TWI336397B - Glass substrate inspection apparatus and method - Google Patents

Glass substrate inspection apparatus and method Download PDF

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TWI336397B
TWI336397B TW092137459A TW92137459A TWI336397B TW I336397 B TWI336397 B TW I336397B TW 092137459 A TW092137459 A TW 092137459A TW 92137459 A TW92137459 A TW 92137459A TW I336397 B TWI336397 B TW I336397B
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Taiwan
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glass substrate
substrate
lead screw
video element
inspection
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TW092137459A
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Chinese (zh)
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TW200519372A (en
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Chang Ha Lee
Taek Cheon Kim
Suk Joon Kim
Jong Yeol Lee
Kyung Chae Bae
Ki Nam Kim
Ji Hwa Jung
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Samsung Corning Prec Mat Co
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67288Monitoring of warpage, curvature, damage, defects or the like

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)

Description

1336397 玖、發明說明: C發明所屬之技術領域3 發明領域 本發明涉及一種玻璃基板的檢查裝置及檢查方法,具 5 體而言,涉及在成形步驟中迅速且正確地實施玻璃基板檢 查的玻璃基板的檢查裝置及檢查方法。 發明背景 通常,TFT-LCD(薄膜電晶體液晶顯示器)、PDP(等離 10 子體顯示面板)、EL(Electro luminescence)等平板顯示器的 製造領域中使用的玻璃基板,是在成形步驟中將在玻璃熔 化爐熔化的玻璃液提供給熔化成形機來製造,用切割機 (cutting apparatus)按初級標準切斷,由傳送系統搬運到加工 線上。 15 成形步驟中的玻璃基板的檢查,通過事先截斷不合格 品進入後步驟,可有效降低成本、提高合格率。 在成形步驟中,在檢查由傳送系統移送的玻璃基板 時,將玻璃基板從傳送系統取出後載入到其他檢查裝置上 的情況下,不僅檢查需要很長時間,而且搬運花費工夫, 20 並且由於物理接觸,可能在玻璃基板中産生缺陷。 因此’在成形步驟中,爲了檢查玻璃基板,必需充分 考慮如下幾點。 第一、必需通過將玻璃基板容易載入到檢查區並使其 固定,來減少將玻璃基板固定在檢查區時的工夫,並在一 5 定時間内使-連串檢查步驟結束,縮短檢查所需的時間, 必需在檢查時使與玻板的物理接觸最小化並最大限 度抑制玻璃基板的缺陷産生。 第二、必需將移送的玻璃基板的振動抑制到焦深内, 以進行正確的檢查。 必需開發出考慮到上述各點等的成形步驟中的玻填基 板檢查裝置’由此,必需使進人成形步驟後實施的步驟中 的玻璃基板的不合格率最小化,降低成本,並提高生產率。 c發明内容3 發明概要 本發明鑒於上述問題做出,其目的在於提供一種破璃 基板的檢查裝置及檢查方法,不僅在成形步驟中容易實施 玻璃基板的檢查,並且縮短檢查所需的時間,使檢查時物 理接觸玻璃基板造成的缺陷的産生最小化,並且,使被移 送的玻璃基板的振動在限定的焦深内最小化,從而進行正 確的檢查。 爲了實現上述目的,本發明是一種檢查玻璃基板的裝 置,其特徵在於,包括:基板固定機構,設置在檢查區, 夾緊所述玻璃基板的端部並使之固定;視頻元件,對用所 述基板固定機構固定的所述玻璃基板,用照明裝置照射 光’並用多個攝影機進行掃描;視頻元件移動機構,將所 述視頻元件從所述玻璃基板的一側移動到另一側;缺陷資 料處理部,根據從所述視頻元件的攝影機傳送的影像,對 所述玻璃基板的缺陷進行資料化處理;顯示部,顯示由所 述缺陷資料處理部處理後的資料。. 另外,本發明是一種檢查玻璃基板的檢查方法,其特 徵在於’包括如下步驟:在使所述玻璃基板位於檢查區中 後,夹緊所述玻璃基板的端部並使之固定;使照明和多個 攝影機從固定在所述檢查區中的所述玻璃基板的一側向另 一側移動’並對所述玻璃基板進行掃描;根據掃描所述玻 璃基板取得的影像,對所述玻璃基板的缺陷進行資料化處 理;將關於所述玻璃基板缺陷的資料顯示到外部。 根據本發明的玻璃基板的檢查裝置及檢查方法不僅容 易在成形步驟中實施玻璃基板的檢查,而且使檢查所需的 時間縮短’時檢查時物理接觸玻璃基板造成的缺陷的産生 取小化’並且在限定的焦深内使被移送的玻璃基板的振動. 最小化,進行正確的檢查。 圖式簡單說明 第1圖是根據本發明的玻璃基板的檢查裝置的正面圖。 圖是根據本發明的玻璃基板的檢查裝置的側面圖。 第3圖是根據本發明的玻璃基板的檢查裝置的平面圖。 第4圖是表示根據本發明的玻璃基板的檢查裝置的框 圖。 圖疋表不根據本發明的玻璃基板的檢查裝置中基 板固定機構的正面圖。 第6圖是表示根據本發明的玻璃基板的檢查裝置中基 板固疋機構的第1上部夾具的正面圖。 第7圖是表示根據本發明的玻璃基板的檢查裝置中基 1336397 板固定機構的第1上部夾具的側面圖。 第8圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第2上部夹具的正面圖。 第9圖是表示根據本發明的玻璃基板的檢查裝置中基 5 板固定機構的第2上部夾具的底面圖。 第10圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第1下部夾具的正面圖。 第11圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第1下部夾具的側面圖。 10 第12圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第2下部夾具的正面圖。 第13圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第2下部夾具的平面圖。 第14圖是表示根據本發明的玻璃基板的檢查裝置中基 15 板固定機構的側部夾具的正面圖。 第15圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的側部夾具的側面圖。 第16圖是表示根據本發明的玻璃基板的檢查裝置中視 頻元件的斜視圖。 20 第17圖是表示根據本發明的玻璃基板的檢查方法的流 程圖。 I:實施方式3 較佳實施例之詳細說明 下面,參照附圖來說明本發明的較佳實施形態。 8 第1圖是根據本發明的玻璃基板的檢查裝置的正面 圖,第2圖是根據本發明的玻璃基板的檢查裝置的側面圖, 第3圖是根據本發明的玻璃基板的檢查裝置的平面圖,第4 圖是表示根據本發明的玻璃基板的檢查裝置的框圖。 如圖所示,根據本發明的玻璃基板的檢查裝置,在玻 璃基板1的成形步驟中’將上端被沿移送軌道(未圖示)移動 的移送夾子(未圖示)夾緊並被移送的玻璃基板1,固定在檢 查區中進行檢查,該玻璃基板的檢查裝置包括:失緊玻璃 基板1的端部並使之固定的基板固定機構1〇〇、掃描玻璃基 板1的視頻元件200、使視頻元件200從玻璃基板1的一侧移 動到另一侧的視頻元件移動機構300、根據用視頻元件2〇〇 掃描的影像將玻璃基板1的缺陷處理成資料的缺陷資料處 理部4〇〇、和示由缺陷資料處理部400處理後的資料的顯示 部 500。 基板固定機構100與玻璃基板1的移送路徑靠近設置, 該玻璃基板1的上端被多個移送夾子(未圖示)夾緊並沿移送 軌道(未圖示)移動,當沿移送軌道(未圖示)移動的玻璃基板 Η亭止時,基板固定機構1〇〇夾緊從移送夾子(未圖示)取下的 玻璃基板1的端部後,將其固定在檢查區。 如第5圖所示,基板固定機構100包括:固定框140 ;上 部炎緊裝置110,設置在固定框14〇的上側,夾緊玻璃基板【 的上端部;下部夾緊裝置120,設置在固定框140的下側, 爽緊玻璃基板1的下端部,並向下拉玻璃基板1,以使玻璃 基板1向上下拉伸;以及,側部夾緊裝置130,分別設置在 固疋框140的兩側,夾緊玻璃基板1的兩端部,並向兩側拉 玻璃基板1,以使玻璃基板1向左右拉伸》 固定框140設置在成形步驟中用於檢查玻璃基板丨的位 置上’分別位於其上側與下側的上部及下部框14丨、142被 一對側部框143支撐。 上部夹緊裝置110分別設置在固定框14〇的上側、即上 部框141中,由夾緊玻璃基板1的上端部的第丨及第2上部夾 具111、112構成’第1上部夹具U1固定在固定框14〇的上部 框141中’第2上部夾具112沿固定框140的上部框141左右自 由移動地設置。 第6圖及第7圖所示的第1上部夾具,具有由固定框 140的上部框141設置的托架i41a,並設置有第【空壓氣缸 Ilia’爲了抓住或放開玻璃基板1的上端部,利用空壓使自 由疑轉地結合在第1空壓氣缸llla的端部 '即下端上的一對 夾子111c彼此關閉或打開。 第1空壓氣缸111a經一對埠111b選擇性地供給空壓,通 過使一對夾子111c旋轉並彼此關閉或打開,當夾子111(;被 關閉時’使其端部把持玻璃基板1的上端部。 第8圖及第9圖所示的第2上部夾具112設置有第2空壓 氣缸112b ’該第2空壓氣缸i12b沿設置在固定框14〇上側、 卩上。p框141中的引導執道112a滑動,爲了夹住或放開玻璃 基板1的上端部,第2空壓氣缸112b利用空壓使自由旋轉地 結合在端部的—對夾子112d彼此關閉或打開。 第2二壓氣缸112b自由滑動地設置在沿上部框141的縱 1336397 向並列設置在上部框141上的引導軌道112&上,通過向一對 埠ll2c選擇性地供給^壓’使-對失刊戰轉並彼此關 閉或打開,當夾子112d被關閉時,其端部把持玻璃基板1的 上端部。 5 由於第2空壓氣缸112b自由滑動地設置在引導轨道 112a上,在玻璃基板1被側部夾緊裝置13〇向左右拉伸的情 況下,第2上部夾具Π2向玻璃基板1被拉伸的方向移動,使 得玻璃基板1拉伸到整個區域中。 在固定框140的上側、即上部框141與第2空壓氣缸112匕 10中,設置螺旋彈簧等彈性部件112e,使得在第2上部夾具112 内,隨由於玻璃基板1向左右拉伸而移動的第2空壓氣缸 112b恢復到最初位置。 下部夾緊裝置120由分別設置在固定框14〇下側、即下 部框142中,夾緊玻璃基板1的下端部,並向下拉伸玻璃基 I5 板1,使玻璃基板1被上下拉伸的第1及第2下部夾具121、122 構成。第1下部夾具121固定在下部框142中,第2下部夹具 122沿下部框142左右自由移動地設置。 第10圖及第Π圖所示的第1下部失具121上,在固定框 140的下側、即在下部框142中,設置具有利用空壓上下往 20復移動的動作部件121b的第3空壓氣缸121a,在第3空壓氣 缸121a的移動部件121b的端部設置第4空壓氣缸121d;爲了 抓住或放開玻璃基板1的下端部,第4空壓氣缸i2id利用空 壓,使自由旋轉地結合在端部的一對夾子12if彼此關閉或 打開。 11 1336397 第3空壓氣缸i21a通過經一對埠12lc選擇性地供給空 壓,使移動部件12lb往復移動,來使第2空壓氣缸121(1上下 往復移動。 第4空愿氣缸i21d通過經一對璋121e選擇性地供給空 5壓,使一對爽子121f旋轉並彼此關閉或打開,當打開失子 121f時’使其端部把持玻璃基板丨的下端部。 第12圖及第13圖所示的第2下部夾具122設置第5空壓 氣缸122b ’該第5空壓氣缸122b沿設置在固定框140下側、 即下部框142中的引導軌道122a滑動;第5空壓氣缸122b具 10有利用空壓上下往復移動的移動部件122c ;在第5空壓氣缸 122b的移動部件122c的端部設置第6空壓氣缸122e,爲了抓 住或放開破璃基板1的下端部,第6空壓氣缸122e利用空 壓’使自由旋轉地結合在端部的一對夹子122g彼此關閉或 打開》 15 第5空壓氣缸122b自由滑動地設置在沿下部框142的縱 向並列設置在下部框142上的引導軌道122a上,通過經一對 埠來選擇性地供給空壓,使移動部件122c往復移動,從而 使結合在移動部件122c上的第6空歷氣缸122e上下往復移 動0 2〇 第6空壓氣缸I22e通過經一對埠I22f選擇性地供給空 壓,使一對夾子122g旋轉並彼此關閉或打開’當失子122g 被關閉時,其端部把持玻璃基板丨的下端部。 由於第5空壓氣缸122b自由滑動地設置在引導轨道 122a上’因此在玻璃基板1被側部夾緊裝置13〇向左右拉伸 12 1336397 的情況下,第2下部夾具122向玻璃基板1被拉伸的方向移 動,使得玻璃基板1拉伸到整個區域中。 在固定框140下侧、即下部框142與第5空壓氣缸122b 中,設置螺旋彈簧等彈性部件122h,使第2下部夹具122上 5 的隨玻璃基板1向左右拉伸而移動的第5空壓氣缸122b恢復 到最初位置。 側部夾緊裝置130由多個側部夾具131構成,該多個側 部夾具13 1分別設置在固定框140的兩側即每個側部框143 中’爽緊玻璃基板1的兩端部並向左右拉伸玻璃基板1,以 10 使玻璃基板1向左右拉伸。 第14圖及弟15圖不出的側部夹具131,在固定框14〇的 一側、即側部框143中,設置有具有利用空壓左右往復移動 的移動部件131b的第7空壓氣缸131a,在第7空壓氣缸i3ia 的移動部件13 lb的端部設置第8空壓氣缸I31d,爲了抓住或 15放開玻璃基板1的側端部,第8空壓氣缸131d利用空壓,使 自由旋轉地結合在端部的一對夾子13if彼此關閉或打開。 第7空壓氣缸i31a通過經一對蟑131c選擇性地供給空 壓,使移動部件131b往復移動,使得結合在移動部件1Mb 上的第8空壓氣缸131(1向左右往復移動。 20 第8空壓氣缸131d通過經一對埠131e選擇性地供給空 壓,使一對夾子131R^轉並彼此關閉或打開,當打開夹子 131f時’使其端部把持玻璃基板1的側端部。 在下部失緊裝置120的第1及第2下部失具121、122與側 部夾緊裝置13〇的側部夾具131的左側上端如第5圖所示具 13 備支撐玻璃基板1的端部的對準器121g、I2ii、131g,當夾 緊玻璃基板1時’使玻璃基板1整齊排列在被夾緊位置β 各對準器121g、121i、13lg,在結合在第3空壓氣缸 121a、第5空壓氣缸122b及第7空壓氣缸131&的各端部的、 每一個托架mh、12¾、131h的兩側,各設置丨個。 第16圖所示的視頻元件200,在一側開放的視頻框23〇 的内側兩方,分別垂直設置攝影機固定部件240與照明固定 部件250,多個攝影機220固定在攝影機固定部件240中,通 過開放的一側掃描玻璃基板1,照明固定部件Mo設置成向 多個攝影機220的掃描區域照射光。 返回第1圖及第3圖,視頻元件移動機構3〇〇使視頻元件 200從玻璃基板1的一側移動到另一側,以使視頻元件2〇〇的 攝影機220掃描玻璃基板1的整個區域。 視頻元件移動機構300中,在視頻元件移動機構3〇〇的 框315的下部自由旋轉地設置第丨導螺杆31〇,視頻元件2〇〇 結合在螺合於第1導螺杆310上的移動架(cart)32〇的上側,使 第1導螺杆310旋轉的第1移動電機(未圖示)與第丨導螺杆31〇 機械連結,第2導螺杆340與第1導螺杆31〇平行並旋轉自由 地设置在框315的上部,將與第2導螺杆340螺合的球狀螺母 350固定在視頻元件2〇〇的視頻框230上,使第2導螺杆340旋 轉的第2移動電機360與第2導螺杆340機械連結。 第2導螺杆340 ’通過其兩端被支撐在設置於框315的上 部的支撐框330上,而被旋轉自由地設置。 缺陷資料處理部400(第4圖)根據由視頻元件200的攝影 1336397 機220傳送的影像’將玻璃基板丨的缺陷處理成個數、大小、 位置等資料。 顯示部500將缺陷資料處理部4〇〇處理後的玻璃基板i 的缺陷個數、大小、位置等資料顯示到外部。 5 第17圖是表示根據本發明的玻璃基板的檢查方法的流 程圖。如圖所示,根據本發明的玻璃基板的檢查方法,對 在成形步驟中,沿移送轨道(未圖示)移動的、上端被夾在移 送夹子(未圖示)上被移送的玻璃基板丨進行檢查,包括:使 玻璃基板1停止的步驟(S10);使玻璃基板1固定在檢查區中 10的步驟(S20);掃描玻璃基板1的整個區域的步驟(S3〇);將 玻璃基板1的缺陷處理成資料的步驟(S40);顯示關於玻璃基 板1的缺陷的資料的步驟(S50)。在使玻璃基板丨停止的步驟 (S10)中,使上端固定在移送夾子(未圖示)上並沿移送軌道 (未圖示)移動的玻璃基板1,停止在一定位置上。 15 玻璃基板1停止(S10)後,在從移送夾子(未圖示)中取出 玻璃基板1並使之位於檢查區中,之後,用基板固定機構1〇〇 的上部夾緊裝置110、下部夾緊裝置120及側部夾緊裝置130 夾緊玻璃基板1的端部並使之固定(S20)。 另一方面’當用基板固定機構100失緊玻璃基板丨時, 20上端部被上部夾緊裝置11〇失緊的玻璃基板1,使下部夾緊 裝置120的第3及第5空壓氣缸121a、122b動作,使玻璃基板 1被上下拉伸;使側部夹緊裝置130的第7空壓氣缸1313動 作’以使被上下拉伸的玻璃基板丨向左右拉伸β從而,使玻 璃基板1不被撓曲’並使振動最小化,用視頻元件2〇〇進行 15 掃描時,得到清晰的影像。 若用基板固定機構100來固定玻璃基板1(S20),則掃描 玻璃基板1的整個區域(S30)。 在掃描玻璃基板1的整個區域的步驟(S30)中,由視頻 5 元件移動機構300將視頻元件200從固定在檢查區中的玻填 基板1的一側移動到另一側’使得用照明210與多個攝影機 220掃描玻璃基板1的整個區域。 根據掃描玻璃基板1的整個區域得到的影像,對玻璃基 板1的缺陷進行資料化處理(S40)。即,對玻璃基板1的整個 10 區域的影像進行影像處理,將缺陷的個數、大小、位置等 處理成資料。 經監視器等將關於玻璃基板1的缺陷的處理資料顯示 到外部(S50)。 在將關於玻璃基板1的缺陷的資料顯示到外部的步驟 15 (S50)中,還可實施顯示玻璃基板1不合格的内容的步驟 (S70)。在顯示玻璃基板1不合格的内容的步驟(S70)中,判 斷關於玻璃基板1的缺陷的資料大於設定值、例如缺陷的個 數、大小等設定值(S71),根據關於於玻璃基板1的缺陷的資 料,當缺陷大於設定值時,將該玻璃基板1不合格的内容顯 20 示在監視器等中(S72)。 另外,在顯示玻璃基板1不合格的内容的步驟(S70) 中,被顯示的不合格玻璃基板1取出到外部,不進入後續步 驟(S80)。 在將關於玻璃基板1的缺陷的資料顯示到外部的步驟 16 1336397 (S50)中,在玻璃基板1的缺陷小於設定值的情況下,爲了進 行後續步驟,從基板固定機構100取出玻璃基板1,用移送 夾子(未圖示)夾緊玻璃基板1的上端,沿移送軌道(未圖示) 移送,或裝入其他裝置的盒(未圖示)中移送。 5 這種結構的玻璃基板的檢查裝置及檢查方法的作用如 下進行。當將成形步驟中成形的玻璃基板1用移送夾子(未 圖示)沿移送軌道(未圖示)移送並進入預定位置時,通過使 移送夾子(未圖示)的移動停止,使玻璃基板1被停止(S10)。 當玻璃基板1停止時(S10),在從移送夾子(未圖示)中取 10 出玻璃基板1並使之位於檢查區中後,用基板固定機構100 的上部夾緊裝置110、下部夾緊裝置120及側部夾緊裝置130 夾緊玻璃基板1的端部並使之固定(S20)。 用基板固定機構100固定玻璃基板1的步驟(S20),如下 進行。 15 在從移送爽子(未圖示)取出玻璃基板1並使之位於固定 框140的内側後,用上部夾緊裝置110的第1及第2上部夾具 111、112夹緊玻璃基板1的上端部。 爲了用上部夾緊裝置110夾緊玻璃基板1的上端部,使 第1及第2上部夾具rn、112的第1及第2空壓氣缸ilia、112b 2〇 動作’用夾子111c、112d夾緊玻璃基板1的上端部。 另外’當使玻璃基板1位於固定框140的内側時,通過 使玻璃基板1位於下部夹緊裝置120及側部夾緊裝置130的 對準器121g、121i、131g上,可容易地整齊排列在夹緊位 置上。用上部夾緊裝置110夾緊玻璃基板1的上端部後,用 17 1336397 下部夾緊裝置120夹緊玻璃基板1的下端部。 即’使下部夾緊裝置120的第4及第6空壓氣缸12 Id ' 122e動作,用下部夾緊裝置120的夹子i2lf、122g夾緊玻璃 基板1的下端部。 5 玻璃基板1的上端與下端分別被上部及下部夾緊裝置 110、120夾緊後,使下部夾緊裝置12〇的第3及第5空壓氣缸 121a、122b動作,用一定力向下拉伸玻璃基板丨,使其向上 下拉伸。 玻璃基板1被上下拉伸後,側部夾緊裝置13〇的第8空壓 10氣缸131d動作,夾子131f分別夾緊玻璃基板1的側端部,並 使第7空壓氣缸131a動作,向兩側拉伸玻璃基板丨,使玻璃 基板1左右拉伸。 當用侧部夾緊裝置130的第7空壓氣缸丨31&左右拉伸玻 璃基板1時,通過上部及下部夾緊裝置110、12〇的第j上部 15夾具111與第1下部夾具112,玻璃基板1固定在一定位置的 狀態下,使第2上部夾具112與第1下部夾具122分別沿引導 軌道112a' 122a移動,使得玻璃基板丨在整個區域中左右拉 伸。由此,使玻璃基板1不撓曲,並使得振動最小化,當用 視頻元件200進行掃描時,取得清晰的影像。 20 用基板固定機構100夾緊並固定玻璃基板1後(S20),使 視頻元件移動機構300的第丨及第2移動電機36〇驅動使第1 及第2導螺杆310、340旋轉,從而使通過第1及第2導螺杆 310、340的旋轉作直線運動的移動架32〇、和與球狀螺母35〇 結合的視頻元件200,沿著第1及第2導螺杆310、34〇,從玻 18 1336397 璃基板1的一側移動到另一側,用視頻元件200的照明210與 多個攝影機(camera)220 ’掃描玻璃基板1的整個區域(S30)。 用視頻元件200的攝影機220掃描玻璃基板1的整個區 域(S30)後,根據用缺陷資料處理部400掃描得到的影像,對 5 玻璃基板1的缺陷個數、大小、位置等進行資料化處理(S40)。 關於玻璃基板1的處理資料通過監視器等顯示部500被 顯示到外部(S50)。 在將關於玻璃基板1的缺陷的資料顯示到外部的步驟 (S50)中,根據關於玻璃基板1的缺陷的資料,判斷缺陷大於 1〇 設定值、例如缺陷的個數、大小等設定值(S71),當玻璃基 板1的缺陷大於設定值時,經顯示部500顯示該玻璃基板1不 合格的内容(S72)。 將顯示部500中顯示的不合格的玻璃基板1取到外部, 不進入後續步驟(S80)。 15 在將關於玻璃基板1的缺陷的資料顯示到外部的步驟 (S50)中,若玻璃基板1的缺陷小於設定值,則爲了進行後續 步驟,從基板固定機構100中取出玻璃基板1,用移送夾子 (未圖示)夾緊玻璃基板1的上端,沿移送軌道(未圖示)移 送,或裝入在其他裝置的盒(未圖示)中移送。 20 如上所述,根據本發明的最佳實施形態,不僅在成形 步驟中容易實施玻璃基板的檢查,並且縮短檢查所需的時 間,最小化檢查時物理接觸玻璃基板造成的缺陷的産生, 並且,將限定的焦深内使被移送的玻璃基板的振動最小 化,並進行正確的檢查。 19 1336397 上述說明了本發明的最佳實施形態,但在不脫離本發 明的申請專利範圍的範圍内,本領域的技術人員可進行各 種變形。 I:圖式簡單說明3 5 第1圖是根據本發明的玻璃基板的檢查裝置的正面圖。 第2圖是根據本發明的玻璃基板的檢查裝置的側面圖。 第3圖是根據本發明的玻璃基板的檢查裝置的平面圖。 第4圖是表示根據本發明的玻璃基板的檢查裝置的框 圖。 10 第5圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的正面圖。 第6圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第1上部夾具的正面圖。 第7圖是表示根據本發明的玻璃基板的檢查裝置中基 15 板固定機構的第1上部夾具的側面圖。 第8圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第2上部夾具的正面圖。 第9圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第2上部夾具的底面圖。 20 第10圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第1下部夹具的正面圖。 第11圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第1下部夾具的側面圖。 第12圖是表示根據本發明的玻璃基板的檢查裝置中基 20 1336397 板固定機構的第2下部夾具的正面·圖。 第13圖是表示根據本發明的玻璃基板的檢查裝置中基 板固定機構的第2下部夹具的平面圖。 第14圖是表示根據本發明的玻璃基板的檢查裴置中& 5板固定機構的側部夾具的正面圖。 第15圖是表示根據本發明的玻璃基板的檢查裝置令& 板固定機構的側部夾具的側面圖。 第16圖是表示根據本發明的玻璃基板的檢查裝置中牙見 頻元件的斜視圖。 0 第17圖是表示根據本發明的玻璃基板的檢查方法的谅 程圖。 瓜 【圖式之主要元件代表符號表】 1…玻璃基板 100···基板固定機構 110·.·上部夾緊裝置 111···第1上部夾具 111a…第1空壓氣紅 111b'112c、121e、122f、131e… 一對璋 lllc、112d、121f、122g、131f... 夾子 112···第2上部夾具 112a、122a·.·引導轨道 112b…第2空壓氣缸 112e、122h...彈性部件 120…下部夾緊裝置 121…第1下部夾具 121a…第3空壓氣紅 121b、122c、131b...移動部件 121d…第4空壓氣缸 121g、121i、131g…對準器 121h、121j、131h、141a’·.托架 122···第2下部夾具 122b···第5空壓氣缸 122e…第6空壓氣缸 130···側部夾緊裝置 21 1336397 131···側部夾具 250…照明固定部件 131a…第7空壓氣缸 300…視頻元件移動機構 131d…第8空壓氣缸 310…第1導螺杆 140···固定框 315…框 141…上部框 320…移動架 142…下部框 330…支樓框 143…側部框 340…第2導螺杆 200···視頻元件 350…球狀螺母 210···照明 360…第2移動電機 220…攝影機 400…缺陷資料處理部 230…視頻框 500···顯示部 240···攝影機固定部件 S10〜S80···步驟 22BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus and an inspection method for a glass substrate, and relates to a glass substrate which is quickly and accurately subjected to glass substrate inspection in a molding step. Inspection device and inspection method. BACKGROUND OF THE INVENTION Generally, a glass substrate used in the manufacturing field of a flat panel display such as a TFT-LCD (Thin Film Transistor Liquid Crystal Display), a PDP (Equivalent 10 Sub Display Panel), or an EL (Electro luminescence) is to be formed in the forming step. The molten glass melted in the glass melting furnace is supplied to a melt forming machine for manufacture, cut off by a cutting apparatus according to a primary standard, and transported by a transfer system to a processing line. 15 Inspection of the glass substrate in the forming step can effectively reduce the cost and improve the yield by cutting off the defective product beforehand. In the forming step, when the glass substrate transferred by the transport system is inspected, when the glass substrate is taken out from the transport system and loaded onto other inspection devices, not only does the inspection take a long time, but also the handling takes time, 20 Physical contact may cause defects in the glass substrate. Therefore, in order to inspect the glass substrate in the forming step, it is necessary to fully consider the following points. First, it is necessary to reduce the time required to fix the glass substrate in the inspection area by easily loading the glass substrate into the inspection area and fixing it, and to end the series of inspection steps in a short period of time to shorten the inspection center. The time required to minimize physical contact with the glass plate during inspection and to minimize the occurrence of defects in the glass substrate. Second, it is necessary to suppress the vibration of the transferred glass substrate to the depth of focus for proper inspection. It is necessary to develop a glass-filled substrate inspection apparatus in the molding step in consideration of the above-described points and the like. Therefore, it is necessary to minimize the failure rate of the glass substrate in the steps performed after the molding step, reduce the cost, and increase the productivity. . SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide an inspection apparatus and an inspection method for a glass substrate, which are not only easy to perform inspection of a glass substrate in a molding step, but also shorten the time required for inspection. The generation of defects caused by physical contact with the glass substrate at the time of inspection is minimized, and the vibration of the transferred glass substrate is minimized within a defined depth of focus, thereby performing proper inspection. In order to achieve the above object, the present invention is an apparatus for inspecting a glass substrate, comprising: a substrate fixing mechanism disposed in an inspection area, clamping an end portion of the glass substrate and fixing the same; a video component, a use device The glass substrate fixed by the substrate fixing mechanism is irradiated with light by the illumination device and scanned by a plurality of cameras; and the video element moving mechanism moves the video element from one side of the glass substrate to the other side; The processing unit performs data processing on the defect of the glass substrate based on the image transmitted from the camera of the video element, and the display unit displays the material processed by the defect data processing unit. Further, the present invention is an inspection method for inspecting a glass substrate, characterized by "including a step of: clamping the end portion of the glass substrate and fixing it after the glass substrate is placed in the inspection region; And moving a plurality of cameras from one side of the glass substrate fixed to the inspection area to the other side and scanning the glass substrate; and scanning the glass substrate according to an image obtained by scanning the glass substrate The defects are subjected to data processing; information on the defects of the glass substrate is displayed to the outside. The inspection apparatus and the inspection method of the glass substrate according to the present invention are not only easy to perform inspection of the glass substrate in the molding step, but also shorten the time required for inspection, and the occurrence of defects caused by physical contact with the glass substrate at the time of inspection is reduced. Minimize the vibration of the glass substrate to be transferred within a defined depth of focus and perform a proper inspection. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing an inspection apparatus for a glass substrate according to the present invention. The drawing is a side view of an inspection apparatus for a glass substrate according to the present invention. Fig. 3 is a plan view showing an inspection apparatus for a glass substrate according to the present invention. Fig. 4 is a block diagram showing an inspection apparatus for a glass substrate according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 5 is a front elevational view showing a substrate fixing mechanism in an inspection apparatus for a glass substrate according to the present invention. Fig. 6 is a front elevational view showing the first upper jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 7 is a side view showing the first upper jig of the base 1336397 plate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 8 is a front elevational view showing the second upper jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 9 is a bottom plan view showing a second upper jig of the base plate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 10 is a front elevational view showing the first lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 11 is a side view showing the first lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 12 is a front elevational view showing the second lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Figure 13 is a plan view showing a second lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 14 is a front elevational view showing the side jig of the base plate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 15 is a side view showing a side jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Figure 16 is a perspective view showing a video element in an inspection apparatus for a glass substrate according to the present invention. Fig. 17 is a flow chart showing a method of inspecting a glass substrate according to the present invention. I. Embodiment 3 DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. 8 is a front view of an inspection apparatus for a glass substrate according to the present invention, FIG. 2 is a side view of an inspection apparatus for a glass substrate according to the present invention, and FIG. 3 is a plan view of an inspection apparatus for a glass substrate according to the present invention. Fig. 4 is a block diagram showing an inspection apparatus for a glass substrate according to the present invention. As shown in the figure, according to the inspection apparatus for a glass substrate of the present invention, in the forming step of the glass substrate 1, a transfer clip (not shown) whose upper end is moved along a transfer rail (not shown) is clamped and transferred. The glass substrate 1 is fixed and inspected in an inspection area, and the inspection apparatus of the glass substrate includes a substrate fixing mechanism 1 that fixes the end portion of the glass substrate 1 and fixes the video element 200 of the glass substrate 1 The video element 200 moves from one side of the glass substrate 1 to the other side of the video element moving mechanism 300, and the defect data processing unit 4 that processes the defects of the glass substrate 1 into data according to the image scanned by the video element 2? And a display unit 500 that displays the data processed by the defect data processing unit 400. The substrate fixing mechanism 100 is disposed adjacent to the transfer path of the glass substrate 1, and the upper end of the glass substrate 1 is clamped by a plurality of transfer clips (not shown) and moved along a transfer track (not shown) when the transfer track is along (not shown) When the moving glass substrate is stopped, the substrate fixing mechanism 1 clamps the end portion of the glass substrate 1 removed from the transfer clip (not shown), and fixes it to the inspection area. As shown in FIG. 5, the substrate fixing mechanism 100 includes: a fixing frame 140; an upper squeezing device 110, which is disposed on the upper side of the fixing frame 14A, clamps the upper end portion of the glass substrate; and the lower clamping device 120 is fixed at the fixing On the lower side of the frame 140, the lower end portion of the glass substrate 1 is pressed, and the glass substrate 1 is pulled down to stretch the glass substrate 1 upward and downward; and the side clamping devices 130 are respectively disposed on the solid frame 140. On the side, the both ends of the glass substrate 1 are clamped, and the glass substrate 1 is pulled to the both sides so that the glass substrate 1 is stretched to the left and right. The fixing frame 140 is disposed in the forming step for checking the position of the glass substrate '. The upper and lower frames 14A and 142 located on the upper side and the lower side are supported by the pair of side frames 143. The upper clamp device 110 is disposed on the upper side of the fixed frame 14A, that is, in the upper frame 141, and the first upper clamp U1 is fixed by the first and second upper clamps 111 and 112 that clamp the upper end portion of the glass substrate 1. The second upper jig 112 of the upper frame 141 of the fixed frame 14 is freely movable to the left and right of the upper frame 141 of the fixed frame 140. The first upper jig shown in FIGS. 6 and 7 has a bracket i41a provided by the upper frame 141 of the fixing frame 140, and is provided with a first air cylinder Ilia' for grasping or releasing the glass substrate 1. The upper end portion is closed or opened by a pair of clips 111c which are freely coupled to the end portion of the first pneumatic cylinder 111a, that is, the lower end, by the air pressure. The first air-pressure cylinder 111a is selectively supplied with air pressure via a pair of turns 111b, and by rotating the pair of clips 111c and closing or opening each other, when the clip 111 (when closed), the end portion of the glass substrate 1 is held by the end portion The second upper clamp 112 shown in Figs. 8 and 9 is provided with a second air cylinder 112b. The second air cylinder i12b is disposed on the upper side of the fixed frame 14 and on the upper side of the frame 141. The guide tunnel 112a slides, and in order to clamp or release the upper end portion of the glass substrate 1, the second air cylinder 112b is rotatably coupled to the end portion by the air pressure, and the pair of clips 112d are closed or opened to each other. The air cylinder 112b is slidably disposed on the guide rail 112& which is juxtaposed on the upper frame 141 along the longitudinal direction 1336397 of the upper frame 141, and is selectively supplied to the pair of 埠ll2c. When the clip 112d is closed, the end portion holds the upper end portion of the glass substrate 1. 5 Since the second air cylinder 112b is slidably disposed on the guide rail 112a, the glass substrate 1 is clamped to the side. When the device 13 is stretched to the left and right, 2 The upper jig Π 2 is moved in a direction in which the glass substrate 1 is stretched, so that the glass substrate 1 is stretched over the entire area. On the upper side of the fixed frame 140, that is, the upper frame 141 and the second air-pressure cylinder 112 匕 10, a spiral is provided. The elastic member 112e such as a spring returns to the first position in the second upper jig 112 as the second air cylinder 112b that has moved to the left and right due to the glass substrate 1. The lower clamp device 120 is disposed in the fixed frame 14 respectively. In the lower frame 142, the lower end portion of the glass substrate 1 is clamped, and the glass-based I5 plate 1 is stretched downward to form the first and second lower jigs 121 and 122 in which the glass substrate 1 is stretched up and down. The first lower jig 121 is fixed to the lower frame 142, and the second lower jig 122 is movably disposed to the left and right of the lower frame 142. The first lower dislocation 121 shown in Fig. 10 and Fig. 1 is fixed to the frame 140. In the lower frame 142, a third air cylinder 121a having an operating member 121b that moves up and down by air pressure 20 is provided, and a fourth air compressor 121a is provided at the end of the moving member 121b of the third air cylinder 121a. Air compressor cylinder 121d; in order to grasp or release the glass base At the lower end portion of the plate 1, the fourth air cylinder i2id utilizes air pressure to close or open the pair of clips 12if that are freely rotatably coupled to the ends. 11 1336397 The third air cylinder i21a is selectively passed through a pair of 埠12lc The air supply is supplied to the ground, and the moving member 12lb is reciprocated to move the second air-pressure cylinder 121 (1) up and down. The fourth air cylinder i21d is selectively supplied with a space of 5 by a pair of turns 121e to make a pair of cools. 121f rotates and closes or opens to each other, and when the opener 121f is opened, 'the end portion holds the lower end portion of the glass substrate 丨. The second lower clamp 122 shown in FIGS. 12 and 13 is provided with a fifth air cylinder 122b. The fifth air cylinder 122b slides along a guide rail 122a provided on the lower side of the fixed frame 140, that is, in the lower frame 142; The fifth air cylinder 122b has a moving member 122c that reciprocates up and down by the air pressure, and a sixth air cylinder 122e is provided at the end of the moving member 122c of the fifth air cylinder 122b, in order to grasp or release the glass. At the lower end portion of the substrate 1, the sixth air-pressure cylinder 122e is closed or opened by a pair of clips 122g that are rotatably coupled to the ends by the air pressure '15. The fifth air-pressure cylinder 122b is slidably disposed along the lower frame 142. The longitudinal direction is juxtaposed on the guide rail 122a on the lower frame 142, and the movable member 122c is reciprocally moved by selectively supplying air pressure through a pair of turns, thereby causing the sixth air cylinder 122e coupled to the moving member 122c. The upper and lower reciprocating movements 0 2 〇 the sixth air cylinder I22e selectively supplies air pressure through a pair of cymbals I22f, causing the pair of clips 122g to rotate and close or open each other'. When the detached 122g is closed, the end grip glass The lower end of the substrate 丨. Since the fifth air-pressure cylinder 122b is slidably provided on the guide rail 122a', the second lower jig 122 is biased toward the glass substrate 1 when the glass substrate 1 is stretched 121336397 to the left and right by the side clamp device 13 The direction of stretching is moved so that the glass substrate 1 is stretched throughout the entire area. In the lower side of the fixed frame 140, that is, the lower frame 142 and the fifth air-pressure cylinder 122b, an elastic member 122h such as a coil spring is provided, and the fifth lower clamp 122 is stretched by the glass substrate 1 to the left and right. The air compressor cylinder 122b is restored to the original position. The side clamping device 130 is composed of a plurality of side clamps 131 which are respectively disposed on both sides of the fixing frame 140, that is, in each of the side frames 143, 'tightening the both ends of the glass substrate 1 The glass substrate 1 is stretched to the left and right, and the glass substrate 1 is stretched to the left and right by 10. The side clamp 131 shown in Fig. 14 and the circumstance 15 is provided with a seventh air cylinder having a moving member 131b that reciprocates by the air pressure, on the side of the fixed frame 14A, that is, the side frame 143. 131a, the eighth air-pressure cylinder I31d is provided at the end of the moving member 13 lb of the seventh air-pressure cylinder i3ia, and the eighth air-pressure cylinder 131d uses air pressure in order to grasp or 15 release the side end portion of the glass substrate 1. A pair of clips 13if that are freely rotatably coupled to the ends are closed or opened to each other. The seventh air-pressure cylinder i31a selectively supplies the air pressure via the pair of turns 131c, and reciprocates the moving member 131b so that the eighth air-pressure cylinder 131 coupled to the moving member 1Mb reciprocates to the right and left. The air-pressure cylinder 131d selectively supplies the air pressure through the pair of turns 131e, so that the pair of clips 131R are rotated and closed or opened to each other, and when the clip 131f is opened, the end portion of the glass substrate 1 is held by the end portion. The left upper end of the first and second lower dislocations 121, 122 of the lower detent device 120 and the side clamp 131 of the side clamping device 13A are provided with the end portion of the glass substrate 1 as shown in FIG. When the aligners 121g, I2ii, and 131g are clamped, the glass substrate 1 is aligned in the clamped position β aligners 121g, 121i, and 13lg, and is coupled to the third air cylinder 121a, One end of each of the brackets mh, 123⁄4, and 131h of each of the air compressor cylinders 122b and the seventh air compressor cylinders 131' and the seventh air compressor cylinders 131', and the video components 200 shown in Fig. 16 are on one side. The inner side of the open video frame 23〇, respectively, vertically sets the camera fixing member 240 and the photo The fixing member 250, the plurality of cameras 220 are fixed to the camera fixing member 240, and the glass substrate 1 is scanned by the open side, and the illumination fixing member Mo is provided to illuminate the scanning area of the plurality of cameras 220. Return to Fig. 1 and Fig. 3 The video element moving mechanism 3 moves the video element 200 from one side of the glass substrate 1 to the other side so that the camera 220 of the video element 2 scans the entire area of the glass substrate 1. The video element moving mechanism 300 The second lead screw 31 is rotatably disposed at a lower portion of the frame 315 of the video element moving mechanism 3, and the video element 2 is coupled to a movable frame 32 螺 screwed to the first lead screw 310. On the upper side, a first moving motor (not shown) that rotates the first lead screw 310 is mechanically coupled to the second lead screw 31 , and the second lead screw 340 is rotatably provided in parallel with the first lead screw 31 在 in the frame 315 . In the upper portion, the ball nut 350 screwed to the second lead screw 340 is fixed to the video frame 230 of the video element 2, and the second moving motor 360 and the second lead screw 340 are rotated by the second lead screw 340. Link. Guide 2 The rod 340' is rotatably disposed by being supported at its both ends on the support frame 330 provided at the upper portion of the frame 315. The defect data processing portion 400 (Fig. 4) is transmitted according to the photographing 1336397 by the video element 200 The image of the glass substrate is processed into a number, size, position, etc. The display unit 500 displays the number, size, position, and the like of the glass substrate i after the defect data processing unit 4 is processed to the outside. Fig. 17 is a flow chart showing a method of inspecting a glass substrate according to the present invention. As shown in the figure, according to the inspection method of the glass substrate of the present invention, the glass substrate which is moved along the transfer rail (not shown) and which is transferred to the transfer clip (not shown) in the forming step 丨The inspection includes the steps of: stopping the glass substrate 1 (S10); the step of fixing the glass substrate 1 in the inspection region 10 (S20); the step of scanning the entire region of the glass substrate 1 (S3〇); and the glass substrate 1 The step of processing the defect into a material (S40); displaying the data on the defect of the glass substrate 1 (S50). In the step (S10) of stopping the glass substrate 丨, the glass substrate 1 having the upper end fixed to the transfer clip (not shown) and moving along the transfer rail (not shown) is stopped at a predetermined position. 15 After the glass substrate 1 is stopped (S10), the glass substrate 1 is taken out from the transfer clip (not shown) and placed in the inspection area, and thereafter, the upper clamping device 110 and the lower clamp of the substrate fixing mechanism 1 are used. The tightening device 120 and the side clamping device 130 clamp the ends of the glass substrate 1 and fix them (S20). On the other hand, when the substrate fixing mechanism 100 is not in contact with the glass substrate ,, the glass substrate 1 whose upper end portion is not tightened by the upper clamp device 11 is used, and the third and fifth air cylinders 121a of the lower clamp device 120 are caused. The operation of 122b causes the glass substrate 1 to be stretched up and down, and the seventh pneumatic cylinder 1313 of the side clamp device 130 is operated to stretch the glass substrate 上下 which is stretched up and down to the left and right by β, thereby causing the glass substrate 1 to be stretched. Without being deflected' and minimizing the vibration, a 15 image is scanned with the video element 2 to obtain a clear image. When the glass substrate 1 is fixed by the substrate fixing mechanism 100 (S20), the entire area of the glass substrate 1 is scanned (S30). In the step (S30) of scanning the entire area of the glass substrate 1, the video element 200 is moved from the side of the glass-filled substrate 1 fixed in the inspection area to the other side by the video 5 element moving mechanism 300 to make the illumination 210 The entire area of the glass substrate 1 is scanned with a plurality of cameras 220. The defects of the glass substrate 1 are subjected to materialization processing based on the image obtained by scanning the entire area of the glass substrate 1 (S40). That is, the image of the entire 10 regions of the glass substrate 1 is subjected to image processing, and the number, size, position, and the like of the defects are processed into data. The processing information on the defect of the glass substrate 1 is displayed to the outside via a monitor or the like (S50). In the step 15 (S50) of displaying the material on the defect of the glass substrate 1 to the outside, a step of displaying the content of the glass substrate 1 which is unacceptable (S70) may be performed. In the step (S70) of displaying the content of the glass substrate 1 that is unacceptable, it is determined that the data on the defect of the glass substrate 1 is larger than a set value, for example, the number of defects, the size, and the like (S71), according to the glass substrate 1. In the data of the defect, when the defect is larger than the set value, the content of the glass substrate 1 that fails is displayed on the monitor or the like (S72). Further, in the step (S70) of displaying the content of the glass substrate 1 which is unacceptable, the displayed defective glass substrate 1 is taken out to the outside, and does not proceed to the subsequent step (S80). In the step 16 1336397 (S50) of displaying the information on the defect of the glass substrate 1 to the outside, in the case where the defect of the glass substrate 1 is smaller than the set value, the glass substrate 1 is taken out from the substrate fixing mechanism 100 in order to perform the subsequent steps, The upper end of the glass substrate 1 is clamped by a transfer clip (not shown), transferred along a transfer rail (not shown), or transferred into a cassette (not shown) of another device. The function of the inspection apparatus and inspection method of the glass substrate having such a structure is as follows. When the glass substrate 1 formed in the molding step is transferred to a transfer position (not shown) by a transfer clamp (not shown) and enters a predetermined position, the glass substrate 1 is stopped by stopping the movement of the transfer clip (not shown). It is stopped (S10). When the glass substrate 1 is stopped (S10), after the glass substrate 1 is taken out from the transfer clip (not shown) and placed in the inspection area, the upper clamping device 110 of the substrate fixing mechanism 100 is clamped at the lower portion. The device 120 and the side clamping device 130 clamp the ends of the glass substrate 1 and fix them (S20). The step (S20) of fixing the glass substrate 1 by the substrate fixing mechanism 100 is performed as follows. 15 After the glass substrate 1 is taken out from the transfer sink (not shown) and placed inside the fixed frame 140, the upper end portions of the glass substrate 1 are clamped by the first and second upper jigs 111 and 112 of the upper clamp device 110. . In order to clamp the upper end portion of the glass substrate 1 by the upper clamp device 110, the first and second air cylinders iLia and 112b of the first and second upper clamps rn and 112 are operated by the clamps 111c and 112d. The upper end portion of the glass substrate 1. In addition, when the glass substrate 1 is positioned inside the fixing frame 140, the glass substrate 1 can be easily aligned in the aligners 121g, 121i, and 131g of the lower clamping device 120 and the side clamping device 130. Clamping position. After the upper end portion of the glass substrate 1 is clamped by the upper clamp device 110, the lower end portion of the glass substrate 1 is clamped by the lower clamp device 120 of 17 1336397. That is, the fourth and sixth pneumatic cylinders 12 Id ' 122e of the lower clamp device 120 are operated, and the lower end portions of the glass substrate 1 are clamped by the clips i2lf and 122g of the lower clamp device 120. 5 The upper end and the lower end of the glass substrate 1 are clamped by the upper and lower clamps 110 and 120, respectively, and the third and fifth air cylinders 121a and 122b of the lower clamp device 12 are operated to pull down with a certain force. Extend the glass substrate to stretch it up and down. After the glass substrate 1 is stretched up and down, the eighth air pressure 10 cylinder 131d of the side clamp device 13 is operated, and the clip 131f clamps the side end portion of the glass substrate 1, and the seventh air compressor 131a is operated. The glass substrate was stretched on both sides to stretch the glass substrate 1 to the left and right. When the glass substrate 1 is stretched left and right by the seventh air cylinder 31 & of the side clamp device 130, the jth upper portion 15 of the upper and lower clamps 110, 12, and the first lower clamp 112 are When the glass substrate 1 is fixed at a predetermined position, the second upper jig 112 and the first lower jig 122 are moved along the guide rails 112a' to 122a, respectively, so that the glass substrate is stretched left and right in the entire region. Thereby, the glass substrate 1 is prevented from being bent, and vibration is minimized, and when scanning is performed by the video element 200, a clear image is obtained. After the glass substrate 1 is clamped and fixed by the substrate fixing mechanism 100 (S20), the first and second moving motors 36 of the video element moving mechanism 300 are driven to rotate the first and second lead screws 310 and 340, thereby causing the first and second lead screws 310 and 340 to rotate. The movable frame 32, which is linearly moved by the rotation of the first and second lead screws 310, 340, and the video element 200 coupled to the ball nut 35A are along the first and second lead screws 310, 34, Glass 18 1336397 One side of the glass substrate 1 is moved to the other side, and the entire area of the glass substrate 1 is scanned with the illumination 210 of the video element 200 and a plurality of cameras 220' (S30). After the entire area of the glass substrate 1 is scanned by the camera 220 of the video element 200 (S30), the number, size, position, and the like of the defects of the 5 glass substrate 1 are processed according to the image scanned by the defect data processing unit 400 ( S40). The processing data of the glass substrate 1 is displayed to the outside through the display unit 500 such as a monitor (S50). In the step (S50) of displaying the information on the defect of the glass substrate 1 to the outside, based on the data on the defect of the glass substrate 1, it is judged that the defect is larger than the set value of 1〇, for example, the number of defects, the size, and the like (S71) When the defect of the glass substrate 1 is larger than the set value, the display unit 500 displays the content of the glass substrate 1 that is unacceptable (S72). The defective glass substrate 1 displayed on the display unit 500 is taken outside, and does not proceed to the subsequent step (S80). 15 In the step (S50) of displaying the information on the defect of the glass substrate 1 to the outside, if the defect of the glass substrate 1 is smaller than the set value, the glass substrate 1 is taken out from the substrate fixing mechanism 100 for transfer, and transferred. A clip (not shown) clamps the upper end of the glass substrate 1, and is transferred along a transfer rail (not shown) or loaded into a cassette (not shown) of another device. 20 As described above, according to the preferred embodiment of the present invention, not only the inspection of the glass substrate is easily performed in the forming step, but also the time required for the inspection is shortened, and the occurrence of defects caused by physical contact with the glass substrate at the time of inspection is minimized, and The vibration of the glass substrate to be transferred is minimized within a defined depth of focus, and a proper inspection is performed. While the preferred embodiment of the invention has been described, the invention may be modified by those skilled in the art without departing from the scope of the invention. I: BRIEF DESCRIPTION OF THE DRAWINGS 3 5 Fig. 1 is a front view of an inspection apparatus for a glass substrate according to the present invention. Fig. 2 is a side view showing an inspection apparatus for a glass substrate according to the present invention. Fig. 3 is a plan view showing an inspection apparatus for a glass substrate according to the present invention. Fig. 4 is a block diagram showing an inspection apparatus for a glass substrate according to the present invention. Fig. 5 is a front elevational view showing the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 6 is a front elevational view showing the first upper jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 7 is a side view showing the first upper jig of the base plate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 8 is a front elevational view showing the second upper jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 9 is a bottom plan view showing a second upper jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 10 is a front elevational view showing the first lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 11 is a side view showing the first lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 12 is a front elevational view showing the second lower jig of the base 20 1336397 plate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Figure 13 is a plan view showing a second lower jig of the substrate fixing mechanism in the inspection apparatus for a glass substrate according to the present invention. Fig. 14 is a front elevational view showing the side jig of the & 5 plate fixing mechanism in the inspection apparatus of the glass substrate according to the present invention. Fig. 15 is a side view showing a side jig of the & plate fixing mechanism of the glass substrate inspection apparatus according to the present invention. Figure 16 is a perspective view showing a dental component in an inspection apparatus for a glass substrate according to the present invention. Fig. 17 is a perspective view showing a method of inspecting a glass substrate according to the present invention. [The main component representative symbol table of the drawing] 1...glass substrate 100···substrate fixing mechanism 110·.·upper clamping device 111···first upper jig 111a...first air pressure gas red 111b'112c, 121e 122f, 131e... a pair of 璋lllc, 112d, 121f, 122g, 131f... clip 112···second upper clamps 112a, 122a···guide rail 112b...second air cylinders 112e, 122h... The elastic member 120...the lower clamp device 121...the first lower clamp 121a...the third air pressure red 121b, 122c, 131b...the moving member 121d...the fourth air cylinder 121g, 121i,131g...the aligners 121h, 121j 131h, 141a'·. bracket 122···second lower clamp 122b···5th air cylinder 122e...6th air cylinder 130···side clamping device 21 1336397 131···side Fixture 250...Illumination fixing member 131a... seventh air cylinder 300...video element moving mechanism 131d...eight air cylinder 310...first lead screw 140···fixing frame 315...frame 141...upper frame 320...moving frame 142 ...lower frame 330...branch frame 143...side frame 340...second lead screw 200···video element 350...ball nut 210···Lighting 360...Second mobile motor 220...Camera 400...Defect data processing unit 230...Video frame 500···Display unit 240···Camera fixing parts S10 to S80···Step 22

Claims (1)

1336397 第92137459號專利申請案 申請專利範圔替換本 2〇1〇.6.15 拾、申請專利範園: 1. 一種玻璃基板的檢查裝置’係用於檢查使用於平板顯示 器之玻璃基板者,其特徵在於包括: 基板固定機構,設置在檢查區,用以夾緊所述玻璃 5 基板的端部並使之固定; 視頻元件,對用所述基板固定機構固定的所述玻璃 基板,用照明裝置照射光’並用多個攝影機進行掃描; 視頻元件移動機構,將所述視頻元件從所述玻璃基 板的一側移動到另一側; 10 缺陷資料處理部,根據從所述視頻元件的攝影機傳 送的影像,對所述玻璃基板的缺陷進行資料化處理;及 顯示部,顯示由所述缺陷資料處理部處理後的資 料, 所述基板固定機構係由上下夾緊所述玻璃基板後 丨5 加以拉伸,並且由左右夾緊所述玻璃基板後加以拉伸, 以防止所述玻璃基板變形。 2. 如申請專利範圍第1項所述的玻璃基板的檢查裝置,其 中所述視頻元件在至少開放了一側的視頻框内側的兩 方分別垂直設置攝影機固定部件與照明固定部件,在所 20 述攝影機固定部件上固定所述多個攝影機’使得所述多 個攝影機通過開放的一側對所述玻璃基板進行掃描;在 所述照明固定部件上設置所述照明,使得所述照明向所 述多個攝影機的掃描區域照射光。 3. 如申請專利範圍第1項所述的玻璃基板的檢查裝置,其 23 1336397 中所述視頻元件移動機構包括: 與所述基板固定機構靠近設置並且自由旋轉地設 置在框下部的第1導螺杆; 與所述第1導螺杆螺合並且所述視頻元件結合在上 5 側的移動架; 與所述第1導螺杆連結並且向所述第1導螺杆供給 旋轉力的第1驅動裝置; 與所述第1導螺杆平行並且自由旋轉地設置在所述 框的上部的第2導螺杆; 10 與所述第2導螺杆螺合並且固定在所述視頻元件上 的球狀螺母;及 與所述第2導螺杆連結並且向所述第2導螺杆供給 旋轉力的第2驅動裝置。 4. 一種玻璃基板的檢查方法,係用於檢查使用於平板顯示 15 器之玻璃基板者,包括如下步驟: 在使所述玻璃基板位於檢查區後,夾緊所述玻璃基 板的端部並使之固定; 使照明和多個攝影機,從固定在所述檢查區的所述 玻璃基板的一側向另一側移動,並對所述玻璃基板進行 20 掃描; 根據掃描所述玻璃基板取得的影像,對所述玻璃基 板的缺陷進行資料化處理;及 將關於所述玻璃基板缺陷的資料顯示到外部, 所述基板固定機構係由上下失緊所述玻璃基板後 24 1336397 加以拉伸,並且由左右夾緊所述玻璃基板後加以拉伸, 以防止所述玻璃基板變形。 5.如申請專利範圍第4項所述的玻璃基板的檢查方法,其 中在將關於所述玻璃基板缺陷的資料顯示到外部的步 5 驟中,還包括根據關於所述玻璃基板缺陷的資料,所述 缺陷在設定值以上時,顯示所述玻璃基板不合格的内容 的步驟。 6·如申請專利範圍第5項所述的玻璃基板的檢查方法,其 中在顯示所述玻璃基板不合格的步驟中,還包括將被顯 10 示的所述不合格的玻璃基板取到外部的步驟。 251336397 Patent Application No. 92137459 Patent Application No. 2〇1〇.6.15 Picking up, applying for a patent garden: 1. A glass substrate inspection device is used to inspect a glass substrate used in a flat panel display, its characteristics The invention comprises: a substrate fixing mechanism disposed in the inspection area for clamping and fixing the end of the glass 5 substrate; and a video element for illuminating the glass substrate fixed by the substrate fixing mechanism with a lighting device Light' is scanned by a plurality of cameras; a video element moving mechanism moves the video element from one side of the glass substrate to the other side; 10 a defect data processing unit that transmits images according to a camera from the video element And dicing the defect of the glass substrate; and displaying the data processed by the defect data processing unit, wherein the substrate fixing mechanism stretches the glass substrate from above and below by stretching And stretching the glass substrate from left and right and then stretching to prevent the glass substrate from being deformed. 2. The inspection apparatus for a glass substrate according to claim 1, wherein the video element is vertically disposed on both sides of the video frame at least one side of the video frame, and the camera fixing member and the illumination fixing member are vertically disposed at 20 Fixing the plurality of cameras on the camera fixing member' such that the plurality of cameras scan the glass substrate through an open side; setting the illumination on the illumination fixing member such that the illumination is The scanning area of the plurality of cameras illuminates the light. 3. The apparatus for inspecting a glass substrate according to claim 1, wherein the video element moving mechanism described in 23 1336397 includes: a first guide disposed adjacent to the substrate fixing mechanism and rotatably disposed at a lower portion of the frame a first driving device that is coupled to the first lead screw and that couples the video element to the upper side 5; a first driving device that is coupled to the first lead screw and supplies a rotational force to the first lead screw; a second lead screw disposed in parallel with the first lead screw and rotatably disposed at an upper portion of the frame; 10 a ball nut screwed to the second lead screw and fixed to the video element; and The second lead screw that is coupled to the second lead screw and that supplies a rotational force to the second lead screw is provided. 4. A method for inspecting a glass substrate for inspecting a glass substrate used for a flat panel display, comprising the steps of: clamping the end of the glass substrate after the glass substrate is placed in the inspection area; Fixing; moving the illumination and the plurality of cameras from one side of the glass substrate fixed to the inspection area to the other side, and performing 20 scanning on the glass substrate; according to the image obtained by scanning the glass substrate And performing data processing on the defects of the glass substrate; and displaying the information about the defects of the glass substrate to the outside, the substrate fixing mechanism is stretched by the upper and lower sides of the glass substrate 24 1336397, and The glass substrate is clamped left and right and then stretched to prevent deformation of the glass substrate. 5. The method of inspecting a glass substrate according to claim 4, wherein in the step 5 of displaying the material of the glass substrate defect to the outside, further comprising, according to the information about the defect of the glass substrate, When the defect is equal to or higher than the set value, the step of displaying the content of the glass substrate is unacceptable. The method for inspecting a glass substrate according to claim 5, wherein in the step of displaying the glass substrate is unacceptable, the method further comprises: taking the unqualified glass substrate indicated by the external one to the outside step. 25
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CN1627059A (en) 2005-06-15
KR100582344B1 (en) 2006-05-22
JP2005172782A (en) 2005-06-30

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