CN1982880A - 差分比较检查方法及差分比较检查装置 - Google Patents

差分比较检查方法及差分比较检查装置 Download PDF

Info

Publication number: CN1982880A
Authority: CN; China
Prior art keywords: mentioned; zone; pixel; angle; image
Prior art date: 2005-12-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

CNA2006101428229A

Other languages

English (en)

Chinese (zh)

Inventor

浅井宣雄

赤木佑司

大西润

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Dainippon Screen Manufacturing Co Ltd

Original Assignee

Dainippon Screen Manufacturing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-12-13

Filing date

2006-10-26

Publication date

2007-06-20

2006-10-26 Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd

2007-06-20 Publication of CN1982880A publication Critical patent/CN1982880A/zh

Status Pending legal-status Critical Current

Links

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Images

Classifications

- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0006—Industrial image inspection using a design-rule based approach

Landscapes

Engineering & Computer Science (AREA)
Quality & Reliability (AREA)
Computer Vision & Pattern Recognition (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Theoretical Computer Science (AREA)
Image Processing (AREA)
Image Analysis (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Length Measuring Devices By Optical Means (AREA)

CNA2006101428229A 2005-12-13 2006-10-26 差分比较检查方法及差分比较检查装置 Pending CN1982880A (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2005358962		2005-12-13
JP2005358962A JP2007163259A (ja)	2005-12-13	2005-12-13	差分比較検査方法および差分比較検査装置

Publications (1)

Publication Number	Publication Date
CN1982880A true CN1982880A (zh)	2007-06-20

Family

ID=38165559

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CNA2006101428229A Pending CN1982880A (zh)	2005-12-13	2006-10-26	差分比较检查方法及差分比较检查装置

Country Status (4)

Country	Link
JP (1)	JP2007163259A (ja)
KR (1)	KR100821038B1 (ja)
CN (1)	CN1982880A (ja)
TW (1)	TW200723980A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN103674959A (zh) *	2012-09-21	2014-03-26	英业达科技有限公司	电路板上电子元件的检测***及其方法
CN106778879A (zh) *	2015-09-23	2017-05-31	英特美克技术公司	评价图像
CN107408289A (zh) *	2015-03-27	2017-11-28	株式会社日立产机***	印刷检查方法及使用其的印刷检查装置及印刷检查装置主体
CN111739020A (zh) *	2020-07-31	2020-10-02	成都数之联科技有限公司	周期纹理背景缺陷标签自动标注方法、装置、设备及介质
CN113340909A (zh) *	2021-08-05	2021-09-03	常州铭赛机器人科技股份有限公司	一种基于机器视觉的胶线缺陷检测方法
CN114222913A (zh) *	2019-08-23	2022-03-22	东丽工程株式会社	晶片外观检查装置和方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2010128795A (ja) *	2008-11-27	2010-06-10	Aisin Seiki Co Ltd	障害物検出装置
JP5169907B2 (ja) *	2009-02-27	2013-03-27	ブラザー工業株式会社	ヘッドマウントディスプレイ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4648053A (en)	1984-10-30	1987-03-03	Kollmorgen Technologies, Corp.	High speed optical inspection system
JPH06185999A (ja) *	1992-12-21	1994-07-08	Toshiba Corp	パターン検査方法及びその装置
GB2389178B (en)	2001-12-31	2004-10-27	Orbotech Ltd	Method for inspecting patterns

2005
- 2005-12-13 JP JP2005358962A patent/JP2007163259A/ja not_active Abandoned
2006
- 2006-10-03 TW TW095136657A patent/TW200723980A/zh not_active IP Right Cessation
- 2006-10-26 CN CNA2006101428229A patent/CN1982880A/zh active Pending
- 2006-10-30 KR KR1020060105429A patent/KR100821038B1/ko not_active IP Right Cessation

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN103674959A (zh) *	2012-09-21	2014-03-26	英业达科技有限公司	电路板上电子元件的检测***及其方法
CN107408289A (zh) *	2015-03-27	2017-11-28	株式会社日立产机***	印刷检查方法及使用其的印刷检查装置及印刷检查装置主体
CN107408289B (zh) *	2015-03-27	2020-12-25	株式会社日立产机***	印刷检查方法及使用其的印刷检查装置及印刷检查装置主体
CN106778879A (zh) *	2015-09-23	2017-05-31	英特美克技术公司	评价图像
CN106778879B (zh) *	2015-09-23	2022-06-03	英特美克技术公司	评价图像
CN114222913A (zh) *	2019-08-23	2022-03-22	东丽工程株式会社	晶片外观检查装置和方法
CN114222913B (zh) *	2019-08-23	2024-05-24	东丽工程株式会社	晶片外观检查装置和方法
CN111739020A (zh) *	2020-07-31	2020-10-02	成都数之联科技有限公司	周期纹理背景缺陷标签自动标注方法、装置、设备及介质
CN113340909A (zh) *	2021-08-05	2021-09-03	常州铭赛机器人科技股份有限公司	一种基于机器视觉的胶线缺陷检测方法

Also Published As

Publication number	Publication date
KR20070062905A (ko)	2007-06-18
KR100821038B1 (ko)	2008-04-08
TW200723980A (en)	2007-06-16
TWI303540B (ja)	2008-11-21
JP2007163259A (ja)	2007-06-28

Legal Events

Date	Code	Title	Description
2007-06-20	C06	Publication
2007-06-20	PB01	Publication
2007-08-15	C10	Entry into substantive examination
2007-08-15	SE01	Entry into force of request for substantive examination
2010-07-21	C02	Deemed withdrawal of patent application after publication (patent law 2001)
2010-07-21	WD01	Invention patent application deemed withdrawn after publication	Open date: 20070620

Publication	Publication Date	Title
CN1982880A (zh)	2007-06-20	差分比较检查方法及差分比较检查装置
KR100554639B1 (ko)	2006-02-24	패턴검사방법과 장치 및 패턴정렬방법
US7239735B2 (en)	2007-07-03	Pattern inspection method and pattern inspection device
US20060018534A1 (en)	2006-01-26	Technique for detecting a defect of an object by area segmentation of a color image of the object
US6347150B1 (en)	2002-02-12	Method and system for inspecting a pattern
JP4776308B2 (ja)	2011-09-21	画像欠陥検査装置、画像欠陥検査システム、欠陥分類装置及び画像欠陥検査方法
CN106530275A (zh)	2017-03-22	元件错件检测方法和***
US20110128354A1 (en)	2011-06-02	System and method for obtaining camera parameters from multiple images and computer program products thereof
US20090052765A1 (en)	2009-02-26	Pattern shape evaluation method, pattern shape evaluation device, pattern shape evaluating data generation device and semiconductor shape evaluation system using the same
JPH03232250A (ja)	1991-10-16	パターン検査方法および装置
CN102980533A (zh)	2013-03-20	检测测量目标的方法
KR19990023986A (ko)	1999-03-25	참조 화상 작성 방법 및 패턴 검사 장치
JP2002358509A (ja)	2002-12-13	穴検査装置
KR940006220B1 (ko)	1994-07-13	프린트기판상의 패턴을 검사하는 방법 및 장치
JP5660861B2 (ja)	2015-01-28	基板上の異物検査方法および異物検査装置
US7477773B2 (en)	2009-01-13	Method for inspecting a pattern and method for manufacturing a semiconductor chip having a circuit pattern
KR930002347B1 (ko)	1993-03-29	패턴위치 인식장치
JP5215545B2 (ja)	2013-06-19	電子部品の装着状況の検査方法
CN114170130A (zh)	2022-03-11	检验电路板是否存在未经授权修改
CN103904002B (zh)	2016-08-17	一种验证缺陷检测程序灵敏度的方法
JP2002168799A (ja)	2002-06-14	パターン欠陥検査方法
JPH07260699A (ja)	1995-10-13	画像データ比較装置
JP4970101B2 (ja)	2012-07-04	欠陥検出方法
JP3158640B2 (ja)	2001-04-23	パターンマッチング方法
JPH10160681A (ja)	1998-06-19	パターン欠陥検出装置及びパターン欠陥検出方法