200933134 九、發明說明 【發明所屬之技術領域】 本發明係關於液晶顯示器等之液晶面板的檢查者’特 別是關於在顯示面板的顯示不均的檢查，抑制在攝影被顯 示於顯示面板的影像而進行顯示時產生波紋（干涉紋）以 - 及機械漸暈（Kerare, mechanical vignetting)之顯不面板的 .檢查方法及檢查裝置。 〇 【先前技術】 於液晶顯示器等顯示面板之檢查，已知使被顯示於顯 示面板的影像，以使用CCD之照相機（CCD照相機）攝 影時，會發生波紋（moire)。此波紋，係由以規則的格子 圖案排列之畫素來接收光線的光的亮度，反覆有規則地些 微變化所產生。亦即，顯示面板與CCD都一·樣其顯示影 像的單位之畫素係以規則的格子圖案來排列，在顯示面板 ❹ 之各畫素與CCD之各畫素之間隨著相對的位置偏移而使 得在CCD之畫素受光的顯示面板的光的亮度反覆有規則 地些微變化因而產生波紋。 ' 波紋有大的濃淡差，對於進行顯示面板的顯示不均的 檢查時造成妨礙，有必要除去此波紋。於此場合，理想上 (理論上）只要消除顯示面板的各畫素與C CD之各畫素 之間的相對的位置偏移即可使波紋不再產生，但是要使此 位置偏移量爲零是困難的。因此，通常如專利文獻1、2 所記載的，對攝得的影像上產生的波紋，藉由影像處理此 -5- 200933134 一影像而進行波紋的除去。 此外，如專利文獻3、4所記載的，係在攝影時對顯 示面板水平移動照相機而使焦點些微地失焦以防止波紋的 發生。 進而，如專利文獻5所記載的，係在照相機與顯示面 板之間***散射板，但是在此場合，雖可藉由散射板而使 波紋模糊，但是有可能使顯示不均自身也跟著變模糊。在 此，作爲更簡便的方法，可以在調整CCD照相機的透鏡 0 系與顯示面板之間的距離而進行焦點對準（前對焦）之 後，藉由使透鏡系稍微移動（所謂的「使焦點模糊」）而 攝影以抑制波紋的發生。 此外，如專利文獻6那樣，亦有在透鏡前面配置光學 濾光片而進行取除不要的光的處理之例。例如把除去反射 光的PL濾光片，或是遮掉近紅外線之濾紅外光（IR-Cut)濾 光片等設置在透鏡前面，除去不要的光。 [專利文獻1]日本專利特開平07-1462 1 1號公報 ❹ [專利文獻2]日本專利特開平11-352011號公報 [專利文獻3]曰本專利特開2005-72816號公報 [專利文獻4]日本專利特開平ιι_101712號公報 _ [專利文獻5 ]日本專利特開平η _ 6 7 8 6號公報 [專利文獻6]日本專利特開2003-344761號公報 【發明內容】 [發明所欲解決之課題] -6- 200933134 然而，在專利文獻1、2之藉由影像處理而除去波紋 的方法，必須要複雜的影像處理程式，該影像處理很耗時 間，有檢查效率很差的問題。 此外，在專利文獻3、4之方法，對顯示面板對準焦 點的狀態下要正確地水平移動照相機必須要有精密的控 制，除了該照相機之水平移動控制相當花時間檢査效率很 差以外，還有成本很高的問題。 φ 此外，對專利文獻5使焦點模糊的方法，由於移動透 鏡系時發生光軸偏移，或者很難確保焦點距離的再現性等 理由，使得在各顯示面板產生照相機與顯示面板之間的位 置偏移，而有作業性很差的問題。 此外，於透鏡前面配置光學濾光片的場合，由於2次 元測試器的特性，必須要進行廣角攝影，所以會引起在影 像的四角變暗的機械漸暈（Kerare, mechanical vignetting) 現象。考慮此機械漸暈現象而進行設計的話，有必要使濾 〇 光片自身增大。此外，設置瀘光片切換機構的場合，配合 著濾光片直徑使得濾光片切換機構也變大。接著，隨著顯 示面板的解析度越高，尺寸、重量、成本等方面都變得不 _ 利。 本發明之目的在於解決這些從前的技術課題，提供在 檢查顯示面板的顯示不均時，可以簡易而且有效果地抑制 波紋的產生，同時可精簡地安裝光學濾光片之顯示面板之 檢查方法及檢查裝置。 200933134 [供解決課題之手段] 本發明係有鑑於前述課題而爲者，相關於本發明之顯 示面板之檢查方法，係藉由具備透鏡系與攝影元件之攝影 手段攝影被顯示於顯示面板的影像，由攝得的影像檢查前 述顯示面板之顯示不均（mura)之檢查方法，其特徵爲具 備：前述攝影手段之對前述顯示面板進行焦點對準之焦點 對準工程，及藉由調整前述透鏡系與前述攝影元件之間的 距離使入射至前述攝影元件的前述影像之光分散而抑制攝 影被顯示於前述顯示面板的影像時之波紋（mo ire)發生之 分散工程。 相關於本發明之顯示面板之檢查裝置，具備：攝影被 顯示於顯示面板的影像之攝影手段，及處理藉由前述攝影 手段攝得的前述顯示面板的影像之影像處理手段，以及顯 示以前述影像處理手段處理過的影像之影像顯示手段；其 特徵爲：前述攝影手段，具備：透鏡系、攝影元件、使前 述透鏡系移動而對前述顯示面板之影像進行焦點對準之焦 點對準手段、使前述攝影元件移動而調整前述透鏡系與前 述攝影元件之距離之後焦點調整手段、以及控制前述焦點 對準手段及後焦點調整手段之控制手段；前述控制手段， 具備：在從前述攝影手段攝得的影像來檢查前述顯示面板 的顯示不均時，控制前述攝影手段之前述焦點對準手段對 前述顯示面板進行焦點對準之焦點對準處理機能，以及藉 由控制前述後焦點調整手段調整前述透鏡系與前述攝影元 件之間的距離使入射至前述攝影元件的前述影像的光分散 -8- 200933134 而抑制攝影被顯示於前述顯示面板的影像時產生波 散處理機能。 此外，前述顯示面板之檢查裝置，最好是前述 段之透鏡系與攝影元件之間，具有安裝光學濾光片 片安裝部，前述控制手段，進而具備爲了修正伴隨 光學濾光片的安裝或交換而由折射導致焦點的偏移 前述後焦點調整手段而微調整前述透鏡系與前述攝 之間的距離之微調整處理機能。前述濾光片安裝部 具備自動切換複數濾光片之濾光片切換機構。 [發明之效果] 因爲藉由使以前述攝影元件受光的前述影像之 開而抑制前述波紋的產生，所以可確實進行顯示不 查。 此外，可以將具備前述濾光片安裝部所要求的 光學濾光片適當地安裝或者交換，同時使以前述控 微調整前述透鏡系與前述攝影元件之間的距離而進 光等的除去之檢查光，以前述攝影元件受光而進行 的檢查。 【實施方式】 以下，參照圖面說明本發明之適切的實施型態 [第1實施型態] 紋之分 攝影手 之據光 著前述 ，控制 影元件 ，最好 光分散 均的檢 機能之 制手段 行雜訊 高精度 -9- 200933134 以下，說明本發明之第1實施型態。 圖1係槪略顯示相關於本發明的第1實施型態之顯示 面板檢查裝置的攝影裝置之構成圖。 圖2係槪略顯示顯示面板檢查裝置之構成圖。 圖3.係模式顯示相關於本發明的第1實施型態之攝影 裝置之關於前聚焦（front focus)及後聚焦（back focus)之焦 點距離之說明圖。 圖4係以攝影裝置攝影顯不面板時之以CCD兀件之 ❹ 各畫素檢測出的光的亮度位準的分佈之圖。 圖5係在產生波紋（moire)的狀態下以攝影裝置攝影 顯示面板時之以CCD元件之各畫素檢測出的光的亮度位 準的分佈之圖。圖6係顯示攝影裝置之CCD元件及顯示 面板的各畫素之對應狀態之模式圖。圖7係使以攝影裝置 接收的光藉由後聚焦使其分散時之以CCD元件之各畫素 檢測出的光的亮度位準的分佈之圖。圖8係於顯示面板產 生顯示不均（mura)時之以CCD元件之各畫素檢測出的光 © 的亮度位準的分佈之圖。 相關於本發明的顯示面板的檢查方法及檢查裝置，爲 了進行顯示面板的檢查，特別是進行點缺陷等種種的顯示 ^ 不均的檢査，以照相機（例如CCD照相機）攝影被顯示 於顯示面板的影像（包含白色顯示之種種影像）時進行照 相機的焦點對準之後，藉由改變照相機的透鏡系與攝影元 件之間的距離（進行後對焦的調整），而抑制攝得的影像 之波紋的產生。 -10- 200933134 〔顯示面板檢査裝置〕 首先，說明供實施本發明之顯示面板檢查方法之顯示 面板檢查裝置。 顯示面板檢查裝置，如圖1、2所示主要由攝影裝置 2、影像處理裝置3、與影像顯示裝置4所構成。 攝影裝置2係攝影被顯示於成爲檢查對象的顯示面板 (液晶顯示面板）5之影像之攝影手段。此攝影裝置2, 係由透鏡系7、攝影元件8、焦點對準手段9、後焦點調 整手段丨〇、面板控制部1 1、與控制手段1 2所構成。又， 顯示面板5、透鏡系7以及攝影元件8’係被收容於暗室 1 5內，遮蔽外光。 透鏡系7，在暗室15內係位於前述顯示面板5與攝 影元件8之間供調整焦點之用的光學裝置。透鏡系7’係 組合1個透鏡或複數透鏡、濾光片等而構成的。攝影元件 8，係供由上方攝影顯示面板5之用的元件。攝影元件8 具體而言係以使用c c D元件的照相機構成的。 焦點對準手段9，係使前述透鏡系7以及攝影元件8 一體移動而對前述顯示面板5之影像進行焦點對準之手 段。焦點對準手段9，係由垂直移動機構13、及透鏡支擦 部1 4所構成。 垂直移動機構13 ’被安裝於顯示面板檢查裝置1之 裝置本體側’使透鏡系7及攝影兀件8 一體地在垂直方向 上移動而對顯示面板5對準焦點之用的機構。此垂直移動 -11 - 200933134 機構13，係由被固定於裝置本體側支撐支撐部14的滑塊 之固定部16,以及在被固定於透鏡支撐部14的狀態下可 以在上下方向滑動地被支撐於固定部16之移動部17所構 成。於固定部16，使移動部17移動於垂直方向上的機構 (未圖示）被組入，支撐移動部17而使其移動於垂直方 向。移動部17，支撐透鏡支撐部14而透過此透鏡支撐部 - 14使透鏡系7移動於垂直方向。 透鏡支撐部14，係供一起支撐透鏡系7與攝影元件8 ❹ 之構件。透鏡支撐部1 4，係由側面形狀被形成爲L字形 的縱板部14A，及由此縱板部14A之中間位置水平延伸出 的橫板部14B所構成。透鏡系7在橫板部14B之下側以 朝向顯示面板5的狀態被支撐。 後焦點調整手段1 0，係使攝影元件8移動而調整透 鏡系7與攝影元件8之間隔之用的裝置。後焦點調整手段 10，係由精密移動機構19、與攝影元件支撐部20所構 成。精密移動機構19，係供在被支撐於透鏡支撐部14的 0 縱板部14A的狀態下支撐攝影元件支撐部20而使其精密 移動之用的機構。藉由使此攝影元件支撐部20精密地移 動，而調整被支撐於攝影元件支撐部20的攝影元件8的 — 位置微調整後焦點。精密移動機構19，係由可以調整微 細距離的移動之直動機構所構成。作爲此直動機構，可以 使用球螺桿機構、線性馬達等之可調整攝影元件8的位置 的所有裝置。攝影元件支撐部20，係供直接支撐攝影元 件8之用的構件。攝影元件支撐部20，在支撐攝影元件8 -12- 200933134 的狀態被支撐於精密移動機構19，藉由以精密移動機構 19微調整其位置而微調整前述透鏡系7與前述攝影元件8 之間隔。 面板控制部1 1，係由LCD面板用電源1 1，與LCD 面板驅動訊號產生器23所構成。以LCD面板用電源22 對顯示面板5供給電源，藉由以LCD面板驅動訊號產生 器23產生的驅動訊號來驅動顯示面板5。藉此，顯示面 0 板5發光，顯示適合檢查用的影像。 控制手段1 2，係供控制各部進行檢查之用的裝置。 控制手段1 2，具體而言係由具備控制機能的電腦所構 成。在本實施型態，在1台電腦具有影像處理裝置3與控 制手段12這兩種機能。又，以1台電腦構成控制手段 1 2，而以另1台電腦構成影像處理裝置3亦可。此外，其 他的構成亦可。 控制手段1 2至少具有焦點對準處理機能，及分散處 〇 理機能。焦點對準處理機能，係由以前述攝影裝置2攝得 的影像檢查前述顯示面板5之顯示不均時，控制前述攝影 裝置2的前述焦點對準手段9，而對前述顯示面板5進行 焦點對準之用的處理機能。焦點對準手段9，使前述透鏡 系7及攝影元件8 —體移動而對前述顯示面板5之影像進 行焦點對準後，不移動透鏡系7而使透鏡系7與顯示面板 5之間的距離保持一定。 分散處理機能，係供控制前述後焦點調整手段1 0而 調整前述透鏡系7與前述攝影元件8之間的距離使來自前 -13- 200933134 述顯示面板5的影像之光分散藉以抑制在攝影被顯示於顯 示面板5的影像時之波紋的產生的處理機能。此分散處理 機能，具體而言，係控制前述後焦點調整手段1〇，調整 前述透鏡系7與前述攝影元件8之距離’以前述顯示面板 5之1個畫素對應於前述攝影元件8之CCD之複數個 (例如3個）畫素的方式使前述影像之光分散。 影像處理裝置3，係供處理以攝影裝置2所攝得的影 像，使其顯示於影像顯示裝置4之裝置。影像處理裝置 3，具體而言係由具備影像處理機能的電腦所構成。在本 實施型態，如前所述，在1台電腦具有影像處理裝置3與 控制手段12之機能。此外，於影像處理裝置3，視需要 連接鍵盤24或滑鼠25。 影像顯示裝置4,係供顯示以攝影裝置攝影而以影像 處理裝置3進行影像處理的影像資料之裝置。影像顯示裝 置4，係由缺陷影像用監視器27、與操作用監視器28所 構成。缺陷影像用監視器27，顯示以攝影裝置2攝影而 以影像處理裝置8分散處理後之顯示面板5的表面的影 像。操作用監視器28，在攝影裝置2之焦點對準等時候 顯示顯示面板5。操作者邊看著此操作用監視器28邊進 行攝影裝置2之焦點對準等操作，看著缺陷影像用監視器 27，檢查顯示面板5是否有顯示不均。 〔顯示面板之檢查方法〕 其次，針對使用以上構成之顯示面板檢查裝置1之顯 -14- 200933134 示面板之檢查方法加以說明^ 本實施型態之顯示面板之檢査方法，使用具備透鏡系 7與攝影元件8之前述顯示面板檢查裝置1之攝影裝置 2，攝影被顯示於顯示面板5之影像，由攝得的影像使用 影像處理裝置3與影像顯示裝置4來檢查前述顯示面板5 之顯示不均的方法。 此顯示面板之檢查方法係由焦點對準工程，與分散工 φ 程所構成。 焦點對準工程，係前述攝影裝置進行對前述顯示面板 5的焦點對準之工程。 對被安裝於暗室15內的顯示面板15在面臨透鏡系7 的狀態下，控制手段1 2控制焦點對準手段9而使移動部 17上下移動，透過透鏡支撐部14調整透鏡系7的位置’ 使透鏡系7的焦點對準於顯示面板5。 分散工程，係調整透鏡系7與攝影元件8之間的距離 Q 而使前述顯示面板5的影像的光分散的工程。 在分散工程，係在前述焦點對準工程使透鏡系7的焦 點聚焦於顯示面板5的狀態下’調整前述透鏡系7與前述 ' 攝影元件8之間的距離而使前述顯示面板5的影像的光分 散，藉此抑制在攝影被顯示於顯示面板5的影像時發生波 紋。在此分散工程，調整前述透鏡系7與前述攝影元件8 之距離之後焦點’以顯示面板5之1個畫素對應於攝影元 件8之CCD之3個畫素的方式使前述影像之光分散。 以下，詳述分散工程之後焦點調整。 -15- 200933134 一般而言，於照相機，如圖3所示，以攝影對象之被 攝體（顯示面板5)到透鏡系（透鏡系7)爲止的距離爲 a、以透鏡系至攝影元件（CCD或透鏡，在本實施型態爲 攝影元件8)之距離爲b、透鏡的焦點距離爲f時，成立 下列關係式（透鏡之公式）。 l/a+l/b=1/f ❿ 通常，把調整被攝體至透鏡系爲止的距離a(調整前 焦距）稱爲「焦點對準」。 於本實施型態，藉由照相機的焦點對準，亦即前焦點 調整來將照相機的焦點對準於被攝體（顯示面板5)後， 藉由固定住被攝體至透鏡系7的距離a，而調整透鏡系7 至攝影元件8的距離b之後焦點調整，而如後所述抑制波 紋的產生。 以下，說明本發明之波紋抑制的原理。 0 於顯示面板，特別是彩色液晶顯示面板，分別顯示紅 (R)、綠（G)、藍（B)之色的畫素成爲一組而形成一 個顯示點（dot)。 ' 此處，考慮在使顯示面板顯示白色，亦即顯示RGB 所有顏色的場合，來自顯示面板1之1個畫素的光以3個 攝影元件8之CCD元件檢測的場合。如果在顯示面板5 沒有顯示不均的話，顯示面板5全體會以單一顏色均勻發 光。此時，以攝影元件8攝影顯示面板5時，如果顯示面 -16- 200933134 板5之各畫素與攝影元件8之CCD元件之各畫素之間沒 有位置偏移的話，如圖4所示，以CCD元件之各畫素檢 側的光的亮度位準，應該不會規則地改變，而於每個顯示 面板5的畫素出現分散（scattering)。又，在圖4係模 式顯示以CCD元件之各畫素檢測出的光的亮度位準有規 -則地改變的狀態，顯示餘圖中上部的山形顯示由顯示面板 5所發出的顯示色的光的亮度位準，圖中下部之矩形圖 0 ( histogram )係以各畫素檢測出的來自顯示面板5的光 的亮度位準。如果於顯示面板5不存在顯示不均，如此圖 4所示，使顯示面板5進行白色顯示的場合，被輸入至對 應於顯示面板5的各畫素之所有的C CD之畫素之光的亮 度位準，應該沒有各顯示面板 5的畫素之分散 (scattering )。 接著，如果在顯示面板5存在著顯示不均的場合，來 自發生顯示不均的畫素之光爲對應於此畫素的CCD之畫 φ 素所檢測出時之光的亮度位準，與檢測到的來自不產生顯 示不均的畫素的光之其他的畫素之亮度位準會變得不同， 由此亮度位準的變化，可以檢測出顯示面板5之顯示不 . 均。 此外，在顯示面板5之各畫素與攝影元件8之CCD 之各畫素之間沒有位置偏移的場合，以CCD之畫素所檢 測出的光的亮度位準的比率沒有變化，也沒有發生波紋。 然而，實際上在顯示面板5之各畫素與攝影元件8之 CCD之各畫素之間會存在著位置偏移，此場合如圖5所 -17- 200933134 示，即使於顯示面板5不存在著顯示不均，以攝影元件之 CCD畫素所檢測出的光的亮度位準的比率在CCD全體會 變得不均勻，此即爲波紋發生的原因。例如，在圖5之例 左側之圖所示的畫素爲明亮的條紋，右側之圖所示的畫素 變成暗色的條紋。 如前所述，從前係藉由影像處理除去這樣的波紋的發 - 生，或者藉由照相機之前焦距調整而抑制波紋。但在本發 明係藉由後焦點調整來抑制波紋。 q 具體而言，一旦對準攝影裝置2之透鏡系7的焦點 後，藉由後焦點調整手段10之精密移動機構19使攝影元 件8移動，改變透鏡系7與攝影元件8之間的距離。作爲 改變之量，係成爲顯示面板5之1個畫素對應攝影元件8 之CCD之畫素3個的位置爲止。亦即，如圖6所示，改 變距離b，直到由RGB之3畫素所構成之1個點之光以9 個CCD檢測出的位置爲止。換句話說，使顯示面板5之 單色1畫素的光分散於攝影元件8之3個CCD亦即是形 〇 成1個點（dot)的RGB3畫素所構成的光分散至9個CCD 而進行檢測的方式使攝影元件8移動。 結果，如圖7所示，於顯示面板5沒有顯示不均，顯 ‘ 示面板5全體均勻地發出白色光的場合，以所有的C CD 檢測出的光的亮度位準成爲一定，抑制了亮度位準的規則 性改變而抑制了波紋的發生。結果’沒有波紋所致視覺上 的障礙，而可以僅僅辨識顯示面板5是否有顯示不均，可 以正確地檢測出沒有顯示不均。 -18- 200933134 另一方面，在顯示面板5存在著顯示不均的場合變成 後述情形。亦即’如圖8所示’於顯示面板5的表面有顯 示不均的缺陷的場合，該部分的亮度位準與其他部分相比 會有變化。而且，在廣範圍（3個C CD )其亮度位準改 變，所以可以容易而且確實地以攝影元件8之CCD檢測 •出顯示不均導致顯示面板5所產生的光的亮度不同。 根據以此攝影元件8之CCD之檢測値顯示於影像顯 U 示裝置4之缺陷影像用監視器27，根據檢查員的視覺或 者根據與閾値比較之影像處理來檢測出顯示不均。 藉此，沒有必要進行複雜而且花時間的影像處理，可 以由攝得的影像確實地進行顯示不均的檢查。 此外’因爲不是進行前焦點調整而是進行後焦點調 整，所以只要一度對準透鏡系的焦點，之後沒有必要移動 透鏡系7,所以照相機（攝影裝置2)不會發生光軸偏離， 此外沒有必要在每次交換檢査對象的顯示面板5都要進行 〇 照相機的對焦，生產性提高。 藉由以上’可以迅速且正確地進行顯示面板的顯示不 均的檢查。 [第2實施型態] 其次，說明本發明之第2實施型態。 本實施型態之顯示面板之檢查裝置，係於前述第1實 施型態之顯示面板檢查裝置〖追加光學濾光片。全體構成 與前述第1實施型態之顯示面板檢查裝置1相同，所以相 -19- 200933134 同構件賦予同一符號而省略其說明，以光學濾光片爲中心 進行說明。 本實施型態之顯示面板檢査裝置’如圖9所示’在攝 影裝置2之透鏡系7與攝影元件8之間，具有安裝著光學 濾光片30的濾光片安裝部31。 光學濾光片30，使用具備顯示面板檢查裝置所要求 · 的機能之濾光片。例如，可以遮掉近紅外線之去IR(IR-cut)濾光片、除去反射光之PL (偏光）濾光片或者低通濾 0 光片等具備種種機能的濾光片之中，選出並安裝具備顯示 面板檢查裝置所必要的機能之濾光片。 濾光片安裝部31，係供安裝光學濾光片30之部分。 濾光片安裝部31，有以手動交換光學濾光片30的場合， 及自動交換光學濾光片30的場合，因應這些而被構成。 濾光片安裝部 31，被安裝於透鏡支撐部14之縱板部 14A，支撐光學濾光片30。 此濾光片安裝部31，在以手動交換光學濾光片30的 〇 構成的場合，被構成爲嵌合於光學濾光片30而將此光學 濾光片30支撐在透鏡系7與攝影元件8之間的構件。在 此場合’具備檢測出在濾光片安裝部31安裝了新的光學 胃 濾光片3 0之開關或者感測器，藉由感測到新的光學濾光 片30的安裝，而使後述之控制手段12的微調整處理機能 動作亦可。 濾光片安裝部31自動交換光學濾光片30的場合，該 濾光片安裝部31例如圖10所示，被構成爲具備：濾光片 -20- 200933134 支撐部32，旋轉驅動馬達33所構成的濾光片切換機構 34。濾光片支撐部32，設有3個支撐光學濾光片30的支 撐腕部36，以各支撐腕部36同時支撐3枚光學濾光片 30。濾光片支撐部32,使以該支撐腕部36支撐的光學濾 光片30位於透鏡系7與攝影元件8之間的方式被配設。 • 又，支撐腕部36亦可設置4個以上。旋轉驅動馬達33, .適當地旋轉濾光片支撐部32。此旋轉驅動馬達33，被連 Q 接於前述控制手段。在此場合，控制手段12，以在光學 濾光片30之安裝或者交換後自動使微調整處理機能動作 的方式被設定。 前述控制手段12，除了前述第1實施型態所說明的 機能以外，進而具備微調整透鏡系7與攝影元件8之間的 距離之微調整處理機能。此微調整處理機能，係爲了修正 伴隨著光學濾光片30的安裝或交換而由折射導致的焦距 偏移，而控制後焦點調整手段1 0而微調整透鏡系7與攝 〇 影元件8之間的距離之機能。進而，控制手段12，控制 濾光片切換機構34之旋轉驅動馬達33，使特定之光學濾 光片30移動於透鏡系7與攝影元件8之間，改變顯示面 _ 板檢查裝置之光學特性。亦即，被構成爲濾光片安裝部 31具備濾光片切換機構34的場合，前述控制手段12,控 制濾光片切換機構34的旋轉驅動馬達33，使瀘光片支撐 部32的支撐腕部36旋轉，使被選擇的光學濾光片30移 動而支撐於透鏡系7與攝影元件8之間。 如以上所構成的顯示面板檢查裝置動作如後述。 -21 - 200933134 顯示面板檢査裝置之全體動作與前述第1實施型態之 顯示面板檢查裝置1同樣，所以在此處以光學濾光片30 的交換作業爲中心進行說明。 作爲光學濾光片30，準備複數枚機能不同的濾光 片。由這些複數光學濾光片30之中選擇對應於顯示面板 檢査裝置所要求的機能的光學濾光片30，新安裝於濾光 · 片安裝部31，或者與既有的光學瀘光片30交換。 _。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Corrugated (interference pattern) - and mechanically vignetting (Kerare, mechanical vignetting) display method and inspection device.先前 [Prior Art] In the inspection of a display panel such as a liquid crystal display, it is known that when a video displayed on a display panel is photographed by a CCD camera (CCD camera), moiré occurs. This ripple is generated by the brightness of the light received by the pixels arranged in a regular lattice pattern, with a slight change in the regularity. That is, the display panel and the CCD are arranged in a regular grid pattern, and the pixels in the display panel are relatively offset from each pixel of the CCD. The brightness of the light of the display panel that receives the light from the CCD is periodically changed slightly, thereby generating ripples. The corrugation has a large difference in shading, which is an obstacle to the inspection of uneven display of the display panel, and it is necessary to remove the corrugation. In this case, ideally (theoretically) the ripple is no longer generated as long as the relative positional offset between each pixel of the display panel and each pixel of the CCD is eliminated, but the positional offset is Zero is difficult. Therefore, as described in Patent Documents 1 and 2, the ripple generated in the captured image is usually removed by image processing of the image of -5-200933134. Further, as described in Patent Documents 3 and 4, the camera is horizontally moved to the display panel during shooting to cause the focus to be slightly out of focus to prevent the occurrence of waviness. Further, as described in Patent Document 5, a scattering plate is inserted between the camera and the display panel. However, in this case, the ripple can be blurred by the scattering plate, but the display unevenness itself may be blurred. . Here, as a simpler method, after the focus (prefocus) is adjusted by adjusting the distance between the lens 0 of the CCD camera and the display panel, the lens system is slightly moved (so-called "focusing on the focus" ") and photography to suppress the occurrence of ripples. Further, as in Patent Document 6, there is an example in which an optical filter is disposed in front of the lens to remove unnecessary light. For example, a PL filter that removes reflected light or an IR-Cut filter that blocks near-infrared light is placed in front of the lens to remove unnecessary light. [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Japanese Patent Laid-Open Publication No. JP-A No. 2003-344761 [Patent Document 5] Japanese Patent Application Laid-Open No. 2003-344761 Problem -6- 200933134 However, in the methods of removing the corrugations by image processing in Patent Documents 1 and 2, a complicated image processing program is required, which is time consuming and has a problem of poor inspection efficiency. Further, in the methods of Patent Documents 3 and 4, it is necessary to have precise control to correctly move the camera horizontally in a state in which the display panel is in focus, except that the horizontal movement control of the camera takes considerable time to check the efficiency, and There are high cost issues. φ In addition, in the method of blurring the focus of Patent Document 5, the position between the camera and the display panel is generated in each display panel due to the optical axis shift when moving the lens system or the difficulty in ensuring the reproducibility of the focal length. Offset, but has poor workability. Further, when an optical filter is disposed in front of the lens, it is necessary to perform wide-angle photography due to the characteristics of the two-dimensional tester, so that a mechanical vignetting phenomenon in which the four corners of the image are darkened is caused. In consideration of this mechanical vignetting, it is necessary to increase the filter diaphragm itself. Further, in the case where the calender switching mechanism is provided, the filter switching mechanism is also increased in accordance with the filter diameter. Then, as the resolution of the display panel is higher, the size, weight, cost, and the like become unfavorable. An object of the present invention is to solve the problems of the prior art, and to provide a method for inspecting a display panel in which an optical filter can be mounted in a simple and effective manner while inspecting display unevenness of a display panel, and which can be easily and effectively suppressed. Check the device. 200933134 [Means for Solving the Problem] The present invention has been made in view of the above-mentioned problems, and an image inspection method for a display panel according to the present invention is to image an image displayed on a display panel by a photographing means including a lens system and a photographing element. An inspection method for inspecting display unevenness (mura) of the display panel from the captured image, comprising: focusing on an in-focus of the display panel by the photographing means, and adjusting the lens by adjusting the lens The distance between the imaging element and the imaging element is such that the light incident on the imaging element is dispersed to suppress the occurrence of moiré when the image displayed on the display panel is captured. An inspection apparatus for a display panel according to the present invention includes: a photographing means for photographing an image displayed on the display panel; and an image processing means for processing an image of the display panel captured by the photographing means, and displaying the image An image display means for processing an image processed by the processing means, wherein the imaging means includes: a lens system, an imaging element, and an in-focus means for moving the lens system to focus an image of the display panel; a focus adjustment means for adjusting a distance between the lens system and the imaging element after moving the imaging element, and a control means for controlling the focus alignment means and the back focus adjustment means; wherein the control means is provided in the image pickup means The image is used to check the display unevenness of the display panel, and the focus alignment means for controlling the focus of the display means is controlled by the focus means of the image pickup means, and the lens system is adjusted by controlling the back focus adjustment means. Distance from the aforementioned photographic element The light of the image incident on the image pickup element is dispersed -8-200933134 to suppress the occurrence of a wave processing function when the image displayed on the display panel is captured. Further, it is preferable that the inspection device of the display panel has an optical filter sheet mounting portion between the lens system and the image pickup element, and the control means further includes mounting or exchange for correcting the optical filter. On the other hand, the micro-adjusting processing function of the distance between the lens system and the photographing is finely adjusted by the back focus adjustment means by which the focus is shifted by the refraction. The filter mounting unit includes a filter switching mechanism that automatically switches a plurality of filters. [Effects of the Invention] Since the occurrence of the above-described corrugation is suppressed by opening the image received by the imaging element, the display can be surely performed. Further, the optical filter provided in the filter mounting portion may be appropriately attached or exchanged, and the removal of light or the like by adjusting the distance between the lens system and the imaging element by the above-described fine adjustment may be performed. The light is inspected by the light receiving of the aforementioned imaging element. [Embodiment] Hereinafter, a suitable embodiment of the present invention will be described with reference to the drawings. [First Embodiment] The photographic subject of the gradation of the photographic subject is controlled by the above-mentioned light control device. High-precision noise of the means - 9 - 200933134 Hereinafter, the first embodiment of the present invention will be described. Fig. 1 is a view showing a configuration of a photographing apparatus of a display panel inspection apparatus according to a first embodiment of the present invention. Fig. 2 is a block diagram showing the structure of the display panel inspection device. Fig. 3 is an explanatory view showing the focal lengths of the front focus and the back focus relating to the photographing apparatus of the first embodiment of the present invention. Fig. 4 is a view showing the distribution of the luminance level of the light detected by each pixel of the CCD element when the panel is not photographed by the photographing device. Fig. 5 is a view showing a distribution of luminance levels of light detected by respective pixels of the CCD element when the display panel is photographed by the photographing device in a state where moiré is generated. Fig. 6 is a schematic view showing the corresponding state of each pixel of the CCD element and the display panel of the photographing apparatus. Fig. 7 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the light received by the image pickup device is dispersed by back focusing. Fig. 8 is a view showing the distribution of the luminance level of the light © detected by each pixel of the CCD element when the display panel generates display unevenness (mura). In the inspection method and inspection apparatus of the display panel according to the present invention, in order to perform inspection of the display panel, in particular, inspection of various types of display such as point defects is performed, and a camera (for example, a CCD camera) is imaged and displayed on the display panel. After the focus of the camera is performed on the image (including various images displayed in white), the ripple of the captured image is suppressed by changing the distance between the lens system of the camera and the photographic element (adjusting the focus after focusing). . -10-200933134 [Display Panel Inspection Apparatus] First, a display panel inspection apparatus for carrying out the display panel inspection method of the present invention will be described. As shown in Figs. 1 and 2, the display panel inspection device is mainly composed of a photographing device 2, an image processing device 3, and a video display device 4. The photographing apparatus 2 photographs the photographing means displayed on the image of the display panel (liquid crystal display panel) 5 to be inspected. This imaging device 2 is composed of a lens system 7, an imaging element 8, an in-focus means 9, a back focus adjustment means, a panel control unit 1 1 and a control means 12. Further, the display panel 5, the lens system 7, and the imaging element 8' are housed in the dark room 15 to shield the external light. The lens system 7 is disposed in the dark room 15 between the display panel 5 and the imaging element 8 for adjusting the focus. The lens system 7' is composed of a single lens, a complex lens, a filter, and the like. The photographic element 8 is an element for photographic display panel 5 from above. The photographing element 8 is specifically constituted by a camera using a c c D element. The in-focus means 9 is a means for integrally moving the lens system 7 and the imaging element 8 to focus the image of the display panel 5. The in-focus means 9 is composed of a vertical movement mechanism 13 and a lens cleaning portion 14. The vertical movement mechanism 13' is attached to the apparatus main body side of the display panel inspection device 1 to move the lens system 7 and the imaging element 8 integrally in the vertical direction to align the display panel 5 with the focus. This vertical movement -11 - 200933134 mechanism 13 is supported by the fixing portion 16 of the slider fixed to the apparatus body side supporting support portion 14 and slidably supported in the up and down direction in a state of being fixed to the lens supporting portion 14. It is constituted by the moving portion 17 of the fixing portion 16. In the fixing portion 16, a mechanism (not shown) for moving the moving portion 17 in the vertical direction is incorporated, and the moving portion 17 is supported to be moved in the vertical direction. The moving portion 17 supports the lens supporting portion 14 and transmits the lens system 7 in the vertical direction through the lens supporting portion 14. The lens supporting portion 14 is a member for supporting the lens unit 7 and the photographic element 8 一起 together. The lens supporting portion 14 is composed of a vertical plate portion 14A having a side surface shape formed in an L shape, and a horizontal plate portion 14B extending horizontally at an intermediate position of the vertical plate portion 14A. The lens system 7 is supported on the lower side of the horizontal plate portion 14B so as to face the display panel 5. The back focus adjustment means 10 is a means for moving the imaging element 8 to adjust the interval between the lens system 7 and the imaging element 8. The back focus adjustment means 10 is composed of a precision moving mechanism 19 and a photographic element supporting unit 20. The precision moving mechanism 19 is a mechanism for supporting the imaging element supporting portion 20 to be precisely moved while being supported by the 0 vertical plate portion 14A of the lens supporting portion 14. By precisely moving the photographic element supporting portion 20, the position of the photographic element 8 supported by the photographic element supporting portion 20 is finely adjusted. The precision moving mechanism 19 is constituted by a linear motion mechanism that can adjust the movement of the fine distance. As the linear motion mechanism, all the devices that can adjust the position of the imaging element 8 such as a ball screw mechanism or a linear motor can be used. The photographic element supporting portion 20 is a member for directly supporting the photographic element 8. The photographic element supporting portion 20 is supported by the precision moving mechanism 19 in a state of supporting the photographic elements 8-12-200933134, and the interval between the lens system 7 and the photographic element 8 is finely adjusted by finely adjusting the position thereof by the precise moving mechanism 19. . The panel control unit 1 1 is composed of an LCD panel power supply 1 1 and an LCD panel drive signal generator 23. The display panel 5 is supplied with power by the power supply 22 for the LCD panel, and the display panel 5 is driven by the driving signal generated by the LCD panel driving signal generator 23. Thereby, the display panel 0 is illuminated, and an image suitable for inspection is displayed. The control means 1 2 is a device for controlling each part for inspection. The control means 1 2 is specifically constituted by a computer having a control function. In the present embodiment, the two functions of the image processing device 3 and the control means 12 are provided in one computer. Further, the control means 1 2 may be constituted by one computer, and the image processing apparatus 3 may be constituted by another computer. In addition, other components are also available. The control means 1 2 has at least an in-focus processing function and a dispersion processing function. In the focus processing function, when the display unevenness of the display panel 5 is inspected by the image captured by the image capturing device 2, the focusing means 9 of the image capturing device 2 is controlled, and the display panel 5 is focused on the focus. The processing power that is used. The in-focus means 9 moves the lens system 7 and the imaging element 8 to focus on the image of the display panel 5, and then moves the lens system 7 without moving the lens system 7 to distance the lens system 7 from the display panel 5. Keep it constant. The dispersion processing function is for controlling the back focus adjustment means 10 to adjust the distance between the lens system 7 and the imaging element 8 so that the light of the image from the display panel 5 of the previous-13-200933134 is dispersed to suppress the photography. The processing function of the generation of ripples when displayed on the image of the display panel 5. Specifically, the dispersion processing function controls the back focus adjustment means 1 to adjust the distance between the lens system 7 and the imaging element 8 such that one pixel of the display panel 5 corresponds to the CCD of the imaging element 8. A plurality of (for example, three) pixels are arranged to disperse the light of the aforementioned image. The image processing device 3 is a device for processing an image captured by the photographing device 2 to be displayed on the image display device 4. The image processing device 3 is specifically constituted by a computer having an image processing function. In the present embodiment, as described above, the functions of the image processing apparatus 3 and the control means 12 are provided in one computer. Further, in the image processing apparatus 3, a keyboard 24 or a mouse 25 is connected as needed. The video display device 4 is a device for displaying video data that is imaged by the image processing device 3 by the imaging device. The video display device 4 is composed of a defective video monitor 27 and an operation monitor 28. The defective image monitor 27 displays an image of the surface of the display panel 5 which is imaged by the image processing device 8 and is imaged by the image processing device 8. The operation monitor 28 displays the display panel 5 when the photographing device 2 is in focus or the like. The operator performs an operation such as focusing on the photographing device 2 while looking at the operation monitor 28, and looks at the defective image monitor 27 to check whether or not the display panel 5 is unevenly displayed. [Inspection Method of Display Panel] Next, the inspection method of the display panel using the display panel inspection apparatus 1 configured as above will be described. The inspection method of the display panel of the present embodiment uses the lens system 7 and The photographing device 2 of the display panel inspection device 1 of the photographing element 8 photographs the image displayed on the display panel 5, and uses the image processing device 3 and the image display device 4 to check the display unevenness of the display panel 5 from the captured image. Methods. The inspection method of this display panel is composed of the focus alignment project and the dispersion process. The focus alignment project is a process in which the aforementioned photographing device performs focus on the display panel 5. In a state in which the display panel 15 mounted in the dark room 15 faces the lens system 7, the control means 1 2 controls the focus means 9 to move the moving portion 17 up and down, and the lens support portion 14 adjusts the position of the lens system 7'. The focus of the lens system 7 is aligned with the display panel 5. The dispersion process is a process of adjusting the distance Q between the lens system 7 and the imaging element 8 to disperse the light of the image of the display panel 5. In the dispersion process, the image of the display panel 5 is adjusted by adjusting the distance between the lens system 7 and the 'photography element 8' in a state in which the focus of the lens system 7 focuses the focus of the lens system 7 on the display panel 5. Light is dispersed, thereby suppressing occurrence of waviness when photographing an image displayed on the display panel 5. In this dispersion process, after the distance between the lens system 7 and the imaging element 8 is adjusted, the focus 'disperses the light of the image so that one pixel of the display panel 5 corresponds to the three pixels of the CCD of the imaging element 8. Hereinafter, the focus adjustment after the dispersion process will be described in detail. -15- 200933134 In general, in the camera, as shown in FIG. 3, the distance from the subject (display panel 5) of the photographic subject to the lens system (lens system 7) is a, and the lens is attached to the photographic element ( In the present embodiment, when the distance between the imaging element 8) is b and the focal length of the lens is f, the following relational expression (form of the lens) is established. l/a+l/b=1/f ❿ Normally, the distance a (pre-adjustment focal length) until the subject is adjusted to the lens system is called "in focus". In the present embodiment, the focus of the camera is aligned with the subject (display panel 5) by the focus of the camera, that is, the focus adjustment, and the distance from the subject to the lens system 7 is fixed. a, while the focus is adjusted after adjusting the distance b of the lens system 7 to the photographic element 8, and the generation of the ripple is suppressed as will be described later. Hereinafter, the principle of the ripple suppression of the present invention will be described. 0 On the display panel, especially the color liquid crystal display panel, the pixels of the colors of red (R), green (G), and blue (B) are respectively displayed as a group to form a display dot (dot). Here, in the case where the display panel is displayed in white, that is, when all the colors of RGB are displayed, the light from one pixel of the display panel 1 is detected by the CCD elements of the three imaging elements 8. If unevenness is not displayed on the display panel 5, the entire display panel 5 is uniformly emitted in a single color. At this time, when the display panel 5 is photographed by the photographing element 8, if there is no positional shift between each pixel of the display surface-16-200933134 panel 5 and each pixel of the CCD element of the photographing element 8, as shown in FIG. The luminance level of the light on the side of each pixel of the CCD element should not be changed regularly, and the pixels on each display panel 5 appear to be scattered. Further, in FIG. 4, the state in which the luminance level of the light detected by each pixel of the CCD element is changed in a regular manner is displayed, and the mountain shape in the upper portion of the remaining image is displayed to display the display color emitted by the display panel 5. The brightness level of the light, the histogram in the lower part of the figure is the brightness level of the light from the display panel 5 detected by each pixel. If there is no display unevenness on the display panel 5, as shown in FIG. 4, when the display panel 5 is displayed in white, it is input to all of the C CD pixel lights corresponding to the respective pixels of the display panel 5. The brightness level should be free of the scattering of the pixels of each display panel 5. Next, when there is display unevenness on the display panel 5, the light from the pixel in which the display unevenness occurs is the brightness level of the light detected by the CCD of the pixel corresponding to the pixel, and the detection The brightness level of the other pixels from the light that does not cause the display unevenness will be different, and thus the display of the display panel 5 can be detected by the change in the brightness level. Further, when there is no positional shift between each pixel of the display panel 5 and each pixel of the CCD of the imaging element 8, the ratio of the luminance level of the light detected by the CCD pixel does not change, and there is no change. Ripple occurs. However, there is actually a positional shift between each pixel of the display panel 5 and each pixel of the CCD of the photographic element 8. In this case, as shown in FIG. 5-17-200933134, even if the display panel 5 does not exist. The display unevenness, the ratio of the brightness level of the light detected by the CCD pixel of the photographic element becomes uneven in the entire CCD, which is the cause of the occurrence of the ripple. For example, the pixels shown in the figure on the left side of the example of Fig. 5 are bright stripes, and the pixels shown in the figure on the right side become dark stripes. As described above, the generation of such ripples is removed by image processing in the past, or the ripple is suppressed by the focal length adjustment of the camera. However, in the present invention, the ripple is suppressed by the back focus adjustment. Specifically, once the focus of the lens unit 7 of the photographing device 2 is aligned, the precise moving mechanism 19 of the back focus adjusting means 10 moves the photographing element 8 to change the distance between the lens unit 7 and the photographing element 8. The amount of change is such that one pixel of the display panel 5 corresponds to three positions of the CCD pixels of the imaging element 8. That is, as shown in Fig. 6, the distance b is changed until the position of the light of one dot composed of three pixels of RGB is detected by nine CCDs. In other words, the light composed of the RGB 3 pixels of the photographic element 8 in which the light of the monochromatic 1 pixel of the display panel 5 is dispersed in the photographic element 8 is dispersed to 9 CCDs. The detection means moves the photographic element 8. As a result, as shown in Fig. 7, when the display panel 5 is not unevenly displayed, and the entire display panel 5 emits white light uniformly, the luminance level of the light detected by all the C CDs is constant, and the brightness is suppressed. The regularity of the level changes the occurrence of ripples. As a result, there is no visual obstacle due to the corrugation, and it is possible to recognize only whether or not the display panel 5 is unevenly displayed, and it is possible to correctly detect that there is no display unevenness. -18- 200933134 On the other hand, when there is display unevenness on the display panel 5, it will be described later. That is, as shown in Fig. 8, when the surface of the display panel 5 has a defect indicating unevenness, the luminance level of the portion changes compared with other portions. Further, since the brightness level is changed over a wide range (3 C CDs), it is possible to easily and surely detect the CCD of the photographic element 8 and the display unevenness causes the brightness of the light generated by the display panel 5 to be different. According to the defective image monitor 27 displayed on the image display device 4 by the detection of the CCD of the image pickup device 8, the display unevenness is detected based on the visual inspection of the inspector or the image processing in comparison with the threshold. Thereby, it is not necessary to perform complicated and time-consuming image processing, and the unevenness of the display can be surely performed from the captured image. In addition, since the back focus adjustment is performed instead of the front focus adjustment, it is not necessary to move the lens system 7 once the focus of the lens system is once aligned, so that the camera (photographing device 2) does not have the optical axis deviation, and it is not necessary. The focus of the camera is performed every time the display panel 5 of the inspection object is exchanged, and the productivity is improved. By the above, the display unevenness of the display panel can be quickly and accurately checked. [Second embodiment] Next, a second embodiment of the present invention will be described. The inspection device of the display panel of the present embodiment is an additional optical filter in the display panel inspection device of the first embodiment. The entire configuration is the same as that of the display panel inspection device 1 of the first embodiment. Therefore, the same reference numerals will be given to the same components as those of the first embodiment, and the description thereof will be omitted, and the optical filter will be mainly described. The display panel inspection device of the present embodiment has a filter attachment portion 31 to which the optical filter 30 is mounted, between the lens system 7 of the image pickup device 2 and the image pickup device 8 as shown in Fig. 9 . The optical filter 30 uses a filter having functions required for a display panel inspection device. For example, it is possible to remove the near-infrared IR (IR-cut) filter, the PL (polarized) filter that removes the reflected light, or the filter that has various functions such as a low-pass filter, and select Install a filter that has the functions necessary for the display panel inspection device. The filter mounting portion 31 is a portion to which the optical filter 30 is mounted. The filter mounting portion 31 is configured such that the optical filter 30 is manually exchanged and the optical filter 30 is automatically exchanged. The filter attaching portion 31 is attached to the vertical plate portion 14A of the lens supporting portion 14, and supports the optical filter 30. The filter mounting portion 31 is configured to be fitted to the optical filter 30 when the optical filter 30 is manually exchanged, and the optical filter 30 is supported by the lens unit 7 and the imaging element. The component between 8. In this case, a switch or a sensor that detects that a new optical stomach filter 30 is attached to the filter attaching portion 31 is provided, and the mounting of the new optical filter 30 is sensed, and will be described later. The fine adjustment processing function of the control means 12 can also be operated. When the optical filter mounting portion 31 automatically exchanges the optical filter 30, the filter mounting portion 31 is configured to include a filter -20-200933134 support portion 32 and a rotary drive motor 33, as shown in Fig. 10, for example. The filter switching mechanism 34 is constructed. The filter supporting portion 32 is provided with three supporting arms 36 for supporting the optical filter 30, and each of the supporting arms 36 simultaneously supports the three optical filters 30. The filter supporting portion 32 is disposed such that the optical filter 30 supported by the supporting arm portion 36 is positioned between the lens unit 7 and the imaging element 8. • Further, four or more support arms 36 may be provided. Rotate the drive motor 33, and appropriately rotate the filter support portion 32. The rotary drive motor 33 is connected to the control means by a connection. In this case, the control means 12 is set such that the fine adjustment processing function is automatically operated after the optical filter 30 is mounted or exchanged. The control means 12 further includes a fine adjustment processing function for finely adjusting the distance between the lens system 7 and the imaging element 8 in addition to the functions described in the first embodiment. The micro-adjusting processing function is to correct the focal length shift caused by the refraction accompanying the mounting or exchange of the optical filter 30, and to control the back focus adjusting means 10 to finely adjust the lens system 7 and the photographic element 8 The function of distance between. Further, the control means 12 controls the rotation drive motor 33 of the filter switching mechanism 34 to move the specific optical filter 30 between the lens system 7 and the imaging element 8, and changes the optical characteristics of the display surface inspection device. In other words, when the filter attachment unit 31 is provided with the filter switching mechanism 34, the control means 12 controls the rotation drive motor 33 of the filter switching mechanism 34 to support the support of the calender support portion 32. The portion 36 is rotated to move the selected optical filter 30 to be supported between the lens unit 7 and the imaging element 8. The operation of the display panel inspection device configured as described above will be described later. -21 - 200933134 The entire operation of the display panel inspection device is the same as that of the display panel inspection device 1 of the first embodiment. Therefore, the operation of the optical filter 30 will be mainly described herein. As the optical filter 30, a plurality of filters having different functions can be prepared. The optical filter 30 corresponding to the function required by the display panel inspection device is selected from among the plurality of optical filters 30, newly mounted on the filter/sheet mounting portion 31, or exchanged with the existing optical calender sheet 30. . _
此時，在以手動交換光學濾光片30的構成之濾光片 Q 安裝部31的場合，作業者將光學濾光片30直接安裝於濾 光片安裝部31。此時，計有的光學濾光片30被安裝於瀘 光片安裝部31的場合，首先將其拆下，其後將新的光學 濾光片安裝於濾光片安裝部3 1。 接著，具備前述開關或感測器的場合自動使控制手段 12之前述微調整處理機能開始動作，不具有開關等的場 合則採手動方式。 此外，自動交換光學濾光片30的構成之濾光片安裝 〇 部31的場合，藉由根據控制手段12之濾光片切換機構 34之控制而使旋轉驅動馬達33動作，濾光片支撐部32 被旋轉，而將特定的光學濾光片30安裝於透鏡系7與攝 ^ 影元件8之間。接著，使前述微調整處理機能動作。 接著，藉由前述微調整處理機能，微調整透鏡系7與 攝影元件8之間的距離而結束光學濾光片30的交換作 業。 此後，根據顯示面板檢查裝置進行通常的檢查。 -22- 200933134 藉由以上所述，將具備所要求的機能之光學濾光片 30於前述濾光片安裝部31適當地安裝或者交換，同時以 控制手段12微調整前述透鏡系7與前述攝影元件8之間 的距離，使因應於光學濾光片30的機能而進行了雜訊光 的除去等之檢查光以前述攝影元件8受光，所以與前述第 - 1實施型態之機能互起作用，可以進行高精度的檢查。 此外，把濾光片安裝部31設於透鏡系7與攝影元件 φ 8之間，將光學濾光片30安裝於透鏡系7與攝影元件8 之間，所以可以精簡地安裝光學濾光片3 0。亦即，可以 縮小光學濾光片30的尺寸。而且光學濾光片30，可以不 管畫角多大都維持相同尺寸。這是因爲後聚焦部，把在透 鏡系7的內部一度成像之影像展開爲攝影元件8的尺寸的 緣故。藉此，顯示面板檢查裝置也同樣可以精簡地構成。 此外，光學濾光片3 0變小，所以可以謀求輕量化以及成 本的降低。 ❹ (變形例） 在前述第1實施型態，在前述分散工程，係考慮由於 ' 對比的降低而導致精度降低，以顯示面板5之1個畫素對 應於攝影裝置2的CCD之3個畫素的方式使前述影像之 光分散，但只要確保檢測精度，亦可以對應2個或者4個 以上畫素的方式分散前述影像之光。亦即，使光分散的範 圍太大的話，對應於相鄰的位址的LCD畫素之CCD也會 有光進入，會有缺陷自身被分散而對比降低，變得無法檢 -23- 200933134 測出缺陷的可能性，因此在前述實施型態以對應於CCD 的3個畫素的方式設定光的分散範圍’但是只要對比不會 降低可以確保檢測精度的話，亦可以對應2個或4個以上 的畫素的方式使前述影像的光分散。 在前述第1實施型態，在焦點對準工程之後進行分散 工程，但是隨著顯示面板5的種類不同’亦可在分散工程 - 之後進行焦點對準工程。隨著檢查對象之顯示面板5的不 同，有時預先知道此顯示面板5與前述透鏡系7之間的距 ◎ 離以及透鏡系7與前述攝影元件8之間的距離，所以在此 場合亦可使焦點對準工程與分散工程順序對調。亦即，在 分散工程之後進行焦點對準工程亦可。 在前述第2實施型態，係使濾光片切換機構34，成 爲以迴轉驅動馬達33旋轉支撐腕部36而切換光學濾光片 30的構成，但是採其他的構成也當然可以。例如，與投 幣式自動電唱機（juke box)同樣，亦可由收容複數光學 濾光片30的收容部，以及自動取出此收容部內的光學濾 © 光片30而搬送安裝於濾光片安裝部31的搬送部所構成。 【圖式簡單說明】 圖1係槪略顯示相關於本發明的第1實施型態之顯示 面板檢查裝置的攝影裝置之構成圖。 圖2係槪略顯示相關於本發明的第1實施型態之顯示 面板檢查裝置之構成圖。 圖3係模式顯示相關於本發明的第1實施型態之攝影 -24- 200933134 裝置之關於前對焦（front focus)及後對焦（back focus)之對 焦距離之說明圖。 圖4係以攝影裝置攝影顯示面板時之以CCD元件之 各畫素檢測出的光的亮度位準的分佈之圖。 圖5係在產生波紋（moire)的狀態下以攝影裝置攝影 ' 顯示面板時之以CCD元件之各畫素檢測出的光的亮度位 。準的分佈之圖。 〇 圖6係顯示攝影裝置之CCD元件及顯示面板的各畫 素之對應狀態之模式圖。 圖7係使以攝影裝置接收的光藉由後聚焦使其分散時 之以CCD元件之各畫素檢測出的光的亮度位準的分佈之 圖。 圖8係於顯示面板產生顯示不均（mura)時之以CCD 元件之各畫素檢測出的光的亮度位準的分佈之圖。 圖9係槪略顯示相關於本發明的第2實施型態之顯示 © 面板檢查裝置的攝影裝置之構成圖。 _ 圖10係槪略顯示相關於本發明的第2實施型態之顯 示面板檢查裝置的濾光片安裝部之構成圖。 【主要元件符號說明】 1 :顯示面板檢查裝置 2 :攝影裝置 3 :影像處理裝置 4 :影像顯示裝置 -25- 200933134 5 :顯示面板 7 :透鏡系 8 :攝影元件 9 :焦點對準手段 1 〇 :後對焦調整手段 1 1 :面板控制部 - 1 2 :控制手段 1 3 :垂直移動機構 0 1 4 :透鏡支撐部 15 :暗室 1 6 :固定部 17 :移動部 1 9 :精密移動機構 20 :攝影元件支撐部 22 : LCD面板用電源 23 : LCD面板驅動訊號產生器 ◎ 27 :缺陷影像用監視器 2 8 :操作用監視器 3 〇 :光學濾光片 ' 31 :濾光片安裝部 3 2 :濾光片支撐部 3 3 :旋轉驅動馬達 3 4 :濾光片切換機構 3 6 :支撐腕部 -26-At this time, in the case where the filter Q mounting portion 31 of the optical filter 30 is manually exchanged, the operator directly attaches the optical filter 30 to the filter attaching portion 31. At this time, when the optical filter 30 is mounted on the illuminator mounting portion 31, it is first removed, and then a new optical filter is attached to the filter mounting portion 31. Next, when the switch or the sensor is provided, the micro-adjusting processing function of the control means 12 is automatically started, and the manual mode is employed without a switch or the like. Further, when the filter 31 is configured to automatically switch the optical filter 30, the rotary drive motor 33 is operated by the control of the filter switching mechanism 34 of the control means 12, and the filter supporting portion is operated. 32 is rotated, and a specific optical filter 30 is mounted between the lens unit 7 and the image pickup element 8. Next, the fine adjustment processing operation is enabled. Next, by the above-described fine adjustment processing function, the distance between the lens system 7 and the image pickup element 8 is finely adjusted to end the exchange operation of the optical filter 30. Thereafter, a normal inspection is performed in accordance with the display panel inspection device. -22- 200933134 As described above, the optical filter 30 having the required function is appropriately mounted or exchanged in the filter mounting portion 31, and the lens unit 7 and the aforementioned photographing are finely adjusted by the control means 12. Since the inspection light such as the removal of the noise light due to the function of the optical filter 30 is received by the imaging element 8, the distance between the elements 8 interacts with the function of the first embodiment. , high-precision inspection is possible. Further, since the filter mounting portion 31 is provided between the lens system 7 and the imaging element φ 8 and the optical filter 30 is mounted between the lens system 7 and the imaging element 8, the optical filter 3 can be mounted neatly. 0. That is, the size of the optical filter 30 can be reduced. Moreover, the optical filter 30 can maintain the same size regardless of the angle of the drawing. This is because the rear focusing portion expands the image once imaged inside the lens system 7 into the size of the imaging element 8. Thereby, the display panel inspection device can also be constructed in a compact manner. Further, since the optical filter 30 is small, it is possible to reduce the weight and cost.变形 (Modification) In the first embodiment described above, in the dispersion process, it is considered that the accuracy is lowered due to the decrease in the contrast, and the three pixels of the display panel 5 correspond to the CCD of the photographing device 2 In the manner of dispersing the light of the image, the light of the image may be dispersed in a manner corresponding to two or more pixels as long as the detection accuracy is ensured. That is, if the range of light dispersion is too large, the CCD of the LCD pixel corresponding to the adjacent address will also have light entering, and the defect itself will be dispersed and the contrast will be lowered, and it becomes impossible to detect -23-200933134 Since the possibility of the defect is generated, in the foregoing embodiment, the dispersion range of the light is set in a manner corresponding to the three pixels of the CCD. However, if the comparison is not lowered, the detection accuracy can be ensured, and two or more can be used. The way of the pixels disperses the light of the aforementioned image. In the first embodiment described above, the dispersion process is performed after the focus alignment process, but the focus alignment process may be performed after the dispersion process is performed depending on the type of the display panel 5. Depending on the display panel 5 to be inspected, the distance between the display panel 5 and the lens system 7 and the distance between the lens system 7 and the imaging element 8 may be known in advance. The focus alignment project and the decentralized engineering sequence are reversed. That is, it is also possible to perform an in-focus project after the dispersion process. In the second embodiment, the filter switching mechanism 34 is configured such that the optical drive 30 is switched by rotating the support portion 36 by the swing drive motor 33. However, other configurations are of course possible. For example, similarly to the juke box, the accommodating portion for accommodating the plurality of optical filters 30 and the optical filter 30 in the accommodating portion are automatically taken out and transported to the filter mounting portion 31. The structure of the transportation department. [Brief Description of the Drawings] Fig. 1 is a view showing a configuration of a photographing apparatus of a display panel inspection apparatus according to a first embodiment of the present invention. Fig. 2 is a block diagram showing a configuration of a display panel inspection apparatus according to a first embodiment of the present invention. Fig. 3 is an explanatory view showing the focus distances of the front focus and the back focus of the apparatus of the first embodiment of the present invention - 24 - 200933134. Fig. 4 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the image pickup device photographs the display panel. Fig. 5 is a view showing the luminance level of light detected by each pixel of the CCD element when the display panel is photographed by the photographing device in a state where moiré is generated. A map of the quasi-distribution. Fig. 6 is a schematic view showing the corresponding state of each pixel of the CCD element and the display panel of the photographing apparatus. Fig. 7 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the light received by the image pickup device is dispersed by back focusing. Fig. 8 is a diagram showing the distribution of the luminance level of light detected by each pixel of the CCD element when the display panel generates display mura. Fig. 9 is a view showing a configuration of a photographing apparatus of a panel inspection apparatus according to a second embodiment of the present invention. Fig. 10 is a view showing a configuration of a filter mounting portion of a display panel inspection device according to a second embodiment of the present invention. [Description of main component symbols] 1 : Display panel inspection device 2 : Photographic device 3 : Image processing device 4 : Image display device - 25 - 200933134 5 : Display panel 7 : Lens system 8 : Photographic element 9 : In-focus means 1 : Rear focus adjustment means 1 1 : Panel control unit - 1 2 : Control means 1 3 : Vertical movement mechanism 0 1 4 : Lens support part 15 : Dark room 1 6 : Fixing part 17 : Moving part 1 9 : Precision moving mechanism 20 : Photographic element support unit 22: LCD panel power supply 23: LCD panel drive signal generator ◎ 27: Defective image monitor 2 8 : Operation monitor 3 〇: Optical filter ' 31 : Filter mounting portion 3 2 : Filter support portion 3 3 : Rotary drive motor 3 4 : Filter switching mechanism 3 6 : Supporting wrist -26-