TWI375496B - Method for making conductive line - Google Patents

Method for making conductive line Download PDF

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Publication number
TWI375496B
TWI375496B TW98100705A TW98100705A TWI375496B TW I375496 B TWI375496 B TW I375496B TW 98100705 A TW98100705 A TW 98100705A TW 98100705 A TW98100705 A TW 98100705A TW I375496 B TWI375496 B TW I375496B
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Taiwan
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conductive line
preparing
carbon nanotube
conductive
ink
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TW98100705A
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Chinese (zh)
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TW201028060A (en
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Yao-Wen Bai
Rui Zhang
Cheng Hsien Lin
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Hon Hai Prec Ind Co Ltd
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1375496 六、發明說明: 【發明所屬之技術領域】 本發明涉及-種製備導電魏的方法,朗涉及—種譽備基 於奈米碳管的導電線路的方法。 土 【先前技術】 近年來’資訊、軌、及錄㈣子產品等產祕展迅速。 而於資訊、通訊及消費性電子產品的產業中,印刷線路板駐不 可缺少的重要組件。印刷線路板’又稱印製電路板,印刷電路板, 常使用英錢寫PCB (PFinted dfeuitb_),健制電子部件, 係電枝件的支«,係電子元科線路連接的提供^由於它 係採用電子印做術製作的,故被板。 先前的製造印刷線路板_程包括將金屬薄膜壓於基板表 面、,再用旋轉塗布的方法於金屬薄膜表面形成—光阻層,而後再 加以光罩曝光、顯影、_ ’進而再加以鑽孔、壓合與電鍵等多 項步驟,並還f多項測試及修微桂完成整個餘。先前的方 法製造印刷線路板,不僅過程複雜,而且還具有消耗資源高,對 環境有污染的缺點。 隨著數㈣墨蝴技術的發展,_噴墨印表機製造印刷線 路板成為可能。料電墨水直接噴印於絕緣基板表面,經過進一 步的j理於絕絲板表面形成電路,即可獲得印獅路板。相較 於先前的印刷線路板的製造方法,噴墨技術將會給印刷線路板的 製造業帶來更快的速度和更低的成本,及更高的佈線密度。 U/M96 U/M96 m 2〇06年7月15日公開的一篇公開號為US2006/0124028 A1的 二 提出—種嘴墨印表機用墨水,其包括一溶劑载體、 Γ 性劑。射奈米碳管的質量百分比為〇·1〜3〇%, y: W包括金屬性奈米碳管或半導體性奈米碳管。該專利中言主 ^提出種於基底上形成奈米碳管圖案的方法,包括以下步驟 ,供-上述墨水;_印表機將該墨水噴印於—基底上形成 …烘乾上述圖案該瞧可用作電極或導線等。進—步,該 利申請的具财__奈米碳管㈣量百分比為25%的墨树 印薄膜’然後m咖於航以上加熱:小時烘乾得到—導電 薄膜,該導電薄膜的厚度為65微米。對該導電薄膜進行測量表明, =電阻率為然而,_上述方法直接噴印形成導電 薄膜時’具有以下从:第―,由於麵接噴印含 2墨水製備導電_,墨水中的奈米碳管只能制金屬性奈米 i ’而半導體性奈㈣管會造成線路導紐不佳。第二,由於 導電薄膜僅细奈米碳管導電,而奈米碳管之間的連接電阻較 大’該方法製備的導電薄膜電阻率為18xl(feem,遠大於銅的電 ^率(銅的電鳴⑽X1GD,由此可見該導電薄膜電阻 羊太大’使聘會產生較大的焦耳熱損耗,不易用作連接導線。 弟三’喷印後烘乾的過針,由於導電_周_溶劑蒸發速度 ^中間快’造成導電薄_部的液體必須通過毛細現象向線路週 邊擴散’從而導致製備的導電薄膜㈣外厚,厚度不均句。 先前技術賴—縣米碳f與麵複合材互連導 1375496 /線的形成方法’該方法包括以下步驟:準備一奈米碳管的分散液, • •其包含-有機溶劑及分散於該有機溶_奈米辟;將該奈米石炭 .管的分散液噴印印刷於一基材的-表面,及從該表面揮發移除該 ‘有機溶劑’從而形成-導電基線;及將該導電基線與一陰極電極 电連接’亚置於-含有金屬離子的電鍍浴巾進行電錄,以形成奈 米碳官與金屬複合材料的電鍍互連導線。採用該方法製備的導電 線路,可克服上述方法製備導電線路存在的導電性差的問題,= •且可於一定程度上改善線路均勻性。 然而’採賴方法製備互連導線具有以下不足:第―,由於 該方法通過電鍍的方法製備互連導線,故,奈米碳管的分散液: 能採用金雜奈米碳管。且奈米碳f的分絲中的奈米碳管含量 不能太低加絲碳f的含餘易造射墨印_過程 塞印表機喷頭。第二,該方法需要確定該奈米碳管的合適用量的 過程,工藝,成本較高。第三,該方法製備互料線,由於 靠近陰極電極的位置電流密度妓,電化學反驗快,故, 近陰極電極驗料線厚度大,導致導線厚度整體 【發明内容】 〜 、有繁於此,提供一種對墨水的導電性要求低,且方法簡單, 成本低廉的導電線路的製備方法實為必要。 一種製備導電線路的方法,其包括町步驟:製備-含有夺 、Γ的墨水’細該墨水於—基底上形鱗電線路預製體;及 對所述導電線路預製體進行化學錢。 ^75496 與先珂技術相比較,採用所述方法製備導電線路具有以下 點.先噴印含有奈米碳管的導躲路預製體 , ,錄,該方法對墨水的導電性要求低,且方々 【實施方式】 廉。 下面將結合附圖及具體實施例,對本發明實施例提供的 導電線路的方法作進一步詳細說明。 & 明參閱圖1及圖2,本發明實施例提供一種製備導電線 的方法’具體包括以下步驟: 乂驟,提供一墨水,其包括:溶劑、黏度調節劑、表面、、 性劑、連接料及奈米碳管。 、 所述墨水中,溶劑的質量百分比為I·,奈米碳管的質息 百分比為_m〜5% ’黏度調_㈣量百分比為q ,夺里 雜劑的貝置百分比為〇 Μ%,連接料的質量百分比為叫攸。 所述溶劑為水,其中,優選去離子水。 〇〇 本發明實關t提供的墨水,奈米碳管的#量百分 杨可避免墨杨於奈米碳管含量過高而分散不= 勻,從而保證該墨水使用時不會將印表機的喷頭堵塞,另 可保證該墨极彳_料魏路w _財,奴财的= 碳管吸附貴金雜子以利於化學鍍。優選地,奈米碳 = 分比為1〜3%。 貝里百 ”所述不米及s包括單壁奈米碳管、雙壁奈米碳管及多壁 碳&中的種或夕種。该奈米碳管可通過電弧放電法、録射蒸發 1375496 法或者化學氣相沈積法製備獲得。所述奈米碳管的直徑小於50奈 米,長度小於2微米。可理解,奈米碳管的直徑越小,長度越大, 其長徑比越大,比表面積也越大,對金屬離子的吸附能力就越強。 然,奈米碳管的長度越大,就越難分散,從而導致該墨水使用時 將印表機的噴頭堵塞。本發明實施射,選用直徑小於5〇奈米, 長度為50〜200奈米的奈米碳管製備墨水,既可使奈米碳管均勻分 散,使用時不會將印表機的喷頭堵塞,又可使得該含有奈米碳管 的墨水具有-定的讀性’關於其細於導電祕如的製備。 進-步’所述墨水中的奈米礙管可預先進行功能化處理。該 功能化處理的奈米碳管表面帶有功能團,該功能團包括羧基 (-COOH)、Μ基(-OH)、盤基(_CHO)及氨基(_Nh2)等中的一種或多 種。該功能團可形成於奈米碳管管壁上。可理解,該功能團為親 水性功能團,且所述墨水的溶劑為水,故,功能化處理的奈米碳 管可更好地分散於墨水中。 所述黏度調節劑為水溶性聚合物,以調節墨水的黏合性。所 述黏度調節劑包括曱醇、乙醇、纖維素醚、瓜耳膠及矽膠等中的 一種或多種。所述黏度調節劑可調節墨水的黏度,使其適合用於 噴墨印表機。 所述表面活性劑可包括脂肪酸、填酸酯、改性聚乙稀醇、聚 矽氧烷、十二烷基硫酸鈉及聚山梨醇酯中的一種或多種。本發明 實施例中,表面活性劑為改性聚乙烯醇。所述表面活性劑—部分 包裘於奈米碳管表面,使奈米碳管均勻分散於墨水中。另—部分 歹刀放於墨水巾調即墨水的表面張力從而使得該墨水可適合 列印到不同的基底上。 所述連接料包括聚乙婦°比魏酮(pvp)、聚乙稀醇(PVA) ^維酮等中的-種或多種。本發明實施例中,連接料為聚乙稀 比魏酮。加人連接料可提高墨水的黏合性。將墨水列印到基底1375496 VI. Description of the Invention: [Technical Field] The present invention relates to a method for preparing a conductive Wei, and a method for preparing a conductive line based on a carbon nanotube. Soil [Prior Art] In recent years, the secrets of the products such as “Information, Orbit, and Record (4) Sub-products have been rapid. In the information, communications and consumer electronics industries, printed circuit boards are an indispensable component. Printed circuit board, also known as printed circuit board, printed circuit board, often used in English to write PCB (PFinted dfeuitb_), health electronic components, is the branch of the electric branch, is provided by the electronic yuan line connection ^ due to it It is made by electronic printing, so it is board. The prior manufacturing of printed circuit boards consists of pressing a metal film onto the surface of the substrate, and then forming a photoresist layer on the surface of the metal film by spin coating, and then exposing, developing, and further drilling the mask. , a number of steps such as pressing and pressing, and also a number of tests and repairs to complete the entire remainder. The previous method of manufacturing printed circuit boards not only has a complicated process, but also has the disadvantages of high resource consumption and environmental pollution. With the development of the number (four) ink butterfly technology, it is possible to manufacture printed circuit boards by _ inkjet printers. The electric ink is directly printed on the surface of the insulating substrate, and the lion board is obtained by further forming a circuit on the surface of the slab. Inkjet technology will bring faster speed and lower cost to printed circuit board manufacturing, as well as higher wiring density than previous printed circuit board manufacturing methods. U/M96 U/M96 m 2 pp. US Publication No. US 2006/0124028 A1, issued on Jul. 15, 2006, which is incorporated herein by reference. The mass percentage of the carbon nanotubes is 〇·1 to 3〇%, and y: W includes metallic carbon nanotubes or semiconducting carbon nanotubes. The patent discloses a method for forming a carbon nanotube pattern on a substrate, comprising the steps of: - the ink is printed on the substrate; the printer prints the ink on the substrate to form the pattern Can be used as an electrode or wire. Step-by-step, the profit application of the profitable __nano carbon tube (four) percentage of 25% of the ink-tree printed film 'then m coffee above the air heating: hour drying to obtain - conductive film, the thickness of the conductive film is 65 microns. The measurement of the conductive film shows that the resistivity is, however, the above method directly prints to form a conductive film, which has the following: from the first, because the surface is printed with 2 inks to prepare conductive _, the carbon in the ink The tube can only make metal nano-i' and the semiconductor nephew (four) tube will cause poor line guides. Second, since the conductive film is only conductive with a thin carbon nanotube, and the connection resistance between the carbon nanotubes is large, the resistivity of the conductive film prepared by the method is 18xl (feem, much larger than the electrical conductivity of copper (copper The electric sound (10) X1GD, it can be seen that the conductive film resistance sheep is too large, so that the employment will produce a large Joule heat loss, and it is not easy to be used as a connecting wire. The third one is after the printing and drying the needle, due to the conductive_week_solvent Evaporation speed ^ intermediate fast 'causes the conductive thin _ part of the liquid must diffuse to the periphery of the line through capillary phenomenon', resulting in the preparation of the conductive film (four) thick outer thickness, uneven thickness sentence. Previous technology Lai - county meters carbon f and surface composites Method for forming a lead 1375496 / line 'The method comprises the steps of: preparing a dispersion of a carbon nanotube, • comprising - an organic solvent and dispersing in the organic solution - nanometer; the nanocarbon charcoal tube Dispersing liquid is printed on a surface of a substrate, and volatilized from the surface to remove the 'organic solvent' to form a conductive baseline; and electrically connecting the conductive baseline to a cathode electrode 'sub-position-containing metal Ion plating The towel is electrically recorded to form a plated interconnecting wire of nano carbon official and metal composite material. The conductive circuit prepared by the method can overcome the problem of poor conductivity of the conductive line prepared by the above method, and can be to some extent Improve the uniformity of the line. However, the method of preparing the interconnected wires has the following disadvantages: ―, because the method is to prepare the interconnecting wires by electroplating, the dispersion of the carbon nanotubes: can adopt the gold hybrid Carbon tube, and the carbon nanotube content in the carbon filament of the nano carbon f can not be too low, the content of the carbon carbon f is easy to make ink printing _ process plug printer nozzle. Second, the method needs to determine the The process, process and cost of the suitable amount of carbon nanotubes are relatively high. Thirdly, the method prepares the interconnecting line, because the current density near the cathode electrode is 妓, the electrochemical counter-test is fast, so the near-cathode electrode inspection line The thickness is large, resulting in the overall thickness of the wire. [Invention] In addition, there is a need to provide a method for preparing a conductive line having low conductivity requirements, simple method, and low cost. A method of preparing a conductive line, comprising the steps of: preparing - containing ink, squeezing ink, finely smearing the ink on the substrate, and depositing chemical money on the conductive line preform. ^75496 Compared with the prior art, the method of preparing the conductive circuit by the method has the following points. First, the conductive pre-formed body containing the carbon nanotubes is printed, and the method has low requirements on the conductivity of the ink, and the method is The method for preparing a conductive line according to an embodiment of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Referring to FIG. 1 and FIG. 2, an embodiment of the present invention provides a method for preparing a conductive line. Specifically, the method includes the following steps: Step: providing an ink, comprising: a solvent, a viscosity modifier, a surface, a sex agent, a binder, and a carbon nanotube. In the ink, the mass percentage of the solvent is I·, nanometer The percentage of the carbon nanotubes is _m~5%. The viscosity is _ (four) and the percentage is q. The percentage of the scallops is 〇Μ%, and the mass percentage of the binder is 攸. The solvent is water, of which deionized water is preferred. 〇〇The ink provided by the real-time t of the invention, the nano-quantum of the carbon nanotubes can avoid the excessive content of the poplar in the carbon nanotubes and the dispersion is not uniform, thereby ensuring that the ink will not be printed when used. The nozzle of the machine is clogged, and the ink can be guaranteed to be 彳_料魏路w_财, slavery = carbon tube adsorbs precious gold miscellaneous to facilitate electroless plating. Preferably, the nanocarbon = fractional ratio is from 1 to 3%. "Berry" includes the single-walled carbon nanotubes, the double-walled carbon nanotubes, and the multi-walled carbon & species or evening species. The carbon nanotubes can be recorded by arc discharge. Obtained by evaporation 1375496 or chemical vapor deposition. The diameter of the carbon nanotubes is less than 50 nm and the length is less than 2 microns. It is understood that the smaller the diameter of the carbon nanotubes, the larger the length, the aspect ratio The larger the specific surface area, the stronger the adsorption capacity for metal ions. However, the larger the length of the carbon nanotubes, the more difficult it is to disperse, which causes the nozzles of the printer to clog when the ink is used. In the invention, the ink is prepared by using a carbon nanotube having a diameter of less than 5 nanometers and a length of 50 to 200 nanometers, so that the carbon nanotubes can be uniformly dispersed, and the nozzle of the printer is not blocked when used. In addition, the carbon nanotube-containing ink can have a predetermined readability. The preparation of the ink in the ink can be functionalized in advance. The surface of the treated carbon nanotube has a functional group, and the functional group includes a carboxyl group (- One or more of COOH), mercapto (-OH), disc (_CHO) and amino (_Nh2), etc. The functional group can be formed on the wall of the carbon nanotube. It is understood that the functional group is hydrophilic. The functional group, and the solvent of the ink is water, so that the functionalized carbon nanotubes can be better dispersed in the ink. The viscosity modifier is a water-soluble polymer to adjust the adhesion of the ink. The viscosity adjusting agent includes one or more of decyl alcohol, ethanol, cellulose ether, guar gum and silicone rubber, etc. The viscosity adjusting agent can adjust the viscosity of the ink to make it suitable for use in an ink jet printer. The surfactant may include one or more of a fatty acid, a carboxylic acid ester, a modified polyvinyl alcohol, a polyoxyalkylene oxide, a sodium lauryl sulfate, and a polysorbate. In the embodiment of the present invention, the surfactant is Modified polyvinyl alcohol. The surfactant is partially coated on the surface of the carbon nanotubes to uniformly disperse the carbon nanotubes in the ink. Another part of the boring tool is placed on the ink towel to adjust the surface tension of the ink so that The ink can be suitable for printing onto different substrates. The material includes one or more kinds of polyacetone (pvp), polyvinyl alcohol (PVA) ketone, etc. In the embodiment of the invention, the binder is polyethylene carbitol. Improves the adhesion of the ink. Prints the ink to the substrate

^,隨_糊絲_綱域蝴發,奈米 反官很容魏落。崎連接财將奈米碳管固定於基底表面。 可&擇地’該墨水中還可加人—定量的保測,所述 夕質量百分比為^〜娜。所述保_通常為—高彿點材料,包括 ^酵及二摘_旨等中的_種或錄。保濕劑可提高該墨水的 /弗點’減慢墨水蒸發的速度。本#_中,於墨水中加入質量百 刀比為30%的二元醇_旨。該墨水可於5〇~励〇c溫度下使用而 不易揮發。 該墨水的製備方法主要包括以下步驟: (一)提供一奈米碳管原料。 所述不米<官原料可通過電弧放電法'鐳射蒸發法或者化學 =相沈積法製備。本實施例中,通過化學氣相沈積法生長奈米碳 二車列,並職奈純管_巾的奈米碳#麟作切务奈米 ^官陣列中由於奈米碳管定向排列而沒有相互纏繞,故,有利於 奈米碳官於溶液中分散。本實施例中,奈米碳管長度為50〜200夺 米。 ’、 -)對上述奈米碳㈣料魏化處理,其包括^個步驟: 1375496 首先,提純上述奈米碳管原料。 所述提純奈米碳管原料的方法包括以下步驟:空氣流中加熱 除去無定型碳;濃酸浸泡除去金屬催化劑;及反復洗滌過濾得到 提純的奈米碳管。 本實施例中’將奈米碳管原料放於35〇°c的爐中,於空氣流 中加熱2小時以除去奈米碳管原料中殘留的無定型碳;將奈米碳 管原料浸泡於36%的濃鹽酸中約i天,除去奈米碳管原料中殘留 的金屬催化劑;將鹽酸浸泡後的奈米碳管原料進行離心分離;將 分離所得的奈米碳管原料沉澱物用去離子水反復洗滌;再將洗滌 後的奈米碳管原料沉殿物經由〇.2mm孔徑的聚四氟乙烯膜過濾, 得到提純的奈米碳管原料。 提純的目的主要為除去奈米碳管原料中殘留的無定型碳和金 屬催化劑等雜質。通過提純,可得到純淨的奈米碳管原料。 其次’功能化處理該奈米碳管原料。 所述對奈米碳管原料功能化處理的方法包括以下步驟:將提 純過的奈米碳管原料於強酸中酸化處理;及清洗過濾得到帶有功 能團的奈米碳管。 所述強酸包括濃硫酸、濃硝酸或濃鹽酸中的一種或幾種。功 能化處理的目的為使奈米碳管表面引入功能團。請參閱圖3,按上 述功能化方法處理後的奈米碳管14,於管壁上引入親水性的功能 團。所述功能團包括叛基(-COOH)、經基(_〇h)、搭基(_CH〇)及氨 基(-NH2)等中的一種或多種。 9 1375496 本實施例中,將提純後的奈米碳管粉體lg放置於500ml燒瓶 中’量取50ml濃硫酸和濃硝酸混合液(濃硫酸和濃硝酸的體積為 3 : 1)倒入圓底繞瓶内,酸化反應4小時〜20小時後,將反應液倒 入水中,過遽後得到一奈米碳管渡餅。用去離子水將該奈米碳管 濾餅洗至pH值為中性,得到羧基化的奈米碳管。 (三) 製備奈米碳管的水溶性分散液。 把功能化處理過的奈米碳管過遽出來,放入去離子水中進行 超聲分散、離心、過濾處理,並重複上述分散處理的步驟4至5 次。最後將奈米碳管超聲分散於去離子水中,得到一奈米碳管水 >谷性分散液。所述去離子水可作為墨水的溶劑。 (四) 加入適量的黏度調節劑、表面活性劑、連接料,並攪 拌均勻得到墨水。 本實施例製備的墨水t,所述溶綱#量百分比為%〜齡, 所述奈米碳管㈣量百分比為G.2〜5%,所述黏度調節_質量百 分比為0.1〜30% ’所述表面活性劑的質量百分比為〇ι〜5%,所述 連接料的質量百分比為0.1〜30%。 於至溫下觸齡混合減〜5〇分鐘,制墨水。然後將 墨水超聲混合秘彳練人墨水H步,本實糊還可於該墨 水中加入適糾保酬。所賴關質量百分比為G.1〜4〇%。 v驟一採用4墨水於一基底1〇上形成導電線路預製體12。 所述基底10為—絕緣材料,形狀與大小不限 的材料树、氧化* f H基底10 石央、籃寶石、陶瓷、玻璃、金屬氧化物 及高分子材料中的一種或多種。所述 電線路預製體U的方法包括印表機噴2水於基底10上形成導 為-聚酿亞胺薄膜。通過喷墨印表機5本貝_中’基底10 安 、以忒醯亞胺薄膜上列印圖 本。由於所述墨水中奈米碳管含量較 頭。 _,故,不會堵塞印表機喷 所述導電線路預製體12可形成—箱κ 1 „ 战預疋要求的圖案。所述導電 線路預衣體12令包括複數個均勻分佈的奈米碳总μ 步驟三,對所述導電線路預製體12進行化風铲 對所述導電線路預製體12進行化學峡體3以下步驟: (一) 將所述導電線路預製體12烘乾。 所述將導電線路預製體12烘乾的太 的方去不限,可通過烘箱烘 乾’光照烘乾等。通過烘乾可使導電線路預製體η更牢固地錢 底1〇結合。本實施例中’將該形成有導電線路預製體η的^氏 10置於一供箱,並於120〜150°c保持10〜60秒。 (二) 將所述導電線路預製體12活化。 所述將導電線路預製體12活化的方法包括將該形成有導電線 路預製體12的基底1G整個浸泡於-貴錢鹽溶財浸泡或將一 貴金屬鹽溶液滴到所述導電線路預製體12表面以浸潤。 所述貴金触溶液巾的貴金難包括銀、錢_金屬鹽化 合物的/種或多種,如硝酸銀、硝酸鉑、硝酸鈀等中的一種或多 種。該貴金屬鮮液巾’貴金屬轉子形式均勻分散於溶液中^ 然後,將該導電線路預製體12從貴金屬鹽溶液中取丨。該步驟中, 11 1375496 由於導電線路預製體12中的奈米碳管14具有較大的比表面積,^, with _ 丝 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Saki connects the carbon nanotubes to the surface of the substrate. It is also possible to add a human-quantitative test to the ink, which is a mass percentage of ^~Na. The protection _ is usually - the high Buddha point material, including the _ species or record in the yeast and the second extract. The humectant increases the ink's / volts' slowdown of ink evaporation. In this #_, a glycol with a mass ratio of 30% is added to the ink. The ink can be used at temperatures from 5 〇 to 〇 c and is not volatile. The preparation method of the ink mainly comprises the following steps: (1) providing a carbon nanotube raw material. The non-rice raw material can be prepared by an arc discharge method 'laser evaporation method or chemical = phase deposition method. In this embodiment, the carbon nanotubes are grown by chemical vapor deposition, and the carbon nanotubes of the Nylon tube are not aligned with the carbon nanotubes. Intertwined, it is beneficial to disperse the nano carbon official in the solution. In this embodiment, the length of the carbon nanotubes is 50 to 200 meters. ', -) The above-mentioned nano carbon (four) material Weihua treatment, which includes the following steps: 1375496 First, the above carbon nanotube raw materials are purified. The method for purifying a carbon nanotube raw material comprises the steps of: heating to remove amorphous carbon in a stream; diluting to remove the metal catalyst by concentrated acid; and repeatedly washing and filtering to obtain a purified carbon nanotube. In the present embodiment, 'the carbon nanotube raw material is placed in a furnace of 35 ° C, and heated in an air stream for 2 hours to remove the amorphous carbon remaining in the carbon nanotube raw material; the carbon nanotube raw material is immersed in 36 days of concentrated hydrochloric acid for about i days, removing the metal catalyst remaining in the carbon nanotube raw material; centrifuging the carbon nanotube raw material after the hydrochloric acid soaking; separating the precipitate of the obtained carbon nanotube raw material by deionization The water is washed repeatedly; the washed carbon nanotube raw material is filtered through a 2 mm pore size polytetrafluoroethylene membrane to obtain a purified carbon nanotube raw material. The purpose of the purification is mainly to remove impurities such as amorphous carbon and metal catalyst remaining in the carbon nanotube raw material. By purifying, pure carbon nanotube raw materials can be obtained. Secondly, functionalize the carbon nanotube raw material. The method for functionalizing the carbon nanotube raw material comprises the steps of: acidifying the purified carbon nanotube raw material in a strong acid; and washing and filtering to obtain a carbon nanotube with a functional group. The strong acid includes one or more of concentrated sulfuric acid, concentrated nitric acid or concentrated hydrochloric acid. The purpose of the functionalization process is to introduce a functional group into the surface of the carbon nanotube. Referring to Figure 3, the carbon nanotubes 14 treated in the above functionalized manner introduce a hydrophilic functional group on the tube wall. The functional group includes one or more of a thiol (-COOH), a transradical (_〇h), a chelating group (_CH〇), and an amino group (-NH2). 9 1375496 In this embodiment, the purified carbon nanotube powder lg is placed in a 500 ml flask. Pour 50 ml of a concentrated sulfuric acid and concentrated nitric acid mixture (the volume of concentrated sulfuric acid and concentrated nitric acid is 3:1) into a circle. After the acidification reaction was carried out in the bottom of the bottle for 4 hours to 20 hours, the reaction liquid was poured into water, and after passing through a crucible, a carbon nanotube cake was obtained. The carbon nanotube filter cake was washed with deionized water until the pH was neutral to obtain a carboxylated carbon nanotube. (iii) Preparation of a water-soluble dispersion of carbon nanotubes. The functionalized carbon nanotubes are pulverized, placed in deionized water for ultrasonic dispersion, centrifugation, filtration treatment, and the steps of the above dispersion treatment are repeated 4 to 5 times. Finally, the carbon nanotubes were ultrasonically dispersed in deionized water to obtain a carbon nanotube water > trough dispersion. The deionized water can be used as a solvent for the ink. (4) Add appropriate amount of viscosity modifier, surfactant, and binder, and stir to obtain the ink. The ink t prepared in this embodiment has a percentage of the solvent of % to aging, the percentage of the carbon nanotubes (four) is G. 2 to 5%, and the viscosity adjustment _ mass percentage is 0.1 to 30%. The mass percentage of the surfactant is 〜1 to 5%, and the mass percentage of the binder is 0.1 to 30%. Into the temperature, the age of the mixture is reduced by ~5 〇 minutes to make ink. Then, the ink is ultrasonically mixed with the secretive man's ink H step, and the real paste can also be added to the ink water to compensate. The percentage of the quality of the company is G.1~4〇%. v. First, a conductive line preform 12 is formed on a substrate 1 by using 4 inks. The substrate 10 is one or more of an insulating material, a material tree having an unlimited shape and size, an oxidation * f H substrate 10, a basket gemstone, a ceramic, a glass, a metal oxide, and a polymer material. The method of the electrical line preform U includes the printer spraying 2 water onto the substrate 10 to form a conductive-polyimine film. The image is printed on the yttrium imide film by an ink jet printer 5 in a shell. Due to the relatively low content of carbon nanotubes in the ink. _, therefore, will not block the printer spray the conductive line preform 12 can form a box κ 1 „ warfare required pattern. The conductive line pre-coat 12 is made to include a plurality of evenly distributed nanocarbon In the third step, the conductive line preform 12 is subjected to a chemical shovel to perform the chemical gorge 3 on the conductive line preform 12: (1) drying the conductive line preform 12. The conductive line prefabricated body 12 is not limited by the drying of the square, and can be dried by oven drying, such as light drying, etc. By drying, the conductive line preform η can be more firmly combined. In this embodiment The conductive layer preform 10 is placed in a supply box and held at 120 to 150 ° C for 10 to 60 seconds. (2) The conductive line preform 12 is activated. The method of activating the preform 12 includes immersing the substrate 1G on which the conductive wiring preform 12 is formed, or immersing a precious metal salt solution on the surface of the conductive wiring preform 12 to infiltrate. The precious gold of the precious gold touch solution towel is difficult to include silver, money _ gold One or more kinds of salt compounds, such as one or more of silver nitrate, platinum nitrate, palladium nitrate, etc. The precious metal fresh liquid towel 'the noble metal rotor form is uniformly dispersed in the solution ^ Then, the conductive line preform 12 is removed from the precious metal salt The solution is taken in a step. In this step, 11 1375496, since the carbon nanotubes 14 in the conductive line preform 12 have a large specific surface area,

故,可吸附大量的責金屬離子16。該吸附於導電線路預製體U 中的奈米碳管14表面的貴金麟子16形成化學雜化中心,以 便化學鍍。可選擇地,所述將該導電線路預製體12從貴金屬鹽溶 液中取出之後進-步包括—用去離子水反復沖洗除去殘留的貴金 屬鹽溶液的步驟。 本實施例中,將形成有導電線路預製體12的基底10置於硝 S夂銀洛液t,簡1Q〜細秒。所述雜銀驗的濃度大於等於 10—4m〇l/L。 由於本實施例採用的墨水巾奈米碳管的f量百分比小於等於 5%,且奈米碳”魏水性功賴,故,奈米碳管於墨水中分散 均勻。故,導電線路預製體12中的奈米碳管14的分散也均勻。 由於不米碳管14具有較大的比表面積,可吸附大量的貴金 屬離子以形成化學娜化中心,從而大大提高貴金屬離子16 的利用率’提魏學綱效率。故,化學郷朗導電線路如均 勻性更好。 (三)將所述導電線路預製體12置於一化學鍍液中進行化學 ^[處理。 將形成有導電線路預製體I2的基底放人化學鍍液中進行化學 鍍化學錢可錢錦、錢銅或鍍銀等。所述化學錢液成分不限,可 2化學鍍條或化學_液等。本實施财,採肢學錄銅液, 其主要成分為讀銅,5〜15g/L;帽,i㈣mL/L;乙二胺四乙 12 酸(EDTA),40〜60g/L ;酒石酸鉀鈉,15〜3〇g/L。 本實施例中,於貌下將所述導電線路預製體口置於化學 軸液令2分鐘後取出。由於奈米碳管Μ表面均勻吸附貴金屬離 ^ 16以形成化學難化t心,故,通過化學鑛可製備厚度均勾的 ^電線路20。化學_開始的時候,導電線路預製體η _的太米 ^官14、貴金屬離子16及析出的銅形成—複合導電線路2〇, :化學㈣時間延長,整辦電線路麵體12被銅覆蓋形成一銅 導電線路20。 “進一步地’為增加金屬層的均勻性,得到厚度更加均勾的導 20 學!^後進行電錢。本實施例中,將形成有 導電線路2〇的基底1G放人電錢射作為陰極魏銅。電鑛時, 電流讀為2〜1GA/dm2 ’電鍍時間為5〜iq分鐘,鐘層厚度為 10〜ΙΟΟμιη。 本實施例製備導電線路2〇的方法具有以下優點:第一,由於 ^水中奈米碳管的質量百分比小於等於5%,且奈米碳管帶有親水 性功能團’故,奈米碳管於 、墨^刀政均勻。故,導電線路預製 ,^心的分散也均句。第二,由於奈米碳管具有較大的 二表面積’可大量吸附貴金屬離子以形成催化中心、,從而提高貴 於屬離子的利用率,提高化學錢的效率。而且,由於貴金屬離子 j吸附赠路預製體中的奈米碳管表面形成催化中心,故,貴 、’離子分散均句,通過化學鍍可製備厚度均勻的導電線路。第 二’採用該方__線路,通過化學麟線路金屬化,對墨 13 1375496 /水料電性要求低,故方法簡單,成本低廉。 綜上所述’本發明確已符合發明專利之要件遂依法提出專 利申請。惟’社所述者僅為本發日把難實關,自不能以此 -限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明 '之精神所作之等效鑛或變化,皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 圖1為本㈣實關巾製備導電線路的方法的流程圖。 .圖2為本發明實施例中製備導電線路的工藝流程圖。 胃圖3為本發明實施例中功能化處理後的奈米碳管的結構示音 【主要元件符號說明】 基底 10 導電線路預製體 12 奈米碳管 14 g 貴金屬粒子 16 導電線路Therefore, a large amount of metal ions 16 can be adsorbed. The gold lining 16 adsorbed on the surface of the carbon nanotube 14 in the conductive line preform U forms a chemical hybrid center for electroless plating. Alternatively, the step of removing the conductive line preform 12 from the precious metal salt solution further comprises the step of repeatedly rinsing the residual precious metal salt solution with deionized water. In the present embodiment, the substrate 10 on which the conductive wiring preform 12 is formed is placed in a niobium sulphide liquid t, which is a simple 1Q to fine second. The concentration of the miscellaneous silver is greater than or equal to 10-4 m〇l/L. Since the percentage of the amount of f of the ink towel carbon nanotube used in the embodiment is less than or equal to 5%, and the nano-carbon "wei water" is used, the carbon nanotubes are uniformly dispersed in the ink. Therefore, the conductive line preform 12 The dispersion of the carbon nanotubes 14 is also uniform. Since the carbon nanotubes 14 have a large specific surface area, a large amount of precious metal ions can be adsorbed to form a chemical nano-center, thereby greatly increasing the utilization rate of the noble metal ions 16 Efficiency. Therefore, the chemically-conductive conductive line has better uniformity. (3) The conductive line preform 12 is placed in an electroless plating solution for chemical treatment. The substrate on which the conductive line preform I2 is formed is placed. Electroless plating chemistry in human electroless plating bath can be Qianjin, Qiantong or silver plating, etc. The chemical liquid liquid component is not limited, and can be 2 chemical plating strips or chemical liquid, etc. The main component of the solution is copper reading, 5~15g/L; cap, i(four)mL/L; ethylenediaminetetraethyl 12 acid (EDTA), 40~60g/L; sodium potassium tartrate, 15~3〇g/L. In this embodiment, the conductive circuit preform body port is placed under the appearance of the chemical shaft liquid order 2 After the minute, it is taken out. Since the surface of the carbon nanotubes is uniformly adsorbed by the noble metal to form a chemically hardened t-heart, the electroless ore can be used to prepare the electric circuit 20 with a thickness of the hook. When the chemical starts, the conductive line is prefabricated. The body η _ is too ^ ^ 14, the noble metal ion 16 and the precipitated copper formed - the composite conductive line 2 〇, : chemical (four) time extension, the whole wire pavement body 12 is covered with copper to form a copper conductive line 20. 'In order to increase the uniformity of the metal layer, the guideline with a more uniform thickness is obtained! ^ After the money. In the present embodiment, the substrate 1G on which the conductive line 2 is formed is placed as a cathode. In the case of electro-mine, the current is read as 2~1GA/dm2' plating time is 5~iq minutes, and the thickness of the clock layer is 10~ΙΟΟμιη. The method for preparing the conductive line 2〇 in the embodiment has the following advantages: first, since the mass percentage of the carbon nanotube in the water is less than or equal to 5%, and the carbon nanotube has a hydrophilic functional group, the carbon nanotube Yu, ink ^ knife uniform. Therefore, the conductive circuit is prefabricated, and the dispersion of the heart is also uniform. Second, since the carbon nanotubes have a large two-surface area, a large amount of noble metal ions can be adsorbed to form a catalytic center, thereby increasing the utilization of noble ions and increasing the efficiency of chemical money. Moreover, since the precious metal ions j adsorb the surface of the carbon nanotubes in the pre-formed body to form a catalytic center, the noble and the ions are dispersed, and a conductive line having a uniform thickness can be prepared by electroless plating. The second 'using the __ line, through the metallization of the chemical lining line, has low requirements on the electrical properties of the ink 13 1375496 / water, so the method is simple and the cost is low. In summary, the present invention has indeed met the requirements of the invention patent and filed a patent application in accordance with the law. However, the person mentioned by the company is only difficult to implement on the date of this issue, and it cannot be used to limit the scope of patent application in this case. Equivalent minerals or changes made by those who are familiar with the skill of the present invention in accordance with the spirit of the present invention shall be covered by the following patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method for preparing a conductive line by (4) a solid sealing towel. 2 is a process flow diagram of preparing a conductive line in an embodiment of the present invention. Figure 3 shows the structure of the carbon nanotubes after functionalization in the embodiment of the present invention. [Main component symbol description] Base 10 Conductive line preform 12 Carbon nanotubes 14 g Precious metal particles 16 Conductive lines

Claims (1)

1375496 , 七、申請專利範圍: 種製備導電線路的方法,其包括以下步帮: 提供一含奈米碳管的墨水; • 採用該墨水於-基底上形成導電線路預製體;及 ^ 對所述導電線路預製體進行化學鍍。 2.如申請專利範圍第w所述的製備導電線路的方法| 述製備墨水的方法主要包括以下步驟: / ,其令,所 φ 提供奈米碳管原料; 功能化處理上述奈米碳管原料; 製備奈米碳管的水溶性分散液;以及 並攪拌均勻得 加入適1的黏度調節劑、表面活性劑、連接料, 到墨水。 所 3.如申請專利細第2項所述的製備導電線路的方法,直中 理μ好料的步猶進_步紐—提純紗 米石反官原料的步驟。 4.如申請專利範圍第3項所述的製備導電線路的方法,其中,所 述提純奈輕管原料的方法包括以下步驟·· 將該奈米碳管原料於空氣流^㉘處理; 將加熱處理後的奈米碳管原料於濃酸中浸泡處理;及 將濃酸浸泡處理後的奈米碳管原料反復洗務過遽。 5·如申請專利細第2項所述的製備導電線路的方法,其中,所 述功能化處理奈米碳管原料的方法包括以下步驟: 15 1375496 將奈米碳管於強酸中酸化處理;及 清洗過濾得到帶有功能團的奈米碳管。 6. 如申請專利範圍第5項所述的製備導電線路的方法I 述功能團包括絲、經基、搭基及氨基令的一種或多3 ’所 7. 如申請專利範圍第2項所述的製備導電線路的方法, 述黏度調節劑的質量百分比為0.1〜3〇%。 ,、’所 &如申請專利範圍第2項所述的製備導電線路的方法, 述表面活性劑的質量百分比為0.1〜5%。 /、,所 9. 如申請專利範圍第2項所述的製備導電線路的方法, 述連接料的質量百分比為0.1〜30%。 所 10. 如申請專利範圍第2項所述的製備導電線路的方法, 述奈米碳管的質量百分比為00001〜5%。 、 11. 如申請專利範圍第10項所述的製備導電線路的方法, 所述奈米碳管的質量百分比為1〜3%。 、 以如申請專利範圍第2項所述的製備導電線路的方法,其中,所 述奈米碳管的纽小於5〇奈米,長度祕2微米。 13. 如申睛專利範圍第2項所述的製備導電線路的方法,其中,進 -步包括-向該墨水中加人保濕劑的步驟。 14. 如申請專利範圍第13項所述的製備導電線_方法,其中, 所述保濕劑質量百分比為01〜4〇%。 15. 如申睛專利範圍第!項所述的製備導電線路的方法,其令,所 述基底材料包括石夕、氧化石夕、石英、藍寶石、陶竟、玻璃、金 16 /^496 屬氡化物及高分子中的一槿或多楂。 16.如申請專利範圍第1項所述的製備導電線路的方法复 述於-基底上形料f線路前_方法包騎錢^ ’所 17.如申請專利範園第i項所述的製備導電線路的方法其令卜 述對導電線路預製體進行化學鑛的方法包括以下步驟:所 供乾所述導電線路預製體; 活化所述導電線路預製體;及 將該導電線路預製體置於一化學鍍液中。 18•如申請專利範圍第17項所述的製備導電線路的方法,㈠ 戶斤述活化導電線路預製體的方法為採用貴金屬鹽溶液浸財 導電線路預製體。 x 19.如申請專概群18項所述的製備導電線路的方法,其中, 戶斤述貴金屬鹽溶液令的貴金屬鹽包括銀、翻及把的金屬鹽化合 物中的一種或多種。 如申明專利祀圍第1項所述的製備導電線路的方法,其中,所 述對導電線路預製體進行化學鍍之後進一步包括一電鐘的步1375496, VII. Patent application scope: A method for preparing a conductive circuit, comprising the following steps: providing an ink containing a carbon nanotube; and forming a conductive line preform on the substrate by using the ink; The conductive line preform is electrolessly plated. 2. The method for preparing a conductive line as described in the patent application scope w | The method for preparing an ink mainly comprises the following steps: /, wherein, φ provides a carbon nanotube raw material; functionalizing the above-mentioned carbon nanotube raw material Prepare a water-soluble dispersion of the carbon nanotubes; and stir evenly to add a suitable viscosity modifier, surfactant, binder, to the ink. 3. As described in the patent preparation fine item 2, the method of preparing the conductive line, the step of straightening the middle of the material, the step of stepping into the raw material. 4. The method for producing a conductive line according to claim 3, wherein the method for purifying the raw material of the n-ray tube comprises the following steps: treating the carbon nanotube raw material in an air stream 28; heating The treated carbon nanotube raw material is immersed in concentrated acid; and the carbon nanotube raw material after the concentrated acid immersion treatment is repeatedly washed and dried. The method for preparing a conductive line according to the second aspect of the invention, wherein the method for functionalizing the carbon nanotube raw material comprises the following steps: 15 1375496 acidifying the carbon nanotube in a strong acid; The filter is cleaned to obtain a carbon nanotube with a functional group. 6. The method of claim 1, wherein the functional group comprises a filament, a warp group, a chelating group, and an amino group, as described in claim 5, wherein the functional group comprises one or more of 3'. The method for preparing a conductive line, wherein the mass percentage of the viscosity modifier is 0.1 to 3 %. The method for preparing a conductive line as described in claim 2, wherein the mass percentage of the surfactant is 0.1 to 5%. 9. The method of preparing a conductive line according to the second aspect of the patent application, wherein the mass percentage of the binder is 0.1 to 30%. 10. The method for preparing a conductive line according to claim 2, wherein the mass percentage of the carbon nanotubes is from 0000 to 5%. 11. The method for preparing a conductive line according to claim 10, wherein the carbon nanotube has a mass percentage of 1 to 3%. The method for preparing a conductive line according to claim 2, wherein the carbon nanotube has a neon of less than 5 nanometers and a length of 2 micrometers. 13. The method of preparing a conductive trace according to claim 2, wherein the step further comprises the step of adding a humectant to the ink. 14. The method of preparing a conductive wire according to claim 13, wherein the humectant has a mass percentage of from 01 to 4% by weight. 15. If the scope of the patent application is the first! The method for preparing a conductive line, wherein the base material comprises a stone or a sapphire, a quartz, a sapphire, a ceramic, a glass, a gold, and a polymer Thank you. 16. The method for preparing a conductive line according to claim 1 of the patent application is repeated on the substrate before the f-line is formed. _ Method package riding money ^ '. 17. Preparation of conductive material as described in claim i. The method of routing a method for chemically depositing a conductive line preform includes the steps of: drying the conductive line preform; activating the conductive line preform; and placing the conductive line preform in a chemical In the plating solution. 18• The method for preparing a conductive line as described in claim 17 of the patent application, (1) The method for activating the conductive line preform is to use a precious metal salt solution to immerse the conductive line preform. x 19. The method of preparing a conductive circuit according to the application of claim 18, wherein the noble metal salt of the noble metal salt solution comprises one or more of a silver, a metal salt compound. The method for preparing a conductive line according to claim 1, wherein the step of electroless plating the conductive line preform further comprises an electric clock step
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