TWI390660B - 用於半導體晶圓對準之方法與設備 - Google Patents

用於半導體晶圓對準之方法與設備 Download PDF

Info

Publication number
TWI390660B
TWI390660B TW096131155A TW96131155A TWI390660B TW I390660 B TWI390660 B TW I390660B TW 096131155 A TW096131155 A TW 096131155A TW 96131155 A TW96131155 A TW 96131155A TW I390660 B TWI390660 B TW I390660B
Authority
TW
Taiwan
Prior art keywords
wafer
platform
image
reference frame
alignment system
Prior art date
Application number
TW096131155A
Other languages
English (en)
Other versions
TW200832597A (en
Inventor
David Michael
James Clark
Gang Liu
Original Assignee
Cognex Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cognex Corp filed Critical Cognex Corp
Publication of TW200832597A publication Critical patent/TW200832597A/zh
Application granted granted Critical
Publication of TWI390660B publication Critical patent/TWI390660B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

用於半導體晶圓對準之方法與設備
本發明係關於機器視覺。本發明可應用於(例如)半導體晶圓製造期間之晶圓對準。
半導體晶片製造為使矽或其他晶圓經受由模組化晶圓處理單元或"系統"所進行之一系列處理步驟的多級製程。彼等單元(其中每一單元通常執行一或多個專用處理步驟)沿工廠或"fab"之地面而排列。藉由輸送機、機器人等等而在單元當中及之間傳送晶圓。
在可藉由處理系統來處理晶圓之前，必須建立晶圓之位置及對準。此保證相對於晶圓所固有之特徵(例如，方向定向之結晶結構)與相對於已經(或待)由其他單元執行於晶圓上之處理來適當地引導由單元所執行之微影及/或其他步驟。
在大多數現今之模組化晶圓製造系統中，藉由旋轉晶圓且使用線性相機來尋找晶圓之對準指示器(例如，沿圓形晶圓之周邊的凹口或"平口"(flat))的機械預對準器來執行晶圓之初始對準。一旦其尋找到凹口(或平口)，預對準器即旋轉上面放置有晶圓之夾盤及平臺，以便將晶圓定向至已知角度，且進而使晶圓為在單元內之處理做好準備。可在單一晶圓之處理期間及/或在單一晶圓轉移至fab中之另一單元之前重複地使用預對準器。
有關現今之預對準器之一問題在於：其為昂貴且緩慢的。其可能花費高達$20,000且通常需要高達五秒來執行對準。由於預對準期間所耗費之每一額外秒可能使fab花費數千美元或更多，所以需要減少彼等時間以及預對準器自身之成本。另一問題在於：其可能為不精確的及/或需要接觸每一晶圓之背面。由於現今之預對準器旋轉機械夾盤上之晶圓，所以其僅可能達到與旋轉夾盤之機械容許度所允許之精確度一樣的精確度。
本發明之一目的係提供用於機器視覺之改良方法與設備。
一相關目的係提供可應用於半導體晶圓製造之此等方法與設備。
其他目的係提供可應用於晶圓對準之此等方法與設備。
本發明之另外其他目的係提供可用於晶圓製造系統中之此等方法與設備。
本發明之另外其他目的係提供快速地操作之此等方法與設備。
本發明之另外其他目的係提供可以低成本來實施之此等方法與設備。
本發明之其他目的係提供改良預對準器之精確度以便處理每一連續代之半導體製造技術之較小容許度的此等方法與設備。
本發明之另外其他目的係提供促進避免接觸正被處理之晶圓之背面且因此藉由減少污染來改良產率的預對準器之使用的此等方法與設備。
本發明之另外其他目的係提供可與現存及未來晶圓製造製程及裝備一起使用之此等方法與設備。
前述內容係在由在一些態樣中提供一種晶圓對準系統之本發明所達到之目的當中，該晶圓對準系統包含一影像擷取裝置、一照明源、一可旋轉晶圓平臺及一影像處理器，該影像處理器包括用於在該平臺之複數個旋轉角度中之每一旋轉角度下將該平臺上之物品(諸如，晶圓)之影像中之座標映射至"世界"參考框架的功能性。
本發明之相關態樣提供一種如上文所述之晶圓對準系統，其中平臺將物品(例如，晶圓)固持於具有隨平臺旋轉而進動之法線的平面上。
本發明之其他相關態樣提供此等系統，其中平臺安置於夾盤上且旋轉地耦接至夾盤，其旋轉軸線不垂直於平臺之固持平面。因此，平臺隨夾盤旋轉而旋轉，且平臺之固持平面的法線在該旋轉的過程中進動。
在其他態樣中，本發明提供此等系統，其中世界參考框架係獨立於由平臺(例如)在其各種旋轉角度下所界定之一或多個參考框架。在本發明之其他相關態樣中，世界參考框架為平面的。
根據本發明之其他態樣，映射功能性包含一離散函數，其對於平臺之兩個或兩個以上離散角度中之每一離散角度而將平臺上之物品(例如，晶圓)之影像中的座標映射至世界參考框架。在本發明之其他態樣中，映射功能性包含一連續函數，其將平臺上之物品(例如，晶圓)之影像中的座標映射至世界參考框架作為平臺之角度的連續函數。
在其他態樣中，本發明提供一種如上文所述之系統，其中照明源對平臺上之物品(例如，晶圓)提供背光。在相關態樣中，該源在平行於平臺之固持平面之法線的角度下提供該背光。在本發明之另外其他相關態樣中，該源安置於平臺之固持平面中。在本發明之另外其他相關態樣中，該源包含一安置於物品(例如，晶圓)與平臺之間的平面源。根據本發明之其他相關態樣，該源包含一電致發光光源。
本發明之其他態樣提供一種如上文所述之系統，其中影像擷取裝置經配置以在單一視場中擷取整個物品(例如，晶圓)之影像－－或至少擷取其一足夠部分之影像，以使能夠判定物品(或其特徵)之位置及/或定向。
本發明之另外其他態樣提供一種如上文所述之系統，其中影像處理器包含用於將安置於平臺上之物品之位置及定向中之至少一者判定為影像中所示之一或多個特徵之函數的功能性(例如，在影像擷取裝置之參考框架中及/或在世界參考框架中)。
本發明之其他態樣提供用於上文所述之系統之晶圓對準並行操作的方法。此等態樣包括(例如)：擷取平臺上之物品(例如，晶圓)之影像；在影像擷取裝置之參考框架中判定物品(或其上之特徵)之位置及定向中之任一者；及將該位置及/或定向轉換至世界參考框架。經如此轉換之位置及/或定向可(例如)由機器人手臂(或其他方式)用以定位物品以用於進一步處理或檢測。
本發明之此等及其他態樣在圖式及以下描述中為明顯的。
圖1描繪一包括複數個晶圓處理單元或系統12－16之晶圓製造設施10。設施10可為晶圓"fab"、鑄造廠、實驗室或此項技術中已知之類型的任一其他製造設施。晶圓處理系統12－16亦為此項技術中已知用以在晶圓上執行諸如微影等等之處理步驟之類型。該等單元中之一或多者可經調適成包括如以下及本文中別處所述的根據本發明之晶圓預對準子系統。
在所說明之實施例中，該等單元12－16沿設施10之地面而排列，但在其他實施例中，其可以其他方式被安置(例如，安置於單一設施之獨立處理區域中、分散於遠端設施當中，等等)。藉由均如此項技術中已知之完全自動化、半自動化或非自動化機構(諸如，輸送機(未圖示)、機器人手臂18、手工勞動(未圖示)，等等)而在單元12－16當中及之間傳送晶圓。在手臂18之末端效應器中展示了一個此晶圓20。
每一系統12－16包括執行各別系統之晶圓處理步驟的一或多個子系統。相對於系統12而展示四個此等子系統22－28。此等子系統包括根據本發明之一晶圓對準子系統22，以及此項技術中已知用於微影或其他晶圓處理步驟之類型的三個其他子系統。可在系統12內提供機器人手臂29或另一輸送工具(未圖示)以用於在子系統當中及之間(例如)以此項技術中已知之習知方式來移動晶圓。亦可提供一局部控制器32以用於以此項技術中已知之習知方式(適應於本文中之教示)來控制系統12內之操作，以及用於(例如)經由以此項技術中已知之習知方式(再次，適應於本文中之教示)來控制總系統操作(包括手臂或輸送工具18之操作)的系統控制器34而與其他系統協調操作。應瞭解，可在系統12中使用更多或更少數目之子系統及/或輸送工具，且可類似地組態其他系統14－16。
晶圓對準子系統(或"預對準器")22判定各別系統12中之晶圓30之位置及/或對準(較佳為此兩者)。此保證(例如)相對於晶圓30所固有之特徵(例如，方向定向之結晶結構)與相對於已經(或待)由其他系統14－16執行於晶圓30上之處理來適當地引導由系統12所執行之微影及/或其他步驟。
更特定言之，預對準器22判定晶圓20之中心及/或其他特徵之定位。該其他特徵可為(例如)晶圓之特徵"平口"或"凹口"。又，其可為對準標記或蝕刻或另外延伸於(例如)晶圓之表面上之其他圖案。此外，預對準器22判定晶圓之定向。按照慣例，在所說明之實施例中，此表示晶圓平口或凹口之旋轉角度，但其他實施例可利用其他特徵用於此定向判定。
一旦其判定晶圓30之定位及/或定向，預對準器22即將該位置及/或定向傳達至所說明之設施10之控制器32或其他組件，使得晶圓可被手臂或其他輸送工具18、29移動且進一步在系統12內、在一或多個其他系統14－16內或總體上在設施10內被處理。預對準器22傳達為系統12－16所共有之"世界"參考框架(FoR)系統36中的定位及/或定向資訊，但在其他實施例中，其可能僅為各別系統12所共有、為一或多個其他系統14－16所共有，及/或總體上為設施10所共有。為此，如以下及本文中別處所進一步論述，預對準器22將自由其相機40擷取之影像所鑑別之資訊自該相機之FoR轉換至世界FoR。
圖2A描繪圖1之晶圓對準子系統(或預對準器)22的其他細節。子系統22包括均如圖所示而配置之影像擷取裝置(或相機)40、照明源42、晶圓夾盤44及平臺46以及影像處理器48。亦如圖所示，一框架50或其他結構元件相對於夾盤及平臺44－46而對相機40提供剛性支撐。儘管存在圖式中所示之特定組態，但熟習此項技術者應瞭解，可以按照本文中之教示之其他方式來配置元件42－50。
相機40包含用於此項技術中之類型的習知影像擷取裝置。較佳地，其經定位及組態以在單一視場(FoV)41中獲取完整晶圓30之影像，因此無需擷取多個不同影像來鑑別晶圓之位置及/或定位。所說明之預對準器之益處在於：相機40可具有(例如)在晶圓30之表面上具有解析至650微米(或更佳)之影像像素之相對較低的解析度，而仍允許晶圓定位及位置之解析度為20微米(或更佳)。較佳相機40為可自本文中之受讓人獲得的In－Sight。
源42照明晶圓30之用於位置及/或定向判定的特徵。在所說明之實施例中，源42對晶圓30作背光照明，以便在相機40所擷取且影像處理器48所處理用於位置及/或定向判定之影像中強調晶圓30之周邊。較佳地，如在所說明之實施例中，此背光由安置於(例如)與平臺46相同之水平面處且恰在晶圓30下方之提供均勻照明的低輪廓元件提供。較佳地，此係藉由直徑略小於晶圓直徑之圓形平臺及內徑大於平臺內徑且外徑大於晶圓外徑之圓形背光來完成。此元件42可以2005年9月14日申請之標題為"Method and Apparatus for Backlighting a Wafer during Alignment"的同在申請中之共同讓渡的美國專利申請案第11/162,540號中所述之照明源的方式來製造，該案之教示以引用的方式併入本文中。
平臺46固持晶圓30以用於藉由相機40之成像及藉由夾盤44之旋轉。為此，平臺界定在裏面藉由摩擦力、吸力或其他方式而固持有晶圓30之虛平面52。在所說明之實施例中，該平面52整體垂直於界定相機40之FoV 41之錐形的軸線，但在其他實施例中，可以其他方式來定向平面與相機。此外，平面52整體--但(如下文所述)並非完全--垂直於以此項技術中已知之方式而在上面安置有其(平面52)且與其旋轉地耦接之夾盤44的旋轉軸線53。如圖所示，夾盤自身以此項技術中已知之方式而安置於電腦控制馬達54上且旋轉地耦接至電腦控制馬達54。
參看圖2B，所說明之預對準器之益處在於：由平臺46所界定之固持平面52無需垂直於夾盤之旋轉軸線53(且因此，夾盤及46可為此項技術中已知之較不昂貴的種類)。實際上，在所說明之實施例中，在不垂直於軸線53之非垂直角(亦即，非90°角度)α下安置固持平面52，其中α係在0－0.5度之間，且較佳不大於1.5度。結果，固持平面52之法線56隨夾盤44旋轉而進動。作為另一結果，由平面52所建立之參考框架隨平臺46之旋轉角度ω而變化。或者，換言之，世界參考框架係獨立於－－但(如下文所述)可映射至－－由旋轉平臺在其各種角度下所建立之參考框架。
返回參看圖2A，儘管獨立於系統12之其他組件來展示夾盤及平臺44－46，但在某些實施例中，夾盤及平臺44－46形成機器人手臂29(且特定言之，其末端效應器)之一部分，或系統12或設施10之其他組件之一部分。
影像處理器48包含此項技術中已知之類型的通用或專用數位資料處理器，其用於分析由相機40所產生之影像，(例如)以識別該等影像中之特徵之座標且在該等影像上執行變換。為此，影像處理器48包括中央處理單元(未圖示)、記憶體(未圖示)及輸入/輸出介面(未圖示)，其均為用以執行(例如)儲存於記憶體中之軟體的習知類型。在所說明之實施例中，該軟體使影像處理器48執行下列功能：1.(例如)以此項技術中已知之習知方式來觸發相機40且捕獲平臺46上之晶圓30之影像。此功能性由圖式中之擷取模組60來表示。
2.(例如)以此項技術中已知之習知方式(見(例如)System for Finding the Orientation of a Wafer之美國專利5,825,913，該專利之教示以引用的方式併入本文中)來分析如此所捕獲之影像，以識別相機之FoR(且特定言之，所捕獲影像之FoR)中晶圓30之中心之定位及/或晶圓30之其他特徵(諸如，如上文所述之晶圓之特徵平口、凹口或其他)之定位。此功能性由圖式中之分析模組62來表示。
3.將自影像之FoR中之座標如此所判定的定位映射至如下文所述之世界FoR中之座標。此功能性由圖式中之映射模組64來表示。
4.自所映射定位判定晶圓之定向。如上文所述，一旦判定所映射定位，即可以此項技術中已知之習知方式來判定定向。此功能性由圖式中之定向模組66來表示。
5.將所映射定位及自其所判定之定向發送至控制器32及/或34，使得晶圓30可如上文所述被進一步移動或處理。
當然，應瞭解，可將模組60－66之功能性組合於較少模組中及/或分配於較大數目當中，實際上，包括分配至預對準器22或系統12或其他之組件當中。
關於模組64，預對準器22使用使由模組60所擷取之晶圓影像之FoR中之座標與世界FoR中之座標有關的映射函數來映射由模組62所判定之定位。映射函數(其可為連續的或離散的)如以下所表達來將該關係式定義為電腦控制夾盤及平臺44、46之角旋轉的函數：[x,y] FoR(world) ＝f ([x,y] FoR(image) ,ω platform ) 等式1其中，[x,y] FoR(world) 為世界參考框架中之座標；[x,y] FoR(image) 為影像參考框架中之座標；ω platform 為夾盤及平臺44、46之旋轉角度。
熟習此項技術者自上文應瞭解，因為由平臺46所建立之固持平面52不垂直於軸線53，所以等式1之函數f隨ω而變化。在所說明之實施例中，該函數f 藉由下列步驟而(例如)在系統12、預對準器22之裝配或安裝期間被實驗地判定：1.在已知旋轉角度ω下置放夾盤及平臺44－46；2.在平臺46上置放一具有一或多個參考標記之校正卡或板(例如，總尺寸類似於矽晶圓30)，該或該等參考標記之定位在世界FoR中為已知的(例如，如藉由自世界FoR中之已知參考點獨立地量測校正卡/板及/或其附屬參考標記之定位所判定)；3.藉由相機40來成像如此所標記之校正卡或板；4.比較影像中所示之參考標記之座標(亦即，影像FoR座標)與相應世界FoR座標；5.自此比較之結果建構離散查找表及/或連續數學函數(例如，藉由二次擬合)，該函數以上述等式1之方式而用於給定旋轉角度ω；6.對於夾盤及平臺44－46之至少一其他旋轉角度(且較佳地，對於許多其他旋轉角度)而重複步驟1－5。
當然，步驟1－6僅表示一用以建立函數f 之方式。熟習此項技術者應瞭解，可鑒於本文中之教示而以其他方式來建構函數。
以上描述了滿足前文所述之目的之方法與設備。此包括改良預對準器精確度，以便處理現今及連續代之半導體製造技術之較小且愈來愈小的容許度。熟習此項技術者應瞭解，所說明之實施例僅為本發明之實例，且併有對本發明之修改之其他實施例屬於本發明之範疇。因此，例如，應瞭解，可藉由避免接觸製程中之晶圓之背面且進而最小化污染風險的邊緣夾緊旋轉台來利用根據本發明之預對準器。
10．．．晶圓製造設施
12、14、16．．．晶圓處理單元或系統
18．．．機器人手臂
20．．．晶圓
22、24、26、28．．．子系統
29．．．機器人手臂
30．．．晶圓
32．．．局部控制器
34．．．系統控制器
36．．．"世界"參考框架(FoR)系統
40．．．影像擷取裝置/相機
41．．．視場(FoV)
42．．．照明源
44．．．晶圓夾盤
46．．．平臺
48．．．影像處理器
50．．．框架
52．．．虛平面
53．．．旋轉軸線
54．．．電腦控制馬達
56．．．法線
60．．．擷取模組
62．．．分析模組
64．．．映射模組
66．．．定向模組
圖1描繪本發明被實踐之類型的晶圓製造設施；及圖2A及圖2B描繪用於圖1之晶圓處理系統中之類型的晶圓對準子系統(或預對準器)之其他細節。
10．．．晶圓製造設施
12、14、16．．．晶圓處理單元或系統
18．．．機器人手臂
20．．．晶圓
22、24、26、28．．．子系統
29．．．機器人手臂
30．．．晶圓
32．．．局部控制器
34．．．系統控制器
36．．．"世界"參考框架(FoR)系統

Claims (21)

  1. 一種晶圓對準系統，包含：A.一可旋轉平臺；B.一影像擷取裝置，其具有一包括該可旋轉平臺上之一晶圓之至少一部分的視場；C.一照明源，其照明在該可旋轉平臺上之該晶圓之該至少一部分；D.一影像處理器，其耦接至該影像擷取裝置且處理一在一第一參考框架中展示該晶圓之一或多個特徵的影像，該影像處理器在一第二參考框架中自該影像判定該晶圓或其一部分之一位置及一定向的至少一者；及E.該影像處理器，包括一映射元件，其在該平臺之複數個旋轉角度中之每一旋轉角度下，將該第一參考框架中之座標映射至該第二參考框架中之座標；F.其中該映射元件將在該可旋轉平臺上的該晶圓之該影像中的座標映射至第二參考框架，作為該平臺的旋轉角度的一函數。
  2. 如請求項1之晶圓對準系統，其中該平臺將該晶圓固持於一具有一隨該平臺旋轉而進動之法線之平面上。
  3. 如請求項2之晶圓對準系統，其中該平臺安置於一夾盤上且旋轉地耦接至該夾盤，該夾盤之旋轉軸線不垂直於該平臺之該固持平面。
  4. 如請求項3之晶圓對準系統，其中該平臺隨該夾盤旋轉而旋轉，且該平臺之固持平面之該法線隨該旋轉的過程 中進動。
  5. 如請求項1之晶圓對準系統，其中該第二參考框架係獨立於由該平臺在其一或多個旋轉角度下所界定之一或多個第三參考框架。
  6. 如請求項1之晶圓對準系統，其中該第二參考框架為一平面。
  7. 如請求項1之晶圓對準系統，其中該映射元件包含一離散函數，該離散函數對於該平臺之兩個或兩個以上離散角度中之每一離散角度而將該平臺上之該晶圓之一影像中的座標映射至該第二參考框架。
  8. 如請求項1之晶圓對準系統，其中該映射元件包含一連續函數，該連續函數將該平臺上之該晶圓之一影像中的座標映射至該第二參考框架，作為該平臺之該角度的一連續函數。
  9. 如請求項1之晶圓對準系統，其中該照明源對該平臺上之該晶圓提供背光。
  10. 如請求項9之晶圓對準系統，其中該照明源在一平行於該平臺之該固持平面之該法線的角度下提供該背光。
  11. 如請求項9之晶圓對準系統，其中該照明源安置於該平臺之該固持平面中。
  12. 如請求項11之晶圓對準系統，其中該照明源包含一安置於該晶圓與該平臺之間的平面照明源。
  13. 如請求項9之晶圓對準系統，其中該照明源包含一電致發光光源。
  14. 如請求項1之晶圓對準系統，其中該影像擷取裝置經配置以在一單一視場中擷取該整個晶圓之一影像。
  15. 如請求項1之晶圓對準系統，其中該影像處理器進一步包含：在該第一參考框架及該第二參考框架中之任一者中，將該晶圓或其一部分之該位置及定向的至少一者判定為該影像中所示之一或多個特徵之一函數的功能性。
  16. 一種晶圓對準方法，包含：A.擷取一安置於一可旋轉平臺上之晶圓之一影像，該影像在一第一參考框架中展示該晶圓之一或多個特徵；B.處理該影像以在一第二參考框架中自該影像判定該晶圓或其一部分之一位置及定向的至少一者；C.該處理步驟包括藉由使用一在該平臺之複數個旋轉角度中之每一旋轉角度下，將該第一參考框架中之座標映射至該第二參考框架中之座標的映射元件，來判定該位置及定向的該至少一者；D.將位於該可旋轉平臺上的該晶圓之該影像中的座標映射至該第二參考框架，作為該平臺的旋轉角度的一函數，及E.使用步驟(B)中所判定之該位置及定向的該至少一者來定位該晶圓以用於處理及檢測中之任一者。
  17. 如請求項16之方法，其中該平臺將該晶圓固持於一具有一隨該平臺旋轉而進動之法線之平面上。
  18. 如請求項16之方法，其中該第二參考框架係獨立於由該平臺在其一或多個旋轉角度下所界定之一或多個第三參 考框架。
  19. 如請求項16之方法，包含在步驟(A)中之該影像之擷取期間背光照明該晶圓。
  20. 如請求項19之方法，包含在該晶圓與該平臺之間安置一照明源。
  21. 如請求項19之方法，包含利用一平面電致發光光源而背光照明該晶圓。
TW096131155A 2006-08-23 2007-08-22 用於半導體晶圓對準之方法與設備 TWI390660B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/508,551 US8162584B2 (en) 2006-08-23 2006-08-23 Method and apparatus for semiconductor wafer alignment

Publications (2)

Publication Number Publication Date
TW200832597A TW200832597A (en) 2008-08-01
TWI390660B true TWI390660B (zh) 2013-03-21

Family

ID=39107438

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096131155A TWI390660B (zh) 2006-08-23 2007-08-22 用於半導體晶圓對準之方法與設備

Country Status (3)

Country Link
US (1) US8162584B2 (zh)
TW (1) TWI390660B (zh)
WO (1) WO2008024476A2 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4871264B2 (ja) * 2005-03-17 2012-02-08 浜松ホトニクス株式会社 顕微鏡画像撮像装置
TWI434368B (zh) * 2011-12-08 2014-04-11 Metal Ind Res & Dev Ct 無標記基板組裝對位方法
TWI421972B (zh) * 2011-12-08 2014-01-01 Metal Ind Res & Dev Ct 無標記異空間基板組裝對位方法及系統
PT2891173T (pt) 2012-08-31 2019-06-28 Semiconductor Tech & Instruments Pte Ltd Sistema multifuncional de manuseamento de bolachas e de molduras de película
US10032273B2 (en) 2013-03-15 2018-07-24 Cognex Corporation Machine vision system calibration using inaccurate calibration targets
WO2019183141A1 (en) * 2018-03-21 2019-09-26 Realtime Robotics, Inc. Motion planning of a robot for various environments and tasks and improved operation of same
CN108615699B (zh) * 2018-05-29 2023-11-07 深圳信息职业技术学院 一种晶圆对准***及方法和用于晶圆对准的光学成像装置
US11295975B2 (en) 2019-09-13 2022-04-05 Brooks Automation Us, Llc Method and apparatus for substrate alignment
CN116277015B (zh) * 2023-04-07 2024-01-23 上海感图网络科技有限公司 数据处理方法、装置、设备及存储介质

Family Cites Families (308)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3816722A (en) 1970-09-29 1974-06-11 Nippon Electric Co Computer for calculating the similarity between patterns and pattern recognition system comprising the similarity computer
JPS5425782B2 (zh) * 1973-03-28 1979-08-30
US3967100A (en) 1973-11-12 1976-06-29 Naonobu Shimomura Digital function generator utilizing cascade accumulation
US3968475A (en) 1974-11-11 1976-07-06 Sperry Rand Corporation Digital processor for extracting data from a binary image
JPS5177047A (zh) 1974-12-27 1976-07-03 Naonobu Shimomura
US4011403A (en) * 1976-03-30 1977-03-08 Northwestern University Fiber optic laser illuminators
CH611017A5 (zh) 1976-05-05 1979-05-15 Zumbach Electronic Ag
US4183013A (en) * 1976-11-29 1980-01-08 Coulter Electronics, Inc. System for extracting shape features from an image
JPS5369063A (en) 1976-12-01 1978-06-20 Hitachi Ltd Detector of position alignment patterns
CH643959A5 (de) 1978-04-14 1984-06-29 Siemens Ag Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips.
US4385322A (en) 1978-09-01 1983-05-24 View Engineering, Inc. Pattern recognition apparatus and method
US4200861A (en) * 1978-09-01 1980-04-29 View Engineering, Inc. Pattern recognition apparatus and method
JPS5579590A (en) * 1978-12-13 1980-06-16 Hitachi Ltd Video data processor
US4286293A (en) 1979-05-30 1981-08-25 Western Electric Company, Inc. Laser scanning and multiple detection for video image processing
US4300164A (en) 1980-03-21 1981-11-10 View Engineering, Inc. Adaptive video processor
US4631750A (en) 1980-04-11 1986-12-23 Ampex Corporation Method and system for spacially transforming images
DE3177299T4 (de) * 1980-04-11 1994-05-26 Ampex Bildverarbeitungssystem für räumliche Bildtransformation.
JPS57102017A (en) * 1980-12-17 1982-06-24 Hitachi Ltd Pattern detector
US4435837A (en) * 1981-03-05 1984-03-06 President And Fellows Of Harvard College Pattern recognition and orientation system
US4441124A (en) * 1981-11-05 1984-04-03 Western Electric Company, Inc. Technique for inspecting semiconductor wafers for particulate contamination
US5506682A (en) * 1982-02-16 1996-04-09 Sensor Adaptive Machines Inc. Robot vision using targets
US4519041A (en) 1982-05-03 1985-05-21 Honeywell Inc. Real time automated inspection
DE3267548D1 (en) * 1982-05-28 1986-01-02 Ibm Deutschland Process and device for an automatic optical inspection
US4534813A (en) 1982-07-26 1985-08-13 Mcdonnell Douglas Corporation Compound curve-flat pattern process
US4736437A (en) * 1982-11-22 1988-04-05 View Engineering, Inc. High speed pattern recognizer
US4577344A (en) * 1983-01-17 1986-03-18 Automatix Incorporated Vision system
FR2540263B1 (fr) 1983-01-31 1988-05-20 Commissariat Energie Atomique Procede de reconnaissance automatique d'une image a partir d'une image correspondante de reference
US4783829A (en) 1983-02-23 1988-11-08 Hitachi, Ltd. Pattern recognition apparatus
GB8311813D0 (en) 1983-04-29 1983-06-02 West G A W Coding and storing raster scan images
US4581762A (en) * 1984-01-19 1986-04-08 Itran Corporation Vision inspection system
US4606065A (en) 1984-02-09 1986-08-12 Imaging Technology Incorporated Image processing-system
JPS60167069A (ja) 1984-02-09 1985-08-30 Omron Tateisi Electronics Co 図形認識装置
US4541116A (en) 1984-02-27 1985-09-10 Environmental Research Institute Of Mi Neighborhood image processing stage for implementing filtering operations
US4860374A (en) 1984-04-19 1989-08-22 Nikon Corporation Apparatus for detecting position of reference pattern
US4688088A (en) 1984-04-20 1987-08-18 Canon Kabushiki Kaisha Position detecting device and method
EP0163885A1 (de) * 1984-05-11 1985-12-11 Siemens Aktiengesellschaft Anordnung zur Segmentierung von Linien
JPS6134583A (ja) * 1984-07-26 1986-02-18 シャープ株式会社 照明装置
US4953224A (en) 1984-09-27 1990-08-28 Hitachi, Ltd. Pattern defects detection method and apparatus
JPS6180222A (ja) * 1984-09-28 1986-04-23 Asahi Glass Co Ltd メガネ合せ方法及びメガネ合せ装置
US4922543A (en) 1984-12-14 1990-05-01 Sten Hugo Nils Ahlbom Image processing device
US4641349A (en) * 1985-02-20 1987-02-03 Leonard Flom Iris recognition system
US4876728A (en) 1985-06-04 1989-10-24 Adept Technology, Inc. Vision system for distinguishing touching parts
US4831580A (en) 1985-07-12 1989-05-16 Nippon Electric Industry Co., Ltd. Program generator
JPS6261390A (ja) 1985-09-11 1987-03-18 興和株式会社 プリント基板検査方法およびその装置
US4617619A (en) 1985-10-02 1986-10-14 American Sterilizer Company Reflector for multiple source lighting fixture
US4742551A (en) 1985-10-07 1988-05-03 Fairchild Camera & Instrument Corporation Multistatistics gatherer
JPH0679325B2 (ja) * 1985-10-11 1994-10-05 株式会社日立製作所 位置姿勢判定方法
US4706168A (en) 1985-11-15 1987-11-10 View Engineering, Inc. Systems and methods for illuminating objects for vision systems
US4860375A (en) 1986-03-10 1989-08-22 Environmental Research Inst. Of Michigan High speed cellular processing system
US4728195A (en) * 1986-03-19 1988-03-01 Cognex Corporation Method for imaging printed circuit board component leads
GB8608431D0 (en) * 1986-04-07 1986-05-14 Crosfield Electronics Ltd Monitoring digital image processing equipment
US4697075A (en) 1986-04-11 1987-09-29 General Electric Company X-ray imaging system calibration using projection means
JP2623530B2 (ja) * 1986-04-22 1997-06-25 ミノルタ株式会社 固体撮像素子駆動装置
FR2598019B1 (fr) 1986-04-25 1992-09-11 Thomson Csf Procede d'utilisation d'une matrice photosensible a transfert de charge, et matrice photosensible ainsi utilisee
US4707647A (en) 1986-05-19 1987-11-17 Gmf Robotics Corporation Gray scale vision method and system utilizing same
US4783828A (en) 1986-06-02 1988-11-08 Honeywell Inc. Two-dimensional object recognition using chain codes, histogram normalization and trellis algorithm
US4771469A (en) 1986-06-30 1988-09-13 Honeywell Inc. Means and method of representing an object shape by hierarchical boundary decomposition
US4783826A (en) 1986-08-18 1988-11-08 The Gerber Scientific Company, Inc. Pattern inspection system
US4821333A (en) * 1986-08-22 1989-04-11 Environmental Research Inst. Of Michigan Machine learning procedures for generating image domain feature detector structuring elements
FR2604320B1 (fr) 1986-09-19 1988-11-04 Thomson Csf Systeme de prise de vues en videographie rapide utilisant un capteur optique matriciel a transfert de charges
US4955062A (en) 1986-12-10 1990-09-04 Canon Kabushiki Kaisha Pattern detecting method and apparatus
US4752898A (en) 1987-01-28 1988-06-21 Tencor Instruments Edge finding in wafers
US4972359A (en) 1987-04-03 1990-11-20 Cognex Corporation Digital image processing system
US5005126A (en) * 1987-04-09 1991-04-02 Prevail, Inc. System and method for remote presentation of diagnostic image information
US4764870A (en) 1987-04-09 1988-08-16 R.A.P.I.D., Inc. System and method for remote presentation of diagnostic image information
US5012433A (en) * 1987-04-27 1991-04-30 International Business Machines Corporation Multistage clipping method
US4982438A (en) * 1987-06-02 1991-01-01 Hitachi, Ltd. Apparatus and method for recognizing three-dimensional shape of object
CA1318977C (en) * 1987-07-22 1993-06-08 Kazuhito Hori Image recognition system
JPH07120385B2 (ja) 1987-07-24 1995-12-20 シャープ株式会社 光学的読取り方法
JP2630605B2 (ja) * 1987-07-29 1997-07-16 三菱電機株式会社 曲面創成方法
US4903218A (en) * 1987-08-13 1990-02-20 Digital Equipment Corporation Console emulation for a graphics workstation
JPS6478381A (en) * 1987-09-21 1989-03-23 Toshiba Corp Picture processing method
US5119435A (en) 1987-09-21 1992-06-02 Kulicke And Soffa Industries, Inc. Pattern recognition apparatus and method
US4907169A (en) * 1987-09-30 1990-03-06 International Technical Associates Adaptive tracking vision and guidance system
US4782238A (en) 1987-10-20 1988-11-01 Eastman Kodak Company Apparatus for generating edge position signals for use in locating an address element on a mailpiece
US4912659A (en) * 1987-10-30 1990-03-27 International Business Machines Corporation Parallel surface processing system for graphics display
US5621811A (en) * 1987-10-30 1997-04-15 Hewlett-Packard Co. Learning method and apparatus for detecting and controlling solder defects
US5081656A (en) * 1987-10-30 1992-01-14 Four Pi Systems Corporation Automated laminography system for inspection of electronics
DE3737631C1 (de) 1987-11-05 1989-03-02 Sick Optik Elektronik Erwin Optische Abstastvorrichtung fuer ebene Oberflaechen
US5287449A (en) * 1987-11-06 1994-02-15 Hitachi, Ltd. Automatic program generation method with a visual data structure display
JPH01160158A (ja) * 1987-12-17 1989-06-23 Murata Mach Ltd 遠隔地の機械制御システム
JP2622573B2 (ja) 1988-01-27 1997-06-18 キヤノン株式会社 マーク検知装置及び方法
FR2631188A1 (fr) 1988-05-03 1989-11-10 Thomson Csf Photodetecteur matriciel a transfert de charges avec dispositif integre de filtrage de charges
JP2739130B2 (ja) 1988-05-12 1998-04-08 株式会社鷹山 画像処理方法
US4891767A (en) * 1988-06-02 1990-01-02 Combustion Engineering, Inc. Machine vision system for position sensing
JP2541631B2 (ja) 1988-07-26 1996-10-09 ファナック株式会社 Ｃｎｃのリモ―ト診断方式
EP0356680A1 (de) 1988-08-11 1990-03-07 Siemens Aktiengesellschaft Optische Aufnahmeeinrichtung für Bildverarbeitungssysteme
JP2512099B2 (ja) 1988-08-24 1996-07-03 松下電器産業株式会社 ロボットの動作教示方法および制御装置
US5046190A (en) 1988-09-06 1991-09-03 Allen-Bradley Company, Inc. Pipeline image processor
US5155775A (en) 1988-10-13 1992-10-13 Brown C David Structured illumination autonomous machine vision system
US4975972A (en) 1988-10-18 1990-12-04 At&T Bell Laboratories Method and apparatus for surface inspection
US5054096A (en) 1988-10-24 1991-10-01 Empire Blue Cross/Blue Shield Method and apparatus for converting documents into electronic data for transaction processing
US4876457A (en) 1988-10-31 1989-10-24 American Telephone And Telegraph Company Method and apparatus for differentiating a planar textured surface from a surrounding background
US4932065A (en) 1988-11-16 1990-06-05 Ncr Corporation Universal character segmentation scheme for multifont OCR images
JPH02148180A (ja) 1988-11-29 1990-06-07 Nippon Seiko Kk パターン検査方法及び装置
US6067379A (en) 1988-12-09 2000-05-23 Cognex Corporation Method and apparatus for locating patterns in an optical image
US5717785A (en) * 1992-01-30 1998-02-10 Cognex Corporation Method and apparatus for locating patterns in an optical image
NL8803112A (nl) * 1988-12-19 1990-07-16 Elbicon Nv Werkwijze en inrichting voor het sorteren van een stroom voorwerpen in afhankelijkheid van optische eigenschappen van de voorwerpen.
US5012524A (en) * 1989-02-27 1991-04-30 Motorola, Inc. Automatic inspection method
IL89484A (en) * 1989-03-03 1992-08-18 Nct Ltd Numerical Control Tech System for automatic finishing of machined parts
EP0385009A1 (en) 1989-03-03 1990-09-05 Hewlett-Packard Limited Apparatus and method for use in image processing
US5081689A (en) * 1989-03-27 1992-01-14 Hughes Aircraft Company Apparatus and method for extracting edges and lines
US5027419A (en) 1989-03-31 1991-06-25 Atomic Energy Of Canada Limited Optical images by quadrupole convolution
US5153925A (en) 1989-04-27 1992-10-06 Canon Kabushiki Kaisha Image processing apparatus
US5060276A (en) 1989-05-31 1991-10-22 At&T Bell Laboratories Technique for object orientation detection using a feed-forward neural network
US5253308A (en) 1989-06-21 1993-10-12 Amber Engineering, Inc. Massively parallel digital image data processor using pixel-mapped input/output and relative indexed addressing
DE3923449A1 (de) 1989-07-15 1991-01-24 Philips Patentverwaltung Verfahren zum bestimmen von kanten in bildern
US5432525A (en) 1989-07-26 1995-07-11 Hitachi, Ltd. Multimedia telemeeting terminal device, terminal device system and manipulation method thereof
US5204944A (en) * 1989-07-28 1993-04-20 The Trustees Of Columbia University In The City Of New York Separable image warping methods and systems using spatial lookup tables
US5175808A (en) 1989-09-12 1992-12-29 Pixar Method and apparatus for non-affine image warping
JP2810152B2 (ja) 1989-10-13 1998-10-15 株式会社日立製作所 ポイントパターンマッチング方法
US5063608A (en) 1989-11-03 1991-11-05 Datacube Inc. Adaptive zonal coder
JP2523222B2 (ja) * 1989-12-08 1996-08-07 ゼロックス コーポレーション 画像縮小／拡大方法及び装置
JP3092809B2 (ja) 1989-12-21 2000-09-25 株式会社日立製作所 検査方法、並びに検査プログラムデータの自動作成機能を有する検査装置
US5164994A (en) 1989-12-21 1992-11-17 Hughes Aircraft Company Solder joint locator
JPH03210679A (ja) 1990-01-12 1991-09-13 Hiyuutec:Kk パターンマッチング方法および装置
US5151951A (en) 1990-03-15 1992-09-29 Sharp Kabushiki Kaisha Character recognition device which divides a single character region into subregions to obtain a character code
US5271068A (en) 1990-03-15 1993-12-14 Sharp Kabushiki Kaisha Character recognition device which divides a single character region into subregions to obtain a character code
US5495424A (en) * 1990-04-18 1996-02-27 Matsushita Electric Industrial Co., Ltd. Method and apparatus for inspecting solder portions
DE4013308A1 (de) * 1990-04-26 1991-10-31 Zeiss Carl Fa Verfahren zur optischen untersuchung von prueflingen
US4959898A (en) 1990-05-22 1990-10-02 Emhart Industries, Inc. Surface mount machine with lead coplanarity verifier
JP2690603B2 (ja) 1990-05-30 1997-12-10 ファナック株式会社 視覚センサのキャリブレーション方法
US5243607A (en) 1990-06-25 1993-09-07 The Johns Hopkins University Method and apparatus for fault tolerance
US5113565A (en) 1990-07-06 1992-05-19 International Business Machines Corp. Apparatus and method for inspection and alignment of semiconductor chips and conductive lead frames
JPH0475183A (ja) * 1990-07-17 1992-03-10 Mitsubishi Electric Corp 画像の相関度検出装置
JP2865827B2 (ja) 1990-08-13 1999-03-08 株式会社日立製作所 会議システムにおけるデータ蓄積方法
US5206820A (en) * 1990-08-31 1993-04-27 At&T Bell Laboratories Metrology system for analyzing panel misregistration in a panel manufacturing process and providing appropriate information for adjusting panel manufacturing processes
JP2591292B2 (ja) 1990-09-05 1997-03-19 日本電気株式会社 画像処理装置とそれを用いた自動光学検査装置
US5388252A (en) * 1990-09-07 1995-02-07 Eastman Kodak Company System for transparent monitoring of processors in a network with display of screen images at a remote station for diagnosis by technical support personnel
US5115309A (en) 1990-09-10 1992-05-19 At&T Bell Laboratories Method and apparatus for dynamic channel bandwidth allocation among multiple parallel video coders
US5083073A (en) * 1990-09-20 1992-01-21 Mazada Motor Manufacturing U.S.A. Corp. Method and apparatus for calibrating a vision guided robot
US5168269A (en) 1990-11-08 1992-12-01 Norton-Lambert Corp. Mouse driven remote communication system
US5327156A (en) 1990-11-09 1994-07-05 Fuji Photo Film Co., Ltd. Apparatus for processing signals representative of a computer graphics image and a real image including storing processed signals back into internal memory
US5598345A (en) * 1990-11-29 1997-01-28 Matsushita Electric Industrial Co., Ltd. Method and apparatus for inspecting solder portions
DE69121369T2 (de) * 1990-11-30 1997-01-09 Honda Motor Co Ltd Steuervorrichtung für einen sich selbständig bewegenden Körper und Verfahren zur Auswertung der Daten davon
US5586058A (en) 1990-12-04 1996-12-17 Orbot Instruments Ltd. Apparatus and method for inspection of a patterned object by comparison thereof to a reference
US5086478A (en) * 1990-12-27 1992-02-04 International Business Machines Corporation Finding fiducials on printed circuit boards to sub pixel accuracy
US5091968A (en) * 1990-12-28 1992-02-25 Ncr Corporation Optical character recognition system and method
US5133022A (en) 1991-02-06 1992-07-21 Recognition Equipment Incorporated Normalizing correlator for video processing
TW198107B (zh) * 1991-02-28 1993-01-11 Ibm
JP3175175B2 (ja) 1991-03-01 2001-06-11 ミノルタ株式会社 合焦検出装置
US5143436A (en) 1991-03-06 1992-09-01 The United States Of America As Represented By The United States Department Of Energy Ringlight for use in high radiation
US5265173A (en) 1991-03-20 1993-11-23 Hughes Aircraft Company Rectilinear object image matcher
CA2072198A1 (en) 1991-06-24 1992-12-25 Scott C. Farrand Remote console emulator for computer system manager
JP2700965B2 (ja) 1991-07-04 1998-01-21 ファナック株式会社 自動キャリブレーション方式
DE4222804A1 (de) 1991-07-10 1993-04-01 Raytheon Co Einrichtung und verfahren zur automatischen visuellen pruefung elektrischer und elektronischer baueinheiten
US5477138A (en) 1991-07-23 1995-12-19 Vlsi Technology, Inc. Apparatus and method for testing the calibration of a variety of electronic package lead inspection systems
DE69222102T2 (de) * 1991-08-02 1998-03-26 Grass Valley Group Bedienerschnittstelle für Videoschnittsystem zur Anzeige und interaktive Steuerung von Videomaterial
EP0823818B1 (en) 1991-08-13 2002-01-09 Canon Kabushiki Kaisha Image transmission apparatus
US5297238A (en) * 1991-08-30 1994-03-22 Cimetrix Incorporated Robot end-effector terminal control frame (TCF) calibration method and device
US5475766A (en) 1991-09-05 1995-12-12 Kabushiki Kaisha Toshiba Pattern inspection apparatus with corner rounding of reference pattern data
JPH0568243A (ja) 1991-09-09 1993-03-19 Hitachi Ltd 可変長符号化制御方式
FR2683340A1 (fr) 1991-11-05 1993-05-07 Sgs Thomson Microelectronics Circuit elevateur au carre de nombres binaires.
US5315388A (en) 1991-11-19 1994-05-24 General Instrument Corporation Multiple serial access memory for use in feedback systems such as motion compensated television
US5159281A (en) 1991-11-20 1992-10-27 Nsi Partners Digital demodulator using numerical processor to evaluate period measurements
US5179419A (en) * 1991-11-22 1993-01-12 At&T Bell Laboratories Methods of detecting, classifying and quantifying defects in optical fiber end faces
US5145432A (en) 1991-11-27 1992-09-08 Zenith Electronics Corporation Optical interprogation system for use in constructing flat tension shadow mask CRTS
US5337262A (en) 1991-12-03 1994-08-09 Hr Textron Inc. Apparatus for and method of testing hydraulic/pneumatic apparatus using computer controlled test equipment
US5299269A (en) * 1991-12-20 1994-03-29 Eastman Kodak Company Character segmentation using an associative memory for optical character recognition
US5216503A (en) 1991-12-24 1993-06-01 General Instrument Corporation Statistical multiplexer for a multichannel image compression system
US5371690A (en) 1992-01-17 1994-12-06 Cognex Corporation Method and apparatus for inspection of surface mounted devices
US6002793A (en) 1992-01-30 1999-12-14 Cognex Corporation Machine vision method and apparatus for finding an object orientation angle of a rectilinear object
WO1993016442A1 (en) 1992-02-18 1993-08-19 Neopath, Inc. Method for identifying objects using data processing techniques
JP3073599B2 (ja) * 1992-04-22 2000-08-07 本田技研工業株式会社 画像のエッジ検出装置
US5657403A (en) 1992-06-01 1997-08-12 Cognex Corporation Vision coprocessing
US5594859A (en) * 1992-06-03 1997-01-14 Digital Equipment Corporation Graphical user interface for video teleconferencing
US5475803A (en) 1992-07-10 1995-12-12 Lsi Logic Corporation Method for 2-D affine transformation of images
US5715385A (en) * 1992-07-10 1998-02-03 Lsi Logic Corporation Apparatus for 2-D affine transformation of images
JP2597802B2 (ja) 1992-08-04 1997-04-09 インターナショナル・ビジネス・マシーンズ・コーポレイション イメージ・キャプチャ装置を制御するための方法、イメージ・キャプチャ装置及びユーザ・インターフェース
GB2270581A (en) * 1992-09-15 1994-03-16 Ibm Computer workstation
US5367667A (en) 1992-09-25 1994-11-22 Compaq Computer Corporation System for performing remote computer system diagnostic tests
JP3225635B2 (ja) 1992-10-20 2001-11-05 株式会社日立製作所 建設支援装置及び方法
US5506617A (en) * 1992-12-10 1996-04-09 Eastman Kodak Company Electronic camera incorporating a computer-compatible bus interface
EP0604052B1 (en) 1992-12-23 2001-08-08 AT&T Corp. A method and system for locating objects with subpixel precision
US5367439A (en) 1992-12-24 1994-11-22 Cognex Corporation System for frontal illumination
US5859923A (en) * 1992-12-29 1999-01-12 Cognex Corporation Mark quality inspection apparatus and method
US5461417A (en) 1993-02-16 1995-10-24 Northeast Robotics, Inc. Continuous diffuse illumination method and apparatus
US5608872A (en) * 1993-03-19 1997-03-04 Ncr Corporation System for allowing all remote computers to perform annotation on an image and replicating the annotated image on the respective displays of other comuters
US5481712A (en) * 1993-04-06 1996-01-02 Cognex Corporation Method and apparatus for interactively generating a computer program for machine vision analysis of an object
JP3051279B2 (ja) 1993-05-13 2000-06-12 シャープ株式会社 バンプ外観検査方法およびバンプ外観検査装置
JPH06325181A (ja) 1993-05-17 1994-11-25 Mitsubishi Electric Corp パターン認識方法
JP3205432B2 (ja) * 1993-06-10 2001-09-04 松下電器産業株式会社 装着部品検査装置と装着部品検査方法
US5455933A (en) 1993-07-14 1995-10-03 Dell Usa, L.P. Circuit and method for remote diagnosis of personal computers
DE69322775T2 (de) 1993-08-12 1999-07-22 International Business Machines Corp., Armonk, N.Y. Verfahren zur Inspektion vom Verbindungskugel-Satz eines intergrierten Schaltungsmoduls
US5381004A (en) * 1993-08-31 1995-01-10 Applied Materials, Inc. Particle analysis of notched wafers
US5809658A (en) 1993-09-29 1998-09-22 Snap-On Technologies, Inc. Method and apparatus for calibrating cameras used in the alignment of motor vehicle wheels
US5548326A (en) 1993-10-06 1996-08-20 Cognex Corporation Efficient image registration
US5532739A (en) 1993-10-06 1996-07-02 Cognex Corporation Automated optical inspection apparatus
US5640199A (en) 1993-10-06 1997-06-17 Cognex Corporation Automated optical inspection apparatus
EP0647920A2 (en) 1993-10-08 1995-04-12 AT&T Corp. Method for deriving image width & height from raw image data
US5652658A (en) 1993-10-19 1997-07-29 View Engineering, Inc. Grid array inspection system and method
US5544256A (en) 1993-10-22 1996-08-06 International Business Machines Corporation Automated defect classification system
US5805722A (en) 1993-11-22 1998-09-08 Cognex Corporation Method and apparatus for locating, inspecting, and placing large leaded devices
US5511015A (en) * 1993-11-30 1996-04-23 Loral Vought Systems Corporation Double-accumulator implementation of the convolution function
US5434927A (en) 1993-12-08 1995-07-18 Minnesota Mining And Manufacturing Company Method and apparatus for machine vision classification and tracking
US5500906A (en) * 1994-01-14 1996-03-19 Cognex Corporation Locating curvilinear objects using feathered fiducials
CA2113752C (en) * 1994-01-19 1999-03-02 Stephen Michael Rooks Inspection system for cross-sectional imaging
US5519840A (en) 1994-01-24 1996-05-21 At&T Corp. Method for implementing approximate data structures using operations on machine words
US5583954A (en) 1994-03-01 1996-12-10 Cognex Corporation Methods and apparatus for fast correlation
DE4408948C2 (de) 1994-03-16 1998-02-26 Till Gea Gmbh & Co Verfahren und Vorrichtung zur Überprüfung von Gebinden
US5526050A (en) 1994-03-31 1996-06-11 Cognex Corporation Methods and apparatus for concurrently acquiring video data from multiple video data sources
US5581632A (en) 1994-05-02 1996-12-03 Cognex Corporation Method and apparatus for ball bond inspection system
US5550763A (en) 1994-05-02 1996-08-27 Michael; David J. Using cone shaped search models to locate ball bonds on wire bonded devices
US5642158A (en) 1994-05-02 1997-06-24 Cognex Corporation Method and apparatus to detect capillary indentations
DE4415990A1 (de) 1994-05-06 1995-11-23 Philips Patentverwaltung Verfahren zur Wiedergabe insbesondere einer digitalen Röntgenaufnahme als sichtbares Bild sowie Anordnung zur Durchführung des Verfahrens
US5557410A (en) 1994-05-26 1996-09-17 Lockheed Missiles & Space Company, Inc. Method of calibrating a three-dimensional optical measurement system
US5602937A (en) * 1994-06-01 1997-02-11 Cognex Corporation Methods and apparatus for machine vision high accuracy searching
US5495537A (en) * 1994-06-01 1996-02-27 Cognex Corporation Methods and apparatus for machine vision template matching of images predominantly having generally diagonal and elongate features
JP3513916B2 (ja) * 1994-06-20 2004-03-31 株式会社ニコン カメラシステム
US5539409A (en) 1994-06-30 1996-07-23 Westinghouse Electric Corp. Apparatus and method for windshear data processing
JP3603285B2 (ja) * 1994-07-21 2004-12-22 株式会社セガ 画像処理装置
US5640200A (en) 1994-08-31 1997-06-17 Cognex Corporation Golden template comparison using efficient image registration
US5649032A (en) 1994-11-14 1997-07-15 David Sarnoff Research Center, Inc. System for automatically aligning images to form a mosaic image
US5496106A (en) * 1994-12-13 1996-03-05 Apple Computer, Inc. System and method for generating a contrast overlay as a focus assist for an imaging device
DE69530566T2 (de) * 1995-01-13 2004-03-25 Stmicroelectronics S.R.L., Agrate Brianza Hough-Transform mit Fuzzy-Gradient und Wahl
US5796386A (en) 1995-01-23 1998-08-18 International Business Machines Corporation Precise calibration procedure for sensor-based view point control system
US5497007A (en) * 1995-01-27 1996-03-05 Applied Materials, Inc. Method for automatically establishing a wafer coordinate system
US5627915A (en) 1995-01-31 1997-05-06 Princeton Video Image, Inc. Pattern recognition system employing unlike templates to detect objects having distinctive features in a video field
US5850466A (en) 1995-02-22 1998-12-15 Cognex Corporation Golden template comparison for rotated and/or scaled images
US5574668A (en) 1995-02-22 1996-11-12 Beaty; Elwin M. Apparatus and method for measuring ball grid arrays
US5696848A (en) 1995-03-09 1997-12-09 Eastman Kodak Company System for creating a high resolution image from a sequence of lower resolution motion images
US5553859A (en) 1995-03-22 1996-09-10 Lazer-Tron Corporation Arcade game for sensing and validating objects
EP0971541A3 (en) 1995-03-24 2000-08-23 PPT Vision, Inc. High speed digital video serial link
US5566877A (en) 1995-05-01 1996-10-22 Motorola Inc. Method for inspecting a semiconductor device
US5676302A (en) 1995-06-02 1997-10-14 Cognex Corporation Method and apparatus for crescent boundary thresholding on wire-bonded leads
WO1996039619A1 (en) 1995-06-06 1996-12-12 Kla Instruments Corporation Optical inspection of a specimen using multi-channel responses from the specimen
US6002738A (en) 1995-07-07 1999-12-14 Silicon Graphics, Inc. System and method of performing tomographic reconstruction and volume rendering using texture mapping
US5825913A (en) 1995-07-18 1998-10-20 Cognex Corporation System for finding the orientation of a wafer
US5801966A (en) 1995-07-24 1998-09-01 Cognex Corporation Machine vision methods and articles of manufacture for determination of convex hull and convex hull angle
US6026176A (en) 1995-07-25 2000-02-15 Cognex Corporation Machine vision methods and articles of manufacture for ball grid array inspection
US5757956A (en) 1995-10-31 1998-05-26 Cognex Corp. Template rotating method for locating bond pads in an image
US5754679A (en) 1995-10-31 1998-05-19 Cognex Corp. Image rotating method for locating bond pads in an image
US5715369A (en) * 1995-11-27 1998-02-03 Microsoft Corporation Single processor programmable speech recognition test system
US5673334A (en) 1995-11-30 1997-09-30 Cognex Corporation Method and apparatus for inspection of characteristics on non-rigid packages
US5987172A (en) 1995-12-06 1999-11-16 Cognex Corp. Edge peak contour tracker
US6870566B1 (en) 1995-12-07 2005-03-22 Canon Kabushiki Kaisha Image sensing system for sensing an image and converting the image into image signals with a controlled operating rate
US5768443A (en) 1995-12-19 1998-06-16 Cognex Corporation Method for coordinating multiple fields of view in multi-camera
US5825483A (en) * 1995-12-19 1998-10-20 Cognex Corporation Multiple field of view calibration plate having a reqular array of features for use in semiconductor manufacturing
US5796868A (en) 1995-12-28 1998-08-18 Cognex Corporation Object edge point filtering system for machine vision
US5751853A (en) 1996-01-02 1998-05-12 Cognex Corporation Locating shapes in two-dimensional space curves
US5845007A (en) 1996-01-02 1998-12-01 Cognex Corporation Machine vision method and apparatus for edge-based image histogram analysis
SG42307A1 (en) 1996-01-09 1997-08-15 Peng Seng Toh Measurement and inspection of leads on integrated circuit packages
US5739846A (en) * 1996-02-05 1998-04-14 Universal Instruments Corporation Method of inspecting component placement accuracy for each first selected circuit board to be assembled of a batch
US5872870A (en) * 1996-02-16 1999-02-16 Cognex Corporation Machine vision methods for identifying extrema of objects in rotated reference frames
US5742037A (en) * 1996-03-07 1998-04-21 Cognex Corp. Method and apparatus for high speed identification of objects having an identifying feature
US5909504A (en) 1996-03-15 1999-06-01 Cognex Corporation Method of testing a machine vision inspection system
US6259827B1 (en) 1996-03-21 2001-07-10 Cognex Corporation Machine vision methods for enhancing the contrast between an object and its background using multiple on-axis images
US6298149B1 (en) 1996-03-21 2001-10-02 Cognex Corporation Semiconductor device image inspection with contrast enhancement
US5949901A (en) 1996-03-21 1999-09-07 Nichani; Sanjay Semiconductor device image inspection utilizing image subtraction and threshold imaging
US5848189A (en) 1996-03-25 1998-12-08 Focus Automation Systems Inc. Method, apparatus and system for verification of patterns
US5978502A (en) 1996-04-01 1999-11-02 Cognex Corporation Machine vision methods for determining characteristics of three-dimensional objects
WO1997039416A2 (en) 1996-04-02 1997-10-23 Cognex Corporation Image formation apparatus for viewing indicia on a planar specular substrate
US5818443A (en) 1996-05-06 1998-10-06 Cognex Corporation Single step coarse registration and inspection of circular objects
US5847714A (en) 1996-05-31 1998-12-08 Hewlett Packard Company Interpolation method and apparatus for fast image magnification
KR100257279B1 (ko) 1996-06-06 2000-06-01 이시다 아키라 주변노광장치 및 방법
US5835099A (en) 1996-06-26 1998-11-10 Xerox Corporation Representing a region of a color image using a space-color separable model
WO1998004882A1 (en) * 1996-07-12 1998-02-05 Linker Frank V Jr Split optics arrangement for vision inspection/sorter module
US5739913A (en) * 1996-08-02 1998-04-14 Mrs Technology, Inc. Non-contact edge detector
US6137893A (en) 1996-10-07 2000-10-24 Cognex Corporation Machine vision calibration targets and methods of determining their location and orientation in an image
US5960125A (en) 1996-11-21 1999-09-28 Cognex Corporation Nonfeedback-based machine vision method for determining a calibration relationship between a camera and a moveable object
US5918196A (en) 1996-11-29 1999-06-29 Cognex Corporation Vision system for analyzing solid-of-revolution radius profile
US5912984A (en) 1996-12-19 1999-06-15 Cognex Corporation Method and apparatus for in-line solder paste inspection
US6025905A (en) * 1996-12-31 2000-02-15 Cognex Corporation System for obtaining a uniform illumination reflectance image during periodic structured illumination
US5912768A (en) 1996-12-31 1999-06-15 Cognex Corporation Depth-from-defocus optical apparatus with invariance to surface reflectance properties
US5953130A (en) 1997-01-06 1999-09-14 Cognex Corporation Machine vision methods and apparatus for machine vision illumination of an object
US5933523A (en) 1997-03-18 1999-08-03 Cognex Corporation Machine vision method and apparatus for determining the position of generally rectangular devices using boundary extracting features
US6075881A (en) 1997-03-18 2000-06-13 Cognex Corporation Machine vision methods for identifying collinear sets of points from an image
US5974169A (en) 1997-03-20 1999-10-26 Cognex Corporation Machine vision methods for determining characteristics of an object using boundary points and bounding regions
US6069668A (en) 1997-04-07 2000-05-30 Pinnacle Systems, Inc. System and method for producing video effects on live-action video
US6141033A (en) 1997-05-15 2000-10-31 Cognex Corporation Bandwidth reduction of multichannel images for machine vision
US5878152A (en) * 1997-05-21 1999-03-02 Cognex Corporation Depth from focal gradient analysis using object texture removal by albedo normalization
US6118540A (en) 1997-07-11 2000-09-12 Semiconductor Technologies & Instruments, Inc. Method and apparatus for inspecting a workpiece
US6016152A (en) * 1997-08-01 2000-01-18 Avid Technology, Inc. Apparatus and method for non-uniform image scaling
US5978521A (en) 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine calibration locations of multiple cameras that image a common object
US5978080A (en) 1997-09-25 1999-11-02 Cognex Corporation Machine vision methods using feedback to determine an orientation, pixel width and pixel height of a field of view
US5982132A (en) * 1997-10-09 1999-11-09 Electroglas, Inc. Rotary wafer positioning system and method
US5974365A (en) 1997-10-23 1999-10-26 The United States Of America As Represented By The Secretary Of The Army System for measuring the location and orientation of an object
US5900975A (en) 1997-10-30 1999-05-04 Cognex Corporation Ghost image extinction in an active range sensor
US6856698B1 (en) * 1997-11-26 2005-02-15 Cognex Corporation Fast high-accuracy multi-dimensional pattern localization
US6658145B1 (en) 1997-12-31 2003-12-02 Cognex Corporation Fast high-accuracy multi-dimensional pattern inspection
US6170973B1 (en) * 1997-11-26 2001-01-09 Cognex Corporation Method and apparatus for wide-angle illumination in line-scanning machine vision devices
US6025854A (en) * 1997-12-31 2000-02-15 Cognex Corporation Method and apparatus for high speed image acquisition
US6850646B1 (en) * 1997-12-31 2005-02-01 Cognex Corporation Fast high-accuracy multi-dimensional pattern inspection
US6282328B1 (en) 1998-01-28 2001-08-28 Cognex Corporation Machine vision systems and methods for morphological transformation of an image with non-uniform offsets
US6236769B1 (en) 1998-01-28 2001-05-22 Cognex Corporation Machine vision systems and methods for morphological transformation of an image with zero or other uniform offsets
US6381375B1 (en) 1998-02-20 2002-04-30 Cognex Corporation Methods and apparatus for generating a projection of an image
US6215915B1 (en) 1998-02-20 2001-04-10 Cognex Corporation Image processing methods and apparatus for separable, general affine transformation of an image
US6516092B1 (en) * 1998-05-29 2003-02-04 Cognex Corporation Robust sub-model shape-finder
US7295314B1 (en) 1998-07-10 2007-11-13 Nanometrics Incorporated Metrology/inspection positioning system
US6389029B1 (en) 1998-11-10 2002-05-14 Nortel Networks Limited Local area network incorporating universal serial bus protocol
US6381366B1 (en) 1998-12-18 2002-04-30 Cognex Corporation Machine vision methods and system for boundary point-based comparison of patterns and images
US6275742B1 (en) 1999-04-16 2001-08-14 Berkeley Process Control, Inc. Wafer aligner system
US6477275B1 (en) 1999-06-16 2002-11-05 Coreco Imaging, Inc. Systems and methods for locating a pattern in an image
US6341878B1 (en) * 1999-08-31 2002-01-29 Cognex Corporation Method and apparatus for providing uniform diffuse illumination to a surface
US6191850B1 (en) * 1999-10-15 2001-02-20 Cognex Corporation System and method for inspecting an object using structured illumination
US6684402B1 (en) * 1999-12-01 2004-01-27 Cognex Technology And Investment Corporation Control methods and apparatus for coupling multiple image acquisition devices to a digital data processor
US6639624B1 (en) 1999-12-30 2003-10-28 Cognex Corporation Machine vision methods for inspection of leaded components
US6748104B1 (en) 2000-03-24 2004-06-08 Cognex Corporation Methods and apparatus for machine vision inspection using single and multiple templates or patterns
US6771808B1 (en) 2000-12-15 2004-08-03 Cognex Corporation System and method for registering patterns transformed in six degrees of freedom using machine vision
US6728582B1 (en) 2000-12-15 2004-04-27 Cognex Corporation System and method for determining the position of an object in three dimensions using a machine vision system with two cameras
US7006669B1 (en) * 2000-12-31 2006-02-28 Cognex Corporation Machine vision method and apparatus for thresholding images of non-uniform materials
US7048400B2 (en) 2001-03-22 2006-05-23 Lumimove, Inc. Integrated illumination system
US6914679B2 (en) 2001-12-18 2005-07-05 Cognex Technology And Investment Corporation Side light apparatus and method
CN1251318C (zh) 2002-02-25 2006-04-12 精工爱普生株式会社 半导体芯片、半导体装置和它们的制造方法以及使用它们的电路板和仪器
AU2003263737A1 (en) 2002-05-16 2003-12-02 Asyst Technologies, Inc. Pre-aligner
DE10222119B4 (de) 2002-05-17 2004-11-11 Asys Automatisierungssysteme Gmbh Vorrichtung und Verfahren zum Einstellen der relativen Lage zwischen einem zu bedruckenden Substrat und einem Druckmuster
US6900877B2 (en) 2002-06-12 2005-05-31 Asm American, Inc. Semiconductor wafer position shift measurement and correction
US7220034B2 (en) 2003-07-11 2007-05-22 Rudolph Technologies, Inc. Fiber optic darkfield ring light

Also Published As

Publication number Publication date
US8162584B2 (en) 2012-04-24
US20080050006A1 (en) 2008-02-28
TW200832597A (en) 2008-08-01
WO2008024476A2 (en) 2008-02-28
WO2008024476A3 (en) 2008-11-13

Similar Documents

Publication Publication Date Title
TWI390660B (zh) 用於半導體晶圓對準之方法與設備
US11099368B2 (en) Camera and specimen alignment to facilitate large area imaging in microscopy
JP4567667B2 (ja) ウェーハ担持ロボットを較正するための方法
US9275886B2 (en) Device and method for detecting position of semiconductor substrate
JP4703187B2 (ja) 視覚システム
JP4257570B2 (ja) 搬送用ロボットのティーチング装置および搬送用ロボットのティーチング方法
US6516244B1 (en) Wafer alignment system and method
US20080225281A1 (en) Visual inspection apparatus
TWI359442B (en) Substrate processing device, and substrate process
JP2017504014A (ja) 位置敏感基板デバイス
US20230176354A1 (en) Method and system to detect substrate placement accuracy
JP2007059640A (ja) 外観検査装置
JP3247495B2 (ja) 基板処理装置、基板移載機の位置設定方法、及びボートの状態検出方法
JP4334917B2 (ja) アライメント装置
JP3143700B2 (ja) 位置合せ装置