TWI271019B - Can type linear motor armature and can type linear motor - Google Patents

Can type linear motor armature and can type linear motor Download PDF

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Publication number
TWI271019B
TWI271019B TW93109602A TW93109602A TWI271019B TW I271019 B TWI271019 B TW I271019B TW 93109602 A TW93109602 A TW 93109602A TW 93109602 A TW93109602 A TW 93109602A TW I271019 B TWI271019 B TW I271019B
Authority
TW
Taiwan
Prior art keywords
armature
cover
linear motor
winding
frame
Prior art date
Application number
TW93109602A
Other languages
English (en)
Chinese (zh)
Other versions
TW200503386A (en
Inventor
Toru Shikayama
Yoshiyuki Nagamatsu
Mamoru Takaki
Mitsuhiro Matsuzaki
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003102995A external-priority patent/JP2004312877A/ja
Priority claimed from JP2003369768A external-priority patent/JP2005137105A/ja
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Publication of TW200503386A publication Critical patent/TW200503386A/zh
Application granted granted Critical
Publication of TWI271019B publication Critical patent/TWI271019B/zh

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
TW93109602A 2003-04-07 2004-04-07 Can type linear motor armature and can type linear motor TWI271019B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003102995A JP2004312877A (ja) 2003-04-07 2003-04-07 キャンド・リニアモータ電機子およびキャンド・リニアモータ
JP2003369768A JP2005137105A (ja) 2003-10-30 2003-10-30 キャンド・リニアモータ電機子およびキャンド・リニアモータ

Publications (2)

Publication Number Publication Date
TW200503386A TW200503386A (en) 2005-01-16
TWI271019B true TWI271019B (en) 2007-01-11

Family

ID=33161519

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93109602A TWI271019B (en) 2003-04-07 2004-04-07 Can type linear motor armature and can type linear motor

Country Status (2)

Country Link
TW (1) TWI271019B (ja)
WO (1) WO2004091079A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI479779B (zh) * 2010-08-27 2015-04-01 Yaskawa Denki Seisakusho Kk 線性馬達電樞及線性馬達
TWI499172B (zh) * 2012-03-27 2015-09-01 Sumitomo Heavy Industries Linear motor cooling structure
TWI499173B (zh) * 2012-03-27 2015-09-01 Sumitomo Heavy Industries Linear motor cooling structure

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3226073A3 (en) 2003-04-09 2017-10-11 Nikon Corporation Exposure method and apparatus, and method for fabricating device
US6956308B2 (en) 2003-07-15 2005-10-18 Nikon Corporation Dual flow circulation system for a mover
TW201834020A (zh) 2003-10-28 2018-09-16 日商尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TW201809801A (zh) 2003-11-20 2018-03-16 日商尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法
US6979920B2 (en) 2004-01-30 2005-12-27 Nikon Corporation Circulation housing for a mover
TWI437618B (zh) 2004-02-06 2014-05-11 尼康股份有限公司 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法
EP1881521B1 (en) 2005-05-12 2014-07-23 Nikon Corporation Projection optical system, exposure apparatus and exposure method
US8451427B2 (en) 2007-09-14 2013-05-28 Nikon Corporation Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
EP2179330A1 (en) 2007-10-16 2010-04-28 Nikon Corporation Illumination optical system, exposure apparatus, and device manufacturing method
EP2179329A1 (en) 2007-10-16 2010-04-28 Nikon Corporation Illumination optical system, exposure apparatus, and device manufacturing method
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
KR101695034B1 (ko) 2008-05-28 2017-01-10 가부시키가이샤 니콘 공간 광 변조기의 검사 장치, 조명 광학계, 노광 장치, 검사 방법, 조명 광학계의 조정 방법, 조명 방법, 노광 방법, 및 디바이스 제조 방법
JP5413641B2 (ja) * 2009-01-15 2014-02-12 株式会社安川電機 コアレスリニアモータ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3804842B2 (ja) * 1997-08-29 2006-08-02 株式会社安川電機 リニアモータ
JP2001025227A (ja) * 1999-07-08 2001-01-26 Canon Inc リニアモータ並びにこれを有するステージ装置および露光装置
JP2002010618A (ja) * 2000-06-16 2002-01-11 Canon Inc リニアモータ、及びこれを有するステージ装置、露光装置
JP3539493B2 (ja) * 2001-04-09 2004-07-07 株式会社安川電機 キャンド・リニアモータ電機子およびキャンド・リニアモータ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI479779B (zh) * 2010-08-27 2015-04-01 Yaskawa Denki Seisakusho Kk 線性馬達電樞及線性馬達
TWI499172B (zh) * 2012-03-27 2015-09-01 Sumitomo Heavy Industries Linear motor cooling structure
TWI499173B (zh) * 2012-03-27 2015-09-01 Sumitomo Heavy Industries Linear motor cooling structure

Also Published As

Publication number Publication date
TW200503386A (en) 2005-01-16
WO2004091079A1 (ja) 2004-10-21

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