201040571 六、發明說明： 【發明所屬之技術領域】 本兔明係關於一種氣象資料置測&又備，尤指^一種利用 微機電製程製作出可測量溫度、溼度、氣壓與風速風向等 氣象資料之微型氣象站。 【先前技術】 Ο ❹ 隨著地球溫室效應之加劇，與氣象相關的議題也在近 年：更加重視。對於氣象資訊，一般人直接聯想到的便是 曰常生活中的大氣資料，主要以戶外氣象條件為主，而用 以測量該些氣象條件的設備大多是屬於體積龐大的大型氣 象站，並不適合用於量測室内氣象資料。 然而在某些應用場合中，單 要且必須加以嚴密監控，例如半導體2象條件亦相當重 制、古文物/藝術品之展示、2:::::之_控 場所皆屬於室内環境…的 :=，前述類型 要迅速，且必須具有較高的精確度。條件不僅要求量測反應 目前可用以測量室内環境的旦 型，即單-設備僅針對一種氣 里測儀器皆屬獨立 時監控多種參數須分別添置^ 丁量測，若須要同 備又無法整合成為單—徭势、 里測設備。且該些設 俄器以同時 訊。 叔供多種室内氣象資 【發明内容】 有鑑於目前量測τ η & 用多種不同獨立 里列不同氣象資邙ν 。凡必須使 201040571 設計之量測設備，缺乏整合性的氣象觀測裝置，故本發明 之主要目的係提供-種微型氣象站及其製&，以該微型氣 象站提供溫度、澄度、氣壓、風速及風向等所需數據。 為達成前述目的，本發明之微型氣象站製法係包含 有： 形成氮化石夕薄膜於一基板之正、背面，· 於該基板正面之氮化矽薄膜上形成一白金壓阻層，該 白金壓阻層之位置係對應不同氣象資訊感測區$，該氣象 資訊感測區域包含一濕度感測區、—氣壓感測區、一風速 感測區及一風向感測區； 於該白金壓阻層上形成—接線電極層，其中該接線電 極層僅覆蓋於白金壓阻層之部分區域； 蝕刻該基板正面對應該濕度感測區及風向感測區之部 分氮化矽薄膜： 蝕刻該基板底面之部分氮化矽薄膜以形成複數蝕刻 孔：該複數蝕刻孔係對應該濕度感測區、氣壓感測區、風 速感測區及風向感測區； 蝕刻該基板，係去除外露於該複數蝕刻孔之基板，使 基板正面的氮化矽薄膜得以顯露而形成複數懸臂結構及薄 膜結構； 於該基板正面對應該濕度感測區之氮化矽薄膜與白金 壓阻層之上形成一吸水層； 於對應該氣壓感測區之基板背面設置一底板，使該底 板與基板正面之氮化矽薄膜之間形成一密封區。 本叙月之另目的係提供一種微型氣象站，該微型氣 5 201040571 象站包含有： 一基板，係具有複數氣象資訊感測區域，該氣象資訊 感測區域包含一濕度感測區、一氣壓感測區、一風速感測 區及一風向感測區； 一氮化矽薄膜，係沉積於該基板之正面而在該濕度感 測區與風向感測區之所在位置形成懸臂，且在該氣壓感測 區與風速感測區之所在位置形成薄膜； 一白金壓阻層’係形成於該基板之正面之氮化矽薄膜 Ο 上； 一接線電極層’係形成於該白金壓阻層上； 一吸水層’係覆蓋於基板正面對應該濕度感測區之氮 化矽薄膜與白金壓阻層； 一底板’係設置於該基板背面且對應該氣壓感測區， 該底板與基板正面之氮化矽薄膜之間形成一密封區。 前述微型氣象站台以其懸臂結構用來感測濕度及風 0 向，該薄膜結構可應用於感測氣壓及風速，藉由量測懸臂 結構/薄膜結構上方之白金壓阻層的電阻變化，並與標法 參考數據相比，可藉由電阻值的改變而換算出所需數據； 又白金壓阻層本身電阻對溫度呈線性變化之特性可應用於 感測氣溫。故只要同時使用多數個微型氣象站台，並將其 個別搭配一獨立之控制電路，根據各微型氣象站台之電阻 變化狀態便可獲得其負責之獨立氣象觀測數據。 【實施方式】 本發明係提供一種兼具溫度、溼度、氣壓與風速風向 6 201040571 之微型氣象站及其製法，透過體型微細加工可分別製作出 微型溫度計、微懸臂式濕度計、薄膜式氣壓計、微懸臂式 風向計與熱膜式風速計等’以下係配合圖式逐步說明： 請參考第-圖A所示，首先於—基板（1Q)的兩面皆沉 積一層鼠化石夕（Si3N4)肖膜（12)作為懸臂與薄膜之結構材 料該基板（10)可為厚度500 # m的厚石夕晶圓，而氮化石夕薄 膜（12)之厚度度約為1G# m厚，其中亦須透過氮化石夕對濕 蝕刻氫氧化鉀各液之選擇性，使氮化矽薄膜（12)作為罩幕 之用。 月4考弟圖B所示，於基板（10)正面的氮化石夕薄膜（12) 上，係先沉積一層黏著層，該黏著層可為厚度約為0.02# 的鉻（Cr)形成黏著層後，於其表面進行金屬沉積作業 以形成-白金壓阻層(14)’本實施例以電子束蒸鍍(mectr〇n beam evaporation)的方式沉積一層厚〇的白金，該 白金壓阻層（14)於基板⑽之所在位置係根據氣象資訊感測 區域而定義，例如在本發明中定義出可感測濕度、氣壓、 風速、風向等不同氣象資訊感測區域。 請參考第一圖c所示，於該白金壓阻層（14)的表面係 再形成一接線電極層（16)，在此是以相同的技術沉積一層 厚度〇_ 1 # m的金屬層，例如金（Au)來作為接線電極。 凊參閱第一圖D所示，為了在基板（1〇)的不同區域完 成感應濕度與風向所需之懸臂以及感應風速與氣壓所需之 薄膜，故在該基板（10)底面係先形成一道濕式蝕刻所需之 罩幕，因此以反應性離子蝕刻（Reactive丨〇n Etch, r丨日）的 方法將一部份氮化矽薄膜（12)去除，使蝕刻孔露出，保留 7 201040571 在基板（10)之上氮化矽薄膜（12)係作為蝕刻罩幕，基板（1〇) 所露出的區域即是後續製程中要進行濕式蝕刻的區域。 請參考第一圖E所示’利用鐵氟龍夾具配合〇型環 (Ο-ring)來保護基板（1〇)正面之金屬電極結構，僅露出基板 (1〇)背面，將其放入30%重量百分比濃度和持溫於8〇~85 t的氫氧化鉀（KOH)蝕刻液，令基板（1〇)之背部進行非等向 性濕式蝕刻反應，將露出於蝕刻孔之基板（1〇)去除，使基 板（1 〇)正面之氮化矽薄膜（12)構成所需的懸臂（3〇)(31)與薄 膜（32)(33)。 請參考第一圖F所示，於其中一懸臂（3〇)上係塗佈聚 酰亞胺（polyimide)薄膜作為吸水層（18)，該吸水層（彳8)係 覆蓋露出於接線電極層（16)之外的白金壓阻層（14),藉由 吸水層（18)之膨脹收縮進而造成懸臂（3〇)結構之形變，因 而連帶改變懸臂（30)上方之白金壓阻層（14)之阻值，以此 達到濕度量測之機制。在本實施例中，懸臂（3〇)上方之白 金壓阻層（14)的線寬為50 # m，而懸臂（3〇)之長、寬分別 為 4000// m 與 400// m。 請參考第一圖G所示，在任一薄膜（33)下方係形成一 底板（34)，該底板（34)連接於基板（10)背面之兩相鄰氮化矽 薄膜（12)之間，以該底板（34)與上方之薄膜（33)形成一密封 區（35)，該密封區（35)内之氣壓值供作為參考氣壓，可對 比上方薄膜（33)因大氣壓力變化時造成之不同變形量下之 氣壓值。此底板（34)之連結製程可使用任何方式，只要能 固定底板（34)於該位置即可。 本發明以前述製程所製成之微型氣象站台本身其不同 8 201040571 區域係形成針對不同氣象條件觀測之結構，例如離臂(3〇) 可應用於濕度感測、薄膜（33)配合底板（34)可應用於氣麼 感測，懸臂（31)可應用於風向感肖。故只要同時使用多數 個微型氣象站台，並將其個別搭配一 據各微型氣象站台之電阻變化狀態便 獨立之控制電路，根 可獲得其負責之獨立 氣象觀測數據。以下僅針對各種氣象條件如何觀測逐一解 釋。 A. 濕度量測 由於懸臂（30)上的聚酰亞胺薄膜因吸收水氣而膨服， 拉扯懸臂(30)使白金壓阻層(14)產生電阻值的改變，因此 將製作出之微懸臂式溼度計預先置入於一溫濕度控制箱 内，依量測須求以不同溫度與相對濕度下，經電性量測系 統（LCR)量測微懸臂式澄度計其白金電阻值之變化。如第 二圖所示’本實施例中分別將溫度設於4〇<t、6〇。〇與8〇 °C以及相對溼度40到85獅之下量測其電阻值的變化， 依據該些曲線作為實際量測濕度時之參考基準。 B. 溫度量測 因白金屬於正電阻溫度係數之材料，故該白金壓阻層 (14)之電阻會隨溫度增加而增加，在溫度變化不大的情況 下，其電阻與溫度約成線性關係，因此透過測量金屬的電 ’本實施例所用之白金 由於白金熔點高，因此 阻’便可得知當下之環境溫度為何 其電阻溫度係數（TCR)為0.0044。 可測量的溫度範圍更大，約在攝氏_25(rCl 12〇(rc左右， 白金感/皿电阻具有尚精確度及南安定性，在⑽。C 之間亦有很好的線性度。如第三圖所*，係顯示本發明在 9 201040571 不同溫度下，該白金壓阻層（14)之電阻變化β C.氣壓量測201040571 VI. Description of the invention: [Technical field to which the invention belongs] The rabbit system relates to a meteorological data set and test, especially a method for producing temperature, humidity, air pressure and wind speed and wind direction using a microelectromechanical process. Information on the micro weather station. [Prior Art] Ο ❹ With the intensification of the global warming effect, issues related to meteorology are also in recent years: more attention is paid. For meteorological information, the average person directly associates with the atmospheric data in the daily life, mainly in outdoor weather conditions, and the equipment used to measure these meteorological conditions are mostly large-scale weather stations, which are not suitable for use. For measuring indoor meteorological data. However, in some applications, it must be closely monitored and monitored. For example, the semiconductor 2 image conditions are quite heavy, the ancient artifacts/artworks are displayed, and the 2::::: control places are all indoor environments... :=, the aforementioned types are fast and must have a high degree of precision. The condition not only requires that the measurement reaction can be used to measure the denier of the indoor environment, that is, the single-device is only for one type of gas-inspection instrument, and the monitoring of various parameters must be separately measured. If it is necessary, it cannot be integrated. Single - potential, measuring equipment. And these devices are at the same time. Uncle for a variety of indoor meteorological resources [Invention] In view of the current measurement τ η & use a variety of different independent ranks of different meteorological resources ν. The measurement equipment designed by 201040571 must lack the integrated meteorological observation device. Therefore, the main purpose of the present invention is to provide a micro weather station and its system, which provides temperature, degree, pressure, and Required data such as wind speed and direction. In order to achieve the foregoing objective, the micro weather station manufacturing method of the present invention comprises: forming a nitride film on the front and back sides of a substrate, and forming a platinum piezoresistive layer on the tantalum nitride film on the front surface of the substrate, the platinum pressure The position of the resist layer corresponds to different weather information sensing area $, and the weather information sensing area comprises a humidity sensing area, a pressure sensing area, a wind speed sensing area and a wind direction sensing area; Forming a wiring electrode layer on the layer, wherein the wiring electrode layer covers only a portion of the platinum piezoresistive layer; etching a portion of the tantalum nitride film corresponding to the humidity sensing region and the wind direction sensing region on the front surface of the substrate: etching the substrate bottom surface a portion of the tantalum nitride film to form a plurality of etched holes: the plurality of etched holes are corresponding to the humidity sensing region, the gas pressure sensing region, the wind speed sensing region, and the wind direction sensing region; etching the substrate to remove the exposed etching The substrate of the hole is such that the tantalum nitride film on the front surface of the substrate is exposed to form a plurality of cantilever structures and a film structure; the tantalum nitride film corresponding to the humidity sensing region on the front side of the substrate Gold piezoresistive layer is formed over a water-absorbing layer; a bottom plate provided on the back surface of the substrate to be measured pressure sensing zone, so that the bottom plate is formed a sealing zone between the front surface of the silicon nitride film and the substrate. Another purpose of this month is to provide a miniature weather station. The micro gas 5 201040571 image station includes: a substrate having a plurality of weather information sensing areas, the weather information sensing area including a humidity sensing area, a pressure a sensing region, a wind speed sensing region and a wind direction sensing region; a tantalum nitride film deposited on the front side of the substrate and forming a cantilever at a position of the humidity sensing region and the wind direction sensing region, and a film is formed at a position where the air pressure sensing region and the wind speed sensing region are located; a platinum piezoresistive layer is formed on the tantalum nitride film 正面 on the front surface of the substrate; and a wiring electrode layer is formed on the platinum piezoresistive layer A water absorbing layer is a tantalum nitride film and a platinum piezoresistive layer covering the humidity sensing region on the front side of the substrate; a bottom plate is disposed on the back surface of the substrate and corresponding to the air pressure sensing region, the bottom plate and the front surface of the substrate A sealing zone is formed between the tantalum nitride films. The micro weather station is configured to sense humidity and wind direction with its cantilever structure, and the film structure can be applied to sense air pressure and wind speed by measuring the resistance change of the platinum piezoresistive layer above the cantilever structure/film structure, and Compared with the reference data of the standard method, the required data can be converted by the change of the resistance value; and the characteristic that the resistance of the platinum piezoresistive layer itself changes linearly with temperature can be applied to the sensing temperature. Therefore, as long as a plurality of micro weather stations are used at the same time, and they are individually matched with an independent control circuit, the independent meteorological observation data that are responsible for them can be obtained according to the resistance change state of each micro weather station. [Embodiment] The present invention provides a micro weather station having a temperature, a humidity, a gas pressure, and a wind speed and a wind direction of 6 201040571, and a method for manufacturing the same, and a micro-thermometer, a micro-cantilever type hygrometer, and a film type barometer can be respectively manufactured through the micro-machining of the body type. , micro-cantilever wind direction meter and hot film anemometer, etc. 'The following system is a step-by-step description of the pattern: Please refer to the figure -A, first deposit a layer of ratification fossil (Si3N4) on both sides of the substrate (1Q) The film (12) is used as a structural material of the cantilever and the film. The substrate (10) may be a thick stone wafer having a thickness of 500 #m, and the thickness of the nitride film (12) is about 1G#m thick, wherein The tantalum nitride film (12) is used as a mask by the selectivity of the wet etching of each of the potassium hydroxide solutions by means of a nitride. On the nitriding film (12) on the front side of the substrate (10), an adhesive layer is deposited on the front side of the substrate (10). The adhesive layer can be an adhesive layer of chromium (Cr) having a thickness of about 0.02#. Thereafter, a metal deposition operation is performed on the surface thereof to form a platinum-plated piezoresistive layer (14). In this embodiment, a thick layer of platinum is deposited by electron beam evaporation (mectr〇n beam evaporation), and the platinum piezoresistive layer ( 14) The position of the substrate (10) is defined according to the weather information sensing area. For example, in the present invention, different weather information sensing areas such as humidity, air pressure, wind speed, and wind direction are defined. Referring to the first figure c, a wiring electrode layer (16) is further formed on the surface of the platinum piezoresistive layer (14), and a metal layer having a thickness of 〇_1 #m is deposited by the same technique. For example, gold (Au) is used as a wiring electrode.凊 Referring to the first figure D, in order to complete the cantilever required for sensing humidity and wind direction and the film required for sensing wind speed and air pressure in different areas of the substrate (1〇), a bottom surface of the substrate (10) is formed first. The mask required for wet etching, so a part of the tantalum nitride film (12) is removed by reactive ion etching (Reactive丨〇n Etch) to expose the etched holes, leaving 7 201040571 in The tantalum nitride film (12) on the substrate (10) serves as an etching mask, and the exposed region of the substrate (1) is the region to be wet-etched in the subsequent process. Please refer to the first figure E to 'protect the metal electrode structure on the front side of the substrate (1〇) with a Teflon clamp and a Ο-ring. Only expose the back surface of the substrate (1〇) and place it in 30 % by weight concentration and potassium hydroxide (KOH) etching solution with a temperature of 8〇~85 t, the back of the substrate (1〇) is subjected to an anisotropic wet etching reaction, and the substrate exposed to the etching hole is exposed (1) 〇) Removal, so that the tantalum nitride film (12) on the front side of the substrate (1) constitutes the desired cantilever (3) (31) and film (32) (33). Referring to FIG. F, a polyimide film is coated on the cantilever (3 〇) as a water absorbing layer (18), and the water absorbing layer (彳8) is exposed to the wiring electrode layer. The platinum piezoresistive layer (14) other than (16) is deformed by the expansion and contraction of the water absorbing layer (18) to cause deformation of the cantilever (3 〇) structure, thereby changing the platinum piezoresistive layer above the cantilever (30). The resistance value is used to achieve the mechanism of humidity measurement. In this embodiment, the white gold piezoresistive layer (14) above the cantilever (3) has a line width of 50 #m, and the cantilever (3〇) has a length and a width of 4000//m and 400//m, respectively. Referring to FIG. G, a bottom plate (34) is formed under any film (33). The bottom plate (34) is connected between two adjacent tantalum nitride films (12) on the back surface of the substrate (10). The bottom plate (34) and the upper film (33) form a sealing zone (35), and the pressure value in the sealing zone (35) is used as a reference air pressure, which can be compared with the upper film (33) due to changes in atmospheric pressure. The pressure value under different deformation amounts. The joining process of the bottom plate (34) can be carried out in any manner as long as the bottom plate (34) can be fixed at the position. According to the invention, the micro weather station itself made by the above process has different structures. The 201040571 region forms a structure for different meteorological conditions, for example, the arm (3〇) can be applied to humidity sensing, and the film (33) is matched with the bottom plate (34). Can be applied to gas sensing, cantilever (31) can be applied to wind direction. Therefore, as long as most micro-weather stations are used at the same time, and they are individually matched with the control circuit of the micro-weather stations, the independent control circuit can obtain the independent meteorological observation data. The following is only an explanation of how the various meteorological conditions are observed. A. Humidity measurement Since the polyimide film on the cantilever (30) is swollen by absorbing moisture, pulling the cantilever (30) causes the platinum piezoresistive layer (14) to change the resistance value, so it will be made The cantilever hygrometer is pre-installed in a temperature and humidity control box. According to the measurement, the platinum resistance value of the micro cantilever type hysterometer is measured by the electrical measurement system (LCR) under different temperatures and relative humidity. Variety. As shown in Fig. 2, the temperature is set to 4 〇 < t, 6 分别 in the present embodiment. 〇 and 8 〇 ° C and relative humidity of 40 to 85 lions to measure the change in resistance value, based on these curves as a reference for the actual measurement of humidity. B. Temperature measurement Because the white metal is in the material of the positive resistance temperature coefficient, the resistance of the platinum piezoresistive layer (14) increases with the increase of temperature, and the resistance is linear with the temperature when the temperature does not change much. Therefore, by measuring the electrical conductivity of the metal, the platinum used in this embodiment has a high melting point of platinum, so the resistance can be known as the current ambient temperature, and its temperature coefficient of resistance (TCR) is 0.0044. The measurable temperature range is larger, about 0.25 °C (rCl 12 〇 (circle rc, platinum resistance / dish resistance has accuracy and South stability, also has good linearity between (10) and C. The third figure shows that the resistance change of the platinum piezoresistive layer (14) at different temperatures of 9 201040571 is β C.
請參考第一圖G、第八圖及附件一所示，本發明之氣 體壓力感測方式透過以上述製程形成之薄膜（33)，並且藉 由改變該感測層之面積而達到目的。其係以沉積氮化矽的 矽材料為感測器之基材，並於壓力感測器背部反應離子蝕 刻後，以濕蝕刻後殘留於矽基材上之氮化矽薄膜（33)做為 感測器感測層之薄膜，且在薄膜（33)上透過電子束蒸鍍法 沉積白金壓阻層（14)做為感測層之感測電極，再將感測器 於負壓環境中黏著於一底板（35)上，該底板（35)可為一載 玻片。其中經由連接電極以量測感測層因氣壓變化對薄膜 產生之變形量，藉由薄膜之變形得知壓力之變化。薄膜Ο” 產生變形時，可透過量測作為感測電極之白金壓阻層 而得知其電阻變化’如第七圖所示，4測電阻變化即3可推 知變形量，附件一係顯示本發明單獨構成一氣壓計之正面 (左方）及背面（右方）樣品。 D·風向量測 請參考第四、五圖及附件二所示，於風向量測中將首 次氣流流入之相對角度（如箭號Α所示）位置定為18〇。，其 餘懸臂依照順時針方向，順序為9〇。、 ^八 四個部分，變因為風速，定為15 m/s、20 m/s、25刀 與m/s ’入風角度任意取三點。實驗所得各風速下之： 線皆有相似的變化趨勢。而於風速3〇牆的情兄下 量得之電阻值各角度中增加最多者，近2 Ω，：’丄所 軋流之順向下壓力’致使白金壓阻層(14)遭到拉伸所導：到 10 201040571 反之’於〇。之懸臂樑由於逆向受風’使得懸臂向上短起， 白金因此遭受到擠壓，其電阻值在各懸臂角度中為降低最 多者，為1.2Ω。 巨觀的風向可由懸臂各自的電阻值變化來直接判斷出 入風方向。以〇。、9〇。、180。、27〇。處之風向而言，直接 從四根懸臂的電阻值變化做比較，氣流之流向經由各組懸 臂間的變化大小關係看出，懸臂入風處的電阻值提升量勢Referring to the first figure G, the eighth figure and the annex 1, the gas pressure sensing mode of the present invention passes through the film (33) formed by the above process, and the object is achieved by changing the area of the sensing layer. The tantalum nitride material (33) which is deposited on the tantalum substrate after wet etching is used as a base material of the sensor for depositing tantalum nitride and is subjected to ion etching on the back of the pressure sensor. The sensor senses a thin film of the layer, and deposits a platinum piezoresistive layer (14) on the film (33) by electron beam evaporation as a sensing electrode of the sensing layer, and then the sensor is in a negative pressure environment. Adhesive to a bottom plate (35), which can be a slide. The deformation of the sensing layer due to the change of the air pressure is measured through the connecting electrode, and the change of the pressure is known by the deformation of the film. When the film is deformed, the resistance change of the platinum can be measured by measuring the platinum piezoresistive layer as the sensing electrode. As shown in the seventh figure, the measured resistance change is 3, and the amount of deformation can be inferred. The invention separately constitutes the front (left) and back (right) samples of a barometer. D. Wind vector measurement, please refer to the fourth, fifth and annexes, and the relative angle of the first airflow in the wind vector measurement. (As indicated by arrow Α), the position is set to 18〇. The remaining cantilevers are in the clockwise direction, the order is 9〇., ^ eight parts, because the wind speed is set to 15 m/s, 20 m/s, 25 knives and m/s 'wind angle can be taken at any three points. The wind speeds of the experiment have similar trends. , nearly 2 Ω,: 'the downward pressure of the rolling flow' causes the platinum piezoresistive layer (14) to be stretched: to 10 201040571, otherwise 'Yu. The cantilever beam is reversed by the wind' The cantilever is shortened upward, and the platinum is thus squeezed, and its resistance value is in each cantilever angle. In order to reduce the maximum, it is 1.2 Ω. The wind direction of the giant view can be directly determined by the change of the resistance value of the cantilever to directly determine the direction of the wind. 〇., 9〇, 180, 27〇. In terms of wind direction, directly from the wind The change of the resistance value of the root cantilever is compared, and the flow direction of the airflow is seen through the relationship between the change of the cantilever of each group, and the resistance value of the cantilever into the wind is increased.
必為最大，出風處懸臂的電阻值則減少最多，剩餘兩根懸 臂受影響最小’且變化大致相同。 而入風角為45。（如箭號Β所示）、135。、225。、315。 的情況下而言，此即代表風先由兩懸臂的中央切入，再由 兩懸臂中央切出。此時便為入風點最接近之兩側懸臂受到 ，等的順風下虔力’造成電阻值上升；其後方兩：風：懸 臂：受到均等的逆風力上抬造成電阻值下降，㈣臂之變 化量為兩兩成對進行且互等比例，藉由其電 = 風向即可決定。以上八大方位角的情況下，不須依: 二 助即可直接完嫩。但若為更細部的角度判 斷則須要先得知風速。 風向角度判斷上，是在受風時量測各懸臂之變化值， 與負變化最大的懸臂各自在風向圖上於對應該風 後=向曲線中找出’再找出剩餘兩組懸臂在曲線上的點 最為接二Tr =入風角，比較就近角度之0。、90。、180。或270。， 東北件西°1田部的精確切入角。故，東、西、南、北、東南、 、西北專八大方向不須風速資料即可決定風向。 201040571 若要得知更精確的人風角度，則必須以風速風 助’再以比對法判斷。 貝枓做輔 E ·風速量測 於風速量測中，因本發明採以熱 之設計原理，因此須額外紙與 ’、、、風速感測器 貝額外、..σ與一加熱器以其加埶 度，感測料料収Μ金録層（14)料—頁溫 ❹ 〇 以進行風速對阻值變化之量測。其主要工作=益， 加熱器加熱該微型氣象站台至、乃疋透過 層（14)之阳佶介收 疋/凰度’而該白金壓阻 )之阻值亦將因溫度影響而升高，·當給予 站台一流通氣流將其熱量帶走，因本身溫度之；二：！ 導致白金堡阻層⑽本身阻值下降 ：下降… 之變化错由觀察風速對阻值 之-化關係而疋義當下所通過 成風速量測。 』故本發明可達 【圖式簡單說明】 第-圖A〜第一圖G: ^ - Η · , « 〜表缸步驟不意圖。 第一圖.本發明於不同溫 第三圖 第四圖 第五圖 第六圖 第七圖 第八圖 /、仰奵濕度之量測特性圖丨 本發明於不同溫度下之量測特性圖。 本發明之風向測試示意圖。 本發明之風向與電阻值變化之關係圖。 :發明之風速與電阻值變化之關係圖。 發明之氣應與電阻值變化之關係圖。 意圖 發月之微型氣象台構成―氣料之正面示 附件一：以本發明微型氣象台構成-氣料其正、反 12 201040571 面樣品照片。 附件二：以本發明微型氣象台之懸臂樣品照片。 【主要元件符號說明】 (10)基板 (12)氮化矽薄膜 (14)白金壓阻層 (16)接線電極層 (1 8)吸水層 (30)(31)懸臂 (32)(33)薄膜 (34) 底板 (35) 密封區It must be the largest, and the resistance of the cantilever at the outlet is reduced the most, and the remaining two cantilevers are minimally affected and the changes are approximately the same. The wind angle is 45. (as indicated by the arrow 、), 135. 225. 315. In this case, this means that the wind is first cut in from the center of the two cantilevers and then cut out from the center of the two cantilevers. At this time, the cantilever is received on the two sides closest to the wind inlet point, and the resistance of the wind is increased by the wind force; the rear two are: the wind: the cantilever: the equal reverse wind force rises to cause the resistance value to drop, (4) the arm The amount of change is carried out in pairs and in equal proportions, which can be determined by its electric = wind direction. In the case of the above eight azimuths, you do not need to rely on: However, if you judge the angle of the detail, you must first know the wind speed. In the wind direction angle judgment, the change value of each cantilever is measured when the wind is received, and the cantilever with the largest negative change is respectively found on the wind direction map corresponding to the wind = the curve to the curve, and then the remaining two sets of cantilever are found in the curve. The point on the top is the second Tr = the wind angle, and the nearest angle is 0. 90. 180. Or 270. , the precise cut-in angle of the northwest part of the west part of the 1st. Therefore, the wind direction can be determined without the wind speed data in the east, west, south, north, southeast, and northwest. 201040571 To learn more about the angle of the wind, you must use the wind speed to help you judge by comparison. Bessie is the auxiliary E · wind speed measurement in the wind speed measurement, because the invention adopts the thermal design principle, so extra paper and ',,, wind speed sensor, extra, .. σ and a heater are required. The twisting degree, the sensing material receiving gold recording layer (14) material-page temperature 〇 〇 to measure the wind speed versus resistance value. The main work = benefit, the heating of the micro-weather station to the heat transfer layer (14), the imperme of the layer (14) and the resistance of the platinum (the platinum piezoresistive) will also increase due to temperature effects. · When giving the station a flow of air to take away its heat, because of its own temperature; two:! As a result, the resistance of the Baijinbao resist layer (10) itself decreases: the change of the fault is determined by observing the relationship between the wind speed and the resistance value. 』The invention is reachable [Simplified description of the drawing] - Figure A ~ Figure G: ^ - Η · , « 〜 Table cylinder step is not intended. The first picture. The present invention is at different temperatures. The third picture is the fourth picture, the fifth picture, the sixth picture, the seventh picture, the eighth picture, the measurement characteristic of the humidity of the sputum, and the measurement characteristic chart of the invention at different temperatures. A schematic diagram of the wind direction test of the present invention. A diagram showing the relationship between the wind direction and the change in resistance value of the present invention. : Diagram of the relationship between the wind speed of the invention and the change in resistance value. The relationship between the gas of the invention and the change in resistance value. Intentions The micro-memory station of the month of the month constitutes the front view of the gas material. Annex I: The micro-weather station of the present invention is composed of a gas material whose positive and negative 12 201040571 surface samples. Annex II: Photograph of the cantilever sample of the micro weather station of the present invention. [Main component symbol description] (10) Substrate (12) Tantalum nitride film (14) Platinum piezoresistive layer (16) Wiring electrode layer (18) Water absorption layer (30) (31) Cantilever (32) (33) film (34) Base plate (35) Sealing area
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