1296897 九、發明說明： 【發明所屬之技術領域】 m 本發明係有關於液晶顯示器或電漿顯示器、有機電激 發光顯示器等平面顯示器之製造方法。 【先前技術】1296897 IX. Description of the Invention: [Technical Field of the Invention] m The present invention relates to a method of manufacturing a flat panel display such as a liquid crystal display, a plasma display, or an organic electroluminescence display. [Prior Art]
液晶顯示器與電漿顯示器等平面顯示器多用於電腦之 顯不裝置與TV顯示裝置、行動電話之顯示裝置等各種電子 產品。近來，有機電激發光顯示器的開發不斷地進步，前 景相當看好。其中上述有機電激發光顯示器具有高應答速 度以及不需要背光源就可以自己發光。 上述平面顯示器的重要課題之一就是薄型化的要求。 所謂的薄型化就是連同被搭載的電子產品也要薄型化與小 型化以及輕量化。例如，筆記型電腦與攜帶電話更要求薄 型化與輕量化，因此平面顯示器必須要朝輕薄化發展。 為了要將平面顯示器薄型化與輕量化，其中玻璃基板 疋最重要的-個要素。在液晶顯示器、電衆顯示器、有機 電激^光顯不器中’都是在一對貼合的玻璃基板之間配置 旦/、極。其中玻璃基板的比重很大，而且為了確保機械 強度而必須具有一定的厚度。因A，玻璃基板對平面顯示 器之薄型化與輕量化& i u j 1 里化的要求上造成一定程度的限制。 夕數的平面顯不器之製程中，都是從大尺寸之成對的 玻璃基板切割許多小尺寸的平面顯示器。並且在-對大尺 寸的玻璃基板中依不同用途於不同區域形成畫素電極。在 5 5147-7143-PF；Forever769 J296897 題’申請專利範圍14所記载之 距設置’而且各喷射孔至該外 另外，為了解決上述問 發明揭露··該噴射孔係以等 部之距離皆相等。 另外，為了解決上述問題， ^ Be ^ ^ 申咱專利範圍15所記載之 赞明揭路•平面顯示器，且一 H ^ ^ A 4 ^ 1已經貼合之玻璃基板， 且該對玻璃基板之内部具有光穿透控制部或發光部，· 徵在於.該ff «基板之外部被料 液係利用大於重力加速度 〃干-亥冷解 速度噴射至該外部以衝擊該 外部而削減該外部之厚声， 又其中最頂部與最底部之距離小 於〇·1微米，因此該平面顯 107 4不态具有良好之平坦性。 如下列之說明，根攄士 本發月之申請專利範圍第1項或 8項所述之發明，新鮮（泫古 a也μ .. 又有嘁入外部材料）的溶解液依序 地供給，因為融入外部材粗 ，4之、/谷解液由於衝擊的關係依序 地^出，因而可以進行效率 旱良好且均一性良好的削減製 程。即使外部之玻璃的組成與鈐曰 、、、σ日日狀悲有不均一的地方， 但疋由於併用物理作用的緣故，可以充分均一地削減。由 於上述緣故，肖m外部的平坦性提高了，所製作出的平面 顯示器之顯示性能也提高了。 另外’根據申請專利範圍第3或1〇項所述之發明，除 了上述效果之外’又因為溶解液衝擊上述外部的壓力介於 0.5W至3.5kg/cm2之間，不但可以充分地供給新鮮的 溶解液而削減玻璃基板之外部，X因為可以充分地利用物 理作用，所以即使玻璃之組成或結晶狀態不均—也可以充 分地削減玻璃基板料部，而且可以確保提高平坦性。 5147-7143-PF;Forever769 10 1296897 另外’根據申明乾圍第4或11項所述之發明，除了上 述效果之外’在喷射溶解液的時候玻璃基板外部與溶解液 呈垂直狀態，因此可以促進玻璃基板外部之溶解液的置換 效果，可以十分有效率地進行外部削減製程。 另外，根據申請範圍第5或1 2項所述之發明，除了上 述效果之外，在已經貼合之一對玻璃基板的外部同時進行 削減製程’因此整體的厚度就變薄了，所以除了有助於已 經貼合之面板的薄型化要求之外，也可以提高製程的生產 • 效率。 另外，根據申請範圍第6或13項所述之發明，除了上 述效果之外，於削減製程開始的時候噴嘴之噴射孔至基板 外部的距離係介於5mm至l〇〇mm之間，因此可以確保衝擊 地均一性0 另外，根據申請範圍第7或14項所述之發明，除了上 述效果，喷嘴之各噴射孔均等間隔設置，而且各噴射孔至 鲁外部的距離皆相同的緣故，所以可以很均一地控制喷射之 /合解液的衝擊壓力，由於上述的緣故可以提高平坦性並有 利於削減處理。 •另外根據申明範圍第15項所述之發明，因為提供薄 型化之顯示器，所以對應用之電子製品的薄型化與輕量化 相當有貢獻，另外因為提高了平坦性的緣故，因而可以提 供顯示不均之缺陷較少且具有優越性能的製品。 【實施方式】 5147-7143-PF；Forever769 11 1296897 i黑色矩陣層係沿著晝素之間的部分而形成之遮光膜，用 .於提而對比與防止現色，在多數的場合係利用圖案化製程 而形成。上述透明電極在多數的場合係利用圖案化製程而 形成之ITO膜。 、凌製程巾纟其中-個玻璃基板1的表面上圖部封 裝材料12。上述封裝材料12係沿著所產出之各LCD的輪 廉而塗佈。在上述封裝材料12所包圍之内側區域内滴下定 量的液晶13。之後’散佈間隙子，並在預定的位置上與另 • 外一個玻璃基板1對準合貼合。 接著，進行本實施例之特徵—外部削減製程。在本實施 例之外部削減製程中，將可溶解玻璃基板i之外部材料的 溶解液L對著外部噴射，其中溶解液L以大於重力加速度 之加速度對著外部喷射。利用溶解液L喷射的結果，溶解 液L的化學作用加上喷射所造成之物理作用而將外部溶 解。而且，本實施例並不是單單地散佈溶解液L，而且立 喷射的加速度也不僅僅相當於重力加速度，這是最大的不 同處。 而且在本說明書中，—對基板相互面對的内側稱為 内部，而與内部相反的則稱為外部。在本實施例之外部削 減工程中，指的是將已經貼合的一對玻璃基板（以下，稱為 已經接貼合的面板1 〇 )之雙方的外部削減的製程。 如第1圖所示’在本實施例中，冑已經接貼合的面板 10保持直立，然後在已經接貼合的面板10的兩側配置噴 嘴4,並由喷嘴4喷射出溶解液L。上述溶解液[可以使用 5147-7143-PF;Forever769 13 !296897 -性良好的削減製程。即使外部之破璃的組成與結晶狀態 =不均一的地方，但是由於併用物理作用的緣故，可以充 分均—地削減。由於上述緣故，削減外部的平坦性提高了， 所製作出的平面顯示器之顯示性能也提高了。 接著’說日月適用於上述製造方法之外部削減袭置。以 下的說性係包括外部削減裝置的一較佳實施例。Flat-panel displays such as liquid crystal displays and plasma displays are widely used in various electronic products such as display devices for computers, display devices for TV displays, and display devices for mobile phones. Recently, the development of organic electroluminescent display has been progressing steadily, and the prospects are quite promising. The above organic electroluminescent display has a high response speed and can emit light by itself without requiring a backlight. One of the important issues of the above flat panel display is the requirement for thinning. The so-called thinning is to reduce the thickness, size, and weight of the electronic products to be mounted. For example, notebook computers and mobile phones are required to be thinner and lighter, so flat-panel displays must be thinner and lighter. In order to make the flat panel display thinner and lighter, the glass substrate is the most important element. In the liquid crystal display, the electric display, and the organic electro-optical display, the denier/pole is disposed between a pair of bonded glass substrates. Among them, the glass substrate has a large specific gravity and must have a certain thickness in order to secure mechanical strength. Due to A, the glass substrate imposes a certain degree of limitation on the requirements for thinning and weight reduction of the flat display & i i j j 1 . In the process of the planar display of the eves, many small-sized flat-panel displays are cut from a large-sized pair of glass substrates. Further, in a large-sized glass substrate, a pixel electrode is formed in different regions depending on the application. In the case of 5 5147-7143-PF; Forever 769 J296897, the distance set as described in the patent application section 14 and the respective injection holes to the outside, in order to solve the above-mentioned problem, the injection hole is equidistantly spaced. equal. In addition, in order to solve the above problem, ^ Be ^ ^ applied for the clarification of the road surface display as described in the patent scope 15 and a glass substrate to which the H ^ ^ A 4 ^ 1 has been attached, and the inside of the pair of glass substrates The light-transmitting control unit or the light-emitting unit is characterized in that the external liquid of the substrate is sprayed to the outside by using a gravity-free acceleration-drying speed to the outside to reduce the thickness of the external sound. , wherein the distance between the topmost and the bottommost portion is less than 〇·1 μm, so the flat display 107 4 does not have good flatness. As described below, in the invention described in the first or eighth application of the patent application of the Gentleman, the freshly-dissolved liquids of the original materials are supplied sequentially. Since the external material is thick, the 4 and / gluten solution are sequentially extracted due to the impact, so that a process with good efficiency and good uniformity can be performed. Even if the composition of the outer glass is not uniform with the 钤曰, , and σ, it can be fully and uniformly reduced due to the combination of physical effects. For the above reason, the flatness of the outer portion of the xiaom is improved, and the display performance of the produced flat display is also improved. In addition, the invention according to the third or the first aspect of the patent application, in addition to the above effects, can be sufficiently supplied not only because the pressure of the solution impinging on the outside is between 0.5 W and 3.5 kg/cm 2 . Since the dissolved solution is used to reduce the outside of the glass substrate, X can sufficiently utilize the physical action. Therefore, even if the composition or crystal state of the glass is not uniform, the glass substrate portion can be sufficiently reduced, and flatness can be ensured. 5147-7143-PF; Forever 769 10 1296897 In addition, according to the invention described in the fourth or eleventh aspect of the invention, in addition to the above effects, the outside of the glass substrate is perpendicular to the solution when the solution is sprayed, so that it can be promoted. The replacement effect of the solution outside the glass substrate allows the external reduction process to be performed very efficiently. Further, according to the invention of the fifth or fifteenth aspect of the application, in addition to the above effects, the reduction process is simultaneously performed on the outer side of one of the pair of glass substrates, so that the overall thickness is thinned, so In addition to the thinning requirements of the panels that have been fitted, the production and efficiency of the process can also be improved. Further, according to the invention of claim 6 or 13, in addition to the above effects, the distance from the injection hole of the nozzle to the outside of the substrate at the start of the reduction process is between 5 mm and 10 mm, so In addition to the above effects, the injection holes of the nozzles are equally spaced, and the distances from the respective injection holes to the outside of the Lu are the same, so that it is possible to use the same according to the invention described in claim 7 or 14. The impact pressure of the jet/combination liquid is controlled very uniformly, and the above-described reason can improve the flatness and facilitate the reduction of the treatment. Further, according to the invention of the fifteenth aspect of the invention, since the display of the thinned type is provided, it contributes to the thinning and weight reduction of the electronic product to be applied, and the display can be provided because the flatness is improved. Products with fewer defects and superior performance. [Embodiment] 5147-7143-PF; Forever769 11 1296897 i The black matrix layer is a light-shielding film formed along a portion between the elements, used to compare and prevent the color, and in most cases, the pattern is utilized. Formed by the process. In many cases, the transparent electrode is an ITO film formed by a patterning process. The encapsulating material 12 on the surface of one of the glass substrates 1 is processed. The encapsulating material 12 described above is applied along the winding of each of the produced LCDs. A predetermined amount of the liquid crystal 13 is dropped in the inner region surrounded by the above-mentioned encapsulating material 12. Thereafter, the spacer is spread and aligned with another glass substrate 1 at a predetermined position. Next, the feature of the present embodiment - the external reduction process is performed. In the external reduction process of the present embodiment, the solution L which dissolves the external material of the glass substrate i is ejected to the outside, and the solution L is ejected to the outside with an acceleration greater than the gravitational acceleration. As a result of the ejection of the solution L, the chemical action of the solution L and the physical action caused by the ejection dissolve the outside. Moreover, this embodiment does not spread the solution L alone, and the acceleration of the vertical injection is not only equivalent to the acceleration of gravity, which is the biggest difference. Further, in the present specification, the inner side facing the substrates is referred to as the inner side, and the inner side opposite to the inner side is referred to as the outer portion. In the external reduction project of the present embodiment, it is a process of reducing the external portions of both the pair of glass substrates (hereinafter referred to as the bonded panels 1) which have been bonded together. As shown in Fig. 1, in the present embodiment, the panel 10 to which the crucible has been attached is kept upright, and then the nozzle 4 is disposed on both sides of the panel 10 which has been attached, and the solution L is ejected from the nozzle 4. The above dissolving solution [5147-7143-PF can be used; Forever769 13!296897 - a good cutting process. Even if the composition of the external glass is not uniform with the crystal state, it can be fully and uniformly reduced due to the combined use of physical effects. Due to the above, the flatness of the external portion is improved, and the display performance of the produced flat panel display is also improved. Then, it is said that the sun and the moon are applicable to the external reduction of the above manufacturing method. The following description includes a preferred embodiment of an external reduction device.
第2圖係繪示根據本發明一較佳實施例之外部削減裝 置之正面示意圖。第3圖係繪示第2圖所示之裝置之側面 剖面示意圖。在第2圖以及第3圖所示之外部削減裝置中， 包括：處理室2,用於進行外部削減處理；基板保持具3, 用於將該玻璃基板1保持在處理室2内之預定位置上；具 有喷射孔之喷嘴4,用於將溶解液L噴射在固定於基板保 持具3上之該玻璃基板丨之外部；溶解液供給系統5，用 於供給溶解液L至喷嘴4;其中該溶解液供給系統5係以 特定之壓力將溶解液L供給至該噴嘴4。在此實施例中， 為了在貼合製程後進行外部蝕刻製程，上述基板保持具3 係用於固定已經貼合之面板1 〇。 處理室2具有搬入口 21與搬出口 22;其中上述搬入 口 21用於搬入已經貼合之面板1〇，而上述搬出口 22用於 搬出已經貼合之面板10。搬入口 21以及搬出口 22係由封 鎖閘門2 3來控制開關狀態。而且，封鎖閘門2 3移動之方 向係與搬送方向垂直之水平方向（圖2之紙面垂直方向）。 設置搬送機構30，其中上述搬送機構3〇用於將已經 貼合之面板10運送通過搬入口 21以及搬出口 22。基板保 5147-7143-PF;Forever7 6 9 15 1296897 持具3係構成搬送機構30的部分元件。第*圖係繪示第2 及3圖中所示之裝置中基板保持具3之斜視示意圖。 ' 如第4圖所示，基板保持具3用於將已經貼合之面板 10保持在垂直站立的狀態。基板保持具3主要由水平之底 板31、設置於底板31上之支柱32、裝置於支柱32上的緩 衝具3 3所構成。 支柱32主要設置在細長的長方形之底板31的四個角 的部分上’共計4個。喷射孔34沿著底板31之長邊方向 •設置，且係在支柱32的上端而補強基板保持具3。各支柱 32比已經貼合之面板1〇稍微高一點。位於底板31之短邊 上的兩根支柱32之間的間隔比已經貼合之面板1()的厚度 稱微大-點。位在底板31之長邊方向上的兩支支柱心 的間隔比已經貼合之面板10的長度稍微長一點。已經貼合 之面板10則是被固定在四支支柱所圍出的空間。 緩衝具33是直接接觸已經貼合之面板1〇的零件，以 φ ^乂接口之面板10。緩衝具33係由不會被溶解液L所 腐=之材料所構成（耐藥性佳的材料），例如是鐵氟龍（註冊 商標）之氟素樹脂所組成之材料。 如第4圖所示，緩衝具33設置於底板31之長邊方向 的兩端上並與各支柱之下端聯繫，同時也設置於底板”之 長邊方向之兩端上並與各支柱32的上端相聯繫。已經貼合 之面板10及與上述緩衝具之各角落接觸。已經貼合之面板 的下端角部接觸之下側的緩衝具33中，短邊方向的剖 面形狀呈現凹狀而長邊方向的剖面形狀呈現l字型狀 5147-7143-PF;F〇rever769 16 1296897 外，與已經貼合之面板10上端角落接觸的緩衝具33中， 短邊方向的剖面形狀呈現凹狀。如第4圖所示，在放置已 經貼合之面板1〇的時候，由上而下***並與各緩衝具Μ 的凹部接觸。 搬送機構30例如是由支架與小齒輪（andpini〇n)所組 成。其中底板31作為支架（rack)，而小齒輪3〇1與底板 31咬合而構成搬送機構3〇。小齒輪沿著搬送線以一定的間 隔設置。小齒輪301設置於處理室2内外。另外，可以設 _ 置導引零件以導引基板保持具3。 如第3圖所示，喷嘴4係設置於被固定在基板保持具 中已[貼合之面板1 〇的兩側並對著已經貼合之面板1 〇的 兩側之外部同時喷射溶解液L。第5圖係繪示第3圖所示 之喷嘴4之形狀之斜視示意圖。 如第5圖所示，噴嘴4係具有喷射孔41的管狀零件， 如弟5圖所示，喷嘴4沿著垂直方向配置，並在已經貼合 之面板10的長度方向（搬送方向）上等間隔地設置。喷射孔 41係設置於喷嘴4之中並設置在靠近已經貼合之面板1〇 的位置，而且沿著圓管的方向（垂直方向）上等距離設置。 另外’喷嘴4的構成除了如第5圖所示之外，數量上可以 增加或減少。另外，噴嘴4的構成也可以是沿著水平方向 或傾斜方向設置之複數個喷嘴的構成。另外，喷嘴4的形 狀除了管狀之外也可以是板狀或其它形狀。 溶解液供給系統5由儲存溶解液l之液體儲槽51、連 接液體儲槽51以及各噴嘴4之配管52、設置於配管52上 5147-7143-PF；Forever7 6 9 17 1296897 圖所示’從各喷射孔喷射出來的溶解液L在上述傾 方向上呈現往外擴之喇叭狀。 、Figure 2 is a front elevational view of an external reduction device in accordance with a preferred embodiment of the present invention. Fig. 3 is a side cross-sectional view showing the apparatus shown in Fig. 2. The external reduction device shown in FIGS. 2 and 3 includes a processing chamber 2 for performing external reduction processing, and a substrate holder 3 for holding the glass substrate 1 at a predetermined position in the processing chamber 2. a nozzle 4 having a spray hole for spraying the solution L onto the outside of the glass substrate fixed to the substrate holder 3; a solution supply system 5 for supplying the solution L to the nozzle 4; The solution supply system 5 supplies the solution L to the nozzle 4 at a specific pressure. In this embodiment, in order to perform an external etching process after the bonding process, the substrate holder 3 is used to fix the panel 1 that has been attached. The processing chamber 2 has a loading port 21 for carrying in a panel 1 that has been attached, and a carrying port 22 for carrying out the panel 10 that has been attached. The transfer port 21 and the transfer port 22 are controlled by the lock gate 23 to control the switch state. Further, the direction in which the blocking gate 23 moves is in the horizontal direction perpendicular to the conveying direction (the vertical direction of the paper surface in Fig. 2). A transport mechanism 30 for transporting the panel 10 that has been attached to the carry-in port 21 and the carry-out port 22 is provided. The substrate holder 5147-7143-PF; Forever 7 6 9 15 1296897 The holder 3 constitutes a part of the components of the conveying mechanism 30. Fig. 4 is a perspective view showing the substrate holder 3 in the apparatus shown in Figs. 2 and 3. As shown in Fig. 4, the substrate holder 3 is used to hold the panel 10 that has been attached in a vertically standing state. The substrate holder 3 is mainly composed of a horizontal bottom plate 31, a support post 32 provided on the bottom plate 31, and a buffer 33 attached to the support post 32. The struts 32 are mainly provided on a portion of the four corners of the elongated rectangular bottom plate 31, a total of four. The injection hole 34 is provided along the longitudinal direction of the bottom plate 31 and is attached to the upper end of the support 32 to reinforce the substrate holder 3. Each of the pillars 32 is slightly higher than the panel that has been attached. The spacing between the two struts 32 on the short side of the bottom plate 31 is called the micro-point of the thickness of the panel 1 () which has been attached. The spacing of the two struts in the longitudinal direction of the bottom plate 31 is slightly longer than the length of the panel 10 that has been attached. The panel 10 that has been attached is a space that is fixed to the four pillars. The cushioning member 33 is a panel 10 which is in direct contact with the panel 1已经 which has been attached to the interface of the φ^乂 interface. The cushioning device 33 is made of a material which is not rotted by the dissolving liquid L (a material having good chemical resistance), and is, for example, a material composed of a fluorocarbon resin of Teflon (registered trademark). As shown in FIG. 4, the cushioning members 33 are disposed on both ends of the longitudinal direction of the bottom plate 31 and are in contact with the lower ends of the respective pillars, and are also disposed on both ends of the longitudinal direction of the bottom plate and with the respective pillars 32. The upper end is connected to the panel 10 which has been attached and is in contact with each corner of the cushioning device. In the cushioning member 33 on the lower side of the lower end corner of the panel which has been attached, the cross-sectional shape in the short side direction is concave and long. The cross-sectional shape in the side direction is in the shape of an l-shaped 5147-7143-PF; in addition to the F〇rever769 16 1296897, the cross-sectional shape in the short-side direction of the cushion 33 in contact with the upper end corner of the panel 10 that has been bonded is concave. As shown in Fig. 4, when the panel that has been attached is placed, it is inserted from the top to the bottom and is in contact with the concave portion of each cushioning device. The conveying mechanism 30 is composed of, for example, a bracket and a pinion (andpini〇n). The bottom plate 31 serves as a rack, and the pinion gear 3〇1 engages with the bottom plate 31 to constitute a transport mechanism 3〇. The pinion gears are disposed at regular intervals along the transport line. The pinion gears 301 are disposed inside and outside the processing chamber 2. , can set _ guide parts The substrate holder 3 is guided. As shown in Fig. 3, the nozzles 4 are disposed on the two sides of the panel 1 that are fixed to the substrate holder and that are attached to the panel 1 that has been attached. The outside of the side simultaneously ejects the dissolved liquid L. Fig. 5 is a schematic perspective view showing the shape of the nozzle 4 shown in Fig. 3. As shown in Fig. 5, the nozzle 4 is a tubular part having the injection hole 41, such as the younger brother 5 As shown in the figure, the nozzles 4 are arranged in the vertical direction and are provided at equal intervals in the longitudinal direction (transport direction) of the panels 10 that have been attached. The injection holes 41 are provided in the nozzles 4 and are disposed close to each other. The position of the panel is 1 ,, and is equidistantly arranged along the direction of the circular tube (vertical direction). In addition, the configuration of the nozzle 4 can be increased or decreased in number, as shown in Fig. 5. In addition, the nozzle 4 The configuration may be a plurality of nozzles arranged in a horizontal direction or an oblique direction. Further, the shape of the nozzle 4 may be a plate shape or the like in addition to the tubular shape. The solution supply system 5 is configured to store the solution 1 Liquid storage tank 51, connecting liquid The groove 51 and the pipe 52 of each nozzle 4 are provided on the pipe 52 5147-7143-PF; Forever 7 6 9 17 1296897 shows that the dissolved liquid L ejected from each of the injection holes is flared in the above-mentioned tilting direction. Shape.
在圖6之中，繪示單一喷嘴4之各噴孔41所噴射出來 的溶解液L。在圖6的右側，此圖是從已經貼合之面板u 的高度方向來看’各喷射孔41之溶解液[的喷射量的分佈 圖。已經貼合之面板1 〇通過兩侧之喷嘴4之間的時候，已 經貼合之面板10之外部的各點可以接受來自任何一、個噴 射孔41所供給之溶解液L。此時，位於外部之點p通上下 相鄰之兩個噴射孔41之正中間的位置時，上述點p接受來 自上述兩個相鄰之喷射孔41所噴射之溶解液[。由於I述 點P位於形成喇叭狀之溶解液的端部位置，如第6圖之右 側圖所示，點p接受於來自一個噴射孔的溶解液L的量是 其他點的二分之一，而上下兩相鄰之喷射孔41之溶解液的 量加起來就是一個喷射孔41所供應之溶解液L的量。因 此，已經貼合之面板1 〇之高度方向上，外部個點所接受到 的〉谷解液L之供給量是均一地。另外，如第5圖所示，溶 解液L呈現喇叭狀之外，也可以是呈現橢圓狀、圓狀、方 形狀（正方形、長方形）、菱形狀、平行四邊形等形狀。 接著，說明上述裝置的作動情形。 上述封裝工程完成之後’已經貼合之面板1 〇被舉起並 放置在處理室2外面的基板保持具3上面。上述搭載的動 作可以利用機器手臂完成，也可以由作業員徒手完成。於 基板保持具3搭載已經貼合之面板1〇之前，也可以利用保 護膠帶進行保護的動作。 5147-7143-PF；F〇rever769 19 1296897 接著，搬送機構30開始動 23打開’基板保持具通過搬入 口 21的封鎖閘門 接著’基板保持具3將已經貼合 ^理室2内移動。 嘴4夕鬥的葙〜 板10放置於兩側之噴 嘴4之間的預疋位置上。搬入口 、 „ 21的封鎖閘門23接著關 閉。此時，溶解液供給系統5 要者關 閥件53打開，接著輪送液 體的幫浦54以預定的壓力將溶 疋收 ★ 解液L迗至各喷嘴4。妹果， 溶解液由各噴嘴4的各噴射孔41噴射 、，。果 下衝擊已經貼合之面板10的外 的&力 J外邛。因此，削減了已經 之面板10的外部。混有溶解 、、σ 外邛材枓的溶解液L往下$ 至排出孔24而排出。 王下机 溶解液L喷射了 ^ —定日卑pq + μ _ 閉門株„ 、曰4 ’將幫浦54關掉，並關 閉閥件53。接者，搬送機構3 ^ , 间始作動，移動基板保持 八3,打開搬出口 22之封鎖間門23，將已經貼合之 10搬出處理室2。接签，妥丨丨田μ , μ 良 至2接者’利用純水等洗淨液將保護膠帶除 去。之後，進行切割製程。 在上述裝置的作動中，於溶解液L喷射時需改變已經 貼合之面板10的位置。已經貼合之面板1〇之外 與各噴嘴4之各喷射孔41之相對距離最短的點所受的衝擊 壓力較高’因此必須在溶解液L喷射的時候將已經貼合之 面板1〇前後移動，以使得外部個點所受的衝擊虔力均相 等。因此’可以提高削減後之平坦性。另外’已經貼合之 面板10的移動方向也可以是上下方向。 上述裝置具有控制全體的控制部（圖未顯示上述控 制部可以有頻率地控制各部，可以控制上述的作動、以及 5147-7143-PF;F〇rever769 20 1296897 為了^擊均-化之基板保持具3的移動動作。 壓力介於二述裝置的構成中，幫浦54輸送溶解… 的原因之…距離Γ: 圖所示之D)是非常重要 體之壓力則4= 的時候，若不提高幫浦輸送液 離到上述溶解液L之衝擊壓力。另外，距 ^ ’衝擊壓力㈣保持在最適值，々是距離 壓力H 最短的點所承受的衝擊壓力會過高，而演伸衝擊 若要確伴ΖΓ。衝擊的均—性（也就是說，削減的平坦性） =確保的話，距離D較佳者是介於5随至⑽顧之間。 利用溶解液L進行削減的過程中，喷射孔41至外部 的巨離之交化非常的少，其開始削減時的距離大約介於_ 至100_之間。 另外，一旦衝擊壓力小於0· 5kg/cm2，因為新鮮之溶解 液L的供給量變少而無法進行削減，而且也因為完全沒有 物里作用的緣故，無法充分地削減玻璃之組成與結晶狀態 不均一的地方，因此平坦性會將低。另外，一旦衝擊壓力 大於3.5kg/cm2,只有距離喷嘴4之喷射孔41最短的點被 肖J除最夕，因此在這各點的平坦性非常不良。因此，較佳 的衝擊壓力之範圍大約介於〇 5kg/cm2至3 5kg/cm2之間。 根據上述裝置，因為可以利用溶解液L的化學作用再 加上衝擊所引起之物理作用而將外部削減，除了可以提高 削減的平坦性之外，由於玻璃基板〗之搬送與削減處理皆 自動化的關係，因此生產效率非常高。 5147-7143-PF；Forever769 21 1296897In Fig. 6, the dissolved liquid L ejected from each of the injection holes 41 of the single nozzle 4 is shown. On the right side of Fig. 6, this figure is a distribution diagram of the ejection amount of the dissolution liquid of each of the injection holes 41 as seen from the height direction of the panel u which has been attached. When the panel 1 that has been fitted passes between the nozzles 4 on both sides, the points outside the panel 10 that have been bonded can receive the dissolved liquid L supplied from any one of the injection holes 41. At this time, when the point p outside is at the position in the middle of the two adjacent injection holes 41, the point p receives the dissolved liquid sprayed from the two adjacent injection holes 41. Since the point I of the point I is located at the end position of the horn-forming solution, as shown in the right diagram of Fig. 6, the point p receives the amount of the solution L from one of the injection holes, which is one-half of the other points. The amount of the dissolved liquid of the upper and lower adjacent injection holes 41 is added up to the amount of the dissolved liquid L supplied from the injection hole 41. Therefore, in the height direction of the panel 1 which has been attached, the supply amount of the solution solution L received by the external points is uniform. Further, as shown in Fig. 5, the solution L may have a flared shape, and may have an elliptical shape, a circular shape, a square shape (square shape, a rectangular shape), a rhombic shape, a parallelogram shape or the like. Next, the operation of the above device will be described. After the completion of the above packaging process, the panel 1 which has been attached is lifted and placed on the substrate holder 3 outside the processing chamber 2. The above-mentioned actions can be performed by the robot arm or by the operator. The protective tape may be protected by a protective tape before the substrate holder 3 is mounted on the panel 1 to which the bonding has been carried out. 5147-7143-PF; F〇rever769 19 1296897 Next, the transport mechanism 30 starts moving 23 to open the blocking gate of the substrate holder through the carry-in port 21. Next, the substrate holder 3 moves the inside of the bonding chamber 2. The mouth of the mouth 4 is placed on the pre-twisted position between the nozzles 4 on both sides. The opening gate, the blocking gate 23 of „21 is then closed. At this time, the solution supply system 5 opens the valve member 53 to open, and then the pump 54 that carries the liquid discharges the solution to the predetermined pressure. Each of the nozzles 4. The solution is sprayed by the respective injection holes 41 of the respective nozzles 4, and the outer surface of the panel 10 that has been attached is impacted by the force of the external force. Therefore, the panel 10 is already cut. Externally, the dissolved liquid L mixed with the dissolved, σ outer material 枓 is drained down to the discharge hole 24. The King's machine dissolves the liquid L and sprays it — 定日卑pq + μ _ Closed door „ , 曰 4 ' The pump 54 is turned off and the valve member 53 is closed. The carrier, the transport mechanism 3 ^ , starts to move, and the movable substrate is held at 8.3, and the lock door 23 of the transfer port 22 is opened, and the already attached 10 is carried out of the processing chamber 2. Pick-up, 丨丨 丨丨 μ μ, μ good to 2 picks 'use the cleaning solution such as pure water to remove the protective tape. After that, the cutting process is performed. In the operation of the above apparatus, it is necessary to change the position of the panel 10 which has been attached when the solution L is ejected. The point at which the relative distance from the respective injection holes 41 of the respective nozzles 4 is the same as that of the panel 1 which has been bonded is high. Therefore, it is necessary to apply the panel which has been attached before and after the ejection of the solution L. Move so that the impact points on the external points are equal. Therefore, the flatness after the reduction can be improved. Further, the moving direction of the panel 10 which has been attached may be the up and down direction. The above device has a control unit for controlling the entire control unit (the control unit can control the respective units to control the frequency, and can control the above-mentioned operation, and 5147-7143-PF; F〇rever769 20 1296897 for the uniformization of the substrate holder) The movement of 3. The pressure is between the two devices, the reason why the pump 54 is dissolved... The distance Γ: D) is very important, the pressure is 4=, if not improve The transporting liquid is separated from the impact pressure of the above-mentioned solution L. In addition, the impact pressure (4) from the ^' is kept at an optimum value, and the impact pressure at the point where the pressure H is the shortest is too high, and the impact is too high. The uniformity of the impact (that is, the flatness of the cut) = if it is ensured, the distance D is preferably between 5 and 10. In the process of reducing by the dissolution liquid L, the intersection of the injection holes 41 to the outside is extremely small, and the distance at which the reduction is started is approximately between _ and 100_. In addition, when the impact pressure is less than 0.5 kg/cm2, the supply amount of the fresh solution L is reduced, and the amount of supply of the fresh solution L is not reduced, and the composition of the glass and the crystal state are not sufficiently reduced because the object does not act at all. Place, so flatness will be low. Further, once the impact pressure is more than 3.5 kg/cm2, only the point which is the shortest from the injection hole 41 of the nozzle 4 is removed by the chord J, so the flatness at each of these points is extremely poor. Therefore, the preferred impact pressure ranges from about 5 kg/cm 2 to 35 kg/cm 2 . According to the above-described apparatus, since the external action can be reduced by the chemical action of the solution L and the physical action caused by the impact, the relationship between the transfer and the reduction processing of the glass substrate can be automated, in addition to the improvement of the flatness of the reduction. Therefore, the production efficiency is very high. 5147-7143-PF; Forever769 21 1296897
底部102的距離相當於表面粗糙度測定中所測定到的最大 粗糙度（RMAX)。可以從市面上販賣之用於測定表面粗糙度的 工具中選出幾個’以用於測定上述外冑丄〇〇之平坦性。根 據本發明之發明人的研究，進行上述外部㈣處理之後， 個玻璃基板1的厚度大約在〇· 5mm以下，平坦性可 以控制在0·1微米以下，除了可以達到薄型化、輕量化的 要求之外’也可以避免顯示不均的現象而提高平面顯示器 的顯不性此。另外，這樣的平坦性以進行外部削減處理之 前的玻璃基板丨之外部的平㈣相#，因此進行外面削減 處理並不會影響玻璃基板的平坦性。 在上述的例子中，以最大粗糙度作為平坦性，另外也 可以以中心線平均粗糙度（Ra)作為平坦性的依據。其實， 可：將外冑100之凹凸的平均高度求出來，在將凹凸部分 的高度與平均高度之差異的絕對值的平均求出I。因為也 可以使用市面上販賣的表面粗輪度計測定中心線平均粗縫 度⑽），所以可以使用適當的卫具。#中心線平均粗糖度 在〇.03臓以下的時候，平面顯示器就不會出現顯示不均的 現象，而這樣的平域也可以料㈣減處理來達 成0 另外，上述的構成除了適用於液晶顯示器以外，也可 以適用其他的平面顯示器。例如有機電激發光顯示器等之 發光的平面顯示器中’可以設置發光部代替光透過控制部。 【圖式簡單說明】 5147-7143-PF;Forever769 1296897 第1圖係纷示根據本發明 之概略製程剖面圖。 第2圖係繪示根據本發明 置之正面示意圖。 較佳實施例之平面顯示器 一較佳實施例之外部削減裝 =:圖係繪不第2圖所示之裝置之侧面剖面示意圖。 W係繪不第2及3圖中所示之 3之斜視示意圖。 τ 土板保持具The distance of the bottom portion 102 corresponds to the maximum roughness (RMAX) measured in the surface roughness measurement. Several of the tools for measuring the surface roughness which are commercially available can be selected for determining the flatness of the above-mentioned outer crucible. According to the study by the inventors of the present invention, after the external (four) treatment described above, the thickness of each of the glass substrates 1 is about 〇·5 mm or less, and the flatness can be controlled to be less than 0.1 μm, in addition to the requirement of being thinner and lighter. In addition, it can also avoid the phenomenon of uneven display and improve the display of the flat panel. Further, since such flatness is performed by the flat (four) phase # outside the glass substrate 前 before the external reduction process, the outer surface reduction treatment does not affect the flatness of the glass substrate. In the above example, the maximum roughness is used as the flatness, and the center line average roughness (Ra) may be used as the basis for the flatness. Actually, the average height of the concavities and convexities of the outer crucible 100 can be obtained, and I can be obtained by averaging the absolute values of the difference between the height of the concavo-convex portion and the average height. Since it is also possible to measure the average centerline crack (10) of the center line using a commercially available surface rough rotometer, an appropriate guard can be used. #Center line average coarse sugar degree below 〇.03臓, flat panel display will not show uneven display, and such flat field can also be expected (four) minus processing to achieve 0 In addition, the above composition is applicable to liquid crystal Other flat displays can be used in addition to the display. For example, in a flat panel display that emits light such as an organic electroluminescence display, a light-emitting portion may be provided instead of the light-transmitting control portion. BRIEF DESCRIPTION OF THE DRAWINGS 5147-7143-PF; Forever 769 1296897 FIG. 1 is a schematic cross-sectional view showing a process according to the present invention. Figure 2 is a front elevational view of the invention in accordance with the present invention. Flat-panel display of a preferred embodiment Externally-reduced package of a preferred embodiment =: A side cross-sectional view of the apparatus shown in Figure 2 is not shown. The W series depicts a squint of the 3 shown in Figures 2 and 3. τ soil plate holder
圖。第5圖係綠示第3圖所示之噴嘴4之形狀之斜視示意 :6圖係不意圖’用於說明溶解液L從各噴射孔“均 也噴在面板10之外部上的喷射點。 =_7圖係綠示根據本發明—較佳實施例之平面顯示器 <剖面不意圖。Figure. Fig. 5 is a perspective view showing the shape of the nozzle 4 shown in Fig. 3, which is green, and Fig. 6 is a schematic view for explaining that the solution L is sprayed from the respective injection holes to the outside of the panel 10. =_7 is a green display according to the present invention - a preferred embodiment of the flat display <section is not intended.
【主要元件符號說明】 L〜溶解液； 2〜處理室； 4〜噴嘴； 11〜電極； 13〜液晶； 21〜搬入口； 2 3〜封鎖閘門； 30〜搬送機構； 32〜支柱； 1〜玻璃基板； 3〜基板保持具； 5〜溶解液供給系統； 12〜封膠部； 14〜彩色渡光片； 22〜搬出口； 24〜排出孔； 31〜底板； 3 3〜緩衝具； 5147-7143-PF;F〇rever769 25 1296897 41〜喷射孔； 51〜液體儲槽； 5 2〜配管； 5 3〜閥件； 54〜幫浦； 3(Π〜小齒輪。[Main component symbol description] L~dissolving solution; 2~processing chamber; 4~nozzle; 11~electrode; 13~liquid crystal; 21~moving inlet; 2 3~blocking gate; 30~transporting mechanism; 32~pillar; Glass substrate; 3~ substrate holder; 5~ solution supply system; 12~ sealant; 14~ color lighter; 22~ port; 24~ drain hole; 31~ bottom plate; 3 3~ cushioning; -7143-PF; F〇rever769 25 1296897 41 ~ injection hole; 51 ~ liquid storage tank; 5 2 ~ piping; 5 3 ~ valve parts; 54 ~ pump; 3 (Π ~ pinion.
5147-7143-PF;Forever769 265147-7143-PF; Forever769 26