TWI406700B - Combustion-type exhaust gas treatment apparatus - Google Patents
Combustion-type exhaust gas treatment apparatus Download PDFInfo
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- TWI406700B TWI406700B TW096146016A TW96146016A TWI406700B TW I406700 B TWI406700 B TW I406700B TW 096146016 A TW096146016 A TW 096146016A TW 96146016 A TW96146016 A TW 96146016A TW I406700 B TWI406700 B TW I406700B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
- F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2217/00—Intercepting solids
- F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E20/00—Combustion technologies with mitigation potential
- Y02E20/30—Technologies for a more efficient combustion or heat usage
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Abstract
Description
本發明係有關一種用於藉由燃燒來處理包含例如矽烷氣體(SiH4 )或鹵素氣體(NF3 、ClF3 、SF6 、CH F3 、C2 F6 、CF4 等)等有害且可燃燒之廢氣以使該廢氣無害之燃燒式廢氣處理裝置。The present invention relates to a process for treating by containing, for example, decane gas (SiH 4 ) or a halogen gas (NF 3 , ClF 3 , SF 6 , CH F 3 , C 2 F 6 , CF 4 , etc.) A combustion-type exhaust gas treatment device that burns the exhaust gas to make the exhaust gas harmless.
半導體製造裝置會排放包含例如矽烷氣體(SiH4 )或鹵素氣體(NF3 、ClF3 、SF6 、CH F3 、C2 F6 、CF4 等)等有害且可燃燒之廢氣。此種廢氣不能直接釋放到大氣中。因此，通常將該廢氣導入處理裝置中，藉由燃燒來氧化該廢氣以使之無害。此種廣泛使用的處理方法係使助燃氣體在爐中形成火焰，而廢氣在該爐中藉由火焰燃燒，如見諸於日本早期公開專利公報第11－218317號者。The semiconductor manufacturing apparatus emits harmful and combustible exhaust gas including, for example, decane gas (SiH 4 ) or halogen gas (NF 3 , ClF 3 , SF 6 , CH F 3 , C 2 F 6 , CF 4 , etc.). This exhaust gas cannot be released directly into the atmosphere. Therefore, the exhaust gas is usually introduced into the treatment device, and the exhaust gas is oxidized by combustion to make it harmless. Such a widely used treatment method causes the combustion-supporting gas to form a flame in the furnace, and the exhaust gas is burned by the flame in the furnace, as described in Japanese Laid-Open Patent Publication No. 11-218317.
使用於半導體產業及液晶產業之燃燒式廢氣處理裝置可能會排放大量的粉塵(dust)(主要為SiO2 )及大量之廢氣燃燒處理副產物之酸性氣體。因此，需要定期的維護作業以自處理部移除粉塵，或者需要額外的機構，如刮除器(scraper)以定期地刮除附著沉積在燃燒處理室之圓筒形本體之內表面上的粉塵。Combustion-type exhaust gas treatment devices used in the semiconductor industry and the liquid crystal industry may emit a large amount of dust (mainly SiO 2 ) and a large amount of acid gas as a by-product of exhaust gas combustion treatment. Therefore, regular maintenance work is required to remove dust from the treatment section, or an additional mechanism such as a scraper is required to periodically scrape dust adhering to the inner surface of the cylindrical body deposited on the combustion treatment chamber. .
所附著沉積之粉塵主要係由SiO2 (亦即二氧化矽)所組成。然而，除了SiO2 之外，粉塵可能有毒性粉塵混合其中。粉塵具有0.1微米至數十微米之各種直徑。又，粉塵可能以大約結塊存在。因此，需要確保粉塵移除維護的作業安全性，俾不會由於吸入粉塵而造成健康傷害。The deposited deposited dust is mainly composed of SiO 2 (ie, cerium oxide). However, in addition to SiO 2 , dust may be mixed with toxic dust. The dust has various diameters from 0.1 micrometer to several tens of micrometers. Also, dust may be present in about agglomerates. Therefore, it is necessary to ensure the safety of dust removal maintenance work, and no health injury due to inhalation of dust.
在設置刮除機構的情形中，會增加組件的數目。結果，將會增加產品的製造成本，而且需要定期地更換刮除機構，因此增加運作成本。In the case where the scraping mechanism is set, the number of components is increased. As a result, the manufacturing cost of the product will increase, and the scraping mechanism needs to be replaced periodically, thereby increasing the operating cost.
因為燃燒處理室中之燃燒氣體的溫度高達約1700℃，故使用例如氧化鋁為主之玻璃陶瓷等耐熱性材料於包圍該燃燒處理室之圓筒形本體。然而，燃燒處理室的溫度甚高，若有氟或氯氣體存在，則圓筒形本體的內表面會被腐蝕而耗損。因此，需要定期地更換圓筒形本體。此種高價位圓筒形本體之更換會增加成本且需要耗時的維護。Since the temperature of the combustion gas in the combustion treatment chamber is as high as about 1700 ° C, a heat-resistant material such as alumina-based glass ceramic is used for the cylindrical body surrounding the combustion treatment chamber. However, the temperature of the combustion treatment chamber is extremely high, and if fluorine or chlorine gas is present, the inner surface of the cylindrical body is corroded and worn. Therefore, it is necessary to periodically replace the cylindrical body. The replacement of such high-priced cylindrical bodies adds cost and requires time-consuming maintenance.
本發明係鑑於上述缺點而完成者。因此，本發明之目的係提供一種燃燒式廢氣處理裝置，其可使用低價位材料於包圍燃燒處理室之本體，可防止粉塵附著於燃燒處理室的內表面，可防止腐蝕性氣體損害燃燒處理室的內表面，且可減少耗時的維護及維護成本。The present invention has been accomplished in view of the above disadvantages. Accordingly, it is an object of the present invention to provide a combustion type exhaust gas treatment apparatus which can use a low-priced material to surround a body of a combustion treatment chamber to prevent dust from adhering to an inner surface of a combustion treatment chamber, thereby preventing corrosive gas from damaging combustion treatment. The interior surface of the chamber reduces time-consuming maintenance and maintenance costs.
依據本發明之燃燒式廢氣處理裝置包含：對廢氣進行燃燒處理之燃燒處理部；冷卻已經燃燒處理部處理之廢氣之冷卻部；以及以水洗滌廢氣以移除因燃燒處理所產生之副產物之洗滌部。燃燒處理部包含：廢氣處理燃燒器；由金屬所製成且具有粗糙內表面之本體；及用於在本體的內表面上形成水膜(water film)之水膜形成機構。廢氣的燃燒處理係在本體中進行。A combustion type exhaust gas treatment apparatus according to the present invention includes: a combustion treatment portion that performs combustion treatment on the exhaust gas; a cooling portion that cools the exhaust gas treated by the combustion treatment portion; and the exhaust gas with water to remove by-products generated by the combustion treatment Washing department. The combustion treatment portion includes: an exhaust gas treatment burner; a body made of metal and having a rough inner surface; and a water film formation mechanism for forming a water film on the inner surface of the body. The combustion treatment of the exhaust gas is carried out in the body.
如上所述，本發明係提供包含具有粗糙內表面之金屬本體之燃燒式廢氣處理裝置，使得廢氣係藉由本體中的燃燒而予以處理。形成在本體內表面上之水膜提供防水結構。因此，可使用如不鏽鋼等低價位材料形成本體。又，形成在本體內表面上之水膜可洗掉粉塵，藉此防止粉塵附著於本體內表面。再者，水膜可洗掉腐蝕性氣體，因此不會損害本體內表面。結果，可使用如不鏽鋼等低價位材料形成本體，因此降低本體本身的製造成本。此外，可減少耗時的維護及維護成本。As described above, the present invention provides a combustion type exhaust gas treatment device comprising a metal body having a rough inner surface such that the exhaust gas is treated by combustion in the body. The water film formed on the surface of the body provides a waterproof structure. Therefore, the body can be formed using a low-priced material such as stainless steel. Further, the water film formed on the surface of the body can wash off the dust, thereby preventing the dust from adhering to the surface of the body. Furthermore, the water film can wash away corrosive gases and thus does not damage the inner surface of the body. As a result, the body can be formed using a low-priced material such as stainless steel, thereby reducing the manufacturing cost of the body itself. In addition, time-consuming maintenance and maintenance costs can be reduced.
以下將參照圖式說明本發明的實施例。在圖式中，以相同的元件符號表示具有相同功能或結構之組件或元件。Embodiments of the present invention will be described below with reference to the drawings. In the drawings, components or elements having the same function or structure are denoted by the same reference numerals.
第1圖係顯示依據本發明實施例之燃燒式廢氣處理裝置之燃燒處理部的剖面圖。燃燒處理部11包括廢氣處理燃燒器12。然後經由噴嘴13所供應之廢氣係與經由空氣噴嘴14所供應之空氣漩流及經由助燃氣體噴嘴15所供應之助燃氣體混合。燃燒此混合氣體以形成火焰17。在火焰17的下游設置被圓筒形本體18包圍之燃燒處理室(攏焰室(flame holding chamber))19。在此燃燒處理室19中進行廢氣的燃燒與處理。在廢氣處理燃燒器12與圓筒形本體18之間設置水流法蘭(water－flow flange)20，使得水沿著圓筒形本體18的內表面向下流，藉此在圓筒形本體18的內表面上形成水膜A。Fig. 1 is a cross-sectional view showing a combustion treatment portion of a combustion type exhaust gas treatment device according to an embodiment of the present invention. The combustion treatment unit 11 includes an exhaust gas treatment burner 12. The exhaust gas supplied via the nozzle 13 is then mixed with the swirling of the air supplied via the air nozzle 14 and the combustion-supporting gas supplied via the combustion-assisting gas nozzle 15. This mixed gas is burned to form a flame 17. A combustion treatment chamber (flame holding chamber) 19 surrounded by the cylindrical body 18 is disposed downstream of the flame 17. Combustion and treatment of the exhaust gas are performed in this combustion processing chamber 19. A water-flow flange 20 is disposed between the exhaust gas treatment burner 12 and the cylindrical body 18 such that water flows downward along the inner surface of the cylindrical body 18, thereby being in the cylindrical body 18 A water film A is formed on the inner surface.
在此實施例中，係使用不鏽鋼形成圓筒形本體18。此圓筒形本體18的內表面包括粗糙表面。由於圓筒形本體18的內表面粗糙化，故改善內表面的可濕性(wettability)，因此可在內表面上整體形成均勻的水膜。若不鏽鋼(其為疏水性材料)具有鏡面磨光內表面，則易於在其上形成水滴。因此，難以在內表面上整體形成均勻的水膜。因為圓筒形本體18的內表面整體粗糙化，故可在圓筒形本體18的內表面上整體形成穩定的水膜而沒有水破散。In this embodiment, the cylindrical body 18 is formed using stainless steel. The inner surface of the cylindrical body 18 includes a rough surface. Since the inner surface of the cylindrical body 18 is roughened, the wettability of the inner surface is improved, so that a uniform water film can be integrally formed on the inner surface. If stainless steel, which is a hydrophobic material, has a mirror-finished inner surface, it is easy to form water droplets thereon. Therefore, it is difficult to form a uniform water film on the inner surface as a whole. Since the inner surface of the cylindrical body 18 is entirely roughened, a stable water film can be integrally formed on the inner surface of the cylindrical body 18 without water being broken.
粗糙表面可藉由噴砂或噴丸(blast)等方法予以形成，該方法係藉由使用壓縮空氣或離心力以高速對表面噴射研磨材(例如沙或玻璃珠)而形成具有想要之粗糙度之粗糙表面。粗糙表面可藉由機械加工而形成，例如使用多刀片之切割(銑削加工)，或藉由工具之垂直－線性運動與工件之進給運動(feed motion)的組合而刮削工件之鍵槽法(spline method)。或者，粗糙表面可藉由表面處理而形成，諸如酸洗(pickling)或親水性塗佈(hydrophilic coating)予以形成。酸洗係藉由將工件浸漬在化學藥品液體(例如硝酸、氫氟酸、氫氯酸、硫酸)中，自化學藥品液體取出工件，以水洗滌工件，再乾燥工件而進行。親水性塗佈係藉由以親水性膜(hydrophilic film)，如玻璃纖維、矽聚合物、或鐵弗龍(註冊商標)等塗佈內表面來進行。The rough surface can be formed by sandblasting or blasting by forming a desired roughness by spraying the abrasive material (for example, sand or glass beads) onto the surface at a high speed using compressed air or centrifugal force. Rough surface. Rough surfaces can be formed by machining, such as cutting with multiple inserts (milling), or by using a combination of vertical-linear motion of the tool and feed motion of the workpiece to scrape the workpiece. Method). Alternatively, the rough surface may be formed by surface treatment such as pickling or hydrophilic coating. Pickling is carried out by immersing the workpiece in a chemical liquid (for example, nitric acid, hydrofluoric acid, hydrochloric acid, sulfuric acid), taking out the workpiece from the chemical liquid, washing the workpiece with water, and drying the workpiece. The hydrophilic coating is carried out by coating the inner surface with a hydrophilic film such as glass fiber, ruthenium polymer, or Teflon (registered trademark).
分解廢氣的較佳溫度為至少1700℃。因此，燃燒處理室19中的溫度保持在1700℃左右。調整自水流法蘭20所供給之水量，使得水膜A具有至少2mm的厚度。具有至少2mm厚度之水膜A可提供耐熱結構，從而圓筒形本體18的溫度保持在大致一般的溫度(不超過50℃)。因此，圓筒形本體18可使用諸如不鏽鋼等低價位材料來取代高價位之以氧化鋁為主之玻璃陶瓷。當水流法蘭20中之水溫為30℃時，在圓筒形本體18之出口之水溫可為數十度或更低。The preferred temperature for decomposition of the offgas is at least 1700 °C. Therefore, the temperature in the combustion processing chamber 19 is maintained at about 1700 °C. The amount of water supplied from the water flow flange 20 is adjusted such that the water film A has a thickness of at least 2 mm. The water film A having a thickness of at least 2 mm can provide a heat resistant structure such that the temperature of the cylindrical body 18 is maintained at a substantially normal temperature (not exceeding 50 ° C). Therefore, the cylindrical body 18 can replace a high-priced alumina-based glass ceramic with a low-priced material such as stainless steel. When the water temperature in the water flow flange 20 is 30 ° C, the water temperature at the outlet of the cylindrical body 18 may be several tens of degrees or less.
當燃燒處理室19中所產生之粉塵接近圓筒形本體18之內表面時，水膜A會洗掉該粉塵，藉此防止粉塵附著於圓筒形本體18之內表面。同樣地，當腐蝕性氣體的分子接近圓筒形本體18之內表面時，水膜A也會洗掉腐蝕性氣體的分子。例如，當在燃燒處理中產生氟副產物時，此種氟副產物則變成不會對圓筒形本體18之內表面造成損害之稀氫氟酸。因此，即使使用諸如不鏽鋼等低價位材料於圓筒形本體18，粉塵亦不會附著於內表面，而內表面亦不會被氧化氣體腐蝕。因此，可大大地減少耗時之維護及維護成本。When the dust generated in the combustion processing chamber 19 approaches the inner surface of the cylindrical body 18, the water film A washes off the dust, thereby preventing the dust from adhering to the inner surface of the cylindrical body 18. Similarly, when the molecules of the corrosive gas approach the inner surface of the cylindrical body 18, the water film A also washes off the molecules of the corrosive gas. For example, when a fluorine by-product is generated in a combustion process, such a fluorine by-product becomes a dilute hydrofluoric acid which does not cause damage to the inner surface of the cylindrical body 18. Therefore, even if a low-priced material such as stainless steel is used in the cylindrical body 18, the dust does not adhere to the inner surface, and the inner surface is not corroded by the oxidizing gas. As a result, time-consuming maintenance and maintenance costs can be greatly reduced.
在第1圖中，圓筒形本體18之內表面具有自圓筒形本體18之上端至下端的內徑為一定之圓筒形。或者，圓筒形本體18之內表面可具有自圓筒形本體18之上端至下端的內徑尺寸逐漸地減小之圓錐形。圓筒形具有自燃燒處理室消除焊接部份，以避免水破散，並簡化圓筒形本體的製造，因而降低製造成本的優點。圓錐形具有因其推拔型(tapered)形狀而可輕易形成水膜的優點。另一方面，圓錐形需要技術性的焊接俾不致造成水破散，因此，會增加製造成本。第2至10圖係顯示用以在圓筒形本體之內表面上形成水膜之機構的實施例。In Fig. 1, the inner surface of the cylindrical body 18 has a cylindrical shape having a constant inner diameter from the upper end to the lower end of the cylindrical body 18. Alternatively, the inner surface of the cylindrical body 18 may have a conical shape whose inner diameter gradually decreases from the upper end to the lower end of the cylindrical body 18. The cylindrical shape has the advantage of eliminating the welded portion from the combustion treatment chamber to avoid water breakage and simplifying the manufacture of the cylindrical body, thereby reducing the manufacturing cost. The conical shape has the advantage that the water film can be easily formed due to its tapered shape. On the other hand, the conical shape requires a technical weld that does not cause water to break, and therefore, increases the manufacturing cost. Figures 2 to 10 show an embodiment of a mechanism for forming a water film on the inner surface of a cylindrical body.
第2圖係顯示水流法蘭(水膜形成機構)20之實施例的剖面圖。水膜形成機構20之此實施例包括環形儲水槽24及水堰18a。水堰18a形成儲水槽24之一部份。水堰18a具有具備高度一致之頂部。因此，可在圓筒形本體18之內表面上形成具有厚度一致的均勻水膜。第3圖係顯示具有圓弧化內側頂緣之圓筒形水堰18b。水膜形成機構之此實施例的基本結構與第2圖相同。此實施例可形成水堰18b之溢流水的平滑流動。Fig. 2 is a cross-sectional view showing an embodiment of a water flow flange (water film forming mechanism) 20. This embodiment of the water film forming mechanism 20 includes an annular water storage tank 24 and a water raft 18a. The leeches 18a form part of the water reservoir 24. The otter 18a has a top with a uniform height. Therefore, a uniform water film having a uniform thickness can be formed on the inner surface of the cylindrical body 18. Figure 3 shows a cylindrical water hammer 18b having an arcuate inner top edge. The basic structure of this embodiment of the water film forming mechanism is the same as that of Fig. 2. This embodiment can form a smooth flow of overflow water from the weir 18b.
第4圖係第2圖的變形例，其係顯示具有具備L－形剖面之頂部之水堰18c。水膜形成機構之此實施例包括環形儲水槽24及水堰18c。水堰18c形成儲水槽24之一部份。第5圖係顯示具有具備L－形剖面之頂部且具有圓弧化內側頂緣之水堰18d。水膜形成機構之此實施例的基本結構與第4圖相同。第6圖之實施例係顯示在圓筒形水堰18e之內側徑向設置圓筒形構件33，且水向下流經水堰18e與圓筒形構件33間的小間隙。水膜形成機構之此實施例包括環形儲水槽24、水堰18e、及圓筒形構件33。水堰18e形成儲水槽24之一部份。Fig. 4 is a modification of Fig. 2 showing a water raft 18c having a top portion having an L-shaped cross section. This embodiment of the water film forming mechanism includes an annular water storage tank 24 and a water raft 18c. The water raft 18c forms part of the water storage tank 24. Fig. 5 shows a water raft 18d having a top portion having an L-shaped cross section and having a rounded inner top edge. The basic structure of this embodiment of the water film forming mechanism is the same as that of Fig. 4. The embodiment of Fig. 6 shows that the cylindrical member 33 is radially disposed inside the cylindrical water raft 18e, and the water flows downward through the small gap between the water dam 18e and the cylindrical member 33. This embodiment of the water film forming mechanism includes an annular water storage tank 24, a water raft 18e, and a cylindrical member 33. The water raft 18e forms part of the water storage tank 24.
第7A圖及第7B圖係顯示在圓筒形水堰18f之頂部下方形成矩形開口20f，使得水流經開口20f至圓筒形本體18之內表面的實施例。水膜形成機構之此實施例包括環形儲水槽24、水堰18f、及形成在水堰18f中之矩形開口20f。第8A圖及第8B圖係顯示出口20g，水係經此出口流出面在圓筒形本體18之內周面上形成螺旋流動。水膜形成機構之此實施例包括形成在圓筒形本體18之內表面中之複數個出口20g。更具體而言，出口20g係沿著圓筒形本體18之內周面朝水平方向形成水流。因為設有複數個出口20g，故在圓筒形本體18之內周面上形成具有均勻厚度的水膜。第9A圖至第9C圖係顯示出口20h，水係經此出口流出而在圓筒形本體18之內周面上形成螺旋流動。水膜形成機構之此實施例包括環形儲水槽24、及形成在圓筒形本體18之內表面中之垂直延伸之出口20h。該出口20h各具有其一側為開放之矩形形狀，使得水朝切線方向水平地流出而形成覆蓋矩形出口20h本身之水膜。Figs. 7A and 7B show an embodiment in which a rectangular opening 20f is formed under the top of the cylindrical water raft 18f so that water flows through the opening 20f to the inner surface of the cylindrical body 18. This embodiment of the water film forming mechanism includes an annular water storage tank 24, a water raft 18f, and a rectangular opening 20f formed in the water raft 18f. Figs. 8A and 8B show an outlet 20g through which the water flows in a spiral flow on the inner circumferential surface of the cylindrical body 18. This embodiment of the water film forming mechanism includes a plurality of outlets 20g formed in the inner surface of the cylindrical body 18. More specifically, the outlet 20g forms a water flow in the horizontal direction along the inner circumferential surface of the cylindrical body 18. Since a plurality of outlets 20g are provided, a water film having a uniform thickness is formed on the inner circumferential surface of the cylindrical body 18. Figs. 9A to 9C show an outlet 20h through which the water flows out to form a spiral flow on the inner circumferential surface of the cylindrical body 18. This embodiment of the water film forming mechanism includes an annular water storage tank 24, and a vertically extending outlet 20h formed in the inner surface of the cylindrical body 18. The outlets 20h each have a rectangular shape whose one side is open, so that water flows horizontally in the tangential direction to form a water film covering the rectangular outlet 20h itself.
第10A圖及第10B圖係顯示自切線方向供應水至儲水槽24而在儲水槽24中形成漩流，使得水溢出水堰18i而形成螺旋流動。水膜形成機構之此實施例包括環形儲水槽24、水堰18i、及自儲水槽24之切線方向供應水至儲水槽24之至少一個供應孔20i。水堰18i係形成儲水槽24之一部份。當水經由供應孔20i供應至儲水槽24時，水在儲水槽24中形成螺旋流動。結果，儲水槽24中之水位在其整個圓周方向均勻地增加，且水會均勻地溢出水堰18i至圓筒形本體18之內表面上。可設置一個或多個供應孔20i。即使僅設置單一供應孔20i，亦可在儲水槽24中形成水的螺旋流動。因此，可在圓筒形本體18之內表面上形成均勻水膜。依據此實施例，即使由於廢氣處理裝置10之安裝情形而使圓筒形本體18自水平方向以某種角度(例如，具有使得高度對長度為1cm至200cm的梯度)傾斜，亦可穩定地形成均勻水膜。10A and 10B show that water is supplied from the tangential direction to the water storage tank 24 to form a swirling flow in the water storage tank 24, so that the water overflows the water raft 18i to form a spiral flow. This embodiment of the water film forming mechanism includes an annular water storage tank 24, a water raft 18i, and at least one supply hole 20i that supplies water from the tangential direction of the water storage tank 24 to the water storage tank 24. The leech 18i forms part of the water storage tank 24. When water is supplied to the water storage tank 24 via the supply hole 20i, the water forms a spiral flow in the water storage tank 24. As a result, the water level in the water storage tank 24 is uniformly increased throughout its circumferential direction, and the water uniformly overflows the water raft 18i onto the inner surface of the cylindrical body 18. One or more supply holes 20i may be provided. Even if only a single supply hole 20i is provided, a spiral flow of water can be formed in the water storage tank 24. Therefore, a uniform water film can be formed on the inner surface of the cylindrical body 18. According to this embodiment, even if the cylindrical body 18 is inclined at an angle from the horizontal direction (for example, having a gradient such that the height is 1 cm to 200 cm in length) due to the mounting condition of the exhaust gas treating device 10, it can be stably formed. Uniform water film.
第11圖為燃燒式廢氣處理裝置10之整體結構實施例。燃料與氧氣經由導管35及36供應至預混合機(premixer)37，燃料與氧氣在此相互混合以形成預混合燃料。此預混合燃料經由導管38供應至燃燒處理部11。作為燃燒(亦即氧化)廢氣之氧氣來源的空氣經由導管39供應至燃燒處理部11。Fig. 11 is a view showing an overall configuration of a combustion type exhaust gas treatment device 10. Fuel and oxygen are supplied via conduits 35 and 36 to a premixer 37 where the fuel and oxygen are mixed to form a premixed fuel. This premixed fuel is supplied to the combustion treatment portion 11 via the conduit 38. Air as a source of oxygen for combustion (i.e., oxidation) of the exhaust gas is supplied to the combustion treatment portion 11 via the conduit 39.
燃燒式廢氣處理裝置10包括：將已經燃燒處理之廢氣冷卻之冷卻部21、及儲存和循環用於在圓筒形本體18之內表面上形成水膜A之水的循環槽25。冷卻部21係位在圓筒形本體18的下游。冷卻部21包括：使圓筒形本體18之下端部與循環槽25相互耦接之導管22、及從導管22分支到洗滌部31之導管27。從導管22分支之導管27係向上傾斜且經由垂直導管耦接至洗滌部(洗滌室)31之下端部。在導管27與垂直導管間之連接部附近設置有用以在導管27之內表面上形成水膜之噴水機構28。The combustion type exhaust gas treatment device 10 includes a cooling portion 21 that cools the exhaust gas that has been burned, and a circulation groove 25 that stores and circulates water for forming the water film A on the inner surface of the cylindrical body 18. The cooling portion 21 is tied downstream of the cylindrical body 18. The cooling portion 21 includes a duct 22 that couples the lower end portion of the cylindrical body 18 to the circulation groove 25, and a duct 27 that branches from the duct 22 to the washing portion 31. The duct 27 branched from the duct 22 is inclined upward and coupled to the lower end of the washing portion (washing chamber) 31 via a vertical duct. A water spray mechanism 28 for forming a water film on the inner surface of the duct 27 is provided in the vicinity of the joint between the duct 27 and the vertical duct.
以自圓筒形本體18向下流之水膜會整體地覆蓋導管22的內表面，且藉由噴水機構28所形成之水膜整體地覆蓋導管27的內表面。因為這些水膜係作為耐熱材料，故導管22與導管27的溫度可保持在大致一般的溫度(不超過50℃)，不管是否已受到燃燒處理之廢氣的高溫。又，水膜可防止腐蝕性氣體損害導管。因此，低價位之不鏽鋼可用於導管22及27。習知的措施係藉由化學沉積、物理塗佈、塗刷或貼附耐腐蝕性材料(例如，鐵弗龍(註冊商標)或PVC)來覆蓋由金屬(如不鏽鋼)製導管之氣體接觸部份的表面。依據本發明上述實施例之結構，可無需提供該種措施。The water film flowing downward from the cylindrical body 18 integrally covers the inner surface of the duct 22, and the water film formed by the water spray mechanism 28 integrally covers the inner surface of the duct 27. Since these water films are used as the heat resistant material, the temperature of the conduit 22 and the conduit 27 can be maintained at a substantially normal temperature (not exceeding 50 ° C) regardless of whether or not the exhaust gas has been subjected to the high temperature of the exhaust gas after the combustion treatment. Moreover, the water film prevents corrosive gases from damaging the catheter. Therefore, low-priced stainless steel can be used for the conduits 22 and 27. Conventional measures cover the gas contact of a conduit made of metal (eg stainless steel) by chemical deposition, physical coating, painting or attachment of a corrosion-resistant material (eg Teflon (registered trademark) or PVC). The surface of the serving. According to the structure of the above embodiment of the present invention, it is not necessary to provide such a measure.
在導管22或導管27的內表面上以設置冷卻加速機構為佳，如鰭板或擋板。第12A、12B至16A、16B圖係顯示例如鰭板或擋板等之冷卻加速機構之實施例。第12A圖及第12B圖係顯示配置在導管22之內表面上之環形鰭板23。第13A圖及第13B圖亦顯示環形鰭板23。第13A圖及第13B圖所示之實施例與第12A圖及第12B圖所示之實施例的差別在於第12A圖及第12B圖中之鰭板23具有矩形剖面，而第13A圖及第13B圖中之鰭板23具有三角形剖面。第14A圖及第14B圖係顯示沿著導管22中之廢氣流動方向傾斜之短鰭板23。第15A圖及第15B圖係顯示設置在導管22之內表面上之半圓形擋板23。各半圓形擋板23係形成為配合導管22之部分內表面的形狀。在導管22中，擋板23係配置於不同垂直位置及不同圓周位置。廢氣係流經導管22，同時與導管22及擋板23的內表面接觸。以此方式，可藉由以水膜覆蓋之鰭板或擋板加速廢氣的冷卻效果。第16A圖及第16B圖係顯示設置在導管22之內周面上之螺旋形鰭板23。It is preferable to provide a cooling acceleration mechanism such as a fin or a baffle on the inner surface of the duct 22 or the duct 27. 12A, 12B to 16A, and 16B are diagrams showing an embodiment of a cooling acceleration mechanism such as a fin or a baffle. 12A and 12B show the annular fins 23 disposed on the inner surface of the duct 22. The annular fins 23 are also shown in Figs. 13A and 13B. The difference between the embodiment shown in FIGS. 13A and 13B and the embodiment shown in FIGS. 12A and 12B is that the fins 23 in FIGS. 12A and 12B have a rectangular cross section, and FIG. 13A and FIG. The fin 23 in Fig. 13B has a triangular cross section. Figs. 14A and 14B show short fin plates 23 which are inclined along the flow direction of the exhaust gas in the duct 22. 15A and 15B show a semicircular baffle 23 disposed on the inner surface of the catheter 22. Each of the semicircular baffles 23 is formed in a shape that fits a part of the inner surface of the duct 22. In the duct 22, the baffles 23 are arranged at different vertical positions and at different circumferential positions. The exhaust gas flows through the conduit 22 while being in contact with the inner surfaces of the conduit 22 and the baffle 23. In this way, the cooling effect of the exhaust gas can be accelerated by fins or baffles covered with a water film. Figs. 16A and 16B show a spiral fin 23 provided on the inner circumferential surface of the duct 22.
燃燒式廢氣處理裝置10之洗滌部31包括過濾器31a及噴水機構31b。在燃燒處理後，廢氣藉由冷卻部21冷卻，然後導入洗滌部31中。此洗滌部31係以水洗滌廢氣，以便捕捉及移除包含有由廢氣之燃燒處理所產生之粉塵及氧化氣體之副產物。以過濾器31a移除粉塵，再與自噴水機構31b噴出之水一起流下。粉塵隨著水經由導管27及22流入循環槽25，再儲存於槽25中。以此方式，藉由燃燒處理、冷卻部21中之冷卻、及在洗滌部31中以水洗滌，而使廢氣變得無害。經處理之廢氣流經導管32，然後釋放至大氣或其他空間中。The washing unit 31 of the combustion type exhaust gas treatment device 10 includes a filter 31a and a water spray mechanism 31b. After the combustion treatment, the exhaust gas is cooled by the cooling portion 21 and then introduced into the washing portion 31. The washing portion 31 washes the exhaust gas with water to capture and remove by-products containing dust and oxidizing gas generated by the combustion treatment of the exhaust gas. The dust is removed by the filter 31a, and then flows down together with the water sprayed from the water spray mechanism 31b. The dust flows into the circulation tank 25 with the water through the conduits 27 and 22, and is stored in the tank 25. In this way, the exhaust gas is rendered harmless by the combustion treatment, the cooling in the cooling portion 21, and the washing with water in the washing portion 31. The treated exhaust gas flows through conduit 32 and is then released into the atmosphere or other space.
循環槽25內具有水堰26。經由導管22向下流後，水進入如圖式中之水堰26之左側室中。左室中的水溢出水堰26至如圖式中之水堰26之右側室中。右室中的水藉由泵30抽吸而經由供應導管34輸送至熱交換器40。熱交換器40在水與冷卻水之間進行熱交換而使得水具有適合的溫度。之後，此水當作循環水重複使用。含有大量粉塵之水係流入循環槽25之左室中。粉塵係由顆粒所形成，其中部分顆粒具有大直徑。由於大顆粒較重，會沈入室的底部。另一方面，具有非常小直徑的顆粒重量較輕，因此會溢出水堰26而至右室。移動至右室之顆粒係混合至將被使用作為循環水之水中。只要顆粒具有約50 μm之直徑，混合至循環水中之顆粒對循環水之使用即可不具有負面效果。因此，水堰26以具有使超過50 μm直徑之顆粒無法溢出的高度為佳。The water tank 26 is provided in the circulation tank 25. After flowing down through conduit 22, the water enters the left chamber of the raft 26 in the Figure. The water in the left chamber overflows the water raft 26 into the right chamber of the leeches 26 in the figure. The water in the right chamber is pumped through the supply conduit 34 to the heat exchanger 40 by pumping 30. The heat exchanger 40 exchanges heat between the water and the cooling water so that the water has a suitable temperature. This water is then reused as recycled water. The water containing a large amount of dust flows into the left chamber of the circulation tank 25. The dust is formed of particles in which a part of the particles have a large diameter. Because the large particles are heavy, they will sink to the bottom of the chamber. On the other hand, particles having a very small diameter are lighter in weight and therefore overflow the leeches 26 to the right ventricle. The particles moved to the right chamber are mixed into water that will be used as circulating water. As long as the particles have a diameter of about 50 μm, the particles mixed into the circulating water have no negative effect on the use of circulating water. Therefore, the water raft 26 preferably has a height such that particles having a diameter exceeding 50 μm cannot overflow.
在熱交換器40中調整溫度之後，水係以水W1之方式供應至水流法蘭20。水W1係用於在圓筒形本體18的內表面上形成水膜A，以及在導管22之內周面上形成水膜。然後，水會回到循環槽25。已在熱交換器40中調整溫度之一部份水係供應至洗滌部31之噴水機構31b，再回到循環槽25。此外，已在熱交換器40中調整溫度之一部份水係供應至噴水機構28，並在導管22之內周面上形成水膜。然後，水回到循環槽25。以此方式，水得以進行循環。因此，燃燒式廢氣處理裝置10具有僅需要補充非常小量之民生用水或工業用水之優點，因為裝置10之操作所使用之大部份的水係為循環水。再者，因為水係以循環水重複使用，故即使在洗滌廢氣後水變成稀氫氟酸，此酸亦不會被排出至裝置10的外部。After the temperature is adjusted in the heat exchanger 40, the water is supplied to the water flow flange 20 in the form of water W1. The water W1 is for forming a water film A on the inner surface of the cylindrical body 18, and a water film is formed on the inner circumferential surface of the duct 22. The water then returns to the circulation tank 25. One of the temperatures in the heat exchanger 40 is adjusted to supply the water system to the water spray mechanism 31b of the washing unit 31, and is returned to the circulation tank 25. Further, a part of the water having been adjusted in the heat exchanger 40 is supplied to the water spouting mechanism 28, and a water film is formed on the inner peripheral surface of the duct 22. Then, the water returns to the circulation tank 25. In this way, water can be circulated. Therefore, the combustion type exhaust gas treatment device 10 has the advantage of only replenishing a very small amount of domestic or industrial water, since most of the water used for the operation of the device 10 is circulating water. Further, since the water system is repeatedly used as the circulating water, the acid is not discharged to the outside of the apparatus 10 even if the water becomes dilute hydrofluoric acid after the exhaust gas is washed.
將被供應至熱交換器40之一部份冷卻水係以冷卻水W2之方式供應至設置在燃燒處理部11中之未圖示之冷卻水通道。此水W2係用於冷卻廢氣處理燃燒器12。由泵30所輸送之一部份水係以水W3之方式供應至循環槽25，使水W3得自循環槽25的側部流入循環槽25中。已流入循環槽25中之水會將沉積在循環槽25之底部上的副產物掃向水堰26，因此可防止副產物阻塞導管22之下端開口。A part of the cooling water to be supplied to the heat exchanger 40 is supplied to the cooling water passage (not shown) provided in the combustion processing unit 11 as the cooling water W2. This water W2 is used to cool the exhaust gas treatment burner 12. A part of the water conveyed by the pump 30 is supplied to the circulation tank 25 as water W3, so that the water W3 is supplied from the side of the circulation tank 25 into the circulation tank 25. The water that has flowed into the circulation tank 25 sweeps the by-product deposited on the bottom of the circulation tank 25 toward the water raft 26, thereby preventing the by-product from blocking the opening at the lower end of the conduit 22.
燃燒式廢氣處理裝置10在圓筒形本體18上包括溫度感測器41，且以溫度感測器41監控圓筒形本體18之溫度的增加。若在圓筒形本體18的內表面上發生水破散，則在該部份的耐熱效果就會消失。在此種情況下，圓筒形本體18會與高溫廢氣直接接觸，對圓筒形本體18的內表面可能造成損害。為了偵測此種情形，在圓筒形本體18上設置溫度感測器41以確保安全性。The combustion type exhaust gas treatment device 10 includes a temperature sensor 41 on the cylindrical body 18, and the temperature sensor 41 monitors the increase in the temperature of the cylindrical body 18. If water breaks on the inner surface of the cylindrical body 18, the heat resistance effect in this portion disappears. In this case, the cylindrical body 18 may be in direct contact with the high temperature exhaust gas, which may cause damage to the inner surface of the cylindrical body 18. In order to detect such a situation, a temperature sensor 41 is provided on the cylindrical body 18 to ensure safety.
在作為圓筒形本體18之底盤的部份設置泄漏感測器42。若圓筒形本體18受到損害且形成穿孔，泄漏感測器42會偵測到此種穿孔的存在。以此方式，設置泄漏感測器42可改善安全性。A leakage sensor 42 is provided at a portion of the chassis as the cylindrical body 18. If the cylindrical body 18 is damaged and a perforation is formed, the leak sensor 42 detects the presence of such a perforation. In this way, providing the leak sensor 42 can improve safety.
本發明之某些較佳實施例雖然已說明如上述，但應瞭解，本發明並不侷限於上述實施例，而在不偏離本發明範疇之下仍可進行各種變更及修飾。The present invention has been described with reference to the above-described embodiments, and it is to be understood that the invention is not limited thereto, and various changes and modifications may be made without departing from the scope of the invention.
10．．．燃燒式廢氣處理裝置10. . . Combustion exhaust gas treatment device
11．．．燃燒處理區11. . . Combustion treatment zone
12．．．廢氣處理燃燒器12. . . Exhaust gas treatment burner
13．．．噴嘴13. . . nozzle
14．．．空氣噴嘴14. . . Air nozzle
15．．．助燃氣體噴嘴15. . . Assisting gas nozzle
17．．．火焰17. . . flame
18．．．圓筒形本體18. . . Cylindrical body
18a、18b、18c、18d、18e、18f、18i、26．．．水堰18a, 18b, 18c, 18d, 18e, 18f, 18i, 26. . . Otter
19．．．燃燒處理室19. . . Combustion chamber
20．．．水流法蘭20. . . Water flow flange
20f．．．開口20f. . . Opening
20g、20h．．．出口20g, 20h. . . Export
20i．．．供應孔20i. . . Supply hole
21．．．冷卻區twenty one. . . Cooling zone
22、27、32、35、36、38、39．．．導管22, 27, 32, 35, 36, 38, 39. . . catheter
23．．．鰭板(擋板)twenty three. . . Fin plate
24．．．水槽twenty four. . . sink
25．．．循環槽25. . . Circulation slot
28、31b．．．噴水機構28, 31b. . . Water spray mechanism
30．．．泵30. . . Pump
31．．．洗滌區31. . . Washing area
31a．．．過濾器31a. . . filter
33．．．圓筒形構件33. . . Cylindrical member
34．．．供應導管34. . . Supply catheter
37．．．預混合機37. . . Premixer
40．．．熱交換器40. . . Heat exchanger
41．．．溫度感測器41. . . Temperature sensor
42．．．泄漏感測器42. . . Leak sensor
A．．．水膜A. . . Water film
W1、W3．．．水W1, W3. . . water
W2．．．冷卻水W2. . . Cooling water
第1圖係顯示依據本發明實施例之燃燒處理部的剖面圖；第2圖係顯示水膜形成機構之實施例的剖面圖；第3圖係顯示水膜形成機構之變形例的剖面圖；第4圖係顯示水膜形成機構之另一變形例的剖面圖；第5圖係顯示水膜形成機構之又另一變形例的剖面圖；第6圖係顯示水膜形成機構之又另一變形例的剖面圖；第7A圖係顯示水膜形成機構之又另一變形例的剖面圖；第7B圖係顯示第7A圖所示之水膜形成機構的前視圖；第8A圖係顯示水膜形成機構之又另一變形例的平面圖；第8B圖係顯示第8A圖所示之水膜形成機構的剖面圖；第9A圖係顯示水膜形成機構之又另一變形例的平面圖；第9B圖係顯示第9A圖所示之水膜形成機構的剖面圖；第9C圖係顯示第9A圖所示之水膜形成機構的前視圖；第10A圖係顯示水膜形成機構之又另一變形例的剖面圖；第10B圖係顯示第10A圖所示之水膜形成機構的平面圖；第11圖係顯示依據本發明實施例之燃燒式廢氣處理裝置的方塊圖；第12A圖係顯示冷卻加速機構之實施例的平面圖；第12B圖係顯示第12A圖所示之機構的剖面圖；第13A圖係顯示冷卻加速機構之另一實施例的平面圖；第13B圖係顯示第13A圖所示之機構的剖面圖；第14A圖係顯示冷卻加速機構之另一實施例的平面圖；第14B圖係顯示第14A圖所示之機構的剖面圖；第15A圖係顯示冷卻加速機構之另一實施例的平面圖；第15B圖係顯示第15A圖所示之機構的剖面圖；第16A圖係顯示冷卻加速機構之另一實施例的平面圖；以及第16B圖係顯示第16A圖所示之機構的剖面圖。1 is a cross-sectional view showing a combustion treatment portion according to an embodiment of the present invention; FIG. 2 is a cross-sectional view showing an embodiment of a water film formation mechanism; and FIG. 3 is a cross-sectional view showing a modification of the water film formation mechanism; 4 is a cross-sectional view showing another modification of the water film forming mechanism; FIG. 5 is a cross-sectional view showing still another modification of the water film forming mechanism; and FIG. 6 is another sectional view showing the water film forming mechanism. Fig. 7A is a cross-sectional view showing still another modification of the water film forming mechanism; Fig. 7B is a front view showing the water film forming mechanism shown in Fig. 7A; and Fig. 8A is a water showing FIG. 8B is a cross-sectional view showing a water film forming mechanism shown in FIG. 8A; and FIG. 9A is a plan view showing still another modified example of the water film forming mechanism; 9B is a cross-sectional view showing the water film forming mechanism shown in FIG. 9A; FIG. 9C is a front view showing the water film forming mechanism shown in FIG. 9A; and FIG. 10A is another showing the water film forming mechanism. Sectional view of the modification; Figure 10B shows the water film shape shown in Fig. 10A Figure 11 is a plan view showing a combustion type exhaust gas treating apparatus according to an embodiment of the present invention; Fig. 12A is a plan view showing an embodiment of a cooling acceleration mechanism; and Fig. 12B is a view showing a 12A FIG. 13A is a plan view showing another embodiment of the cooling acceleration mechanism; FIG. 13B is a cross-sectional view showing the mechanism shown in FIG. 13A; and FIG. 14A is another embodiment showing the cooling acceleration mechanism. Figure 14B is a cross-sectional view showing the mechanism shown in Figure 14A; Figure 15A is a plan view showing another embodiment of the cooling acceleration mechanism; and Figure 15B is a sectional view showing the mechanism shown in Figure 15A. Fig. 16A is a plan view showing another embodiment of the cooling acceleration mechanism; and Fig. 16B is a sectional view showing the mechanism shown in Fig. 16A.
10．．．燃燒式廢氣處理裝置10. . . Combustion exhaust gas treatment device
11．．．燃燒處理區11. . . Combustion treatment zone
18．．．圓筒形本體18. . . Cylindrical body
26．．．水堰26. . . Otter
21．．．冷卻區twenty one. . . Cooling zone
22、27、32、35、36、38、39．．．導管22, 27, 32, 35, 36, 38, 39. . . catheter
23．．．鰭板(擋板)twenty three. . . Fin plate
25．．．循環槽25. . . Circulation slot
28．．．噴水機構28. . . Water spray mechanism
30．．．泵30. . . Pump
31．．．洗滌區31. . . Washing area
31a．．．過濾器31a. . . filter
34．．．供應導管34. . . Supply catheter
37．．．預混合機37. . . Premixer
40．．．熱交換器40. . . Heat exchanger
41．．．溫度感測器41. . . Temperature sensor
42．．．泄漏感測器42. . . Leak sensor
W1、W3．．．水W1, W3. . . water
W2．．．冷卻水W2. . . Cooling water
Claims (15)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006328248 | 2006-12-05 | ||
| JP2007296395A JP4937886B2 (en) | 2006-12-05 | 2007-11-15 | Combustion exhaust gas treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200835545A TW200835545A (en) | 2008-09-01 |
| TWI406700B true TWI406700B (en) | 2013-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096146016A TWI406700B (en) | 2006-12-05 | 2007-12-04 | Combustion-type exhaust gas treatment apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4937886B2 (en) |
| KR (1) | KR101375202B1 (en) |
| CN (1) | CN101251259A (en) |
| TW (1) | TWI406700B (en) |
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| US7854792B2 (en) * | 2008-09-17 | 2010-12-21 | Airgard, Inc. | Reactive gas control |
| KR101253698B1 (en) * | 2010-08-06 | 2013-04-11 | 주식회사 글로벌스탠다드테크놀로지 | Burning apparatus for purifying noxious gas |
| JP5622686B2 (en) * | 2011-08-19 | 2014-11-12 | 大陽日酸株式会社 | Combustion abatement equipment |
| JP2013204923A (en) * | 2012-03-28 | 2013-10-07 | Daihatsu Motor Co Ltd | Evaporator for vehicle |
| TW201432204A (en) * | 2013-02-08 | 2014-08-16 | Wholetech System Hitech Ltd | Combustion type hazardous gas treatment device |
| CN104046956A (en) * | 2013-03-14 | 2014-09-17 | 友荃科技实业股份有限公司 | Combustion type harmful gas treatment device |
| JP6196481B2 (en) * | 2013-06-24 | 2017-09-13 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| GB2528444B (en) * | 2014-07-21 | 2018-06-20 | Edwards Ltd | Abatement apparatus |
| GB2528445B (en) | 2014-07-21 | 2018-06-20 | Edwards Ltd | Separator apparatus |
| JP5977419B1 (en) * | 2015-03-12 | 2016-08-24 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6659461B2 (en) * | 2016-05-23 | 2020-03-04 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6659471B2 (en) * | 2016-06-08 | 2020-03-04 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6836351B2 (en) * | 2016-08-18 | 2021-02-24 | 株式会社荏原製作所 | Exhaust gas treatment equipment |
| JP6895342B2 (en) | 2016-08-19 | 2021-06-30 | 株式会社荏原製作所 | Burner head for exhaust gas treatment equipment and its manufacturing method, and combustion chamber for exhaust gas treatment equipment, its manufacturing method and maintenance method |
| US10690341B2 (en) * | 2017-01-06 | 2020-06-23 | Alzeta Corporation | Systems and methods for improved waste gas abatement |
| GB2561190A (en) * | 2017-04-04 | 2018-10-10 | Edwards Ltd | Purge gas feeding means, abatement systems and methods of modifying abatement systems |
| SG10202001081TA (en) | 2017-07-07 | 2020-03-30 | Siw Eng Pte Ltd | Device and system for controlling decomposition oxidation of gaseous pollutants |
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| JP7076223B2 (en) * | 2018-02-26 | 2022-05-27 | 株式会社荏原製作所 | Wet abatement device |
| JP2020034180A (en) * | 2018-08-27 | 2020-03-05 | 国立大学法人埼玉大学 | Combustion furnace of harmful exhaust gas processing device using alternating electric fields |
| CN111495598B (en) * | 2020-04-26 | 2022-03-25 | 安徽顺达环保科技股份有限公司 | Device and method for stably maintaining water film uniformity of wet electric dust collector |
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Also Published As
| Publication number | Publication date |
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| CN101251259A (en) | 2008-08-27 |
| JP2008161861A (en) | 2008-07-17 |
| KR20080052414A (en) | 2008-06-11 |
| TW200835545A (en) | 2008-09-01 |
| KR101375202B1 (en) | 2014-03-17 |
| JP4937886B2 (en) | 2012-05-23 |
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