TW201631298A - 使用滑移平面接近開關之慣性感測器 - Google Patents
使用滑移平面接近開關之慣性感測器 Download PDFInfo
- Publication number
- TW201631298A TW201631298A TW105100962A TW105100962A TW201631298A TW 201631298 A TW201631298 A TW 201631298A TW 105100962 A TW105100962 A TW 105100962A TW 105100962 A TW105100962 A TW 105100962A TW 201631298 A TW201631298 A TW 201631298A
- Authority
- TW
- Taiwan
- Prior art keywords
- time domain
- support structure
- inertial sensor
- proximity switch
- guaranteed
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/847,539 US9103673B2 (en) | 2011-06-24 | 2013-03-20 | Inertial sensor using sliding plane proximity switches |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201631298A true TW201631298A (zh) | 2016-09-01 |
Family
ID=51580569
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105100962A TW201631298A (zh) | 2013-03-20 | 2013-11-22 | 使用滑移平面接近開關之慣性感測器 |
TW102142691A TWI528020B (zh) | 2013-03-20 | 2013-11-22 | 使用滑移平面接近開關之慣性感測器 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102142691A TWI528020B (zh) | 2013-03-20 | 2013-11-22 | 使用滑移平面接近開關之慣性感測器 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2976597A4 (ja) |
JP (1) | JP2016520811A (ja) |
CN (1) | CN105723184A (ja) |
TW (2) | TW201631298A (ja) |
WO (1) | WO2014149085A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3161415A2 (en) | 2014-06-26 | 2017-05-03 | Lumedyne Technologies Incorporated | System and methods for determining rotation from nonlinear periodic signals |
CN107636473B (zh) | 2015-05-20 | 2020-09-01 | 卢米达因科技公司 | 从非线性的周期性信号中提取惯性信息 |
US10234477B2 (en) * | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
CN110780088B (zh) * | 2019-11-08 | 2021-08-03 | 中北大学 | 多桥路隧道磁阻双轴加速度计 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050092085A1 (en) * | 2003-11-04 | 2005-05-05 | Shyu-Mou Chen | Solid-state gyroscopes and planar three-axis inertial measurement unit |
US7612424B1 (en) * | 2005-07-22 | 2009-11-03 | Northwestern University | Nanoelectromechanical bistable cantilever device |
CN101360968B (zh) * | 2006-01-24 | 2013-06-05 | 松下电器产业株式会社 | 惯性力传感器 |
JP5536994B2 (ja) * | 2008-06-30 | 2014-07-02 | 株式会社東芝 | 慣性センサ及び慣性検出装置 |
US8347720B2 (en) * | 2010-06-29 | 2013-01-08 | Tialinx, Inc. | MEMS tunneling accelerometer |
JP5158160B2 (ja) * | 2010-09-10 | 2013-03-06 | 横河電機株式会社 | 振動式トランスデューサ |
US9705450B2 (en) * | 2011-06-24 | 2017-07-11 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and methods for time domain measurement of oscillation perturbations |
-
2013
- 2013-11-20 CN CN201380074890.4A patent/CN105723184A/zh active Pending
- 2013-11-20 EP EP13879155.3A patent/EP2976597A4/en not_active Withdrawn
- 2013-11-20 WO PCT/US2013/071076 patent/WO2014149085A1/en active Application Filing
- 2013-11-20 JP JP2016504286A patent/JP2016520811A/ja not_active Ceased
- 2013-11-22 TW TW105100962A patent/TW201631298A/zh unknown
- 2013-11-22 TW TW102142691A patent/TWI528020B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP2976597A1 (en) | 2016-01-27 |
TWI528020B (zh) | 2016-04-01 |
WO2014149085A1 (en) | 2014-09-25 |
CN105723184A (zh) | 2016-06-29 |
JP2016520811A (ja) | 2016-07-14 |
TW201437607A (zh) | 2014-10-01 |
EP2976597A4 (en) | 2016-11-16 |
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