TW201631298A - 使用滑移平面接近開關之慣性感測器 - Google Patents

使用滑移平面接近開關之慣性感測器 Download PDF

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Publication number
TW201631298A
TW201631298A TW105100962A TW105100962A TW201631298A TW 201631298 A TW201631298 A TW 201631298A TW 105100962 A TW105100962 A TW 105100962A TW 105100962 A TW105100962 A TW 105100962A TW 201631298 A TW201631298 A TW 201631298A
Authority
TW
Taiwan
Prior art keywords
time domain
support structure
inertial sensor
proximity switch
guaranteed
Prior art date
Application number
TW105100962A
Other languages
English (en)
Chinese (zh)
Inventor
保羅 史文森
理查 華特斯
查爾斯 泰利
安卓 王
Original Assignee
路梅戴尼科技公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/847,539 external-priority patent/US9103673B2/en
Application filed by 路梅戴尼科技公司 filed Critical 路梅戴尼科技公司
Publication of TW201631298A publication Critical patent/TW201631298A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
TW105100962A 2013-03-20 2013-11-22 使用滑移平面接近開關之慣性感測器 TW201631298A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/847,539 US9103673B2 (en) 2011-06-24 2013-03-20 Inertial sensor using sliding plane proximity switches

Publications (1)

Publication Number Publication Date
TW201631298A true TW201631298A (zh) 2016-09-01

Family

ID=51580569

Family Applications (2)

Application Number Title Priority Date Filing Date
TW105100962A TW201631298A (zh) 2013-03-20 2013-11-22 使用滑移平面接近開關之慣性感測器
TW102142691A TWI528020B (zh) 2013-03-20 2013-11-22 使用滑移平面接近開關之慣性感測器

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW102142691A TWI528020B (zh) 2013-03-20 2013-11-22 使用滑移平面接近開關之慣性感測器

Country Status (5)

Country Link
EP (1) EP2976597A4 (ja)
JP (1) JP2016520811A (ja)
CN (1) CN105723184A (ja)
TW (2) TW201631298A (ja)
WO (1) WO2014149085A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161415A2 (en) 2014-06-26 2017-05-03 Lumedyne Technologies Incorporated System and methods for determining rotation from nonlinear periodic signals
CN107636473B (zh) 2015-05-20 2020-09-01 卢米达因科技公司 从非线性的周期性信号中提取惯性信息
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
CN110780088B (zh) * 2019-11-08 2021-08-03 中北大学 多桥路隧道磁阻双轴加速度计

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050092085A1 (en) * 2003-11-04 2005-05-05 Shyu-Mou Chen Solid-state gyroscopes and planar three-axis inertial measurement unit
US7612424B1 (en) * 2005-07-22 2009-11-03 Northwestern University Nanoelectromechanical bistable cantilever device
CN101360968B (zh) * 2006-01-24 2013-06-05 松下电器产业株式会社 惯性力传感器
JP5536994B2 (ja) * 2008-06-30 2014-07-02 株式会社東芝 慣性センサ及び慣性検出装置
US8347720B2 (en) * 2010-06-29 2013-01-08 Tialinx, Inc. MEMS tunneling accelerometer
JP5158160B2 (ja) * 2010-09-10 2013-03-06 横河電機株式会社 振動式トランスデューサ
US9705450B2 (en) * 2011-06-24 2017-07-11 The United States Of America As Represented By The Secretary Of The Navy Apparatus and methods for time domain measurement of oscillation perturbations

Also Published As

Publication number Publication date
EP2976597A1 (en) 2016-01-27
TWI528020B (zh) 2016-04-01
WO2014149085A1 (en) 2014-09-25
CN105723184A (zh) 2016-06-29
JP2016520811A (ja) 2016-07-14
TW201437607A (zh) 2014-10-01
EP2976597A4 (en) 2016-11-16

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