201035141 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於如玻璃基板、矽晶圓、半導體 兀件（semiconductor device)等之要求高度表面平坦性的玻 璃材料之生產的熱硬化性胺基甲酸酯（TSU)型之硏磨墊用2 液型胺基甲酸酯樹脂組成物、使用它而成之聚胺基甲酸酯 硏磨墊、及該聚胺基甲酸酯硏磨墊之製法。 【先前技術】 〇 以往，液晶顯示器（LCD)用玻璃基板、硬碟（HDD)用玻 璃基板、記錄裝置用玻璃碟片、光學用透鏡、矽晶圓、半 導體元件等之要求高度表面平坦性的玻璃材料的一般製造 上，係首先進行使用胺基甲酸酯樹脂製之硏磨墊的「粗加 工步驟」，接著進行使用硏磨布之「精加工步驟」，以進行 精密硏磨。 作爲可用於玻璃硏磨之熱硬化性胺基甲酸酯樹脂製的 硏磨墊之方法，迄今已有例如組合含有異氰酸酯基末端胺 〇 基甲酸酯預聚物之主劑與硬化劑之所謂的2液型胺基甲酸 酯樹脂組成物之各種提案。 例如，已知一種玻璃硏磨聚胺基甲酸酯墊用之2液型 組成物，其係由含有異氰酸酯基末端胺基甲酸酯預聚物之 主劑，與含有異氰酸酯基反應性化合物、作爲發泡劑的水、 無機硏磨劑及觸媒之硬化劑所構成的玻璃硏磨聚胺基甲酸 酯墊用2液型組成物，前述預聚物係分別使用至少甲苯二 異氰酸酯（TDI)、聚（四亞甲基醚）乙二醇（PTMG)及聚己內酯 .201035141 三醇（PCL)，在混合PTMG與PCL的情況下使平均官能基 數成爲2.1 ~2.7之範圍，來使其反應而得之異氰酸酯基末端 胺基甲酸酯預聚物，且前述異氰酸酯基反應性化合物係至 少由4,4’-二胺基-3，3’-二氯二苯基甲烷與聚（四亞甲基醚） 乙二醇所構成。該2液型組成物之預聚物爲低黏度，混合 成形時之泡沫、氣孔減低，可得均勻的氣泡，此外，藉由 聚醇混合物之平均官能基數的適性化，能夠抑制因硏磨加 工時發熱所導致的硏磨墊之硬度降低（例如，參照專利文獻 Ο 1)。 然而，使用專利文獻1記載之2液型組成物所構成的 玻璃硏磨聚胺基甲酸酯墊來進行加工物的硏磨時，由於硏 磨墊與加工物之間所產生的摩擦熱，硏磨墊表面之溫度係 顯著上昇，且前述樹脂組成在漿液或水溶液的存在下伴隨 著顯著的溫度上昇，硏磨墊之耐熱水性惡化，因此硏磨墊 的硬度（彈性模數）改變，而有對要求高度表面平坦性之玻 璃材料的平坦化加工造成不良影響之問題。 〇 如上所述，將聚異氰酸酯與聚胺基氯苯基甲烷化合物 之反應性控制到作業上沒有問題的程度、各種硏磨性能優 異之硏磨墊用2液型胺基甲酸酯樹脂組成物、及使用它而 成之聚胺基甲酸酯硏磨墊的開發係迫切期望。 [專利文獻1]特開2005-68168號公報 【發明内容】 發明所欲解決之課題 本發明之目的爲提供一種成形作業時之反應性的控制 201035141 爲容易且可均勻地形成微細形狀之發泡胞（胞控制性） 耐久性（耐熱水性）、耐摩耗性、成形性（產率、成形不女 優良的硏磨墊用2液型胺基甲酸酯樹脂組成物。 又提供一種高硬度聚胺基甲酸酯硏磨墊，其係使 合於將半導體基板、光學基板、磁性基板等之要求高 面平坦性的玻璃材料予以平坦化之該硏磨墊用2液型 甲酸酯樹脂組成物而成、及聚胺基甲酸酯硏磨墊之製; 解決課題之手段 〇 本發明人欲解決上記課題而進行鑽硏探討，結 現：在由含有異氰酸酯基末端胺基甲酸酯預聚物之主 與含有異氰酸酯基反應性化合物、作爲發泡劑之水及 之硬化劑所構成的硏磨墊用2液型胺基甲酸酯樹脂組 中，前述預聚物係使作爲聚異氰酸酯之聯甲苯胺二異 酯與二醇反應而得之異氰酸酯基末端胺基甲酸酯預聚 藉由限定前述預聚物合成時，異氰酸酯基與羥基的莫 (即「NCO/OH莫耳比」）、前述胺基甲酸酯預聚物之 ◎ 當量、前述莫耳比與NCO當量的積於特定之範圍內， 到耐久性（耐熱水性）、耐摩耗性、成形性（例如，產率 形不均）優良，且作業時之反應性控制爲容易，能形成 且微細形狀之胞的硏磨墊用2液型胺基甲酸酯樹脂 物、使用它而成之高硬度聚胺基甲酸酯硏磨墊、及聚 甲酸酯硏磨墊之製法，而完成了本發明。 亦即’本發明係提供一種硏磨墊用2液型胺基甲 樹脂組成物，特徵爲其係以含有異氰酸酯基末端胺基 ，且 奇等） 用適 度表 胺基 果發 劑、 觸媒 成物 氰酸 物， 耳比 NCO 可得 、成 均勻 組成 胺基 酸酯 甲酸 201035141 酯預聚物（A)之主劑與包括具有含活性氫的基之化合物（bl) 的硬化劑（B)爲必須成分之硏磨墊用胺基甲酸酯樹脂組成 物’前述預聚物（A)係使聯甲苯胺二異氰酸酯（al)與二醇（a2) 反應而得者，在其合成時，前述聯甲苯胺二異氰酸酯（al) 之異氰酸酯基與前述二醇（a2)羥基的莫耳比（α)爲 2.10〜2.30，前述預聚物（Α)之NCO當量（β)爲460〜550，且 前述莫耳比（α)與NCO當量（β)的積（αχβ)爲1〇55~1265之範 圍。 〇 又，本發明亦提供一種使用前述硏磨墊用異氰酸酯基 末端胺基甲酸酯預聚物而成之聚胺基甲酸酯硏磨墊。 又，本發明亦提供一種聚胺基甲酸酯硏磨墊之製法， 其特徵係將前述硏磨墊用2液型胺基甲酸酯樹脂組成物注 入鑄模內使其發泡、硬化，將該發泡成形物從鑄模取出， 並切片成片狀。 發明效果 本發明之硏磨墊用2液型胺基甲酸酯樹脂組成物可使 〇 作業時之反應性控制爲容易，成形性優良，能容易形成均 勻且微細形狀之發泡胞。 又，本發明之聚胺基甲酸酯硏磨墊係因硏磨操作時之 溫度上昇導致硏磨墊的硬度（彈性模數）改變小、耐久性（耐 熱水性等）、耐摩耗性、成形性（產率、成形不均等）優良， 可用於例如，液晶顯示器（LCD)用玻璃基板、硬碟（HDD)用 玻璃基板、記錄裝置用玻璃碟片、光學用透鏡、矽晶圓、 半導體元件等之半導體基板、光學基板、磁性基板等要求 201035141 高度表面平坦性之玻璃材料的精密硏磨。 【實施方式】 實施發明之最佳形態 首先，針對本發明之硏磨墊用2液型胺基甲酸酯樹脂 組成物加以説明。 前述硏磨墊用2液型胺基甲酸酯樹脂組成物係將含有 異氰酸酯基末端胺基甲酸酯預聚物（A)之主劑與含有異氰 酸酯基反應性化合物（bl)之硬化劑（B)調配、混合而成。 〇 前述異氰酸酯基末端胺基甲酸酯預聚物（A)(以下簡稱 「預聚物（A)」）可使作爲聚異氰酸酯之聯甲苯胺二異氰酸 酯（al)與二醇反應而得。 在本發明，於前述預聚物（A)之合成時，藉由單獨使用 聯甲苯胺二異氰酸酯（a 1)作爲聚異氰酸酯，而聯甲苯胺二 異氰酸酯之分子構造係富有對稱性，因此可得聚胺基甲酸 酯樹脂中之硬鏈段構造的高結晶化（高凝集）所致之高硬度 化、耐久性（耐熱水性）、耐摩耗性等優良特性。 © 前述聯甲苯胺二異氰酸酯（al)係存在異構物，此等之 中，〇-聯甲苯胺二異氰酸酯（別名；3，3’-二甲基-4,4’-聯苯二 異氰酸酯）由於可使聚胺基甲酸酯樹脂中硬鏈段構造之高 結晶化（高凝集化）所致之硏磨性更佳提升，因而特佳。 再者，在本發明預聚物（A)之合成時，雖係單獨使用聯 甲苯胺二異氰酸酯（al)，但在不阻害本發明目的之範圍 內，亦可使用其他聚異氰酸酯。 作爲前述其他聚異氰酸酯，可舉出例如，二苯基甲烷 201035141 二異氰酸酯（略稱MDI;其4,4’-體、2,4’-體、或2,2’-體、或 是此等之混合物）、聚亞甲基聚苯基聚異氰酸酯、碳二醯亞 胺化二苯基甲烷聚異氰酸酯、甲苯二異氰酸酯（TDI;其2，4-體、或2,6-體、或是此等之混合物）、二甲苯二異氰酸酯 (XDI)、1，5-萘二異氰酸酯（NDI)、四甲基二甲苯二異氰酸酯 等之芳香族系二異氰酸酯、或異佛爾酮二異氰酸酯 (IPDI)、加氫二苯基甲烷二異氰酸酯（加氫MDI)、加氫二甲 苯二異氰酸酯（加氫XDI)等之脂環族系二異氰酸酯、或六 〇 亞甲基二異氰酸酯、二聚物酸二異氰酸酯、降莰烯二異氰 酸酯等之脂肪族系二異氰酸酯等，在不損害本發明之目的 的範圍內，亦可使用此等中之一種或二種以上。 作爲前述其他聚異氰酸酯，例如，當二苯基甲烷二異 氰酸酯（MDI)的使用量增加時，所得聚胺基甲酸酯樹脂中硬 鏈段構造的結晶化降低，而有難以得到高硬度化、耐久性 (耐熱水性）、耐摩耗性所致之硏磨性提升的傾向，而不佳。 因此，其他聚異氰酸酯的使用量宜考慮與所期望之特性的 〇 平衡來加以設定 前述預聚物（A)係將聯甲苯胺二異氰酸酯（al)與二醇依 照通常方法使其反應而得，前述二醇可使用單一的二醇、 或亦可組合特定數平均分子量（以下簡稱爲「Μη」）的高分 子量二醇（a2)及特定分子量的低分子量二醇（a22)之至少2 種二醇使其反應，倂用高分子量二醇（a21)及低分子量二醇 (a22)，將本發明之胺基甲酸酯樹脂組成物予以發泡、硬化 成形時，能夠更有效地控制反應性，可容易控制作業時之 201035141 反應性，成形性（產率、成形不均等）優良’且可形成均勻 且微細形狀之發泡胞，因而更佳。 前述高分子量二醇（a21)之Μη較佳爲500~5000之範 圍，更佳爲500~2000之範圍。 作爲前述高分子量二醇（a2 1)，可舉出例如’聚乙二醇 (PEG)、聚丙二醇（PPG)、聚伸乙基丙二醇（PEPG)、聚四亞 甲基乙二醇（PTMG)、2-甲基-1，3-丙烷己二酸、3-甲基-1，5 戊烷己二酸、聚碳酸酯聚醇等，此等之中’較佳爲Mn爲 0 500~2000之聚四亞甲基乙二醇（PTMG)。前述高分子量二醇 (a2 1)可爲直鏈、分枝、環狀構造之任一者。 又，前述低分子量二醇（a22)之分子量較佳爲50〜300 之範圍，更佳爲分子量爲5 0~2 00之範圍。 作爲前述低分子量二醇（a22)，可舉出例如’乙二醇 (EG)、丙二醇、1，3-丙二醇、1，3-丁 二醇、1，4-丁 二醇、1,5-戊二醇、1，6-己二醇、新戊二醇、二乙二醇（DEG)、三乙二 醇、四乙二醇、二丙二醇、三丙二醇、3-甲基-1，5-戊二醇、 〇 2 -丁基-2-乙基1，3 -丙二醇、2 -甲基-1，3 -丙—·醇等之脂肪族 二醇、1，4-環己二醇、1，4-環己烷二甲醇、加氫雙酚A等之 脂環族二醇等，作爲3官能以上之成分，可舉出甘油、三 羥甲基丙烷、新戊四醇等，此等之中，較佳爲二乙二醇 (DEG)。前述低分子量二醇〇22)可爲直鏈、分枝、環狀構 造之任一者。 在本發明，較佳爲組合前述高分子量二醇U21)與低分 子量二醇（a22)使其反應，此等之中，以高分子量二醇（a2 1) -10- 201035141 係聚伸丁二醇（PTMG，特佳爲Μη爲500~2000)及低分子量 二醇（a22)係二乙二醇（DEG)之組合爲特佳，藉此能夠使作 業時之反應性的控制更爲容易，成形性（產率、成形不均等） 優良，可形成均勻且微細形狀之發泡胞。 前述預聚物（A)係在使作爲聚異氰酸酯之聯甲苯胺二 異氰酸酯（a 1)與二醇（較佳爲Μη爲特定範圍的高分子量二 醇（a2 1)及分子量爲特定之範圍的低分子量二醇（a2 2))反應 而成的分子末端具有異氰酸酯基之預聚物’全部滿足下述 〇 〔條件I〕、〔條件II〕、〔條件ΙΠ〕者。 〔條件I〕預聚物（A)合成時之異氰酸酯基與羥基的莫耳比 (α)(即NCO/OH莫耳比）係2.10〜2·30之範圍。 〔條件II〕預聚物（Α)之NCO當量（β)爲460~550之範圍。 〔條件III〕莫耳比（〇0與NCO當量（β)的積（αχβ)爲 1 05 5〜1 265之範圍。 若前述預聚物（Α)之莫耳比（a)、NCO當量（β)、積（αχβ) 完全滿足〔條件I〕~〔要件ΙΠ〕，則成形性、耐磨耗性、 〇 耐久性優良，且作業時之反應性控制爲容易，可形成均勻 且微細形狀之發泡胞。 再者，在本發明中，當量的單位係使用「g/eq」。 構成主劑之預聚物（A)具有下述2個特徴，因此藉由與 後述硬化劑組合、調配、混合，可發揮優異的性能。 〔預聚物（A)之特徴1〕單獨使用聯甲苯胺二異氰酸酯 (TODI)。 習知的硏磨墊用2液型胺基甲酸酯樹脂組成物之主流 -11- 201035141 係以甲苯二異氰酸酯（TDI)等作爲主要之聚異氰酸酯成 分，惟與此等相較，本發明的特徵係在主劑之預聚物（A) 的必要反應原料中不使用TDI等作爲聚異氰酸酯，而單獨 使用TODI。TODI比TDI更具有分子構造之對稱性，因此 可有效賦予所得聚胺基甲酸酯樹脂中硬鏈段構造之高結晶 化（高凝集化）所致的高硬度化、耐久性（特別是耐熱水性）、 耐摩耗性。 〔預聚物（A)之特徴2〕倂用高分子量二醇（a2 1)與低分 〇 子量二醇（a22)以將TODI之反應性調整爲最適範圍。 聚異氰酸酯之反應性係TODI比TDI快，TODI具有反 應難以控制、發泡成形性差等缺點。因此，本發明爲了盡 可能減低反應後之無異氰酸酯殘存量，在使TODI單獨與 二醇反應合成預聚物（A)之際，較佳爲倂用高分子量二醇 (a2 1)與低分子量二醇（a22)，藉由分別將預聚物（A)在合成 時之異氰酸酯基與羥基的莫耳比（α)(亦即，NCO/OH莫耳 比）2.10~2.30之範圍、前述預聚物（Α)之NCO當量（β)設定 〇 於460~550之範圍、且前述莫耳比（α)與前述NCO當量（β) 的積（αχβ)設定於1 0 5 5〜1 265之範圍，將TODI的反應性 調整爲最適範圍，以謀求發泡成形性之適當化。 接著，以下說明與前述主劑組合、調配、混合之硬化 劑。 本發明所用之硬化劑（B)係含有異氰酸酯基反應性化 合物（bl)(以下簡稱爲「反應性化合物（bl)」）作爲必須成分。 又，以後述水發泡法製造硏磨墊時，硏磨墊用2液型 -12- 201035141 胺基甲酸酯樹脂組成物的硬化劑（B)中含有作爲發泡劑之 水（C)與觸媒（D)作爲必須成分。 只要前述反應性化合物（bl)對具有異氰酸酯基之化合 物具有良好的反應性，則無特別限定，可舉出例如，聚胺 基氯苯基甲烷化合物、Pandex E-5 0(商品名，DIC股份有限 公司製’聚胺基氯苯基甲烷化合物）、聚胺基氯苯基甲烷化 合物之二核體的4，4’-二胺基-3，3’-二氯二苯基甲烷（以下稱 爲MOCA)與聚伸丁二醇（以下稱爲PTMG)之混合物等，此 〇 等係可單獨使用，亦可倂用2種以上。 前述反應性化合物（bl)之調配量相對於前述預聚物 (A) 100重量份而言，較佳爲15〜35重量份之範圍，更佳爲 2 0〜3 2重量份之範圍。若前述反應性化合物（B)之調配量在 此範圍內，則可得高硬度且耐久性（耐熱水性）、耐摩耗性 優異的聚胺基甲酸酯硏磨墊。 又，水（C)係擔任發泡劑之作用而調配。水之調配量相 對於前述反應性化合物（b 1)100重量份而言，較佳爲0.05~1 〇 重量份之範圍，更佳爲0.3 0~0.60重量份之範圍。若前述水 (C)之調配量在此範圍內，則可得具有安定發泡狀態之硏磨 塾。 將主劑與硬化劑予以2液混合時水（C)之添加方法並無 特別限定，可舉出例如，預先將反應性化合物（B)、水（C)、 觸媒（D)與視需要的添加劑混合作爲硬化劑，接著，使主劑 與硬化劑混合、發泡、硬化之方法等。 進一步地，本發明之硏磨墊用2液型胺基甲酸酯樹脂 -13- 201035141 組成物必須含有觸媒（D)。 前述觸媒（D)之種類及添加量只要是考慮混合步驟後 流入規定形狀之鑄模內的時間、最終發泡狀態等來加以選 擇即可，沒有特別限定》 作爲前述觸媒（D)，可舉出例如，N，N-二甲基胺基乙基 醚、TOYOCAT ET(商品名，東曹股份有限公司製，N，N-二 甲基胺基乙基醚）、三伸乙二胺、二甲基乙醇胺、三乙醇胺、 N,N，N’，N’-四甲基六亞甲基二胺、N-甲基咪唑等之三級 〇 胺、二辛錫二月桂酸酯等之金屬系觸媒等，此等之中，由 泡化特性爲強的點來看，較佳爲N，N-二甲基胺基乙基醚、 TOYOCAT ET，此等係可單獨使用，亦可倂用2種以上。 前述觸媒（D)之調配量相對於異氰酸酯基反應性化合 物（B)100重量份而言，較佳爲0.1〜1重量份之範圍，更佳 爲0.3〜0.6重量份之範圍。若前述觸媒（D)之調配量在此範 圍內，可得具有安定發泡狀態之硏磨墊。 以前述調配量之範圍調配作爲必須成分之反應性化合 〇 物（B)、水（C)、觸媒（D)，藉由充分地攪拌混合可得硬化劑。 如上所述調配經調整的主劑與硬化劑’直接充分地攪 拌混合，可得本發明之硏磨墊用2液型胺基甲酸酯樹脂組 成物。 前述主劑與硬化劑之調配比，亦即，〔主劑中之異氰酸 酯基之總莫耳數〕/〔含水之硬化劑中之異氰酸酯基反應性 基之合計莫耳數〕較佳爲1/0·7〜1/1.1之範圍’更佳爲 1/0.8〜1/1.0之範圍。若主劑與硬化劑的調配比在此範圍 -14- 201035141 內，則可得高硬度，耐久性（耐熱水性）、耐摩耗性等優異 特性。 在本發明之硏磨墊用2液型胺基甲酸酯樹脂組成物 中，在不損及本發明目的之範圍內，亦可在製造步驟的任 何階段使用例如整泡劑、抗氧化劑、脫泡劑、紫外線吸收 劑、硏磨粒、塡充劑、顏料、增黏劑、界面活性劑、難燃 劑、可塑劑、滑劑、防靜電劑、耐熱安定劑、摻合用樹脂 等作爲添加劑。 〇 作爲前述塡充材，沒有特別限定，可舉出例如，碳酸 鹽、矽酸、矽酸鹽、氫氧化物、硫酸鹽、硼酸鹽、鈦酸鹽、 金屬氧化物、碳化物、有機物等。 作爲前述整泡劑，可舉出Toray Silicone SH-193 (東麗 道康寧股份有限公司製）、SH-192(同公司製）、SH-190(同 公司製）等。 接著針對本發明之聚胺基甲酸酯硏磨墊及其製法加以 説明。 ^ 本發明之聚胺基甲酸酯硏磨墊係使用前述硏磨墊用2 液型胺基甲酸酯樹脂組成物而成者，可在前述硏磨墊用2 液型胺基甲酸酯樹脂組成物中視需要加入添加劑，注入預 定形狀的鑄模內使發泡、硬化，將該發泡成形物從鑄模取 出，切片成片狀等之適當形狀等加工而得。 作爲本發明之聚胺基甲酸酯硏磨墊之製法，除了後述 水發泡法以外，亦可採用例如，添加中空珠粒之方法、機 械發泡法、化學發泡法等各種方法，沒有特別限制。 -15- 201035141 以下，舉水發泡法作爲例子，說明本發明之製法。 使用前述硏磨墊用2液型胺基甲酸酯樹脂組成物的聚 胺基甲酸酯硏磨墊之製法，可例示例如，包括如下〔步驟 1〕〜〔步驟5〕的一連串之製法，惟不限於此。 再者，添加劑只要可無阻礙地添加且能夠均勻調配， 則可在任何步驟使用。 〔步驟1〕主劑之調整步驟。 在具備氮導入管、冷卻冷凝器、溫度計、冷卻機之反 ❹ 應裝置中，分別裝入作爲聚異氰酸酯之聯甲苯胺二異氰酸 酯（al)、高分子量二醇（a21)(Mn爲500〜5000之範圍）、低 分子量二醇（a22)(分子量爲50~300)，使得預聚物（A)在合 成時之異氰酸酯基與羥基的莫耳比（α)爲2.10~2.30之範 圍，前述預聚物（A)之NCO當量（β)爲460〜550之範圍，且 前述莫耳比（〇〇與前述NCO當量（β)的積（αχβ)爲1 05 5〜1265 之範圍，在氮氛圍氣下邊攪拌邊在較佳爲50〜90°C之範圍、 更佳爲60~8(TC之範圍使其反應，合成預聚物（A)而得含有 Ο 預聚物（A)之主劑。 〔步驟2〕主劑與硬化劑之混合步驟。 接著，將含有前述預聚物（A)之主劑與至少含有反應性化 合物（B)、水（C)、及觸媒（D)之硬化劑予以混合、攪拌做成發 泡反應液。於混合之際，將預聚物（A)與含有水（C)及觸媒（D) 之反應性化合物（B)分別置入二液混合澆鑄機的各自槽中，將 含有前述預聚物（A)之主劑加溫至較佳爲40~70°C，硬化劑較 佳爲加溫至40~90°C，各自以二液混合澆鑄機進行混合。 -16- 201035141 〔步驟3〕澆鑄步驟。 將前述發泡反應液注入預先加溫至較佳爲50〜12 0°C的 鑄模內。 〔步驟4〕硬化步驟。 以注入鑄模內之狀態，將發泡反應液加熱保持在適合 的溫度範圍（例如，50〜120°C之範圍），使其發泡、硬化， 較佳爲在50〜120 °C之模具內放置30分鐘~2小時後，取出 該成形品，以較佳爲1〇〇〜120°C、8~17小時的條件進行後 Ο 硬化（after cure)，做爲成形品。 〔步驟5〕切片步驟。 將前述成形品切片爲適合的厚度之片狀。切片後之片 厚只要依照硏磨目的加以設定即可，無特別限制，例如較 佳爲0.6〜2.0mm之範圍。 如上所述，本發明之聚胺基甲酸酯硏磨墊係硏磨操作 時因溫度上昇導致之硏磨墊硬度（彈性模數）改變爲小、耐 久性（耐熱水性等）、耐摩耗性、成形性（產率、成形不均等） 〇 w 優異，可用於例如，液晶顯示器（LCD)用玻璃基板、硬碟 (HDD)用玻璃基板、顯示器用玻璃基板、記錄裝置用玻璃 碟片、光學用透鏡、矽晶圓、半導體元件等之要求高度表 面平坦性的玻璃材料之精密硏磨。 實施例 以下藉由實施例進一步具體説明本發明，惟本發明之 範圍係不僅限於此等實施例。 又’在本發明’若無特別限定，「份」爲「重量份」，「％ -17- 201035141 爲「重量％」。 再者’本發明所用之測定方法及評價方法係如以下所 示。 (重量平均分子量之測定） 又’本發明中藉由GPC之重量平均分子量（聚苯乙烯換 算）的測定’係使用東曹（股）公司製HLC8220系統依照以下 條件進行。 分離管柱：使用4根東曹（股）製TSKgelGMHHR-N。管柱 0 溫度：40°C。移動層··和光純藥工業（股）製四氫呋喃。流 速：1.〇1111/分。試料濃度：1.0重量％。試料注入量：1〇〇微升。 檢測器：差示折射計。 〔預聚物（A)的NCO當量（β)之測定方法〕 預聚物（Α)的NCO當量（β)之測定係依照JISK7301，將 試料溶解於乾燥甲苯，添加過剩的二-η- 丁基胺溶液使反 應，以鹽酸標準溶液逆滴定残存的二-η-丁基胺而求得。 〔預聚物（Α)的黏度之測定方法〕 ❹ 預聚物（Α)的黏度之測定係使用ΒΜ型黏度計（東京計 器製），在使用樣品量200m卜2號或3號轉子來測定。 〔預聚物（A)的使用壽命之測定方法〕 將含有預聚物（A)之主劑與異氰酸酯基反應性化合物 (B)分別調整爲內溫80°C與50°C，接著，混合主劑與硬化 劑將成爲胺基甲酸酯樹脂組成物的時點TG當作基點，測定 前述胺基甲酸酯樹脂組成物的黏度到達50000mPai爲止 的時間TK單位；秒），當作胺基甲酸酯樹脂組成物之反應性 -18- 201035141 的測定結果。 然後，胺基甲酸酯樹脂組成物的黏度之測定係使用bm 型黏度計（東京計器製），在23 °c之氛圍氣下以樣品量 200ml、4號轉子每10秒加以測定。 〔硏磨墊之製作方法〕 將前述預聚物（A)與含有水（C)及觸媒（D)之異氰酸酯 基反應性化合物（B)分別置入二液混合澆鑄機的各自槽 內，將預聚物（A)加溫至50~80°C，將反應性化合物（B)加 〇 溫至40〜11 0°C，分別以二液混合澆鑄機進行混合。 將前述發泡反應液注入預先加溫至50〜12 0 °C之鑄模 內。以注入於鑄模內之狀態，將發泡反應液加熱保持於適 合的溫度範圍（例如，50~120°C之範圍），使發泡、硬化， 較佳爲在50〜12 CTC之模具內放置30分鐘〜2小時後，將該 成形品取出，以較佳爲1 0 0~ 1 2 0 °C、8 ~ 1 7小時的條件進行 後硬化，作爲成形品。 將前述成形品切片爲適合的厚度之片狀。切片後之片 ^ 厚只要依照硏磨目的加以設定即可，無特別限制，例如較 佳爲0.6-2.0mm之範圍。 〔成形性之測定方法〕 將前述預聚物（A)與含有水（C)及觸媒（D)之反應性化 合物（B)分別置入二液混合澆鑄機的各自槽內，將預聚物 (A)加溫至50~80°C，將反應性化合物（B)加溫至40〜1 l〇°C， 分別以二液混合澆鑄機進行混合，在室溫下，注入上方開 放的鑄模，使發泡。目視觀察，依照發泡狀態，將沒發生 -19- 201035141 裂紋、發泡下方的膨脹者判定爲成形性「良好」。 〔耐久性（耐熱水性）之測定方法〕 使用前述硏磨墊用2液型胺基甲酸酯樹脂組成物，以 相同的樹脂組成物製作3個硏磨墊，各自浸漬於內溫設定 爲4 0 °C、6 0 °C、8 0 °C之恆溫水槽中，測定2小時浸漬後硬 度的經時變化。由硬度之經時變化，以下式算出硬度保持 率，將硬度保持率70%以上的硏磨墊判定爲耐久性（耐熱水 性）良好，小於7 〇 %者判定爲「不良」。 Ο 硬度保持率（％) = 2小時浸漬後之硬度/浸漬前之硬度X 1 00 〔耐摩耗性之測定方法〕 依照 JISK73 1 2- 1 996(Taber磨耗試験），評價耐摩耗 性。耐摩耗性之評價基準係將摩耗減量20Omg以下的硏磨 墊判定爲耐摩耗性良好。 〔硬度（JIS A)之測定方法〕 依照JIS K 73 1 2- 1 996(硬度試験），進行彈簧硬度試 験’以鑄模A進行評價。硬度之評價基準爲硬度8 5 (JIS A) Ο 以上的情形判定爲「良好」、硬度85(JIS A)以下的情形判 定爲「不良」。 〔實施例1〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶中，裝入作爲聚異氰酸酯之聯甲苯胺 二異氰酸酯（TODI)(al)(日本曹達股份有限公司製）1〇68 份’開始攪拌。接著，將1 000份作爲高分子量二醇（a21) 之PTMG-1000(商品名，三菱化學股份有限公司製，聚伸丁 -20- 201035141 二醇，Mn= 1 000)分次添加混合，在氮氣流下70 °C進行2小 時反應，然後將93份作爲低分子量二醇（a22)之二乙二醇 (DEG，三菱化學股份有限公司製，分子量106)分次添加混 合，在氮氣流下7〇°C進行5小時反應，合成主劑之異氰酸 酯基末端胺基甲酸酯預聚物（A-1)。 前述預聚物（A-1)在合成時之NCO/OH莫耳比（α)爲 2.15，前述預聚物（八-1)之1^〇當量（0)爲5〇〇，前述（〇〇與（0) 的積（αχβ)爲 1 075 » 〇 接著，在100份作爲具有異氰酸酯基反應性化合物（Β) 之Pandex Ε-5 0中，調配0.6份作爲發泡劑之離子交換水 (C)、0.5份作爲觸媒（D)之TOYOCAT-ET、及0.9份作爲整 泡劑之Toray Silicone SH-193，充分地攪拌混合，得到硬 化劑之聚胺組成物（X-1)。 在容器中以預聚物（A-1)/聚胺組成物（X- 1 )=1 00/27重 量比，將主劑之預聚物（A-1)與硬化劑之聚胺組成物（X-1) 攪拌混合’將約 350g注入預熱至 50 °C之模具 © (130mmxl30mmx35mm)，立刻做成模具的蓋後，在50°C放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 將前述成形品以切片機切出約2mm厚，得到密度分布 均勻之片狀聚胺基甲酸酯硏磨墊（P-1)。將該聚胺基甲酸酯 硏磨墊（P-1)之物性（成形性、耐摩耗性、耐久性等）示於表 〔實施例2〕 -21- 201035141 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入TODI(al)(日本曹達股份有限公司 製）968份’開始攪拌。接著，將1000份作爲高分子量二醇 (a21)之PTMG- 1 000分次添加混合，在氮氣流下7(TC進行2 小時反應，然後將67份作爲低分子量二醇（a22)之DEG(三 菱化學股份有限公司製）分次添加混合，在氮氣流下70 °C進 行5小時反應，合成主劑之預聚物（A-2)。 前述預聚物（A-2)在合成時之NCO/OH莫耳比（ct)爲 〇 2.25’前述預聚物（A-2)之NCO當量（β)爲500,前述（α)與（β) 的積（αχβ)爲 1111 。 接著，在100份作爲反應性化合物（Β)之Pandex Ε-50 中調配0.6份作爲發泡劑之離子交換水（〇、0.5份作爲觸 媒（D)之TOYOCAT-ET、及0.9份作爲整泡劑之Toray Silicone SH-193，充分地攪拌混合，得到硬化劑之聚胺組 成物（X-1)。 在容器中以預聚物（A-2)/聚胺組成物（X- 1 ) = 1 00/27重 Ο 量比，攪拌混合主劑之預聚物（A-2)與硬化劑之聚胺組成物 (X-1)，將約 3 5 0g 注入預熱至 50 °C之模具 (1 30mm X 1 30mm x3 5mm)，立刻做成模具的蓋後，在5 0 °C放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 將前述成形品以切片機切出約2mm厚，得到密度分布 均勻之片狀聚胺基甲酸酯硏磨墊（P-2)。將該聚胺基甲酸酯 硏磨墊（P-2)之物性（成形性、耐摩耗性、耐久性等）示於表 -22- 201035141 〔實施例3〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入TODI(al)(日本曹達股份有限公司 製）904份，開始攪拌。接著，將1000份作爲高分子量二醇 (a21)之PTMG- 1 000分次添加混合，在氮氣流下70°C進行2 小時反應，然後將67份作爲低分子量二醇（a22)之DEG(三 菱化學股份有限公司製）分次添加混合，在氮氣流下70°C進 〇 行5小時反應，合成主劑之預聚物（A-3)。 前述預聚物（A-3)在合成時之NCO/OH莫耳比（α)爲 2.10,前述預聚物（A-3)之NCO當量（β)爲5 5 0,前述（〇〇與（β) 的積（αχβ)爲 1 220。 接著，在1〇〇份作爲反應性化合物（Β)之Pandex Ε-50 中調配0.6份作爲發泡劑之離子交換水（C)、0.5份作爲觸 媒（D)之 TOYOCAT-ET、及 0_9份作爲整泡劑之 Toray S i 1 i c 〇 ne S Η -1 9 3，充分地攪拌混合，得到硬化劑之聚胺組 〇 成物（x-l)。 在容器中以預聚物（Α-3)/聚胺組成物（X- 1 )= 1 00/25重 量比，攪拌混合主劑之預聚物（Α-3)與硬化劑之聚胺組成物 (Χ-1)，將約 3 5 0 g 注入預熱至 50 °C之模具 (130mmxl30mmx35mm)，立刻做成模具的蓋後’在50C放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 將前述成形品以切片機切出約2mm厚，得到密度分布 -23- 201035141 均勻之片狀聚胺基甲酸酯硏磨墊（P-3)。將該聚胺基甲酸酯 硏磨墊（P-3)之物性（成形性、耐摩耗性、耐久性等）示於表 1 ° 〔實施例4〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入TO DI(al)(日本曹達股份有限公司 製）759份，開始攪拌。接著，將1000份作爲高分子量二醇 (a21)之PTMG- 1 000分次添加混合，在氮氣流下70°C進行2 〇 小時反應，然後將26份作爲低分子量二醇（a22)之DEG(三 菱化學股份有限公司製）分次添加混合，在氮氣流下7〇°C進 行5小時反應，合成主劑之預聚物（A-4)。 前述預聚物（A-4)在合成時之NCO/OH莫耳比（α)爲 2.30,前述預聚物（A-4)之NC0當量（β)爲550,前述（α)與（β) 的積（αχβ)爲 1 265。 接著，在100份作爲反應性化合物（Β)之Pandex Ε-50 中調配〇·6份作爲發泡劑之離子交換水（C)、0.5份作爲觸 Ο 媒（D)之 TOYOCAT-ET、及 0.9份作爲整泡劑之Toray Silicone SH_ 193，充分地攪拌混合，得到硬化劑之聚胺組 成物（X-1)。 在容器中以預聚物（A-4)/聚胺組成物（X-l) = 100/25重 量比，攪拌混合主劑之預聚物（A-4)與硬化劑之聚胺組成物 (X-1) ’將約 3 5 0g 注入預熱至 50 °C之模具 (130mmxl30mmx35mm)，立刻做成模具的蓋後，在50°C放 置1小時’之後取出發泡成形品，將該發泡成形品在11 0 -24- 201035141 °C進行1 6小時之後硬化’得到成形品。 將前述成形品以切片機切出約2mm厚，得到密度分布 均勻之片狀聚胺基甲酸酯硏磨墊（P-4)。將該聚胺基甲酸酯 硏磨墊（P-4)之物性（成形性、耐摩耗性、耐久性等）示於表 〔實施例5〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入T〇DI(al)(日本曹達股份有限公司 〇 製）1127份，開始攪拌。接著，將1000份作爲高分子量二 醇（a2 1)之PTMG-1000分次添加混合，在氮氣流下70°C進 行 2小時反應，然後將91份作爲低分子量二醇（a22)之 DEG(三菱化學股份有限公司製）分次添加混合，在氮氣流下 70°C進行5小時反應，合成主劑之預聚物（A-5)。 前述預聚物（A-5)在合成時之NCO/OH莫耳比（〇：)爲 2.3〇，前述預聚物（八-5)之：^(：〇當量（0)爲46〇，前述（〇〇與（0) 的積（αχβ)爲 1 05 8。 Ο 接著，在100份作爲反應性化合物（Β)之Pandex Ε-50 中調配〇·6份作爲發泡劑之離子交換水（C)、0.5份作爲觸 媒（D)之 TOYOCAT-ET、及 0.9份作爲整泡劑之 Toray Silicone SΗ-193，充分地攪拌混合，得到硬化劑之聚胺組 成物（Χ-1) ° 在容器中以預聚物（Α-5)/聚胺組成物（X- 1 ) = 1 00/3 0重 量比，攪拌混合主劑之預聚物（Α-5)與硬化劑之聚胺組成物 (Χ-1)，將約 3 5 0g 注入預熱至 50 °c之模具 -25- 201035141 (130mmxl30mmx35mm)，立刻做成模具的蓋後，在50°C放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 將前述成形品以切片機切出約2mm厚，得到密度分布 均勻之片狀聚胺基甲酸酯硏磨墊（P-5)。將該聚胺基甲酸酯 硏磨墊（P-5)之物性（成形性、耐摩耗性、耐久性等）示於表 1 ° 〔實施例6〕 C 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入作爲聚異氰酸酯之聯甲苯胺二異 氰酸酯（TODI)(al)(日本曹達股份有限公司製）913份，開始 攪拌。接著，將1〇〇〇份作爲二醇之PTMG-650(商品名，三 菱化學股份有限公司製，聚伸丁二醇，Mn = 6 50)分次添加混 合，在氮氣流下70°C進行5小時反應，合成主劑之異氰酸 酯基末端胺基甲酸酯預聚物（A-6) » 前述預聚物（Α-6)在合成時之NCO/OH莫耳比U)爲 ^ 2.25’前述預聚物（Α-6)之NCO當量（β)爲500,前述（α)與（β) 的積（ax β)爲 1 1 25。 接著，在100份作爲具有異氰酸酯基反應性化合物（Β) 之Pandex Ε-50中，調配0.6份作爲發泡劑之離子交換水 (C)、0.5份作爲觸媒（D)之TOYOCAT-ET、及0.9份作爲整 泡劑之To ray Silicone SH-193，充分地攪拌混合，得到硬 化劑之聚胺組成物（X-1)。 在容器中以預聚物（A-6)/聚胺組成物（X- 1 )=1 00/27重 -26- 201035141 量比’攪拌混合主劑之預聚物（A-6)與硬化劑之聚胺組成物 (Χ-1)，將約 350g 注入預熱至 50°C之模具 (1 30mmx 1 30mmx35mm)，立刻做成模具的蓋後，在50°C放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 將前述成形品以切片機切出約2mm厚，得到密度分布 均勻之片狀聚胺基甲酸酯硏磨墊（P-6)。將該聚胺基甲酸酯 硏磨墊（P-6)之物性（成形性、耐摩耗性、耐久性等）示於表 Ο 1。 〔比較例1〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入作爲聚異氰酸酯之 Cosmonate T-8 0 (商品名，三井化學聚胺基甲酸酯股份有限公司製，甲 苯二異氰酸酯（TDI)之2,4-異構物與2,6-異構物的8 0:20之 混合物）1117份，開始攪拌。接著，將1000份作爲高分子 量二醇（a21)之PTMG-1 000(商品名，三菱化學股份有限公 〇 司製，聚伸丁二醇，Mn=1 000)分次添加混合，在氮氣流下 70 °C進行2小時反應，然後將26 8份作爲低分子量二醇（a22) 之二乙二醇（DEG，三菱化學股份有限公司製，分子量106) 分次添加混合，在氮氣流下70°C進行5小時反應’合成主 劑之異氰酸酯基末端胺基甲酸酯預聚物（A-7)。 前述預聚物（A-7)在合成時之NCO/OH莫耳比（^)爲 1.85,前述預聚物（A-7)之NCO當量（β)爲400’前述〇)與（β) 的積（αχβ)爲740。 -27- 201035141 接著，在1 00份作爲具有異氰酸酯基反應性化合物（B) 之Pandex E-50中調配〇·5份作爲發泡劑之離子交換水 (C)、0.3份作爲觸媒（D)之TOYOCAT-ET、及0.9份作爲整 泡劑之Toray Silicone SH-193 ’充分地攪拌混合’得到硬 化劑之聚胺組成物（X-2)。 在容器中以預聚物（A-7)/聚胺組成物（X-2)= 1 00/3 0重 量比，攪拌混合主劑之預聚物（A-7)與硬化劑之聚胺組成物 (X-2)， 將約 350g 注入預熱至 50°C 之模具 〇 (130mmxl30mmx35mm)，立刻做成模具的蓋後，在50°c放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 將前述成形品以切片機切出約2mm厚，得到片狀之聚 胺基甲酸酯硏磨墊（P-7)。將該聚胺基甲酸酯硏磨墊（P-7) 之物性（成形性、耐摩耗性、耐久性等）示於表2。由其結果 得知耐久性（耐熱水性）爲不佳。 〔比較例2〕 ^ 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入TODI(al)(日本曹達股份有限公司 製）904份，開始攪拌。接著，將1〇〇〇份作爲高分子量二醇 (a21)之PTMG-1000(商品名，三菱化學股份有限公司製， 聚伸丁二醇，Mn=1000)分次添加混合，在氮氣流下7〇〇c進 行2小時反應，然後將67份作爲低分子量二醇（a22)之二 乙二醇（DEG，三菱化學股份有限公司製，分子量丨〇6)分次 添加混合’在氮氣流下7 0 °C進行5小時反應，合成主劑之 -28- .201035141 預聚物（A-8)。 前述預聚物（A-8)在合成時之NCO/OH莫耳比（α)爲 2.1〇，前述預聚物（八-8)之1^〇當量（0)爲5〇〇，前述（〇[)與（0) 的積（αχβ)爲 1 0 5 0。 預聚物（Α-8)係在合成時發生凝膠化，無法得到良好的 性能。結果示於表2。 〔比較例3〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 Ο 1公升四口圓底燒瓶裝入TODI(al)(日本曹達股份有限公司 製）806份，開始攪拌。接著，將1000份作爲高分子量二醇 (a21)之PTMG- 1 000分次添加混合，在氮氣流下70°C進行2 小時反應，然後將23份作爲低分子量二醇（a22)之DEG(三 菱化學股份有限公司製）分次添加混合，在氮氣流下70°C進 行5小時反應，合成主劑之預聚物（A-9)。 前述預聚物（A-9)在合成時之NCO/OH莫耳比（α)爲 2.5〇’前述預聚物（八-9)之1^〇當量（卩）爲5〇〇，前述（〇〇與（0) €) 的積（αχβ)爲 1 250。 接著’在100份作爲反應性化合物（Β)之Pandex Ε-50 中調配〇·6份作爲發泡劑之離子交換水（C)、0.5份作爲觸 媒（D)之 TOYOCAT-ET、及0.9份作爲整泡劑之Toray Silicone SΗ-193，充分地攪拌混合，得到硬化劑之聚胺組 成物（Χ-1)。 在容器中以預聚物（Α-9)/聚胺組成物（X-l) = 100/27重 量比，攪拌混合主劑之預聚物（Α-9)與硬化劑之聚胺組成物 -29- 201035141 (Χ-l)將約 3 50g 注入預熱至 50 °C 之模具 (130mmxl30mm><35mm)，立刻做成模具的蓋後，在50°C放 置1小時，之後取出發泡成形品，將該發泡成形品在1 1 0 °C進行1 6小時之後硬化，得到成形品。 所得成形品發生裂紋與發泡下方的膨脹，無法得到良 好的片狀聚胺基甲酸酯硏磨墊（P-9)。結果示於表2。 〔比較例4〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 〇 1公升四口圓底燒瓶裝入TODI(al)(日本曹達股份有限公司 製）1176份，開始攪拌。接著，將1000份作爲高分子量二 醇（a2 1)之PTMG-1 000分次添加混合，在氮氣流下70°C進 行2小時反應，然後將143份作爲低分子量二醇（a22)之 DEG(三菱化學股份有限公司製）分次添加混合，在氮氣流下 70°C進行5小時反應，合成主劑之預聚物（A-10)。 前述預聚物（A-10)在合成時之NCO/OH莫耳比（α)爲 2.00，前述預聚物（A-10)之NCO當量（β)爲550，前述（α)與 Ο (β)的積（αχβ)爲 1100 » 如表2所示，預聚物（Α-10)係在合成時產生凝膠化， 無法得到良好的性能。結果示於表2。 〔比較例5〕 在具備氮導入管、冷卻用冷凝器、溫度計、攪拌機的 1公升四口圓底燒瓶裝入TODI(al)(日本曹達股份有限公司 製）719份，開始攪拌。接著，1000份作爲二醇之PTMG-1000 分次添加混合，在氮氣流下進行5小時反應，合成主 -30- 201035141 劑之預聚物（A-1 1)。 前述預聚物（A-11)在合成時之NCO/OH莫耳比（α)爲 2.72’前述預聚物（a-U)之NCO當量（β)爲5 00，前述（α)與 (β)的積（αχ β)爲 1360。 接著’在100份作爲反應性化合物（Β)之Pandex Ε-50 中調配0.6份作爲發泡劑之離子交換水（C)、0.5份作爲觸 媒（D)之 TOYOCAT-ET、及 0.9份作爲整泡劑之 Toray Silicone SH-193，充分地攪拌混合，得到硬化劑之聚胺組 〇 成物（x-i)。 在容器中以預聚物（A-11)/聚胺組成物（X-l) = 100/2 7重 量比，攪拌混合主劑之預聚物（A-11)與硬化劑之聚胺組成 物（X-1)，將約 3 50g 注入預熱至 50 °C之模具 (130mmxl30mmx35mm)，立刻做成模具的蓋後，在50°C放 置1小時，之後取出發泡成形品，將該發泡成形品在11 0 °C進行1 6小時之後硬化，得到成形品。 所得成形品發生裂紋與發泡下方的膨脹，無法得到良 〇 好的片狀聚胺基甲酸酯硏磨墊（P-11)。結果示於表2。 -31- 201035141 表1-1 實施例1 實施例2 實施例3 主劑;預聚物(A) A-1 A-2 A-3 預聚物在合成時之NCO/OH莫 耳比⑹ 2.15 2.25 2.1 預聚物之NCO當量(β) 500 500 550 莫耳比⑷與NCO當量(β)的積 (αχβ) 1075 1111 1155 預聚物(Α)之黏度(mPa. s/80°C) 1470 1190 1220 硬化劑潔胺組成物(份） X-1 X-1 X-1 NCO基反應性化合物(B) Pandex E-50 1〇〇份 Pandex E-50 100份 Pandex E-50 100份 離子交換水(C) 0.6份 0.6份 0.6份 觸媒(D) TOYOCAT-ET TOYOCAT-ET TOYOCAT-ET 0.5份 0.5份 0.5份 Toray Silicone Toray Silicone Toray Silicone 整泡劑 SH-193 SH-193 SH-193 0.9份 0.9份 0.9份 主劑(預聚物)/ 硬化劑(聚胺組成物)之 混合比（重量比） 100/27 100/27 100/25 胺基甲酸酯樹脂組成物的使用壽 命（秒） 220 200 230 成形品之密度(g/cm3) 0.6 0.6 0.6 硬度（JISA) 91 89 88 成形性 良好 良好 良好 硏磨墊(P) P-1 P-2 P-3 耐摩耗性 良好 良好 良好 磨耗減量（mg) 140 110 95 耐久性 良好 良好 良好 4(TC之硬度保持率(％) 84 85 84 耐久性 良好 良好 良好 60。。之硬度保持率(％) 82 83 82 耐久性 良好 良好 良好 80。。之硬度保持率(％) 80 81 80 -32- 201035141 表1-2 實施例4 實施例5 實施例6 主劑;預聚物(A) A-4 A-5 A-6 預聚物在合成時之NCO/OH莫耳比 ⑹ 2.3 2.3 2.25 預聚物之NCO當量(β) 550 460 500 莫耳比⑹與NCO當量(β)的積 (αχβ) 1265 1058 1125 預聚物(Α)之黏度(mPa· s/80〇C) 820 1610 690 硬化劑潔胺組成物(份） X-1 X-1 X-1 NCO基反應性化合物(B) Pandex E-50 100份 Pandex E-50 1〇〇份 Pandex E-50 100份 離子交換水(C) 0.6份 0.6份 0.6份 觸媒(D) TOYOCAT-ET TOYOCAT-ET TOYOCAT-ET 0.5份 0.5份 〇·5份 Toray Silicone Toray Silicone Toray Silicone 整泡劑 SH-193 SH-193 SH-193 〇·9份 0.9份 0.9份 主劑(預聚物)/ 硬化劑(聚胺組成物)之 混合比（重量比） 100/25 100/30 100/27 胺基甲酸酯樹脂組成物的使用壽命 (秒） 200 190 190 成形品之密度(g/cm3) 0.6 0.6 0.61 硬度（JISA) 83 90 91 成形性 良好 良好 良好 硏磨墊(P) P-4 P-5 P-6 耐摩耗性 良好 良好 良好 磨耗減量（mg) 10 145 160 耐久性 良好 良好 良好 40〇C之硬度保持率(％) 86 83 86 耐久性 良好 良好 良好 60°C之硬度保持率(％) 85 81 83 耐久性 良好 良好 良好 80°C之硬度保持率(％) 82 79 80 -33- 201035141201035141 VI. Description of the Invention: [Technical Field] The present invention relates to a heat hardening for the production of a glass material requiring high surface flatness such as a glass substrate, a germanium wafer, a semiconductor device, or the like. a urethane type (TSU) type honing pad using a 2-liquid type urethane resin composition, a polyurethane lining pad using the same, and the polyurethane The method of making honing pads. [Prior Art] Conventionally, a glass substrate for a liquid crystal display (LCD), a glass substrate for a hard disk (HDD), a glass disk for a recording device, an optical lens, a germanium wafer, a semiconductor element, or the like, which requires high surface flatness In general production of a glass material, first, a "roughing step" using a lining pad made of a urethane resin is carried out, followed by a "finishing step" using a honing cloth for precision honing. As a method of using a honing pad made of a thermosetting urethane resin for glass honing, there has been hitherto, for example, a combination of a main component containing a isocyanate group-terminated urethane prepolymer and a hardener. Various proposals for the two-component urethane resin composition. For example, a two-component composition for a glass honing polyurethane pad is known which comprises a main component containing an isocyanate-terminated urethane prepolymer and an isocyanate-containing reactive compound. A two-liquid type composition for a glass honing polyurethane pad composed of water, an inorganic honing agent and a curing agent for a catalyst as a foaming agent, wherein the prepolymer is at least toluene diisocyanate (TDI) ), poly(tetramethylene ether) glycol (PTMG) and polycaprolactone. 201035141 Triol (PCL), with an average functional group of 2. in the case of mixing PTMG and PCL. 1 ~ 2. a range of 7 to give an isocyanate-terminated urethane prepolymer, and the aforementioned isocyanate-reactive compound is at least 4,4'-diamino-3,3'-dichloro Phenylmethane and poly(tetramethylene ether) ethylene glycol. The prepolymer of the two-component composition has a low viscosity, and the foam and pores in the mixed molding are reduced to obtain uniform bubbles, and further, the aging of the polyhydric alcohol mixture can suppress the honing process. The hardness of the honing pad caused by the heat generation is lowered (for example, refer to Patent Document Ο 1). However, when the honing of the workpiece is performed using the glass honing polyurethane pad composed of the two-liquid composition described in Patent Document 1, the frictional heat generated between the honing pad and the workpiece is caused by the friction heat generated by the honing pad and the workpiece. The temperature of the surface of the honing pad is significantly increased, and the resin composition is accompanied by a significant temperature rise in the presence of a slurry or an aqueous solution, and the hot water resistance of the honing pad is deteriorated, so that the hardness (elastic modulus) of the honing pad is changed, and There is a problem of adversely affecting the planarization processing of a glass material requiring high surface flatness. 〇 As described above, the reactivity of the polyisocyanate with the polyaminochlorophenylmethane compound is controlled to the extent that there is no problem in the operation, and the two-component urethane resin composition for the honing pad excellent in various honing properties is as described above. And the development of a polyurethane lining pad made of it is highly desirable. [Problem to be Solved by the Invention] The object of the present invention is to provide a control for the reactivity at the time of molding work 201035141, which is a foam which is easy and uniformly formed into a fine shape. Cell (cell controllability) Durability (hot water resistance), abrasion resistance, formability (yield, two-component urethane resin composition for honing pads excellent in forming, and a high-hardness poly-polymer A urethane lining pad which is made of a two-component type formic acid resin which is flattened by a glass material which is required to have a high surface flatness such as a semiconductor substrate, an optical substrate, or a magnetic substrate. The method of solving the problem and the method of solving the problem; the means for solving the problem, the inventors of the present invention want to solve the above problem and carry out the drill collar discussion, the cashing: in the pre-preparation of the urethane containing the isocyanate group In the two-component urethane resin group for the honing pad comprising the isocyanate-reactive compound, the water as the foaming agent, and the curing agent, the prepolymer is used as the polyisocyanate. The isocyanate-terminated urethane prepolymer obtained by reacting tolidine diisoester with a diol is defined by the isocyanate group and the hydroxyl group when the prepolymer is synthesized (ie, "NCO/OH molar ratio") ◎ equivalent of the urethane prepolymer, the molar ratio of the molar ratio and the NCO equivalent in a specific range, durability (heat resistant water), abrasion resistance, formability (for example, yield form) It is excellent, and the reactivity at the time of operation is controlled to be easy, and a two-component urethane resin which can form a fine-grained cell is used, and a high-hardness polyurethane which is formed using the same The present invention has been completed by the method of producing an honing pad and a polyphthalate honing pad. That is, the present invention provides a two-component type amino amide resin composition for a honing pad characterized by containing an isocyanate. Base end amine group, and odd, etc.) with a moderate epithelial-based hair styling agent, a catalyst-like cyanate, an ear ratio NCO, a homogeneous composition of the amino acid ester formic acid 201035141 ester prepolymer (A) And a compound (bl) comprising a group having an active hydrogen group The agent (B) is a urethane resin composition for a honing pad which is an essential component. The prepolymer (A) is obtained by reacting tolidine diisocyanate (al) with a diol (a2). At the time of its synthesis, the molar ratio (α) of the isocyanate group of the tolidine diisocyanate (al) to the hydroxyl group of the aforementioned diol (a2) is 2. 10~2. 30. The NCO equivalent (β) of the prepolymer (Α) is 460 to 550, and the product (αχβ) of the molar ratio (α) and the NCO equivalent (β) is in the range of 1〇55 to 1265. Further, the present invention also provides a polyurethane lining pad which is obtained by using the isocyanate-based terminal urethane prepolymer of the aforementioned honing pad. Moreover, the present invention also provides a method for producing a polyurethane lining pad, characterized in that the honing pad is injected into a mold by a two-component urethane resin composition to be foamed and hardened. The foamed molded article was taken out from the mold and sliced into a sheet shape. EFFECTS OF THE INVENTION The two-component urethane resin composition for a honing pad of the present invention can easily control the reactivity at the time of hydrazine work, and has excellent moldability, and can easily form a uniform and fine-shaped foamed cell. Further, the polyurethane lining pad of the present invention has a small change in hardness (elastic modulus) of the honing pad due to an increase in temperature during the honing operation, durability (heat-resistant water resistance, etc.), abrasion resistance, and formation. It is excellent in properties (yield, uneven molding, etc.) and can be used, for example, in a glass substrate for a liquid crystal display (LCD), a glass substrate for a hard disk (HDD), a glass disk for a recording device, an optical lens, a germanium wafer, and a semiconductor element. Precision honing of glass materials requiring high surface flatness in 201035141, such as semiconductor substrates, optical substrates, and magnetic substrates. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION First, a two-component urethane resin composition for a honing pad of the present invention will be described. The two-component urethane resin composition for the honing pad is a main component containing an isocyanate group-terminated urethane prepolymer (A) and a hardener containing an isocyanate-reactive compound (b1) ( B) Blending and mixing.前述 The isocyanate group-terminated urethane prepolymer (A) (hereinafter referred to as "prepolymer (A)") can be obtained by reacting a toluidine diisocyanate (al) as a polyisocyanate with a diol. In the present invention, in the synthesis of the prepolymer (A), by using tolidine diisocyanate (a1) alone as a polyisocyanate, the molecular structure of the tolidine diisocyanate is symmetrical, and thus it is available. The hard segment structure of the polyurethane resin has excellent properties such as high hardness (high agglomeration), durability (heat resistant water), and abrasion resistance. © The above-mentioned tolidine diisocyanate (al) is an isomer, among which 〇-tolidine diisocyanate (alias; 3,3'-dimethyl-4,4'-biphenyl diisocyanate) It is particularly preferable because the honing property due to the high crystallization (high agglomeration) of the hard segment structure in the polyurethane resin can be improved. Further, in the synthesis of the prepolymer (A) of the present invention, although toluidine diisocyanate (al) is used alone, other polyisocyanates may be used within a range not inhibiting the object of the present invention. Examples of the other polyisocyanate include diphenylmethane 201035141 diisocyanate (abbreviated as MDI; 4,4′-form, 2,4′-form, or 2,2′-form, or these Mixture), polymethylene polyphenyl polyisocyanate, carbodiimide diphenylmethane polyisocyanate, toluene diisocyanate (TDI; 2,4-body, or 2,6-body, or this An aromatic diisocyanate such as a mixture of xylene diisocyanate (XDI), 1,5-naphthalene diisocyanate (NDI) or tetramethylxylene diisocyanate, or isophorone diisocyanate (IPDI), An alicyclic diisocyanate such as hydrogenated diphenylmethane diisocyanate (hydrogenated MDI) or hydrogenated xylene diisocyanate (hydrogenated XDI), or hexamethylene diisocyanate or dimer acid diisocyanate, An aliphatic diisocyanate such as a decene diisocyanate or the like may be used, or one or more of these may be used within a range not impairing the object of the present invention. As the other polyisocyanate, for example, when the amount of use of diphenylmethane diisocyanate (MDI) is increased, the crystallization of the hard segment structure in the obtained polyurethane resin is lowered, and it is difficult to obtain high hardness. The tendency of durability (heat-resistant water resistance) and abrasion resistance due to abrasion resistance is not good. Therefore, the amount of the other polyisocyanate to be used is preferably set in consideration of the balance of the desired properties. The prepolymer (A) is obtained by reacting tolidine diisocyanate (al) with a diol according to a usual method. The diol may be a single diol or a combination of a high molecular weight diol (a2) having a specific number average molecular weight (hereinafter referred to as "Μη") and a low molecular weight diol (a22) having a specific molecular weight. When the alcohol is reacted, the high molecular weight diol (a21) and the low molecular weight diol (a22) are used, and when the urethane resin composition of the present invention is foamed and hardened, the reactivity can be more effectively controlled. It is easy to control the reactivity of 201035141 at the time of work, and it is preferable that the formability (yield, uneven formation, etc.) is excellent, and a foamed cell having a uniform and fine shape can be formed. The η of the above high molecular weight diol (a21) is preferably in the range of 500 to 5,000, more preferably in the range of 500 to 2,000. Examples of the high molecular weight diol (a2 1) include polyethylene glycol (PEG), polypropylene glycol (PPG), polyethyl propylene glycol (PEPG), and polytetramethylene glycol (PTMG). , 2-methyl-1,3-propane adipic acid, 3-methyl-1,5-pentane adipate, polycarbonate polyol, etc., among which 'preferably Mn is 0 500-2000 Polytetramethylene glycol (PTMG). The high molecular weight diol (a2 1) may be any of a linear, branched or cyclic structure. Further, the molecular weight of the low molecular weight diol (a22) is preferably in the range of 50 to 300, and more preferably in the range of 50 to 200. The low molecular weight diol (a22) may, for example, be 'ethylene glycol (EG), propylene glycol, 1,3-propanediol, 1,3-butylene glycol, 1,4-butanediol, 1,5- Pentylene glycol, 1,6-hexanediol, neopentyl glycol, diethylene glycol (DEG), triethylene glycol, tetraethylene glycol, dipropylene glycol, tripropylene glycol, 3-methyl-1,5- An aliphatic diol such as pentanediol, 〇2-butyl-2-ethyl 1,3-propanediol, 2-methyl-1,3-propanol, or 1,4-cyclohexanediol, 1 And an alicyclic diol such as 4-cyclohexanedimethanol or hydrogenated bisphenol A, and examples of the trifunctional or higher component include glycerin, trimethylolpropane, and neopentyl alcohol. Among them, diethylene glycol (DEG) is preferred. The aforementioned low molecular weight diol oxime 22) may be any of a linear, branched or cyclic structure. In the present invention, it is preferred to combine the high molecular weight diol U21) with a low molecular weight diol (a22) to react with the high molecular weight diol (a2 1) -10- 201035141 A combination of an alcohol (PTMG, particularly preferably Μη of 500 to 2,000) and a low molecular weight diol (a22)-based diethylene glycol (DEG) is particularly preferable, whereby the control of reactivity during work can be made easier. Formability (yield, uneven formation, etc.) is excellent, and a foamed cell having a uniform and fine shape can be formed. The prepolymer (A) is obtained by using a toluidine diisocyanate (a1) as a polyisocyanate and a diol (preferably, a high molecular weight diol (a2 1) having a specific range of Μη and a molecular weight of a specific range The prepolymer having an isocyanate group at the molecular terminal of the reaction of the low molecular weight diol (a2 2)) satisfies all of the following conditions [conditions I], [conditions II], and [conditions]. [Condition I] Mohr ratio (α) (i.e., NCO/OH molar ratio) of the isocyanate group and the hydroxyl group in the synthesis of the prepolymer (A). The range of 10~2·30. [Condition II] The NCO equivalent (β) of the prepolymer (Α) is in the range of 460 to 550. [Condition III] Mohr ratio (the product of 〇0 and NCO equivalent (β) (αχβ) is in the range of 1 05 5 to 1 265. If the prepolymer (Α) has a molar ratio (a), NCO equivalent ( When β) and (αχβ) are completely satisfied [condition I] to [required material], the moldability, abrasion resistance, and enthalpy durability are excellent, and the reactivity at the time of work is easily controlled, and a uniform and fine shape can be formed. In the present invention, the equivalent unit is "g/eq". The prepolymer (A) constituting the main component has the following two characteristics, and therefore, it is combined and formulated with a curing agent to be described later. And mixing, and exhibiting excellent performance. [Special polymer of prepolymer (A)] Tolylamine diisocyanate (TODI) is used alone. The conventional honing pad is composed of a two-component urethane resin composition. Mainstream-11-201035141 is mainly composed of toluene diisocyanate (TDI) or the like as a main polyisocyanate component, but the characteristics of the present invention are not used in the necessary reaction raw materials of the prepolymer (A) of the main component. TDI is used as a polyisocyanate, and TODI is used alone. TODI has more molecular structure symmetry than TDI. Therefore, it is possible to effectively impart high hardness, durability (especially hot water resistance), and abrasion resistance due to high crystallization (high agglomeration) of the hard segment structure in the obtained polyurethane resin. The characteristic of the substance (A) is that the high molecular weight diol (a2 1) and the low molecular weight diol (a22) are used to adjust the reactivity of the TODI to an optimum range. The reactivity of the polyisocyanate is faster than TDI. The TODI has disadvantages such as difficulty in control of reaction and poor foam formability. Therefore, in order to minimize the residual amount of isocyanate after the reaction, the present invention preferably combines TODI alone with a diol to synthesize the prepolymer (A). In order to use the high molecular weight diol (a2 1) and the low molecular weight diol (a22), the molar ratio (α) of the isocyanate group to the hydroxyl group at the time of synthesis of the prepolymer (A), respectively (ie, NCO) /OH Mobi ratio) 2. 10~2. The range of 30, the NCO equivalent (β) of the prepolymer (Α) is set to be in the range of 460 to 550, and the product of the molar ratio (α) and the aforementioned NCO equivalent (β) (αχβ) is set at 10 In the range of 5 5 to 1 265, the reactivity of TODI is adjusted to an optimum range to optimize the foam formability. Next, a curing agent which is combined, blended, and mixed with the above-mentioned main component will be described below. The curing agent (B) used in the present invention contains an isocyanate group-reactive compound (b1) (hereinafter simply referred to as "reactive compound (bl)") as an essential component. Further, when the honing pad is produced by the water foaming method described later, the hardener (B) of the urethane resin composition of the two-component type -12-201035141 honing pad contains water (C) as a foaming agent. And the catalyst (D) as an essential component. The reactive compound (b1) is not particularly limited as long as it has good reactivity with a compound having an isocyanate group, and examples thereof include a polyaminochlorophenylmethane compound and a Pandex E-5 0 (trade name, DIC stock). Co., Ltd. 'polyaminochlorophenylmethane compound', 4,4'-diamino-3,3'-dichlorodiphenylmethane of the dinuclear form of polyaminochlorophenylmethane compound (hereinafter referred to as It is a mixture of MOCA) and polybutanediol (hereinafter referred to as PTMG), and the like may be used singly or in combination of two or more. The compounding amount of the above-mentioned reactive compound (b1) is preferably in the range of 15 to 35 parts by weight, more preferably in the range of 20 to 32 parts by weight, based on 100 parts by weight of the prepolymer (A). When the amount of the reactive compound (B) is within this range, a polyurethane lining pad having high hardness, durability (heat resistant water), and abrasion resistance can be obtained. Further, water (C) is formulated as a foaming agent. The amount of water is preferably 0. by weight relative to 100 parts by weight of the above reactive compound (b 1). 05~1 〇 The range of parts by weight, more preferably 0. 3 0~0. A range of 60 parts by weight. If the amount of the water (C) is within this range, a honing enthalpy having a stable foaming state can be obtained. The method of adding the water (C) when the main component and the curing agent are mixed in two liquids is not particularly limited, and for example, the reactive compound (B), water (C), and catalyst (D) are optionally used in advance, as needed. The additive is mixed as a hardener, followed by a method of mixing the main agent with the hardener, foaming, hardening, and the like. Further, the composition of the 2-liquid type urethane resin -13 - 201035141 for the honing pad of the present invention must contain the catalyst (D). The type and the amount of the catalyst (D) to be added may be selected in consideration of the time of flowing into the mold of a predetermined shape after the mixing step, the final foaming state, and the like, and are not particularly limited as the catalyst (D). For example, N,N-dimethylaminoethyl ether, TOYOCAT ET (trade name, manufactured by Tosoh Corporation, N,N-dimethylaminoethyl ether), triethylene glycol diamine, Metals such as dimethylethanolamine, triethanolamine, N,N,N',N'-tetramethylhexamethylenediamine, N-methylimidazole, etc., such as tertiary decylamine and dioctyltin dilaurate In the case of a catalyst or the like, among these, from the viewpoint that the foaming property is strong, N,N-dimethylaminoethyl ether and TOYOCAT ET are preferable, and these may be used singly or in the form of a catalyst. Use two or more types. The amount of the catalyst (D) is preferably 0. by weight based on 100 parts by weight of the isocyanate-reactive compound (B). 1 to 1 part by weight, more preferably 0. 3~0. A range of 6 parts by weight. If the amount of the above-mentioned catalyst (D) is within this range, a honing pad having a stable foaming state can be obtained. The reactive chemical compound (B), water (C), and catalyst (D), which are essential components, are blended in a range of the above-mentioned blending amount, and a hardener is obtained by sufficiently stirring and mixing. The two-component urethane resin composition for a honing pad of the present invention can be obtained by directly mixing and mixing the adjusted main agent and the hardener as described above. The ratio of the ratio of the main agent to the hardener, that is, the total number of moles of isocyanate groups in the main agent / [the total number of moles of isocyanate-reactive groups in the aqueous hardener) is preferably 1/ 0·7~1/1. The range of 1 is better than 1/0. 8~1/1. The range of 0. When the blending ratio of the main component and the hardener is in the range of -14 to 201035141, excellent properties such as high hardness, durability (heat resistant water), and abrasion resistance can be obtained. In the two-component urethane resin composition for the honing pad of the present invention, for example, a foam stabilizer, an antioxidant, or a detachment may be used at any stage of the production step without damaging the object of the present invention. A foaming agent, an ultraviolet absorber, a honing abrasive, a chelating agent, a pigment, a tackifier, a surfactant, a flame retardant, a plasticizer, a slip agent, an antistatic agent, a heat stabilizer, a blending resin, or the like is used as an additive. 〇 The ruthenium material is not particularly limited, and examples thereof include carbonates, citric acid, silicates, hydroxides, sulfates, borates, titanates, metal oxides, carbides, and organic substances. Examples of the foam stabilizer include Toray Silicone SH-193 (manufactured by Toray Industries, Inc.), SH-192 (manufactured by Toray Industries, Inc.), and SH-190 (manufactured by the company). Next, the polyurethane lining pad of the present invention and a method for producing the same will be described. ^ The polyurethane lining pad of the present invention is a two-liquid type urethane resin composition using the aforementioned honing pad, and a 2-liquid type urethane can be used for the honing pad. The resin composition is added to the mold of a predetermined shape as needed, and is injected into a mold having a predetermined shape to be foamed and hardened, and the foamed product is taken out from the mold, and sliced into a sheet shape or the like to obtain a suitable shape. As a method for producing the polyurethane lining pad of the present invention, in addition to the water foaming method described later, various methods such as a method of adding hollow beads, a mechanical foaming method, and a chemical foaming method may be employed. Special restrictions. -15-201035141 Hereinafter, the water-foaming method will be described as an example to explain the production method of the present invention. A method for producing a polyurethane lining pad using a two-component urethane resin composition for the honing pad, for example, a series of processes including the following [Step 1] to [Step 5], It is not limited to this. Further, the additive can be used in any step as long as it can be added unimpeded and can be uniformly formulated. [Step 1] The adjustment step of the main agent. In a reaction apparatus equipped with a nitrogen introduction tube, a cooling condenser, a thermometer, and a cooling machine, toluidine diisocyanate (al) and high molecular weight diol (a21) as polyisocyanate are respectively charged (Mn is 500 to 5000). The range), low molecular weight diol (a22) (molecular weight 50~300), the molar ratio (α) of the isocyanate group to the hydroxyl group of the prepolymer (A) is 2. 10~2. In the range of 30, the NCO equivalent (β) of the prepolymer (A) is in the range of 460 to 550, and the aforementioned molar ratio (the product of 〇〇 and the aforementioned NCO equivalent (β) (αχβ) is 1 05 5 to 1265. In the range of preferably 50 to 90 ° C, more preferably 60 to 8 (the range of TC is reacted under stirring in a nitrogen atmosphere, the prepolymer (A) is synthesized to obtain a ruthenium prepolymer. The main component of (A). [Step 2] a mixing step of the main component and the curing agent. Next, the main component containing the prepolymer (A) and at least the reactive compound (B), water (C), and The curing agent of the catalyst (D) is mixed and stirred to form a foaming reaction liquid. When mixing, the prepolymer (A) and the reactive compound (B) containing water (C) and catalyst (D) are mixed. The main agent containing the prepolymer (A) is heated to a temperature of preferably 40 to 70 ° C, and the hardener is preferably heated to 40 to 90 ° C in the respective tanks of the two-liquid mixing casting machine. Each of them is mixed by a two-liquid mixing casting machine. -16 - 201035141 [Step 3] Casting step The foaming reaction liquid is poured into a mold which is previously heated to preferably 50 to 12 ° C. [Step 4 The hardening step: in the state of being injected into the mold, the foaming reaction liquid is heated and maintained in a suitable temperature range (for example, in the range of 50 to 120 ° C) to be foamed and hardened, preferably at 50 to 120 ° C. After leaving the mold for 30 minutes to 2 hours, the molded article is taken out, and post-cured is preferably carried out at a temperature of 1 to 120 ° C for 8 to 17 hours to form a molded article. 5] Slicing step: The formed product is sliced into a sheet having a suitable thickness. The thickness of the sliced sheet is not particularly limited as long as it is set according to the purpose of honing, and is preferably, for example, 0. 6~2. The range of 0mm. As described above, the polyurethane lining pad of the present invention has a small change in the hardness (elastic modulus) of the honing pad due to an increase in temperature during the honing operation, and wear resistance. Formability (yield, uneven molding, etc.) 〇w is excellent, and can be used for, for example, a glass substrate for a liquid crystal display (LCD), a glass substrate for a hard disk (HDD), a glass substrate for a display, a glass disk for a recording device, and optical Precision honing of glass materials requiring high surface flatness such as lenses, tantalum wafers, and semiconductor components. EXAMPLES Hereinafter, the present invention will be specifically described by examples, but the scope of the invention is not limited to the examples. Further, the present invention is not particularly limited, and "parts" are "parts by weight", and "% -17- 201035141 is "% by weight". Further, the measurement method and evaluation method used in the present invention are as follows. (Measurement of weight average molecular weight) The measurement of the weight average molecular weight (polystyrene conversion) by GPC in the present invention was carried out under the following conditions using an HLC 8220 system manufactured by Tosoh Corporation. Separation column: 4 TSKgel GMHHR-N made by Tosoh Co., Ltd. was used. Column 0 Temperature: 40 °C. Moving layer··Huangguang Pure Chemical Industry Co., Ltd. produces tetrahydrofuran. Flow rate: 1. 〇1111/min. Sample concentration: 1. 0% by weight. Sample injection amount: 1 〇〇 microliter. Detector: Differential refractometer. [Method for Measuring NCO Equivalent (β) of Prepolymer (A)] The NCO equivalent (β) of the prepolymer (Α) was measured by dissolving the sample in dry toluene according to JIS K7301, and adding excess di-n-butyl The reaction of the base amine is carried out by counter-titrating the residual di-η-butylamine with a hydrochloric acid standard solution. [Method for Measuring Viscosity of Prepolymer (Α)] 黏 The viscosity of the prepolymer (Α) was measured using a ΒΜ-type viscometer (manufactured by Tokyo Keiki Co., Ltd.) using a sample of 200 mb No. 2 or No. 3 rotor. . [Method for Measuring the Service Life of Prepolymer (A)] The main component containing the prepolymer (A) and the isocyanate-reactive compound (B) were each adjusted to an internal temperature of 80 ° C and 50 ° C, followed by mixing. When the main agent and the hardener are used as the urethane resin composition, the TG is used as a base point, and the time TK unit until the viscosity of the urethane resin composition reaches 50,000 mPai is measured; The measurement result of the reactivity of the acid ester resin composition -18 - 201035141. Then, the viscosity of the urethane resin composition was measured by using a bm type viscometer (manufactured by Tokyo Keiki Co., Ltd.) in an atmosphere of 23 ° C with a sample amount of 200 ml and a No. 4 rotor every 10 seconds. [Method for Producing Honing Pad] The prepolymer (A) and the isocyanate-reactive compound (B) containing water (C) and catalyst (D) are placed in respective tanks of a two-liquid mixing casting machine. The prepolymer (A) was warmed to 50 to 80 ° C, and the reactive compound (B) was heated to 40 to 110 ° C, and mixed by a two-liquid mixing casting machine. The foaming reaction solution was poured into a mold which was previously heated to 50 to 12 °C. The foaming reaction liquid is heated and maintained in a suitable temperature range (for example, in the range of 50 to 120 ° C) in a state of being injected into the mold to be foamed and hardened, preferably placed in a mold of 50 to 12 CTC. After 30 minutes to 2 hours, the molded article is taken out and post-cured at a temperature of preferably from 1 to 10 ° C for 8 to 17 hours to obtain a molded article. The molded article is sliced into a sheet having a suitable thickness. The sliced slice ^ is thick as long as it is set according to the purpose of honing, and is not particularly limited, and is preferably, for example, 0. 6-2. The range of 0mm. [Method for Measuring Formability] The prepolymer (A) and the reactive compound (B) containing water (C) and catalyst (D) are placed in respective tanks of a two-liquid mixing casting machine to pre-polymerize. The product (A) is heated to 50-80 ° C, and the reactive compound (B) is heated to 40 to 1 l ° ° C, respectively, mixed by a two-liquid mixing casting machine, and injected at a room temperature at an upper temperature. Molding to make foaming. According to the state of foaming, it was judged that the cracking under the -19-201035141 crack and the expansion under the foaming was "good" in accordance with the foaming state. [Method for Measuring Durability (Hot Water Resistance)] Using the two-component urethane resin composition for the honing pad, three honing pads were prepared from the same resin composition, and each immersion was set to an internal temperature of 4 The change in hardness after immersion for 2 hours was measured in a constant temperature water bath at 0 ° C, 60 ° C, and 80 °C. The hardness retention ratio was calculated from the following formula, and the honing mat having a hardness retention ratio of 70% or more was judged to be excellent in durability (heat hydration resistance), and it was judged as "poor" when it was less than 7 〇%.硬度 Hardness retention ratio (%) = hardness after immersion for 2 hours / hardness before immersion X 1 00 [Method for measuring abrasion resistance] The abrasion resistance was evaluated in accordance with JIS K73 1 2- 1 996 (Taber abrasion test). The evaluation criteria for the abrasion resistance were that the honing pad having a friction loss of 20 mg or less was judged to have good abrasion resistance. [Measurement Method of Hardness (JIS A)] The spring hardness test 験 was performed in accordance with JIS K 73 1 2- 1 996 (hardness test), and was evaluated by the mold A. The hardness was evaluated as "perfect" when the hardness was 8 5 (JIS A) Ο or more, and the hardness was 85 (JIS A) or less. [Example 1] Toluene diisocyanate (TODI) (al) as a polyisocyanate was placed in a 1 liter four-necked round bottom flask equipped with a nitrogen introduction tube, a condenser for cooling, a thermometer, and a stirrer (Japan Soda Co., Ltd.) Ltd.) 1〇68 parts 'Start stirring. Next, 1 000 parts of PTMG-1000 (trade name, manufactured by Mitsubishi Chemical Corporation, poly-stranded -20-201035141 diol, Mn = 1 000) as a high molecular weight diol (a21) was added and mixed in portions. The reaction was carried out at 70 ° C for 2 hours under a nitrogen stream, and then 93 parts of diethylene glycol (DEG, manufactured by Mitsubishi Chemical Corporation, molecular weight 106) as a low molecular weight diol (a22) was added and mixed in a nitrogen stream at 7 Torr. The reaction was carried out for 5 hours at ° C to synthesize the isocyanate-terminated urethane prepolymer (A-1) of the main component. The NCO/OH molar ratio (α) of the aforementioned prepolymer (A-1) at the time of synthesis is 2. 15. The above prepolymer (VIII-1) has an equivalent weight (0) of 5 Å, and the above (product of 〇〇 and (0) (αχβ) is 1 075 » 〇, then, in 100 parts as having an isocyanate The base reactive compound (Β) of Pandex Ε-5 0, formulated with 0. 6 parts of ion-exchanged water (C) as a foaming agent, 0. 5 parts of TOYOCAT-ET as catalyst (D), and 0. 9 parts of Toray Silicone SH-193 as a foam stabilizer were thoroughly stirred and mixed to obtain a polyamine composition (X-1) of a hardener. A polyamine composition of a prepolymer (A-1) of a main component and a hardener in a weight ratio of the prepolymer (A-1) / polyamine composition (X-1) = 1 00 / 27 in a vessel (X-1) Stirring and mixing 'Approximately 350 g was injected into a mold (130 mm x 30 mm x 35 mm) preheated to 50 ° C, and immediately placed in a mold lid, and then allowed to stand at 50 ° C for 1 hour, and then the foamed molded article was taken out. The foamed molded article was cured at 110 ° C for 16 hours, and a molded article was obtained. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a sheet-like polyurethane lining pad (P-1) having a uniform density distribution. The physical properties (formability, abrasion resistance, durability, and the like) of the polyurethane lining pad (P-1) are shown in Table [Example 2] -21 - 201035141 With a nitrogen introduction tube and cooling A 1 liter four-necked round bottom flask of a condenser, a thermometer, and a stirrer was charged with 968 parts of TODI (al) (made by Nippon Soda Co., Ltd.) to start stirring. Next, 1000 parts of PTMG-1 000 as a high molecular weight diol (a21) were added and mixed, and 7 (TC was subjected to a reaction for 2 hours under a nitrogen stream, and then 67 parts of DEG (Mitsubishi) as a low molecular weight diol (a22) was used. Chemical Co., Ltd.) was added and mixed in portions, and reacted at 70 ° C for 5 hours under a nitrogen stream to synthesize a prepolymer (A-2) of the main component. The NCO of the prepolymer (A-2) at the time of synthesis. The OH molar ratio (ct) is 〇2. The NCO equivalent (β) of the above-mentioned prepolymer (A-2) was 500, and the product (αχβ) of the above (α) and (β) was 1111. Next, in 100 parts of Pandex Ε-50 as a reactive compound (Β), 0. 6 parts of ion exchange water as a blowing agent (〇, 0. 5 parts of TOYOCAT-ET as a catalyst (D), and 0. 9 parts of Toray Silicone SH-193 as a foam stabilizer were thoroughly stirred and mixed to obtain a polyamine composition (X-1) of a hardener. In the container, the prepolymer (A-2) / polyamine composition (X-1) = 1 00 / 27 weight ratio, stirring and mixing the prepolymer (A-2) of the main agent with the hardener Amine composition (X-1), about 350g was injected into a mold (1 30mm X 1 30mm x 3 5mm) preheated to 50 °C, immediately formed into a mold cover, and placed at 50 ° C for 1 hour. Thereafter, the foamed molded article was taken out, and the foamed molded article was cured at 110 ° C for 16 hours, and then cured to obtain a molded article. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a sheet-like polyurethane lining pad (P-2) having a uniform density distribution. The physical properties (formability, abrasion resistance, durability, and the like) of the polyurethane lining pad (P-2) are shown in Table-22-201035141. [Example 3] A nitrogen introduction tube and a cooling device are provided. A 1 liter four-necked round bottom flask of a condenser, a thermometer, and a stirrer was placed in 904 parts of TODI (al) (manufactured by Nippon Soda Co., Ltd.), and stirring was started. Next, 1000 parts of PTMG-1 000 as a high molecular weight diol (a21) were added and mixed, and the reaction was carried out at 70 ° C for 2 hours under a nitrogen stream, and then 67 parts of DEG (Mitsubishi) as a low molecular weight diol (a22) was used. The product was added in portions, and the mixture was reacted at 70 ° C for 5 hours under a nitrogen stream to synthesize a prepolymer (A-3) of the main component. The NCO/OH molar ratio (α) of the aforementioned prepolymer (A-3) at the time of synthesis is 2. 10, the NCO equivalent (β) of the prepolymer (A-3) is 550, and the above (product of 〇〇 and (β) (αχβ) is 1 220. Next, in 1 part as a reactive compound (Β)Pandex Ε-50 tuned 0. 6 parts of ion exchange water (C) as a foaming agent, 0. 5 parts of TOYOCAT-ET as catalyst (D), and 0_9 parts of Toray S i 1 ic 〇ne S Η -1 9 3 as a foam stabilizer, fully stirred and mixed to obtain a polyamine group composition of a hardener (xl). In the container, the prepolymer (Α-3)/polyamine composition (X-1) = 1 00/25 by weight, the prepolymer (Α-3) mixed with the main agent and the polyamine of the hardener are stirred. (Χ-1), inject about 350g into a mold preheated to 50 °C (130mmxl30mmx35mm), immediately after making the lid of the mold, 'Place at 50C for 1 hour, then take out the foamed molded article, and send the hair The foamed article was cured at 110 ° C for 16 hours, and a molded article was obtained. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a uniform sheet-like polyurethane lining pad (P-3) having a density distribution of -23-201035141. The physical properties (formability, abrasion resistance, durability, etc.) of the polyurethane lining pad (P-3) are shown in Table 1 [Example 4] A nitrogen introduction tube and a condenser for cooling are provided. A 1 liter four-neck round bottom flask of a thermometer and a stirrer was charged with 759 parts of TO DI (al) (made by Nippon Soda Co., Ltd.), and stirring was started. Next, 1000 parts of PTMG-1 000 as a high molecular weight diol (a21) were added and mixed, and a reaction was carried out at 70 ° C for 2 hours under a nitrogen stream, and then 26 parts of DEG as a low molecular weight diol (a22) was used. Mitsubishi Chemical Co., Ltd.) was added and mixed in portions, and reacted at 7 ° C for 5 hours under a nitrogen stream to synthesize a prepolymer (A-4) of a main component. The NCO/OH molar ratio (α) of the aforementioned prepolymer (A-4) at the time of synthesis is 2. 30. The NC0 equivalent (β) of the prepolymer (A-4) was 550, and the product (αχβ) of the above (α) and (β) was 1,265. Next, in 100 parts of Pandex Ε-50 as a reactive compound (Β), 6 parts of ion-exchanged water (C) as a foaming agent, 0. 5 copies of TOYOCAT-ET as a touch media (D), and 0. 9 parts of Toray Silicone SH_193 as a foam stabilizer were sufficiently stirred and mixed to obtain a polyamine composition (X-1) of a hardener. Mixing the prepolymer (A-4) of the main component with the polyamine composition of the hardener in the container in the weight ratio of the prepolymer (A-4) / polyamine composition (Xl) = 100 / 25 (X) -1) 'Inject approximately 350g into a mold (130mmxl30mmx35mm) preheated to 50 °C, immediately cover the mold, and place at 50 °C for 1 hour'. Then remove the foamed molded article and shape the foam. The product was hardened after 11 6 hours at 11 0 -24 - 201035141 °C to obtain a molded article. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a sheet-like polyurethane lining pad (P-4) having a uniform density distribution. The physical properties (formability, abrasion resistance, durability, etc.) of the polyurethane lining pad (P-4) are shown in the table. [Example 5] A nitrogen introduction tube, a condenser for cooling, and a thermometer are provided. A 1 liter four-neck round bottom flask of a stirrer was charged with 1127 parts of T〇DI (al) (manufactured by Nippon Soda Co., Ltd.), and stirring was started. Next, 1000 parts of PTMG-1000 as a high molecular weight diol (a2 1) was added and mixed in portions, and the reaction was carried out at 70 ° C for 2 hours under a nitrogen stream, and then 91 parts of DEG (Mitsubishi) as a low molecular weight diol (a22) was used. Chemicals Co., Ltd.) was added and mixed in portions, and reacted at 70 ° C for 5 hours under a nitrogen stream to synthesize a prepolymer (A-5) of a main component. The NCO/OH molar ratio (〇:) of the aforementioned prepolymer (A-5) at the time of synthesis is 2. 3〇, the prepolymer (8-5): ^(: 〇 equivalent (0) is 46 〇, the above (〇〇 and (0) product (αχβ) is 1 05 8. Ο Next, at 100 parts As a reactive compound (Β), Pandex Ε-50 is formulated with 〇·6 parts of ion-exchanged water (C) as a foaming agent, 0. 5 parts of TOYOCAT-ET as the catalyst (D), and 0. 9 parts of Toray Silicone SΗ-193 as a foam stabilizer, thoroughly mixed and mixed to obtain a polyamine composition of hardener (Χ-1) ° Prepolymer (Α-5)/polyamine composition in a container ( X- 1 ) = 1 00/3 0 by weight, stirring the prepolymer (Α-5) of the main agent and the polyamine composition (Χ-1) of the hardener, and injecting about 350g into the preheating to 50 °C--25-201035141 (130mmxl30mmx35mm), immediately after making the cover of the mold, placed at 50 ° C for 1 hour, after which the foamed molded product was taken out, and the foamed molded article was subjected to 1 10 ° C for 1 6 After the aging, it hardens to obtain a molded article. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a sheet-like polyurethane lining pad (P-5) having a uniform density distribution. The physical properties (formability, abrasion resistance, durability, etc.) of the polyurethane lining pad (P-5) are shown in Table 1 [Example 6] C Having a nitrogen introduction tube and cooling condensation A 1 liter four-necked round bottom flask of a thermometer, a stirrer, and 913 parts of toluidine diisocyanate (TO) (manufactured by Nippon Soda Co., Ltd.) as polyisocyanate was charged and stirred. Then, PTMG-650 (trade name, manufactured by Mitsubishi Chemical Corporation, polybutanediol, Mn = 6 50) as a diol was added and mixed in portions, and the mixture was carried out at 70 ° C under a nitrogen stream. Hour reaction, synthesis of the isocyanate-terminated urethane prepolymer (A-6) of the main agent » The NCO/OH molar ratio U) of the prepolymer (Α-6) at the time of synthesis is 2. The NCO equivalent (β) of the above-mentioned prepolymer (Α-6) is 500, and the product (ax β) of the above (α) and (β) is 1 125. Next, in 100 parts of Pandex Ε-50 having an isocyanate-reactive compound (Β), 0 is formulated. 6 parts of ion-exchanged water (C) as a foaming agent, 0. 5 parts of TOYOCAT-ET as catalyst (D), and 0. 9 parts of To ray Silicone SH-193 as a foam stabilizer were sufficiently stirred and mixed to obtain a polyamine composition (X-1) of a hardener. Prepolymer (A-6) / polyamine composition (X-1) = 00 / 27 weight -26 - 201035141 in the container in the amount of 'mixed mixed prepolymer prepolymer (A-6) and hardened The polyamine composition (Χ-1) of the agent, about 350g was injected into a mold (1 30mmx 1 30mmx35mm) preheated to 50 ° C, immediately formed into a mold cover, placed at 50 ° C for 1 hour, and then taken out The foamed molded article was cured at 110 ° C for 16 hours, and then cured to obtain a molded article. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a sheet-like polyurethane lining pad (P-6) having a uniform density distribution. The physical properties (formability, abrasion resistance, durability, and the like) of the polyurethane lining pad (P-6) are shown in Table 1. [Comparative Example 1] A 1 liter four-neck round bottom flask equipped with a nitrogen introduction tube, a cooling condenser, a thermometer, and a stirrer was charged with Cosmonate T-8 0 (trade name, Mitsui Chemical Polyurethane) as a polyisocyanate. Stirring was started by making a mixture of 1,117 parts of a 2,4-isomer of toluene diisocyanate (TDI) and a 2:6-isomer of toluene diisocyanate (TDI). Next, 1000 parts of PTMG-1 000 (trade name, manufactured by Mitsubishi Chemical Corporation, Ltd., polybutane diol, Mn = 1 000) as a high molecular weight diol (a21) were added and mixed in portions under a nitrogen stream. The reaction was carried out at 70 ° C for 2 hours, and then 26 8 parts of diethylene glycol (DEG, manufactured by Mitsubishi Chemical Corporation, molecular weight 106) as a low molecular weight diol (a22) was added and mixed in portions, and 70 ° C under a nitrogen stream. The reaction was carried out for 5 hours to synthesize the isocyanate-terminated urethane prepolymer (A-7) of the main component. The NCO/OH molar ratio (^) of the aforementioned prepolymer (A-7) at the time of synthesis is 1. 85. The NCO equivalent (β) of the prepolymer (A-7) is 400', and the product (αχβ) of the above 〇) and (β) is 740. -27- 201035141 Next, in 100 parts of Pandex E-50 having an isocyanate-reactive compound (B), 5 parts of ion-exchanged water (C) as a foaming agent is formulated. 3 parts of TOYOCAT-ET as catalyst (D), and 0. 9 parts of Toray Silicone SH-193' as a foam stabilizer were thoroughly stirred and mixed to obtain a polyamine composition (X-2) of a hardener. Mixing the prepolymer (A-7) of the main component with the polyamine of the hardener in a weight ratio of the prepolymer (A-7) / polyamine composition (X-2) = 1 00 / 30 in the container In the composition (X-2), about 350 g was injected into a mold crucible (130 mm x 30 mm x 35 mm) preheated to 50 ° C, and immediately after the lid of the mold was placed, it was allowed to stand at 50 ° C for 1 hour, and then the foamed molded article was taken out. The foamed molded article was cured at 110 ° C for 16 hours, and a molded article was obtained. The molded article was cut into a thickness of about 2 mm by a microtome to obtain a sheet-shaped polyurethane lining pad (P-7). The physical properties (formability, abrasion resistance, durability, and the like) of the polyurethane lining pad (P-7) are shown in Table 2. From the results, it was found that durability (hot water resistance) was poor. [Comparative Example 2] ^ 904 parts of TODI (al) (manufactured by Nippon Soda Co., Ltd.) was placed in a 1 liter four-necked round bottom flask equipped with a nitrogen introduction tube, a condenser for cooling, a thermometer, and a stirrer, and stirring was started. Next, one part of PTMG-1000 (trade name, manufactured by Mitsubishi Chemical Corporation, polybutane diol, Mn=1000) as a high molecular weight diol (a21) was added and mixed in portions under a nitrogen stream. 〇〇c was reacted for 2 hours, and then 67 parts of diethylene glycol (DEG, manufactured by Mitsubishi Chemical Corporation, molecular weight 丨〇6) as a low molecular weight diol (a22) was added and mixed in a stepwise manner under a nitrogen stream. The reaction was carried out for 5 hours at °C to synthesize the main agent -28-. 201035141 Prepolymer (A-8). The NCO/OH molar ratio (α) of the aforementioned prepolymer (A-8) at the time of synthesis is 2. 1〇, the 1 (〇) equivalent (0) of the prepolymer (8-8) is 5〇〇, and the product (αχβ) of the above (〇[) and (0) is 1 0 50. The prepolymer (Α-8) gelled during synthesis and did not provide good performance. The results are shown in Table 2. [Comparative Example 3] 806 parts of TODI (al) (manufactured by Nippon Soda Co., Ltd.) was placed in a 公 1 liter four-necked round bottom flask equipped with a nitrogen inlet tube, a condenser for cooling, a thermometer, and a stirrer, and stirring was started. Next, 1000 parts of PTMG-1 000 as a high molecular weight diol (a21) were added and mixed, and the reaction was carried out at 70 ° C for 2 hours under a nitrogen stream, and then 23 parts of DEG (Mitsubishi) as a low molecular weight diol (a22) was used. Chemicals Co., Ltd.) was added and mixed in portions, and reacted at 70 ° C for 5 hours under a nitrogen stream to synthesize a prepolymer (A-9) of a main component. The NCO/OH molar ratio (α) of the aforementioned prepolymer (A-9) at the time of synthesis is 2. 5〇' The first prepolymer (8-9) has a 1 〇 equivalent (卩) of 5 〇〇, and the product (α χ β) of the above (〇〇 and (0) €) is 1 250. Then, in 100 parts of Pandex Ε-50 as a reactive compound (Β), 6 parts of ion-exchanged water (C) as a foaming agent, 0. 5 parts of TOYOCAT-ET as the catalyst (D), and 0. 9 parts of Toray Silicone SΗ-193 as a foam stabilizer were thoroughly stirred and mixed to obtain a polyamine composition (Χ-1) of a hardener. Mixing the prepolymer (Α-9) of the main component with the polyamine composition of the hardener in the weight ratio of the prepolymer (Α-9)/polyamine composition (Xl) = 100/27 in the vessel - 201035141 (Χ-l) Inject approximately 3 50g into the mold preheated to 50 °C (130mmxl30mm> <35 mm), immediately after the lid of the mold was placed, and left at 50 ° C for 1 hour, and then the foamed molded article was taken out, and the foamed molded article was cured at 110 ° C for 16 hours, and then cured to obtain a molded article. . The resulting molded article was cracked and expanded under foaming, and a good sheet-like polyurethane lining pad (P-9) could not be obtained. The results are shown in Table 2. [Comparative Example 4] 1176 parts of TODI (al) (manufactured by Nippon Soda Co., Ltd.) was placed in a 公 1 liter four-necked round bottom flask equipped with a nitrogen introduction tube, a condenser for cooling, a thermometer, and a stirrer, and stirring was started. Next, 1000 parts of PTMG-1 000 as a high molecular weight diol (a2 1) were added and mixed in portions, and the reaction was carried out at 70 ° C for 2 hours under a nitrogen stream, and then 143 parts of DEG as a low molecular weight diol (a22) was used ( Mitsubishi Chemical Co., Ltd.) was added and mixed in portions, and reacted at 70 ° C for 5 hours under a nitrogen stream to synthesize a prepolymer (A-10) of a main component. The NCO/OH molar ratio (α) of the prepolymer (A-10) at the time of synthesis is 2.00, and the NCO equivalent (β) of the prepolymer (A-10) is 550, and the aforementioned (α) and Ο ( The product of β) (αχβ) was 1100. As shown in Table 2, the prepolymer (Α-10) was gelated during the synthesis, and good performance could not be obtained. The results are shown in Table 2. [Comparative Example 5] 719 parts of TODI (al) (manufactured by Nippon Soda Co., Ltd.) was placed in a 1 liter four-necked round bottom flask equipped with a nitrogen inlet tube, a condenser for cooling, a thermometer, and a stirrer, and stirring was started. Next, 1000 parts of PTMG-1000 as a diol was added and mixed in portions, and the reaction was carried out for 5 hours under a nitrogen stream to synthesize a prepolymer (A-1 1) of the main -30-201035141 agent. The NCO/OH molar ratio (α) of the prepolymer (A-11) at the time of synthesis is 2.72', and the NCO equivalent (β) of the aforementioned prepolymer (aU) is 500, the aforementioned (α) and (β) The product (αχ β) is 1360. Then, in 100 parts of Pandex®-50 as a reactive compound (Β), 0.6 parts of ion-exchanged water (C) as a foaming agent, 0.5 parts of TOYOCAT-ET as a catalyst (D), and 0.9 parts were formulated. Toray Silicone SH-193, a foam stabilizer, was thoroughly stirred and mixed to obtain a polyamine group composition (xi) of a hardener. Mixing the prepolymer (A-11) of the main component with the polyamine composition of the hardener in a weight ratio of the prepolymer (A-11) / polyamine composition (Xl) = 100/2 7 in the vessel ( X-1), about 3 50g was injected into a mold (130mmxl30mmx35mm) preheated to 50 °C, and immediately formed into a mold cover, and then placed at 50 ° C for 1 hour, after which the foamed molded article was taken out and the foam was molded. The product was hardened at 110 ° C for 16 hours, and a molded article was obtained. The obtained molded article was cracked and expanded under the foaming, and a good sheet-like polyurethane lining pad (P-11) could not be obtained. The results are shown in Table 2. -31- 201035141 Table 1-1 Example 1 Example 2 Example 3 Main agent; Prepolymer (A) A-1 A-2 A-3 Prepolymer NCO/OH molar ratio at the time of synthesis (6) 2.15 2.25 2.1 NCO equivalent of prepolymer (β) 500 500 550 Product of molar ratio (4) to NCO equivalent (β) (αχβ) 1075 1111 1155 Viscosity of prepolymer (Α) (mPa. s/80°C) 1470 1190 1220 Hardener amide composition (parts) X-1 X-1 X-1 NCO-based reactive compound (B) Pandex E-50 1 part Pandex E-50 100 parts Pandex E-50 100 parts ion exchange Water (C) 0.6 parts 0.6 parts 0.6 parts catalyst (D) TOYOCAT-ET TOYOCAT-ET TOYOCAT-ET 0.5 parts 0.5 parts 0.5 parts Toray Silicone Toray Silicone Toray Silicone Foaming agent SH-193 SH-193 SH-193 0.9 parts Mixing ratio (weight ratio) of 0.9 parts of 0.9 part of main agent (prepolymer) / hardener (polyamine composition) 100/27 100/27 100/25 Service life of urethane resin composition (seconds) 220 200 230 Density of molded product (g/cm3) 0.6 0.6 0.6 Hardness (JISA) 91 89 88 Good formability Good honing pad (P) P-1 P-2 P-3 Good abrasion resistance Good wear loss (mg) 140 110 95 resistant Good long-term good and good 4 (TC hardness retention rate (%) 84 85 84 Good durability, good and good 60. Hardness retention rate (%) 82 83 82 Good durability, good and good 80% hardness retention rate (% 80 81 80 -32- 201035141 Table 1-2 Example 4 Example 5 Example 6 Main agent; Prepolymer (A) A-4 A-5 A-6 Prepolymer NCO/OH at the time of synthesis Ear ratio (6) 2.3 2.3 2.25 NCO equivalent of prepolymer (β) 550 460 500 Moir (6) and NCO equivalent (β) product (αχβ) 1265 1058 1125 Prepolymer (Α) viscosity (mPa· s/80 〇C) 820 1610 690 Hardener amide composition (parts) X-1 X-1 X-1 NCO-based reactive compound (B) Pandex E-50 100 parts Pandex E-50 1 part Pandex E-50 100 parts ion-exchanged water (C) 0.6 parts 0.6 parts 0.6 parts catalyst (D) TOYOCAT-ET TOYOCAT-ET TOYOCAT-ET 0.5 parts 0.5 parts 〇·5 parts Toray Silicone Toray Silicone Toray Silicone Foaming agent SH-193 SH- 193 SH-193 〇·9 parts 0.9 parts 0.9 parts of main agent (prepolymer) / hardener (polyamine composition) mixing ratio (weight ratio) 100/25 100/30 100/27 urethane resin Use of the composition Life (seconds) 200 190 190 Density of molded product (g/cm3) 0.6 0.6 0.61 Hardness (JISA) 83 90 91 Good formability Good honing pad (P) P-4 P-5 P-6 Good abrasion resistance Good good wear loss (mg) 10 145 160 Good durability, good good hardness retention (%) at 40 〇C 86 83 86 Good durability, good hardness retention at 60 °C (%) 85 81 83 Good durability Good hardness retention at 80 ° C (%) 82 79 80 -33- 201035141
表2 比較例1 比較例2 比較例3 比較例4 比較例5 主劑澦聚物(A) A_7 A-8 A-9 A-10 A-11 預聚物在合成時之 NCO/OH莫耳比⑻ 1.85 2.10 2.50 2.00 2.72 預聚物之NCO當量(β) 400 500 500 550 500 莫耳比(〇0與NCO當量(β)的 積(αχβ) 740 1050 1250 1100 1360 預聚物(Α)之黏度 (mPa-s/SOt：) 800 凝膠化 750 凝膠化 660 硬化劑;聚胺組成物 (份） X-2 X-1 X-1 NCO基反應性化合物(B) Pandex E-50 100份 無調配 Pandex E-50 1〇〇份 無調配 Pandex E-50 100份 離子交換水(C) 〇·5份 無調配 〇_6份 無調配 0.6份 觸媒(D) TOYOCAT-ET 0.3份 無調配 TOYOCAT-ET 0.5份 無調配 TOYOCAT-ET 〇_5份 整泡劑 Toray Silicone SH-193 0.9份 無調配 Toray Silicone SH-193 0.9份 無調配 Toray Silicone SH-193 0.9份 主劑(預聚物)/ 硬化劑(聚胺組成物)之 混合比價量比） 100/30 100/27 100/27 胺基甲酸酯樹脂組成物之 使用壽命(秒） 220 170 150 成形品之密度(g/cm3) 0.60 0.60 0.61 硬度(JISA) 93 88 90 成形性 良好 裂紋 發泡下方的膨 脹 裂紋 發泡下方的膨 脹 硏磨墊(P) P-7 P-9 P-11 耐摩耗性 良好 無法測定 無法測定 磨耗減量(mg) 130 耐久性 桃之硬度保持率(％) 良好 77 無法測定 無法測定 耐久性 60¾之硬度保持率(％) 不良 59 無法測定 無法測定 耐久性 801之硬度保持率(％) 不良 48 無法測定 無法測定 -34- 201035141 產業上之利用可能性 本發明之硏磨墊用2液型胺基甲酸酯樹 業時反應性的控制爲容易且成形性優異，能 微細形狀之發泡胞。 又，本發明之聚胺基甲酸酯硏磨墊在硏 度上昇導致之硏磨墊硬度（彈性模數）改變爲 熱水性等）、耐摩耗性、成形性（產率、成形 可用於例如，液晶顯示器（LCD)用玻璃基板-0 玻璃基板、記錄裝置用玻璃碟片、光學用透 半導體元件等之要求高度表面平坦性的玻璃 磨。 【圖式簡單說明】 無。 【主要元件符號說明】 無。 〇 脂組成物係作 夠形成均勻且 磨操作時因溫 J、，耐久性（耐 不均等）優良， 硬碟（HDD)用 鏡、砂晶圓、 材料之精密硏 -35-Table 2 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Main agent cerium polymer (A) A_7 A-8 A-9 A-10 A-11 A-11 NCO/OH molar of the prepolymer during synthesis Ratio (8) 1.85 2.10 2.50 2.00 2.72 NCO equivalent of prepolymer (β) 400 500 500 550 500 Mo ratio (〇0 and NCO equivalent (β) product (αχβ) 740 1050 1250 1100 1360 Prepolymer (Α) Viscosity (mPa-s/SOt:) 800 Gelation 750 Gelation 660 Hardener; Polyamine Composition (Parts) X-2 X-1 X-1 NCO-based Reactive Compound (B) Pandex E-50 100 Dispensing Pandex E-50 1 无 Dispensing Pandex E-50 100 parts Ion exchange water (C) 〇·5 parts no preparation 〇6 parts unmixed 0.6 parts catalyst (D) TOYOCAT-ET 0.3 parts TOYOCAT-ET 0.5 Dispensing TOYOCAT-ET 〇_5 Refining Toray Silicone SH-193 0.9 Dispensing Toray Silicone SH-193 0.9 Dispensing Toray Silicone SH-193 0.9 Precipitant (Prepolymer) / Mixing ratio of hardener (polyamine composition) 100/30 100/27 100/27 Life of urethane resin composition (seconds) 220 170 150 Density of molded product (g/cm3) 0.60 0.60 0.61 Hardness (JISA) 93 88 90 Good formability. Expansion under the cracked foam. Expansion under the foaming cushion (P) P-7 P-9 P-11 Good wear resistance cannot be determined. It is impossible to measure the wear loss (mg). 130 Durability of the durability of the peach (%) Good 77 Unable to measure the durability of the unmeasured durability 603⁄4. (%) Poor 59 Unable to measure the hardness retention rate (%) of the unmeasured durability 801 Bad 48 Unable to measure cannot be measured - 34-201035141 Industrial Applicability The two-liquid urethane tree used in the honing pad of the present invention is easy to control and has excellent moldability, and can be a finely shaped foamed cell. Moreover, the polyurethane honing pad of the present invention is changed in hardness (elastic modulus) due to an increase in twist to a hot water property, etc., abrasion resistance, formability (yield, forming can be used for For example, a glass substrate - a glass substrate - a glass substrate for a liquid crystal display (LCD), a glass disk for a recording device, an optical transmissive semiconductor element, or the like, is required to have a high degree of surface flatness. [Simplified description of the drawing] None. Description] None. The rouge composition is uniform enough for the grinding process due to the temperature J, durability (inequality resistance), hard disk (HDD) mirror, sand wafer, material precision 硏-35-