TW384389B - Apparatus for measuring the angle of rotation for rotatable parts - Google Patents
Apparatus for measuring the angle of rotation for rotatable parts Download PDFInfo
- Publication number
- TW384389B TW384389B TW088109405A TW88109405A TW384389B TW 384389 B TW384389 B TW 384389B TW 088109405 A TW088109405 A TW 088109405A TW 88109405 A TW88109405 A TW 88109405A TW 384389 B TW384389 B TW 384389B
- Authority
- TW
- Taiwan
- Prior art keywords
- angle
- rotation angle
- patent application
- bridge
- signal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/18—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying effective impedance of discharge tubes or semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
- G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
- G01P3/487—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by rotating magnets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0017—Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
A7 ____ϋ___ 丨. 五、發明説明(丨) 本發明關於申請專利範圍第1項引文的一種用於將可 轉元件的旋轉角度檢出的裝置以及申請專利範圍第9項引 文的一種相關的方法。 此類可作無接觸式的旋轉角度檢出的裝置’舉例而言 ,見於德專利公開案DE-OS 195 43 562,在這種裝置’有 一磁鐵與該可轉動的軸(其角度位置要求出)連接。磁場 (它隨-的旋轉角度改變)利用二個感測器元件測量。這 些感測器元件爲二個霍爾感測器元件(它們互相偏轉了 90 。的角度)或二個磁阻式感測器元件(它們互相偏轉了 45° )。感測器元件利用交流電壓信號(它們互相呈適當方式的 相位移動)供電。感測器元件之輸出信號重疊造成一種信 號走勢,這種走勢可表示角度位置。在此文獻中提到無接 觸式旋轉角度檢出裝置各有二個同類的感測器元件。這點 會導致一些缺點,因爲舉例而言,霍爾感測器受溫度影響 很大,且受應力(Stress)影響很大。反之’磁阻性感測器 元件在溫度及應力的影響方面具有較有利的性質’它們受 溫度及應力的影響比霍爾感測器少,但其缺點爲:由於這 種物理效應,只能明確地檢出180。的角度範圍。舉例而 言,這種角度範圍在檢出內燃機凸輪軸的位置時或在方向 盤角度測量方法中顯得太小。 在專利DE-P 197 22016發表了一種可轉元件的無接觸 式旋轉角度檢出裝置,其中,將具有至少二個感測器元件 的感測器裝置之可受磁性影響的性質分析’在一分析電路 中將由可轉元件產生的磁場強度或受其影響的磁場強度檢 (請先聞讀背面之注f項再 ^丨 订本頁 訂· 9 經濟部智慧財產局員工消费合作社印製 本纸張尺度逍用中國因家標準(€呢)八4規格(210父2和公釐) A7 B7
出,並取出以求出旋轉位置,其中一個感測器元件利用磁 阻效應工作,另一感測器元件利用霍爾效應工作,而將由 一感測器兀件產生的信號互相組合。在實用上,這種磁阻 感測器及霍爾感測器的組合顯得十分繁複昂貴。 本發明的目的在提供一種檢出旋轉角度的裝置或方法 ,藉之可用低成本明確地檢出儘可能大的角度範圍(特別 是 0〇 〜360〇 )。 這種目係利用具有申請專利範圍第1項的特點裝置及 具有申請專利範圍第9項特點的方法達成。 如今’依本發首度可以使用磁阻感測器裝置明確地檢 出0°〜360°之間的角度。在此’不同於背景技術的感測 器裝置,並不需附加之霍爾感測器。如此,準備—種旋轉 角度檢出裝置的成本就減少了。有利的用途舉例而w,係 用在檢出內燃機凸輪軸的位置。此外,本發明可有利地用 於方向盤角度測量方法,因爲比起傳統方法, 圍增大到360° ,使整個系統的容許誤差限度提高. 本發明之有利進一步特點見申請專利範圍副g。 依一種較佳設計,該感測器裝有多數磁阻元彳牛, 至少接成二個橋式電路(特別是惠斯頓電橋),其中之— 產生一個信號,此信號係所要檢出的第〜磁場相對於 一參考面的夾角的餘弦(cosine)値有關,而另—橋接電路 產生的信號則與此角度的正弦(sine)値有關。根據這種 線性獨立的信號,可簡單地作信號分析。 這種磁阻元件設計成AMR測量條帶形式。道種測量 本紙張又度適用中國國家揉率(CNS ) A4規格(210X29、公釐) I-ΟΙ. 1Τ 經濟部智慧財產局貝工消费合作社印製 A7 B7 經濟部智慧財產局員工消费合作社印製 五、發明説明(今) 條帶可以用較簡單及廉價的方式以適當方位設到一基質上 〇 最好在二個與橋式電路的一橋分枝相關的磁阻元件中 .的電流方向互相成垂直。 該橋式電路宜設成相偏轉一角度(特別是45° )利用 這種設置,正弦及餘弦信號都能用簡單方式抽離。 在橋式電路中的磁性輔助場Bh宜具不同方向,其中, 這些方向宜夾成45°角。 這些磁阻元件宜設成蜿蜒排列。利用這些措施可達成 較高之感測器信號,它們可以較簡單地分析。 該磁性輔助場Bh宜利用平面線圈產生,該線圈利用一 不導電的中間層和磁阻元件絕緣。利用這種線圈,配線成 本較低,且輔助場BH的童及方向可用想要的方式調整。 依本發月方法一較佳實施例關聯(Korrelierung)係利用一 個以下形式的區域函數實施: F = [ ( 0° S 3 AMR180 ‘ f ( Λ 1,α 2 ) ] AND { { ( <5 Ucos > S )OR ( ( 5Usin<-S) AND ( I (5Uc〇s | <S) ) } } OR { { f(CZl,a2) AMR180 } AND < { δ Ucos〉S } 0R[ ( (5 Ucos > S) AND ( I (5Uc〇s I <S]}} 其中 CC AMR180 爲一種不施輔助場Bh用180°明確範圍檢 出的旋轉角度,S爲一可調整的有效臨限,占或(511心 爲此感測器裝置之與角度有關的變化信號,而爲 在各橋式電路地點的橋式電路或輔.助場相對於—參考方向 的角度對準的一個加法或減法函數。如此可得到一種測定 (請先《讀背面之注$項再本頁)
C 本紙張尺度適用中國國家樑準(CNS ) A4規格(210X2^7公釐) A7 B7 五、發明説明(今) 方法利用電腦以獨立方式在360°的角度範中作明確的旋 轉角度測定。區域函數的形狀依各橋式電路中的磁性輔助 場Bh的方向而定。在輔助場Bh的任意方向時,藉著使用 磁性場Bh可以區別角度範圍Ο$α$180°與角度範圍180 ° $α$360° ,其中要注意,在橋式電路(1)的地點的Bh的 方向與橋式電路(11)地點的Bh的方向不同。如果該二Bh方 向差了 45° ,則特別有利。 依本發明方法之一特佳實施例,函數係爲i +心形式的函數。當輔助場BR在橋式電路(1)的地點沿方 向α =90° ,而在橋式電路(11)的地點沿方向α =45°作用 時,舉例而言,就造成以下之區域函數 F = { { 〇。^ ΑΜΙΠ80 $135° }及{〔 51U>S〕或〔 ((5Usin<-S)及(I (5Uc〇s | <S)〕} } 或 { { 135。< a AMR180 $180。}及{〔 6DS〕或〔( dUsin>S) R ( I (5Ucos I <S) 3 } } 依本發明方法之一特佳實施例’函數f( α,,a 2)爲I α! - α 形 式的函數,且在橋接電路(11)時,方向α = 135° ,舉例而 言,就造成以下之逦域函數 F= { { 〇〇 ^ AMR180 $45° }及{〔 5U^>S〕或〔( | (5Uc〇s | <S)及(^UwC-S)〕} }或 { {45〇〈 CK AMR180 $180° }及{〔 51U>S〕或〔( | 5Uc〇s | <S)及(5Usin>S)〕} } 茲配合附圖利一較佳實施例詳細說明本發明’圖式中 本紙張尺度適用中國國家揉準(CNS > A4规格(210X29?公釐) (請先閲讀背面之注f項再1^本頁)
訂'
C 經濟部智慧財產局貝工消费合作社印製 五、發明説明(γ) A7 B7 經濟部智慧財產局員工消费合作社印製 第一圖係一種將可轉元件的旋轉角度檢出的裝置的一 較佳實施例的示意圖, 第二圖係本發明之旋轉角度檢出裝置所發生的餘弦與 正弦橋接信號電壓在施加磁性輔助場時的改變與所要檢出 的外磁場的關係, 第三圖係本發明之旋轉角度檢出裝置一較佳實施例的 可能構造的上視圖。 第一圖中所示本發明旋轉角度檢出裝置的感測器裝置 有二個惠斯頓電橋(1)(11),各惠斯頓電橋(1)(11)具有各向 異性(anisotrop)的磁阻薄膜感測器或AMR測量條帶(1/1) 〜(1/4)或(11/1)〜(11/4),當作磁阻元件。 AMR材料〔例如透磁鋼(permau〇y)的電阻依一角度 而定,此角度係在磁化方向或所施磁場B«t方向與一電流 (I)(它流經此AMR材料)的方向間的夾角。在AMR測量 條帶內的電流方向在第一圖中係利用與各AMR測量條帶相 關的線組作示意表示(此處可看出,惠斯頓電橋的電橋各 分枝有二個AMR測量條帶,它們具有互相垂直的電流方向 。)當電流受到AMR測量條帶的幾何形狀固定時,磁化方 向就循著所要檢出之外磁場之方向。在第一圖中,外磁場 B«t之與旋轉角度相關的方向係利用一長箭頭表示。AMR 測量條帶之電阻和角度的關係圖有180。的週期,其中, 當磁化方向平行於或反向平行於電.流方向時,阻力最大, 而當磁化方向垂直於電流方向時,阻力最小。接到一惠斯 (請先閱讀背面之注$項再
QiJI
C 訂 本紙張尺度適用中國鬮家標準(CNS > A4規格(210X2釣公釐) Α7 Β7 五、發明説明(b) 頓電橋(1)(11)的AMR測量條帶(1/1)〜(1/4)及(11/1〜11/4)用 於將與角度有關的應用信號抽出。由惠斯頓電橋(1)得到的 信號Uw具有180°週期,且顯示一種餘弦形走勢 Ucos ^ cos(2a)。如上述,角度α顯示出所要測之外磁場的方向。 第二惠斯頓電橋(11)相對於第一惠斯頓電橋(1)轉了 45°。 AMR測量條係對應地設置,因此惠斯頓電橋(11)產生正弦 形輸出信號U&〜sin(2c〇。在一電子分析電路(圖中未示 )中形成tan'1,可得到所要測的角度α。由於電橋電壓與 2α的關係,故有180°的週期,因此角度之絕對値只能在 0° SaS180°的範圍中。 爲了區分二種角度範圍0° $α$180°以及180° 經濟部智慧財產局貝工消費合作社印製 360° ,故短時地施一輔助磁場Βη,如第一圖中的白箭頭所 示。在AMR測量條帶(1/1)〜(1/4)或(11/1)〜(11/4)中的磁化 方向稍微受此磁場Bh改變,因此,從惠斯頓電橋(1)(11)導 出的信號1)。。5或Usi»也受到對應的改變。這種相對於無施加 輔助場Bh時的測量的信號或電壓的改變(5U。。:及6Usu以一 種邏輯關聯(所謂的區域函數)作分析。此區域函數(它 在下文中將詳述)可爲邏輯値“0”或“Γ,如此可決定 ,是否所測的角度α在0°〜180°範圍或在180°〜360° 範圍。如此,利用一 AMR角度感測裝置可在整個角度範圍0 °〜360°作絕對角度測量。 在惠斯頓電橋(11)上的磁性輔助場的方向(角度α2) 相對於在惠斯頓電橋(1)上的輔助場Bh (角度呈一種差 了 45°的方向。舉例而言,這點可見於第一圖,其中,惠 本紙張尺度適用中國國家樑準(CNS ) A4规格(210Χ2ί7公釐) 經濟部智慧財產局貝工消费合作社印製 A7 ___B7 _ 五、發明説明(q ) 斯頓電橋(11)上的輔助場Bh朝向(22 = 45°方向’而在惠斯 頓電橋(1)上的輔助場朝向〜=90°方向,對於這種輔助場 Bh的對準,在第二圖中顯示相關的信號變化<511咖及51^ 。如果此時A AMR180 表示無輔助場時測量的角度’且由於 180°的週期性而侷限於明確範圍0°〜180° ,此邏輯區域 函數F爲: .F= { {0。SaAMR$135。}及{〔 ^UC<5S>S〕或〔(5 Usin<-S) R ( I 5Uc〇s I <s) ] } } 或{ { 135。< 〇!amr180° }及{〔 <5Uc〇s>S〕或〔(占 Usin>S)及(I 5Uc〇s I <s)〕} } 其中F=僞或“0”則表示:外磁場所要檢出的場 方向的角度α在0°〜180°範圍中,亦即:α = αΑΜ_ ’ ,且 F=真或“Γ則表示:外磁場Be之所要檢出的場方 向的角度α在180。〜360°範圍中,亦即·· a = aAMim〇+180 〇 在以下表1中顯示區域函數的邏輯關聯的細節。要知 道’只有當信號變化(5Uw的値在有效臨限値S以下時,才 將信號改變5Usin取出以作區域的決定。這種情形,依第二 圖特別是發生在角度範圍α=0° 、90° 、180。、270°與 360°或者對 CL AMR180 = 0〇 、 90〇 與 180。。 (請先閱讀背面之注f項再 Γό—. -fr^F^本頁 訂
-Π-· C 本紙張AAit用《ΡΗ目家轉(CNS ) A4^ ( 21GX2?7公釐) 經濟部智慧財產局員工消費合作社印製
A7 ___B7_ 五、發明説明(名) δ Uc〇s δ Usin a amr 180 — + ; ? ; — u ; ο + + ; ? ; — u ; ο ? + u ? - u ? - 0 ? + 〇 此處邏輯區域函數F具以下之値: 對於 0° S α $180。 爲 〇, 對於 180° S α $360° 爲 1, 對於 (X AMR180 * . 以下邏輯狀態 u 表7^0。SaAMRi8〇S135〇 , 0表示135 ° < 0! AMR180 $180。, 函數511。。5及5Usin的邏輯狀態如下定義 對於5U>+S + 對於I <5U丨< + S ? 對於(5UC-S — 第三圖顯示一本發明之36(T AMR角度感測器的較佳 構造,它可利用薄膜技術製造。個別的AMR測量條帶或電 阻在此處也用(1/1)〜(1/4) (cos電橋)及(11/1〜11/4) (sin 電橋)表示。此電阻層的厚度典型値在20nm〜50nm範圍 。條帶寬度舉例而言爲l〇//m。要把AMR電阻(1/1)〜(1/4) 及(11/1)〜(11/4)配線或鍍金屬成爲二個惠斯頓電橋的方法 ,舉例而言,係用鋁或銅條帶(10)以薄膜技術造成。 本紙張逍用中國國家梯準(CNS > Α· ( 210X2讲公釐) '~ (請先閱讀背面之注f項再_ JOI 订本頁 .9 經濟部智慧財產局員工消费合作社印製 A7 _B7_ , 五、發明説明(1 ) 輔助場Bh係利用一薄膜平面線圈(2)產生。該平面線 圈(2)利用一不導電之中間層(典型厚度200nm〜500nm) 呈電絕緣方式位在AMR電阻(1/1)〜(1/4)及(11/1)〜(11M)或 .其鍍金屬層上。平面線圈(2)的形狀設定成使輔助場Bh依第 一圖在惠斯頓電橋(1) (cos電橋)的範圍中朝向α =90°之 方向,而在惠斯頓電橋(11) (sin電橋)的範圍中朝向α = 450。的方向,而在AMR測量條帶的範圍中則平行於層的 平面延伸。平面線圈(2)的線圈線組特別平行或垂直於AMR 電阻的條帶方向或蜿蜒方向延伸。平面線圈(2)的線圈繞組 的寬度方向在典型的例子係和AMR電阻寬度方向相同。在 圖示之例子,該寬度爲12//m。平面線圈(12)的線圈繞組的 典型層厚度在500nm〜lOOOnm範圍之間。在圖示之例子中 ,該二惠斯頓電橋(1)(11)係並聯。整個感測器元件連同該 二個線圈端子共有八個端子墊(Pad),即:U«s_ '仏:、 IW、IW、V«、Vs_、Vs+及接地GND。它們可用簡單方式 包裝在一適合殻體,物別是一個SOIC8殼體中。 利用平面線圈(2)產生磁性副場(Bh)的方式並不限於第 三圖的設置及AMR電阻的蜿蜒形狀。AMR電阻的製造或 設置只需確保惠斯頓電橋(1)(11)的電阻中的電流方向沿第 一圖所示方向跑。因此即使在AMR電阻之變更設置方式( 例如EP 0 671 065A2中所述之星形嵌合電路)也可利用一 平面線圈(2)產生輔助場。同樣地’舉例而言,如不採用蜿 蜒的AMR電阻或電阻條帶,也可以採用任何長方形、方形 、圓形或橢圓形的AMR薄膜構造的串聯電路,例如在WO 本紙張尺度逋用中國國家標準(CNS ) A4規格(210X助公釐) A7 ___B7_ 五、發明説明() ' 。要求出未施輔助場Bh時的角度 OL AMRI80 (亦即在平面線圈 (2)無電流時),舉例而言,係用一微處理電路依習知方法 依公式asO.Stan1 (USin/U«s)計算tan·1値,或用其他適 合的計算方法。利用其他的數位回路將信號電壓、U,u 及角度aAMR18。儲存。然後施加輔助場Bh〔亦即將平面線圈 (2)通電〕重新測量。用另外的邏輯電路實施上述的區域函 數F,參考有效臨限將電壓變化5仏。8與5Usin的正號或負 號分析出來,並決定是否求出的測量角度等於aAMRI8()+180° 〇 〔圖號說明〕 ⑴(11) 惠斯頓電橋 (1 /1)〜(1 /4),(11 /1)〜(11 /4) 磁阻薄膜感測器或AMP測量條帶 ⑵ 平面線圈 經濟部智慧財產局貝工消費合作社印製 |紙 本 逍 Μ I嗖一祕 !9 12
Claims (1)
- ___§_.__ 六、申請專利範固 1·—種用於將可轉元件的旋轉角度檢出的裝置’其 中可將一感測器裝置之可受磁性影響的性質分析而將受— 可轉元件產生或影響的第一磁場Bm在一分析電路中檢出 以及應用以求出旋轉角度,其中該感測器元件利用在一第 一角度範圍(特別是180°的角度範圍)的磁阻效應而產 生一個與磁場B„,方向明確地相關的信號’其特徵在:具 有施加手段(2)以選擇性地把一磁性輔助場Β»施到該感器裝 置,藉之可使該可與一磁場B«t方向相關的信號改變’以 與一第二角度範圍(特別是360° )的一個角度明確地相 關聯。 2. 如申請專利範圍第1項之用於將可轉元件的旋轉 角度檢出的裝置,其中: 該感測器裝置有多數磁阻元件(1/1)〜(1/4) ’(n/1)〜 (11/4),它們至少接成二個橋式電路’特別是惠斯頓電橋 (1)(11),其中一電橋產生一個對一參考方式的第一磁場 的角度的餘弦値相關的信號,而另一霄辦產生一個與此角 度的正弦値相關的信號。 3. 如申請專利範圍第2項之用於將可轉元件的旋轉 角度檢出的裝置,其中: 該磁阻元件爲AMR測量條帶(1/1)〜(1/4) ’(11/1)〜 (11/4)。 4. 如申請專利範圍第1或第2項之用於將可轉元件 的旋轉角度檢出的裝置,其中: 該在二個與構式電路(1)(11) 一橋分枝相關聯的磁阻元 ___—I-—- 良乐尺度埴用中两圃家裸準(CNS M4规格(210X297公釐) (請先聞讀背面之注f項再填寫本頁) -订- -Γ 經濟部智慧財產局負工消費合作社印t S84389 B8 C8 , D8 六、申請專利範園 件的電流方向互相垂直。 5·如申請專利範圍第1或第2項之用於將可轉元件 的旋轉角度檢出的裝置,其中: 該二橋式電路(1)(11)設成互相轉一角度,特別是45。。 6♦如申請專利範圍第1或第2項之用於將可轉元件 的旋轉角度檢出的裝置,其中: <該橋式電路(1)(11)中的磁性輔助場Bh有不同的方向, 這'二個方向夾成一角度,特別是45°。 7·如申請專利範圍第1或第2項之用於將可轉元件 的旋轉角度檢出的裝置,其中: 該磁阻元件(1/1)〜(1/4),(11/1卜(11/4)設計成蜿蜒狀 〇 8·如申請專利範圍第1或第2項之用於將可轉元件 的旋轉角度檢出的裝置,其中: 該磁性輔助場Bh可利用一平面線圈(2)產生,該平面 線圈利用一不導電的中間層相對於磁阻元件(1/1)〜(1M), (11/1)〜(11/4)及其鍍金屬層設成電絕緣。 9·一種用於將可轉元件的旋轉角度檢出的方法’其 中把一感測器裝置的磁性之性質分析’把一個受該元件產 生或影響的第一磁場B«t在一分析電路中檢出’並應用以 求出旋轉角度,其特徵在以下步驟: a) 在施第一磁場Βπ時測定由該感測器裝置檢出的信號 b) 將一附加磁性輔助場Bh間歇地施加到感測器裝置’ 2___ 本紙張尺度逋用中國鬮家榡準(CNS > A4规格(210X297公釐) (請先聞讀背面之注意事項再填窝本頁) 訂 4, 經濟部智慧財產局員工消費合作社印製 A8 B8 C8 D8 38438^ 六、申請專利範園 (請先閱讀背面之注$項再填寫本資) C)測定由感測器裝置檢出之信號相對於未施加輔助場 Bh時所檢出之信號的變化,以得到與旋轉角度有關的變化 信號, ‘ d)將此變化信號與未施輔助場(Bh)時檢出的信號相關聯 ,以明確地測定達360°角度範圍的旋轉角度。 1〇·如申請專利範圍第9項之用於將可轉元件的旋 轉角度檢出的方法,其中該感測器裝置有二個橋式電路’ 特別是惠斯頓電橋,二者互相轉一角度,特別是45°。 1 1 ·如申請專利範圍第1 〇項之用於將可||元件的 旋轉角度檢出的方法,其中: 該關聯作業係利用以下形式的區域函數F實施: F= { {0° ^ CL AMR180 ^f(ai,a2) }S{[ (5Uc〇s<-S 〕或〔(5Usu<-S)及(I 5Uc〇s<S)〕} }或 { {f(ai,0:2) <a AMR180 $180° }及{〔 5Usin>S〕 及(I <5 Uc〇s I < S) } } } 其中 OL AMR180 爲末施輔助場Bh時檢出的旋轉角度, S爲可調整的有效臨限値, 51]«^或5Usin爲感測器裝置之與角度有關的變化信號 經濟部智慧財產局員工消費合作社印製 f ( ascu)爲橋式電路之角度對準或橋式電路輔助場相 對於一參考方向的加法或減法函數。 1 2 ·如申請專利範圍第1 1項之方法,其中: f(ai,o:2)爲αι+αζ形式的函數。 1 3 ·如申請專利範圍第1 1項之方法,其中: 3 本紙張尺度適用中固國家揉準(CNS ) A4规格(210X297公釐) S84389 ?g D8 六、申請專利範園 f(ai,a2)爲| αι_α2|形式的函數。 (請先閱讀背面之注^'項再填寫本I') b 裝- 訂 經濟部智慧財產局員工消費合作社印製 4 本紙張尺度逍用中國國家揉準(CNS ) A4規格(210X297公釐)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19839446A DE19839446A1 (de) | 1998-08-29 | 1998-08-29 | Anordnung zur Drehwinkelerfassung eines drehbaren Elements |
Publications (1)
Publication Number | Publication Date |
---|---|
TW384389B true TW384389B (en) | 2000-03-11 |
Family
ID=7879188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW088109405A TW384389B (en) | 1998-08-29 | 1999-06-07 | Apparatus for measuring the angle of rotation for rotatable parts |
Country Status (7)
Country | Link |
---|---|
US (1) | US6433535B1 (zh) |
EP (1) | EP1049908B1 (zh) |
JP (1) | JP4406509B2 (zh) |
AU (1) | AU754291B2 (zh) |
DE (2) | DE19839446A1 (zh) |
TW (1) | TW384389B (zh) |
WO (1) | WO2000012957A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI565958B (zh) * | 2015-05-08 | 2017-01-11 | 愛盛科技股份有限公司 | 磁場感測裝置及磁場感測模組 |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19947761A1 (de) | 1999-10-02 | 2001-04-12 | Bosch Gmbh Robert | Verfahren und Schaltungsanordnung zur Feststellung einer Richtung eines äußeren magnetischen Feldes |
US6633462B2 (en) * | 2000-07-13 | 2003-10-14 | Koninklijke Philips Electronics N.V. | Magnetoresistive angle sensor having several sensing elements |
DE10041089A1 (de) * | 2000-08-22 | 2002-03-07 | Bosch Gmbh Robert | Verfahren zur Korrektur einer Winkelmessung |
DE10042006A1 (de) * | 2000-08-26 | 2002-03-07 | Bosch Gmbh Robert | Vorrichtung und Verfahren zur Winkelmessung |
DE10104116A1 (de) * | 2001-01-31 | 2002-08-01 | Philips Corp Intellectual Pty | Anordnung zum Erfassen des Drehwinkels eines drehbaren Elements |
DE10104453A1 (de) | 2001-02-01 | 2002-08-08 | Philips Corp Intellectual Pty | Anordnung zum Messen der magnetischen Feldstärke |
DE10118650A1 (de) * | 2001-04-14 | 2002-10-17 | Philips Corp Intellectual Pty | Winkelsensor sowie Verfahren zum Erhöhen der Anisotropiefeldstärke einer Sensoreinheit eines Winkelsensors |
DE10130988A1 (de) * | 2001-06-27 | 2003-01-16 | Philips Corp Intellectual Pty | Justierung eines magnetoresistiven Winkelsensors |
JP4695325B2 (ja) * | 2001-09-17 | 2011-06-08 | キヤノン電子株式会社 | 磁気検出素子とその製造方法及び該素子を用いた携帯機器 |
US20040017187A1 (en) * | 2002-07-24 | 2004-01-29 | Van Ostrand Kent E. | Magnetoresistive linear position sensor |
DE10240239A1 (de) | 2002-08-31 | 2004-03-11 | Robert Bosch Gmbh | Hochgenauer Hall-Sensor mit mehreren Kontaktpaaren |
DE10250319A1 (de) * | 2002-10-29 | 2003-10-30 | Bosch Gmbh Robert | Einrichtung zur Erfassung der Rotation einer Welle und GMR-Schichtsystem |
DE10306127B4 (de) * | 2003-02-14 | 2007-02-15 | Robert Bosch Gmbh | Verfahren und Schaltungsanordnung zur Festellung der Richtung eines Magnetfeldes |
US20060198172A1 (en) * | 2003-10-01 | 2006-09-07 | International Rectifier Corporation | Bridgeless boost converter with PFC circuit |
US20050140363A1 (en) * | 2003-12-29 | 2005-06-30 | International Business Machines Corporation | Sensor for detection of the orientation of a magnetic field |
DE102004019238B3 (de) * | 2004-04-16 | 2005-08-18 | Hl-Planar Technik Gmbh | Anordnung und Verfahren zur Bestimmung der Richtung magnetischer Felder sowie Verwendung der Anordnung und des Verfahrens |
JP2006047228A (ja) * | 2004-08-06 | 2006-02-16 | Tokai Rika Co Ltd | 回転角度検出装置 |
US7990978B1 (en) | 2004-12-17 | 2011-08-02 | Verizon Services Corp. | Dynamic bandwidth queue allocation |
US7492554B2 (en) | 2005-01-21 | 2009-02-17 | International Business Machines Corporation | Magnetic sensor with tilted magnetoresistive structures |
DE102005031806A1 (de) * | 2005-07-07 | 2007-01-11 | Zf Lenksysteme Gmbh | Drehwinkelsensor |
US7339370B2 (en) * | 2005-12-09 | 2008-03-04 | Bourns, Inc. | Position and torque sensor |
DE102008001247A1 (de) | 2008-04-18 | 2009-10-22 | Zf Lenksysteme Gmbh | Überlagerungslenkung |
JP2010038765A (ja) * | 2008-08-06 | 2010-02-18 | Tokai Rika Co Ltd | 回転検出装置 |
US8390283B2 (en) | 2009-09-25 | 2013-03-05 | Everspin Technologies, Inc. | Three axis magnetic field sensor |
WO2011072849A1 (de) * | 2009-12-18 | 2011-06-23 | Hirschmann Automotive Gmbh | Verfahren zur berührungslosen strommessung mit angepasster auflösung |
US8518734B2 (en) | 2010-03-31 | 2013-08-27 | Everspin Technologies, Inc. | Process integration of a single chip three axis magnetic field sensor |
US8448528B2 (en) | 2010-09-27 | 2013-05-28 | Bourns Incorporated | Three-piece torque sensor assembly |
US8390276B2 (en) | 2010-09-27 | 2013-03-05 | Bourns Incorporated | Target magnet assembly for a sensor used with a steering gear |
US8884616B2 (en) | 2011-06-22 | 2014-11-11 | Infineon Technologies Ag | XMR angle sensors |
US8947082B2 (en) * | 2011-10-21 | 2015-02-03 | University College Cork, National University Of Ireland | Dual-axis anisotropic magnetoresistive sensors |
CN105209860B (zh) * | 2013-05-22 | 2017-08-25 | 斯凯孚公司 | 传感器轴承中所用的传感器组件 |
US9377327B2 (en) | 2013-06-28 | 2016-06-28 | Analog Devices Global | Magnetic field direction sensor |
ITUB20152562A1 (it) | 2015-07-28 | 2017-01-28 | St Microelectronics Srl | Procedimento di funzionamento di sensori di hall e dispositivo corrispondente |
US10114085B2 (en) | 2016-03-04 | 2018-10-30 | Allegro Microsystems, Llc | Magnetic field sensor with improved response immunity |
IT201800007246A1 (it) | 2018-07-17 | 2020-01-17 | Sensore di hall, dispositivi e procedimento corrispondenti | |
US10605874B2 (en) | 2018-08-06 | 2020-03-31 | Allegro Microsystems, Llc | Magnetic field sensor with magnetoresistance elements having varying sensitivity |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5435070A (en) * | 1993-07-26 | 1995-07-25 | Honeywell Inc. | Simplified compass with multiple segment display capability |
US5570016A (en) * | 1994-06-01 | 1996-10-29 | General Motors Corporation | Method and apparatus for detecting crankshaft angular position |
EP0740776B1 (de) * | 1994-11-22 | 2002-06-12 | Robert Bosch Gmbh | Anordnung zur berührungslosen drehwinkelerfassung eines drehbaren elements |
DE19510579C2 (de) * | 1995-03-23 | 1997-08-21 | Inst Physikalische Hochtech Ev | Drehwinkel- oder Drehzahlgeber |
JPH09318387A (ja) | 1996-05-30 | 1997-12-12 | Mitsubishi Electric Corp | 検出装置 |
DE19640695A1 (de) * | 1996-10-02 | 1998-04-09 | Bosch Gmbh Robert | Magnetoresistiver Sensor mit temperaturstabilem Nullpunkt |
DE19722016A1 (de) | 1997-05-27 | 1998-12-03 | Bosch Gmbh Robert | Anordnung zur berührungslosen Drehwinkelerfassung |
-
1998
- 1998-08-29 DE DE19839446A patent/DE19839446A1/de not_active Withdrawn
-
1999
- 1999-06-02 US US09/530,077 patent/US6433535B1/en not_active Expired - Lifetime
- 1999-06-02 WO PCT/DE1999/001632 patent/WO2000012957A1/de active IP Right Grant
- 1999-06-02 AU AU51517/99A patent/AU754291B2/en not_active Ceased
- 1999-06-02 EP EP99936400A patent/EP1049908B1/de not_active Revoked
- 1999-06-02 JP JP2000571077A patent/JP4406509B2/ja not_active Expired - Fee Related
- 1999-06-02 DE DE59906764T patent/DE59906764D1/de not_active Revoked
- 1999-06-07 TW TW088109405A patent/TW384389B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI565958B (zh) * | 2015-05-08 | 2017-01-11 | 愛盛科技股份有限公司 | 磁場感測裝置及磁場感測模組 |
Also Published As
Publication number | Publication date |
---|---|
US6433535B1 (en) | 2002-08-13 |
EP1049908B1 (de) | 2003-08-27 |
JP2002525588A (ja) | 2002-08-13 |
DE59906764D1 (de) | 2003-10-02 |
WO2000012957A1 (de) | 2000-03-09 |
EP1049908A1 (de) | 2000-11-08 |
DE19839446A1 (de) | 2000-03-02 |
AU754291B2 (en) | 2002-11-14 |
JP4406509B2 (ja) | 2010-01-27 |
AU5151799A (en) | 2000-03-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW384389B (en) | Apparatus for measuring the angle of rotation for rotatable parts | |
JPS6349724Y2 (zh) | ||
JP5654455B2 (ja) | 歯車の回転速度検出方法および歯車の回転速度検出装置 | |
JP3848670B1 (ja) | 回転角度検出装置 | |
US7208940B2 (en) | 360-Degree magnetoresistive rotary position sensor | |
JP4234004B2 (ja) | 対象物の角位置を測定するための装置 | |
US20090115405A1 (en) | Magnetic field angular sensor with a full angle detection | |
US20070080683A1 (en) | Magnetoresistive sensor for determining an angle or a position | |
JP2010066262A (ja) | 磁界の空間成分を測定する磁界センサ装置 | |
TW440704B (en) | Magnetoresistive sensor element and process for determining a direction of a magnetic field | |
WO2010014877A2 (en) | Nanowire magnetic compass and position sensor | |
US6522132B1 (en) | Linear angular sensor with magnetoresistors | |
CN114838655B (zh) | 一种多周期双极型电磁感应式角度传感器 | |
KR102677085B1 (ko) | 인코더 | |
JP2004518110A (ja) | 角度測定のための装置及び方法 | |
US7602176B2 (en) | AMR sensor element for angle measurement | |
JP4121747B2 (ja) | 回転可能な部材の回転角度を検出するための装置 | |
TW406187B (en) | Detector for determining an angle variation | |
JP6799450B2 (ja) | 磁気センサ | |
JP5170614B2 (ja) | 磁気センサ及び回転角度検出装置 | |
JP5333957B2 (ja) | 磁気センサ及び回転角度検出装置 | |
CN112394304A (zh) | 确定杂散磁场强度的组件和方法 | |
TW201229525A (en) | Electric power measuring apparatus and method | |
CN112051523B (zh) | 磁场感测装置 | |
JP2002525609A (ja) | 磁気抵抗効果型センサ素子、例えば、角度センサ素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MM4A | Annulment or lapse of patent due to non-payment of fees |