JP2008161861A - Combustion-type exhaust gas treatment apparatus - Google Patents

Combustion-type exhaust gas treatment apparatus Download PDF

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JP2008161861A
JP2008161861A JP2007296395A JP2007296395A JP2008161861A JP 2008161861 A JP2008161861 A JP 2008161861A JP 2007296395 A JP2007296395 A JP 2007296395A JP 2007296395 A JP2007296395 A JP 2007296395A JP 2008161861 A JP2008161861 A JP 2008161861A
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exhaust gas
combustion
water
gas treatment
pipe
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JP4937886B2 (en
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Kotaro Kawamura
興太郎 川村
Hiroyuki Arai
裕之 新井
Yasutaka Muroga
安隆 室賀
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Ebara Corp
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Ebara Corp
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Priority to JP2007296395A priority Critical patent/JP4937886B2/en
Priority to KR1020070124919A priority patent/KR101375202B1/en
Priority to TW096146016A priority patent/TWI406700B/en
Priority to US11/987,764 priority patent/US8591819B2/en
Priority to EP07023594.0A priority patent/EP1933088B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/30—Technologies for a more efficient combustion or heat usage

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a combustion-type exhaust gas treatment apparatus, which can constitute a cylinder surrounding a combustion treatment chamber with an inexpensive material, and can reduce a cost and time of the maintenance by neither preventing a deposit of fine particles to the inner wall surface of the combustion treatment chamber, nor damaging the inner wall surface of the combustion treatment chamber due to a corrosive gas. <P>SOLUTION: The combustion-type exhaust gas treatment apparatus 10 mounts a combustion treatment part 11 of the exhaust gas to be treated, a cooling tower 21 cooling the exhaust gas combustion-treated at the combustion treatment part 11, a water washing part 31 collecting and removing a treatment reaction by-product produced by the combustion treatment of the exhaust gas to be treated by water washing. The combustion treatment part 11 comprises a combustor for exhaust gas treatment 12, and a metal material, the inner wall surface being subjected to a rough processing, and is provided with a cylinder 18 in which the exhaust gas is combustion-treated inside, and a mechanism 20 forming a water film A on the inner wall surface of the cylinder 18. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えばシランガス（ＳｉＨ４）、或いはハロゲン系のガス（ＮＦ３，ＣｌＦ３，ＳＦ６，ＣＨＦ３，Ｃ２Ｆ６，ＣＦ４等）を含む有害可燃性の排ガスを燃焼処理し、無害化するための燃焼式排ガス処理装置に関する。 The present invention combusts harmful flammable exhaust gas containing, for example, silane gas (SiH 4 ) or halogen-based gas (NF 3 , ClF 3 , SF 6 , CHF 3 , C 2 F 6 , CF 4, etc.) The present invention relates to a combustion type exhaust gas treatment device for detoxification.

例えば、半導体製造装置からはシランガス（ＳｉＨ４）、或いはハロゲン系のガス（ＮＦ３，ＣｌＦ３，ＳＦ６，ＣＨＦ３，Ｃ２Ｆ６，ＣＦ４）等の有害可燃ガスを含むガスが排出されるが、このような排ガスは、そのままでは大気に放出することはできない。そこで、これらの排ガスを除害装置に導いて、燃焼による酸化無害化処理を行うことが一般に行われている。この処理方法としては、助燃ガスを用いて炉内に火炎を形成し、この火炎により排ガスを燃焼させるようにしたものが広く採用されている（例えば、特許文献１）。 For example, silane gas (SiH 4 ) or halogen-containing gases (NF 3 , ClF 3 , SF 6 , CHF 3 , C 2 F 6 , CF 4 ) and other gases containing harmful combustible gases are discharged from the semiconductor manufacturing apparatus. However, such exhaust gas cannot be released into the atmosphere as it is. Therefore, it is generally performed that these exhaust gases are guided to a detoxification device and subjected to oxidation detoxification treatment by combustion. As this processing method, a method in which a flame is formed in a furnace using an auxiliary combustion gas and the exhaust gas is burned by this flame is widely adopted (for example, Patent Document 1).

半導体産業や液晶産業向け燃焼式排ガス処理装置は、排ガス処理において、燃焼処理副生成物として、多量の粉塵（主としてＳｉＯ２）の発生や多量の酸性ガスの発生が見込まれる。そのため、定期的に処理部内に付着堆積した粉体の除去メンテナンスが必要となるか、付着堆積した粉体をスクレーパーなどの機構を追加することで、燃焼処理室の筒体内壁面を定期的に掻き取ることが必要であった。 Combustion-type exhaust gas treatment apparatuses for the semiconductor industry and the liquid crystal industry are expected to generate a large amount of dust (mainly SiO 2 ) and a large amount of acid gas as a combustion treatment by-product in the exhaust gas treatment. For this reason, it is necessary to periodically perform maintenance to remove the powder that has adhered and accumulated in the processing section, or by adding a mechanism such as a scraper to the adhered and accumulated powder, the cylinder wall surface of the combustion processing chamber should be periodically scraped. It was necessary to take.

付着堆積する粉体は、主としてＳｉＯ２（二酸化珪素）であるが、これ以外にも有毒な粉体が入り混じる可能性が高く、さらにそれら粉体の粒子径はまちまちで、０．１ミクロン程度から数十ミクロン、または大きな塊状となっており、粉体除去メンテナンス時などには、吸引による健康被害など安全性の確立が他に必要な状態である。 The powder deposited and deposited is mainly SiO 2 (silicon dioxide), but there is a high possibility that other toxic powders are mixed in, and the particle size of these powders varies, and is about 0.1 microns. From 10 to several tens of microns or a large lump, it is necessary to establish safety such as health damage due to suction during powder removal maintenance.

また、粉体の掻き取り機構を設けた場合には、部品点数が増加することで、製品製造コストの上昇や定期的な掻き取り機構部品の交換が必要となり、ランニングコストの増加にも直結している。   In addition, when a powder scraping mechanism is provided, the number of parts increases, which necessitates an increase in product manufacturing cost and periodic replacement of scraping mechanism parts, which directly increases running costs. ing.

また、燃焼処理室の燃焼ガスは約１７００℃程度と高温であるので、燃焼処理室を囲む筒体にはアルミナ系ガラスセラミックス材料等の耐熱性の高い材料が用いられる。しかしながら、燃焼処理室は高温であり、例えばフッ素系や塩素系のガスが存在すると、燃焼処理室を囲む筒体内壁面が腐食され、消耗するので定期的に交換する必要がある。このため、高価な筒体の交換のためのコストがかかり、また、メンテナンスの手間が必要となる。   Further, since the combustion gas in the combustion processing chamber is as high as about 1700 ° C., a material having high heat resistance such as an alumina glass ceramic material is used for the cylinder surrounding the combustion processing chamber. However, the combustion processing chamber is at a high temperature. For example, if a fluorine-based or chlorine-based gas exists, the wall surface of the cylinder surrounding the combustion processing chamber is corroded and consumed, so that it must be replaced periodically. For this reason, the cost for replacement | exchange of an expensive cylinder body starts, and the effort of a maintenance is needed.

特開平１１−２１８３１７号公報JP-A-11-218317

本発明はこのような課題を解決するもので、燃焼処理室を囲む筒体を安価な材料で構成でき、且つ粉体が燃焼処理室内壁面に付着せず、腐食性ガスにより燃焼処理室内壁面が損傷せず、メンテナンスの手間とコストを低減できる燃焼式排ガス処理装置を提供することを目的とする。   The present invention solves such a problem, and the cylindrical body surrounding the combustion processing chamber can be made of an inexpensive material, and the powder does not adhere to the wall surface of the combustion processing chamber. An object of the present invention is to provide a combustion exhaust gas treatment device that is not damaged and that can reduce maintenance labor and costs.

本発明の燃焼式排ガス処理装置は、処理対象排ガスの燃焼処理部と、燃焼処理部で燃焼処理した排ガスを冷却する冷却部と、処理対象排ガスの燃焼処理によって発生する処理反応副生成物を水洗にて捕集除去する水洗部を搭載した燃焼式排ガス処理装置であって、燃焼処理部は、排ガス処理用燃焼器と、金属材料からなり、内壁面に荒れ加工が施され、排ガスがその内部で燃焼処理される筒体と、筒体の内壁面に水膜を形成する機構とを備えたことを特徴とする。   The combustion-type exhaust gas treatment apparatus of the present invention includes: a washing treatment unit for treating exhaust gas to be treated; a cooling unit for cooling the waste gas treated by the combustion treatment unit; and a treatment reaction by-product generated by the combustion treatment for the treatment target exhaust gas. Combustion-type exhaust gas treatment device equipped with a water washing part that collects and removes in the combustion process part. Combustion treatment part is made of exhaust gas treatment combustor and metal material, the inner wall surface is roughened, and the exhaust gas is inside And a mechanism for forming a water film on the inner wall surface of the cylinder.

本発明の燃焼式排ガス処理装置によれば、金属材料からなり、内壁面に荒れ加工が施され、排ガスがその内部で燃焼処理される筒体を備え、筒体の内壁面に水膜を形成するので、水膜により断熱が施され、例えばステンレス鋼等の安価な材料を筒体に用いることができる。そして、筒体の内壁面に水膜を形成するので、粉体が水膜により洗い流され、筒体の内壁面に付着せず、また腐食性ガスが水膜により洗い流され、筒体の内壁面が損傷しない。これにより、ステンレス鋼等の安価な材料を筒体に用いることができ、筒体自体の製造コストを低減出来ると共に、メンテナンスの手間とコストを低減出来る。   According to the combustion type exhaust gas treatment apparatus of the present invention, a metal material is provided, the inner wall surface is roughened, and the exhaust gas is combusted inside thereof, and a water film is formed on the inner wall surface of the cylinder body. Therefore, heat insulation is performed by the water film, and an inexpensive material such as stainless steel can be used for the cylindrical body. And since the water film is formed on the inner wall surface of the cylinder, the powder is washed away by the water film, does not adhere to the inner wall surface of the cylinder, and the corrosive gas is washed away by the water film. Will not be damaged. Thereby, cheap materials, such as stainless steel, can be used for a cylinder, and while being able to reduce the manufacturing cost of cylinder itself, the effort and cost of maintenance can be reduced.

以下、本発明の実施形態について、添付図面を参照して説明する。なお、各図中、同一の作用または機能を有する部材または要素には、同一の符号を付して説明する。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, in each figure, the same code | symbol is attached | subjected and demonstrated to the member or element which has the same effect | action or function.

図１は、本発明の一実施形態の燃焼式排ガス処理装置における燃焼処理部を示す。この燃焼処理部１１は、排ガス処理用燃焼器１２を備え、ノズル１３から供給される排ガスを、空気ノズル１４から供給される空気の旋回流と、助燃ガスノズル１５から供給される助燃ガスと混合して燃焼し、火炎１７を形成する。火炎１７の下流側には、円筒状の筒体１８に囲まれた燃焼処理室（保炎室）１９が配置され、燃焼処理室１９で排ガスの燃焼処理が進行する。排ガス処理用燃焼器１２と筒体１８との間には、水流フランジ２０を備え、水が筒体１８の内壁面に沿って流下し、筒体１８の内壁面に水膜Ａを形成する。   FIG. 1 shows a combustion treatment section in a combustion exhaust gas treatment apparatus according to an embodiment of the present invention. The combustion processing unit 11 includes an exhaust gas processing combustor 12, and mixes the exhaust gas supplied from the nozzle 13 with the swirling flow of air supplied from the air nozzle 14 and the auxiliary combustion gas supplied from the auxiliary combustion gas nozzle 15. To form a flame 17. A combustion processing chamber (flame holding chamber) 19 surrounded by a cylindrical tube 18 is disposed on the downstream side of the flame 17, and exhaust gas combustion processing proceeds in the combustion processing chamber 19. A water flow flange 20 is provided between the exhaust gas treatment combustor 12 and the cylinder 18, and water flows down along the inner wall surface of the cylinder 18, and a water film A is formed on the inner wall surface of the cylinder 18.

この実施形態では、筒体１８としてステンレス鋼が用いられ、この筒体１８の内壁面に荒れ加工が施されている。この荒れ加工により内壁面の濡れ性が向上し、均一な水膜を内壁面の全面に形成できる。例えば疎水性であるステンレス鋼の内表面を鏡面に加工すると、水滴が生じやすくなり、均一な水膜を内壁面の全面に形成することは困難である。荒れ加工を筒体１８の内壁面の全面に施すことで、水切れの存在しない安定した水膜を筒体１８の内壁面の全面に確保することができる。   In this embodiment, stainless steel is used as the cylinder 18, and the inner wall surface of the cylinder 18 is roughened. This roughing process improves the wettability of the inner wall surface, and a uniform water film can be formed on the entire inner wall surface. For example, when the inner surface of stainless steel, which is hydrophobic, is processed into a mirror surface, water droplets are easily generated, and it is difficult to form a uniform water film on the entire inner wall surface. By applying the roughing process to the entire inner wall surface of the cylindrical body 18, a stable water film free from water breakage can be secured on the entire inner wall surface of the cylindrical body 18.

荒れ加工は、圧縮空気や遠心力などを用いて研削材（例えば砂、ガラスビーズなど）を加工面に高速で噴射し、その衝撃力で適切な粗さの粗面を生み出すブラスト加工により形成される。また、荒れ加工は、多数刃工具による切削加工（ブローチ加工）、工具を上下方向に直線運動させ、工作物の送り運動と組み合わせて削るスプライン加工などの機械加工を用いて形成することができる。また、薬品（硝酸、フッ酸、塩酸、硫酸など）を入れた槽に浸漬し、取り出して水洗・乾燥を行う酸洗い、ガラス繊維系・ケイ素ポリマー・テフロン（登録商標）などの親水性膜を内面に塗布する親水性コーティングなどの表面処理によっても形成できる。   Roughening is formed by blasting that uses compressed air or centrifugal force to inject abrasives (eg sand, glass beads, etc.) onto the work surface at a high speed and generates a rough surface with an appropriate roughness using the impact force. The The rough machining can be formed by machining such as cutting (broaching) with a multi-blade tool, or spline machining in which the tool is linearly moved in the vertical direction and cut in combination with the feed movement of the workpiece. In addition, it is immersed in a tank containing chemicals (nitric acid, hydrofluoric acid, hydrochloric acid, sulfuric acid, etc.), taken out, washed with water and dried, and washed with water, dried with a hydrophilic film such as glass fiber, silicon polymer, and Teflon (registered trademark). It can also be formed by a surface treatment such as a hydrophilic coating applied to the inner surface.

排ガスの分解には１７００℃以上の高温が好ましく、燃焼処理室１９内の温度はこの程度の温度に維持される。水膜Ａの厚さは少なくとも２ｍｍ以上となるように、水流フランジ２０からの水の供給量が調整される。厚さ２ｍｍ以上の水膜Ａを形成することで、水膜Ａにより断熱が施され、筒体１８の温度は略常温（５０℃以下）に保たれる。これにより、高価なアルミナ系ガラスセラミックス材料に代えて、例えばステンレス鋼等の安価な材料を筒体１８に用いることができる。なお、水流フランジ２０における水温を３０℃とすると、筒体１８の出口における水温を数十℃以下に抑えることができる。   A high temperature of 1700 ° C. or higher is preferable for the decomposition of the exhaust gas, and the temperature in the combustion processing chamber 19 is maintained at this level. The amount of water supplied from the water flow flange 20 is adjusted so that the thickness of the water film A is at least 2 mm or more. By forming the water film A having a thickness of 2 mm or more, heat insulation is provided by the water film A, and the temperature of the cylindrical body 18 is maintained at substantially normal temperature (50 ° C. or less). Thereby, it can replace with expensive alumina type glass-ceramics material, and can use cheap materials, such as stainless steel, for the cylinder 18, for example. If the water temperature at the water flow flange 20 is 30 ° C., the water temperature at the outlet of the cylindrical body 18 can be suppressed to several tens of degrees C. or less.

筒体１８の内壁面に水膜Ａを形成するので、燃焼処理室１９で形成される粉体が筒体１８の内壁面に付着しようとすると水膜Ａの水流により洗い流され、筒体１８の内壁面に付着しない。同様に、腐食性ガス分子が筒体１８の内壁面に付着しようとすると水膜Ａの水流により洗い流され、例えばフッ素系の処理反応副生成物であると薄いフッ酸となり、筒体１８の内壁面を損傷しない。これにより、ステンレス鋼等の安価な金属材料を筒体１８に用いても、内壁面に粉体が付着せず、酸化性ガスによる腐食が生じないので、メンテナンスの手間とコストを大幅に低減出来る。   Since the water film A is formed on the inner wall surface of the cylindrical body 18, when the powder formed in the combustion processing chamber 19 tries to adhere to the inner wall surface of the cylindrical body 18, the water film A is washed away by the water flow of the water film A. Does not adhere to the inner wall. Similarly, when corrosive gas molecules try to adhere to the inner wall surface of the cylinder 18, it is washed away by the water flow of the water film A. For example, if it is a fluorine-based treatment reaction by-product, it becomes thin hydrofluoric acid, Does not damage the wall. As a result, even if an inexpensive metal material such as stainless steel is used for the cylindrical body 18, no powder adheres to the inner wall surface, and no corrosion due to oxidizing gas occurs, so that the maintenance labor and cost can be greatly reduced. .

筒体１８の内壁面は、図１の例では上流側から下流側に向かって内径が同一な直胴型であるが、上流側から下流側に向かって内径が縮小するコニカル型を用いてもよい。直胴型のメリットは、処理反応部に溶接部を無くせるので水切れの可能性が少なくなる、筒体の製造加工が容易で製造コストを低減出来ることなどである。また、コニカル型のメリットは、下細りになっているので水膜が形成し易い点にあるが、溶接部で水切れを起こさないようにするために溶接の技術力を要し、製造コストが高くなる。   The inner wall surface of the cylindrical body 18 is a straight body type having the same inner diameter from the upstream side toward the downstream side in the example of FIG. 1, but a conical type whose inner diameter decreases from the upstream side toward the downstream side may be used. Good. The advantages of the straight body type are that the welded part can be eliminated from the processing reaction part, so that the possibility of running out of water is reduced, the manufacturing process of the cylinder is easy, and the manufacturing cost can be reduced. Also, the merit of the conical type is that it is easy to form a water film because it is thinned down, but it requires welding technology to prevent water drainage at the welded part, and the manufacturing cost is high. Become.

図２乃至図１０は、筒体の内壁面に水膜を形成する各種機構の構成例を示す。
図２は水流フランジ（水膜形成機構）２０の構成例を示す。この例の水膜形成機構２０は、環状の水溜め部２４と、堰１８ａとを備えている。堰１８ａは水溜め部２４の一部を構成している。堰１８ａの頂部を均一な高さとすることにより円筒状の筒体１８の内壁面に沿って均質な膜厚の水膜を形成することができる。図３は円筒状堰の頂部の内周面側を円弧状とした堰１８ｂを示す。この例の水膜形成機構の基本的構成は図２と同様である。これにより、堰１８ｂを越える水の流れを滑らかなものとすることができる。 2 to 10 show configuration examples of various mechanisms for forming a water film on the inner wall surface of the cylindrical body.
FIG. 2 shows a configuration example of the water flow flange (water film forming mechanism) 20. The water film forming mechanism 20 of this example includes an annular water reservoir 24 and a weir 18a. The weir 18 a constitutes a part of the water reservoir 24. By setting the top of the weir 18a to a uniform height, a water film having a uniform film thickness can be formed along the inner wall surface of the cylindrical tubular body 18. FIG. 3 shows a weir 18b in which the inner peripheral surface side of the top of the cylindrical weir has an arc shape. The basic structure of the water film formation mechanism in this example is the same as that shown in FIG. Thereby, the flow of water over the weir 18b can be made smooth.

図４は図２の変形例であり、堰の頂部をＬ字型とした堰１８ｃを示す。この例の水膜形成機構は、環状の水溜め部２４と、堰１８ｃとを備えている。堰１８ｃは水溜め部２４の一部を構成している。図５は堰の頂部をＬ字型とし、さらに円筒状堰の頂部の内周面側を円弧状とした堰１８ｄを示す。この例の水膜形成機構の基本的構成は図４と同様である。図６は、円筒状の堰１８ｅの径方向内側に円筒部材３３を配置し、堰１８ｅと円筒部材３３との間の微小な隙間から水を流下させる例を示す。この例の水膜形成機構は、環状の水溜め部２４と、堰１８ｅと、円筒部材３３とを備えている。堰１８ｅは水溜め部２４の一部を構成している。   FIG. 4 is a modification of FIG. 2 and shows a weir 18c having an L-shaped top portion of the weir. The water film forming mechanism of this example includes an annular water reservoir 24 and a weir 18c. The weir 18 c constitutes a part of the water reservoir 24. FIG. 5 shows a weir 18d in which the top of the weir is L-shaped and the inner peripheral surface side of the top of the cylindrical weir is arcuate. The basic structure of the water film formation mechanism in this example is the same as that shown in FIG. FIG. 6 shows an example in which the cylindrical member 33 is arranged on the radially inner side of the cylindrical weir 18e, and water flows down from a minute gap between the weir 18e and the cylindrical member 33. The water film forming mechanism of this example includes an annular water reservoir 24, a weir 18e, and a cylindrical member 33. The weir 18e constitutes a part of the water reservoir 24.

図７（ａ）および図７（ｂ）は円筒状堰の頂部の下に矩形の開口２０ｆを設け、この開口２０ｆから水を円筒状の筒体１８の内周面に流出させるようにした堰１８ｆを示す。この例の水膜形成機構は、環状の水溜め部２４と、堰１８ｃと、堰１８ｃに形成された複数の開口２０ｆとを備えている。図８（ａ）および図８（ｂ）は円筒状の筒体１８の内周面にらせん状に水流を形成するようにした流出口２０ｇを示す。この例の水膜形成機構は、筒体１８の内周面に形成された複数の流出口２０ｇを備えている。すなわち、流出口２０ｇは円筒状の筒体１８の内周面に沿って水平方向に水流を形成する。流出口２０ｇが複数個配置されているので、これにより筒体１８の内周面に均質な膜厚の水膜が形成される。図９（ａ）乃至図９（ｃ）は、同様に円筒状の筒体１８の内周面にらせん状に水流を形成するようにした流出口２０ｈを示す。この例の水膜形成機構は、環状の水溜め部２４と、筒体１８に形成された、縦長に延びる複数の流出口２０ｈとを備えている。ここで、流出口２０ｈは一辺が開口した矩形状をなしていて、筒体１８の内面に対して水平かつ接線方向に水を流出させることで、矩形状をなす流出口２０ｈも水膜で覆われる構造となっている。   7A and 7B show a weir in which a rectangular opening 20f is provided below the top of the cylindrical weir and water flows out from the opening 20f to the inner peripheral surface of the cylindrical tubular body 18. 18f is shown. The water film forming mechanism of this example includes an annular water reservoir 24, a weir 18c, and a plurality of openings 20f formed in the weir 18c. FIG. 8A and FIG. 8B show an outlet 20 g that forms a water flow in a spiral shape on the inner peripheral surface of the cylindrical tube 18. The water film forming mechanism of this example includes a plurality of outlets 20 g formed on the inner peripheral surface of the cylindrical body 18. That is, the outlet 20g forms a water flow in the horizontal direction along the inner peripheral surface of the cylindrical tube 18. Since a plurality of outlets 20g are arranged, a water film having a uniform film thickness is formed on the inner peripheral surface of the cylindrical body 18 by this. 9 (a) to 9 (c) show an outlet 20h in which a water flow is formed spirally on the inner peripheral surface of the cylindrical cylindrical body 18 similarly. The water film forming mechanism of this example includes an annular water reservoir 24 and a plurality of outlets 20 h that are formed in the cylindrical body 18 and extend vertically. Here, the outflow port 20h has a rectangular shape with one side open, and the rectangular outflow port 20h is covered with a water film by allowing water to flow horizontally and tangentially with respect to the inner surface of the cylindrical body 18. It has a structure that is called.

図１０（ａ）および図１０（ｂ）は、水溜め部２４に接線方向から水を供給することにより該水溜め部２４に旋回流を形成させ、堰１８ｉから溢れ出る水がらせん状に流れるようにした例を示す。この例の水膜形成機構は、環状の水溜め部２４と、堰１８ｉと、水溜め部２４に接線方向から水を供給する少なくとも１つの供給口２０ｉとを備えている。堰１８ｉは水溜め部２４の一部を構成している。供給口２０ｉから水溜め部２４に水を供給すると、この水溜め部２４に水の旋回流が形成される。その結果、水溜め部２４内の水位が全周方向において均一に上昇し、水は堰１８ｉから筒体１８の内面に均一に溢れ出る。供給口２０ｉは、１つまたは複数であってもよい。供給口２０ｉが１つの場合であっても、水溜め部２４には水の旋回流が形成されるので、筒体１８の内面に均一な水膜を形成することができる。この構成例によれば、排ガス処理装置１０の設置条件によって筒体１８が水平方向からある程度傾いても（例えば、長さ２００ｃｍに対して高さ１ｃｍ程度の傾斜）、均一な水膜を安定して形成することができる。   10 (a) and 10 (b), when water is supplied to the water reservoir 24 from the tangential direction, a swirl flow is formed in the water reservoir 24, and the water overflowing from the weir 18i flows spirally. An example of this is shown. The water film forming mechanism of this example includes an annular water reservoir 24, a weir 18i, and at least one supply port 20i that supplies water to the water reservoir 24 from a tangential direction. The weir 18 i constitutes a part of the water reservoir 24. When water is supplied from the supply port 20 i to the water reservoir 24, a swirling flow of water is formed in the water reservoir 24. As a result, the water level in the water reservoir 24 rises uniformly in the entire circumferential direction, and the water uniformly overflows from the weir 18i to the inner surface of the cylindrical body 18. One or a plurality of supply ports 20i may be provided. Even if there is only one supply port 20 i, a swirl flow of water is formed in the water reservoir 24, so that a uniform water film can be formed on the inner surface of the cylindrical body 18. According to this configuration example, even if the cylinder 18 is inclined to some extent from the horizontal direction depending on the installation conditions of the exhaust gas treatment device 10 (for example, an inclination of about 1 cm in height with respect to a length of 200 cm), a uniform water film is stabilized. Can be formed.

図１１は、燃焼式排ガス処理装置１０の全体構成例を示す。燃料と酸素とは配管３５，３６を介して予混合器３７に供給され、ここで混合されて予混合燃料が形成される。この予混合燃料は燃焼処理部１１に配管３８を介して供給される。また、排ガスを燃焼（酸化）させるための酸素源となる空気が配管３９を介して燃焼処理部１１に供給される。   FIG. 11 shows an example of the overall configuration of the combustion-type exhaust gas treatment apparatus 10. The fuel and oxygen are supplied to the premixer 37 via the pipes 35 and 36, and are mixed here to form a premixed fuel. This premixed fuel is supplied to the combustion processing unit 11 via a pipe 38. Further, air serving as an oxygen source for burning (oxidizing) the exhaust gas is supplied to the combustion processing unit 11 via the pipe 39.

燃焼式排ガス処理装置１０は、筒体１８の下流側に燃焼処理した排ガスを冷却する冷却部２１と、筒体１８の内壁面に水膜Ａを形成した水を貯留して循環させる循環タンク２５とを備えている。排ガスを冷却する冷却部２１は、筒体１８の下端部と循環タンク２５とを接続する配管２２と、配管２２から分岐して水洗部３１と接続する配管２７とを備えている。配管２７は、配管２２から分岐して上方に向けて傾斜し、垂直管を介して水洗部（水洗室）３１の下端に接続される。配管２７の垂直管との接続部分の近傍に配管２７の内壁に水膜を形成する散水装置２８を備えている。   The combustion-type exhaust gas treatment apparatus 10 includes a cooling unit 21 that cools the exhaust gas that has been subjected to combustion treatment downstream of the cylinder 18, and a circulation tank 25 that stores and circulates water in which the water film A is formed on the inner wall surface of the cylinder 18. And. The cooling unit 21 that cools the exhaust gas includes a pipe 22 that connects the lower end of the cylindrical body 18 and the circulation tank 25, and a pipe 27 that branches from the pipe 22 and connects to the water washing unit 31. The pipe 27 branches from the pipe 22 and is inclined upward, and is connected to the lower end of the water washing section (water washing chamber) 31 through a vertical pipe. A watering device 28 for forming a water film on the inner wall of the pipe 27 is provided in the vicinity of the connection portion of the pipe 27 with the vertical pipe.

配管２２と配管２７とは、配管２２は筒体１８から流下する水膜により、配管２７は散水装置２８から散水して形成される水膜により管内壁の全周面が水膜により被覆されている。この水膜により断熱されるので、燃焼処理された排ガスは高温であるが配管２２，２７自体は略常温（５０℃以下）に維持され、腐食性ガスによる損傷もないため、安価なステンレス鋼を配管２２，２７の材料として用いることができる。なお、従来から、ステンレス鋼等の金属材料で構成された配管の接ガス部表面に耐食性のある材料（テフロン（登録商標）やＰＶＣ材料）を化学的に蒸着したり、物理的なコーティング、塗布、または貼り付けるなどの対策を施している場合があるが、このような対策も不要となる。   The pipe 22 and the pipe 27 are configured such that the pipe 22 is covered by a water film flowing down from the cylindrical body 18, and the pipe 27 is covered by a water film formed by spraying water from the water sprinkler 28. Yes. Because it is insulated by this water film, the combustion-treated exhaust gas is hot, but the pipes 22 and 27 themselves are maintained at substantially normal temperature (50 ° C. or less), and are not damaged by corrosive gas. It can be used as a material for the pipes 22 and 27. Conventionally, a corrosion-resistant material (Teflon (registered trademark) or PVC material) is chemically vapor-deposited on the surface of the gas contact part of a pipe made of a metal material such as stainless steel, or is physically coated or applied. In some cases, measures such as pasting are applied, but such measures are also unnecessary.

配管２２または配管２７の内壁に、フィンまたは邪魔板などの冷却を促進する機構を設けることが好ましい。フィンまたは邪魔板などの冷却を促進する機構の例を図１２乃至図１６に示す。図１２（ａ）および図１２（ｂ）は配管２２の内周面にリング状のフィン２３を配置したものである。図１３（ａ）および図１３（ｂ）は同様にリング状のフィン２３を設けたものであるが、図１２（ａ）および図１２（ｂ）の例ではフィン２３の断面が矩形状であるのに対し、図１３（ａ）および図１３（ｂ）の例ではフィン２３の断面が三角形状である点で相違する。図１４（ａ）および図１４（ｂ）は、配管２２の流れ方向に沿って傾斜した短いフィン２３を設けたものである。図１５（ａ）および図１５（ｂ）は配管２２の内周に半月型の邪魔板２３を設けたものである。半月型の邪魔板２３は、配管内の内周の一部分に沿うような形状に構成されており、配管内で高さと円周上の位置をずらして取り付けられている。排ガス流は配管２２の内壁と邪魔板２３に接触しながら流れる。このようにして、水膜に被覆されたフィンまたは邪魔板などにより、排ガスの冷却効果が促進される。なお、図１６（ａ）および図１６（ｂ）は、らせん状にフィン２３を配管２２の内周面に設けたものである。   It is preferable to provide a mechanism for promoting cooling of fins or baffle plates on the inner wall of the pipe 22 or the pipe 27. Examples of mechanisms for promoting cooling of fins or baffle plates are shown in FIGS. 12A and 12B show the ring-shaped fins 23 arranged on the inner peripheral surface of the pipe 22. 13 (a) and 13 (b) are similarly provided with ring-shaped fins 23. In the examples of FIGS. 12 (a) and 12 (b), the fins 23 have a rectangular cross section. On the other hand, the example of FIG. 13A and FIG. 13B is different in that the cross section of the fin 23 is triangular. FIG. 14A and FIG. 14B are provided with short fins 23 that are inclined along the flow direction of the pipe 22. 15A and 15B show a case where a half-moon baffle plate 23 is provided on the inner periphery of the pipe 22. The half-moon-shaped baffle plate 23 is formed in a shape along a part of the inner circumference in the pipe, and is attached with the height and the position on the circumference shifted in the pipe. The exhaust gas flow flows while contacting the inner wall of the pipe 22 and the baffle plate 23. In this manner, the exhaust gas cooling effect is promoted by the fins or baffle plates covered with the water film. In FIGS. 16A and 16B, the fins 23 are provided on the inner peripheral surface of the pipe 22 in a spiral shape.

燃焼式排ガス処理装置１０において、水洗部３１はフィルタ３１ａと散水装置３１ｂとを備えている。燃焼した排ガスは冷却部２１で冷却された後、水洗部３１に導入される。この水洗部３１は、排ガスの燃焼処理によって発生する粉体および酸化性ガスなどの処理反応副生成物を水洗にて捕集除去する。フィルタ３１ａにより除去された粉体等は散水装置３１ｂの散水により下方に落下し、配管２７，２２を通り、循環タンク２５に流入し、貯留される。燃焼処理により無害化され、冷却部２１で冷却され、水洗部３１で水洗処理された処理済排ガスは配管３２を介して大気中などに排気される。   In the combustion exhaust gas treatment apparatus 10, the water washing section 31 includes a filter 31a and a water sprinkler 31b. The burned exhaust gas is cooled by the cooling unit 21 and then introduced into the water washing unit 31. The water washing section 31 collects and removes processing reaction by-products such as powder and oxidizing gas generated by the exhaust gas combustion treatment by water washing. The powder or the like removed by the filter 31a falls downward due to the watering of the watering device 31b, passes through the pipes 27 and 22, flows into the circulation tank 25, and is stored. The treated exhaust gas that has been rendered harmless by the combustion process, cooled by the cooling unit 21, and washed by the water washing unit 31 is exhausted to the atmosphere or the like via the pipe 32.

循環タンク２５には堰２６が設けられ、配管２２を流下した水は一旦堰２６の図示左側の室に入り、左側の室から堰２６を越えた水が堰２６の図示右側の室に入り、ポンプ３０により吸引され、供給配管３４を通って熱交換器４０に送られ、この熱交換器４０で冷却水と熱交換され、好ましい温度に調温された後、循環水として再利用される。タンク２５の堰２６の左側の室には、粉体を多量に含む水が流入するが、粉体の内、粒径の大きいものは、重いので室底部に沈み、粒径のごく小さいものは軽いので堰２６を越え、図示右側の室に入り、循環水として利用される水中に混入する。循環水として利用する上で支障のない混入粉体の粒径は５０μｍ程度と考えられ、堰２６の高さは粒径５０μｍ以上の粉体が越えられない高さに設定することが好ましい。   The circulation tank 25 is provided with a weir 26, and the water flowing down the pipe 22 once enters the left chamber of the weir 26 in the figure, and the water beyond the weir 26 from the left chamber enters the right chamber of the weir 26 in the figure. It is sucked by the pump 30, sent to the heat exchanger 40 through the supply pipe 34, heat-exchanged with the cooling water in the heat exchanger 40, adjusted to a preferred temperature, and then reused as circulating water. Water containing a large amount of powder flows into the chamber on the left side of the weir 26 of the tank 25. Of the powder, those with a large particle size sink to the bottom of the chamber because they are heavy, and those with a very small particle size Since it is light, it passes over the weir 26 and enters the chamber on the right side of the figure, and enters the water used as circulating water. The particle size of the mixed powder that does not hinder the use as circulating water is considered to be about 50 μm, and the height of the weir 26 is preferably set to a height at which the powder having a particle size of 50 μm or more cannot be exceeded.

熱交換器４０で調温された水は、Ｗ１として水流フランジ２０に供給され、筒体１８の内壁面の水膜Ａを形成し、さらに配管２２の内周面に水膜を形成し、循環タンク２５に戻るように循環する。また、熱交換器４０で調温された水の一部は、水洗部３１の散水装置３１ｂに供給され、循環タンク２５に戻るように循環する。さらに、熱交換器４０で調温された水の一部は、散水装置２８に供給され、配管２２の内周面に水膜を形成した後、循環タンク２５に戻るように循環する。従って、この燃焼式排ガス処理装置１０においては、使用する水の大部分に循環水を用いて運転が可能であるので、市水、工業用水等の補給がごく僅かな量で済むという利点がある。また、水洗後の水は薄いフッ酸となる場合があるが、循環水として循環利用されるので、外部に放出されないという環境上の利点がある。   The water adjusted in temperature by the heat exchanger 40 is supplied to the water flow flange 20 as W1, forms a water film A on the inner wall surface of the cylindrical body 18, and further forms a water film on the inner peripheral surface of the pipe 22 for circulation. Circulate back to tank 25. A part of the water adjusted in temperature by the heat exchanger 40 is supplied to the watering device 31 b of the water washing section 31 and circulates back to the circulation tank 25. Further, a part of the water adjusted in temperature by the heat exchanger 40 is supplied to the sprinkler 28, forms a water film on the inner peripheral surface of the pipe 22, and then circulates back to the circulation tank 25. Therefore, the combustion exhaust gas treatment apparatus 10 can be operated using circulating water for most of the water used, and therefore has an advantage that only a small amount of city water, industrial water, or the like needs to be replenished. . In addition, although the water after washing may be thin hydrofluoric acid, it is recycled as circulating water, so there is an environmental advantage that it is not released to the outside.

熱交換器４０に供給される冷却水の一部は、排ガス処理用燃焼器１２を冷却するための冷却水Ｗ２として、燃焼処理部１１に設けられた図示しない冷却水路に供給される。また、ポンプ３０によって移送される水の一部Ｗ３は、循環タンク２５の側部から循環タンク２５内に流入するようになっている。流入した水は、循環タンク２５の底部に堆積した副生成物を堰２６の方に押し流す。これにより、配管２２の下端開口部が副生成物によって閉塞してしまうことが防止される。   A part of the cooling water supplied to the heat exchanger 40 is supplied as a cooling water W2 for cooling the exhaust gas processing combustor 12 to a cooling water channel (not shown) provided in the combustion processing unit 11. In addition, a part of the water W <b> 3 transferred by the pump 30 flows into the circulation tank 25 from the side of the circulation tank 25. The inflowing water pushes by-products accumulated at the bottom of the circulation tank 25 toward the weir 26. Thereby, it is prevented that the lower end opening part of the piping 22 is blocked by a by-product.

さらに、この燃焼式排ガス処理装置１０においては、筒体１８に温度センサ４１を備え、筒体１８の温度上昇を監視している。万一、筒体１８の内壁面に水切れなどが生じると、その部分で断熱効果がなくなり、筒体１８は直接高温の燃焼排ガスと接触し、損傷を受けることになる。このような事態を検出するため、筒体１８に温度センサ４１を備え、安全確保を図っている。   Further, in the combustion exhaust gas treatment apparatus 10, the cylinder 18 is provided with a temperature sensor 41 to monitor the temperature rise of the cylinder 18. In the unlikely event that water runs out on the inner wall surface of the cylindrical body 18, the heat insulating effect is lost at that portion, and the cylindrical body 18 is directly in contact with the high-temperature combustion exhaust gas and is damaged. In order to detect such a situation, the cylinder 18 is provided with a temperature sensor 41 to ensure safety.

また、筒体１８の受け皿に相当する部分に漏水センサ４２を備えている。例えば、筒体１８に損傷があり、貫通孔がある場合には、漏水センサ４２でこれを検出することができる。このように、漏水センサ４２を備えることで、安全性を向上できる。   Further, a leak sensor 42 is provided in a portion corresponding to the tray of the cylindrical body 18. For example, when the cylinder 18 is damaged and there is a through hole, the leak sensor 42 can detect this. Thus, by providing the water leakage sensor 42, safety can be improved.

これまで本発明の一実施形態について説明したが、本発明は上述の実施形態に限定されず、その技術的思想の範囲内において種々異なる形態にて実施されてよいことは勿論である。   Although one embodiment of the present invention has been described so far, the present invention is not limited to the above-described embodiment, and may of course be implemented in various forms within the scope of the technical idea.

本発明の一実施形態の燃焼処理部を示す断面図である。It is sectional drawing which shows the combustion process part of one Embodiment of this invention. 水膜形成機構の例を示す断面図である。It is sectional drawing which shows the example of a water film formation mechanism. 水膜形成機構の変形例を示す断面図である。It is sectional drawing which shows the modification of a water film formation mechanism. 水膜形成機構の他の変形例を示す断面図である。It is sectional drawing which shows the other modification of a water film formation mechanism. 水膜形成機構の他の変形例を示す断面図である。It is sectional drawing which shows the other modification of a water film formation mechanism. 水膜形成機構の他の変形例を示す断面図である。It is sectional drawing which shows the other modification of a water film formation mechanism. 図７（ａ）は水膜形成機構の他の変形例を示す断面図であり、図７（ｂ）は図７（ａ）に示す水膜形成機構の正面図である。FIG. 7A is a cross-sectional view showing another modification of the water film forming mechanism, and FIG. 7B is a front view of the water film forming mechanism shown in FIG. 図８（ａ）は水膜形成機構の他の変形例を示す平面図であり、図８（ｂ）は図８（ａ）に示す水膜形成機構の断面図である。FIG. 8A is a plan view showing another modification of the water film forming mechanism, and FIG. 8B is a cross-sectional view of the water film forming mechanism shown in FIG. 図９（ａ）は水膜形成機構の他の変形例を示す平面図であり、図９（ｂ）は図９（ａ）に示す水膜形成機構の断面図であり、図９（ｂ）は図９（ａ）に示す水膜形成機構の正面図である。FIG. 9A is a plan view showing another modification of the water film forming mechanism, FIG. 9B is a cross-sectional view of the water film forming mechanism shown in FIG. 9A, and FIG. FIG. 10 is a front view of the water film forming mechanism shown in FIG. 図１０（ａ）は水膜形成機構の他の変形例を示す断面図であり、図１０（ｂ）は図１０（ａ）に示す水膜形成機構の平面図である。FIG. 10A is a cross-sectional view showing another modification of the water film forming mechanism, and FIG. 10B is a plan view of the water film forming mechanism shown in FIG. 本発明の一実施形態の燃焼式排ガス処理装置を示すブロック図である。It is a block diagram which shows the combustion type exhaust gas processing apparatus of one Embodiment of this invention. 図１２（ａ）は冷却を促進する機構の構造例を示す平面図であり、図１２（ｂ）は図１２（ａ）に示す機構の断面図である。12A is a plan view showing a structural example of a mechanism that promotes cooling, and FIG. 12B is a cross-sectional view of the mechanism shown in FIG. 図１３（ａ）は冷却を促進する機構の他の構造例を示す平面図であり、図１３（ｂ）は図１３（ａ）に示す機構の断面図である。FIG. 13A is a plan view showing another structural example of a mechanism for promoting cooling, and FIG. 13B is a cross-sectional view of the mechanism shown in FIG. 図１４（ａ）は冷却を促進する機構の他の構造例を示す平面図であり、図１４（ｂ）は図１４（ａ）に示す機構の断面図である。FIG. 14A is a plan view showing another structural example of a mechanism for promoting cooling, and FIG. 14B is a cross-sectional view of the mechanism shown in FIG. 図１５（ａ）は冷却を促進する機構の他の構造例を示す平面図であり、図１５（ｂ）は図１５（ａ）に示す機構の断面図である。FIG. 15A is a plan view showing another structural example of a mechanism for promoting cooling, and FIG. 15B is a cross-sectional view of the mechanism shown in FIG. 図１６（ａ）は冷却を促進する機構の他の構造例を示す平面図であり、図１６（ｂ）は図１６（ａ）に示す機構の断面図である。FIG. 16A is a plan view showing another structural example of a mechanism for promoting cooling, and FIG. 16B is a cross-sectional view of the mechanism shown in FIG.

符号の説明Explanation of symbols

１０ 燃焼式排ガス処理装置
１１ 燃焼処理部
１２ 排ガス処理用燃焼器
１３ ノズル
１４ 空気ノズル
１５ 助燃ガスノズル
１７ 火炎
１８ 筒体
１９ 燃焼処理室
２０ 水流フランジ
２１ 冷却部
２２，２７，３２，３４，３５，３６，３８，３９ 配管
２３ フィン（邪魔板）
２５ 循環タンク
２６ 堰
３０ ポンプ
３１ 水洗部
３１ａ フィルタ
３１ｂ，２８ 散水装置 DESCRIPTION OF SYMBOLS 10 Combustion type exhaust gas processing apparatus 11 Combustion processing part 12 Exhaust gas processing combustor 13 Nozzle 14 Air nozzle 15 Auxiliary gas nozzle 17 Flame 18 Cylindrical body 19 Combustion processing chamber 20 Water flow flange 21 Cooling parts 22, 27, 32, 34, 35, 36 , 38, 39 Piping 23 Fin (baffle plate)
25 Circulating tank 26 Weir 30 Pump 31 Flushing section 31a Filter 31b, 28 Sprinkler

Claims (12)

処理対象排ガスの燃焼処理部と、
前記燃焼処理部で燃焼処理した排ガスを冷却する冷却部と、
処理対象排ガスの燃焼処理によって発生する処理反応副生成物を水洗にて捕集除去する水洗部を搭載した燃焼式排ガス処理装置であって、
前記燃焼処理部は、排ガス処理用燃焼器と、
金属材料からなり、内壁面に荒れ加工が施され、排ガスがその内部で燃焼処理される筒体と、
前記筒体の内壁面に水膜を形成する機構とを備えたことを特徴とする燃焼式排ガス処理装置。 A combustion treatment section of the exhaust gas to be treated;
A cooling unit for cooling the exhaust gas burned in the combustion processing unit;
A combustion type exhaust gas treatment apparatus equipped with a water washing part for collecting and removing treatment reaction by-products generated by combustion treatment of exhaust gas to be treated by washing,
The combustion treatment section includes an exhaust gas treatment combustor,
A cylindrical body made of a metal material, subjected to roughing processing on the inner wall surface, and exhaust gas is combusted inside thereof,
A combustion-type exhaust gas treatment apparatus comprising a mechanism for forming a water film on the inner wall surface of the cylindrical body. 前記筒体の内壁面は、上流側から下流側に向かって内径が同一な直胴型であることを特徴とする請求項１に記載の燃焼式排ガス処理装置。   2. The combustion exhaust gas treatment apparatus according to claim 1, wherein an inner wall surface of the cylindrical body is a straight body type having the same inner diameter from the upstream side toward the downstream side. 前記筒体の内壁面は、上流側から下流側に向かって内径が縮小するコニカル型であることを特徴とする請求項１に記載の燃焼式排ガス処理装置。   The combustion exhaust gas treatment apparatus according to claim 1, wherein the inner wall surface of the cylindrical body is a conical type whose inner diameter is reduced from the upstream side toward the downstream side. 前記筒体の下流側に配置され、前記冷却部に接続された循環タンクを備えたことを特徴とする請求項１に記載の燃焼式排ガス処理装置。   The combustion type exhaust gas treatment apparatus according to claim 1, further comprising a circulation tank disposed on the downstream side of the cylindrical body and connected to the cooling unit. 前記循環タンクに堰を設け、所定サイズ以上の粒径の処理反応副生成物を含む水を循環させないようにしたことを特徴とする請求項４記載の燃焼式排ガス処理装置。   5. A combustion type exhaust gas treatment apparatus according to claim 4, wherein a water is provided in the circulation tank so that water containing a treatment reaction by-product having a particle size of a predetermined size or more is not circulated. 前記冷却部は、前記筒体の下端部と前記循環タンクとを接続する第１の配管と、該第１の配管から分岐し、前記水洗部に接続する第２の配管とを備え、該第１の配管と該第２の配管の内壁面に水膜を形成する機構を備えたことを特徴とする請求項４記載の燃焼式排ガス処理装置。   The cooling section includes a first pipe connecting the lower end of the cylindrical body and the circulation tank, and a second pipe branched from the first pipe and connected to the water washing section. The combustion exhaust gas treatment apparatus according to claim 4, further comprising a mechanism for forming a water film on the inner wall surface of the first pipe and the second pipe. 前記第２の配管は、前記第１の配管から分岐した部分から上方に傾斜して配置され、前記第２の配管の内壁面に散水する散水装置を備えたことを特徴とする請求項６記載の燃焼式排ガス処理装置。   The second pipe is provided with a watering device that is inclined upward from a portion branched from the first pipe and sprays water on an inner wall surface of the second pipe. Combustion exhaust gas treatment equipment. 前記第１の配管または前記第２の配管の内壁に、フィンまたは邪魔板を設けたことを特徴とする請求項６記載の燃焼式排ガス処理装置。   The combustion exhaust gas treatment apparatus according to claim 6, wherein fins or baffle plates are provided on an inner wall of the first pipe or the second pipe. 前記循環タンクに貯留された水を、前記筒体の内壁面に水膜を形成する機構と、前記水洗部と、前記冷却部とに供給する供給配管およびポンプと、
該供給配管に接続した熱交換器とを備えたことを特徴とする請求項４記載の燃焼式排ガス処理装置。 A mechanism for forming a water film on the inner wall surface of the cylindrical body, water supply pipes and a pump for supplying water stored in the circulation tank, the cooling unit, and the cooling unit;
The combustion exhaust gas treatment apparatus according to claim 4, further comprising a heat exchanger connected to the supply pipe. 前記水膜を形成する機構および前記水洗部に供給された水は、前記冷却部を通じて前記循環タンクに戻されることを特徴とする請求項９記載の燃焼式排ガス処理装置。   The combustion exhaust gas treatment apparatus according to claim 9, wherein the water supplied to the mechanism for forming the water film and the water washing section is returned to the circulation tank through the cooling section. 前記筒体に温度センサを備え、前記筒体の温度上昇を検出するようにしたことを特徴とする請求項１記載の燃焼式排ガス処理装置。   The combustion exhaust gas treatment apparatus according to claim 1, wherein a temperature sensor is provided in the cylindrical body so as to detect a temperature rise of the cylindrical body. 前記筒体の漏水を検出する漏水センサを備えたことを特徴とする請求項１記載の燃焼式排ガス処理装置。   The combustion exhaust gas treatment apparatus according to claim 1, further comprising a water leakage sensor that detects water leakage of the cylindrical body.
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TW096146016A TWI406700B (en) 2006-12-05 2007-12-04 Combustion-type exhaust gas treatment apparatus
US11/987,764 US8591819B2 (en) 2006-12-05 2007-12-04 Combustion-type exhaust gas treatment apparatus
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