TW200819736A - Quality tester of glass board and method thereof - Google Patents

Quality tester of glass board and method thereof Download PDF

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Publication number
TW200819736A
TW200819736A TW96119422A TW96119422A TW200819736A TW 200819736 A TW200819736 A TW 200819736A TW 96119422 A TW96119422 A TW 96119422A TW 96119422 A TW96119422 A TW 96119422A TW 200819736 A TW200819736 A TW 200819736A
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Taiwan
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glass plate
illumination
image
glass
shadow
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TW96119422A
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Chinese (zh)
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TWI329200B (en
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Bong-Joo Woo
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Semisysco Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/69—Arrangements or methods for testing or calibrating a device

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)

Abstract

An apparatus for testing quality of a glass substrate is provided. The present invention uses an illumination portion to emit an illumination that penetrates the glass substrate only, a camera to shoot a vivid shadow image on a surface of the glass substrate, and a differential algorithm to determine whether a waveness is generated and to precisely test types of the waveness. Therefore, not only quality status of the glass substrates continuously conveyed by a conveying device are tested in real time to improve the quality, but also the time for testing the quality of the glass substrates is saved, which contributes to quickly complete a continuous process using plasma, such as vapor deposition, etching, or deposition.

Description

200819736 九、發明說明： 【發明所屬之技術領域】 本發明是關於測試在薄膜電晶體液晶顯示器 (TFT-LCD)中形成薄膜電晶體（TFT)及彩色濾光片（color 纽ter)所需之玻璃板是否發生波紋（Waveness)之玻璃板 的品質測試機。 【先前技術】 薄膜電晶體液晶顯示器大體由形成薄膜電晶體之下部 玻璃板、形成彩色濾光片之上部玻璃板以及注入下部玻璃 板與上部玻璃板之間的液晶構成。 就形成此種薄膜電晶體及彩色濾光片所需之玻璃板而 :，其表面若發生厚度形成不均之波紋現象，則無法在玻 祸板上均一地完成濾光片之氣相沈積或蝕刻，必將導致薄 膜電晶體液晶顯示器之液晶所表現之彩色發生異常，即， 造成發生變色之產品缺陷。 鲁 積、钱玄丨1志、:士接室你FS带總心200819736 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to testing for forming thin film transistors (TFTs) and color filters (TFTs) in a thin film transistor liquid crystal display (TFT-LCD). A quality tester for the glass plate in which the glass plate is corrugated. [Prior Art] A thin film transistor liquid crystal display is generally composed of a liquid crystal plate which forms a lower portion of a thin film transistor, a glass plate which forms an upper portion of a color filter, and a liquid crystal which is injected between the lower glass plate and the upper glass plate. In the case of forming the glass plate required for such a thin film transistor and a color filter: if the surface is unevenly formed with a corrugation phenomenon, the vapor deposition of the filter cannot be uniformly performed on the glass plate or Etching will inevitably lead to an abnormality in the color of the liquid crystal of the thin film transistor liquid crystal display, that is, a product defect causing discoloration. Lu Ji, Qian Xuanzhen 1 Zhi,: Shi Ji room, your FS belt

對此，先丽是在將玻璃板放入製程處理室進行氣相沈 〜別^敬％敬是否發生浊紐之烚杳枯I县太诂In this regard, Xianli is putting the glass plate into the process chamber for gas phase sedimentation~Do not pay attention to whether or not there is a turbidity

5 200819736 由此，自上述投影於螢幕之影子中，發生波紋之部分 與未發生波紋部分出現透光率差異（或光之相位差），呈^ 出或淺或深之曲折部分，作業者憑藉肉眼判斷是否發生 紋。 收 但疋’上述波紋檢查由於無法實現原地檢查之緣故， 不可能全數檢查，此外波紋檢查需藉由作業者肉眼直接確 認，不僅工序時間長，且亦存在波紋檢查可靠性大打 之缺點。 為此，本發明正是為解決如上先前問題而提出，其目 ，在於提供一種使用僅透過玻璃板的照明部之照明來測試 是否發生波紋的玻璃板之品質測試機。 1 【發明内容】 為達成上述目的，玻璃板之品質測試機是針對在 輸达裝置供應給製程設備時，在玻璃板移送狀態下即時使 =原地之K方式來檢查是否發生波紋，或在玻璃止 日寸即時檢查是否發生波紋的測試機。 面之測1=括:照明部，其提供穿過上述玻璃板表 面之ϋίί 述玻璃板之照明而發生的玻璃板表 之旦二：4二：及控制部’其自上述影像處理部所拍攝 之如子衫像，檢查破璃板表面是否發生波紋。5 200819736 Thus, from the above-mentioned projection in the shadow of the screen, the difference between the portion where the ripple occurs and the portion where the corrugation does not occur (or the phase difference of the light) is a tortuous portion of the light or the shallow or the deep, and the operator relies on The naked eye determines whether or not a grain has occurred. However, since the above-mentioned corrugated inspection cannot be performed in situ, it is impossible to inspect all of them. In addition, the corrugation inspection needs to be directly confirmed by the operator's naked eye, which not only has a long process time, but also has the disadvantage of high reliability of corrugation inspection. To this end, the present invention has been made to solve the above problems, and an object thereof is to provide a quality tester for testing a glass plate which is corrugated using only the illumination of the illumination portion of the glass plate. 1 [Summary of the Invention] In order to achieve the above object, the quality tester for the glass plate is for detecting the presence or absence of ripples in the K-mode of the glass plate when the delivery device is supplied to the process equipment, or The glass tester immediately checks for corrugated testers. The measurement of the surface 1 includes: an illumination unit that provides illumination of the glass plate through the surface of the glass plate, which occurs on the surface of the glass plate: 2:4: and the control unit's image taken from the image processing unit As a child's shirt, check the surface of the glass for ripples.

Lampt發明之另—特徵是：上述照明部為氙燈％ 之玻 本么月之3彳银是.為使透過上述玻璃板生成 6 20081973d 璃板表面之影子影像更鮮賴現，在上㈣ 使照明之照射方向僅侷限於麵板_隙結構。、、合 本發明之另—特徵是：藉由上述裂隙 板之照明照射角度⑻在18〜22。之範圍内。…射於破璃 包括而且’使用上述玻璃板之品質測試機實現之測試方法 4 办于〜像，步驟2，使上述獲得之 驟3，使贿分演算法對上錢形狀影i影像 割成相等間隔;步驟4，將關於玻璃板^ ρ::=ϊ ί條件應用於藉由上述微分分割成相等間 邊界條件之影像，判斷是否發生波纹；^用之 判斷結果若發生波紋，料區職波紋種類^ 6 ’上述 本發财僅能夠使射目機更鮮明地拍攝玻璃板表 =子影像’亦可藉由微分演算法更精密地根據上述影子与 像測試各個波紋種類是否發生。使用本發明，不僅可^ ^試藉由輸送裝置連續進行移送之玻璃板之品質狀能，以 提1對品質之滿意度’亦可藉由節省玻璃板品質測試所♦ 之時間，獲得迅速完成連續的氣相沈積、㈣或沈積等二 用電漿之製程的效果。 、 【實施方式】 下面參照附圖，說明本發明較佳實施例。 圖1是本發明實施例之玻璃板之品質測試機整體結構 7 200819736 圖，圖2是本發明實施例之在照明部已應用裂隙之狀態的 正面圖，圖3是本發明實施例之在橫向上測試玻璃板品質 之狀態的平面略圖。 圖4是使用本發明測試之波紋種類為條紋（:Stre此) _ 型之波紋波形圖，圖5是使用本發明測試之波紋種類為粗 條紋（Thick Band)型之波紋波形圖，圖6是使用本發明 測試之波紋種類為索（Cord)型之波紋波形圖，圖7是本 發明實施例之在玻璃板發生條紋型波紋狀態之實驗中檢測 馨 到之波形圖，圖8是本發明實施例之在玻璃板發生粗條紋 型波紋狀態之實驗中檢測到之波形圖，圖9是本發明實施 例之在玻璃板發生索型波紋狀態之實驗中檢測到之波形 圖，圖10是本發明實施例之在玻璃板同時發生波紋及粗條 紋型波紋狀態之實驗中檢測到之波形圖。 如圖1至圖10所示，本發明實施例之玻璃板之品質測 试機女I於薄膜電晶體液晶顯示器製造所需之氣相沈積、 餘刻或沈積製程等使用電漿之製程設備流入侧閘閥前方。 • 品質測試機用於使用原地測試方式即時測試由滾筒所構成 之輸送裝置（1)所輸送之玻璃板（2)是否發生波紋，或 - 在玻璃板（2)停止時，即時測試其是否發生波紋。品質測 • 咸機包括照明部（1 〇 )、影像處理部（20 )以及控制部（30 )。 上述明部為透過玻璃板（2)表面照射照明之氣燈， 其是以既定角度（Θ)安裝於由滾筒構成之用以輸送上述玻 祸板（2)之輸送裝置（1)下侧。在照明部前方會建構用 於引導照明僅向玻璃板（2)表面照射之裂隙（11)。 200819736, 上述影像處理部（20)為CCD相機模組，其建構於 上述輸送裝置⑴上側。影像處理部（20)用以當上述昭 本之照明透過玻璃板⑺表面時，自透過上述玻 =板（）表面之照明拍攝上述玻璃板⑵表面之影子 像0 上述控制部（30)用於控制上述照明部（10)及影像 處理部（20)。在輸入上述影像處 子#Another feature of Lampt's invention is that the above-mentioned illuminating part is a xenon lamp. The glass of the moon is 3 彳 silver. In order to make the shadow image of the surface of the glass plate generated by the above glass plate 6 20081973d, the lighting is more vivid. The direction of illumination is limited to the panel-gap structure. According to another aspect of the invention, the illumination angle (8) is 18 to 22 by the illumination of the slit plate. Within the scope. ...in the broken glass, and the test method 4 implemented by the quality tester using the above glass plate is done in ~, step 2, so that the above obtained step 3, the bribery algorithm is cut into the image of the money shape Equally spaced; in step 4, the condition regarding the glass plate ^ ρ::= ϊ ί is applied to the image which is divided into equal boundary conditions by the above differential, and it is judged whether or not corrugation occurs; Corrugation type ^ 6 'The above-mentioned money can only make the eye-catching machine more vividly shoot the glass plate table = sub-image'. It is also possible to test whether the respective corrugation types occur according to the above-mentioned shadow and image by the differential algorithm. By using the present invention, it is possible to not only test the quality of the glass plate which is continuously transferred by the conveying device, but also to satisfy the satisfaction of the quality, and can also be quickly completed by saving the time of the glass plate quality test. The effect of continuous vapor deposition, (four) or deposition of a dual-purpose plasma process. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. 1 is a front view of a quality test machine of a glass plate according to an embodiment of the present invention. 7200819736, FIG. 2 is a front view showing a state in which a crack is applied to an illumination portion according to an embodiment of the present invention, and FIG. 3 is a horizontal view of an embodiment of the present invention. A sketch of the state of the quality of the test glass plate. 4 is a corrugated waveform diagram of a stripe type (stre) of the corrugated type tested using the present invention, and FIG. 5 is a corrugated waveform diagram of a rough strip type (Thick Band) type tested using the present invention, and FIG. 6 is The waveform of the corrugated type tested by the present invention is a corrugated waveform diagram of a cord type, and FIG. 7 is a waveform diagram for detecting the sinfulness in the experiment of the stripe-shaped corrugation state of the glass sheet according to the embodiment of the present invention, and FIG. 8 is an embodiment of the present invention. For example, the waveform diagram detected in the experiment in which the glass sheet has a rough stripe-shaped corrugation state, and FIG. 9 is a waveform diagram detected in the experiment in which the glass sheet has a cable-type corrugation state according to the embodiment of the present invention, and FIG. 10 is the present invention. The waveform pattern detected in the experiment in which the glass plate simultaneously has a corrugated and coarse stripe-shaped corrugation state. As shown in FIG. 1 to FIG. 10, the quality tester of the glass plate of the embodiment of the present invention flows into the process of using a plasma process such as a vapor deposition, a residual engraving or a deposition process required for the manufacture of a thin film transistor liquid crystal display. Front of the side gate valve. • The quality tester is used to instantly test whether the glass plate (2) conveyed by the conveyor (1) consisting of the drum is corrugated using the in-situ test method, or - when the glass plate (2) is stopped, test it immediately Ripple occurs. Quality Measurement • The salt machine includes an illumination unit (1 〇 ), an image processing unit (20 ), and a control unit (30). The above-mentioned bright portion is an air lamp that illuminates the surface of the glass plate (2), and is attached to a lower side of the conveying device (1) for conveying the glass plate (2) at a predetermined angle (Θ). A crack (11) for guiding the illumination to only the surface of the glass sheet (2) is constructed in front of the illumination unit. In 200819736, the image processing unit (20) is a CCD camera module constructed on the upper side of the transport device (1). The image processing unit (20) is configured to capture the shadow image of the surface of the glass plate (2) from the illumination of the surface of the glass plate (2) when the illumination of the illumination plate is transmitted through the surface of the glass plate (7). The control unit (30) is used for the control unit (30). The illumination unit (10) and the image processing unit (20) are controlled. Enter the above image at the subsection#

，控制部⑽之後，如圖4至圖H)所示，二;；3Γ) d吏用微分演算法測試玻璃板⑺表面是否發生波 波紋種類。在㈣部（3G)㈣記龍巾設定並存儲有應 用有關玻璃板⑺平坦度之邊界條件（s，s,)之基準值。 下面參照圖1至圖10以及展現玻璃板之品質測試方法 的圖9 ’說明如上構成之本發明實施例之作用。 首先，藉由由滾筒所構成之多段輪送裝置（1)，向萝 造薄膜電晶體液晶顯示器所需之進行氣相沈積、侧献 積等使用電t之製程設備輸送玻魏（2)，或使玻璃 停止。 此時’山气燈照明部（10)以既定照射角度（θ;2〇。）安 裝於上述輸送裝置⑴下端，其前方結合有㈣（ιι)。 當矾燈照明部（10)照射照明時，上述 僅照射至玻璃板（2)之表面，同時_至另：；^(11) 〃由此’因穿過上述玻璃板⑺上面之照明而出現影子 影像，上述影子影像被位於上述輪送I置⑴上側之影像 處理部（20)，即被CCD相機拍攝後，被傳送給控制部⑼）。 9 200819736 隨後’上述控制部（3〇) 現波形化後，使用微分演算法對之進二微分之影:影像實 等間隔。另-方面，在上述經波形化之今子刎成相 ⑵平坦度之基準值之邊界二二二應= k測出疋钟麵越上述朗之邊界 由此判斷是否發生波紋，並區別其波紋種類。）之办像 門二4==0)在檢測經微分並被分割成相等 間隔之&子衫像疋否存在超越已設定之邊界條 之部分後’在檢測之邊界條件（s，s,)之 叶 數，如圖4之所示，以測ί在= 板⑺表面是否發生條紋型波敌（&磁加w⑽㈡ 粗波紋(ThickBandType w— ^ (Cord Waveness ) 〇 更八體而s ’首先，玻璃板（2 )表面是否發生條紋型 波紋之測試，如圖4至圖1〇所示。控制部⑶）在經微分 亚被分割成相等間隔之影子影像中會檢測是否存在超越已 設定之邊界條件（S，S，）之部分。當存在時，上述控制部 (3〇)會計數超越邊界條件（s, s，）之經微分之影 的相等間隔。 / 此時，如圖4及圖7所示，在上述計數之個數中，當 1越邊界條件（S，S’）之影子影像整體相等間隔寬度較^ 犄，上述控制部（30)則會檢測到玻璃板（2)表面發生 紋型波紋。 ^ ^ fee後，如圖5及圖8所示，在上述計數之個數中，當 200819736, 超越邊界條件（s，s，）之旦彡羊旦 寬時，上述控制部（3〇) 二之整體相等間隔寬度較 粗條紋型波紋。 則會檢_彳麵板⑺表面發生 隨後’如圖6及圖9所七，乂 l、、 超越邊界條件（S，s，）^數之健中，當 有反覆週期砗，p + 〜子衫像之整體相等間隔寬度具 =;:波;述控制部(3〇)則會檢測到破璃板⑺ 中，當超越邊^:件〜以二圖二二在上述計數’個數 ίί分或f體相等間隔寬度分; (2) 破璃二ΐ面:圖11是本發明另—實施例之在縱向上測試 离板《口貝之狀態的平面略圖。在該實施例中，從由 2同所構成之驗料玻魏⑴之纽輸送裝 =除某^段之後，在被去除之部分縱向絲包括照 )與影像處理部（20)及控制部（30 )之測試機 由此可藉由其從縱向來檢測玻璃板（2)是否發生波紋 即，如圖3及圖12所示，本發明在橫向及縱向上均处 夠檢測出玻璃板（2)表面是否發生波紋，從而可更精宓: 進行上述玻璃板（2)之品質測試。 ^月在> 以下對與本發明實施例中相同之部分，標註為一 μ 旒’省略對其重複說明。 、、、付 本發明不僅能夠藉由相機更鮮明地拍攝破璃板表面之 200819736, i---- 影子影像，亦可藉由微分演算法，根據上述影子影像更精 禮地測減各波紋種類是否發生。 【圖式簡單說明】 圖1是本發明實施例之玻璃板之品質測試機整體構成 ^ 圖。 ， 圖2是本發明實施例之在照明部已應用裂隙之狀態的 正面圓。 圖3是本發明實施例之在橫向上測試玻璃板品質之狀 _ 態、的平面略圖。 圖4是使用本發明測試之波紋種類為條紋（Streak) 型之波紋波形圖。 圖5是使用本發明测試之波紋種類為粗條紋（Thick Band)型之波紋波形圖。 圖6是使用本發明測試之波紋種類為索（cord)型之 波紋波形圖。 圖7是本發明實施例之在玻璃板發生條紋型波紋狀態 _ 之實驗中檢測到之波形圖。 圖8是本發明實施例之在玻璃板發生粗條紋型波紋狀 • 態之實驗中檢測到之波形圖。 ' 圖9是本發明實施例之在玻璃板發生索型波紋狀態之 貫驗中檢測到之波形圖。 圖10是本發明實施例之在玻璃板同時發生波紋及粗 條紋型波紋狀態之實驗中檢測到之波形圖。 圖11是本發明實施例之玻璃板之品質測試方法流程 12 200819736f 圖。 圖12是本發明另一實施例之在縱向上測試玻璃板品 質之狀態的平面略圖。 【主要元件符號說明】 1 :輸送裝置 2 :玻璃板 ' 10 :照明部 11 :裂隙 ⑩ 20 :影像處理部 30 :控制部 13After the control unit (10), as shown in Fig. 4 to Fig. H), the second; 3Γ) d吏 uses a differential algorithm to test whether the surface of the glass plate (7) is corrugated. The reference value of the boundary condition (s, s,) for applying the flatness of the glass plate (7) is set and stored in the (4) (4) (4). Next, the action of the embodiment of the present invention constructed as above will be described with reference to Figs. 1 to 10 and Fig. 9' showing the quality test method of the glass sheet. Firstly, by using a multi-stage transfer device (1) composed of a roller, a process device using a gas t, such as vapor deposition and side accumulation, which is required for a thin film transistor liquid crystal display, is transported to the glass (2). Or stop the glass. At this time, the mountain light illumination unit (10) is mounted on the lower end of the transport device (1) at a predetermined irradiation angle (θ; 2〇), and (4) (ιι) is coupled to the front side. When the xenon lamp illumination portion (10) illuminates the illumination, the above only illuminates the surface of the glass plate (2) while _ to another:; (11) 〃 thus appears as a result of illumination through the glass plate (7) In the shadow image, the shadow image is transmitted to the control unit (9) by the image processing unit (20) located above the wheel transfer I (1), that is, after being captured by the CCD camera. 9 200819736 Subsequently, the above-mentioned control unit (3〇) is now waveformized, and the differential algorithm is used to make a two-differential image: the image is equally spaced. On the other hand, at the boundary of the reference value of the flattened phase (2) flatness of the above-mentioned waveform, the boundary value of the 疋 clock surface is determined by the above-mentioned ridge boundary, thereby judging whether or not ripple occurs, and distinguishing the ripple kind. ) The image gate 2 4 = 0) After detecting the differential and dividing into equal intervals of the & trousers image, there is a part of the boundary bar beyond the set boundary condition (s, s, The number of leaves, as shown in Figure 4, to determine whether the stripe-type enemies occur on the surface of the plate (7) (& magnetic plus w(10)(b) coarse corrugations (ThickBandType w-^ (Cord Waveness) 〇 八 体 s ' First, whether the stripe type corrugation test is performed on the surface of the glass plate (2), as shown in Fig. 4 to Fig. 1. The control unit (3) detects whether there is an overshoot set in the shadow image which is divided into equal intervals by the differential sub-section. Part of the boundary condition (S, S,). When present, the above control unit (3〇) counts the equal intervals of the differential shadows beyond the boundary conditions (s, s, ). As shown in FIG. 7, in the number of counts, when the shadow image of the boundary condition (S, S') is equal to the width of the entire boundary, the control unit (30) detects the glass plate (2). ) The surface has ripples. ^ ^ fee, as shown in Figure 5 and Figure 8, in the above count In 200819736, when the boundary condition (s, s,) exceeds the boundary condition (s, s,), the above control unit (3〇) 2 is equally spaced and has a wider stripe-shaped corrugation. The surface of the panel (7) is checked. After the occurrence of 'as shown in Figure 6 and Figure 9, seven, 超越 l,, beyond the boundary condition (S, s,) ^ in the health, when there is a repetitive cycle 砗, p + ~ Z-shirts are equal to the width of the overall width = ;: wave; the control section (3〇) will detect the broken glass (7), when the transcendence ^: pieces ~ 2 to 2 in the above count 'number ίί 分 or f body equal spacing width; 2) Broken glass surface: Fig. 11 is a plan view showing the state of the off-plate "mouth" in the longitudinal direction according to another embodiment of the present invention. In this embodiment, the sample is composed of 2 (1) New conveyor belt = after a certain section, the portion of the longitudinal filament removed, and the image processing unit (20) and the control unit (30) can be used to detect the glass sheet from the longitudinal direction. (2) Whether or not corrugation occurs, that is, as shown in Figs. 3 and 12, the present invention detects whether the surface of the glass plate (2) is emitted in both the lateral direction and the longitudinal direction. Corrugations, thereby more refined Mi: the above-described glass plate (2) the quality of the test. ^月在> The same portions as those in the embodiment of the present invention are denoted by a μ 旒 ', and the repeated description thereof will be omitted. The invention can not only capture the 200819736, i---- shadow image of the surface of the glass plate more vividly by the camera, but also reduce and reduce the ripples according to the shadow image by the differential algorithm. Whether the type has occurred. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall configuration of a quality tester for a glass sheet according to an embodiment of the present invention. Fig. 2 is a front circle in a state in which a crack has been applied to an illumination portion according to an embodiment of the present invention. Fig. 3 is a schematic plan view showing the state of the glass sheet in the lateral direction in the embodiment of the present invention. Fig. 4 is a corrugated waveform diagram of a streak type which is tested using the corrugation type of the present invention. Fig. 5 is a corrugated waveform diagram of a type of corrugation tested using the present invention as a thick band type. Fig. 6 is a corrugated waveform diagram of a corrugated type which is tested using the present invention. Fig. 7 is a waveform diagram detected in an experiment in which a fringe-type corrugation state of a glass sheet is carried out according to an embodiment of the present invention. Fig. 8 is a view showing the waveforms detected in the experiment in which the glass sheet has a coarse stripe type corrugated state according to an embodiment of the present invention. Figure 9 is a waveform diagram of the embodiment of the present invention detected in the occurrence of a cable-like corrugation state of the glass sheet. Fig. 10 is a view showing the waveforms detected in an experiment in which a corrugated and rough stripe-shaped corrugated state of a glass sheet is simultaneously performed in an embodiment of the present invention. Figure 11 is a flow chart showing the quality test method of the glass plate according to the embodiment of the present invention 12 200819736f. Figure 12 is a schematic plan view showing the state in which the quality of the glass sheet is tested in the longitudinal direction according to another embodiment of the present invention. [Description of main component symbols] 1 : Conveying device 2 : Glass plate ' 10 : Illumination portion 11 : Crack 10 20 : Image processing unit 30 : Control unit 13

Claims (1)

200819736 十、申請專利範圍·· Λ认^一種破螭板之品質測試機，其會在藉由輸送裝置供 二給袅程設備時，在玻璃板移送狀態下即時使用原地之測 j方式來檢查是否發生波紋，或在玻璃板停止時即時檢查 疋否發生波紋，上述測試機包括： 2明部，其照射穿過上述玻璃板表面之照明； _衫像處理部，在上述照明部之照明穿過玻璃板時， 八气處理因牙過上述玻璃板之照明而發生的玻璃板表 之影子影像；以及 控制部，其自上述影像處理部所拍攝之影子影像 檢查玻璃板表面是否發生波紋。 2.如申請專利範圍帛！項所述之玻璃板之品 機，上述照明部為氤燈（Xe Lamp)。 ^ 3·如中請專利範圍第i項所述之玻璃板之品 機’為使穿過上述_板生成之玻魏表面之影子事傻= 鮮明顯現’在上述照明部前方結合使照明之照射方向= 限於玻璃板的裂隙。 里竭 4. 如申請專利範㈣3項所述之玻璃板之品 機，藉由上述裂隙而僅照射於玻璃板之照明照射角声二 在18〜22度之範圍内。 a 5. —種玻璃板之品質測試方法，包括： 步驟1，按既定角度向玻璃板照射照明，並释 璃板表面之影子影像； & f坡 步驟2，4吏上述獲得之影子影像實現波形化」 14 200819736 步驟3，使用微分演算法對上述波形化 進行微分，以分割成相等間隔； 〜子衫像 步驟4，將關於玻璃板平坦度之基準 用於藉由上述微分分誠相㈣隔之f彡子影像:1 1 木牛應 步驟5，檢測出是否存在超越上述應^喜 之影像，判斷是否發生波紋；以及 ％ ，1木件 纹種=6，上述判斷結果若發生波紋時，則區別其波 6.如申請專利範圍第5項所述之玻璃板之品 法，上述波紋種類區別包括： 貝測4方 步驟1，計數超越邊界條件之經微 等間隔，·以及 〜〜子影像相 步驟2 ’在上料數之錄巾，若超 影像之整體相等間隔寬度較窄時，^ 法，7二!:f專利範圍第5項所述之玻璃板之品質測試方 上述波紋種類區別包括： ^驟1 ’計數超越邊界條件之經微分之影子影像相 寻間隔，以及 ^ ^驟2，在上述計數之個數中，若超越邊界條件 像之整體相等間隔寬度較寬時，則認定為粗條紋 8如申请專利範圍第5項所述之玻璃板之品 法，上述波紋種類區別包括： 、、“式方 15 20081973d 步驟i，計數超越邊界條件之經微分之影子影像相 等間隔；以及 步驟2，在上述計數之個數中，若超越邊界條件之 影子影像之整體相等間隔寬度具有反覆週期時，則認定 為索型波紋。200819736 X. Application for patent scope·· Λ ^ ^ 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 一种 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质 品质Check whether corrugation occurs, or if the corrugation occurs immediately after the glass plate stops, the above test machine includes: 2 bright part, which illuminates the illumination through the surface of the glass plate; _ shirt image processing part, illumination in the above illumination part When passing through the glass plate, the eight-gas treatment shadow image of the glass plate surface generated by the illumination of the glass plate; and the control unit detects whether the surface of the glass plate is corrugated from the shadow image captured by the image processing unit. 2. If you apply for a patent scope! In the product of the glass plate according to the item, the illumination unit is a xe lamp. ^ 3 · The glass machine of the patent scope of the patent scope is called 'the shadow of the glass surface generated by the above-mentioned _ plate is silly = fresh and obvious now' is combined with the illumination in front of the above illumination unit Direction = limited to the crack of the glass plate. 4. In the case of applying the glass plate of the above-mentioned patents (4), the illumination of the glass plate by the above-mentioned cracks is only in the range of 18 to 22 degrees. a 5. The quality test method of the glass plate includes: Step 1. Illuminate the glass plate at a predetermined angle and shadow the image on the surface of the release plate; & f slope step 2, 4吏 The shadow image obtained above is realized Waveformation 14 200819736 Step 3, using the differential algorithm to differentiate the above waveforms to be equally divided; ~ 衫 衫 like step 4, the benchmark for the flatness of the glass plate is used to separate the phase by the above differential (4)彡 彡 影像 : : : : : 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Then distinguish the wave 6. According to the method of the glass plate described in the fifth paragraph of the patent application, the difference of the above-mentioned corrugation types includes: the beta test 4 side step 1, the counting exceeds the boundary condition, the micro-equal interval, and the ~~ sub Image phase step 2 'In the recording of the number of feeds, if the overall width of the super image is narrow, the method is the same as the quality test of the glass plate described in item 5 of the patent scope: The types of differences include: ^1' counts the differential shadow image phase-finding interval beyond the boundary condition, and ^^2, in the number of counts above, if the over-border condition image is equal in width, the width is wider. It is determined as the thick stripe 8 as in the method of the glass plate described in claim 5, and the difference of the corrugated type includes: , "" Formula 15 20081973d Step i, counting the differential shadow image of the boundary condition exceeding the boundary condition And step 2, in the number of the above counts, if the overall equal interval width of the shadow image exceeding the boundary condition has a repeating period, it is determined as a cable-shaped corrugation. 1616
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CN101542359B (en) 2012-11-07
JP4971456B2 (en) 2012-07-11
KR20080037927A (en) 2008-05-02
WO2008050941A1 (en) 2008-05-02
KR100838655B1 (en) 2008-06-16
TWI329200B (en) 2010-08-21
CN101542359A (en) 2009-09-23

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