TWI307675B - - Google Patents

Download PDF

Info

Publication number
TWI307675B
TWI307675B TW094136703A TW94136703A TWI307675B TW I307675 B TWI307675 B TW I307675B TW 094136703 A TW094136703 A TW 094136703A TW 94136703 A TW94136703 A TW 94136703A TW I307675 B TWI307675 B TW I307675B
Authority
TW
Taiwan
Prior art keywords
substrate
transfer
hand
conveyor
process side
Prior art date
Application number
TW094136703A
Other languages
Chinese (zh)
Other versions
TW200642933A (en
Inventor
Kensuke Hirata
Susumu Murayama
Original Assignee
Ishikawajima Harima Heavy Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Harima Heavy Ind filed Critical Ishikawajima Harima Heavy Ind
Publication of TW200642933A publication Critical patent/TW200642933A/en
Application granted granted Critical
Publication of TWI307675B publication Critical patent/TWI307675B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Specific Conveyance Elements (AREA)
  • Warehouses Or Storage Devices (AREA)

Description

1307675 (1) 九、發明說明 【發明所屬之技術領域】 本發明係有關一種基板搬運裝置，特別是有關在使用 輸送機和移載手來積層基板而收納自如的匣與對基板施以 處理的製程裝置之間搬運基板。 【先前技術】 以往，於積層電漿顯示面板等所使用的玻璃基板而收 納的匣方面，據知有從被載置在載置台之特定位置的匣， 使用移載手（於前述匣內***移載手）一片片取出存在於 前述匣之任意位置的玻璃基板，將該取出的玻璃基板換成 載置在滾子輸送機，投入到對前述玻璃基板施行印刷等之 處理的製程裝置之構成的基板搬運裝置（例如參照日本特 開 2002 — 1 6703 9 號公報）。 可是，前述以往的基板搬運裝置中，使用移載手從匣 取出玻璃基板之際，在玻璃基板之間***移載手，該*** 後使前述移載手對前述玻璃基板（匣）相對性地上昇而僅 提起屬於搬送對象的玻璃基板，從支撐前述玻璃基板的前 述匣的支撐部反向離開前述玻璃基板而將前述基板載置在 前述移載手，該載置後，將前述移載手移動到前述匣之外 ，從前述匣取出玻璃基板。 因而，需要爲了將前述移載手***到玻璃基板之間並 且稍微提起屬於搬送對象的玻璃基板的空間，積層在匣內 的各玻璃基板之間的上下方向的間隔須要某種程度，就會 -4- (2) 1307675 有積層在匣內的各玻璃基板之上下方向的間距很大的 ，還會有玻璃基板之收納片數減少，匣之玻璃基板的 效率降低的問題。 再者，玻璃基板大型化從移載手伸出的部分變大 ，應從匣搬出玻璃基板，稍微提起時，前述玻璃基板 曲（從前述移載手伸出並且與前述匣之支撐部接觸的 的撓曲）變大，會使前述玻璃基板朝前述匣之前述支 背離的緣故須更進一步提起，因此前述問題更爲明顯 另一方面，前述習知之基板搬運裝置中，使用滾 送機將玻璃基板搬入至製程裝置，但在製程裝置側中 求利用移載手之移載的情形具多。即，例如，對基板 處理的製程裝置的部位，利用蓋板與外部隔離，搬入 基板時，必須打開開閉自如的前述蓋板的一部份，來 前述基板，因此會有所謂難以藉由滾子輸送機朝製程 搬入玻璃基板之情形的缺點。 爲了彌補前述缺點，如果在前述滾子輸送機與前 程裝置之間，設置多關節機械手臂等，會有基板搬運 之構成變複雜，並且基板搬運裝置之設置面積變寬的 〇 再者，前述問題就算是使用玻璃以外的材質所構 基板也會發生同樣的問題。 本發明係爲有鑑於前述問題的發明，係針對在自 納基板的匣與對基板施行處理的製程裝置之間搬送基 基板搬運裝置，其目的在於提供一種能提高前述匣之 情形 收納 的話 的撓 部位 撐部 〇 子輸 ，要 施行 前述 搬入 裝置 述製 裝置 問題 成的 如收 板的 基板 (3) 1307675 的收納效率’構成簡單，並且可縮小設置面積的基板搬運 裝置。 【發明內容】 依據本發明之第1狀態的發明，係具有：能從形成水 平而多段收納基板的匣朝水平方向移動而搬出前述基板， 或是能朝水平方向移動而往前述匣搬入前述基板的匣側輸 _ 送機；和能將前述基板朝水平方向移動，而往對著前述基 板施行加工的製程裝置供給，或是能將前述基板朝水平方 向移動而從前述製程裝置搬出的製程側移載手；和能在前 述匣側輸送機與前述製程側移載手之間遞交前述基板的基 板遞交手段；前述匣側輸送機、前述製程側移載手以及前 述基板遞交手段，係藉由僅平行移動，來移動前述基板地 被構成的基扳搬運裝置。 若藉由依據第1狀態的發明，使用匣側輸送機從匣搬 Φ 出基板或是將基板搬入至匣，因此在該搬出搬入之際不必 將基板朝上下方向移動，且不必將移載手***至基板之間 ，因此，可縮小被積層在導線匣內的各基板間的間隔（上 下方向的間隔），就能提高前述匣之基板的收納效率。 更因使用製程側移載手將基板搬入至製程裝置或是從 製程裝置搬出基板，能回應製程裝置側的要求，不必在前 述製程裝置另外設置多關節機械手臂等，因此能將基板搬 運裝置的構成簡化，並且可縮小設置面積。 又，藉由匣側輸送機、製程側移載手以及前述基板遞 -6 - 1307675 » « (4) 父手段之基板.的移動’只是隨著改變基板之姿勢的旋轉移 動的平行移動來進彳了’因此不需要有爲了使基板旋轉（回 旋）的空間，就能縮小基板搬運裝置的設置面積。 依據本發明之第2狀態的發明，係具有：能從形成水 平而多段收納基板的厘’保持前述基板的端面或是端面附 近且朝水平方向移動而搬出前述基板，或是能保持前述基 板的端面或是端面附近且朝水平方向移動而往前述匣搬入 g 前述基板的匣側移載手、和能將前述基板朝水平方向移動 ，而往對著前述基板施行加工的製程裝置供給，或是能將 前述基板朝水平方向移動而從前述製程裝置搬出的製程側 移載手、和能在前述匣側移載手與前述製程側移載手之間 遞交前述基板的基板遞交手段；前述匣側移載手、前述製 程側移載手以及前述基板遞交手段，係藉由僅平行移動， 來移動前述基板地被構成基板搬運裝置。 若藉由第2狀態的發明，使用匣側移載手從匣搬出基 φ 板或是將基板搬入至匣，在該搬出搬入之際不必將基板朝 上下方向移動，因此使用厘側移載手來保持基板的端部對 基板進行搬出搬入，在該搬出搬入之際不必將基板朝上下 方向移動，且不必將匣側移載手深插至基板之間。因此， 可縮小積層在導線匣內之各基板間的間隔（上下方向的間 隔），就能提高前述匣之基板的收納效率。 更因從匣搬出基板或是將基板搬入到匣之際，保持前 述基板之端部來進行搬出搬入，因此能進一步避免傷及前 述基板或是前述基板被污染之虞。又’因使用製程側移載 (5) 1307675 手將基板搬入至製程裝置或是從製程裝置搬出基板， 回應製程裝置側的要求，不必在前述製程裝置另外設 關節機械手臂等，因此能將基板搬運裝置的構成簡化 且可縮小設置面積。 又’藉由匣側輸送機、製程側移載手以及前述基 交手段之基板的移動，只是隨著改變基板之姿勢的旋 動的平行移動來進行，因此不需要有爲了使基板旋轉 旋）的空間，就能縮小基板搬運裝置的設置面積。 依據本發明之第3狀態的發明，係針對第2狀態 載的基板搬運裝置中，前述匣側移載手，係具備：朝 基板之搬出搬入方向延長的滑動底座、和對前述滑動 而言，可朝前述基板之搬出搬入方向移動的移動構件 可保持前述基板，並且對前述移動構件而言，可在前 板之搬出搬入方向移動的保持構件；對前述滑動底座 >將前述保持構件移動定位自如地被構成基板搬運裝f 若藉由根據第3狀態的發明，因匣側移載手的保 件是相對於針對底座構件而移動自如的移動構件而移 如地被設置，故可極力避免因加大前述保持構件的移 程（基板的搬運行程）而增大基板搬運裝置的設置面彳 依據本發明之第4狀態的發明，係針對第1狀態 3狀態之任一狀態所記載的基板搬運裝置中，藉由前 側輸送機或是前述匣側移載手的基板之搬出搬入方向 藉由前述製程側移載手的基板之搬出搬入方向，會互 致，並且具有將以前述匣側輸送機或是前述匣側移載 故能 置多 ，並 板遞 轉移 (回 所記 -、'- X r> 即述 底座 、和 述基 而言 置。 持構 動自 動行 貝0 〜第 述匣 '和 相一 手從 -8- 1307675 » (6) 前述匣搬出的基板，或是將以前述製程側移載手從製 置搬出的基板，朝著對藉由前述匣側輸送機或是前述 移載手、前述製程側移載手的基板之搬出搬入方向所 的水平方向移動定位自如的基板移動定位手段基板搬 置。 若藉由第4狀態所記載的發明，因具備藉由前述 輸送機或是前述匣側移載手的基板的搬出搬入方向（ 0 方向）與藉由前述製程側移載手的基板的搬出搬入方 X軸方向）會互相一致，並且將基板朝Y軸方向移動 自如的基板移動定位手段’故基板搬運裝置全體的構 加簡單，並且即使匣與製程裝置在Y軸方向具有偏移 置，還是能夠在匣與製程裝置之間搬運基板。 又，以基板搬運裝置爲中間，就可在X軸方向的 部側朝Y軸方向並列的複數個匣、和在X軸方向的另 部側朝Y軸方向並列的複數個製程裝置之間，搬運基 φ 依據本發明之第5狀態的發明，係針對第丨狀態 4狀態之任一狀態所記載的基板搬運裝置中，前述基 交手段’係具備對前述匣側輸送機或是前述匣側移載 前述製程側移載手而相對性地朝上下方向移動自如的 用輸送機’並且將前述遞交用輸送機載置前述基板的 通過設置在前述製程側移載手的各缺口或是各貫通孔 此能在前述匣側輸送機或是前述匣側移載手與前述製 移載手之間遞交前述基板地被構成，或是，前述基板 手段’係具備對前述匣側輸送機或是前述匣側移載手 程裝 匣側 交叉 運裝 匣側 X軸 向（ 定位 成更 的位 ~端 一端 板。 〜第 板遞 手與 遞交 部位 ，藉 程側 遞交 與前 (7) 1307675 述製程側移載手而相對性地朝上下方向移動自如的遞交用 空氣浮動手段或是遞交用超音波浮動手段，並且將前述遞 交用空氣浮動手段或是前述遞交用超音波浮動手段載置前 述基板的部位通過設置在前述製程側移載手的各缺口或是 各貫通孔，藉此能在前述匣側輸送機或是前述匣側移載手 與前述製程側移載手之間遞交前述基板地被構成基板搬運 裝置。 $ 若藉由第5狀態所記載的發明，前述基板遞交手段具 備朝上下方向移動自如的遞交用輸送機，並且將前述遞交 用輸送機之載置基板的部位通過設置在前述製程側移載手 的各缺口或是各貫通孔，藉此可在前述匣側輸送機與前述 製程側移載手之間遞交前述基板地被構成，故能以簡單的 構成且僅朝上下方向移動來遞交基板，就能避免傷及基板 之虞。 又，若藉由第5狀態所記載的發明，因前述遞交手段 φ 是以遞交用空氣浮動手段和遞交用超音波浮動手段所構成 ，故能以簡單的構成且僅朝上下方向移動來遞交基板，並 且在移送基板之際，能進一步避免傷及前述基板或是前述 基板被污染之虞。 依據本發明之第6狀態的發明，係針對第1狀態〜第 5狀態之任一狀態所記載的基板搬運裝置中，在前述製程 側移載手的基端部側，係設有爲了支撐在前述匣側輸送機 或是前述匣側移載手與前述製程側移載手之間朝水平方向 移動的前述基板之重量的中間輸送機，或是爲了支撐在前 -10- (8) 1307675 述匣側輸送機或前述匣側移載手與前述製程側移載手之間 朝水平方向移動的基板之重量的中間空氣浮動手段或是中 間超音波浮動手段基板搬運裝置。 若藉由第6狀態所記載的發明，因設有中間輸送機， 故可一邊使用該中間輸送機來支撐基板，一邊在前述匣側 輸送機與前述遞交用輸送機之間遞交前述基板，確實地進 行基板的遞交。 | 又，若藉由第6狀態所記載的發明，因設有中間空氣 浮動手段或是中間超音波浮動手段，故同樣的可確實地進 行基板的遞交，進而在移動基板之際，可更進一步避免傷 及前述基板或是前述基板被污染之虞。 依據本發明之第7狀態的發明，係針對第1狀態〜第 6狀態之任一狀態所記載的基板搬運裝置中，前述製程側 移載手是朝上下方向並列的設有複數個基板搬運裝置。 若藉由第7狀態所記載的發明，因前述製程側移載手 φ 是朝上下方向並列的設有複數個，故能在短時間進行從製 程裝置搬出基板、將基板搬入至製程裝置的情形。 【實施方式】 [用以實施發明的最佳形態] 〔第1實施形態〕 第1圖係表示有關本發明之第1實施形態的基板搬運 裝置1的槪略構成的俯視圖，第2圖係表示基板搬運裝置 1的槪略構成的側視圖。 -11 - 1307675 • _ (9) 再者’爲了易於觀看，在第2圖中，省略其中一側（ 第1圖的下側）的側方構件3 5、移載手支撐構件3 9、中 間構件41的表示。又，本說明書中，爲了方便說明，以 水平方向之一方向爲X軸方向，以水平方向之另一方向之 垂直於前述X軸方向之方向爲Y軸方向，以鉛直方向爲Z 軸方向。 基板搬運裝置1，係爲在自如收納玻璃基板（例如電 _ 漿顯示面板和液晶顯示面板等所使用的矩形之板狀玻璃基 板）W的匣c S、和對前述玻璃基板（以下有簡稱「基板 」的情形。）W施以處理（加工）的製程裝置（於第1圖 、第2圖中並未圖示）之間搬送前述基板W的裝置，具 備匣側輸送機3與製程側移載手5。 前述匣CS，係將呈水平的基板W彼此互相梢微離開 而朝上下方向積層，就能多段收納前述基板W。 前述匣側輸送機3，係將收納在匣CS內的基板w從 Φ 存在最下方按順序朝水平方向（只朝X軸方向）直線地移 動，就能一片片搬出。又，前述匣側輸送機3’係將前述 基板W朝水平方向（只朝X軸方向）直線地移動’就能 將前述基板w —片片朝前述匣CS搬入。再者’在前述匣 CS內，從先搬入的按順序將前述基板W由上往下並排。 前述製程側移載手5，能將前述基板W —片片朝水平 方向（只朝X軸方向）直線地移動而往前述製程裝置供給 ，並且能將前述基板W —片片朝水平方向（只朝X軸方 向）直線地移動而從前述製程裝置搬出。再者’如已理解 -12- 1307675 . (10) 的，藉由前述匣側輸送機3的基板W之搬送方向與藉由 前述製程側移載手5的基板W之搬送方向會互相一致。 又，於前述基板搬運裝置1，係在前述匣側輸送機3 與前述製程側移載手5之間，設有可將前述基板W僅朝Z 軸方向移動，藉此遞交前述基板W的基板遞交手段7。 前述匣側輸送機3、前述製程側移載手5、前述基板 遞交手段7，係藉由僅平行移動前述基板W，換句話就是 不改變前述基板W的姿勢，藉由僅平行地移動前述基板 W，來移動前述基板w地構成。 前述匣側輸送機3，雖於後面詳述，但在搬出或是搬 入前述基板W之際，將前述基板W在不妨礙前述匣CS和 基板遞交手段7的位置，從上下方向夾入而移動地被構成 〇 前述基板遞交手段7，係具備對前述匣側輸送機3與 前述製程側移載手5相對性地朝上下方向移動自如的遞交 φ 用輸送機9，並且設置在前述製程側移載手5的各缺口 11 ，會通過用來載置前述遞交用輸送機9之基板的部位13, 藉此在前述匣側輸送機3與前述製程側移載手5之間，將 前述基板W僅朝Z軸方向直線性地移動進行遞交地被構 成。再者’取代前述缺口 11，亦可設置貫通孔。 在前述製程側移載手5的基端部側（匣C S側；與製 程裝置相反側），設有爲了將在前述匣側輸送機3與前述 製程側移載手5之間朝水平方向移動的前述基板W的重 量’由前述基板W之下側來支撐的中間輸送機1 9。 -13- 1307675 I · (11) 又，前述基板遞交手段7’係在前述匣側輸送機3與 前述遞交用輸送機9之間’使用設於前述製程側移載手5 (更詳細是後述的移載手支撐構件39)並且載置前述基板 W的部位15設得比前述製程側移載手5的基板載置部位 1 7 (通過路線；藉由前述製程側移載手5搬送前述基板W 時的前述基板W之下面）還高之處的中間輸送機19’而 就能在前述匣側輸送機3與前述遞交用輸送機9之間遞交 φ 前述基板W地被構成。 即，前述遞交用輸送機9的基板載置部位（藉由前述 遞交用輸送機9載置前述基板W時的前述基板W之下面 :前述遞交用輸送機9的通過路線）13，至少可在與前述 匣側輸送機3之通過路線（以前述匣側輸送機3載置前述 基板W時的前述基板W的下面）21同高度的位置、和比 前述製程側移載手5之通過路線1 7更下側的位置之間， 朝上下方向移動。 φ 例如，以滾子輸送機所構成的前述遞交用輸送機9的 各滾子23，會通過前述缺口 11而在前述範圍朝上下方向 移動。 然後，前述匣側輸送機3載置基板W，前述製程側移 載手5的通過路線1 7存在於比前述匣側輸送機3的通過 路線21還低的位置，且前述中間輸送機1 9的工件載置部 位（在前述中間輸送機19載置前述基板W時的前述基板 W之下面；前述中間輸送機1 9的通過路線）1 5成爲與前 述匣側輸送機3之通過路線21同高度時，前述遞交用輸 -14- (12) 1307675 送機9的基板職置部位i 3會成爲與前述匣側輸送機3的 通過路線21同高度’在前述中間輸送機19形成中繼而從 則述匣側輸送機3朝前述遞交用輸送機9移送基板W，該 移送後’前述遞交用輸送機9的通過路線13會降到比前 述製程側移載手5的通過路線i 7還低的位置，藉此就能 從前述匣側輸送機3朝前述製程側移載手5遞交前述基板 W。 另一方面’前述製程側移載手5載置基板W，前述製 程側移載手5的通過路線丨7保持在比前述匣側輸送機3 的通過路線21還低的位置，且前述中間輸送機1 9的通過 路線1 5成爲與前述匣側輸送機3之通過路線2丨同高度時 ’使保持在比前述製程側移載手5的通過路線1 7還低之 位置的前述遞交用輸送機9，上昇到與前述匣側輸送機3 的通過路線21同高度，將前述製程側移載手5所載置的 基板W’藉由前述遞交用輸送機9而載置，將該遞交用輸 送機9所載置的基板W，在前述中間輸送機19進行中繼 朝前述匣側輸送機3進行移送，藉此從前述製程側移載手 5朝前述匣側輸送機3遞交前述基板W。 在此針對前述基板搬運裝置1做更詳細說明。 前述匣CS的槪略外觀構成長矩形狀，於γ軸方向的 兩端部具備側構件C S 1。在前述各側構件C S 1之間，張設 有爲了在前述匣C S內載置且收納複數個基板w的線狀構 件（例如導線；圖未表示）。 於z軸方向爲同位置（同高度）在X軸方向隔著特定 -15- (13) 130767.5 間隔朝Y軸方向延伸而設有複數個前述導線，藉此形成能 支撐（載置）一片基板W的一個導線群。 前述導線群是在Ζ軸方向隔著特定的小間隔而設有複 數個，藉此前述匣CS就能將基板W以水平而多段地收納 。並有將像這樣所構成的匣CS稱爲導線匣的情形。 又，在前述匣CS的X軸方向之一側面（設有前述製 程側移載手5這側的面），設有使前述基板w出入自如 瞻 的開口部。 再者，也可取代前述導線匣CS，採用普通的匣（藉 由設置在Υ軸方向之兩端部的支撐構件來支撐前述基板W 之構成的匣）。 前述導線匣CS，使用圖未表示的堆高式起重機和高 架起重機來載置圖未表示的匣載置裝置，而移動定位在ζ 軸方向。 前述匣側輸送機3，係例如以滾子輸送機所構成，具 φ 備旋轉自如地設置在立設於設置在地板上的底座構件24 的複數個滾子支撐構件25的上端部的複數個滾子27。 前述各滾子支撐構件25，係在X軸方向隔著特定的間 隔而立設。然後’將前述導線匣CS載置在前述匣載置裝 置’且將前述導線匣CS朝上下移動的話，在未收納基板 W的狀態’前述各滾子27與前述各滾子支撐構件25會進 入到述導線匣C S的各導線之間。即，前述各滾子2 7與 前述各滾子支撐構件25，會以不與前述導線匣CS和前述 匣移載裝置發生干涉的進入到前述導線匣CS內。 -16- (14) 1307675 前述匣側輸送機3的各滾子27，係以朝γ軸方向 伸的中心軸爲旋轉中心，並透過皮帶和鏈條等的動力傳 構件，藉由馬達等的引動器進行旋轉來搬送基板w。前 各滾子2 7的上端部則形成前述匣側輸送機3的通過路 2卜 再者’前述各滾子2 7之中，位於最一側部側（中間 送機19側）的滾子27A，係設於未進入到前述匣CS內 _ 位置。又’在前述滾子2 7A的上方，設有滾子26。該 子26,係可藉由圖未表示的馬達等的引動器旋轉，並且 由圖未表75的流體壓力缸（fluid pressure cylinder)等的 動器，對滾子27A進行靠近、背離之方向（Z軸方向） 如地移動。 然後’搬出或是搬入前述基板W之際，能將前述 板W藉由滾子27A與滾子26從上下方向夾入而移動。 者，也可取消爲了旋轉驅動滾子26的引動器，將滾子 φ 構成自由地旋轉。 在前述匣側輸送機3的X軸方向的一側部，設有製 側移載手5。該程側移載手5，係槪略外觀爲長矩形狀 形成薄板狀，並且厚度方向爲Z軸方向地被設置。又， 前述製程側移載手5之X軸方向的前端部（與設有匣側 送機3之側相反側的端部）直至X軸方向的基端部側， 在Y軸方向隔著特定間隔而形成複數個矩形狀的缺口 。像這樣藉由形成缺口 1 1，也就是說前述製程側移載手 被形成齒梳狀。 延 達 述 線 輸 的 滾 藉 引 白 基 再 26 程 而 從 輸 係 -17- 11 (15) 1307675 又，在基板搬運裝置1，係設有將藉由前述匣側 機3從前述匣CS被搬出的基板W，或是將藉由前述 側移載手5從製程裝置被搬出的基板W，移動自如定 對藉由前述匣側輸送機3、前述製程側移載手5之基 搬出入方向（X軸方向）形成交叉之水平方向（例如 的Y軸方向）的基板移動定位手段3 0。 若更詳的說明，在前述底座構件24之鄰（X軸 p 之一側部側）的地板面，設有底座構件2 9，透過設置 底座構件29的導軌31，將基台33朝Y軸方向自如 動。前述基台33，係透過圖未表示的滾珠螺桿等的動 達手段並藉由圖未表示的馬達等的引動器朝Y軸方向 地定位。 在前述基台33的Y軸方向的兩端部，一體地立 各側方構件3 5。在前述各側方構件3 5的內側，係透 體設置在前述各側方構件3 5的導軌3 7，朝Z軸方向 φ 自如地設有移載手支撐構件39。前述移載手支撐構f ，係透過圖未表示的滾珠螺桿等的動力傳達手段並藉 未表示的馬達等的引動器朝Z軸方向自如地定位。 在前述移載手支撐構件3 9的內側，朝X軸方向 自如地設有中間構件4 1。更在前述中間構件4 1的內 朝X軸方向移動自如地設有前述製程側移載手5。進 前述製程側移載手5，係透過圖未表示的滾珠螺桿等 力傳達手段並藉由圖未表示的馬達等的引動器朝X軸 (與前述匣側輸送機3相反側的方向），從前述移載 輸送 製程 位在 板的 正交 方向 在該 地移 力傳 自如 設有 過一 移動 _ 39 由圖 移動 側， 而， 的動 方向 手支 -18- 1307675 . (16) 撐構件3 9至第1圖和第2圖以假想線所示的位置形成突 出而移動自如地定位。 又，在前述匣側輸送機3的X軸方向的一側部側，設 有遞交用輸送機9。該遞交用輸送機9，係如前述地例如 以滾子輸送機所構成，該滾子輸送機的通過路線1 3，係移 動自如地定位在Z軸方向。 若更詳細的說明，在前述移載手支撐構件3 9、前述中 0 間構件4 1、前述製程側移載手5的下側，係透過一體設置 在前述各側方構件3 5的導軌3 7，而朝Z軸方向移動自如 地設有遞交用輸送機底座構件43。前述遞交用輸送機底座 構件43，係透過圖未表示的滾珠螺桿等的動力傳達手段並 藉由圖未表示的馬達等的引動器（與用來驅動前述移載手 支撐構件3 9的引動器相異的引動器）朝z軸方向自如地 定位。 在前述遞交用輸送機底座構件43之上，係在Y軸方 φ 向隔著特定間隔而設有複複個滾子支撐構件45，在該滾子 支撐構件4 5的上端部，旋轉自如地設有複數個滾子2 3。 然後’若對前述移載手支撐構件39，將前述遞交用輸 送機底座構件43相對性地朝上下方向移動，前述滾子支 撐構件45和前述遞交用輸送機9的滾子23，會通過前述 製程側移載手5的缺口 π而移動。 即，前述遞交用輸送機9的通過路線13，至少會在從 前述製程側移載手5背離下方的特定位置與前述匣側輸送 機3的通過路線2 1之間進行移動。 -19- (17) 1307675 Y 的 板 刖 中 上 5 載 延 達 者 4 7 下 述 5 位 匣 所 再者，前述遞交用輸送機9的各滾子23，係以朝 軸方向延伸的中心軸爲旋轉中心，並透過皮帶和鏈條等 動力傳達構件，藉由馬達等的引動器進行旋轉來搬送基 W。 在前述製程側移載手5的另一端部側（基端部側； 述匣側輸送機3與前述各缺口 U之間），設有前述的 間輸送機（例如滾子輸送機）1 9。 前述中間輸送機19的各滾子47，乃對厚度方向朝 下方向地被設置的矩形之板狀的滾子支撐構件48而言 旋轉自如，前述滾子支撐構件48，係一體設置在前述移 手支撐構件39。因此，前述中間輸送機19的各滾子47 對前述移載手支撐構件39而言，旋轉自如。 前述中間輸送機19的各滾子47，係以朝Y軸方向 伸的中心軸爲旋轉中心，並透過皮帶和鏈條等的動力傳 構件，藉由馬達等的引動器進行旋轉來搬送基板W。再 ，也可取消爲了旋轉驅動前述中間輸送機19之各滾子 的裝置（前述皮帶和引動器等）。 前述製程側移載手5，係在前述滾子支撐構件48的 側而離開前述滾子支撐構件4 8被設置。又，未形成前 製程側移載手5之缺口 1 1的部位，在前述製程側移載手 未朝製程裝置側延伸的狀態（第2圖所示的狀態），是 在前述滾子支撐構件4 8的下側。 如上所述，藉由設置有中間輸送機1 9，就能支撐在 側輸送機3與製程側移載手5 (遞交用輸送機9)之間 -20- (18) 1307675 移動的基板W之重量。 其次，針對基板搬運裝置1的動作做說明。 第3圖〜第7圖係表示基板搬運裝置1之動作的側視 圖。再者，第6圖係爲第7圖所示之狀態下的俯視圖。 說明有關將基板W從匣CS搬運到製程裝置（處理裝 置）的情形。 首先，如第2圖所示，收納基板W的匣CS是位在匣 φ 側輸送機3的上方，匣側輸送機3的通過路線21與中間 輸送機19的通過路線15是位在同高度，遞交用輸送機9 的通過路線1 3是位在比製程側移載手5的通過路線1 7更 下方。 在該狀態，前述匣CS所載置的基板W之中保存在最 下側的基板W，直到接觸到前述匣側輸送機3的滾子27 前，前述匣CS會向下方移動，並且前述中間輸送機19的 通過路線15與前述遞交用輸送機9的通過路線13互相一 φ 致之前，前述遞交用輸送機底座構件43會上昇（參照第3 圖）。 接著，保存在前述最下方的基板W，載置在前述遞交 用輸送機9之前，驅動前述各輸送機3、19、9來移動基 板W(參照第4圖）。像這樣來移動基板W時，藉由前 述滾子27A與前述滾子26來夾入基板W。 接著，將遞交用輸送機底座構件43降下來，將前述 遞交用輸送機9所載置的基板W藉由製程側移載手5來 載置（參照第5圖）。 -21 - (19) 1307675 接著’將前述製程側移載手5和前述中間構件4丨延 伸出，而將基板W搬入到製程裝置（參照第6圖、第7 圖）。 再者’即使前述製程側移載手5和前述中間構件4 1 延伸出，旋轉自如的前述中間輸送機1 9不會移動，但將 前述中間輸送機19設置在前述製程側移載手5，當前述製 程側移載手5和前述中間構件4 1延伸出時，前述中間輸 送機19也可以同時移動。 前述搬入後，會將前述製程側移載手5和前述中間構 件41引進，並且前述匣側輸送機3的滾子27接觸到被載 置在前述匣CS的下一個基板（前述匣CS所載置的基板 W之中保存在最下側的基板）W之前，降下前述匣CS， 進行前述下一個基板W的搬出。 在從前述製程裝置對前述匣C S搬運基板W的情形， 是藉由大致與前述動作相反的動作來進行基板W的搬運 〇 若藉由基板搬運裝置1，使用匣側輸送機3從匣CS 來搬出基板W或是對匣CS搬入基板W，因此在該搬出、 搬入之際，基板W不必朝上下方向移動，且移載手不必 ***到基板之間，因此可縮小積層在導線匣CS內的各基 板w間的間隔（上下方向的間隔），就能提高前述匣CS 之基板的收納效率。 又，使用製程側移載手5對製程裝置搬入基板W，或 是從製程裝置搬出基板W，能回應製程裝置側的要求，就 -22- (20) 1307675 不必在前述製程裝置另外設置多關節機械手臂等，因此可 簡化基板搬運裝置1的構成，並且可縮小設置面積。 更藉由匣側輸送機3、製程側移載手5以及基板遞交 手段7的基板W之移動（搬送），只是隨著改變基板W 之姿勢的旋轉移動的平行移動，因此不需要有爲了使基板 W旋轉（回旋）的空間，就能縮小基板搬運裝置1的設置 面積。 若更詳細的說明，使矩形狀的基板W以該中心（通 過中心朝Z軸方向延伸的軸）爲回旋中心而回旋的話，該 回旋所需要的空間，至少須要以基板W之對角線爲直徑 之圓的程度。進而，若回旋中心偏離基板W的中心，回 旋所需要的空間會更大，並且藉由因回旋所產生的角加速 度（接線加速度）和向心加速度（法線加速度），基板W 的位置有產生偏離之虞。 對此，僅平行移動來移動基板W的話，爲了使基板 W回旋之際所要的空間就不需要，因此能縮小基板搬運裝 置1的設置面積。進而因回旋使基板W偏位之虞就能避 免。 如前所述，如果能縮小基板搬運裝置1的設置面積’ 在無塵室內使用基板搬運裝置1之際，就能縮小如高價設 備之無塵室那類設備的大小。又，不必將基板w回旋’ 因此就不需要有如前所述爲了使基板W回旋的機構。 可是，使大的基板w回旋的機構，一般是構成透過 藉由齒輪等所構成的減速機並藉由馬達等的引動器使載置 -23- (21) 1307675 基板的載置台回旋。在該構成中因存在有齒輪的背隙，爲 了將前述載置台正確地指標定位，需要有利用定位插銷等 的定位機構，基板搬運裝置的構成變得很煩雜。進而，爲 了防止因基板W之回旋產生的基板W之位移和因利用前 述定位插銷之載置台定位時所發生的驟變的基板W之位 移，產生前述載置台和前述定位插鎖需要慢慢的作動，使 基板W的搬送效率下降。 p 有關本發明的基板搬運裝置1，因不需要基板W的回 旋機構，故構成變簡單，又，因不使基板W回旋，故沒 有基板回旋時之基板W的偏移，能加快基板W的搬運速 度，還能提高基板W的搬運效率。 又，若藉由基板搬運裝置1，將基板W搬出或是搬入 之際，藉由滾子26與滾子27A將基板W從上下方向夾入 而移動地構成，因此即使對基板W施加較大的力來搬運 (即使施加於基板W的加速度（包含負的加速度）很大 φ )，還是能抑制在基板W與匣側輸送機3之間發生滑動 之虞，就能快速的搬運基板W。 又，若藉由基板搬運裝置1，前述基板遞交手段7, 係具備朝上下方向移動自如的遞交用輸送機9，並且設置 在前述製程側移載手5的各缺口 11，會通過用來載置前述 遞交用輸送機9之基板W的部位，藉此就能在前述匣側 輸送機3與前述製程側移載手5之間遞交基板W地被構 成，因此以簡單的構成且僅朝上下方向移動就能遞交基板 W，傷及基板W之虞就能避免。 -24- (22) 1307675 又，若藉由基板搬運裝置1，因設有中間輸送機19, 就能使用該中間輸送機19 一邊支撐基板W，一邊在前述 匣側輸送機3與前述遞交用輸送機9之間遞交基板W，確 實地進行基板W的遞交。 再者，如已理解的，製程側移載手5之未設缺口 11 的缺口非形成部位’不可或缺的一定要將爲了互相隔著間 隔而設置的各載置部位（設有缺口 11的部位）連繫成一 _ 體。 另一方面，在製程側移載手5的前述缺口非形成部位 ，構成遞交手段7的各滾子47無法通過，因此在前述缺 口非形成部位就不設遞交手段7。 因此假設不設中間輸送機19的話，對存在於匣CS與 製程側移載手5之載置部位之間的前述缺口非形成部位， 就不會設置從下方支撐用來在匣CS與前述製程側移載手 5之間移動基板W的手段，被搬運的基板W會因重力而 φ 撓曲等，基板有不能順利搬運之虞。 但是，在基板搬運裝置1，因設有中間輸送機19，即 使在前述缺口非形成部位，還是可由下方支撐基板W，就 能避免基板搬運時因重力使基板W撓曲的情形，可順利 地搬運基板W。 又，若藉由基板搬運裝置1，因具備藉由匣側輸送機 3的基板W之搬出入方向（X軸方向）與藉由前述製程側 移載手5的基板W之搬出入方向（X軸方向）互相一致 ，並且將基板w朝Y軸方向移動定位自如的基板移動定 -25- (23) (23)1307675 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a substrate transfer apparatus, and more particularly to a crucible that is accommodated by laminating a substrate using a conveyor and a transfer hand, and is applied to the substrate. The substrate is transported between the process devices. [Prior Art] Conventionally, it has been known that a crucible is placed on a glass substrate used for a laminated plasma display panel or the like, and a transfer hand is inserted from a predetermined position placed on the mounting table. The transfer substrate is taken out of a glass substrate existing at any position of the above-mentioned crucible, and the taken-out glass substrate is replaced with a processing device placed on a roller conveyor and subjected to processing such as printing on the glass substrate. The substrate transfer device (for example, refer to Japanese Laid-Open Patent Publication No. 2002-166703). However, in the above-described conventional substrate transfer device, when a glass substrate is taken out from a crucible using a transfer hand, a transfer hand is inserted between the glass substrates, and after the insertion, the transfer hand is relatively opposed to the glass substrate. When the glass substrate belonging to the transfer target is lifted up, the support portion of the crucible supporting the glass substrate is separated from the glass substrate, and the substrate is placed on the transfer hand. After the placement, the transfer carrier is placed. Moving outside the aforementioned crucible, the glass substrate was taken out from the aforementioned crucible. Therefore, in order to insert the transfer hand between the glass substrates and slightly lift the space of the glass substrate belonging to the transfer target, the interval between the upper and lower directions of the glass substrates stacked in the crucible needs to be some degree, and then - 4- (2) 1307675 There is a problem that the distance between the upper and lower sides of each of the glass substrates in the crucible is large, and the number of sheets of the glass substrate is reduced, and the efficiency of the glass substrate is lowered. In addition, when the glass substrate is enlarged, the portion extending from the transfer hand is enlarged, and the glass substrate is carried out from the crucible, and when the glass substrate is slightly lifted, the glass substrate is bent (the one that protrudes from the transfer hand and is in contact with the support portion of the crucible) When the deflection is large, the glass substrate is further lifted away from the aforementioned support of the crucible, so that the above problem is more conspicuous. On the other hand, in the conventional substrate transfer device, the glass substrate is used by a roll conveyor. Moving into the process unit, there are many situations in which the transfer of the transfer hand is sought in the process unit side. In other words, for example, the portion of the processing device for the substrate processing is separated from the outside by the cover plate, and when the substrate is carried in, it is necessary to open a part of the cover plate that is openable and closable to the substrate, so that it is difficult to use the roller. The disadvantage of the case where the conveyor is moved into the glass substrate toward the process. In order to compensate for the above-mentioned drawbacks, if a multi-joint robot arm or the like is provided between the roller conveyor and the forward device, the configuration for transporting the substrate becomes complicated, and the installation area of the substrate transfer device is widened. The same problem occurs even if the substrate is made of a material other than glass. The present invention is directed to a substrate transfer device for transporting a crucible from a substrate and a substrate to a substrate, and an object of the invention is to provide a substrate that can improve the storage of the crucible. In the case of the splicing of the scorpion, the storage efficiency of the substrate (3) 1307675, which is a problem of the above-described loading device, is simple, and the substrate conveying device can be reduced in size. According to the invention of the first aspect of the present invention, the substrate can be moved in a horizontal direction by a plurality of stages of the substrate, and the substrate can be carried out, or can be moved in the horizontal direction, and the substrate can be carried into the substrate. And the side of the processing device that can move the substrate in the horizontal direction to the substrate, or the process side that can move the substrate in the horizontal direction and be carried out from the processing device a transfer hand; and a substrate delivery means capable of delivering the substrate between the side conveyor and the process side shifting hand; the side conveyor, the process side shifting hand, and the substrate delivery means are The base plate transporting device configured to move the aforementioned substrate only in parallel. According to the invention of the first aspect, the substrate is transported from the crucible by the side conveyor or the substrate is carried into the crucible. Therefore, it is not necessary to move the substrate in the vertical direction during the loading and unloading, and it is not necessary to transfer the carrier. Since it is inserted between the substrates, the space between the substrates (the space in the vertical direction) stacked in the lead turns can be reduced, and the storage efficiency of the substrate can be improved. Moreover, the use of the process side shifting carrier to carry the substrate into the process device or to carry out the substrate from the process device can respond to the requirements of the process device side, and it is not necessary to additionally provide a multi-joint robot arm or the like in the process device, so that the substrate transfer device can be The composition is simplified and the set area can be reduced. In addition, by the side conveyor, the process side shifting hand and the aforementioned substrate transfer -6 - 1307675 » « (4) the parent means of the substrate. The movement 'only moves in parallel with the parallel movement of the rotational movement of changing the posture of the substrate. Therefore, there is no need to have a space for rotating (rotating) the substrate, and the installation area of the substrate transfer device can be reduced. According to the invention of the second aspect of the present invention, the substrate can be carried out by holding the end surface of the substrate or the end surface of the substrate from a plurality of stages of the substrate, and moving the substrate in the horizontal direction or holding the substrate. The end surface or the end surface is moved in the horizontal direction, and the side of the substrate is loaded into the substrate, and the substrate is moved in the horizontal direction, and is supplied to the processing device for processing the substrate, or a process side transfer carrier capable of moving the substrate in a horizontal direction and being carried out from the processing apparatus, and a substrate delivery means capable of delivering the substrate between the side transfer hand and the process side transfer hand; The transfer hand, the process side shifting hand, and the substrate transfer means are configured to move the substrate by moving only in parallel to form a substrate transfer device. According to the invention of the second aspect, the φ side transfer carrier is used to carry out the base φ plate from the crucible or the substrate is carried into the crucible, and it is not necessary to move the substrate in the vertical direction when the loading and unloading is performed. The end portion of the substrate is held in and out of the substrate, and it is not necessary to move the substrate in the vertical direction during the loading and unloading, and it is not necessary to deeply insert the side transfer hand between the substrates. Therefore, the space between the substrates (the space in the vertical direction) stacked in the lead wire can be reduced, and the storage efficiency of the substrate can be improved. Further, when the substrate is carried out from the crucible or the substrate is carried into the crucible, the end portion of the substrate is held and carried in, so that it is possible to further prevent the substrate or the substrate from being contaminated. In addition, by using the process side transfer (5) 1307675, the substrate is carried into the process device or the substrate is removed from the process device, and in response to the requirements of the process device side, it is not necessary to provide a joint robot arm or the like in the process device. The configuration of the conveying device is simplified and the installation area can be reduced. Further, the movement of the substrate by the side conveyor, the process side shifting hand, and the base transfer means is performed only by the parallel movement of the rotation of the substrate, so that it is not necessary to rotate the substrate. The space can reduce the installation area of the substrate handling device. According to a third aspect of the invention, in the substrate transport device of the second aspect, the side transfer hand includes a slide base extending in a direction in which the substrate is carried in and out, and the sliding portion is a moving member that can move in the loading/unloading direction of the substrate can hold the substrate, and the moving member can move the holding member in the loading/unloading direction of the front plate; and the sliding base can move the holding member According to the invention of the third aspect, the retaining member for the armrest transfer hand is disposed so as to be movable relative to the moving member for the base member, so that it can be avoided as much as possible. In the fourth aspect of the present invention, the substrate according to the fourth aspect of the present invention is used to increase the mounting distance of the holding member (the conveyance stroke of the substrate). In the transport device, the substrate of the front side conveyor or the substrate of the front side transfer carrier is moved by the process side In the direction of loading and unloading, it will be mutually reciprocal, and it will be able to be moved by the above-mentioned side conveyor or the side of the rafter, and the board will be transferred (return to the record -, '- X r>, the base, and the description In the case of the base, the automatic movement of the shell 0 to the first 匣' and the phase of the hand from the -8- 1307675 » (6) The substrate carried out by the above-mentioned ,, or the hand-loaded hand from the manufacturing process The substrate is moved toward the substrate moving positioning means substrate that is movable in the horizontal direction of the loading/unloading direction of the substrate by the side conveyor or the transfer hand and the process side transfer carrier. In the invention according to the fourth aspect, the loading/unloading direction (0 direction) of the substrate by the conveyor or the side transfer carrier and the loading and unloading side X of the substrate by the process side are provided. Since the direction of the substrate is the same as that of the substrate moving the positioning means in the Y-axis direction, the construction of the entire substrate transfer device is simple, and even if the 匣 and the process device are offset in the Y-axis direction, it is possible to versus Conveying the substrate between the drive means. Further, in the middle of the substrate transfer device, a plurality of ridges arranged in the Y-axis direction on the portion side in the X-axis direction and a plurality of process devices arranged in the Y-axis direction on the other side in the X-axis direction can be arranged. In the substrate transfer device according to the fifth aspect of the present invention, in the substrate transport device according to the fifth aspect of the present invention, the base transfer means includes the side conveyor or the side a conveyor for transporting the above-described process side shifting carrier and relatively freely moving in the up and down direction, and placing the substrate on the delivery conveyor with the gaps provided in the process side transfer carrier or each through The hole may be configured to transfer the substrate between the side conveyor or the side transfer hand and the transfer carrier, or the substrate means may be provided to the side conveyor or the aforementioned匣 移 手 手 手 手 X X X X X X X X X ( ( ( ( ( X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X X Load And the transfer air floating means or the ultrasonic wave floating means for moving in the up-and-down direction, and the portion for placing the substrate by the delivery air floating means or the ultrasonic wave floating means for delivery The process side shifting the notches of the hand or the through holes, thereby forming the substrate carrying device by transferring the substrate between the side conveyor or the side transfer hand and the process side carrier According to the invention of the fifth aspect, the substrate delivery means includes a delivery conveyor that is movable in the vertical direction, and the portion on which the substrate is placed on the delivery conveyor is placed on the process side. The notches or the through holes of the hand can be configured to transfer the substrate between the side conveyor and the process side carrier, so that the substrate can be delivered in a simple configuration and only in the vertical direction. In addition, according to the invention described in the fifth aspect, the delivery means φ is the delivery air. Since the moving means and the delivery are constituted by the ultrasonic floating means, the substrate can be delivered with a simple configuration and moving only in the vertical direction, and when the substrate is transferred, it is possible to further prevent the substrate or the substrate from being contaminated. According to the invention of the sixth aspect of the present invention, in the substrate transfer device according to any one of the first state to the fifth state, the base end portion side of the process side transfer carrier is provided for supporting The intermediate conveyor of the weight of the substrate moving horizontally between the side conveyor or the side transfer hand and the process side shifting hand, or for supporting the front -10- (8) 1307675 The intermediate air floating means or the intermediate ultrasonic floating means substrate carrying means of the weight of the substrate moving between the side conveyor and the side shifting hand in the horizontal direction. According to the invention described in the sixth aspect, since the intermediate conveyor is provided, the substrate can be delivered between the side conveyor and the delivery conveyor while supporting the substrate using the intermediate conveyor. Submission of the substrate is performed. Further, according to the invention described in the sixth aspect, since the intermediate air floating means or the intermediate ultrasonic floating means is provided, the substrate can be reliably delivered in the same manner, and further, when the substrate is moved, the substrate can be further moved. It is avoided to damage the substrate or the substrate to be contaminated. According to a seventh aspect of the invention, in the substrate transfer device according to any one of the first to sixth aspects, the process side transfer carrier is provided with a plurality of substrate transfer devices arranged in the vertical direction. . According to the invention of the seventh aspect, since the plurality of the process side shifting hand φ are arranged in the vertical direction, the substrate can be carried out from the process device and the substrate can be carried into the process device in a short time. . [Embodiment] [First Embodiment] FIG. 1 is a plan view showing a schematic configuration of a substrate transfer device 1 according to a first embodiment of the present invention, and FIG. 2 is a plan view showing a schematic configuration of the substrate transfer device 1 according to the first embodiment of the present invention. A side view of a schematic configuration of the substrate transfer device 1. -11 - 1307675 • _ (9) Further, in order to facilitate viewing, in FIG. 2, the side member 35 of one side (the lower side of FIG. 1), the transfer hand supporting member 39, and the middle are omitted. Representation of member 41. In the present specification, for convenience of explanation, one direction in the horizontal direction is the X-axis direction, and the direction perpendicular to the X-axis direction in the other direction in the horizontal direction is the Y-axis direction, and the vertical direction is the Z-axis direction. The substrate transfer device 1 is a cover plate for arranging a glass substrate (for example, a rectangular plate-shaped glass substrate used for an electro-plasma display panel or a liquid crystal display panel) W, and the glass substrate (hereinafter referred to as " In the case of the substrate, the apparatus for transporting the substrate W between the processing devices (not shown in the first drawing and the second drawing) is provided, and the side conveyor 3 and the process side shift are provided. Hand 5 . In the above-described 匣CS, the substrates W are horizontally separated from each other and stacked in the vertical direction, so that the substrate W can be accommodated in a plurality of stages. In the above-described side conveyor 3, the substrate w accommodated in the crucible CS is linearly moved in the horizontal direction (only in the X-axis direction) from the lowest position of Φ, and can be carried out in one piece. Further, the side conveyor 3' linearly moves the substrate W in the horizontal direction (only in the X-axis direction), so that the substrate w-sheet can be carried into the 匣CS. Further, in the 匣CS, the substrate W is placed side by side from the top to the bottom. The process side shifting hand 5 can linearly move the substrate W-sheet in a horizontal direction (only in the X-axis direction) to the processing apparatus, and can move the substrate W to a horizontal direction (only Moved linearly in the X-axis direction and carried out from the above-described process device. Furthermore, as already understood -12- 1307675.  (10), the conveyance direction of the substrate W of the side conveyor 3 and the conveyance direction of the substrate W by the process side transfer hand 5 coincide with each other. Further, in the substrate transfer device 1, a substrate that can move the substrate W only in the Z-axis direction and deliver the substrate W is provided between the side conveyor 3 and the process side transfer hand 5 Submit means 7. The side conveyor 3, the process side shifting hand 5, and the substrate delivery means 7 move the substrate W only in parallel, in other words, without changing the posture of the substrate W, by moving only the aforementioned The substrate W is configured to move the substrate w. In the above-described side conveyor 3, when the substrate W is carried out or carried in, the substrate W is moved in the vertical direction without hindering the position of the 匣CS and the substrate delivery means 7. The substrate delivery means 7 is provided with a delivery φ conveyor 9 that is movable in the vertical direction relative to the side conveyor 5 and the process side transfer hand 5, and is disposed in the process side shift Each of the notches 11 of the hand 5 passes through a portion 13 on which the substrate of the delivery conveyor 9 is placed, whereby the substrate W is interposed between the first side conveyor 3 and the process side transfer hand 5 It is configured to move only linearly in the Z-axis direction and to deliver. Further, instead of the notch 11, a through hole may be provided. The base end portion side (匣CS side; opposite to the processing device) of the process side shifting hand 5 is provided to move in the horizontal direction between the first side conveyor 3 and the process side transfer hand 5 The weight of the aforementioned substrate W is 'intermediate conveyor 19 supported by the lower side of the aforementioned substrate W. -13- 1307675 I (11) Further, the substrate delivery means 7' is disposed between the side conveyor 3 and the delivery conveyor 9 by using the process side transfer hand 5 (more specifically described later) The transfer hand support member 39) and the portion 15 on which the substrate W is placed are disposed more than the substrate placement portion 17 of the process side transfer carrier 5 (passing the route; the substrate is transferred by the process side transfer carrier 5) The intermediate conveyor 19' at the upper portion of the substrate W at the time of W can be configured to deliver φ the substrate W between the side conveyor 3 and the delivery conveyor 9. In other words, the substrate placement portion of the delivery conveyor 9 (the lower surface of the substrate W when the substrate W is placed on the delivery conveyor 9: the route of the delivery conveyor 9) 13 can be at least a position at the same height as the passage of the side conveyor 3 (the lower surface of the substrate W when the substrate W is placed on the side conveyor 3) and the passage 1 of the carrier side 5 of the process side 7 Moves up and down between the lower positions. φ For example, the rollers 23 of the delivery conveyor 9 constituted by the roller conveyor are moved in the vertical direction by the notch 11 in the above range. Then, the side conveyor 3 carries the substrate W, and the passage 17 of the process side shifting hand 5 is present at a position lower than the passage 21 of the side conveyor 3, and the intermediate conveyor 19 The workpiece mounting portion (the lower surface of the substrate W when the intermediate conveyor 19 is placed on the substrate W; the passage of the intermediate conveyor 19) 15 is the same as the passage 21 of the side conveyor 3 At the height, the substrate placement portion i 3 of the delivery 14-(12) 1307675 delivery machine 9 is formed at the same height as the passage 21 of the side conveyor 3 to form a relay on the intermediate conveyor 19. Then, the side conveyor 3 transfers the substrate W to the delivery conveyor 9, and after the transfer, the passage 13 of the delivery conveyor 9 is lowered to be lower than the passage i7 of the process side shifting hand 5 By this, the substrate W can be delivered from the above-described side conveyor 3 toward the process side transfer hand 5. On the other hand, the above-described process side shifting hand 5 mounts the substrate W, and the passing path 7 of the process side shifting hand 5 is held at a position lower than the passing path 21 of the side conveyor 3, and the intermediate conveyance is performed. When the passage 15 of the machine 19 becomes the same height as the passage 2 of the side conveyor 3, the delivery of the delivery is maintained at a position lower than the passage 17 of the process side shifting hand 5 The machine 9 is raised to the same height as the passage 21 of the above-described side conveyor 3, and the substrate W' placed on the process side transfer hand 5 is placed by the delivery conveyor 9, and the delivery is performed. The substrate W placed on the conveyor 9 is transferred to the side conveyor 3 by the intermediate conveyor 19, whereby the substrate W is delivered from the process side transfer hand 5 to the side conveyor 3. . The substrate transfer device 1 described above will be described in more detail. The outline of the 匣CS has a long rectangular shape, and side members C S 1 are provided at both end portions in the γ-axis direction. Between each of the side members C S 1 , a linear member (for example, a wire; not shown) for placing and accommodating a plurality of substrates w in the 匣C S is stretched. The same position (same height) in the z-axis direction is separated by a specific -15- (13) 130767 in the X-axis direction. 5 A plurality of the aforementioned wires are provided to extend in the Y-axis direction, thereby forming a wire group capable of supporting (mounting) one substrate W. The plurality of wire groups are provided in a plurality of predetermined small intervals in the z-axis direction, whereby the substrate W can be stored in a plurality of stages in a horizontal direction. There is a case where the 匣CS constituted as described above is referred to as a wire 匣. Further, on one side surface of the 匣CS in the X-axis direction (the surface on the side where the process side transfer carrier 5 is provided), an opening portion for allowing the substrate w to be taken in and out is provided. Further, instead of the above-described lead wire CS, a conventional crucible (a crucible that supports the substrate W by a supporting member provided at both end portions in the z-axis direction) may be used. The lead wire CS is placed on the side of the yoke by a stacking crane (not shown) and a shovel mounting device (not shown). The above-described side conveyor 3 is constituted by, for example, a roller conveyor, and is provided with a plurality of φ rotatably provided at an upper end portion of a plurality of roller supporting members 25 that are erected on a floor member 24 provided on the floor. Roller 27. Each of the roller supporting members 25 is erected in a predetermined interval in the X-axis direction. Then, when the wire cymbal CS is placed on the cymbal mounting device and the wire cymbal CS is moved up and down, the respective rollers 27 and the roller support members 25 enter the state in which the substrate W is not accommodated. Between the wires of the wire 匣CS. In other words, each of the rollers 27 and the roller support members 25 enters the lead wire CS without interfering with the lead wire CS and the first transfer device. -16- (14) 1307675 Each of the rollers 27 of the side conveyor 3 is a center of rotation extending in the γ-axis direction, and transmits a power transmission member such as a belt or a chain, and is driven by a motor or the like. The device rotates to transport the substrate w. The upper end portion of the front roller 27 is formed with the passage 2 of the above-described side conveyor 3, and the roller on the most side (the side of the intermediate feed 19) among the aforementioned rollers 2 7 27A, is set to not enter the 匣CS _ position. Further, a roller 26 is provided above the roller 2 7A. The sub-stage 26 is rotatable by an actuator such as a motor (not shown), and the roller 27A is moved closer to and away from the actuator such as a fluid pressure cylinder (not shown in Table 75). Z-axis direction) Moves as ground. Then, when the substrate W is carried out or carried in, the plate W can be moved by the roller 27A and the roller 26 from the vertical direction. Alternatively, the roller φ can be freely rotated to cancel the actuator for rotating the roller 26. A side transfer hand 5 is provided on one side of the side conveyor 3 in the X-axis direction. The side shifting hand 5 is formed in a long rectangular shape and formed into a thin plate shape, and the thickness direction is set in the Z-axis direction. Further, the distal end portion of the process side shifting hand 5 in the X-axis direction (the end opposite to the side on which the side of the side conveyor 3 is provided) is on the side of the proximal end portion in the X-axis direction, and is interposed in the Y-axis direction. A plurality of rectangular notches are formed at intervals. Thus, by forming the notch 1 1, that is, the aforementioned process side shifting hand is formed into a toothed comb shape. The extension of the line is transferred by the white base and then from the transmission system -17-11 (15) 1307675. Further, in the substrate conveying device 1, the side conveyor 3 is provided by the aforementioned side machine 3 from the aforementioned 匣CS. The substrate W that has been carried out or the substrate W that has been carried out from the process device by the side shifting hand 5 is moved in a direction in which the base side conveyor 3 and the process side transfer hand 5 are moved in and out. (X-axis direction) A substrate movement positioning means 30 in which a horizontal direction (for example, a Y-axis direction) intersects is formed. More specifically, the base member 2 is provided on the floor surface adjacent to the base member 24 (one side of the X-axis p side), and the base 33 is moved toward the Y-axis through the guide rail 31 on which the base member 29 is provided. The direction is moving. The base 33 is positioned in the Y-axis direction by means of an actuator such as a ball screw (not shown) and an actuator such as a motor (not shown). The side members 35 are integrally formed at both end portions of the base 33 in the Y-axis direction. Inside the respective side members 35, a transfer handle supporting member 39 is provided in the guide rails 3 of the respective side members 35, and is disposed in the Z-axis direction φ. The transfer hand supporting structure f is freely positioned in the Z-axis direction by a power transmission means such as a ball screw (not shown) and an indexer such as a motor (not shown). An intermediate member 41 is provided on the inner side of the transfer hand supporting member 39 in the X-axis direction. Further, the process side transfer hand 5 is movably provided in the X-axis direction in the intermediate member 4 1 . The process side shifting hand 5 is inserted into the X-axis (the direction opposite to the side of the side conveyor 3) by means of a force transmission means such as a ball screw (not shown). From the above-mentioned transfer transport process position in the orthogonal direction of the plate at the ground, the force is transmitted from the moving side _ 39 from the moving side of the figure, and the moving direction of the hand -18 - 1307675.  (16) The struts 39 to 1 and 2 are formed so as to be protruded at positions indicated by the imaginary lines, and are movably positioned. Further, a delivery conveyor 9 is provided on the side of the side of the side conveyor 3 in the X-axis direction. The delivery conveyor 9 is constituted by, for example, a roller conveyor as described above, and the passage 13 of the roller conveyor is movably positioned in the Z-axis direction. More specifically, the lower side of the transfer hand support member 39, the intermediate member 41, and the process side transfer hand 5 is transmitted through the guide rail 3 integrally provided to each of the side members 35. 7. The delivery conveyor base member 43 is movably provided in the Z-axis direction. The delivery conveyor base member 43 is a power transmission means such as a ball screw (not shown) and an actuator such as a motor (not shown) (an actuator for driving the aforementioned transfer hand support member 39) The different actuators are freely positioned in the z-axis direction. On the delivery conveyor base member 43, the plurality of roller support members 45 are provided at a predetermined interval in the Y-axis φ direction, and the upper end portion of the roller support member 45 is rotatably There are a plurality of rollers 2 3 . Then, if the transfer conveyor base member 43 is relatively moved in the vertical direction with respect to the transfer hand supporting member 39, the roller support member 45 and the roller 23 of the delivery conveyor 9 pass through the aforementioned The process moves the notch π of the hand 5 and moves. That is, the passage 13 of the delivery conveyor 9 moves at least between the specific position from the downstream side of the process-side transfer hand 5 and the passage 21 of the first side conveyor 3. -19- (17) 1307675 Y 刖 刖 5 5 5 4 4 4 4 4 4 4 4 4 4 4 4 4 4 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 再 递 递 递 递 递 递 递 递 递 递 递 递 递The center is rotated, and the base W is conveyed by a power transmission member such as a belt or a chain, and rotated by an actuator such as a motor. The other end side (the base end side; between the side conveyor 3 and the each notch U) of the process side shifting hand 5 is provided with the above-described inter-conveyor (for example, a roller conveyor). . Each of the rollers 47 of the intermediate conveyor 19 is rotatable in a rectangular plate-shaped roller supporting member 48 provided in a thickness direction downward, and the roller supporting members 48 are integrally provided in the above-described shifting. Hand support member 39. Therefore, each of the rollers 47 of the intermediate conveyor 19 is rotatable to the transfer hand supporting member 39. Each of the rollers 47 of the intermediate conveyor 19 is a center of rotation extending in the Y-axis direction, and transmits a power transmission member such as a belt or a chain, and is rotated by an actuator such as a motor to convey the substrate W. Further, means for rotating the rollers of the intermediate conveyor 19 (the aforementioned belt, the actuator, etc.) may be eliminated. The process side shifting hand 5 is provided on the side of the roller supporting member 48 away from the roller supporting member 48. Further, the portion of the notch 1 of the front side shifting hand 5 is not formed, and the state in which the process side shifting hand is not extended toward the processing apparatus side (the state shown in Fig. 2) is the roller supporting member. The lower side of 4 8 . As described above, by providing the intermediate conveyor 19, it is possible to support the substrate W which is moved between the side conveyor 3 and the process side transfer hand 5 (delivery conveyor 9) -20-(18) 1307675. weight. Next, the operation of the substrate transfer device 1 will be described. 3 to 7 are side views showing the operation of the substrate transfer device 1. In addition, FIG. 6 is a top view in the state shown in FIG. A description will be given of a case where the substrate W is transported from the 匣CS to the process device (processing device). First, as shown in Fig. 2, the 匣CS accommodating the substrate W is positioned above the 匣φ side conveyor 3, and the passage path 21 of the 匣-side conveyor 3 and the passage 15 of the intermediate conveyor 19 are at the same height. The passage 13 of the delivery conveyor 9 is located below the passage 17 of the shifting hand 5 of the process side. In this state, the substrate W placed on the lowermost side of the substrate W placed on the 匣CS is moved to the lower side until the roller 27 of the side conveyor 3 is contacted, and the middle portion is moved in the middle. Before the passage 15 of the conveyor 19 and the passage 13 of the delivery conveyor 9 are mutually symmetrical, the delivery conveyor base member 43 rises (see Fig. 3). Next, the substrate W stored at the lowermost position is placed before the delivery conveyor 9, and the conveyors 3, 19, and 9 are driven to move the substrate W (see Fig. 4). When the substrate W is moved as described above, the substrate W is sandwiched by the roller 27A and the roller 26. Then, the delivery conveyor base member 43 is lowered, and the substrate W placed on the delivery conveyor 9 is placed by the process side transfer hand 5 (see Fig. 5). -21 - (19) 1307675 Next, the process side shifting hand 5 and the intermediate member 4 are extended, and the substrate W is carried into the processing apparatus (see Figs. 6 and 7). Further, even if the intermediate transfer hand 5 and the intermediate member 4 1 are extended, the intermediate conveyor 19 that is rotatable freely does not move, but the intermediate conveyor 19 is disposed in the process side transfer hand 5, When the aforementioned process side shifting hand 5 and the aforementioned intermediate member 4 1 are extended, the intermediate conveyor 19 can also be moved at the same time. After the above-described loading, the process side shifting hand 5 and the intermediate member 41 are introduced, and the roller 27 of the side conveyor 3 is brought into contact with the next substrate placed on the 匣CS (the aforementioned 匣CS Before the substrate W is stored in the lowermost substrate W, the 匣CS is lowered, and the next substrate W is carried out. In the case where the substrate W is transported to the cymbal CS from the processing device, the substrate W is transported by an operation substantially opposite to the above-described operation, and when the substrate transport device 1 is used, the 输送-side conveyor 3 is used from the 匣CS. Since the substrate W is carried out or the substrate W is carried into the substrate CS, the substrate W does not have to be moved in the vertical direction during the loading and unloading, and the transfer carrier does not have to be inserted between the substrates, so that the laminate can be reduced in the wire bundle CS. The space between the substrates w (the interval in the vertical direction) can improve the storage efficiency of the substrate of the above-mentioned 匣CS. Moreover, the process side loading carrier 5 is used to carry the substrate W into the processing device, or the substrate W is carried out from the processing device, and can respond to the requirements of the processing device side. -22-(20) 1307675 does not need to additionally provide multiple joints in the aforementioned processing device. Since the robot arm or the like can simplify the configuration of the substrate transfer device 1, the installation area can be reduced. Further, the movement (transport) of the substrate W by the side conveyor 3, the process side shifting hand 5, and the substrate delivery means 7 is only required to change the parallel movement of the rotational movement of the substrate W, so that it is not necessary to The space in which the substrate W is rotated (swinged) can reduce the installation area of the substrate transfer device 1. More specifically, if the rectangular substrate W is rotated at the center (the axis extending through the center in the Z-axis direction) as a center of rotation, the space required for the rotation needs at least the diagonal of the substrate W. The extent of the circle of diameter. Further, if the center of the rotation deviates from the center of the substrate W, the space required for the whirling is larger, and the position of the substrate W is generated by the angular acceleration (wire connection acceleration) and the centripetal acceleration (normal acceleration) due to the whirling. Deviation. On the other hand, if the substrate W is moved only in parallel, the space required for the substrate W to be rotated is not required, so that the installation area of the substrate transfer device 1 can be reduced. Further, the substrate W can be prevented from being displaced due to the whirling. As described above, if the installation area of the substrate transfer device 1 can be reduced. When the substrate transfer device 1 is used in the clean room, the size of a device such as a clean room of a high-priced device can be reduced. Further, it is not necessary to rotate the substrate w. Therefore, there is no need for a mechanism for rotating the substrate W as described above. However, the mechanism for rotating the large substrate w is generally configured to be rotated by a speed reducer formed of a gear or the like by an actuator such as a motor to mount the -23-(21) 1307675 substrate. In this configuration, since the backlash of the gear is present, in order to accurately position the mounting table, a positioning mechanism using a positioning pin or the like is required, and the configuration of the substrate transfer device becomes complicated. Further, in order to prevent the displacement of the substrate W due to the whirling of the substrate W and the displacement of the substrate W caused by the sudden change of the positioning of the mounting table by the positioning pin, the mounting table and the positioning latch need to be slowly generated. The operation is performed to lower the transport efficiency of the substrate W. In the substrate transfer apparatus 1 of the present invention, since the rotation mechanism of the substrate W is unnecessary, the configuration is simplified, and since the substrate W is not rotated, the substrate W is not displaced when the substrate is rotated, and the substrate W can be accelerated. The conveyance speed can also improve the conveyance efficiency of the substrate W. In addition, when the substrate W is carried out or carried in by the substrate transfer device 1, the substrate W is sandwiched by the roller 26 and the roller 27A from the vertical direction, and thus the substrate W is applied even larger. The force is handled (even if the acceleration applied to the substrate W (including the negative acceleration) is large φ), the substrate W can be quickly transported while suppressing slippage between the substrate W and the side conveyor 3. Further, the substrate transfer device 1 includes the delivery conveyor 9 that is movable in the vertical direction, and is provided in each of the notches 11 of the process side transfer hand 5, and is used to carry The portion of the substrate W of the delivery conveyor 9 is disposed so that the substrate W can be transferred between the first side conveyor 3 and the process side transfer hand 5, so that it is simple and only faces up and down. The substrate W can be delivered by moving in the direction, and the substrate W can be avoided. -24- (22) 1307675 Further, by the intermediate conveyance device 19, the intermediate conveyor 19 can be used to support the substrate W while the intermediate conveyor 19 supports the substrate. The substrate W is delivered between the conveyors 9, and the delivery of the substrate W is surely performed. Furthermore, as already understood, the non-formed portions of the process side shifting hand 5 that are not provided with the notches 11 are indispensable, and the respective mounting portions (with the notches 11 provided) are provided to be spaced apart from each other. The part) is connected to a body. On the other hand, in the process of shifting the notch forming portion of the hand 5, the rollers 47 constituting the delivery means 7 cannot pass, and therefore the delivery means 7 is not provided in the portion where the defect is not formed. Therefore, if the intermediate conveyor 19 is not provided, the non-formed portion of the gap existing between the 匣CS and the mounting portion of the process side shifting hand 5 is not provided for support from the lower side and the foregoing process. The means for moving the substrate W between the hand 5 is shifted, and the substrate W to be conveyed is deflected by gravity or the like, and the substrate cannot be smoothly transported. However, in the substrate transfer device 1, since the intermediate conveyor 19 is provided, even if the substrate W is supported by the lower portion of the notch, the substrate W can be prevented from being deflected by gravity during the substrate conveyance, and the substrate W can be smoothly smoothed. Carry the substrate W. In addition, the substrate transport apparatus 1 includes the loading/unloading direction (X-axis direction) of the substrate W by the side conveyor 3 and the loading and unloading direction of the substrate W by the carrier side of the process side (X). The axes are aligned with each other, and the substrate w is moved in the Y-axis direction to move the substrate freely. -25 (23) (23)

1307675 位手段30，故基板搬運裝置1全體的構成更簡驾 使匣CS與製程裝置存在偏離γ軸方向的位置， 在匣CS與製程裝置之間搬運基板。 又，以基板搬運裝置1爲中間，就能在Χί 端部側朝Υ軸方向並列的複數個匣CS與在χ_ 一端部側朝Υ軸方向並列的複數個製程裝置之H 板W。 可是，如第8圖（表示設有複數個製程側移 狀態的圖）所示，亦可將前述製程側移載手5， 向並列的設置複數個（例如兩個）。 若藉由像這樣所構成的基板搬運裝置，就肯g 行從製程裝置搬出基板W、對製程裝置搬入基板 例如，於保持在下方的製程側移載手5 B， 理的基板W之狀態，將前述各製程側移載手5A 到製程裝置，在前述製程裝置將已處理的基板 保持在上方的製程側移載手5A之後，將前述製 手5B所載置的基板搬入到前述製程裝置，該掷 前述各製程側移載手5A、5B離開前述製程裝濯 就能在短時間進行從製程裝置搬出基板W、對· 入基板W。 再者，於前述第1實施形態中，如第9圖 搬運裝置之變形例的俯視圖）所示’亦可針對 輸送機3、9、19的前述基板W之搬運方向（ ，來改變藉由前述製程側移載手5的前述基板 ，並且即 還是能夠 :方向之一 丨方向之另 丨，搬運基 載手5之 朝上下方 :短時間進 W。 載置未處 、5B移動 W載置於 [程側移載 丨入後’將 :地偏離， !程裝置搬 表不基板 :由前述各 :軸方向） W之搬運 -26- (24) 1307675 方向（γ軸方向）。 〔第2實施形態〕 第10圖 '第11圖〜第16圖係表示有關本發明之第2 實施形態的基板搬運裝置101之槪略構成的立體圖，第11 圖係表示第13圖之XI端視的圖，第12圖係表示第1〇 圖之X I I端視的圖。 P 有關第2實施形態的基板搬運裝置101，係取代輸送 機，採用移載手，從匣搬出基板或是朝匣搬入基板，而且 遞交用輸送機、中間輸送機除了以空氣浮動所構成的這點 外，大致上是與有關前述第1實施形態的基板搬運裝置1 相同的構成，且具有大致相同的效果，並且因基板不會接 觸到輸送機，故能更進一步提升基板的乾淨度等。 若做詳細說明，基板搬運裝置1 0 1，係具備匣側移載 手1 02。該匣側移載手1 02，係以將基板W從形成水平而 φ 能多段收納的匣，保持前述基板W的端面或是端面附近 ，而將前述基板W搬出到（第14圖所示的位置；第1特 定的位置P S 1 )地被構成。 又，前述匣側移載手1 0 2，係保持前述基板W的端面 或是端面附近而能將保存在第14圖所示之位置PS1的前 述基板W朝目ij述厘搬入地被構成。 前述匣側移載手102，係具備L字狀的移動構件106 。該移動構件106’係朝基板W之搬出入方向（X軸方向 )延長，並且對滑動底座（底座構件）107而言，移動自 -27- (25) 1307675 如的定位在基板W之搬出入方向。該滑動底座107，係朝 基板w之搬出入方向（X軸方向）延長’並且一體設置 在底座構件1 0 4。 再者，前述底座構件104，係與前述遞交用輸送機底 座構件43同樣地，移動自如的定位在X軸方向、Y軸方 向。 在前述移動構件1 06，係設有爲了保持前述基板W的 保持構件108。該保持構件108，係對前述移動構件106 而言，移動自如地定位在X軸方向。 藉由像這樣地構成，即使對保持構件1 08之底座構件 104的移動行程增大，還是能縮短基板搬運裝置101之X 軸方向的長度，就能極力避免設置面積增大。 前述保持構件1 〇 8，例如具備吸盤1 1 0，如第1 1圖所 示，藉由吸附基板W之端面附近的下面，來保持前述基 板W。取代前述吸盤110，也可藉由夾入前述基板W之端 面附近來保持前述基板W。 再者’爲了穩定搬運（移送）基板W，前述移動構件 106、前述保持構件108等，係離開Y軸方向，設有複數 個（例如兩個）。 又，設有爲了將藉由前述匣側移載手102所搬出或是 搬入的前述基板W的重量，利用前述匣之下部側來支撐 的匣側空氣浮動手段（圖未表示）。 前述匣側空氣浮動手段，例如具備藉由具有通氣性的 陶瓷所形成的支撐構件’就能藉由圧縮空気供給手段所供 -28- (26) 1307675 W 金 材 個 第 置 程 述 樣 同 支 如 程 X 定 板 手 白 側 給的圧縮空気，從前述支撐構件噴出，在與前述基板 非接觸的狀態’來支撐前述基板W的重量。 再者’取代通氣性的陶瓷，亦可藉由通氣性的燒結 屬等來構成前述支撐構件。又，亦可使用不具通氣性的 質所塡充的金屬等之構件，在該金屬等之構件設置複數 孔’使壓縮空氣從該些孔噴出而來支撐前述基板W。 又’基板搬運裝置101，係具備可保存在位於前述 1特定之位置下的第2特定之位置（第15圖所示的位 PS3)的前述基板W，朝著對前述基板w施行加工的製 裝置供給，或是可從前述製程裝置將前述基板W往前 第2特定之位置搬出的112(與前述製程側移載手5同 地所構成的移載手）。 前述製程側移載手1 1 2，係與前述製程側移載手5 樣地，透過中間構件1 1 5 (第1 6圖参照）設置在移載手 撐構件114(與前述移載手支撐構件39同樣地，移動自 的定位在Y軸、Z軸方向的移載手支撐構件），前述製 側移載手1 1 2，係對前述移載手支撐構件1 1 4而言可朝 軸方向突出而移動。 進而，基板搬運裝置101，係具備可在前述第1特 之位置與前述第2特定之位置間遞交前述基板W的基 遞交手段1 1 6。 前述基板遞交手段116，係具備對前述匣側移載 1 02與前述製程側移載手1 1 2相對性地朝上下方向移動 如的遞交用空氣浮動手段H8，並且將設置在前述製程 -29- (27) 1307675 移載手112的各缺口 11，通過用來載置前述遞交用空氣浮 動手段1 1 8之前述基板W的部位，藉此就能在前述第1 特定之位置與前述第2特定之位置之間，遞交前述基板w 〇 若更詳細的說明，前述遞交用空氣浮動手段118，係 具備支撐構件120，該支撐構件120是在前述底座構件 1 04的上方朝X軸方向延伸，在Y軸方向隔著間隔而一體 g 地複數個設置在前述底座構件1 〇4。 前述支撐構件1 20，係爲與前述匣側空氣浮動手段之 支撐構件同樣地被構成，可噴出空氣來支撐基板W。 又，在前述第1特定之位置與前述匣之間，設有爲了 來用支撐藉由前述匣側移載手102被搬運的基板W之中 間空氣浮動手段122。 前述中間空氣浮動手段122,係具備支撐構件124, 該支撐構件124,係在屬於前述匣側的前述移載手支撐構 φ 件Π4之內側，在Y軸方向隔著間隔而一體地設有複數個 前述底座構件104。 再者，爲了避免與前述製程側移載手112和前述支撐 構件124的干涉，前述移動構件106，乃於Y軸方向，被 設置在前述製程側移載手1 12和前述支撐構件124之間。 在此，針對基板搬運裝置1 〇 1的動作做說明。 第1 0圖係表示初期狀態。在該初期狀態，位於前述 匣之最下方的基板W之下面、和前述吸盤110之上端、 和前述支撐構件124之上面、和前述支撐構件120之上面 -30- (28) 1307675 爲略同等高度，又，前述製程側移載手112之上面，係位 在比前述各支撐構件120、124之上面的更下方。進而， 前述移動構件106，並未突出於匣側，於平面視之，整合 在前述底座構件104的內側。 於前述初期狀態中，前述移動構件1 0 6是朝匣側延伸 ，並且前述保持構件108也朝匣側移動，藉由前述吸盤 110，吸附前述最下方的基板W的端面附近的下部，來保 持前述基板w (參照第1 1圖、第13圖）。 接著，打開在前述各支撐構件120、124的空氣浮動 ，並且將前述移動構件1 〇 6和前述保持構件1 0 8朝離開前 述匣的方向移動，藉此一邊在前述各支撐構件120、124 形成空氣浮起，來支撐前述基板W的重量，一邊將前述 基板W搬運到第1特定的位置PS1(參照第14圖）。 其次，若將前述底座構件1 04朝向下方移動，隨著該 移動，以前述支撐構件120所支撐的基板W也會朝下方 移動，在該移動的途中’前述基板W被載置在前述製程 側移載手1 1 2，該載置的位置會在前述第2特定的位置 PS3 (參照第15圖）。 以前述基板w保持在PS3之位置的狀態’切斷各支 撐構件120、124的空氣浮動。 接著，前述製程側移載手1 1 2朝製程裝置側延伸’將 基板W搬入到前述製程裝置（參照第16圖）’該搬入後 ’引進前述製程側移載手112，適當調整前述底座構件 104、前述移載手支撐構件114的高度等’回到前述初期 -31 - (29) 1307675 狀態。 重複前述各動作，將基板w —片片從前述匣搬入到 前述製程裝置。 再者，將基板從前述製程裝置移送到前述匣時’進行 與前述動作相反的動作。 又，如已理解的，與前述第1實施形態同樣地，藉由 前述各移載手102、112的前述基板W的搬送方向會互相 —致。若藉由基板搬運裝置101，使用匣側移載手102將 基板w從匣搬出，或是將基板W搬入匣，因此在該搬出 搬入之際，不必將基板W朝上下方向移動，以匣側移載 手1 02來保持基板W的端部而將基板搬出搬入，因此在 該搬出搬入之際，不必將基板W朝上下方向移動，又， 匣側移載手1 02不必深插到基板W之間。因而，能縮小 積層在匣內的各基板W間之間隔（上下方向的間隔）， 就能提高前述匣之基板的收納效率。 進而，從匣搬出基板W，或是將基板W搬入匣之際 ，因保持前述基板W的端部來進行搬出搬入，就能進一 步避免傷及前述基板W之中央部或污染前述基板W之虞 。又，因使用製程側移載手112對製程裝置搬入基板W， 或是從製程裝置搬出基板W，就能回應製程裝置側的要求 ，不必在前述製程裝置另外設置多關節機械手臂等，因此 可簡化基板搬運裝置1 0 1的構成，並且可縮小設置面積。 又’藉由匣側輸送機、製程側移載手以及基板遞交手 段的基板W之移動’只是隨著改變基板W之姿勢的旋轉 -32- (30) 1307675 移動的平行移動，因此不需要有爲了使基板W旋轉（回 旋）的空間，就能縮小基板搬運裝置1 0 1的設置面積。 可是，與前述第1實施形態同樣地，亦可將前述製程 側移載手1 1 2朝上下方向並列設置複數個。 進而，亦可取代前述各空氣浮動手段，而採用利用超 音波使基板W浮起的超音波浮動手段。 前述超音波浮動手段，係藉由將基板支撐構件利用超 p 音波振動子使其振動，藉由形成在基板W與前述基板支 撐構件之間的薄空氣膜，來支撐基板W的重量。 若以所揭示的例子做詳細說明，前述超音波浮動手段 ，係具備超音波產生元件（例如壓電元件）。 在前述超音波產生元件的上側，設有爲了放大該超音 波產生元件所產生之振動的喇叭（horn)。前述基板支撐構 件’是透過連結構件，而設置在前述喇叭的上部。 然後’前述超音波產生元件所產生的振動會傳達到前 φ 述基板支撐構件’該基板支撐構件主要是在前述基板W 的厚度方向產生振動，藉此在基板W與前述基板支撐構 件之間，產生以空氣作爲媒介的放射壓（藉由空氣之粗密 波的放射壓），藉由該放射壓，在前述基板w與前述基 板支撐構件之間產生薄空氣膜，就能以前述基板支撐構件 來支撐前述基板W的重量。 再者’藉由參照日本特許申請第2005 — 1 62225號（ 2〇〇5年6月2日申請）的全部內容’寫入到本案說明書中 -33- (31) 1307675 又，本發明並不限於前述之發明的實施形態，藉由進 行適當的變更，得以其他的形態來實施。 【圖式之簡單說明】 [第1圖]表示有關本發明之第1實施形態的基板搬運 裝置之槪略構成的俯視圖。 [第2圖]表示基板搬運裝置之槪略構成的側視圖。 [第3圖]表示基板搬運裝置之動作的側視圖。 [第4圖]表示基板搬運裝置之動作的側視圖。 [第5圖]表示基板搬運裝置之動作的側視圖。 [第6圖]表示基板搬運裝置之動作的側視圖。 [第7圖]表示基板搬運裝置之動作的側視圖。 [第8圖]表示設有複數個基板搬運手之狀態的圖。 [第9圖]表示基板搬運裝置之變形例的俯視圖。。 [第1 〇圖]表示有關本發明之第2實施形態的基板搬運 裝置之槪略構成的立體圖。 [第11圖]表示第13圖之X I端視的圖。 [第12圖]表示第10圖之X I I端視的圖。 [第13圖]表示有關本發明之第2實施形態的基板搬運 裝置之槪略構成的立體圖。 [第1 4圖]表示有關本發明之第2實施形態的基板搬運 裝置之槪略構成的立體圖。 [第15圖]表示有關本發明之第2實施形態的基板搬運 裝置之槪略構成的立體圖。 -34- (32) 1307675 [第1 6圖]表示有關本發明之第2實施形態的基板搬運 裝置之槪略構成的立體圖。 【主要元件符號說明】 1、101:基板搬運裝置 CS ： I® W :基板 3 =匣側輸送機 5、5 A、5 B :製程側移載手 7 :基板遞交手段 9 :遞交用輸送機 1 1 :缺口 1 3 :基板載置部位（通過路線） 1 5 :工件載置部位（通過路線） 1 7 :基板載置部位（通過路線） 1 9 :中間輸送機 2 1 :通過路線 25、45、48 :滾子支撐構件 23、 26、 27、 27A、 47:滾子 24、 29、104:底座構件 3 0 :基板移動定位手段 3 1、3 7 :導軌 33 :基台 3 5 :側方構件 -35- (33)1307675Since the 1307675 position means 30, the entire structure of the substrate transfer apparatus 1 is more simplified. The 匣CS and the process apparatus are separated from the γ-axis direction, and the substrate is transported between the 匣CS and the process apparatus. Further, in the middle of the substrate transfer device 1, the H-plates W of a plurality of process devices which are arranged in the z-axis direction on the side of the Χί and the plurality of process devices arranged in the z-axis direction on the one end side of the χ_ are provided. However, as shown in Fig. 8 (showing a diagram in which a plurality of process side shifting states are provided), the process side shifting hand 5 may be arranged in parallel (for example, two). According to the substrate transfer device configured as described above, the substrate W is carried out from the process device, and the substrate is carried into the process device, for example, the substrate W is transferred to the process side held by the process side, and the substrate W is placed. The process side shifting hand 5A is transferred to the process device, and after the process device holds the processed substrate on the process side transfer carrier 5A, the substrate placed on the handle 5B is carried into the process device. By ejecting the respective process side shifting carriers 5A and 5B away from the process unit, the substrate W can be carried out from the processing apparatus and the substrate W can be transferred in a short time. Further, in the first embodiment, as shown in the plan view of the modification of the conveying device of the ninth embodiment, the conveyance direction of the substrate W of the conveyors 3, 9, and 19 can be changed. The process side shifts the substrate of the hand 5, and is still capable of: one direction of the direction, the other direction of the carrier, the carrier carrier 5 is moved up and down: a short time into W. The placement is not carried out, the 5B movement W is placed [After the transfer of the process side, it will be: the ground is deviated, and the process of moving the table is not: the above: each axis direction) W Handling -26- (24) 1307675 direction (γ axis direction). [Embodiment 2] FIG. 10 is a perspective view showing a schematic configuration of a substrate transfer device 101 according to a second embodiment of the present invention, and FIG. 11 is a view showing a XI terminal of FIG. Fig. 12 is a view showing the XII end view of Fig. 1 . In the substrate transfer device 101 according to the second embodiment, the transfer carrier is used to carry out the substrate from the crucible or the substrate is transferred to the crucible instead of the conveyor, and the delivery conveyor and the intermediate conveyor are configured to float in the air. The outline is substantially the same as that of the substrate transfer device 1 according to the first embodiment described above, and has substantially the same effect, and since the substrate does not come into contact with the conveyor, the cleanliness of the substrate and the like can be further improved. For detailed explanation, the substrate transfer device 101 has a side transfer carrier 102. The side shifting hand 102 is configured such that the substrate W is held in a plurality of stages from the horizontal direction and φ can be held in the vicinity of the end surface or the end surface of the substrate W, and the substrate W is carried out (shown in FIG. 14). Position; the first specific position PS 1 ) is formed. Further, the side transfer carrier 1 0 2 is configured such that the end surface or the end surface of the substrate W is held, and the substrate W stored at the position PS1 shown in Fig. 14 can be carried in. The side shifting hand 102 is provided with an L-shaped moving member 106. The moving member 106' is extended toward the loading/unloading direction (X-axis direction) of the substrate W, and for the sliding base (base member) 107, the movement from the -27-(25) 1307675 is carried out in the substrate W. direction. The slide base 107 is extended toward the loading/unloading direction (X-axis direction) of the substrate w and is integrally provided to the base member 104. Further, the base member 104 is movably positioned in the X-axis direction and the Y-axis direction in the same manner as the delivery conveyor base member 43. In the moving member 106, a holding member 108 for holding the substrate W is provided. The holding member 108 is movably positioned in the X-axis direction with respect to the moving member 106. According to this configuration, even if the movement stroke of the base member 104 of the holding member 108 is increased, the length of the substrate conveyance device 101 in the X-axis direction can be shortened, and the increase in the installation area can be avoided as much as possible. The holding member 1 〇 8 is provided with, for example, a chuck 1 1 0. As shown in Fig. 1, the substrate W is held by adsorbing the lower surface in the vicinity of the end surface of the substrate W. Instead of the chuck 110 described above, the substrate W may be held by being sandwiched between the end faces of the substrate W. Further, in order to stably transport (transfer) the substrate W, the moving member 106, the holding member 108, and the like are provided in plural (for example, two) in the Y-axis direction. Further, a side air floating means (not shown) for supporting the weight of the substrate W carried out or carried in by the side transfer hand 102 is supported by the lower side of the cymbal. The above-mentioned side air floating means, for example, having a supporting member formed of a gas permeable ceramic, can be supplied by the collapsed air supply means -28-(26) 1307675 W gold material. The contraction space given by the white side of the X-hand plate is ejected from the support member, and supports the weight of the substrate W in a state of being non-contact with the substrate. Further, in place of the air-permeable ceramic, the support member may be constituted by a gas-permeable sintered genus or the like. Further, a member such as a metal which is not filled with a gas permeable property may be used, and a plurality of holes may be provided in the member such as the metal to allow compressed air to be ejected from the holes to support the substrate W. Further, the substrate transfer device 101 includes the substrate W that can be stored at a second specific position (bit PS3 shown in Fig. 15) located at the specific position of the first one, and is processed toward the substrate w. The device is supplied or 112 (the transfer hand formed in the same manner as the process side transfer carrier 5) that can be carried out from the second predetermined position of the substrate W from the processing device. The process side shifting hand 1 1 2 is disposed on the transfer hand support member 114 (with the aforementioned transfer hand support) through the intermediate member 1 15 (refer to FIG. 6). Similarly, the member 39 is moved from the transfer hand support member positioned in the Y-axis and Z-axis directions, and the side transfer hand 1 1 2 is movable toward the axis of the transfer hand support member 1 1 4 The direction is prominent and moves. Further, the substrate transfer device 101 includes a base delivery means 1 16 that can deliver the substrate W between the first specific position and the second specific position. The substrate delivery means 116 is provided with a delivery air floating means H8 that moves in the vertical direction relative to the side transfer load 102 and the process side transfer hand 1 1 2, and is provided in the above-described process -29. - (27) 1307675 Each of the notches 11 of the transfer hand 112 passes through the portion of the substrate W on which the delivery air floating means 1 18 is placed, whereby the first specific position and the second portion can be Between the specific positions, the substrate w is delivered. As described in more detail, the delivery air floating means 118 is provided with a support member 120 extending in the X-axis direction above the base member 104. A plurality of the base members 1 to 4 are integrally provided in the Y-axis direction with an interval therebetween. The support member 120 is configured in the same manner as the support member of the side air floating means, and can eject air to support the substrate W. Further, between the first specific position and the crucible, an intermediate air floating means 122 for supporting the substrate W transported by the side transfer hand 102 is provided. The intermediate air floating means 122 is provided with a support member 124 which is provided inside the transfer hand supporting structure Π4 belonging to the side of the side, and is integrally provided with a plurality of intervals in the Y-axis direction with an interval therebetween. The aforementioned base member 104. Furthermore, in order to avoid interference with the process side shifting hand 112 and the support member 124, the moving member 106 is disposed between the process side transfer hand 12 and the support member 124 in the Y-axis direction. . Here, the operation of the substrate transfer device 1 〇 1 will be described. The 10th figure shows the initial state. In the initial state, the lower surface of the substrate W located at the lowermost side of the crucible, and the upper end of the suction cup 110, and the upper surface of the support member 124 are slightly equal to the upper surface of the support member 120, -30-(28) 1307675. Further, the upper surface of the process side shifting hand 112 is located below the upper surface of each of the support members 120 and 124. Further, the moving member 106 does not protrude from the side of the crucible, and is integrated inside the base member 104 in plan view. In the initial state, the moving member 106 extends toward the side of the crucible, and the holding member 108 also moves toward the side of the crucible, and the lower portion of the end surface of the lowermost substrate W is sucked by the suction cup 110 to be held. The substrate w (see FIGS. 1 and 13). Then, the air floating on each of the support members 120 and 124 is opened, and the moving member 1 〇 6 and the holding member 108 are moved in a direction away from the cymbal, thereby forming the respective support members 120 and 124. The air floats to support the weight of the substrate W, and the substrate W is transported to the first specific position PS1 (see FIG. 14). Next, when the base member 104 is moved downward, the substrate W supported by the support member 120 moves downward as the movement progresses, and the substrate W is placed on the process side during the movement. The hand 1 1 2 is transferred, and the position to be placed is at the second specific position PS3 (see Fig. 15). The air of each of the support members 120, 124 is cut in a state where the substrate w is held at the position of the PS3. Next, the process side shifting hand 1 1 2 extends toward the process device side. 'The substrate W is carried into the process device (see FIG. 16). 'After the loading, the process side shifting hand 112 is introduced, and the base member is appropriately adjusted. 104, the height of the transfer hand support member 114, etc. 'returns to the initial state of -31 - (29) 1307675. The above operations are repeated, and the substrate w-sheet is carried from the cassette to the processing apparatus. Further, when the substrate is transferred from the processing device to the 匣, the operation opposite to the above operation is performed. Further, as is understood, similarly to the first embodiment, the transport directions of the substrates W by the respective transfer carriers 102 and 112 are mutually exclusive. When the substrate transfer device 101 is used to carry out the substrate w from the crucible or the substrate W is carried into the crucible by the side transfer carrier 101, it is not necessary to move the substrate W in the vertical direction during the loading and unloading. Since the end of the substrate W is transferred and the substrate is carried out and carried in, the substrate W does not have to be moved in the vertical direction during the loading and unloading, and the side transfer carrier 102 does not have to be deeply inserted into the substrate W. between. Therefore, the interval between the substrates W in the crucible (the interval in the vertical direction) can be reduced, and the storage efficiency of the substrate of the crucible can be improved. Further, when the substrate W is carried out from the crucible or the substrate W is carried into the crucible, the end portion of the substrate W is held and carried out, whereby the central portion of the substrate W or the substrate W can be further prevented from being damaged. . Moreover, by using the process side shifting hand 112 to carry the substrate W into the process device or to carry out the substrate W from the process device, the process device side can be responded to, and it is not necessary to separately provide a multi-joint robot arm in the process device. The configuration of the substrate transfer device 110 is simplified, and the installation area can be reduced. Further, 'the movement of the substrate W by the side conveyor, the process side shifting hand, and the substrate delivery means' is only a parallel movement of the rotation of the rotation-32-(30) 1307675 which changes the posture of the substrate W, so there is no need to have In order to rotate (rotate) the substrate W, the installation area of the substrate transfer device 101 can be reduced. However, similarly to the first embodiment, a plurality of the process side shifting hand 11 1 may be arranged in parallel in the vertical direction. Further, instead of the air floating means described above, an ultrasonic floating means for floating the substrate W by ultrasonic waves may be employed. In the ultrasonic wave floating means, the substrate supporting member is vibrated by the super-p-wave vibrator, and the weight of the substrate W is supported by a thin air film formed between the substrate W and the substrate supporting member. The above-described ultrasonic floating means is provided with an ultrasonic generating element (for example, a piezoelectric element) as will be described in detail with reference to the disclosed examples. On the upper side of the aforementioned ultrasonic generating element, a horn for amplifying the vibration generated by the ultrasonic generating element is provided. The substrate supporting member ' is transmitted through the connecting member and is provided at an upper portion of the horn. Then, the vibration generated by the aforementioned ultrasonic generating element is transmitted to the front substrate supporting member. The substrate supporting member mainly generates vibration in the thickness direction of the substrate W, whereby between the substrate W and the substrate supporting member, Radiation pressure (airborne pressure of coarse air waves) generated by air is generated, and a thin air film is formed between the substrate w and the substrate supporting member by the radiation pressure, so that the substrate supporting member can be used The weight of the aforementioned substrate W is supported. In addition, by referring to the entire contents of Japanese Patent Application No. 2005-1 62225 (Application for June 2, 2005), it is written in the present specification -33- (31) 1307675 Further, the present invention does not The embodiments of the invention described above are limited to other embodiments and can be implemented in other forms. [Brief Description of the Drawings] [Fig. 1] is a plan view showing a schematic configuration of a substrate transfer device according to a first embodiment of the present invention. [Fig. 2] A side view showing a schematic configuration of a substrate transfer device. [Fig. 3] A side view showing the operation of the substrate transfer device. Fig. 4 is a side view showing the operation of the substrate transfer device. [Fig. 5] A side view showing the operation of the substrate transfer device. Fig. 6 is a side view showing the operation of the substrate transfer device. Fig. 7 is a side view showing the operation of the substrate transfer device. Fig. 8 is a view showing a state in which a plurality of substrate transporting hands are provided. Fig. 9 is a plan view showing a modification of the substrate transfer device. . [Fig. 1] is a perspective view showing a schematic configuration of a substrate transfer device according to a second embodiment of the present invention. [Fig. 11] is a view showing the X I end view of Fig. 13. [Fig. 12] Fig. 10 is a view showing the X I I end view of Fig. 10. [Fig. 13] Fig. 13 is a perspective view showing a schematic configuration of a substrate transfer device according to a second embodiment of the present invention. [Fig. 14] Fig. 14 is a perspective view showing a schematic configuration of a substrate transfer device according to a second embodiment of the present invention. [Fig. 15] Fig. 15 is a perspective view showing a schematic configuration of a substrate transfer device according to a second embodiment of the present invention. -34- (32) 1307675 [Fig. 16] Fig. 16 is a perspective view showing a schematic configuration of a substrate transfer device according to a second embodiment of the present invention. [Main component symbol description] 1, 101: Substrate transfer device CS: I® W: Substrate 3 = 匣 side conveyor 5, 5 A, 5 B: Process side shifting hand 7: Substrate delivery means 9: Delivery conveyor 1 1 : notch 1 3 : substrate mounting position (passing route) 1 5 : workpiece mounting position (passing route) 1 7 : substrate mounting position (passing route) 1 9 : intermediate conveyor 2 1 : passing route 25 45, 48: roller support members 23, 26, 27, 27A, 47: rollers 24, 29, 104: base member 30: substrate movement positioning means 3 1, 3 7 : guide rail 33: base 3 5: side Square member-35- (33)1307675

39、 41 : 43 : 102 ： 106 ： 107 ： 108 ： 110: 112： 116: 118： 120、 122: 1 1 4 :移載手支撐構件 中間構件 遞交用輸送機底座構件 匣側移載手 移動構件 滑動底座（底座構件） 保持構件 吸盤 製程側移載手 基板遞交手段 遞交用空氣浮動手段 124 :支撐構件 中間空氣浮動手段39, 41 : 43 : 102 : 106 : 107 : 108 : 110 : 112 : 116 : 118 : 120 , 122 : 1 1 4 : Transfer carrier support member intermediate member delivery conveyor base member 匣 side transfer carrier moving member Sliding base (base member) holding member suction cup process side shifting carrier substrate delivery means delivery air floating means 124: support member intermediate air floating means

-36--36-

Claims (1)

1307675 十、申請專利範圍 第94 1 36703 號專利申請案 中文申請專利範圍修正本 民國97年10月27曰修正 1. 一種基板搬運裝置，具有： 能從形成水平而多段收納基板的匣朝水平方向移動 搬出目I[述基板’或是能朝水平方向移動而往B丨i述厘搬入 述基板的匣側輸送機；和 能將前述基板朝水平方向移動，而往對著前述基板 行加工的製程裝置供給，或是能將前述基板朝水平方向 動而從前述製程裝置搬出的製程側移載手；和 能在前述匣側輸送機與前述製程側移載手之間遞交 述基板的基板遞交手段； 前述匣側輸送機、前述製程側移載手以及前述基板 交手段，係藉由僅平行移動，來移動前述基板地被構成 其特徵爲： 前述基板遞交手段，係具備對前述匣側輸送機與前 製程側移載手而相對性地朝上下方向移動自如的遞交用 送機，並且將前述遞交用輸送機載置前述基板的部位通 設置在前述製程側移載手的各缺口或是各貫通孔，藉此 在前述匣側輸送機與前述製程側移載手之間遞交前述基 地被構成， 或是，前述基板遞交手段，係具備對前述厘側輸送 與前述製程側移載手而相對性地朝上下方向移動自如的 而 前 施 移 前 遞 述 輸 過 能 板 機 遞 .1307675 交用空氣浮動（air float)手段或是遞交用超音波浮動手段 ，並且將前述遞交用空氣浮動手段或是前述遞交用超音波 浮動手段載置前述基板的部位通過設置在前述製程側移載 手的各缺口或是各貫通孔，藉此能在前述匣側輸送機與前 述製程側移載手之間遞交前述基板地被構成。 2- 一種基板搬運裝置，具有： 能從形成水平而多段收納基板的匣，保持前述基板的 端面或是端面附近且朝水平方向移動而搬出前述基板，或 是能保持前述基板的端面或是端面附近且朝水平方向移動 而往前述匣搬入前述基板的匣側移載手；和 能將前述基板朝水平方向移動，而往對著前述基板施 行加工的製程裝置供給，或是能將前述基板朝水平方向移 動而從前述製程裝置搬出的製程側移載手；和 能在前述匣側移載手與前述製程側移載手之間遞交前 述基板的基板遞交手段； 前述匣側移載手、前述製程側移載手以及前述基板遞 交手段，係藉由僅平行移動，來移動前述基板地被構成， 其特徵爲： 前述基板遞交手段，係具備對前述匣側移載手與前述 製程側移載手而相對性地朝上下方向移動自如的遞交用輸 送機，並且將前述遞交用輸送機載置前述基板的部位通過 設置在前述製程側移載手的各缺口或是各貫通孔，藉此能 在前述匣側移載手與前述製程側移載手之間遞交前述基板 地被構成， -2- .1307675 或是’前述基板遞交手段，係具備對前述匣側移載手 與前述製程側移載手而相對性地朝上下方向移動自如的遞 交用空氣浮動（air float)手段或是遞交用超音波浮動手段 ’並且將前述遞交用空氣浮動手段或是前述遞交用超音波 浮動手段載置前述基板的部位通過設置在前述製程側移載 手的各缺口或是各貫通孔，藉此能在前述匣側移載手與前 述製程側移載手之間遞交前述基板地被構成。 3-如申請專利範圍第2項所記載的基板搬運裝置， 其中， 前述匣側移載手，係具備： 朝前述基板之搬出搬入方向延長的滑動底座；和 對前述滑動底座而言，可朝前述基板之搬出搬入方向 移動的移動構件；和 可保持前述基板，並且對前述移動構件而言’可在前 述基板之搬出搬入方向移動的保持構件； 對前述滑動底座而言，將前述保持構件移動定位自如 地被構成。 4.如申請專利範圍第1〜3項的任一項所記載的基板 搬運裝置，其中， 藉由前述匣側輸送機或是前述匣側移載手的基板之搬 出搬入方向、和藉由前述製程側移載手的基板之搬出搬入 方向，會互相一致，並且 具有將以前述匣側輸送機或是前述匣側移載手從前述 匣搬出的基板，或是將以前述製程側移載手從製程裝置搬 -3- 1307675 出的基板’朝著對藉由前述匣側輸送機或是前述匣側移載 手、前述製程側移載手的基板之搬出搬入方向所交叉的水 平方向移動定位自如的基板移動定位手段。 5·如申請專利範圍第1〜3項的任一項所記載的基板 搬運裝置，其中， 在前述製程側移載手的基端部側，係設有爲了支撐在 前述匣側輸送機或是前述匣側移載手與前述製程側移載手 | 之間朝水平方向移動的前述基板之重量的中間輸送機，或 是爲了支撐在前述匣側輸送機或前述匣側移載手與前述製 程側移載手之間朝水平方向移動的基板之重量的中間空氣 浮動手段或是中間超音波浮動手段。 6.如申請專利範圍第1〜3項的任一項所記載的基板 搬運裝置，其中， 前述製程側移載手是朝上下方向並列的設有複數個。1307675 X. Patent Application No. 94 1 36703 Patent Application Revision of Chinese Patent Application Revision of the Republic of China, October 27, 1997. 1. A substrate handling device having: a horizontal direction in which a substrate can be accommodated in a plurality of stages from horizontal to horizontal Moving the object I [the substrate] or the side conveyor that can move in the horizontal direction to the substrate, and the substrate can be moved in the horizontal direction and processed toward the substrate. a process device supply, or a process side transfer carrier capable of moving the substrate in a horizontal direction and being carried out from the process device; and a substrate transfer capable of delivering the substrate between the side conveyor and the process side transfer carrier The first side conveyor, the process side shifting hand, and the substrate transfer means are configured to move the substrate by moving only in parallel: the substrate delivery means includes the side transport The machine and the front process side move the hand to move the transfer machine relatively freely in the up and down direction, and carry the aforementioned delivery conveyor The portion of the substrate is disposed in each of the notches or the through holes of the process side transfer carrier, thereby transferring the base between the side conveyor and the process side carrier, or the substrate The delivery means has the function of moving the upper side and the said process side shifting hand relatively in the up and down direction, and before the pre-transfer, the derivation of the energy transfer board machine. 1307675 air floating (air float) Or means for delivering the ultrasonic floating means, and the portion for placing the substrate by the delivery air floating means or the ultrasonic wave floating means for delivery is provided in each of the notches or through holes provided in the process side transfer carrier Thereby, the substrate can be delivered between the first side conveyor and the process side shifting hand. A substrate transporting apparatus comprising: a crucible capable of accommodating a substrate in a plurality of stages, forming an end surface or an end surface of the substrate, moving in a horizontal direction to carry out the substrate, or holding an end surface or an end surface of the substrate a side shifting hand that moves in the horizontal direction and moves into the substrate, and can move the substrate in a horizontal direction, and supplies the substrate to a processing device that processes the substrate, or can move the substrate toward a process side shifting hand that moves in a horizontal direction and is carried out from the processing device; and a substrate delivery means capable of delivering the substrate between the side transfer hand and the process side transfer hand; the side transfer hand, the aforementioned The process side shifting hand and the substrate delivery means are configured to move the substrate by moving only in parallel, and the substrate delivery means is configured to transfer the side transfer hand and the process side a transfer conveyor that moves freely in the up and down direction with the hand, and carries the aforementioned conveyor on the delivery conveyor The portion of the plate is formed by the notches or the through holes provided in the process side shifting hand, whereby the substrate can be delivered between the front side transfer hand and the process side transfer hand, -2- .1307675 or 'the above-mentioned substrate delivery means, which is provided with an air float means or a super transfer method for moving the vertical transfer hand and the process side transfer hand relatively vertically in the vertical direction. The sound wave floating means 'and the portion for placing the substrate by the delivery air floating means or the ultrasonic wave floating means for the delivery is provided in each of the notches or the through holes provided in the process side transfer hand, whereby The front side transfer carrier and the process side shift carrier are configured to deliver the substrate. The substrate transfer device according to the second aspect of the invention, wherein the side transfer carrier includes: a slide base that extends in a direction in which the substrate is carried in and out; and the slide base a moving member that moves the substrate in the loading/unloading direction; and a holding member that can hold the substrate and that is movable in a direction in which the substrate is carried in and out; and the sliding base moves the holding member Positioning is freely constructed. 4. The substrate transfer device according to any one of the first to third aspects of the present invention, wherein the substrate transporting direction of the side conveyor or the side transfer carrier is carried out by The loading and unloading directions of the substrates of the process side shifting hand are mutually coincident, and the substrate is carried out by the side conveyor or the side transfer hand from the magazine, or the carrier is moved by the process side. The substrate 'moved from the processing device -3- 1307675' is moved in a horizontal direction to the direction in which the substrate is transported in and out of the substrate by the side conveyor or the side transfer hand and the process side carrier. Freely movable substrate positioning means. The substrate transfer device according to any one of the first to third aspects of the present invention, wherein the base end portion side of the process side transfer hand is supported on the side conveyor or An intermediate conveyor of the weight of the substrate moving horizontally between the side transfer hand and the process side shifting hand, or for supporting the side conveyor or the side transfer hand and the foregoing process An intermediate air floating means for laterally shifting the weight of the substrate moving horizontally between the hands or an intermediate ultrasonic floating means. The substrate transfer device according to any one of claims 1 to 3, wherein the plurality of the process side transfer carriers are arranged in parallel in the vertical direction. -4--4-
TW094136703A 2005-06-02 2005-10-20 Substrate carrying device TW200642933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005162225A JP4904722B2 (en) 2005-06-02 2005-06-02 Substrate transfer device

Publications (2)

Publication Number Publication Date
TW200642933A TW200642933A (en) 2006-12-16
TWI307675B true TWI307675B (en) 2009-03-21

Family

ID=37481322

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094136703A TW200642933A (en) 2005-06-02 2005-10-20 Substrate carrying device

Country Status (5)

Country Link
JP (1) JP4904722B2 (en)
KR (1) KR101226733B1 (en)
CN (1) CN101035725B (en)
TW (1) TW200642933A (en)
WO (1) WO2006129385A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4840595B2 (en) * 2007-02-20 2011-12-21 株式会社Ｉｈｉ Board transfer machine
KR100973190B1 (en) * 2008-08-22 2010-07-30 주식회사 에스에프에이 Cassette and robot for transferring glass, and cassette system having the same
KR101037063B1 (en) * 2008-12-30 2011-05-26 에이펫(주) Substrate processing apparatus
JP2011051748A (en) * 2009-09-03 2011-03-17 Murata Machinery Ltd Loader-unloader and loading-unloading method between carrier and device
JP5480605B2 (en) * 2009-12-01 2014-04-23 東京エレクトロン株式会社 Substrate transfer apparatus and substrate processing system
TWI422521B (en) * 2011-03-02 2014-01-11 Au Optronics Corp Device for delivering glass substrate
JP5575689B2 (en) * 2011-04-01 2014-08-20 株式会社 ハリーズ Thin plate processing apparatus and method for manufacturing thin plate member
KR101520744B1 (en) 2013-11-04 2015-05-15 코닝정밀소재 주식회사 Non-contact vibration cut device and method of processing an object
CN103950716B (en) * 2014-05-21 2016-07-27 芜湖万辰电光源科技有限公司 A kind of conveying mechanism of glass bar plated film microscope carrier
JP6297989B2 (en) * 2015-01-27 2018-03-20 光洋サーモシステム株式会社 Transport device
CN107818938B (en) * 2016-09-13 2021-07-30 台湾积体电路制造股份有限公司 Transport system and method for transporting processing elements
CN108502543B (en) 2017-02-28 2020-01-24 上海微电子装备（集团）股份有限公司 Substrate transmission device and method
CN111347341A (en) * 2020-04-01 2020-06-30 长江存储科技有限责任公司 Semiconductor preparation device and chemical mechanical polishing equipment with same
CN112158604A (en) * 2020-10-13 2021-01-01 南京多脉智能设备有限公司 Combined exhaust floating type friction-free glass panel transfer robot
JP7342840B2 (en) * 2020-11-05 2023-09-12 トヨタ自動車株式会社 Conveyance method and conveyance device for thin plate materials
CN118062576B (en) * 2024-04-25 2024-06-21 肇庆南玻节能玻璃有限公司 Flexible conveying system applied to glass production

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558983A (en) * 1983-10-24 1985-12-17 Usm Corporation Automatic board handling mechanism
JPS60153306A (en) * 1984-01-21 1985-08-12 Fujitsu Ltd Device for supplying and discharging print circuit board
CA1234924A (en) * 1984-01-21 1988-04-05 Hideo Sakamoto Printed circuit board load-unload system with bypass route
JPH11227943A (en) * 1998-02-09 1999-08-24 Ishikawajima Harima Heavy Ind Co Ltd Substrate transfer device
JP4474672B2 (en) * 2000-04-24 2010-06-09 株式会社Ｉｈｉ Substrate transfer device
JP4153812B2 (en) * 2002-07-22 2008-09-24 大日本印刷株式会社 Color filter production line system

Also Published As

Publication number Publication date
CN101035725A (en) 2007-09-12
KR20080016518A (en) 2008-02-21
TW200642933A (en) 2006-12-16
JP2006335518A (en) 2006-12-14
JP4904722B2 (en) 2012-03-28
WO2006129385A1 (en) 2006-12-07
KR101226733B1 (en) 2013-01-25
CN101035725B (en) 2011-04-20

Similar Documents

Publication Publication Date Title
TWI307675B (en)
TWI487607B (en) Transfer apparatus and transfer method of a plate-shaped work piece
CN107275268B (en) Robot unit and transfer method
TW201247508A (en) Suction chuck, and transfer device of workpiece including same
JP2007036227A (en) Substrate storage cassette, transfer conveyor, and transfer system employing them
TW201014772A (en) Baling device for glass substrate and baling method thereof
TW200834790A (en) Method for forming stacks of wafers to be doped one-sided, in particular solar wafers, and handling system for loading a process boat with wafer batches
JP5028919B2 (en) Substrate transport apparatus and substrate transport method
JP4957133B2 (en) Substrate transport apparatus and substrate transport method
JP2015133391A (en) Transfer method, holding device, and transfer system
TW200911665A (en) End effector and robot for transferring a substrate having the same
TW200800754A (en) Transfer robot
TW200933800A (en) Substrate transport device
JP2022093656A (en) Article transfer facility
TW201532762A (en) Substrate transfer system and method
JP2011178531A (en) Slip sheet transfer method and slip sheet transfer device
JP5827046B2 (en) Plate member support device and support method, and plate member transport device
JP2006327819A (en) Transfer device and transfer method for glass pane
JPWO2008129603A1 (en) Substrate transfer system
JP2010052897A (en) Workpiece conveying device and workpiece conveying method
JP2008053531A (en) Mounting apparatus of semiconductor chip
JP3161434B2 (en) Sheet feeding device
JP4631433B2 (en) Substrate transport apparatus and substrate transport method
JP2004115137A (en) Sheet carrier device
JP2007324169A (en) Carrying arm, substrate carrier, and substrate inspection apparatus