CN101826440A - Short arc discharge lamp - Google Patents
Short arc discharge lamp Download PDFInfo
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- CN101826440A CN101826440A CN201010123897A CN201010123897A CN101826440A CN 101826440 A CN101826440 A CN 101826440A CN 201010123897 A CN201010123897 A CN 201010123897A CN 201010123897 A CN201010123897 A CN 201010123897A CN 101826440 A CN101826440 A CN 101826440A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
- H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/186—Getter supports
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- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The object of the present invention is to provide a kind of short arc discharge lamp, make the illumination rate of change of short arc discharge lamp stable, and will collect hydrogen device safety and easily be fixed in the luminous tube by the hydrogen that absorbs in the luminous tube.This short arc discharge lamp has: luminous tube; The sealed tube that continues respectively and extend with the two ends of above-mentioned luminous tube towards tube axial direction foreign side; The pair of electrodes that disposes relative to one another in the inside of above-mentioned luminous tube; And the collection hydrogen device that constitutes of the hollow container that constitutes by the material that hydrogen is seen through and the gettering material that is enclosed in above-mentioned hollow container inside, wherein, above-mentioned collection hydrogen device is fixed on above-mentioned electrode.
Description
Technical field
The present invention relates to the exposure light source in a kind of manufacturing field that is applicable to semiconductor or liquid crystal etc. or the short arc discharge lamp with light source backlight of projector.
Background technology
In short arc discharge lamp, relatively the front end distance of the pair of electrodes of configuration is short and approach point-source of light in luminous tube, therefore by with the optical system combination, can be used as exposure device with or the light source of the usefulness backlight of projector use.
Patent documentation 1 and 2 discloses existing short arc discharge lamp.Shown in patent documentation 1 open, in the xenon short-arc lamp as the xenon of luminous gas, in the mercury vapor short-arc lamp, cause the problem that on the inner surface of the discharge vessel of quartz glass system, produces gonorrhoea as the luminous meeting of quasi-molecule of xenon, krypton gas and the argon gas of buffer gas.In the document,, stipulated that ultra violet radiation divergence by this discharge vessel is that the average OH base concentration that the inner surface of the best part plays the scope of 200 μ m is 7.8 * 10 as the countermeasure of problem as implied above
24Individual/m
3More than, and the average OH base concentration that is played the scope of the degree of depth 20 μ m by this inner surface is 1.5 * 10
25Individual/m
3More than, 1.2 * 10
26Individual/m
3Below.As implied above, in short arc discharge lamp, containing the OH base on the inner surface of discharge vessel is general technology.
On the other hand, when patent documentation 2 discloses the OH base that has high concentration in the zone that the utmost point is bordering on the inner surface of luminous tube, at the discharge lamp lighting initial stage, in the lamp starting, luminous tube becomes high temperature, therefore the OH base is emitted by the luminous tube inner surface, and the OH base of being emitted by the luminous tube inner surface becomes H
2O and in luminous tube, spreading.In the document,, stipulated that the average OH base concentration that inner surface by ultra violet radiation divergence the best part plays the scope of 20 μ m is more than the 10ppm, below the 190ppm as its countermeasure.
The OH base that in luminous tube, contains as implied above, its in emitting space as H
2O spreads and is widely known by the people.In addition, the H that in luminous tube, spreads
2O is oxygen and hydrogen owing to the heat from arc light is thermal decomposited.Study intensively through the inventor, find that the hydrogen that generates as implied above can make the stability of illumination reduce in luminous tube.The illumination stability is because arc light rocks, and making distributes for the amount of incident of the light of optical system or incident angle changes and produce.Though the cycle of rocking is different because of optical system, but can roughly several milliseconds produce the illumination change during the several seconds and become big what is called flicker.Being reduced in the portrait projection arrangement of this illumination stability can become film flicker and throw into question, and then can cause the problem that exposure is uneven at exposure device.
Patent documentation 3 discloses the collection hydrogen device that will be used for being absorbed in the hydrogen of emitting in the luminous tube and has been configured in content in the luminous tube.Figure 13 is the key diagram of summary of the structure of the expression document disclosed discharge lamp.Figure 14 is the profile construction of the expression aspirator that discharge lamp possessed shown in Figure 13.
Discharge lamp shown in Figure 13 has: bulb 201, electrode 202,203, sealing 204, metal forming 205.206 is that quartz tube, 207 is that quartz pushrod, 210 is collection hydrogen device.As shown in figure 14, collection hydrogen device 210 by: by what metals such as tantalum constituted round-ended cylinder 211 and lid 212 metal sheaths that constitute 213 are arranged; And the gettering material 214 that is made of yttrium cylindraceous that is sealed in the inside of this metal sheath 213 constituted, thereby the 211A of blade of a sword portion by round-ended cylinder 211 will be arranged and lid 212 are by the inner sealing of resistance welded with metal sheath 213.
As shown in the drawing, this collection hydrogen device is fixed on bulb with quartz tube 206, and the other end that is located at the quartz pushrod 207 on this quartz tube 206 is welded on bulb 201, is fixed on bulb 201 thus.Hydrogen in the bulb 201 is invaded to the inside of metal sheath 213 by the metal sheath 213 that tantalum etc. has the hydrogen permeability, is absorbed by gettering material 214.According to the collection hydrogen device 210 that the document is put down in writing, owing at the inner sealing of metal sheath 213 gettering material 214 is arranged, therefore can not react with other material in the emitting space to absorb hydrogen.
But, will collect hydrogen device 210 as mentioned above and be installed in bulb 201 this point, because collection hydrogen device 210 reacts with silica as the constituent of bulb 201, have and cause illumination to reduce or the danger of bulb break.
No. 2891997, patent documentation 1 Japan Patent
No. 3591470, patent documentation 2 Japan Patents
Patent documentation 3 Japanese Patent Publication 57-21835 numbers
Summary of the invention
The present invention is based on above problem, purpose is to make the illumination rate of change of short arc discharge lamp stable by the hydrogen that absorbs in the luminous tube, and will collect hydrogen device safety and easily be fixed in the luminous tube.
The short arc discharge lamp of technical scheme 1 record has: luminous tube; The sealed tube that continues respectively and extend with the two ends of above-mentioned luminous tube towards tube axial direction foreign side; The pair of electrodes that disposes relative to one another in the inside of above-mentioned luminous tube; And the collection hydrogen device that constitutes of the hollow container that constitutes by the material that hydrogen is seen through and the gettering material that is enclosed in the inside of above-mentioned hollow container, above-mentioned collection hydrogen device is fixed on above-mentioned electrode.
The short arc discharge lamp of technical scheme 2 records is in the short arc discharge lamp of technical scheme 1 record, has electrode tip holder, and described electrode tip holder has: above-mentioned electrode; The power supply member that constitutes by the metal forming and the outside lead that are used for to above-mentioned electrode power supply; And the bar-shaped containment member that is used for sealing airtightly above-mentioned sealed tube portion, above-mentioned collection hydrogen device is configured in the section that above-mentioned electrode tip holder is cut off with long side direction the zone that the contacted a pair of imaginary line of maximum outside diameter portion with above-mentioned electrode tip holder is clipped.
The short arc discharge lamp of technical scheme 3 record is that above-mentioned electrode tip holder has in the short arc discharge lamp of technical scheme 2 records: the retaining member that is used for to the collector plate of above-mentioned electrode power supply and is used for keeping the tubular of above-mentioned electrode or said external lead-in wire.
The short arc discharge lamp of technical scheme 4 record be in technical scheme 1 to the short arc discharge lamp of technical scheme 3 records, the shape of the above-mentioned hollow container of above-mentioned collection hydrogen device is straight tube-like, and disposes abreast with the long side direction of above-mentioned electrode.
The short arc discharge lamp of technical scheme 5 records is that a plurality of above-mentioned collection hydrogen devices are configured in the circumferencial direction of above-mentioned electrode in the mode of surrounding above-mentioned electrode in the short arc discharge lamp of technical scheme 4 records.
The short arc discharge lamp of technical scheme 6 record be in technical scheme 1 to the short arc discharge lamp of technical scheme 3 records, the shape of the above-mentioned hollow container of above-mentioned collection hydrogen device is the curved tube shape, and with helical coil around above-mentioned electrode.
The effect of invention
Short arc discharge lamp of the present invention will collect the hydrogen device and be fixed on the electrode that is disposed in the luminous tube.Therefore,, can positively remove the hydrogen that in luminous tube, generates, can solve the problem of flicker thus and make the illumination of lamp stable by collection hydrogen device even the luminous tube constituent material that contains the OH base in use forms under the situation of luminous tube.And, the problem that luminous tube constituent material and collection hydrogen device react can not take place, can and positively be configured in the inner space of luminous tube with collection hydrogen device safety.
Description of drawings
Fig. 1 is the front elevation of summary of the structure of expression short arc discharge lamp of the present invention.
Fig. 2 is the figure of local specification of expression the 1st embodiment of the present invention.
Fig. 3 is the key diagram of detailed structure of the collection hydrogen device of expression the 1st embodiment.
Fig. 4 is the figure of local specification of expression the 2nd embodiment of the present invention.
Fig. 5 is the key diagram of detailed structure of the collection hydrogen device of expression the 2nd embodiment.
Fig. 6 is the figure of local specification of expression the 3rd embodiment of the present invention.
Fig. 7 is the key diagram of detailed structure of the collection hydrogen device of expression the 3rd embodiment.
Fig. 8 is the figure of local specification of expression the 4th embodiment of the present invention.
Fig. 9 is the key diagram of detailed structure of the collection hydrogen device of expression the 4th embodiment.
Figure 10 is the explanation profile that schematically shows the structure and the manufacture method of electrode tip holder of the present invention.
Figure 11 is the explanation profile of manufacture method that schematically shows the short arc discharge lamp of Fig. 1.
Figure 12 is the explanation profile of structure that schematically shows other embodiment of electrode tip holder of the present invention.
Figure 13 is the key diagram of summary of the structure of the discharge lamp that shows of expression.
Figure 14 is the profile construction of the expression gas collector that discharge lamp shown in Figure 13 possessed.
Embodiment
Fig. 1 represents the structure of the summary of short arc discharge lamp of the present invention.
Short arc discharge lamp 10 shown in this figure has: form roughly spherical luminous tube 11 and the 12A of sealed tube portion and the 12B of the straight tube-like that continues respectively at the two ends of luminous tube 11.In the inside of luminous tube 11, the main part 2B of negative electrode 2 and the main part 3B of anode 3 are opposite each other, and inclosure has luminescent substance.Luminescent substance is a rare gas, for example encloses the above xenon of 0.5MPa (room temperature).In addition, also can be with the wantonly 0.01～1MPa (room temperature) that encloses more than a kind in xenon, argon gas, the krypton gas.In addition, also can enclose the above mercury of 1mg/cc as luminescent substance.
Negative electrode 2 constitutes by the shaft-like axial region 2A that is for example formed by tungsten and than the main part 2B in the big footpath of axial region 2A.The front end of main part 2B is along with towards anode 3, and external diameter diminishes gradually, forms taper.Anode 3 constitutes by shaft-like axial region 3A with than the main part 3B in the big footpath of axial region 3A.The front end of main part 3B forms hemispherical.
The X of Fig. 1 partly is illustrated in the position that collection hydrogen device is installed in the internal space S of luminous tube 11.Collection hydrogen device need be configured in internal space S in order to catch the hydrogen that short arc discharge lamp 10 is lit a lamp and generated inevitably when driving in internal space S.Collection hydrogen device illustrate among each embodiment as described later like that, the side of the axial region 2A by being fixed on negative electrode 2 and positively be configured in internal space S.Collection hydrogen device only is fixed on the axial region 2A of negative electrode 2 in Fig. 1, but also can be fixed on the axial region 3A of anode 3, also can be fixed on negative electrode 2 and anode 3 axial region 2A and 3A separately in addition.Collection hydrogen device to be fixed on collection hydrogen device the temperature of the efficiency of operation of electrode or collection hydrogen device and preferably to be fixed on axial region 2A (or axial region 3A) in order suitably to keep.
Embodiment 1
Fig. 2 is the figure of local specification that the X with the short arc discharge lamp of Fig. 1 partly amplifies.The figure shows about axial region 2A and be fixed on the 1st embodiment of structure of the collection hydrogen device 30 of axial region 2A.Below for simplicity, the axial region 2A of target 2 sides is illustrated.Fig. 3 is the key diagram of the detailed structure of expression collection hydrogen device 30.Fig. 3 (A) is a perspective view of watching collection hydrogen device by oblique, and Fig. 3 (B) is that Fig. 3 (C) will collect the diametric profile that the hydrogen device cuts off with the B-B line shown in Fig. 3 (A) with the profile of collection hydrogen device with the long side direction of the cut-out of the A-A line shown in Fig. 3 (A).
As shown in Figure 3, collection hydrogen device 30 is made of following: the hollow container 31 of the straight tube-like that is made of the metal that hydrogen is seen through and the gettering material 32 that is enclosed in the inside of hollow container 31.As shown in Figure 2, a plurality of collection hydrogen devices 30 in the mode of the side that surrounds axial region 2A separated from one another and on the circumferencial direction of axial region 2A alignment arrangements in regular turn, to be the side that parallel posture is fixed on axial region 2A with the axis L of negative electrode 2.Each collects hydrogen device 30 and surrounds each hollow container 31 ground at the outside of each hollow container 31 coiling, can be fixed on the side of axial region 2A by the mode that axial region 2A falls by 2 fixed component 4A and 4B.Wherein, each collects hydrogen device 30 also can be by being welded on the side of axial region 2A with each hollow container 31, and each hollow container 31 one is fixed on axial region 2A.
The hollow container 31 that constitutes collection hydrogen device 30 is formed with along with towards the end of hollow container 31 shown in Fig. 3 (B), and the sealing 31A of the diminishing ramped shaped of external diameter shown in Fig. 3 (C), has the section of toroidal.The two ends of the straight tube member of each sealing 31A by will for example constituting hollow container carry out cold weld processing or welding carry out airtight airtightly so that gettering material 32 can not sewed to the outside of hollow container 31.Wherein, hollow container 31 might not need to form sealing at its two ends, for example also can form and use the member that bottom tube-like is arranged, only with the structure of a distolateral sealing.In addition, also can form the sealing of gas-tight seal by the end of hollow container 31 is welded.Though hollow container 31 is made of the metal that hydrogen is seen through but be difficult to react with mercury, constitute by for example tantalum or niobium.Tantalum and niobium can be monomer, also can for the compound of other material.The hollow container 31 that is made of above-mentioned substance sees through hydrogen efficiently, and prevents that gettering material 32 from especially reacting with discharge medium such as mercury, and can remove impure gases such as the oxygen that takes place in luminous tube 11 or carbon monoxide.Hollow container 31 for example internal diameter is that 3.0mm, wall thickness are 0.1mm.
The gettering material 32 that is enclosed in hollow container 31 inside for example is yttrium or zirconium.The adsorption capacity of the hydrogen of material such as yttrium or zirconium is good.Yttrium, zirconium can be monomer, also can for the compound of other material.
Below be illustrated at the axial region 2A and the various embodiment of structure that are fixed on the collection hydrogen device of axial region 2A, but because the structure and the encapsulating method of the sealing of the material of formation hollow container and gettering material and hollow container are same as described above, the Therefore, omited explanation.
Embodiment 2
Fig. 4 is the figure of local specification that the X with the short arc discharge lamp of Fig. 1 partly amplifies.The figure shows about axial region 2A and be fixed on the 2nd embodiment of structure of the collection hydrogen device 50 of axial region 2A.Fig. 5 is the key diagram of the detailed structure of expression collection hydrogen device 50.Fig. 5 (A) is a perspective view of watching collection hydrogen device by oblique, and Fig. 5 (B) is with the profile of collection hydrogen device with the Width of the cut-out of the A-A line shown in Fig. 5 (A).
As shown in Figure 5, collection hydrogen device 50 is made of following: the hollow container 51 of the straight tube-like that is made of the metal that hydrogen is seen through and be enclosed in gettering material 52 in the hollow container 51.Shown in Fig. 5 (A), in hollow container 51, two ends along with similarly be formed on hollow container 51 towards the sealing 51A of the diminishing ramped shaped of outer end diameter of hollow container 51 and sealing 31A shown in Figure 3 shown in Fig. 5 (B), have section and are flat shape.
As shown in Figure 4, in the present embodiment, traverse the recess 21A that is formed with ring-type full week of axial region 2A.As shown in Figure 4, a plurality of collection hydrogen devices 50 traverse the mode of side of recess 21A of the ring-type that forms in full week of axial region 2A with encirclement separated from one another and in the circumferencial direction of axial region 2A alignment arrangements in regular turn, to be the side that parallel posture is fixed on axial region 2A with the axis L of negative electrode 2.Each collects hydrogen device 50 by 2 fixed component 4A and 4B are wound on the outside of each hollow container 51 in the mode of surrounding each hollow container 51, can be fixed on the side of recess 21A by the mode that axial region 2A falls.In the present embodiment, because collection hydrogen device 50 is configured in the recess 21A of the ring-type that is formed at axial region 2A, therefore collects hydrogen device 50 and positively fix with respect to axial region 2A.Wherein, each collects hydrogen device 50 and also can each hollow container 51 one be fixed on axial region 2A by each hollow container 51 being welded on the side of recess 21A.
Embodiment 3
Fig. 6 is the figure of local specification that the X with the short arc discharge lamp of Fig. 1 partly amplifies.The figure shows at axial region 2A and be fixed on the 3rd embodiment of structure of the collection hydrogen device 70 of axial region 2A.Fig. 7 is the perspective view of the detailed structure of expression collection hydrogen device 70.
As shown in Figure 7, collection hydrogen device 70 has the hollow container 71 of curved tube shape, and 71 pairs of this hollow containers are airtight by the sealing two ends to have the tubular element of gettering material to apply bending machining, thereby integral body has coil shape.Hollow container 71 has adjusted internal coil diameter, with when being fixed to axial region 2A to axial region 2A effect elastic force.
As shown in Figure 6, present embodiment traverses the recess 21A that is formed with ring-type full week of axial region 2A.As shown in Figure 6, collection hydrogen device 70 is by the elastic force of the hollow container 71 of coiled type, and hollow container 71 is fixed on axial region 2A thus with the side of helical coil around the recess 21A of ring-type.The collection hydrogen device 70 of present embodiment is configured in the recess 21A of the ring-type that is formed at axial region 2A, and positively is fixed on axial region 2A by the elastic force of hollow container 71.Wherein, also can be by the hollow container 71 of coiled type be welded on the side of recess 21A, and hollow container 71 one are fixed on axial region 2A.
Embodiment 4
Fig. 8 is the figure of local specification that the X with the short arc discharge lamp of Fig. 1 partly amplifies.This figure is expression at axial region 2A and is fixed on the 4th embodiment of structure of the collection hydrogen device 90 of axial region 2A.Fig. 9 is the perspective view of the detailed structure of expression collection hydrogen device 90.
As shown in Figure 9, collection hydrogen device 90 has the hollow container 91 of curved tube shape, and it has the tubular element of gettering material to apply bending machining to the sealing 91A that is formed with ramped shaped at two ends is also airtight, and integral body has the C word shape thus.Hollow container 91 has adjusted internal diameter, with when being fixed on axial region 2A to axial region 2A effect elastic force.
In the present embodiment, the side with anti-fall member 5A, the 5B of 2 ring-types is located at axial region 2A up and down discretely will collect hydrogen device 90 and be configured between anti-fall member 5A and the 5B.Collection hydrogen device 90 is by the elastic force of hollow container 91, and the side that makes hollow container 91 be wound on axial region 2A is fixed on axial region 2A thus.In the present embodiment, collection hydrogen device 90 is sandwiched between the anti-fall member 5A that is located on the axial region 2A and the 5B and is configured, and positively is fixed on axial region 2A by the elastic force of hollow container 91.Wherein, also can be by hollow container 91 being welded on the side of axial region 2A, thus hollow container 91 one are fixed on axial region 2A.
By above short arc discharge lamp of the present invention, contain the OH base even constitute the quartz glass of luminous tube, also can the internal space S of luminous tube 11 will be configured in the collection hydrogen device 30 (50,70,90) that removes hydrogen, can positively remove the hydrogen that in the internal space S of luminous tube 11, generates inevitably by collection hydrogen device, therefore can prevent the short arc discharge lamp flicker, and make the illumination of lamp stable.And, collection hydrogen device 30 (50,70,90) are fixed on electrode, can not take place as quartz glass that constitutes luminous tube 11 and bad situations such as collection hydrogen device 30 (50,70,90) react, therefore can and positively be configured in the internal space S of luminous tube 11 collection hydrogen device 30 (50,70,90) safety.
Wherein, more than be fixed on the axial region 2A of negative electrode 2 for collection hydrogen device 30 (50,70,90) embodiment describe, but not limited thereto, also collection hydrogen device 30 (50,70,90) can be fixed on main part 2B in the present invention.
Figure 10 schematically shows the structure of the electrode tip holder that short arc discharge lamp shown in Figure 1 uses and the explanation profile of manufacture method.Electrode tip holder 100 shown in Figure 10 is the electrode tip holder of cathode side.Electrode tip holder 100 after the finishing shown in Figure 10 (C) constitutes to have: the containment member 105 that constitutes collector plate 101,102, metal forming 103 and the outside lead 104 of the main part 2B of negative electrode 2 and axial region 2A, power supply usefulness, is made of quartz glass, retaining member 106 and 107, ribbon 108 (ribbon), and collection hydrogen device 30.Collector plate 101,102 and metal forming 103 for example are made of molybdenum.Metal forming 103 is used for example 6, is permitted in the appearance scope so that big electric current shunting will be located at the electric current that each metal forming flows through.Collection hydrogen device can be in the foregoing description 1 to 4 any, but the electrode tip holder at the collection hydrogen device 30 with embodiment 1 is illustrated among Figure 10.Shown in Figure 10 (A), root fixed set electroplax 101 at axial region 2A, and after the root of axial region 2A being inserted bottom outlet 105HA is arranged and being kept of front of containment member 105, axial region 2A is inserted the through hole 106H of retaining member 106, and bottom outlet 2BH arranged what the leading section of axial region 2A inserted main part 2B.Then, 104 leading section fixed set electroplax 102 externally goes between, and after the leading section of outside lead 104 being inserted bottom outlet 105HB is arranged and being kept of root side of containment member 105, with the through hole 107H of outside lead 104 insertion retaining members 107, at the side of the outside lead of giving prominence to by retaining member 107 104 installing ribbon 108.Then, a plurality of metal formings 103 are disposed separately in the mode that can not be superimposed each other in the side of containment member 105, and the two ends of each metal forming 103 are connected with collector plate 101 and 102 respectively.As implied above, finish the electrode tip holder shown in Figure 10 (B) in the middle of product.Thereafter, shown in Figure 10 (C), shown in Figure 10 (B) in the middle of product axial region 2A side fixed set hydrogen device 30 and finish electrode tip holder 100.
Figure 11 is the explanation profile of manufacture method that schematically shows the short arc discharge lamp of Fig. 1.In Figure 11, for simplicity, the wherein manufacture method of a side sealing only is described, and the explanation of omitting the manufacture method of the opposing party's sealing.Shown in Figure 11 (A), the luminous tube constituent material 1 ' that the 12A ' of branched pipe portion, the 12B ' of globular part that quartz glass constituted 11 ' that preparation is sold by the market and the straight tube-like that continues respectively with the two ends of globular part 11 ' constitutes, the inside of electrode tip holder 100 being inserted luminous tube constituent materials 1 ' by a side the 12A ' of branched pipe portion side wherein.At this moment, main part 2B and collection hydrogen device 30 are configured in the inside of globular part 11 ', and other member is configured in the inside of the 12A ' of branched pipe portion.Then, shown in Figure 11 (B), by the wherein end heating of a side the 12A ' of branched pipe portion of heater meanses such as burner, shown in Figure 11 (C), with the wherein end sealing of a side the 12A ' of branched pipe portion.Then, shown in Figure 11 (D), utilize heater means such as burner with retaining member 106, containment member 105, and the 12A ' of arm portion that divides of retaining member 107 pairing wherein sides heat and the 12A ' of branched pipe portion fusion made its undergauge.Thus, shown in Figure 11 (E), make a plurality of metal formings 103 of constituting by molybdenum between quartz glass that constitutes a side the 12A ' of branched pipe portion wherein and the containment member 105 that constitutes by quartz glass, thereby form the sealing 12A of gas-tight seal.At last, with the root of outside lead 104 by the outstanding mode in the outer end of sealing 12A the A-A line shown in Figure 11 (E) wherein the part of a side the 12A ' of branched pipe portion cut off and ribbon 108 removed.
At this, shown in the oblique line of the profile of the long side direction of the electrode tip holder of Figure 10, the collection hydrogen device 30 that is fixed on electrode tip holder 100 be configured in and a pair of imaginary line that clipped of maximum outside diameter portion contacted a pair of the imaginary line K1 and the K2 of electrode tip holder 100 between regional Z." the maximum outside diameter portion of electrode tip holder 100 " is meant the external diameter of the member of external diameter maximum in the various members that constitute electrode tip holder 100.As implied above when disposing collection hydrogen device 30, shown in Figure 11 (A), when carrying out that the electrode tip holder that electrode tip holder is configured in luminous tube inside inserted operation,, therefore can successfully carry out electrode tip holder and insert operation because collection hydrogen device 30 can not form interference.
Wherein, are the members that can arbitrarily change its diameter as the ribbon 108 of the constituent part of electrode tip holder 100, therefore as the part of the regional Z of decision, except giving by electrode tip holder 100.Therefore, in Figure 10 (C), omitted ribbon 108.Below, do not put down in writing ribbon 108 during the constituent part of the electrode tip holder 100 when the regional Z of explanation decision.
Wherein, electrode tip holder shown in Figure 10 can omit the part of the part that constitutes electrode tip holder as required.Figure 12 represents the structure of other embodiment of electrode tip holder.Figure 12 (A) and (B) shown in electrode tip holder 120 and 130 be in electrode tip holder shown in Figure 10 100, to have omitted more than in collector plate 101, collector plate 102, retaining member 106 and the retaining member 107 any.The collection hydrogen device that is fixed on electrode tip holder 120 as implied above is as Figure 12 (A) and (B), is configured in by the regional Z that is clipped with the maximum outside diameter portion of electrode tip holder contacted a pair of imaginary line K1 and K2.
Claims (6)
1. a short arc discharge lamp has: luminous tube; The sealed tube that continues respectively and extend with the two ends of above-mentioned luminous tube towards tube axial direction foreign side; The pair of electrodes that disposes relative to one another in the inside of above-mentioned luminous tube; And by the material that hydrogen is seen through hollow container that constitutes and the collection hydrogen device that the gettering material that is enclosed in the inside of above-mentioned hollow container constitutes, it is characterized in that,
Above-mentioned collection hydrogen device is fixed on above-mentioned electrode.
2. short arc discharge lamp according to claim 1 is characterized in that having electrode tip holder, and described electrode tip holder has: above-mentioned electrode; The power supply member that constitutes by the metal forming and the outside lead that are used for to above-mentioned electrode power supply; And the bar-shaped containment member that is used for sealing airtightly above-mentioned sealed tube portion,
Above-mentioned collection hydrogen device is configured in the section that above-mentioned electrode tip holder is cut off with long side direction the zone that the contacted a pair of imaginary line of maximum outside diameter portion with above-mentioned electrode tip holder is clipped.
3. short arc discharge lamp according to claim 2 is characterized in that, above-mentioned electrode tip holder has: be used for to the collector plate of above-mentioned electrode power supply and be used for keeping above-mentioned electrode or the retaining member of the tubular of said external lead-in wire.
4. according to each described short arc discharge lamp in the claim 1 to 3, it is characterized in that the shape of the above-mentioned hollow container of above-mentioned collection hydrogen device is straight tube-like, and with the configuration of the parallel axes of above-mentioned electrode ground.
5. short arc discharge lamp according to claim 4 is characterized in that, a plurality of above-mentioned collection hydrogen devices are configured in the circumferencial direction of above-mentioned electrode in the mode of surrounding above-mentioned electrode.
6. according to each described short arc discharge lamp in the claim 1 to 3, it is characterized in that the shape of the above-mentioned hollow container of above-mentioned collection hydrogen device is the curved tube shape, and with helical coil around above-mentioned electrode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009048066A JP4678059B2 (en) | 2009-03-02 | 2009-03-02 | Short arc type discharge lamp |
| JP2009-048066 | 2009-03-02 |
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| Publication Number | Publication Date |
|---|---|
| CN101826440A true CN101826440A (en) | 2010-09-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010123897A Pending CN101826440A (en) | 2009-03-02 | 2010-03-02 | Short arc discharge lamp |
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| JP (1) | JP4678059B2 (en) |
| KR (1) | KR101083522B1 (en) |
| CN (1) | CN101826440A (en) |
| DE (1) | DE102010008913A1 (en) |
| TW (1) | TW201034044A (en) |
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| JP4760964B2 (en) * | 2009-07-02 | 2011-08-31 | ウシオ電機株式会社 | Short arc type discharge lamp |
| JP4826669B2 (en) * | 2009-11-05 | 2011-11-30 | ウシオ電機株式会社 | Short arc type discharge lamp |
| JP5573691B2 (en) * | 2011-01-18 | 2014-08-20 | ウシオ電機株式会社 | Xenon short arc lamp for digital projector |
Citations (6)
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| CN1953137A (en) * | 2005-10-18 | 2007-04-25 | 株式会社Orc制作所 | Sealing structure of discharge lamp |
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- 2009-03-02 JP JP2009048066A patent/JP4678059B2/en active Active
-
2010
- 2010-01-11 TW TW99100582A patent/TW201034044A/en not_active IP Right Cessation
- 2010-02-05 KR KR20100010680A patent/KR101083522B1/en active IP Right Grant
- 2010-02-23 DE DE201010008913 patent/DE102010008913A1/en not_active Withdrawn
- 2010-03-02 CN CN201010123897A patent/CN101826440A/en active Pending
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| CN1035584A (en) * | 1988-02-23 | 1989-09-13 | 菲利浦光灯制造公司 | bulb |
| CN1381766A (en) * | 2001-04-13 | 2002-11-27 | 株式会社日立制作所 | Light source for projector and projection image display device using the light source |
| JP2003234083A (en) * | 2002-02-07 | 2003-08-22 | Orc Mfg Co Ltd | Electrode of short arc electric discharge lamp and method of manufacturing the same, and short arc electric discharge lamp |
| US20040124776A1 (en) * | 2002-12-27 | 2004-07-01 | General Electric Company | Sealing tube material for high pressure short-arc discharge lamps |
| CN1879191A (en) * | 2003-11-14 | 2006-12-13 | 工程吸气公司 | Cathode with integrated getter and low work function for cold cathode lamps |
| CN1953137A (en) * | 2005-10-18 | 2007-04-25 | 株式会社Orc制作所 | Sealing structure of discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201034044A (en) | 2010-09-16 |
| KR20100099046A (en) | 2010-09-10 |
| KR101083522B1 (en) | 2011-11-16 |
| JP4678059B2 (en) | 2011-04-27 |
| DE102010008913A1 (en) | 2010-09-09 |
| JP2010205491A (en) | 2010-09-16 |
| TWI349949B (en) | 2011-10-01 |
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Application publication date: 20100908 |