CN101451909B - Inspection method and inspection apparatus of display panel - Google Patents
Inspection method and inspection apparatus of display panel Download PDFInfo
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- CN101451909B CN101451909B CN2008101789442A CN200810178944A CN101451909B CN 101451909 B CN101451909 B CN 101451909B CN 2008101789442 A CN2008101789442 A CN 2008101789442A CN 200810178944 A CN200810178944 A CN 200810178944A CN 101451909 B CN101451909 B CN 101451909B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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Abstract
The present invention provides an inspection method and device for a display panel, which may quickly and correctly inspecting display unevenness of a display panel. The method and device use a pick-up member having a lens system and a pick-up element to pick up displayed image, and inspect the display unevenness of the display panel according to the picked up image. The inspection device comprises a focusing member for focusing relative to the display panel of the pick-up member; a dispersal member for dispersing light of the image by adjusting distance between the lens system and the pick-up element, thereby restraining Moire fringe generated when picking-up the displayed image on the display panel. A light filter installation section for installing optical light filter is provided between the lens system and the pick-up element.
Description
Technical field
The present invention relates to the inspection of display panels such as LCD, be particularly related to when the demonstration of checking display panel is inhomogeneous, be suppressed at the inspection method and the testing fixture that produce the display panel of Moire fringe (interference fringe) and shading when taking image shown on the display panel and showing this image.
Background technology
When display panels such as inspection LCD, known if take shown image on the display panel with the video camera (ccd video camera) that has used CCD, then can produce Moire fringe.This Moire fringe is that the brightness of the light that receives owing to the pixel of arranging in order to the lattice dot matrix of rule bit by bit changes regularly repeatedly and produces.Promptly, display panel, CCD arrange with the lattice dot matrix of rule as the pixel of the unit of display image to form, but because the relative position deviation between each pixel of each pixel of display panel and CCD, with bit by bit variation and can produce Moire fringe regularly repeatedly of the brightness of the light of the display panel of the pixel reception of CCD.
Because Moire fringe has very big gray scale difference, when the demonstration of checking display panel is inhomogeneous, can become obstacle, therefore need remove this Moire fringe.In this case, theoretically,, be zero to be very difficult but make this position deviation if there is not relative position deviation just can not produce Moire fringe between each pixel of each pixel of display panel and CCD.Therefore, usually as patent documentation 1,2 is put down in writing, by this image that has produced Moire fringe in the image of shooting is carried out Flame Image Process, thereby remove Moire fringe.
In addition, as patent documentation 3,4 is put down in writing, also make focusing a little fuzzy, prevent the generation of Moire fringe thus by video camera is moved horizontally with respect to display panel.
Have again, as patent documentation 5 is put down in writing, also can between video camera and display panel, insert scatter plate, in this case,, show inhomogeneous itself bluring but might also make though can make Moire fringe fuzzy by scatter plate.Therefore, as easier method, also can be by after lens combination and the distance between the display panel and focus (front focal length) of adjusting ccd video camera, mobile lens system (so-called " focusing is blured ") is taken the generation that suppresses Moire fringe a little.
In addition, as described in patent documentation 6, also have by removing the example of the processing of unwanted light at lens former configuration optical filter.For example, remove catoptrical PL optical filter in the setting of lens front, wait by near infrared IR cutoff filter (IR cutfilter) and remove unwanted light.
Patent documentation 1: 07-No. 146211 communiques of Japanese kokai publication hei
Patent documentation 2: 11-No. 352011 communiques of Japanese kokai publication hei
Patent documentation 3: 2005-No. 72816 communiques of TOHKEMY
Patent documentation 4: 11-No. 101712 communiques of Japanese kokai publication hei
Patent documentation 5: 11-No. 6786 communiques of Japanese kokai publication hei
Patent documentation 6: 2003-No. 344761 communiques of TOHKEMY
But, remove in the method for Moire fringe in the Flame Image Process of passing through of patent documentation 1,2, existing needs complex image processing program, its Flame Image Process needs the time, the checking efficiency variation is such problem.
In addition, in the method for patent documentation 3,4, existence need be used to make the precision that video camera moves horizontally under the state with respect to the display panel focusing exactly control, control that moving horizontally of this video camera needs the time, checking efficiency variation and cost increase such problem.
In addition, in the method that defocuss of patent documentation 5, there are the following problems: produce optical axis deviation when mobile lens system, perhaps the reason owing to repeatability that is difficult to guarantee the focal position and so on makes each display panel produce position deviation between video camera and display panel, perhaps the operability variation.
In addition, under the situation of lens former configuration optical filter, owing to, therefore, the shading phenomenon of four jiaos of deepenings of image occurred needing wide angle shot aspect the characteristic of 2 dimension testers.If consider that this shading phenomenon designs, then need to increase the diameter of optical filter self.In addition, corresponding with the optical filter diameter under the situation that the optical filter switching mechanism is set, the optical filter switching mechanism has also become greatly.And the resolution of display panel is high more, and is just unfavorable more aspect size, weight, cost.
Summary of the invention
The present invention makes for the problem that solves these conventional arts, it is a kind of when the demonstration of checking display panel is inhomogeneous that its purpose is to provide, can be simple and easy and suppress the generation of Moire fringe effectively and the inspection method and the testing fixture of the display panel of optical filter are installed compactly.
The present invention makes in view of the above problems, the inspection method of display panel involved in the present invention is the uneven method of demonstration of utilizing image shown on the shooting part shooting display panel with lens combination and imaging apparatus, checking above-mentioned display panel according to captured image, it is characterized in that this inspection method comprises following operation: the focusing operation that above-mentioned shooting part is focused with respect to above-mentioned display panel; By the distance of adjusting between said lens system and the above-mentioned imaging apparatus light of the above-mentioned image that incides above-mentioned imaging apparatus is scatter, thereby be suppressed at the dispersion step that produces Moire fringe when taking image shown on the above-mentioned display panel.
The testing fixture of the display panel that the present invention relates to comprises: the shooting part that is used to take image shown on the display panel; The Flame Image Process parts that the image of the above-mentioned display panel taken with above-mentioned shooting part is handled; Be used to show the image display part of the image of having handled by above-mentioned Flame Image Process parts, it is characterized in that, above-mentioned shooting part comprises: lens combination, imaging apparatus, the focusing parts of focusing with respect to the image of above-mentioned display panel by the said lens system is moved, by above-mentioned imaging apparatus being moved adjust the back focal length adjustment component of the distance between said lens system and the above-mentioned imaging apparatus, be used to control the control assembly of above-mentioned focusing parts and back focal length adjustment component, above-mentioned control assembly has following function: when the demonstration of checking above-mentioned display panel according to the image of taking with above-mentioned shooting part is inhomogeneous, and the focusing process function of focusing with respect to above-mentioned display panel by the above-mentioned focusing parts of controlling above-mentioned shooting part; Adjust distance between said lens system and the above-mentioned imaging apparatus by controlling above-mentioned back focal length adjustment component, the light that incides the above-mentioned image on the above-mentioned imaging apparatus is scatter, thereby be suppressed at the dispersion treatment function that produces Moire fringe when taking image shown on the above-mentioned display panel.
In addition, the testing fixture of above-mentioned display panel has the optical filter installation portion that is used to install optical filter between the lens combination of above-mentioned shooting part and imaging apparatus, above-mentioned control assembly preferably also has the inching processing capacity, in order to proofread and correct along with installing or change optical filter and the deviation of anaclastic focal length, come distance between inching said lens system and the above-mentioned imaging apparatus by controlling above-mentioned back focal length adjustment component.Above-mentioned optical filter installation portion preferably has the optical filter switching mechanism of a plurality of optical filters that automatically switch.
Suppressed the generation of above-mentioned Moire fringe owing to scattering, therefore can show uneven inspection reliably by the light that makes the above-mentioned image that receives by above-mentioned imaging apparatus.
In addition, the optical filter that will have desired function is suitably installed or is changed on the above-mentioned optical filter installation portion, and with the distance between above-mentioned control assembly inching said lens system and the above-mentioned imaging apparatus, receive the inspection light of having removed stray light etc. with above-mentioned imaging apparatus again, therefore can carry out high-precision inspection.
Description of drawings
Fig. 1 is the structural drawing of camera head of roughly representing the display panel testing fixture of the present invention's the 1st embodiment.
Fig. 2 is a structural drawing of roughly representing the display panel testing fixture of the present invention's the 1st embodiment.
Fig. 3 is the key diagram that schematically shows focal length about the front focal length of the camera head of the present invention's the 1st embodiment and back focal length.
Fig. 4 is the curve map that the brightness degree of the light of each pixel detection when being shown schematically in camera head shooting display panel, that use the CCD element distributes.
Fig. 5 is shown schematically under the state that produces Moire fringe curve map when taking display panel with camera head, that distribute with the brightness degree of the light of each pixel detection of CCD element.
Fig. 6 is the synoptic diagram of corresponding states of each pixel of expression CCD element of camera head and display panel.
Fig. 7 is shown schematically in curve map when utilizing back focal length that the light that is received by camera head is scatter, that distribute with the brightness degree of the light of each pixel detection of CCD element.
Fig. 8 is shown schematically on the display panel to produce to show curve map when inhomogeneous, that distribute with the brightness degree of the light of each pixel detection of CCD element.
Fig. 9 is the structural drawing of camera head of roughly representing the display panel testing fixture of the present invention's the 2nd embodiment.
Figure 10 is the structural drawing of optical filter installation portion of roughly representing the display panel testing fixture of the present invention's the 2nd embodiment.
Embodiment
Below, describe with reference to the preferred implementation of accompanying drawing the present application.
The 1st embodiment
Below the 1st embodiment of the present invention is described.
Fig. 1 is the structural drawing of camera head of roughly representing the display panel testing fixture of embodiment of the present invention, Fig. 2 is a structural drawing of roughly representing the display panel testing fixture, Fig. 3 is the key diagram that schematically shows focal length about the front focal length of the camera head of embodiment of the present invention and back focal length, when Fig. 4 is shown schematically in camera head shooting display panel, the curve map that distributes with the brightness degree of the light of each pixel detection of CCD element, Fig. 5 is shown schematically under the state that produces Moire fringe when taking display panel with camera head, the curve map that distributes with the brightness degree of the light of each pixel detection of CCD element, Fig. 6 is the synoptic diagram of corresponding states of each pixel of expression CCD element of camera head and display panel, Fig. 7 is shown schematically in when utilizing back focal length that the light that is received by camera head is scatter, with the curve map that the brightness degree of the light of each pixel detection of CCD element distributes, Fig. 8 is shown schematically in to produce on the display panel and shows when inhomogeneous, the curve map that distributes with the brightness degree of the light of each pixel detection of CCD element.
In the inspection method and testing fixture of display panel involved in the present invention, in order to carry out the inspection of display panel, particularly carry out the uneven inspections of various demonstrations such as point defect, taking image shown on the display panel with video camera (for example ccd video camera) when (comprising the various images that white shows), after the focusing of having carried out video camera, lens combination by changing video camera and the distance between the imaging apparatus (carrying out the adjustment of back focal length) are suppressed in the captured image and produce Moire fringe.
The display panel testing fixture
At first, the display panel testing fixture that is used to implement display panel inspection method of the present invention is described.
As shown in Figure 1, 2, display panel testing fixture 1 mainly is made of camera head 2, image processing apparatus 3 and image display device 4.
Lens combination 7 is above-mentioned display panel 5 in darkroom 15 and the optical devices that are used to adjust focus between the imaging apparatus 8.Lens combination 1 lens of 7 combinations or formations such as a plurality of lens, optical filter.Imaging apparatus 8 is the elements that are used for taking from the top display panel 5.Specifically, imaging apparatus 8 is made of the video camera that has used the CCD element.
Focusing parts 9 are said lens system 7 and imaging apparatus 8 to be moved integratedly and the parts of focusing with respect to the image of above-mentioned display panel 5.Focusing parts 9 are made of vertical movement mechanism 13 and lens support 14.
Back focal length adjustment component 10 is to be used for by imaging apparatus 8 being moved adjust the device at the interval between lens combination 7 and the imaging apparatus 8.Back focal length adjustment component 10 is made of accurate travel mechanism 19 and imaging apparatus support 20.Accurate travel mechanism 19 is used for by the state lower support imaging apparatus support 20 of the vertical piece 14A of lens support 14 supporting and mechanism that imaging apparatus support 20 is critically moved.The position of the imaging apparatus 8 by this imaging apparatus support 20 critically being moved adjust pixel spare support 20 supportings being shot, thereby inching back focal length.Accurate travel mechanism 19 is made of the straight-line motion mechanism that can adjust small displacement.The device of the position of energy such as ball screw framework, linear motor inching imaging apparatus 8 can be used as this straight-line motion mechanism.Imaging apparatus support 20 is the members that are used for directly supporting imaging apparatus 8.Imaging apparatus support 20 at the state lower support that is supporting imaging apparatus 8 in accurate travel mechanism 19, by come the interval between inching said lens system 7 and the above-mentioned imaging apparatus 8 with the position of accurate travel mechanism 19 inching imaging apparatus supports 20.
Panel control part 11 is made of with power supply 22 and LCD panel driving signal generator 23 the LCD panel.Utilize the LCD panel to use power supply 22, utilize the drive display panel 5 that produces at LCD panel driving signal generator 23 to display panel 5 supply powers.Thereby display panel 5 can be luminous, demonstrates the suitable image of checking usefulness.
Control assembly 12 is to be used to control the device that each one checks.Specifically, control assembly 12 is made of the computing machine with control function.In present embodiment,, make it have two kinds of functions of image processing apparatus 3 and control assembly 12 with 1 computing machine.In addition, also can constitute control assembly 12, constitute image processing apparatus 3 with other 1 computing machine with 1 computing machine.In addition, also can be other formation.
Control assembly 12 has focusing process function and dispersion treatment function at least.The focusing process function is when the demonstration of checking above-mentioned display panel 5 according to the image of being taken by above-mentioned camera head 2 is inhomogeneous, is used to control the processing capacity that the above-mentioned focusing parts 9 of above-mentioned camera head 2 are focused with respect to above-mentioned display panel 5.Focusing parts 9 do not move lens combination 7 in that the image with respect to above-mentioned display panel 5 carries out defocused by said lens system 7 and imaging apparatus 8 are moved integratedly, remain the distance between lens combination 7 and the display panel 5 constant.
The dispersion treatment function is to be used for adjusting distance between said lens system 7 and the above-mentioned imaging apparatus 8 light from the image of above-mentioned display panel 5 being scatter by controlling above-mentioned back focal length adjustment component 10, thereby is suppressed at the processing capacity that produces Moire fringe when taking image shown on the display panel 5.Specifically, this dispersion treatment function is controlled above-mentioned back focal length adjustment component 10 and is adjusted distance between said lens system 7 and the above-mentioned imaging apparatus 8, makes a plurality of (for example 3) pixel of the CCD of 1 pixel of above-mentioned display panel 5 and above-mentioned imaging apparatus 8 disperse the light of above-mentioned image accordingly.
Image processing apparatus 3 is to be used for the image of being taken by camera head 2 is handled and this image is shown in device on the image display device 4.Specifically, image processing apparatus 3 is made of the computing machine with image processing function.In the present embodiment, as previously discussed, 1 computing machine has the function of image processing apparatus 3 and control assembly 12.In addition, can on image processing apparatus 3, suitably connect keyboard 24, mouse 25.
Image display device 4 is to be used to show the device of being taken and being undertaken by image processing apparatus 3 view data of Flame Image Process by camera head 2.Image display device 4 is made of with monitor 28 with monitor 27 and operation defect image.Defect image is used to show the image of being taken and having been undertaken by image processing apparatus 3 surface of the display panel 5 after the dispersion treatment by camera head 2 with monitor 27.Operation is used for demonstration display panel 5 when the focusing of camera head 2 etc. with monitor 28.The operator is being while seeing that this operation carries out the operations such as focusing of camera head 2 with monitor 28, seeing defect image with monitor 27, check have or not on the display panel 5 show inhomogeneous.
The inspection method of display panel
Below, the inspection method of the display panel of the display panel testing fixture 1 that uses above structure is described.
The inspection method of the display panel of present embodiment is such method, promptly, use has the camera head 2 of the above-mentioned display panel testing fixture 1 of lens combination 7 and imaging apparatus 8 and takes shown image on the display panel 5, uses image processing apparatus 3 and image display device 4 to check that according to captured image the demonstration of above-mentioned display panel 5 is inhomogeneous.
The inspection method of this display panel is made of focusing operation and dispersion step.
The focusing operation is the operation that above-mentioned camera head 2 is focused with respect to above-mentioned display panel 5.
Make lens combination 7 in the face of being installed under the state of the display panel 5 in the darkroom 15, control assembly 12 moves up and down moving part 17 by control focusing parts 9, adjust the position of lens combination 7 by lens support 14, thereby the focus of lens combination 7 and display panel 5 are coincided.
Dispersion step is the operation that the light of the image of above-mentioned display panel 5 is disperseed by the distance of adjusting between lens combination 7 and the imaging apparatus 8.
In dispersion step, under the state that the focus of lens combination 7 coincides with display panel 5 in above-mentioned focusing operation, by the distance of adjusting between said lens system 7 and the above-mentioned imaging apparatus 8 light of the image of above-mentioned display panel 5 is disperseed, be suppressed at thus and produce Moire fringe when taking image shown on the display panel 5.In this dispersion step, adjust said lens system 7 and above-mentioned imaging apparatus 8 distance, promptly adjust back focal length, make 3 pixels of the CCD of 1 pixel of display panel 5 and imaging apparatus 8 disperse the light of above-mentioned image accordingly.
Below, the back focal length adjustment in the dispersion step is elaborated.
Generally speaking, as shown in Figure 3, in video camera, if the distance from the body that is taken (display panel 5) of reference object to lens combination (lens combination 7) is a, if from the lens combination to the imaging apparatus, (be CCD or egative film, in present embodiment is imaging apparatus 8) distance be b, if the focal length of lens is f, following relational expression (formula of lens) is set up.
1/a+1/b＝1/f
Usually, be called " focusing " with adjusting to the operation apart from a (adjustment front focal length) of lens from the body that is taken.
In the present embodiment, at video camera to defocused, promptly by after adjusting focus that front focal length makes video camera and the body that is taken (display panel 5) overlapping, will be from being taken body under the fixing state apart from a of lens combination 7, by adjusting from lens combination 7 to imaging apparatus the back focal length adjustment of 8 distance b, thereby suppress the generation of Moire fringe as described later.
Below the principle of inhibition Moire fringe of the present invention is described.
On display panel, particularly color liquid crystal display panel, be used to show that red (R), green (G), blue (B) each color pixel are that a group forms a display dot (point).
At this, make the display panel display white, be RGB all under the situation of Show Color, can consider with the CCD element testing of 3 imaging apparatuss 8 light from 1 pixel of display panel 5.If it is inhomogeneous not have demonstration on the display panel 5, then whole display panel 5 is luminous equably with a kind of color.At this moment, when taking display panel 5 with imaging apparatus 8, if location deviation not between each pixel of the CCD element of each pixel of display panel 5 and imaging apparatus 8, then as shown in Figure 4, brightness degree with the light of each pixel detection of CCD element changes regularly, should not have inhomogeneous between each pixel of display panel 5.In addition, Fig. 4 is the figure that schematically shows the state that the brightness degree rule with the light of each pixel detection of CCD element changes, projection shown in the top among the figure is represented the brightness degree of the light of the demonstration look that sends from display panel 5, and the histogram of the bottom among the figure is represented the brightness degree from the light of display panel 5 with each pixel detection of CCD.If display panel 5 does not exist demonstration inhomogeneous, then as shown in Figure 4, under the situation that makes display panel 5 display white, be input to and the brightness degree of the light of all pixels of the corresponding CCD of each pixel of display panel 5 should not exist inhomogeneous between each pixel of display panel 5.
And, if exist on the display panel 5 under the uneven situation of demonstration, is different from the brightness degree of the light that produces the light time that shows uneven pixel and with other pixel detection from the brightness degree that does not produce the light that shows uneven pixel with the pixel detection with the corresponding CCD of this pixel, therefore, it is inhomogeneous to detect the demonstration of display panel 5 according to the variation of this brightness degree.
In addition, between each pixel of the CCD of each pixel of display panel 5 and imaging apparatus 8 not under the situation of location deviation, the ratio of the brightness degree of the light that goes out with the pixel detection of CCD can not change, and can not produce Moire fringe yet.
But, location deviation between each pixel of the CCD of each pixel of display panel 5 and imaging apparatus 8 under the situation about in fact having, in this case, as shown in Figure 5, even on display panel 5, do not exist demonstration inhomogeneous, the ratio of the brightness degree of the light that goes out with the pixel detection of the CCD of imaging apparatus 8 also can become inhomogeneous on whole CCD, this becomes the reason that produces Moire fringe.For example, at the example of Fig. 5, the pixel shown in the curve map in left side is bright striped, and the pixel shown in the curve map on right side is dim striped.
As previously discussed, be that perhaps the front focal length adjustment by video camera suppresses Moire fringe, but is to suppress Moire fringe by the back focal length adjustment in the present invention by the generation of the such Moire fringe of Flame Image Process inhibition in the past.
Specifically,, utilize the accurate travel mechanism 19 of back focal length adjustment component 10 that imaging apparatus 8 is moved, the distance b between lens combination 7 and the imaging apparatus 8 is changed in case 7 pairs of the lens combinations of camera head 2 are defocused.As the amount that changes, be to 3 pixels of the CCD that makes imaging apparatus 8 and 1 corresponding position of pixel of display panel 5.That is, as shown in Figure 6, make distance b change to the position of detecting 1 the light that 3 pixels by RGB constitute with 9 CCD.In other words, imaging apparatus 8 is moved, the light from 1 pixel of the monochrome of display panel 5 is distributed on 3 CCD of imaging apparatus 8, that is to say, make the light of 3 pixels of the RGB of 1 point of self-forming to be distributed on 9 CCD and detect.
Consequently, as shown in Figure 7, not showing that inhomogeneous, whole display panel 5 turns white under the situation of coloured light equably not existing on the display panel 5, is constant with the brightness degree of the detected light of all CCD, the rule that can suppress brightness degree changes, thereby suppresses the generation of Moire fringe.As a result, can be because of Moire fringe does not produce dysopia, can only discern to have or not on the display panel 5 and show inhomogeneously, can detect the uneven situation that do not show exactly.
On the other hand, exist on the display panel 5 under the uneven situation of demonstration, as following.That is, as shown in Figure 8, have under the situation that shows uneven defective on the surface of display panel 5, the brightness degree of this part is compared with other parts to some extent and is changed.And, since brightness degree within a large range (3 CCD) change, therefore, can be easily and detect reliably with the CCD of imaging apparatus 8 owing to show the inhomogeneous difference that causes by the brightness of the light of display panel 5 generations.
Based on the detected value of the CCD of this imaging apparatus 8, show at the defect image of image display device 4 with monitor 27, by inspectoral vision or with the Flame Image Process of the comparison of threshold value detect show inhomogeneous.
Therefore, do not need to carry out complicated and time-consuming Flame Image Process, just can show uneven inspection reliably according to captured image.
In addition, carry out the back focal length adjustment owing to not carrying out the front focal length adjustment, therefore, as long as carry out the focusing of a lens combination 7, after this just do not need to make lens combination 7 to move, therefore, can not produce the optical axis deviation of video camera (camera head 2), in addition, the each replacing as the display panel 5 of checking object, do not need to carry out the focusing of video camera, can improve operability.
By above such operation, just can rapidly and carry out the uneven inspection of demonstration of display panel 5 exactly.
The 2nd embodiment
Below the 2nd embodiment of the present invention is described.
The testing fixture of the display panel of present embodiment has increased optical filter on the display panel testing fixture 1 of above-mentioned the 1st embodiment.Because one-piece construction is identical with the display panel testing fixture 1 of above-mentioned the 1st embodiment, therefore, at this, the Reference numeral that the identical components mark is identical, and omit its explanation, be that the center describes with the optical filter.
As shown in Figure 9, the display panel testing fixture of present embodiment is provided with the optical filter installation portion 31 that is used to install optical filter 30 between the lens combination 7 of camera head 2 and imaging apparatus 8.
Optical filter 30 uses the optical filter that possesses the desired function of display panel testing fixture.For example, from by near infrared IR cutoff filter, remove the optical filter that selection the optical filter that catoptrical PL optical filter, low pass filter (lowpass filter) etc. have various functions has the needed function of display panel testing fixture and install.
Optical filter installation portion 31 is the parts that are used to install optical filter 30.Optical filter installation portion 31 has the situation of manual replacing optical filter 30 and changes the situation of optical filter 30 automatically, constitutes optical filter installation portion 31 correspondingly.Optical filter installation portion 31 is installed on the vertical piece 14A of lens support 14, is used to support optical filter 30.
Under the situation of the structure of manually changing optical filter 30, this optical filter installation portion 31 constitutes and optical filter 30 tablings and this optical filter 30 is bearing in member between lens combination 7 and the imaging apparatus 8.In this case, have be used to detect switch or the sensor that new optical filter 30 has been installed on optical filter installation portion 31, the inching processing capacity of control assembly 12 described later is worked.
Structure at optical filter installation portion 31 is to change automatically under the situation of optical filter 30, and the structure of its optical filter installation portion 31 has the optical filter switching mechanism 34 that is made of optical filter support 32 and rotary driving motor 33 as shown in figure 10.Optical filter support 32 is provided with 3 supporting arms 36 that are used to support optical filter 30, supports 3 optical filters 30 simultaneously with each supporting arm 36.Optical filter support 32 is adapted to and makes the optical filter 30 that is supported by its supporting arm 36 between lens combination 7 and imaging apparatus 8.In addition, supporting arm 36 also can be provided with more than 4.Rotary driving motor 33 suitably rotates optical filter support 32.This rotary driving motor 33 is connected with above-mentioned control assembly 12.In this case, control assembly 12 is set for and after installing or changing optical filter 30 the inching processing capacity is worked automatically.
Above-mentioned control assembly 12 also has the inching processing capacity of the distance between inching lens combination 7 and the imaging apparatus 8 except have the function that has illustrated in above-mentioned the 1st embodiment.This inching processing capacity is in order to proofread and correct along with installing or changing optical filter 30 and the deviation of anaclastic focal length, come the function of the distance between inching lens combination 7 and the imaging apparatus 8 by control back focal length adjustment component 10.In addition, control assembly 12 moves the optical filter 30 of regulation by the rotary driving motor 33 of control optical filter switching mechanism 34 between lens combination 7 and imaging apparatus 8, thereby changes the optical characteristics of display panel testing fixture.Promptly, constitute under the situation with optical filter switching mechanism 34 at optical filter installation portion 31, above-mentioned control assembly 12 makes supporting arm 36 rotations of optical filter support 32 by the rotary driving motor 33 of control optical filter switching mechanism 34, thereby makes selecteed optical filter 30 move between lens combination 7 and the imaging apparatus 8 and be bearing between lens combination 7 and the imaging apparatus 8.
The display panel testing fixture that as above, constitutes as below move.
Because the molar behavior of display panel testing fixture is identical with the display panel testing fixture 1 of above-mentioned the 1st embodiment, therefore, is that the center describes in this replacing operation with optical filter 30.
Prepare the different optical filter of multi-disc function as optical filter 30.From these a plurality of optical filters 30, select and the corresponding optical filter 30 of the desired function of display panel testing fixture, newly be installed on the optical filter installation portion 31, perhaps exchange with original optical filter 30.
At this moment, under the situation of the optical filter installation portion 31 that constitutes manual replacing optical filter 30, the operator is directly installed on optical filter 30 on the optical filter installation portion 31.At this moment, under original optical filter 30 is installed in situation on the optical filter installation portion 31, at first original optical filter 30 is unloaded down, then new optical filter 30 is installed on the optical filter installation portion 31.
Then, under situation, the above-mentioned inching processing capacity of control assembly 12 is worked, under the situation that does not possess switch etc., the above-mentioned inching processing capacity of control assembly 12 is worked with above-mentioned switch or sensor.
In addition, under the situation of the optical filter installation portion 31 that constitutes automatic replacing optical filter 30, control assembly 12 is controlled optical filter switching mechanisms 34 and is made rotary driving motor 33 work, thereby make 32 rotations of optical filter support, the optical filter of stipulating 30 is installed between lens combination 7 and the imaging apparatus 8.Then, above-mentioned inching processing capacity is worked.
Then, by the distance between above-mentioned inching processing capacity inching lens combination 7 and the imaging apparatus 8, change the end of job of optical filter 30.
After this, carry out common inspection by the display panel testing fixture.
According to the above, the optical filter 30 that will have desired function is suitably installed or is changed on the above-mentioned optical filter installation portion 31, and with the distance between control assembly 12 inching said lens systems 7 and the above-mentioned imaging apparatus 8, receive the inspection light of having removed stray light etc. with the function of optical filter 30 accordingly with above-mentioned imaging apparatus 8, therefore, can combine with the function of above-mentioned the 1st embodiment and carry out high-precision inspection.
In addition, because optical filter installation portion 31 is arranged between lens combination 7 and the imaging apparatus 8, optical filter 30 is installed between lens combination 7 and the imaging apparatus 8, therefore optical filter 30 can be installed compactly.That is, can reduce the size of optical filter 30.And optical filter 30 is no matter how field angle can both become same size.This is because back focal length portion will Polaroid image stretching be the cause of the size of imaging apparatus 8 in the inside of lens combination 7.Therefore, also can volume little, constitute the display panel testing fixture compactly.In addition, because optical filter 30 diminishes, therefore also can realize lightweight and reduce cost.
Variation
In above-mentioned the 1st embodiment, consider that the reduction owing to contrast causes that precision reduces in above-mentioned dispersion step, make 3 pixels of the CCD of 1 pixel of display panel 5 and camera head 2 disperse the light of above-mentioned image accordingly, if but can guarantee accuracy of detection, the light of above-mentioned image also can be disperseed with the pixel more than 2 or 4 accordingly.Promptly, when the scope that light is disperseed is excessive, light also can enter into the corresponding CCD of LCD pixel with neighbor address, and defective itself is disperseed, and contrast reduces, defective might can not be detected, therefore, in the above-described embodiment, set the dispersion range of light accordingly with 3 pixels of CCD, but only otherwise reduce contrast and can guarantee accuracy of detection, also can disperse the light of above-mentioned image accordingly with the pixel more than 2 or 4.
In above-mentioned the 1st embodiment, though carry out dispersion step in focusing after the operation, according to the difference of the kind of display panel 5, the operation of also can after dispersion step, focusing.Owing to also know distance between this display panel 5 and the said lens system 7 and the distance between lens combination 7 and the above-mentioned imaging apparatus 8 sometimes in advance according to the display panel 5 of checking object, therefore in this case, also can will focus operation and dispersion step conversely.That is the operation of also can after dispersion step, focusing.
In above-mentioned the 2nd embodiment, make the rotation of supporting arm 36 and the structure of switchable optics optical filter 30 is self-evident though optical filter switching mechanism 34 become with rotary driving motor 33, also can be other structures.For example, also can be with juke-box similarly by the incorporating section of taking in a plurality of optical filters 30 with take out automatically that optical filter 30 in this incorporating section is carried and the delivery section that is installed on the optical filter installation portion 31 constitutes.
Claims (8)
1. the inspection method of a display panel, it is the uneven method of demonstration of utilizing image shown on the shooting part shooting display panel with lens combination and imaging apparatus, checking above-mentioned display panel according to captured image, it is characterized in that this inspection method comprises following operation:
The focusing operation that above-mentioned shooting part is focused with respect to above-mentioned display panel;
By the distance of adjusting between said lens system and the above-mentioned imaging apparatus light of the above-mentioned image that incides above-mentioned imaging apparatus is scatter, thereby be suppressed at the dispersion step that produces Moire fringe when taking image shown on the above-mentioned display panel.
2. the inspection method of display panel according to claim 1 is characterized in that,
Above-mentioned imaging apparatus is CCD, in above-mentioned dispersion step, adjusts the distance between said lens system and the above-mentioned CCD, makes 1 pixel of above-mentioned display panel and a plurality of pixels of above-mentioned CCD that the light of above-mentioned image is scatter.
3. the inspection method of display panel according to claim 2 is characterized in that, in above-mentioned dispersion step, makes 1 pixel of above-mentioned display panel and 3 pixels of above-mentioned CCD that the light of above-mentioned image is scatter.
4. the testing fixture of a display panel comprises:
Be used to take the shooting part of image shown on the display panel;
The Flame Image Process parts that the image of the above-mentioned display panel taken with above-mentioned shooting part is handled;
Be used to show the image display part of the image of having handled by above-mentioned Flame Image Process parts, it is characterized in that,
Above-mentioned shooting part comprises: lens combination, imaging apparatus, the focusing parts of focusing with respect to the image of above-mentioned display panel by the said lens system is moved, the back focal length adjustment component by above-mentioned imaging apparatus being moved adjust the distance between said lens system and the above-mentioned imaging apparatus, the control assembly that is used to control above-mentioned focusing parts and back focal length adjustment component
Above-mentioned control assembly has following function: when the demonstration of checking above-mentioned display panel according to the image of being taken by above-mentioned shooting part is inhomogeneous, control the above-mentioned focusing parts of above-mentioned shooting part and the focusing process function of focusing with respect to above-mentioned display panel; Adjust distance between said lens system and the above-mentioned imaging apparatus by controlling above-mentioned back focal length adjustment component, the light that incides the above-mentioned image on the above-mentioned imaging apparatus is scatter, thereby be suppressed at the dispersion treatment function that produces Moire fringe when taking image shown on the above-mentioned display panel.
5. the testing fixture of display panel according to claim 4 is characterized in that,
The above-mentioned imaging apparatus of above-mentioned shooting part is CCD;
Above-mentioned control assembly makes 1 pixel of above-mentioned display panel and a plurality of pixels of above-mentioned CCD that the light of above-mentioned image is scatter by the distance between above-mentioned back focal length adjustment component adjustment said lens system and the above-mentioned CCD.
6. the testing fixture of display panel according to claim 5 is characterized in that, above-mentioned control assembly makes 1 pixel of above-mentioned display panel and 3 pixels of above-mentioned CCD that the light of above-mentioned image is scatter.
7. the testing fixture of display panel according to claim 4 is characterized in that,
Between the lens combination of above-mentioned shooting part and imaging apparatus, has the optical filter installation portion that is used to install optical filter;
Above-mentioned control assembly also has the inching processing capacity, in order to proofread and correct along with installing or change above-mentioned optical filter and the deviation of anaclastic focal length, come distance between inching said lens system and the above-mentioned imaging apparatus by controlling above-mentioned back focal length adjustment component.
8. the testing fixture of display panel according to claim 7 is characterized in that, above-mentioned optical filter installation portion has the optical filter switching mechanism of a plurality of optical filters that automatically switch.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007314920 | 2007-12-05 | ||
| JP2007-314920 | 2007-12-05 | ||
| JP2007314920 | 2007-12-05 | ||
| JP2008-115844 | 2008-04-25 | ||
| JP2008115844 | 2008-04-25 | ||
| JP2008115844A JP2009156857A (en) | 2007-12-05 | 2008-04-25 | Display panel inspection method and inspection device |
Publications (2)
| Publication Number | Publication Date |
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| CN101451909A CN101451909A (en) | 2009-06-10 |
| CN101451909B true CN101451909B (en) | 2011-11-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2008101789442A Active CN101451909B (en) | 2007-12-05 | 2008-12-05 | Inspection method and inspection apparatus of display panel |
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| JP (1) | JP2009156857A (en) |
| KR (1) | KR20090059032A (en) |
| CN (1) | CN101451909B (en) |
| TW (1) | TWI390195B (en) |
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| JP5499295B2 (en) * | 2007-12-05 | 2014-05-21 | 株式会社日本マイクロニクス | Display panel inspection method and inspection apparatus |
| JP4865849B2 (en) * | 2009-12-16 | 2012-02-01 | シャープ株式会社 | Imaging condition determination device, imaging condition determination method, imaging condition determination program, computer-readable recording medium, and unevenness correction system including the imaging condition determination device |
| CN101996597B (en) * | 2009-08-18 | 2013-11-13 | 夏普株式会社 | Display device, correction system, forming device, determining device and method |
| JP5702634B2 (en) * | 2011-03-15 | 2015-04-15 | 株式会社日本マイクロニクス | Camera resolution automatic measurement method, automatic adjustment method, and image inspection method and apparatus |
| KR101306289B1 (en) | 2011-09-15 | 2013-09-09 | (주) 인텍플러스 | Method of inspecting plat panel |
| TWI512277B (en) * | 2013-01-04 | 2015-12-11 | Taiwan Power Testing Technology Co Ltd | Monitor inspection equipment |
| KR102149480B1 (en) * | 2013-10-31 | 2020-10-14 | 엘지디스플레이 주식회사 | Method and apparatus for compensating a mura of display device |
| CN103645036B (en) * | 2013-12-30 | 2017-07-18 | 京东方科技集团股份有限公司 | Moire fringes assessment method and assessment device |
| CN104867429B (en) * | 2014-02-25 | 2018-02-06 | 台湾动力检测科技股份有限公司 | The detection device of display |
| CN104111547B (en) * | 2014-05-23 | 2017-10-27 | 苏州日和科技有限公司 | A kind of colored filter automatic switching control equipment |
| EP3171588B1 (en) * | 2014-07-15 | 2020-04-15 | IIX, Inc. | Image processing method and image processing apparatus executing that image processing method |
| CN105654898B (en) * | 2016-02-25 | 2018-09-21 | 西安诺瓦电子科技有限公司 | Image capture device is imaged moire fringes suppressing method and its application |
| CN106292003B (en) * | 2016-08-16 | 2019-08-16 | 凌云光技术集团有限责任公司 | A kind of automatic adjusting method for optical detection LCD screen, apparatus and system |
| CN108254160A (en) * | 2016-12-29 | 2018-07-06 | 天津梦祥原科技有限公司 | A kind of rapid measurement device for measuring display screen coloration |
| CN106596563A (en) * | 2016-12-30 | 2017-04-26 | 镇江苏仪德科技有限公司 | Solar battery cell machine vision detection platform |
| WO2018176261A1 (en) * | 2017-03-29 | 2018-10-04 | 深圳配天智能技术研究院有限公司 | Method for determining detection parameter, and detection device |
| CN108918533B (en) * | 2018-06-27 | 2024-04-05 | 武汉精测电子集团股份有限公司 | Full-automatic Demura multiaxis detection mechanism |
| KR101954089B1 (en) * | 2018-08-21 | 2019-03-06 | (주)트라이시스 | System for inspecting mura of display panel |
| KR102667359B1 (en) * | 2018-12-04 | 2024-05-21 | 삼성디스플레이 주식회사 | Inspection apparatus and method of driving the same |
| CN111182296B (en) * | 2020-01-03 | 2021-08-27 | 歌尔光学科技有限公司 | Detection device and detection method of camera module and storage medium |
| KR102608202B1 (en) * | 2021-11-11 | 2023-12-01 | 서울대학교산학협력단 | UV-VIS-NIR spectroscopic analyzer for measuring transmittance |
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- 2008-10-17 TW TW097140013A patent/TWI390195B/en not_active IP Right Cessation
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| Publication number | Publication date |
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| CN101451909A (en) | 2009-06-10 |
| TWI390195B (en) | 2013-03-21 |
| KR20090059032A (en) | 2009-06-10 |
| JP2009156857A (en) | 2009-07-16 |
| TW200933134A (en) | 2009-08-01 |
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