TW201802013A - Flipping mechanism and inspection method and device using the flipping mechanism capable of inspecting front and rear surfaces of a to-be-inspected component - Google Patents
Flipping mechanism and inspection method and device using the flipping mechanism capable of inspecting front and rear surfaces of a to-be-inspected component Download PDFInfo
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本發明係有關於一種翻轉機構及使用該翻轉機構之檢查方法及裝置,尤指一種可在搬送過程中對待檢查元件進行翻轉,使該待檢查元件的正、反面皆可受到檢查的翻轉機構及使用該翻轉機構之檢查方法及裝置。The invention relates to a reversing mechanism and an inspection method and device using the reversing mechanism, in particular to a reversing mechanism capable of reversing an element to be inspected during transportation, so that both the front and back sides of the element to be inspected can be inspected, and Inspection method and device using the turning mechanism.
按,一般電子元件中的基板加工製程通常需要進行品質檢查,這些檢查依製程別有不同的需求,但通常需藉助搬送裝置來協助以使檢查的過程可以自動化方式來進行;以在基板上已設有晶片並在晶片上方已覆設有散熱片的基板為例,由於時下的封裝製程以BGA(球柵陣列封裝Ball Grid Array)封裝為盛行,此類封裝後的基板通常必須檢查反面(底部)的錫球焊點的漏銅(又稱漏底銅)狀況,也必須檢查基板上方(正面)的散熱片是否刮傷、規格銘標是否無損,另散熱片封裝時的溢膠則需由基板四周側的檢查得知。In general, the substrate processing process in general electronic components usually requires quality inspection. These inspections have different requirements depending on the process, but usually need to be assisted by a transport device so that the inspection process can be performed in an automated manner; As an example, there is a substrate with a chip and a heat sink over it. As the current packaging process is prevalent with BGA (Ball Grid Array) packaging, such packaged substrates must usually be inspected on the reverse side ( Bottom) The leakage of copper (also called bottom leakage copper) of the solder ball solder joints must also be checked whether the heat sink above the substrate (front side) is scratched, and the specifications are not damaged. In addition, the overflow of glue when the heat sink is packaged needs to be checked. It is known from the inspection of the peripheral side of the substrate.
這些基板在進行檢查時,常複數個以矩陣方式排列置於一載盤中複數個定位區間中,每一個基板在一個定位區間中以散熱片朝上置放著,以便於整個載盤搬送及定位;載盤上盤面、下盤面在同一位置分別各設有對應之定位區間,故複數個載盤間可相互上、下堆疊、定位。When these substrates are inspected, a plurality of substrates are often arranged in a matrix and placed in a plurality of positioning sections in a carrier disk. Each substrate is placed in a positioning section with a heat sink facing upwards to facilitate the entire carrier disk transportation and Positioning: The upper and lower surfaces of the carrier disks are respectively provided with corresponding positioning sections at the same position, so a plurality of carrier disks can be stacked and positioned on each other.
先前技術中,在進行檢查時,常以人工方式逐一將載盤中基板取出置於顯微鏡下進行檢查,然而在大量檢查需求中,採自動化為必然趨勢,如何在進行檢查時於一機台上有效而妥善規劃基板的搬送及提供檢查的功能,以提高檢查效率及降低成本、節省廠房空間,乃為值得研究的重要課題;惟為求基板各面可在一機台上作檢查,完成正面檢查後的基板必須能作翻轉以進行反面檢查,現行進行翻轉的機構大致僅考慮尚未切割的整片基板以吸附基板表面方式進行翻轉,該種翻轉方式未考慮吸附或夾持基板表面所造成的刮傷問題,同時也無法適用於已完成切割後基板的檢查,因切割後基板通常複數個以矩陣方式排列置於一載盤中複數個定位區間中,翻轉的機構必需同時翻轉載盤,無法逐一單獨吸附基板翻轉;亦有翻轉的機構採以一端轉軸配合橫設的二上下夾板進行載盤翻轉者,惟其機構複雜且翻轉時力矩過大,易使載盤中基板被拋傷。In the prior art, during the inspection, the substrates in the carrier tray were often taken out one by one under the microscope for inspection. However, in a large number of inspection requirements, automation is an inevitable trend. How to perform inspection on a machine Effective and proper planning of substrate transfer and inspection functions to improve inspection efficiency, reduce costs, and save plant space are important topics worthy of study; but to ensure that all sides of the substrate can be inspected on one machine, the front is completed The inspected substrate must be able to be reversed for reverse inspection. The current mechanism for reversing generally only considers the uncut whole substrate to be inverted by adsorbing the surface of the substrate. This type of inversion does not take into account the problem caused by the adsorption or clamping of the substrate surface. The scratch problem is also not applicable to the inspection of the substrate after cutting. Because the substrate after cutting is usually arranged in a matrix and placed in a plurality of positioning sections in a carrier plate, the reversing mechanism must turn the carrier plate at the same time. Separate substrates are individually flipped one by one; there are also flipping mechanisms that use one end of the shaft to cooperate with the two up and down Platen plate tumblers, although its torque is too large and complicated reversing mechanism, substrates are easy to cast the carrier disc injury.
爰是,本發明的目的,在於提供一種可以將待檢查元件在搬送中進行翻轉之翻轉機構。That is, an object of the present invention is to provide a reversing mechanism capable of reversing a component to be inspected during transportation.
本發明的另一目的,在於提供一種使用該翻轉機構之檢查方法及裝置。Another object of the present invention is to provide an inspection method and device using the turning mechanism.
本發明的又一目的,在於提供一種使用該翻轉機構之檢查裝置。Another object of the present invention is to provide an inspection device using the turning mechanism.
依據本發明目的之翻轉機構,包括:一可受驅動件作Z軸向上、下位移、Y軸向左、右位移及以一轉軸為軸心受驅動件驅動作對稱性旋轉的翻轉座。The turning mechanism according to the purpose of the present invention includes: a turning seat capable of being driven by the driving member for Z-axis upward and downward displacement, Y-axis left and right displacement, and a rotation shaft driven by the driving member for symmetrical rotation.
依據本發明目的之另一翻轉機構,包括:一可受驅動件作Z軸向上、下位移、Y軸向左、右位移及以一轉軸為軸心受驅動件驅動作旋轉的翻轉座,該翻轉座具有一框體,框體內部具有鏤空狀操作區間。Another turning mechanism according to the purpose of the present invention includes: a turning base capable of being driven by the driving member for Z-axis upward and downward displacement, Y-axis left and right displacement, and driven by the driving member for rotation with a rotation axis as an axis. The flip base has a frame body, and the frame body has a hollow operating section inside.
依據本發明另一目的之檢查方法,使用如所述翻轉機構,包括:提供一載盤,盛載待檢查元件;使載盤被一第一搬送裝置搬送至一第一載台受一第一檢視單元進行檢查;檢查後被第一搬送裝置搬送至一第二載台;以該翻轉機構將第二載台上載盤保持並翻轉至一第二搬送裝置的一第三載台;使第三載台上的載盤搬送至一第四載台上被一第二檢視單元進行檢查。According to the inspection method of another object of the present invention, the use of the turning mechanism as described above includes: providing a carrier disc for holding the component to be inspected; and transferring the carrier disc to a first carrier by a first carrying device to receive a first The inspection unit performs inspection; after the inspection, it is transported to a second carrier by the first conveying device; the second carrier is held and turned over by a reversing mechanism to a third carrier of a second conveying device; The carrier disk on the carrier platform is transferred to a fourth carrier platform for inspection by a second inspection unit.
依據本發明又一目的之檢查裝置,使用如所述翻轉機構,包括: 一第一搬送裝置,形成一搬送載盤之傳送流路,設有一第一載台及一第二載台;一第一檢視單元,位於該第一載台上方,設有由上往下檢視之鏡頭; 一第二搬送裝置,形成一搬送載盤之傳送流路,設有一第三載台及一第四載台;一第二檢視單元,位於該第四載台上方,設有由上往下檢視之鏡頭; 該翻轉機構的翻轉座可受驅動位移於第一搬送裝置、第二搬送裝置間並進行翻轉。An inspection device according to another object of the present invention, using the turning mechanism as described, includes: a first conveying device forming a conveying flow path of a conveying tray, provided with a first stage and a second stage; An inspection unit, which is located above the first carrier, is provided with a lens for viewing from top to bottom; a second conveying device forms a conveying flow path for conveying a carrier disk, and is provided with a third carrier and a fourth carrier A second viewing unit, which is located above the fourth carrier and is provided with a lens for viewing from top to bottom; the turning base of the turning mechanism can be driven to move between the first transfer device and the second transfer device and flip.
本發明實施例翻轉機構及使用該翻轉機構之檢查方法及裝置,由於翻轉機構的翻轉座以一轉軸為軸心受驅動件驅動作對稱性旋轉,故翻轉時力矩小,載盤中基板不易被拋傷;且翻轉座具有一框體,框體內部具有鏤空狀操作區間,載盤以周緣被保持於框體中,不論使用於本實施例或一般未切割之基板,皆不易使基板被刮傷;而將該翻轉機構應用於基板之檢查,該第一搬送裝置、翻轉機構、第二搬送裝置、移載機構、第三搬送裝置循序將載盤傳送,故可在整個傳送流路中完成基板的反、正、四周側面等六面檢查;並藉由翻轉機構的第一保持組件、第二保持組件之對抵或對夾轉換,使基板順利轉換於二載盤間並被穩定輸送;同時配合第一搬送裝置之供料機構、第二搬送裝置之收料機構、第三搬送裝置之供料機構及收料機構之設計,使載盤可順利的供、收,甚至作盛載不同規格基板之載盤的分別供、收,其所獲得的檢查、輸送效益確大幅提昇產能效率。The turning mechanism of the embodiment of the present invention and the inspection method and device using the turning mechanism. Since the turning base of the turning mechanism is driven by a driving member for symmetrical rotation with a rotation axis as an axis, the torque is small during the turning and the substrate in the carrier is not easily damaged. There is a damage; and the flip base has a frame body with a hollow operating section inside the frame. The carrier is held in the frame body by the periphery. It is not easy to scratch the substrate whether it is used in this embodiment or a generally uncut substrate. The flip mechanism is applied to the inspection of the substrate. The first transfer device, the flip mechanism, the second transfer device, the transfer mechanism, and the third transfer device sequentially transfer the carrier disc, so it can be completed in the entire transfer flow path. The substrate is inspected on the six sides including the reverse, front, and sides of the substrate; and the substrate is smoothly transferred between the two carrier trays and stably conveyed by the first holding component and the second holding component of the turning mechanism, or the clamping conversion. At the same time, with the design of the feeding mechanism of the first conveying device, the receiving mechanism of the second conveying device, and the feeding mechanism and receiving mechanism of the third conveying device, the tray can be smoothly supplied and received. Even for the filled carrier substrate carrying tray of different specifications are for close inspection of which it is obtained, the conveying efficiency greatly enhance the production efficiency is determined.
請參閱圖1〜3,本發明實施例在進行搬送時,採用一載盤A,該載盤A大致呈一長方形之盤狀,其四個側邊之周緣設有朝上凸設之框緣A1,並在兩側長側邊之框緣A1上以相隔間距設有二微凹之扣緣A2,及在兩側短側邊之框緣A1外分別各設有一外凸之扣肋A3,框緣A1內設有一平設之盤面A4,並在盤面A4上以矩陣排列複數組凸設的定位部A5,每一組定位部A5分別各提供一可供置放基板B等之待檢查元件的定位區間A51,各基板B呈矩陣排列;該基板B可為採BGA方式已植設晶片及散熱片者,其置於載盤A中時,採散熱片朝上方式,該散熱片上表面為正面,基板B下方表面為反面。Please refer to FIGS. 1 to 3. In the embodiment of the present invention, when carrying, a carrier plate A is used. The carrier plate A is substantially a rectangular disk shape, and the edges of the four sides are provided with frame edges protruding upward. A1, and two slightly concave buckle edges A2 are provided on the frame edge A1 of the long side of the two sides at an interval, and a convex buckle rib A3 is provided outside the frame edge A1 of the short side of the two sides, A flat disk surface A4 is provided in the frame edge A1, and a plurality of positioning portions A5 convexly arranged in a matrix are arranged on the disk surface A4. Each group of positioning portions A5 respectively provides a component to be inspected, such as a substrate B, etc. In the positioning interval A51, the substrates B are arranged in a matrix. The substrate B may be a BGA-type wafer and a heat sink that have been planted. When it is placed in the carrier A, the heat sink faces upward. The upper surface of the heat sink is The front surface and the lower surface of the substrate B are the reverse surfaces.
請參閱圖2、4〜5,本發明實施例可以圖中之裝置實施例來說明,該裝置可適用分別載有二種不同規格基板B之二種載盤A同時置入裝置中,依序分別進行檢查,該裝置包括: 一第一搬送裝置C,設於一機台台面Y上,呈X軸向設置並偏靠機台台面Y一側邊Y1,該第一搬送裝置C包括相互對設的第一軌道C1及第二軌道C2,第一軌道C1搬送起點設有一供料機構C3,該供料機構C3層層疊置載有反面朝上基板B之載盤A,並由上往下對第一軌道C1逐件供應所述載盤A;第二軌道C2中設有相隔間距且分別各設於定位但可作Z軸向上下昇降的第一載台C21、第二載台C22,及可受驅動用以進行輸送形成傳送流路的皮帶C23;其中,第二載台C22鄰靠該第二軌道C2輸送終點並設有夾持機構C221;待檢查元件之基板B以反面朝上置於載盤A並由供料機構C3經第一軌道C1往第二軌道C2輸送; 一第二搬送裝置D,與第一搬送裝置C平行且相隔間距倂設於機台台面Y上,呈X軸向設置並位於相對機台台面Y之側邊Y1的第一搬送裝置C另一側,該第二搬送裝置D包括相互對設的第三軌道D1及第四軌道D2,第四軌道D2輸送終點設有一收料機構D3,該收料機構D3用以收集完成檢查載有正面朝上基板B良品之載盤A,並由下往上自第四軌道D2逐件承收所述載盤A作層層疊置;第三軌道D1中設有相隔間距且分別各設於定位但可作Z軸向上下昇降的第三載台D11、第四載台D12,及可受驅動用以進行輸送形成傳送流路的皮帶D13,第四軌道D2中設有可作Z軸向上下昇降的第五載台D22,其位於一第四軌道D2中下方軌座D21上可受驅動作X軸向位移並設有一夾持機構D221;其中,第三載台D11鄰靠該第三軌道D1輸送起點並設有一夾持機構D111,待檢查元件之基板B以正面朝上置於載盤A並由第三軌道D1經第四軌道D2往收料機構D3輸送; 一翻轉機構E,設於機台台面Y上,位於第一搬送裝置C之第二軌道C2輸送終點外,及第二搬送裝置D之第三軌道D1輸送起點外,其設有一可受驅動件E1作Z軸向上、下位移、Y軸向左、右位移及以一X軸向轉軸E2為軸心受驅動件E3驅動作對稱性旋轉的翻轉座E4,其設於一立設之機座E5上,該機座E5設於一Y軸向軌座E6 並受驅動件E7驅動而在軌座E6上作Y軸向位移,使翻轉座E4可反復位移於第一搬送裝置C之第二軌道C2與第二搬送裝置D之第三軌道D1之間上方; 一第一檢查機構F,位於機台台面Y上,設有以一Y軸向橫設於第一搬送裝置C的第二軌道C2及第二搬送裝置D的第三軌道D1上方的第一軌座F1,第一軌座F1兩端分別設於相併設的第一搬送裝置C、第二搬送裝置D兩外側所架高平行設置的X軸向第二軌座F2、第三軌座F3上,第一軌座F1可在第二軌座F2、第三軌座F3上受驅動作X軸向位移;第一軌座F1上設有可受驅動作Z軸向位移的第一檢視單元F11,其可獨立受驅動在第一軌座F1上作Y軸向位移,並對下方被輸送至第一搬送裝置C之第二軌道C2中第一載台C21上載盤A以反面朝上放置之待檢查元件基板B的上表面進行檢查,該第一檢視單元F11設有一由上往下進行檢視之CCD鏡頭;第一軌座F1上另設有可受驅動作Z軸向位移的第二檢視單元F12,其可獨立受驅動在第一軌座F1上作Y軸向位移,並對下方被輸送至第二搬送裝置D之第三軌道D1中第四載台D12上載盤A以正面朝上放置之待檢查元件基板B進行上表面檢查,該第二檢視單元F12設有一由上往下進行檢視之CCD鏡頭; 一第三搬送裝置G,其傳送流路與第一搬送裝置C、第二搬送裝置D的傳送流路相互平行且相隔間距倂設於機台台面Y上,且呈X軸向設置並位於偏靠相對機台台面Y之側邊Y1的另一側機台台面Y之側邊Y2,該第三搬送裝置G包括相互對設的第五軌道G1及第六軌道G2,第五軌道G1上設有一供料機構G3,該供料機構G3由上往下對第五軌道G1供應空載盤A,第六軌道G2輸送終點設有一收料機構G4,該收料機構G4由下往上自第六軌道G2回收經檢測為不良品而撿置其上之正面朝上待檢查元件基板B的載盤A;第六軌道G2中設有可作Z軸向上下昇降且位於一第六軌道G2中下方軌座G21上可受驅動作X軸向位移的第六載台G5,第六載台G5在Y軸向位置對應第二搬送裝置D之第四軌道D2中第五載台D22並設有夾持機構G51,空載盤A由第五軌道G1經第六軌道G2往收料機構G4輸送; 一第二檢查機構H,設有一第三檢視單元H1及一第四檢視單元H2,其在X軸向相隔間距設置於機台台面Y上,並位於第二搬送裝置D之第四軌道D2與第三搬送裝置G之第六軌道G2間,其分別各設有由下往上進行檢視之CCD鏡頭,用以對待檢查元件基板B之四周側面進行檢視; 一移載機構K,設有相向、相互平行並設於機台台面Y上的第一移載軌座K1、第二移載軌座K2,該第一移載軌座K1、第二移載軌座K2分別各被架高呈Y軸向設置,其傳送流路與第一搬送裝置C、第二搬送裝置D的傳送流路相互垂直;第一移載軌座K1上設有可受驅動作Y軸向及Z軸向位移的第一提取組件K11,第一提取組件K2可被驅動在第一移載軌座K1上移送於第二搬送裝置D之第四軌道D2中第五載台D22、第二檢查機構H的第三檢視單元H1及第三搬送裝置G之第六軌道G2的第六載台G5間;第二移載軌座K2設有可受驅動作Y軸向及Z軸向位移的第二提取組件K21,第二提取組件K21可被驅動移送於第二搬送裝置D之第四軌道D2中第五載台D22、第二檢查機構H之第四檢視單元H2及第三搬送裝置G之第六軌道G2的第六載台G5間。Please refer to FIGS. 2, 4 to 5. The embodiment of the present invention can be illustrated by the device embodiment in the figure. The device can be applied to two kinds of carrier disks A carrying two different specifications of substrates B and simultaneously placed in the device. The inspection is performed separately. The device includes: a first conveying device C, which is arranged on a table surface Y, is arranged in the X-axis direction and is biased against the side Y1 of the table surface Y. The first conveying device C includes The first track C1 and the second track C2 are set, and the starting point of the first track C1 is provided with a feeding mechanism C3. The feeding mechanism C3 is stacked on top of the carrier tray A with the substrate B facing upward, and from top to bottom. The carrier A is supplied to the first track C1 one by one; the second track C2 is provided with a first carrier C21 and a second carrier C22 spaced apart from each other and positioned respectively, but capable of vertical movement in the Z axis. And a belt C23 that can be driven to form a conveying flow path; wherein, the second stage C22 is adjacent to the end of the second track C2 and is provided with a clamping mechanism C221; the substrate B of the component to be inspected faces upward It is placed on the carrier tray A and transported by the feeding mechanism C3 via the first track C1 to the second track C2; D, which is parallel to the first conveying device C and is spaced apart from each other on the table surface Y. It is arranged in the X-axis direction and is located on the other side of the first conveying device C opposite to the side Y1 of the table surface Y. The second conveying device D includes a third track D1 and a fourth track D2 which are opposite to each other. A delivery mechanism D3 is provided at the end point of the fourth track D2. The receiving mechanism D3 is used to collect and inspect the good products bearing the substrate B facing up. The carrier A is received from the fourth track D2 from the bottom to the top, and the carrier A is stacked one by one; the third track D1 is provided with a spaced apart space and is located in each position but can be used in the Z axis. A third carrier D11, a fourth carrier D12, and a belt D13 that can be driven to form a conveying flow path while being moved up and down. A fourth carrier D2 is provided with a fifth carrier that can move up and down in the Z axis. D22, which is located on a lower rail base D21 of a fourth rail D2 and can be driven for X-axis displacement and is provided with a clamping mechanism D221; wherein the third carrier D11 is adjacent to the starting point of the third rail D1 and is provided with a The clamping mechanism D111, the substrate B of the component to be inspected is placed on the tray A with the front side facing up, and the third track D1 passes the fourth track D2 is conveyed to the receiving mechanism D3; a turning mechanism E is provided on the machine table Y, outside the end of the second track C2 of the first conveying device C, and outside the start point of the third track D1 of the second conveying device D It is provided with a turning seat E4 which can be driven by the driving member E1 for Z-axis upward and downward displacement, Y-axis left and right displacement, and an X-axis rotation axis E2 as the axis and driven by the driving member E3 for symmetrical rotation. It is set on a stand E5, which is set on a Y-axis rail E6 and driven by a driver E7 to make Y-axis displacement on the rail base E6, so that the flip base E4 can be repeatedly displaced on Above the second track C2 of the first conveying device C and the third track D1 of the second conveying device D; a first inspection mechanism F, which is located on the machine table Y, and is provided with a Y-axis transversely arranged on the first The first track base F1 above the second track C2 of the first conveying device C and the third track D1 of the second conveying device D, and the two ends of the first track base F1 are respectively arranged next to each other in the first conveying device C and the second conveying device. On the X-axis second rail base F2 and the third rail base F3, which are arranged in parallel on both sides of the device D, the first rail base F1 can be on the second rail base F2 and the third rail base. The first track base F1 is provided with a first viewing unit F11 that can be driven for Z-axis displacement, and can be driven independently for the Y-axis direction on the first track base F1. The first inspection unit F11, and inspect the upper surface of the component substrate B to be inspected placed on the first stage C21 on the second track C2 of the first conveying device C below the first carrier C21 and the tray A facing upward. A CCD lens for inspection from top to bottom is provided; a second inspection unit F12 which can be driven for Z-axis displacement is additionally provided on the first track base F1, which can be driven independently as Y on the first track base F1 Axial displacement and upper surface inspection of the component substrate B to be inspected placed on the fourth stage D12 on the third track D1 of the second conveying device D and the loading plate A placed on the front side facing upward, the second inspection unit F12 is provided with a CCD lens for viewing from top to bottom; a third conveying device G, the conveying flow path of which is parallel to the conveying flow path of the first conveying device C and the second conveying device D and is arranged on the machine at a distance from each other; On the table surface Y, which is arranged in the X-axis direction and is located on the side Y1 opposite to the table surface Y of the machine The other side Y2 of the machine table Y on the other side, the third conveying device G includes a fifth track G1 and a sixth track G2 opposite to each other. The fifth track G1 is provided with a feeding mechanism G3, and the feeding mechanism G3 An empty tray A is supplied to the fifth track G1 from the top to the bottom, and a receiving mechanism G4 is provided at the end point of the sixth track G2. The receiving mechanism G4 collects from the sixth track G2 from the bottom to the top and collects it as a defective product. Carrier disk A with the front side facing upward of the substrate B of the component to be inspected; the sixth track G2 is provided with a Z axis that can be raised and lowered vertically and located on a lower rail seat G21 in a sixth track G2 and can be driven as an X axis The sixth stage G5, which is displaced in the Y direction, corresponds to the fifth stage D22 in the fourth track D2 of the second conveying device D, and is provided with a clamping mechanism G51. The five tracks G1 are conveyed to the receiving mechanism G4 via the sixth track G2. A second inspection mechanism H is provided with a third inspection unit H1 and a fourth inspection unit H2, which are arranged on the table surface Y at a distance in the X axis. And is located between the fourth track D2 of the second conveying device D and the sixth track G2 of the third conveying device G, each of which is provided from bottom to top The inspection CCD lens is used to inspect the sides of the substrate B to be inspected. A transfer mechanism K is provided with a first transfer rail base K1, which is opposite to each other and is arranged on the table surface Y of the machine. The transfer rail base K2, the first transfer rail base K1, and the second transfer rail base K2 are respectively arranged in the Y-axis direction, and the conveying flow path is the same as that of the first transfer device C and the second transfer device D. The transfer flow paths are perpendicular to each other; the first transfer module K1 is provided with a first extraction module K11 which can be driven for Y-axis and Z-axis displacement, and the first extraction module K2 can be driven on the first transfer module K1 is transferred between the fifth stage D22 in the fourth track D2 of the second transfer device D, the third inspection unit H1 in the second inspection mechanism H, and the sixth stage G5 in the sixth track G2 of the third transfer device G. ; The second transfer rail base K2 is provided with a second extraction component K21 that can be driven for Y-axis and Z-axis displacement, and the second extraction component K21 can be driven and transferred to the fourth track D2 of the second transfer device D The fifth stage D22, the fourth inspection unit H2 of the second inspection mechanism H, and the sixth stage G5 of the sixth track G2 of the third conveying device G.
請參閱圖4、6〜7,該第一搬送裝置C的第一軌道C1係在一座板C11上設有二相隔間距並相互平行的架高側架C12,二側架C12相對應之內側分別設有受驅動的皮帶C13,該皮帶C13形成所述輸送載盤A的傳送流路,二側架C12間的一端下方座板C11上設有一鏤空的工作區間C111;所述供料機構C3與第三搬送裝置G中第五軌道G1上供料機構G3相同,茲以供料機構C3作說明,供料機構G3同理可推,茲不贅述,該供料機構C3包括一載料架C31及一昇降架C32;其中, 該載料架C31包括一設有可供載盤A移經之長方形鏤空移載區間C311的載座C312,該移載區間C311與工作區間C111上、下對應;載座C312下方兩側分別各設有可跨設於第一軌道C1二側架C12兩外側之側座C313,使載座C312被架高於第一軌道C1二側架C12上方一間距高度;該移載區間C311外的四角落處分別於載座C312上各設有角架桿C314,在載座C312下方設有由四個可受驅動作前後凸伸或縮入之卡掣件C3151所組成的第一嵌抵組件C315,其在長方形鏤空移載區間C311二長側邊外的二角架桿C314間分別各設有二個卡掣件C3151;在載座C312上方設有由四個被立架C3161距離載座C312一間距下架高的可受驅動作前後凸伸或縮入之卡掣件C3162所組成的第二嵌抵組件C316,其在長方形鏤空移載區間C311二長側邊外的二角架桿C314間分別各設有二個卡掣件C3162;該第一嵌抵組件C315與第二嵌抵組件C316間供疊置第一種規格的載有反面朝上基板B之載盤A,該第二嵌抵組件C316上方供疊置第二種規格的載有反面朝上基板B之載盤A; 該昇降架C32包括一固定架C321及一移動架C322所組成;該固定架C321由上固定座C3211、下固定座C3212及其間複數支撐桿C3213組成,並以上固定座C3211設於該第一軌道C1的座板C11下方;上固定座C3211、下固定座C3212間設有一長條狀定位件C3214,其上設有分別設於上、下兩定位之感應器C3215;該移動架C322由位於上固定座C3211上方的上撐座C3221、位於上固定座C3211下方並位於各支撐桿C3213間的驅動座C3222及其間複數支撐桿C3223組成;該上撐座C3221設有二個並相隔間距,每一個上撐座C3221各位於二支撐桿C3223上端;該驅動座C3222受一驅動件C3224所驅動的螺桿C3225作用,可作上下位移並藉支撐桿C3223連動上撐座C3221上下位移進出移載區間C311與工作區間C111;驅動座C3222一側設有一感應片C3226可受該感應器C3215感應。Please refer to FIGS. 4 and 6 to 7. The first track C1 of the first conveying device C is provided with two elevated side frames C12 spaced apart and parallel to each other on a plate C11, and the inner sides corresponding to the two side frames C12 are respectively A driven belt C13 is provided. The belt C13 forms the conveying flow path of the conveying tray A. A hollow working section C111 is provided on the seat plate C11 below one end between the two side frames C12; the feeding mechanism C3 and The feeding mechanism G3 on the fifth track G1 in the third conveying device G is the same, and the feeding mechanism C3 will be described here. The feeding mechanism G3 can be pushed for the same reason, and will not be repeated. The feeding mechanism C3 includes a carrier C31. And a lifting frame C32; wherein the carrier C31 includes a carrier C312 provided with a rectangular hollow-out transfer section C311 through which the tray A can be moved, and the transfer section C311 corresponds to the upper and lower working sections C111; Sides C313 on both sides below the carrier C312 can be placed on the two outer sides of the first rail C1 two side frame C12, so that the carrier C312 is racked higher than the first rail C1 two side frame C12 by a space height; Four corners outside the transfer section C311 are respectively provided with angle bracket rods C314 on the carrier C312, and the carrier C312 A first engaging component C315 is composed of four engaging members C3151 which can be driven to protrude or retract in the front and back. The corner frame rod C314 is located outside the two long sides of the rectangular hollow transfer area C311. There are two latches C3151 each in the space. Above the base C312, there are four latches C3161, which are lower than the base C312 by a distance, which can be driven to project forward or backward. The second indentation component C316 composed of C3162 is provided with two latching members C3162 between the two corner frames C314 outside the two long sides of the rectangular hollow transfer area C311; the first indentation component C315 and The second mating component C316 is used for stacking the carrier plate A of the first specification carrying the substrate B facing upward, and the second mating component C316 is used for stacking the second specification of the carrier plate B facing the upwardly facing substrate B. Carrying plate A; The lifting frame C32 includes a fixed frame C321 and a moving frame C322. The fixed frame C321 is composed of an upper fixed seat C3211, a lower fixed seat C3212 and a plurality of supporting rods C3213, and the upper fixed seat C3211 is provided. Located below the seat plate C11 of the first track C1; between the upper fixing seat C3211 and the lower fixing seat C3212 A long-shaped positioning member C3214 is provided with sensors C3215 provided on the upper and lower positions respectively; the moving frame C322 is formed by an upper support C3221 located above the upper fixed base C3211 and located below the upper fixed base C3211 and located at each The support base C3222 between the support rods C3213 and a plurality of support rods C3223 are formed; the upper support base C3221 is provided with two spaced apart, each upper support base C3221 is located at the upper end of the two support bases C3223; the drive base C3222 is driven by one The screw C3225 driven by the piece C3224 can be moved up and down and can be moved up and down by the support rod C3223 to move up and down into the transfer zone C311 and the work zone C111. A sensor piece C3226 on the side of the drive base C3222 can be received by the sensor C3215 induction.
請參閱圖2、8〜10,該第一嵌抵組件C315與第二嵌抵組件C316間疊置的第一種規格載有反面朝上基板B之載盤A,其下方受凸伸的第一嵌抵組件C315所阻抵而定位在第一嵌抵組件C3152的卡掣件C3151上方(圖8);當欲作入料於第一軌道C1時,昇降架C32被驅動上移以上撐座C3221抵於載有反面朝上基板B之載盤A下方,第一嵌抵組件C315的卡掣件C3151被驅動縮入,使載盤A循載座C312下方兩側分別各設的導引件C317間之限制區間落置於上撐座C3221上(圖9);第一嵌抵組件C315的卡掣件C3151被驅動凸伸以限制其上方載盤A不致續落,昇降架C32被驅動下移以上撐座C3221將載盤A降至二側架C12相對應內側皮帶C13上,使載盤A受第一軌道C1之該皮帶C13所形成的傳送流路進行輸送(圖10);若係第一種規格載有反面朝上基板B之載盤A欲作入料於第一軌道C1時,則同理方式執行;在本實施例中,第一種規格載有反面朝上基板B之載盤A將被優先執行完後再執行第二種規格載有反面朝上基板B之載盤A入料檢查作業。Please refer to FIGS. 2, 8 to 10. The first specification of the first mating component C315 and the second mating component C316 is superimposed on the carrier plate A with the substrate B facing upwards. An engagement component C315 resists and is positioned above the latch C3151 of the first engagement component C3152 (Figure 8); when it is intended to feed into the first track C1, the lifting frame C32 is driven upward to move above the support C3221 abuts under the carrier plate A carrying the substrate B with the reverse side facing upward, and the latching member C3151 of the first engaging member C315 is driven and retracted, so that the carrier plate A follows the guides provided on both sides below the carrier seat C312, respectively. The restricted section between C317 is placed on the upper support C3221 (Fig. 9); the latch C3151 of the first engaging member C315 is driven to protrude to limit the carrier A above it from falling, and the lifter C32 is driven. Move the upper support C3221 to lower the carrier A to the inner belt C13 corresponding to the side frame C12, so that the carrier A is transported by the conveying flow path formed by the belt C13 of the first track C1 (Figure 10); When the carrier A of the first specification carrying the substrate B with the reverse side facing up is intended to be fed into the first track C1, the same method is implemented; in this embodiment, the first specification There tails disc substrate B are set to A is executed after completion of the second specification takes precedence containing tails of the substrate carrier plate B A feeding and inspection work.
請參閱圖11〜12,該第二搬送裝置D之第四軌道D2及收料機構D3與第三搬送裝置G之第六軌道G2及收料機構G4相同,茲以第二搬送裝置D之第四軌道D2及收料機構D3作說明,第六軌道G2及收料機構G4同理可推,茲不贅述; 該第二搬送裝置D之第四軌道D2包括在一座板D23上設有二相隔間距並相互平行的架高側架D24,二側架D24相對應之內側分別設有受驅動的皮帶D25,該皮帶D25形成所述輸送載盤A的傳送流路,二側架D24間的一端下方座板D23上設有一鏤空的工作區間D231;該設有夾持機構D221並位於軌座D21上可作Z軸向上下昇降的第五載台D22係位於二側架D24間,並於一側對應該第五載台D22的側架D24上設有迫推機構D26,以迫推移至第五載台D22上的載盤A朝一側之側架D24偏靠定位; 該收料機構D3包括一載料架D31及一昇降架D32;其中,該載料架D31包括一設有可供載盤A移經之長方形鏤空移載區間D311的載座D312,該移載區間D311與工作區間D231上、下對應;載座D312下方兩側分別各設有可跨設於第四軌道D2二側架D24兩外側之側座D313,使載座D312被架高於第四軌道D2二側架D24上方一間距高度;該移載區間D311外的四角落處分別於載座D312上各設有角架桿D314,在載座D312上表面上設有由四個可由下往上旋撥或受彈性(或重力作用)回復呈水平定位之卡掣件D3151所組成的第一嵌抵組件D315,其在長方形鏤空移載區間D311二長側邊外的二角架桿D314間分別各設有二個卡掣件D3151;在第一嵌抵組件D315上方設有由四個被立座D3161距離第一嵌抵組件D315一上下間距下架高的由四個可由下往上旋撥或受彈性(或重力作用)回復呈水平定位之卡掣件D3162所組成的第二嵌抵組件D316,其在長方形鏤空移載區間D311二長側邊外的二角架桿D314間分別各設有二個卡掣件D3162;其中,該第二嵌抵組件D316上方供疊置第一種規格的載有正面朝上被檢查為良品的基板B之載盤A,第一嵌抵組件D315與第二嵌抵組件D316間供疊置第二種規格的載有正面朝上被檢查為良品的基板B之載盤A; 該昇降架D32包括一固定架D321及一移動架D322所組成;該固定架D321由上固定座D3211、下固定座D3212及其間複數支撐桿D3213組成,並以上固定座D3211設於該第四軌道D2的座板D23下方;上固定座C3211、下固定座C3212間設有一長條狀定位件D3214,其上設有分別設於上、下兩定位之感應器D3215;該移動架D322由位於上固定座D3211上方的上撐座D3221、位於上固定座D3211下方並位於各支撐桿D3213間的驅動座D3222及其間複數支撐桿D3223組成;該驅動座D3222受一驅動件D3224所驅動的螺桿D3225作用,可作上下位移並藉支撐桿D3223連動上撐座D3221上下位移進出移載區間D311與工作區間D111;驅動座D3222一側設有一感應片D3226可受該感應器D3215感應。Please refer to FIGS. 11 to 12. The fourth track D2 and the receiving mechanism D3 of the second conveying device D are the same as the sixth track G2 and the receiving mechanism G4 of the third conveying device G. The four tracks D2 and the receiving mechanism D3 will be described. The sixth track G2 and the receiving mechanism G4 can be pushed in the same way, and will not be repeated. The fourth track D2 of the second conveying device D includes two plates on a plate D23. Elevated side frames D24 spaced and parallel to each other, and corresponding inner sides of the two side frames D24 are respectively provided with driven belts D25. The belts D25 form the conveying flow path of the carrying tray A, and one end between the two side frames D24 The lower seat plate D23 is provided with a hollow working section D231; the fifth carrier D22, which is provided with a clamping mechanism D221 and is located on the rail seat D21, can be raised and lowered in the Z axis, is located between the two side frames D24, and The side frame D24 corresponding to the fifth carrier D22 is provided with a pushing mechanism D26 to force the carrier A on the fifth carrier D22 to be biased toward the side frame D24 on one side; the receiving mechanism D3 includes A loading rack D31 and a lifting rack D32; wherein, the loading rack D31 includes a rectangular opening with a tray A through which it can be moved. The carrier D312 in the transfer interval D311 corresponds to the upper and lower parts of the work interval D231. The lower sides of the carrier D312 are respectively provided with side seats that can span the two outer sides of the two side frames D24 of the fourth track D2. D313, make the carrier D312 be higher than the fourth track D2 two side frames D24 above a space height; four corners outside the transfer interval D311 are provided on the carrier D312 angle bracket rods D314, respectively, in the carrier The first surface of D312 is provided with a first engaging component D315 composed of four latching pieces D3151 which can be turned downward or upward or restored by elasticity (or gravity action) to be horizontally positioned. Two brackets D3151 are set between the two corner brackets D314 outside the two long sides. Above the first engagement member D315, there are four vertical seats D3161 and an upper and lower distance from the first engagement member D315. A second indentation component D316 consisting of four latching elements D3162 that can be turned down or turned back elastically (or under the action of gravity) to return to a horizontal position, which is lowered in the rack height. It is two long in the rectangular hollow transfer area D311. Each of the two corner bracket rods D314 outside the side is respectively provided with two latching members D3162; The first mating component D316 is used for stacking the first type of carrier plate A carrying the substrate B which has been inspected as a good product facing up. The first mating component D315 and the second mating component D316 are stacked for the second. Carrier tray A carrying a substrate B with the front side being inspected as a good product. The lifting frame D32 includes a fixed frame D321 and a moving frame D322. The fixed frame D321 is composed of an upper fixing base D3211 and a lower fixing base. D3212 and a plurality of supporting rods D3213 are formed, and the upper fixing seat D3211 is located below the seat plate D23 of the fourth track D2; an upper fixing seat C3211, a lower fixing seat C3212 is provided with a long-shaped positioning member D3214, which is provided with The upper and lower positioning sensors D3215 are respectively located; the moving frame D322 is composed of an upper support D3221 located above the upper fixed base D3211, a drive base D3222 located below the upper fixed base D3211 and located between the support rods D3213, and a plurality thereof. Supported by a support rod D3223; the drive block D3222 is driven by a screw D3225 driven by a drive member D3224, which can be moved up and down, and supported by the support rod D3223 to move the upper support D3221 up and down into and out of the transfer section D311 and the work section D111; the drive block D3222 One side A sensor D3226 is provided for sensing by the sensor D3215.
請參閱圖2、13〜15,當第二種規格的載有正面朝上被檢查為良品的基板B之載盤A被第四軌道D2之皮帶D25形成的傳送流路移送至該收料機構D3之載料架D31下方時(圖13),昇降架D32被驅動上移以上撐座D3221抵於載有正面朝上基板B之載盤A下方並承托上移至抵及第一嵌抵組件D315的卡掣件D3151,使卡掣件D3151被由下往上旋撥(圖14),使載盤A上移通過兩側卡掣件D3151後,卡掣件D3151受彈性(或重力作用)回復呈水平定位,昇降架D32被驅動下移使載盤A下移落置於第一嵌抵組件D315的卡掣件D3151上(圖15);若係第一種規格的載有正面朝上被檢查為良品的基板B之載盤A被第四軌道D2之皮帶D25形成的傳送流路移送至該收料機構D3之載料架D31下方,則同理被移送落置第二嵌抵組件D316的卡掣件D3162上方;在本實施例中,第一種規格的載有正面朝上被檢查為良品的基板B之載盤A將被優先執行,故載盤A移送落置第二嵌抵組件D316的卡掣件D3162上方將被先執行。Please refer to FIGS. 2, 13 to 15. When the second type of the carrier plate A carrying the substrate B, which is inspected as a good product facing up, is transferred to the receiving mechanism by the conveying flow path formed by the belt D25 of the fourth track D2. When the loading rack D31 of D3 is below (Fig. 13), the lifting rack D32 is driven upward to move the upper support D3221 under the loading tray A carrying the substrate B facing up and supporting the moving up to the first indentation. The latching piece D3151 of the component D315 causes the latching piece D3151 to be turned from bottom to top (Figure 14), so that the carrier A is moved up through the latching pieces D3151 on both sides, and the latching piece D3151 is subject to elasticity (or gravity). ) Return to the horizontal position, the lifting frame D32 is driven to move down so that the carrier plate A is moved down and placed on the latching member D3151 of the first indentation component D315 (Figure 15); The carrier A of the substrate B that has been inspected as a good product is transported by the conveying flow path formed by the belt D25 of the fourth track D2 to the carrier D31 of the receiving mechanism D3, and is similarly transferred to the second indentation. Above the latch D3162 of the module D316; in this embodiment, the first specification of the carrier plate A carrying the substrate B, which is inspected as a good face up, will be executed first. A transfer platen so that the top of the second insert is set off against the engaging member assembly D316 D3162 will be executed first.
請參閱圖16〜19,該翻轉機構E的翻轉座E4具有一呈長方形的框體E41, 內部具有較載盤A大的長方形鏤空狀操作區間E411,框體E41一側受機座E5上所設感應器E8所感應定位,使框體E41每一次翻轉皆保持在一水平狀態;框體E41兩相對應的短邊側設有一組第一保持組件E42,框體E41兩相對應的長邊側設有二組相隔間距的第二保持組件E43;翻轉座E4上並設有震盪器E44及朝操作區間E411檢測是否有載盤A之感應器E45; 該組第一保持組件E42包括位於鄰靠轉軸E2的框體E41短邊側之第一對抵件E421以及相對轉軸E2的框體E41另一短邊側之第二對抵件E422;其中,第一對抵件E421以二樞桿E4211(圖中未示)樞設於框體E41,並受框體E41下方一驅動件E423作用,以驅動件E423之驅動桿E4231凸伸出力方向,作為向操作區間E411內前抵執行對抵之施力;第二對抵件E422以二樞桿E4221樞設於框體E41,並受框體E41下方一驅動件E424作用,該驅動件E424之驅動桿E4241朝框體E41聯結一連動件E4242,連動件E4242則連動二樞桿E4221,以驅動件E424之驅動桿E4241凸伸出力方向之反向,作為向操作區間E411內前抵執行對抵之施力; 每一組第二保持組件E43各包括位於框體E41一長邊側之第一對夾件E431以及框體E41另一長邊側之第二對夾件E432;其中,第一對夾件E431、第二對夾件E432分別各以二樞桿E433樞設於框體E41,並受框體E41下方一驅動件E434作用,該驅動件E434之驅動桿E435朝框體E41外聯結一連動件E436,連動件E436則連動二樞桿E433,以驅動件E434之驅動桿E435凸伸出力方向之反向,作為向操作區間E411內前抵執行對抵之施力;第一對夾件E431及第二對夾件E432分別各設有可受驅動在一Z軸向滑軌E437上作滑移以進行上下開啟或閉靠之二夾爪E438,二夾爪E438一側並設有一定位件E439,其中,該二夾爪E438前端較定位件E439前端朝操作區間E411前伸。Please refer to FIGS. 16 to 19, the turning base E4 of the turning mechanism E has a rectangular frame E41, and has a rectangular hollow-shaped operating section E411 larger than the carrier plate A. The side of the frame E41 is received by the base E5. The sensor E8 is positioned so that the frame E41 is maintained at a horizontal level each time the frame E41 is turned over. A pair of first holding components E42 are provided on the short sides of the frame E41, and the corresponding long sides of the frame E41 are provided. There are two sets of spaced second holding components E43 on the side; the flip base E4 is provided with an oscillator E44 and a sensor E45 to detect whether there is a disk A toward the operation area E411; the first holding component E42 of this group includes The first pair of contact pieces E421 on the short side of the frame E41 on the rotation axis E2 and the second pair of contact pieces E422 on the other short side of the frame E41 on the rotation axis E2; E4211 (not shown) is pivoted on the frame E41, and is acted by a driving member E423 under the frame E41. The driving rod E4231 of the driving member E423 protrudes in the direction of the protruding force, and is used as a forward push into the operation interval E411 to perform a counteract. The second pair of resisting pieces E422 are pivoted on the frame E41 by two pivot rods E4221, and receive the frame. A driving member E424 under E41 functions. A driving member E4241 of the driving member E424 is connected to a connecting member E4242 toward the frame E41, and the connecting member E4242 is connected to a second pivot rod E4221. The driving rod E4241 of the driving member E424 projects in the opposite direction of the protruding force. The direction is used as a forward force to perform the resistance in the direction of the operation interval E411. Each set of the second holding components E43 includes a first pair of clamps E431 located on one long side of the frame E41 and the other long side of the frame E41. The second pair of clips E432 on the side; among them, the first pair of clips E431 and the second pair of clips E432 are respectively pivoted to the frame E41 with two pivot rods E433, and are acted by a drive member E434 below the frame E41. The driving rod E435 of the driving member E434 is connected with a link E436 to the outside of the frame E41, and the link E436 links the two pivots E433. The driving force of the driving rod E435 of the driving member E434 is opposite to the direction of the protruding force. The inner front is used to perform the opposing force; the first pair of clamps E431 and the second pair of clamps E432 are each provided with a Z-axis slide rail E437 that can be driven to slide up and down or open and close. Two clamping jaws E438, one side of the two clamping jaws E438 is provided with a positioning member E439, wherein the two clamping jaws The front end of the claw E438 extends forward toward the operation section E411 than the front end of the positioning member E439.
請參閱圖20〜21,該組第一保持組件E42之第一對抵件E421以及第二對抵件E422用以對抵載盤A兩側短側邊框緣A1外分別各設之外凸的扣肋A3;請參閱圖22〜23,該二組第二保持組件E43之第一對夾件E431以及第二對夾件E432分別各以二夾爪E437對載盤A兩側長側邊之框緣A1上相隔間距所設二微凹之扣緣A2(參閱圖3)進行上下對夾扣合,且在本實施例中,該二組第二保持組件E43之第一對夾件E431以及第二對夾件E432以同時進行二載盤A之上下對夾扣合為原則。Please refer to FIGS. 20 to 21. The first pair of abutment pieces E421 and the second pair of abutment pieces E422 of the first holding component E42 of the set are respectively provided with convex protrusions on the short side frame edges A1 on both sides of the resisting plate A. Buckle rib A3; please refer to FIGS. 22 to 23, the first pair of clamping members E431 and the second pair of clamping members E432 of the two sets of second retaining components E43 respectively use two clamping jaws E437 to each of the long sides of the two sides of the carrier A Two slightly concave buckle edges A2 (see FIG. 3) provided on the frame edge A1 at a distance from each other are fastened up and down, and in this embodiment, the first pair of clips E431 of the two sets of second retaining components E43 and The second pair of clips E432 is based on the principle of simultaneously performing two upper and lower paired clips of the two carrier plates A.
本發明實施例之電子元件之檢查方法,在實施上包括: 一送空盤步驟,使一空載盤A先由供料機構C3或直接置於第一搬送裝置C的第一軌道C1之皮帶C13被輸送至第二軌道C2中第二載台C22處,並受夾持機構C221夾抵定位,及受第二載台C22頂抵連動上昇至預定高度定位,使翻轉機構E的翻轉座E4移至第二載台C22的空載盤A上方,並下移以第一保持組件E42將空載盤A保持在翻轉座E4中,翻轉座E4再上移待命; 一反面檢查步驟,使載有反面朝上待檢查元件基板B之載盤A由供料機構C3經第一搬送裝置C的第一軌道C1被輸送至第二軌道C2中第一載台C21處,並受第一載台C21頂抵連動上昇至預定高度定位,以受第一檢查機構F的第一檢視單元F11對載盤A中各待檢查元件基板B反面逐一進行漏底銅檢查;檢查完後,第一載台C21連動載盤A下移回復原位,載盤A再受皮帶C13輸送至第二軌道C2中第二載台C22處,並受夾持機構C221夾抵定位; 一翻轉步驟,完成反面檢查步驟的載盤A受第二載台C22頂抵連動上昇至預定高度定位;使翻轉機構E的翻轉座E4移至第二載台C22的上方,並下移以第一保持組件E42之翻轉座E4中原保持的空載盤A置於第二載台C22上的已完成反面檢查步驟的載盤A上方,並在解除第一保持組件E42對抵保持後,改以該二組第二保持組件E43之第一對夾件E431以及第二對夾件E432同時進行二載盤A之上下對夾扣合,將二載盤A保持在翻轉座E4中,翻轉座E4並進行翻轉一百八十度及位移至第二搬送裝置D的第三軌道D1中已上昇至預定高度定位的第三載台D11上方,此時載盤A中原反面朝上的基板B已被翻轉改為正面朝上並改置於原空轉盤A上,並使震盪器E44啟動而令翻轉座E4受震動以連動載盤A中基板B充份落置轉載,翻轉座E4下移將已載有正面朝上待檢查元件基板B且位於下方之轉盤A置於第三載台D11上受夾持機構D111夾持,翻轉座E4並改以第一保持組件E42之第一對抵件E421及第二對抵件E422對抵保持上方已轉載完畢的空載盤A,翻轉座E4並上移反復於第一搬送裝置C與第二搬送裝置D間作前述翻轉作業; 一正面檢查步驟,完成翻轉步驟的載盤A在第三載台D11下降回位後被第二搬送裝置D的第三軌道D1輸送至第四載台D12處,載盤A受第四載台D12頂抵連動上昇至預定高度定位,以受第一檢查機構F的第二檢視單元F12對載盤A中各待檢查元件基板B正面逐一進行散熱片表面檢查;檢查完後,第四載台D12連動載盤A下移回復原位,載盤A再受皮帶D25輸送至第四軌道D2中第五載台D22處,並受夾持機構D221夾抵定位; 一側面檢查步驟,完成正面檢查步驟的載盤A受第五載台D22頂抵連動上昇至預定高度定位,移載機構K的第一提取組件K11、第二提取組件K21分別自載盤A上提取已完成正面檢查的基板B,若該基板B經正、反面檢查後已確定為不良品,則第一提取組件K11、第二提取組件K21將分別經第一移載軌座K1、第二移載軌座K2將該基板B不良品直接移至第三搬送裝置G之第六軌道G2中第六載台G5上之空載盤A上置放;若該基板B經正、反面檢查後已確定為良品,則第一提取組件K11、第二提取組件K21將分別經第一移載軌座K1、第二移載軌座K2將該基板B良品分別移至第二檢查機構H的第三檢視單元H1及第四檢視單元H2進行四周側面之溢膠檢查,基板B檢查後若為良品,則回送於第五載台D22的載盤A中,基板B檢查後若為不良品,則移至第三搬送裝置G之第六軌道G2中第六載台G5之空載盤A上; 一良品收集步驟,完成側面檢查步驟的第五載台D22上盛載基板B良品的載盤A下移回復原位,夾持機構D221解除夾抵定位,載盤A再受皮帶D25輸送至收料機構D3處收集; 一不良品收集步驟,第三搬送裝置G之第五軌道G1上供料機構G3供應空載盤A循第五軌道G1輸送至第六軌道G2之第六載台G5處,並被夾持機構G51夾持定位及受第六載台G5頂抵連動上昇至預定高度定位,完成側面檢查步驟的第六載台G5上盛載基板B不良品的載盤A,隨第六載台G5下移回復原位,並受第六軌道G2輸送至收料機構G4收集。The method for inspecting electronic components according to the embodiment of the present invention includes the following steps: a step of sending an empty tray, so that an empty tray A is first placed by the feeding mechanism C3 or the belt placed directly on the first track C1 of the first conveying device C C13 is transported to the second stage C22 in the second track C2, and is clamped and positioned by the clamping mechanism C221, and is raised to a predetermined height by the second stage C22, so as to position the tilting seat E4 of the tilting mechanism E Move over the empty tray A of the second carrier C22, and move down to hold the empty tray A in the flip base E4 with the first holding component E42, and the flip base E4 moves up again to stand by; a reverse inspection step makes the load The tray A with the substrate B of the component to be inspected facing upward is transported by the feeding mechanism C3 via the first track C1 of the first conveying device C to the first stage C21 in the second track C2, and is received by the first stage C21 rises up to a predetermined height, and is subject to the first inspection unit F11 of the first inspection mechanism F to inspect the bottom copper of each component substrate B to be inspected in the tray A one by one; after the inspection, the first stage C21 moves the carrier plate A down to return to the original position, and the carrier plate A is transported to the second track C2 by the belt C13. At the second carrier C22, it is clamped and positioned by the clamping mechanism C221; During the reversing step, the carrier A, which has completed the reverse inspection step, is raised to the predetermined height by the second carrier C22, and the reversing seat of the reversing mechanism E E4 moves above the second carrier C22, and moves down to the empty carrier A originally held in the reversing seat E4 of the first holding unit E42, and is placed above the carrier A on the second carrier C22 that has completed the reverse inspection step. After the first holding component E42 is released from holding, the first pair of clips E431 and the second pair of clips E432 of the two sets of the second holding component E43 are simultaneously used to fasten the upper and lower clips of the two carriers A. , The second carrier A is held in the turning base E4, the turning base E4 is turned 180 degrees and moved to the third carrier D11 which has been positioned to a predetermined height in the third track D1 of the second conveying device D Above, at this time, the substrate B with the original reverse side facing up in the carrier A has been turned upside down and placed on the original idler A, and the oscillator E44 is activated to cause the flip E4 to be vibrated to link the carrier A The base plate B is fully reprinted, and the flip base E4 is moved down to carry the front side up to be inspected. The turntable A of the substrate B and the lower part is placed on the third stage D11 and clamped by the clamping mechanism D111. The seat E4 is turned over and changed to the first pair of resisting members E421 and the second pair of resisting members E422 of the first holding member E42. Aiming at holding the reloaded empty loader A, the reversing seat E4 is moved upward to repeat the aforementioned reversing operation between the first conveying device C and the second conveying device D; a front inspection step, and the tray A that has completed the reversing step is in the The third carrier D11 is lowered and returned to the fourth carrier D12 by the third track D1 of the second transfer device D, and the carrier A is raised to a predetermined height by the fourth carrier D12 and then moved to a predetermined height for positioning. The second inspection unit F12 of an inspection mechanism F inspects the surface of the heat sink one by one on the front surface of the substrate B of each component to be inspected in the carrier plate A. After the inspection, the fourth carrier D12 moves the carrier plate A down to return to the original position. A is conveyed by the belt D25 to the fifth stage D22 in the fourth track D2, and is clamped and positioned by the clamping mechanism D221. A side inspection step, and the carrier plate A that has completed the front inspection step is abutted by the fifth stage D22. The first extraction component K11 of the transfer mechanism K is moved up to a predetermined height for positioning The second extraction module K21 extracts the substrate B that has been inspected from the front plate A respectively. If the substrate B has been determined to be defective after the front and back inspection, the first extraction module K11 and the second extraction module K21 will be respectively Through the first transfer rail base K1 and the second transfer rail base K2, the defective product of the substrate B is directly moved to the empty tray A on the sixth carrier G5 in the sixth track G2 of the third transfer device G. ; If the substrate B has been determined to be a good product after the front and back inspection, the first extraction component K11 and the second extraction component K21 will pass the first transfer rail base K1 and the second transfer rail base K2 to the substrate B, respectively. The good products are moved to the third inspection unit H1 and the fourth inspection unit H2 of the second inspection mechanism H to perform overflow inspection on the sides of the periphery. If the substrate B is inspected, it will be returned to the carrier disk A of the fifth carrier D22. If the substrate B is defective after inspection, it is moved to the empty tray A of the sixth stage G5 in the sixth track G2 of the third conveying device G; a good product collection step, and the fifth stage of the side inspection step is completed D22, which is a good product of substrate B on D22, moves down to its original position, and the clamping mechanism D221 releases the clamping. Position, the tray A is transported to the receiving mechanism D3 by the belt D25 for collection; a defective product collecting step, the empty tray A is supplied by the feeding mechanism G3 on the fifth track G1 of the third conveying device G to follow the fifth track G1 Go to the sixth carrier G5 of the sixth track G2, and be clamped and positioned by the clamping mechanism G51 and rise to a predetermined height by the sixth carrier G5 against the sixth carrier G5 to complete the side inspection step. The carrier A carrying the defective product of the substrate B is returned to the original position as the sixth carrier G5 moves down, and is transported to the receiving mechanism G4 by the sixth track G2 for collection.
本發明實施例翻轉機構及使用該翻轉機構之檢查方法及裝置,由於翻轉機構E的翻轉座E4以一轉軸E2為軸心受驅動件E3驅動作對稱性旋轉,故翻轉時力矩小,載盤A中基板B不易被拋傷;且翻轉座E4具有一框體E41,框體E41內部具有鏤空狀操作區間,載盤A以周緣被保持於框體E41中,不論使用於本實施例或一般未切割之基板,皆不易使基板被刮傷;而將該翻轉機構應用於基板B之檢查,該第一搬送裝置C、翻轉機構E、第二搬送裝置D、移載機構K、第三搬送裝置G循序將載盤A傳送,故可在整個傳送流路中完成基板B的反、正、四周側面等六面檢查;並藉由翻轉機構E的第一保持組件E42、第二保持組件E43之對抵或對夾轉換,使基板B順利轉換於二載盤A間並被穩定輸送;同時配合第一搬送裝置C之供料機構C3、第二搬送裝置D之收料機構D3、第三搬送裝置G之供料機構G3及收料機構G4之設計,使載盤A可順利的供、收,甚至作盛載不同規格基板B之載盤A的分別供、收,其所獲得的檢查、輸送效益確大幅提昇產能效率。The turning mechanism of the embodiment of the present invention and the inspection method and device using the turning mechanism. Since the turning seat E4 of the turning mechanism E uses a rotation axis E2 as the axis and is driven by the driving member E3 for symmetrical rotation, the torque is small during the turning, and the loading disc The substrate B in A is not easy to be injured; and the flip base E4 has a frame E41, and the frame E41 has a hollow-shaped operating section. The carrier A is held in the frame E41 by the periphery, whether used in this embodiment or in general. The uncut substrates are not easy to scratch the substrate; and the reversing mechanism is applied to the inspection of the substrate B, the first transfer device C, the reversing mechanism E, the second transfer device D, the transfer mechanism K, and the third transfer The device G sequentially transfers the carrier disk A, so the six sides of the substrate B, including the reverse, front, and sides, can be inspected in the entire transfer flow path; and the first holding component E42 and the second holding component E43 of the turning mechanism E are completed. The matching or clamping change enables the substrate B to be smoothly transferred between the two trays A and be stably transported; at the same time, it cooperates with the feeding mechanism C3 of the first transfer device C, the receiving mechanism D3 of the second transfer device D, and the third Feeding mechanism G3 and receiving of conveying device G The G4 design configuration, the carrier for the disc A smoothly close, even for different sizes filled carrier carrying the substrate B for the disc A, respectively, close inspection of which it is obtained, the conveying efficiency greatly enhance the production efficiency is determined.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only the preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, the simple equivalent changes and modifications made according to the scope of the patent application and the description of the invention, All are still within the scope of the invention patent.
A‧‧‧載盤
A1‧‧‧框緣
A2‧‧‧扣緣
A3‧‧‧扣肋
A4‧‧‧盤面
A5‧‧‧定位部
A51‧‧‧定位區間
B‧‧‧基板
C‧‧‧第一搬送裝置
C1‧‧‧第一軌道
C11‧‧‧座板
C111‧‧‧工作區間
C12‧‧‧側架
C13‧‧‧皮帶
C2‧‧‧第二軌道
C21‧‧‧第一載台
C22‧‧‧第二載台
C221‧‧‧夾持機構
C23‧‧‧皮帶
C3‧‧‧供料機構
C31‧‧‧載料架
C311‧‧‧移載區間
C312‧‧‧載座
C313‧‧‧側座
C314‧‧‧角架桿
C315‧‧‧第一嵌抵組件
C3151‧‧‧卡掣件
C316‧‧‧第二嵌抵組件
C3161‧‧‧立架
C3162‧‧‧卡掣件
C317‧‧‧導引件
C32‧‧‧昇降架
C321‧‧‧固定架
C3211‧‧‧上固定座
C3212‧‧‧下固定座
C3213‧‧‧支撐座
C3214‧‧‧定位件
C3215‧‧‧感應器
C322‧‧‧移動架
C3221‧‧‧上撐座
C3222‧‧‧驅動座
C3223‧‧‧支撐桿
C3224‧‧‧驅動件
C3225‧‧‧螺桿
C3226‧‧‧感應片
D‧‧‧第二搬送裝置
D1‧‧‧第三軌道
D11‧‧‧第三載台
D111‧‧‧夾持機構
D12‧‧‧第四載台
D13‧‧‧皮帶
D2‧‧‧第四軌道
D21‧‧‧軌座
D22‧‧‧第五載台
D221‧‧‧夾持機構
D23‧‧‧座板
D231‧‧‧工作區間
D24‧‧‧側架
D25‧‧‧皮帶
D26‧‧‧迫推機構
D3‧‧‧收料機構
D31‧‧‧載料機構
D311‧‧‧移載區間
D312‧‧‧載座
D313‧‧‧側座
D314‧‧‧角架桿
D315‧‧‧第一嵌抵組件
D3151‧‧‧卡掣件
D316‧‧‧第二嵌抵組件
D3161‧‧‧立座
D32‧‧‧昇降架
D321‧‧‧固定架
D3211‧‧‧上固定座
D3212‧‧‧下固定座
D3213‧‧‧支撐桿
D3214‧‧‧定位件
D3215‧‧‧感應器
D322‧‧‧移動架
D3221‧‧‧上撐座
D3222‧‧‧ 驅動座
D3223‧‧‧支撐座
D3224‧‧‧驅動件
D3225‧‧‧螺桿
D3226‧‧‧感應片
E‧‧‧翻轉機構
E1‧‧‧驅動件
E2‧‧‧轉軸
E3‧‧‧驅動件
E4‧‧‧翻轉框
E41‧‧‧框體
E411‧‧‧操作區間
E42‧‧‧第一保持組件
E421‧‧‧第一對抵件
E4211‧‧‧樞桿
E422‧‧‧第二對抵件
E4221‧‧‧樞桿
E423‧‧‧驅動件
E4231‧‧‧驅動桿
E424‧‧‧ 驅動件
E4241‧‧‧驅動桿
E4242‧‧‧連動件
E43‧‧‧第二保持組件
E431‧‧‧第一對夾件
E432‧‧‧第二對夾件
E433‧‧‧樞桿
E434‧‧‧ 驅動件
E435‧‧‧驅動桿
E436‧‧‧連動件
E437‧‧‧滑軌
E438‧‧‧夾爪
E439‧‧‧定位件
E44‧‧‧震盪器
E45‧‧‧感應器
E5‧‧‧機座
E6‧‧‧軌座
E7‧‧‧驅動件
E8‧‧‧感應器
F‧‧‧第一檢查機構
F1‧‧‧第一軌座
F11‧‧‧第一檢視單元
F2‧‧‧第二軌座
F12‧‧‧第二檢視單元
F3‧‧‧第三軌座
G‧‧‧第三搬裝置
G1‧‧‧第五軌道
G2‧‧‧第六軌道
G3‧‧‧供料機構
G4‧‧‧收料機構
G5‧‧‧第六載台
G51‧‧‧夾持機構
H‧‧‧第二檢查機構
H1‧‧‧第三檢視單元
H2‧‧‧第四檢視單元
K‧‧‧移載機構
K1‧‧‧第一移載軌座
K11‧‧‧第一提取組件
K2‧‧‧第二移載軌座
K21‧‧‧第二提取組件
Y‧‧‧機台台面
Y1‧‧‧側邊
Y2‧‧‧側邊
A‧‧‧carriage
A1‧‧‧Frame margin
A2‧‧‧button margin
A3‧‧‧Rib
A4‧‧‧pan
A5‧‧‧Positioning Department
A51‧‧‧Positioning interval
B‧‧‧ substrate
C‧‧‧The first conveying device
C1‧‧‧First track
C11‧‧‧seat
C111‧‧‧Working interval
C12‧‧‧Side Frame
C13‧‧‧Belt
C2‧‧‧Second Track
C21‧‧‧First Carrier
C22‧‧‧Second carrier
C221‧‧‧Clamping mechanism
C23‧‧‧Belt
C3‧‧‧feeding agency
C31‧‧‧Carrier
C311‧‧‧ transfer interval
C312‧‧‧carriage
C313‧‧‧Side Seat
C314‧‧‧Angle pole
C315‧‧‧The first embedded component
C3151 ‧‧‧ detent
C316‧‧‧Second inset assembly
C3161‧‧‧ stand
C3162 ‧‧‧ detent
C317‧‧‧Guide
C32‧‧‧lifting frame
C321‧‧‧Fixed frame
C3211‧‧‧Upper mount
C3212‧‧‧lower mount
C3213‧‧‧Support
C3214‧‧‧Positioning
C3215‧‧‧Sensor
C322‧‧‧mobile stand
C3221‧‧‧ Upper Support
C3222‧‧‧Drive Seat
C3223 ‧‧‧ support rod
C3224‧‧‧Driver
C3225‧‧‧Screw
C3226‧‧‧Sensor
D‧‧‧Second transfer device
D1‧‧‧ Third Track
D11‧‧‧Third carrier
D111‧‧‧Clamping mechanism
D12‧‧‧The fourth carrier
D13‧‧‧Belt
D2‧‧‧ Fourth track
D21‧‧‧rail mount
D22‧‧‧ fifth carrier
D221‧‧‧Clamping mechanism
D23‧‧‧seat
D231‧‧‧Working area
D24‧‧‧Side Frame
D25‧‧‧Belt
D26‧‧‧Forcing agency
D3‧‧‧Receiving organization
D31‧‧‧Loading mechanism
D311‧‧‧ Transfer interval
D312‧‧‧carriage
D313‧‧‧Side Seat
D314‧‧‧Angle pole
D315‧‧‧The first embedded component
D3151‧‧‧Lock
D316‧‧‧Second inset assembly
D3161‧‧‧stand
D32‧‧‧Lifting frame
D321‧‧‧Fixed frame
D3211‧‧‧Upper mount
D3212‧‧‧ Lower mounting base
D3213‧‧‧Support rod
D3214‧‧‧Positioning
D3215‧‧‧Sensor
D322‧‧‧mobile stand
D3221‧‧‧ Upper Support
D3222‧‧‧ Drive Block
D3223‧‧‧Support
D3224‧‧‧Driver
D3225‧‧‧Screw
D3226‧‧‧Sensor
E‧‧‧turning mechanism
E1‧‧‧Driver
E2‧‧‧Shaft
E3‧‧‧Driver
E4‧‧‧ Flip Box
E41‧‧‧Frame
E411‧‧‧operation interval
E42‧‧‧First holding component
E421‧‧‧First pair
E4211‧‧‧ Pivot
E422‧‧‧The second pair
E4221‧‧‧ Pivot
E423‧‧‧Driver
E4231‧‧‧Driver
E424‧‧‧ Driver
E4241‧‧‧Driver
E4242‧‧‧ Linkage
E43‧‧‧Second holding component
E431‧‧‧The first pair of clamps
E432‧‧‧Second pair of clamps
E433‧‧‧ Pivot
E434‧‧‧ Driver
E435‧‧‧Driver
E436‧‧‧ Linkage
E437‧‧‧Slide
E438‧‧‧Jaw
E439‧‧‧Positioning
E44‧‧‧Oscillator
E45‧‧‧Sensor
E5‧‧‧base
E6‧‧‧rail mount
E7‧‧‧Driver
E8‧‧‧Sensor
F‧‧‧The first inspection agency
F1‧‧‧First rail seat
F11‧‧‧First viewing unit
F2‧‧‧Second rail seat
F12‧‧‧Second viewing unit
F3‧‧‧Third rail seat
G‧‧‧Third moving device
G1‧‧‧Fifth track
G2‧‧‧ Sixth Track
G3‧‧‧feeding agency
G4‧‧‧Receiving organization
G5‧‧‧ sixth carrier
G51‧‧‧Clamping mechanism
H‧‧‧Second Inspection Agency
H1‧‧‧Third viewing unit
H2‧‧‧Fourth viewing unit
K‧‧‧ transfer agency
K1‧‧‧The first transfer rail seat
K11‧‧‧First extraction component
K2‧‧‧Second Transfer Rail Base
K21‧‧‧Second extraction component
Y‧‧‧machine table top
Y1‧‧‧side
Y2‧‧‧side
圖1係本發明實施例中載盤之立體示意圖。 圖2係本發明實施例中基板盛載於載盤之立體示意圖。 圖3係本發明實施例中載盤之側面示意圖。 圖4係本發明實施例中各機構配置在一機台台面上之俯視示意圖。 圖5係本發明實施例中各機構配置在一機台台面上之立體示意圖。 圖6係本發明實施例中第一搬送裝置之第一軌道及供料機構立體示意圖。 圖7係本發明實施例中第一搬送裝置之第一軌道及供料機構之立體分解示意圖。 圖8係本發明實施例中第一搬送裝置中供料機構供料操作之示意圖(一)。 圖9係本發明實施例中第一搬送裝置中供料機構供料操作之示意圖(二)。 圖10係本發明實施例中第一搬送裝置中供料機構供料操作之示意圖(三)。 圖11係本發明實施例中第二搬送裝置之第四軌道及收料機構立體示意圖。 圖12係本發明實施例中第二搬送裝置之第四軌道及收料機構之立體分解示意圖。 圖13係本發明實施例中第二搬送裝置中收料機構收料操作之示意圖(一)。圖14係本發明實施例中第二搬送裝置中收料機構收料操作之示意圖(二)。 圖15係本發明實施例中第二搬送裝置中收料機構收料操作之示意圖(三)。 圖16係本發明實施例中翻轉機構之立體示意圖。 圖17係本發明實施例中翻轉框的背側立體示意圖。 圖18係本發明實施例中翻轉框的第一保持組件之第二對抵件立體示意圖。 圖19係本發明實施例中翻轉框的第二保持組件之第一、二對夾件立體示意圖。 圖20係本發明實施例中翻轉框的第一保持組件之第一、二對抵件進行對載盤保持之示意圖(一)。 圖21係本發明實施例中翻轉框的第一保持組件之第一、二對抵件進行對載盤保持之示意圖(二)。 圖22係本發明實施例中翻轉框的第二保持組件之第一、二對夾件進行對載盤保持之示意圖(一)。 圖23係本發明實施例中翻轉框的第二保持組件之第一、二對夾件進行對載盤保持之示意圖(二)。FIG. 1 is a schematic perspective view of a carrier disk in an embodiment of the present invention. FIG. 2 is a schematic perspective view of a substrate carried on a carrier disk in the embodiment of the present invention. FIG. 3 is a schematic side view of a carrier disk in an embodiment of the present invention. FIG. 4 is a schematic plan view of each mechanism disposed on a machine table in the embodiment of the present invention. FIG. 5 is a schematic perspective view of various mechanisms arranged on a machine table in the embodiment of the present invention. 6 is a schematic perspective view of a first track and a feeding mechanism of a first conveying device in an embodiment of the present invention. FIG. 7 is an exploded perspective view of the first track and the feeding mechanism of the first conveying device in the embodiment of the present invention. FIG. 8 is a schematic diagram (1) of the feeding operation of the feeding mechanism in the first conveying device in the embodiment of the present invention. FIG. 9 is a schematic diagram (2) of the feeding operation of the feeding mechanism in the first conveying device in the embodiment of the present invention. FIG. 10 is a schematic diagram (No. 3) of the feeding operation of the feeding mechanism in the first conveying device in the embodiment of the present invention. FIG. 11 is a schematic perspective view of a fourth track and a receiving mechanism of the second conveying device in the embodiment of the present invention. FIG. 12 is a schematic exploded perspective view of a fourth track of a second conveying device and a receiving mechanism in an embodiment of the present invention. FIG. 13 is a schematic diagram (1) of a receiving operation of a receiving mechanism in a second conveying device according to an embodiment of the present invention. FIG. 14 is a schematic diagram (2) of the feeding operation of the receiving mechanism in the second conveying device in the embodiment of the present invention. FIG. 15 is a schematic diagram (three) of the receiving operation of the receiving mechanism in the second conveying device according to the embodiment of the present invention. FIG. 16 is a schematic perspective view of a turning mechanism in the embodiment of the present invention. FIG. 17 is a schematic perspective view of the rear side of the flip frame in the embodiment of the present invention. 18 is a schematic perspective view of a second pair of abutment members of a first holding component of a flip frame in an embodiment of the present invention. FIG. 19 is a schematic perspective view of the first and second pairs of clips of the second holding component of the flip frame in the embodiment of the present invention. FIG. 20 is a schematic diagram (1) of holding the carrier disk by the first and second pairs of abutment members of the first holding component of the flip frame in the embodiment of the present invention. FIG. 21 is a schematic diagram (2) of holding the carrier disk by the first and second pairs of abutment members of the first holding component of the flip frame in the embodiment of the present invention. FIG. 22 is a schematic diagram (1) of the first and second pairs of clips holding the carrier disk by the second holding component of the flip frame in the embodiment of the present invention. FIG. 23 is a schematic diagram (2) of holding the carrier disk by the first and second pairs of clips of the second holding component of the flip frame in the embodiment of the present invention.
E‧‧‧翻轉機構 E‧‧‧turning mechanism
E41‧‧‧框體 E41‧‧‧Frame
E42‧‧‧第一保持組件 E42‧‧‧First holding component
E44‧‧‧震盪器 E44‧‧‧Oscillator
E5‧‧‧機座 E5‧‧‧base
E4‧‧‧翻轉框 E4‧‧‧ Flip Box
E411‧‧‧操作區間 E411‧‧‧operation interval
E43‧‧‧第二保持組件 E43‧‧‧Second holding component
E45‧‧‧感應器 E45‧‧‧Sensor
E8‧‧‧感應器 E8‧‧‧Sensor
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