KR20100099046A - Short-arc typed discharge lamp - Google Patents

Short-arc typed discharge lamp Download PDF

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Publication number
KR20100099046A
KR20100099046A KR1020100010680A KR20100010680A KR20100099046A KR 20100099046 A KR20100099046 A KR 20100099046A KR 1020100010680 A KR1020100010680 A KR 1020100010680A KR 20100010680 A KR20100010680 A KR 20100010680A KR 20100099046 A KR20100099046 A KR 20100099046A
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South Korea
Prior art keywords
electrode
hydrogen
light emitting
discharge lamp
getter
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KR1020100010680A
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Korean (ko)
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KR101083522B1 (en
Inventor
다케오 마츠시마
유타카 무네
유키오 야스다
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우시오덴키 가부시키가이샤
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Publication of KR20100099046A publication Critical patent/KR20100099046A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/26—Means for absorbing or adsorbing gas, e.g. by gettering; Means for preventing blackening of the envelope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/186—Getter supports

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  • Discharge Lamp (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

An object of the present invention is to stabilize the illuminance fluctuation rate of a short arc discharge lamp by absorbing hydrogen gas in the light emitting tube, and to secure the hydrogen getter safely and easily in the light emitting tube.
It consists of a light emitting tube, a sealing tube which extends toward the outer side in the tube axis direction successively to each of both ends of the light emitting tube, a pair of electrodes disposed to face each other inside the light emitting tube, and a substance which transmits hydrogen. A hydrogen getter made of a hollow container and a getter material sealed inside the hollow container, wherein the hydrogen getter is fixed to the electrode.

Description

Short arc type discharge lamp {SHORT-ARC TYPED DISCHARGE LAMP}

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a short arc type discharge lamp applied to a light source for exposure of a semiconductor or a liquid crystal, or a light source for a backlight of a projector.

The short arc type discharge lamp is used as a light source for an exposure apparatus or a backlight of a projector by combining with an optical system because the tip distance of a pair of electrodes disposed opposite to the light emitting tube is short and close to a point light source.

Patent documents 1 and 2 disclose a conventional short arc type discharge lamp. As disclosed in Patent Document 1, in the xenon short arc lamp, xenon gas which is a light emitting gas, and in the mercury vapor short arc lamp, excimer light emission of xenon gas, krypton gas and argon gas, which are buffer gases, is a discharge vessel made of quartz glass. It caused a problem of cloudiness inside. As a countermeasure against such a problem, this document describes that the average OH group concentration in the range of 200 μm is 7.8 × 10 24 pieces / m 3 or more from the inner surface of the portion where the ultraviolet radiation divergence degree of the discharge vessel is maximum, and the inner surface thereof. It is prescribed | regulated that the average OH group concentration of the range of 20 micrometers from is 1.5 * 10 <25> pieces / m <3> or more and 1.2 * 10 <26> pieces / m <3> . Thus, in a short arc type discharge lamp, it is a general technique to make an inner surface of a discharge container contain OH group.

On the other hand, Patent Document 2 discloses that when a high concentration of OH groups is present in a region very close to the inner surface of the light emitting tube, the light emitting tube becomes high temperature with the start of the lamp in the initial stage of lighting of the discharge lamp. It is disclosed that the OH group emitted from the inner surface of the light emitting tube becomes H 2 O and diffuses into the light emitting tube. As a countermeasure, this document stipulates the average OH group concentration of 20 micrometers or more and 190 ppm or less in the range of 20 micrometers from the inner surface of the part from which the ultraviolet radiation divergence degree becomes maximum.

Thus, the arc tube contains OH groups, it is known that diffusion as H 2 0 in a light emitting area. In addition, H 2 O diffused in the light emitting tube is thermally decomposed into oxygen and hydrogen by heat from the arc. By examination of the inventor's example, it discovered that the hydrogen produced | generated in this way in the light emitting tube reduces the stability of illuminance. The illuminance stability occurs when the arc is shaken, and the incident amount and the incident angle distribution of light are changed by the optical system. The period of the shaking varies depending on the optical system, but generates a so-called flicker in which roughness fluctuations generally increase from a few milliseconds to several seconds. This decrease in illuminance stability causes a problem as flicker of the screen in the image projector, and causes a problem that exposure unevenness occurs in the exposure apparatus.

Patent document 3 discloses arrange | positioning the hydrogen getter which absorbs the hydrogen discharge | released in a light emitting tube in a light emitting tube. 13 is an explanatory diagram showing an outline of the configuration of the discharge lamp disclosed in this document. FIG. 14 shows a cross-sectional structure of a getter included in the discharge lamp shown in FIG. 13.

The discharge lamp shown in FIG. 13 includes a valve 201, electrodes 202 and 203, a sealing portion 204, and a metal foil 205. 206 is a quartz cylinder, 207 is a quartz rod, and 210 is a hydrogen getter. As shown in FIG. 14, the hydrogen getter 210 includes a metal shell 213 made of a bottomed cylinder 211 made of metal such as tantalum and a lid 212, and a inside of the metal shell 213. It consists of the getter material 214 which consists of sealed cylindrical yttrium, and the inside of the metal shell 213 is sealed by resistance welding the flange part 211A of the bottomed cylinder 211 and the lid 212.

As shown in this figure, the hydrogen getter is fixed to the valve by the quartz cylinder 206 and the valve 201 is welded to the valve 201 by welding the other end of the quartz rod 207 provided in the quartz cylinder 206 to the valve 201. It is fixed at. Hydrogen in the valve 201 penetrates into the metal shell 213 through a metal shell 213 having hydrogen permeability such as tantalum and is absorbed by the getter material 214. According to the hydrogen getter 210 described in this document, since the getter material 214 is sealed inside the metal shell 213, hydrogen can be absorbed without reacting with other substances in the light emitting space.

However, the provision of the hydrogen getter 210 to the valve 201 as described above may cause a decrease in roughness or rupture of the valve when the hydrogen getter 210 reacts with silica, which is a component of the valve 201.

Patent Document 1: Japanese Patent No. 2891997 Patent Document 2: Japanese Patent 3591470 Patent Document 3: Japanese Patent Application Publication No. 57-21835

SUMMARY OF THE INVENTION The present invention has been made on the basis of the above circumstances, and by absorbing hydrogen gas in the light emitting tube, it is possible to stabilize the fluctuation rate of illuminance of the short arc type discharge lamp and to fix the hydrogen getter safely and easily in the light emitting tube. For the purpose of

The short arc type discharge lamp according to claim 1 includes a light emitting tube, a sealing tube that extends outward in the tube axis direction in succession to each of both ends of the light emitting tube, and a pair disposed to face each other inside the light emitting tube. And a hydrogen getter made of a getter material hermetically sealed inside the hollow container, wherein the hydrogen getter is fixed to the electrode.

The short arc type discharge lamp of Claim 2 is a short arc type discharge lamp of Claim 1 WHEREIN: The power supply member which consists of the said electrode, metal foil for supplying electric power, and an external lead, and the said sealing pipe part An electrode mount including a rod-shaped sealing member for sealing hermetically, wherein the hydrogen getter contacts a pair of virtual contacts of the maximum outer diameter of the electrode mount in a cross section obtained by cutting the electrode mount in a longitudinal direction. It is arranged in the area sandwiched between the lines.

The short arc type discharge lamp of Claim 3 is a short arc type discharge lamp of Claim 2 WHEREIN: The malleable electrode mount is a tubular shape for holding a collector plate for supplying electric power to the said electrode, and the said electrode or the said external lead. It is provided with the holding member of.

The short arc type discharge lamp of Claim 4 is a short arc type discharge lamp of Claims 1-3,

In the hydrogen getter, the hollow container has a straight tube shape and is arranged in parallel with the longitudinal direction of the electrode.

The short arc type discharge lamp of Claim 5 is a short arc type discharge lamp of Claim 4,

A plurality of the hydrogen getters are arranged in the circumferential direction of the electrodes to surround the electrodes.

The short arc type discharge lamp of Claim 6 is a short arc type discharge lamp of Claims 1-3,

In the hydrogen getter, the hollow container has a curved shape, and is wound spirally around the electrode.

In the short arc discharge lamp of the present invention, a hydrogen getter is fixed to an electrode disposed in a light emitting tube. Therefore, even when the light emitting tube is formed using the light emitting tube constituent material containing the OH group, the hydrogen generated in the light emitting tube can be reliably removed by the hydrogen getter to solve the problem of flicker and stabilize the illuminance of the lamp. In addition, the problem that the light emitting tube constituent material and the hydrogen getter react does not occur, and the hydrogen getter can be safely and reliably disposed in the inner space of the light emitting tube.

BRIEF DESCRIPTION OF THE DRAWINGS The front view which shows the outline of the structure of the short arc type discharge lamp of this invention.
2 is a partial explanatory diagram showing a first embodiment of the present invention.
3 is an explanatory view showing the details of the configuration of the hydrogen getter of the first embodiment.
4 is a partial explanatory diagram showing a second embodiment of the present invention.
5 is an explanatory diagram showing the details of the configuration of the hydrogen getter of the second embodiment.
6 is a partial explanatory diagram showing a third embodiment of the present invention.
7 is an explanatory diagram showing the details of the configuration of the hydrogen getter of the third embodiment.
8 is a partial explanatory diagram showing a fourth embodiment of the present invention.
9 is an explanatory diagram showing the details of the configuration of the hydrogen getter of the fourth embodiment.
10 is an explanatory cross-sectional view schematically showing the configuration and manufacturing method of an electrode mount according to the present invention.
FIG. 11 is an explanatory cross-sectional view schematically showing the method of manufacturing the short arc discharge lamp of FIG. 1. FIG.
12 is an explanatory cross-sectional view schematically showing the configuration of another embodiment of the electrode mount according to the present invention.
It is explanatory drawing which showed the outline of the structure of the conventional discharge lamp.
FIG. 14 shows a cross-sectional structure of a getter included in the discharge lamp shown in FIG. 13.

<Mode for carrying out the invention>

1 shows a schematic configuration of a short arc type discharge lamp of the present invention.

The short arc-type discharge lamp 10 shown in this figure is provided with the light emitting tube 11 formed in substantially spherical shape, and the sealing tube part 12A and 12B of the straight tube shape which are continuous in each of both ends of the light emitting tube 11. As shown in FIG. Inside the light emitting tube 11, the main body 2B of the negative electrode 2 and the main body 3B of the positive electrode 3 are arranged to face each other, and a light emitting material is sealed. The luminescent material is a rare gas, and for example, xenon gas of 0.5 MPa (room temperature) or more is enclosed. Moreover, you may encapsulate 0.01-1 Mpa (room temperature) any 1 or more types of xenon gas, argon gas, and a clipton. Moreover, 1 mg / cc or more of mercury may be enclosed as a luminescent substance.

The cathode 2 is formed of, for example, a rod-shaped shaft portion 2A formed of tungsten and a body portion 2B having a larger diameter than the shaft portion 2A. The tip of the main body 2B is formed in a tapered shape so that the outer diameter gradually decreases as it faces the anode 3. The anode 3 is constituted by a rod-shaped shaft portion 3A and a body portion 3B having a larger diameter than the shaft portion 3A. The tip of the main body 3B is formed in a hemispherical shape.

The light emitting tube 11 is, for example, an average OH group concentration in the range of 20 μm or more from the inner surface of the portion where the ultraviolet radiation divergence degree is maximum is 10 ppm or more, 19 ppm or less, or an average OH group concentration in the range of 20 μm from the inner surface. Is composed of quartz glass having 1.5 × 10 25 pieces / m 3 or more and 1.2 × 10 26 pieces / m 3 or less. The OH group contained in the quartz glass is released into the inner space of the light emitting tube 11 when the short arc discharge lamp is turned on, and thermally decomposes in the inner space to generate hydrogen. In the present invention, in order to remove hydrogen inevitably generated in the inner space of the light emitting tube by using quartz glass containing an OH group on the inner surface of the light emitting tube 11, the hydrogen getter in the light emitting tube as follows. Installed it.

A part X in FIG. 1 indicates a place where a hydrogen getter is mounted in the internal space S of the light emitting tube 11. The hydrogen getter needs to be disposed in the internal space S in order to capture hydrogen inevitably generated in the internal space S when the short arc type discharge lamp 10 is turned on and driven. The hydrogen getter is reliably disposed in the internal space S by being fixed to the side of the shaft portion 2A of the cathode 2 as described in each of the embodiments described later. Although the hydrogen getter is fixed only to the shaft portion 2A of the cathode 2 in FIG. 1, it is also possible to fix the hydrogen getter to the shaft portion 3A of the anode 3. It can also be fixed to the shaft parts 2A and 3A. The hydrogen getter is preferably fixed to the shaft portion 2A (or shaft portion 3A) in order to properly maintain the efficiency of the operation of fixing the hydrogen getter to the electrode and the temperature of the hydrogen getter.

&Lt; Example 1 >

FIG. 2 is an enlarged view illustrating a portion of X of the short arc discharge lamp of FIG. 1. This figure shows the first embodiment of the configuration of the hydrogen getter 30 fixed to the shaft portion 2A and the shaft portion 2A. In the following, the shaft portion 2A on the cathode 2 side will be described for convenience. 3 is an explanatory diagram showing the details of the configuration of the hydrogen getter 30. Fig. 3A is a perspective view of the hydrogen getter viewed from an oblique direction, Fig. 3B is a longitudinal cross-sectional view of the hydrogen getter cut along the line A-A shown in Fig. 3A, and Fig. 3C is a hydrogen getter Is a radial cross-sectional view cut by the B-B line shown to FIG. 3 (A).

As shown in FIG. 3, the hydrogen getter 30 is constituted by a straight tubular hollow container 31 composed of a metal which transmits hydrogen and a getter material 32 sealed inside the hollow container 31. do. As shown in FIG. 2, the plurality of hydrogen getters 30 are sequentially arranged side by side in the circumferential direction of the shaft portion 2A, spaced apart from each other so as to surround the side surface of the shaft portion 2A, and the axis L of the cathode 2 and the like. It is fixed to the side surface of 2 A of shaft parts in a parallel posture. Each hydrogen getter 30 has two fixing members 4A and 4B surrounding each hollow container 31 and wound around the outside of each hollow container 31 so that the hydrogen getter 30 does not fall from the shaft part 2A. It is fixed to the side of the. Moreover, each hydrogen getter 30 can also integrally fix each hollow container 31 to 2 A of shaft parts by welding each hollow container 31 to the side surface of 2 A of shaft parts.

As shown in FIG. 3 (B), the hollow container 31 constituting the hydrogen getter 30 is formed with a slope-shaped sealing portion 31A whose outer diameter gradually decreases toward the end of the hollow container 31. It has a circular cross section as shown in Fig. 3C. Each sealing portion 31A is hermetically sealed to prevent the getter material 32 from leaking out of the hollow container 31 by, for example, cold pressing or welding both ends of the straight pipe member constituting the hollow container. do. In addition, the hollow container 31 does not necessarily need to form a sealing part at the both ends, For example, it can also be set as the structure which sealed only one end side using the bottomed cylindrical member. Moreover, you may form the hermetically sealed sealing part by welding the edge part of the hollow container 31. FIG. The hollow container 31 consists of a metal which permeates hydrogen but hardly reacts with mercury and is made of, for example, tantalum or niobium. Tantalum and niobium may be a single substance or a compound with another substance. The hollow container 31 made of such a material can efficiently permeate hydrogen and prevent the getter material 32 from reacting with a discharge medium such as mercury, in particular, Impurity gases such as carbon monoxide can be removed. The hollow container 31 is 3.0 mm in inner diameter and 0.1 mm in thickness, for example.

The getter material 32 enclosed in the hollow container 31 is yttrium or zirconium, for example. Substances such as yttrium and zirconium are excellent in absorbing power of hydrogen. Yttrium and zirconium may be a single compound or a compound with other substances.

Hereinafter, various embodiments of the configuration of the hydrogen getter fixed to the shaft portion 2A and the shaft portion 2A will be described, but the material and getter material constituting the hollow container and the configuration and sealing method of the sealing portion of the hollow container are described. Since it is the same as the above, description is abbreviate | omitted.

<Example 2>

FIG. 4 is an enlarged view illustrating a portion of X of the short arc discharge lamp of FIG. 1. This figure shows the second embodiment of the configuration of the hydrogen getter 50 fixed to the shaft portion 2A and the shaft portion 2A. 5 is an explanatory diagram showing the details of the configuration of the hydrogen getter 50. 5: (A) is a perspective view which looked at the hydrogen getter from the oblique direction, and FIG. 5 (B) is sectional drawing in the width direction which cut | disconnected the hydrogen getter by the AA line shown in FIG.

As shown in FIG. 5, the hydrogen getter 50 is composed of a straight hollow container 51 made of a metal that transmits hydrogen, and a getter material 52 sealed in the hollow container 51. . As shown in FIG. 5 (A), the hollow container 51 is the sealing part 51A of the slope-shaped sealing part whose outer diameter gradually reduces as it goes to the edge part of the hollow container 51 (FIG. It is formed in the both ends of the hollow container 51 similarly to 31A), and has a flat cross section as shown to FIG. 5 (B).

In the present embodiment, as shown in FIG. 4, an annular recess 21A is formed over the entire circumference of the shaft portion 2A. As shown in FIG. 4, the plurality of hydrogen getters 50 are sequentially spaced in the circumferential direction of the shaft portion 2A while being spaced apart from each other to surround the side surface of the annular recess 21A formed over the entire circumference of the shaft portion 2A. Are arranged side by side and are fixed to the side surface of the shaft portion 2A in a posture parallel to the axis L of the cathode 2. Each hydrogen getter 50 is recessed 21A so that two fixing members 4A and 4B surround each hollow container 51 and are wound on the outside of each hollow container 51 so as not to fall from the shaft portion 2A. It is fixed to the side. In this embodiment, since the hydrogen getter 50 is disposed in the annular recess 21A formed in the shaft portion 2A, the hydrogen getter 50 is securely fixed to the shaft portion 2A. Moreover, each hydrogen getter 50 can also integrally fix each hollow container 51 to 2 A of shaft parts by welding each hollow container 51 to the side surface of 21 A of recessed parts.

<Example 3>

FIG. 6 is an enlarged view illustrating a portion of X of the short arc discharge lamp of FIG. 1. This figure shows a third embodiment of the configuration of the hydrogen getter 70 fixed to the shaft portion 2A and the shaft portion 2A. 7 is a perspective view showing the details of the configuration of the hydrogen getter 70.

As shown in FIG. 7, the hydrogen getter 70 is provided with the curved hollow container 71 which has a coil shape as a whole by carrying out bending process with respect to the tubular member by which the getter material was sealed by sealing both ends. . The hollow container 71 has a coil inner diameter adjusted so that an elastic force acts on the shaft portion 2A when the hollow container 71 is fixed to the shaft portion 2A.

In the present embodiment, as shown in FIG. 6, an annular recess 21A is formed over the entire circumference of the shaft portion 2A. As shown in FIG. 6, the hydrogen getter 70 has a shaft portion (when the hollow container 71 is spirally wound on the side surface of the annular recess 21A by the elastic force of the coil-shaped hollow container 71). It is fixed to 2A). In this embodiment, while the hydrogen getter 70 is disposed in the annular recess 21A formed in the shaft portion 2A, the hydrogen getter 70 is firmly fixed to the shaft portion 2A by the elastic force of the hollow container 71. In addition, by welding the coil-shaped hollow container 71 to the side surface of the recessed part 21A, the hollow container 71 can also be integrally fixed to the shaft part 2A.

<Example 4>

FIG. 8 is an enlarged view illustrating a portion of X of the short arc discharge lamp of FIG. 1. This figure shows the 4th Example about the structure of the hydrogen getter 90 fixed to 2 A of shaft parts, and 2 A of shaft parts. 9 is a perspective view showing the details of the configuration of the hydrogen getter 90.

As shown in FIG. 9, the hydrogen getter 90 has the curved shape which has a C-shape as a whole by performing the bending process with respect to the tubular member by which the sealing-shaped sealing part 91A was formed in the both ends, and the getter material was sealed. It has a hollow container 91 of. The hollow container 91 has an inner diameter adjusted so that an elastic force acts on the shaft portion 2A when the hollow container 91 is fixed to the shaft portion 2A.

In this embodiment, two annular fall prevention members 5A and 5B are spaced apart vertically and provided on the side surface of the shaft portion 2A, and a hydrogen getter 90 is disposed between the fall prevention members 5A and 5B. The hydrogen getter 90 is fixed to the shaft portion 2A by the hollow container 91 being wound around the side surface of the shaft portion 2A by the elastic force of the hollow container 91. In this embodiment, the hydrogen getter 90 is arranged to be sandwiched between the drop preventing members 5A and 5B provided in the shaft portion 2A, and is firmly fixed to the shaft portion 2A by the elastic force of the hollow container 91. . In addition, the hollow container 91 can be fixed integrally to the shaft portion 2A by welding the hollow container 91 to the side surface of the shaft portion 2A.

According to the short arc discharge lamp of the present invention, even if the quartz glass constituting the light emitting tube contains an OH group, the hydrogen getters 30 (50, 70, 90) for removing hydrogen are provided with the light emitting tube 11. Is disposed in the inner space S of the light emitting tube 11, and the hydrogen gas inevitably generated in the inner space S of the light emitting tube 11 can be reliably removed by the hydrogen getter, thereby preventing flicker of the short arc type discharge lamp, The illuminance of can be stabilized. In addition, the hydrogen getter 30 (50, 70, 90) is fixed to the electrode, causing the problem that the quartz glass and hydrogen getter 30 (50, 70, 90) constituting the light emitting tube 11 react. Since the hydrogen getter 30 (50, 70, 90) can be safely and reliably arranged in the internal space S of the light emitting tube 11, it is impossible to make it.

In addition, in the above, although the Example which the hydrogen getter 30 (50, 70, 90) was fixed to the shaft part 2A of the cathode 2 was demonstrated, it is not limited to this, In this invention, the hydrogen getter 30 is carried out. 50, 70, and 90 may be fixed to the main body 2B.

FIG. 10: is sectional drawing for explanatory which showed typically the structure and manufacturing method of the electrode mount for the short arc type discharge lamp shown in FIG. The electrode mount 100 shown in FIG. 10 is an electrode mount on the cathode side. The electrode mount 100 after completion shown in FIG. 10 (C) includes a main body portion 2B and a shaft portion 2A constituting the negative electrode 2, current collector plates 101 and 102 and a metal foil 103 for power supply. And an outer lead 104, a sealing member 105 made of quartz glass, holding members 106 and 107, a ribbon 108, and a hydrogen getter 30. The current collector plates 101 and 102 and the metal foil 103 are made of molybdenum, for example. The metal foil 103 is used, for example, in order to classify a large current, and to make the electric current which flows through each metal foil within an allowable range, for example. The hydrogen getter may be any one of the above embodiments 1 to 4, but in FIG. 10, the electrode mount including the hydrogen getter 30 of the first embodiment will be described. As shown in FIG. 10 (A), while the current collector plate 101 is fixed to the root portion of the shaft portion 2A, the bottom portion of the shaft portion 2A has a bottomed hole at the front end side of the sealing member 105 ( After inserting and holding in 105HA), the shaft portion 2A is inserted into the through hole 106H of the holding member 106, and the tip portion of the shaft portion 2A has a bottomed hole 2BH of the main body portion 2B. Insert it in Then, while fixing the current collector plate 102 to the tip end of the outer lead 104, the tip end of the outer lead 104 is inserted into the bottomed hole 105HB on the root side of the sealing member 105. After holding, the outer lead 104 is inserted into the through hole 107H of the holding member 107, and the ribbon 108 is attached to the side of the outer lead 104 protruding from the holding member 107. Subsequently, the plurality of metal foils 103 are arranged to be spaced apart from each other on the side surfaces of the sealing member 105 so as to overlap each other, and the respective ends of each metal foil 103 are connected to the current collector plates 101 and 102. In this way, the intermediate product of the electrode mount shown in FIG. 10 (B) is completed. Thereafter, as shown in FIG. 10C, the hydrogen getter 30 is fixed to the side surface of the shaft portion 2A of the intermediate product shown in FIG. 10B to complete the electrode mount 100.

FIG. 11 is an explanatory cross-sectional view schematically showing the method of manufacturing the short arc discharge lamp of FIG. 1. In FIG. 11, for convenience, only the manufacturing method of one sealing part is demonstrated, and description of the manufacturing method of the other sealing part is abbreviate | omitted. As shown to FIG. 11 (A), the branch pipe part 12A ', 12B continuous to each of the both ends of the spherical part 11' and the spherical part 11 'which consist of commercially available quartz glass is carried out. The light emitting tube constituent material 1 'made of') is prepared, and the electrode mount 100 is inserted into the light emitting tube constituent material 1 'from one side of the branch pipe portion 12A'. At this time, the main body portion 2B and the hydrogen getter 30 are arranged inside the spherical portion 11 'and the other members are arranged inside the branch pipe portion 12A'. Then, as shown in FIG. 11 (B), one end of one branch pipe portion 12A 'is heated by a heating means such as a burner, and one branch pipe portion 12A as shown in FIG. 11 (C). Seal the end of '). Subsequently, as shown in Fig. 11D, one branch pipe portion 12A 'corresponding to the holding member 106, the sealing member 105, and the holding member 107 is heated by a burner or the like. By heating to melt the branch pipe portion 12A 'and reduce the diameter thereof. By doing in this way, as shown to FIG. 11 (E), the some metal foil 103 which consists of molybdenum is made between the sealing glass 105 which consists of quartz glass and quartz glass which comprise one branch pipe part 12A '. By interposing, the sealing part 12A hermetically sealed is formed. Finally, a portion of one branch pipe portion 12A 'is cut by a line A-A shown in FIG. 11E so that the root portion of the outer lead 104 protrudes from the outer end portion of the sealing portion 12A. ).

Here, as shown by the oblique line in the longitudinal cross-sectional view of the electrode mount of FIG. 10, the hydrogen getter 30 fixed to the electrode mount 100 is a pair of virtual lines K1 in contact with the maximum outer diameter portion of the electrode mount 100. And a region Z between a pair of imaginary lines sandwiched between K2. The "maximum outer diameter part of the electrode mount 100" means the outer diameter of the member with the largest outer diameter among the various members constituting the electrode mount 100. In the case where the hydrogen getter 30 is arranged in this manner, as shown in FIG. 11A, the hydrogen getter 30 does not interfere with the electrode mount insertion procedure in which the electrode mount is arranged inside the light emitting tube. The electrode mount insertion procedure can be executed smoothly.

In addition, since the ribbon 108 which is a component part of the electrode mount 100 is a member which can change the diameter freely, it is excluded from the electrode mount 100 as a component which determines the area | region Z. As shown in FIG. Therefore, the ribbon 108 is abbreviate | omitted in FIG.10 (C). Thereafter, the ribbon 108 is not described in the constituent parts of the electrode mount 100 in the case of the description for determining the region Z.

In addition, the electrode mount shown in FIG. 10 can abbreviate | omit a part of the components which comprise an electrode mount as needed. 12 shows the configuration of another embodiment of the electrode mount. The electrode mounts 120 and 130 shown in FIGS. 12A and 12B show the current collector plate 101, the current collector plate 102, the holding member 106, and the holding member in the electrode mount 100 shown in FIG. 10. One or more components of 107 are omitted. The hydrogen getter fixed to this electrode mount 120 is a region Z sandwiched between a pair of imaginary lines K1 and K2 in contact with the maximum outer diameter portion of the electrode mount, as shown in FIGS. 12A and 12B. Is placed on.

The electrode mount 140 shown in FIG. 12C includes the shaft portion 2A, the main body portion 2B, the current collector plates 101 and 102, the metal foil 103, the external lead 104, and the sealing member 105. And holding members 106 and 107 and inner sealing pipe 141. The electrode mount 130 is doubled by welding the branch pipe portion 2A 'and the inner seal pipe 141 in a state where the inner sealing pipe 141 is disposed inside the branch pipe portion 12A' shown in FIG. The sealed sealing part 12A is comprised. As shown in FIG. 12C, the hydrogen getter 30 is interposed between a pair of imaginary lines K1 and K2 in contact with the maximum outer diameter portion of the electrode mount 140, that is, the side surface of the inner sealing tube 141. It is arranged in the fitted region Z.

1: light-emitting tube 2: cathode
2A: shaft portion 2B: body portion
21A: recess 3: anode
3A: Shaft 3B: Main Body
4A: fastening member 4B: fastening member
5A: Drop prevention member 5B: Drop prevention member
30, 50, 70, 90: hydrogen getters 31, 51, 71, 91: hollow vessels
32, 52: getter material 100, 120, 130, 140: electrode mount
101, 102: current collector plate 103: metal foil
104: outer lead 105: sealing member
106,107: Holding Member 108: Ribbon
141: inner sealing pipe K1, K2: virtual line
Z: hydrogen getter placement area

Claims (6)

It consists of a light emitting tube, a sealing tube which extends toward the outer side in the tube axis direction successively to each of both ends of the light emitting tube, a pair of electrodes disposed to face each other inside the light emitting tube, and a substance which transmits hydrogen. A short arc discharge lamp comprising a hollow container and a hydrogen getter made of a getter material sealed inside the hollow container,
The said hydrogen getter is fixed to the said electrode, The short arc type discharge lamp characterized by the above-mentioned. The method according to claim 1,
An electrode mount including the electrode, a power feeding member composed of a metal foil and an external lead for feeding the electrode, and a rod-shaped sealing member for hermetically sealing the sealing tube portion;
The hydrogen getter is disposed in an area sandwiched between a pair of imaginary lines in contact with a maximum outer diameter of the electrode mount in a cross section obtained by cutting the electrode mount in a longitudinal direction. The method according to claim 2,
The electrode mount includes a current collector plate for feeding power to the electrode, and a cylindrical holding member for holding the electrode or the external lead. The method according to any one of claims 1 to 3
The said hydrogen getter is a short arc type discharge lamp characterized by the shape of the said hollow container becoming a straight tube shape, and is arrange | positioned in parallel with the axis line of the said electrode. The method according to claim 4,
A plurality of said hydrogen getters are arrange | positioned in the circumferential direction of the said electrode so as to surround the said electrode, The short arc type discharge lamp characterized by the above-mentioned. The method according to any one of claims 1 to 3,
The hydrogen getter is a short arc discharge lamp, characterized in that the hollow container has a curved shape, and is wound spirally around the electrode.
KR20100010680A 2009-03-02 2010-02-05 Short-arc typed discharge lamp KR101083522B1 (en)

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JP5573691B2 (en) * 2011-01-18 2014-08-20 ウシオ電機株式会社 Xenon short arc lamp for digital projector

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JP2010205491A (en) 2010-09-16
TWI349949B (en) 2011-10-01

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