201034044 六、發明說明 【發明所屬之技術領域】 本發明係關於適用於半導體或液晶之製造區域等之曝 光用光源或放映機之背光用光源的短弧型放電燈。 【先前技術】 短弧型放電燈係在發光管內相對向配置的一對電極的 前端距離較短而接近於點光源，因此藉由與光學系加以組 合而作爲曝光裝置用或放映機之背光用光源加以利用。 專利文獻1及2係揭示習知之短弧型放電燈。如專利 文獻1之揭示，在氙短弧燈中作爲發光氣體的氙氣、在水 銀蒸氣短弧燈中作爲緩衝氣體的氙氣、氪氣及氬氣的準分 子發光會引起在石英玻璃製放電容器的內面產生白濁的問 題。該文獻中，以如上所示之問題的對策而言，規定有由 該放電容器之紫外線放射發散度成爲最大的部分的內面起 200μιη之範圍的平均OH基濃度爲7.8xl 024個/m3以 上，而且由該內表面起深度20μιη之範圍的平均OH基濃 度爲 1.5χ 1 025個/ m3以上、1.2χ 1 026個/ m3以下的內 容。如上所示，在短弧型放電燈中，在放電容器的內面含 有OH基乃爲一般常見的技術。 另一方面，專利文獻2係揭示在極近於發光管之內表 面的區域存在有高濃度OH基時，在放電燈亮燈初期，連 同燈起動而使發光管變爲高溫，因此將OH基由發光管內 表面放出，由發光管內表面所放出的OH基成爲H2〇而在 201034044 發光管內擴散的內容。該文獻係規定有由紫外線放射發散 度成爲最大的部分的內面起之範圍的平均OH基濃 度爲lOppm以上、190ppm以下作爲其對策。 如上所示在發光管含有〇H基，其在發光空間內作爲 H20進行擴散已爲所知。此外，在發光管內擴散的H20 係藉由來自弧光的熱而被熱分解爲氧與氫。經發明人精心 硏究，發現如上所示在發光管內生成的氫會使照度的安定 度降低。照度安定度係由於弧光晃動，使對於光學系之光 的入射量或入射角度分布產生變化而產生。晃動的周期雖 依光學系統而異，但是會產生照度變動大致在數毫秒至數 秒之間變大的所謂閃爍。該照度安定度的降低在畫像投影 裝置中，會成爲畫面閃爍而造成問題，在曝光裝置則會引 起曝光不均的問題。 專利文獻3係揭示將用以吸收在發光管內所被放出之 氫的集氫器配置在發光管內的內容。第13圖係顯示該文 獻所揭示之放電燈之構成之槪略的說明圖。第14圖係顯 示第13圖所示之放電燈所具備之集氣器的剖面構造。 第13圖所示之放電燈係具備有：燈泡201、電極 2 02、203、密封部204、金屬箔205。206爲石英筒、207 爲石英棒、210爲集氫器。如第14圖所示，集氫器210 係由：包括由鉬等金屬所構成的有底圓筒211與蓋212的 金屬外皮213、及被密封在該金屬外皮213內部的圓筒狀 由釔所構成的集氣器材料214所構成，藉由將有底圓筒 211的凸緣部211A與蓋212予以電阻熔接，而將金屬外 -6- 201034044 皮213的內部予以密封。 如該圖所示，該集氫器係以石英筒206被固定在燈 泡，將設在該石英筒206之石英棒207的另一端熔接在燈 泡201，藉此固定在燈泡201。燈泡201內的氫係通過鉬 等具氫透過性之金屬外皮213而侵入至金屬外皮213的內 部，被集氣器材料214予以吸收。根據該文獻所記載的集 氫器210，由於在金屬外皮213的內部密封有集氣器材料 214，因此不會與發光空間內之其他物質起反應即可吸收 氫。 但是，如上所述將集氫器210安裝在燈泡201，由於 集氫器210與作爲燈泡201之構成成分的氧化矽起反應， 會有引起照度降低或燈泡破裂之虞》 [先前技術文獻] [專利文獻] [專利文獻1 ]日本專利2 8 9 1 9 9 7號 [專利文獻2]日本專利3 59 1 470號 [專利文獻3]日本特公昭57-2 1 8 3 5號 【發明內容】 (發明所欲解決之課題） 本發明係根據以上之情形所硏創者，目的在藉由吸收 發光管內的氫氣而使短弧型放電燈的照度變動率安定’而 且將集氫器安全且容易地固定在發光管內° 201034044 (解決課題之手段） 請求項1所記載之短弧型放電燈係具備有：發光管； 與前述發光管之兩端的各個相接連而朝向管軸方向外方延 伸的密封管；在前述發光管的內部彼此相對向配置的一對 電極，·及包括由使氫透過的物質所構成之中空容器與被密 閉在前述中空容器內部的集氣器材料的集氫器者，其中， 前述集氫器被固定在前述電極。 請求項2所記載之短弧型放電燈係在請求項1所記載 之短弧型放電燈中，具備有電極座，其具有：前述電極； 由用以供電至前述電極之金屬箔及外部引腳所構成的供電 用構件；及用以氣密式密封前述密封管部的棒狀密封構 件，前述集氫器係被配置在以在將前述電極座以長邊方向 切斷的剖面中與前述電極座的最大外徑部相接的一對假想 線所包夾的區域。 請求項3所記載之短弧型放電燈係在請求項2所記載 之短弧型放電燈中，前述電極座係具備有：用以對前述電 極供電的集電板、及用以保持前述電極或前述外部引腳的 筒狀保持構件。 請求項4所記載之短弧型放電燈係在請求項1至請求 項3所記載之短弧型放電燈中，前述集氫器係前述中空容 器的形狀呈直管狀，且與前述電極的長邊方向呈平行配 置。 請求項5所記載之短弧型放電燈係在請求項4所記載 之短弧型放電燈中’複數的前述集氫器以包圍前述電極的 -8 - 201034044 方式被配置在前述電極的圓周方向。 請求項6所記載之短弧型放電燈係在請 項3所記載之短弧型放電燈中，前述集氫器 器的形狀呈直管狀，且以螺旋狀捲繞在前述 (發明之效果） 本發明之短弧型放電燈係將集氫器固定 管內的電極。因此，即使在使用含有OH基 材料而形成發光管的情形下，亦可藉由集氫 除在發光管內所生成的氫，藉此可解決閃爍 的照度安定。而且，不會有發生發光管構成 起反應的不良情形，而可將集氫器安全且確 光管的內部空間。 【實施方式】 φ 第1圖係顯示本發明之短弧型放電燈之 該圖所示之短弧型放電燈10係具備有 球狀的發光管11、及在發光管11之兩端的 直管狀密封管部12A與12B。在發光管11 2的本體部2B與陽極3的本體部3B彼此相 被封入有發光物質。發光物質爲稀有氣體 〇.5MPa (室溫）以上的氙氣。此外，亦可將 氪氣中之任 1種以上封入0.01〜IMPa (室 亦可封入lmg/cc以上的水銀作爲發光物質 求項1至請求 係前述中空容 電極的周圍。 在配置於發光 的發光管構成 器來確實地去 的問題而使燈 材料與集氫器 實地配置在發 槪略構成。 :形成爲大致 各端所接續的 的內部，陰極 向配置，並且 ，例如封入有 氣氣、氬氣、 溫）。此外， -9 - 201034044 陰極2係藉由：例如由鎢所形成的桿狀軸部2A、及 比軸部2A爲更大徑的本體部2B所構成》本體部2B的前 端係以隨著愈朝向陽極3，外徑愈逐漸變小的方式形成爲 錐狀。陽極3係藉由：桿狀軸部3A、與比軸部3A爲更大 徑的本體部3B所構成。本體部3B的前端係形成爲半球 狀。 發光管1 1係藉由：從例如紫外線放射發散度成爲最 大之部分的內面起 20μιη之範圍的平均 OH基濃度爲 lOppm以上、190ppm以下的石英玻璃、或從內面起20μιη 之範圍的平均 OH基濃度爲1·5χ1〇25個/ m3以上、 1 ·2 χ102δ個/ m3以下的石英玻璃所構成。石英玻璃所含有 的OH基係在短弧型放電燈亮燈時被放出在發光管11的 內部空間，並且在內部空間中被熱分解，藉此生成氫。本 發明係如上所示藉由使用在發光管11的內面含有OH基 的石英玻璃，爲了事後去除在發光管的內部空間中不可避 免所生成的氫，如以下所示在發光管內設置集氫器。 第1圖之X部分係表示在發光管11的內部空間S中 安裝有集氫器的場所。集氫器係爲了捕捉當將短弧型放電 燈10亮燈驅動時在內部空間S中不可避免所生成的氫， 而必須配置在內部空間S。集氫器如後述各實施例中之說 明’係藉由被固定在陰極2之軸部2A的側面而確實地配 置在內部空間S。集氫器在第1圖中係僅被固定在陰極2 的軸部2A，但是亦可固定在陽極3的軸部3A，此外亦可 固定在陰極2及陽極3之各個的軸部2A及3A。集氫器係 201034044 爲了適當維持將集氫器固定在電極的作業的效率或集氫器 的溫度而以固定在軸部2A(或軸部3A)爲佳。 [實施例1] 第2圖係將第1圖之短弧型放電燈的X部分予以放 大的局部說明圖。該圖係顯示關於軸部2A及被固定在軸 部2A之集氫器30之構成的第1實施例。以下爲方便起 φ 見’針對陰極2側的軸部2A加以說明。第3圖係顯示集 氫器30之詳細構成的說明圖。第3圖（A)係由斜向觀看集 氫器的斜視圖，第3圖（B)係將集氫器以第3圖（A)所示A-A線予以切斷的長邊方向剖面圖，第3圖（c)係將集氫器 以第3圖（A)所示B-B線予以切斷的直徑方向剖面圖。 如第3圖所示，集氫器30係藉由：藉由使氫透過的 金屬所構成的直管狀中空容器31、及被密閉在中空容器 31內部的集氣器材料32所構成。如第2圖所示，複數集 # 氫器30以包圍軸部2A之側面的方式彼此分離而在軸部 2A的圓周方向依序排列配置’以與陰極2的軸線l呈平 行的姿勢被固定在軸部2A的側面。各集氫器30係藉由2 個固定構件4A及4B包圍各中空容器31而在各中空容器 31的外側捲繞’以不會由軸部2A落下的方式被固定在軸 部2A的側面。其中，各集氫器3〇亦可藉由將各中空容 器31熔接在軸部2A的側面，而將各中空容器31 一體固 定在軸部2A。 構成集氫器30的中空容器31如第3圖（B)所示，係 -11 - 201034044 形成有隨著愈朝向中空容器31的端部，外徑愈逐漸縮小 的斜坡狀密封部31A，如第3圖（C)所示，具有圓形狀的 剖面。各密封部3 1 A係藉由將例如構成中空容器的直管 構件的兩端進行冷壓接加工或熔接，以集氣器材料32不 會漏洩至中空容器31外部的方式以氣密式予以密閉。其 中，中空容器31並不一定需在其兩端形成密封部，例如 亦可形成爲使用有底筒狀的構件，僅將一端側加以密封的 構造。此外，亦可藉由將中空容器31的端部進行熔接， 而形成以氣密式予以密封的密封部。中空容器31係由雖 使氫透過但難以與水銀起反應的金屬所構成，由例如钽或 鈮所構成。钽及鈮可爲單體，亦可爲與其他物質的化合 物。藉由該等物質所構成的中空容器31係使氫有效透 過，並且防止集氣器材料32尤其與水銀等放電媒體起反 應’而且可去除在發光管11內所發生的氧或一氧化碳等 不純氣體。中空容器31例如內徑爲3.0mm、壁厚爲 0.1 mm 〇 被封入在中空容器31內部的集氣器材料32例如爲釔 或鉻。釔或锆等物質的氫吸留力佳。釔、锆可爲單體，亦 可爲與其他物質的化合物。 以下針對關於軸部2A及被固定在軸部2A之集氫器 之構成的各種實施例加以說明，但是由於構成中空容器的 材料及集氣器材料以及中空容器之密封部之構成及密封方 法與上述相同，故省略說明。 -12- 201034044 [實施例2 ] 第4圖係將第1圖之短弧型放電燈的X部分予以放 大的局部說明圖。該圖係顯示關於軸部2A及被固定在軸 部2A之集氫器50之構成的第2實施例。第5圖係顯示 集氫器50之詳細構成的說明圖。第5圖（A)係由斜向觀看 集氫器的斜視圖，第5圖（B)係將集氫器以第5圖（A)所示 A-A線予以切斷的寬幅方向剖面圖。 φ 如第5圖所示，集氫器50係由：藉由使氫透過的金 屬所構成的直管狀中空容器51、及被密閉在中空容器51 內的集氣器材料52所構成。如第5圖（A)所示，中空容器 51係將隨著愈朝向中空容器51的端部，外徑愈逐漸縮小 的斜坡狀密封部5 1 A，與第3圖所示之密封部3 1 A相同地 形成在中空容器51的兩端，如第5圖（B)所示，具有剖面 呈扁平的形狀。 如第4圖所示’本實施例係遍及軸部2A的全周形成 φ 有環狀的凹部21A。如第4圖所示，複數集氫器50係以 包圍遍及軸部2A全周所形成的環狀凹部21A的側面的方 式彼此分離而在軸部2A的圓周方向依序排列作配置，以 與陰極2的軸線L呈平行的姿勢被固定在軸部2A的側 面。各集氫器50係藉由將2個固定構件4A及4B以包圍 各中空容器51的方式捲繞在各中空容器51的外側，以不 會由軸部2A落下的方式被固定在凹部21A的側面。在本 實施例中，由於集氫器50被配置在形成於軸部2A的環 狀凹部21A’因此集氫器5〇確實地被固定在軸部2a。其 -13- 201034044 中，各集氫器50亦可藉由將各中空容器51熔接在凹部 21A的側面，而將各中空容器51 —體固定在軸部2A。 [實施例3] 第6圖係將第1圖之短弧型放電燈的X部分予以放 大的局部說明圖。該圖係顯示針對軸部2A及被固定在軸 部2A的集氫器70之構成的第3實施例。第7圖係顯示 集氫器70之詳細構成的斜視圖。 〇 如第7圖所示’集氫器70係具備有曲管狀的中空容 器71，其對藉由兩端被封閉而密閉有集氣器材料的管狀 構件施加彎曲加工’以整體而言具有線圈形狀。中空容器 71係具有當被固定在軸部2A時，以對軸部2A作用彈性 力的方式予以調整的線圈內徑。 如第6圖所示’本實施例係遍及軸部2A的全周形成 有環狀的凹部21A。如第6圖所示，集氫器70係藉由線 圈狀中空容器71的彈性力，中空容器ή以螺旋狀捲繞在 參 環狀凹部21A的側面而藉此被固定在軸部2A。本實施例 係集氫器70被配置在形成於軸部2A的環狀凹部21A，並 且藉由中空容器71的彈性力而確實地固定在軸部2A。其 中，亦可藉由將線圈狀中空容器71熔接在凹部21A的側 面’而將中空容器71—體固定在軸部2A。 [實施例4] 第8圖係將第1圖之短弧型放電燈〇 X部分予以放 -14 - 201034044 大的局部說明圖。該圖係顯示針對軸部2A及被固定在軸 部2A的集氫器90之構成的第4實施例。第9圖係顯示 集氫器90之詳細構成的斜視圖。 如第9圖所示，集氫器90係具有曲管狀的中空容器 91 ’其對在兩端形成有斜坡狀密封部91A而密閉有集氣 器材料的管狀構件施加彎曲加工，以整體而言具有C字形 狀。中空容器91係具有當被固定在軸部2A時，以對軸 φ 部2A作用彈性力的方式予以調整的內徑。 本實施例係將2個環狀的防落構件5A、5B以上下分 離而設在軸部2A的側面，將集氫器90配置在防落構件 5A及5B之間。集氫器90係藉由中空容器91的彈性力， 使中空容器91捲繞在軸部2A的側面而藉此固定在軸部 2A。本實施例係集氫器90被夾在設在軸部2A之防落構 件5A及5B之間的方式作配置，並且藉由中空容器91的 彈性力而確實地固定在軸部2A。其中，亦可藉由將中空 φ 容器91熔接在軸部2A的側面，而將中空容器91 一體固 定在軸部2A。 藉由以上本發明之短弧型放電燈，即使構成發光管的 石英玻璃含有 OH基，亦可將用以去除氫的集氫器30 (50、70、90 )配置在發光管1 1的內部空間S，可藉由 集氫器確實地去除在發光管11的內部空間S中不可避免 所生成的氫氣，因此可防止短弧型放電燈閃爍，而使燈的 照度較爲安定。而且，集氫器30(50、70、90)被固定 在電極，不會發生如構成發光管11的石英玻璃與集氫器 -15- 201034044 30 ( 50、70、90)起反應等不良情形，因此可將集氫器 30(50、70、90)安全且確實地配置在發光管11的內部 空間S。 其中，以上係就集氫器30 ( 50、70、90 )被固定在 陰極2之軸部2A的實施例加以說明，但是並非侷限於 此，在本發明中亦可將集氫器30(50、70、90)固定在 本體部2B。 第10圖係以模式顯示第1圖所示之短弧型放電燈用 之電極座之構成及製造方法的說明用剖面圖。第10圖所 示之電極座100爲陰極側的電極座。第10圖（C)所示之完 成後的電極座1〇〇係具備有：構成陰極2的本體部2B及 軸部2A、供電用集電板101、102、金屬箔103及外部引 腳104、藉由石英玻璃所構成的密封構件105、保持構件 106及107、帶狀物108( ribbon)、及集氫器 30所構 成。集電板1 〇 1、1 02及金屬箔1 03係例如由鉬所構成。 金屬箔1 03係使用例如6枚，俾以將大電流作分流而將在 各金屬箔流通的電流設在許容範圍內。集氫器可爲上述實 施例1至4中任一者，但第10圖中係針對具備有實施例 1之集氫器30的電極座加以說明。如第10圖（A)所示， 在軸部2A的根部固定集電板101，並且將軸部2A的根部 ***密封構件105之前端側的有底孔105HA而予以保持 之後，將軸部2A***保持構件106的貫通孔106H，並且 將軸部2A的前端部***本體部2B的有底孔2BH。接 著，在外部引腳104的前端部固定集電板102，並且將外 16- 201034044 部引腳1 04的前端部揷入密封構件1 05根側的有底孔 1 05 HB而予以保持之後，將外部引腳104***保持構件 107的貫通孔107H，在由保持構件107突出的外部引腳 104的側面裝設帶狀物108。接著，將複數金屬箔103以 不會發生在密封構件105的側面彼此相疊合的情形的方式 相分離配置，並且將各金屬箔103之兩端的各個與集電板 101及102相連接。如上所示，完成第1〇圖（B)所示之電 φ 極座之中間品。之後，如第10圖（C)所示，在第10圖（B) 所示之中間品之軸部2A的側面固定集氫器30而完成電 極座1 0 0。 第11圖係以模式顯示第1圖之短弧型放電燈之製造 方法的說明用剖面圖。在第11圖中，爲方便起見，僅說 明其中一方密封部之製造方法，而省略說明另一方密封部 之製造方法。如第11圖（A)所示，備妥由市面販售的石英 玻璃所構成的球狀部11’及由與球狀部11’之兩端的各個 φ 相接連的直管狀分支管部12A’、12B，所構成的發光管構 成材料1’’由其中一方分支管部〗2A，側將電極座100揷 入發光管構成材料1’的內部。此時，本體部2B及集氫器 30被配置在球狀部11’的內部，並且其他構件被配置在分 支管部12A’的內部。接著，如第u圖（8)所示，藉由燃 燒器等加熱手段將其中一方分支管部12A’的一端部加 熱’如第11圖（C)所示，將其中一方分支管部12A’的端 部封閉。接著’如第11圖（D)所示，利用燃燒器等加熱手 段將與保持構件1 06、密封構件1 〇5、及保持構件1 07相 -17- 201034044 對應的其中一方分支管部12A’加熱而將分支管部12A’熔 融而使其縮徑。藉此，如第11圖（E)所示，使由鉬所構成 的複數金屬箱103介在於構成其中一方分支管部12A’的 石英玻璃與由'石英玻璃所構成的密封構件1 05之間而形成 以氣密式予以密封的密封部12A。最後，以外部引腳104 的根部由密封部12A的外端部突出的方式在第11.圖（E)所 示之A-A線將其中一方分支管部12A’的一部分切斷而將 帶狀物108去除。 在此，如第10圖之電極座之長邊方向剖面圖之斜線 所示，被固定在電極座1〇〇的集氫器30係被配置在以與 電極座1〇〇的最大外徑部相接的一對假想線K1及K2所 包夾的一對假想線之間的區域Z。「電極座100的最大外 徑部」意指在構成電極座1〇〇之各種構件之中爲外徑最大 構件的外徑。如上所示配置有集氫器30時’如第11圖（A) 所示，在進行將電極座配置在發光管內部的電極座揷入順 序時，由於集氫器30不會形成干擾，因此可平順地執行 電極座揷入順序。 其中，屬於電極座1〇〇之構成零件的帶狀物108係可 隨意改變其直徑的構件’因此以決定區域Z的零件而言’ 係由電極座100予以除外。因此’在第10圖（C)中係省略 帶狀物108。以下，在說明決定區域Z時之電極座100之 構成零件並未記載帶狀物108。 其中，第10圖所示之電極座係可視需要而省略構成 電極座之零件的一部分。第12圖係顯示電極座之其他實 -18- 201034044 施例之構成。第12圖（A)及（B)所示之電極座120及130 係在第10圖所示之電極座100中，將集電板1〇1、集電 板102、保持構件1〇6及保持構件1〇7中任一者以上之零 件予以省略者》如上所示之被固定在電極座120的集氫器 如第12圖（A)及（B)所示，係被配置在藉由與電極座的最 大外徑部相接之一對假想線K1及K2所包夾的區域Z。 第12圖（C)所示之電極座140係具備有：軸部2A、 本體部2B、集電板1〇1、1〇2、金屬箔1〇3、外部引腳 1 0 4、密封構件1 0 5、保持構件1 〇 6、1 0 7及內側密封管 141所構成。如上所示之電極座130係在內側密封管141 被配置在第11圖所示之分支管部12A’之內部的狀態下， 構成藉由將分支管部2A’與內側密封管141相熔接而予以 雙重密封的密封部12A。如第12圖（C)所示，集氫器30 係被配置在藉由電極座140之最大外徑部、亦即與內側密 封管141之側面相接之一對假想線K1及K2所包夾的區 域Z。 【圖式簡單說明】 第1圖係顯示本發明之短弧型放電燈之槪略構成的正 面圖。 第2圖係顯示本發明之第1實施例的局部說明圖。 第3圖係顯示第1實施例之集氫器之詳細構成的說明 圖。 第4圖係顯示本發明之第2實施例的局部說明圖。 -19 - 201034044 第5圖係顯示第2實施例之集氫器之詳細構成的說明 圖。 第6圖係顯示本發明之第3實施例的局部說明圖。 第7圖係顯示第3實施例之集氫器之詳細構成的說明 圖。 第8圖係顯示本發明之第4實施例的局部說明圖。 第9圖係顯示第4實施例之集氫器之詳細構成的說明 圖。 第10圖係以模式顯示本發明之電極座之構成及製造 方法的說明用剖面圖。 第11圖係以模式顯示第1圖之短弧型放電燈之製造 方法的說明用剖面圖。 第12圖係以模式顯示本發明之電極座之其他實施例 之構成的說明用剖面圖。 第13圖係顯示習知之放電燈之槪略構成的說明圖。 第14圖係顯示第13圖所示放電燈所具備之集氣器的 剖面構造。 【主要元件符號說明】 1 :發光管 1’ ：發光管構成材料 2 :陰極 2A :軸部 2B :本體部 -20- 201034044 2BH :有底孔 3 :陽極 3 A :軸部 3B :本體部 4A :固定構件 4B :固定構件 5A :防落構件 5 B :防落構件 1 1 :發光管 11’ ：球狀部 12A、12B:密封管部 12A’、12B’ ：分支管部 2 1 A :凹部 30 、 50 、 70 、 90 ：集氫器 31、 51、 71、 91:中空容器 32、 52 :集氣器材料 31A、51A、91A:密封部 100、 120、 130、 140 ：電極座 101 、 102 :集電板 103 :金屬箔 104 :外部引腳 105 :密封構件 105HA ' 105HB ：有底孔 106、107 :保持構件 -21 - 201034044 106H、107H:貫通孔 108 :帶狀物 1 4 1 :內側密封管 2 0 1 :燈泡 202 、 203 ：電極 204 :密封部 205 :金屬箔 206 :石英筒 2〇7 :石英棒 210 :集氫器 2 1 1 :有底圓筒 21 1 A :凸緣部 212 :蓋 2 1 3 :金屬外皮 214:集氣器材料 ΚΙ、K2 :假想線 S :內部空間 X:在發光管11的內部空間S中安裝有集氫器的場 所 Z :集氫器配置區域 -22-[Technical Field] The present invention relates to a short arc type discharge lamp which is applied to a light source for exposure such as a semiconductor or a liquid crystal manufacturing region or a backlight source for a projector. [Prior Art] A short arc type discharge lamp has a short front end distance of a pair of electrodes disposed in the arc tube and is close to a point light source. Therefore, it is used as an exposure device or a backlight for a projector by combining with an optical system. The light source is utilized. Patent Documents 1 and 2 disclose a conventional short arc type discharge lamp. As disclosed in Patent Document 1, excimer emission of helium gas, helium gas and argon gas as a buffer gas in a short-arc arc lamp in a short-arc arc lamp causes a discharge vessel in a quartz glass. There is a problem of white turbidity inside. In this document, the average OH group concentration in the range of 200 μm from the inner surface of the portion where the ultraviolet radiation divergence of the discharge vessel is maximized is 7.8×1 024/m 3 or more in the above-mentioned problem. Further, the average OH group concentration in the range of 20 μm from the inner surface is 1.5 χ 1 025 / m 3 or more and 1.2 χ 1 026 / m 3 or less. As described above, in the short arc type discharge lamp, it is a common technique to contain an OH group on the inner surface of the discharge vessel. On the other hand, Patent Document 2 discloses that when a high-concentration OH group exists in a region extremely close to the inner surface of the arc tube, the OLED is made high in the initial stage of the discharge of the discharge lamp together with the start of the lamp, so that the OH group is used. The content of the OH group released from the inner surface of the arc tube is H2〇 and diffused in the luminous tube of 201034044. In this document, the average OH group concentration in the range from the inner surface of the portion where the ultraviolet radiation divergence is the largest is set to be 10 ppm or more and 190 ppm or less. As indicated above, it is known that the arc tube contains a 〇H group which diffuses as H20 in the luminescent space. Further, H20 diffused in the arc tube is thermally decomposed into oxygen and hydrogen by heat from the arc. As a result of intensive research by the inventors, it has been found that hydrogen generated in the arc tube as described above lowers the stability of illuminance. The illuminance stability is caused by a change in the incident amount or the incident angle distribution of the light of the optical system due to the sway of the arc. Although the period of shaking varies depending on the optical system, there is a so-called flicker in which the illuminance variation greatly increases between several milliseconds and several seconds. This reduction in illuminance stability causes problems in the image projection device due to flickering of the screen, and the exposure device causes a problem of uneven exposure. Patent Document 3 discloses a configuration in which a hydrogen collector for absorbing hydrogen discharged in an arc tube is disposed in an arc tube. Fig. 13 is a schematic explanatory view showing the constitution of the discharge lamp disclosed in the document. Fig. 14 is a sectional view showing the structure of a gas collector provided in the discharge lamp shown in Fig. 13. The discharge lamp shown in Fig. 13 is provided with a bulb 201, electrodes 02, 203, a sealing portion 204, and a metal foil 205. 206 is a quartz cylinder, 207 is a quartz rod, and 210 is a hydrogen collector. As shown in Fig. 14, the hydrogen collector 210 is composed of a metal sheath 213 including a bottomed cylinder 211 and a lid 212 made of a metal such as molybdenum, and a cylindrical shape sealed inside the metal sheath 213. The air collector material 214 is configured to seal the inside of the metal outer-6-201034044 skin 213 by resistance-welding the flange portion 211A of the bottomed cylinder 211 and the lid 212. As shown in the figure, the hydrogen collector is fixed to the bulb by a quartz cylinder 206, and the other end of the quartz rod 207 provided in the quartz cylinder 206 is welded to the bulb 201, thereby being fixed to the bulb 201. The hydrogen in the bulb 201 enters the inside of the metal sheath 213 through a hydrogen-permeable metal sheath 213 such as molybdenum, and is absorbed by the collector material 214. According to the hydrogen collector 210 described in this document, since the collector material 214 is sealed inside the metal sheath 213, hydrogen can be absorbed without reacting with other substances in the light-emitting space. However, as described above, the hydrogen collector 210 is mounted on the bulb 201, and since the hydrogen collector 210 reacts with the ruthenium oxide which is a constituent of the bulb 201, there is a possibility that the illuminance is lowered or the bulb is broken. [Prior Art Document] [ [Patent Document 1] Japanese Patent No. 2 8 9 1 9 9 [Patent Document 2] Japanese Patent No. 3 59 1 470 [Patent Document 3] Japanese Patent Publication No. Sho 57-2 1 8 3 5 [Summary of the Invention] (Problems to be Solved by the Invention) The present invention has been made in view of the above circumstances, and aims to stabilize the illuminance variation rate of a short arc type discharge lamp by absorbing hydrogen gas in the arc tube and to secure the hydrogen collector. It is easy to fix in the light-emitting tube. 201034044 (Means for Solving the Problem) The short-arc discharge lamp according to claim 1 is provided with an arc tube; and is connected to each of both ends of the arc tube and is outward in the tube axis direction. a sealed tube extending; a pair of electrodes disposed to face each other inside the arc tube; and a hydrogen container including a substance that permeates hydrogen and a hydrogen collector that is sealed inside the hollow container Device Wherein the current collector is fixed on the hydrogen electrode. The short arc type discharge lamp according to claim 2 is characterized in that the short arc type discharge lamp according to claim 1 includes an electrode holder including: the electrode; a metal foil for supplying power to the electrode; and an external lead a power supply member formed by a leg; and a rod-shaped sealing member for hermetically sealing the sealed tube portion, wherein the hydrogen collector is disposed in a cross section that cuts the electrode holder in a longitudinal direction The area enclosed by a pair of imaginary lines where the largest outer diameter portion of the electrode holder is in contact. The short arc type discharge lamp according to claim 3, wherein the electrode holder includes: a current collector plate for supplying power to the electrode; and the electrode for holding the electrode Or a cylindrical holding member of the aforementioned outer lead. The short arc type discharge lamp according to claim 4, wherein the hydrogen collecting device has a shape of a straight tubular shape and is long with the electrode. The side directions are arranged in parallel. The short arc type discharge lamp according to claim 5 is characterized in that in the short arc type discharge lamp described in claim 4, the plural hydrogen collector is disposed in the circumferential direction of the electrode so as to surround the electrode -8 - 201034044. . The short arc type discharge lamp according to claim 3, wherein the hydrogen collecting device has a straight tubular shape and is spirally wound in the spiral (the effect of the invention). The short arc type discharge lamp of the present invention fixes the electrodes in the tube with a hydrogen collector. Therefore, even in the case where an OLED-based material is used to form an arc tube, hydrogen generated in the arc tube can be removed by hydrogen collection, whereby the illuminance stability of the flicker can be solved. Moreover, there is no problem that the light-emitting tube reacts, and the hydrogen collector can be safely and the internal space of the light pipe can be confirmed. [Embodiment] φ Fig. 1 shows a short arc type discharge lamp 10 shown in the figure of the short arc type discharge lamp of the present invention, which is provided with a spherical arc tube 11 and a straight tube at both ends of the arc tube 11. The tube portions 12A and 12B are sealed. The body portion 2B of the arc tube 11 2 and the body portion 3B of the anode 3 are sealed with a luminescent material. The luminescent material is a rare gas 〇.5MPa (room temperature) or higher. In addition, any one or more of the helium gas may be sealed in a range of 0.01 to 1 MPa (the chamber may be sealed with mercury of 1 mg/cc or more as a light-emitting substance, and the request is for the periphery of the hollow-capacitance electrode. The tube constituting device is configured to be in a stable manner, and the lamp material and the hydrogen concentrator are arranged in the hair shaft. The inner portion of the tube is formed to be continuous, the cathode is disposed, and, for example, air and argon are enclosed. Gas, temperature). Further, -9 - 201034044 The cathode 2 is formed by, for example, a rod-shaped shaft portion 2A made of tungsten and a body portion 2B having a larger diameter than the shaft portion 2A. The anode 3 is formed in a tapered shape so that the outer diameter becomes gradually smaller. The anode 3 is composed of a rod-shaped shaft portion 3A and a main body portion 3B having a larger diameter than the shaft portion 3A. The front end of the main body portion 3B is formed in a hemispherical shape. The arc tube 11 is an average of a range of 20 μm from the inner surface of the portion where the ultraviolet radiation divergence is the largest, and an average OH group concentration in the range of 20 μm to 10 ppm or more and 190 ppm or less, or an average of 20 μm from the inner surface. Quartz glass having a OH group concentration of 1. 5 χ 1 〇 25 / m3 or more and 1 · 2 χ 102 δ / m3 or less. The OH group contained in the quartz glass is discharged into the inner space of the arc tube 11 when the short arc type discharge lamp is turned on, and is thermally decomposed in the internal space, thereby generating hydrogen. In the present invention, by using quartz glass containing an OH group on the inner surface of the arc tube 11, in order to remove hydrogen which is unavoidably generated in the inner space of the arc tube, the set is set in the arc tube as shown below. Hydrogenizer. The X portion of Fig. 1 shows a place where the hydrogen collector is attached to the internal space S of the arc tube 11. The hydrogen collector is required to be trapped in the internal space S in order to capture hydrogen which is inevitably generated in the internal space S when the short arc type discharge lamp 10 is driven to be lighted. The hydrogen collector is reliably disposed in the internal space S by being fixed to the side surface of the shaft portion 2A of the cathode 2 as described in the following embodiments. The hydrogen collector is fixed only to the shaft portion 2A of the cathode 2 in Fig. 1, but may be fixed to the shaft portion 3A of the anode 3, or may be fixed to the shaft portions 2A and 3A of the cathode 2 and the anode 3, respectively. . The hydrogen collector system 201034044 is preferably fixed to the shaft portion 2A (or the shaft portion 3A) in order to appropriately maintain the efficiency of the operation of fixing the hydrogen collector to the electrode or the temperature of the hydrogen collector. [Embodiment 1] Fig. 2 is a partial explanatory view showing an enlarged X portion of a short arc type discharge lamp of Fig. 1. This figure shows a first embodiment of the configuration of the shaft portion 2A and the hydrogen collector 30 fixed to the shaft portion 2A. Hereinafter, for convenience, φ see 'the shaft portion 2A on the cathode 2 side will be described. Fig. 3 is an explanatory view showing the detailed configuration of the hydrogen collector 30. Fig. 3(A) is a perspective view of the hydrogen collector viewed obliquely, and Fig. 3(B) is a longitudinal cross-sectional view of the hydrogen collector with the AA line shown in Fig. 3(A). Fig. 3(c) is a diametrical cross-sectional view in which the hydrogen collector is cut by the BB line shown in Fig. 3(A). As shown in Fig. 3, the hydrogen collector 30 is composed of a straight tubular hollow vessel 31 made of a metal through which hydrogen is permeated, and an aerator material 32 sealed inside the hollow vessel 31. As shown in Fig. 2, the complex set #hydrogenizer 30 is separated from each other so as to surround the side surface of the shaft portion 2A, and is arranged in the circumferential direction of the shaft portion 2A in order to be fixed in a posture parallel to the axis l of the cathode 2. On the side of the shaft portion 2A. Each of the hydrogen collectors 30 is wound around the hollow containers 31 by the two fixing members 4A and 4B, and is fixed to the side surface of the shaft portion 2A so as not to fall by the shaft portion 2A. Here, each of the hydrogen collectors 3A may be integrally fixed to the shaft portion 2A by welding the respective hollow containers 31 to the side faces of the shaft portion 2A. As shown in Fig. 3(B), the hollow container 31 constituting the hydrogen collector 30 is formed with a slope-like sealing portion 31A whose outer diameter gradually decreases as it goes toward the end portion of the hollow container 31, such as As shown in Fig. 3(C), it has a circular cross section. Each of the sealing portions 3 1 A is hermetically sealed by, for example, cold-pressing or welding the both ends of the straight pipe member constituting the hollow container so that the collector material 32 does not leak to the outside of the hollow container 31. Closed. Here, the hollow container 31 does not necessarily need to have a seal portion formed at both ends thereof, and for example, a structure in which a bottomed cylindrical member is used and only one end side is sealed. Further, the end portion of the hollow container 31 may be welded to form a sealing portion that is hermetically sealed. The hollow container 31 is made of a metal that is difficult to react with mercury even though it permeates hydrogen, and is composed of, for example, ruthenium or osmium. The ruthenium and osmium may be a monomer or a compound with other substances. The hollow container 31 made of these substances transmits hydrogen efficiently, and prevents the collector material 32 from reacting particularly with a discharge medium such as mercury, and can remove impurities such as oxygen or carbon monoxide which are generated in the arc tube 11. . The hollow container 31 has, for example, an inner diameter of 3.0 mm and a wall thickness of 0.1 mm. The collector material 32 enclosed in the hollow container 31 is, for example, ruthenium or chromium. Materials such as cerium or zirconium have good hydrogen occlusion. Niobium and zirconium may be monomers or compounds with other substances. Hereinafter, various embodiments of the configuration of the shaft portion 2A and the hydrogen collector fixed to the shaft portion 2A will be described, but the constitution and sealing method of the material constituting the hollow container and the gas collector material and the sealing portion of the hollow container are Since the above is the same, the description is omitted. -12- 201034044 [Embodiment 2] Fig. 4 is a partial explanatory view showing an enlarged X portion of the short arc type discharge lamp of Fig. 1. This figure shows a second embodiment of the configuration of the shaft portion 2A and the hydrogen collector 50 fixed to the shaft portion 2A. Fig. 5 is an explanatory view showing the detailed configuration of the hydrogen collector 50. Fig. 5(A) is a perspective view of the hydrogen collecting device viewed obliquely, and Fig. 5(B) is a wide-sectional sectional view showing the hydrogen collecting device cut by the A-A line shown in Fig. 5(A). φ As shown in Fig. 5, the hydrogen collector 50 is composed of a straight tubular hollow vessel 51 made of a metal through which hydrogen is permeated, and an aerator material 52 sealed in the hollow vessel 51. As shown in Fig. 5(A), the hollow container 51 is a slanted seal portion 5 1 A whose outer diameter gradually decreases toward the end portion of the hollow container 51, and the seal portion 3 shown in Fig. 3 1 A is formed identically at both ends of the hollow container 51, and as shown in Fig. 5(B), has a flat cross section. As shown in Fig. 4, the present embodiment forms a concave portion 21A having an annular shape over the entire circumference of the shaft portion 2A. As shown in Fig. 4, the plurality of hydrogen collectors 50 are separated from each other so as to surround the side surface of the annular recessed portion 21A formed over the entire circumference of the shaft portion 2A, and are arranged in the circumferential direction of the shaft portion 2A in order to The axis L of the cathode 2 is fixed to the side surface of the shaft portion 2A in a parallel posture. Each of the current collectors 50 is wound around the hollow containers 51 so as to surround the hollow containers 51 so as to surround the hollow containers 51, and is fixed to the recesses 21A so as not to fall by the shaft portion 2A. side. In the present embodiment, since the hydrogen collector 50 is disposed in the annular recess 21A' formed in the shaft portion 2A, the hydrogen collector 5 is surely fixed to the shaft portion 2a. In the -13-201034044, each of the hydrogen collectors 50 may be fixed to the shaft portion 2A by welding the respective hollow containers 51 to the side faces of the recesses 21A. [Embodiment 3] Fig. 6 is a partial explanatory view showing an enlarged portion X of the short arc type discharge lamp of Fig. 1. This figure shows a third embodiment of the configuration of the shaft portion 2A and the hydrogen collector 70 fixed to the shaft portion 2A. Fig. 7 is a perspective view showing the detailed configuration of the hydrogen collector 70. For example, as shown in Fig. 7, the hydrogen collector 70 is provided with a hollow tubular container 71 having a curved tubular shape, which is subjected to a bending process by a tubular member in which both ends are closed and sealed with a gas collector material. shape. The hollow container 71 has an inner diameter of the coil that is adjusted to exert an elastic force on the shaft portion 2A when being fixed to the shaft portion 2A. As shown in Fig. 6, the present embodiment has an annular recess 21A formed over the entire circumference of the shaft portion 2A. As shown in Fig. 6, the hydrogen collecting device 70 is fixed to the shaft portion 2A by the elastic force of the coiled hollow container 71, and the hollow container is spirally wound around the side surface of the annular recessed portion 21A. In the present embodiment, the hydrogen collector 70 is disposed in the annular recess 21A formed in the shaft portion 2A, and is fixed to the shaft portion 2A by the elastic force of the hollow container 71. Further, the hollow container 71 may be fixed to the shaft portion 2A by welding the coil-shaped hollow container 71 to the side surface ' of the recess 21A. [Embodiment 4] Fig. 8 is a partial explanatory view showing a portion of the short arc type discharge lamp 第 X of Fig. 1 -14 - 201034044. This figure shows a fourth embodiment of the configuration of the shaft portion 2A and the hydrogen collector 90 fixed to the shaft portion 2A. Fig. 9 is a perspective view showing the detailed configuration of the hydrogen collector 90. As shown in Fig. 9, the hydrogen collector 90 has a curved hollow container 91' which applies a bending process to a tubular member in which a slope-like sealing portion 91A is formed at both ends and a collector material is sealed, as a whole. Has a C shape. The hollow container 91 has an inner diameter that is adjusted to exert an elastic force on the shaft φ portion 2A when it is fixed to the shaft portion 2A. In the present embodiment, the two annular falling prevention members 5A and 5B are separated from each other and provided on the side surface of the shaft portion 2A, and the hydrogen collector 90 is disposed between the falling prevention members 5A and 5B. The hydrogen collector 90 is fixed to the shaft portion 2A by winding the hollow container 91 around the side surface of the shaft portion 2A by the elastic force of the hollow container 91. In the present embodiment, the hydrogen collector 90 is disposed so as to be sandwiched between the falling prevention members 5A and 5B provided in the shaft portion 2A, and is fixed to the shaft portion 2A by the elastic force of the hollow container 91. Here, the hollow container 91 may be integrally fixed to the shaft portion 2A by welding the hollow φ container 91 to the side surface of the shaft portion 2A. According to the short arc type discharge lamp of the present invention, even if the quartz glass constituting the arc tube contains an OH group, the hydrogen collector 30 (50, 70, 90) for removing hydrogen can be disposed inside the arc tube 1 1 . In the space S, hydrogen gas which is unavoidably generated in the internal space S of the arc tube 11 can be surely removed by the hydrogen collector, so that the short arc type discharge lamp can be prevented from flickering, and the illuminance of the lamp can be made relatively stable. Further, the hydrogen collector 30 (50, 70, 90) is fixed to the electrode, and the adverse reaction such as the reaction of the quartz glass constituting the arc tube 11 with the hydrogen collector-15-201034044 30 (50, 70, 90) does not occur. Therefore, the hydrogen collectors 30 (50, 70, 90) can be safely and surely disposed in the internal space S of the arc tube 11. In the above, the embodiment in which the hydrogen collector 30 (50, 70, 90) is fixed to the shaft portion 2A of the cathode 2 will be described, but it is not limited thereto, and the hydrogen collector 30 (50) may be used in the present invention. , 70, 90) are fixed to the body portion 2B. Fig. 10 is a cross-sectional view for explaining the configuration and manufacturing method of the electrode holder for the short arc type discharge lamp shown in Fig. 1 in a mode. The electrode holder 100 shown in Fig. 10 is an electrode holder on the cathode side. The completed electrode holder 1 shown in FIG. 10(C) includes a main body portion 2B and a shaft portion 2A constituting the cathode 2, power supply collector plates 101 and 102, a metal foil 103, and an external lead 104. The sealing member 105 composed of quartz glass, the holding members 106 and 107, the ribbon 108, and the hydrogen collector 30 are formed. The collector plates 1 〇 1, 012 and the metal foil 103 are made of, for example, molybdenum. For example, six metal foils are used, and the current flowing through each metal foil is set within a tolerance range by dividing a large current. The hydrogen collector may be any of the above-described Embodiments 1 to 4, but in Fig. 10, the electrode holder provided with the hydrogen collector 30 of the first embodiment will be described. As shown in Fig. 10(A), the current collecting plate 101 is fixed to the root portion of the shaft portion 2A, and the root portion of the shaft portion 2A is inserted into the bottomed hole 105HA on the front end side of the sealing member 105, and then the shaft portion 2A is held. The through hole 106H of the holding member 106 is inserted, and the front end portion of the shaft portion 2A is inserted into the bottomed hole 2BH of the body portion 2B. Next, the current collector plate 102 is fixed to the front end portion of the outer lead 104, and the front end portion of the outer 16-201034044 portion pin 104 is held by the bottomed hole 051B on the side of the sealing member 510, and then held. The outer lead 104 is inserted into the through hole 107H of the holding member 107, and the strip 108 is attached to the side surface of the outer lead 104 protruding from the holding member 107. Next, the plurality of metal foils 103 are disposed apart from each other in such a manner that the side faces of the sealing member 105 do not overlap each other, and each of both ends of each of the metal foils 103 is connected to the current collector plates 101 and 102. As shown above, the intermediate of the electric φ pole seat shown in Fig. 1(B) is completed. Thereafter, as shown in Fig. 10(C), the hydrogen collector 30 is fixed to the side surface of the shaft portion 2A of the intermediate product shown in Fig. 10(B) to complete the electrode holder 100. Fig. 11 is a cross-sectional view showing the method of manufacturing the short arc type discharge lamp of Fig. 1 in a mode. In Fig. 11, for the sake of convenience, only a method of manufacturing one of the sealing portions will be described, and a method of manufacturing the other sealing portion will be omitted. As shown in Fig. 11(A), a spherical portion 11' composed of commercially available quartz glass and a straight tubular branch pipe portion 12A' connected to each φ at both ends of the spherical portion 11' are prepared. 12B, the light-emitting tube constituent material 1'' is formed by one of the branch tube portions 2A, and the electrode holder 100 is inserted into the inside of the light-emitting tube constituent material 1'. At this time, the main body portion 2B and the hydrogen collector 30 are disposed inside the spherical portion 11', and the other members are disposed inside the branch pipe portion 12A'. Next, as shown in Fig. 8 (8), one end portion of one of the branch pipe portions 12A' is heated by a heating means such as a burner. As shown in Fig. 11(C), one of the branch pipe portions 12A' is provided. The ends are closed. Then, as shown in FIG. 11(D), one of the branch pipe portions 12A' corresponding to the holding member 106, the sealing member 1A, and the holding member 107, -17-201034044, is heated by a heating means such as a burner. The branch pipe portion 12A' is melted by heating to reduce the diameter. Thereby, as shown in Fig. 11(E), the plurality of metal cases 103 made of molybdenum are interposed between the quartz glass constituting one of the branch pipe portions 12A' and the sealing member constituting the quartz glass. On the other hand, a sealing portion 12A that is hermetically sealed is formed. Finally, a part of one of the branch pipe portions 12A' is cut at a line AA shown in Fig. 11(E) so that the root portion of the outer lead 104 protrudes from the outer end portion of the sealing portion 12A. 108 removed. Here, as shown by the oblique line in the longitudinal direction cross-sectional view of the electrode holder of Fig. 10, the hydrogen collector 30 fixed to the electrode holder 1 is disposed at the maximum outer diameter portion of the electrode holder 1 A region Z between a pair of imaginary lines sandwiched by a pair of imaginary lines K1 and K2. The "maximum outer diameter portion of the electrode holder 100" means the outer diameter of the member having the largest outer diameter among the various members constituting the electrode holder 1A. When the hydrogen collector 30 is disposed as described above, as shown in FIG. 11(A), when the electrode holder insertion order in which the electrode holder is disposed inside the arc tube is performed, since the hydrogen collector 30 does not cause interference, The electrode holder insertion sequence can be performed smoothly. Among them, the strip 108 belonging to the constituent parts of the electrode holder 1 is a member which can change its diameter arbitrarily. Therefore, the part which determines the area Z is excluded from the electrode holder 100. Therefore, the strip 108 is omitted in Fig. 10(C). Hereinafter, the belt member 108 is not described in the components of the electrode holder 100 when the determination region Z is described. Here, the electrode holder shown in Fig. 10 may omit a part of the components constituting the electrode holder as needed. Figure 12 shows the construction of the other embodiment of the electrode holder -18- 201034044. The electrode holders 120 and 130 shown in Fig. 12 (A) and (B) are in the electrode holder 100 shown in Fig. 10, and the current collector plate 1〇, the current collector plate 102, the holding member 1〇6, and The components of any one of the holding members 1 to 7 are omitted. The hydrogen collector fixed to the electrode holder 120 as shown above is as shown in FIGS. 12(A) and (B), and is disposed by A region Z that is adjacent to the largest outer diameter portion of the electrode holder and sandwiched between the imaginary lines K1 and K2. The electrode holder 140 shown in Fig. 12(C) is provided with a shaft portion 2A, a body portion 2B, current collector plates 1〇1, 1〇2, a metal foil 1〇3, an external lead 104, and a sealing member. 1 0 5. The holding members 1 〇6, 1 0 7 and the inner sealing tube 141 are formed. The electrode holder 130 as described above is configured such that the inner tube tube 141 is placed inside the branch tube portion 12A' shown in Fig. 11, and the branch tube portion 2A' is welded to the inner tube tube 141. The sealing portion 12A is double sealed. As shown in Fig. 12(C), the hydrogen collector 30 is disposed in the imaginary line K1 and K2 by one of the largest outer diameter portions of the electrode holder 140, that is, the side surface of the inner seal tube 141. The area Z of the clip. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view showing the schematic configuration of a short arc type discharge lamp of the present invention. Fig. 2 is a partial explanatory view showing a first embodiment of the present invention. Fig. 3 is an explanatory view showing the detailed configuration of the hydrogen collector of the first embodiment. Fig. 4 is a partial explanatory view showing a second embodiment of the present invention. -19 - 201034044 Fig. 5 is an explanatory view showing the detailed configuration of the hydrogen collector of the second embodiment. Fig. 6 is a partial explanatory view showing a third embodiment of the present invention. Fig. 7 is an explanatory view showing the detailed configuration of the hydrogen collector of the third embodiment. Fig. 8 is a partial explanatory view showing a fourth embodiment of the present invention. Fig. 9 is an explanatory view showing the detailed configuration of the hydrogen collector of the fourth embodiment. Fig. 10 is a cross-sectional view showing the configuration and manufacturing method of the electrode holder of the present invention in a mode. Fig. 11 is a cross-sectional view showing the method of manufacturing the short arc type discharge lamp of Fig. 1 in a mode. Fig. 12 is a cross-sectional view for explaining the configuration of another embodiment of the electrode holder of the present invention in a mode. Fig. 13 is an explanatory view showing a schematic configuration of a conventional discharge lamp. Fig. 14 is a sectional view showing the structure of a gas collector provided in the discharge lamp shown in Fig. 13. [Description of main component symbols] 1 : Light-emitting tube 1': Light-emitting tube constituent material 2: Cathode 2A: Shaft portion 2B: Main body portion -20- 201034044 2BH: Bottom hole 3: Anode 3 A: Shaft portion 3B: Main body portion 4A : fixing member 4B : fixing member 5A : falling prevention member 5 B : falling prevention member 1 1 : luminous tube 11': spherical portion 12A, 12B: sealed tube portion 12A', 12B': branching tube portion 2 1 A : concave portion 30, 50, 70, 90: hydrogen collectors 31, 51, 71, 91: hollow containers 32, 52: collector materials 31A, 51A, 91A: sealing portions 100, 120, 130, 140: electrode holders 101, 102 : collector plate 103 : metal foil 104 : external lead 105 : sealing member 105HA ' 105HB : bottomed hole 106 , 107 : holding member - 21 - 201034044 106H, 107H : through hole 108 : ribbon 1 4 1 : inner side Sealing tube 2 0 1 : bulb 202 , 203 : electrode 204 : sealing portion 205 : metal foil 206 : quartz cylinder 2 〇 7 : quartz rod 210 : hydrogen collecting device 2 1 1 : bottomed cylinder 21 1 A : flange portion 212: cover 2 1 3 : metal sheath 214: collector material ΚΙ, K2: imaginary line S: internal space X: a hydrogen collector is installed in the internal space S of the arc tube 11 The field Z: a hydrogen collector region is configured -22-