CN105723184A - 音叉式陀螺仪时域惯性传感器 - Google Patents
音叉式陀螺仪时域惯性传感器 Download PDFInfo
- Publication number
- CN105723184A CN105723184A CN201380074890.4A CN201380074890A CN105723184A CN 105723184 A CN105723184 A CN 105723184A CN 201380074890 A CN201380074890 A CN 201380074890A CN 105723184 A CN105723184 A CN 105723184A
- Authority
- CN
- China
- Prior art keywords
- mass body
- supporting construction
- detection mass
- time domain
- inertial sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/847,539 US9103673B2 (en) | 2011-06-24 | 2013-03-20 | Inertial sensor using sliding plane proximity switches |
US13/847,539 | 2013-03-20 | ||
PCT/US2013/071076 WO2014149085A1 (en) | 2013-03-20 | 2013-11-20 | Inertial sensor using sliding plane proximity switches |
Publications (1)
Publication Number | Publication Date |
---|---|
CN105723184A true CN105723184A (zh) | 2016-06-29 |
Family
ID=51580569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380074890.4A Pending CN105723184A (zh) | 2013-03-20 | 2013-11-20 | 音叉式陀螺仪时域惯性传感器 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2976597A4 (ja) |
JP (1) | JP2016520811A (ja) |
CN (1) | CN105723184A (ja) |
TW (2) | TW201631298A (ja) |
WO (1) | WO2014149085A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110780088A (zh) * | 2019-11-08 | 2020-02-11 | 中北大学 | 多桥路隧道磁阻双轴加速度计 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3161415A2 (en) | 2014-06-26 | 2017-05-03 | Lumedyne Technologies Incorporated | System and methods for determining rotation from nonlinear periodic signals |
CN107636473B (zh) | 2015-05-20 | 2020-09-01 | 卢米达因科技公司 | 从非线性的周期性信号中提取惯性信息 |
US10234477B2 (en) * | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050092085A1 (en) * | 2003-11-04 | 2005-05-05 | Shyu-Mou Chen | Solid-state gyroscopes and planar three-axis inertial measurement unit |
CN101360968A (zh) * | 2006-01-24 | 2009-02-04 | 松下电器产业株式会社 | 惯性力传感器 |
US7612424B1 (en) * | 2005-07-22 | 2009-11-03 | Northwestern University | Nanoelectromechanical bistable cantilever device |
US20090322183A1 (en) * | 2008-06-30 | 2009-12-31 | Kabushiki Kaisha Toshiba | Inertial sensor and inertial detecting device |
US20110314913A1 (en) * | 2010-06-29 | 2011-12-29 | Tialinx, Inc. | MEMS Tunneling Accelerometer |
CN102401693A (zh) * | 2010-09-10 | 2012-04-04 | 横河电机株式会社 | 振动传感器及其制造方法 |
WO2012178086A1 (en) * | 2011-06-24 | 2012-12-27 | Lumedyne Technologies Incorporated | Apparatus and methods for time domain measurement of oscillation perturbations |
-
2013
- 2013-11-20 CN CN201380074890.4A patent/CN105723184A/zh active Pending
- 2013-11-20 EP EP13879155.3A patent/EP2976597A4/en not_active Withdrawn
- 2013-11-20 WO PCT/US2013/071076 patent/WO2014149085A1/en active Application Filing
- 2013-11-20 JP JP2016504286A patent/JP2016520811A/ja not_active Ceased
- 2013-11-22 TW TW105100962A patent/TW201631298A/zh unknown
- 2013-11-22 TW TW102142691A patent/TWI528020B/zh not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050092085A1 (en) * | 2003-11-04 | 2005-05-05 | Shyu-Mou Chen | Solid-state gyroscopes and planar three-axis inertial measurement unit |
US7612424B1 (en) * | 2005-07-22 | 2009-11-03 | Northwestern University | Nanoelectromechanical bistable cantilever device |
CN101360968A (zh) * | 2006-01-24 | 2009-02-04 | 松下电器产业株式会社 | 惯性力传感器 |
US20090322183A1 (en) * | 2008-06-30 | 2009-12-31 | Kabushiki Kaisha Toshiba | Inertial sensor and inertial detecting device |
US20110314913A1 (en) * | 2010-06-29 | 2011-12-29 | Tialinx, Inc. | MEMS Tunneling Accelerometer |
CN102401693A (zh) * | 2010-09-10 | 2012-04-04 | 横河电机株式会社 | 振动传感器及其制造方法 |
WO2012178086A1 (en) * | 2011-06-24 | 2012-12-27 | Lumedyne Technologies Incorporated | Apparatus and methods for time domain measurement of oscillation perturbations |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110780088A (zh) * | 2019-11-08 | 2020-02-11 | 中北大学 | 多桥路隧道磁阻双轴加速度计 |
Also Published As
Publication number | Publication date |
---|---|
EP2976597A1 (en) | 2016-01-27 |
TWI528020B (zh) | 2016-04-01 |
WO2014149085A1 (en) | 2014-09-25 |
JP2016520811A (ja) | 2016-07-14 |
TW201437607A (zh) | 2014-10-01 |
EP2976597A4 (en) | 2016-11-16 |
TW201631298A (zh) | 2016-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160629 |
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WD01 | Invention patent application deemed withdrawn after publication |