1231518 玖、發明說明： 【發明所屬之技術領域】 本發明是有關於一種場發射電極，特別是指_種以卉 米碳管作為發射源的場發射電極及其製造方法。 下 【先前技術】 應用於場發射電極的各類材料，例如金屬尖錐與鑽石 薄膜4 ’都需要很咼的臨界電場（threshold field，^ # 仕％流密 度Je=10 mA/cm所需之電場），才能夠有所表現，而有相當 多的文獻證實，當奈米碳管應用於場發射電極時，有著2 為優異的表現，顯示奈米碳管是很好的場發射電極材料。 目鈾，應用奈米碳管為電子發射源的場發射電極，其 製作的步驟大多是在基板上直接成長奈米碳管，再加上適 度的兀件設計而製成電子發射源，其方法是置放觸媒於基 板上直接成長奈米碳纖維或奈米碳管作為電子發射源；進 一步的改進則是將奈米碳管做成陣列式，以增進奈米碳管 發射電子的性能。 在美國發明專利第6436221 B1發明專利案，以奈米碳 管、有機聯結劑、樹脂、銀粉混合作成一奈米碳管膠，將 之塗佈在以網印法所製得的條狀電極上，作為電子發射源 。但實驗發現，以此法所得的裝置必須在超過4·5 v/pm的 電場下，才可以得到10 mA/cm2的電流密度。又如美國第 6146230號發明專利案，則揭示以p〇ly〇xyethylene n〇nyl phenyl ether的竹生物或p〇iyVinyipyrr〇iid〇ne為分散劑，石夕 烷的化合物或膠態的二氧化矽為連結劑，混之以石墨粉、 1231518 類鑽石碳、奈米碳管、碳纖維粉、氮化爛、或氮化銘做成 電子發射源材料，但此發明專利並無相關實驗數據證明此 技術成果。 大致來說，上述各發明專利的確有可能可以製作出應 5肖奈米碳管為電子發射源的場發射電極，但其缺點均在於 製程複雜、成本較高；而如美國第614623〇號發明專利案 雖提出m易、製作成本較低的製程技術，但卻沒有 相關實驗數據證實，或其所製成的場發射電極所需之臨界 電場較高等缺點。 10 目此’開發出製程簡單、生產成本低的場發射電極及 相關製程，並使完成的場發射電極具有優異的工作表現， 是目前學界、業界所努力克服的難題之一。 【發明内容】 因此，本發明之目的，是在提供一種簡易、低成本的 15 冑造方法’以製造出以奈米碳管為電子發射源的場發射電 極。 於疋，本發明一種場發射奈米碳管電極的製造方法， 包含以下步驟。 (Ο以低溫共燒陶瓷製程製作一具有積集化内連接線 20 路之基板。 (b )選取一奈米碳管漿料以網版印刷方式在該基板上 形成至少一發射源。 (c)熱處理該步驟（b)之產物。 (d )燒結經過該步驟（c )之產物。 1231518 〃此外，以上述方法所製成之本發明—種場發射奈米碳 =極’包含—積集化㈣基板，及—形成於該積集化陶 竟基板上的發射源。 5 10 15 該積集化陶瓷基板以低溫共燒陶瓷製程製作。 該發射源是以-包含一奈米碳材及—添加有奈米銀粉 之銀膠的奈米碳管漿料以網版印刷方式形呈一各 加一電壓時可發射複數電子。 本發明之功效在於以低成本且簡易的網印法，製造低 臨界電場強度的場發射奈米碳管電極。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在 以下配合參考圖式之一較佳實施例的詳細說明中，將可清 楚的明白。 / 參閱圖卜本發明一種場發射奈米碳管電極的製造方法 的-較佳實施例，是可以製造如目2所示之場發射奈米碳 管電極2,而可應用於例如場發射顯示器、發光元件上。 同時參閱圖2、圖3 ’該場發射奈米碳管電極2包含-陶瓷基板21、一形成於該陶瓷基板21上的電極單元24, 及一形成於該陶竟基板21上的發射源23。 該陶瓷基板21是一積集化陶瓷基板，包含至少二具有 複數可作為電性連結用之孔洞211 ’及—以預定態樣形成在 二陶瓷薄帶212間及複數孔洞211中的内連接線路213。内 連接線路亦可以採用導電材料形成導電層取代。 該電極單元24以導電材料例如銀膠形成，電性連接内 20 1231518 連接線路213 ’進而可將電壓施加於該發射源23。 該發射源是選用一包含一奈米碳材及一添加有奈米 銀粉之銀膠的奈米碳管漿料，以網版印刷方式形成一寬度 介於50//m〜々OOem之間的圓環狀，當施加一電壓在電極 5 單元24日^，忒奈米碳材中的每一奈米碳管可作為一發射子 發射電子。 在此’僅先概述場發射奈米碳管電極2的巨觀結構， 餘相關微觀結構以及其他詳細說明，將配合製造方法與相 關實驗結果一併詳述。 10 參閱圖1，上述場發射奈米碳管電極2是先以步驟n ，製造一包含有複數奈米碳管之奈米碳管漿料。在本例中 ，是先選用例如二甲苯、環己烯、甲苯、苯，或正己烷等 含碳元素之碳源前軀體，混合二茂鐵（Ferr〇cene)為催化 劑以及賽吩（Thiophene)為促進劑，經由化學氣相沉積過 15 程’製知直桎範圍介於2〇〜15 〇nm之多壁奈米石炭管作為奈米 碳材；再以市售包含粒徑介於〇_15〜5 Am之間銀粉的銀膠 (本發明是使用MEP-Ag-PTG-5575 )，添加粒徑界於 30〜150nm之間的奈米銀粉，且奈米銀粉的重量百分比佔銀 膠内銀含量的30〜100wt%，均勻混合成一混合物；最後以 20 奈米$反材的重量百分比為1〜15wt%，摻合相對重量百分比 介於99〜85wt%混有奈米銀粉之銀膠的混合物，以及添加比 例界於0.8〜1.8 ml/g的Triton X-1〇〇作為介面活性劑，混合 製成奈米漿料。 當然，奈米碳材不必一定要自行製作，只需選用直徑 1231518 耗圍"於2G〜15Gnm之多壁奈米碳f，或是直絲圍介於 〇〇nm的奈米韻維’均可作為本發明所須之奈米碳材 ::。此外’介面活性劑亦不以Tdt〇nx_i〇〇為限，只需 功月b相同之溶劑均可適用。 5 10 15 20 在進行上述步驟U的同時，可以先行或是同步進行步 驟⑴製作積集化陶竟基板21。在此，以低溫共燒陶究（ LTCC)製程，選用混合玻璃與氧化㈣體為材料或是混合 有乳化銘纖維之複合材料為材料，製成陶竟浆料後，先以 刮刀成型方式成型出複數陶究薄帶212，再以雷射加工形成 複數薄帶孔洞2U，經過填孔後，再選用導電材料例如銀膠 ，以網印方式形成内連接線路（或導電層）213，最後經過將 這些網印有内連接線路（或導電層）213之料薄帶212疊声 、熱麼及退火熱處理，以低成本且精確的製程完成㈣ 板以之製作，使陶究基板21不但具有積集化内連接線路（ 或導電層卯，方便整合各式元件之外，同時可以耐高溫之 陶瓷材料忍受後續相關熱處理溫度。 然後進行㈣13，以網版印刷方式，以上述步驟^所 製備完成之奈米碳管㈣為材料’在㈣基板21上形 環形之發射源23 ’且環形發射源23之環形的外徑界於 1200"m〜2000/zm之間，寬度介於15〇#m〜5〇〇"m之門、 再以銀膝為材料形成電極單元24。在此要說明的是料源 的形狀並不限於圓環’凡是呈矩形、三角形，或多‘开二 環狀均可以達到本發明之預定功效，同時半捏/於 500〜1500 // m之間的圓形亦可以達到預定功效。 、 9 1231518 然後以步驟14,在大氣環境下，先以1〇〇〜22〇t的溫 度進行10〜60分鐘，再以200〜3〇(rc的溫度進行3〇〜12〇分 鐘進行熱處理。 77 最後進行步驟15，在氫/氬之體積濃度比為3〜3() 的氣氛下，以500〜900°C的溫度，100〜700 T〇rr的壓力下進 仃10〜60分鐘的燒結處理，即完成場發射奈米碳管電極2 的製作。 在此要特別說明的是，在網印成型完環形發射源U之 =可以另行選用-可導引電子運動的物質，像是導電物 貝’或同介電常數物質，例如麵、纪、鐵、銘、錄等金屬 %素或含此等金屬元素之合金填覆於環形發射源23所圍構 出的填覆空間巾，用於發散或集中電子的運動，以更 昇場發射特性。 -般市售無摻加奈米銀粉之碳管漿料與本發明之摻合 漿料’經過網印成型與步驟14、步 /1231518 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a field emission electrode, and particularly to a field emission electrode using a carbon nanotube as a source and a method for manufacturing the same. [Previous technology] Various materials used in field emission electrodes, such as metal spikes and diamond thin films, all require a critical threshold electric field (threshold field, ^ # ％% flow density Je = 10 mA / cm Electric field) to be able to perform, and quite a lot of literature confirms that when carbon nanotubes are used in field emission electrodes, 2 has excellent performance, showing that carbon nanotubes are a good field emission electrode material. Uranium, a field emission electrode that uses nanometer carbon tubes as an electron emission source, most of its manufacturing steps are to directly grow nanometer carbon tubes on a substrate, plus moderate element design to make an electron emission source, and its method The catalyst is placed on the substrate to directly grow nano-carbon fiber or nano-carbon tube as the electron emission source; further improvement is to make the nano-carbon tube into an array to improve the electron-emitting performance of the nano-carbon tube. In the United States Invention Patent No. 6436221 B1 invention patent, a nano carbon tube, organic coupling agent, resin, and silver powder were mixed to make a nano carbon tube glue, which was coated on the strip electrode prepared by the screen printing method. As an electron emission source. However, it was found experimentally that the device obtained by this method must obtain an electric current density of 10 mA / cm2 under an electric field exceeding 4.5 v / pm. Another example is U.S. Patent No. 6146230, which discloses bamboo bio using p〇ly〇xyethylene no ynyl phenyl ether or po yi Vinyipyrroi ide id as a dispersant, a compound of lithoxane or colloidal silica As a binding agent, it is mixed with graphite powder, 1231518 type diamond carbon, nano carbon tube, carbon fiber powder, nitrided rot, or nitrided inscription to make the electron emission source material, but this patent does not have relevant experimental data to prove this technology. Results. Generally speaking, the above invention patents may indeed make field emission electrodes that should use 5 nanometer carbon tubes as the electron emission source, but their disadvantages are that the manufacturing process is complex and the cost is high; such as the US invention No. 6146230 Although the patent case proposes a process technology that is easy to manufacture and has a low production cost, there is no relevant experimental data to confirm it, or its field emission electrode requires a higher critical electric field and other disadvantages. 10 Therefore, the development of a field emission electrode and related processes with a simple process and low production cost, and making the completed field emission electrode have excellent performance, is one of the problems that the academic and industry are trying to overcome at present. [Summary of the Invention] Therefore, the object of the present invention is to provide a simple and low-cost 15 fabrication method 'to produce a field emission electrode using a carbon nanotube as an electron emission source. Yu Li, a method for manufacturing a field emission nano carbon tube electrode according to the present invention includes the following steps. (0) A low-temperature co-fired ceramic manufacturing process is used to make a substrate with 20 integrated interconnect lines. (B) A nano carbon tube paste is selected to form at least one emission source on the substrate by screen printing. (C ) Heat-treating the product of step (b). (D) sintering the product of step (c). 1231518 〃 In addition, the invention produced by the method described above-seed field emission nano-carbon = pole-contains-accumulation Chemical substrate and the emission source formed on the ceramic substrate. 5 10 15 The ceramic substrate is made by a low-temperature co-fired ceramic process. The emission source is-containing a nano-carbon material and —Nano carbon tube paste added with silver paste of nano silver powder can be screen-printed to emit multiple electrons when each voltage is applied. The effect of the invention lies in the low-cost and simple screen printing method. Field emission nano-carbon tube electrode with low critical electric field strength. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention will be described in the following detailed description of a preferred embodiment with reference to the accompanying drawings. Be clear. / See Figure A preferred embodiment of the method for manufacturing a field emission nanometer carbon tube electrode according to the present invention is that the field emission nanometer carbon tube electrode 2 shown in item 2 can be manufactured, and can be applied to, for example, a field emission display and a light emitting element. At the same time, refer to FIG. 2 and FIG. 3 'The field emission nano carbon tube electrode 2 includes a ceramic substrate 21, an electrode unit 24 formed on the ceramic substrate 21, and an emission source formed on the ceramic substrate 21 23. The ceramic substrate 21 is an integrated ceramic substrate including at least two holes 211 'having a plurality of holes for electrical connection and-formed in a predetermined state between two ceramic thin strips 212 and a plurality of holes 211. The connection line 213. The internal connection line may also be replaced by a conductive material. The electrode unit 24 is formed of a conductive material such as silver glue, and is electrically connected to the internal 20 1231518 connection line 213 ', so that a voltage can be applied to the emission source 23. The emission source is a nano carbon tube paste containing a nano carbon material and a silver glue added with nano silver powder, and a screen printing method is used to form a width between 50 // m and 々OOem. Donut-shaped When a voltage is applied to the electrode 5 unit 24, each nano-carbon tube in the nano-carbon material can emit electrons as an emitter. Here, we will only outline the macroscopic structure of the field-emitting nano-carbon tube electrode 2 first. The relevant microstructures and other detailed descriptions will be detailed in conjunction with the manufacturing method and related experimental results. 10 Referring to FIG. 1, the above field-emission carbon nanotube electrode 2 is first manufactured in step n by including a plurality of nanometers. Nanotube slurry of carbon tubes. In this example, a carbon source precursor containing carbon elements such as xylene, cyclohexene, toluene, benzene, or n-hexane is first selected, and ferrocene (Ferr. cene) is the catalyst and Thiophene is the accelerator. Through chemical vapor deposition, it is known that the multi-walled nano-carbon tube with a range of 20 ~ 150 nm is used as the carbon material through 15 processes. A commercially available silver colloid containing silver powder having a particle size between 0-15 and 5 Am (in the present invention, MEP-Ag-PTG-5575 is used), and a nano silver powder having a particle size boundary between 30 and 150 nm is added, and The weight percentage of nano silver powder accounts for 30 ~ 100wt% of the silver content in the silver gel, and it is evenly mixed into one. Finally, a mixture of 20 nanometers of reverse material is 1 to 15% by weight, and a mixture of relative weight percentages of 99 to 85% by weight of silver glue mixed with silver powder is added, and the proportion of addition is within the range of 0.8 to 1.8. ml / g of Triton X-100 is used as a surface active agent, and mixed into a nano slurry. Of course, the nano carbon material does not have to be made by itself, only the diameter of 1231518 and the multi-walled nano carbon f at 2G ~ 15Gnm, or the nano-wind with a straight wire between 0 and 0nm are selected. Can be used as the nano carbon material required by the present invention ::. In addition, the 'surfactant' is not limited to Tdtonx_i00o, so long as the solvent of the same function b can be used. 5 10 15 20 While performing the above step U, the steps may be performed in advance or in synchronization to make the integrated ceramic substrate 21. Here, in the low temperature co-firing ceramic research (LTCC) process, mixed glass and oxidized oxide are used as materials or mixed materials with emulsified fibers are used as materials. After the ceramic slurry is made, it is first formed by scraper molding. A plurality of thin ceramic strips 212 are produced, and then a plurality of thin strip holes 2U are formed by laser processing. After filling the holes, a conductive material such as silver glue is selected to form an internal connection line (or conductive layer) 213 by screen printing. These thin webs 212 printed with internal connection lines (or conductive layers) 213 are superimposed by sound, heat, and annealing, and are completed with a low-cost and accurate manufacturing process. The ceramic substrate 21 not only has a product Centralize the internal connection lines (or conductive layer 方便) to facilitate the integration of various types of components, and at the same time, can withstand high temperature resistant ceramic materials withstand subsequent heat treatment temperatures. Then ㈣13, screen printing, and the above steps ^ Nano carbon tube ㈣ is made of material 'ring-shaped emission source 23' on ring substrate 21 and the outer diameter of the ring-shaped emission source 23 is between 1200 " m ~ 2000 / zm, and the width is between 15〇 # m ~ The door of 500m, and silver knees are used to form the electrode unit 24. It is to be noted here that the shape of the source is not limited to a circular ring, which is generally rectangular, triangular, or more. The predetermined effect of the present invention can be achieved, and at the same time, the half-pinch / circle between 500 and 1500 // m can also achieve the predetermined effect., 9 1231518 and then step 14, in the atmospheric environment, first with 100 ~ 22 The temperature of 〇t is 10 to 60 minutes, and then the heat treatment is performed at a temperature of 200 to 30 (rc) for 30 to 120 minutes. 77 Finally, step 15 is performed, and the hydrogen / argon volume concentration ratio is 3 to 3 () The sintering process is performed at a temperature of 500 to 900 ° C and a pressure of 100 to 700 Torr for 10 to 60 minutes to complete the production of the field-emission carbon nanotube electrode 2. This is particularly explained here. The reason is that after the screen printing, the ring-shaped emission source U = can be selected separately-substances that can guide the movement of electrons, such as conductive materials, or materials with the same dielectric constant, such as surface, period, iron, inscription, record, etc. Metal% element or alloy containing these metal elements is filled in the structure surrounded by the annular emission source 23 The interstitial towel is used for the movement of divergent or concentrated electrons to enhance the field emission characteristics.-The commercially available carbon tube paste without nano silver powder and the blend paste of the present invention are subjected to screen printing and step 14. Step /
一〜队π、燒結及退火處理後，可以明顯看出One ~ team π, sintering and annealing can be clearly seen
佳的場發射特性表現。Excellent field emission characteristics.
10 1231518 的場，射奈米碳管電極2,實際搭配塗佈螢光粉體的IT〇玻 璃為陽極，70成—發光元件後，分別在300V(圖9)、400V( · -)的工作電屢下量測其發光圖形，可知，本發明所开)成 之環形的發射源23可以得到相對大面積之發光面積。 〇由圖11所顯現之量測結果可知，以重量百分比為l〇wt %奈米碳材之奈米漿料，成型出外# 3.1mm，寬度為 〇_25mm之發射源的場發射奈米碳管電極，在〇_6〇〇v的工 作電壓範圍時，具有優良的場發射特性表現。 - 綜所上述，由於奈米碳管具有高惰性，高電傳導性，參 及極小的曲率半徑，因此相當適合作為場發射電極的材料 ;而本發明主要是以陶瓷為基材，以自製的多璧奈米碳管 為材料，同時應用製作成本較低，且可以大面積塗佈，做 成大範圍之電子發射源的網版印刷製程形成場發射的電極 ，不但可以達成内連接線路積集化的要求，同時所完成的 場發射奈米碳管電極，不但臨界電壓較低，更具有優良的 場發射特性表現，而確實達到本發明開發製程簡單、生產 成本低的場發射電極製程，並使完成的場發射電極具有優 _ 異的工作表現之創作目的。 惟以上所述者，僅為本發明之較佳實施例而已，當不 月b以此限定本發明實施之範圍’即大凡依本發明申請專利 範圍及發明說明書内容所作之簡單的等效變化與修飾，皆 應仍屬本發明專利涵蓋之範圍内。 【圈式簡單說明】 圖1是一流程圖，說明本發明一種場發射奈米碳管電 11 1231518 極的製造方法的一較佳實施例； 圖2是-俯視示意圖，說明以圖i所示之製造方法製 造之場發射奈米碳管電極； 圖3是-剖視圖，輔助圖2說明以圖i所示之製造方 5 法製造之場發射奈米碳管電極； ® 4是―SEM照片’說明—般市售無摻加奈米銀粉之 碳官漿料所形成之銀粉及奈米碳管間的分散狀況； 圖5疋SEM照片，說明圖4之一橫截面影像，可看 出銀粉的分散並不均句，因而造成導電度降低； 1〇 ® 6疋SEM照片’說明本發明之摻合有奈米銀粉的 奈米漿料的奈米碳管間之分散狀況； 圖7是一 SEM照片，說明圖6之一橫截面影像，可看 出奈米碳管及奈米銀粉均句分散於其中間分散狀況良好； 圖8是-量測結果曲線圖，說明一般市售無換加奈米 15 ㈣之* &滎料與本發明所使用之摻合有奈米銀粉的奈米 碳管聚料，θ在形成發射源之後的場發射特性表現，· 圖9是照片，說明本發明之場發射奈米碳管電極， 貝際搭配f光體為陽極製成發光元件後，在3，的工作電 壓下的發光面積； ® 疋知片’說明本發明之場發射奈米碳管電極， 實際搭配f光體為陽極製成發光元件後，在權v的工作電 壓下的發光面積；及 〇圖11疋—量測結果曲線圖，說明以重量百分比為1〇wt U反材之奈米漿米斗，成型預定態樣之發射源的場發射 12 1231518 奈米碳管電極，在0-600V的工作電壓範圍的場發射特性表 現0In the field of 10 1231518, the nanometer carbon tube electrode 2 is actually matched with IT0 glass coated with fluorescent powder as the anode. 70%-after the light-emitting element, it works at 300V (Figure 9) and 400V (·-). The light emission pattern is repeatedly measured by electricity, and it can be known that the circular emission source 23 formed by the present invention can obtain a relatively large area light emission area. 〇 From the measurement results shown in FIG. 11, it is known that a nano-carbon paste with a weight percentage of 10 wt% nano-carbon material is molded into a field emission nano-carbon of an emission source having a width of 3.1 mm and a width of 0-25 mm. The tube electrode has excellent field emission characteristics in the working voltage range of 0-600V. -As mentioned above, because the carbon nanotubes have high inertia, high electrical conductivity, and a very small radius of curvature, they are quite suitable as materials for field emission electrodes. The present invention is mainly based on ceramics and self-made Polycarbonate carbon nanotubes are used as materials. At the same time, they can be coated on a large area and can be coated on a large area. The screen printing process can be used to form a wide range of electron emission sources to form field emission electrodes. The field emission nanometer carbon tube electrode completed at the same time not only has a lower critical voltage, but also has excellent field emission characteristics, and indeed achieves the field emission electrode process with simple development process and low production cost. The purpose of making the completed field emission electrode excellent and different. However, the above are only the preferred embodiments of the present invention. When the month b is used to limit the scope of the implementation of the present invention, that is, the simple equivalent changes made according to the scope of the patent application and the content of the invention specification of the present invention, and Modifications should still fall within the scope of the invention patent. [Circumferential Description] FIG. 1 is a flowchart illustrating a preferred embodiment of a method for manufacturing a field-emission carbon nanotube electrode 11 1231518 according to the present invention; FIG. 2 is a schematic plan view illustrating the description shown in FIG. Field emission nano carbon tube electrode manufactured by the manufacturing method; FIG. 3 is a cross-sectional view, supplementing FIG. 2 to illustrate the field emission nano carbon tube electrode manufactured by the manufacturing method 5 shown in FIG. I; ® 4 is `` SEM photograph '' Explanation—Generally, the state of dispersion between silver powder and nano carbon tubes formed by carbon official slurry without nano silver powder added; Fig. 5 疋 SEM photograph, illustrating the cross-sectional image of one of Fig. 4, the dispersion of silver powder can be seen Irregular sentence, resulting in a decrease in conductivity; 10® 6 疋 SEM photograph 'illustrates the dispersion between the carbon nanotubes of the nano-slurry with nano-silver powder blended in the present invention; Figure 7 is a SEM photograph Explain one of the cross-sectional images in Figure 6. It can be seen that the carbon nanotubes and nano-silver powder are well dispersed in the middle; Figure 8 is a graph of the measurement results, which shows that the general commercially available non-replaceable nano 15 ㈣ 之 * & 荥 料 and nanosilver powder used in the present invention The performance of the field emission characteristics of the nano carbon tube aggregate after the formation of the emission source. Figure 9 is a photo illustrating the field emission nano carbon tube electrode of the present invention. After that, the light-emitting area at the operating voltage of 3, and the "information sheet" explains the field emission nano-carbon tube electrode of the present invention. After the light-emitting element is actually made with the phosphor as the anode, the working voltage is at the right v. And 图 Figure 11 疋 —Measurement result curve, illustrating the field emission of a predetermined source of 12 1231518 nanometer carbon tubes with a weight percentage of 10wt U anti-wood nanometer rice bucket. Electrode, field emission characteristics in the operating voltage range of 0-600V
13 1231518 【圈式之主要元件代表符號說明】 11 步驟 21 陶瓷基板 12 步驟 211 孔洞 13 步驟 212 陶瓷薄帶 14 步驟 213 内連接線路 15 步驟 23 發射源 2 場發射奈米碳管電極 24 電極單元 1413 1231518 [Description of the symbols of the main components of the ring type] 11 Step 21 Ceramic substrate 12 Step 211 Hole 13 Step 212 Ceramic ribbon 14 Step 213 Interconnect line 15 Step 23 Emission source 2 Field emission nano carbon tube electrode 24 Electrode unit 14