TWI370011B - Method and apparatus for treating gas containing fluorine-containing compounds - Google Patents
Method and apparatus for treating gas containing fluorine-containing compoundsInfo
- Publication number
- TWI370011B TWI370011B TW094108306A TW94108306A TWI370011B TW I370011 B TWI370011 B TW I370011B TW 094108306 A TW094108306 A TW 094108306A TW 94108306 A TW94108306 A TW 94108306A TW I370011 B TWI370011 B TW I370011B
- Authority
- TW
- Taiwan
- Prior art keywords
- treating gas
- gas containing
- containing compounds
- fluorine
- containing fluorine
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/62—Carbon oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/685—Halogens or halogen compounds by treating the gases with solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/70—Organic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/40—Alkaline earth metal or magnesium compounds
- B01D2251/404—Alkaline earth metal or magnesium compounds of calcium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2047—Hydrofluoric acid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004080249A JP5048208B2 (ja) | 2004-03-19 | 2004-03-19 | フッ素含有化合物を含むガスの処理方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200533412A TW200533412A (en) | 2005-10-16 |
TWI370011B true TWI370011B (en) | 2012-08-11 |
Family
ID=34993485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094108306A TWI370011B (en) | 2004-03-19 | 2005-03-18 | Method and apparatus for treating gas containing fluorine-containing compounds |
Country Status (6)
Country | Link |
---|---|
US (1) | US7955578B2 (zh) |
EP (1) | EP1732669B1 (zh) |
JP (1) | JP5048208B2 (zh) |
KR (1) | KR101126655B1 (zh) |
TW (1) | TWI370011B (zh) |
WO (1) | WO2005089909A1 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0611968D0 (en) * | 2006-06-16 | 2006-07-26 | Boc Group Plc | Method and apparatus for the removal of fluorine from a gas system |
JP4523936B2 (ja) * | 2006-12-28 | 2010-08-11 | 東洋電化工業株式会社 | 合成蛍石の製造方法及び合成蛍石の製造装置 |
TWI454305B (zh) * | 2007-07-10 | 2014-10-01 | Ebara Corp | 氟固定劑與pfc分解處理劑及其調製方法、pfc處理裝置與含pfc之氣體的處理方法 |
WO2009008454A1 (ja) * | 2007-07-10 | 2009-01-15 | Ebara Corporation | フッ素固定剤及びpfc分解処理剤並びにこれらの調製方法 |
JP5020136B2 (ja) * | 2007-07-10 | 2012-09-05 | 株式会社荏原製作所 | フッ素固定剤及びpfc分解処理剤並びにこれらの調製方法 |
JP5066021B2 (ja) * | 2007-07-10 | 2012-11-07 | 株式会社荏原製作所 | Pfc処理装置及びpfc含有ガスの処理方法 |
JP5031783B2 (ja) * | 2008-02-26 | 2012-09-26 | 京セラ株式会社 | 分解処理剤 |
JP5284873B2 (ja) * | 2008-10-29 | 2013-09-11 | 株式会社荏原製作所 | ガス処理装置および半導体製造装置 |
JP5297208B2 (ja) * | 2009-01-08 | 2013-09-25 | 株式会社荏原製作所 | フッ素含有化合物処理剤及び排ガスの処理方法 |
JP5016616B2 (ja) * | 2009-01-08 | 2012-09-05 | 株式会社荏原製作所 | フッ素化合物を含有する排ガスの処理方法及び処理用反応槽 |
JP5350809B2 (ja) * | 2009-01-09 | 2013-11-27 | 株式会社荏原製作所 | 予備処理槽を備えた排ガス処理装置 |
JP5016618B2 (ja) * | 2009-01-15 | 2012-09-05 | 株式会社荏原製作所 | Sf6を含む排ガスの処理方法 |
CN101804298B (zh) * | 2010-04-10 | 2013-03-27 | 太原理工大学 | 一种氯气捕消剂的制备方法 |
JP5709606B2 (ja) * | 2011-03-30 | 2015-04-30 | 京セラ株式会社 | 分解処理剤 |
JP6732694B2 (ja) | 2017-06-16 | 2020-07-29 | クラリアント触媒株式会社 | フッ素含有ガスの分解除去剤、その製造方法と、それを使用したフッ素含有ガス除去方法、及びフッ素資源を回収する方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3845191A (en) * | 1972-06-02 | 1974-10-29 | Du Pont | Method of removing halocarbons from gases |
FR2279443A1 (fr) * | 1974-07-25 | 1976-02-20 | Asahi Fiber Cy Ltd | Procede de purification de gaz residuaire contenant un compose du fluor |
JP2751874B2 (ja) * | 1995-04-24 | 1998-05-18 | 日本電気株式会社 | フッ素含有廃水の処理方法 |
JPH0924243A (ja) * | 1996-07-05 | 1997-01-28 | Dowa Mining Co Ltd | フロン分解剤 |
US6482367B1 (en) * | 1998-06-18 | 2002-11-19 | Kanken Techno Co., Ltd. | Method and apparatus for removing harmful components in an exhaust gas |
JP4357018B2 (ja) | 1998-11-25 | 2009-11-04 | 関東電化工業株式会社 | ハロゲン化ガスの処理剤を用いた無害化方法 |
JP4488545B2 (ja) * | 1999-03-12 | 2010-06-23 | 昭和電工株式会社 | フッ化ハロゲンを含む排ガスの処理方法、処理剤及び処理装置 |
US6309618B1 (en) * | 1999-03-12 | 2001-10-30 | Showa Denko K. K. | Method for treating exhaust gas containing fluorine-containing interhalogen compound, and treating agent and treating apparatus |
JP3789277B2 (ja) * | 1999-04-28 | 2006-06-21 | 昭和電工株式会社 | フッ素化合物の分解用反応剤、分解方法及びその用途 |
JP3976459B2 (ja) * | 1999-11-18 | 2007-09-19 | 株式会社荏原製作所 | フッ素含有化合物を含む排ガスの処理方法及び装置 |
JP2002224565A (ja) | 2000-12-01 | 2002-08-13 | Japan Pionics Co Ltd | フルオロカーボンの分解処理剤及び分解処理方法 |
GB0101769D0 (en) * | 2001-01-24 | 2001-03-07 | Ineos Fluor Ltd | Decomposition of fluorine compounds |
JP2002370013A (ja) | 2001-06-15 | 2002-12-24 | Japan Pionics Co Ltd | フッ化硫黄の分解処理剤及び分解処理方法 |
JP2003071244A (ja) | 2001-09-06 | 2003-03-11 | Japan Pionics Co Ltd | フルオロカーボンの分解処理剤及び分解処理方法 |
EP1297884A3 (en) * | 2001-09-28 | 2003-04-16 | Japan Pionics Co., Ltd. | Treating agent and method for decomposition of fluorocarbons |
JP4156312B2 (ja) * | 2001-09-28 | 2008-09-24 | 日本パイオニクス株式会社 | フルオロカーボンの分解処理剤及び分解処理方法 |
JP2003311122A (ja) * | 2002-04-24 | 2003-11-05 | Esumakku:Kk | 複合型煙道吹込み薬剤とその使用方法 |
JP4255114B2 (ja) * | 2003-05-07 | 2009-04-15 | 電気化学工業株式会社 | フロンガスの分解処理方法 |
-
2004
- 2004-03-19 JP JP2004080249A patent/JP5048208B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-18 KR KR1020067018890A patent/KR101126655B1/ko active IP Right Grant
- 2005-03-18 US US10/593,312 patent/US7955578B2/en active Active
- 2005-03-18 EP EP05721554A patent/EP1732669B1/en active Active
- 2005-03-18 TW TW094108306A patent/TWI370011B/zh active
- 2005-03-18 WO PCT/JP2005/005627 patent/WO2005089909A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
KR20070011311A (ko) | 2007-01-24 |
JP5048208B2 (ja) | 2012-10-17 |
WO2005089909A1 (en) | 2005-09-29 |
EP1732669A4 (en) | 2008-02-06 |
US7955578B2 (en) | 2011-06-07 |
JP2005262128A (ja) | 2005-09-29 |
TW200533412A (en) | 2005-10-16 |
EP1732669A1 (en) | 2006-12-20 |
EP1732669B1 (en) | 2012-10-10 |
KR101126655B1 (ko) | 2012-03-29 |
US20070264188A1 (en) | 2007-11-15 |
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