TW202300938A - 掃描裝置及電氣檢查裝置 - Google Patents

掃描裝置及電氣檢查裝置 Download PDF

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Publication number
TW202300938A
TW202300938A TW111123850A TW111123850A TW202300938A TW 202300938 A TW202300938 A TW 202300938A TW 111123850 A TW111123850 A TW 111123850A TW 111123850 A TW111123850 A TW 111123850A TW 202300938 A TW202300938 A TW 202300938A
Authority
TW
Taiwan
Prior art keywords
substrate
independent
scanning device
common
common substrate
Prior art date
Application number
TW111123850A
Other languages
English (en)
Chinese (zh)
Inventor
椹木雅也
Original Assignee
日商日本電產理德股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本電產理德股份有限公司 filed Critical 日商日本電產理德股份有限公司
Publication of TW202300938A publication Critical patent/TW202300938A/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2868—Complete testing stations; systems; procedures; software aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/14—Structural association of two or more printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Tests Of Electronic Circuits (AREA)
TW111123850A 2021-06-29 2022-06-27 掃描裝置及電氣檢查裝置 TW202300938A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021107630 2021-06-29
JP2021-107630 2021-06-29

Publications (1)

Publication Number Publication Date
TW202300938A true TW202300938A (zh) 2023-01-01

Family

ID=84691767

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111123850A TW202300938A (zh) 2021-06-29 2022-06-27 掃描裝置及電氣檢查裝置

Country Status (5)

Country Link
JP (1) JPWO2023276769A1 (ja)
KR (1) KR20240026153A (ja)
CN (1) CN117597587A (ja)
TW (1) TW202300938A (ja)
WO (1) WO2023276769A1 (ja)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3401713B2 (ja) * 1994-09-13 2003-04-28 富士通株式会社 集積回路試験装置
KR100717462B1 (ko) * 2003-04-04 2007-05-14 주식회사 아도반테스토 접속 유닛, 시험 헤드, 및 시험 장치
JP2010112789A (ja) * 2008-11-05 2010-05-20 Yamaha Fine Technologies Co Ltd 電気検査装置
JP2013250250A (ja) * 2012-06-04 2013-12-12 Advantest Corp テスターハードウェアおよびそれを用いた試験システム
JP6165035B2 (ja) * 2013-11-18 2017-07-19 日置電機株式会社 スキャナ装置および基板検査装置
JP2015111082A (ja) * 2013-12-06 2015-06-18 富士通テレコムネットワークス株式会社 布線試験装置、布線試験方法及び基準値測定装置

Also Published As

Publication number Publication date
CN117597587A (zh) 2024-02-23
JPWO2023276769A1 (ja) 2023-01-05
KR20240026153A (ko) 2024-02-27
WO2023276769A1 (ja) 2023-01-05

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