TWI303540B - - Google Patents
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- Publication number
- TWI303540B TWI303540B TW095136657A TW95136657A TWI303540B TW I303540 B TWI303540 B TW I303540B TW 095136657 A TW095136657 A TW 095136657A TW 95136657 A TW95136657 A TW 95136657A TW I303540 B TWI303540 B TW I303540B
- Authority
- TW
- Taiwan
- Prior art keywords
- image
- corner
- angle
- pattern
- region
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach
Landscapes
- Engineering & Computer Science (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005358962A JP2007163259A (ja) | 2005-12-13 | 2005-12-13 | 差分比較検査方法および差分比較検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200723980A TW200723980A (en) | 2007-06-16 |
TWI303540B true TWI303540B (ja) | 2008-11-21 |
Family
ID=38165559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095136657A TW200723980A (en) | 2005-12-13 | 2006-10-03 | Differential comparison inspection method and apparatus thereof |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2007163259A (ja) |
KR (1) | KR100821038B1 (ja) |
CN (1) | CN1982880A (ja) |
TW (1) | TW200723980A (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010128795A (ja) * | 2008-11-27 | 2010-06-10 | Aisin Seiki Co Ltd | 障害物検出装置 |
JP5169907B2 (ja) * | 2009-02-27 | 2013-03-27 | ブラザー工業株式会社 | ヘッドマウントディスプレイ |
CN103674959A (zh) * | 2012-09-21 | 2014-03-26 | 英业达科技有限公司 | 电路板上电子元件的检测***及其方法 |
JP6675831B2 (ja) * | 2015-03-27 | 2020-04-08 | 株式会社日立産機システム | 印字検査方法及びそれを用いた印字検査装置及び印字検査装置本体 |
US9646191B2 (en) * | 2015-09-23 | 2017-05-09 | Intermec Technologies Corporation | Evaluating images |
JP7293046B2 (ja) * | 2019-08-23 | 2023-06-19 | 東レエンジニアリング株式会社 | ウエーハ外観検査装置および方法 |
CN111739020B (zh) * | 2020-07-31 | 2020-12-01 | 成都数之联科技有限公司 | 周期纹理背景缺陷标签自动标注方法、装置、设备及介质 |
CN113340909B (zh) * | 2021-08-05 | 2021-11-16 | 常州铭赛机器人科技股份有限公司 | 一种基于机器视觉的胶线缺陷检测方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4648053A (en) | 1984-10-30 | 1987-03-03 | Kollmorgen Technologies, Corp. | High speed optical inspection system |
JPH06185999A (ja) * | 1992-12-21 | 1994-07-08 | Toshiba Corp | パターン検査方法及びその装置 |
GB2389178B (en) | 2001-12-31 | 2004-10-27 | Orbotech Ltd | Method for inspecting patterns |
-
2005
- 2005-12-13 JP JP2005358962A patent/JP2007163259A/ja not_active Abandoned
-
2006
- 2006-10-03 TW TW095136657A patent/TW200723980A/zh not_active IP Right Cessation
- 2006-10-26 CN CNA2006101428229A patent/CN1982880A/zh active Pending
- 2006-10-30 KR KR1020060105429A patent/KR100821038B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN1982880A (zh) | 2007-06-20 |
KR20070062905A (ko) | 2007-06-18 |
KR100821038B1 (ko) | 2008-04-08 |
TW200723980A (en) | 2007-06-16 |
JP2007163259A (ja) | 2007-06-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |