TWI370011B - Method and apparatus for treating gas containing fluorine-containing compounds - Google Patents

Method and apparatus for treating gas containing fluorine-containing compounds

Info

Publication number
TWI370011B
TWI370011B TW094108306A TW94108306A TWI370011B TW I370011 B TWI370011 B TW I370011B TW 094108306 A TW094108306 A TW 094108306A TW 94108306 A TW94108306 A TW 94108306A TW I370011 B TWI370011 B TW I370011B
Authority
TW
Taiwan
Prior art keywords
treating gas
gas containing
containing compounds
fluorine
containing fluorine
Prior art date
Application number
TW094108306A
Other languages
English (en)
Other versions
TW200533412A (en
Inventor
Yoichi Mori
Tadakazu Nishikawa
Masaaki Osato
Saburou Nagano
Yoshihiro Tanabe
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of TW200533412A publication Critical patent/TW200533412A/zh
Application granted granted Critical
Publication of TWI370011B publication Critical patent/TWI370011B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/62—Carbon oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/685—Halogens or halogen compounds by treating the gases with solids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/40—Alkaline earth metal or magnesium compounds
    • B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
TW094108306A 2004-03-19 2005-03-18 Method and apparatus for treating gas containing fluorine-containing compounds TWI370011B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004080249A JP5048208B2 (ja) 2004-03-19 2004-03-19 フッ素含有化合物を含むガスの処理方法及び装置

Publications (2)

Publication Number Publication Date
TW200533412A TW200533412A (en) 2005-10-16
TWI370011B true TWI370011B (en) 2012-08-11

Family

ID=34993485

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094108306A TWI370011B (en) 2004-03-19 2005-03-18 Method and apparatus for treating gas containing fluorine-containing compounds

Country Status (6)

Country Link
US (1) US7955578B2 (zh)
EP (1) EP1732669B1 (zh)
JP (1) JP5048208B2 (zh)
KR (1) KR101126655B1 (zh)
TW (1) TWI370011B (zh)
WO (1) WO2005089909A1 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0611968D0 (en) * 2006-06-16 2006-07-26 Boc Group Plc Method and apparatus for the removal of fluorine from a gas system
JP4523936B2 (ja) * 2006-12-28 2010-08-11 東洋電化工業株式会社 合成蛍石の製造方法及び合成蛍石の製造装置
TWI454305B (zh) * 2007-07-10 2014-10-01 Ebara Corp 氟固定劑與ｐｆｃ分解處理劑及其調製方法、ｐｆｃ處理裝置與含ｐｆｃ之氣體的處理方法
WO2009008454A1 (ja) * 2007-07-10 2009-01-15 Ebara Corporation フッ素固定剤及びｐｆｃ分解処理剤並びにこれらの調製方法
JP5020136B2 (ja) * 2007-07-10 2012-09-05 株式会社荏原製作所 フッ素固定剤及びｐｆｃ分解処理剤並びにこれらの調製方法
JP5066021B2 (ja) * 2007-07-10 2012-11-07 株式会社荏原製作所 Ｐｆｃ処理装置及びｐｆｃ含有ガスの処理方法
JP5031783B2 (ja) * 2008-02-26 2012-09-26 京セラ株式会社 分解処理剤
JP5284873B2 (ja) * 2008-10-29 2013-09-11 株式会社荏原製作所 ガス処理装置および半導体製造装置
JP5297208B2 (ja) * 2009-01-08 2013-09-25 株式会社荏原製作所 フッ素含有化合物処理剤及び排ガスの処理方法
JP5016616B2 (ja) * 2009-01-08 2012-09-05 株式会社荏原製作所 フッ素化合物を含有する排ガスの処理方法及び処理用反応槽
JP5350809B2 (ja) * 2009-01-09 2013-11-27 株式会社荏原製作所 予備処理槽を備えた排ガス処理装置
JP5016618B2 (ja) * 2009-01-15 2012-09-05 株式会社荏原製作所 Ｓｆ６を含む排ガスの処理方法
CN101804298B (zh) * 2010-04-10 2013-03-27 太原理工大学 一种氯气捕消剂的制备方法
JP5709606B2 (ja) * 2011-03-30 2015-04-30 京セラ株式会社 分解処理剤
JP6732694B2 (ja) 2017-06-16 2020-07-29 クラリアント触媒株式会社 フッ素含有ガスの分解除去剤、その製造方法と、それを使用したフッ素含有ガス除去方法、及びフッ素資源を回収する方法

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US3845191A (en) * 1972-06-02 1974-10-29 Du Pont Method of removing halocarbons from gases
FR2279443A1 (fr) * 1974-07-25 1976-02-20 Asahi Fiber Cy Ltd Procede de purification de gaz residuaire contenant un compose du fluor
JP2751874B2 (ja) * 1995-04-24 1998-05-18 日本電気株式会社 フッ素含有廃水の処理方法
JPH0924243A (ja) * 1996-07-05 1997-01-28 Dowa Mining Co Ltd フロン分解剤
US6482367B1 (en) * 1998-06-18 2002-11-19 Kanken Techno Co., Ltd. Method and apparatus for removing harmful components in an exhaust gas
JP4357018B2 (ja) 1998-11-25 2009-11-04 関東電化工業株式会社 ハロゲン化ガスの処理剤を用いた無害化方法
JP4488545B2 (ja) * 1999-03-12 2010-06-23 昭和電工株式会社 フッ化ハロゲンを含む排ガスの処理方法、処理剤及び処理装置
US6309618B1 (en) * 1999-03-12 2001-10-30 Showa Denko K. K. Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus
JP3789277B2 (ja) * 1999-04-28 2006-06-21 昭和電工株式会社 フッ素化合物の分解用反応剤、分解方法及びその用途
JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP2002224565A (ja) 2000-12-01 2002-08-13 Japan Pionics Co Ltd フルオロカーボンの分解処理剤及び分解処理方法
GB0101769D0 (en) * 2001-01-24 2001-03-07 Ineos Fluor Ltd Decomposition of fluorine compounds
JP2002370013A (ja) 2001-06-15 2002-12-24 Japan Pionics Co Ltd フッ化硫黄の分解処理剤及び分解処理方法
JP2003071244A (ja) 2001-09-06 2003-03-11 Japan Pionics Co Ltd フルオロカーボンの分解処理剤及び分解処理方法
EP1297884A3 (en) * 2001-09-28 2003-04-16 Japan Pionics Co., Ltd. Treating agent and method for decomposition of fluorocarbons
JP4156312B2 (ja) * 2001-09-28 2008-09-24 日本パイオニクス株式会社 フルオロカーボンの分解処理剤及び分解処理方法
JP2003311122A (ja) * 2002-04-24 2003-11-05 Esumakku:Kk 複合型煙道吹込み薬剤とその使用方法
JP4255114B2 (ja) * 2003-05-07 2009-04-15 電気化学工業株式会社 フロンガスの分解処理方法

Also Published As

Publication number Publication date
KR20070011311A (ko) 2007-01-24
JP5048208B2 (ja) 2012-10-17
WO2005089909A1 (en) 2005-09-29
EP1732669A4 (en) 2008-02-06
US7955578B2 (en) 2011-06-07
JP2005262128A (ja) 2005-09-29
TW200533412A (en) 2005-10-16
EP1732669A1 (en) 2006-12-20
EP1732669B1 (en) 2012-10-10
KR101126655B1 (ko) 2012-03-29
US20070264188A1 (en) 2007-11-15

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