TW559584B - Method and device for adjusting position of hand - Google Patents
Method and device for adjusting position of hand Download PDFInfo
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- TW559584B TW559584B TW091117654A TW91117654A TW559584B TW 559584 B TW559584 B TW 559584B TW 091117654 A TW091117654 A TW 091117654A TW 91117654 A TW91117654 A TW 91117654A TW 559584 B TW559584 B TW 559584B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
Abstract
Description
559584 五、發明說明（]) 發明所屬之技術領域】 本發明係關於機哭丰/署 娜。。于之位置對準方法及其裝置。 習知之技術】 的中’有使用機械手臂將收納於閉盒内 ===:一作業場所的情況。機械手臂在將機 ° ·甲凰]的玻璃基板的下方空間後，筆直上升爷；^ 器手用以吸著破璃其祐 ^ e丄u 军且上开4械 門八& Η山 基板。方；疋，由機器手將各玻璃基板從 閘益内取出，搬運至下一作業場所的承接位置。 玻璃基板有被收納於閘盒内的偏離正確位置的位置上 情況，機械手臂邊修正I、息 k 〇止Θ位置偏呈邊將玻璃基板正確搬 至下一作業場所的承接位置。 乂機器手上設有檢測玻璃基板的後端緣（近前側端緣）用的 前後位置檢測感測器。藉由前後位置檢測感測器檢測玻璃 基板的後端緣’求得玻璃基板的前後方向的位置偏差量△ v 此外，前後位置檢測感測器係於機器手的左右各設置1 個’左右的前後位置檢測感測器根據檢測玻璃基板的後端 緣的時間至求得玻璃基板的左右方向的傾斜角0。 此外’鄰近機械手臂設置檢測玻璃基板的側緣用的左右 位置檢測感測為。機械手臂從閘盒内將玻璃基板筆直取出 後’橫向移動至左右位置檢測感測器檢測玻璃基板的側緣 為止。於是’根據移動機械手臂至左右位置檢測感測器檢 測玻璃基板的側緣為止的距離，求得玻璃基板的左右方向 的位置偏差量ΔΥ。 於是，機械手臂邊修正所求得的位置偏差量、Δγ及559584 V. Description of the invention (]) The technical field to which the invention belongs] The present invention relates to machine crying / signature. . Method and device for aligning at position. [Known technique] In the case of “′, a robotic arm is used to store in a closed box ===: a work place. After the robotic arm moves the space below the glass substrate, it rises straight up; ^ The hand is used to suck and break the glass ^ e 丄 u Army and open up 4 doors 八 &; 山 板. Square; 疋, each glass substrate is taken out of Zhayi by the robot hand and carried to the receiving position of the next working place. The glass substrate may be stored in a position deviated from the correct position in the gate box, and the robotic arm will correct the position of I, κ and Θ to move the glass substrate to the receiving position of the next work place.乂 The robot has a front and rear position detection sensor for detecting the rear edge (near the front edge) of the glass substrate. The back-end edge of the glass substrate is detected by the front-back position detection sensor 'to determine the positional deviation amount Δv of the front-back direction of the glass substrate. In addition, the front-back position detection sensor is provided on the left and right sides of the robot hand, and each of the left and right sides is provided with a' about ' The front-rear position detection sensor obtains the inclination angle 0 of the glass substrate in the left-right direction based on the time from detecting the rear edge of the glass substrate. In addition, a left and right position detection sensor for detecting a side edge of the glass substrate is provided adjacent to the robot arm. After the robotic arm straightly takes out the glass substrate from the gate box, it moves laterally until the left and right position detection sensors detect the side edges of the glass substrate. Then, 'the positional deviation amount Δ 手臂 in the left-right direction of the glass substrate is obtained based on the distance from the mobile robot arm to the side edge detection of the glass substrate by the left-right position detection sensor. Then, the robot arm corrects the position deviation amount, Δγ, and
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傾斜角0邊搬運基板 所的承接位置。 將玻璃基板正確置放於下一作業場 【發明 然而 器，其 玻璃基 會有加 本較一 此，裝 此外 業場所 增力口生 又， 移動， 置偏差 板的位 本發 間，同 之位置 【解決 所欲解決之問題】 係與機械手臂另外設置左右位置檢測感測 而I芏間增大，使得裝置全體更為大型化。一浐 板是於無塵室内進行作業，隨著製置全體的1 =化 t無塵室的必要。無塵室的每一單位面積的必要 般工廠的每一單位面積的必要成本要高很多，因 置的大型化會招致製造成本的增加。 ’從閘盒内取出的玻璃基板無法直接搬運至下一作 ’有暫時向左右位置檢測感測器移動的必要，此會 產即拍時間（duct time)，造成生產性惡化。 為求得位置偏差量ΔΥ實際上將機械手臂向橫方向 ，用測定該移動量求得位置偏差量Δγ，因而，位 ^ ΑΥ的值本身就有可能含有誤差，會造成玻璃基 置定位精度惡化。 月之目的在於，提供一種可減小設置時必要的空 時可縮短生產節拍時間，又，誤差要因少的機器手 對準方法及其裝置。 問題之手段】 為了達成上述目的，申請專利範圍第1項之發明，係為 將^動彳2為手從前後方向進入工件的上方或下方進行位置 對準之機器手之位置對準方法，其具備如下步驟，機器手 具有左右方向並行配置的一對第1感測器，及設於側部的The position where the substrate is transported while the inclination angle is 0. Put the glass substrate in the next working place correctly. [Invented device, however, its glass base will have a cost increase compared to this. It will be installed in the field to increase strength, move, and place the deviation plate in the same position. [Solving the problem to be solved] The left and right position detection sensors are separately installed with the robot arm, and the interval between I and Y is increased, which makes the entire device larger. A slab is operated in a clean room. As the entire system is installed, it is necessary to clean the room. The necessary cost per unit area of the clean room In general, the necessary cost per unit area of the factory is much higher, because the increase in size will increase the manufacturing cost. ‘The glass substrate taken out of the gate box cannot be directly transported to the next work’ ’It is necessary to temporarily move the left and right position detection sensors, which results in a duct time and deteriorates productivity. In order to obtain the position deviation ΔΥ, the robot arm is actually moved in the horizontal direction, and the position deviation Δγ is obtained by measuring the movement amount. Therefore, the value of the position ^ ΑΥ itself may contain errors, which will cause the accuracy of the glass base positioning to deteriorate. . The purpose of the month is to provide a robot alignment method and a device which can reduce the time required for installation, shorten the production cycle time, and cause fewer errors. Means of the problem] In order to achieve the above-mentioned object, the invention of the first scope of the patent application is a method for aligning the position of the robot hand with the hand entering the upper or lower part of the workpiece from the front-to-rear direction to perform position alignment. It has the following steps. The robot hand has a pair of first sensors arranged in parallel in the left-right direction, and a pair of first sensors arranged on the side.
C:\2D-O)DE\91-10\91117654.pUl 559584 五、發明說明（3) 第2感測器，將機器手從前後方向進入工件的上方或下方 的機器手進入步驟；根據機器手進入時一對第1感測器檢 測工件的前端緣或後端緣的機械座標差，求得工件的左右 方向的傾斜角<9的傾斜角計算步驟；於工件的上方或下方 沿左右方向使機器手僅傾斜傾斜角0的傾斜角對準步驟； 在沿左右方向使機器手僅傾斜傾斜角0的狀態下，沿左右 方向移動機器手至第2感測器檢測工件的側緣為止的第1左 右位置對準步驟；及在沿左右方向使機器手僅傾斜傾斜角 0的狀態下，沿從前後方向僅傾斜傾斜角0的方向移動機 器手至一對第1感測器檢測工件的前端緣或後端緣為止的 第1前後位置對準步驟。 據此，若進行機器手進入步驟時以使機器手與工件對 向，進行傾斜角計算步驟，可求得機器手與工件的面向偏 差（傾斜）。於是，進行傾斜角對準步驟以使機器手的面向 與工件的面向一致，進行第1左右位置對準步驟，以修正 機器手的左右方向的位置偏差，進行第1前後位置對準步 驟，以修正機器手的前後方向的位置偏差。也就是說，在 解除了工件的左右方向的傾斜角0 、左右方向的位置偏 差、前後方向的位置偏差的狀態下，始由機器手挾持工 件。 此外，申請專利範圍第2項之發明，係為將自動機器手 從前後方向進入工件的上方或下方進行位置對準之機器手 之位置對準方法，其具備如下步驟，機器手具有左右方向 並行配置的一對第1感測器，及設於側部的第2感測器，將C: \ 2D-O) DE \ 91-10 \ 91117654.pUl 559584 V. Description of the invention (3) The second sensor moves the robot hand from the front-rear direction into the work piece above or below the robot hand entry steps; according to the machine When a hand enters, a pair of first sensors detect the mechanical coordinate difference of the leading edge or the trailing edge of the workpiece, and calculate the tilt angle of the workpiece in the left-right direction < 9 tilt angle calculation steps; Step for aligning the inclination angle of the robot with only the inclination angle of 0 in the direction; With the inclination of the robot in the left and right direction only with the inclination of 0, move the robot in the left and right direction until the side edge of the workpiece is detected by the second sensor. The first left and right position alignment step; and in a state where the robot hand is tilted only by the tilt angle 0 in the left-right direction, the robot hand is moved to the pair of first sensors to detect the workpiece in the direction tilted only by the tilt angle 0 from the front-back direction. The first front-rear position alignment step up to the leading edge or the trailing edge. According to this, if the robot enters the step so that the robot and the workpiece face each other and perform the tilt angle calculation step, the deviation (inclination) between the robot and the workpiece can be obtained. Then, the inclination angle alignment step is performed so that the face of the robot hand is consistent with the face of the workpiece, and the first left-right position alignment step is performed to correct the positional deviation of the left-right direction of the robot hand, and the first front-back position alignment step is performed to Correct the position deviation of the robot in the front-back direction. In other words, when the inclination angle 0 of the workpiece in the left-right direction, the positional deviation in the left-right direction, and the positional deviation in the front-back direction are canceled, the workpiece is held by the robot hand. In addition, the invention in the scope of patent application No. 2 is a position alignment method of a robotic hand that positions an automatic robotic hand above and below a workpiece from the front-to-rear direction, and has the following steps. The pair of first sensors and the second sensor provided on the side
C:\2D-CODE\91 -10\911176 54.p t d 第6頁 559584 五、發明說明（4) 機器手從前後方向進入工件的上方或下方的機器手進入步 驟；根據機器手進入時一對第1感測器檢測工件的前端緣 或後端緣的機械座標差，求得工件的左右方向的傾斜角Θ 的傾斜角計算步驟；於工件的上方或下方沿左右方向使機 器手僅傾斜傾斜角Θ的傾斜角對準步驟；在沿左右方向使 機器手僅傾斜傾斜角Θ的狀態下，沿前後方向移動機器手 至一對第1感測器檢測工件的前端緣或後端緣為止的第2前 後位置對準步驟；及在沿左右方向使機器手僅傾斜傾斜角 0的狀態下，沿從左右方向僅傾斜傾斜角（9的方向移動機 器手至第2感測器檢測工件側緣為止的第2左右位置對準步 驟。 據此，若進行機器手進入步驟時以使機器手與工件對 向，進行傾斜角計算步驟，可求得機器手與工件的面向偏 差（傾斜）。於是，進行傾斜角對準步驟以使機器手的面向 與工件的面向一致，進行第2前後位置對準步驟，以修正 機器手的前後方向的位置偏差，進行第2左右位置對準步 驟，以修正機器手的左右方向的位置偏差。也就是說，在 解除了工件的左右方向的傾斜角0 、前後方向的位置偏 差、左右方向的位置偏差的狀態下，始由機器手挾持工 件。 此外，申請專利範圍第3項之發明，係為將自動機器手 從前後方向進入工件的上方或下方保持且取出工件、同時 進行位置對準之機器手之位置對準方法，其具備如下步 驟，機器手具有左右方向並行配置的一對前後感測器，同C: \ 2D-CODE \ 91 -10 \ 911176 54.ptd Page 6 559584 V. Description of the invention (4) Robot robot entering steps above or below the workpiece from the front-to-rear direction; The first sensor detects the mechanical coordinate difference of the leading edge or the trailing edge of the workpiece, and calculates the tilt angle of the tilt angle Θ of the left and right directions of the workpiece. The robot hand is tilted only in the left and right directions above or below the workpiece. Step of aligning the inclination angle of the angle Θ; in a state where the robot hand is inclined only by the inclination angle Θ in the left-right direction, move the manipulator in the forward-backward direction until the pair of first sensors detects the leading edge or the trailing edge of the workpiece 2nd front-to-back position alignment step; and in a state where the robot arm is tilted only by the tilt angle of 0 in the left-right direction, the robot arm is tilted only by the tilt angle from the left-right direction (9 direction to the second sensor to detect the side edge of the workpiece This is the second left and right position alignment step. According to this, if the robot enters the step so that the robot and the workpiece face each other, and perform the tilt angle calculation step, the deviation (inclination) between the robot and the workpiece can be obtained. , To perform the tilt angle alignment step so that the face of the robot hand is consistent with the face of the workpiece, perform the second front-to-back position alignment step to correct the positional deviation of the front-back direction of the robot, and perform the second left-to-right position alignment step to correct The position deviation of the robot hand in the left-right direction. That is, the workpiece is held by the robot hand only after the inclination angle 0 of the left-right direction of the workpiece, the position deviation in the front-back direction, and the position deviation in the left-right direction are removed. The invention of item 3 of the patent scope is a position alignment method for a robot hand that holds an automatic robot hand above and below the workpiece from the front-rear direction and holds and removes the workpiece while performing position alignment. The method includes the following steps. The robot hand has A pair of front and rear sensors arranged in parallel in the left and right directions.
C:\2D-CODE\9MO\9]]17654.rKl 第7頁 五、發明說明（5) 時’支持為可上下方 部具有端緣感測器，同才t J::機益手的機械手臂的臂柱 的上方或下方的機哭=再：機器手從前後方向進入工件 前後感測器檢測工件的ft二驟，根據機器手進入時一對 得工件的左右方向=後端緣的機械座標差，求 的上方或下方沿左右方6角=傾斜角計算步驟；於工件 角對準步‘驟；沿左右“：:僅傾斜傾斜角θ的傾斜 後感測器導通的起始點保===僅傾斜傾斜角θ，在前 端緣感測器測定工件的#終 出工件的取出步驟；藉由 偏差量將工件對準 t 、、二右測疋步驟；及修正左右 據此，若進行機器手:位$ :位置對準步驟。 向，進行傾斜角計算I 入^驟時以使機器手與工件對 差（傾斜）。於是，逸疒二、可求得機器手與工件的面向偏 與工件的面向一致，^ 〃、斜角對準步驟以使機器手的面向 外，進行左右測定步驟：：f步驟保持且取出工件。此 步驟以修正左右的偏差量疋工件的端緣，進行位置對準 說，在解除了工件的:使工件位於指示位置。也就是 置偏差、前後方向的位w ^向的傾斜角0 、左右方向的位 工件。 偏差的狀態下，始由機器手挾持 此外，申請專利範圍第 移動且可旋轉的自動機哭貝^之明，係為將可前後左右 下方進行位置對準之機從珂後方向進入工件的上方或 具有左力方向並行設置位置對準裝其於機器手 側部的第2感測器，根據播_對弟1感測器，及設於機器手 -歲為手進入時一對第1感測器檢測 !! C:\2D-CODE\91-10\91117654.ptdC: \ 2D-CODE \ 9MO \ 9]] 17654.rKl Page 7 V. Description of the invention (5) 'Support is to have an edge sensor on the top and bottom, same as t J :: 机 益 手 的The machine crying above or below the arm column of the robotic arm = Re: The robot hand enters the workpiece from the front-rear direction to detect the ft of the workpiece. The left and right directions of the work piece when the robot enters = the rear edge The mechanical coordinate difference, the upper or lower direction of the left and right 6 angles = the calculation step of the inclination angle; the step of aligning at the workpiece angle; the left and right ":: the starting point of the sensor after the inclination of the inclination angle θ only Guarantee === Only the inclination angle θ is measured at the leading edge sensor, the #finishing step of the workpiece is taken out; the workpiece is aligned with t, and the two steps are measured by the deviation; and the left and right are corrected accordingly, If the robot hand: bit $: position alignment step is performed, the inclination angle calculation is performed in I step ^ so that the robot hand and the workpiece are opposite (inclined). Therefore, the second step is to obtain the robot hand and the workpiece. The orientation is the same as that of the workpiece. ^ 〃, bevel alignment steps to make the robot face outward, Measurement step: f step to hold and take out the workpiece. This step is to correct the left and right deviations 疋 the end edge of the workpiece, and perform position alignment. When the workpiece is released: the workpiece is positioned at the indicated position. Bit w ^ inclination angle 0, left and right position of the workpiece. In the state of deviation, it is held by the robot hand. In addition, the patent application scope of the moving and rotatable automaton ^ Zhiming is to be able to back and forth The machine that performs position alignment from left to right enters the workpiece from the rear direction or has a left force direction and sets up a second sensor mounted on the side of the machine in parallel. According to the broadcast_pair brother 1 sensor, And set on the robot hand-year-old hand detection when a pair of first sensors enter !! C: \ 2D-CODE \ 91-10 \ 91117654.ptd
第8頁 559584 五、發明說明（6) 工件的前端緣或後端緣的機械座標差，求得工件的左右方 向的傾斜角0 ，根據一對第1感測器檢測工件的前端緣或 後端緣，根據第2感測器檢測工件側緣。 據此，在解除了工件的左右方向的傾斜角0、前後方向 的位置偏差、左右方向的位置偏差的狀態下，始由機器手 挾持工件。 此外，申請專利範圍第5項之發明，係於申請專利範圍 第4項之機器手之位置對準裝置中，一對第1感測器及第2 感測器係為光學式地檢測工件之邊緣者。據此，可以非接 觸方式檢測工件的邊緣。 此外，申請專利範圍第6項之發明，係為將可前後左右 移動且可旋轉的自動機器手從前後方向進入工件的上方或 下方進行位置對準之機器手之位置對準裝置，其於可上下 方向移動地支持安裝機器手的機械手臂的臂柱部設置端緣 感測器，藉由該端緣感測器檢測機器手所吸著的工件的左 右方向的位置。 據此，利用端緣感測器檢測工件的左右方向的位置，因 而，與習知將左右位置檢測感測器特別設於自動臂機構的 情況比較，可使裝置全體小型化。藉此，減小了所需無塵 室的空間，可降低製造成本。 此外，無必要如習知般將從閘盒取出的工件移動至與機 械手臂部不同位置設置的左右位置檢測感測器，而且，端 緣感測器與機械手臂同時向上下方向移動，因而，可縮短 生產節拍時間，提高生產性。Page 8 559584 V. Description of the invention (6) The mechanical coordinate difference between the leading edge or the trailing edge of the workpiece, and the tilt angle 0 of the workpiece in the left-right direction is obtained. The leading edge or the trailing edge of the workpiece is detected by a pair of first sensors. The end edge detects the side edge of the workpiece based on the second sensor. As a result, the workpiece is held by the robot hand in a state where the inclination angle of the workpiece in the left-right direction is 0, the position deviation in the front-back direction, and the position deviation in the left-right direction are released. In addition, the invention in the scope of the patent application No. 5 is in the position alignment device of the robot hand in the scope of the patent application No. 4, and the pair of the first sensor and the second sensor are optically detecting the workpiece. Marginal. Accordingly, the edge of the workpiece can be detected in a non-contact manner. In addition, the invention in the 6th aspect of the patent application is a position alignment device for a robotic hand that moves an automatic robotic hand that can move forward, backward, leftward, and rightward, and enters into the upper part or lower part of a workpiece from the front-rear direction. An end edge sensor is provided on the arm post portion of the robot arm supporting the robot hand to move in the vertical direction, and the end edge sensor detects the position in the left-right direction of the workpiece held by the robot hand. Accordingly, the position of the workpiece in the left-right direction is detected by the edge sensor, so that the entire device can be miniaturized as compared with the case where the left-right position detection sensor is particularly provided in the robot arm mechanism. This reduces the space required for the clean room and reduces manufacturing costs. In addition, it is not necessary to move the workpiece taken out of the brake box to the left and right position detection sensors provided at different positions from the robot arm as is conventional, and the edge sensor and the robot arm move simultaneously in the up and down direction. Can shorten the production cycle time and improve productivity.
C:\2D-CODE\9MO\91117654.ptd 第9頁 559584 五、發明說明（7) 又，端緣mm於❹冑， ，間：活；部僅為機器手及機械手臂。因：與如習。 2置檢測感測器間存在自動臂機構及架台的 定誤差。 仵兵感測為間的活動部極少而可減小測 此外’ t請專利範圍第7項之發明 第6項之機器手之位置對準 申5月專幻乾圍 測器。據此，可在廣範圍正確檢測出而工ζ感測山器為線型感 【發明之實施形態】 、件的知緣。 成^丁令、如、Η式，詳細說明本發明之最佳實施形態的構 f 1至圖5顯示適用本發明之機 置對準裝置），係為將可今洛士 士 Μ 下間稱為位 器手!從前後方向=移：且可旋轉的 機器手之位置對準f置nt!或下方進行位置對準之 抓晋的一斜笛其於機器手1具有左右方向並行 緣2a或後端賴^ ^ # = i件=端 傾斜角0 ，根據一對筮]汚.目,丨&于件2的左右方向的 後端緣2b，根據第2^ =二檢測工件2的前端緣2a或 T1 ^ ^ , . ^ 則頭B頒不圖中的左右方向。 方向隔開y定^° 1件2係於問盒内上下 重瑩收納方；未圖示的閘盒内。在機器手C: \ 2D-CODE \ 9MO \ 91117654.ptd Page 9 559584 V. Description of the invention (7) In addition, the edge is mm, ❹ 胄, 间: Live; the department is only a robot hand and a robot arm. Because: and as usual. There is a fixed error between the robot arm mechanism and the stand between the two detection sensors. The soldiers sense that there are very few moving parts and the measurement can be reduced. In addition, please align the position of the robot in item 6 of the invention in item 7 of the patent. According to this, it can be accurately detected in a wide range, and the ζ sensing mountain device has a linear sense. [Embodiment of the invention] The knowledge of the device. Formulas D1, D2, and D2 are used to describe the structure of the preferred embodiment of the present invention in detail (f 1 to FIG. 5 show the machine-aligned device to which the present invention is applied), which is called the present Roche M A positioner! From front to back direction = shift: and the position of the rotatable robot hand is aligned with f set nt! Or a oblique flute for position alignment below, which has a left and right parallel edge 2a or The rear end is ^ ^ # = ipiece = end inclination angle 0, according to a pair of contamination. Head, 2 & 2 at the rear end edge 2b of the left and right direction of the piece 2, the front end of the workpiece 2 is detected according to 2 ^ = 2 Edge 2a or T1 ^ ^,. ^ Then the head B is not shown in the left-right direction in the figure. The directions are separated by y ° ^ 1 piece and 2 pieces are stored in the upper and lower sides of the question box; In the machine hand
第10頁 C:\2D-CODE\91-10\91117654.ptd 五、發明說明（8) 1進入閘盒内的工件 吸著工件2。機器手丨步F方後，使機器手1上升藉由負壓 安裝有機器手1ίΛι/战如又子形狀。 第1機械手臂6與第2機，機構5，係利用相互逆方向旋轉 此外，自動臂機構5伤，手臂7沿前後方向移動機器手1。 上，利用左右移私#二可沿左右方向移動地載置於架台8 利用上下移動第丨機料^^手1左右移動。又，自動臂機構5 機構5係由電腦=ί f臂6使；器手;上下移動。自動臂 ^ 、、= 〇構成的控制器（未圖示）所控制。 弟忍、/、3為測工件2的前端緣2 a或是後端緣2 b者， 例如’如於機器手1的與工件2的前端緣2a或是後端緣2b對 向的。卩位面向上方而設。由於本實施形態中，藉由第1感 測裔3檢測工件2的後端緣2b，因而，第1感測器3係設於與 工件2的後端緣2b對應的部位、亦即左右的叉ia、ib的叉 根部。 苐1感测為、3為例如光學式地檢測工件2的後端緣2 b的感 測器。第1感測器3具備如面向上方發光的發光部；及接收 發光部發出、且由工件2反射的光的受光部。受光部的受 光量係根據工件2的有無進行變化，因而，根據該受光量 可檢測出是否與工件2對向、亦即可檢測出工件2的有無的 境界的端緣。 第2感測器4為檢測工件2的側緣者，係於機器手1的與工 件2的侧緣對向的部位面向上方而設。由於本實施形態 中，藉由第2感測器3檢測工件2的左側緣2c，因而第2感測 器4係設於與工件2的左側緣2 c對應的部位、例如、形成於Page 10 C: \ 2D-CODE \ 91-10 \ 91117654.ptd V. Description of the invention (8) 1 Work piece entering the brake box Suction work piece 2. After the robot hand steps F, the robot hand 1 is raised and the machine hand 1 is installed in a negative pressure. The first robot arm 6 and the second machine and mechanism 5 are rotated in mutually opposite directions. In addition, the robot arm mechanism 5 is injured, and the arm 7 moves the robot hand 1 in the front-rear direction. On the top, the left and right moving private # 二 can be placed on the stand 8 so as to be movable in the left and right direction. In addition, the automatic arm mechanism 5 is made up of a computer 5 and an arm 6; the hand is moved up and down. Controlled by a controller (not shown) formed by the robotic arms ^,, = 〇. Brother Ni, /, 3 is to measure the leading edge 2a or the trailing edge 2b of the workpiece 2, for example, 'as opposed to the leading edge 2a or the trailing edge 2b of the workpiece 2 of the robot hand 1. The niche is facing upward. Since the rear end edge 2b of the work 2 is detected by the first sensor 3 in this embodiment, the first sensor 3 is provided at a position corresponding to the rear end edge 2b of the work 2, that is, left and right. Fork root of fork ia, ib.苐 1 is a sensor, and 3 is a sensor that optically detects the trailing edge 2b of the workpiece 2, for example. The first sensor 3 includes a light-emitting section that emits light upward, and a light-receiving section that receives light emitted from the light-emitting section and reflected by the workpiece 2. The amount of light received by the light-receiving section is changed according to the presence or absence of the work 2. Therefore, based on the amount of light received, it is possible to detect whether or not it is opposed to the work 2, that is, the edge of the realm of the presence or absence of the work 2. The second sensor 4 detects a side edge of the workpiece 2 and is provided on a portion of the robot hand 1 that faces the side edge of the workpiece 2 and faces upward. Since the left edge 2c of the workpiece 2 is detected by the second sensor 3 in the present embodiment, the second sensor 4 is provided at a position corresponding to the left edge 2c of the workpiece 2, for example, formed at
C:\2D-CODE\91-10\91 117654 .pm 第11頁 559584 ——^ 五、發明說明（9) 左侧叉1 a的〇 第2感測哭^ 部2e。 . 測器。第2 i,、則學式地檢測工件2的左側緣2c的感 發光部發出*' 4具備如面向上方發光的發光部；及接收 光量係根據工i〇由工件2反射的光的受光部。受光部的受 可檢測出是不，.的有無進行變化，因而，根據該受光量 境界的端緣:與工件2對向、亦即可檢測出工件2的有無的 對準方法)計進對:幾,、器手1的位置對準方法(以下’簡稱為位置 法。該位取斜丁:兄明。圖6顯示適用本發明的位置對準方 工件2的上'準方法係為將自動機器手1從前後方向進入 法’其具備如\下」方進行位置對準之機器手之位置對準方 一對第1感測器3 U器j 具有左右方向並行配置的 從前後方向進入工件&的第2感測器4，將機器手！ (SU);根據機界手丨 或下方的機器手進入步驟 端緣h或後端緣;第1Λ測器3檢測工件的前 的傾斜角Θ的傾斜角叶’求仔工件2的左右方向 方沿左右方向使機器年;"從%，;(S12) ’·於工件2的上方或下 驟（S1 3 );在沿乂 、斜傾斜角β的傾斜角對準步 緣為止的第〗左右位置V準手二^ 機裔手1僅傾斜傾斜角0 在沿左右方向使 傾斜角β的方向移動機手:z，f從前後方向僅傾斜 的前端緣2 a或後端綠9 / 對第1感剩器3檢測工件2 為止的第】前後位置對準步驟 __C: \ 2D-CODE \ 91-10 \ 91 117654 .pm Page 11 559584 —— Ⅴ V. Description of the invention (9) Left side fork 1 a 〇 2 Sense crying part 2e. . Tester. The second i, the light-emitting portion that detects the left edge 2c of the workpiece 2 in a scientific manner * '4 is provided with a light-emitting portion that emits light upward, and a light-receiving portion that receives the amount of light reflected by the workpiece 2 according to the process i0 . The detection of the light-receiving part is no, the presence or absence of changes. Therefore, according to the edge of the light-receiving realm: facing the workpiece 2, that is, the alignment method to detect the presence or absence of the workpiece 2) The position alignment method of the hand 1 (hereinafter referred to as the position method. This position is taken as an oblique Ding: brother Ming. Fig. 6 shows that the quasi-method of the position alignment of the workpiece 2 to which the present invention is applied is the The automatic robot 1 enters from the front-back direction. It has the position alignment side of the robot hand to perform position alignment as below. A pair of first sensors 3 U and j. The second sensor 4 of the workpiece & the robot hand! (SU); According to the robot hand or the robot hand below, enter the step edge h or the rear edge; the first Λ sensor 3 detects the front tilt of the workpiece The angle of inclination of the angle Θ is to find the left and right directions of the workpiece 2 along the left and right directions to make the machine year; from% ,; (S12) '· Above or below the workpiece 2 (S1 3); The inclination angle of the oblique inclination angle β is aligned with the left and right positions of the leading edge V. The second hand ^ Machine hand 1 is inclined only by the inclination angle 0 Move the robot in the direction that makes the inclination angle β: z, f only the front edge 2 a or the rear edge green 9 which is inclined from the front-back direction. The front-back position alignment step until the workpiece 2 is detected by the first sensor 3 _ _
IK C:\2D-O0DE\9J-10\9JJJ7654.ptci 559584 五、發明說明（ίο) (S15)。 機器手進入步驟（S11)中，使機器手1前行進入工件2的 下方（圖1 )。此時，若工件2向左側僅傾斜傾斜角Θ，最 初，左側的第1感測器3檢測出工件2的後端緣2b。自動臂 機構5的控制器常時把握機器手1的現在位置的座標。控制 器根據左側的第1感測器3檢測出工件2的後端緣2b的瞬間 的機器手1的位置座標，計算出從第1機械手臂6的旋轉中 心〇 1至左側的第1感測器3的前後方向的距離X1。 於是，當機器手1再度前行時，右側的第1,感測器3檢測 出工件2的後端緣2b (圖2 )。控制器根據右側的第1感測器3 檢測工件2的後端緣2 b的瞬間的機器手1的位置座標，計算 出從第1機械手臂6的旋轉中心01至右側的第1感測器3的前 後方向的距離X2。 在傾斜角計算步驟（S1 2 )中，求得工件2的左右方向的傾 斜角θ。若假設左右的第]感測器3的間隔為以時，則傾斜 =Θ=Μγτ1((Χ2-Χ1)/ L1)。控制器係計算該程式求得傾斜 角0 。 步驟(S13” ’首先，求得最初沿左右方 =二;…2的支持位置的 械手臂6的旋轉中心…工置;=二=1機 ^ ^Y1=L2 χ tan , 0 ^ ^ ^ ^ 向的移動距離Y1。於是，若使=二私式求仵向左右方 動距離Y1 ’同時，使自動臂機動#機構5向右方向僅移 向左方向僅旋轉傾斜角IK C: \ 2D-O0DE \ 9J-10 \ 9JJJ7654.ptci 559584 V. Description of the Invention (ίο) (S15). In step (S11), the robot hand advances the robot hand 1 under the workpiece 2 (Fig. 1). At this time, if the workpiece 2 is tilted to the left only by the inclination angle Θ, the first sensor 3 on the left detects the trailing edge 2b of the workpiece 2 at first. The controller of the robot arm mechanism 5 always grasps the coordinates of the current position of the robot hand 1. The controller calculates the position from the rotation center of the first robot arm 6 to the first sensor on the left based on the position coordinates of the robot 1 at the moment when the left sensor 1 detects the trailing edge 2b of the workpiece 2. The distance X1 in the front-rear direction of the device 3. Then, when the robot hand 1 moves forward again, the sensor 1 on the right side detects the trailing edge 2b of the workpiece 2 (Fig. 2). The controller calculates the position coordinates of the robot hand 1 at the moment when the rear edge 2 b of the workpiece 2 is detected by the first sensor 3 on the right side, and calculates from the rotation center 01 of the first robot arm 6 to the first sensor on the right side. The distance X2 in the front-back direction of 3. In the inclination angle calculation step (S1 2), the inclination angle θ in the left-right direction of the workpiece 2 is obtained. If it is assumed that the interval between the left and right sensors 3 is less than or equal to, the inclination = Θ = Μγτ1 ((X2-X1) / L1). The controller calculates this program to find the tilt angle 0. Step (S13 "'First, find the rotation center of the robot arm 6 at the support position initially along the left and right sides = 2; ... 2; = 2 = 1 machine ^ ^ Y1 = L2 χ tan, 0 ^ ^ ^ ^ Distance Y1 in the direction of movement. Therefore, if you set the = two-private type to move the distance Y1 to the left and right, at the same time, make the automatic arm maneuver # 机构 5 to the right only to the left and only the tilt angle
559584 五、發明說明（11) ㊀ 機☆手1成為以閘盒的設置位置的中心02為中心向左 方向僅傾斜角度0 ，使得工件2的傾斜與機器手1的傾斜一 致。 德ί g第左ΐ位置對準步驟（S1 4 )中’沿左方向移動自動臂 / ^ ，第2感測器4檢測工件2的左側緣2c的位置停止 " 籍此’可調整工件2與機器手1的左右方向的位置 關係。 1 π在^後位置對準步驟（S1 5 )中’從前後方向使機器手 1僅傾斜傾斜尚A & +， ,的方向、亦即沿工件2的側緣2c、2d的方 ^ t , 丁弟1感測器3檢測工件2的後端緣2b的位置 停止（圖 5 ) 。Μ ,|·μ _ > $ „ ^ ^此’可調整工件2與機器手1的前後方向的 位置關係。 ^就=a兄’使機器手1的傾斜角0、前後左右的位置對 收1 ^ 2 /隨後上升機器手1吸著工件2。如此，由於在 :俨為手1對準工件2後吸著工件2，因而，例如工件2的置 ^位置即使相/對於問盒多少存在—些偏差，機器手工與工 ^的位1關仏仍成為正確，自動臂機構5可正確將工件2 搬運至下業場所的承接位置。 $ ’上述貫施形態為本發明的一例較佳形態，但是，並 不僅限於此，只I太丁 種種的變形。要在不起出本發明之要旨的範圍，即可作 r ς iD由圖：t位置對準方法中’在第1左右位置對準步驟 置對VWrii方向移動機器手1 ，隨後，在第1前後位 ，y Ηκ 中’從前後方向使機器手1僅傾斜傾斜角559584 V. Description of the invention (11) 机 Machine ☆ Hand 1 becomes inclined at an angle of 0 to the left with the center 02 of the installation position of the brake box, so that the inclination of workpiece 2 is consistent with that of robot hand 1. In the position alignment step (S1 4) of the gth left side, 'the robot moves in the left direction / ^, and the second sensor 4 detects the position of the left edge 2c of the workpiece 2 and stops.' "The workpiece 2 can be adjusted accordingly" The positional relationship with the left and right directions of the robot hand 1. 1 π in the rear position alignment step (S1 5) 'Make the robot hand 1 tilt only from the front-rear direction to the direction of A & +,, that is, the direction along the side edges 2c, 2d of the work 2 ^ t Ding Di 1 sensor 3 detects the position of the trailing edge 2b of the workpiece 2 to stop (Figure 5). Μ, | · μ _ > $ „^ ^ This can adjust the positional relationship between the workpiece 2 and the robot hand 1 in the front-back direction. ^ 就 = a 哥 兄 'makes the inclination angle 0 of the robot hand 1 and the position in the front-back and left-right position close. 1 ^ 2 / then raise the robot hand 1 to suck the workpiece 2. In this way, since: 俨 sucks the workpiece 2 after aligning the hand 1 with the workpiece 2, for example, the position of the workpiece 2 is even if there is a relative / for the number of boxes With some deviations, the manual and machine position 1 of the machine is still correct, and the robotic arm mechanism 5 can correctly transfer the workpiece 2 to the receiving position of the workplace. $ 'The above-mentioned embodiment is a preferred form of the present invention. However, it is not limited to this, but only various deformations of I. In order not to fall within the scope of the present invention, you can make r i iD from the figure: in the t-position alignment method, Move the robot hand 1 in the VWrii direction step by step, and then, in the first front and rear positions, y Ηκ causes the robot hand 1 to tilt only by the inclination angle.
___ 苐14頁 559584 五、發明說明（]2) 0的方向移動，但本發明並 在第2前後位置對爭步驟（s丨6 ) ^ ^ πί，圖7所不， 器手1，隨後，在第2左右位晋射准士可耵後方向移動機 右方向使機器手1僅傾斜傾斜角> 乂驟s 17)中，沿從左 左右侧緣2 c、2 d的方向移動。的方向、亦即沿工件2的 =是說’該位置對準方法係為將自動 方”入工件2的上方或下方進行位置對：之。機心= 置對準方法其還可具備如下步驟，機器手！且； 向並行配置的一對第1感測器3， /、有左右方 4，將機器手i從前後方向進入工;上側方部士的第2感測器 ^ #，,usi 1) ； ^ ^ ^ n ^ ΓΛ Λ .T! 測工件2的前端緣23或後端緣孔的機械座標差，= 的左右方向的傾斜角β的傾斜角計算步驟（S12).=工二 的上方或下方沿左右方向使機器手丨僅傾斜傾斜角0 斜角對準步驟（S13);在沿左右方向使機器手1僅傾斜傾斜 角0的狀態下，沿前後方向移動機器手1至一對第i感測哭 3檢測工件2的前端緣2a或後端緣2b為止的第2前後位*置'對& 準步驟（S1 6);及在沿左右方向使機器手！僅傾斜傾斜角θ 的狀態下’沿從左右方向僅傾斜傾斜角0的方向移動機哭 手1至第2感測器4檢測工件2側緣為止的第2左右位置對準 步驟（S1 7 )。 < 該位置對準方法也與圖1之位置對準方法相同，可使機 器手1的傾斜角0、前後左右的位置對準於工件2。藉此， 例如工件2的置放位置即使相對於閘盒多少存在一些偏___ 页 14 pages 559584 V. Description of the invention () 2) 0 moves in the direction of 0, but the present invention does not compete at the second forward and backward positions (s 丨 6) ^ ^ πί, as shown in Figure 7, the instrument 1, then, In the second left and right position, the right-hander can move the machine in the right direction so that the robot 1 tilts only at an inclination angle > step s 17), and moves in the direction from the left and right side edges 2 c, 2 d. The direction of the workpiece, that is, along the workpiece 2 = means 'the position alignment method is to position the automatic side' above or below the workpiece 2 for position alignment: it. Movement = positioning alignment method It can also have the following steps , Robot hand! And; a pair of first sensors 3 arranged in parallel, / has left and right sides 4, enter the robot hand i from the front-rear direction; the second sensor of the upper sergeant ^ # ,, usi 1); ^ ^ ^ n ^ ΓΛ Λ .T! Measure the mechanical coordinate difference of the leading edge 23 or the trailing edge hole of the workpiece 2, = the inclination angle calculation step of the inclination angle β in the left and right directions (S12). = 工Move the robot hand 1 in the left-right direction from the top or bottom to the tilt direction. Slope angle alignment step (S13); Move the robot hand 1 in the front-rear direction with the robot hand 1 tilted only in the left-right direction. The second anterior and posterior positions up to a pair of the i-th sensing cry 3 detecting the leading edge 2a or the trailing edge 2b of the workpiece 2 are set in the "quasi-step" (S1 6); and the robot is moved in the left and right directions only! In the state of inclination inclination angle θ, the mobile phone 1 to the second sensor 4 detect the side edge of the workpiece 2 in a direction in which the inclination angle is only 0 from the left and right directions. The second left and right position alignment step (S1 7). ≪ This position alignment method is also the same as the position alignment method of FIG. 1, which can make the tilt angle 0 of the robot hand 1 and the front, back, left and right positions aligned with the workpiece 2 With this, for example, the placement position of the workpiece 2 is somewhat biased relative to the brake box.
| SI ιβρβι II I 1 1 11 C:\2D-CODE\9MO\91117654.pid 559584 五、發明說明（13) 差，機器手1與工件2的位置關係仍成為正確，自動臂機構 5可正確將工件2搬運至下一作業場所的承接位置。 此外，上述說明中，係藉由一對第1感測器3檢測工件2 的後端緣2 b，但是，也可藉由一對第1感測器3檢測工件2 的别端緣2 a。 此外’上述說明中’係措由第2感測4檢測工件2的左 側緣2 c，但是，也可藉由第2感測器4檢測工件2的右側緣 2 d 〇 又，上述說明中，機器手1上安裝有檢測工件2的後端緣 2b的一對第1感測器3，及檢測工件2的左側緣2c的第2感測 器4，但也可增加安裝的感測器數。例如，圖8所示，除安 裝檢測工件2的後端緣2b的一對第1感測器3，及檢測工件2 的左側緣2 c的第2感測器4外，還可安裝檢測工件2的前端 緣2a的一對第1感測器3，及檢測工件2的右側緣2d的第2感 測器4。利用增加感測器數可提高機器手1的位置定位精 度。此外，即使工件2的尺寸公差大的情況，也可握持工 件2的中心部分。 此外，上述說明中，係藉由感測器3、4檢測工件2的端 緣2a〜2d，在將感測器3、4的位置對準於工件2的端緣2a 〜2d的狀態下吸著工件進行握持，但是，並非一定要將感 測器3、4的位置對準於工件2的端緣2 a〜2 d。例如，也可 將感測器3、4的位置對準於遠離開工件2的端緣2a〜2d的 落在指定偏差尺寸之内側的位置。 另一方面，上述實施形態中，機器手1上至少安裝1第2SI ιβρβι II I 1 1 11 C: \ 2D-CODE \ 9MO \ 91117654.pid 559584 V. Description of the invention (13) Poor, the positional relationship between robot 1 and workpiece 2 is still correct, and the automatic arm mechanism 5 can correctly The work 2 is transferred to the receiving position of the next work place. In addition, in the above description, the trailing edge 2 b of the workpiece 2 is detected by the pair of first sensors 3. However, the other trailing edge 2 a of the workpiece 2 may be detected by the pair of first sensors 3. . In addition, in the above description, the left edge 2 c of the workpiece 2 is detected by the second sensor 4, but the right edge 2 d of the workpiece 2 may also be detected by the second sensor 4. In the above description, A pair of first sensors 3 for detecting the trailing edge 2b of the workpiece 2 and a second sensor 4 for detecting the left edge 2c of the workpiece 2 are mounted on the robot hand 1, but the number of sensors to be mounted may be increased . For example, as shown in FIG. 8, in addition to a pair of first sensors 3 that detect a trailing edge 2 b of the workpiece 2 and a second sensor 4 that detects a left edge 2 c of the workpiece 2, a detection workpiece may be installed. A pair of first sensors 3 at the leading edge 2a of 2 and a second sensor 4 that detects the right edge 2d of the workpiece 2. By increasing the number of sensors, the positioning accuracy of the robot hand 1 can be improved. In addition, even when the dimensional tolerance of the work 2 is large, the center portion of the work 2 can be held. In addition, in the above description, the edges 2a to 2d of the workpiece 2 are detected by the sensors 3 and 4, and the positions of the sensors 3 and 4 are aligned with the edges 2a to 2d of the workpiece 2. Hold the workpiece while holding it, but it is not necessary to align the positions of the sensors 3 and 4 to the edges 2 a to 2 d of the workpiece 2. For example, the positions of the sensors 3 and 4 may be aligned with the positions which are far away from the end edges 2a to 2d of the workpiece 2 and fall inside the designated deviation size. On the other hand, in the above embodiment, at least one second
C:\2D-CODE\91-10\9ni7654.ptcl 第16頁 乃584 五、發明說明（】4) 感測器4，但B 、， 2感測器4，ϋ ’並不僅限於此，也可於機器手1不設置第 安裝機器手^是，如圖9所示，於可上下方向移動地支持 藉由該:緣感的機械手臂6的臂柱部18設置端緣感測器〗9， 方向的位置t ^為1 9檢測吸著於機器手1上的工件2的左右 的左右方向礒情況，由於利用端緣感測器1 9檢測工件2 特別設於自f，置，因而，與習知將左右位置檢測感測器 化。藉此，^臂機構5的情況比較，可使裝置全體小型 此外，該情小了所需無塵室的空間，可降低製造成本。 2移動至與自| ^中’無必要如習知般將從閘盒取出的工件 器，而且、，妒力臂機構5不同位置設置的左右位置檢測感測 移動，因而:緣感測器19與機械手臂6、7同時向上下方向 又，端緣感:Ϊ短生產節拍時間，提高生產性。 緣感測器1 9間的态1 9係设於臂柱部1 8，因而，工件2與端 此，與如習知妒1動部僅為機器手1及機械手臂6、7。因 動臂機構5及架\^工t2與左右位置檢測感測器間存在自 的活動部極少、的h况比車乂，由於工件2與感測器1 9間 在此，機可減小測定誤差。 L3。於*，於機具器有手一對第1感測器 件2的前端緣2a或後入日；^對弟1感測器3、3檢測工 方向的傾斜角θ後/ 4 b，同蚪，據此求得工件2的左右 此外，端緣感準機器!1與卫件2的面向。 廣範圍正確檢；：二：型感測器構成。因此，可在 2d。 出件的立而緣、亦即左側緣2c或右側緣C: \ 2D-CODE \ 91-10 \ 9ni7654.ptcl Page 16 and 584 V. Description of the invention () 4) Sensor 4, but B ,, 2 Sensor 4, and '' are not limited to this, but also The robot arm 1 can be installed without installing the first robot arm ^ Yes, as shown in FIG. 9, an edge sensor can be installed on the arm column portion 18 of the robot arm 6 which can move up and down. 9 The position t ^ of the direction is 19 to detect the left and right direction of the workpiece 2 that is attracted to the robot hand 1. Since the edge detector 19 is used to detect the workpiece 2, it is particularly set at the position f. Therefore, And the sensor is used to detect left and right position detection. Accordingly, the comparison of the arm mechanism 5 can make the entire device compact. In addition, the space required for the clean room is reduced, and the manufacturing cost can be reduced. 2Move to and from | ^ in 'It is not necessary to remove the workpiece device from the brake box as is customary, and the left and right positions of the jealous arm mechanism 5 are set to detect the sensing movement, so: the edge sensor 19 At the same time as the robotic arms 6, 7 up and down, the edge feeling: Ϊ short production cycle time, improve productivity. The state 19 between the edge sensors 19 is located at the arm post portion 18. Therefore, the workpiece 2 and the end are the same as the conventional jealousy 1. The moving part is only the robot hand 1 and the robot arms 6, 7. Because there is very few moving parts between the boom mechanism 5 and the frame t2 and the left and right position detection sensors, the h-state is lower than the car, because the workpiece 2 and the sensor 19 are here, the machine can be reduced Measurement error. L3. In *, the machine tool has a pair of first edge 2a of the first sensing device 2 or the rear sunburst; ^ After the first sensor 3, 3 detects the tilt angle θ of the working direction / 4 b, the same, Based on this, the left and right sides of the workpiece 2 are obtained, and the end edge is aligned with the direction of the machine 1 and the guard 2. Wide range of correct inspection; 2: Second: the structure of the sensor. So it is available in 2d. The vertical edge of the output, that is, the left edge 2c or the right edge
第17頁 559584 五、發明說明（15) __ 線型感測器1 9具備發光部與受光部，同時， 置為如圖1 〇所示相對工件2呈傾斜狀。因此'，x光軸係設 部的光線由工件2反射返回原來的方向等 2抑制發光 產生。又，圖10中，元件編號Γ 、6，、7，八°、力作-的原因 機器手及機械手臂。 刀1頌不第2個 又，線型感測器19係設於圖9所示機械手臂6、 方向的相反側。因此，機械手臂6 /的言曲 不會干擾，也不會阻礙操作性。W線型感測器Π相互 針對該實施形態之機器手〗之位 該位置對準方法係為將自動機界 ^方法進行說明。 的上方或下方保持且取出工件\ ^別後方向進入工件2 機器手之位置對準方法。於是，> 5妆將工件2位置對準之 示，具備如下步驟，將機器手〃二/立置對準方法如圖Π所 方或下方的機器手進入步驟 ^刖後方向進入工件2的上 對前後感測器3、3檢測工件2 二根據機器手1進入時一 械座標差，求得工件2的左古則端緣2a或後端緣2b的機 算步驟（S1 2 );於工件2的上方/向的傾斜角Θ的傾斜角計 1僅傾斜傾斜角Θ的傾斜角 或下方沿左右方向使機器手 機器手1僅傾斜傾斜角0 ，二步驟（S1 3);沿左右方向使 點保持且取出工件2的取出牛二後感測器3、3導通的起始 測定工件2的端緣2c、2d的二^(Sl8);藉由端緣感測器19 右偏差量將工件2對準於指=右測定步驟（S1 9);及修正左 機器手進入步驟（SI 1 )與:^置的位置對準步驟（S20)。 及圖7所示者相同省略詳細說/角計算步驟（S1 2 )因與圖6 °兄明。又，將收納工件2的閘盒 C: \2D-CODE\9] -]〇\9] ] 17654. pic! 第18頁 559584 五、發明說明（16) 的設置位置的中心〇2與第1機械手臂6的旋轉中心01處於最 短距離的臂柱部18的位置（圖9所示狀態）作為自動臂機構5 的假設原始位置。 在傾斜角對準步驟（S13)中，首先，求得最初沿左右方 向移動自動臂機構5的距離Y2。距此求得工件2的前後方向 的中心0 3。假設從工件2的础後方向的中心〇 3至第1機械手 臂6的旋轉中心〇 1的距離為L 3，則L 3由如下數式算出。 L3=Xl+tan Θ x (Ll/2)+cos θ χ (b/2) 又，向左右方向的移動距離為Υ 2 == L 3 χ t a η 0。控制器計 算該試求得向左右方向的移動距離Υ2。於是，如圖丨3所° 示，邊將自動臂機構5向右方向的僅移動距離γ2，同時邊 將自動臂機構5旋轉僅傾斜角<9，即可使機器手1以工件2 的中心03為中心向左方向僅傾斜角度0 ，使工件2的傾斜 與機器手1的傾斜一致。 在取出步驟（S18)中，如圖13所示，使機器手1向左方向 僅傾斜角度Θ，同時，使自動臂機構5僅移動距離Υ2，在 前後感測器33導通的起始點保持且取出工件2。隨後， 如圖1 4所示，使自動臂機構5僅返回距離Υ2，同時，使機 器手1僅返回傾斜角Θ。藉此，使自動臂機構5位於假設的 原始位置。 .在左右測定步驟（s 1 9 )中，如圖1 5所示，藉由端緣感測 器1 9測定工件2的端緣2c。於是，在位置對準步驟（S2〇)中 修正左右偏差量使工件2對準於指示位置。 如上所述，根據本實施形態由於將前後感測器3、3搭載 第19頁 C: \2D-OODE\9] · 】】7654 .ptd 559584 五、發明說明（]7) 於機器手1上’因而’可相對機器手！筆 此，可防止在從儲存庫取出工件2時因工y的=件2。因 莫名其妙的飛落或缺口的情況發生。 ’角部而造成 哭，上述實施形態中，雖將前後感測器3、3捉并 的手上，但並不限於此，也可不搭载。該愔。裁於機 緣感測器1 9決定工件2的位置。也就是說，保持工僅由端 需進行測定即進行保持。於是，只要於保持後、件2時不 ，器Π進行工件2的左右側緣2c、2d與前後端緣側^緣感 中至少3部位的測定，測定對於自動臂機構5的工、2b 置’再搭載於下一正禮位置即可。 、位 、，又，上述實施形態中，僅設置1個端緣感測器丨9，作θ 並不僅限於此，也可設置2個以上的端緣感測器。如=是 自動⑤機構5的左右部位各設置1個端緣感測器丨9，= 測工〃件2 ^左右側緣2C、2d。該情況，藉由前後移動機^十 手1等，藉以檢測出工件2的傾斜角0且予以修正即。斋 【發明效果】 ° 、如上所述，申請專利範圍第丨項之機器手之位置對準 法中1，於具備如下步驟，機器手具有左右方向並行配置 ^ 對苐1感測器，及設於側部的第2感測器，將機器手從 3，方向進入工件的上方或下方的機器手進入步驟；°根二 2為手進入時一對第1感測器檢測工件的前端緣或後端緣 白、機械座標差，求得工件的左右方向的傾斜角0的傾斜角 計算步驟；於工件的上方或下方沿左右方向使機器手僅傾 斜傾斜角0的傾斜角對準步驟；在沿左右方向使機器手僅Page 17 559584 V. Description of the invention (15) __ The linear sensor 19 is provided with a light-emitting part and a light-receiving part. At the same time, it is arranged to be inclined with respect to the work 2 as shown in FIG. 10. Therefore, the light emitted from the x-axis system is reflected by the workpiece 2 and returned to the original direction. In FIG. 10, the component numbers Γ, 6, 7, 7, and 8 are caused by the force of the robot and the robot arm. The knife 1 is not the second. The linear sensor 19 is provided on the opposite side to the direction of the robot arm 6 shown in FIG. 9. Therefore, the speech of the robot arm 6 / will not interfere or hinder operability. The W-line sensors Π are directed to the position of the robot hand in this embodiment. The position alignment method is to explain the method of the automaton. Hold and remove the workpiece from above or below \ ^ Do not enter the workpiece from the rear direction 2 Positioning method of the robot hand. Therefore, > 5 makeup alignment of the workpiece 2 is shown as follows, with the following steps, the robot hand 2 / vertical alignment method as shown in Figure II or below the robot hand into the step ^ 刖 into the direction of the workpiece 2 The front and back sensors 3 and 3 detect the workpiece 2 and calculate the left and right edge 2a or 2b of the workpiece 2 according to the coordinate difference of the robot when the robot 1 enters (S1 2); Tilt angle meter 1 for tilt angle Θ above / toward of workpiece 2 Tilt angle of tilt angle Θ only or tilt angle of tilt angle Θ in the left-right direction causes mobile phone hand 1 to tilt tilt angle 0 only, two steps (S1 3); Hold the point and take out the work piece 2. Take out the second sensor 2 and the sensor 3, 3 to start the measurement of the two edges 2c and 2d of the work piece 2 (Sl8); with the edge sensor 19, the right deviation The workpiece 2 is aligned with the finger = right measurement step (S1 9); and the left robot hand enters the step (SI 1) and the position alignment step (S20) is set. It is the same as that shown in FIG. 7 and detailed description / angle calculation step (S1 2) is omitted because it is the same as that shown in FIG. 6. In addition, the gate box C housing the workpiece 2 is: \ 2D-CODE \ 9]-] 〇 \ 9]] 17654. pic! Page 18 559584 V. The center of the installation position 〇2 and the first of the description of the invention (16) The rotation center 01 of the robot arm 6 is at the position (the state shown in FIG. 9) of the arm column portion 18 with the shortest distance as the assumed home position of the robot arm mechanism 5. In the tilt angle alignment step (S13), first, the distance Y2 of the robot arm 5 which is first moved in the left-right direction is obtained. From this, the center 0 3 of the workpiece 2 in the front-rear direction is obtained. Assuming that the distance from the center 03 of the base-back direction of the workpiece 2 to the rotation center 01 of the first robot arm 6 is L 3, L 3 is calculated by the following formula. L3 = Xl + tan Θ x (Ll / 2) + cos θ χ (b / 2) The moving distance in the left-right direction is Υ 2 == L 3 χ t a η 0. The controller calculates this test to find the moving distance Υ2 in the left-right direction. Then, as shown in Figure 3, while moving the robotic arm mechanism 5 to the right by only the distance γ2, while rotating the robotic arm mechanism 5 only by the inclination angle < 9, the robot hand 1 can move the workpiece 2 The center 03 is a center-to-left tilt angle of 0, so that the tilt of the workpiece 2 coincides with the tilt of the robot hand 1. In the taking-out step (S18), as shown in FIG. 13, the robot hand 1 is tilted to the left only by an angle Θ, and at the same time, the robot arm mechanism 5 is moved only by a distance Υ2, and is maintained at the starting point where the front and rear sensors 33 are turned on And take out the workpiece 2. Subsequently, as shown in Fig. 14, the robot arm mechanism 5 is returned only by the distance Υ2, and at the same time, the robot hand 1 is returned only by the inclination angle?. Thereby, the robot arm mechanism 5 is positioned at the assumed home position. In the left and right measurement step (s 1 9), as shown in FIG. 15, the edge 2 c of the workpiece 2 is measured by the edge sensor 19. Then, in the alignment step (S20), the amount of left-right deviation is corrected so that the workpiece 2 is aligned at the designated position. As described above, according to this embodiment, since the front and rear sensors 3 and 3 are mounted on page 19, C: \ 2D-OODE \ 9] ·]] 7654 .ptd 559584 5. Description of the invention () 7) on the robot hand 1 'Thus' can be relative to the robot! With this, it is possible to prevent work 2 from being removed when the workpiece 2 is removed from the storage. Due to inexplicable flying or notch. The corner part causes crying. In the above embodiment, the front and rear sensors 3 and 3 were held in the hand, but it is not limited to this and may not be mounted. The puppet. Cut to the edge sensor 19 determines the position of the workpiece 2. In other words, the maintenance workers only need to perform the measurement to maintain. Therefore, as long as the left and right sides of the workpiece 2 are not held, the device 2 measures at least 3 of the left and right side edges 2c and 2d of the workpiece 2 and the front and rear edge sides, and measures the position of the robot arm 5 and the position 2b. 'Reload it at the next salute position. In the above embodiment, only one edge sensor is provided, and θ is not limited to this, and two or more edge sensors may be provided. If = Yes, the left and right parts of the mechanism 5 are provided with one edge sensor 丨 9, and the left and right side edges 2C, 2d of the measuring tool 2 are measured. In this case, the inclination angle 0 of the workpiece 2 is detected and corrected by moving the machine back and forth ten hands 1 and so on. [Inventive effect] ° As mentioned above, in the position alignment method of the robot hand in the patent application No. 丨 1, it has the following steps. The robot hand has a parallel arrangement in the left and right directions. At the second sensor on the side, enter the robot hand from the 3 direction to the upper or lower part of the workpiece. Step 2 is the pair of first sensors that detect the leading edge of the workpiece or The back edge is white, the mechanical coordinate is different, and the inclination angle calculation step of the inclination angle 0 of the workpiece in the left and right direction is obtained; the inclination angle alignment step of the machine arm only inclination angle 0 above and below the workpiece; Keep the robot hand in the left-right direction only
C:\2D- C〇DE\9]-l〇\9]117654.ptd 第20頁 559584 1五、發明說明（18) ^ ί=，向使機器手僅傾斜傾斜角θ的=對準步驟；及在 向僅傾斜傾斜角0的方向移 狹態下’沿從前後 ，工件的前端緣或後端緣為止對第1感測器 騄，因而，僅藉由設於機器手上：】：後位置對準步 :;:ΐ對準。因此，，無將：Ξ;Γ可進行機器手 臂機構的肋等上的必要，可=測益個別地安裝於自動 所必要的空間。此夕卜，由於可u型化’也可減窄設置 ，至下一作業場所，可縮短搬運二二二後直接將工件搬 郎拍時間。又，藉由設於機哭二守間，也可縮短生產 的位置對準，目而，可減小誤差要：測器直接進行機器手 此外，申請專利範圍第2項之機哭。 中’由於具備如下步⑩，機哭手具;手之位置對準方法 1第1感測器，及設於側部的方配置的 後方向進入工件的上方或下方的機二丰:冬機态手從前 器手進入時-對第1感測器檢測工件D°的吁二步、驟；根據機 機械座標差，求得工件的乂 、月11而‘或後端緣的 算步驟；於工件的上方或；；=傾斜角Θ的傾斜角計 傾斜角0的傾斜角對準步驟.$ 方向使機器手僅傾斜 :傾斜角“㈣T，沿前後；器手僅傾 2器檢測工件的前端緣或後端緣為對第1 > V称，及在沿左右方向使機器手僅_ 引後位置對 下，沿從左右方向僅傾斜傾斜角θ方Θ 、知角Θ的狀態 勺方向淨夕動機器手至第C: \ 2D- C〇DE \ 9] -l〇 \ 9] 117654.ptd Page 20 559584 1 V. Description of the invention (18) ^ =, aligning steps to make the robot only tilt the inclination angle θ = ; And in a narrow state shifted only in the direction of an inclination angle of 0, the first sensor 沿 is moved along the front or rear edge of the workpiece from the front and back, so only by setting on the machine hand:]: Back position alignment step:;: ΐ alignment. Therefore, there is no need to: Ξ; Γ can be performed on the ribs of the robot arm mechanism, etc., and it can be installed individually in the space necessary for automatic measurement. In addition, since it can be u-shaped, it can also be narrowed down to the next work place, which can shorten the time for directly moving the workpiece after the 222 is moved. In addition, it can also shorten the production position alignment by setting it up in the second guard room. In addition, the error can be reduced: the tester directly performs the robot hand. In addition, the second scope of the patent application is for the machine tear. Due to the following steps, the machine cries hand tools; the position of the hand is aligned with the first sensor, and the rear side of the machine is arranged above and below the workpiece. When the state hand enters from the front hand-two steps and steps for the first sensor to detect the workpiece D °; according to the mechanical coordinate difference of the machine, obtain the workpiece's 工件, month 11 'or the back edge calculation step; The upper part of the workpiece or ;; = the inclination angle alignment step of the inclination angle of the inclination angle 0 of the inclination angle Θ. The $ direction makes the robot hand only inclination: the inclination angle "㈣T, along the front and rear; the hand only tilts 2 to detect the front end of the workpiece The edge or trailing edge is called the first > V, and the robot hand is positioned only in the left and right directions, and the rear edge is tilted from the left and right directions only by the inclination angle θ square Θ and the known angle Θ. Move the robot hand to the first
559584 五、發明說明（]9) 2感測器檢測工件側緣為止的第2左右位 而，僅藉由設於機器手上的感測器即可 =559584 V. Description of the invention () 9) 2 sensor detects the second left and right position up to the side edge of the workpiece, and only the sensor set on the robot hand can be used =
的空間…卜，由於可於握持工件後直接將工 斤G -作業場所’彳縮短搬運所需時間，也可縮短生產節拍日: :m:機器手的感測器直接進行機器手的位置 對準，因而，可減小誤差要因。 此外，根據申請專利範圍第3項之機器手之位置 法，可僅藉由設於機器手及臂柱部的感測器即可進 手的位置對準。因Η彳如，無將感測器個別地安裝^ 動臂機構的肋等上的必要，可使裝置小型<匕 ；卜 置所必要的空間。此外，由於不需經由與自動臂機 ::，握持工件後直接將工件搬運至下：二 :琢所’ gp可紕短搬運所需時間，也可縮短生產節拍 ，。又，端緣感測器係設置於臂柱部，0此， =議活動部僅為機器手及機械手臂。因此斑Ϊ: 工件興左右位置檢測咸：目丨丨口口日日士 士 A /、白知 ,,ώ仏Π α測益間存在自動臂機構及架台的情 差。乂 m興感測器間的活動部極少可減少測定誤 此夕：’：請專利範圍第4項之機器 中，由於機器手具有左 了早裝置 器，及嗖於機尹主,,Γ 设置的一對第1感測 二對ί Γ感t Λ 1部:第2感測器^ ΰσ k J件的前端緣或後端緣的機械座標Space ... buy, because the weight can be directly transferred to the G-working place after holding the workpiece, the time required for transportation can be shortened, and the production cycle time can also be shortened:: m: The sensor of the robot directly performs the position of the robot Alignment can therefore reduce the error factor. In addition, according to the position method of the robot hand in item 3 of the patent application scope, the hand position can be aligned only by the sensors provided on the robot hand and the arm post. For example, it is not necessary to individually mount the sensors on the ribs of the boom mechanism, so that the device can be made small <dagger; the space necessary for the installation. In addition, since there is no need to pass the automatic arm machine ::, the workpiece can be directly transported to the bottom after holding the workpiece: Ⅱ: 所 所 ’gp can shorten the time required for transportation and shorten the production cycle. In addition, the edge sensor is provided at the arm post portion, and therefore, the movable portion is only a robot hand and a robot arm. Therefore, it is very difficult to detect the left and right positions of the workpiece: eye 丨 丨 口 口 日 日 士士 A /, Bai Zhi ,, 仏 仏 α α There is a poor condition between the automatic arm mechanism and the stand.乂 m Xing the movable part between the sensors can reduce the measurement error. ": In the machine with the scope of patent No. 4, because the robot hand has a left device, and the machine is set by Yin Zhuo, Γ A pair of first sensing two pairs of Γ Γ t t Λ 1: The second sensor ^ ΰσ k J the mechanical coordinates of the leading edge or the trailing edge of the piece
第22頁 C:\2D-CODE\91-10\91117654.ptd 559584 五、發明說明（20) __ 差，求得工件的左右方向的傾斜角^， 測器檢測工件的前端緣或後 =艮據一對第1感 件側緣，僅藉由設於機器手^苐2感測器檢測工 位置對準。因此，例如 即可進行機器手的 機構的肋等上的必要，可使別;臂 必要的空間。此外，由於可也了減乍設置所 至下一作業場所，可縮短搬運二兩士後直接將工件搬運 拍時間。X ’藉由設於機器；；^直=可縮紐生產節 位置對準，因而，可減小誤1 =測益直接進行機器手的 中此夕U請專利範圍第5項之機器手之位置對準裝置 :邊K一 Γ1感測二及第2感測器輪學式地檢則工 件者，因而可以#接觸方式檢測工件的邊緣。 置，由於3據申請專利範圍第6項之機器手之位置對準裝 $ :於利用端緣感測器檢測工件的左右方向的位 二兄：知將左右位置檢測感測器特別設於自動 = Lb;，可使裝置全f小型化。“，減小了所需無Ϊ ηϋ 降低製造本。此外，$必要如習知般將從 Γ ϋ ΐ 工件移動裘與機械手臂部不同位置設置的左右 ^測感測器，而真，端緣感測器與機械手臂同時向上 二移動，因而，玎縮紐生產節拍時間，提高生產性。 Ρ3 ·5Λ二、水感'則器係設於臂柱部，因而，工件與端緣感測器 曰杜/動部僅為機器手及機械手臂。因此，與如習知般於 =7，左右位置檢測感測器間存在自動臂機構及架台的情 况比較，由於工件與感測器間的活動部極少而可減小測定Page 22 C: \ 2D-CODE \ 91-10 \ 91117654.ptd 559584 V. Description of the invention (20) __ Difference, find the inclination angle of the left and right direction of the workpiece ^, the detector detects the front edge or back of the workpiece = gen According to the side edges of the pair of first sensing elements, the detection positions are aligned only by the sensor set on the robot hand. Therefore, for example, the ribs and the like of the mechanism of the robot hand can be carried out, and the space necessary for the arm can be made different. In addition, because it can reduce the installation time to the next work place, it can reduce the time required to directly move the workpiece after taking two or two people. X 'by setting on the machine; ^ Straight = the position of the shrinkable production joints can be reduced, so that errors can be reduced 1 = the measurement benefit is directly performed by the robot hand Positioning device: Edge K1, Γ1, second sensor, and second sensor check the workpiece in a wheeled manner, so the edge of the workpiece can be detected by #contact method. Due to the position alignment of the robot hand according to item 6 of the scope of patent application according to item 3, it is used to detect the left and right direction of the workpiece by using the edge sensor. Brother: I know that the left and right position detection sensor is specially set to automatic = Lb ;, can make the device all miniaturized. "Reduces the required free weight η ϋ reduces manufacturing costs. In addition, it is necessary to move the workpiece from the Γ ϋ ΐ as known, and the left and right ^ sensors located at different positions of the robot arm, and true, the edge The sensor and the robot arm move up and up at the same time, thus reducing the production cycle time and improving productivity. P3 · 5Λ 二, the water sensor is installed on the arm post, so the workpiece and the edge sensor The du / moving part is only a robot hand and a robot arm. Therefore, compared with the conventional case where = 7, there is an automatic arm mechanism and a stand between the left and right position detection sensors, due to the movement between the workpiece and the sensor Minimal number of parts to reduce measurement
C:\2D-CODE\9l-10\9lii7654.ptd 第23頁 559584 五、發明說明（21) 誤差。 此外，根據申請專利範圍第7項之機器手之位置對準裝 置，由於端緣感測器為線型感測器，因而，可在廣範圍正 確檢測出工件的端緣。 【元件編號之說明】 1 機器手 la 左側叉 lb 右側叉 2 工件 2a 工件的前端緣 2b 工件的後端緣 2c 工件的左側緣 2d 工件的右側緣 2e 突出部 3 第1感測器 4 第2感測器 5 自動臂機構 6 第1機械手臂 7 第2機械手臂 8 架台 18 臂柱部 19 端緣感測器（e 1， 第2個機器手 6， 機械手臂C: \ 2D-CODE \ 9l-10 \ 9lii7654.ptd Page 23 559584 V. Description of the invention (21) Error. In addition, according to the position alignment device of the robot hand according to item 7 of the patent application, since the edge sensor is a linear sensor, the edge of the workpiece can be accurately detected in a wide range. [Description of component numbers] 1 Robot la left fork lb right fork 2 workpiece 2a leading edge of workpiece 2b trailing edge of workpiece 2c left edge of workpiece 2d right edge of workpiece 2e protruding portion 3 first sensor 4 second 2 Sensor 5 Robot arm mechanism 6 First robot arm 7 Second robot arm 8 Mounting table 18 Arm post 19 End edge sensor (e 1, second robot 6, robot arm
C:\2D-00DE\9M0\91117654.ptd 第24頁 559584 五、發明說明（22) 7 ’ 機械手臂 Θ 傾斜角 S1 1 機器手進入步驟 S12 傾斜角計算步驟 S 1 3 傾斜角對準步驟 S 1 4 第1左右位置對準步驟 S1 5 第1前後位置對準步驟 S1 6 第2前後位置對準步驟 S1 7 第2左右位置對準步驟 S 1 8 取出步驟 S1 9 左右測定步驟 S20 位置對準步驟C: \ 2D-00DE \ 9M0 \ 91117654.ptd Page 24 559584 V. Description of the invention (22) 7 'Robot arm Θ tilt angle S1 1 The robot enters step S12 tilt angle calculation step S 1 3 tilt angle alignment step S 1 4 The first left and right position alignment step S1 5 The first front and back position alignment step S1 6 The second front and back position alignment step S1 7 The second left and right position alignment step S 1 8 The removal step S1 9 The left and right measurement step S20 position alignment step
C:\2D-CODE\91-10\91117654.ptd 第 25 頁 559584 圖式簡單說明 圖1為顯示適用本發明之機器手之位置對準裝置的一例 實施形態的概略構成圖。 圖2顯示同一位置對準裝置，為從圖1之狀態進一步使機 器手進入的狀態的概略構成圖。 圖3顯示同一位置對準裝置，為使機器手的傾斜角與工 件的傾斜角一致的狀態的概略構成圖。 圖4顯示同一位置對準裝置，為進行左右方向的位置對 準的狀態的概略構成圖。 ’ 圖5顯示同一位置對準裝置，為進行前後方向的位置對 準的狀態的概略構成圖。 圖6為顯示適用本發明之機器手之位置對準方法的一例 實施形態的流程圖。 圖7為顯示適用本發明之機器手之位置對準方法的又一 例實施形態的流程圖。 圖8為顯示適用本發明之機器手之位置對準裝置的又一 例實施形態的概略構成圖。 圖9為顯示適用本發明之機器手之位置對準裝置的再一 例實施形態的概略構成圖。 圖1 0為顯示同一位置對準裝置的側視圖。 圖1 1為顯示適用本發明之機器手之位置對準方法的再一 例實施形態的流程圖。 圖1 2顯示本發明之機器手之位置對準裝置，為從圖9的 狀態使機器手進一步進入的狀態的概略構成圖。 圖1 3顯示同一位置對準裝置，為使機器手·的傾斜角與工C: \ 2D-CODE \ 91-10 \ 91117654.ptd Page 25 559584 Brief description of the drawings Fig. 1 is a schematic configuration diagram showing an example of an embodiment of a position alignment device for a robot to which the present invention is applied. Fig. 2 is a schematic configuration diagram showing a state where the hand alignment device is further moved from the state of Fig. 1 to the same position alignment device. Fig. 3 is a schematic configuration diagram showing a state where the inclination angle of the robot and the inclination angle of the workpiece are aligned with the same position alignment device. Fig. 4 is a schematic configuration diagram showing a state in which the same position alignment device performs position alignment in the left-right direction. Fig. 5 is a schematic configuration diagram showing a state in which the same position alignment device performs position alignment in the front-rear direction. Fig. 6 is a flowchart showing an embodiment of a position alignment method of a robot hand to which the present invention is applied. Fig. 7 is a flowchart showing still another embodiment of a method for aligning the position of a robot hand to which the present invention is applied. Fig. 8 is a schematic configuration diagram showing another embodiment of a position alignment device for a robot hand to which the present invention is applied. Fig. 9 is a schematic configuration diagram showing still another embodiment of a position alignment device for a robot hand to which the present invention is applied. FIG. 10 is a side view showing the same position alignment device. Fig. 11 is a flowchart showing still another embodiment of a method for aligning the position of a robot hand to which the present invention is applied. Fig. 12 shows a schematic configuration diagram of the robot hand positioner according to the present invention in a state where the robot hand is further advanced from the state shown in Fig. 9. Figure 13 shows the same position alignment device.
C:\2D-CODE\91-10\911]765^.ptd 第26頁 559584 圖式簡單說明 件的傾斜角一致的狀態的概略構成圖。 圖14顯示同一位置對準裝置，為使機器手的傾斜角相對 於臂柱部垂直的狀態的概略構成圖。 圖1 5顯示同一位置對準裝置，為進行左右方向的位置對 準的狀態的概略構成圖。C: \ 2D-CODE \ 91-10 \ 911] 765 ^ .ptd P.26 559584 Brief description of the diagram The schematic diagram of the state where the inclination angles of the parts are the same. Fig. 14 is a schematic configuration diagram showing a state where the inclination angle of the robot hand is perpendicular to the arm post portion of the same position alignment device. Fig. 15 shows a schematic configuration diagram of a state in which the same position alignment device is performing position alignment in the left-right direction.
C: \2D-CODE\91 -10\911176-54.ptd 第27頁C: \ 2D-CODE \ 91 -10 \ 911176-54.ptd page 27
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| JP2002177148A JP3955499B2 (en) | 2001-08-07 | 2002-06-18 | Hand positioning method and apparatus |
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| TW559584B true TW559584B (en) | 2003-11-01 |
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| JP (1) | JP3955499B2 (en) |
| KR (1) | KR100503013B1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09162257A (en) * | 1995-12-05 | 1997-06-20 | Metsukusu:Kk | Thin-type substrate transfer device |
| JPH10277986A (en) * | 1997-04-01 | 1998-10-20 | Mecs:Kk | Alignment device for thin type substrate |
| JPH10335420A (en) * | 1997-06-04 | 1998-12-18 | Mecs:Kk | Work aligning apparatus |
| JP2000040735A (en) * | 1998-07-24 | 2000-02-08 | Mecs Corp | Substrate transfer device |
| JP2000071187A (en) * | 1998-08-27 | 2000-03-07 | Komatsu Ltd | Workpiece carrying robot |
| JP2001144165A (en) * | 1999-11-16 | 2001-05-25 | Assist Japan Kk | Noncontact alignment system for glass substrate |
-
2002
- 2002-06-18 JP JP2002177148A patent/JP3955499B2/en not_active Expired - Lifetime
- 2002-07-29 KR KR10-2002-0044554A patent/KR100503013B1/en active IP Right Grant
- 2002-08-06 TW TW091117654A patent/TW559584B/en not_active IP Right Cessation
- 2002-08-06 CN CNB021298092A patent/CN1283427C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI382903B (en) * | 2007-11-23 | 2013-01-21 | Hon Hai Prec Ind Co Ltd | Mechanical hand |
| TWI644389B (en) * | 2016-09-20 | 2018-12-11 | 圓益Ｉｐｓ股份有限公司 | Substrate transfer apparatus and control method thereof |
| TWI717860B (en) * | 2018-10-28 | 2021-02-01 | 台灣積體電路製造股份有限公司 | Annealing apparatus and method thereof |
| US11587807B2 (en) | 2018-10-28 | 2023-02-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Annealing apparatus and method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100503013B1 (en) | 2005-07-25 |
| JP2003117862A (en) | 2003-04-23 |
| CN1283427C (en) | 2006-11-08 |
| CN1401461A (en) | 2003-03-12 |
| KR20030013250A (en) | 2003-02-14 |
| JP3955499B2 (en) | 2007-08-08 |
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