TW201406683A - Rolling and splitting device of brittle material substrate - Google Patents
Rolling and splitting device of brittle material substrate Download PDFInfo
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- TW201406683A TW201406683A TW102114560A TW102114560A TW201406683A TW 201406683 A TW201406683 A TW 201406683A TW 102114560 A TW102114560 A TW 102114560A TW 102114560 A TW102114560 A TW 102114560A TW 201406683 A TW201406683 A TW 201406683A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Dicing (AREA)
- Footwear And Its Accessory, Manufacturing Method And Apparatuses (AREA)
Abstract
Description
本發明係關於滾動裂斷裝置者,尤其是關於可容易地對形成有刻劃線之脆性材料基板進行分斷之脆性材料基板之滾動裂斷裝置。 BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a rolling fracture device, and more particularly to a rolling fracture device that can easily break a brittle material substrate on which a sharded brittle material substrate is formed.
一般而言,脆性材料基板係被大型化地製造,使用者再將該基板分斷成所欲之大小而使用。關於分斷如此之大型的脆性材料基板之習知之分斷裝置,參照圖1及圖2進行說明。 In general, a brittle material substrate is manufactured in a large size, and the user divides the substrate into a desired size and uses it. A conventional breaking device for dividing such a large-sized brittle material substrate will be described with reference to Figs. 1 and 2 .
參照圖1,為了對大型的脆性材料基板3進行分斷,首先,於大型的脆性材料基板3之表面,使用刀輪4來形成刻劃線S。之後,以將脆性材料基板3之上下面對調之方式利用吸附反轉裝置(未圖示)使其180度反轉。如圖2所示,若使形成有刻劃線S之脆性材料基板3之面以朝向底面之方式反轉,則對刻劃線S之背側沿著刻劃線S之形成方向以裂斷桿8進行加壓。藉此,脆性材料基板3沿著刻劃線S左右分離同時分斷。此時,在脆性材料基板S之下部側,以於利用斷桿8進行加壓時,脆性材料基板3一邊被押往下部側一邊被緩衝之方式鋪設有緩衝片7。 Referring to Fig. 1, in order to break the large-sized brittle material substrate 3, first, the scribe line S is formed on the surface of the large-sized brittle material substrate 3 by using the cutter wheel 4. Thereafter, the brittle material substrate 3 is reversed by 180 degrees by an adsorption reversal device (not shown). As shown in FIG. 2, when the surface of the brittle material substrate 3 on which the score line S is formed is reversed toward the bottom surface, the back side of the score line S is broken along the direction in which the score line S is formed. The rod 8 is pressurized. Thereby, the brittle material substrate 3 is separated and separated along the scribe line S at the same time. At this time, on the lower portion side of the brittle material substrate S, when the pressure is applied by the broken rod 8, the buffer sheet 7 is laid so as to be buffered while being pushed to the lower side.
如前述般,當沿著刻劃線S對脆性材料基板3之上面一邊以裂斷桿8進行加壓一邊押下時,脆型材料基板3則一邊往緩衝片7壓擠一邊沿著刻劃線S分斷。然而,由於脆性材料基板3之刻劃線S與鋪設之緩衝片7之面接觸,一旦對與形成有刻劃線S之面為相反側之面以裂斷桿8 進行加壓,則形成有刻劃線S之面將與緩衝片7之面接觸且產生摩擦力。據此,存在有分斷後之脆性材料基板難以左右分離,使分離變得不容易之問題。 As described above, when the upper surface of the brittle material substrate 3 is pressed along the scribe line S while being pressed by the rupture rod 8, the brittle-type material substrate 3 is pressed along the scribe line while being pressed against the buffer sheet 7. S is broken. However, since the scribe line S of the brittle material substrate 3 is in contact with the surface of the laid buffer sheet 7, once the surface opposite to the surface on which the scribe line S is formed is broken, the rod 8 is broken. When the pressure is applied, the surface on which the score line S is formed will come into contact with the surface of the cushion sheet 7 to generate a frictional force. According to this, there is a problem in that it is difficult to separate the brittle material substrate after the separation, and the separation is not easy.
此外,形成有刻劃線S之面,在與緩衝片7之面接觸之狀態下,一邊往緩衝片7之方向壓擠一邊引起摩擦同時分斷,因此亦存在有於分斷面產生碎屑之問題。此外,在如前述般之習知之分斷裝置中,為了對脆性材料進行分斷而必需利用吸附反轉裝置等使基板反轉,因此亦存在有因吸附而導致基板面之汙染容易產生之問題點。進一步地,一旦未對刻劃線S之正背對位置以裂斷桿8進行加壓,則無法正確地沿刻劃線S分斷,一旦在脆性材料基板3之位置些微偏移之狀態下以裂斷桿8進行加壓,便無法正確地沿刻劃線S分斷,而以往左右任一方偏移之狀態分斷之問題發生。 Further, in the state in which the scribe line S is formed, in the state of being in contact with the surface of the cushion sheet 7, the friction is simultaneously broken while being pressed in the direction of the cushion sheet 7, so that there is also a chip generated in the cross section. The problem. Further, in the conventional breaking device as described above, in order to break the brittle material, it is necessary to invert the substrate by the adsorption reversal device or the like, and therefore there is a problem that the contamination of the substrate surface is likely to occur due to adsorption. point. Further, once the cracking rod 8 is not pressed against the position of the front side of the scribe line S, it cannot be correctly broken along the scribe line S, once the position of the brittle material substrate 3 is slightly offset. When the rupture rod 8 is pressed, it is impossible to accurately break along the scribe line S, and the problem of the state of the left and right offsets is broken.
本發明係考量上述般之問題點而提出者,其目的在於,提供一種可容易地分斷形成有刻劃線之脆性材料基板之脆性材料基板之滾動裂斷裝置。 The present invention has been made in view of the above-described problems, and an object thereof is to provide a rolling cracking device which can easily break a brittle material substrate on which a sharded brittle material substrate is formed.
為了達成前述之目的,本發明之滾動裂斷裝置,具備有:載置於上面形成有刻劃線之脆性材料基板之柔軟性安放襯墊(pad)、設置於該柔軟性安放襯墊之一側端並以拉伸該柔軟性安放襯墊之方式賦予張力之拉伸部、隔著該柔軟性安放襯墊位於與該脆性材料基板相反之相反側之按壓移動滾動部、以及使該按壓移動滾動部上下移動之升降部。 In order to achieve the above object, the rolling splitting device of the present invention comprises: a flexible mounting pad placed on a substrate on which a scribed line is formed, and one of the soft mounting pads; a tensile portion that is tensioned by stretching the flexible spacer, and a pressing movement rolling portion that is located on a side opposite to the brittle material substrate across the flexible mounting pad, and that moves the pressing portion The lifting portion of the rolling portion moving up and down.
該按壓移動滾動部,可成為沿著該柔軟性安放襯墊之下面進 行移動之構成。 The pressing and moving of the rolling portion can be made along the bottom of the soft cushion The composition of the movement of the line.
在該按壓移動滾動部與該升降部之間,進一步包含與該脆性材料基板之下面平行地設置之水平棚,且該按壓移動滾動部,可成為在該水平棚上沿著該柔軟性安放襯墊之下面進行移動之構成。 Between the pressing and moving rolling portion and the lifting portion, further comprising a horizontal shed disposed parallel to the lower surface of the brittle material substrate, and the pressing and moving rolling portion can be placed along the soft lining on the horizontal shed The structure of the movement under the pad.
可成為具有使該按壓移動滾動部在與該脆性材料基板之面平行之面內旋轉之旋轉部之構成。 It may be configured to have a rotating portion that rotates the pressing moving rolling portion in a plane parallel to the surface of the brittle material substrate.
該柔軟性安放襯墊,可以在篩網狀之網上重疊橡膠襯墊之方式形成、或以黏著性橡膠形成。 The flexible mounting pad may be formed by overlapping a rubber pad on a mesh-like mesh or by an adhesive rubber.
該按壓移動滾動部,其長邊方向之尺寸可形成為較該脆性材料基板之寬度為大之構成。 The pressing movement rolling portion may have a size in the longitudinal direction that is larger than a width of the brittle material substrate.
根據本發明之一實施例,於脆性材料基板形成刻劃線後,以未將該脆性材料基板翻面之方式繼續,因此可防止基板面之汙染。此外,藉由利用在水平方向進行移動之按壓移動滾動部,可迅速且容易地將形成有刻劃線之脆性材料基板分斷,並且,即使在刻劃線之方向與按壓移動滾動部之位置未正確地成為一致時亦可分斷。此外,由於一邊將按壓移動滾動部往上方按壓,一邊使其沿著脆性材料基板之下面於水平方向移動,因此可對脆性材料基板之刻劃線順著每一條線進行裂斷。此外,在以黏著性橡膠構成柔軟性安放襯墊之情形,由於脆性材料基板貼附於黏著性橡膠襯墊,因此可防止在由按壓移動滾動部之往上按壓時,脆性材料基板從柔軟性安放襯墊浮起,且可提高分斷力。 According to an embodiment of the present invention, after the scribe line is formed on the brittle material substrate, the brittle material substrate is not turned over, so that contamination of the substrate surface can be prevented. Further, by moving the rolling portion by pressing in the horizontal direction, the brittle material substrate on which the score line is formed can be quickly and easily broken, and even in the direction of the score line and the position of the press moving scroll portion It can also be broken when it is not correctly matched. Further, since the press-moving rolling portion is pressed upward and moved in the horizontal direction along the lower surface of the brittle material substrate, the scribe line of the brittle material substrate can be broken along each line. Further, in the case where the flexible spacer is formed of the adhesive rubber, since the brittle material substrate is attached to the adhesive rubber pad, it is possible to prevent the brittle material substrate from being soft when pressed by the pressing moving rolling portion. The mounting pad floats and the breaking force is increased.
S‧‧‧刻劃線 S‧‧ scribe
3‧‧‧脆性材料基板 3‧‧‧Battery material substrate
20‧‧‧按壓移動滾動部 20‧‧‧Press the moving scroll
25‧‧‧柔軟性安放襯墊 25‧‧‧Soft cushioning
26‧‧‧升降部 26‧‧‧ Lifting Department
28‧‧‧旋轉部 28‧‧‧Rotating Department
30‧‧‧拉伸部 30‧‧‧Stretching Department
圖1,係概略地表示形成用以分斷脆性材料基板之刻劃線之裝置之圖式。 Fig. 1 is a view schematically showing a device for forming a scribe line for breaking a substrate of a brittle material.
圖2,係表示在藉由圖1之裝置形成刻劃線後,利用裂斷桿對基板進行分斷之習知之分斷裝置之圖式。 Fig. 2 is a view showing a conventional breaking device for breaking a substrate by a split bar after forming a score line by the apparatus of Fig. 1.
圖3,係表示本發明之一實施例之脆性材料基板之滾動裂斷裝置之圖式。 Fig. 3 is a view showing a rolling breaking device of a brittle material substrate according to an embodiment of the present invention.
圖4,係表示利用本發明之一實施例之脆性材料基板之滾動裂斷裝置,對脆性材料基板進行分斷之狀態之圖式。 Fig. 4 is a view showing a state in which a brittle material substrate is divided by a rolling cracking device of a brittle material substrate according to an embodiment of the present invention.
圖5,係更具體地表示本發明之一實施例之脆性材料基板之滾動裂斷裝置,對脆性材料基板進行分斷之狀態之圖式。 Fig. 5 is a view showing more specifically a state in which a brittle material substrate is broken by a rolling cracking device of a brittle material substrate according to an embodiment of the present invention.
以下,參照圖式,對本發明之較佳之實施例更詳細地進行說明。另外,在本發明之實施例中,關於與習知技術之構成元件相同或類似之構成元件,藉由使用相同之圖式符號而省略說明。 Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings. In the embodiments of the present invention, the same or similar constituent elements as those of the prior art are omitted by the same reference numerals.
本發明之一實施例之脆性材料基板之滾動裂斷裝置,如圖3所示,具備藉由汽缸等而可升降之升降部26,而在該升降部26之上部安裝有旋轉部28。在旋轉部28之上部安裝有在水平狀態下形成平坦之水平棚22,而在水平棚22上安裝有於水平方向移動自如之按壓移動滾動部20。按壓移動滾動部20,以在水平棚22上藉由驅動裝置(未圖示)而可滾動之方式設置。 As shown in FIG. 3, the rolling breaking device for a brittle material substrate according to an embodiment of the present invention includes a lifting portion 26 that can be raised and lowered by a cylinder or the like, and a rotating portion 28 is attached to an upper portion of the lifting portion 26. A horizontal horizontal shed 22 is formed on the upper portion of the rotating portion 28 in a horizontal state, and a horizontally movable pressing rolling portion 20 is movably attached to the horizontal shed 22. The moving scroll unit 20 is pressed to be set to be scrollable on the horizontal shed 22 by a driving device (not shown).
在按壓移動滾動部20之上方往水平方向延伸設置有柔軟性安放襯墊25,而在該柔軟性安放襯墊25之一側端,安裝有以柔軟性安放襯 墊25經常性地維持水平狀態之方式賦予張力之拉伸部30。拉伸部30,安裝於柔軟性安放襯墊25之一側端,並可以使柔軟性安放襯墊25經常性地維持於拉伸狀態之懸錘或彈性體構成。當然,若可使柔軟性安放襯墊25經常維持於拉伸狀態,則亦可為其他之手段。拉伸部30,以即使在脆性材料基板3已載置於柔軟性安放襯墊25上之狀態下,柔軟性安裝襯墊25亦不會因脆性材料基板3之重量而彎曲並可維持水平狀態之方式,對柔軟性安放襯墊25賦予張力。 A soft mounting pad 25 is extended in the horizontal direction above the pressing moving rolling portion 20, and a soft side is attached to one side end of the flexible mounting pad 25 The pad 25 is applied to the tension portion 30 in such a manner that the pad 25 is constantly maintained in a horizontal state. The stretched portion 30 is attached to one side end of the flexible receiving pad 25, and can be configured by a suspension or an elastic body in which the flexible placing pad 25 is constantly maintained in a stretched state. Of course, if the softness-imparting pad 25 is often maintained in a stretched state, it may be other means. In the stretched portion 30, the flexible mounting pad 25 is not bent by the weight of the brittle material substrate 3 and can be maintained in a horizontal state even in a state where the brittle material substrate 3 has been placed on the flexible mounting pad 25. In this manner, tension is imparted to the flexible seating pad 25.
在拉伸部30對柔軟性安放襯墊25之整個寬以一定之力拉伸時,為了維持柔軟性安放襯墊25之水平狀態,較佳為:以篩網狀之橡膠網構成柔軟性安放襯墊25,或以於篩網狀之網上將橡膠襯墊形成一體之方式構成柔軟性安放襯墊25。此外,柔軟性安放襯墊25,為了在載置有脆性材料基板3時產生固定力,因此亦可利用附著性佳之黏著橡膠等。 When the stretching portion 30 stretches the entire width of the flexible seating pad 25 with a certain force, in order to maintain the horizontal state of the cushioning 25, it is preferable to form a soft rubber mesh in a mesh shape. The cushion 25 is formed, or the flexible spacer 25 is formed in such a manner that the rubber gasket is integrally formed on the mesh. Further, in order to generate a fixing force when the brittle material substrate 3 is placed, the flexible spacer 25 can also be made of an adhesive rubber or the like having good adhesion.
對利用如上述般構成之本實施例之滾動裂斷裝置分斷基板之過程具體地進行說明。 The process of dividing the substrate by the rolling breaking device of the present embodiment configured as described above will be specifically described.
首先,如圖3所示,將藉由刻劃步驟而於上面形成有刻劃線S之脆性材料基板3載置於柔軟性安放襯墊25上。在將脆性材料基板3載置於柔軟性安放襯墊25上時,柔軟性安放襯墊25未撓曲地維持水平狀態。亦即,柔軟性安放襯墊25,其一側端藉由拉伸部30而經常性地以較脆性材料基板3之重量為大之力拉伸,因此防止因脆性材料基板3之重量而使柔軟性安放襯墊25之中央部位往下方撓曲。 First, as shown in FIG. 3, the brittle material substrate 3 on which the score line S is formed by the scribing step is placed on the flexible mounting pad 25. When the brittle material substrate 3 is placed on the flexible mounting pad 25, the flexible mounting pad 25 is maintained in a horizontal state without being bent. In other words, the one side end of the flexible mounting pad 25 is stretched with a large force of the brittle material substrate 3 by the stretching portion 30, so that the weight of the brittle material substrate 3 is prevented. The central portion of the softness-imparting pad 25 is deflected downward.
當將脆性材料基板3載置於柔軟性安放襯墊25上,升降部26藉由驅動裝置(未圖示)上升。一旦升降部26上升則使得按壓移動滾動部 20亦上升,藉此,在載置有脆性材料基板3之狀態下維持水平狀態之柔軟性安放襯墊25之下面之一部分,亦藉由按壓移動滾動部20上升一定之高度。 When the brittle material substrate 3 is placed on the flexible mounting pad 25, the lifting portion 26 is raised by a driving device (not shown). Once the lifting portion 26 is raised, the pressing and moving portion is pressed In addition, a portion of the lower surface of the flexible mounting pad 25 that maintains the horizontal state in the state in which the brittle material substrate 3 is placed is also raised by the pressing movement portion 20 by a certain height.
當按壓移動滾動部20一邊抵接於柔軟性安放襯墊25之下面,一邊使柔軟性安放襯墊25押往上方(在圖3之Y方向)時,載置於柔軟性安放襯墊25上之脆性材料基板3亦同時往上方位移。亦即,如圖4所示,一旦柔軟性安放襯墊25藉由按壓移動滾動部20而被押至Y軸上之一定之高度,則使得載置於柔軟性安放襯墊25上之脆性材料基板3亦被往上方舉起。此時,一旦形成於脆性材料基板3之上面之刻劃線S之高度以按壓移動滾動部20之上升高度進行位移,則於使刻劃線S裂開之方向產生拉伸應力,藉此形成於刻劃線S之裂痕緩緩地往下側延伸並分斷脆性材料基板3。 When the movable rolling portion 20 is pressed against the flexible mounting pad 25, the flexible mounting pad 25 is placed upward (in the Y direction of FIG. 3), and placed on the flexible mounting pad 25. The brittle material substrate 3 is also displaced upward at the same time. That is, as shown in FIG. 4, once the flexible mounting pad 25 is pushed to a certain height on the Y-axis by pressing the moving rolling portion 20, the brittle material placed on the flexible mounting pad 25 is made. The substrate 3 is also lifted upward. At this time, once the height of the score line S formed on the upper surface of the brittle material substrate 3 is displaced by the rising height of the pressing movement rolling portion 20, tensile stress is generated in the direction in which the score line S is cracked, thereby forming The crack of the scribe line S gradually extends downward and breaks off the brittle material substrate 3.
此外,如圖5所示,在脆性材料基板3之刻劃線S藉由按壓移動滾動部20之按壓力而左右分離時,藉由脆性材料基板3之本身重而加重施加於刻劃線S上之拉伸應力,因此裂痕之進行速度進一步地加速,可進一步容易地對脆性材料基板3進行分斷。 Further, as shown in FIG. 5, when the scribe line S is separated from the left and right by the pressing force of the moving rolling portion 20 when the brittle material substrate 3 is pressed, it is applied to the scribe line S by the weight of the brittle material substrate 3 itself. The tensile stress is increased, so that the speed at which the crack progresses is further accelerated, and the brittle material substrate 3 can be further easily separated.
此外,如圖4所示,在按壓移動滾動部20一邊於水平方向(在圖4之X方向)進行移動一邊經過形成脆性材料基板3之刻劃線S之位置之過程中,成為按壓移動滾動部20將脆性材料基板3之刻劃線S往上方舉起之形態,因此於形成有刻劃線S之每一部位,裂痕一邊進行一邊依序分斷。 Further, as shown in FIG. 4, in the process of moving the rolling portion 20 in the horizontal direction (in the X direction of FIG. 4) while passing through the position where the scribe line S of the brittle material substrate 3 is formed, it becomes a pressing movement scroll. The portion 20 lifts the scribe line S of the brittle material substrate 3 upward. Therefore, the crack is sequentially cut while being formed at each portion where the scribe line S is formed.
載置有脆性材料基板3之柔軟性安放襯墊25之表面,亦可以一般之橡膠形成,以脆性材料基板3附著於柔軟性安放襯墊25之表面並進一步增加由拉伸應力導致之分斷力之方式,亦可以吸附性橡膠或黏著性橡膠等形成。 The surface of the flexible mounting pad 25 on which the brittle material substrate 3 is placed may be formed of a general rubber, and the brittle material substrate 3 is attached to the surface of the flexible mounting pad 25 to further increase the breaking caused by the tensile stress. The force can also be formed by adsorbing rubber or adhesive rubber.
關於此,更具體地進行說明,在柔軟性安放襯墊25以黏著性橡膠形成之情形,由於脆性材料基板3貼附於柔軟性安放襯墊25,因此在圖5所示之圓內之放大圖中之脆性材料基板3之折彎之角度變陡峭,進一步附加施加於脆性材料基板3之刻劃線S之力,因此進一步有助於裂痕之進行。 In this connection, more specifically, in the case where the flexible seating pad 25 is formed of an adhesive rubber, since the brittle material substrate 3 is attached to the flexible mounting pad 25, it is enlarged in the circle shown in FIG. In the figure, the angle of the bending of the brittle material substrate 3 becomes steep, and the force applied to the scribe line S of the brittle material substrate 3 is further added, thereby further contributing to the progress of the crack.
另一方面,如前述般,按壓移動滾動部20,一邊沿著脆性材料基板3之下面於X方向移動,一邊對脆性材料基板3之形成於與X軸及Y軸垂直之方向(以下稱Z方向)之刻劃線S進行裂斷後,藉由升降部26之下降動作下降並返回至最初之位置。而且,在完成沿著形成於Z方向之刻劃線S之分斷作業後,為了繼續地執行沿著形成於X方向之刻劃線S之分斷作業,利用旋轉部28將按壓移動滾動20之朝向旋轉90度。之後,按壓移動滾動部20,藉由升降部26而再次往Y方向上升,此次一邊往Z方向移動一邊依序對脆性材料基板3之形成於X方向之刻劃線S進行裂斷。 On the other hand, as described above, the moving rolling portion 20 is pressed, and the brittle material substrate 3 is formed in a direction perpendicular to the X-axis and the Y-axis while moving along the lower surface of the brittle material substrate 3 in the X direction (hereinafter referred to as Z). After the slash S is broken in the direction, the lowering operation of the lifting portion 26 is lowered and returned to the original position. Further, after the breaking operation along the scribe line S formed in the Z direction is completed, in order to continue the cutting operation along the scribe line S formed in the X direction, the pressing portion 28 is used to scroll the pressing movement 20 The direction is rotated by 90 degrees. Thereafter, the moving rolling portion 20 is pressed, and the lifting portion 26 is again raised in the Y direction. This time, the scribe line S formed in the X direction of the brittle material substrate 3 is sequentially broken while moving in the Z direction.
在本實施例中,雖按壓移動滾動部20以在水平棚22上進行移動之方式構成,但本發明並不限定於此者,按壓移動滾動部20亦可以在旋轉部28上於水平方向進行移動之方式構成。此外,按壓移動滾動部20,圖示雖省略,但亦可以於兩端鋪設軌條等之方式使其移動,或以安裝其他之驅動裝置等之方式使其移動。 In the present embodiment, the pressing movement portion 20 is configured to move on the horizontal shed 22, but the present invention is not limited thereto, and the pressing movement rolling portion 20 may be performed in the horizontal direction on the rotating portion 28. The way of moving. Further, although the illustration of the movement of the moving scroll portion 20 is omitted, it may be moved so that the rails or the like are laid at both ends, or the other driving device or the like may be attached.
此外,根據本實施例之按壓移動滾動部20,在脆性材料基板3之與形成有刻劃線S之面為相反側之面,亦即脆性材料基板3之背面之側,長條狀之滾子(roller)一邊滾動一邊將該背面往上方舉起,因此在按壓移動滾動部20與刻劃線S之間即使產生些微之偏移等,亦可沿著刻劃線S 正確地進行分斷。 Further, according to the pressing movement rolling portion 20 of the present embodiment, the side of the brittle material substrate 3 opposite to the surface on which the scribe line S is formed, that is, the side of the back surface of the brittle material substrate 3, is rolled. The roller lifts the back side upward while rolling, so that even if a slight offset or the like is generated between the pressing movement rolling portion 20 and the scribe line S, the scribe line S may be along Break it correctly.
S‧‧‧刻劃線 S‧‧ scribe
3‧‧‧脆性材料基板 3‧‧‧Battery material substrate
20‧‧‧按壓移動滾動部 20‧‧‧Press the moving scroll
22‧‧‧水平棚 22‧‧‧ horizontal shed
25‧‧‧柔軟性安放襯墊 25‧‧‧Soft cushioning
26‧‧‧升降部 26‧‧‧ Lifting Department
28‧‧‧旋轉部 28‧‧‧Rotating Department
30‧‧‧拉伸部 30‧‧‧Stretching Department
Claims (7)
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KR1020120084653A KR101365049B1 (en) | 2012-08-02 | 2012-08-02 | Rolling break apparatus for brittle material substrate |
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TW201406683A true TW201406683A (en) | 2014-02-16 |
TWI591031B TWI591031B (en) | 2017-07-11 |
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KR (1) | KR101365049B1 (en) |
CN (1) | CN103568138B (en) |
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TWI607845B (en) * | 2015-09-29 | 2017-12-11 | 三星鑽石工業股份有限公司 | Breaking method of brittle substrate |
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JP6387679B2 (en) * | 2014-05-22 | 2018-09-12 | 三星ダイヤモンド工業株式会社 | Break method |
CN105565254B (en) * | 2014-10-17 | 2017-11-14 | 中芯国际集成电路制造(上海)有限公司 | A kind of MEMS and preparation method thereof, electronic installation |
WO2016079951A1 (en) * | 2014-11-19 | 2016-05-26 | 坂東機工株式会社 | Method for splitting glass plate and splitting device for same |
JP2016104683A (en) | 2014-11-19 | 2016-06-09 | 坂東機工株式会社 | Splitting method of glass sheet, and splitting device therefor |
CN104843488B (en) * | 2015-04-10 | 2017-12-29 | 京东方科技集团股份有限公司 | A kind of output device and cutting splitting system |
JP6149960B2 (en) * | 2016-02-17 | 2017-06-21 | 坂東機工株式会社 | Glass plate folding method |
JP6477946B2 (en) * | 2018-03-02 | 2019-03-06 | 三星ダイヤモンド工業株式会社 | Break device |
TWI664134B (en) * | 2018-08-07 | 2019-07-01 | 住華科技股份有限公司 | Transportation device and transportation method using the same |
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TWI607845B (en) * | 2015-09-29 | 2017-12-11 | 三星鑽石工業股份有限公司 | Breaking method of brittle substrate |
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KR20140018504A (en) | 2014-02-13 |
TWI591031B (en) | 2017-07-11 |
KR101365049B1 (en) | 2014-02-20 |
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JP6274756B2 (en) | 2018-02-07 |
CN103568138B (en) | 2016-11-02 |
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CN103568138A (en) | 2014-02-12 |
JP2018030376A (en) | 2018-03-01 |
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