CN103552083A - Method for adjusting position of mechanical arm - Google Patents
Method for adjusting position of mechanical arm Download PDFInfo
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- CN103552083A CN103552083A CN201310526668.5A CN201310526668A CN103552083A CN 103552083 A CN103552083 A CN 103552083A CN 201310526668 A CN201310526668 A CN 201310526668A CN 103552083 A CN103552083 A CN 103552083A
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Abstract
The invention discloses a method for adjusting the position of a mechanical arm and belongs to the field of integrated circuits. The method relates to the process of storing a wafer by the mechanical arm and comprises the steps of sensing the respective vertical distances from different grippers at the front end of the mechanical arm to a distance measuring sensor as well as from an arm at the rear end of the mechanical arm to the distance measuring sensor by the distance measuring sensor, adjusting the horizontal position of the mechanical arm according to the respective vertical distance differences between the different grippers at the front end of the mechanical arm and the distance measuring sensor sensed by the distance measuring sensor, and adjusting the vertical distance between the mechanical arm and a stored wafer according to the difference between the vertical distance from any gripper at the front end of the mechanical arm to the distance measuring sensor and the vertical distance from the arm at the rear end of the mechanical arm to the distance measuring sensor sensed by the distance measuring sensor. According to the method, the respective vertical distances between the different grippers at the front end of the mechanical arm and the distance measuring sensor as well as between the arm at the rear end of the mechanical arm and the distance measuring sensor are sensed by the distance measuring sensor, so the horizontal position and the vertical distance of the mechanical arm can be objectively and efficiently adjusted.
Description
Technical field
The invention belongs to integrated circuit fields, specifically, relate to a kind of method of adjusting mechanical arm position.
Background technology
Along with the development of semiconductor technology, the silicon chip that the silicon chip of 300mm has replaced 200mm becomes main flow, and each container weight that has loaded silicon chip has become approximately 9 kilograms by original approximately 4 kilograms.Therefore,, if carried between each manufacturing module by means of manpower, can cause efficiency lower, the danger that simultaneously also may cause personnel to be injured.And owing to can effectively improving the production cycle of factory building utilization rate, shortening product, automated material induction system (Automated Material Handling Systems, hereinafter to be referred as: AMHS) with respect to the mass transport of manpower, become the main tie of carrying silicon chip in 300mm silicon chip manufacture process between each manufacturing module.
In prior art, automated material induction system mainly comprises: be placed with memory cell, the mechanical arm of box type container, by this mechanical arm, pick up or unload box type container, thereby make silicon chip automatic transport between each manufacturing module of fabrication region.And pick up or unload box type container at mechanical arm, and how to guarantee the delivering position of mechanical arm, be one of key reason affecting automatic transport efficiency.
In prior art, when confirming the delivering position of mechanical arm, engineer mainly utilizes bubble and scale and ruler to judge.When needs are adjusted mechanical arm level, conventionally bubble and scale is placed on mechanical arm, by naked eyes, judge that the position, left and right of bubble in bubble and scale is proofreaied and correct.But this method depends on engineer's naked eyes, be limited to engineer's subjective experience, there is certain error, objectivity is poor.And in the time need to adjusting the vertical height of mechanical arm, conventionally adopt ruler directly to measure, and measurement process, owing to being subject to the impact of the factors such as operating space, often needs to spend the more time, cannot realize the quick location of mechanical arm, and efficiency is lower.
To sum up, the localization method of mechanical arm in prior art, when the horizontal level of positioning mechanical arm, owing to depending on engineer's subjective experience, objectivity is poor.In addition, during due to upright position at positioning mechanical arm, the operating space in ruler measurement process is limited, and efficiency is lower.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of method and system of positioning mechanical arm, the above-mentioned technical problem existing in order to partly or entirely to overcome, partly or entirely to solve prior art.
In order partly or entirely to overcome, partly or entirely to solve the problems of the technologies described above, the invention provides a kind of method of adjusting mechanical arm position, in the process of mechanical arm storing wafer, it comprises:
Arm by the different handgrip of distance measuring sensor sensing mechanical arm front end, rear end respectively with the vertical range of described distance measuring sensor;
Vertical range according to the different handgrip of the mechanical arm front end of described distance measuring sensor sensing respectively and between described distance measuring sensor is poor, adjusts the horizontal level of mechanical arm;
Poor according to the arbitrary handgrip of mechanical arm front end, the arm of rear end and the vertical range of described distance measuring sensor of described distance measuring sensor sensing, adjust the vertical range that mechanical arm distance is stored wafer.
Preferably, in an embodiment of invention, at the arm by the different handgrip of distance measuring sensor sensing mechanical arm front end, rear end, comprise respectively with before the vertical range of described distance measuring sensor: by described range sensor, record an initial distance, and the adjustment of making zero.
Preferably, in an embodiment of invention, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the installation site of the described distance measuring sensor respectively handgrip different from mechanical arm front end, the arm of rear end forms range of triangle relation.
Preferably, in an embodiment of invention, described distance measuring sensor is arranged on and loads the carrying case upper surface that is stored wafer.
Preferably, in an embodiment of invention, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the different handgrip of described mechanical arm front end is distance measuring sensor described in corresponding a group separately, distance measuring sensor described in the arm correspondence one of described mechanical arm rear end, to form range of triangle relation.
Preferably, in an embodiment of invention, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the corresponding same described distance measuring sensor of arm of the different handgrip of described mechanical arm front end, described mechanical arm rear end, to form three-dimensional range of triangle relation.
In order partly or entirely to overcome, partly or entirely to solve the problems of the technologies described above, the invention provides a kind of wafer storage system, in the process of mechanical arm storing wafer, it comprises: mechanical arm, distance measuring sensor, mechanical arm is for depositing the wafer of carrying case; Distance measuring sensor for the arm of the different handgrip of sensing mechanical arm front end, rear end respectively with the vertical range of described distance measuring sensor; Distance measuring sensor also for according to the different handgrip of the mechanical arm front end of described distance measuring sensor sensing the vertical range respectively and between described distance measuring sensor poor, adjust the horizontal level of mechanical arm; Distance measuring sensor is also poor for the arbitrary handgrip of mechanical arm front end, the arm of rear end and the vertical range of described distance measuring sensor according to described distance measuring sensor sensing, adjusts the vertical range that mechanical arm distance is stored wafer.
Compare with existing scheme, the arm by the different handgrip of distance measuring sensor sensing mechanical arm front end, rear end in the present invention respectively with the vertical range of described distance measuring sensor; Accordingly, objective horizontal level and the vertical range of adjusting mechanical arm that realized efficiently.
Accompanying drawing explanation
Figure 1 shows that the method flow diagram of adjusting mechanical arm position in the embodiment of the present invention one;
Fig. 2 is the schematic diagram that sensor makes zero and adjust of adjusting the distance;
Figure 3 shows that the triangle relation that in the embodiment of the present invention one, distance measuring sensor and mechanical arm form;
Figure 4 shows that the position relationship between distance measuring sensor and the front end handgrip of mechanical arm in the embodiment of the present invention one;
Figure 5 shows that distance measuring sensor in the embodiment of the present invention one in ranging process with the position relationship of manipulator.
The specific embodiment
Below will coordinate graphic and embodiment to describe embodiments of the present invention in detail, and by this present invention's implementation procedure how application technology means solve technical problem and reach technology effect can be fully understood and be implemented according to this.
In following embodiment of the present invention, the arm by the different handgrip of distance measuring sensor sensing mechanical arm front end, rear end respectively with the vertical range of described distance measuring sensor; Accordingly, objective horizontal level and the vertical range of adjusting mechanical arm that realized efficiently.
Figure 1 shows that the method flow diagram of adjusting mechanical arm position in the embodiment of the present invention one; As shown in Figure 1, the method relates in the process of mechanical arm storing wafer, and it can comprise:
Preferably, in the present embodiment, as long as described distance measuring sensor is selected, being not limited to infrared distance sensor can detection-sensitive distance.Particularly, can select the laser ranging inductor of the ZX-L series of Omron Corp.At this, need to illustrate time, the present invention does not limit the laser ranging inductor of the ZX-L series of Omron Corp, can select other serial infrared distance sensors of other producers yet.
The laser ranging inductor of the ZX-L series of the Omron Corp selecting in the present embodiment comprises infrared emission/receiving system, and infrared laser is controlled display unit.To those skilled in the art, this laser ranging inductor belongs to the state of the art, does not repeat them here.
Preferably, in the present embodiment, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the different handgrip of described mechanical arm front end is distance measuring sensor described in corresponding a group separately, distance measuring sensor described in the arm correspondence one of described mechanical arm rear end, to form range of triangle relation.
Preferably, in another embodiment of the present invention, before step 101, can also comprise: by described range sensor, record an initial distance, and the adjustment of making zero.
Fig. 2 is the schematic diagram that sensor makes zero and adjust of adjusting the distance; The laser ranging inductor of the ZX-L series of ，Yi Omron Corp is that example describes as shown in Figure 2.When ZX-L series laser range sensor carries out work, Laser emission and receiving terminal Sensor Head201 are used range of triangle method, first record the distance T1 between sensor and initial measurement thing surface.Now the controller of sensor is carried out to zero setting, this point is initial point zero-bit.When the object of needs range findings is positioned over, transmit and receive end Sensor Head below, re-start measurement, now obtain sensor and the distance T2 that measures thing 202 surfaces, this is exactly measurand upper surface and the initial distance between zero point before apart from T2.Hence one can see that, sensor and the distance T2=sensor that measures thing surface and the distance T1(sensor between initial measurement thing surface and the distance between initial measurement thing surface)-be positioned over the height X of the surperficial object of initial measurement thing.
To those skilled in the art, the detailed range measurement principle of this ZX-L series laser ranging inductor belongs to the state of the art, does not repeat them here.
Preferably, in the present embodiment, described distance measuring sensor can be arranged on and load the carrying case upper surface that is stored wafer.Make at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the installation site of the described distance measuring sensor respectively handgrip different from mechanical arm front end, the arm of rear end forms range of triangle relation.In other words, if the front end of mechanical arm has two handgrips, there is an arm rear end, so according to the principle of stroke range of triangle relation, gives each handgrip configuration a distance measuring sensor, and to range finding sensing of arm configuration, adds up to three distance measuring sensors.
Figure 3 shows that the triangle relation that in the embodiment of the present invention one, distance measuring sensor and mechanical arm form; As shown in Figure 3, it is 192mm that the front end of mechanical arm has the distance between 301, two handgrips 301 of two handgrips, and there is an arm 302 rear end, and the width of arm 302 is 80mm.
According to the principle of stroke range of triangle relation, give each handgrip 301 configuration a distance measuring sensor 303 so, can measure left front end and the right front ends of mechanical arm; And give arm 302 configuration a range finding sensing 303, can measure the rear end of mechanical arm.By this configuration, share three distance measuring sensors 303.
In the process of range finding and positioning mechanical arm position, be respectively h1 and h2 to the distance of distance measuring sensor 303 sensings of handgrip 301 configurations, and give the distance of range finding sensing 303 sensings of arm 302 configurations, be h3.
Compare h1 and h2, the horizontal level of adjustment and positioning mechanical arm; Compare h1 or h2, with h3, the upright position of adjustment and positioning mechanical arm.Need adjustment and the location of the horizontal level upright position of explanation there is no strict precedence relationship, the horizontal level of can first having good positioning, relocates upright position, and the upright position of also can first having good positioning, relocates horizontal level.
Figure 4 shows that the position relationship between distance measuring sensor and the front end handgrip of mechanical arm in the embodiment of the present invention one; Figure 5 shows that distance measuring sensor in the embodiment of the present invention one in ranging process with the position relationship of manipulator.As shown in Figure 4, be the cross-sectional schematic along Laser emission direction, distance measuring sensor 303 of each handgrip 301 configuration is positioned at the upper surface of carrying case.Distance measuring sensor 303 is respectively h1 and h2 with the distance of handgrip 301.As shown in Figure 5, be the cross-sectional schematic of vertical and Laser emission direction, a upper surface that is positioned at carrying case 300 of each handgrip 301 configuration, and the distance measuring sensor 303 of arm 302 configurations of mechanical arm rear end and the distance h 3 of arm 302.
In Fig. 4 and Fig. 5, illustrated last and penultimate slit room 304, the wafer of depositing in the wafer rest area 305 in penultimate slit room 304 of take is example, describes the location in above-described embodiment in detail.If mechanical arm has two handgrips, and the thickness of mechanical arm front end 302A is 4mm left and right, and the thickness of rear end 302B is 2.5mm, and the thickness of wafer is 1mm left and right.While transmitting due to mechanical arm, its position need to navigate to the position, upper middle that is positioned at last and second wafer, distance between mechanical arm lower surface and last wafer 306 is 3mm, distance between mechanical arm front end upper surface and penultimate wafer 306 is 2mm, and the distance between last wafer lower surface and penultimate slit room 304 is 10mm.Therefore, can just access during to the wafer of penultimate slit room 304 correspondences when mechanical arm, three distance h 1, h2 and h3 should be at 24.5 ± 0.5mm.Be in course of adjustment, according to these data, carry out the location of mechanical arm.As for the process of adjusting, can a distance h 1, the error between h2 and h3, in conjunction with adjustment component in prior art, to carry out, detailed process repeats no more.
As previously mentioned, in order to improve accuracy, before range finding, need distance measuring sensor settings of making zero, when having three distance measuring sensors 303, make zero respectively so, three times altogether.Such as usining carrying case ground as making zero as initial measurement thing surface, when mechanical arm is positioned at 24.5 ± 0.5mm, just can deposit the wafer of penultimate slit room 304 correspondences so.
In above-described embodiment, to use three distance measuring sensors, so to those skilled in the art, also can use a distance measuring sensor, configure three infrared emission/receiving terminals, along the arm transmitting three beams infrared light of the different handgrip of mechanical arm front end, rear end, form a three-dimensional range of triangle relation respectively.The same s1 of range data, s2 and s3 that distance measuring sensor obtains, decompose in XYZ three-dimensional planar this distance, as the data foundation of positioning mechanical arm.Detailed process does not repeat them here.
In an other embodiment of the present invention, above-mentioned mechanical arm, distance measuring sensor can form with wafer storage system (system architecture schematic diagram is not shown), and wherein, mechanical arm is for depositing the wafer of carrying case; Distance measuring sensor for the arm of the different handgrip of sensing mechanical arm front end, rear end respectively with the vertical range of described distance measuring sensor; Distance measuring sensor also for according to the different handgrip of the mechanical arm front end of described distance measuring sensor sensing the vertical range respectively and between described distance measuring sensor poor, adjust the horizontal level of mechanical arm; Distance measuring sensor is also poor for the arbitrary handgrip of mechanical arm front end, the arm of rear end and the vertical range of described distance measuring sensor according to described distance measuring sensor sensing, adjusts the vertical range that mechanical arm distance is stored wafer.
In the present embodiment, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the installation site of the described distance measuring sensor respectively handgrip different from mechanical arm front end, the arm of rear end forms range of triangle relation.
In the present embodiment, described distance measuring sensor is arranged on and loads the carrying case upper surface that is stored wafer.
In the present embodiment, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, also can make the corresponding same described distance measuring sensor of arm of the different handgrip rear end of described mechanical arm front end, to form three-dimensional range of triangle relation.
Above-mentioned explanation illustrates and has described some preferred embodiments of the present invention, but as previously mentioned, be to be understood that the present invention is not limited to disclosed form herein, should not regard the eliminating to other embodiment as, and can be used for various other combinations, modification and environment, and can, in invention contemplated scope described herein, by technology or the knowledge of above-mentioned instruction or association area, change.And the change that those skilled in the art carry out and variation do not depart from the spirit and scope of the present invention, all should be in the protection domain of claims of the present invention.
Claims (10)
1. a method of adjusting mechanical arm position, is characterized in that, in the process of mechanical arm storing wafer, comprising:
Arm by the different handgrip of distance measuring sensor sensing mechanical arm front end, rear end respectively with the vertical range of described distance measuring sensor;
Vertical range according to the different handgrip of the mechanical arm front end of described distance measuring sensor sensing respectively and between described distance measuring sensor is poor, adjusts the horizontal level of mechanical arm;
Poor according to the arbitrary handgrip of mechanical arm front end, the arm of rear end and the vertical range of described distance measuring sensor of described distance measuring sensor sensing, adjust the vertical range that mechanical arm distance is stored wafer.
2. method according to claim 1, is characterized in that, at the arm by the different handgrip of distance measuring sensor sensing mechanical arm front end, rear end, comprises respectively with before the vertical range of described distance measuring sensor:
By described range sensor, record an initial distance, and the adjustment of making zero.
3. method according to claim 1, it is characterized in that, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the installation site of the described distance measuring sensor respectively handgrip different from mechanical arm front end, the arm of rear end forms range of triangle relation.
4. method according to claim 1, is characterized in that, described distance measuring sensor is arranged on and loads the carrying case upper surface that is stored wafer.
5. method according to claim 3, it is characterized in that, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the different handgrip of described mechanical arm front end is distance measuring sensor described in corresponding a group separately, distance measuring sensor described in the arm correspondence one of described mechanical arm rear end, to form range of triangle relation.
6. method according to claim 3, it is characterized in that, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the corresponding same described distance measuring sensor of arm of the different handgrip of described mechanical arm front end, described mechanical arm rear end, to form three-dimensional range of triangle relation.
7. a wafer storage system, is characterized in that, in the process of mechanical arm storing wafer, comprising: mechanical arm, distance measuring sensor, and mechanical arm is for depositing the wafer of carrying case; Distance measuring sensor for the arm of the different handgrip of sensing mechanical arm front end, rear end respectively with the vertical range of described distance measuring sensor; Distance measuring sensor also for according to the different handgrip of the mechanical arm front end of described distance measuring sensor sensing the vertical range respectively and between described distance measuring sensor poor, adjust the horizontal level of mechanical arm; Distance measuring sensor is also poor for the arbitrary handgrip of mechanical arm front end, the arm of rear end and the vertical range of described distance measuring sensor according to described distance measuring sensor sensing, adjusts the vertical range that mechanical arm distance is stored wafer.
8. system according to claim 7, it is characterized in that, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the installation site of the described distance measuring sensor respectively handgrip different from mechanical arm front end, the arm of rear end forms range of triangle relation.
9. system according to claim 7, is characterized in that, described distance measuring sensor is arranged on and loads the carrying case upper surface that is stored wafer.
10. system according to claim 3, it is characterized in that, at the arm of the different handgrip of sensing mechanical arm front end, rear end during respectively with the vertical range of described distance measuring sensor, the corresponding same described distance measuring sensor of arm of the handgrip rear end that described mechanical arm front end is different, to form range of triangle relation.
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Cited By (6)
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| CN106930255A (en) * | 2017-03-06 | 2017-07-07 | 徐芝香 | A kind of air blows and melts continuous ice-breaking mechanism |
| CN107138852A (en) * | 2017-06-29 | 2017-09-08 | 中国电子科技集团公司第四十八研究所 | A kind of method that laser head for laser welding focuses on workpiece automatically |
| CN109702742A (en) * | 2018-12-29 | 2019-05-03 | 深圳市越疆科技有限公司 | A kind of mechanical arm leveling method and device |
| CN109877824A (en) * | 2017-12-06 | 2019-06-14 | 沈阳新松机器人自动化股份有限公司 | It is a kind of singly to take correction robot and its method for correcting error |
| CN112371800A (en) * | 2020-11-30 | 2021-02-19 | 华人运通(江苏)技术有限公司 | Stacking part grabbing system and grabbing method |
| CN117506941A (en) * | 2024-01-05 | 2024-02-06 | 珠海格力智能装备有限公司 | Control method and device of mechanical arm, readable storage medium and electronic equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117506941A (en) * | 2024-01-05 | 2024-02-06 | 珠海格力智能装备有限公司 | Control method and device of mechanical arm, readable storage medium and electronic equipment |
| CN117506941B (en) * | 2024-01-05 | 2024-05-03 | 珠海格力智能装备有限公司 | Control method and device of mechanical arm, readable storage medium and electronic equipment |
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Application publication date: 20140205 |