CN1283427C - Machine hand location method and device - Google Patents
Machine hand location method and device Download PDFInfo
- Publication number
- CN1283427C CN1283427C CNB021298092A CN02129809A CN1283427C CN 1283427 C CN1283427 C CN 1283427C CN B021298092 A CNB021298092 A CN B021298092A CN 02129809 A CN02129809 A CN 02129809A CN 1283427 C CN1283427 C CN 1283427C
- Authority
- CN
- China
- Prior art keywords
- workpiece
- mechanical hand
- sensor
- edge
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title abstract description 37
- 238000004904 shortening Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 20
- 239000000758 substrate Substances 0.000 description 20
- 230000004807 localization Effects 0.000 description 15
- 238000010276 construction Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 11
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 241000150100 Margo Species 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
Abstract
The objective is to provide a hand position adjusting method and device capable of narrowing the requisite space, shortening the duct time, and lessening error factors. The solution of the present invention is that a position adjusting device for a hand 1 of a robot movable to the front and rear and to the left and right and also capable of revolving is to adjust the hand position by intruding the hand 1 to over or under a work 2 from the front or rear and is furnished with a pair of first sensors 3 installed on the hand 1 in line on the left and line and a second sensor 4 installed on the side of the hand 1, and when the hand 1 is intruding, the first sensors 3 sense the front edge 2a and rear edge 2b of the work 1 to determine the inclining angle theta in the left-right direction of the work 2 on the basis of the difference in the coordinates of the robot, and the front edge 2a or rear edge 2b of the work 2 is sensed on the basis of the result from sensing by the first sensors 3 while the side edge 2c of the work 2 is sensed on the basis of the result from sensing by the second sensor 4.
Description
Technical field
The present invention relates to the positioner of mechanical hand.
Background technology
In semi-conductive production line etc., adopt arm robot will be accommodated in glass substrate conveyance in the box body sometimes to next operation place.Arm robot rises this mechanical hand as the crow flies after making mechanical hand enter the following side space of the glass substrate in the box body and is adsorbed on the glass substrate.Then, corresponding each piece glass substrate is pulled out mechanical hand in box body, and conveyance is to the delivery position in next operation place.
Glass substrate takes place sometimes be accommodated in the phenomenon that departs from regular position in box body, the deviation of this position of arm robot revisal on one side is Yi Bian conveyance correctly is to the delivery position in next operation place.
On mechanical hand, be provided with the front and back position sensor of the end edge (ora terminalis of front side) that detects glass substrate.By detecting, obtain the position deviation amount Δ X of the fore-and-aft direction of glass substrate by the end edge of front and back position sensor to glass substrate.Again, about mechanical hand, be respectively equipped with 1 front and back position sensor, about front and back position sensor root a tree name time difference of detecting the end edge of glass substrate obtain the tiltangle of the left and right directions of glass substrate.
Near arm robot, be provided with the left and right sides position sensor of the lateral margin that detects glass substrate again.When arm robot with glass substrate in box body after straight the pulling out, left and right sides position sensor laterally moves, until the lateral margin that detects glass substrate.Then, the displacement of left and right sides position sensor root a tree name arm robot before detecting the lateral margin of glass substrate is obtained the position deviation amount Δ Y of the left and right directions of glass substrate.
And arm robot carries out revisal to position deviation amount Δ X, Δ Y and the tiltangle of obtaining on one side, on one side the conveyance glass substrate, correctly to be placed on the delivery position in next operation place.
Yet, because of left and right sides position sensor and arm robot are provided with respectively, required space is increased, cause device to maximize.Usually, glass substrate is handled in clean room, because of installing all maximizations big clean room must be arranged.The required cost of the per unit area of the clean room cost more required than the per unit area at common workshop is much higher, and the maximization of device causes the increase of manufacturing cost.
Again, directly conveyance is to next operation place for the glass substrate of pulling out from box body, and the direction of position sensor moves in case need to the left and right, will prolong the productive temp time of this part, and productivity is worsened.
And, in order to obtain departure Δ Y, be actually arm robot is laterally moved, obtain position deviation amount Δ Y by measuring this amount of movement, thereby might comprise error in the numerical value of offset residual quantity Δ Y on the throne itself, the positioning accuracy of glass substrate is worsened.
Summary of the invention
The object of the present invention is to provide a kind ofly reduce that requisite space is set, can shorten the productive temp time, the localization method and the device thereof of mechanical hand that source of error is few.
For achieving the above object, the positioner of mechanical hand of the present invention be a kind of mechanical hand that makes removable and rotatable robot all around from fore-and-aft direction enter workpiece above or below the positioner of the mechanical hand that positions, wherein, the arm that described mechanical hand is installed becomes 2 groups of ground, is bearing in movably on the arm column sections at above-below direction, described arm column sections is provided with the edge sensor that is made of line sensor, at described 2 groups of mechanical hands, the left and right directions position that is adsorbed on the described workpiece on the described mechanical hand is detected by a line sensor.
Therefore, owing to utilize edge sensor that the left and right directions position of workpiece is detected, the occasion that left and right sides position sensor branch is arranged is compared, can be made all miniaturizations of device with the sort of arm robot in the past.Thereby dwindled the area of required clean room, can reduce manufacturing cost.
Again, needn't resemble and the workpiece of pulling out from box body be moved to be arranged on other locational left and right sides position sensor, because edge sensor carries out above-below direction with arm and moves, therefore can shorten the productive temp time again, improve productivity.
And, because of edge sensor is arranged on the arm column sections, so the movable part between workpiece and the edge sensor has only mechanical hand and arm.Thus, and existed the occasion of arm robot and pallet to compare the movable part that can dwindle widely between workpiece and the sensor between workpiece and the left and right sides position sensor, so can reduce evaluated error in the past.
Again, because edge sensor is a line sensor, so extensively correctly detect to scope the edge of workpiece.
Adopt the positioner of technique scheme mechanical hand, the left and right directions position of workpiece is detected, can make all miniaturizations of device so compare with the sort of occasion that left and right sides position sensor and arm robot branch are arranged in the past because of utilizing edge sensor.Thereby dwindled the area of required clean room, can reduce manufacturing cost.Again, owing to will move to from the workpiece that box body is pulled out needn't resembling in the past and be arranged on other locational left and right sides position sensor of arm robot, because edge sensor carries out above-below direction with arm and moves, therefore can shorten the productive temp time again, improve productivity.And because of edge sensor is arranged on the arm column sections, so the movable part between workpiece and the edge sensor has only mechanical hand and arm.With compared the movable part that can dwindle widely between workpiece and the sensor in the occasion that exists arm robot and pallet between workpiece and the left and right sides position sensor in the past, so can reduce evaluated error.
Description of drawings
Fig. 1 is the summary construction diagram of example one example of the positioner of the suitable mechanical hand of the present invention of expression.
Fig. 2 represents same positioner, is the summary construction diagram that the state from Fig. 1 further makes mechanical hand get the hang of.
Fig. 3 represents same positioner, is the summary construction diagram that makes the inclination angle of the mechanical hand state consistent with the inclination angle of workpiece.
Fig. 4 represents same positioner, is the summary construction diagram that has carried out the state of left and right directions location.
Fig. 5 represents same positioner, is the summary construction diagram that has carried out the state of fore-and-aft direction location.
Fig. 6 is the flow chart of example one example of the localization method of the suitable mechanical hand of the present invention of expression.
Fig. 7 is the flow chart of another example of the localization method of the suitable mechanical hand of the present invention of expression.
Fig. 8 is the summary construction diagram of another example of the positioner of the suitable mechanical hand of the present invention of expression.
Fig. 9 is the summary construction diagram of the another example of the positioner of the suitable mechanical hand of the present invention of expression.
Figure 10 is the side view of the same positioner of expression.
Figure 11 is the flow chart of the another example of the localization method of the suitable mechanical hand of the present invention of expression.
Figure 12 represents the positioner of mechanical hand of the present invention, is the summary construction diagram that state from Fig. 9 further makes the state that mechanical hand enters.
Figure 13 represents same positioner, is the summary construction diagram that makes the inclination angle of the mechanical hand state consistent with the inclination angle of workpiece.
Figure 14 represents same positioner, is the summary construction diagram that makes the inclination angle of the mechanical hand state vertical with respect to column sections.
Figure 15 represents same positioner, is the summary construction diagram that has carried out the state of left and right directions location.
The specific embodiment
Below, root a tree name optimal morphology shown in the drawings describes structure of the present invention in detail.
Fig. 1 to Fig. 5 represents example one example of the positioner of suitable mechanical hand of the present invention.The positioner of this mechanical hand (being called positioner to place an order) be a kind of mechanical hand 1 that makes removable and rotatable robot all around from fore-and-aft direction enter workpiece 2 above or below the device that positions, have along left and right directions and be set up in parallel a pair of the 1st sensor 3 on mechanical hand 1 and be arranged on the 2nd sensor 4 of the sidepiece of mechanical hand 1, when mechanical hand 1 enters, the difference of the coordinate of the front-end edge 2a of 3 a tree names detections of a pair of the 1st sensor workpiece 2 or the robot of end edge 2b is obtained the tiltangle of the left and right directions of workpiece 2, the front-end edge 2a or the end edge 2b of 3 pairs of workpiece 2 of a pair of the 1st sensor of root a tree name detect, and the lateral margin of 4 pairs of workpiece 2 of root a tree name the 2nd sensor detects.In addition, represent fore-and-aft direction with arrow A among the figure, represent left and right directions with arrow B.
The arm robot 5 that mechanical hand 1 is installed oppositely turns round mutually by the 1st arm 6 and the 2nd arm 7 and makes mechanical hand 1 carry out fore-and-aft direction to move.Again, arm robot 5 is uploaded at pallet 8 and is set to along left and right directions removablely, and carries out move left and right by the mobile mechanical hand 1 that makes of left and right directions.And arm robot 5 moves up and down by the installation site that makes the 1st arm 6 mechanical hand 1 is moved up and down.The controller that arm robot 5 is made of computer (not shown) is controlled.
The 1st sensor 3 is used to detect the front-end edge 2a or the end edge 2b of workpiece 2, for example towards the top and be arranged on the position of mechanical hand 1 and front-end edge 2a workpiece 2 or end edge 2b subtend.In this example, the end edge 2b of 3 pairs of workpiece 2 of reason the 1st sensor detects, so the 1st sensor 3 is set at the foundation part of fork 1a, 1b about the position corresponding with the end edge 2b of workpiece 2 is.
The 1st sensor 3 for example is a kind of sensor that the end edge 2b of workpiece 2 is carried out optical detection.The 1st sensor 3 for example has luminous upward illuminating part, accept to send and by the light accepting part of the light of workpiece 2 reflections from illuminating part.Owing to having or not of light income root a tree name workpiece 2 of light accepting part changes, therefore, promptly to have or not the border of workpiece 2 be that the edge detects but whether this light income of root a tree name to being intended for workpiece 2.
The 2nd sensor 4 is used to detect the lateral margin of workpiece 2, for example towards the top be arranged on mechanical hand 1, with the position of the lateral margin subtend of workpiece 2 on.In this example, the left border 2c of 4 pairs of workpiece 2 of reason the 2nd sensor detects, so the 2nd sensor 4 is arranged on the position corresponding with the left border 2c of workpiece 2, for example is arranged on the protuberance 2e that is formed at left side fork 1a.
The 2nd sensor 4 for example is a kind of sensor that the left border 2c of workpiece 2 is carried out optical detection.The 2nd sensor 4 for example has luminous upward illuminating part, accept to send and by the light accepting part of the light of workpiece 2 reflections from illuminating part.Because having or not of light income root a tree name workpiece 2 of light accepting part changes, but therefore this light income of root a tree name promptly to have or not the border of workpiece 2 be that the edge detects to whether being intended for workpiece 2.
The following describes the localization method (being designated hereinafter simply as localization method) of mechanical hand 1.Fig. 6 represents to be suitable for localization method of the present invention.This localization method be a kind of mechanical hand 1 that makes robot from fore-and-aft direction enter workpiece 2 above or below the method that positions, mechanical hand 1 has a pair of the 1st sensor 3 that is set up in parallel along left and right directions and is arranged on the 2nd sensor 4 of sidepiece, and comprises: make mechanical hand 1 from fore-and-aft direction enter workpiece 2 above or below mechanical hand enter operation (S11); When mechanical hand 1 enters, 3 a tree names of a pair of the 1st sensor difference of coordinate of detecting the robot of the front-end edge 2a of workpiece 2 or end edge 2b inclination angle of tiltangle of obtaining the left and right directions of workpiece 2 calculates operation (S12); Above or below workpiece 2, make mechanical hand 1 tilt into the inclination angle alignment process (S13) of tiltangle at left and right directions; Make mechanical hand 1 make described mechanical hand be inclined under the state of tiltangle the 1st left and right sides positioning process (S14) that direction to the left and right moved, detected until the 2nd sensor 4 lateral margin of workpiece along left and right directions; And make mechanical hand 1 move, detect the front-end edge of workpiece or the 1st front and back positioning process (S15) of end edge making mechanical hand 1 be inclined to the direction that tilts from fore-and-aft direction along tiltangle under the state of tiltangle along left and right directions until described a pair of the 1st sensor 3.
Enter in the operation (S11) at mechanical hand, make before the mechanical hand 1 and then enter into the below (Fig. 1) of workpiece 2.At this moment, in a single day workpiece 2 is tilted to the left into tiltangle, is then at first detected by the end edge 2b of 3 pairs of workpiece 2 of the 1st sensor in left side.The controller of arm robot 5 is grasped the coordinate of the position at that time of mechanical hand 1 all the time.The location coordinate of the mechanical hand 1 of the moment of the end edge 2b of the 1st sensor 3 detection workpiece 2 in controller root a tree name left side is calculated the distance X 1 of center O 1 to the fore-and-aft direction of the 1st sensor 3 in left side of reversing from the 1st arm 6.
Then, if mechanical hand 1 moves on, then the end edge 2b of 3 pairs of workpiece 2 of the 1st sensor on right side detects (Fig. 2).The 1st sensor 3 on controller root a tree name right side detects the location coordinate of mechanical hand 1 of moment of the end edge 2b of workpiece 2, calculates the distance X 2 from the fore-and-aft direction of center O 1 till the 1st sensor 3 on right side that reverse of the 1st arm 6.
Calculate the tiltangle of obtaining the left and right directions of workpiece 2 in the operation (S12) at the inclination angle.As with about the interval of the 1st sensor 3 as L1, tiltangle=tan then
-1((X2-X1/L1)).Controller is obtained tiltangle after calculating according to this formula.
In inclination angle alignment process (S13), at first obtain the distance Y 1 that arm robot 5 is moved along left and right directions.With the center of the position of getting the raw materials ready of workpiece 2 promptly, from the distance of the center O 1 of reversing of the center O that the position is set 2 to the 1st arms 6 of the box body of taking in workpiece 2 during as L2, the displacement of left and right directions is Y1=L2 * tan θ.After calculating according to this formula, controller obtains the displacement of left and right directions.And, in case make arm robot 5 in right-hand displacement Y1, make arm robot 5 to left rotation tiltangle, then mechanical hand 1 is that the center just is inclined to tiltangle left with the center O 2 that box body is provided with the position, makes the inclination consistent with the inclination of mechanical hand 1 (Fig. 3) of workpiece 2.
In the 1st left and right sides positioning process (S14), arm robot 5 is moved to the left, and the 2nd sensor 4 stops on the position of the left border 2c that detects workpiece 2 (Fig. 4).Can adjust the position relation of the left and right directions of workpiece 2 and mechanical hand 1 thus.
In the 1st front and back positioning process (S15), mechanical hand 1 is promptly retreating along the lateral margin 2c of workpiece 2, the direction of 2d to the direction that is inclined to tiltangle from fore-and-aft direction, and a pair of the 1st sensor 3 stops on the position of the end edge 2b that detects workpiece 2 (Fig. 5).Can adjust the position relation of the fore-and-aft direction of workpiece 2 and mechanical hand 1 thus.
That is, the tiltangle of mechanical hand 1, all around the position conforms to workpiece 2.Thereafter, mechanical hand 1 rises, and workpiece 2 is held.Like this, owing to after mechanical hand 1 positions with respect to workpiece 2 workpiece 2 is held, therefore, even for example workpiece 2 residing positions more or less are offset with respect to box body, mechanical hand 1 also is correct with the position relation of workpiece 2, and arm robot 5 can be with the delivery position of workpiece 2 conveyance correctly to next operation place.
In addition, above-mentioned form is an example of suitable form of the present invention, but is not limited to this, can carry out various distortion and implement in the scope that does not break away from aim of the present invention.
For example, the localization method of Fig. 6 is a kind ofly to make the mechanical hand 1 direction form that moves, in the 1st front and back positioning process (S15) mechanical hand 1 moved to the direction that is inclined to tiltangle from fore-and-aft direction then to the left and right in the 1st left and right sides positioning process (S14), but is not limited thereto.For example, also can in the 2nd front and back positioning process (S16), make mechanical hand 1 forwards, backwards direction move, in the 2nd left and right sides positioning process (S17), make then mechanical hand 1 promptly the lateral margin 2c along about the workpiece 2, the direction of 2d move to the direction that is inclined to tiltangle from left and right directions.
Promptly, it be a kind of mechanical hand 1 that makes robot from fore-and-aft direction enter workpiece 2 above or below the localization method of the mechanical hand 1 that positions, mechanical hand 1 has a pair of the 1st sensor 3 that is set up in parallel along left and right directions and the 2nd sensor 4 that is arranged on sidepiece, comprising: make mechanical hand 1 from fore-and-aft direction enter workpiece 2 above or below mechanical hand enter operation (S11); When mechanical hand 1 enters, 3 a tree names of a pair of the 1st sensor difference of coordinate of detecting the robot of the front-end edge 2a of workpiece 2 or end edge 2b inclination angle of tiltangle of obtaining the left and right directions of workpiece 2 calculates operation (S12); Above or below workpiece 2, make mechanical hand 1 tilt into the inclination angle alignment process (S13) of tiltangle at left and right directions; Make mechanical hand 1 mechanical hand 1 be moved at the state lower edge fore-and-aft direction that left and right directions tilts into tiltangle, detecting the front-end edge 2a of workpiece 2 or the 2nd front and back positioning process (S16) of end edge 2b until a pair of the 1st sensor 3; And make mechanical hand 1 make mechanical hand 1 tilt at left and right directions under the state of tiltangle from left and right directions to the direction that is inclined to tiltangle move, until 2nd left and right sides positioning process (S17) of the 2nd sensor 4 at the lateral margin that detects workpiece 2.
This localization method also localization method with Fig. 1 is identical, can make the tiltangle of mechanical hand 1, the position accords with workpiece 2 all around.Therefore, even for example workpiece 2 residing positions more or less are offset with respect to box body, mechanical hand 1 also is correct with the position relation of workpiece 2, and arm robot 5 can be with the delivery position of workpiece 2 conveyance correctly to next operation place.
Again, above-mentioned explanation is the end edge 2b that is detected workpiece 2 by a pair of the 1st sensor 3, but also can be detected the front-end edge 2a of workpiece 2 by a pair of the 1st sensor 3.
Again, above-mentioned explanation is the left border 2c that is detected workpiece 2 by the 2nd sensor 4, but also can be detected the margo dexter 2d of workpiece 2 by the 2nd sensor 4.
And above-mentioned explanation is the 2nd sensor 4 that a pair of the 1st sensor 3 of the end edge 2b that detects workpiece 2 is installed on mechanical hand 1 and detects the left border 2c of workpiece 2, but also can increase the quantity of the sensor of installation.For example, as shown in Figure 8, also can and detect on the basis of the 2nd sensor 4 of left border 2c of workpiece 2, the 1st sensor 3 of the front-end edge 2a that detects workpiece 2 is set again and detect the 2nd sensor 4 of the margo dexter 2d of workpiece 2 at a pair of the 1st sensor 3 of the end edge 2b that detects workpiece 2.
Can improve the positioning accuracy of mechanical hand 1 by the quantity that increases sensor.Even in the bigger occasion of the dimensional tolerance of workpiece 2, also can handle in the center of workpiece 2 again.
Again, above-mentioned explanation is the edge 2a～2d that is detected workpiece 2 by sensor 3,4, under the state that the position of sensor 3,4 is consistent with the edge 2a～2d of workpiece 2, workpiece 2 held and to handle, but need not to make the position of sensor 3,4 consistent with the edge 2a～2d of workpiece 2.For example, also the position of sensor 3,4 can be positioned with the edge 2a～2d of workpiece 2 for the inboard of the size of setovering surely.
In addition, above-mentioned example is that 1 the 2nd sensor 4 is installed on mechanical hand 1 at least, but be not limited to this, also the 2nd sensor 4 can be set on mechanical hand 1, but as shown in Figure 9, supporting the arm 6 that mechanical hand 1 is installed movably along the vertical direction, 7 arm column sections 18 is provided with edge sensor 19, left and right directions position by the workpiece 2 of 19 pairs of suctions of this edge sensor on mechanical hand 1 is detected, in this occasion, because of detecting the left and right directions position that utilizes 19 pairs of workpiece 2 of edge sensor, can make whole equipment miniaturization so compare with traditional occasion that left and right sides position sensor and arm robot 5 are provided with respectively.So can reduce the area of essential clean room, can reduce manufacturing cost.
Again, in this occasion, do not need to resemble living, will move to from the workpiece 2 that box body is pulled out be arranged on arm robot 5 diverse locations on left and right sides position sensor, again since edge sensor 19 carry out above-below direction with arm 6,7 and move, so can shorten the productive temp time, improve productivity.
And, because of edge sensor 19 is arranged on the arm column sections 18, so the movable part between workpiece 2 and the edge sensor 19 has only mechanical hand 1 and arm 6,7.Thus, can prop up the movable part that shortens between workpiece 2 and the edge sensor 19 greatly with comparing in the occasion that exists arm robot 5 and pallet 8 between workpiece 2 and the left and right sides position sensor in the past, so can reduce evaluated error.
At this, mechanical hand 1 has a pair of the 1st sensor 3,3 that left and right directions is set up in parallel, and, when mechanical hand 1 enters, the front-end edge 2a or the end edge 2b of 3 pairs of workpiece 2 of a pair of the 1st sensor detect, and obtain the tiltangle of the left and right directions of workpiece 2 in view of the above.So can make mechanical hand 1 consistent with the direction of workpiece 2.
And edge sensor 19 is line sensors.Thus, extensively the correct edge that detects workpiece 2, scope ground is left border 2c or margo dexter 2d.
Again, edge sensor 19 has illuminating part and light accepting part, and its optical axis is arranged to be skewed form with respect to workpiece 2 as shown in figure 10.Thus, the light that can restrain to come self-luminescent part returns the reason of the malfunction of original direction etc. after by workpiece 2 reflections.Again, the symbol among Figure 10 1 ', 6 ', 7 ' is respectively the occasion that expression is provided with the 2nd mechanical hand and arm.
And, as shown in Figure 9, edge sensor 19 be arranged on arm 6,7 the opposite side of bending direction.So arm 6,7 can not collide with edge sensor 19, can not hinder operability.
The following describes the localization method of the mechanical hand 1 in this example.This localization method be a kind of mechanical hand 1 that makes robot from fore-and-aft direction enter workpiece 2 above or below, in the method for workpiece 2 being carried out when keeping arm takes out workpiece 2 is positioned.And this localization method comprises as shown in figure 11: make mechanical hand 1 from fore-and-aft direction enter workpiece 2 above or below mechanical hand enter operation (S11); When mechanical hand 1 enters, 3,3 a tree names of a pair of front and back sensor difference of coordinate of detecting the robot of the front-end edge 2a of workpiece 2 or end edge 2b inclination angle of tiltangle of obtaining the left and right directions of workpiece 2 calculates operation (S12); Above or below workpiece 2, make mechanical hand 1 tilt into the inclination angle alignment process (S13) of tiltangle at left and right directions; The taking-up operation (S18) that makes mechanical hand 1 tilt into tiltangle and workpiece 2 be kept and take out at the upright some place that front and back position sensor 3,3 is connected at left and right directions; By edge 2c, the 2d of 19 pairs of workpiece 2 of edge sensor measure about measure operation (S19); And the departure about revisal and make workpiece 2 be positioned at the demonstration position positioning process (S20).
To calculate operation (S12) and Fig. 6 identical with structure shown in Figure 7 because of mechanical hand enters operation (S11) and inclination angle, the explanation that the Therefore, omited is detailed.The position (state shown in Figure 19) of the arm column sections 18 when in addition, being in beeline with the center of reversing 01 of the center that the position is set 02 of the box body of taking in workpiece 2 and the 1st arm 6 is as the imaginary original position of arm robot 5.
In inclination angle alignment process (S13), at first obtain the distance Y 2 that the left and right directions of arm robot 5 moves.Can obtain the center O 3 of the fore-and-aft direction of workpiece 2 thus.If with from center O 3 to the 1st arms 6 of the fore-and-aft direction of workpiece 2 and the distance between the center O 1 of reversing as L3, then L3 can be calculated by formula 1.
[formula 1]
L3＝X1+tanθ×(L1/2)×cosθ×(b/2)
And the displacement of left and right directions is Y2=L3 * tan θ.Controller is obtained the displacement Y2 of left and right directions by calculating this formula.And, as shown in figure 13, if arm robot 5 is moved right in the distance Y 2 arm robot 5 to the anticlockwise tiltangle, then mechanical hand 1 is the center angled θ that is tilted to the left with the center 03 of workpiece 2, thereby makes the inclination of mechanical hand 1 consistent with the inclination of workpiece 2.
In taking out operation (S18), as shown in figure 13, when making mechanical hand 1 direction is inclined to tiltangle to the left and right, arm robot 5 is moved Y2, at the upright some place that front and back position sensor 3,3 is connected workpiece 2 is kept and take out.Then, as shown in figure 14, when making arm robot 5 return Y2, mechanical hand 1 recovers tiltangle.Can make arm robot 5 be in imaginary original position thus.
About measure in the operation (S19), as shown in figure 15, measure by the edge 2c of 19 pairs of workpiece 2 of edge sensor.Then, in positioning process (S20), to about departure carry out revisal, make workpiece 2 be positioned at the demonstration position.
As mentioned above, adopt this example, so make workpiece 2 keep straight with respect to mechanical hand 1 because of sensor 3,3 before and after on mechanical hand 1, being equipped with.Thus, when workpiece 2 is extracted from accumulator, can prevent to break because of wrong the causing of the angle of workpiece 2.
Again, above-mentioned example is a sensor 3,3 before and after being equipped with on mechanical hand 1, but is not limited to this, also can not even do not carry.In this occasion, only decide the position of workpiece 2 by edge sensor 19.When promptly workpiece 2 being kept is to keep under situation about not measuring.And, can utilize after the maintenance 19 pairs of workpiece 2 of edge sensor about lateral margin 2c, 2d and at least 3 positions among front and back ora terminalis 2a, the 2b measure, measure the position of workpiece 2, and carry regular position at next device with respect to arm robot 5.
And, though above-mentioned example only is provided with 1 edge sensor 19, being not limited to this, also can be provided with more than 2.For example, also 1 edge sensor 19 can be set respectively about arm robot 5, simultaneously lateral margin 2c, 2d about workpiece 2 be carried out instrumentation.In this occasion, can wait the tiltangle that detects workpiece 2 and give revisal by mechanical hand 1 is seesawed.
Claims (1)
- A mechanical hand that makes removable and rotatable robot all around from fore-and-aft direction enter workpiece above or below the positioner of the mechanical hand that positions, it is characterized in that, the arm that described mechanical hand is installed becomes 2 groups of ground, is bearing in movably on the arm column sections at above-below direction, described arm column sections is provided with the edge sensor that is made of line sensor, at described 2 groups of mechanical hands, the left and right directions position that is adsorbed on the described workpiece on the described mechanical hand is detected by a line sensor.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001239166 | 2001-08-07 | ||
| JP2001239166 | 2001-08-07 | ||
| JP2002177148A JP3955499B2 (en) | 2001-08-07 | 2002-06-18 | Hand positioning method and apparatus |
| JP2002177148 | 2002-06-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1401461A CN1401461A (en) | 2003-03-12 |
| CN1283427C true CN1283427C (en) | 2006-11-08 |
Family
ID=26620097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021298092A Expired - Fee Related CN1283427C (en) | 2001-08-07 | 2002-08-06 | Machine hand location method and device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3955499B2 (en) |
| KR (1) | KR100503013B1 (en) |
| CN (1) | CN1283427C (en) |
| TW (1) | TW559584B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105417066A (en) * | 2015-11-09 | 2016-03-23 | 合肥欣奕华智能机器有限公司 | Base plate position deviation detecting and correcting device and base plate transferring system |
| CN106956290A (en) * | 2017-04-17 | 2017-07-18 | 京东方科技集团股份有限公司 | Mechanical arm and its operating method, robot arm device and display panel production equipment |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100716301B1 (en) | 2006-02-06 | 2007-05-09 | 삼성전자주식회사 | Panel carrier robot |
| JP4688739B2 (en) * | 2006-05-02 | 2011-05-25 | 株式会社ソニー・コンピュータエンタテインメント | Information display device |
| KR101239821B1 (en) * | 2006-06-30 | 2013-03-06 | 엘지디스플레이 주식회사 | robot for transporting substrate and alignment method of the same |
| TWI382903B (en) * | 2007-11-23 | 2013-01-21 | Hon Hai Prec Ind Co Ltd | Mechanical hand |
| JP5491731B2 (en) * | 2008-12-25 | 2014-05-14 | 川崎重工業株式会社 | Robot and calibration method of straight start position of robot teaching position |
| CN101491403B (en) * | 2009-02-18 | 2011-06-15 | 苏州艾隆科技有限公司 | Quick counting method of automatic pharmacy |
| JP4837116B2 (en) * | 2010-03-05 | 2011-12-14 | ファナック株式会社 | Robot system with visual sensor |
| KR101452650B1 (en) * | 2010-07-14 | 2014-10-22 | 니혼 덴산 산쿄 가부시키가이샤 | Industrial robot, method for controlling industrial robot, and method for teaching industrial robot |
| JP5578973B2 (en) * | 2010-07-16 | 2014-08-27 | 日本電産サンキョー株式会社 | Industrial robot |
| JP5665417B2 (en) * | 2010-08-20 | 2015-02-04 | 日本電産サンキョー株式会社 | Industrial robot |
| US8768513B2 (en) * | 2011-08-08 | 2014-07-01 | Applied Materials, Inc. | Systems having multi-linkage robots and methods to correct positional and rotational alignment in multi-linkage robots |
| KR101337563B1 (en) * | 2012-03-30 | 2013-12-06 | 한국생산기술연구원 | Transferring Apparatus for Adjusting Position of Manipulator Using Sensor Unit |
| JP2014008578A (en) * | 2012-06-29 | 2014-01-20 | Daihen Corp | Substrate carrying device |
| JP6035063B2 (en) * | 2012-06-29 | 2016-11-30 | 株式会社ダイヘン | Substrate transfer device |
| CN103552083A (en) * | 2013-10-30 | 2014-02-05 | 上海华力微电子有限公司 | Method for adjusting position of mechanical arm |
| JP6499826B2 (en) * | 2014-01-29 | 2019-04-10 | 日本電産サンキョー株式会社 | Industrial robot |
| CN105590878B (en) * | 2014-10-23 | 2019-02-19 | 北京北方华创微电子装备有限公司 | A kind of manipulator offset monitoring system |
| CN105329642B (en) * | 2015-11-09 | 2017-11-21 | 合肥欣奕华智能机器有限公司 | Substrate position offset detection and bearing calibration and the control method of substrate conveying system |
| KR102066044B1 (en) * | 2016-06-30 | 2020-02-11 | 세메스 주식회사 | Substrate treating apparatus, index robot and substrate transferring method |
| KR102181121B1 (en) * | 2016-09-20 | 2020-11-20 | 주식회사 원익아이피에스 | Substrate transfer apparatus and control method of substrate transfer apparatus |
| CN109877823A (en) * | 2017-12-06 | 2019-06-14 | 沈阳新松机器人自动化股份有限公司 | A kind of pair puts correction tow-armed robot and its method for correcting error |
| CN109877824A (en) * | 2017-12-06 | 2019-06-14 | 沈阳新松机器人自动化股份有限公司 | It is a kind of singly to take correction robot and its method for correcting error |
| CN109877822A (en) * | 2017-12-06 | 2019-06-14 | 沈阳新松机器人自动化股份有限公司 | A kind of pair takes correction tow-armed robot and its method for correcting error |
| US11587807B2 (en) * | 2018-10-28 | 2023-02-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Annealing apparatus and method thereof |
| CN109523580B (en) * | 2018-12-13 | 2021-01-26 | 法兰泰克重工股份有限公司 | Calculation method of image acquisition module, image acquisition module and sorting system |
| JP7219106B2 (en) * | 2019-02-12 | 2023-02-07 | 日本電産サンキョー株式会社 | SUBSTRATE TRANSFER SYSTEM AND METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM |
| JP7303686B2 (en) | 2019-07-26 | 2023-07-05 | ニデックインスツルメンツ株式会社 | Work position detection method for robots |
| JP7443142B2 (en) | 2020-04-10 | 2024-03-05 | ニデックインスツルメンツ株式会社 | Industrial robots and industrial robot control methods |
| JP7443141B2 (en) | 2020-04-10 | 2024-03-05 | ニデックインスツルメンツ株式会社 | Industrial robots and industrial robot control methods |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09162257A (en) * | 1995-12-05 | 1997-06-20 | Metsukusu:Kk | Thin-type substrate transfer device |
| JPH10277986A (en) * | 1997-04-01 | 1998-10-20 | Mecs:Kk | Alignment device for thin type substrate |
| JPH10335420A (en) * | 1997-06-04 | 1998-12-18 | Mecs:Kk | Work aligning apparatus |
| JP2000040735A (en) * | 1998-07-24 | 2000-02-08 | Mecs Corp | Substrate transfer device |
| JP2000071187A (en) * | 1998-08-27 | 2000-03-07 | Komatsu Ltd | Workpiece carrying robot |
| JP2001144165A (en) * | 1999-11-16 | 2001-05-25 | Assist Japan Kk | Noncontact alignment system for glass substrate |
-
2002
- 2002-06-18 JP JP2002177148A patent/JP3955499B2/en not_active Expired - Lifetime
- 2002-07-29 KR KR10-2002-0044554A patent/KR100503013B1/en active IP Right Grant
- 2002-08-06 CN CNB021298092A patent/CN1283427C/en not_active Expired - Fee Related
- 2002-08-06 TW TW091117654A patent/TW559584B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105417066A (en) * | 2015-11-09 | 2016-03-23 | 合肥欣奕华智能机器有限公司 | Base plate position deviation detecting and correcting device and base plate transferring system |
| CN106956290A (en) * | 2017-04-17 | 2017-07-18 | 京东方科技集团股份有限公司 | Mechanical arm and its operating method, robot arm device and display panel production equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003117862A (en) | 2003-04-23 |
| TW559584B (en) | 2003-11-01 |
| JP3955499B2 (en) | 2007-08-08 |
| KR20030013250A (en) | 2003-02-14 |
| KR100503013B1 (en) | 2005-07-25 |
| CN1401461A (en) | 2003-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1283427C (en) | Machine hand location method and device | |
| CN201058765Y (en) | Material pushing device | |
| CN100345273C (en) | Collimator | |
| CN1688235A (en) | Window wiping system | |
| CN1655668A (en) | Method and device for detecting mounting error of electronic device mounting apparatus | |
| CN111958121A (en) | Laser marking machine | |
| CN1309528A (en) | Device and method for installing component | |
| CN1155804C (en) | Height measurer | |
| CN1501770A (en) | Correcting method and apparatus for electronic components mounting apparatus | |
| CN1172248A (en) | Optical gauge | |
| CN1713811A (en) | Electronic component mounting apparatus and electronic component mounting method | |
| CN1768422A (en) | Apparatus and method for picking up semiconductor chip | |
| JP2004146661A (en) | Electronic component mounting apparatus | |
| CN109378293B (en) | High-precision photovoltaic cell string typesetter | |
| CN101045294A (en) | Multi-direction type grab | |
| KR20140129453A (en) | Apparatus for supplying material sequentially | |
| CN201105361Y (en) | Laser cutting device | |
| CN214979071U (en) | Automatic ceramic plate assembling mechanism | |
| CN1772434A (en) | Substrate positioning device | |
| JP2009170536A (en) | Method and system for acquiring height-direction information of electric circuit component | |
| CN112490168A (en) | Device and method for automatically positioning and calibrating wafer center | |
| CN1246130C (en) | Boring device | |
| CN212577814U (en) | Laser marking machine | |
| CN1822761A (en) | Parts mounting device | |
| CN101033942A (en) | Method for automatically checking bottle base |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170323 Address after: No. two Xingping Road, Pinghu Economic Development Zone, Zhejiang, China, No. 888 Patentee after: NIDEC SANKYO (ZHEJIANG) Corp. Patentee after: NIDEC SANKYO Corp. Address before: Nagano Patentee before: NIDEC SANKYO Corp. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20061108 Termination date: 20210806 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |