SG10202001081TA - Device and system for controlling decomposition oxidation of gaseous pollutants - Google Patents
Device and system for controlling decomposition oxidation of gaseous pollutantsInfo
- Publication number
- SG10202001081TA SG10202001081TA SG10202001081TA SG10202001081TA SG10202001081TA SG 10202001081T A SG10202001081T A SG 10202001081TA SG 10202001081T A SG10202001081T A SG 10202001081TA SG 10202001081T A SG10202001081T A SG 10202001081TA SG 10202001081T A SG10202001081T A SG 10202001081TA
- Authority
- SG
- Singapore
- Prior art keywords
- gaseous pollutants
- decomposition oxidation
- controlling decomposition
- controlling
- oxidation
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/346—Controlling the process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
- B01D21/267—Separation of sediment aided by centrifugal force or centripetal force by using a cyclone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
- B01D47/022—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by using a liquid curtain
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
- B01D47/063—Spray cleaning with two or more jets impinging against each other
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/14—Packed scrubbers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/64—Heavy metals or compounds thereof, e.g. mercury
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/73—After-treatment of removed components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/76—Gas phase processes, e.g. by using aerosols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/79—Injecting reactants
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/10—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust
- F01N3/24—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous by thermal or catalytic conversion of noxious components of exhaust characterised by constructional aspects of converting apparatus
- F01N3/26—Construction of thermal reactors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/08—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases using flares, e.g. in stacks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/102—Oxygen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/104—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/11—Air
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/20—Reductants
- B01D2251/202—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/20—Reductants
- B01D2251/208—Hydrocarbons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Biomedical Technology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Dispersion Chemistry (AREA)
- Toxicology (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Treating Waste Gases (AREA)
- Incineration Of Waste (AREA)
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Organic Chemistry (AREA)
- Processing Of Solid Wastes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762529795P | 2017-07-07 | 2017-07-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10202001081TA true SG10202001081TA (en) | 2020-03-30 |
Family
ID=64950263
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10202001081TA SG10202001081TA (en) | 2017-07-07 | 2018-07-05 | Device and system for controlling decomposition oxidation of gaseous pollutants |
SG10202001086WA SG10202001086WA (en) | 2017-07-07 | 2018-07-05 | Device and system for decomposing and oxidizing gaseous pollutant |
SG11202000101TA SG11202000101TA (en) | 2017-07-07 | 2018-07-05 | Device and system for controlling decomposition oxidation of gaseous pollutants |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10202001086WA SG10202001086WA (en) | 2017-07-07 | 2018-07-05 | Device and system for decomposing and oxidizing gaseous pollutant |
SG11202000101TA SG11202000101TA (en) | 2017-07-07 | 2018-07-05 | Device and system for controlling decomposition oxidation of gaseous pollutants |
Country Status (7)
Country | Link |
---|---|
US (4) | US10898853B2 (en) |
JP (3) | JP6968274B2 (en) |
KR (3) | KR102318517B1 (en) |
CN (5) | CN111306559A (en) |
MY (3) | MY195067A (en) |
SG (3) | SG10202001081TA (en) |
WO (1) | WO2019009811A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220017469A (en) | 2019-11-21 | 2022-02-11 | 에코시스 피티이.엘티디. | gaseous pollutant treatment equipment |
CN112370917A (en) * | 2020-10-30 | 2021-02-19 | 张全连 | VOCs industrial waste gas treatment system |
CN114923193B (en) * | 2022-06-07 | 2023-03-17 | 上海协微环境科技有限公司 | Harmful gas combustion reactor |
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JPS52146083A (en) * | 1976-05-27 | 1977-12-05 | Toshiba Corp | Burner for sealing sealed-beam type lamps |
US5123836A (en) * | 1988-07-29 | 1992-06-23 | Chiyoda Corporation | Method for the combustion treatment of toxic gas-containing waste gas |
US5462429A (en) * | 1993-10-20 | 1995-10-31 | Praxair Technology, Inc. | Mechanical wiper for waste gas incinerator |
JP3486022B2 (en) * | 1995-10-16 | 2004-01-13 | ジャパン・エア・ガシズ株式会社 | Exhaust gas treatment equipment |
KR0172185B1 (en) * | 1996-01-23 | 1999-02-18 | 김경균 | Apparatus and method for treating harmful waste gases |
JPH10137630A (en) * | 1996-11-11 | 1998-05-26 | Nikuni:Kk | Liquid treatment device |
JP4066107B2 (en) * | 1997-11-21 | 2008-03-26 | 株式会社荏原製作所 | Combustor for exhaust gas treatment |
US6153150A (en) * | 1998-01-12 | 2000-11-28 | Advanced Technology Materials, Inc. | Apparatus and method for controlled decomposition oxidation of gaseous pollutants |
EP1143197B1 (en) * | 1998-12-01 | 2017-03-29 | Ebara Corporation | Exhaust gas treating device |
JP3460122B2 (en) * | 1999-07-14 | 2003-10-27 | 日本酸素株式会社 | Combustion type abatement system and burner for combustion abatement system |
KR100328632B1 (en) * | 1999-08-14 | 2002-03-23 | 조현기 | Composite gas scrubber system |
JP2001059613A (en) * | 1999-08-20 | 2001-03-06 | Iwatani Internatl Corp | Pretreatment apparatus for exhaust gas from semiconductor manufacturing process |
JP3994605B2 (en) * | 1999-11-26 | 2007-10-24 | 株式会社日立製作所 | PFC gas processing method and processing apparatus |
JP2001165422A (en) * | 1999-12-10 | 2001-06-22 | Iwatani Internatl Corp | Pollution eliminating unit for exhaust gas from semiconductor process |
US6948929B2 (en) * | 2000-10-02 | 2005-09-27 | Ebara Corporation | Combustion type waste gas treatment system |
JP4211227B2 (en) | 2001-03-16 | 2009-01-21 | 株式会社日立製作所 | Perfluoride treatment method and treatment apparatus |
JP4009501B2 (en) * | 2002-06-25 | 2007-11-14 | 岩谷産業株式会社 | Combustion type vertical abatement system |
JP2004053219A (en) | 2002-07-24 | 2004-02-19 | Nippon Sanso Corp | Combustion detoxifying device |
JP2004068556A (en) | 2002-08-02 | 2004-03-04 | Tomoji Kato | Water tank for garden |
CN1580636A (en) * | 2003-08-04 | 2005-02-16 | 华懋科技股份有限公司 | Whirlpool-type reaction chamber poison gas processing apparatus and method |
CN1253236C (en) | 2003-09-09 | 2006-04-26 | 华懋科技股份有限公司 | Perfluoro compound exhaust gas treatment method |
US7569193B2 (en) * | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
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DE102006027882B4 (en) * | 2005-09-02 | 2009-04-30 | Clean Systems Korea Inc., Seongnam | Scrubber for treating semiconductor waste gas |
KR100623368B1 (en) * | 2005-09-02 | 2006-09-12 | 크린시스템스코리아(주) | Direct burn-wet scrubber for semiconductor manufacture equipment |
KR101036734B1 (en) * | 2005-10-31 | 2011-05-24 | 어플라이드 머티어리얼스, 인코포레이티드 | Process abatement reactor |
JP4937886B2 (en) * | 2006-12-05 | 2012-05-23 | 株式会社荏原製作所 | Combustion exhaust gas treatment equipment |
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-
2018
- 2018-07-05 CN CN202010115479.9A patent/CN111306559A/en active Pending
- 2018-07-05 CN CN201880045259.4A patent/CN111315971B/en active Active
- 2018-07-05 MY MYPI2020000096A patent/MY195067A/en unknown
- 2018-07-05 WO PCT/SG2018/050332 patent/WO2019009811A2/en active Application Filing
- 2018-07-05 SG SG10202001081TA patent/SG10202001081TA/en unknown
- 2018-07-05 MY MYPI2020000091A patent/MY194516A/en unknown
- 2018-07-05 JP JP2020522275A patent/JP6968274B2/en active Active
- 2018-07-05 KR KR1020207003872A patent/KR102318517B1/en active IP Right Grant
- 2018-07-05 KR KR1020207003134A patent/KR102295177B1/en active IP Right Grant
- 2018-07-05 MY MYPI2020000097A patent/MY194531A/en unknown
- 2018-07-05 CN CN202010115342.3A patent/CN111306558B/en active Active
- 2018-07-05 SG SG10202001086WA patent/SG10202001086WA/en unknown
- 2018-07-05 SG SG11202000101TA patent/SG11202000101TA/en unknown
- 2018-07-05 CN CN202010115341.9A patent/CN111237786B/en active Active
- 2018-07-05 KR KR1020207003869A patent/KR102308332B1/en active IP Right Grant
- 2018-07-05 CN CN202010115494.3A patent/CN111306560B/en active Active
-
2020
- 2020-01-07 US US16/736,612 patent/US10898853B2/en active Active
- 2020-01-07 US US16/736,481 patent/US10814271B2/en active Active
- 2020-01-07 US US16/736,669 patent/US10946334B2/en active Active
- 2020-02-10 JP JP2020020446A patent/JP6992100B2/en active Active
- 2020-02-10 JP JP2020020429A patent/JP7191056B2/en active Active
-
2021
- 2021-01-04 US US17/140,756 patent/US11406934B2/en active Active
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