CN101542359A - Quality tester of glass board and method thereof - Google Patents
Quality tester of glass board and method thereof Download PDFInfo
- Publication number
- CN101542359A CN101542359A CNA2007800397368A CN200780039736A CN101542359A CN 101542359 A CN101542359 A CN 101542359A CN A2007800397368 A CNA2007800397368 A CN A2007800397368A CN 200780039736 A CN200780039736 A CN 200780039736A CN 101542359 A CN101542359 A CN 101542359A
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- Prior art keywords
- glass substrate
- ripple
- shadow image
- quality
- boundary
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nonlinear Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
Abstract
Provided are an apparatus for inspecting quality of a glass substrate including an illumination part for radiating light to transmit through a glass substrate only to inspect waveness of the glass substrate. The apparatus and method use a camera to more clearly photograph a shadow image of a surface of a glass substrate and more precisely inspect the existence of waveness from the shadow image through a differential algorithm. As a result, it is possible to inspect in real time the quality of the glass substrate continuously conveyed by a conveyance unit to thereby improve quality of and satisfaction regarding the product. Of course, it is also possible to reduce time consumed to inspect the quality of the glass substrate to thereby rapidly and continuously perform processes using plasma such as deposition, etching, sputtering, and so on.
Description
Technical field
The present invention relates to a kind ofly be used for checking whether the glass substrate that is used to form thin film transistor (TFT) (TFT) and colored filter (color filter) at Thin Film Transistor-LCD (TFT-LCD) exists the quality tester of ripple (waveness).
Background technology
Usually, Thin Film Transistor-LCD comprises: be formed with the bottom glass substrate of thin film transistor (TFT), the top glass substrate that is formed with colored filter and the liquid crystal between injection bottom glass substrate and the top glass substrate and constitute.
With regard to forming the required glass substrate of this kind thin film transistor (TFT) and colored filter, thereby when the generation ripple forms uneven thickness on the surface in glass substrate, can't on glass substrate, carry out the deposition and the etching of film equably.As a result, the shown color of the liquid crystal of Thin Film Transistor-LCD takes place unusual,, can produce variable color that is.
Therefore, before glass substrate being put into process chamber and being carried out using the processing of plasma, should carry out comprehensive quality check to glass substrate such as deposition, etching or sputter etc.
Yet, traditional ripple inspection to glass substrate surface, therefore the influence of its check result person of being subjected to an examination subjective factor has reduced the reliability of checking.
For example, the technology of the ripple of traditional inspection glass substrate be glass substrate by vertically arranged state under, light is incided on the glass substrate, make described glass substrate slight inclination (tilt) from the state parallel, check the shadow of the glass substrate that on the screen that is positioned at described glass substrate opposite, shows with light source.
As a result, in the above-mentioned shadow that projects to screen, exist the part of ripple and the part that does not have ripple transmittance difference (or phase differential of light) to occur, present the refraction of black and white, thereby the operator can determine the existence of ripple.
But,, therefore can not carry out the inspection fully of glass substrate because described ripple inspection can not realize the ripple inspection in original place (in-situ).In addition, because described ripple inspection needs directly carry out by operator's naked eyes, therefore unusual trouble but also consuming time not only greatly reduces the reliability of inspection.
Summary of the invention
Technical matters
In order to solve above-mentioned and/or other problems, an aspect of of the present present invention provides a kind of equipment of quality that is used to check glass substrate of the luminous existence of checking ripple that can launch the illuminating part that only sees through glass substrate.
Technical scheme
Can be used to check that the equipment of the quality of glass substrate realizes aforementioned and/or other aspects of the present invention by providing a kind of, described equipment comprises conveying device and the inspection unit that glass substrate is transported to treatment facility, described inspection unit when glass substrate is transferred or glass substrate check the existence of ripple in the glass substrate when stopping in real time, described detecting unit comprises: illuminating part, and irradiates light sees through the surface of glass substrate; Image processing part when illuminating part sees through glass substrate with rayed, is taken the shadow image on the surface of the glass substrate that is produced by the light that sees through glass substrate; And control part, the shadow image of taking from image processing part is checked the existence of ripple on the surface of glass substrate.
In another embodiment, illuminating part can be xenon lamp (Xe lamp).
In another embodiment, in order more to clearly illustrate the shadow image on the surface that sees through the glass substrate that glass substrate produces, be formed with the crack in the front side of illuminating part, so that luminous direction of illumination is limited in only within glass substrate.
In another embodiment, only shine by described crack glass substrate luminous irradiating angle can 18～22 the degree scopes in.
Can realize other aspect of the present invention by a kind of method of being implemented by the equipment of the quality that is used to check glass substrate is provided, described method comprises: press predetermined angular to the glass substrate irradiates light, and the shadow image on the surface of acquisition glass substrate; The shadow image of waveform acquisition; The use differential algorithm is carried out differential to the shadow image of waveformization, to be divided into equal intervals; The boundary condition of the reference value of the flatness of glass substrate is applied to be divided into by differential the shadow image of equal intervals; Detect the image that whether has the boundary condition that exceeds described application, to determine existing of ripple; And when having ripple, determine the kind of ripple as testing result.
Beneficial effect
The equipment and the method that are used to check the quality of glass substrate use camera to come more clearly to take the shadow image on the surface of glass substrate, and check the existence of ripple more accurately from the shadow image by differential algorithm.As a result, but the quality of the glass substrate that real-time inspection is carried continuously by conveying device, thus improved quality and to the satisfaction of product.Certainly, also can reduce the time of the quality cost of checking glass substrate, thereby also carry out the processing of using plasma such as deposition, etching, sputter etc. rapidly continuously.
Description of drawings
By below in conjunction with the description of accompanying drawing to exemplary embodiment, above-mentioned and other aspects of the present invention and advantage will become clear and be easier to and understand, wherein,
Fig. 1 is the synoptic diagram of equipment that is used to check the quality of glass substrate according to an exemplary embodiment of the present invention;
Fig. 2 is according to an exemplary embodiment of the present invention at the front elevation in the crack that illuminating part is used;
Fig. 3 is the floor map that the processing of the quality of checking glass substrate according to an exemplary embodiment of the present invention in the horizontal is shown;
Fig. 4 illustrates to use ripple kind that the present invention the checks diagrammatic sketch as the ripple of stripe;
Fig. 5 illustrates to use ripple kind that the present invention the checks diagrammatic sketch as the ripple of cord type;
Fig. 6 illustrates to use ripple kind that the present invention the checks diagrammatic sketch as the ripple of rope type;
Fig. 7 is the detection waveform that the test result of the stripe ripple that produces in glass substrate according to an exemplary embodiment of the present invention is shown;
Fig. 8 is the detection waveform that the test result of the cord type ripple that produces in glass substrate according to an exemplary embodiment of the present invention is shown;
Fig. 9 is the detection waveform that the test result of the rope type ripple that produces in glass substrate according to an exemplary embodiment of the present invention is shown;
Figure 10 is the detection waveform that the test result that produces ripple type ripple and cord type ripple according to an exemplary embodiment of the present invention in glass substrate simultaneously is shown;
Figure 11 is the process flow diagram that the method for quality of checking glass substrate according to an exemplary embodiment of the present invention is shown;
Figure 12 is the floor map that the processing of the quality of checking glass substrate in the vertical of another exemplary embodiment according to the present invention is shown.
Embodiment
To describe embodiments of the invention in detail now, the example of embodiment is shown in the drawings.
Fig. 1 is the synoptic diagram of equipment that is used to check the quality of glass substrate according to an exemplary embodiment of the present invention, Fig. 2 is that Fig. 3 is the floor map that the processing of the quality of checking glass substrate according to an exemplary embodiment of the present invention in the horizontal is shown according to an exemplary embodiment of the present invention at the front elevation in the crack that illuminating part is used.
Fig. 4 illustrates to use ripple kind that the present invention the checks diagrammatic sketch as the ripple of striped (streak) type, Fig. 5 illustrates that to use ripple kind that the present invention the checks diagrammatic sketch as the ripple of cord (thick band) type, Fig. 6 be that the ripple kind of the using the present invention's inspection diagrammatic sketch as the ripple of rope (cord) type is shown.
Fig. 7 is the detection waveform that the test result of the stripe ripple that produces in glass substrate according to an exemplary embodiment of the present invention is shown, Fig. 8 is the detection waveform that the test result of the cord type ripple that produces in glass substrate according to an exemplary embodiment of the present invention is shown, Fig. 9 is the detection waveform that the test result of the rope type ripple that produces in glass substrate according to an exemplary embodiment of the present invention is shown, and Figure 10 is the detection waveform that the test result that produces ripple type ripple and cord type ripple according to an exemplary embodiment of the present invention in glass substrate simultaneously is shown.
Referring to figs. 1 through Figure 10, be used to according to an exemplary embodiment of the present invention to detect glass substrate quality equipment use plasma be used to make Thin Film Transistor-LCD such as processing such as deposition, etching, injections during be installed on the place ahead of gate valve of the entrance side of treatment facility, using the original place test mode to check the existing of ripple of the glass substrate 2 that conveying device 1 is carried in real time, or when stopping, glass substrate 2 checks ripple.Describedly be used to check that the equipment of the quality of glass substrate comprises: illuminating part 10, image processing part 20 and the inspection unit that comprises control part 30.
With reference to Fig. 1 to Figure 10 and with reference to the description of the method for Fig. 9, operation of the apparatus according to the invention is described below.
At first, by comprising the multistage conveying device 1 of cylinder, carry glass substrate 2 to the treatment facility of making Thin Film Transistor-LCD by the processing of using plasma, or glass substrate 2 is stopped such as deposition, etching or sputter etc.
At this moment, the illuminating part 10 that is generally xenon lamp is installed in conveying device 1 below with predetermined irradiating angle (for example, 20 °), and wherein, the place ahead of illuminating part 10 has crack 11.In the case, light only is irradiated to the surface of glass substrate 2 by crack 11, to be transmitted to this surperficial apparent surface of glass substrate 2.
Then, cross the luminous shadow image that occurs of the upper surface of glass substrate 2 by transmission, described shadow image is transmitted to control part 30 after being positioned at image processing part 20 (that is, the CCD camera) shooting of conveying device 1 upside.
Subsequently, control part 30 uses differential algorithm with equal intervals it to be carried out differential after the shadow image that makes shooting is realized waveformization.On the other hand, at the boundary condition S and the S ' of the reference value of the above-mentioned flatness of in the shadow image of waveformization, using relevant glass substrate 2, detect the boundary condition S that whether there is above-mentioned application and the image outside the S ' with this.Thus, can determine the existence of ripple, and the kind of definite ripple.
Promptly, whether control part 30 is detecting through the shadow image of differential equally partly after outside predetermined boundary condition S and the S ', calculating exceeds the quantity of image of differential in the zone of predetermined boundary condition, shown in Fig. 4-10, on the surface of glass substrate 2, whether produce stripe ripple (streak type waveness), cord type ripple (thick band type waveness) and rope type ripple (cord waveness) to check.
More specifically, producing on the surface of glass substrate 2 under the situation of stripe ripple, extremely shown in Figure 10 as Fig. 4, when some differential and the shadow image section of five equilibrium exceed predetermined boundary condition S and S ' time, the be beyond the boundary equal intervals of shadow image of differential of condition S and S ' of 30 pairs of control parts is counted.
At this moment, as Fig. 4 and shown in Figure 7, as quantity be beyond the boundary the condition S and the S ' of counting, and the width of whole equal intervals of shadow image is when narrow, and control part 30 determines to produce the stripe ripple on the surface of glass substrate 2.
Subsequently, as Fig. 5 and shown in Figure 8, as quantity be beyond the boundary the condition S and the S ' of counting, and the width of whole equal intervals of shadow image is when wide, and control part 30 determines to produce cord type ripple on the surface of glass substrate 2.
Subsequently, as Fig. 6 and shown in Figure 9, as quantity be beyond the boundary the condition S and the S ' of counting, and whole equal intervals of shadow image are when having the cycle of repetition, and control part 30 determines to produce rope type ripple on the surface of glass substrate 2.
At this moment, as Fig. 4,5 and shown in Figure 10, as quantity be beyond the boundary the condition S and the S ' of counting, and the width of whole equal intervals of shadow image is narrow and the wide phenomenon of width when occurring simultaneously, and control part 30 determines to produce stripe ripple and cord type ripple on the surface of glass substrate 2.
Simultaneously, Figure 12 is the floor map of processing of the quality of checking glass substrate in the vertical of another exemplary embodiment of the present invention.Compare with Fig. 3, in this embodiment, from comprise a plurality of cylinders be used for carry the multistage conveying device 1 of glass substrate 2 to remove certain one-level, in removed part the test section 100 that comprises illuminating part 10, image processing part 20 and control part 30 vertically is installed.Therefore, can be along the existence that vertically detects ripple of glass substrate 2.
That is, as Fig. 3 and shown in Figure 12, described equipment and method all can detect the existence of ripple on the surface of glass substrate 2 on glass substrate 2 horizontal and vertical, thereby can carry out the quality check of glass substrate 2 more accurately.
As mentioned above, run through instructions, the identical identical parts of label indication omit its repeat specification.
Industrial applicability
By top description as can be known, apparatus and method according to the invention more clearly takes the shadow image on the surface of glass substrate with camera, thereby can check more accurately the existence of ripple and the kind of ripple according to the shadow image by differential algorithm.
Claims (8)
1, a kind of equipment that is used to check the quality of glass substrate, described equipment comprises conveying device and the inspection unit that glass substrate is transported to treatment facility, described inspection unit when glass substrate is transferred or glass substrate check the existence of ripple in the glass substrate when stopping in real time, described detecting unit comprises:
Illuminating part, irradiates light sees through the surface of glass substrate;
Image processing part when illuminating part sees through glass substrate with rayed, is taken the shadow image on the surface of the glass substrate that is produced by the light that sees through glass substrate; And
Control part, the shadow image of taking from image processing part are checked the existence of ripple on the surface of glass substrate.
2, the equipment that is used to check the quality of glass substrate as claimed in claim 1, wherein, illuminating part is an xenon lamp.
3, the equipment that is used to check the quality of glass substrate as claimed in claim 1, wherein, front side at illuminating part is formed with the crack, luminous direction of illumination is limited in the shadow image that only also more clearly illustrates the surface of the glass substrate that sees through the glass substrate generation within glass substrate.
4, the equipment that is used to check the quality of glass substrate as claimed in claim 3, wherein, the luminous irradiating angle that only shines glass substrate by described crack can be in the scopes of 18～22 degree.
5, a kind of method for quality of checking glass substrate comprises:
Press predetermined angular to the glass substrate irradiates light, and obtain the shadow image on the surface of glass substrate;
The shadow image of waveform acquisition;
The use differential algorithm is carried out differential to the shadow image of waveformization, to cut apart the shadow image by equal intervals;
The boundary condition of the reference value of the flatness of glass substrate is applied to be divided into by differential the shadow image of equal intervals;
Detect the shadow image that whether has the boundary condition that exceeds described application, to determine existing of ripple; And
When having ripple, determine the kind of ripple as testing result.
6, method as claimed in claim 5, wherein, determine that the step of the kind of ripple comprises:
The quantity through the equal intervals of the shadow image of differential to the condition of being beyond the boundary is counted; And
When the quantity of counting is beyond the boundary the width of whole equal intervals of condition and shadow image when narrow, determine that ripple is the stripe ripple.
7, method as claimed in claim 5, wherein, determine that the step of the kind of ripple comprises:
The quantity through the equal intervals of the shadow image of differential to the condition of being beyond the boundary is counted; And
When the quantity of counting is beyond the boundary the width of whole equal intervals of condition and shadow image when wide, determine that ripple is a cord type ripple.
8, method as claimed in claim 5, wherein, determine that the step of the kind of ripple comprises:
The quantity through the equal intervals of the shadow image of differential to the condition of being beyond the boundary is counted; And
When the quantity of counting is beyond the boundary whole equal intervals of condition and shadow image when having the cycle of repetition, determine that ripple is a rope type ripple.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060105240 | 2006-10-27 | ||
| KR10-2006-0105240 | 2006-10-27 | ||
| KR20060105240A KR100838655B1 (en) | 2006-10-27 | 2006-10-27 | Quality tester of glass board and method thereof |
| PCT/KR2007/002633 WO2008050941A1 (en) | 2006-10-27 | 2007-05-30 | Quality tester of glass board and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101542359A true CN101542359A (en) | 2009-09-23 |
| CN101542359B CN101542359B (en) | 2012-11-07 |
Family
ID=39324710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007800397368A Active CN101542359B (en) | 2006-10-27 | 2007-05-30 | Quality tester of glass board and method thereof |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4971456B2 (en) |
| KR (1) | KR100838655B1 (en) |
| CN (1) | CN101542359B (en) |
| TW (1) | TWI329200B (en) |
| WO (1) | WO2008050941A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102753933A (en) * | 2010-02-15 | 2012-10-24 | 株式会社理光 | Transparent object detection system and transparent flat plate detection system |
| CN103185662A (en) * | 2011-12-30 | 2013-07-03 | 信义汽车玻璃(深圳)有限公司 | Support frame, system and method for detection of automobile toughened glass water ripples |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100953204B1 (en) * | 2008-05-19 | 2010-04-15 | (주)쎄미시스코 | Glass waviness inspection device and inspection method thereof |
| KR200461687Y1 (en) | 2010-09-09 | 2012-07-30 | (주)쎄미시스코 | Board quality tester with board injection gate of multistage |
| KR101316039B1 (en) * | 2012-05-02 | 2013-10-10 | (주)쎄미시스코 | Receiving device and glass permeable membrane inspecting device that use this |
| CN117222886A (en) * | 2021-04-22 | 2023-12-12 | 日立造船株式会社 | Inspection apparatus |
| KR20240028785A (en) | 2022-08-25 | 2024-03-05 | 주식회사 큐빅셀 | Cross-sectional inspection device of glass substrate and inspection method using it |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56166452A (en) * | 1980-05-27 | 1981-12-21 | Nippon Sheet Glass Co Ltd | Detecting method for distortion defect of transparent plate |
| JPH0283438A (en) * | 1988-09-21 | 1990-03-23 | Nissan Motor Co Ltd | Apparatus for evaluating deposit or the like on surface of transparent plate |
| CN1016101B (en) * | 1989-09-22 | 1992-04-01 | 中国新型建筑材料工业杭州设计研究院 | In-line automatic tester of adfects on float glass |
| FR2663744B1 (en) * | 1990-06-25 | 1993-05-28 | Saint Gobain Vitrage Int | METHOD AND DEVICE FOR MEASURING THE OPTICAL QUALITY OF A GLAZING. |
| JPH05272949A (en) * | 1992-03-30 | 1993-10-22 | Nippon Sheet Glass Co Ltd | Method for evaluating glass plate surface |
| JPH07306152A (en) * | 1994-03-16 | 1995-11-21 | Sekisui Chem Co Ltd | Optical distortion inspecting device |
| JPH08136239A (en) * | 1994-11-11 | 1996-05-31 | Adomon Sci Kk | Device and method for inspection |
| JP3668294B2 (en) * | 1995-08-22 | 2005-07-06 | オリンパス株式会社 | Surface defect inspection equipment |
| JP4385419B2 (en) * | 1998-11-30 | 2009-12-16 | 株式会社ニコン | Appearance inspection method and appearance inspection apparatus |
| KR20010055184A (en) * | 1999-12-09 | 2001-07-04 | 구자홍 | Optics apparatus for pattern inspection of pdp glass |
| JP2001201429A (en) * | 2000-01-18 | 2001-07-27 | Mitsubishi Chemicals Corp | Method and device for inspecting defect in inspected base body |
| JP2002310925A (en) * | 2001-04-18 | 2002-10-23 | Corning Japan Kk | Plate material inspecting method and device thereof |
| JP2004219108A (en) * | 2003-01-09 | 2004-08-05 | Dainippon Printing Co Ltd | Method and apparatus for inspecting irregularities in film thickness of colored film |
| JP2005083906A (en) * | 2003-09-09 | 2005-03-31 | Asahi Kasei Engineering Kk | Defect detector |
-
2006
- 2006-10-27 KR KR20060105240A patent/KR100838655B1/en active IP Right Grant
-
2007
- 2007-05-30 WO PCT/KR2007/002633 patent/WO2008050941A1/en active Application Filing
- 2007-05-30 JP JP2009534472A patent/JP4971456B2/en active Active
- 2007-05-30 CN CN2007800397368A patent/CN101542359B/en active Active
- 2007-05-31 TW TW96119422A patent/TWI329200B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102753933A (en) * | 2010-02-15 | 2012-10-24 | 株式会社理光 | Transparent object detection system and transparent flat plate detection system |
| CN103185662A (en) * | 2011-12-30 | 2013-07-03 | 信义汽车玻璃(深圳)有限公司 | Support frame, system and method for detection of automobile toughened glass water ripples |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010507801A (en) | 2010-03-11 |
| CN101542359B (en) | 2012-11-07 |
| JP4971456B2 (en) | 2012-07-11 |
| KR20080037927A (en) | 2008-05-02 |
| WO2008050941A1 (en) | 2008-05-02 |
| KR100838655B1 (en) | 2008-06-16 |
| TWI329200B (en) | 2010-08-21 |
| TW200819736A (en) | 2008-05-01 |
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