CN105723184A - 音叉式陀螺仪时域惯性传感器 - Google Patents

音叉式陀螺仪时域惯性传感器 Download PDF

Info

Publication number
CN105723184A
CN105723184A CN201380074890.4A CN201380074890A CN105723184A CN 105723184 A CN105723184 A CN 105723184A CN 201380074890 A CN201380074890 A CN 201380074890A CN 105723184 A CN105723184 A CN 105723184A
Authority
CN
China
Prior art keywords
mass body
supporting construction
detection mass
time domain
inertial sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380074890.4A
Other languages
English (en)
Chinese (zh)
Inventor
P·D·斯旺森
R·L·沃特斯
C·塔利
A·王
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lu Meidaini Scientific & Technical Corp
US Government
US Department of Navy
Lumedyne Technologies Inc
Original Assignee
Lu Meidaini Scientific & Technical Corp
US Government
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/847,539 external-priority patent/US9103673B2/en
Application filed by Lu Meidaini Scientific & Technical Corp, US Government filed Critical Lu Meidaini Scientific & Technical Corp
Publication of CN105723184A publication Critical patent/CN105723184A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
CN201380074890.4A 2013-03-20 2013-11-20 音叉式陀螺仪时域惯性传感器 Pending CN105723184A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/847,539 US9103673B2 (en) 2011-06-24 2013-03-20 Inertial sensor using sliding plane proximity switches
US13/847,539 2013-03-20
PCT/US2013/071076 WO2014149085A1 (en) 2013-03-20 2013-11-20 Inertial sensor using sliding plane proximity switches

Publications (1)

Publication Number Publication Date
CN105723184A true CN105723184A (zh) 2016-06-29

Family

ID=51580569

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380074890.4A Pending CN105723184A (zh) 2013-03-20 2013-11-20 音叉式陀螺仪时域惯性传感器

Country Status (5)

Country Link
EP (1) EP2976597A4 (ja)
JP (1) JP2016520811A (ja)
CN (1) CN105723184A (ja)
TW (2) TW201631298A (ja)
WO (1) WO2014149085A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110780088A (zh) * 2019-11-08 2020-02-11 中北大学 多桥路隧道磁阻双轴加速度计

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161415A2 (en) 2014-06-26 2017-05-03 Lumedyne Technologies Incorporated System and methods for determining rotation from nonlinear periodic signals
CN107636473B (zh) 2015-05-20 2020-09-01 卢米达因科技公司 从非线性的周期性信号中提取惯性信息
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050092085A1 (en) * 2003-11-04 2005-05-05 Shyu-Mou Chen Solid-state gyroscopes and planar three-axis inertial measurement unit
CN101360968A (zh) * 2006-01-24 2009-02-04 松下电器产业株式会社 惯性力传感器
US7612424B1 (en) * 2005-07-22 2009-11-03 Northwestern University Nanoelectromechanical bistable cantilever device
US20090322183A1 (en) * 2008-06-30 2009-12-31 Kabushiki Kaisha Toshiba Inertial sensor and inertial detecting device
US20110314913A1 (en) * 2010-06-29 2011-12-29 Tialinx, Inc. MEMS Tunneling Accelerometer
CN102401693A (zh) * 2010-09-10 2012-04-04 横河电机株式会社 振动传感器及其制造方法
WO2012178086A1 (en) * 2011-06-24 2012-12-27 Lumedyne Technologies Incorporated Apparatus and methods for time domain measurement of oscillation perturbations

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050092085A1 (en) * 2003-11-04 2005-05-05 Shyu-Mou Chen Solid-state gyroscopes and planar three-axis inertial measurement unit
US7612424B1 (en) * 2005-07-22 2009-11-03 Northwestern University Nanoelectromechanical bistable cantilever device
CN101360968A (zh) * 2006-01-24 2009-02-04 松下电器产业株式会社 惯性力传感器
US20090322183A1 (en) * 2008-06-30 2009-12-31 Kabushiki Kaisha Toshiba Inertial sensor and inertial detecting device
US20110314913A1 (en) * 2010-06-29 2011-12-29 Tialinx, Inc. MEMS Tunneling Accelerometer
CN102401693A (zh) * 2010-09-10 2012-04-04 横河电机株式会社 振动传感器及其制造方法
WO2012178086A1 (en) * 2011-06-24 2012-12-27 Lumedyne Technologies Incorporated Apparatus and methods for time domain measurement of oscillation perturbations

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110780088A (zh) * 2019-11-08 2020-02-11 中北大学 多桥路隧道磁阻双轴加速度计

Also Published As

Publication number Publication date
EP2976597A1 (en) 2016-01-27
TWI528020B (zh) 2016-04-01
WO2014149085A1 (en) 2014-09-25
JP2016520811A (ja) 2016-07-14
TW201437607A (zh) 2014-10-01
EP2976597A4 (en) 2016-11-16
TW201631298A (zh) 2016-09-01

Similar Documents

Publication Publication Date Title
JP5960257B2 (ja) 振動摂動の時間領域測定のための装置および方法
US9103673B2 (en) Inertial sensor using sliding plane proximity switches
US9254992B2 (en) Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism
US8683862B2 (en) Oscillation apparatus with atomic-layer proximity switch
US8875576B2 (en) Apparatus and method for providing an in-plane inertial device with integrated clock
EP1020984B1 (en) A 3-dimensional comb structure
US8490462B2 (en) Auto-ranging for time domain inertial sensor
US9128496B2 (en) Auto-ranging for time domain extraction of perturbations to sinusoidal oscillation
TWI512268B (zh) 陀螺儀以及將時域音叉陀螺儀用於慣性感測的方法
CN105723184A (zh) 音叉式陀螺仪时域惯性传感器
US8770043B2 (en) Comb-structured MEMS accelerometer
TW201610392A (zh) 時域切換陀螺儀
WO2013094208A1 (ja) 振動型角速度センサ
KR20140131229A (ko) 멤스 자계 센서
US9449891B1 (en) Proximity switch fabrication method using angled deposition
Langfelder et al. High-sensitivity differential fringe-field MEMS accelerometers
KR20010026739A (ko) 가벼운 현수 구조물의 제조 방법 및 이를 채용한 액츄에이터와관성 센서

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20160629

WD01 Invention patent application deemed withdrawn after publication