TW471008B - Substrate transport device - Google Patents

Substrate transport device Download PDF

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Publication number
TW471008B
TW471008B TW089113615A TW89113615A TW471008B TW 471008 B TW471008 B TW 471008B TW 089113615 A TW089113615 A TW 089113615A TW 89113615 A TW89113615 A TW 89113615A TW 471008 B TW471008 B TW 471008B
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Taiwan
Prior art keywords
substrate
storage box
patent application
scope
item
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TW089113615A
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Chinese (zh)
Inventor
Kiyohisa Tateyama
Yoshiharu Ota
Shinichiro Araki
Tatsuya Iwasaki
Noriyuki Anai
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Tokyo Electron Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

This invention provides a substrate transport device. In a storage cabinet, a substrate moving part is installed, which is supported by a rotation axle capable of rotating horizontally with respect to the moving direction of the object. This ensures that there is no contact between the glass substrate and any dust floating outside of the cabinet. Therefore, the cost spent in cleaning the environment can be reduced greatly as the substrate moving area requires no environmental cleaning.

Description

471008 A7 B7 五、發明說明（1 ) 【發明之背景】 (請先閱讀背面之注音？事項再填寫本頁) 本發明係有關基板搬運裝置，譬如在使用於液晶顯示 器1 ( Liguid Crystal Display : LCD )之玻璃基板等的被處 理基板上實施塗布·顯像處理對塗布.顯像V裝置等之處 理裝置，爲了用以搬出入被處理基板所使用。 在LCD之製造工程中，係在LCD.用之玻璃基板上 爲了用以形成I TO ( Indium Tin Oxide)之薄膜或電極模 型，與使用於半導體裝置之製造同樣的光刻法技術被使用 。光刻法技術，係在用以洗淨光敏電阻之基板進行塗布， 並將此進行曝光，進而進行顯像。 在被處理基板的玻璃基板，係被保持於基板搬運裝置 並進行移動搬運路上，而被搬入到種種的處理裝置，在各 處理裝置被處理後被搬出再度藉由基板搬運裝置被搬運到 下個工程。 【發明之槪要】 經濟部智慧財產局員工消費合作社印製 如上述之製造工程中，在基板必須不會xi ( particle )之環境下進行，通常，係將上述各種之處理裝置 設置在無塵室內，或在裝置內外之基板搬運區域設有 Η E P A薄膜，用以形成低灰塵環境。 可是，在上述之裝置，係將無塵室全體或基板搬運區 域全體之廣大範圍爲了必須進行淸淨環境，會有高成本的 問題。特別是，爲了提高生產效率，不僅塗布·顯像裝置 ，其他裝置，譬如含C V D裝置，蝕刻裝置，排灰器等1 -4- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作杜印製 471008 A7 ___________ B7 五、發明說明（2 ) - 條線化的系統都要考慮’但用以形成淸淨環境的範圍會形 成更大’因此會有成本更高之虞。 ‘本發明係有鑑於上述之情事而發明，提供一種基板搬 運裝置’其目的在於：歷Jgjl化韵多要空間儘可能屋縮小_ Ο 爲了解決上述問題，本發明申請專利範圍第1項所記 載之基板搬運裝置，其_|爲具備有： 卜搬運方向移動體，沿著搬運路可移動； 1收容箱，對前述搬運方向移動體通過可水平旋轉之旋 轉軸被支持；及 y基板移交構件’被設於前述收容箱內，同時對峙於處 理裝置之搬出入口的姿勢下可移動於離接在該搬出入口的 方向’通過被形成於該收容箱之開口部並對處理裝置，可 用以移交保持的基板。 本發明申請專利範圍第2項所記載之基板搬運裝置， 係如申請專利範圍第1項所記載之基板搬運裝置，其特徵 爲：在前述收容箱內，設有基板移交構件具備複數段之基 板載置部者。 本發明申請專利範圍第3項所記載之基板搬運裝置， 係如申請專利範圍第1或2項所記載之基板搬運裝置，其 特徵爲：前述收容箱係被層疊設置成複數段，並分別被設 有前述基板移交構件者。 本發明申請專利範圍第4項所記載之基板搬運裝置， 係如申請專利範圍第1或2項所記載之基板搬運裝置，其 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公t ) -5- n n 1 n n It I n tw. 4 I n 1 n n n n 一-口 1 n ϋ n n n I w (請先閱讀背面之注音w事項再填寫本頁) 471008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（3 ) 特徵爲：前述收容箱係通過被配置成略呈水平之間隔板並 被區分成複數室，並使前述基板移交構件，被設於被區分 之:各室者。 * 本發明申請專利範圍第5項所記載之基板搬運裝置， 係如申請專利範圍第1〜4項之其中任何一項所記載之基 板搬運裝置，其特徵爲：在被形成於前述收容箱之開口部 被設有可開關的蓋構件者。 本發明申請專利範圍第6項所記載之基板搬運裝置， 係如申請專利範圍第1〜4項之其中任何一項所記載之基 板搬運裝置，其特徵爲：被形成於前述收容箱之開口部係 具有常時開口之構造，同時具備有壓力控制機構爲了將該 收容箱內部保持於正壓者。 本發明申請專利範圍第7項所記載之基板搬運裝置， 係如申請專利範圍第1〜4項之其中任何一項所記載之基 板搬運裝置，其特徵爲：被形成於前述收容箱之開口部係 具有常時開口之構造，同時具備有送風機構由對置於該收 容箱之開口部的面側通過該開口部用以形成氣流流到外部 者。 本發明申請專利範圍第8項所記載之基板搬運裝置， 係如申請專利範圍第1〜7項之其中任何一項所記載之基 板搬運裝置，其特徵爲：設有監視裝置用以監視前述收容 箱內之狀態者。 本發明申請專利範圍第9項所記載之基板搬運裝置， 其特徵爲具備有： (請先閱讀背面之注音？事項再填寫本頁) 1 ------11 訂---------線 ΐ. 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 471008 Α7 __ Β7 經濟部智慧財產局員工消費合作社印製 五、發明說明（4 ) * 搬運方向移動體，沿著搬運路可移動； 基板移交構件，對前述搬運方向移動體通過可水平旋 轉·之旋轉軸被支持，同時對峙於處理裝置之搬出入口的姿 勢下可移動於離接在該搬出入口的方向，對處理裝置.，可 用以移交保持的基板；及 灰塵除去裝置’具備有吸塵用之過濾器被配置於前述 基板移交構件的近傍β 本發明申請專利範圍第1 0項所記載之基板搬運裝置 ，係如申請專利範圍第9項所記載之基板搬運裝置，其特 徵爲：用以構成前述灰塵除去裝置之過濾器，係被設於前 述基板移交構件之上方者。 本發明申請專利範圍第1 1項所記載之基板搬運裝置 ’係如申請專利範圍第9或1 〇項所記載之基板搬運裝置 ’其特徵爲：前述灰塵除去裝置，係具有壁部可用以覆蓋 前述基板移交構件之周圍者。 本發明申請專利範圍第1 2項所記載之基板搬運裝置 ，係如申請專利範圍第9〜1 1項之其中任何一項所記載 之基板搬運裝置’其特徵爲：前述基板移交構件，係具備 有複數段之基板載置部者。 本發明申請專利範圍第1項所記載之基板搬運裝置， 係被設於收容箱內，同時在對峙於處理裝置之搬出入口的 姿勢下藉由基板移交構件可移動於離接在該搬出入口的方 向用以保持基板之構成。因一此一，一 H. . .將.碁ϋ搬運區域進 理-環營〜.，可-夫幅〜度屬麗淸境控形成成本。 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公餐） 471008 A7 ____ B7 五、發明說明（5 ) 本發明申請專利範圍第2項所記載之基板搬運裝置， 係在收容箱內，設有具備複數段之基板載置部的基板移交 構'件。因此，可將複數之基板同時進行搬送，適合於基板 之連續處理。 本發明申請專利範圍第3項所記載之基板搬運裝置， 係使收容箱被層疊設置成複數段，並分別被設有前述基板 移交構件。因此，可將複數之基板同時進行搬送，適合於 基板之連續處理。 本發明申請專利範圍第4項所記載之基板搬運裝置， 係使收容箱通過被配置成略呈水平之間隔板並被區分成複 數室，並使前述基板移交構件，被設於被區分之各室者。 因此，可將複數之基板同時進行搬送，適合於基板之連續 處理。 本發明申請專利範圍第5項所記載之基板搬運裝置， 係在被形成於前述收容箱之開口部被設有可開關的蓋構件 。因此，在與處理裝置之間僅在進行基板移交時若使該蓋 構件開關，則在移動中不會使外部灰塵侵入到收容箱內。 本發明申請專利範圍第6項所記載之基板搬運裝置， 係使被形成於收容箱之開口部具有常時開口之構造，同時 具備有壓力控制機構爲了將該收容箱內部保持於正壓。因 此，進行基板之移交即使使開口部常時開口，但使浮遊於 收容箱外之灰塵不會侵入到收容箱內。又，進行基板移交 使開口部常時開口，因爲未設有開關機構用以開關該開口 部，所以可迅速進行基板之移交。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -8 - (請先閱讀背面之注意事項再填寫本頁) I ----I---訂---------綠 經濟部智慧財產局員工消費合作社印製 471008 A7 — B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（6 ) 本發明申請專利範圍第7項所記載之基板搬運裝置， 係使被形成於收容箱之開口部係具有常時開口之構造，同 時:具備有送風機構由對置於該收容箱之開口部的面側通過 該開口部用以形成氣流流到外部。因此，進行基板之移交 即使使開口部常時開口，但使浮遊於收容箱外之灰塵不會 侵入到收容箱內。又，進行基板移交使開口部常時開口， 因爲未設有開關機構用以開關該開口部，所以可迅速進行 基板之移交。 本發明申請專利範圍第8項所記載之基板搬運裝置， 係設有監視裝置用以監視收容箱內之狀態。因此，將收容 箱內之狀態對基板而言成爲容易保持良好的環境。特別是 ’赛由收容箱<因爲'_基板被保持於密閉的空間，所以容易 控制成良好的環境。 本發明申請專利範圍第9項所記載之基板搬運裝置， 係具備有灰塵除去裝置，備有吸塵用之過濾器被配置於基 板移交構件的近傍。因此，被保持於基板移交構件之基板 周圍的空氣，係因爲藉由該過濾器經常被淨化，所以將基 板周圍經常可維持低灰塵環境。因此不必將基板之搬運區 域全體進行淸理環境’可大幅度削減淸理環境之形成成本 〇 本發明申請專利範圍第1 0項所記載之基板搬運裝置 ’係使用以構成前述灰塵除去裝置之過濾器，因爲被設於 前述基板移交構件之上方者，所以可有效除去浮遊之灰塵 --------Ϊ----- f ------- I 訂--------•線 (請先閱讀背面之注咅？事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公餐） -9 - 471008 A7 -- B7 五、發明說明) 本發明申請專利範圍第1 1項所記載之基板搬運裝置 ’係使前述灰麈除去裝置，因爲具有壁部可用以覆蓋前述 基:板移交構件之周圍，所以由外部侵入之灰塵變少，由基 板周圍可用以形成高淸淨環境。 本發明申請專利範圍第1 2項所記載之基板搬運裝置 ，係設有基板移交構件具備有複數段之基板載置部。因此 ，可將複數之基板同時進行搬送，適合於基板之連續處理 〇 本發明申請專利範圍第1 3項所記載之基板搬運裝置 ，係因爲其構成具有：風速感應器，將監視裝置設於收容 箱；及送風控制部，用以作動控制送風機構之風扇，所以 用以撿測風速感應器使過濾器進行篩眼堵塞降低送風壓力 ，此據藉由送風控制部將風扇之旋轉變大進行控制’能將 風量維持於形成最適量，並在收容箱內係將穩定的氣流送 風到基板移交構件。 申請專利範圍第1 4項所記載之基板搬運裝置’係因 爲將用以發出警報之警報裝置設於送風控制部’使過濾器 產生篩眼堵塞時，警覺性的通知過濾器之篩眼堵塞。 申請專利範圍第1 5項所記載之基板搬運裝置’係使 收容箱之開口部對峙於前述處理裝置之搬出入口的姿勢時 ，因爲設有對面狀態檢測裝置藉由送風控制部利用送風機 構之風扇減少送風量’由收容箱在無準備通過處理裝置之 搬出入口使多餘的空氣不會流入。 申請專利範圍第1 6項所記載之基板搬運裝置’係在 _本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) :1—0: (請先間讀背面之注意事項再填寫本頁) 裝 II--訂·---I----舞 經濟部智慧財產局員工消費合作社印製 471008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（8 ) 收容箱之開口部周緣設有伸縮構件用以覆蓋前述處理裝置 之搬出入口，所以使玻璃基板被移交時’在收容箱及處理 裝:置之間即使有任何間隙’但藉由伸縮構件使玻璃基板由 周圍被遮斷。 申請專利範圍第1 7項所記載之基板搬運裝置’係在 收容箱之頂部設有送風機構’由該頂部朝向下方吹出空氣 所構成，朝向開口部不流動空氣。因此面對於處理裝置時 ，由收容箱使空氣流入到處理裝置內的量可減低。 申請專利範圍第1 8項所記載之基板搬運裝置’係使 收容箱沿著搬運路進行移動時’朝向與收容箱之開口部用 以移動對置之面的方向使移動所構成，所以將收容箱之開 口部不朝向進行方向，朝向對置之面移動，即朝向移動背 面之方向進行移動。 申請專利範圍第1 9項所記載之基板搬運裝置，係因 爲將基板移交構件藉由水平# 可移動所構成，所 以與使用捲繞傳動機構或擦動機構等不同，使~產_生塵。.之, m m—昀座i,，位屬.，少，僅此.在，盖農箱空間 <3 【發明之實施形態】 以下，根據圖式將本發明之實施形態加以說明。首先 ，根據圖1對於使用本發明之基板搬運裝置處理系統之塗 布·顯像處理的全體構造加以說明。 如圖1所示，在該塗布·顯像處理系統1之前方，係 -------:-----裝--------訂-------—線 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用尹國國家標準（CNS)A4規格（210 X 297公釐） n 471008 A7471008 A7 B7 V. Description of the invention (1) [Background of the invention] (Please read the note on the back? Matters before filling out this page) The present invention relates to a substrate handling device, such as used in a liquid crystal display 1 (Liguid Crystal Display: LCD ) Is used to carry out coating and development processing on a substrate such as a glass substrate. The processing devices such as coating and development V devices are used to carry in and out substrates. In the LCD manufacturing process, the same photolithography technique as used in the manufacture of semiconductor devices is used on the glass substrate used for LCD. In order to form a thin film or electrode model of I TO (Indium Tin Oxide). The photolithography method is to coat a substrate for cleaning a photoresistor, expose it, and then develop it. The glass substrate on the substrate to be processed is held on the substrate conveying device and moved on the conveying path, and is carried into various processing devices. After each processing device has been processed, it is carried out and then conveyed to the next by the substrate conveying device. engineering. [Summary of invention] In the manufacturing process of the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the manufacturing process described above is performed in an environment where the substrate must not be xi (particle). Generally, the above-mentioned various processing devices are set in a dust-free environment. Η EPA film is installed indoors or in the substrate handling area inside and outside the device to create a low dust environment. However, in the above-mentioned apparatus, a large area of the entire clean room or the entire substrate transfer area is required to clean the environment, which causes a problem of high cost. In particular, in order to improve production efficiency, not only coating and developing devices, but also other devices, such as those containing CVD devices, etching devices, ash ejectors, etc. 1 -4- This paper is in accordance with China National Standard (CNS) A4 (210 X 297) Millimeter) Consumption Cooperation by Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs, Du Printed 471008 A7 ___________ B7 V. Description of Invention (2)-The system of linearization must be considered 'but the scope used to form a clean environment will be larger'. Therefore There may be higher costs. 'The present invention is invented in view of the above-mentioned circumstances, and provides a substrate conveying device.' Its purpose is to reduce space as much as possible in order to reduce the Jgjl's rhyme. 〇 In order to solve the above-mentioned problems, it is described in the first patent application The substrate conveying device includes: a moving body in a conveying direction that is movable along a conveying path; a storage box that supports the moving body in the conveying direction by a horizontally rotatable rotation axis; and a substrate transfer member 'It is installed in the above-mentioned storage box, and can be moved in a direction away from the entrance of the processing device while facing the entrance of the processing device.' The opening is formed in the storage box, and the processing device can be transferred. Hold the substrate. The substrate transfer device described in item 2 of the scope of patent application for the present invention is the substrate transfer device described in item 1 of the scope of patent application, which is characterized in that: a substrate transfer unit is provided with a plurality of substrates in the storage box Placement department. The substrate transfer device described in item 3 of the scope of patent application of the present invention is the substrate transfer device described in item 1 or 2 of the scope of patent application, which is characterized in that the aforementioned storage boxes are stacked in a plurality of stages and are respectively Those who are provided with the aforementioned substrate transfer member. The substrate conveying device described in item 4 of the scope of patent application for the present invention is the substrate conveying device described in item 1 or 2 of the scope of patent application, and its paper size is applicable to China National Standard (CNS) A4 (210 X 297) t) -5- nn 1 nn It I n tw. 4 I n 1 nnnn 1-port 1 n ϋ nnn I w (Please read the note on the back before filling this page) 471008 A7 B7 Employees of the Intellectual Property Office, Ministry of Economic Affairs Printed by a consumer cooperative. 5. Description of the invention (3) The feature is that the aforementioned storage box is divided into a plurality of chambers by being arranged into a slightly horizontal partition and divided into a plurality of chambers. Room person. * The substrate conveying device described in item 5 of the scope of patent application for the present invention is the substrate conveying device described in any one of items 1 to 4 of the scope of patent application, and is characterized in that it is formed in the storage box The opening is provided with a cover member that can be opened and closed. The substrate conveying device described in item 6 of the scope of patent application for the present invention is the substrate conveying device described in any one of items 1 to 4 of the scope of patent application, and is characterized in that it is formed in the opening of the storage box. It has a structure that is always open and a pressure control mechanism to maintain the inside of the storage box at a positive pressure. The substrate conveying device described in item 7 of the scope of patent application for the present invention is the substrate conveying device described in any one of items 1 to 4 of the scope of patent application, and is characterized in that it is formed in the opening of the storage box. It has a structure that is always open, and is also provided with an air blowing mechanism that passes through the opening portion from the side facing the opening portion of the storage box to form an air flow to the outside. The substrate conveying device described in item 8 of the scope of patent application for the present invention is the substrate conveying device described in any one of items 1 to 7 of the scope of patent application, and is characterized in that a monitoring device is provided to monitor the aforementioned storage Those in the box. The substrate conveying device described in item 9 of the scope of patent application of the present invention is characterized by having: (Please read the note on the back? Matters before filling out this page) 1 ------ 11 Order ------ --- Lines. This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 471008 Α7 __ Β7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (4) * Moving direction The substrate can be moved along the conveying path; the substrate transfer member supports the moving body in the aforementioned conveying direction through a rotation axis that can be rotated horizontally, and at the same time can be moved away from the entrance of the processing device in a posture facing the entrance of the processing device. The substrate can be transferred to and from the processing device. The dust removal device is equipped with a filter for vacuuming and is arranged near the substrate transfer member. Β The substrate described in item 10 of the present patent application scope The conveying device is a substrate conveying device as described in item 9 of the scope of the patent application, and is characterized in that a filter constituting the dust removing device is provided on the substrate transferring member. The one above. The substrate conveying device described in item 11 of the scope of patent application of the present invention is the substrate conveying device described in item 9 or 10 of the scope of patent application, which is characterized in that the dust removing device has a wall portion for covering. The aforementioned substrate is transferred to the surroundings of the member. The substrate transfer device described in item 12 of the scope of patent application for the present invention is the substrate transfer device described in any one of items 9 to 11 of the scope of application for patent, characterized in that the aforementioned substrate transfer member is provided with There are a plurality of substrate mounting sections. The substrate conveying device described in item 1 of the scope of patent application of the present invention is installed in a storage box, and at the same time, it can be moved by the substrate transfer member in a posture facing the loading and unloading entrance of the processing device. The direction is used to hold the structure of the substrate. Because of this, one H.... Will move the transportation area into the ring camp ~, but-the breadth ~ degree is the cost of the formation of the environmental control. (Please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS) A4 (210x 297 meals) 471008 A7 ____ B7 V. Description of the invention (5) Item 2 of the scope of patent application for this invention The substrate transfer device described is provided in a storage box, and is provided with a substrate transfer structure including a plurality of substrate mounting portions. Therefore, a plurality of substrates can be transported simultaneously, which is suitable for continuous processing of substrates. The substrate conveying device described in item 3 of the scope of patent application of the present invention is such that the storage boxes are stacked in a plurality of stages, and each of the substrate transfer members is provided. Therefore, a plurality of substrates can be transported simultaneously, which is suitable for continuous processing of substrates. The substrate conveying device described in item 4 of the scope of patent application of the present invention is configured such that the storage box is divided into a plurality of chambers through partitions arranged slightly horizontally, and the substrate transfer member is provided in each of the divided sections. Room person. Therefore, a plurality of substrates can be transported simultaneously, which is suitable for continuous processing of substrates. The substrate transfer device described in item 5 of the scope of patent application of the present invention is provided with a cover member that can be opened and closed in an opening portion formed in the storage box. Therefore, if the cover member is opened and closed only when the substrate is handed over to the processing device, external dust does not enter the storage box during the movement. The substrate conveying device described in item 6 of the scope of patent application of the present invention has a structure in which an opening portion formed in a storage box has a constant opening, and is provided with a pressure control mechanism to maintain the inside of the storage box at a positive pressure. Therefore, even if the opening portion is constantly opened during the handover of the substrate, dust floating outside the storage box will not enter the storage box. In addition, the transfer of the substrate is performed so that the opening is always opened. Since no switch mechanism is provided to open and close the opening, the transfer of the substrate can be performed quickly. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) -8-(Please read the precautions on the back before filling this page) I ---- I --- Order ----- ---- Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Green Economy 471008 A7 — B7 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (6) The substrate handling device described in item 7 of the patent scope The opening portion formed in the storage box has a constant opening structure, and at the same time, a ventilation mechanism is provided to pass the opening portion through the opening side facing the opening portion of the storage box to form an air flow to the outside. Therefore, even if the opening portion is kept open at all times when the substrate is handed over, dust floating outside the storage box is prevented from entering the storage box. In addition, since the opening portion is always opened by handing over the substrate, since a switch mechanism is not provided to open and close the opening portion, the handover of the substrate can be performed quickly. The substrate conveying device described in item 8 of the scope of patent application of the present invention is provided with a monitoring device for monitoring the state in the storage box. Therefore, it is easy to maintain a favorable environment for the substrate in the state of the storage box. In particular, the "Saiyu storage box" is easy to control to a good environment because the substrate is kept in a closed space. The substrate conveying device described in item 9 of the scope of patent application of the present invention is provided with a dust removing device, and a filter for dust collection is arranged near the substrate transfer member. Therefore, the air held around the substrate of the substrate transfer member is often purified by the filter, so a low-dust environment can often be maintained around the substrate. Therefore, it is not necessary to carry out a management environment for the entire substrate transfer area. 'The formation cost of the management environment can be greatly reduced. The substrate transfer device described in Item 10 of the present invention's patent scope' is used to form a filter for the dust removal device. Device, because it is set above the substrate transfer member, it can effectively remove floating dust -------- Ϊ ----- f ------- I order ----- --- • Line (Please read the note on the back? Matters before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 meals) -9-471008 A7-B7 V. Invention Explanation) The substrate conveying device described in item 11 of the scope of patent application of the present invention is the aforementioned dust removal device, because it has a wall portion to cover the periphery of the aforementioned substrate: plate transfer member, so the amount of dust from the outside is reduced. It can be used around the substrate to form a high net clean environment. The substrate transfer device described in item 12 of the scope of patent application of the present invention is provided with a substrate transfer member having a substrate mounting portion having a plurality of stages. Therefore, a plurality of substrates can be transported at the same time, which is suitable for continuous processing of the substrates. The substrate transporting device described in item 13 of the patent scope of the present application has a wind speed sensor, and the monitoring device is installed in the storage. Box; and the air supply control unit, which is used to control the fan of the air supply mechanism, so it is used to pick up the wind speed sensor to block the filter to reduce the air supply pressure. Based on this, the air supply control unit is used to control the fan's rotation to increase. 'The air volume can be maintained at an optimum amount, and a stable air flow is sent to the substrate transfer member in the storage box. The reason why the substrate conveying device ′ described in item 14 of the scope of the patent application is that an alarm device for generating an alarm is provided in the air supply control section ′ will cause the filter to block the screen when the filter is clogged. When the substrate conveying device described in Item 15 of the scope of the patent application is in a posture where the opening of the storage box faces the loading and unloading entrance of the processing device, the opposite state detection device is provided with the fan of the blowing mechanism by the blowing control unit. Reduce the amount of air supply 'from the storage box in the unloading entrance of the processing device so that excess air will not flow in. The substrate handling device described in item 16 of the scope of patent application is based on _ this paper size applies Chinese National Standard (CNS) A4 specifications (210 X 297 mm): 1-0: (Please read the precautions on the back first (Fill in this page again.) Pack II--Order · --I——Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 471008 A7 B7 Printed by the Consumer ’s Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A telescopic member is provided on the periphery of the opening of the storage box to cover the loading and unloading entrance of the aforementioned processing device, so when the glass substrate is handed over, 'even if there is any gap between the storage box and the processing device: set', the glass is made by the telescopic member The substrate is interrupted by the surroundings. The substrate conveying device described in item 17 of the scope of the patent application is provided with a blower mechanism at the top of the storage box, and the air is blown downward from the top, and no air flows toward the opening. Therefore, when facing the processing device, the amount of air flowing into the processing device from the storage box can be reduced. The substrate conveying device described in item 18 of the scope of the patent application is configured to move the storage box toward the opening facing the opening of the storage box when the storage box is moved along the conveyance path. The opening of the box does not move toward the direction of progress, but moves toward the opposite surface, that is, moves toward the direction of moving the back surface. The substrate conveying device described in item 19 of the scope of the patent application is composed of a substrate transfer member that can be moved horizontally, which is different from the use of a winding drive mechanism or a wiper mechanism to produce dust. ， M m— 昀 座 i ,, belongs to, little, nothing more, here, cover farm box space < 3 [Embodiment of the invention] Hereinafter, the embodiment of the present invention will be described with reference to the drawings. First, the overall structure of the coating and developing process using the substrate transfer apparatus processing system of the present invention will be described with reference to FIG. As shown in FIG. 1, before the coating and developing processing system 1, the system is -------: ----- installation -------- order ----------- Wire (please read the precautions on the back before filling this page) This paper size applies Yin National Standard (CNS) A4 (210 X 297 mm) n 471008 A7

五、發明說明（9 ) (請先閱讀背面之注意事項再填寫本頁) S又有裝卸料部將處理對象之玻璃基板G對塗布·顯像處理 系統1進行搬出入。在該裝卸料部，係設有：卡匣載置台 3 ’將用以複數收容玻璃基板g之卡匣c使整列被載置於 預定位置；及裝卸料機4，由各卡匣C將應處理玻璃基板 G取出，又將塗布·顯像處理系統丨中處理終了之玻璃基 板G返回到各卡匣c。裝卸料機4，係藉由本體5之行走 移動到卡匣C之配列方向，在被搭載於本體5之板狀體6 上用以載置玻璃基板G並移交到第1搬運裝置2 5。 在塗布·顯像處理系統1之中央部，係使配置於長度 方向之走廊狀的搬運路1 〇、1 1通過移交部1 2被設成 一直線上，在該搬運路1 〇，1 1之兩側，係被配置著各 種處理裝置爲了對玻璃基板G進行各處理。 在圖示之塗布·顯像處理系統1，係在搬運路1 〇之 一側方，譬如被並設有2台洗淨裝置1 6用以刷洗玻璃基 板G同時藉由高壓噴水爲了實施洗淨。又，在挾持搬運路 1 0之相反側’被並設著二座顯像裝置1 7，在其傍邊設 有重疊二台之加熱裝置1 8。 經濟部智慧財產局員工消費合作社印製 又，在搬運路1 1之一側方，被設有粘著裝置2 0在 玻璃基板G用以塗布抗蝕液之前用以疏水處理玻璃基板G ，在該粘著裝置2 0之下方係被配置有冷卻用之冷卻裝置 2 1。又，在此等粘著裝置2 0及冷卻裝置2 1之傍邊係 被配置各二列二個重疊加熱裝置2 2。又，在挾持搬運路 1 1之相反側，被配置有抗蝕液塗布裝置2 3在玻璃基板 G之表面藉由用以塗布抗蝕液在玻璃基板G之表面用以形 本紙張尺度適用中國國家標準（Ci^S)A4規格（210 X 297公釐） -12 - ' 471008 A7 B7 五、發明說明〇〇 ) 成保護膜。未圖示，但在此等塗布裝置2 3之側部，係設 有曝光裝置在被形成於玻璃基板G上之保護膜爲了用以曝 光:預定之微細模型。 ‘ 以上之各處理裝置1 6〜1 8及2 0〜2 3 ，係皆在 搬運路1 0、1 1之兩側，將玻璃基板G之搬出入口朝向 內側被配置。使第1搬運裝置2 5在裝卸料部，各處理裝 置1 6〜1 8及移交部1 2之間爲了用以搬運玻璃基板G 進行移動搬運路1 0上，並使第2搬運裝置2 6在移交部 1 2及各處理裝置2 0〜2 3之間爲了用以搬運玻璃基板 G形成進行移動搬運路1 1上。 其次，做爲上述第1搬運裝置2 5及第2裝置2 6將 被採用有關本發明第1形態之基板搬運裝置4 0的具體構 造加以說明。圖2係顯示該基板搬運裝置4 0之構成斜視 圖，圖3係顯示內部構造平面圖。 基板搬運裝置4 0，係具有搬運方向移動體4 1沿著 搬運路1 0、1 1將被設的導軌3 5上沿著Y方向（搬運 方向）可移動。該搬運方向移動體4 1 ，在本實施形態係 被設成跨越導軌3 5，藉由未圖示被配設於內部的驅動馬 達之驅動進行移動。在該搬運方向移動體4 1之上部，係 設有旋轉軸4 3藉由未圖示馬達形成可旋轉於0方向（水 平方向）。該旋轉軸4 3，係進而藉由被配設於搬運方向 移動體4 1內的昇降部（未圖示）被設置成能動作於上下 方向（Z方向）。 在旋轉軸4 3之上部，係使略呈〕字型之支持構件 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注咅？事項再填寫本頁) 丨裝--------訂---------梦 經濟部智慧財產局員工消費合作社印製 -13- 471008 A7 -—_______________ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（11 ) 4 4，將開放側朝向上方被安裝，在該支持構件4 4之側 板部4 4 a間用以保持收容箱5 0。具體而言，如圖3所 示、，在附設於側板部4 4 a的馬達4 4 b之軸構件4 4 c 用以連結並支持收容箱5 0。藉由該馬達4 4 b之驅動， 以該軸構件4 4 c爲中心可將收容箱5 0之前方部及後方 部傾斜調整於上下，使旋轉軸4 3旋轉於水平方向時所要 的旋轉區域可縮小。 該收容箱5 0之內部，係藉由被配設成略呈水平之間 隔板51被區分成上下2室51a、51b。又’分別在 各室5 1 a、5 1 b設有基板移交構件6 0。 基板移交構件6 0，係可移動於X方向（如圖2所示 ，對峙於處理裝置時進行離接於該處理裝置的方向）’總 之，如圖3之平面圖所示，對基部6 1突出’具備有：一 對之長片6 2 ，由平面觀看在中央附近設有預定間隔；及 短片6 3，對各長片6 2分別具有間隔設於兩端。在長邊 6 2及短片6 3之各前端部係分別設有調整用之銷構件 6 2 a、6 3 a ，藉由長邊6 2之銷構件6 2 a使玻璃基 板g之前端緣一致，藉由短邊6 3之銷構件6 3 a使玻璃 基板g之各側端緣一致。 使基板移交構件6 0驅動於X方向之裝置係無限定， 但在本實施形態，係如圖3及圖4所示’在收容箱5 0之 各側壁5 2以平行，且在設於比該各側壁5 2更內部的隔 壁5 3形成切口 5 3a ，在該切口 5 3 a用以***並使突 出基板移交構件6 0之基部6 1的各側端’將該突出部沿 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） -14 - 471008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（12 ) 著切口 5 3 a由配置的該切口 5 3 a連接於密封桿6 4防 止灰麈之侵入，將該密封桿6 4可進行動作於X方向使驅 動。密封桿6 4，係如圖4所示’在隔壁5 3之外方，沿 著該隔壁5 3在預定間隔中被配置的2個滑輪6 5、6 6 對被配掛的驅動皮帶6 7，通過連結構件6 8被連結’將 該驅動皮帶6 7在2個滑輪6 5、6 6間使旋轉驅動並使 馬達6 9動作，被構成能動作於x方向。尙有’編號6 7 a ，係被配置於該驅動皮帶6 7之下方的連結構件6 8的 導軌。又，圖4所示之驅動機構，係如圖3所示，被設於 收容箱5 0之左右兩方，由其中之一方使被配設於上側室 5 1 a的基板移交構件6 0被驅動，由他方使被配設於下 側室5 1 b的基板移交構件6 0被驅動。 在收容箱5 0之後部’係設有送風機構7 2具備有 HE P A薄膜等薄膜構件7 0及風扇7 1安裝於該薄膜構 件7 0更後部。藉由用以驅動該送風機構7 2，使被形成 於收容箱5 0之前面的開口部即使構造常時開口，但藉由 由後方使朝向該開口部的氣流被形成，通過該開口部可防 止外部灰塵侵入到收容箱5 0內。 尙有，如本實施形態，設有隔壁5 3之情形，譬如， 在隔壁之前方（靠近開口部）的適當位置’用以形成循環 用之孔5 3使氣流循環，同時在各隔壁5 3及側壁5 2之 間的後部藉由設有吸引用之風扇7 3 ，通過該循環用之孔 5 3 b，及各隔壁5 3和側壁5 2之間隙5 4也可將收容 箱5 〇內部的空氣積極的排出到外部。該情形’當然若設 -------·---r *t--------訂 ---------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 X 297公爱） -15- 471008 A7 _ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（13 ) 有吸引用之風扇爲佳，但不設如此的風扇，在側壁5 2等 設排出口，將經由隔壁5 3之循環用的孔5 3 b的氣流構 成排出到外部也可。 ’ 又，在收容箱5 0，係設有監視裝置用以監視其內部 爲佳。譬如，如圖3所示，在該收容箱5 0之內部若配設 靜電監視器5 5及靜電除去裝置5 6，則藉由靜電監視器 5 5若確認產生靜電，則立刻使靜電除去裝置5 6動作可 用以除去靜電，以如此，將收容箱5 0內對玻璃基板G而 言可保持良好的狀態。此時，本實施形態中，因爲使玻璃 基板G被保持在收容箱5 0所謂密封的空間，所以可有效 進行靜電除去等。尙有，做爲監視裝置，係除了靜電監視 器之外，也可設置灰塵監視裝置等。 其次，將有關本實施形態基板搬運裝置4 0之作用加 以說明。首先，藉由搬運方向移動體4 1之驅動使基板搬 運裝置4 0沿著搬運路1 0進行移動，並進行接近於裝卸 料機4，使基板移交構件6 0前進動作並由收容箱5 0使 突出，在該基板移交構件6 0之長片6 2 ，短片6 3上收 取被保持於裝卸料機之玻璃基板G。之後，基板移交構件 6〇係進行後退動作並被收容於收容箱5 0內。尙有，此 時，在上下2個基板移交構件6 0之兩方可收取玻璃基板 G。 此時，使被配置於收容箱5 0之後部的送風機構7 2 之風扇藉由進行驅動，在收容箱5 0內，係由對置於該收 容箱5 0之開口部的面側（後部）通過該開口部使被形成 --------*---!.-裂--------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） -16 - 471008 A7 _ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（14 ) 氣流流到外部。因此，進行基板之移交使收容箱5 0之開 口部即使常時開口，但在移動中使浮遊於收容箱5 0外之 灰塵幾乎不會侵入到收容箱5 0內。 ‘ 基板搬運裝置4 0，若收取玻璃基板G ’做爲目的係 被配置之處理裝置附近爲止藉·由搬運方向移動體4 1之驅 動進行移動於Y方向。其次，使旋轉軸4· 3旋轉於預定角 度Θ方向，將收容箱5 0之開口部與該處理裝置相對，進 而，使旋轉軸4 3動作於上下方向（Z方向），使與該收 容裝置之搬出入口相對。 該狀態下，用以開關該收容裝置之搬出入口使快門開 放動作，另外，譬如，使配置於收容箱5 0之下側室5 1 的基板移交構件6 0之馬達6 9動作用以驅動驅動皮帶 6 7，將該基板移交構件使前進到X方向。而且，處理裝 置內之處理部，譬如，在旋轉夾盤或支持銷上移交玻璃基 板G。 在處理部中使預定之處理若終了，則再度用以開關處 理裝置的搬出入口並使快門開放動作，使配置於收容箱 5 0之下側室5 1 b的基板移交構件6 0前進，由處理部 在該基板移交構件6 0之長片6 2及短片6 3上收取玻璃 基板G。其次，使該基板移交構件6 0後退並收容於收容 箱5 0之下側室5 1 b內。接著，使配置於收容箱5 0之 上側室5 1 a的基板移交構件6 0前進，將載置於該基板 移交構件6 0之玻璃基板G與上述進行同樣處理。 尙有，在上述說明，係在收容箱5 0內的2個基板移 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 -17- 經濟部智慧財產局員工消費合作社印製 471008 A7 B7 五、發明說明（15 ) 交構件6 0使皆未處理的玻璃基板G被保持，但在被配置 於下側室5 1 b的基板移交構件6 0係用以保持未處理玻 璃基板G，而在配置於上側室5 1 a的基板移交構件6 0 係也可用以保持處理完成的玻璃基板G。 又，上述之構成’係藉由由過濾器7 0及風扇7. 1所 構成送風機構7 2，具有由常時開口之收容箱5 0之開口 部防止灰塵之侵入的構造，但取代該送風機構7 2設置壓 力控制機構（未圖示）將收容箱5 0之內部設定在常時正 壓，藉此也可防止外部灰塵侵入的構造。尙有，上述送風 機構7 2 ，係因爲由收容箱5 0內送風到外部之構成，藉 此收容箱5 0內部也係形成正壓。即，該送風機構7 2也 實質上做爲壓力控制機構發揮機能。 又，在上述說明，係使形成於收容箱5 0之前面的開 口部構成常時開口，但在該開口部設有可開關的蓋構件 5 8也可。蓋構件5 8之構成係不被限定’但譬如，如圖 5所示，具有把手部5 8 c形成於中央附近，同時在該把 手部58c之周圍設有按鈕58d ’進而’連動於該按鈕 5 8 d之按壓操作由側部進行突出或沒入’可使用具有卡 合突起5 8 a、5 8 b用以卡合於收容箱5 0之側壁5 2 。又，該情形，做爲裝置用以按壓按鈕5 8 d ’係譬如， 可採用在配設於處理裝置之搬出入口的快門設有凹部可用 以收容把手部5 8 c ，及突片突設於該凹部內放著，使把 手5 8 c嵌合於該凹部，則藉由該突片使按鈕5 8 d被按 壓’並使卡合突起5 8 a、5 8 b之卡合被解除之構成。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -18- -------------- -裝---------訂---------綠 (請先閱讀背面之注音心事項再填寫本頁) 471008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（16 ) 若使卡合突起5 8 a、5 8 b之卡合被解除’則與快門一 起將蓋構件5 8收容於處理裝置之任意部位’進行玻璃基 板G之移交。當然，將用以開關該蓋構件5 8之機構也可 設於收容箱5 0自體。 尙有，設有蓋構件5 8之情形’係玻璃基板G之搬運 中，由開口部不會使灰塵之侵入。因此，·也可構成不設上 述送風機構7 2或壓力控制機構，但該情形’也將送風機 構7 2等設於收容箱5 0之後部等，將該蓋構件5 8進行 開放在與處理機構之間進行玻璃基板G之移交時不要使灰 塵侵入，僅在玻璃基板G之移交時，構成可送風等爲佳。 又，以上述之構成係在收容箱5 0設有間隔板5 1間 隔成複數之室5 1 a、5 lb，在其各自構成設有基板移 交構件6 0，但不設置間隔板5 1，當然也可構成僅配設 一個基板移交構件6 0。進而，將配設一個之基板移交構 件6 0之收容箱5 0，也可做爲複數段疊層。 其次，根據圖6及圖7，對於本發明之其他實施形態 加以說明。有關本實施形態之基板搬運裝置8 0 ，係與上 述之實施形態的基板搬運裝置4 0不同，不具有收容箱 5 0，對搬運方向移動體8 1具有基板移交構件8 3使可 水平旋轉的旋轉軸8 2被直接支持。尙有，旋轉軸8 2被 設爲可上下移動，與上述實施形態相同使基板移交構件 8 3對處理裝置之搬出入口可對峙。 基板移交構件8 3，係基板載置部之1種型式也可， 但以本實施形態係使基板載置部8 3 a以2段被設置。又 --------I---1 -------—訂---— I! - (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -19- 471008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（17 ) ’基板移交構件8 3之形狀係不被限定，但譬如，與上述 實施形態同樣，由平面觀看在中央附近具有長片，並在兩 端附近可採用具備短片之形狀。 ‘ 以本實施形態，係如圖6及圖7所示，被構成具有灰 塵除去裝置8 4具備有：基板8 4 a ，被連接於旋轉軸 8 2 ;支柱構件8 4 b，被立設於該基板8 4 a之四隅； 過濾器8 4 c，被支持於該支柱構件8 4 b之上部的 HEPA薄膜等；及風扇84d，被配設於該過濾器84 c之上部。即，構成僅將用以保持玻璃基板G之基板移交 構件8 3之周圍環境的淸淨化。 若依據本實施形態，則藉由用以驅動灰塵除去裝置 8 4之風扇8 4 d，使外部空氣通過過濾器8 4 c使灰塵 被吸麈，被淸淨化之後，在被保持於基板移交構件8 3之 玻璃基板G進行接觸。因此，不將基板搬運區域全體進行 淸淨化，也可防止灰塵附著在玻璃基板G。 以本實施形態，係在基板移交構件8 3之上方設有灰 塵除去裝置8 4，而該基板移交構件8 3之周圍係被開放 之狀態下，但做爲灰塵除去裝置8 4，也可使用具有壁部 之構造可覆蓋該基板移交構件8 3之周圍。但，該情形， 係在該壁部或上述基板8 4 a之其中之一設有空氣流動排 出口。 又，在本實施形態中，如上述實施形態，在灰塵除去 裝置8 4之下部等，也可附設靜電監視器等之監視裝置或 靜電除去裝置等。 (請先閱讀背面之注音？事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -20 - 471008 A7 —___ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（18 ) 又’不限定於此，如圖8所示，譬如，在各處理裝置 A〜D之搬出入附近a設有玻璃基板G之搬出入周期的監 視器或靜電監視器，同時在搬運路1 〇、ί 1中之適宜位 置b也可設置灰塵監視器。而且，將設於各處理裝置Α〜 D之搬出入附近a ，搬運部1〇、1 1中之適宜位置b， 及基板搬送裝置40、80的適且位置c.之各監視裝置以 網路連結，將該狀態經常藉由電腦9 0加以監視，根據必 要在各處理裝置A〜D籍由自動控制，將搬運線全體對玻 璃基板G而言可保持在適切的環境，同時也有助於處理效 率的提高。 其次對於圖9所示送風機構7 2將第1變形例加以說 明。做爲設於圖3之收容箱5 0內的監視裝置設有靜電除 去裝置5 6 ，由送風機構之風扇7 1將朝向開口部吹出之 空氣除電，藉此用以防止附著灰塵在玻璃基板G，但如第 1變形例在收容箱5 0設有送風控制部1 0 0及風速感應 器1 0 1，藉此也可構成用以控制送風機構7 2。即，在 收容箱5 0之頂部面等之適宜位置設有風速感應器1 0 1 用以檢測由風扇7 1吹進氣流的風速。而且，藉由風速感 應器1 0 1使根據檢測之信號的電壓値，以送風控制部 1〇0被比較判斷是否比所要的臨界値更小。使電壓値判 斷比臨界値更小時，則過濾器7 0會知道由於灰塵引起篩 眼堵塞，使根據檢測之電壓値的風扇7 1之旋轉數驅動信 號由送風控制部1 0 0被輸出，而風扇7 1係被控制使其 旋轉數進行加大。又，該情形，使風扇7 1之旋轉數進行 ------------1' ;裝 --------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -21 - 471008 A7 ----B7 五、發明說明（19 ) ^制加大時，則使警示燈進行點亮，發出聲音等將警報裝 _ 1 〇 2作動並將過濾器7 0之交換告知作業者所構成。 :第1變形例係藉由該構成，即使產生過濾器7 0篩眼 堵塞使送風量下降，但藉由送風控制部1 〇 〇自動可提高 ®扇7 1之旋轉數，將被吹出到收容箱5 0之風量常時保 持固定，且，可維持均勻的流動氣流，僅此有利於防止灰 塵的附著。又，爲了使警報裝置1 〇 2作動，可促使作業 者交換過濾器7 0極爲便利。 其次，第2變形例係如圖9所示其構成係在送風控制 部1 0 0用以連接對面狀態檢測裝置1 0 3。該對面狀態 檢測裝置1 〇 3，係使收容箱5 0在與處理裝置之間形成 用以移交玻璃基板G的狀態時，使用以檢測該狀態之信號 輸入到送風控制部1 0 0。藉此送風控制部1 0 0，係用 以輸出控制信號將風扇7 1之旋轉數變小。另外，對吸引 用風扇7 3，係使其旋轉數變大使控制信號被輸出。 因此若依據第2變形例，則藉由對面狀態檢測裝置 1 0 3使收容箱5 0與處理裝置進行對面並用以檢測進行 玻璃基板G之移交狀態時，風扇7 1之旋轉係變弱，而吸 引用風扇7 3之旋轉係被控制變強。因此，玻璃基板G之 移交時，通過收容箱5 0之開口部可減少流入到處理裝置 之搬出入口的空氣量，形成有利於減低灰塵之附著。 其次，圖1 0所示第3變形例，係在收容箱1 1 〇之 開口部1 1 1周緣設有波紋1 1 2用以變形自由收縮，使 開口部1 1 1進行對面於處理裝置1 1 3之搬出入口 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐〉 -22 - (請先閱讀背面之注音^事項再填寫本頁) -裝·-------訂---------線' 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 471008 A7 ____ B7 五、發明說明（2〇 ) 1 1 4形成用以移交玻璃基板G的狀態時，使波紋1 1 2 構成密著於搬出入口 1 1 1。 :若依攄第3變形例，則收容箱1 1 0及‘處理裝置 1 1 3之間即使有各種不同的間隙，但爲了使波紋1 1 2 完全密著於搬出入口 1 1 4，由間隙使灰塵可回避混入到 處理裝置。尙有，波紋1 1 2，係設於處理裝置側當然也 無妨。 其次，將圖1 1所示第4變形例加以說明，則在收容 箱1 2 0之頂部設有吸入風扇1 2 1及過濾構件.1 2 2， 並在開口部相反側之背面設有吸引用風扇1 2 3。又， 1 2 4係蓋構件以自由開關設於開口部1 2 2 ，使收容箱 1 2 0移動之間係關閉，對面於處理裝置進行玻璃基板G 之移交時被形成打開。 若依據該構成之第4變形例，則用以搬運玻璃基板G 時，蓋構件1 2 4係被關閉，由吸入風扇1 2 1使空氣往 下吹。空氣係流動到收容箱1 2 0箭頭之方向後，經由吸 引用風扇1 2 3被排出到外部。因此在回避灰麈之附著狀 態下可用以搬運玻璃基板G。尙有，取代蓋構件1 2 4以 氣帘方式用以防止灰塵之侵入也可。 又，第4變形例中在收容箱1 2 0之頂部下面設置除 電裝置之除電器1 2 5也可。藉此可除去靜電，對收容箱 1 2 0內之玻璃基板G而言可確保爲了處理之良好的密閉 空間。 其次，圖1 2所示第5變形例，係塗布之處理搬運系 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -23- n FI n ^ n . n f— n «^1 n n n 訂---------線—I (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 471008 A7 -—_________ B7 五、發明說明（21 ) 統中使收容箱1 3 0用以搬運玻璃基板G時，構成將其背 面朝向進行方向移動。譬如，以洗淨裝置1 6將玻璃基板 G:之移交終了後，使收容箱1 3 0經由點線之方向移動到 加熱裝置1 8時，將收容箱1 3 0之背面朝向進行方向移 動’而移動到加熱裝置1 8之正前爲止時將收容箱1 3 0 轉換成預定方向，將收容箱1 3 0之開口部構成使旋轉對 面於加熱裝置18之搬出入口也可。 若依據該第5變形例，則將收容箱1 3 0之開口部不 朝向進行方向而藉由構成使旋轉移動能朝向背面，使灰塵 減少進入到收容箱1 3 0內之餘地之點形成有利。 接著，將圖1 3所示第6變形例加以說明。設置於移 交部1 2之移交搬運裝置1 4 0係在用以移動搬運路1 0 之第1搬運裝置2 5及第2搬運裝置2 6之間用以中繼玻 璃基板G爲了相互移交的裝置。在其兩側係設有開口部 141、142，使各搬運裝置25、26之基板移交構 件6 0等（圖4 )進行進退。由開口部1 4 1、1 4 2之 上方係被設有氣帘裝置1 4 3、1 4 4使空氣往下吹。在 內部係設有載置台1 4 5 ，藉由自由出沒之銷1 4 5被形 成能用以支持玻璃基板G。在移交搬運裝置1 4 0之頂部 ，係被設有風扇送風機構藉由過濾構件1 4 7及吸入風扇 1 4 8所構成。 有關上述構成之第6變形例’係由吸入風扇1 4 8流 入到移交搬運裝置1 4 0內的空氣係形成流動於玻璃壓板 G之周圍箭頭的方向。因此’在移交搬運裝置1 4 0中’ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） -24 - ----------I---» --------訂·-----* 線 (請先閱讀背面之注意事項再填寫本頁) 471008 A7 ______ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（22) 由外部將灰塵之侵入以氣帘裝置1 4 3、1 4 4擋住，且 因爲在玻璃基板G由吸入風扇1 4 8使空氣被勁吹，所以 可抑制灰塵附著。 ’ 其次’對於圖1 4所示之第7變形例加以說明。上述 圖3之實施形態之構成係流動收容箱5 〇內之空氣係通過 間隙5 4經由設於背面之吸引用風扇7 3排風到外部，但 本例，係取代此如圖1 4所示在收容箱1 5 0之背面近傍 的頂部構成安裝有吸引風扇1 5 1。 若依據該第7變形例，則使通過形成於收容箱1 5 0 之側部的間隙1 5 2之空氣，如箭頭1 5 3由頂部被排出 ’所以在存在於背部的處理裝置可回避被空氣勁吹。尙有 與此相反將吸引風扇1 5 1安裝於收容箱1 5 0之下面， 將空氣由下面進行排出也可。進而，如圖1 5在對置於設 於背面未圖示吸引風扇的位置構成設有偏向板1 5 5也可 。藉此，空氣係以偏向板1 5 5使流動被偏向，所以在收 容箱1 5 0之背面的處理裝置，直接可回避被空氣勁吹。 其次，將圖1 6所示第8變形例加以說明。圖4之實 施形態的構成係使基板移交構件6 0沿著導軌6 7 a擦動 支持，通過由驅動皮帶6 7及滑輪6 5，6 6所構成捲掛 傳動機構將馬達6 9之驅動力傳達到基板移交構件6 0 ’ 但本例係取代此如圖1 6所示之構成將基板移交構件 1 6 0直接使用水平多關節型機構1 6 1進行作動。水平 多關節型機構1 6 1係譬如具有第1柄1 6 2及第2柄 1 6 3，而第1柄1 6 2係在第2柄1 6 3通過第1軸 本紙張尺度適用中&國家標準（CNS)A4規格（210 X 297公釐) :25 : 一 ----'-------- 裝--------訂---------線'、 (請先閱讀背面之注意事項*填寫本頁) 經濟部智慧財產局員工消費合作社印製 471008 A7 __________ B7 五、發明說明（23 ) 1 6 4被軸支，第2柄1 6 3係被第2軸1 6 5軸支。又 第1柄1 6 2係將基板移交構件1 6 0藉由第3軸1 6 6 以自由轉動被軸支。各柄1 6 2、1 6 3及基板移交構件 1 6 0係使用設於第1、第2、第3之各軸1 6 4、 1 6 5、1 6 6之未圖示馬達被轉動。 若依據第8變形例則使用多關節型機構1 6 〇，在收 容箱之空間使基板移交構件1 6 〇可移動於箭頭1 6 7方 向。因此’與在收容箱內具有如滑塊機構之擦動部不同， 僅用以密封馬達周圍’可簡單阻止灰塵散逸於收容箱內之 空間。因此’本第8變形例係使施實密封之部位減小而可 完成，以可減少產生灰塵之點形成有利的效果。 將圖1 7及圖1 8所不第9變形例加以說明。在圖2 所示之收容箱5 0之開口部，係未設有蓋構件之態樣下， 但本第9變形例，係如圖1 7所示在收容箱1 7 0之開口 部的中間高度設有蓋構件1 7 2在銷1 7 1之周圍進行開 關。因此，在收容箱1 7 0用以收納玻璃基板G進行搬運 時’係如圖1 7所示關閉蓋構件1 7 3進行搬運。在與處 理裝置之間進行移交時，係如圖1 8所示將蓋構件打開成 水平對上室或下室之其中之一可毫無任何妨礙進行玻璃基 板G之搬出入。 因此，在第9變形例，即使在收容箱1 了 〇之移動時 ’也藉由蓋構件1 7 3使收容箱1 7 0之開口部因爲關閉 ’所以在收容箱內可良好阻止灰麈的侵入。 尙有’蓋構件1 7 3係如圖1 9所示之構成在銷 1 I I I ..ϊ I I I 1 I I, > — — — — — 一5J« — — —111 — — / V (請先閱讀背面之注咅S事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -26- 471008 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（24 ) 1 7 4之周圍設有蓋構件1 7 5可開關。 進而，上述實施形態中在洗淨裝置1 6，顯像裝置 7 ’加熱裝置1 8、2 2等之處理裝置‘，係未設有任何 遮蔽構件，但如圖2 0所示第1 0變形例在處理裝置 1 8 0之移交口的搬出入口設有氣帘裝置丄8 1之構成也 可。藉此’即使使收容箱1 8 3 _面於處理裝置1 8 0之 搬出入口時’以氣帘裝置丨8 1使搬出入口因爲與外部被 遮蔽，所以由收容箱1 8 3可防止不注意空氣的侵入。又 ’如圖2 1所示取代氣帘裝置1 8 1設置在上下方向也可 設置可開關之快門裝置1 8 4。 又，以上述之實施形態，在圖3之例示係使基板移交 構件6 0驅動於X方向之裝置，但如圖2 2所示加以變形 也可。即，在間隙5 4內配置無端之密封皮帶2 2 1能覆 蓋設於隔壁53之切口 53a。而且，該密封皮帶221 之一方側，係通過連結構件2 2 2被連結於驅動皮帶6 7 ，而密封皮帶2 2 1之他方側，係通過連結構件2 2 3被 連結於基板移交構件6 0之基部6 1。因此，驅動皮帶 6 7被驅動，則通過密封皮帶2 2 1使基板移交構件6 0 形成被驅動於X方向。在本實施形態，係特別使密封皮帶 2 2 1覆蓋著切口 5 3 a ，所以由間隙5 4使灰塵流到基 板移交構件6 0側變少。 尙有，成爲本發明之基板搬運裝置之搬運對象的基板 ，係不僅上述之L C D用之玻璃基板G，對於半導體晶圓 等之基板當然也可適用於本發明。進而，上述之塗布•顯 -------------------訂·--------線 (請先閱讀背面之注意事項再填寫.本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -27- 471008 A7 --_ B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（25) 像處理系統的處理裝置之組合僅係一例而已，在被配置 C V D ’ |虫刻裝置，排灰器等一條線中本發明當然也有效 〇 申請專利範圍第1項所記載之本發明的基板搬運裝置 ’係設於收容箱內，同時在對峙於處理裝置之搬出入口的 姿勢中在離接於該搬出入口藉由可移動的基板移交構件用 以保持基板之構成。因此，不必要進行基板之搬運區域的 淸理環境，可大幅度削減淸理環境的形成成本。 申請專利範圍第2項所記載之本發明的基板搬運裝置 ，係在收容箱內，設有具備複數段之基板載置部的基板移 交構件。因此，同時可搬運複數之基板，適用於基板之連 續處理。 申請專利範圍第3項所記載之本發明的基板搬運裝置 ，係使收容箱被疊層設成複數段，並在其各自設有前述基 板移交構件。因此，同時可搬運複數之基板，適用於基板 之連續處理。 申請專利範圍第4項所記載之本發明的基板搬運裝置 ，係使收容箱通過配置於略呈水平之間隔板並被區分成複 數室，而前述基板移交構件，係設於被區分之各室。因此 ，同時可搬運複數之基板，適用於基板之連續處理。 申請專利範圍第5項所記載之本發明的基板搬運裝置 ，係在形成於收容箱之開口部設有可開關之蓋構件。因此 ，在與處理裝置之間僅在進行基板之移交時若使該蓋構件 開關，則在移動中使外部灰塵不會侵入到收容箱內。 本紙張尺度適用中國國家標準（ch)A4規格（210 X 297公釐） .28 - (請先閱讀背面之注意事項再填寫本頁) 471008 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（26 ) 申請專利範圍第6項所記載之本發明的基板搬運裝置 ，係使形成於收容箱之開口部構造成常時開口，另外將該 收容箱內部具備有壓力控制機構爲了保持於正壓。因此， 進行基板之移交使開口部即使常時開口，也不會使浮遊於 收容箱外之灰塵侵入到收容箱內。又，進行基板之移交使 開口部常時開口，因爲未設有開關機構甩以開關該開口部 ，可迅速進行基板之移交。 申請專利範圍第7項所記載之本發明的基板搬運裝置 ，係使形成於收容箱之開口部構造成常時開口，另外由對 置於該收容箱之開口部的面側通過該開口部具備送風機構 用以形成氣流流動於外部。因此，進行基板之移交使開口 部即使常時開口，也不會使浮遊於收容箱外之灰麈侵入到 收容箱內。又，進行基板之移交使開口部常時開口，因爲 未設有開關機構用以開關該開□部，可迅速進行基板之移 交。 申請專利範圍第8項所記載之本發明的基板搬運裝置 ，係設有監視裝置用以監視收容箱內之狀態。因此，將收 容箱內之狀態對基板而言形成容易保持良好的環境。特別 是，藉由收容箱因爲使基板被保持於密閉的空間，所以容 易控制於良好的環境。 申請專利範圍第9項所記載之本發明的基板搬運裝置 ，係具備灰塵除去裝置備有吸塵用之過濾器被配置於基板 移交構件之近傍。因此，被保持於基板移交構件之基板周 圍的空氣，係藉由該過濾器因爲經常被淨化，所以將基板 (請先閱讀背面之注音？事項再填寫本頁}V. Description of the invention (9) (Please read the precautions on the back before filling in this page) S and the loading and unloading section will load and unload the glass substrate G to be processed into the coating and development processing system 1. The loading and unloading section is provided with: a cassette mounting table 3 ′ for loading a plurality of cassettes c for storing a plurality of glass substrates g at a predetermined position; and a loading and unloading machine 4, each cassette C shall respond to The processed glass substrate G is taken out, and the glass substrate G that has been processed in the coating and developing processing system 丨 is returned to each cassette c. The loading and unloading machine 4 is moved to the arrangement direction of the cassettes C by walking of the main body 5, and the glass substrate G is placed on the plate-shaped body 6 mounted on the main body 5 and transferred to the first conveying device 25. In the central part of the coating and developing processing system 1, a corridor-like conveying path 10, 11 arranged in the longitudinal direction is arranged in a straight line by the transfer part 12, and on the conveying path 1 0, 1 1 Various processing apparatuses are arranged on both sides in order to perform each processing on the glass substrate G. The coating / developing processing system 1 shown in the figure is located on one side of the conveying path 10, for example, two cleaning devices 16 are installed in parallel to clean the glass substrate G and perform high-pressure water spraying for cleaning. . On the opposite side of the holding conveyance path 10, two developing devices 17 are installed in parallel, and two heating devices 18 are provided on the side. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, one side of the conveying path 11 is provided with an adhesive device 20, and the glass substrate G is used to hydrophobically treat the glass substrate G before applying the resist solution. A cooling device 21 for cooling is arranged below the adhesive device 20. In addition, two superimposed heating devices 22 are arranged in two rows in each side of the adhesive device 20 and the cooling device 21. On the opposite side of the holding conveyance path 1 1, a resist coating device 2 3 is arranged on the surface of the glass substrate G. The resist is applied on the surface of the glass substrate G to form a paper. National Standard (Ci ^ S) A4 Specification (210 X 297 mm) -12-'471008 A7 B7 V. Description of the Invention 〇) Form a protective film. Not shown, but on the side of these coating devices 23, a protective film formed on the glass substrate G with an exposure device is provided for exposure: a predetermined fine model. ‘Each of the above processing devices 16 to 18 and 20 to 23 is arranged on both sides of the conveyance paths 10 and 11 with the loading and unloading entrances of the glass substrate G facing inward. The first conveying device 25 is placed between the loading and unloading section, each of the processing devices 16 to 18, and the transfer section 12 for moving the glass substrate G on the conveying path 10, and the second conveying device 2 6 A transfer path 11 is formed between the transfer section 12 and each of the processing devices 20 to 23 for transporting the glass substrate G. Next, as the first conveying device 25 and the second device 26, the specific structure of the substrate conveying device 40 according to the first aspect of the present invention will be described. Fig. 2 is a perspective view showing the structure of the substrate transfer device 40, and Fig. 3 is a plan view showing the internal structure. The substrate conveying device 40 has a conveying direction moving body 41 that can be moved along the Y-direction (conveying direction) on the guide rails 35 to be set along the conveying paths 10 and 11. In this embodiment, the moving body 41 in the conveying direction is provided so as to straddle the guide rail 35, and is moved by a drive motor (not shown) provided inside. A rotating shaft 4 3 is provided above the moving body 41 in the conveying direction, and is rotatable in the 0 direction (horizontal direction) by a motor (not shown). The rotary shaft 43 is further provided in a vertical direction (Z direction) by a lifting portion (not shown) arranged in the moving direction moving body 41. On the upper part of the rotating shaft 4 3, the supporting member with the shape of [] is used. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm). (Please read the note on the back first? Matters before filling in this (Page) 丨 Installed -------- Order --------- Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-13- 471008 A7 -----_______________ B7 Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. The description of the invention (11) 4 4 is printed, and the open side is installed upward, and the storage box 50 is held between the side plate portions 4 4 a of the support member 4 4. Specifically, as shown in FIG. 3, a shaft member 4 4 c of a motor 4 4 b attached to the side plate portion 4 4 a is used to connect and support the storage box 50. With the drive of the motor 4 4 b and the shaft member 4 4 c as the center, the front part and the rear part of the storage box 50 can be tilted up and down, so that the rotating shaft 4 3 is rotated in the horizontal direction as required. Can be reduced. The inside of the storage box 50 is partitioned into two upper and lower chambers 51a and 51b by a partition plate 51 arranged slightly horizontally. Further, a substrate transfer member 60 is provided in each of the chambers 5 1 a and 5 1 b. The substrate transfer member 60 is movable in the X direction (as shown in FIG. 2, the direction in which the processing device is separated from the processing device). In short, as shown in the plan view of FIG. 3, the base 6 1 protrudes. 'Equipped with: a pair of long films 6 2, which are arranged at predetermined intervals near the center when viewed from a plane; and short films 63, which have intervals at each end of each long film 62. Pins 6 2 a and 6 3 a for adjustment are respectively provided at the front ends of the long side 6 2 and the short film 6 3, and the front edge of the glass substrate g is aligned by the pin member 6 2 a of the long side 6 2. The side edges of the glass substrate g are aligned by the pin member 6 3 a of the short side 63. The device for driving the substrate transfer member 60 in the X direction is not limited, but in this embodiment, as shown in FIG. 3 and FIG. 4, the side walls 52 of the storage box 50 are parallel to each other, and The inner walls 5 3 of each of the side walls 5 2 form cutouts 5 3a, and the cutouts 5 3 a are used to insert and protrude each side end of the base portion 61 of the substrate transfer member 60 from the side of the protrusion (please first Read the notes on the reverse side and fill out this page) This paper size applies to China National Standard (CNS) A4 (210x 297 mm) -14-471008 A7 B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ) The notch 5 3 a is connected to the sealing rod 64 by the arranged notch 5 3 a to prevent the invasion of ash, and the sealing rod 64 can be operated in the X direction for driving. As shown in FIG. 4, the sealing rod 6 4 is located outside the partition wall 5 3, and two pulleys 6 5 and 6 6 are arranged at predetermined intervals along the partition wall 5 3. It is connected by the connection member 6 8 ′ to drive the driving belt 6 7 between the two pulleys 6 5 and 6 and to operate the motor 6 9 so as to be capable of operating in the x direction. It has a reference number 6 7 a and is a guide rail of a connecting member 68 arranged below the drive belt 67. The drive mechanism shown in FIG. 4 is provided on both the left and right sides of the storage box 50 as shown in FIG. 3, and the substrate transfer member 6 0 disposed in the upper chamber 5 1 a is removed by one of them. Driven, the substrate transfer member 60 arranged in the lower chamber 5 1 b is driven by the other side. A ventilation mechanism 72 is provided at the rear portion of the storage box 50, and is provided with a film member 70 such as a HE PA film and a fan 71 attached to the rear portion of the film member 70. The air blowing mechanism 72 is used to drive the opening formed in the front face of the storage box 50 even if the structure is always opened, but the air flow toward the opening is formed from the rear, and the opening can be prevented through the opening. External dust penetrated into the storage box 50. However, as in the present embodiment, a partition wall 5 3 is provided. For example, an appropriate position in front of the partition wall (near the opening) is used to form a circulation hole 5 3 to circulate the air flow, and at the same time, each partition wall 5 3 A fan 7 3 for suction is provided between the rear side and the side wall 5 2. The circulation box 5 3 b and the gap 5 4 between each partition wall 5 3 and the side wall 5 2 can also be used for storing the inside of the storage box 5. The air is actively exhausted to the outside. In this case, of course, if you set ------- · --- r * t -------- order --------- line (please read the precautions on the back before filling in this Page) This paper size is in accordance with Chinese National Standard (CNS) A4 (21〇X 297 public love) -15- 471008 A7 _ B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (13) A fan is preferred, but such a fan is not provided. A discharge port may be provided on the side wall 52 or the like, and the airflow structure passing through the circulation hole 5 3 b of the partition wall 5 3 may be discharged to the outside. It is also preferable that a monitoring device be installed in the storage box 50 to monitor the inside. For example, as shown in FIG. 3, if a static monitor 55 and a static elimination device 56 are disposed inside the storage box 50, if the static monitor 5 5 is confirmed to generate static electricity, the static elimination device is immediately made. The 56 operation can be used to remove static electricity, so that the glass substrate G can be kept in a good condition in the storage box 50. At this time, in the present embodiment, since the glass substrate G is held in a so-called sealed space of the storage box 50, static electricity removal and the like can be effectively performed. Yes, as a monitoring device, in addition to an electrostatic monitor, a dust monitoring device can also be installed. Next, the operation of the substrate transfer apparatus 40 according to this embodiment will be described. First, the substrate conveying device 40 is moved along the conveying path 10 by the driving of the moving body 41 in the conveying direction, and is brought closer to the loading and unloading machine 4, the substrate transfer member 60 is advanced, and the storage box 50 The glass substrate G held by the loader and unloader is collected on the long piece 6 2 and the short piece 63 of the substrate transfer member 60 by being projected. Thereafter, the substrate transfer member 60 is retracted and stored in a storage box 50. However, at this time, the glass substrate G can be collected at both the upper and lower substrate transfer members 60. At this time, the fan of the air blowing mechanism 7 2 arranged at the rear of the storage box 50 is driven, and the storage box 50 is faced to the opening side of the storage box 50 (rear portion) ) Through this opening to be formed -------- * --- !. -Crack -------- Order --------- Line (Please read the precautions on the back before filling in this page) This paper size applies to China National Standard (CNS) A4 (210 x 297) (Mm) -16-471008 A7 _ B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of Invention (14) Air flow to the outside. Therefore, even if the opening of the storage box 50 is constantly opened by the handover of the substrate, dust floating outside the storage box 50 will hardly enter the storage box 50 during the movement. ‘For substrate transfer device 40, if glass substrate G is picked up’ is for the purpose of moving to the Y direction by driving the moving body 41 in the vicinity of the disposed processing device. Next, the rotary shaft 4 · 3 is rotated in a predetermined angle Θ direction, the opening of the storage box 50 is opposed to the processing device, and the rotary shaft 4 3 is moved in the up-down direction (Z direction) to be aligned with the storage device. The entrance and exit are opposite. In this state, the shutter of the storage device is opened and closed to open the shutter. For example, the motor 6 9 of the substrate transfer member 60 disposed in the side chamber 5 1 below the storage box 50 is operated to drive the drive belt. 6 7. Transfer the substrate to the member to advance to the X direction. Further, the processing unit in the processing apparatus, for example, transfers the glass substrate G on a rotary chuck or a support pin. If the predetermined processing is finished in the processing section, the opening and closing entrance of the processing device is opened and closed again, and the shutter is opened to advance the substrate transfer member 60 disposed in the side chamber 5 1 b under the storage box 50 and advanced by the processing. The glass substrate G is collected on the long piece 6 2 and the short piece 63 of the substrate transfer member 60. Next, the substrate transfer member 60 is retracted and stored in the side chamber 5 1 b below the storage box 50. Next, the substrate transfer member 60 arranged in the upper chamber 5 1 a of the storage box 50 is advanced, and the glass substrate G placed on the substrate transfer member 60 is processed in the same manner as described above. Yes, in the above description, the two substrates in the storage box 50 are moved (please read the precautions on the back before filling in this page) This paper size applies the Chinese National Standard (CNS) A4 (210 X 297 mm) 〉 -17- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 471008 A7 B7 V. Description of the invention (15) The cross member 60 keeps the untreated glass substrate G, but it is placed in the lower chamber 5 1 b. The substrate transfer member 60 is used to hold the unprocessed glass substrate G, and the substrate transfer member 60 arranged in the upper chamber 5 1 a can also be used to hold the processed glass substrate G. The above-mentioned structure is borrowed. Filter by filter 70 and fan 7.  The air supply mechanism 72 formed by 1 has a structure that prevents the intrusion of dust from the opening of the storage box 50 that is always open. However, instead of the air supply mechanism 72, a pressure control mechanism (not shown) is provided inside the storage box 50. The structure is set to always positive pressure to prevent external dust from entering. It should be noted that the above-mentioned air supply mechanism 72 is configured to supply air to the outside from the storage box 50, and thus, the inside of the storage box 50 also forms a positive pressure. That is, the air blowing mechanism 72 also functions substantially as a pressure control mechanism. In the above description, the opening portion formed on the front surface of the storage box 50 is a constant opening. However, a switchable cover member 58 may be provided in the opening portion. The structure of the cover member 58 is not limited. However, for example, as shown in FIG. 5, a handle portion 5 8c is formed near the center, and a button 58d is provided around the handle portion 58c to further interlock with the button. The pressing operation of 5 8 d is protruded or immersed from the side portion. The engaging protrusions 5 8 a and 5 8 b can be used to engage the side wall 5 2 of the storage box 50. Also, in this case, as a device for pressing the button 5 8 d ′, for example, a recess provided at the shutter provided at the entrance of the processing device may be used to receive the handle portion 5 8 c, and the protrusion is projected at The recess is placed inside, and the handle 5 8 c is fitted into the recess, and the button 5 8 d is pressed by the protruding piece, and the engagement of the engagement protrusions 5 8 a, 5 8 b is released. . This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -18- -------------- -Packing --------- Order- ------- Green (Please read the phonetic notes on the back before filling out this page) 471008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (16) If the engagement is raised 5 8 a , When the engagement of 5 8 b is released, the cover member 5 8 is stored in any part of the processing device together with the shutter, and the glass substrate G is transferred. Of course, a mechanism for opening and closing the cover member 58 may be provided in the storage box 50 itself. In the case where the cover member 58 is provided, it is the case where the glass substrate G is transported without dust from entering through the opening. Therefore, it may be configured that the above-mentioned air blowing mechanism 72 or pressure control mechanism is not provided, but in this case, the air blowing mechanism 72 and the like are also provided at the rear of the storage box 50, etc., and the cover member 58 is opened and processed. When the glass substrate G is transferred between the mechanisms, dust should not be intruded, and only when the glass substrate G is transferred, it is preferable that the structure can send air. Further, the above-mentioned structure is provided with a partition plate 51 in the storage box 50 and a plurality of rooms 5 1 a and 5 lb spaced apart, and a substrate transfer member 60 is provided in each structure, but the partition plate 51 is not provided. Of course, it can also be comprised so that only one board | substrate transfer member 60 may be provided. Furthermore, the storage box 50, which is provided with one substrate transfer member 60, can also be stacked in multiple stages. Next, another embodiment of the present invention will be described with reference to Figs. 6 and 7. The substrate conveying device 80 of this embodiment is different from the substrate conveying device 40 of the above-mentioned embodiment, and does not include a storage box 50, and has a substrate transfer member 8 3 for the moving body 8 in the conveying direction. The rotation axis 8 2 is directly supported. In other words, the rotary shaft 82 is configured to be movable up and down, and the substrate transfer member 82 can be aligned with the loading / unloading entrance of the processing device in the same manner as in the above embodiment. The substrate transfer member 8 3 may be one type of the substrate placing portion, but in this embodiment, the substrate placing portion 8 3 a is provided in two stages. And -------- I --- 1 --------- Order ----- I!-(Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS) A4 specification (210 X 297 mm) -19- 471008 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (17) 'The shape of the substrate transfer member 83 is not limited, but for example Similar to the above-mentioned embodiment, when viewed from a plane, there is a long film near the center, and a shape including a short film can be adopted near both ends. 'In this embodiment, as shown in FIG. 6 and FIG. 7, the dust removal device 8 4 is configured to include a substrate 8 4 a connected to the rotation shaft 8 2 and a pillar member 8 4 b to be erected The substrate 8 4 a is the fourth one; the filter 8 4 c is a HEPA film or the like supported on the upper part of the pillar member 8 4 b; and the fan 84d is disposed on the upper part of the filter 84 c. In other words, only the surroundings of the substrate transfer member 83 for holding the glass substrate G are cleaned. According to this embodiment, the fan 8 4 d for driving the dust removing device 8 4 allows the external air to pass through the filter 8 4 c so that the dust is sucked in, and after being cleaned, the dust is held on the substrate transfer member. The glass substrate G of 8 3 makes contact. Therefore, it is possible to prevent dust from adhering to the glass substrate G without cleaning the entire substrate transfer area. In this embodiment, a dust removal device 8 4 is provided above the substrate transfer member 8 3, and the periphery of the substrate transfer member 8 3 is opened, but it can also be used as the dust removal device 8 4. The structure having a wall portion can cover the periphery of the substrate transfer member 83. However, in this case, the wall portion or one of the substrates 8 4 a is provided with an air flow discharge port. Further, in this embodiment, as in the above embodiment, a monitoring device such as an electrostatic monitor or a static electricity removing device may be attached to the lower part of the dust removing device 84 or the like. (Please read the phonetic on the back? Matters before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -20-471008 A7 —___ B7 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Production system 5. Description of the invention (18) It is not limited to this, as shown in FIG. 8, for example, a monitor or static electricity monitor of a glass substrate G carrying cycle is provided near the carrying in and out of each processing device A to D At the same time, a dust monitor can be installed at a suitable position b in the conveying path 10 and 1. Moreover, the processing device A to D will be provided in and out of the vicinity a, the appropriate position b in the conveying section 10, 11 and the appropriate position c of the substrate transfer device 40, 80. Each monitoring device is connected to the network, and the status is often monitored by a computer 90. If necessary, each processing device A to D is automatically controlled, and the entire conveying line can be maintained at an appropriate level for the glass substrate G. The environment also helps improve processing efficiency. Next, a description will be given of a first modification of the air blowing mechanism 72 shown in FIG. 9. As a monitoring device provided in the storage box 50 of FIG. 3, a static elimination device 5 6 is provided. The fan 7 1 of the air blowing mechanism removes the air blown toward the opening, thereby preventing dust from adhering to the glass substrate G. However, as in the first modified example, a ventilation control unit 100 and a wind speed sensor 101 are provided in the storage box 50, so that it can also be configured to control the ventilation mechanism 72. That is, a wind speed sensor 1 0 1 is provided at a suitable position on the top surface of the storage box 50 and the like to detect the wind speed of the intake air flow by the fan 71. In addition, the wind speed sensor 101 makes the voltage 根据 based on the detected signal to be compared with the air supply control section 100 to determine whether it is smaller than the required threshold 値. If the voltage 値 is judged to be smaller than the threshold ，, the filter 70 will know that the screen is blocked due to dust, so that the drive signal of the number of rotations of the fan 71 based on the detected voltage 由 will be output by the air supply control unit 100 The fan 71 is controlled to increase the number of rotations. In this case, the number of rotations of the fan 7 1 is performed ------------ 1 '; installed -------- order --------- line (please Please read the notes on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) -21-471008 A7 ---- B7 V. Description of the invention (19) When it is large, the warning light is turned on, and a sound is emitted to activate the alarm device _102 and inform the operator of the exchange of the filter 70. : The first modification is based on this configuration. Even if the filter 70 is clogged to reduce the air supply volume, the air supply control unit 100 can automatically increase the number of rotations of the fan 71, and it will be blown out to the container. The air volume of the box 50 is always fixed, and it can maintain a uniform flowing airflow, which is only helpful to prevent the adhesion of dust. In addition, in order to activate the alarm device 102, it is extremely convenient for the operator to change the filter 70. Next, the second modified example is shown in Fig. 9 and its structure is connected to the air supply control unit 100 to connect the opposite state detection device 103. The opposite state detection device 103 is a state in which the storage box 50 is formed between the storage box 50 and the processing device to hand over the glass substrate G, and a signal for detecting the state is input to the air supply control section 100. By this, the air supply control unit 100 is used to output a control signal to reduce the number of rotations of the fan 71. In addition, for the suction fan 7 3, a rotation number change control signal is output. Therefore, according to the second modified example, when the storage box 50 and the processing device are faced by the facing state detection device 103 to detect the transfer state of the glass substrate G, the rotation system of the fan 71 becomes weak, and The rotation system of the suction fan 73 is controlled to become stronger. Therefore, when the glass substrate G is handed over, the opening of the storage box 50 can reduce the amount of air flowing into the loading / unloading entrance of the processing apparatus, thereby reducing the adhesion of dust. Next, in the third modification shown in FIG. 10, a corrugation 1 1 2 is provided on the periphery of the opening 1 1 1 of the storage box 1 10 to deform and shrink freely, so that the opening 1 1 1 faces the processing device 1 1 3 of the entrance and exit This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm> -22-(Please read the note on the back ^ matters before filling out this page) -Packing ------- -Order --------- line 'Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy 471008 A7 ____ B7 V. Description of the invention (2〇) 1 1 4 When the glass substrate G is handed over, the corrugations 1 1 2 are closely adhered to the carrying-out entrance 1 1 1.: According to the third modification example, even if there is between the storage box 1 1 0 and the 'processing device 1 1 3' There are various gaps, but in order to make the corrugation 1 1 2 completely close to the exit 1 1 4, the gap can prevent dust from being mixed into the processing device. Of course, the corrugation 1 1 2 is installed on the side of the processing device. Next, the fourth modification shown in FIG. 11 will be described. A suction fan 1 2 1 is provided on the top of the storage box 1 2 0. And filter components. 1 2 2, and a suction fan 1 2 3 is provided on the back side opposite to the opening. In addition, the 1 2 4 cover member is provided in the opening 12 2 with a free switch, and the storage box 120 is closed between movements, and is opened when the glass substrate G is handed over to the processing device. According to the fourth modification of this configuration, when the glass substrate G is transported, the cover member 1 2 4 is closed, and the air is blown down by the suction fan 1 2 1. After the air flowed in the direction of the arrow 120 of the storage box, it was discharged to the outside through the suction fan 1 2 3. Therefore, it can be used to transport the glass substrate G while avoiding the adhesion of ash. Yes, instead of the cover member 1 2 4, an air curtain method can be used to prevent the intrusion of dust. Further, in the fourth modification, a static eliminator 1 2 5 may be provided below the top of the storage box 120. As a result, static electricity can be removed, and a good sealed space can be secured for the glass substrate G in the storage box 120. Secondly, the fifth modification shown in Figure 12 is the coating and handling system. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -23- n FI n ^ n.   nf— n «^ 1 nnn Order --------- line—I (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 471008 A7 ---_________ B7 5 2. Description of the Invention (21) When the storage box 130 is used to transport the glass substrate G in the system, the back surface is configured to be moved in the forward direction. For example, after the glass substrate G: has been handed over by the cleaning device 16 and the storage box 130 is moved to the heating device 18 via the dotted line, the rear surface of the storage box 130 is moved toward the direction. On the other hand, when moving to the front of the heating device 18, the storage box 130 is converted into a predetermined direction, and the opening of the storage box 130 may be configured to rotate opposite to the entrance of the heating device 18. According to this fifth modification, it is advantageous to make the opening of the storage box 130 not facing the direction of progress, and to make the rotary movement be able to face the back surface, so that the dust can be reduced into the room where the storage box 130 is located. . Next, a sixth modification example shown in FIG. 13 will be described. The handover conveying device 1 40 installed in the handover section 12 is a device for relaying the glass substrate G between the first conveying device 25 and the second conveying device 26 for moving the conveyance path 10 to each other. . Openings 141 and 142 are provided on both sides to advance and retreat the substrate transfer members 60 and the like (FIG. 4) of each of the transport devices 25 and 26. An air curtain device 1 4 3, 1 4 4 is provided above the openings 1 4 1 and 1 4 2 to blow air downward. A mounting table 1 4 5 is provided inside, and a freely visible pin 1 4 5 is formed to support the glass substrate G. On the top of the transfer and handling device 140, a fan air supply mechanism is provided, which is composed of a filter member 1 47 and a suction fan 1 4 8. The sixth modification of the above-mentioned configuration 'is such that the air flowing into the delivery device 1 40 by the suction fan 14 8 is formed in the direction of the arrow flowing around the glass platen G. Therefore, 'in the handover handling device 1 4 0', this paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) -24----------- I --- »- ------ Order · ----- * Line (please read the notes on the back before filling this page) 471008 A7 ______ B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The invasion of dust is blocked by the air curtain device 1 4 3, 1 4 4 from the outside, and the air is strongly blown by the suction fan 1 4 8 on the glass substrate G, so that dust adhesion can be suppressed. "Next" The seventh modification shown in Fig. 14 will be described. The structure of the embodiment in FIG. 3 described above is that the air in the mobile storage box 50 is exhausted to the outside through the gap 54 and the suction fan 7 3 provided on the back, but this example replaces this as shown in FIG. 14 A suction fan 151 is mounted on the ceiling near the back of the storage box 150. According to the seventh modification, the air passing through the gap 15 2 formed on the side of the storage box 15 0 is discharged from the top as indicated by the arrow 15 3. Therefore, the treatment device existing on the back can be avoided. The air was blowing.尙 Yes On the contrary, the suction fan 151 is installed below the storage box 150, and the air may be exhausted from below. Further, as shown in FIG. 15, a deflector plate 15 may be provided at a position opposite to a suction fan (not shown) provided on the back surface. As a result, the air is deflected by the deflection plate 155, so the processing device on the back of the storage box 150 can directly avoid being blown by the air. Next, an eighth modified example shown in FIG. 16 will be described. The structure of the embodiment of FIG. 4 is such that the substrate transfer member 60 is rubbed and supported along the guide rail 6 7 a, and the driving force of the motor 6 9 is driven by the winding transmission mechanism composed of the driving belt 67 and the pulleys 6 5 and 6 6. It is transmitted to the substrate transfer member 6 0 ′. In this example, instead of the structure shown in FIG. 16, the substrate transfer member 16 0 is directly operated using the horizontal multi-joint mechanism 16 1. The horizontal multi-joint mechanism 1 6 1 series has, for example, a first handle 16 2 and a second handle 1 6 3, and the first handle 16 2 is on the second handle 1 6 3 through the first axis. This paper is applicable to the paper scale. ; National Standard (CNS) A4 specification (210 X 297 mm): 25: a ----'-------- installed -------- order -------- -Line ', (Please read the notes on the back first * Fill this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 471008 A7 __________ B7 V. Description of the invention (23) 1 6 4 Supported by a shaft, second handle 1 6 The 3 series is supported by the second axis 1 6 5 axis. In addition, the first handle 16 2 is a shaft supporting member 16 which is freely rotated by a third shaft 1 6 6. Each of the handles 16 2, 1 6 3 and the substrate transfer member 16 0 is rotated using unillustrated motors provided on the first, second, and third shafts 16 4, 1 6 5, and 16. According to the eighth modification example, a multi-joint mechanism 16 is used, and the substrate transfer member 16 can be moved in the direction of the arrow 167 in the space of the container. Therefore, unlike having a friction part such as a slider mechanism in the storage box, only for sealing around the motor, it is possible to simply prevent dust from escaping into the space in the storage box. Therefore, the present eighth modification can reduce the area where the seal is applied, and it can be completed, so that the point where dust is generated can be reduced to form an advantageous effect. A ninth modification example shown in FIGS. 17 and 18 will be described. The opening portion of the storage box 50 shown in FIG. 2 is not provided with a cover member, but the ninth modification is shown in FIG. 17 at the middle height of the opening portion of the storage box 170 A cover member 1 7 2 is provided to switch around the pin 1 7 1. Therefore, when the storage box 170 is used to store the glass substrate G for transportation, the cover member 17 is closed and transported as shown in FIG. 17. When transferring to the processing device, as shown in FIG. 18, the cover member is opened horizontally to one of the upper and lower chambers, and the glass substrate G can be moved in and out without any hindrance. Therefore, in the ninth modification, even when the storage box 1 is moved, 'the opening of the storage box 170 is closed by the cover member 17', so that the ash can be well prevented in the storage box. Trespass.尙 有 ’cover member 1 7 3 is formed on the pin 1 I I I as shown in FIG. 19. . ϊ III 1 II, > — — — — — — 5J «— — — — 111 — — / V (Please read the note on the back 咅 S before filling out this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -26- 471008 A7 B7 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (24) A cover member 1 7 5 can be opened and closed around it. Furthermore, in the above-mentioned embodiment, the cleaning device 16 and the developing device 7 'processing devices such as heating devices 18, 22' are not provided with any shielding members, but as shown in FIG. For example, a configuration in which an air curtain device 设有 81 is provided at the exit of the transfer port of the processing device 180 is possible. With this, even when the storage box 1 8 3 _ faces the entrance of the processing device 1 80 0, the air curtain device 丨 8 1 is used to shield the entrance and exit from the outside, so the storage box 1 8 3 can prevent inadvertent air Invasion. Also, as shown in FIG. 21, instead of the air curtain device 1 8 1 being installed in the up-down direction, a shutter device 1 8 4 that can be opened and closed can also be provided. In the embodiment described above, the device in which the substrate transfer member 60 is driven in the X direction is exemplified in Fig. 3, but it may be modified as shown in Fig. 22. That is, the endless sealing belt 2 2 1 is disposed in the gap 54 to cover the cutout 53a provided in the partition wall 53. Furthermore, one side of the sealing belt 221 is connected to the driving belt 6 7 through a connecting member 2 2 2, and the other side of the sealing belt 221 is connected to a substrate transfer member 6 0 through a connecting member 2 2 3. Of the base 6 1. Therefore, when the driving belt 67 is driven, the substrate transfer member 6 0 is formed to be driven in the X direction by the sealing belt 2 2 1. In this embodiment, since the sealing belt 2 2 1 is specifically covered with the cutout 5 3 a, the gap 5 4 allows less dust to flow to the substrate transfer member 60 side. It should be noted that the substrate to be transferred by the substrate transfer device of the present invention is not only the above-mentioned glass substrate G for L C D, but of course it is also applicable to the present invention for substrates such as semiconductor wafers. Furthermore, the above-mentioned coating • display ------------------- order · -------- line (Please read the precautions on the back before filling. (This page) This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) -27- 471008 A7 --_ B7 Printed by the Consumers ’Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (25) Image processing The combination of the system's processing devices is only an example. Of course, the present invention is also effective in a line where CVD '| insect engraving device, ash exhauster, etc. are configured. It is installed in the storage box, and at the same time, it is in a posture facing the exit port of the processing device, and the substrate is separated from the exit port by a movable substrate transfer member to hold the substrate. Therefore, it is not necessary to carry out the processing environment of the substrate transfer area, and the cost of forming the processing environment can be greatly reduced. The substrate transfer device of the present invention described in the second item of the scope of the patent application is a substrate transfer unit provided with a plurality of substrate mounting sections in a storage box. Therefore, multiple substrates can be transported at the same time, which is suitable for continuous processing of substrates. The substrate conveying device of the present invention described in the third item of the scope of the patent application is a structure in which the storage boxes are stacked in a plurality of stages, and the aforementioned substrate transfer members are provided on each of the storage boxes. Therefore, multiple substrates can be transported at the same time, which is suitable for continuous processing of substrates. The substrate conveying device of the present invention described in item 4 of the scope of the patent application is configured to divide the storage box into a plurality of rooms through a partition disposed slightly horizontally, and the substrate transfer member is provided in each divided room. . Therefore, multiple substrates can be transported at the same time, which is suitable for continuous processing of substrates. The substrate conveying device of the present invention described in claim 5 of the scope of patent application is provided with a cover member that can be opened and closed in an opening portion formed in the storage box. Therefore, if the cover member is opened and closed only when the substrate is handed over to the processing device, external dust will not enter the storage box during the movement. This paper size is in accordance with Chinese National Standard (ch) A4 (210 X 297 mm). 28-(Please read the precautions on the back before filling out this page) 471008 A7 B7 Printed by the Consumers' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (26) The substrate handling device of the present invention described in item 6 of the scope of patent application The opening portion formed in the storage box is configured to be always open, and a pressure control mechanism is provided inside the storage box in order to maintain a positive pressure. Therefore, the transfer of the substrate allows the openings to be constantly open, so that dust floating outside the storage box does not enter the storage box. In addition, the opening of the substrate is always performed by handing over the substrate, because the opening portion is not provided with a switch mechanism to open and close the opening, and the substrate can be quickly handed over. The substrate conveying device of the present invention described in item 7 of the scope of patent application has a structure in which an opening portion formed in a storage box is constantly opened, and air is provided through a surface side of the opening portion facing the storage box. The mechanism is used to form an air flow to the outside. Therefore, the handover of the substrate allows the openings to remain open at all times, and does not allow ash that floats outside the storage box to enter the storage box. In addition, the transfer of the substrate keeps the opening portion open. Because no switch mechanism is provided to open and close the opening portion, the transfer of the substrate can be performed quickly. The substrate conveying device of the present invention described in item 8 of the scope of patent application is provided with a monitoring device for monitoring the state in the storage box. Therefore, it is easy to maintain a favorable environment for the substrate in the state of the container. In particular, since the substrate is held in a closed space by the storage box, it can be easily controlled in a good environment. The substrate transfer device of the present invention described in item 9 of the scope of the patent application is equipped with a dust removal device and a filter for vacuuming, and is arranged near the substrate transfer member. Therefore, the air held around the substrate of the substrate transfer member is cleaned by this filter, so the substrate (please read the note on the back? Matters before filling out this page}

~ III 線· 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -29 - 471008 A7 __ B7 經濟部智慧財產局員工消費合作杜印製 五、發明說明（27 ) · 周圍可經常維持於低灰麈環境。因此，將基板之搬運區域 全體不要進行淸理環境，可大幅度削減淸理環境之形成成 本。 . 申請專利範圍第1 〇項所記載之本發明的基板搬運裝 置，係使用以構成前述灰塵除去裝置之過濾器，因爲設於 前述基板移交構件之上方，所以可有效除去浮遊之灰塵。. 申請專利範圍第1 1項所記載之基板搬運裝置，係使 前述灰塵除去裝置，因爲具有壁部可用以覆蓋前述基板移 交構件之周圍，所以由外部侵入之灰麈變少，由基板周圍 可用以形成高淸淨環境。 申請專利範圍第1 2項所記載之基板搬運裝置，係設 有基板移交構件具備有複數段之基板載置部。因此，可將 複數之基板同時進行搬送，適合於基板之連續處理。 申請專利範圍第1 3項所記載之基板搬運裝置，係因 爲其構成具有：風速感應器，將監視裝置設於收容箱；及 送風控制部，用以作動控制送風機構之風扇，所以用以撿 測風速感應器使過濾器進行篩眼堵塞降低送風壓力，此據 藉由送風控制部將風扇之旋轉變大進行控制，能將風量維 持於形成最適量，並在收容箱內係將穩定的氣流送風到基 板移交構件，所以對玻璃基板用以回避灰塵之附著可有效 達成最適當的作業環境。 申請專利範圍第1 4項所記載之基板搬運裝置，係在 過濾器產生篩眼堵塞時，因爲將用以發出警報之警報裝置 設於送風控制部，警覺性的通知過濾器之篩眼堵塞。可有 (請先閱讀背面之注咅心事項再填寫本頁) 本紙張尺度適用令國國家標準（CNS)A4規格（210 X 297公釐） -30- 471008 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（28 ) - 效達成的確便利的進行過濾器交換或掃除。 申請專利範圍第1 5項所記載之基板搬運裝置，係使 收容箱之開口部對峙於前述處理裝置之搬出入口的姿勢時 ，因爲設有對面狀態檢測裝置藉由送風控制部利用送風機 構之風扇減少送風量，由收容箱在無準備通過處理裝置之 搬出入口使多餘的空氣不會流入，僅此可有效達成有利於 防止灰麈附著在玻璃基板。 申請專利範圍第1 6項所記載之基扳搬運裝置，係在 收容箱之開口部周緣，設有伸縮構件用以覆蓋前述處理裝 置之搬出入口，所以使玻璃基板被移交時，在收容箱及處 理裝置之間即使有任何間隙，但藉由伸縮構件使玻璃基板 由周圍被遮斷，可有效達成有利於防止灰塵附著。 申請專利範圍第1 7項所記載之基板搬運裝置，係在 收容箱之頂部設有送風機構，由該頂部朝向下方吹出空氣 所構成，朝向開口部不流動空氣。因此面對於處理裝置時 ，由收容箱使空氣流入到處理裝置內的量可減低，可有效 達成有利於防止灰塵附著。 申請專利範圍第1 8項所記載之基板搬運裝置，係使 收容箱沿著搬運路進行移動時，朝向與收容箱之開口部用 以移動對置之面的方向使移動所構成，所以將收容箱之開 口部不朝向進行方向，朝向對置之面移動，即朝向移動背 面之方向進行移動。因此，可有效達成抑制灰塵進入到收 容箱內。 申請專利範圍第1 9項所記載之基板搬運裝置’係因 -------Γ-----------訂 *-----II -線‘ - (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -31 - 471008 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（29 ) 爲將基板移交構件藉由水平多關節機構可移動所構成，所 以與使用捲繞傳動機構或擦動機構等不同’使產生灰塵之 機械的構成部位變少，僅此在收容箱空間可有效達成抑制 灰塵產生。 【圖式之簡單說明】 圖1係顯示本發明之處理系統的實施形態之斜視圖。 圖2係顯示本發明之基板搬運裝置之一'貫施形態的斜 視圖。 圖3係顯示有關上述實施形態之基板搬運裝置的內部 構造平面圖。 圖4係顯示用以說明有關上述實施形態之基板搬運裝 置的驅動裝置之重要部分圖。 圖5係顯示設於收容箱之蓋構件的構成圖。 圖6係顯示本發明之基板搬運裝置其他實施形態模式 的側視圖。 圖7係顯示有關上述實施形態之基板搬運裝置模式的 前視圖。 圖8係爲了用以說明基板搬運區域中用以檢測各種狀 態之監視系統的模式圖。 圖9係顯示有關上述之一實施形態第1變形例及第2 變形例中的基板搬運裝置之內部構造平面圖。 圖1 0係同第3變形例中由側面觀看收容箱之剖面圖 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -32 - 1 I I I I I L — I 1*1 I · I I 1 C請先閱讀背面Μ涑意事頊存瑱窩本 *tr---------终 471008 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（30 ) * 圖1 1係第4變形例中之收容箱的側視圖。 圖1 2係顯示第5變形例中之收容箱的移動平面圖。 圖1 3係第6變形例中之移交裝置的剖面圖。 圖1 4係第7變形例中之收容箱的斜視圖。 Η 1 5係第7變形例進而另外變形例中之收容箱的斜 視圖。 . 圖1 6係第8變形例中之基板移交構件的斜視圖。 圖1 7係顯示有關第9變形例中之收容箱，關閉蓋構 件之狀態卞的斜視圖。 圖1 8係有關第9變形例，打開蓋構件之狀態下的斜 視圖。 圖1 9係第9變形例進而另外變形例中之收容箱的斜 視圖。 圖2 0係第1 〇變形例中之處理裝置的剖面圖。 圖2 1係第1 0變形例進而另外處理裝置的剖面圖。 圖2 2係顯示收容箱之進而另外實施形態圖， 【元件編號之說明】 40 基板搬運裝置 4 3 旋轉軸 5 0 收容箱 5 1 間隔板 5 1a 室 5 1b 室 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -33 - (請先閱讀背面之注意事項再填寫本頁)~ Line III · This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) -29-471008 A7 __ B7 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Consumption Du V. Invention Description (27) · Around It can often be maintained in a low gray scale environment. Therefore, it is possible to reduce the formation cost of the processing environment by eliminating the entire processing area of the substrate. The substrate conveying device of the present invention described in the scope of patent application No. 10 is a filter used to constitute the aforementioned dust removing device. Since it is provided above the aforementioned substrate transfer member, floating dust can be effectively removed. . The substrate conveying device described in item 11 of the scope of the patent application is the dust removal device, because the wall can be used to cover the periphery of the substrate transfer member. Therefore, the amount of dust from the outside can be reduced, and it can be used from the periphery of the substrate. In order to form a high net clean environment. The substrate transfer device described in item 12 of the scope of the patent application is provided with a substrate transfer member having a plurality of substrate mounting portions. Therefore, a plurality of substrates can be transported simultaneously, which is suitable for continuous processing of substrates. The substrate conveying device described in item 13 of the scope of the patent application has a structure including: a wind speed sensor, and a monitoring device is installed in a storage box; and an air supply control unit is used to control the fan of the air supply mechanism, so it is used to pick up The wind speed sensor enables the filter to block the mesh and reduce the air pressure. Based on the fan control, the fan rotation is increased to control the air volume. The air volume can be maintained at an optimal level and a stable air flow can be maintained in the storage box. Air is sent to the substrate transfer member, so the most suitable working environment can be effectively achieved by avoiding the adhesion of the glass substrate to the dust. The substrate conveying device described in item 14 of the scope of the patent application is an alarm device for sending an alarm to the air control unit when the filter screen is clogged. Yes (please read the note on the back before filling this page) This paper size is applicable to the national standard (CNS) A4 specification (210 X 297 mm) -30- 471008 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs System A7 B7 V. Description of the invention (28)-It is really convenient to perform filter exchange or cleaning. When the substrate conveying device described in Item 15 of the scope of the patent application faces the attitude of the opening of the storage box facing the loading and unloading entrance of the processing device, the opposite state detection device is provided with the fan of the air blowing mechanism through the air blowing control unit. Reduce the amount of air supply. The storage box can prevent excess air from flowing in when it is not ready to pass through the entrance of the processing device. This can effectively prevent the dust from adhering to the glass substrate. The base plate conveying device described in item 16 of the scope of the patent application is provided on the periphery of the opening of the storage box, and is provided with a telescopic member to cover the entrance and exit of the processing device. Even if there is any gap between the processing devices, the glass substrate is blocked from the surroundings by the telescopic member, which can effectively prevent the adhesion of dust. The substrate conveying device described in item 17 of the scope of the patent application is provided with an air blowing mechanism on the top of the storage box, and the air is blown downward from the top, and no air flows toward the opening. Therefore, when facing the processing device, the amount of air flowing into the processing device from the storage box can be reduced, which can effectively prevent the adhesion of dust. The substrate conveying device described in item 18 of the scope of the patent application is configured to move the storage box toward the opening facing the opening of the storage box when the storage box is moved along the conveying path. The opening of the box does not move toward the direction of progress, but moves toward the opposite surface, that is, moves toward the direction of moving the back surface. Therefore, it is possible to effectively prevent dust from entering the container. The substrate handling device described in item 19 of the scope of the patent application is 'cause ------- Γ ----------- order * ----- II-line'-(please first Read the notes on the reverse side and fill in this page) This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) -31-471008 Printed by A7 B7, Employee Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs 29) In order to make the substrate transfer member moveable by a horizontal multi-joint mechanism, it is different from the use of a winding drive mechanism or a wiper mechanism to reduce the number of structural parts of the machine that generates dust. Effectively achieve the suppression of dust generation. [Brief Description of the Drawings] FIG. 1 is a perspective view showing an embodiment of the processing system of the present invention. Fig. 2 is a perspective view showing an embodiment of a substrate transfer apparatus according to the present invention. Fig. 3 is a plan view showing the internal structure of the substrate transfer apparatus according to the embodiment. Fig. 4 is a diagram showing an important part of a driving device for explaining the substrate conveying device according to the above embodiment. FIG. 5 is a configuration diagram showing a cover member provided in the storage box. Fig. 6 is a side view showing another embodiment mode of the substrate transfer apparatus of the present invention. Fig. 7 is a front view showing the pattern of the substrate transfer apparatus according to the embodiment. Fig. 8 is a schematic diagram for explaining a monitoring system for detecting various states in a substrate transfer area. FIG. 9 is a plan view showing the internal structure of a substrate transfer apparatus according to a first modification and a second modification of the above-mentioned embodiment. Figure 10 is a cross-sectional view of the storage box viewed from the side in the third modification. The paper dimensions are applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) -32-1 IIIIIL — I 1 * 1 I · II 1 C Please read the back of the book. The truncated copy * tr --------- end 471008 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (30) * Figure 1 1 is a side view of the storage box in the fourth modification. Fig. 12 is a plan view showing the movement of the storage box in the fifth modification. FIG. 13 is a sectional view of a transfer device in a sixth modification. FIG. 14 is a perspective view of a storage box in a seventh modification. Η 15 is a perspective view of the storage box in the seventh modification and the other modification. Fig. 16 is a perspective view of a substrate transfer member in the 8th modification. Fig. 17 is a perspective view showing a state of the storage case with the lid member closed in the ninth modification. Fig. 18 is a perspective view showing a ninth modification in a state where the cover member is opened. Fig. 19 is a perspective view of a storage box according to a ninth modification and yet another modification. FIG. 20 is a cross-sectional view of the processing apparatus in the 10th modification. FIG. 21 is a cross-sectional view of a 10th modification and another processing apparatus. Figure 2 shows another embodiment of the storage box. [Description of the component number] 40 Substrate carrying device 4 3 Rotary shaft 5 0 Storage box 5 1 Spacer 5 1a Room 5 1b Room This paper is in accordance with Chinese national standards ( CNS) A4 size (210 X 297 mm) -33-(Please read the precautions on the back before filling this page)

丨裝--------訂---------M 471008 A7 B7 五、發明說明（31丨 Install -------- Order --------- M 471008 A7 B7 V. Description of the invention (31

8 4 G 蓋構件 基板移交構件 送風機構 基板搬運裝置 旋轉軸 基板移交構件 基板載置台 灰塵除去裝置 玻璃基板 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -34 -8 4 G Cover member Substrate transfer member Air supply mechanism Substrate conveying device Rotary shaft Substrate transfer member Substrate mounting table Dust removal device Glass substrate (Please read the precautions on the back before filling this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Consumption Cooperative Paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -34-

Claims (1)

471008 經濟部智慧財產局員工消費合作社印製 A8 B8 C8 D8 _____六、申請專利範圍 - 1 · 一種基板搬運裝置，其特徵爲具備有： 搬運方向移動體，沿著搬運路可移動； 收容箱，對前述搬運方向移動體通過可水平旋轉之旋 轉軸被支持；及 基板移交構件，被設於前述收容箱內，同時對峙於處 理裝置之搬出入口的姿勢下可移動於離接·在該搬出入口的 方向，通過被形成於該收容箱之開口部並對處理裝置，可 用以移交保持的基板。 2 .如申請專利範圍第1項所記載之基板搬運裝置’ 係在前述收容箱內，設有基板移交構件具備複數段之基板 載置部者。 3 .如申請專利範圍第1或2項所記載之基板搬運裝 置，其中前述收容箱係被層疊設置成複數段，並分別被設 有前述基板移交構件者。 4，如申請專利範圍第1或2項所記載之基板搬運裝 置，其中前述收容箱係通過被配置成略呈水平之間隔板並 被區分成複數室，並使前述基板移交構件，被設於被區分 之各室者。 5 ·如申請專利範圍第1或2項所記載之基板搬運裝 置，係在被形成於前述收容箱之開口部被設有的蓋 構件者。 6 .如申請專利範圍第1或2項所記載之基板搬運裝 置，其中被形成於前述收容箱之開口部係具有常時開口之 構造，同時具備有構爲了將該收容箱內部保持 本:紙張尺度適用中國國^:標準（CNS ) A4規格（210X297公ϋ~. 35 - ~ (請先閲讀背面之注意事項再填寫本頁) 471008 經濟部智慧財/i局員工消費合作社印製 A8 B8 C8 __ D8六、申請專利範圍 - 於正壓者。 7 ·如申請專利範圍第丨或2項所記載之基板搬運裝 置，其中被形成於前述收容箱之開口部係具有常時開口之 構造，同時具備有送風機構由對置於該收容箱之開口部的 面側通過該開口部用以形成氣流流到外部者。 8 ·如申請專利範圍第1或2項所記·載之基板搬運裝 置，係設有監視裝置用以監視前述收容箱內之狀態者。 9 · 一種基板搬運裝置，其特徵爲具備有： 搬運方向移動體，沿著搬運路可移動； 基板移交構件，對前述搬運方向移動體通過可水平旋 轉之旋轉軸被支持，同時對峙於處理裝置之搬出入口的姿 勢下可移動於離接在該搬出入口的方向，對處理裝置，可 用以移交保持的基板；及 灰塵除去裝置，具備有吸塵用之過濾器被配置於前述 基板移交構件的近傍。； 1 0 ·如申請專利範圍第9項所記載之基板搬運裝置 ’其中用以構成前述灰塵除去裝置之過濾器，係被設於前 述基板移交構件之上方者。 1 1 .如申請專利範圍第9或1 〇項所記載之基板搬 運裝置’其中前述灰塵除去裝置，係具有壁部可用以覆蓋 前述基板移交構件之周圍者。 1 2 ·如申請專利範圍第9或1 0項所記載之基板搬 運裝置’其中前述基板移交構件，係具備有複數段之基板 載置部者。 _ (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -36- 471008 經濟部智慧財/!.局員工消費合作社印製 Α8 Β8 C8 D8 六、申請專利範圍 · 1 3 ·如申請專利範圍第8項所記載之基板搬運裝置 ，係構成具有：風速感應器，使監視裝置設於前述收容箱 ;及送風控制部，以該風:逮^£|1>藉由檢測之信號用以作 動控制形成前述送風機構之風扇。 1 4 .如申請專利範圍第1 3項所記載之基板搬運裝 置，係將警報裝置設於前述送風控制部，.以前述風速感應 器根據檢測之信號藉由前述送風控制部使前述風扇被指示 用以增強其時，通知形成前述送風機構之過濾器有篩 眼堵塞狀態。 1 5 ·如申請專利範圍第1 3項所記載之基板搬運裝 置，係設有對面狀態檢測裝置，使收容箱之開口部對峙於 前述處理裝置之搬出入口的姿勢時，藉由前述送風控制部 利用送風機構之風扇減少送風量。 1 6 ·如申請專利範圍第7項所記載之基板搬運裝置 ’係將伸縮構件設於前述處理裝置之開口部周緣’使前述 收容箱之開口部與前述處理裝置之搬出入口相對時’將收 容箱及處理裝置之空間由外部進行遮斷者。 1 7 ·如申請專利範圍第1或2項所記載之基板搬運 裝置，係具備有送風機構，設於前述收容箱之頂部’並由 該頂部朝向下方吹出空氣者。 1 8 ·申請專利範圍第1或2項所記載之基板搬運裝 置，其中前述收容箱係沿著搬運路進行移動時’朝向與前 述收容箱之開口部用以移動對置之面的方向使移動所構成 者0 ml n i i 1· I 14t m^1 ....... > I- - — I Km ^ (請先閲讀背面之注意事項再填寫本頁} 本紙張尺度適用中國國家標準（CNS〉A4規格（210X 297公釐） -37- 471008 A8 B8 C8 D8 六、申請專利範圍 裝所 運動 搬移 板可 基構 之機 載節 己 S 1三口 1 所多 項平 9 水 或由 1 藉 第件 圍構 範交 利移 專板 請基 申述 . 前 9 將 。 1 係者 ’ 成 置構 '裝------訂 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財是局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -38-471008 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 _____ Sixth, the scope of patent application-1 · A substrate handling device, which is characterized by: a moving body in the carrying direction, movable along the carrying path; a storage box The moving body is supported by a horizontally rotatable rotating shaft in the conveying direction; and the substrate transfer member is installed in the storage box, and can be moved to the receiving / unloading position while facing the loading / unloading entrance of the processing device. The direction of the entrance can be transferred to the processing device through the opening formed in the storage box to transfer the held substrate. 2. The substrate conveying device described in item 1 of the scope of patent application 'is provided in the aforementioned storage box and is provided with a substrate transfer unit having a substrate transfer unit having a plurality of stages. 3. The substrate transporting device as described in item 1 or 2 of the scope of the patent application, wherein the storage boxes are stacked in a plurality of sections and are provided with the substrate transfer members. 4. The substrate conveying device described in item 1 or 2 of the scope of the patent application, wherein the storage box is configured by a partition that is arranged slightly horizontally and is divided into a plurality of chambers, and the aforementioned substrate transfer member is provided in Those who are distinguished from each other. 5. The substrate conveying device described in item 1 or 2 of the scope of patent application is a cover member provided in the opening of the storage box. 6. The substrate conveying device described in item 1 or 2 of the scope of patent application, wherein the opening formed in the storage box has a structure that is constantly open, and also has a structure to keep the inside of the storage box: paper size Applicable to China ^: Standard (CNS) A4 specification (210X297) ~. 35-~ (Please read the precautions on the back before filling out this page) 471008 Printed by the Ministry of Economic Affairs / I Bureau Staff Consumer Cooperatives A8 B8 C8 __ D8 6. Scope of patent application-for those who are under positive pressure. 7 · The substrate handling device described in item 丨 or 2 of the scope of patent application, in which the opening formed in the aforementioned storage box has a structure that is always open, and also has The air blowing mechanism is opposed to the side of the opening of the storage box and passes through the opening to form an airflow to the outside. 8 · As described in the patent application scope item 1 or 2, the substrate conveying device is provided. There is a monitoring device for monitoring the status in the aforementioned storage box. 9 · A substrate conveying device, comprising: a moving body in a conveying direction, movable along a conveying path; a substrate transfer member, The moving body in the carrying direction is supported by a horizontally rotatable rotating shaft, and can be moved in a direction away from the carrying-out entrance in a posture facing the carrying-out entrance of the processing device, and the handling device can be used to hand over the held substrate; and The dust removing device is equipped with a filter for dust collection and is arranged near the substrate transfer member. 10 • The substrate conveying device described in item 9 of the patent application scope, wherein the filter is used to constitute the dust removing device. It is provided above the substrate transfer member. 1 1. The substrate transfer device described in item 9 or 10 of the patent application scope, wherein the dust removal device has a wall portion to cover the substrate transfer member. 1 2 · As for the substrate transfer device described in item 9 or 10 of the scope of patent application, where the aforementioned substrate transfer member is provided with a plurality of substrate mounting sections. _ (Please read the note on the back first Please fill in this page for more details) This paper size is applicable to China National Standard (CNS) A4 specification (210X297mm) -36- 471008 Printed by the Ministry of Intellectual Property / !. Bureau Consumer Cooperatives A8 Β8 C8 D8 VI. Patent Application Scope · 1 3 · The substrate handling device as described in item 8 of the patent application scope is composed of a wind speed sensor and a monitoring device It is located in the aforementioned storage box; and the air supply control unit, which uses the wind: catch ^ £ | 1> to actuate and control the fan forming the aforementioned air supply mechanism through the detected signal. 1 4. As described in item 13 of the scope of patent application The substrate conveying device is provided with an alarm device in the aforementioned air supply control unit. When the wind speed sensor is used to instruct the fan to be enhanced by the air supply control unit according to the detected signal, it is notified to form a filter of the air supply mechanism. The device has a blocked screen. 1 5 · The substrate conveying device described in item 13 of the scope of the patent application is provided with an opposite state detection device, and when the opening of the storage box faces the posture of the entrance and exit of the processing device, the air supply control section is used. Use the fan of the air supply mechanism to reduce the air supply. 1 6 · The substrate conveying device described in item 7 of the scope of patent application 'is provided with a telescopic member on the periphery of the opening portion of the processing device' when the opening portion of the storage box is opposed to the entrance of the processing device ' The space of the box and the processing device is interrupted by the outside. 1 7 · The substrate conveying device described in item 1 or 2 of the scope of patent application is provided with a blower mechanism, which is installed on the top of the storage box 'and blows air downward from the top. 1 8 · The substrate conveyance device described in item 1 or 2 of the scope of the patent application, wherein the storage box is moved in the direction of the opening facing the opening of the storage box when the storage box is moved along the conveyance path. Constituted by 0 ml nii 1 · I 14t m ^ 1 ....... > I--— I Km ^ (Please read the precautions on the back before filling out this page} This paper size applies Chinese national standards ( CNS> A4 specifications (210X 297 mm) -37- 471008 A8 B8 C8 D8 VI. Application for patents The scope of the installation of the moving and moving board can be structured by the airborne section of the S1, 3, 1, and 9 flats, or borrowed from 1 Please refer to the basic structure of the profit-transferring board. The first 9 will be. 1 Department of the 'into the structure' equipment ------ order (please read the precautions on the back before filling this page) The paper size printed by the Bureau ’s Consumer Cooperative is applicable to China National Standard (CNS) A4 (210X297 mm) -38-
TW089113615A 1999-07-09 2000-07-07 Substrate transport device TW471008B (en)

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TWI419824B (en) * 2009-09-04 2013-12-21 Daifuku Kk Cartridge transport device
TWI508829B (en) * 2005-12-22 2015-11-21 Photon Dynamics Inc Method and apparatus for handling and aligning glass substrates
CN105600446A (en) * 2016-01-04 2016-05-25 武汉华星光电技术有限公司 Substrate cache device

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KR20170026872A (en) * 2015-08-31 2017-03-09 삼성디스플레이 주식회사 Baking chamber for manufacturing photo-alignment layer
KR102088748B1 (en) * 2019-10-18 2020-03-13 주식회사 싸이맥스 Particle Blocking Transfer Chamber For Generated By Moving Vacuum Robot

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Publication number Priority date Publication date Assignee Title
TWI508829B (en) * 2005-12-22 2015-11-21 Photon Dynamics Inc Method and apparatus for handling and aligning glass substrates
TWI419824B (en) * 2009-09-04 2013-12-21 Daifuku Kk Cartridge transport device
CN105600446A (en) * 2016-01-04 2016-05-25 武汉华星光电技术有限公司 Substrate cache device
CN105600446B (en) * 2016-01-04 2017-11-03 武汉华星光电技术有限公司 Substrate temporary storage device

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