TWI303540B - - Google Patents

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Publication number
TWI303540B
TWI303540B TW095136657A TW95136657A TWI303540B TW I303540 B TWI303540 B TW I303540B TW 095136657 A TW095136657 A TW 095136657A TW 95136657 A TW95136657 A TW 95136657A TW I303540 B TWI303540 B TW I303540B
Authority
TW
Taiwan
Prior art keywords
image
corner
angle
pattern
region
Prior art date
Application number
TW095136657A
Other languages
English (en)
Chinese (zh)
Other versions
TW200723980A (en
Inventor
Norio Asai
Yuji Akagi
Jun Onishi
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200723980A publication Critical patent/TW200723980A/zh
Application granted granted Critical
Publication of TWI303540B publication Critical patent/TWI303540B/zh

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach

Landscapes

  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW095136657A 2005-12-13 2006-10-03 Differential comparison inspection method and apparatus thereof TW200723980A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005358962A JP2007163259A (ja) 2005-12-13 2005-12-13 差分比較検査方法および差分比較検査装置

Publications (2)

Publication Number Publication Date
TW200723980A TW200723980A (en) 2007-06-16
TWI303540B true TWI303540B (ja) 2008-11-21

Family

ID=38165559

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095136657A TW200723980A (en) 2005-12-13 2006-10-03 Differential comparison inspection method and apparatus thereof

Country Status (4)

Country Link
JP (1) JP2007163259A (ja)
KR (1) KR100821038B1 (ja)
CN (1) CN1982880A (ja)
TW (1) TW200723980A (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010128795A (ja) * 2008-11-27 2010-06-10 Aisin Seiki Co Ltd 障害物検出装置
JP5169907B2 (ja) * 2009-02-27 2013-03-27 ブラザー工業株式会社 ヘッドマウントディスプレイ
CN103674959A (zh) * 2012-09-21 2014-03-26 英业达科技有限公司 电路板上电子元件的检测***及其方法
JP6675831B2 (ja) * 2015-03-27 2020-04-08 株式会社日立産機システム 印字検査方法及びそれを用いた印字検査装置及び印字検査装置本体
US9646191B2 (en) * 2015-09-23 2017-05-09 Intermec Technologies Corporation Evaluating images
JP7293046B2 (ja) * 2019-08-23 2023-06-19 東レエンジニアリング株式会社 ウエーハ外観検査装置および方法
CN111739020B (zh) * 2020-07-31 2020-12-01 成都数之联科技有限公司 周期纹理背景缺陷标签自动标注方法、装置、设备及介质
CN113340909B (zh) * 2021-08-05 2021-11-16 常州铭赛机器人科技股份有限公司 一种基于机器视觉的胶线缺陷检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4648053A (en) 1984-10-30 1987-03-03 Kollmorgen Technologies, Corp. High speed optical inspection system
JPH06185999A (ja) * 1992-12-21 1994-07-08 Toshiba Corp パターン検査方法及びその装置
GB2389178B (en) 2001-12-31 2004-10-27 Orbotech Ltd Method for inspecting patterns

Also Published As

Publication number Publication date
CN1982880A (zh) 2007-06-20
KR20070062905A (ko) 2007-06-18
KR100821038B1 (ko) 2008-04-08
TW200723980A (en) 2007-06-16
JP2007163259A (ja) 2007-06-28

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees