TW201014772A - Baling device for glass substrate and baling method thereof - Google Patents
Baling device for glass substrate and baling method thereof Download PDFInfo
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- TW201014772A TW201014772A TW98123901A TW98123901A TW201014772A TW 201014772 A TW201014772 A TW 201014772A TW 98123901 A TW98123901 A TW 98123901A TW 98123901 A TW98123901 A TW 98123901A TW 201014772 A TW201014772 A TW 201014772A
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- glass substrate
- protective sheet
- station
- stowage
- glass
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Wrapping Of Specific Fragile Articles (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Manipulator (AREA)
Abstract
Description
201014772 六、發明說明： 【發明所屬之技術領域】 本發明是關於一種把玻璃基板與保護片（sheet)交互 地積載在平板（plate)等的積載面上，以進行抽包的技術， 且例如是關於一種對液晶顯示器、電漿（plasma)顯示器 或是有機 EL (Organic Electro Luminescent, OEL)、表面 傳導電子發射顯不器（Surface-conduction Electron-emitter Display，SED)、场發射顯不器（Field Emission Display, FED )等的平面顯示器（Flat Panel Display，FpD )用的玻 璃基板進行積載捆包的技術。 【先前技術】 在保管或輸送玻璃基板的時候，會有需要讓保護片與 玻璃基板在平板上互相密合且以縱向姿勢（大略鉛直姿勢） 或是橫向姿勢（大略水平姿勢）來進行積層捆包的場合。 在以前’雖然像這樣的捆包作業能夠讓作業員以徒手作業 的方式來進行，不過作業效率差且隨著近年的玻璃基板的 大型化，徒手作業變成相當困難。因此，一定要改善此點。 亦即，以玻璃基板的捆包作業自動化、生產性或品質提升 為目的’而提出以下所示的捆包技術。 例如，以下所記載的專利文獻丨揭露了一種移載裝 置’包括玻璃板吸附手段’對被決定了位置的玻璃板進行 ，附支持；紙墊板（slip sheet)吸附手段，在被載置在預 定位置的紙墊板上’以使玻璃板重疊的狀態對從玻璃板的 上端及下端所露出的一端邊部進行吸附；工作手（hand)， 201014772 安裝固定前述玻璃板吸附手段與前述紙墊板吸附手段；以 及移動手段’全方位地移動且自由地旋轉該工作手。移載 裝置使玻璃板與位於此玻璃板的吸附面相反侧的紙墊板同 時被向上持拿，且使玻璃板縱向層積在平板上。[Technical Field] The present invention relates to a technique in which a glass substrate and a protective sheet are alternately supported on a stowage surface of a plate or the like to perform pumping, and for example, It is about a liquid crystal display, a plasma display or an organic EL (Organic Electro Luminescent, OEL), a Surface-conduction Electron-emitter Display (SED), and a field emission display device. A glass substrate for a flat panel display (FpD) such as Field Emission Display (FED) is a technique for stowage and packaging. [Prior Art] When storing or transporting a glass substrate, it is necessary to laminate the protective sheet and the glass substrate on the flat plate, and to laminate the laminate in a vertical posture (approximately vertical posture) or a lateral posture (approximately horizontal posture). The occasion of the package. In the past, the baling operation in this way allows the operator to carry out the work by hand. However, the work efficiency is poor, and with the increase in the size of the glass substrate in recent years, it becomes quite difficult to perform the work by hand. Therefore, we must improve this point. In other words, the packaging technique described below has been proposed for the purpose of automation, productivity, and quality improvement of the packaging operation of the glass substrate. For example, the patent document disclosed below discloses a transfer device 'including a glass plate adsorption means' for supporting a glass plate whose position is determined, and a support for a slip sheet, which is placed on the substrate. The paper pad on the predetermined position absorbs the one end portion exposed from the upper end and the lower end of the glass plate in a state in which the glass plates are overlapped; the hand, 201014772 mounts and fixes the glass plate adsorption means and the aforementioned paper pad The plate adsorption means; and the moving means 'moving in all directions and freely rotating the work hand. The transfer device holds the glass sheet at the same time as the paper pad on the side opposite to the adsorption surface of the glass plate, and longitudinally laminates the glass plate on the flat plate.
又，在以下所記載的專利文獻2中，揭露了一種彎曲 玻璃板的積載裝置，包括玻璃吸附手段，在根據紙墊板供 給裝置的預定位置而決定了彎曲玻璃板的位置後，吸附支 持該彎曲玻璃板；一對紙墊板保持手段，在與紙墊板供給 裝置相異的預定位置上’對載置或吊下狀態的紙墊板的上 端邊部進行把持或吸附，藉此在吊下且張緊狀態下進行接 收及保持，其中紙墊板供給裝置設置於彎曲玻璃板的搬送 路徑的側邊，紙墊板保持部弛緩手段，使一對的紙墊板保 持裝置互相地接近且沿著彎曲玻璃板表面形狀而鬆弛；以 及積載機器人，由彎曲玻璃板與其外侧將吊下且鬆弛狀態 的紙墊板的兩面同時縱積於平板上。 專利文獻1:日本特開200M39138號公報 專利文獻2 ··日本特開2〇〇5_6〇〇63號公報 於是，在最近’ FPD產品成為液晶顯示器的代表。為 PFPD產品進—步地普及，更要求對於產_提高與成 f的降低。為此’捆包的時間也被要求要縮短 '然而，過 =捆包技術已經在構造上把玻璃基板_送距離與搬送 】間縮短到極限了，要完成上述的要求是相當_的。再 ’為了賴捆包咖，必須要提高保護片的移送速度。 …、而’在無法確實地保持賴片的情形下，便會發生移送 201014772 中的該片脫落的問題。因此，以上的狀況成為捆包系統的 可靠度降低的一種原因。 ^ 對於此點，例如上述的專利文獻丨是關於移載裝置， 雖然分別吸附移送玻璃基板與保護片，但當此 搬送下進行時，保護片容易受到撤送時所;生== 形。並且，大幅度的搖晃會使得保護片從吸附手段掉落的 情形產生。因此，讓使用上述移載裝置的工作於高速搬送 下進行是相當困難的。並且，上述的構成是無法依據搬送 時所產生的風壓來穩定保護片的姿勢，所以要讓保護片在 G 積載於傾斜平板時精密地密合於玻璃基板也是困難的。 並且，在上述專利文獻2中，藉由夾頭（Chuck)等 來保持紙墊板，且將此紙墊板與在先前被吸附保持而直立 的玻璃基板重疊的場合中，如上述專利文獻丨所揭露的構 成那樣使保護片從保持手段脫落的可能性低。然而，考慮 到由於一對的保持部於紙墊板的夾頭地方只限於在該紙墊 板的上端邊部，因此保護片受到高速搬送所產生的風壓 下，使得保護片的保持側與相對侧的下端邊部大幅搖晃， 而難以用安定姿勢來移送。 而且’保護片在大幅度搖晃的狀態下若被積載於平板 等地方，保護片會變成以大量殘留麟、f曲等的狀態而 與玻璃基板一起積載’恐怕會讓玻璃基板精度產生不好的 影響。 【發明内容】 有鑑於上述事情，本說明書中實現玻璃基板與該保護 6 201014772 片的高速搬送’同時根據本發明應該解決的技術課題來達 成以高精度進行高品質積載捆包的事項。Further, Patent Document 2 described below discloses a stacking device for a curved glass sheet, which includes a glass suction means for adsorbing and supporting the position of the curved glass sheet in accordance with a predetermined position of the paper sheet supply device. a curved glass plate; a pair of paper pad holding means for holding or adsorbing the upper end portion of the paper pad placed or suspended in a predetermined position different from the paper pad supply device, thereby hoisting Receiving and holding under the tension state, wherein the paper pad supply device is disposed on the side of the conveying path of the curved glass plate, and the paper pad holding portion is relaxed to make the pair of paper pad holding devices close to each other and The shape is relaxed along the surface shape of the curved glass plate; and the stowage robot is simultaneously stacked on the flat plate by both sides of the paper pad which is suspended and relaxed in the state in which the curved glass plate is suspended. Japanese Unexamined Patent Publication No. JP-A No. Hei. No. Hei. No. Hei. For the PFPD products to be popularized, it is required to reduce the production and increase. For this reason, the time for packing is also required to be shortened. However, the packaging technology has been shortened to the limit between the glass substrate _ delivery distance and transportation. It is quite necessary to complete the above requirements. In addition, in order to bundle the coffee, it is necessary to increase the transfer speed of the protective sheet. ..., and in the case where the film cannot be reliably held, the problem of the piece falling off in 201014772 will occur. Therefore, the above situation is a cause of a decrease in the reliability of the bale system. In this regard, for example, the above-mentioned patent document 关于 relates to a transfer device that adsorbs and transports a glass substrate and a protective sheet, respectively, but when the transfer is performed, the protective sheet is easily subjected to evacuation; Also, a large amount of shaking causes the protective sheet to fall from the adsorption means. Therefore, it is quite difficult to carry out the work using the above transfer device under high speed transportation. Further, in the above configuration, the posture of the protective sheet cannot be stabilized depending on the wind pressure generated during the conveyance. Therefore, it is difficult to precisely adhere the protective sheet to the glass substrate when G is loaded on the inclined flat plate. Further, in the above Patent Document 2, the paper pad is held by a chuck or the like, and the paper pad is overlapped with the glass substrate that was previously held by the suction and hold, as in the above-mentioned patent document. As disclosed, the possibility that the protective sheet is detached from the holding means is low. However, it is considered that since the pair of holding portions are limited to the upper end portion of the paper backing plate at the chuck portion of the paper backing plate, the protective sheet is subjected to a wind pressure generated by high-speed conveyance, so that the holding side of the protective sheet is The lower end portion on the opposite side is largely shaken, and it is difficult to transfer in a stable posture. In addition, if the protective sheet is placed on a flat plate or the like in a state where the protective sheet is swayed in a large amount, the protective sheet may be stowed together with the glass substrate in a state of a large amount of residual lining, f-curve, etc., and the accuracy of the glass substrate may be deteriorated. influences. SUMMARY OF THE INVENTION In view of the above, in the present specification, the high-speed transport of the glass substrate and the protective sheet 6 201014772 is achieved, and at the same time, according to the technical problem to be solved by the present invention, high-quality stowage packaging with high precision is achieved.
上述課題的解決是藉由與本發明有關的玻璃基板的 捆包裝置來達成的。亦即，此捆包裝置為玻璃基板捆包裝 置，包括：載置站，讓玻璃基板载置於保護片上；積載站， 父互積載保護片與玻璃基板；以及積載手段，將被載置於 保護片上的玻璃基板與保護片同時保持且積載於積載站。 此玻璃基板捆包裝置的特徵在於積載手段具有挾持部，挾 持從載置狀態下的玻璃基板所露出的保護片的邊緣部分中 互相相對的兩邊緣。 如此一來，若保護片在載置玻璃基板的狀態，且保護 片從玻璃基板露出的邊緣部分中互相相對的兩邊緣被挾持 保持著，舰触免在高賴送時’保持#側邊未被保持 的一邊緣側受到大幅度的搖晃而變形的事態。並且，藉由 挾持載置有玻璃基板的狀態下的賴#，麟以平坦狀 開的狀態下挾持保護片。再者，藉由挾持保護片互相相對 ，兩邊緣，不會產生像吸㈣合下容祕照移送方向而脫 洛的問題’而能夠確實地保持保護片。基於上述不但不 護片脫離’而絲據風壓該積載手段(如搬送用的機 械手# (robot arm)等等）受到的反作用力小， ==能。而且，在高速移送進行積載的場合中 =制在保護片上產生的敵折或曲折= 办以在间精度下局品質地積載玻璃基板。 7 201014772 於此，挾持部也可以構成為另外能夠挾持保護片的邊 緣部分内互相相對的兩邊緣以外的邊緣部分。若保護片的 邊緣部分中有從玻璃基板露出的部分，則在移送時容易受 到風壓而大幅度地搖晃，如上述這樣，不只對從玻璃基板 露出的對向的邊緣，也對其以外的邊緣部分進行挾持，藉 此讓容易搖晃的地方受到固定，且使得保護片全體的搖晃 能夠進一步減少。 還有，挾持部也可以構成為能夠分別在多個位置挾持 各個邊緣部份。通常，由於保護片具有與玻璃基板相同或 更大的大小，從玻璃基板露出的邊緣部分的長度方向的尺 寸也是相當的大小。於是，藉由兩個以上的挾持部挾持一 個邊緣部分的話，能夠大範圍地挾持固定該邊緣部分，使 得安定性增加。 還有，挾持部更可構成為能夠施加張力於保護片上。 藉由如此的構成，張力會施加在保護片的大範圍區域上， 而且能夠維持施加了張力的狀態來移送保護片。因此，移 送時保護片受到風壓的影響會變得相當的小，使得保護片 與玻璃機板能以高速且安定的姿勢來積載。 或者，本發明相關的綑包裝置，也可以在挾持部外， 另具備對載置站上的保護片施加張力的張力施加手段。藉 由如此的構成，施加張力狀態的保護片上載置玻 時，兩者的密合度向上提升。因此，能夠維持此密合&離 來分別對保護片與玻璃基板進行保持移送。在此場合，^ 送時的保護片幾乎沒有搖晃，皺折或曲折等亦不會發生。 201014772 又’在載置在玻璃基板上之前若施加張力在保護片上，則 也能使保護片受到施加的張力而伸長的時候，不會受到與 ΐϊ基ίϋΐΐ的影響，而讓保持保護片時的姿勢穩定。 ί且’施加張力時與玻璃基板的位置偏移的產生也能夠避 免。 ❹ 雖f保護片的構造、材f等並不限^，但從施 樹脂製的較佳，若是發泡構造的話更 二種材質的構成’為了優化伸縮性， 保護片的密合度就能伸長，則也可讓玻璃基板與 段把ί:基裝置更可以是根據積載手 置於不$片、同保持取出的取出站與載置站設 移送手移;常，由於玻璃基板是根據適當的 + 業空間有重複的可能性不少。對 的取出站β 式如下’若保持取出玻璃基板與保護片 ί=疋=置於不同位置，能夠避免各作業的 :的保持動作;的工J (此處的保護片與玻璃基 空間相互細域。4有，各搬送手段的可動 度也能提高置’所咐-連串_包系統的信賴 還有，本發明中相關的捆包裝置更可包括一種在載置 9 201014772 站上供給保護片的片供給手段。並且，在此場合片供給 ^段也可以構絲㈣諸給龍置站且載置有破璃基板 後，將保護Μ制取出料止。諸給手财兼玻璃基 板的搬送手段，藉此㈣把保護定的態樣從載置站 然後往取出馳送。還有，在採取此構成的場合，例如能 夠把載置站上施加張力於保護片的張力施加手段與片供給 手段的搬·構-航’且㈣將施加張力狀態的保護片 往載置站供給。 還有，本發明相關的捆包裴置還可包括移載手段，用 以把玻璃基板從供給玻璃基板的供給站往載置站進行移 載。還有，在此場合，移載手段會使玻璃基板的行進方向 的前端側作為下方而在玻璃基板成傾斜的狀態下接近載置 站。並且，隨著接近載置站，所構成的移動路徑會讓玻璃 基板的姿勢與載置姿勢相近。 雖然為了縮短生產時間，把玻璃基板往保護片上移送 的速度提高也是重要的，但單單以高速來移動玻璃基板的 話，移送時從玻璃基板產生的空氣流動會把載置站上所配 置的保護片往上吹，或是有產生大幅度的搖晃的疑慮。對 此，包括構成前述移送路徑的移載手段的捆包裝置，能夠 藉由前述姿勢的相似方式，而減少玻璃基板受到的空氣阻 力，使得玻璃基板以高速移送變為可能。還有，藉由前述 般的姿勢變化，基於玻璃基板的姿勢變更所產生的空氣流 主要發生在遠離載置站的方向。藉由以上的設計，不但能 夠以高速移送玻璃基板，亦可使從玻璃基板往載置站所產 201014772 生的氣流減弱，能夠防止載置站上的保護片上吹以及因大 幅度搖晃所產生的皺折或寶曲。 還有，採用上述移送路徑的場合，還能夠構成讓玻璃 基板的水平移動量相對下降量的比率提高來接近載置站的 移送路徑。此場合中，玻璃基板的下降量、水平移動量等 例如能以玻璃基板的重心位置為基準來評價。依據上述構 成，由於在與玻璃基板全體的接近方向成直交的情況相比 〇 較下，不如讓沿著該接近方向的方向上依照玻璃基板的姿 勢而移送，所以隨著玻璃基板全體的移送而產生空氣流 時，能夠使朝向載置站所產生的空氣流變得更弱。 另一方面，前記課題的解決能夠透過以下的基板捆包 方法來達成：於載置站上將玻璃基板載置到保護片上；將 載置後的玻璃基板與保護片同時往積載站移送；在積載站 上，交互地積載玻璃基板與保護片；以及同時對載置於保 護片上的玻璃基板與保護片進行保持；於積載站令設置用 以積載的積載手段，其中積載手段具有挾持部，挾持從載 參 置狀態下的玻璃基板所露出的保護片的邊緣部分中互相相 對的兩邊緣。。 基於上述，藉由本發明相關的玻璃基板捆包裝置與其 相包方法，能夠實現玻璃基板與其保護片的高迷搬送，'並 且以高精度達成高品質的積載捆包，因而能夠對捆包系統 的可靠度的提升有所貢獻。 ^ 為讓本發明之上述特徵和優點能更明顯易懂，下文特 舉實施例，並配合所附圖式，作詳細說明如下。 11 201014772 【實施方式】 以下，參照所附圖面來說明本發明的實施型熊。 圖1為示意本發明-實施型態相關的破璃基g拥包裝 置1的俯視圖。此捆包裝置i為用以進行下列動作的裝置： 在載置站2上將玻璃基板4載置於保護片3上，且將載置 後的玻璃基板4連同保護片3同時往積载站5移送，'且在 積載站5上交互地積載玻璃基板4與保護片3。具體來說， 此捆包裝置1包括··玻璃基板供給裝置1G ;麵基板移載 裝置20’在玻璃基板4的供給站6上接受玻璃基板4的供 給，且往載置站2移触璃基板4，其巾供給站6被配設 成與玻璃基板供給裝置10相鄰接；保護片供給裝置3〇， 被配設成與載置站2相鄰接，且在載置站2上供給保護片 3 ;積載裝置40，同時保持被載置於保護片3上的 板4與保護片3,且在積載站5上進行鋪；以^3 板裝置50，具有積載站5。以下，主要參照圖2所示的捆 包裝置1的立體圖，藉以詳細說明各構成元件。 玻璃基板供給裝置10具有用於以水平姿勢搬送玻璃 基板4的輸送道11，此輸送道U例如由複數個滾筒輸送 裝置（roller conveyer) 12等所構成。如圖2所示的例子， 在輸送道11的終端位置上配設該供給站6，用以取得來自 玻璃基板移載裝置20的玻璃基板4。在供給站6上，凹部 13的形狀能夠在鉛直上下的方向中使後述的機械手臂22 的工作保持部28通過，且被形成為往玻璃基板供給裝置 10的供給方向的侧方向成開放的狀態。於是，把在供給站 12 201014772 上呈停止狀L的柄基板4肋部丨 持部28來保持，就這檨於卜太兩山 下藉由作保 7 &樣於上方取出。再者，雖然圖示省略， =在輸送道U上配設適#的位置娜手段，糊整停正 f供給站6上的玻璃基板4的搬送方向位置献搬送的正 父方向位置。The above problem is solved by the packing device for a glass substrate according to the present invention. That is, the packaging device is a glass substrate packaging device, comprising: a mounting station for placing the glass substrate on the protective sheet; a stowage station, a parent mutual load protection sheet and a glass substrate; and a stowage means to be placed The glass substrate on the protective sheet and the protective sheet are simultaneously held and stowed at the stowage station. This glass substrate packing apparatus is characterized in that the stowage means has a holding portion for holding both edges of the edge portion of the protective sheet exposed from the glass substrate in the placed state. In this way, if the protective sheet is in a state in which the glass substrate is placed, and the opposite edges of the protective sheet from the edge portion of the glass substrate are held by each other, the ship touches the side of the holding The edge side that is held is subjected to a large shake and deformation. Further, by holding the Lai in a state in which the glass substrate is placed, the Lin holds the protective sheet in a flat state. Further, by holding the protective sheets facing each other, the two edges do not cause the problem of detachment due to the suction (four) and the secret transfer direction, and the protective sheet can be surely held. Based on the above, not only does the sheet not detach, but the reaction force (such as the robot arm, etc.) received by the wind is small, and == can. In addition, in the case of high-speed transfer for stowage = making an enemy fold or a zigzag on the protective sheet = stacking the glass substrate with a high degree of accuracy. 7 201014772 Here, the grip portion may be configured to be capable of gripping an edge portion other than the two edges facing each other in the edge portion of the protective sheet. When there is a portion exposed from the glass substrate in the edge portion of the protective sheet, it is easily shaken by the wind pressure during the transfer, and as described above, not only the opposite edge exposed from the glass substrate but also the other side The edge portion is held by the grip, whereby the portion that is easy to shake is fixed, and the shaking of the entire protective sheet can be further reduced. Further, the holding portion may be configured to be capable of holding each of the edge portions at a plurality of positions. Generally, since the protective sheet has the same size or larger size as the glass substrate, the size of the edge portion exposed from the glass substrate is also a considerable size. Therefore, by holding one edge portion by two or more gripping portions, the edge portion can be gripped and fixed in a wide range, so that the stability is increased. Further, the holding portion may be configured to be capable of applying tension to the protective sheet. With such a configuration, the tension is applied to a wide area of the protective sheet, and the protective sheet can be transferred while maintaining the tension applied. Therefore, the protective sheet is considerably less affected by the wind pressure during the transfer, so that the protective sheet and the glass sheet can be stowed in a high speed and stable posture. Alternatively, the packing device according to the present invention may be provided with a tension applying means for applying tension to the protective sheet on the mounting station, in addition to the holding portion. With such a configuration, when the protective sheet to which the tension is applied is placed on the glass, the adhesion between the two is raised upward. Therefore, it is possible to maintain the adhesion and the separation of the protective sheet and the glass substrate, respectively. In this case, the protective sheet at the time of sending is hardly shaken, and wrinkles or zigzags do not occur. 201014772 In addition, if tension is applied to the protective sheet before being placed on the glass substrate, the protective sheet can be stretched by the applied tension and will not be affected by the ΐϊ基ϋΐΐ, but when the protective sheet is held. The posture is stable. The generation of the positional deviation from the glass substrate when the tension is applied can also be avoided.虽 Although the structure, material f, etc. of the f-protective sheet are not limited, it is preferable to apply the resin, and if it is a foamed structure, the composition of the two materials is 'in order to optimize the stretchability, the adhesion of the protective sheet can be elongated. , the glass substrate and the segmental device can also be placed according to the stowage hand, and the removal station and the loading station are moved and hand-held according to the holding hand; often, since the glass substrate is suitable according to + There is a lot of possibility that the industry space has duplicates. The correct removal station β is as follows: 'If the glass substrate and the protective sheet are kept in different positions, the holding operation of each operation can be avoided; the work J (where the protective sheet and the glass-based space are thinner) In the domain 4, the mobility of each transport means can also improve the reliability of the "storage"-series_package system. The related packing device of the present invention can further include a supply protection on the station 9 201014772. In this case, the sheet feeding means can also be used to form a wire (4) to the dragon station and to place the glass substrate, and then the protective material is taken out and the material is removed. By means of the transport means, (4) the protective pattern is taken out from the mounting station and then taken out. Further, in the case of this configuration, for example, the tension applying means and the sheet for applying tension to the protective sheet on the mounting station can be used. And (4) supplying a protective sheet in a tension state to the mounting station. Further, the packing device according to the present invention may further include a transfer means for feeding the glass substrate from the supply glass. The supply station of the substrate goes to the loading station Further, in this case, the transfer means approaches the mounting station in a state where the front end side of the glass substrate in the traveling direction is downward and the glass substrate is inclined. The movement path of the glass substrate is similar to the mounting posture. Although it is important to increase the speed at which the glass substrate is transferred to the protective sheet in order to shorten the production time, if the glass substrate is moved at a high speed, the glass is transferred from the glass. The flow of air generated by the substrate causes the protective sheet placed on the mounting station to be blown up, or there is a concern that a large amount of shaking occurs. In this case, the packing device including the transfer means for the transfer path can be borrowed. In a similar manner to the above-described posture, the air resistance received by the glass substrate is reduced, so that the glass substrate can be transferred at a high speed. Further, the air flow generated by the posture change of the glass substrate mainly occurs by the above-described posture change. In the direction away from the mounting station. With the above design, not only can the glass substrate be transferred at high speed, but also The glass substrate is weakened by the airflow generated by the mounting station at 201014772, and it is possible to prevent the protective sheet on the mounting station from being blown up and wrinkles or treble due to large shaking. Further, when the transfer path is used, The ratio of the amount of horizontal movement of the glass substrate to the amount of decrease in the glass substrate is increased to approach the transfer path of the mounting station. In this case, the amount of drop of the glass substrate, the amount of horizontal movement, and the like can be evaluated, for example, based on the position of the center of gravity of the glass substrate. According to the above configuration, since it is less than the case where it is orthogonal to the entire direction of the glass substrate, it is not required to be transferred in the direction along the approach direction in accordance with the posture of the glass substrate, so that the entire glass substrate is transferred. When the air flow is generated, the air flow generated toward the mounting station can be made weaker. On the other hand, the solution to the problem can be achieved by the following substrate packing method: placing the glass substrate on the mounting station Go to the protective sheet; transfer the placed glass substrate and the protective sheet to the stowage station at the same time; at the stowage station, interactively accumulate the glass a substrate and a protective sheet; and simultaneously holding the glass substrate and the protective sheet placed on the protective sheet; and a stowage means for stowage at the stowage station, wherein the stowage means has a holding portion for holding the glass from the loaded state Two edges of the edge portion of the protective sheet exposed by the substrate opposite to each other. . According to the glass substrate packaging apparatus and the packaging method therefor according to the present invention, it is possible to realize the high-transportation of the glass substrate and the protective sheet, and to achieve a high-quality stowage package with high precision, and thus it is possible to apply to the packaging system. The improvement in reliability has contributed. The above-described features and advantages of the present invention will become more apparent from the following description. [Embodiment] Hereinafter, an embodiment bear of the present invention will be described with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a glass-filled package 1 according to the present invention. The packing device i is a device for performing the following operations: placing the glass substrate 4 on the protective sheet 3 on the mounting station 2, and simultaneously placing the placed glass substrate 4 together with the protective sheet 3 toward the stowage station 5, transfer, and the glass substrate 4 and the protective sheet 3 are alternately stacked on the stowage station 5. Specifically, the packaging device 1 includes a glass substrate supply device 1G, and the surface substrate transfer device 20' receives the supply of the glass substrate 4 at the supply station 6 of the glass substrate 4, and moves the glass to the mounting station 2. The substrate 4 has a towel supply station 6 disposed adjacent to the glass substrate supply device 10, and a protective sheet supply device 3A disposed adjacent to the mounting station 2 and supplied to the mounting station 2 The protective sheet 3; the load-carrying device 40 while holding the plate 4 and the protective sheet 3 placed on the protective sheet 3, and is laid on the stowage station 5; and the plate device 50 has the stowage station 5. Hereinafter, the constituent elements of the packaging device 1 shown in Fig. 2 will be mainly referred to, and the respective constituent elements will be described in detail. The glass substrate supply device 10 has a transport path 11 for transporting the glass substrate 4 in a horizontal posture, and the transport path U is constituted by, for example, a plurality of roller conveyers 12 or the like. In the example shown in Fig. 2, the supply station 6 is disposed at the end position of the transport path 11 for acquiring the glass substrate 4 from the glass substrate transfer device 20. In the supply station 6, the shape of the recessed portion 13 can pass through the operation holding portion 28 of the robot arm 22 to be described later in the vertical direction, and is formed in a state in which the side direction of the supply direction of the glass substrate supply device 10 is open. . Then, the shank holding portion 28 of the shank substrate 4 which is stopped in the stop position L on the supply station 12 201014772 is held, so that it is taken out at the top of the mountain. In addition, the illustration is omitted, and the position of the position of the glass is arranged on the conveyance path U, and the position in the conveyance direction of the glass substrate 4 on the supply station 6 is the position in the normal direction.
玻璃基板移載裝置20包括基座21、配設於基座21上 的機械手臂22、㈣機械手臂22動作的控職置23。在 此，機械手臂22具有多關節構造，且各關節轴全部以互相 平行且沿著配Ϊ於供給站6上的麵絲4 _側端面的 方向而配置。換句話說，被工作保持部2S所歸的玻璃基 板4的法線相對任一的關節轴都是經常保持正交的姿勢， 以對應於機械手臂22的構造、供給站6、載置站2等來設 定機械手臂22的設置姿勢。在此圖示的例中，玻璃基板移 載裝置20如圖1所示般被配置在供給站6與載置站2之間 所形成的玻璃基板4的移送路徑的侧邊。 於此’將對機械手臂22進行詳述，如圖2所示般， 機械手臂22為3軸關節構造’位置最靠近基座21的第一 連桿（link) 24相對基座21而共同直立設置著，藉由第一 接頭（joint) 24a使第二連桿25的一端與第一連桿24的 另一端相連結。在第二連桿25的另一端藉由第二接頭25a 而連結至第三連桿26的一端，在第三連桿26的另一端藉 由第三接頭26a而連結工作保持部28的腕部27。各接頭 24a、25a、26a的附近分別一體地配設著驅動馬達（只有 第一接頭24a用的驅動馬達於圖6中有表示），這些驅動 13 201014772 馬達與各連桿24、25、26共同地構成機械手臂22。再者， SSL24': ΐ :加裝有減速機’或者使用附有減 、、…達來作為前述的驅動馬達也可以。還有，此時所 =的減速機是為了進—步提高手臂的剛性而能夠抑制後 座力（backlash)發生的減速機（例如，株式會社三共製 作所製作的零後座力精誠速機的滾筒驅㈣（註冊商標） ，）也是適當的。此外，各連桿24、25、26 _分別藉由 ❹ 各接頭24a、25a、26a而獨立地正逆旋轉，且按照迴轉角 度，連桿相互間或是與周邊的物體不會產生干涉。 工作保持部28具有讓設置於輸送道丨丨上對應_ 6的對應位置的凹部13能在财方向上通過的^供= 圖不中’複數個絲部平行配置，也就是具有所謂的梳齒 形狀。工作保持部28的一面的侧邊配設了複數個吸附墊 29’雖然圖示省略了，但是藉由機械手臂22連接了真空泵 等的減壓手段，吸附墊29所壓附的物體（玻璃基板4^變 得能夠被吸附保持。 保護片供給裝置30主要包括：滾筒狀片31，形成為 捲取保護片3的帶狀體的型態；張力調整機構32，使伸出 的滚筒狀片31的張力保持一定，且用以讓滾筒狀片31伸 出的長度保持一定；旋轉切刀（r〇taiycutter) 33，將伸出 的滚筒狀片31以預定長度且以枚葉狀（矩形狀）地切斷； 以及搬送手段’將枚葉狀地切斷後的保護片3—片一片地 向載置站2進行搬送。 滚请狀片31及保護片3例如使用發泡聚乙稀 14 201014772 (polyethylene )等具有伸縮性的材質乃至於具有結構 物質，但特別是並不限定於此。保護片3為公知的材質， 只要是具有結構性的物質都可任意使用。還有，雖然圖示 置能夠對備用的滾筒狀片31與使用中的 /袞同狀片31父換的機構。 ❹ ❿ 並且，對搬送手段詳細地說明，搬送手段由以下所構 成：輸送道34，從旋轉切刀33的配設位置開始經由載置 站2而延伸到玻璃基板4的取出站7;左右―對夾頭部％、 35，挾持著輸送道34上所供給的保護片3，將被挟持的保 護片3從載置站2搬送到取出站7;以及第—滑動（siide) 機構36，同步地將左右—對的夾頭部％％沿著保護片3 的搬送方向移動。如此圖示的例子中，2㈣左右一對的 夾頭部35、35沿著搬送方向配設，輸送道34上被載置的 保護片3的左右兩側的邊緣部3a、扑（參照後述的圖4) 刀別以兩個的夾頭部35(即4個夹頭部35)來夾持。然後， 前述兩組的左右一對的夾頭部35、35同步地藉由第一滑動 機構36而沿著搬送方向移動，使得義前述—對的夾頭部 35、35所挾持的保護片3變得能夠沿著輸送道搬送。又， 第:滑動機構36例如為滑軌（rail)機構，且可由設置於 夾頭部35側邊的凹部以及與此凹部嵌合的凸條部所構 成。後述的第二滑動機構37也具有相同的構成。 還有，此實施型態中，在各個的夾頭部35與第一滑 動機構36之間，設置有第二滑動機構37，能夠讓夾頭部 35與第一滑動機構36獨立地以搬送的正交方向來滑動。 15 201014772 在此場合，左右一對的夾頭部35、35藉由第一滑動機構 36而沿著保護片3的搬送方向共同移動，此移動是獨立 的’能夠在保護片3的搬送方向上成正交的方向相互靠近 也能互相遠離。此外，此實施型態中，如圖2或後述的圖 6所示，左右一對的夾頭部35,、35,具有前述構成的第一 及第二滑動機構36，37，且分別地設置於已述的夾頭部 35、35的内側。又，在前述的夾頭部35’、35，的第一滑動 機構36與第二滑動機構37之間設置有第三滑動機構％，The glass substrate transfer device 20 includes a susceptor 21, a robot arm 22 disposed on the susceptor 21, and (4) a control unit 23 for operating the robot arm 22. Here, the robot arm 22 has a multi-joint structure, and each of the joint shafts is disposed in parallel with each other and along a direction of the end face 4 _ side end surface of the supply station 6. In other words, the normal line of the glass substrate 4 returned by the work holding portion 2S is always in a posture orthogonal to any of the joint axes to correspond to the structure of the robot arm 22, the supply station 6, and the mounting station 2. Wait until the setting posture of the robot arm 22 is set. In the illustrated example, the glass substrate transfer device 20 is disposed on the side of the transfer path of the glass substrate 4 formed between the supply station 6 and the mounting station 2 as shown in Fig. 1 . Here, the robot arm 22 will be described in detail. As shown in FIG. 2, the robot arm 22 is a 3-axis joint structure. The first link 24 closest to the base 21 is erected with respect to the base 21. It is provided that one end of the second link 25 is coupled to the other end of the first link 24 by a first joint 24a. The other end of the second link 25 is coupled to one end of the third link 26 by the second joint 25a, and the wrist of the work holding portion 28 is coupled to the other end of the third link 26 by the third joint 26a. 27. A drive motor is integrally provided in the vicinity of each of the joints 24a, 25a, and 26a (only the drive motor for the first joint 24a is shown in Fig. 6), and these drives 13 201014772 are common to the respective links 24, 25, and 26 The robot arm 22 is formed. Furthermore, SSL24': ΐ: a reducer is attached or a drive motor with the minus, ... can be used as the aforementioned drive motor. In addition, the reducer that is used in this case is a reducer that can suppress the occurrence of a backlash in order to increase the rigidity of the arm (for example, the drum of the zero-rear force machine manufactured by Sankyo Co., Ltd.) Drive (4) (registered trademark),) is also appropriate. Further, each of the links 24, 25, 26_ is independently rotated forward and backward by the respective joints 24a, 25a, 26a, and the links do not interfere with each other or with the surrounding objects in accordance with the angle of rotation. The work holding portion 28 has a recess 13 that is disposed at a corresponding position on the transport ball 对应 corresponding to _6, and can be passed in the direction of the yoke. The plurality of wires are arranged in parallel, that is, having so-called comb teeth. shape. A plurality of adsorption pads 29 ′ are disposed on the side of one surface of the work holding portion 28 . Although the illustration is omitted, a pressure reducing means such as a vacuum pump is connected to the robot arm 22 , and the object to be adhered by the adsorption pad 29 (glass substrate) The protective sheet supply device 30 mainly includes a roll-shaped sheet 31 formed in a strip shape of the take-up protective sheet 3, and a tension adjusting mechanism 32 for extending the rolled sheet 31. The tension is kept constant, and the length for extending the roller-shaped sheet 31 is kept constant; the rotary cutter 33 is used to extend the roller-shaped sheet 31 by a predetermined length and in a leaf shape (rectangular shape). And the transporting means 'transporting the protective sheet 3 which has been cut in a leaf shape to the mounting station 2 one by one. The rolling sheet 31 and the protective sheet 3 are, for example, foamed polyethylene 14 201014772 ( The material having elasticity and the like has a structural substance, but is not particularly limited thereto. The protective sheet 3 is a known material, and any material having a structure can be used arbitrarily. Able to spare The tubular piece 31 is a mechanism that is replaced by the parent piece 31 in use. ❹ ❿ In addition, the conveying means will be described in detail, and the conveying means is constituted by the conveying path 34 from the arrangement position of the rotary cutter 33. The take-out station 7 that has been extended to the glass substrate 4 via the mounting station 2; the right and left collet heads %, 35 hold the protective sheet 3 supplied on the transport path 34, and the held protective sheet 3 is placed thereon. The station 2 is transported to the take-out station 7; and the first-sliding (siide) mechanism 36 synchronously moves the left-right pair of heads %% along the transport direction of the protective sheet 3. In the illustrated example, 2 (four) is about one The pair of chuck heads 35 and 35 are disposed along the transport direction, and the left and right edge portions 3a of the protective sheet 3 placed on the transport path 34 and the flaps (see FIG. 4 described later) are clipped by two clips. The heads 35 (i.e., the four chucking heads 35) are clamped. Then, the pair of left and right pair of chucking heads 35, 35 are synchronously moved by the first sliding mechanism 36 in the transporting direction, so that The protective sheet 3 held by the pair of chucking heads 35, 35 can be transported along the conveying path. The mechanism 36 is, for example, a rail mechanism, and may be constituted by a recess provided on the side of the chuck portion 35 and a ridge portion fitted to the recess portion. The second slide mechanism 37 to be described later also has the same configuration. In this embodiment, a second sliding mechanism 37 is provided between each of the chuck portions 35 and the first sliding mechanism 36, so that the chuck portion 35 and the first sliding mechanism 36 can be transported independently of each other. 15 201014772 In this case, the pair of left and right chucking heads 35, 35 are moved together along the conveying direction of the protective sheet 3 by the first sliding mechanism 36, and this movement is independent of being able to be in the protective sheet The directions in which the directions of the three directions are orthogonal to each other can also be distant from each other. Further, in this embodiment, as shown in FIG. 2 or FIG. 6 described later, the pair of right and left chucking heads 35, 35 have the first and second sliding mechanisms 36, 37 of the above-described configuration, and are provided separately. On the inside of the clip heads 35, 35 already described. Further, a third sliding mechanism % is provided between the first sliding mechanism 36 and the second sliding mechanism 37 of the aforementioned chuck portions 35' and 35,
使得各滑動機構％、37能夠在鉛直上下方向移動。透過以 G 上的構成’藉由外側的夾頭部35、35挾持保護片3往載置 站2搬送的時候’内側的夾頭35，、35，也根據外側的夾頭 部35、35往下方移動的狀態而從搬送方向的下游側（載置 站2側）往上游側（保護片3挾持位置側）移動；藉由内 側的夾頭部35，、35,挾持保護片3往载置站2搬送的時候， 外側的夾頭部35、35在與内側的夾頭部35’、35,比較下以 向搬送方向側邊移動的狀態而向搬送方向的更上游測移 動，如此一來，藉由雙方的夾頭部35、35，交互地挾持保 護片3而變得能夠搬送。 再者，如圖2所示般，在輸送道34上也可設置氣浮 面板（air float panel) 38，其設有氣浮用的多個喷出孔。 藉由如此構成，對輸送道34上所載置的保護片3喷射氣 體，以在搬送時能夠減輕保護片3的摩擦抵抗。 並且，前述的氣浮面板38之間亦可另外形成有沿著 搬送方向的溝部，把玻璃基板4壓到水平方向用的橫桿 16 201014772 (bar)(省略圖不）從這個溝部突出於上方，且與前述四 個夹頭部35同步地往溝部内移動。 藉由這獅構成，㈣將保護片3上載置的玻璃基板 4與該保護片3同時往取出站7搬送。The sliding mechanisms %, 37 are allowed to move in the vertical up and down direction. By the configuration of G, when the protective sheet 3 is transported to the mounting station 2 by the outer chucks 35 and 35, the inner chucks 35 and 35 are also guided by the outer chucks 35 and 35. The state of the lower movement moves from the downstream side (the mounting station 2 side) in the transport direction to the upstream side (the protective sheet 3 holding position side), and the protective sheet 3 is placed by the inner chuck portions 35, 35. When the station 2 is transported, the outer chucks 35 and 35 are moved further in the transport direction in a state of being moved to the side in the transport direction, as compared with the inner chucks 35' and 35. The protective sheets 3 are alternately held by the chuck portions 35 and 35 of both sides, and can be transported. Further, as shown in Fig. 2, an air float panel 38 may be provided on the conveying path 34, which is provided with a plurality of ejection holes for air flotation. According to this configuration, the gas is ejected to the protective sheet 3 placed on the transport path 34, so that the frictional resistance of the protective sheet 3 can be reduced at the time of transport. Further, a groove portion along the conveyance direction may be separately formed between the air floating panels 38, and the cross member 16 201014772 (bar) for pressing the glass substrate 4 in the horizontal direction (not shown) protrudes from the groove portion. And moving in the groove portion in synchronization with the aforementioned four chuck portions 35. According to this lion configuration, (4) the glass substrate 4 on which the protective sheet 3 is placed is conveyed to the take-out station 7 simultaneously with the protective sheet 3.
玻璃基板積餘置4G主要包括基座41與設置於基座 :ι上的機械手臂42,而取出站7與積載站5配設在機械手 的可祕圍崎涵括的位置。在賊手臂42的前端 权置有保持部43 ’關時保持玻璃基板4與保護片3。在 圖3所示’保持部43具有：略呈格子狀的框架（f) ’吸附塾45，配設於框架體的各框邊的-面，用以吸 玻璃基板4 ;複數個挾持部46，在保護片3載置玻 璃^ 4時，分職持保護# 3互相姆的左右邊緣部 今料w照圖4)。挟持部46由一對的爪部所構成。在 中，隨著可動爪部例如藉由氣紅（咖㈣ 之門成段所驅動而制_作時，與111定側的爪部 可 片3進行挾持或開放的情況。在此圖示 體44兩側的框邊分別配設有3個挾持部， 而此夠挾持取出站7上的保護片3 3a、3b的各3個地方。 遭緣4 實施賴中，在設置複數個挾持部46的 兩侧框邊_結社雜邊上連財平㈣— ^ 的保護片3的上侧邊緣部& (參關彳）。摘保持後达 在此實施型態中，捆包平板裝置50包括：兩台捆包 17 201014772 用平板51、51 ;以及旋轉台（turatabie) 53，載置這些拥 包用平板51、51，且能夠以鉛直軸來旋轉。於此，各拥包 用平板62具有以任何的預定角度而傾斜的積载面％，且 複數個玻璃基板4與保護片3能夠交替地積載在此積載面 52上。此情況下，積載站5配設在與上述的玻璃基板積載 裝置40的機械手臂42的可動範圍中所包含的侧邊(或更靠 近機械手臂42的側邊)的積載面52相同的位置。 以下’將對利用上述構成的玻璃基板捆包裝置1所進 行的玻璃基板4的積載捆包作業的一個例子進行說明。 ❿ 首先，經由玻璃基板供給裝置1〇搬送到輸送道u上 的玻璃基板4在到達位於輸送道U末端位置的供給站u 時，會藉由適當的感測器（sensor)(省略圖示）來感知 此I#况，且停止滾筒輸送裝置12。藉此，玻璃基板4減速 停止而設定在供給站6上。然後，對配置於前述供給站6 上的破璃基板4的輸送道π侧的表面（内面）以設置在基 ，移載裝置20的工作保持部28的吸附墊29來吸附保持 著且使被保持的玻璃基板4隨著内外反轉動作而往載置 爲 站2移送。 ¥ s另一方面，就保護片供給裝置3〇而言，是藉由張力 調整機構32及旋轉切刀33而從滾筒狀片31定尺寸地切出 枚，狀的保護片。切出的保護片3同時供給到輸送道34， ，又到配設於輸送道34的兩侧上的兩組的左右一對夾頭 35所挟持。並且，當所有的夾頭部％同步地藉由 月動機構36而沿著輸送道34移動時’被這些夾頭部 201014772 35所挾持的保護片3會被搬送到載置站2。然後，藉由破 璃基板移載裝置20，將玻璃基板4往載置站2移送，且破 璃基板4會被載置於先前被搬送到載置站2待命的保護片 3上。此實施型態中’保護片3所切出的尺寸會比對應的 玻璃基板4的縱方向上的尺寸還大，並且，保護片3的左 右寬度的尺寸也分別比玻璃基板4的還大。如此場合中， 例如像圖4所示，玻璃基板4被載置於保護片3時，保護 ❹The glass substrate remaining 4G mainly includes a susceptor 41 and a robot arm 42 provided on the susceptor: i, and the take-out station 7 and the stowage station 5 are disposed at a position covered by the robot. The glass substrate 4 and the protective sheet 3 are held at the front end of the thief arm 42 with the holding portion 43' turned off. The holding portion 43 shown in Fig. 3 has a frame (f) which is slightly lattice-shaped, and an adsorption port 45 which is disposed on the surface of each frame side of the frame body for sucking the glass substrate 4; a plurality of holding portions 46 When the protective sheet 3 is placed on the glass ^ 4, the left and right edge portions of each other are protected by #3. The grip portion 46 is composed of a pair of claw portions. In the case where the movable claw portion is driven by the door of the gas red (fourth), for example, the claw portion 3 of the 111 side can be held or opened. Each of the frame sides of the 44 sides is provided with three gripping portions, and this is enough to hold each of the three places of the protective sheets 3 3a and 3b on the take-out station 7. The edge 4 is implemented, and a plurality of gripping portions 46 are provided. The sides of the frame _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Two bundles 17 201014772 The flat plates 51 and 51 and the rotary table 53 are placed on the flat plates 51 and 51 and are rotatable on a vertical axis. Here, each of the wrapping plates 62 has The mounting surface % tilted at any predetermined angle, and a plurality of glass substrates 4 and protective sheets 3 can be alternately supported on the loading surface 52. In this case, the stowage station 5 is disposed on the glass substrate described above. The side included in the movable range of the robot arm 42 of the device 40 (or closer to the side of the robot arm 42) An example of the stowage operation of the glass substrate 4 by the glass substrate packing apparatus 1 of the above-described configuration will be described below. ❿ First, it is conveyed via the glass substrate supply device 1 When the glass substrate 4 on the transport path u reaches the supply station u located at the end position of the transport path U, the I# condition is sensed by a suitable sensor (not shown), and the roller transport device is stopped. 12. The glass substrate 4 is decelerated and stopped, and is set in the supply station 6. Then, the surface (inner surface) on the side of the transport path π of the glass substrate 4 disposed on the supply station 6 is placed on the base, and is transferred. The adsorption pad 29 of the work holding portion 28 of the apparatus 20 is sucked and held, and the held glass substrate 4 is placed on the station 2 as it is reversed inside and outside. On the other hand, the protective sheet supply device 3 is placed. In other words, the tension regulating mechanism 32 and the rotary cutter 33 are used to cut a piece of the protective sheet from the roller-shaped sheet 31. The cut protective sheet 3 is simultaneously supplied to the transport path 34, and Two of the conveyors 34 The upper and lower pair of chucks 35 are held by the upper and lower grippers 35. And, when all the gripper heads are moved synchronously along the transport path 34 by the lunar motion mechanism 36, they are held by these gripper heads 201014772 35. The protective sheet 3 is transported to the mounting station 2. Then, the glass substrate 4 is transferred to the mounting station 2 by the glass substrate transfer device 20, and the glass substrate 4 is placed on the previous loading carrier. The protective sheet 3 on which the station 2 stands by is placed. In this embodiment, the size cut out by the protective sheet 3 is larger than the dimension in the longitudinal direction of the corresponding glass substrate 4, and the size of the left and right widths of the protective sheet 3 Also larger than the glass substrate 4, in this case, for example, as shown in FIG. 4, when the glass substrate 4 is placed on the protective sheet 3, the protection is performed.
^ 3以預定尺寸（例如數十麵的程度）從玻璃基板4的 三個邊（左右兩邊及與這兩邊的上端所連接的上邊）露出。 再者，於此實施型態中，玻璃基板4被載置於保護片3時， 玻璃基板4的下侧邊緣部如從保護片3露出若干（例如數 mm的程度）的部分。這就是說，缺保護片3在下端邊 緣部露出的場合中，往後述的捆包用平板51 (積載站5) 積載的時候，該邊緣部會崎，且_基板4會變得被載 置於此曲折的部分上，便能_免產生朗基板4的載置 位置偏移的情形。 還有，此實施形態中’於載置站2上的保護片3被複 數個夾頭部35所挾持’且第二滑動機構％設置於各炎頭 部35與第一滑動機構36間。藉由第二滑動_ %，左右 -對的爽頭部35、35往相互地遠離的方向移動，以施加預 定的張力於保護片3上。如此處的圖2所示，藉由讓保護 片3的四角分別受到夾頭部35的拉伸，保護片㈣全體上 又到張力的施加’使得保護片3的整面呈平坦狀張開的樣 子。如此-來，施加了張力的狀態下的保護片3上會載置 19 201014772 玻璃基板4，使兩者3、4會以大範圍分布地互相緊密接合 的狀態而載置著。如上所述，載置玻璃基板4的保護片3， 藉由連續的左右一對的夾頭部35、35，同時將玻璃基板4 經由輸送道34而往玻璃基板4的取出站7搬送。 又，在此實施形態中，由於左右一對的夾頭部35、35 的搬送方向的内侧上設置有前述構成的夾頭部35,、35,，^ 3 is exposed from three sides (left and right sides and upper sides connected to the upper ends of the two sides) of the glass substrate 4 in a predetermined size (for example, several tens of degrees). Further, in this embodiment, when the glass substrate 4 is placed on the protective sheet 3, the lower side edge portion of the glass substrate 4 is exposed to a portion (for example, several mm) from the protective sheet 3. In other words, when the lower edge portion is exposed at the lower end edge portion, when the packing sheet 51 (stacking station 5) to be described later is stowed, the edge portion becomes sturdy, and the _substrate 4 becomes placed. On the tortuous portion, it is possible to avoid a situation in which the mounting position of the substrate 4 is shifted. Further, in this embodiment, the protective sheet 3 on the mounting station 2 is held by the plurality of chuck portions 35, and the second sliding mechanism % is disposed between the respective head portions 35 and the first sliding mechanism 36. By the second sliding _%, the left and right pair of cool heads 35, 35 are moved away from each other to apply a predetermined tension to the protective sheet 3. As shown in FIG. 2 herein, by allowing the four corners of the protective sheet 3 to be stretched by the chuck portion 35, respectively, the application of the tension on the entire protective sheet (4) causes the entire surface of the protective sheet 3 to be flattened. Look like. In this manner, the glass sheet 4 is placed on the protective sheet 3 in a state where tension is applied, and the glass substrates 4 are placed in a state in which the two members 3 and 4 are closely joined to each other in a wide range. As described above, the protective sheet 3 on which the glass substrate 4 is placed is conveyed to the take-out station 7 of the glass substrate 4 via the transport path 34 by the continuous pair of left and right chuck portions 35 and 35. Further, in this embodiment, the chuck portions 35 and 35 having the above-described configuration are provided on the inner side in the transport direction of the pair of left and right chuck portions 35 and 35.
所以在藉由外部的夾頭部35、35挾持保護片3且往載置站 2搬送的同時’内側的失頭部35,、35,會在與外侧的夾頭 部35、35無干涉的情形下’從輸送道34的下游侧往上游 侧移動，且由滾筒狀片31重新切出，以便在輸送道34上 能夠挾持新的後續供給的保護片3且往載置站2搬送。還 有，藉由内侧的夾頭部35，、35，來挾持保護片3同時往 载置站2搬送時，外侧的夾頭部35、35會在與内側的夾頭 部35’、35’無干涉的情形下，從輸送道34的下游侧往上游 側移動’使得輸送道34上能夠挾持新的後續供給的保護片 3且往載置站2搬送。藉此，挾持該保護片3且往載置站2 ，送’在載置了玻璃基板4後，更可往取出站7搬送而進 =上述連貫的作業，而能夠藉由外侧夾頭部35、35與内侧 夹頭部35’、35,來交互且重複地進行。 藉由出站7的保護片3與玻璃基拓 基板積載裝置40來保持後，會同時往成為一拥 為下面於載積載二If 得保護片3 的前端所設置的保持-的二=手板臂4 20 201014772 ❹ ❹ 吸附保持著。同時，玻璃基板4載置於保護片3的邊緣部 之内，且從玻璃基板4露出的兩侧的邊緣部3a、3b (參照 圖4)會由設置於保持部43的兩侧框邊上的挾持部46所 挾持著。再者，在此實施型態中，保護片3的邊緣部份内， 邊緣部3a、3b被複數個挾持部46所挾持，錢接邊緣部 3a、3b的上側邊緣部（圖4中上侧的邊緣部）允被所配設 的-整列吸附塾48所吸附保持。於是，由於如此所保持的 保護片3與玻璃基板4藉由機械手臂幻所移送，所以保護 片3在移送時的大幅度搖動、混爲匕等會被抑制且能夠^ 穩定的姿勢將保護片3往積載站5積載。 ，有，在此實施形態中，因為把施加有張力狀態下的 保護片3與玻璃基板4同時保持且積載，所以保護片3與 ，璃基板4 _合度，使得料料_姿勢也變得 二二層安定。尤其是’如上述般的在載置該 之刚施加張力於保護片3,所以在施加張力於保護片3使 之伸長時’不會受到與玻璃基板4的摩擦的影響。並且， 從圖2或圖4等的位置關係所了解者，藉由 =部位與藉由夾頭部35所夹的部位會分別設°定在不㊁ 複的位置，所以藉由夹頭部35來夾住保護片3所 加張力陳態_轉料，目此可料 部46來挾持保護片3。 3的挟持 藉由社攸覆作t，作為積載站 互地積載著保護片3與破璃基板4= 積載（積層）的片數達到預定的數量時，這些被交互 21 201014772 積層的玻璃基板4與保護片3會藉由捆包手段來捆包，且 食b夠即時地使旋轉台53旋轉’使得積載站5切換至另一個 的積載面52。藉由以上的反覆作業，玻璃 基板4的積載捆包作業會自動地繼續實施。Therefore, while the protective sheet 3 is held by the external chucks 35 and 35 and transported to the mounting station 2, the inner heads 35 and 35 are not interfered with the outer chucks 35 and 35. In the case of 'moving from the downstream side of the conveying path 34 to the upstream side, and being re-cut by the roller-shaped piece 31, a new subsequently supplied protective sheet 3 can be held on the conveying path 34 and transported to the mounting station 2. Further, when the protective sheet 3 is held by the inner chuck portions 35, 35 and simultaneously transported to the mounting station 2, the outer chuck portions 35, 35 are in the inner chuck portions 35', 35'. In the case of no interference, the downstream side of the transport path 34 is moved to the upstream side so that the protective sheet 3 of the new subsequent supply can be held on the transport path 34 and transported to the mounting station 2. Thereby, the protective sheet 3 is held and placed on the mounting station 2, and after the glass substrate 4 is placed, it can be transported to the take-out station 7 and the above-described continuous operation can be performed, and the outer chuck portion 35 can be used. 35 and the inner collet heads 35', 35 are alternately and repeatedly performed. After being held by the protective sheet 3 of the outbound 7 and the glass substrate stacking device 40, it will simultaneously become a holding-two=hand arm provided below the front end of the protective sheet 3 of the load carrying two If 4 20 201014772 ❹ ❹ Adsorption is maintained. At the same time, the glass substrate 4 is placed in the edge portion of the protective sheet 3, and the edge portions 3a, 3b (see FIG. 4) on both sides exposed from the glass substrate 4 are provided on the side edges of the both sides of the holding portion 43. The holding unit 46 is held by. Further, in this embodiment, in the edge portion of the protective sheet 3, the edge portions 3a, 3b are held by the plurality of grip portions 46, and the upper side portions of the edge portions 3a, 3b are joined (the upper side in Fig. 4). The edge portion of the column is allowed to be adsorbed and held by the arranged column. Therefore, since the protective sheet 3 and the glass substrate 4 thus held are transferred by the robot arm, the protective sheet 3 is largely shaken during the transfer, mixed, and the like, and the protective sheet can be stabilized. 3 stowage to the stowage station 5. In this embodiment, since the protective sheet 3 and the glass substrate 4 in the tension state are simultaneously held and stowed, the protective sheet 3 and the glass substrate 4 are combined so that the material_pose becomes two. The second floor is stable. In particular, when the tension is applied to the protective sheet 3 as described above, the tension is not affected by the friction with the glass substrate 4 when the tension is applied to the protective sheet 3 to be stretched. Further, from the positional relationship of Fig. 2 or Fig. 4 and the like, the position between the = portion and the clip portion 35 is set to be at a different position, so that the head portion 35 is provided. To clamp the tension sheet _ transfer material of the protective sheet 3, the protective portion 3 can be held by the material portion 46. When the number of sheets of the protective sheet 3 and the broken substrate 4 = stowage (layered) is accumulated as a predetermined number by the staging station, the glass substrate 4 which is laminated 21 201014772 is stacked. The protective sheet 3 is bundled by the packing means, and the food b is instantaneously rotated by the rotating table 53 so that the stowage station 5 is switched to the other stowage surface 52. By the above-described reverse operation, the stowage operation of the glass substrate 4 is automatically continued.
於此’將對藉由玻璃基板移載裝置2〇來移載玻璃基 ，的相關動作進行描述。如圖2所示的狀態，由於第二連 桿Μ以第-接頭24為中心而順時鐘地旋轉（將玻璃基板 4旋回至上抬方向），所以玻璃基板4能夠内外表面反轉 而移載至載置站2，但是考慮移_f的高軌以及當時 的保護片3的型態安錄的場合，可以將玻璃基板4的移 地蚊。訂’將對伽賴基_載裝置 20的移載動作的一個例子進行說明。Here, the related operation of transferring the glass base by the glass substrate transfer device 2 will be described. In the state shown in FIG. 2, since the second link 旋转 rotates clockwise around the first joint 24 (rotating the glass substrate 4 to the upward direction), the glass substrate 4 can be reversed and transferred to the inner and outer surfaces to When the station 2 is placed, the glass substrate 4 can be moved to the ground in consideration of the high rail of the shift _f and the type of the protective sheet 3 at that time. An example of the transfer operation of the Galilee_carrier 20 will be described.
、首先，如圖6所示，把工作保持部28配置在供給站 上以及已設定的玻璃基板4的正下方。在此時把第二与 頭25a定位於比第一接頭24a以及第三接頭加更上方合 位置。然後’位於此位置的工作保持部28上設置有複數布 吸附塾29，絲此複數個吸_ 29壓接於_基板* ^ :面’以吸附保持玻璃基板4。然後，依據麵基板4 ^ 略地往上方上抬的狀態’實質地開始移送的動作。即，女 圖7所示般’使第一接頭24a旋轉且使第二連桿乃以逆峡 鐘方向旋轉，且對應於使第二連桿25的旋轉動作第三讀 桿26也往逆時鐘方向旋轉，同時，使腕部27在第三接再 %旋轉時以順時鐘方向旋轉。藉由這樣的動作，把玻璃羞 板4以其移送方向的前方侧（靠近載置站2的一側）作為 22 201014772 上方位置而徐徐地-邊傾斜-邊上抬，而往載置站2移動。 如上述般把玻璃基板4往載置站2移動，如圖8所示， 藉由第二連桿25與第三連桿26在一直線上㈣，機械手 臂22會使玻璃基板4移動至錯直上方伸展的位置為止。同 時，玻璃基板4會直立’機械手臂22往錯直上方伸展的狀 態下，玻璃基板4會以其前端侧的端面朝向下方而直 狀態下使腕部27旋轉。 ❹ 於是，從此狀態繼續的腕部27往順時鐘方向旋轉， 且第二連桿25與第三連桿26分別往順時鐘方向與逆時鐘 方向旋轉（都參關8)。藉由像這樣來轉動機械手臂22， 直接連接到玻璃基板4的全體的位置上的第三接頭2如 往下方移動，餅朗基板4下降，且_基板4的行進 方向的前端侧作為下方地使玻喊板4以傾斜的狀態 =2接近。並且，使玻璃基板4的行進方向前端^ (鄰 近載置站2的端部）相對地上昇，且使後端侧相對地下降， 所以玻璃基板4的姿勢會近似於水平（載置姿勢）。 於是，上述玻璃基板的移送動作中，如圖9所示，由 =使順時鐘方向旋轉的第二連桿25逆轉而以逆時鐘方向 旋轉’所以相對於玻璃基板4全體的下降量來說水平移動 量^比率會提高，且使玻板4—方面近似於载置姿勢 且-方面朝向載置站2而往水平方向移送。藉此，如圖 所不，破璃基板4以内外面反轉的狀態而移送至正對 的保護片3的位置為止。當該移送動作進行時，玻 項暴扳4在移送時所受到的空氣阻力盡量降低，而能朝載 23 201014772 置站2高速地搬送。 於是，如圖10所示的位置，即，玻璃基板4採取大 平姿勢而由與保護片3正對的位置…方面維持該正 ^立置’且-方面使朗基板4往保護片3以直線地移動。 置=片=基板4能夠在正確地決定位置的狀態下載 ，如此的玻璃基板4的移載動作完成後，應再進行玻 =板4的移送載置動作，使工作保持部28往供給站6 2方移動。由於如此重覆作與圖6〜圖1()湖的一連串 動作:能==站6往載置站2的玻璃基板4的移載 其此Γ上，軸說明了使用朗基板捆包裝置1來對玻璃 述的=積載捆包作業的—例，但本發财然不限定於上 二裝置：作械為手積臂載4手段的玻璃基板積載裝置40或是構 臂2的保持部43，並不限定以挾持部 ttr?置狀態的玻璃基板4所露出的保護片3的邊 互相相對的兩邊緣，也是能採用前述以外的積載 料基板積餘置4G，軸在前述的實施 保持部43兩侧框邊的挾持部46來挾 閛）甲的保持部43配設於框架體44 24 201014772 的兩側框邊’且具有分·以挾持保護片3的互相相對的 左右的邊緣部3a、3b的兩個挾持部46,同時也具有挾持 由這些複數個挾持部46挾持的左右邊緣部3a、3b所連接 的上侧邊緣部3e的兩個挾持部46。其他的構成，例 於吸附塾45、48的構成是與g 4巾既述的保持部43相 所以省略其說明。 依據屬於上述構成的玻璃基板積載裝置4〇 (保持部 43)，不只由玻璃基板4所露出保護片3的邊緣部分中互 相相對的兩個邊緣部3a、3b，還有連接這些邊緣部％、3^ 的其他的邊緣部3也能被挾持著，所以在移送時容易受到 風壓而大幅度搖晃的地方須固定，使保護片全體的摇動或 因搖動，產生的折曲等的變形的情形能夠受到抑制而減 少，而能實現以高速進行高精度與高品質的搬送。 還有，在上述實施形態中，雜已對藉由設置於保護 片供給裝置3G的左右-制夾頭部35、35來施加張力於 輸送道34的保護片3進行說明，但特別是沒有必要限制於 © 此形態。例如，在玻璃基板積載裝置40的保持部43上所 設置的對應的左右-對的挾持部46、46能夠相互地接近或 也能相互遠離’且於取出站7上呈挟持保護片3的兩侧二 邊緣部3a、3b的狀態的—對的挾持部46、46互相往相互 遠離的方向移動，使得施加張力於該保護片3變得可能。 而且，在以上的說明中，關於構成玻璃基板移載裝置 20的機械手臂22,雖然是以三軸關節型的機械手臂為例來 說明，當然，沒有必要限制於此構造。只要能進行把玻璃 25 201014772 基板:從供給站6往載置站2移載的動作就可以，任意的 多關節機械手臂（例如6個自由度等的泛用型機械手臂等） 也可以使用。還有，關於構成玻璃基板積載裝置4〇的機械 手臂42也不特別限定為具體的構造，只要能把玻璃基板4 與保護片3 —體地從取出站7向積載站5移送即可可以 使用任意的多關節機械手臂。 還有，在以上的說明中，雖然是以作為移送對象的工 件的液晶顯示器用的玻璃基板4為例，但是本發明並不限 用於液晶顯示器，電槳顯示器、有機EL顯示器、FED、 © SED等的各種平面面板顯示器用的玻璃板（例如具有在 CMmm〜3.0mm範圍的板厚者）、各種電子顯示機能元件、 作為形成薄膜用的基材所用的玻璃板等，都能利用保護片 來進行積層捆包而能夠把玻璃基板全盤地作為移送對象。 雖然本發明已以實施例揭露如上，然其並非用以限定 本發明，任何所屬技術領域中具有通常知識者，在不脫離 本發明之精神和範圍内，當可作些許之更動與潤飾，因此 本發明之保護範圍當視後附之申請專利範圍所界定者為 準。 【圖式簡單說明】 圖1為示意本發明一實施型態相關的玻璃基板捆包裝 置的全體構成的俯視圖。 圖2為示意玻璃基板捆包裝置的全體構成的立體圖。 圖3為構成玻璃基板捆包裝置的玻璃基板積載裝置的 保持部的立體圖。 26 201014772 圖4為概念性地示意藉由保持部來保持玻璃基板 護片的樣態的一例的俯視圖。 、’、 蠖片：f生地示意藉由保持部來保持玻璃基板與保 護月的樣態的另一例的俯視圖。 圖6為用以說明藉由玻璃基板移載装置的移送玻 板的動作的-綱圖，且躺要開始 ς 包裝置的部分側_。 ^明基板捆 ❹ Ο ，7為用以說明藉由_基板移載裝置來進行的移送 板捆包裝且為剛開始移送後的玻璃基 玻璃進行的移送 捆包裝置的部分側視圖。且為移送動作中的玻璃基板 圖9為用以說明藉由玻璃基板 玻璃基板的動作的-例的圖，且為移的移送 捆包裝置的部分側視圖。 中的破璃基板 圖10為用以說明藉由破璃基板移 送玻璃基板的動作的-例的圖，且為置來進行的移 基板捆包裝置的部分侧視圖。 34剛完成前的玻璃 【主要元件符號說明】 1 :玻璃基板捆包裝置 2 :載置站 3 :保護片 3a、3b、3c :邊緣部 27 201014772 4:玻璃基板 5 :積載站 6 :供給站 7 :取出站 10 :玻璃基板供給裝置 11 :輸送道 13 :凹部 20 :玻璃基板移載裝置 22 :機械手臂 24、25、26 :連桿 24a、25a、26a :接頭 28 :工作保持部 29 :吸附墊 30 :保護片供給裝置 31 :滚筒狀片 34 :輸送道 35 :夾頭部 36 :第一滑動機構 37 :第二滑動機構 40 :玻璃基板積載裝置 42 :機械手臂 43 :保持部 44 :框架體 45 :吸附墊（玻璃基板用） 201014772First, as shown in Fig. 6, the work holding portion 28 is disposed directly on the supply station and directly below the set glass substrate 4. At this time, the second head 25a is positioned at a position higher than the first joint 24a and the third joint. Then, the work holding portion 28 at this position is provided with a plurality of absorbing yokes 29 which are pressed against the _substrate * ^ : face to adsorb and hold the glass substrate 4. Then, the operation of the transfer is substantially started in a state where the surface substrate 4 ^ is slightly lifted upward. That is, as shown in FIG. 7, the first joint 24a is rotated and the second link is rotated in the reverse gorge direction, and the third read lever 26 is also counterclocked in response to the rotation of the second link 25. The direction is rotated, and at the same time, the wrist 27 is rotated in the clockwise direction when the third portion is rotated again. By the above operation, the glass board 4 is lifted by the front side (the side close to the mounting station 2) in the transfer direction as the upper position of 22 201014772, and the side is lifted up to the mounting station 2 mobile. As described above, the glass substrate 4 is moved to the mounting station 2, and as shown in FIG. 8, the robot arm 22 moves the glass substrate 4 to the straight line by the second link 25 and the third link 26 in a straight line (4). Upward position up. At the same time, the glass substrate 4 is erected. When the robot arm 22 is stretched straight up, the glass substrate 4 is rotated in a straight state with the end surface on the distal end side facing downward. Then, the wrist 27 continuing from this state is rotated in the clockwise direction, and the second link 25 and the third link 26 are respectively rotated in the clockwise direction and the counterclockwise direction (all are closed). By rotating the robot arm 22 as described above, the third joint 2 directly connected to the entire position of the glass substrate 4 is moved downward, the cake substrate 4 is lowered, and the front end side of the traveling direction of the substrate 4 is downward. The glass plate 4 is brought close to the inclined state = 2. Further, the front end of the glass substrate 4 in the traveling direction (the end portion adjacent to the mounting station 2) is relatively raised, and the rear end side is relatively lowered. Therefore, the posture of the glass substrate 4 is approximately horizontal (placement posture). Then, in the transfer operation of the glass substrate, as shown in FIG. 9, the second link 25 that rotates in the clockwise direction is reversed to rotate in the counterclockwise direction, so that the level of the glass substrate 4 is lowered. The amount of movement is increased, and the glass plate 4 is approximately in the placed posture and is transferred to the mounting station 2 in the horizontal direction. As a result, the glass substrate 4 is transferred to the position of the facing protective sheet 3 in a state where the inner and outer surfaces are reversed. When the transfer operation is performed, the air resistance received by the glass bulb 4 is reduced as much as possible, and can be transported at a high speed to the station 2 201014772. Then, as shown in FIG. 10, that is, the glass substrate 4 is in a flat posture, and the position is maintained by the position facing the protective sheet 3, and the front substrate 4 is aligned to the protective sheet 3 in a straight line. Move on the ground. When the substrate 4 is mounted in a state in which the position is correctly determined, after the transfer operation of the glass substrate 4 is completed, the transfer operation of the glass plate 4 is performed again, and the work holding portion 28 is moved to the supply station 6. 2 party moves. Because of this, a series of actions with the lake of FIG. 6 to FIG. 1 are repeated: the transfer of the glass substrate 4 of the station 6 to the mounting station 2 can be performed, and the axis indicates the use of the Lang substrate packing device 1 The example of the stowage operation of the glass is described below, but the present invention is not limited to the second device: the glass substrate stowage device 40 that is the device for the hand arm 4 or the holding portion 43 of the arm 2 It is not limited to the two edges of the protective sheet 3 exposed by the glass substrate 4 in the state in which the holding portion ttr is placed, and it is also possible to use the above-mentioned carrier substrate to have a remaining 4G, and the shaft is in the above-described holding portion. The retaining portions 43 of the brackets on the side of the frame are disposed on the frame sides of the frame bodies 44 24 201014772 and have the left and right edge portions 3a that sandwich the opposing faces of the protective sheets 3 The two grip portions 46 of the 3b also have two grip portions 46 that grip the upper side edge portions 3e to which the left and right edge portions 3a, 3b held by the plurality of grip portions 46 are attached. In the other configuration, the configuration of the adsorption crucibles 45 and 48 is the same as that of the holding portion 43 described in the g 4 towel, and the description thereof will be omitted. According to the glass substrate stacking device 4〇 (holding portion 43) of the above-described configuration, not only the edge portions 3a and 3b which are opposed to each other in the edge portion of the protective sheet 3 exposed by the glass substrate 4 but also the edge portions are connected, The other edge portion 3 of the 3^ can be held by the other side. Therefore, it is necessary to fix the place where the wind pressure is greatly shaken during the transfer, and the entire protective sheet may be shaken or deformed by bending or the like. The situation can be suppressed and reduced, and high-precision and high-quality transportation at high speed can be realized. Further, in the above-described embodiment, the protective sheet 3 which is applied to the left and right chucking heads 35 and 35 of the protective sheet supply device 3G by the tension on the transport path 34 will be described, but in particular, it is not necessary. Limited to © this form. For example, the corresponding left-right pair of holding portions 46, 46 provided on the holding portion 43 of the glass substrate stacking device 40 can be close to each other or can also be apart from each other' and both of the holding sheets 3 are held on the take-out station 7. The pair of gripping portions 46, 46 in the state of the side two edge portions 3a, 3b move toward each other in a direction away from each other, so that it is possible to apply tension to the protective sheet 3. Further, in the above description, the robot arm 22 constituting the glass substrate transfer device 20 is exemplified by a three-axis joint type robot arm, and of course, it is not necessary to limit the structure. As long as the operation of transferring the glass 25 201014772 substrate from the supply station 6 to the mounting station 2 can be performed, any multi-joint robot arm (for example, a general-purpose robot arm having six degrees of freedom or the like) can be used. Further, the robot arm 42 constituting the glass substrate stacking device 4A is not particularly limited to a specific structure, and can be used as long as the glass substrate 4 and the protective sheet 3 can be integrally transferred from the take-out station 7 to the stowage station 5. Any multi-joint robotic arm. In the above description, the glass substrate 4 for a liquid crystal display as a workpiece to be transferred is taken as an example, but the present invention is not limited to a liquid crystal display, an electric paddle display, an organic EL display, FED, and A glass plate for various flat panel displays such as SED (for example, a plate having a thickness of CMmm to 3.0 mm), various electronic display functional elements, a glass plate used as a substrate for forming a film, and the like can be used with a protective sheet. By laminating the bundle, the glass substrate can be transported as a whole. Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing the overall configuration of a glass substrate bundle package according to an embodiment of the present invention. Fig. 2 is a perspective view showing the overall configuration of a glass substrate packaging device. Fig. 3 is a perspective view of a holding portion of a glass substrate stacking device constituting a glass substrate packing device. 26 201014772 FIG. 4 is a plan view conceptually showing an example of a state in which a glass substrate blank is held by a holding portion. "," 蠖片: a plan view showing another example of the state in which the glass substrate and the protection month are held by the holding portion. Fig. 6 is a plan view for explaining the operation of the transfer glass plate by the glass substrate transfer device, and the partial side of the package device is started. The clear substrate bundle ❹ Ο , 7 is a partial side view for explaining the transfer packaging device for the transfer glass package by the _ substrate transfer device and for the glass-based glass immediately after the transfer. Further, it is a glass substrate in the transfer operation. Fig. 9 is a view for explaining an example of the operation of the glass substrate glass substrate, and is a partial side view of the transfer packaging device. Fig. 10 is a view for explaining an example of an operation of transferring a glass substrate by a glass substrate, and is a partial side view of the substrate stacking device. 34 Glass just before completion [Description of main components] 1 : Glass substrate packing device 2: Mounting station 3: Protective sheets 3a, 3b, 3c: Edge portion 27 201014772 4: Glass substrate 5: Stowage station 6: Supply station 7 : Take-out station 10 : Glass substrate supply device 11 : Transport path 13 : Recessed portion 20 : Glass substrate transfer device 22 : Robot arms 24 , 25 , 26 : Connecting rods 24 a , 25 a , 26 a : Joint 28 : Working holding portion 29 : Adsorption pad 30: Protective sheet supply device 31: Roller-shaped piece 34: Conveying path 35: Clamping head 36: First sliding mechanism 37: Second sliding mechanism 40: Glass substrate stowing device 42: Robot arm 43: Holding portion 44: Frame body 45: adsorption pad (for glass substrate) 201014772
46 :挾持部 48 :吸附墊（保護片用） 50 ··捆包平板裝置 51 :捆包用平板 52 :積載面 2946 : Holding part 48 : Adsorption pad (for protective sheet) 50 ··Packing plate device 51 : Plate for packing 52 : Stowage surface 29
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008260622A JP5196158B2 (en) | 2008-10-07 | 2008-10-07 | Glass substrate packing apparatus and packing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201014772A true TW201014772A (en) | 2010-04-16 |
| TWI452003B TWI452003B (en) | 2014-09-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW098123901A TWI452003B (en) | 2008-10-07 | 2009-07-15 | Baling device for glass substrate and baling method thereof |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5196158B2 (en) |
| KR (1) | KR20110079575A (en) |
| CN (1) | CN102099272B (en) |
| TW (1) | TWI452003B (en) |
| WO (1) | WO2010041492A1 (en) |
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|---|---|---|---|---|
| TWI469899B (en) * | 2012-08-10 | 2015-01-21 | Kawasaki Heavy Ind Ltd | Plate glass packaging device |
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| JP2013100116A (en) * | 2010-03-03 | 2013-05-23 | Asahi Glass Co Ltd | Layered plate-like body |
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| JP5545597B2 (en) * | 2010-08-10 | 2014-07-09 | 日本電気硝子株式会社 | Sheet material supply apparatus and sheet material supply method |
| CN102358517B (en) * | 2011-07-19 | 2013-06-19 | 陕西彩虹电子玻璃有限公司 | Assisting method for absorbing glass substrate |
| DE102012103533A1 (en) * | 2012-04-20 | 2013-10-24 | Köra-Packmat Maschinenbau GmbH | Device for conveying a substrate and system for printing on a substrate |
| JP5768827B2 (en) * | 2013-03-14 | 2015-08-26 | 株式会社安川電機 | Robot system and workpiece transfer method |
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| JP7110546B2 (en) * | 2016-12-01 | 2022-08-02 | トヨタ自動車株式会社 | Method for determining whether an object can be lifted |
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| CN116730015A (en) * | 2023-06-27 | 2023-09-12 | 龙口市龙发玻璃有限公司 | Automobile windshield transferring, assembling and clamping device |
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- 2009-06-12 WO PCT/JP2009/060793 patent/WO2010041492A1/en active Application Filing
- 2009-06-12 KR KR1020107029414A patent/KR20110079575A/en active Search and Examination
- 2009-06-12 CN CN200980128533.5A patent/CN102099272B/en active Active
- 2009-07-15 TW TW098123901A patent/TWI452003B/en active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI469899B (en) * | 2012-08-10 | 2015-01-21 | Kawasaki Heavy Ind Ltd | Plate glass packaging device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110079575A (en) | 2011-07-07 |
| TWI452003B (en) | 2014-09-11 |
| JP5196158B2 (en) | 2013-05-15 |
| JP2010093022A (en) | 2010-04-22 |
| WO2010041492A1 (en) | 2010-04-15 |
| CN102099272B (en) | 2014-04-30 |
| CN102099272A (en) | 2011-06-15 |
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