TWI456012B - 使用脈衝式ｕｖ光源之晶圓背面塗覆方法 - Google Patents

使用脈衝式ｕｖ光源之晶圓背面塗覆方法 Download PDF

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Publication number
TWI456012B
TWI456012B TW100118180A TW100118180A TWI456012B TW I456012 B TWI456012 B TW I456012B TW 100118180 A TW100118180 A TW 100118180A TW 100118180 A TW100118180 A TW 100118180A TW I456012 B TWI456012 B TW I456012B
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coating composition
semiconductor wafer
pulsed
resin
coating
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TW100118180A
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English (en)
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TW201202359A (en
Inventor
Jeffrey Gasa
Dung Nghi Phan
Jeffrey Leon
Sharad Hajela
Shengqian Kong
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Henkel IP & Holding GmbH
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Publication of TW201202359A publication Critical patent/TW201202359A/zh
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Claims (8)

  1. 一種用塗料組合物塗覆半導體晶圓之方法，其包含：(A)提供塗料組合物；(B)將該塗料組合物安置至該半導體晶圓上；及(C)藉由暴露該組合物於足以固化該塗料組合物之量之脈衝式UV光來對該塗料組合物進行B階段固化；其中該塗料組合物包含(i)熔點介於80℃與130℃之間的固體環氧樹脂；及(ii)具有以下結構之聚合硫醇-側位聚矽氧 其中n為介於5與500之間的整數，且m為1至5之整數。
  2. 如請求項1之方法，其中該塗料組合物係暴露於總計0.1至10J/cm2 。
  3. 如請求項1之方法，其中該脈衝式UV光源係在晶圓距燈泡12至38cm之距離處使用15至300秒。
  4. 如請求項1之方法，其中該半導體晶圓的厚度為100μm或小於100μm。
  5. 如請求項1之方法，其中該塗料組合物包含可熱固化之樹脂及可藉由自由基聚合固化之樹脂。
  6. 如請求項5之方法，其中該可熱固化之樹脂為環氧樹脂，及該可藉由自由基聚合固化之樹脂為丙烯酸酯樹 脂。
  7. 一種半導體晶圓，其係使用如請求項1之方法塗覆。
  8. 一種使用用塗料組合物塗覆半導體晶圓之方法塗覆之半導體晶圓，該方法包含：(A)提供塗料組合物；(B)將該塗料組合物安置至該半導體晶圓上；及(C)藉由暴露該組合物於足以固化該塗料組合物之量之脈衝式UV光來對該塗料組合物進行B階段固化；其中該塗料組合物包含(i)熔點介於80℃與130℃之間的固體環氧樹脂；及(ii)黏度小於50mPas且沸點大於150℃之丙烯酸酯樹脂。
TW100118180A 2010-06-08 2011-05-24 使用脈衝式ｕｖ光源之晶圓背面塗覆方法 TWI456012B (zh)

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WO2011156221A3 (en) 2012-04-05
JP5654672B2 (ja) 2015-01-14
KR20130079478A (ko) 2013-07-10
EP2580777A4 (en) 2015-06-03
JP2013535098A (ja) 2013-09-09
EP2580777A2 (en) 2013-04-17
US20130099396A1 (en) 2013-04-25
CN103003936A (zh) 2013-03-27
WO2011156221A2 (en) 2011-12-15
TW201202359A (en) 2012-01-16

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