EP2976597A4 - INERTIAL SENSOR USING SLIPPING PROXIMITY SWITCHES - Google Patents

INERTIAL SENSOR USING SLIPPING PROXIMITY SWITCHES

Info

Publication number
EP2976597A4
EP2976597A4 EP13879155.3A EP13879155A EP2976597A4 EP 2976597 A4 EP2976597 A4 EP 2976597A4 EP 13879155 A EP13879155 A EP 13879155A EP 2976597 A4 EP2976597 A4 EP 2976597A4
Authority
EP
European Patent Office
Prior art keywords
inertial sensor
proximity switches
sliding plane
plane proximity
sliding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13879155.3A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2976597A1 (en
Inventor
Paul D Swanson
Richard L Waters
Charles Tally
Andrew Wang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Department of Navy
Lumedyne Technologies Inc
Original Assignee
US Department of Navy
Lumedyne Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/847,539 external-priority patent/US9103673B2/en
Application filed by US Department of Navy, Lumedyne Technologies Inc filed Critical US Department of Navy
Publication of EP2976597A1 publication Critical patent/EP2976597A1/en
Publication of EP2976597A4 publication Critical patent/EP2976597A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
EP13879155.3A 2013-03-20 2013-11-20 INERTIAL SENSOR USING SLIPPING PROXIMITY SWITCHES Withdrawn EP2976597A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/847,539 US9103673B2 (en) 2011-06-24 2013-03-20 Inertial sensor using sliding plane proximity switches
PCT/US2013/071076 WO2014149085A1 (en) 2013-03-20 2013-11-20 Inertial sensor using sliding plane proximity switches

Publications (2)

Publication Number Publication Date
EP2976597A1 EP2976597A1 (en) 2016-01-27
EP2976597A4 true EP2976597A4 (en) 2016-11-16

Family

ID=51580569

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13879155.3A Withdrawn EP2976597A4 (en) 2013-03-20 2013-11-20 INERTIAL SENSOR USING SLIPPING PROXIMITY SWITCHES

Country Status (5)

Country Link
EP (1) EP2976597A4 (ja)
JP (1) JP2016520811A (ja)
CN (1) CN105723184A (ja)
TW (2) TW201631298A (ja)
WO (1) WO2014149085A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3161415A2 (en) 2014-06-26 2017-05-03 Lumedyne Technologies Incorporated System and methods for determining rotation from nonlinear periodic signals
CN107636473B (zh) 2015-05-20 2020-09-01 卢米达因科技公司 从非线性的周期性信号中提取惯性信息
US10234477B2 (en) * 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
CN110780088B (zh) * 2019-11-08 2021-08-03 中北大学 多桥路隧道磁阻双轴加速度计

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012178086A1 (en) * 2011-06-24 2012-12-27 Lumedyne Technologies Incorporated Apparatus and methods for time domain measurement of oscillation perturbations

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050092085A1 (en) * 2003-11-04 2005-05-05 Shyu-Mou Chen Solid-state gyroscopes and planar three-axis inertial measurement unit
US7612424B1 (en) * 2005-07-22 2009-11-03 Northwestern University Nanoelectromechanical bistable cantilever device
CN101360968B (zh) * 2006-01-24 2013-06-05 松下电器产业株式会社 惯性力传感器
JP5536994B2 (ja) * 2008-06-30 2014-07-02 株式会社東芝 慣性センサ及び慣性検出装置
US8347720B2 (en) * 2010-06-29 2013-01-08 Tialinx, Inc. MEMS tunneling accelerometer
JP5158160B2 (ja) * 2010-09-10 2013-03-06 横河電機株式会社 振動式トランスデューサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012178086A1 (en) * 2011-06-24 2012-12-27 Lumedyne Technologies Incorporated Apparatus and methods for time domain measurement of oscillation perturbations

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2014149085A1 *

Also Published As

Publication number Publication date
EP2976597A1 (en) 2016-01-27
TWI528020B (zh) 2016-04-01
WO2014149085A1 (en) 2014-09-25
CN105723184A (zh) 2016-06-29
JP2016520811A (ja) 2016-07-14
TW201437607A (zh) 2014-10-01
TW201631298A (zh) 2016-09-01

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