TWI390195B - Inspection method and inspection apparatus of display panel - Google Patents
Inspection method and inspection apparatus of display panel Download PDFInfo
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- TWI390195B TWI390195B TW097140013A TW97140013A TWI390195B TW I390195 B TWI390195 B TW I390195B TW 097140013 A TW097140013 A TW 097140013A TW 97140013 A TW97140013 A TW 97140013A TW I390195 B TWI390195 B TW I390195B
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- 238000007689 inspection Methods 0.000 title claims description 60
- 238000000034 method Methods 0.000 title claims description 32
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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Description
本發明係關於液晶顯示器等之液晶面板的檢查者，特別是關於在顯示面板的顯示不均的檢查，抑制在攝影被顯示於顯示面板的影像而進行顯示時產生波紋(干涉紋)以及機械漸暈(Kerare,mechanical vignetting)之顯示面板的檢查方法及檢查裝置。The present invention relates to an inspector of a liquid crystal panel such as a liquid crystal display, and more particularly to an inspection of display unevenness on a display panel, and suppresses generation of ripples (interference patterns) and mechanical gradation when displaying an image displayed on a display panel. Kerala (mechanical vignetting) display panel inspection method and inspection device.
於液晶顯示器等顯示面板之檢查，已知使被顯示於顯示面板的影像，以使用CCD之照相機(CCD照相機)攝影時，會發生波紋(moire)。此波紋，係由以規則的格子圖案排列之畫素來接收光線的光的亮度，反覆有規則地些微變化所產生。亦即，顯示面板與CCD都一樣其顯示影像的單位之畫素係以規則的格子圖案來排列，在顯示面板之各畫素與CCD之各畫素之間隨著相對的位置偏移而使得在CCD之畫素受光的顯示面板的光的亮度反覆有規則地些微變化因而產生波紋。In the inspection of a display panel such as a liquid crystal display, it is known that when an image displayed on a display panel is photographed by a CCD camera (CCD camera), moiré occurs. This corrugation is produced by the brightness of the light received by the pixels arranged in a regular lattice pattern, with a slight change in the regularity. That is, the display panel and the CCD are the same, and the pixels of the unit of the display image are arranged in a regular grid pattern, and the relative positions of the pixels of the display panel and the pixels of the CCD are offset. The brightness of the light on the display panel of the pixel of the CCD is periodically slightly changed to cause ripples.
波紋有大的濃淡差，對於進行顯示面板的顯示不均的檢查時造成妨礙，有必要除去此波紋。於此場合，理想上(理論上)只要消除顯示面板的各畫素與CCD之各畫素之間的相對的位置偏移即可使波紋不再產生，但是要使此位置偏移量為零是困難的。因此，通常如專利文獻1、2所記載的，對攝得的影像上產生的波紋，藉由影像處理此一影像而進行波紋的除去。The corrugations have a large difference in shading, which is an obstacle to the inspection of uneven display of the display panel, and it is necessary to remove the corrugations. In this case, ideally (theoretically) the ripple is no longer generated as long as the relative positional offset between each pixel of the display panel and each pixel of the CCD is eliminated, but the positional offset is zero. It is difficult. Therefore, as described in Patent Documents 1 and 2, the corrugation generated on the captured image is usually removed by image processing of the image.
此外，如專利文獻3、4所記載的，係在攝影時對顯示面板水平移動照相機而使焦點些微地失焦以防止波紋的發生。Further, as described in Patent Documents 3 and 4, the camera is horizontally moved to the display panel at the time of shooting to defocus the focus slightly to prevent the occurrence of ripples.
進而，如專利文獻5所記載的，係在照相機與顯示面板之間***散射板，但是在此場合，雖可藉由散射板而使波紋模糊，但是有可能使顯示不均自身也跟著變模糊。在此，作為更簡便的方法，可以在調整CCD照相機的透鏡系與顯示面板之間的距離而進行焦點對準(前對焦)之後，藉由使透鏡系稍微移動(所謂的「使焦點模糊」)而攝影以抑制波紋的發生。Further, as described in Patent Document 5, a scattering plate is inserted between the camera and the display panel. However, in this case, the ripple can be blurred by the scattering plate, but the display unevenness itself may be blurred. . Here, as a simpler method, after the focus (prefocus) is adjusted by adjusting the distance between the lens system of the CCD camera and the display panel, the lens system is slightly moved (so-called "focus blur"). ) photography to suppress the occurrence of ripples.
此外，如專利文獻6那樣，亦有在透鏡前面配置光學濾光片而進行取除不要的光的處理之例。例如把除去反射光的PL濾光片，或是遮掉近紅外線之濾紅外光(IR-cut)濾光片等設置在透鏡前面，除去不要的光。Further, as in Patent Document 6, there is an example in which an optical filter is disposed in front of the lens to perform removal of unnecessary light. For example, a PL filter that removes reflected light or an IR-cut filter that blocks near-infrared light is placed in front of the lens to remove unnecessary light.
[專利文獻1]日本專利特開平07-146211號公報[Patent Document 1] Japanese Patent Laid-Open No. Hei 07-146211
[專利文獻2]日本專利特開平11-352011號公報[Patent Document 2] Japanese Patent Laid-Open No. Hei 11-352011
[專利文獻3]日本專利特開2005-72816號公報[Patent Document 3] Japanese Patent Laid-Open Publication No. 2005-72816
[專利文獻4]日本專利特開平11-101712號公報[Patent Document 4] Japanese Patent Laid-Open No. Hei 11-101712
[專利文獻5]日本專利特開平11-6786號公報[Patent Document 5] Japanese Patent Laid-Open No. Hei 11-6786
[專利文獻6]日本專利特開2003-344761號公報[Patent Document 6] Japanese Patent Laid-Open Publication No. 2003-344761
然而，在專利文獻1、2之藉由影像處理而除去波紋的方法，必須要複雜的影像處理程式，該影像處理很耗時間，有檢查效率很差的問題。However, in the methods of removing the corrugations by image processing in Patent Documents 1 and 2, a complicated image processing program is required, which is time consuming and has a problem of poor inspection efficiency.
此外，在專利文獻3、4之方法，對顯示面板對準焦點的狀態下要正確地水平移動照相機必須要有精密的控制，除了該照相機之水平移動控制相當花時間檢查效率很差以外，還有成本很高的問題。Further, in the methods of Patent Documents 3 and 4, it is necessary to have precise control to correctly move the camera horizontally in a state in which the display panel is in focus, except that the horizontal movement control of the camera takes considerable time to check the efficiency, and There are high cost issues.
此外，對專利文獻5使焦點模糊的方法，由於移動透鏡系時發生光軸偏移，或者很難確保焦點距離的再現性等理由，使得在各顯示面板產生照相機與顯示面板之間的位置偏移，而有作業性很差的問題。Further, in the method of blurring the focus of Patent Document 5, since the optical axis shift occurs when the lens system is moved, or the reproducibility of the focal length is hard to be ensured, the positional deviation between the camera and the display panel is generated in each display panel. Moved, and there is a problem of poor workability.
此外，於透鏡前面配置光學濾光片的場合，由於2次元測試器的特性，必須要進行廣角攝影，所以會引起在影像的四角變暗的機械漸暈(Kerare,mechanical vignetting)現象。考慮此機械漸暈現象而進行設計的話，有必要使濾光片自身增大。此外，設置濾光片切換機構的場合，配合著濾光片直徑使得濾光片切換機構也變大。接著，隨著顯示面板的解析度越高，尺寸、重量、成本等方面都變得不利。Further, when an optical filter is disposed in front of the lens, since the characteristics of the two-dimensional tester are required to be wide-angled, a mechanical vignetting phenomenon in which the four corners of the image are darkened is caused. When designing in consideration of this mechanical vignetting phenomenon, it is necessary to increase the filter itself. Further, when the filter switching mechanism is provided, the filter switching mechanism is also increased in accordance with the filter diameter. Then, as the resolution of the display panel is higher, dimensions, weight, cost, and the like are disadvantageous.
本發明之目的在於解決這些從前的技術課題，提供在檢查顯示面板的顯示不均時，可以簡易而且有效果地抑制波紋的產生，同時可精簡地安裝光學濾光片之顯示面板之檢查方法及檢查裝置。An object of the present invention is to solve the problems of the prior art, and to provide a method for inspecting a display panel in which an optical filter can be mounted in a simple and effective manner while inspecting display unevenness of a display panel, and which can be easily and effectively suppressed. Check the device.
本發明係有鑑於前述課題而為者，相關於本發明之顯示面板之檢查方法，係藉由具備透鏡系與攝影元件之攝影手段攝影被顯示於顯示面板的影像，由攝得的影像檢查前述顯示面板之顯示不均(mura)之檢查方法，其特徵為具備：前述攝影手段之對前述顯示面板進行焦點對準之焦點對準工程，及藉由調整前述透鏡系與前述攝影元件之間的距離使入射至前述攝影元件的前述影像之光分散而抑制攝影被顯示於前述顯示面板的影像時之波紋(moire)發生之分散工程。The present invention has been made in view of the above-mentioned problems. In the inspection method of the display panel according to the present invention, the image displayed on the display panel is imaged by the imaging means including the lens system and the imaging element, and the image is inspected from the captured image. A method for inspecting display unevenness (mura) of a display panel, comprising: focusing on an in-focus of the display panel by the photographing means, and adjusting between the lens system and the photographing element The dispersion is performed by dispersing the light of the image incident on the imaging element and suppressing the occurrence of moiré when the image displayed on the display panel is imaged.
相關於本發明之顯示面板之檢查裝置，具備：攝影被顯示於顯示面板的影像之攝影手段，及處理藉由前述攝影手段攝得的前述顯示面板的影像之影像處理手段，以及顯示以前述影像處理手段處理過的影像之影像顯示手段；其特徵為：前述攝影手段，具備：透鏡系、攝影元件、使前述透鏡系移動而對前述顯示面板之影像進行焦點對準之焦點對準手段、使前述攝影元件移動而調整前述透鏡系與前述攝影元件之距離之後焦點調整手段、以及控制前述焦點對準手段及後焦點調整手段之控制手段；前述控制手段，具備：在從前述攝影手段攝得的影像來檢查前述顯示面板的顯示不均時，控制前述攝影手段之前述焦點對準手段對前述顯示面板進行焦點對準之焦點對準處理機能，以及藉由控制前述後焦點調整手段調整前述透鏡系與前述攝影元件之間的距離使入射至前述攝影元件的前述影像的光分散而抑制攝影被顯示於前述顯示面板的影像時產生波紋之分散處理機能。An inspection apparatus for a display panel according to the present invention includes: a photographing means for photographing an image displayed on the display panel; and an image processing means for processing an image of the display panel captured by the photographing means, and displaying the image An image display means for processing an image processed by the processing means, wherein the imaging means includes: a lens system, an imaging element, and an in-focus means for moving the lens system to focus an image of the display panel; a focus adjustment means for adjusting a distance between the lens system and the imaging element after the movement of the imaging element, and a control means for controlling the focus alignment means and the back focus adjustment means; wherein the control means is provided in the image pickup means The image is used to check the display unevenness of the display panel, and the focus alignment means for controlling the focus of the display means is controlled by the focus means of the image pickup means, and the lens system is adjusted by controlling the back focus adjustment means. The distance from the aforementioned photographic element causes incident to Processing function of generating a dispersion ripple when the image of said photographic light dispersing element to suppress the photographic image is displayed on the display panel.
此外，前述顯示面板之檢查裝置，最好是前述攝影手段之透鏡系與攝影元件之間，具有安裝光學濾光片之濾光片安裝部，前述控制手段，進而具備為了修正伴隨著前述光學濾光片的安裝或交換而由折射導致焦點的偏移，控制前述後焦點調整手段而微調整前述透鏡系與前述攝影元件之間的距離之微調整處理機能。前述濾光片安裝部，最好具備自動切換複數濾光片之濾光片切換機構。Further, in the inspection apparatus for the display panel, it is preferable that a filter mounting portion for mounting an optical filter is provided between the lens system of the imaging means and the imaging element, and the control means further includes an optical filter for correcting the optical filter. The micro-adjustment processing function of finely adjusting the distance between the lens system and the imaging element by controlling the offset of the focus by the refraction and the shift of the focus by the mounting or exchange of the light sheet. Preferably, the filter mounting portion includes a filter switching mechanism that automatically switches a plurality of filters.
因為藉由使以前述攝影元件受光的前述影像之光分散開而抑制前述波紋的產生，所以可確實進行顯示不均的檢查。Since the generation of the ripples is suppressed by dispersing the light of the image received by the image pickup element, the inspection of the display unevenness can be surely performed.
此外，可以將具備前述濾光片安裝部所要求的機能之光學濾光片適當地安裝或者交換，同時使以前述控制手段微調整前述透鏡系與前述攝影元件之間的距離而進行雜訊光等的除去之檢查光，以前述攝影元件受光而進行高精度的檢查。Further, the optical filter having the function required for the filter mounting portion can be appropriately mounted or exchanged, and the distance between the lens system and the imaging element can be finely adjusted by the control means to perform the noise light. The inspection light that has been removed is subjected to high-precision inspection by receiving light from the imaging element.
以下，參照圖面說明本發明之適切的實施型態。Hereinafter, a suitable embodiment of the present invention will be described with reference to the drawings.
[第1實施型態][First embodiment]
以下，說明本發明之第1實施型態。Hereinafter, a first embodiment of the present invention will be described.
圖1係概略顯示相關於本發明的第1實施型態之顯示面板檢查裝置的攝影裝置之構成圖。Fig. 1 is a view schematically showing the configuration of an image pickup apparatus relating to a display panel inspection device according to a first embodiment of the present invention.
圖2係概略顯示顯示面板檢查裝置之構成圖。Fig. 2 is a view schematically showing the configuration of a display panel inspection device.
圖3係模式顯示相關於本發明的第1實施型態之攝影裝置之關於前聚焦(front focus)及後聚焦(back focus)之焦點距離之說明圖。Fig. 3 is an explanatory view showing the focal lengths of the front focus and the back focus relating to the photographing apparatus of the first embodiment of the present invention.
圖4係以攝影裝置攝影顯示面板時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。Fig. 4 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the image pickup device photographs the display panel.
圖5係在產生波紋(moire)的狀態下以攝影裝置攝影顯示面板時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。圖6係顯示攝影裝置之CCD元件及顯示面板的各畫素之對應狀態之模式圖。圖7係使以攝影裝置接收的光藉由後聚焦使其分散時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。圖8係於顯示面板產生顯示不均(mura)時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。Fig. 5 is a view showing a distribution of luminance levels of light detected by respective pixels of a CCD element when a display panel is photographed by a photographing device in a state where moiré is generated. Fig. 6 is a schematic view showing a corresponding state of each pixel of the CCD element and the display panel of the photographing device. Fig. 7 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the light received by the photographing device is dispersed by back focusing. Fig. 8 is a view showing a distribution of luminance levels of light detected by respective pixels of the CCD element when display panel display unevenness (mura).
相關於本發明的顯示面板的檢查方法及檢查裝置，為了進行顯示面板的檢查，特別是進行點缺陷等種種的顯示不均的檢查，以照相機(例如CCD照相機)攝影被顯示於顯示面板的影像(包含白色顯示之種種影像)時進行照相機的焦點對準之後，藉由改變照相機的透鏡系與攝影元件之間的距離(進行後對焦的調整)，而抑制攝得的影像之波紋的產生。In the inspection method and inspection apparatus of the display panel according to the present invention, in order to perform inspection of the display panel, in particular, various types of display unevenness inspection such as point defects are performed, and an image displayed on the display panel is captured by a camera (for example, a CCD camera). After the focus of the camera is performed (including various images displayed in white), the generation of the ripple of the captured image is suppressed by changing the distance between the lens system of the camera and the imaging element (adjustment of the back focus).
[顯示面板檢查裝置][Display panel inspection device]
首先，說明供實施本發明之顯示面板檢查方法之顯示面板檢查裝置。First, a display panel inspection apparatus for carrying out the display panel inspection method of the present invention will be described.
顯示面板檢查裝置，如圖1、2所示主要由攝影裝置2、影像處理裝置3、與影像顯示裝置4所構成。As shown in FIGS. 1 and 2, the display panel inspection device is mainly composed of a photographing device 2, an image processing device 3, and a video display device 4.
攝影裝置2係攝影被顯示於成為檢查對象的顯示面板(液晶顯示面板)5之影像之攝影手段。此攝影裝置2，係由透鏡系7、攝影元件8、焦點對準手段9、後焦點調整手段10、面板控制部11、與控制手段12所構成。又，顯示面板5、透鏡系7以及攝影元件8，係被收容於暗室15內，遮蔽外光。The photographing device 2 captures an image capturing means that is displayed on the image of the display panel (liquid crystal display panel) 5 to be inspected. The imaging device 2 is composed of a lens system 7, an imaging element 8, an in-focus means 9, a back focus adjustment means 10, a panel control unit 11, and a control means 12. Further, the display panel 5, the lens system 7, and the imaging element 8 are housed in the dark room 15 to shield external light.
透鏡系7，在暗室15內係位於前述顯示面板5與攝影元件8之間供調整焦點之用的光學裝置。透鏡系7，係組合1個透鏡或複數透鏡、濾光片等而構成的。攝影元件8，係供由上方攝影顯示面板5之用的元件。攝影元件8具體而言係以使用CCD元件的照相機構成的。The lens system 7 is located in the dark room 15 between the display panel 5 and the imaging element 8 for adjusting the focus. The lens system 7 is configured by combining one lens, a complex lens, a filter, and the like. The photographic element 8 is an element for photographic display panel 5 from above. The photographic element 8 is specifically constituted by a camera using a CCD element.
焦點對準手段9，係使前述透鏡系7以及攝影元件8一體移動而對前述顯示面板5之影像進行焦點對準之手段。焦點對準手段9，係由垂直移動機構13、及透鏡支撐部14所構成。The in-focus means 9 is a means for causing the lens system 7 and the imaging element 8 to move integrally to focus the image of the display panel 5. The in-focus means 9 is composed of a vertical movement mechanism 13 and a lens support portion 14.
垂直移動機構13，被安裝於顯示面板檢查裝置1之裝置本體側，使透鏡系7及攝影元件8一體地在垂直方向上移動而對顯示面板5對準焦點之用的機構。此垂直移動機構13，係由被固定於裝置本體側支撐支撐部14的滑塊之固定部16，以及在被固定於透鏡支撐部14的狀態下可以在上下方向滑動地被支撐於固定部16之移動部17所構成。於固定部16，使移動部17移動於垂直方向上的機構(未圖示)被組入，支撐移動部17而使其移動於垂直方向。移動部17，支撐透鏡支撐部14而透過此透鏡支撐部14使透鏡系7移動於垂直方向。The vertical movement mechanism 13 is attached to the apparatus main body side of the display panel inspection device 1, and the lens unit 7 and the imaging element 8 are integrally moved in the vertical direction to align the display panel 5 with the focus. The vertical movement mechanism 13 is supported by the fixing portion 16 of the slider fixed to the support portion 14 on the apparatus main body side, and is slidably supported in the vertical direction in the state of being fixed to the lens support portion 14. The moving unit 17 is configured. In the fixing portion 16, a mechanism (not shown) that moves the moving portion 17 in the vertical direction is incorporated, and the moving portion 17 is supported and moved in the vertical direction. The moving portion 17 supports the lens supporting portion 14 and transmits the lens system 7 in the vertical direction through the lens supporting portion 14.
透鏡支撐部14，係供一起支撐透鏡系7與攝影元件8之構件。透鏡支撐部14，係由側面形狀被形成為L字形的縱板部14A，及由此縱板部14A之中間位置水平延伸出的橫板部14B所構成。透鏡系7在橫板部14B之下側以朝向顯示面板5的狀態被支撐。The lens supporting portion 14 is a member for supporting the lens unit 7 and the photographic element 8 together. The lens support portion 14 is composed of a vertical plate portion 14A having a side surface shape formed in an L shape, and a horizontal plate portion 14B extending horizontally at an intermediate position of the vertical plate portion 14A. The lens system 7 is supported on the lower side of the horizontal plate portion 14B toward the display panel 5.
後焦點調整手段10，係使攝影元件8移動而調整透鏡系7與攝影元件8之間隔之用的裝置。後焦點調整手段10，係由精密移動機構19、與攝影元件支撐部20所構成。精密移動機構19，係供在被支撐於透鏡支撐部14的縱板部14A的狀態下支撐攝影元件支撐部20而使其精密移動之用的機構。藉由使此攝影元件支撐部20精密地移動，而調整被支撐於攝影元件支撐部20的攝影元件8的位置微調整後焦點。精密移動機構19，係由可以調整微細距離的移動之直動機構所構成。作為此直動機構，可以使用球螺桿機構、線性馬達等之可調整攝影元件8的位置的所有裝置。攝影元件支撐部20，係供直接支撐攝影元件8之用的構件。攝影元件支撐部20，在支撐攝影元件8的狀態被支撐於精密移動機構19，藉由以精密移動機構19微調整其位置而微調整前述透鏡系7與前述攝影元件8之間隔。The back focus adjustment means 10 is a device for moving the imaging element 8 to adjust the interval between the lens system 7 and the imaging element 8. The back focus adjustment means 10 is composed of a precision moving mechanism 19 and a photographic element supporting unit 20. The precision moving mechanism 19 is a mechanism for supporting the imaging element supporting portion 20 to be precisely moved while being supported by the vertical plate portion 14A of the lens supporting portion 14. By precisely moving the photographic element supporting portion 20, the position of the photographic element 8 supported by the photographic element supporting portion 20 is adjusted to finely adjust the back focus. The precision moving mechanism 19 is constituted by a linear motion mechanism that can adjust the movement of the fine distance. As the linear motion mechanism, all the devices that can adjust the position of the imaging element 8 such as a ball screw mechanism or a linear motor can be used. The photographic element supporting portion 20 is a member for directly supporting the photographic element 8. The photographic element supporting portion 20 is supported by the precision moving mechanism 19 while supporting the photographic element 8, and the distance between the lens system 7 and the photographic element 8 is finely adjusted by finely adjusting the position of the precise moving mechanism 19.
面板控制部11，係由LCD面板用電源11，與LCD面板驅動訊號產生器23所構成。以LCD面板用電源22對顯示面板5供給電源，藉由以LCD面板驅動訊號產生器23產生的驅動訊號來驅動顯示面板5。藉此，顯示面板5發光，顯示適合檢查用的影像。The panel control unit 11 is composed of an LCD panel power supply 11 and an LCD panel drive signal generator 23. The display panel 5 is supplied with power by the LCD panel power supply 22, and the display panel 5 is driven by the driving signal generated by the LCD panel driving signal generator 23. Thereby, the display panel 5 emits light, and an image suitable for inspection is displayed.
控制手段12，係供控制各部進行檢查之用的裝置。控制手段12，具體而言係由具備控制機能的電腦所構成。在本實施型態，在1台電腦具有影像處理裝置3與控制手段12這兩種機能。又，以1台電腦構成控制手段12，而以另1台電腦構成影像處理裝置3亦可。此外，其他的構成亦可。The control means 12 is a device for controlling each part to perform inspection. The control means 12 is specifically constituted by a computer having a control function. In the present embodiment, the two functions of the image processing device 3 and the control means 12 are provided in one computer. Further, the control means 12 may be constituted by one computer, and the video processing apparatus 3 may be constituted by another computer. In addition, other configurations are also possible.
控制手段12至少具有焦點對準處理機能，及分散處理機能。焦點對準處理機能，係由以前述攝影裝置2攝得的影像檢查前述顯示面板5之顯示不均時，控制前述攝影裝置2的前述焦點對準手段9，而對前述顯示面板5進行焦點對準之用的處理機能。焦點對準手段9，使前述透鏡系7及攝影元件8一體移動而對前述顯示面板5之影像進行焦點對準後，不移動透鏡系7而使透鏡系7與顯示面板5之間的距離保持一定。The control means 12 has at least an in-focus processing function and a distributed processing function. In the focus processing function, when the display unevenness of the display panel 5 is inspected by the image captured by the image capturing device 2, the focusing means 9 of the image capturing device 2 is controlled, and the display panel 5 is focused on the focus. The processing power that is used. The in-focus means 9 moves the lens system 7 and the imaging element 8 integrally to focus the image of the display panel 5, and then maintains the distance between the lens system 7 and the display panel 5 without moving the lens system 7. for sure.
分散處理機能，係供控制前述後焦點調整手段10而調整前述透鏡系7與前述攝影元件8之間的距離使來自前述顯示面板5的影像之光分散藉以抑制在攝影被顯示於顯示面板5的影像時之波紋的產生的處理機能。此分散處理機能，具體而言，係控制前述後焦點調整手段10，調整前述透鏡系7與前述攝影元件8之距離，以前述顯示面板5之1個畫素對應於前述攝影元件8之CCD之複數個(例如3個)畫素的方式使前述影像之光分散。The dispersion processing function is for controlling the back focus adjustment means 10 to adjust the distance between the lens system 7 and the imaging element 8 so that the light of the image from the display panel 5 is dispersed to suppress the display of the image on the display panel 5. The processing function of the generation of ripples in the image. Specifically, the dispersion processing function controls the back focus adjustment means 10 to adjust the distance between the lens system 7 and the imaging element 8 such that one pixel of the display panel 5 corresponds to the CCD of the imaging element 8. A plurality of (for example, three) pixels are arranged to disperse the light of the aforementioned image.
影像處理裝置3，係供處理以攝影裝置2所攝得的影像，使其顯示於影像顯示裝置4之裝置。影像處理裝置3，具體而言係由具備影像處理機能的電腦所構成。在本實施型態，如前所述，在1台電腦具有影像處理裝置3與控制手段12之機能。此外，於影像處理裝置3，視需要連接鍵盤24或滑鼠25。The image processing device 3 is a device for processing an image captured by the photographing device 2 to be displayed on the image display device 4. The image processing device 3 is specifically constituted by a computer having an image processing function. In the present embodiment, as described above, the functions of the image processing device 3 and the control means 12 are provided in one computer. Further, in the image processing apparatus 3, the keyboard 24 or the mouse 25 is connected as needed.
影像顯示裝置4，係供顯示以攝影裝置攝影而以影像處理裝置3進行影像處理的影像資料之裝置。影像顯示裝置4，係由缺陷影像用監視器27、與操作用監視器28所構成。缺陷影像用監視器27，顯示以攝影裝置2攝影而以影像處理裝置8分散處理後之顯示面板5的表面的影像。操作用監視器28，在攝影裝置2之焦點對準等時候顯示顯示面板5。操作者邊看著此操作用監視器28邊進行攝影裝置2之焦點對準等操作，看著缺陷影像用監視器27，檢查顯示面板5是否有顯示不均。The video display device 4 is a device for displaying video data that is imaged by the image processing device 3 by the imaging device. The video display device 4 is composed of a defective video monitor 27 and an operation monitor 28. The defective image monitor 27 displays an image of the surface of the display panel 5 which is imaged by the image processing device 8 and is imaged by the image processing device 8. The operation monitor 28 displays the display panel 5 when the photographing device 2 is in focus or the like. The operator performs an operation such as focusing of the photographing device 2 while looking at the operation monitor 28, and looks at the defective image monitor 27 to check whether or not the display panel 5 has display unevenness.
[顯示面板之檢查方法][Inspection method of display panel]
其次，針對使用以上構成之顯示面板檢查裝置1之顯示面板之檢查方法加以說明。Next, an inspection method using the display panel of the display panel inspection device 1 configured as above will be described.
本實施型態之顯示面板之檢查方法，使用具備透鏡系7與攝影元件8之前述顯示面板檢查裝置1之攝影裝置2，攝影被顯示於顯示面板5之影像，由攝得的影像使用影像處理裝置3與影像顯示裝置4來檢查前述顯示面板5之顯示不均的方法。In the inspection method of the display panel of the present embodiment, the image pickup device 2 of the display panel inspection device 1 including the lens system 7 and the image pickup device 8 is used to image the image displayed on the display panel 5, and the captured image is processed using the image. The device 3 and the image display device 4 check the display unevenness of the display panel 5.
此顯示面板之檢查方法係由焦點對準工程，與分散工程所構成。The inspection method of this display panel is composed of an in-focus engineering and a distributed engineering.
焦點對準工程，係前述攝影裝置進行對前述顯示面板5的焦點對準之工程。The in-focus project is a process in which the aforementioned photographing device performs focus on the display panel 5.
對被安裝於暗室15內的顯示面板15在面臨透鏡系7的狀態下，控制手段12控制焦點對準手段9而使移動部17上下移動，透過透鏡支撐部14調整透鏡系7的位置，使透鏡系7的焦點對準於顯示面板5。When the display panel 15 mounted in the dark room 15 faces the lens system 7, the control means 12 controls the focus means 9 to move the moving portion 17 up and down, and the lens support portion 14 adjusts the position of the lens system 7 so that the position of the lens system 7 is adjusted. The focus of the lens system 7 is aligned with the display panel 5.
分散工程，係調整透鏡系7與攝影元件8之間的距離而使前述顯示面板5的影像的光分散的工程。The dispersion process is a process of adjusting the distance between the lens system 7 and the imaging element 8 to disperse the light of the image of the display panel 5.
在分散工程，係在前述焦點對準工程使透鏡系7的焦點聚焦於顯示面板5的狀態下，調整前述透鏡系7與前述攝影元件8之間的距離而使前述顯示面板5的影像的光分散，藉此抑制在攝影被顯示於顯示面板5的影像時發生波紋。在此分散工程，調整前述透鏡系7與前述攝影元件8之距離之後焦點，以顯示面板5之1個畫素對應於攝影元件8之CCD之3個畫素的方式使前述影像之光分散。In the dispersion process, the focus of the lens system 7 is focused on the display panel 5, and the distance between the lens system 7 and the imaging element 8 is adjusted to make the image of the display panel 5 light. Dispersion, thereby suppressing occurrence of waviness when photographing is displayed on the image of the display panel 5. In this dispersion process, the focus after the distance between the lens system 7 and the imaging element 8 is adjusted, and the light of the image is dispersed such that one pixel of the display panel 5 corresponds to the three pixels of the CCD of the imaging element 8.
以下，詳述分散工程之後焦點調整。Hereinafter, the focus adjustment after the dispersion process will be described in detail.
一般而言，於照相機，如圖3所示，以攝影對象之被攝體(顯示面板5)到透鏡系(透鏡系7)為止的距離為a、以透鏡系至攝影元件(CCD或透鏡，在本實施型態為攝影元件8)之距離為b、透鏡的焦點距離為f時，成立下列關係式(透鏡之公式)。Generally, in the camera, as shown in FIG. 3, the distance from the subject (display panel 5) of the photographic subject to the lens system (lens system 7) is a, and the lens is attached to the photographic element (CCD or lens, In the present embodiment, when the distance between the imaging element 8) is b and the focal length of the lens is f, the following relational expression (form of the lens) is established.
1/a＋1/b=1/f1/a+1/b=1/f
通常，把調整被攝體至透鏡系為止的距離a(調整前焦距)稱為「焦點對準」。Generally, the distance a (pre-adjustment focal length) until the subject is adjusted to the lens system is referred to as "in focus".
於本實施型態，藉由照相機的焦點對準，亦即前焦點調整來將照相機的焦點對準於被攝體(顯示面板5)後，藉由固定住被攝體至透鏡系7的距離a，而調整透鏡系7至攝影元件8的距離b之後焦點調整，而如後所述抑制波紋的產生。In the present embodiment, the focus of the camera is aligned with the subject (display panel 5) by the focus of the camera, that is, the focus adjustment, and the distance from the subject to the lens system 7 is fixed. a, while adjusting the distance b of the lens system 7 to the photographic element 8 after the focus adjustment, and suppressing the generation of the ripple as will be described later.
以下，說明本發明之波紋抑制的原理。Hereinafter, the principle of the ripple suppression of the present invention will be described.
於顯示面板，特別是彩色液晶顯示面板，分別顯示紅(R)、綠(G)、藍(B)之色的畫素成為一組而形成一個顯示點(dot)。In the display panel, in particular, the color liquid crystal display panel, pixels of red (R), green (G), and blue (B) colors are respectively displayed as a group to form a display dot (dot).
此處，考慮在使顯示面板顯示白色，亦即顯示RGB所有顏色的場合，來自顯示面板1之1個畫素的光以3個攝影元件8之CCD元件檢測的場合。如果在顯示面板5沒有顯示不均的話，顯示面板5全體會以單一顏色均勻發光。此時，以攝影元件8攝影顯示面板5時，如果顯示面板5之各畫素與攝影元件8之CCD元件之各畫素之間沒有位置偏移的話，如圖4所示，以CCD元件之各畫素檢側的光的亮度位準，應該不會規則地改變，而於每個顯示面板5的畫素出現分散(scattering)。又，在圖4係模式顯示以CCD元件之各畫素檢測出的光的亮度位準有規則地改變的狀態，顯示於圖中上部的山形顯示由顯示面板5所發出的顯示色的光的亮度位準，圖中下部之矩形圖(histogram)係以各畫素檢測出的來自顯示面板5的光的亮度位準。如果於顯示面板5不存在顯示不均，如此圖4所示，使顯示面板5進行白色顯示的場合，被輸入至對應於顯示面板5的各畫素之所有的CCD之畫素之光的亮度位準，應該沒有各顯示面板5的畫素之分散(scattering)。Here, in the case where the display panel is displayed in white, that is, when all the colors of RGB are displayed, the light from one pixel of the display panel 1 is detected by the CCD elements of the three imaging elements 8. If unevenness is not displayed on the display panel 5, the entire display panel 5 will uniformly emit light in a single color. At this time, when the display panel 5 is photographed by the photographing element 8, if there is no positional shift between each pixel of the display panel 5 and each pixel of the CCD element of the photographing element 8, as shown in FIG. 4, the CCD element is used. The brightness level of the light on each of the picture detection sides should not be changed regularly, and the pixels on each display panel 5 appear to be scattered. Further, in FIG. 4, the state in which the luminance level of the light detected by each pixel of the CCD element is regularly changed is displayed, and the mountain shape displayed on the upper portion of the figure displays the light of the display color emitted from the display panel 5. The brightness level, the lower histogram in the lower part of the figure is the brightness level of the light from the display panel 5 detected by each pixel. If there is no display unevenness on the display panel 5, as shown in FIG. 4, when the display panel 5 is displayed in white, the brightness of the light of the pixels of all the CCDs corresponding to the respective pixels of the display panel 5 is input. The level should be free of the scattering of the pixels of each display panel 5.
接著，如果在顯示面板5存在著顯示不均的場合，來自發生顯示不均的畫素之光為對應於此畫素的CCD之畫素所檢測出時之光的亮度位準，與檢測到的來自不產生顯示不均的畫素的光之其他的畫素之亮度位準會變得不同，由此亮度位準的變化，可以檢測出顯示面板5之顯示不均。Next, when there is display unevenness on the display panel 5, the light from the pixel in which the display unevenness occurs is the brightness level of the light detected by the pixel of the CCD corresponding to the pixel, and is detected. The brightness level of the other pixels from the light that does not cause the display unevenness may become different, and thus the display unevenness of the display panel 5 can be detected by the change in the brightness level.
此外，在顯示面板5之各畫素與攝影元件8之CCD之各畫素之間沒有位置偏移的場合，以CCD之畫素所檢測出的光的亮度位準的比率沒有變化，也沒有發生波紋。Further, when there is no positional shift between each pixel of the display panel 5 and each pixel of the CCD of the imaging element 8, the ratio of the luminance level of the light detected by the CCD pixel does not change, and there is no change. Ripple occurs.
然而，實際上在顯示面板5之各畫素與攝影元件8之CCD之各畫素之間會存在著位置偏移，此場合如圖5所示，即使於顯示面板5不存在著顯示不均，以攝影元件之CCD畫素所檢測出的光的亮度位準的比率在CCD全體會變得不均勻，此即為波紋發生的原因。例如，在圖5之例左側之圖所示的畫素為明亮的條紋，右側之圖所示的畫素變成暗色的條紋。However, there is actually a positional shift between each pixel of the display panel 5 and each pixel of the CCD of the photographic element 8. In this case, as shown in FIG. 5, even if there is no display unevenness on the display panel 5 The ratio of the brightness level of the light detected by the CCD pixel of the photographic element becomes uneven in the entire CCD, which is the cause of the occurrence of the ripple. For example, the pixels shown in the diagram on the left side of the example of Fig. 5 are bright stripes, and the pixels shown in the diagram on the right side become dark stripes.
如前所述，從前係藉由影像處理除去這樣的波紋的發生，或者藉由照相機之前焦距調整而抑制波紋。但在本發明係藉由後焦點調整來抑制波紋。As described above, the occurrence of such ripples is removed by image processing in the past, or the ripple is suppressed by the focal length adjustment of the camera. However, in the present invention, the ripple is suppressed by the back focus adjustment.
具體而言，一旦對準攝影裝置2之透鏡系7的焦點後，藉由後焦點調整手段10之精密移動機構19使攝影元件8移動，改變透鏡系7與攝影元件8之間的距離。作為改變之量，係成為顯示面板5之1個畫素對應攝影元件8之CCD之畫素3個的位置為止。亦即，如圖6所示，改變距離b，直到由RGB之3畫素所構成之1個點之光以9個CCD檢測出的位置為止。換句話說，使顯示面板5之單色1畫素的光分散於攝影元件8之3個CCD亦即是形成1個點(dot)的RGB3畫素所構成的光分散至9個CCD而進行檢測的方式使攝影元件8移動。Specifically, once the focus of the lens system 7 of the photographing device 2 is aligned, the precise moving mechanism 19 of the back focus adjusting means 10 moves the photographing element 8 to change the distance between the lens system 7 and the photographing element 8. The amount of change is such that one pixel of the display panel 5 corresponds to three positions of the CCD pixels of the imaging element 8. That is, as shown in FIG. 6, the distance b is changed until the position of the light of one dot composed of three pixels of RGB is detected by nine CCDs. In other words, the light constituting the monochromatic pixels of the display panel 5 is dispersed in the three CCDs of the imaging element 8, that is, the light composed of RGB3 pixels forming one dot is dispersed to nine CCDs. The manner of detection causes the photographic element 8 to move.
結果，如圖7所示，於顯示面板5沒有顯示不均，顯示面板5全體均勻地發出白色光的場合，以所有的CCD檢測出的光的亮度位準成為一定，抑制了亮度位準的規則性改變而抑制了波紋的發生。結果，沒有波紋所致視覺上的障礙，而可以僅僅辨識顯示面板5是否有顯示不均，可以正確地檢測出沒有顯示不均。As a result, as shown in FIG. 7, when the display panel 5 does not display unevenness and the entire display panel 5 emits white light uniformly, the luminance level of the light detected by all the CCDs is constant, and the luminance level is suppressed. Regular changes inhibit the occurrence of ripples. As a result, there is no visual obstacle due to the ripple, and it is possible to recognize only whether the display panel 5 has display unevenness, and it is possible to correctly detect that no display unevenness is present.
另一方面，在顯示面板5存在著顯示不均的場合變成後述情形。亦即，如圖8所示，於顯示面板5的表面有顯示不均的缺陷的場合，該部分的亮度位準與其他部分相比會有變化。而且，在廣範圍(3個CCD)其亮度位準改變，所以可以容易而且確實地以攝影元件8之CCD檢測出顯示不均導致顯示面板5所產生的光的亮度不同。On the other hand, when the display panel 5 has display unevenness, it will be described later. That is, as shown in FIG. 8, when there is a defect indicating unevenness on the surface of the display panel 5, the luminance level of the portion changes compared with other portions. Further, since the brightness level changes in a wide range (3 CCDs), it is possible to easily and surely detect the unevenness of the display by the CCD of the photographic element 8 to cause the brightness of the light generated by the display panel 5 to be different.
根據以此攝影元件8之CCD之檢測值顯示於影像顯示裝置4之缺陷影像用監視器27，根據檢查員的視覺或者根據與閾值比較之影像處理來檢測出顯示不均。The defect image monitor 27, which is displayed on the image display device 4 based on the detected value of the CCD of the imaging element 8, detects the display unevenness based on the visual of the examiner or based on the image processing compared with the threshold.
藉此，沒有必要進行複雜而且花時間的影像處理，可以由攝得的影像確實地進行顯示不均的檢查。Thereby, it is not necessary to perform complicated and time-consuming image processing, and it is possible to surely perform display unevenness detection from the captured image.
此外，因為不是進行前焦點調整而是進行後焦點調整，所以只要一度對準透鏡系的焦點，之後沒有必要移動透鏡系7，所以照相機(攝影裝置2)不會發生光軸偏離，此外沒有必要在每次交換檢查對象的顯示面板5都要進行照相機的對焦，生產性提高。Further, since the back focus adjustment is performed instead of the front focus adjustment, it is not necessary to move the lens system 7 once the focus of the lens system is once aligned, so that the camera (photographing device 2) does not have the optical axis deviation, and it is not necessary. The focus of the camera is performed every time the display panel 5 of the inspection object is exchanged, and productivity is improved.
藉由以上，可以迅速且正確地進行顯示面板的顯示不均的檢查。With the above, the display unevenness of the display panel can be quickly and accurately checked.
[第2實施型態][Second embodiment]
其次，說明本發明之第2實施型態。Next, a second embodiment of the present invention will be described.
本實施型態之顯示面板之檢查裝置，係於前述第1實施型態之顯示面板檢查裝置1追加光學濾光片。全體構成與前述第1實施型態之顯示面板檢查裝置1相同，所以相同構件賦予同一符號而省略其說明，以光學濾光片為中心進行說明。In the inspection panel of the display panel of the present embodiment, an optical filter is added to the display panel inspection device 1 of the first embodiment. The entire configuration is the same as that of the display panel inspection device 1 of the first embodiment, and the same members are denoted by the same reference numerals, and the description thereof will be omitted. The optical filter will be mainly described.
本實施型態之顯示面板檢查裝置，如圖9所示，在攝影裝置2之透鏡系7與攝影元件8之間，具有安裝著光學濾光片30的濾光片安裝部31。As shown in FIG. 9, the display panel inspection device of the present embodiment has a filter attachment portion 31 to which the optical filter 30 is attached between the lens system 7 of the imaging device 2 and the imaging element 8.
光學濾光片30，使用具備顯示面板檢查裝置所要求的機能之濾光片。例如，可以遮掉近紅外線之去IR(IR-cut)濾光片、除去反射光之PL(偏光)濾光片或者低通濾光片等具備種種機能的濾光片之中，選出並安裝具備顯示面板檢查裝置所必要的機能之濾光片。As the optical filter 30, a filter having a function required for a display panel inspection device is used. For example, it is possible to remove the near-infrared IR (IR-cut) filter, the PL (polarized) filter that removes the reflected light, or the filter that has various functions such as a low-pass filter, and select and install it. A filter that provides the functions necessary for the panel inspection device.
濾光片安裝部31，係供安裝光學濾光片30之部分。濾光片安裝部31，有以手動交換光學濾光片30的場合，及自動交換光學濾光片30的場合，因應這些而被構成。濾光片安裝部31，被安裝於透鏡支撐部14之縱板部14A，支撐光學濾光片30。The filter mounting portion 31 is a portion to which the optical filter 30 is mounted. The filter mounting portion 31 is configured such that the optical filter 30 is manually exchanged and the optical filter 30 is automatically exchanged. The filter attachment portion 31 is attached to the vertical plate portion 14A of the lens support portion 14 and supports the optical filter 30.
此濾光片安裝部31，在以手動交換光學濾光片30的構成的場合，被構成為嵌合於光學濾光片30而將此光學濾光片30支撐在透鏡系7與攝影元件8之間的構件。在此場合，具備檢測出在濾光片安裝部31安裝了新的光學濾光片30之開關或者感測器，藉由感測到新的光學濾光片30的安裝，而使後述之控制手段12的微調整處理機能動作亦可。When the optical filter 30 is manually exchanged, the filter mounting portion 31 is configured to be fitted to the optical filter 30, and the optical filter 30 is supported by the lens unit 7 and the imaging element 8. The components between. In this case, a switch or a sensor that detects that a new optical filter 30 is attached to the filter mounting portion 31 is provided, and the mounting of the new optical filter 30 is sensed, so that the control will be described later. The fine adjustment processing function of the means 12 can also be operated.
濾光片安裝部31自動交換光學濾光片30的場合，該濾光片安裝部31例如圖10所示，被構成為具備：濾光片支撐部32，旋轉驅動馬達33所構成的濾光片切換機構34。濾光片支撐部32，設有3個支撐光學濾光片30的支撐腕部36，以各支撐腕部36同時支撐3枚光學濾光片30。濾光片支撐部32，使以該支撐腕部36支撐的光學濾光片30位於透鏡系7與攝影元件8之間的方式被配設。又，支撐腕部36亦可設置4個以上。旋轉驅動馬達33，適當地旋轉濾光片支撐部32。此旋轉驅動馬達33，被連接於前述控制手段。在此場合，控制手段12，以在光學濾光片30之安裝或者交換後自動使微調整處理機能動作的方式被設定。When the optical filter mounting portion 31 automatically exchanges the optical filter 30, the filter mounting portion 31 is configured to include a filter supporting portion 32 and a filter formed by the rotational driving motor 33, as shown in FIG. Sheet switching mechanism 34. The filter supporting portion 32 is provided with three supporting arm portions 36 that support the optical filter 30, and each of the supporting arms portion 36 simultaneously supports the three optical filters 30. The filter supporting portion 32 is disposed such that the optical filter 30 supported by the supporting arm portion 36 is positioned between the lens unit 7 and the imaging element 8. Further, four or more support arms 36 may be provided. The drive motor 33 is rotated to appropriately rotate the filter support portion 32. This rotary drive motor 33 is connected to the aforementioned control means. In this case, the control means 12 is set such that the fine adjustment processing function is automatically operated after the optical filter 30 is mounted or exchanged.
前述控制手段12，除了前述第1實施型態所說明的機能以外，進而具備微調整透鏡系7與攝影元件8之間的距離之微調整處理機能。此微調整處理機能，係為了修正伴隨著光學濾光片30的安裝或交換而由折射導致的焦距偏移，而控制後焦點調整手段10而微調整透鏡系7與攝影元件8之間的距離之機能。進而，控制手段12，控制濾光片切換機構34之旋轉驅動馬達33，使特定之光學濾光片30移動於透鏡系7與攝影元件8之間，改變顯示面板檢查裝置之光學特性。亦即，被構成為濾光片安裝部31具備濾光片切換機構34的場合，前述控制手段12，控制濾光片切換機構34的旋轉驅動馬達33，使濾光片支撐部32的支撐腕部36旋轉，使被選擇的光學濾光片30移動而支撐於透鏡系7與攝影元件8之間。The control means 12 further includes a fine adjustment processing function for finely adjusting the distance between the lens system 7 and the imaging element 8 in addition to the functions described in the first embodiment. This fine adjustment processing function adjusts the distance between the lens unit 7 and the photographic element 8 by controlling the back focus adjustment means 10 in order to correct the focal length shift caused by the refraction accompanying the mounting or exchange of the optical filter 30. The function. Further, the control means 12 controls the rotation drive motor 33 of the filter switching mechanism 34 to move the specific optical filter 30 between the lens system 7 and the imaging element 8, and changes the optical characteristics of the display panel inspection device. In other words, when the filter attachment unit 31 is provided with the filter switching mechanism 34, the control means 12 controls the rotation drive motor 33 of the filter switching mechanism 34 to support the wrist of the filter support portion 32. The portion 36 is rotated to move the selected optical filter 30 to be supported between the lens unit 7 and the imaging element 8.
如以上所構成的顯示面板檢查裝置動作如後述。The operation of the display panel inspection device configured as described above will be described later.
顯示面板檢查裝置之全體動作與前述第1實施型態之顯示面板檢查裝置1同樣，所以在此處以光學濾光片30的交換作業為中心進行說明。Since the entire operation of the display panel inspection device is the same as that of the display panel inspection device 1 of the first embodiment, the description will be made focusing on the exchange operation of the optical filter 30.
作為光學濾光片30，準備複數枚機能不同的濾光片。由這些複數光學濾光片30之中選擇對應於顯示面板檢查裝置所要求的機能的光學濾光片30，新安裝於濾光片安裝部31，或者與既有的光學濾光片30交換。As the optical filter 30, a plurality of filters having different functions can be prepared. The optical filter 30 corresponding to the function required by the display panel inspection device is selected from among the plurality of optical filters 30, newly mounted on the filter mounting portion 31, or exchanged with the existing optical filter 30.
此時，在以手動交換光學濾光片30的構成之濾光片安裝部31的場合，作業者將光學濾光片30直接安裝於濾光片安裝部31。此時，計有的光學濾光片30被安裝於濾光片安裝部31的場合，首先將其拆下，其後將新的光學濾光片安裝於濾光片安裝部31。At this time, when the filter mounting portion 31 configured to manually exchange the optical filter 30 is used, the operator directly attaches the optical filter 30 to the filter mounting portion 31. At this time, when the optical filter 30 is mounted on the filter mounting portion 31, it is first removed, and then a new optical filter is attached to the filter mounting portion 31.
接著，具備前述開關或感測器的場合自動使控制手段12之前述微調整處理機能開始動作，不具有開關等的場合則採手動方式。Next, when the switch or the sensor is provided, the micro-adjusting processing function of the control means 12 is automatically started, and when there is no switch or the like, the manual mode is employed.
此外，自動交換光學濾光片30的構成之濾光片安裝部31的場合，藉由根據控制手段12之濾光片切換機構34之控制而使旋轉驅動馬達33動作，濾光片支撐部32被旋轉，而將特定的光學濾光片30安裝於透鏡系7與攝影元件8之間。接著，使前述微調整處理機能動作。Further, when the filter mounting portion 31 of the optical filter 30 is automatically exchanged, the rotary drive motor 33 is operated by the control of the filter switching mechanism 34 of the control means 12, and the filter supporting portion 32 is operated. The specific optical filter 30 is mounted between the lens unit 7 and the photographic element 8 while being rotated. Next, the fine adjustment processing operation is enabled.
接著，藉由前述微調整處理機能，微調整透鏡系7與攝影元件8之間的距離而結束光學濾光片30的交換作業。Next, by the above-described fine adjustment processing function, the distance between the lens system 7 and the imaging element 8 is finely adjusted to end the exchange operation of the optical filter 30.
此後，根據顯示面板檢查裝置進行通常的檢查。Thereafter, a normal inspection is performed in accordance with the display panel inspection device.
藉由以上所述，將具備所要求的機能之光學濾光片30於前述濾光片安裝部31適當地安裝或者交換，同時以控制手段12微調整前述透鏡系7與前述攝影元件8之間的距離，使因應於光學濾光片30的機能而進行了雜訊光的除去等之檢查光以前述攝影元件8受光，所以與前述第1實施型態之機能互起作用，可以進行高精度的檢查。As described above, the optical filter 30 having the required function is appropriately mounted or exchanged in the filter mounting portion 31, and the control unit 12 is used to finely adjust the relationship between the lens system 7 and the photographic element 8. The inspection light such as the removal of the noise light by the function of the optical filter 30 is received by the imaging element 8 so that the function of the first embodiment can interact with each other, and high precision can be performed. Check.
此外，把濾光片安裝部31設於透鏡系7與攝影元件8之間，將光學濾光片30安裝於透鏡系7與攝影元件8之間，所以可以精簡地安裝光學濾光片30。亦即，可以縮小光學濾光片30的尺寸。而且光學濾光片30，可以不管畫角多大都維持相同尺寸。這是因為後聚焦部，把在透鏡系7的內部一度成像之影像展開為攝影元件8的尺寸的緣故。藉此，顯示面板檢查裝置也同樣可以精簡地構成。此外，光學濾光片30變小，所以可以謀求輕量化以及成本的降低。Further, since the filter mounting portion 31 is provided between the lens system 7 and the imaging element 8, and the optical filter 30 is mounted between the lens system 7 and the imaging element 8, the optical filter 30 can be mounted neatly. That is, the size of the optical filter 30 can be reduced. Moreover, the optical filter 30 can maintain the same size regardless of the angle of the picture. This is because the rear focusing portion expands the image once imaged inside the lens system 7 into the size of the imaging element 8. Thereby, the display panel inspection device can also be constructed in a compact manner. Further, since the optical filter 30 is reduced, it is possible to reduce the weight and the cost.
(變形例)(Modification)
在前述第1實施型態，在前述分散工程，係考慮由於對比的降低而導致精度降低，以顯示面板5之1個畫素對應於攝影裝置2的CCD之3個畫素的方式使前述影像之光分散，但只要確保檢測精度，亦可以對應2個或者4個以上畫素的方式分散前述影像之光。亦即，使光分散的範圍太大的話，對應於相鄰的位址的LCD畫素之CCD也會有光進入，會有缺陷自身被分散而對比降低，變得無法檢測出缺陷的可能性，因此在前述實施型態以對應於CCD的3個畫素的方式設定光的分散範圍，但是只要對比不會降低可以確保檢測精度的話，亦可以對應2個或4個以上的畫素的方式使前述影像的光分散。In the first embodiment, in the dispersion process, the accuracy is lowered due to a decrease in contrast, and the image is displayed in such a manner that one pixel of the display panel 5 corresponds to three pixels of the CCD of the imaging device 2. The light is dispersed, but as long as the detection accuracy is ensured, the light of the image can be dispersed in a manner corresponding to two or more pixels. That is, if the range in which the light is dispersed is too large, the CCD of the LCD pixel corresponding to the adjacent address also has light entering, and the defect itself is dispersed and the contrast is lowered, and the possibility of detecting the defect cannot be detected. Therefore, in the foregoing embodiment, the dispersion range of the light is set so as to correspond to the three pixels of the CCD. However, if the comparison is not lowered, the detection accuracy can be ensured, and two or more pixels can be used. The light of the aforementioned image is dispersed.
在前述第1實施型態，在焦點對準工程之後進行分散工程，但是隨著顯示面板5的種類不同，亦可在分散工程之後進行焦點對準工程。隨著檢查對象之顯示面板5的不同，有時預先知道此顯示面板5與前述透鏡系7之間的距離以及透鏡系7與前述攝影元件8之間的距離，所以在此場合亦可使焦點對準工程與分散工程順序對調。亦即，在分散工程之後進行焦點對準工程亦可。In the first embodiment described above, the dispersion process is performed after the focus alignment process, but depending on the type of the display panel 5, the focus alignment process may be performed after the dispersion process. Depending on the display panel 5 to be inspected, the distance between the display panel 5 and the lens system 7 and the distance between the lens unit 7 and the imaging element 8 may be known in advance, so that the focus may also be achieved in this case. Alignment engineering and decentralized engineering are reversed. That is, the focus alignment process may be performed after the dispersion process.
在前述第2實施型態，係使濾光片切換機構34，成為以迴轉驅動馬達33旋轉支撐腕部36而切換光學濾光片30的構成，但是採其他的構成也當然可以。例如，與投幣式自動電唱機(juke box)同樣，亦可由收容複數光學濾光片30的收容部，以及自動取出此收容部內的光學濾光片30而搬送安裝於濾光片安裝部31的搬送部所構成。In the second embodiment, the filter switching mechanism 34 is configured such that the arm portion 36 is rotatably supported by the turning drive motor 33 to switch the optical filter 30. However, other configurations are of course possible. For example, similarly to the juke box, the accommodating portion that accommodates the plurality of optical filters 30 and the optical filter 30 in the accommodating portion are automatically taken out and transported to the filter mounting portion 31. The structure of the transport unit.
1．．．顯示面板檢查裝置1. . . Display panel inspection device
2．．．攝影裝置2. . . Photography device
3．．．影像處理裝置3. . . Image processing device
4．．．影像顯示裝置4. . . Image display device
5．．．顯示面板5. . . Display panel
7．．．透鏡系7. . . Lens system
8．．．攝影元件8. . . Photography component
9．．．焦點對準手段9. . . Focusing means
10．．．後對焦調整手段10. . . Rear focus adjustment
11．．．面板控制部11. . . Panel control unit
12．．．控制手段12. . . Control means
13．．．垂直移動機構13. . . Vertical moving mechanism
14．．．透鏡支撐部14. . . Lens support
15．．．暗室15. . . darkroom
16．．．固定部16. . . Fixed part
17．．．移動部17. . . Mobile department
19．．．精密移動機構19. . . Precision moving mechanism
20．．．攝影元件支撐部20. . . Photographic element support
22．．．LCD面板用電源twenty two. . . LCD panel power supply
23．．．LCD面板驅動訊號產生器twenty three. . . LCD panel drive signal generator
27．．．缺陷影像用監視器27. . . Defect image monitor
28．．．操作用監視器28. . . Operation monitor
30．．．光學濾光片30. . . Optical filter
31．．．濾光片安裝部31. . . Filter mounting section
32．．．濾光片支撐部32. . . Filter support
33．．．旋轉驅動馬達33. . . Rotary drive motor
34．．．濾光片切換機構34. . . Filter switching mechanism
36．．．支撐腕部36. . . Support wrist
圖1係概略顯示相關於本發明的第1實施型態之顯示面板檢查裝置的攝影裝置之構成圖。Fig. 1 is a view schematically showing the configuration of an image pickup apparatus relating to a display panel inspection device according to a first embodiment of the present invention.
圖2係概略顯示相關於本發明的第1實施型態之顯示面板檢查裝置之構成圖。Fig. 2 is a view schematically showing the configuration of a display panel inspection apparatus according to a first embodiment of the present invention.
圖3係模式顯示相關於本發明的第1實施型態之攝影裝置之關於前對焦(front focus)及後對焦(back focus)之對焦距離之說明圖。Fig. 3 is an explanatory view showing the focusing distances of the front focus and the back focus relating to the photographing apparatus of the first embodiment of the present invention.
圖4係以攝影裝置攝影顯示面板時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。Fig. 4 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the image pickup device photographs the display panel.
圖5係在產生波紋(moire)的狀態下以攝影裝置攝影顯示面板時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。Fig. 5 is a view showing a distribution of luminance levels of light detected by respective pixels of a CCD element when a display panel is photographed by a photographing device in a state where moiré is generated.
圖6係顯示攝影裝置之CCD元件及顯示面板的各畫素之對應狀態之模式圖。Fig. 6 is a schematic view showing a corresponding state of each pixel of the CCD element and the display panel of the photographing device.
圖7係使以攝影裝置接收的光藉由後聚焦使其分散時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。Fig. 7 is a view showing the distribution of the luminance level of light detected by each pixel of the CCD element when the light received by the photographing device is dispersed by back focusing.
圖8係於顯示面板產生顯示不均(mura)時之以CCD元件之各畫素檢測出的光的亮度位準的分佈之圖。Fig. 8 is a view showing a distribution of luminance levels of light detected by respective pixels of the CCD element when display panel display unevenness (mura).
圖9係概略顯示相關於本發明的第2實施型態之顯示面板檢查裝置的攝影裝置之構成圖。Fig. 9 is a view schematically showing the configuration of an image pickup apparatus of a display panel inspection device according to a second embodiment of the present invention.
圖10係概略顯示相關於本發明的第2實施型態之顯示面板檢查裝置的濾光片安裝部之構成圖。Fig. 10 is a view schematically showing the configuration of a filter mounting portion of a display panel inspection device according to a second embodiment of the present invention.
2．．．攝影裝置2. . . Photography device
7．．．透鏡系7. . . Lens system
8．．．攝影元件8. . . Photography component
9．．．焦點對準手段9. . . Focusing means
10．．．後對焦調整手段10. . . Rear focus adjustment
13．．．垂直移動機構13. . . Vertical moving mechanism
14．．．透鏡支撐部14. . . Lens support
14A．．．縱板部14A. . . Vertical plate
14B．．．橫板部14B. . . Horizontal plate
16．．．固定部16. . . Fixed part
17．．．移動部17. . . Mobile department
19．．．精密移動機構19. . . Precision moving mechanism
20．．．攝影元件支撐部20. . . Photographic element support
Claims (6)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007314920 | 2007-12-05 | ||
| JP2008115844A JP2009156857A (en) | 2007-12-05 | 2008-04-25 | Display panel inspection method and inspection device |
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| TW200933134A TW200933134A (en) | 2009-08-01 |
| TWI390195B true TWI390195B (en) | 2013-03-21 |
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| JP (1) | JP2009156857A (en) |
| KR (1) | KR20090059032A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5499295B2 (en) * | 2007-12-05 | 2014-05-21 | 株式会社日本マイクロニクス | Display panel inspection method and inspection apparatus |
| JP4865849B2 (en) * | 2009-12-16 | 2012-02-01 | シャープ株式会社 | Imaging condition determination device, imaging condition determination method, imaging condition determination program, computer-readable recording medium, and unevenness correction system including the imaging condition determination device |
| CN101996597B (en) * | 2009-08-18 | 2013-11-13 | 夏普株式会社 | Display device, correction system, forming device, determining device and method |
| JP5702634B2 (en) * | 2011-03-15 | 2015-04-15 | 株式会社日本マイクロニクス | Camera resolution automatic measurement method, automatic adjustment method, and image inspection method and apparatus |
| KR101306289B1 (en) | 2011-09-15 | 2013-09-09 | (주) 인텍플러스 | Method of inspecting plat panel |
| TWI512277B (en) * | 2013-01-04 | 2015-12-11 | Taiwan Power Testing Technology Co Ltd | Monitor inspection equipment |
| KR102149480B1 (en) * | 2013-10-31 | 2020-10-14 | 엘지디스플레이 주식회사 | Method and apparatus for compensating a mura of display device |
| CN103645036B (en) * | 2013-12-30 | 2017-07-18 | 京东方科技集团股份有限公司 | Moire fringes assessment method and assessment device |
| CN104867429B (en) * | 2014-02-25 | 2018-02-06 | 台湾动力检测科技股份有限公司 | The detection device of display |
| CN104111547B (en) * | 2014-05-23 | 2017-10-27 | 苏州日和科技有限公司 | A kind of colored filter automatic switching control equipment |
| KR102171232B1 (en) * | 2014-07-15 | 2020-10-28 | 아이아이엑스 인코포레이티드 | Image processing method and image processing apparatus executing that image processing method |
| CN105654898B (en) * | 2016-02-25 | 2018-09-21 | 西安诺瓦电子科技有限公司 | Image capture device is imaged moire fringes suppressing method and its application |
| CN106292003B (en) * | 2016-08-16 | 2019-08-16 | 凌云光技术集团有限责任公司 | A kind of automatic adjusting method for optical detection LCD screen, apparatus and system |
| CN108254160A (en) * | 2016-12-29 | 2018-07-06 | 天津梦祥原科技有限公司 | A kind of rapid measurement device for measuring display screen coloration |
| CN106596563A (en) * | 2016-12-30 | 2017-04-26 | 镇江苏仪德科技有限公司 | Solar battery cell machine vision detection platform |
| WO2018176261A1 (en) * | 2017-03-29 | 2018-10-04 | 深圳配天智能技术研究院有限公司 | Method for determining detection parameter, and detection device |
| CN108918533B (en) * | 2018-06-27 | 2024-04-05 | 武汉精测电子集团股份有限公司 | Full-automatic Demura multiaxis detection mechanism |
| KR101954089B1 (en) * | 2018-08-21 | 2019-03-06 | (주)트라이시스 | System for inspecting mura of display panel |
| KR102667359B1 (en) * | 2018-12-04 | 2024-05-21 | 삼성디스플레이 주식회사 | Inspection apparatus and method of driving the same |
| CN111182296B (en) * | 2020-01-03 | 2021-08-27 | 歌尔光学科技有限公司 | Detection device and detection method of camera module and storage medium |
| KR102608202B1 (en) * | 2021-11-11 | 2023-12-01 | 서울대학교산학협력단 | UV-VIS-NIR spectroscopic analyzer for measuring transmittance |
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| JP2009156857A (en) | 2009-07-16 |
| CN101451909A (en) | 2009-06-10 |
| TW200933134A (en) | 2009-08-01 |
| KR20090059032A (en) | 2009-06-10 |
| CN101451909B (en) | 2011-11-16 |
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