TWI433800B - Stocker system and substrate cassette - Google Patents
Stocker system and substrate cassette Download PDFInfo
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- TWI433800B TWI433800B TW98128819A TW98128819A TWI433800B TW I433800 B TWI433800 B TW I433800B TW 98128819 A TW98128819 A TW 98128819A TW 98128819 A TW98128819 A TW 98128819A TW I433800 B TWI433800 B TW I433800B
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Description
本發明關於一種倉儲系統,特別關於一種用以儲放基板卡匣之倉儲系統。The present invention relates to a storage system, and more particularly to a storage system for storing substrate cassettes.
請參照圖1所示,其為習知之倉儲系統之一示意圖。習知用於存放玻璃基板之倉儲系統1係於本體11之頂部設置複數風機過濾單元(Fan Filter Unit,FFU)13,該等風機過濾單元13產生下吹式的氣流(如圖1中之箭頭方向所示),並將氣流吹送至複數基板卡匣(Cassette)12,用以將本體11與該等基板卡匣12內之微塵順著氣流吹送至倉儲系統1之下方排氣風管14,並將微塵排出,以維持倉儲系統1之潔淨度。Please refer to FIG. 1 , which is a schematic diagram of a conventional storage system. The storage system 1 for storing a glass substrate is provided with a plurality of Fan Filter Units (FFUs) 13 at the top of the body 11, and the fan filter units 13 generate a down-blowing airflow (such as the arrow in FIG. 1). The direction is shown), and the airflow is blown to a plurality of substrate cassettes (Cassette) 12 for blowing the dust in the body 11 and the substrate cassettes 12 to the lower exhaust duct 14 of the storage system 1 along the airflow. The dust is discharged to maintain the cleanliness of the storage system 1.
隨著顯示面板的尺寸越來越大,使得玻璃基板的尺寸也相對增大,用於存放玻璃基板之倉儲系統及基板卡匣之體積也隨之增加,為了維持搬運效率,輸送單元之移動輸送速度也相對增加,此時,需提高風機過濾單元之風量以避免氣流回流情形發生,且為保持倉儲系統1之潔淨度,亦需大量增加風機過濾單元的使用數目。As the size of the display panel becomes larger, the size of the glass substrate is relatively increased, and the volume of the storage system and the substrate cassette for storing the glass substrate is also increased. In order to maintain the handling efficiency, the transport unit of the transport unit is transported. The speed is also relatively increased. At this time, the air volume of the fan filter unit needs to be increased to avoid the airflow return situation, and in order to maintain the cleanliness of the storage system 1, the number of use of the fan filter unit is also greatly increased.
然,現今因環境日益惡化及能源匱乏等因素衝擊下,人們逐漸意識到環境保護的意義,為了達到節能減碳之要求,應降低風機過濾單元之數量。因此,如何提供一種倉儲系統,可減少風機過濾單元之使用量,以達到節能減碳之需求,並可維持倉儲系統內之潔淨,已成為重要課題之一。However, due to the deterioration of the environment and the lack of energy, people are now aware of the significance of environmental protection. In order to meet the requirements of energy saving and carbon reduction, the number of fan filter units should be reduced. Therefore, how to provide a storage system, which can reduce the use of the fan filter unit, to meet the demand for energy saving and carbon reduction, and to maintain the cleanliness in the storage system has become one of the important topics.
有鑑於上述課題,本發明之目的為提供一種倉儲系統及基板卡匣,與導流單元配合運用,使其可減少風機過濾單元之使用量,並可維持倉儲系統之潔淨度。In view of the above problems, an object of the present invention is to provide a storage system and a substrate cassette that can be used in conjunction with a flow guiding unit to reduce the amount of use of the fan filter unit and maintain the cleanliness of the storage system.
為達上述目的,依據本發明一種倉儲系統包含一本體、至少一基板卡匣及至少一導流單元。本體具有一側壁以及位於該側壁內之至少一容置格。基板卡匣放置於容置格內,基板卡匣具有一蓋體及一底板,其中蓋體具有相連接之複數蓋板,底板具有一出風口,底板與蓋體連結並圍設形成一入風口。導流單元係分別連通並對應於各入風口,且導流單元之尺寸小於入風口之尺寸。To achieve the above object, a storage system according to the present invention comprises a body, at least one substrate cassette and at least one flow guiding unit. The body has a side wall and at least one receiving space located in the side wall. The substrate cassette is placed in the accommodating compartment, the substrate cassette has a cover body and a bottom plate, wherein the cover body has a plurality of connected cover plates, the bottom plate has an air outlet, and the bottom plate is connected with the cover body and encloses to form an air inlet . The flow guiding units are respectively connected to and correspond to the respective air inlets, and the size of the flow guiding unit is smaller than the size of the air inlet.
於本發明一實施例中,倉儲系統更包含一第一風機過濾單元,其設置於本體之一頂部,以供應導流單元潔淨之氣體。In an embodiment of the invention, the storage system further includes a first fan filter unit disposed on top of one of the bodies to supply the cleaned gas of the flow guiding unit.
於本發明一實施例中,倉儲系統更包含一第二風機過濾單元,其設置於導流單元遠離於入風口之一端。In an embodiment of the invention, the storage system further includes a second fan filter unit disposed at one end of the flow guiding unit away from the air inlet.
於本發明一實施例中,導流單元之形狀與入風口之形狀相互配合,且鄰近於入風口之該等蓋板部分罩合於導流單元之外側。In an embodiment of the invention, the shape of the flow guiding unit and the shape of the air inlet are matched, and the cover portions adjacent to the air inlet cover are disposed on the outer side of the flow guiding unit.
於本發明一實施例中,罩合處之導流單元與鄰近其之該等蓋板之間具有一間隙,此間隙係大於0公分且小於1公分。In an embodiment of the invention, the flow guiding unit at the cover has a gap between the cover plates adjacent thereto, and the gap is greater than 0 cm and less than 1 cm.
於本發明一實施例中,基板卡匣更具有複數連結元件,設置於該等蓋板之間,或設置於該等蓋板與該底板之間。In an embodiment of the invention, the substrate cassette further has a plurality of connecting elements disposed between the cover plates or between the cover plates and the bottom plate.
於本發明一實施例中,鄰近入風口之該等蓋板係呈ㄇ型,且該等蓋板沿入風口往出風口之一方向具有一第一邊長,而底板具有一第二邊長,第一邊長大於第二邊長。In an embodiment of the invention, the cover plates adjacent to the air inlet are of a ㄇ type, and the cover plates have a first side length along one of the air inlets toward the air outlet, and the bottom plate has a second side length. The first side length is greater than the second side length.
於本發明一實施例中,倉儲系統更包含一輸送單元,沿一行進方向行進,用以搬運基板卡匣,輸送單元具有一承載台以及一擋板,承載台供承載基板卡匣,擋板則設置於承載台背對行進方向之一側並與行進方向相垂直,且擋板面對基板卡匣之入風口。In an embodiment of the invention, the storage system further includes a transport unit that travels in a traveling direction for transporting the substrate cassette. The transport unit has a loading platform and a baffle for supporting the substrate substrate and the baffle. Then disposed on one side of the back of the carrying platform opposite to the traveling direction and perpendicular to the traveling direction, and the baffle faces the air inlet of the substrate jam.
承上所述,本發明之一種倉儲系統及基板卡匣係將基板卡匣與一導流單元配合運用,由於導流單元之尺寸小於入風口之尺寸、導流單元之形狀與入風口之形狀相互配合,且鄰近於入風口之該等蓋板部分罩合於導流單元之外側,但蓋板與導流單元不相互接觸,使得微塵較不易落於基板卡匣內,其亦能使得風機過濾單元之氣體能夠更集中吹送至基板卡匣內,並將基板卡匣內之微塵由出風口排出,以保持基板卡匣內之潔淨度。本發明之倉儲系統係能減少風機過濾單元之使用量,且亦能將風機過濾單元之氣體有效吹送至基板卡匣內,以維持玻璃基板之潔淨度,使其達到減省電力之消耗與降低成本花費。As described above, a storage system and a substrate cassette of the present invention cooperate with a substrate cassette and a flow guiding unit, since the size of the flow guiding unit is smaller than the size of the air inlet, the shape of the flow guiding unit, and the shape of the air inlet. Cooperating with each other, and the cover portions adjacent to the air inlet cover are disposed on the outer side of the flow guiding unit, but the cover plate and the flow guiding unit do not contact each other, so that the fine dust is less likely to fall in the substrate cassette, which can also make the fan The gas of the filter unit can be more concentratedly blown into the substrate cassette, and the fine dust in the substrate cassette is discharged from the air outlet to maintain the cleanliness in the substrate cassette. The storage system of the invention can reduce the usage of the fan filter unit, and can also effectively blow the gas of the fan filter unit into the substrate cassette to maintain the cleanliness of the glass substrate, thereby reducing the consumption and reduction of power consumption. Cost.
以下將參照相關圖式,說明依本發明較佳實施例之一種倉儲系統,其中相同的元件將以相同的參照符號加以說明。DETAILED DESCRIPTION OF THE INVENTION A storage system in accordance with a preferred embodiment of the present invention will now be described with reference to the accompanying drawings, in which the same elements will be described with the same reference numerals.
請參照圖2所示,其為本發明之倉儲系統之一示意圖。倉儲系統2用以儲放複數玻璃基板,其包含一本體21、一基板卡匣22及一導流單元23。Please refer to FIG. 2, which is a schematic diagram of a storage system of the present invention. The storage system 2 is configured to store a plurality of glass substrates, and includes a body 21, a substrate cassette 22 and a flow guiding unit 23.
本體21包含一側壁211以及至少一容置格212,容置格212設置於本體21之側壁211內。The body 21 includes a sidewall 211 and at least one receiving compartment 212. The receiving compartment 212 is disposed in the sidewall 211 of the body 21.
請同時參照圖2及圖3所示,圖3為本發明倉儲系統之基板卡匣的一示意圖。基板卡匣22放置於容置格212內,基板卡匣22具有一蓋體221、一底板222及複數連結元件(圖中未顯示)。蓋體221係呈ㄇ型,其係以相連接之複數蓋板221a(一頂蓋板、二個側蓋板及一背蓋板)所構成,底板222具有一出風口61,底板222與該等蓋板221a(一頂蓋板、二個側蓋板及一背蓋板)相連結並圍設形成一入風口62。本實施例中,出風口61之一平面與入風口62之一平面係實質垂直。另外,該等蓋板221a(頂蓋板及二個側蓋板)沿入風口62往出風口61之一方向具有一第一邊長L1,底板222沿入風口62往出風口61之一方向具有一第二邊長L2,本實施例中,第一邊長L1係大於第二邊長L2,亦即,鄰近入風口62之蓋板221a(頂蓋板及二個側蓋板)較底板222更為突出。該等連結元件設置於該等蓋板221a(頂蓋板、二個側蓋板及背蓋板)之間, 或設置於該等蓋板221a(頂蓋板、二個側蓋板及背蓋板)與底板222之間,用以固定其相對位置。本實施例中,基板卡匣22更具有複數支撐元件223,其用以承載儲放之複數玻璃基板,該等支撐元件223設置於與底板222相互垂直之該等蓋板221a,且與相互連結之該等蓋板221a之一表面實質垂直。Please refer to FIG. 2 and FIG. 3 at the same time. FIG. 3 is a schematic diagram of the substrate cassette of the storage system of the present invention. The substrate cassette 22 is placed in the receptacle 212. The substrate cassette 22 has a cover 221, a bottom plate 222 and a plurality of connecting elements (not shown). The cover body 221 is of a ㄇ type, which is formed by a plurality of connected cover plates 221a (a top cover, two side covers and a back cover), and the bottom plate 222 has an air outlet 61, and the bottom plate 222 The cover plate 221a (a top cover plate, two side cover plates and a back cover plate) are connected and enclosed to form an air inlet 62. In this embodiment, one of the planes of the air outlet 61 is substantially perpendicular to the plane of one of the air inlets 62. In addition, the cover plates 221a (the top cover and the two side cover plates) have a first side length L1 along the air inlet 62 toward one of the air outlets 61, and the bottom plate 222 faces the air inlet 62 toward the air outlet 61. The first side length L1 is greater than the second side length L2, that is, the cover plate 221a (top cover and two side cover plates) adjacent to the air inlet 62 is lower than the bottom plate. 222 is more prominent. The connecting elements are disposed between the cover plates 221a (the top cover, the two side covers and the back cover). Or disposed between the cover plates 221a (the top cover, the two side covers and the back cover) and the bottom plate 222 for fixing the relative positions thereof. In this embodiment, the substrate cassette 22 further has a plurality of supporting members 223 for carrying a plurality of stored glass substrates. The supporting members 223 are disposed on the cover plates 221a perpendicular to the bottom plate 222 and are connected to each other. One of the surfaces of the cover plates 221a is substantially perpendicular.
請同時參照圖2及圖4所示,圖4為本發明基板卡匣與導流單元之一示意圖。導流單元23設置於底板222與蓋體221所圍設之入風口62,亦設置於本體21之側壁211與基板卡匣22之間。導流單元23之尺寸小於入風口62之尺寸,且導流單元23之形狀與入風口62之形狀相互配合,鄰近於入風口62之該等蓋板221a(頂蓋板及二個側蓋板)部分罩合於導流單元23之外側,亦即,蓋板221a(頂蓋板及二個側蓋板)之突出部分罩合於導流單元23之外側,但蓋板221a(頂蓋板及二個側蓋板)不與導流單元23相接觸。換句話說,罩合處之導流單元23與鄰近該等蓋板221a(頂蓋板及二個側蓋板)之間具有一間隙,於本實施例中,此間隙係大於0公分且小於1公分。另外,本實施例之倉儲系統2係以具有複數導流單元23為例。Please refer to FIG. 2 and FIG. 4 simultaneously. FIG. 4 is a schematic diagram of a substrate cassette and a flow guiding unit according to the present invention. The air guiding unit 23 is disposed on the bottom plate 222 and the air inlet 62 surrounded by the cover 221 , and is disposed between the side wall 211 of the body 21 and the substrate cassette 22 . The size of the flow guiding unit 23 is smaller than the size of the air inlet 62, and the shape of the flow guiding unit 23 cooperates with the shape of the air inlet 62, and the cover plate 221a adjacent to the air inlet 62 (top cover and two side covers) The cover portion 221a (the top cover and the two side cover plates) is covered on the outer side of the flow guiding unit 23, but the cover plate 221a (the top cover) And the two side covers) are not in contact with the flow guiding unit 23. In other words, the flow guiding unit 23 at the hood has a gap between the adjacent cover plates 221a (the top cover and the two side covers). In this embodiment, the gap is greater than 0 cm and less than 1 cm. In addition, the storage system 2 of the present embodiment is exemplified by having the plurality of flow guiding units 23.
請再參照圖2所示,本發明之倉儲系統2更包含一風道24及至少一第一風機過濾單元25。風道24係沿本體之側壁211及一頂部213設置,風道24具有複數開口241,部分該等開口241位於靠近頂部213之中間位置,而部分該等開口241相對側壁211設置,該等導流單元23對應 於部分該等開口241設置,使得該等導流單元23經由風道24而相連通。第一風機過濾單元25設置於本體21之頂部213,經由風道24輸送第一風機過濾單元25所產生之氣體,以供應該等導流單元23及本體21潔淨之氣體。 由於倉儲系統2擴增,其易使得部分基板卡匣22所接收到第一風機過濾單元25的氣體較弱。因此,倉儲系統2更包含至少一第二風機過濾單元26,其設置於距離第一風機過濾單元25較遠之基板卡匣22,且位於導流單元23遠離入風口62之一端,以將潔淨之氣體輸送至基板卡匣22內,並將基板卡匣22內之微塵經由出風口61排出。本實施例之第一風機過濾單元25及第二風機過濾單元26係以一風扇過濾器為例。Referring to FIG. 2 again, the storage system 2 of the present invention further includes a duct 24 and at least one first fan filter unit 25. The air duct 24 is disposed along the side wall 211 of the body and a top portion 213. The air duct 24 has a plurality of openings 241, and some of the openings 241 are located at an intermediate position near the top portion 213, and some of the openings 241 are disposed opposite to the side wall 211. Flow unit 23 corresponds A portion of the openings 241 are disposed such that the flow guiding units 23 are in communication via the air passage 24. The first fan filter unit 25 is disposed at the top 213 of the body 21, and the gas generated by the first fan filter unit 25 is sent through the air passage 24 to supply the cleaned gas of the flow guiding unit 23 and the body 21. Due to the expansion of the storage system 2, it is easy for the gas received by the partial fan cassette 22 to the first fan filter unit 25 to be weak. Therefore, the storage system 2 further includes at least one second fan filter unit 26 disposed on the substrate cassette 22 far from the first fan filter unit 25 and located at one end of the flow guiding unit 23 away from the air inlet 62 to be cleaned. The gas is sent into the substrate cassette 22, and the fine dust in the substrate cassette 22 is discharged through the air outlet 61. The first fan filter unit 25 and the second fan filter unit 26 of the embodiment are exemplified by a fan filter.
請參照圖5所示,其為本發明倉儲系統之另一示意圖。本實施例之倉儲系統2更包含一取放口27、一取放通道28及一輸送單元29。取放口27設置於側壁211,外界可經由取放口27將玻璃基板放置基板卡匣22或將玻璃基板由基板卡匣22取出。取放通道28之一端連通於取放口27,另一端則連通於基板卡匣22之入風口62。取放通道28之尺寸小於入風口62之尺寸,且取放通道28之形狀與入風口62之形狀相互配合,鄰近於入風口62之該等蓋板221a(頂蓋板及二個側蓋板)部分罩合於取放通道28之外側,且罩合處之取放通道28與鄰近該等蓋板221a(頂蓋板及二個側蓋板)之間具有一間隙,於本實施例中,此間隙係大於0公分且小於1公分。Please refer to FIG. 5, which is another schematic diagram of the storage system of the present invention. The storage system 2 of the embodiment further includes a pick-and-place port 27, a pick-and-place channel 28, and a transport unit 29. The pick-and-place port 27 is disposed on the side wall 211, and the outside of the glass substrate can be placed on the substrate cassette 22 via the pick-and-place port 27 or the glass substrate can be taken out from the substrate cassette 22 . One end of the pick-and-place channel 28 is connected to the pick-and-place port 27, and the other end is connected to the air inlet 62 of the substrate cassette 22. The size of the access passage 28 is smaller than the size of the air inlet 62, and the shape of the access passage 28 cooperates with the shape of the air inlet 62, and the cover 221a (the top cover and the two side covers adjacent to the air inlet 62) The portion is disposed on the outer side of the pick-and-place channel 28, and a gap is formed between the pick-and-place channel 28 of the cover portion and the adjacent cover plate 221a (the top cover and the two side covers), in this embodiment This gap is greater than 0 cm and less than 1 cm.
請同時參照圖5及圖6所示,圖6係為本發明之基板卡匣與輸送單元之一示意圖。輸送單元29係可沿一行進方向行進,其用以搬運基板卡匣22,往返於容置格212與取放通道28之間。本實施例之行進方向係為如圖6箭頭所示之X或Y方向。輸送單元29具有一承載台291、至少一擋板292a、292b、一旋轉機構293、一升降機構294及一機械手臂295。承載台291承載基板卡匣22。本實施例係以兩個擋板292a、292b為例,其分別設置於承載台291背對行進方向X、Y之一側並與行進方向X、Y相垂直,亦即擋板292a、292b分別設置於承載台291之兩端,且擋板292a、292b面對基板卡匣22之入風口62,以避免微塵落入基板卡匣22內,於此,行進方向X、Y係為與圖面垂直之方向。旋轉機構293係設置於承載台291上,以帶動基板卡匣22旋轉。升降機構294連接承載台291以帶動承載台291升降。機械手臂295設置於承載台291上,以將基板卡匣22輸送置入容置格212,或由容置格212將基板卡匣22取出。Please refer to FIG. 5 and FIG. 6 simultaneously. FIG. 6 is a schematic diagram of a substrate cassette and a transport unit of the present invention. The transport unit 29 is movable in a traveling direction for carrying the substrate cassette 22 to and from the accommodating compartment 212 and the pick-and-place channel 28. The traveling direction of this embodiment is the X or Y direction as indicated by the arrow in FIG. The transport unit 29 has a carrying platform 291, at least one baffle 292a, 292b, a rotating mechanism 293, a lifting mechanism 294 and a robot arm 295. The carrier 291 carries the substrate cassette 22. In this embodiment, two baffles 292a and 292b are respectively exemplified, which are respectively disposed on one side of the carrying platform 291 opposite to the traveling direction X, Y and perpendicular to the traveling directions X and Y, that is, the baffles 292a and 292b respectively The baffles 292a and 292b are disposed at the air inlets 62 of the substrate cassette 22 to prevent the dust from falling into the substrate cassette 22, and the traveling directions X and Y are the same as the drawing surface. The direction of the vertical. The rotating mechanism 293 is disposed on the carrying platform 291 to drive the substrate cassette 22 to rotate. The lifting mechanism 294 is connected to the loading platform 291 to drive the loading platform 291 to move up and down. The mechanical arm 295 is disposed on the carrying platform 291 to transport the substrate cassette 22 into the receiving compartment 212, or the substrate cassette 22 is taken out by the receiving compartment 212.
以上係針對本發明所揭露之倉儲系統2的結構予以論述,接續,則仍基於圖2至圖6,並以倉儲系統2使用在實際的應用為例,提出簡述的說明以解釋此倉儲系統2的作動。The above is the structure of the storage system 2 disclosed in the present invention. The connection is still based on FIG. 2 to FIG. 6 , and the storage system 2 is used in the actual application as an example, and a brief description is given to explain the storage system. 2 action.
於倉儲系統2運作時,第一風機過濾單元25及第二風機過濾單元26不斷提供潔淨之氣體予本體21及基板卡匣22,以避免基板卡匣22於本體21內輸送時,產生過多 的微塵,並維持本體21內之潔淨度。When the storage system 2 is in operation, the first fan filter unit 25 and the second fan filter unit 26 continuously supply clean gas to the body 21 and the substrate cassette 22 to prevent excessive generation of the substrate cassette 22 when transported in the body 21. The dust particles maintain the cleanliness of the body 21.
玻璃基板由外界從取放口27及取放通道28輸送並放置於基板卡匣22內,由於取放通道28之尺寸小於入風口62之尺寸,且取放通道28之形狀與入風口62之形狀相互配合,加上鄰近於入風口62之該等蓋板221a(頂蓋板及二個側蓋板)部分罩合於取放通道28之外側,故乾淨空氣會由氣壓較大的外側經取放通道28導入基板卡匣22以及本體21內,且可避免於置放的過程中微塵掉落於基板卡匣22內及玻璃基板上。The glass substrate is transported from the pick-and-place port 27 and the pick-and-place channel 28 to the substrate cassette 22, and the size of the pick-and-place channel 28 is smaller than the size of the air inlet 62, and the shape of the pick-and-place channel 28 and the air inlet 62 are The shapes are matched with each other, and the cover plates 221a (top cover and two side cover plates) adjacent to the air inlet 62 are partially covered on the outer side of the access passage 28, so that the clean air is from the outside of the air pressure. The pick-and-place channel 28 is introduced into the substrate cassette 22 and the body 21, and the dust is prevented from falling into the substrate cassette 22 and the glass substrate during the placement process.
當基板卡匣22裝載完時,輸送單元29將基板卡匣22移送至欲置放之容置格212。機械手臂295將基板卡匣22由與取放通道28之相對位置移動至輸送單元29之承載台291上,此時,旋轉機構293將帶動基板卡匣22旋轉90度,使得基板卡匣22之入風口62朝向行進方向X的後端,且擋板292a封住基板卡匣22之入風口62,以維持搬運之潔淨度。若欲置放之容置格212於本體21的上方時,輸送單元29之升降機構294帶動承載台291上升。當承載台291與基板卡匣22運送至欲置放之容置格212前時,旋轉機構293將帶動基板卡匣22旋轉90度,以使得基板卡匣22之入風口62一側面對本體21之側壁211,再以機械手臂295將基板卡匣22置入該容置格212。When the substrate cassette 22 is loaded, the transport unit 29 transfers the substrate cassette 22 to the receptacle 212 to be placed. The robot arm 295 moves the substrate cassette 22 from the relative position of the pick-and-place channel 28 to the carrying table 291 of the transport unit 29. At this time, the rotating mechanism 293 rotates the substrate cassette 22 by 90 degrees so that the substrate cassette 22 The air inlet 62 faces the rear end of the traveling direction X, and the baffle 292a seals the air inlet 62 of the substrate cassette 22 to maintain the cleanliness of handling. If the receptacle 212 is to be placed above the body 21, the lifting mechanism 294 of the transport unit 29 drives the carrying platform 291 to rise. When the carrier 291 and the substrate cassette 22 are transported to the front of the accommodating compartment 212, the rotating mechanism 293 rotates the substrate cassette 22 by 90 degrees so that the air inlet 62 side of the substrate cassette 22 faces the body 21. The side wall 211 is further placed into the receiving compartment 212 by the robot arm 295.
導流單元23設置於基板卡匣22之入風口62,且對應風道24之開口241設置,第一風機過濾單元25或第二風機過濾單元26提供潔淨之氣體予基板卡匣22,由於鄰近 於入風口62之該等蓋板221a頂蓋板及二個側蓋板)部分罩合於導流單元23之外側,且罩合處之導流單元23與基板卡匣22之入風口62之間隙僅大於0公分且小於1公分,使得風道24內之氣體或第二風機過濾單元25之氣體可更集中吹送至基板卡匣22,且可避免微塵掉落於基板卡匣22內。氣體由入風口62吹送入基板卡匣22,將基板卡匣22內之微塵吹送至出風口61並排出,以保持基板卡匣22及玻璃基板之潔淨。The flow guiding unit 23 is disposed at the air inlet 62 of the substrate cassette 22, and is disposed corresponding to the opening 241 of the air duct 24. The first fan filter unit 25 or the second fan filter unit 26 provides a clean gas to the substrate cassette 22 due to the proximity. The cover plate 221a and the two side cover portions of the air inlet 62 are partially covered on the outer side of the flow guiding unit 23, and the air guiding unit 23 of the cover portion and the air inlet 62 of the substrate cassette 22 are The gap is only greater than 0 cm and less than 1 cm, so that the gas in the air duct 24 or the gas of the second fan filter unit 25 can be more concentratedly blown to the substrate cassette 22, and the dust can be prevented from falling into the substrate cassette 22. The gas is blown into the substrate cassette 22 through the air inlet 62, and the fine dust in the substrate cassette 22 is blown to the air outlet 61 and discharged to keep the substrate cassette 22 and the glass substrate clean.
當欲將基板卡匣22由容置格212取出時,輸送單元29以機械手機295將基板卡匣22由容置格212移送至輸送單元29之承載台291,此時,旋轉機構293將帶動基板卡匣22旋轉90度,以使得基板卡匣22之入風口62朝向行進方向Y的後端,設置於承載台291之擋板292b封住基板卡匣22之入風口62,以維持搬運之潔淨度。若置放之容置格212於本體21之上方時,輸送單元29之升降機構294將帶動承載台291下降,直到與取放口27同一平面。當輸送單元29將基板卡匣22運送至取放通道28前時,旋轉機構293將帶動基板卡匣22旋轉90度,以使得基板卡匣22之入風口62一側面對取放口27,再以機械手臂295將基板卡匣22移送至與取放通道28相對應之位置,以利外界將玻璃基板取出或將玻璃基板放置於基板卡匣22內。When the substrate cassette 22 is to be taken out of the receiving compartment 212, the transport unit 29 transfers the substrate cassette 22 from the receiving compartment 212 to the carrying platform 291 of the transport unit 29 by the mechanical handpiece 295. At this time, the rotating mechanism 293 will drive The substrate cassette 22 is rotated by 90 degrees so that the air inlet 62 of the substrate cassette 22 faces the rear end of the traveling direction Y, and the shutter 292b provided on the stage 291 seals the air inlet 62 of the substrate cassette 22 to maintain the carrying. Cleanliness. If the accommodating compartment 212 is placed above the body 21, the lifting mechanism 294 of the transport unit 29 will drive the carrying platform 291 down until it is flush with the pick-and-place port 27. When the transport unit 29 transports the substrate cassette 22 to the front of the pick-and-place channel 28, the rotating mechanism 293 rotates the substrate cassette 22 by 90 degrees so that the side of the air inlet 62 of the substrate cassette 22 faces the pick-and-place port 27, and then The substrate cassette 22 is transferred by the robot arm 295 to a position corresponding to the pick-and-place channel 28 to facilitate the external removal of the glass substrate or the placement of the glass substrate in the substrate cassette 22.
另外,本發明提供一種基板卡匣,係用以儲存至少一玻璃基板,並與一導流單元配合運用。基板卡匣包含一蓋 體及一底板。蓋體具有相連接之複數蓋板。底板具有一出風口,底板與蓋體連結並圍設形成一入風口,此入風口之尺寸係與導流單元之尺寸相互配合。其中,蓋體及底板與上述實施例之中,蓋體221及底板222具有相同的技術特徵,故於此不再贅述。In addition, the present invention provides a substrate cassette for storing at least one glass substrate and for use with a flow guiding unit. The substrate cassette includes a cover Body and a bottom plate. The cover has a plurality of cover plates connected thereto. The bottom plate has an air outlet, and the bottom plate is connected with the cover body and encloses to form an air inlet. The size of the air inlet is matched with the size of the flow guiding unit. In the above embodiment, the cover body 221 and the bottom plate 222 have the same technical features, and therefore will not be described again.
綜上所述,本發明之一種倉儲系統及基板卡匣係將基板卡匣與一導流單元配合運用,由於導流單元之尺寸小於入風口之尺寸、導流單元之形狀與入風口之形狀相互配合且鄰近於入風口之該等蓋板部分罩合於導流單元之外側但不相互接觸,使得微塵較不易落於基板卡匣內,其亦能使得風機過濾單元之氣體能夠更集中吹送至基板卡匣內,並將基板卡匣內之微塵由出風口排出,以保持基板卡匣之潔淨度。本發明之倉儲系統係能減少風機過濾單元之使用量,且亦能將風機過濾單元之氣體有效吹送至基板卡匣內,以維持玻璃基板之潔淨度,使其達到減省電力之消耗與降低成本花費。In summary, a storage system and a substrate cassette of the present invention cooperate with a substrate cassette and a flow guiding unit, since the size of the flow guiding unit is smaller than the size of the air inlet, the shape of the flow guiding unit, and the shape of the air inlet. The cover portions that are mated to each other and adjacent to the air inlet cover are disposed on the outer side of the flow guiding unit but are not in contact with each other, so that the fine dust is less likely to fall into the substrate cassette, and the gas of the fan filter unit can be more concentratedly blown. The substrate is placed in the cassette, and the dust in the substrate cassette is discharged from the air outlet to maintain the cleanliness of the substrate. The storage system of the invention can reduce the usage of the fan filter unit, and can also effectively blow the gas of the fan filter unit into the substrate cassette to maintain the cleanliness of the glass substrate, thereby reducing the consumption and reduction of power consumption. Cost.
以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.
1、2‧‧‧倉儲系統1, 2‧‧ ‧ warehousing system
11、21‧‧‧本體11, 21‧‧‧ ontology
12、22‧‧‧基板卡匣12, 22‧‧‧ substrate card
13‧‧‧風機過濾單元13‧‧‧Fan filter unit
14‧‧‧排氣風管14‧‧‧Exhaust duct
211‧‧‧側壁211‧‧‧ side wall
212‧‧‧容置格212‧‧‧ 容
213‧‧‧頂部213‧‧‧ top
221‧‧‧蓋體221‧‧‧ cover
221a‧‧‧蓋板221a‧‧‧ cover
222‧‧‧底板222‧‧‧floor
223‧‧‧支撐元件223‧‧‧Support elements
23‧‧‧導流單元23‧‧‧Guide unit
24‧‧‧風道24‧‧‧ wind channel
241‧‧‧開口241‧‧‧ openings
25‧‧‧第一風機過濾單元25‧‧‧First fan filter unit
26‧‧‧第二風機過濾單元26‧‧‧Second fan filter unit
27‧‧‧取放口27‧‧‧Stop
28‧‧‧取放通道28‧‧‧ access channel
29‧‧‧輸送單元29‧‧‧Transporting unit
291‧‧‧承載台291‧‧‧Loading station
292a、292b‧‧‧擋板292a, 292b‧‧ ‧ baffle
293‧‧‧旋轉機構293‧‧‧Rotating mechanism
294‧‧‧升降機構294‧‧‧ Lifting mechanism
295‧‧‧機械手臂295‧‧ mechanical arm
61‧‧‧出風口61‧‧‧air outlet
62‧‧‧入風口62‧‧‧Air inlet
L1‧‧‧第一邊長L1‧‧‧ first side length
L2‧‧‧第二邊長L2‧‧‧ second side length
X、Y‧‧‧行進方向X, Y‧‧‧ direction of travel
圖1為習知之倉儲系統之一示意圖;圖2為依據本發明之倉儲系統之一示意圖;圖3為依據本發明之基板卡匣之一示意圖; 圖4為依據本發明之基板卡匣與導流單元之一示意圖;圖5為依據本發明之倉儲系統之另一示意圖;以及圖6為依據本發明之基板卡匣與輸送單元之一示意圖。1 is a schematic view of a conventional storage system; FIG. 2 is a schematic view of a storage system according to the present invention; and FIG. 3 is a schematic view of a substrate cassette according to the present invention; 4 is a schematic view of a substrate cassette and a flow guiding unit in accordance with the present invention; FIG. 5 is another schematic view of a storage system in accordance with the present invention; and FIG. 6 is a schematic view of a substrate cassette and transport unit in accordance with the present invention.
2...倉儲系統2. . . Warehousing system
21...本體twenty one. . . Ontology
211...側壁211. . . Side wall
212...容置格212. . .容格
213...頂部213. . . top
22...基板卡匣twenty two. . . Substrate card
23...導流單元twenty three. . . Diversion unit
24...風道twenty four. . . Wind tunnel
241...開口241. . . Opening
25...第一風機過濾單元25. . . First fan filter unit
26...第二風機過濾單元26. . . Second fan filter unit
29...輸送單元29. . . Conveyor unit
61...出風口61. . . Air outlet
62...入風口62. . . Air inlet
Claims (18)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98128819A TWI433800B (en) | 2009-08-27 | 2009-08-27 | Stocker system and substrate cassette |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98128819A TWI433800B (en) | 2009-08-27 | 2009-08-27 | Stocker system and substrate cassette |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201107208A TW201107208A (en) | 2011-03-01 |
TWI433800B true TWI433800B (en) | 2014-04-11 |
Family
ID=44835207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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TW98128819A TWI433800B (en) | 2009-08-27 | 2009-08-27 | Stocker system and substrate cassette |
Country Status (1)
Country | Link |
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TW (1) | TWI433800B (en) |
-
2009
- 2009-08-27 TW TW98128819A patent/TWI433800B/en not_active IP Right Cessation
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TW201107208A (en) | 2011-03-01 |
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