200811032 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種用來合成碳奈米管的量產系統 用此系統的量產方法，且特別是關於一種利用氣相合 來合成碳奈米管的量產系統及使用此系統的量產方法 【先前技術】 本發明是關於一種用來合成碳奈米管的量產系統 用此系統的量產方法，且特別是關於一種利用氣相合 來合成碳奈米管的量產系統及使用此系統的量產方法 碳奈米管為由捲成圓柱狀的石墨片所構成，其依 片數量可分為單壁碳奈米管、雙壁碳奈米管、及多壁 米管。 由於碳奈米管的重量輕、電性與機械性質佳、化 定性高、且表面容易進行反應，故可應用的範圍很廣 如電子資訊產業、能源工業、高性能複合材料、極細 奈米化合物等。因此，需要一種合成高純度碳奈米管 低量產成本的方法。 目前合成碳奈米管的方法包括電弧放電法、雷射 法、化學氣相沉積法、及氣相合成法。以電弧放電法 射沉積法合成碳奈米管會伴隨生成非晶形材料，故需 行熱或化學精製製程，以得到高純度的碳奈米管，因 量產經濟效益低。化學氣相沉積法雖然可藉由將碳奈 排列在基材上而形成高純度的碳奈米管，然此法亦不 及使 成法 及使 成法 〇 石墨 碳奈 學穩 ，例 微的 且具 沉積 或雷 再進 而其 米管 易量 5 200811032 產。 已注意到氣相合成法為低成本合成碳奈米管的方法。 雖然已研發出各種氣相合成法，但以傳統氣相合成法合成 的碳奈米管含有大量的非晶形碳粒，因而難以精製碳奈米 管。由於氣相合成法的產率低且合成的碳奈米管含有大量 的非晶形碳粒，故其特別不適於量產單壁或雙壁碳奈米管。 另外，採用氣相合成法的碳奈米管量產系統為一批次 系統，其中碳奈米管是在每一批次中重複一連串的步驟而 得，步驟包括投入金屬催化劑至反應室中、加熱反應室一 段時間、然後冷卻反應室。但其需於每一批次重複上述各 步驟，且每一批次的製程條件難以控制到完全相同，是以 合成出的碳奈米管均一度差，因此此種量產系統具有高製 造成本與低生產率之問題。 【發明内容】 由於碳奈米管的重量輕、電性與機械性質佳、化學穩 定性高、且表面容易進行反應，故其可應用的範圍很廣， 例如電子資訊產業、能源工業、高性能複合材料、極細微 的奈米化合物等。因此，需要一種大量合成高純度碳奈米 管且具低量產成本的方法。 為解決上述問題，本發明之一目的提出一種量產系統 及利用氣相合成法在開放型反應室中合成碳奈米管的方 法。 本發明是關於一種合成碳奈米管的量產系統，用以於 6 200811032 反應室中合成碳奈米管時，完全開放反應室至外部，並防 止外界空氣因氣體重力不同而流入反應室、以及其量產方 法。 根據本發明，其可連續將催化劑從外部輸入到反應 室，並使反應室内合成的碳奈米管連續排放到外部，藉以 量產碳奈米管。 此外，根據本發明，藉由控制催化劑輸送速度、反應 溫度、金屬催化劑粒子大小、碳源氣體注入量、和氫氣注 入量，而可大量合成不同性質的礙奈米管。 藉由連續還原催化劑、合成碳奈米管、及冷卻碳奈米 管，可量產高品質的碳奈米管。 根據本發明之一態樣，為達成上述與其他目的，提出 一種用來合成碳奈米管的量產系統，包含：一反應室，具 有至少一連通外界空氣的開口 、和至少一不同比重氣體佔 據區域，充滿此區域的氣體比重不同於外界空氣比重，以 防止外界空氣經由開口進入反應室；一碳奈米管合成單 元，位在不同比重氣體佔據區域，並利用通過開口引入的 催化劑介質來合成碳奈米管；一輸送單元，通過開口而輸 送催化劑至碳奈米管合成單元；以及氣體供應單元，分別 提供不同比重氣體與合成碳奈米管用之碳源氣體至不同比 重氣體佔據區域與碳奈米管合成單元。 較佳地，開口包括一引入催化劑至反應室的入口、和 一排放碳奈米管合成單元所合成的碳奈米管至反應室外的 出口。輸送單元通過開口、不同比重氣體佔據區域、碳奈 7 200811032 米管合成單元、及出口來傳輸催化劑及/或碳奈米管。 較佳地，壤奈米管合成單元包括一位在反應室内的反 應區域，其利用填充於不同比重氣體佔據區域中的不同比 重氣體來阻隔外界空氣；一碳源氣體注入器，用以注入氣 體供應單元提供的碳源氣體到反應區域，如此由輸送單元 輸入到反應區域的催化劑將與碳源氣體反應形成碳奈米 管；以及一加熱構件，用以加熱反應區域。 較佳地，碳奈米管合成單元的反應區域定義在至少一 部分不同比重氣體佔據區域的下部，且填入不同比重氣體 佔據區域的氣體比重小於碳源氣體比重。碳奈米管合成單 元更包括一於上部為開啟狀態的碳源氣體限制區，用以阻 擋注入到反應區域的碳源氣體漏出反應區域。 較佳地，不同比重氣體佔據區域包括一第一不同比重 氣體佔據區域，且其充滿比重小於碳源氣體比重的氣體； 以及一第二不同比重氣體佔據區域，且其充滿比重大於碳 源氣體比重的氣體。第一不同比重氣體佔據區域、反應區 域、及第二不同比重氣體佔據區域為沿重力方向依序定義 於反應室内。 較佳地，不同比重之氣體包含至少一種比重小於外界 空氣比重的氣體、或比重大於外界空氣比重的氣體（其視反 應室開口的位置而定），以防止外界空氣經由開口進入反應 室。 較佳地，填入不同比重氣體佔據區域的不同比重之氣 體為氫氣。 8 200811032 較佳地，反應室包括至少一形成其中的排氣管，以排 放氫氣至反應室外部，而使不同比重氣體佔據區域中的氫 氣壓力與外界空氣壓力達平衡狀態。 較佳地，不同比重氣體佔據區域包括一以橫越重力方 向而相通的第一佔據區域、一連接於入口與第一佔據區域 之間的第二佔據區域、以及一連接於出口與第一佔據區域 之間的第三佔據區域。反應室於其入口與出口處彎曲而定 義出第一佔據區域、第二佔據區域、和第三佔據區域。 較佳地，入口與出口在相對於第一佔據區域的重力方 向上具有一位差，以防止不同比重氣體佔據區域内的填充 氣體因重力而經由入口與出口洩漏出反應室外。 較佳地，碳奈米管合成單元包括一位在反應室内的反 應區域，其利用填充於不同比重氣體佔據區域中的不同比 重氣體來阻擋外界空氣；一碳源氣體注入器，用以注入氣 體供應單元提供的碳源氣體到反應區域，如此由輸送單元 輸入到反應區域的催化劑將與碳源氣體反應形成碳奈米 管；以及一加熱構件，用以加熱反應區域。 較佳地，不同比重之氣體包含比重小於外界空氣比重 的氣體，且入口與出口的設置沿重力方向為低於第一佔據 區域，以防止不同比重之氣體因重力而經由入口或出口洩 漏出反應室外。 較佳地，不同比重之氣體為氫氣，其比重小於外界空 氣比重。 較佳地，不同比重之氣體包含比重大於外界空氣比重 9 200811032 的氣體，且入口與出口的設置沿重力方向為高於第一佔據 區域，以防止不同比重之氣體因重力而經由入口與出口洩 漏出反應室外。 較佳地，碳源氣體注入器包括複數個喷嘴，其對應反 應區域尺寸而分散排列，以均勻注入碳源氣體至反應區域。 較佳地，量產系統更包括一加熱構件，用以加熱反應 室的至少一區域，以還原經由開口注入到反應室的催化劑。 較佳地，碳奈米.管合成單元包括一朝上開啟的礙源限 制區，用以阻擋注入到反應區域的碳源氣體漏出反應區域。 較佳地，量產系統更包括一冷卻單元，用以冷卻反應 室靠近出口的區域，如此冷卻單元可冷卻碳奈米管。 根據本發明之另一態樣，提出一種合成碳奈米管的量 產方法，其包含下列步驟：準備一反應室，具有一不同比 重氣體佔據區域、和至少一連通外界空氣的開口；將至少 一不同比重之氣體填入不同比重氣體佔據區域，且氣體的 比重不同於外界空氣，以防止外界空氣經由開口進入不同 比重氣體佔據區域；提供一碳源氣體給不同比重氣體佔據 區域，以形成一反應區域，其利用不同比重之氣體來阻隔 外界空氣；透過開口提供一催化劑至反應室的反應區域； 藉由催化劑與形成反應區域的碳源氣體反應，而合成碳奈 米管；以及透過開口排放合成的碳奈米管至反應室的外部。 較佳地，不同比重氣體佔據區域包括一以橫越重力方 向而相通的第一佔據區域、一連接於入口與第一佔據區域 之間的第二佔據區域、以及一連接於出口與第一佔據區域 10 200811032 之間的第三佔據區域。反應室於其入口與出口處彎曲而定 義出第一佔據區域、第二佔據區域、和第三佔據區域。 較佳地，入口與出口在相對於第一佔據區域的重力方 向上具有一位差，以防止不同比重氣體佔據區域内的填充 氣體因重力而經由入口與出口洩漏出反應室外。 較佳地，不同比重氣體佔據區域内的填充氣體包含氫 氣，且上述方法更包括：加熱第二佔據區域；以及在第二 佔據區域中，利用氫氣與催化劑反應而還原催化劑。 較佳地，反應室更包括一排氣管，形成在其中一個入 口與出口附近而連接於外部，且上述方法更包括：利用排 氣管排放氫氣，以使不同比重氣體佔據區域中的氫氣壓力 與外界空氣壓力達平衡狀態。 本發明可應用於採用氣相合成法來合成碳奈米管的量 產系統。特別是，本發明可應用於合成碳奈米管的量產方 法，其使用含有開放型反應室之合成碳奈米管的量產系統。 【實施方式】 本發明之較佳實施例將配合所附圖式詳述如下。 第1圖為根據本發明第一實施例之合成碳奈米管的量 產系統截面圖。參照第1圖，第一實施例之合成碳奈米管 的量產系統包括一具預定空間於其中的拱形反應室1、一 用於還原金屬催化劑的金屬催化劑還原單元 1 00、一使用 還原之金屬催化劑來合成碳奈米管的碳奈米管合成單元 200、一用於冷卻合成之碳奈米管的冷卻單元300、一用於 11 200811032 提供碳源氣體、大氣等給反應室的氣體供應單元5 0、以及 一用於輸送金屬催化劑至反應室的輸送單元。 反應室1具有一開放結構，其中入口 2與出口 3為連 通外部，而沈降部5則位於其中央以定義出一空間。沈降 部 5用來收集與存放碳源氣體，且可視為碳源氣體限制 區。入口 2與出口 3分別可做為連通外部的開口。 氣體供應單元50包括碳源氣體貯槽60(如乙烯氣體貯 槽）、氬氣或氮氣貯槽 70(如惰性氣體貯槽）、和氫氣貯槽 80，其經由氣體供應管而各自提供氣體至反應室。每一貯 槽包括一淨化器。淨化器分別純化碳源氣體混合物、惰性 氣體混合物及氫氣混合物，以提供高純度的碳源氣體、惰 性氣體及氫氣。碳源氣體的例子包括甲烷、乙烷、乙烯、 乙快、丙烯、丁烧、丁稀、丁二稀、己烧、庚烧、甲苯、 苯、二曱苯、汽油、丙烷、液態丙烷氣（LPG)、液態天然 氣（LNG)、石油腦、一氧化碳、及醇基氣體。 金屬催化劑還原單元1 〇 〇用來還原引入反應室1的金 屬氧化物催化劑、或還原含金屬氧化物催化劑的催化材料 中的金屬氧化物催化劑。金屬催化劑還原單元1 〇 〇包括一 連接反應室1的第一氣體喷嘴112，以供應氫氣、及一裝 設在反應室1外的第一加熱構件11 0，以還原船形容器1 0 中的金屬氧化物催化劑。第一加熱構件11 0為一加熱產生 機構，用以加熱反應室内部，且設有溫度感測器（未繪示）， 以維持反應室内部溫度為60(TC至1200°c。 碳奈米管合成單元200藉由輸入反應室的金屬氧化物 12 200811032 催化劑與碳源氣體反應，而合成出碳奈米管。碳奈米管合 成單元200包括一用來合成碳奈米管的反應區域；一喷灑 頭 212，具有複數個喷嘴，以均勻注入碳源氣體；以及一 裝設在反應室1外的第二加熱構件2 10。由於喷嘴為排列 在喷灑頭2 1 2上，故碳源氣體可均勻注入到反應室1的預 定區域，而於反應室1的整個反應區域中均勻地合成碳奈 米管。第二加熱構件2 1 0為另一加熱產生機構，用以加熱 反應室内部，且設有溫度感測器（未繪示），以維持反應室 内部温度為600°C至1 200°C。 冷卻單元300包括一置於反應室1的冷卻構件310， 用以冷卻反應室内部。反應室1連接於第三氣體喷嘴3 1 2， 以注入惰性氣體，例如氬氣、氮氣或氫氣。冷卻單元 300 可包括圍住反應室1的水冷卻套。第三氣體喷嘴312供應 的氫氣不僅在反應室1内部形成氫氣環境，還清洗了合成 的碳奈米管。 反應室1包括設在反應室1入口 2附近的第一氣體排 氣管 1 3 0，以排出反應後殘留在反應室的氣體、以及設在 反應室1出口 3附近的第二氣體排氣管3 3 0，以排出反應 後殘留在反應室的氣體。此結構可使反應室中的氫氣壓力 與外界空氣壓力達到平衡，而有效防止外界空氣經由入口 與出口滲入反應室内。意即，當氫氣由氣體注入管注入到 反應室時，會提高反應室中的氫氣壓力；當氫氣壓力大於 外界空氣壓力時，則將氫氣排出反應室外。鑒於透過反應 室的入口與出口排放氫氣具危險性，反應室還包括獨立的 13 200811032 氣體排氣管，用以排出氫氣。 輸送單元用來傳輸含金屬催化劑的容器（如船 10)到反應室，其可為運輸帶等裝置。輸送單元可藉 馬達等而控制輸送金屬催化劑的速度，進而控制還 氧化物催化劑的時間及合成碳奈米管的時間。含金 劑的容器之一為船狀容器1 0，且可由各種材料構成 金屬、石英或石墨。船狀容器10具有貫穿底面的孔 還原金屬氧化物催化劑和合成碳奈米管的過程中， 器1 0的孔洞可增加氣體與金屬催化劑的接觸效果， 進金屬氧化物催化劑的還原和碳奈米管的合成。此 狀容器1 0的孔洞有助於排放反應生成物。 根據上述第一實施例之合成碳奈米管的量產系 屬催化劑還原單元1 0 0、碳奈米管合成單元2 0 0及 元3 00為依序設置，以進行連續的製程。 根據上述第一實施例之合成碳奈米管的量產系 金屬氧化物催化劑的船狀容器1〇利用輸送單元從 送至反應室，並經過金屬催化劑還原單元 1 00、破 合成單元200和冷卻單元300，然後經由出口 3輸 室外。當船狀容器1 〇由出口 3傳至外部後，接著從 器1 0取出合成的碳奈米管。在取出船狀容器1 0中 米管後，含有新的金屬催化劑的船狀容器1 0則由 送入反應室。如此，輸送單元可在入口與出口間循 越反應室。儘管圖式並未繪出輸送單元的循環結構 知此技藝者必對其有一定程度的了解，故於此不再 狀容器 由控制 原金屬 屬催化 ，例如 洞。在 船狀容 故可促 外，船 統，金 冷卻單 統，含 外部傳 奈米管 出反應 船狀容 的Z反奈 入口 2 環並穿 ，缺孰 贅述。 14 200811032 本發明之量產系統可重複上述連續的製程，因此可大量合 成碳奈米管。 雖然第1圖的加熱構件鄰接冷卻構件，但加熱構件亦 可置離冷卻構件，以防止彼此功能相互干擾；或者，二構 件間可加設熱傳防護構件，以避免功能相互干擾。由於熟 知此技藝者對這些結構有一定程度的了解，故於此不再贅 述。 第2圖繪示碳源氣體和氫氣在本發明第一實施例之合 成碳奈米管的量產系統反應室中的狀態。如第2圖所示， 反應室1為充滿碳源氣體和氫氣。如上述，因外界空氣無 法滲入反應室1，故反應室1内部可隔離外界空氣。 如第1及2圖所示，碳源氣體是透過連接氣體供應單 元的噴灑頭2 1 2而均勻注入反應室1，氫氣則是透過氣體 喷嘴1 1 2、3 1 2注入其中。若是提供已還原的金屬催化劑給 反應室，則可以氦氣、氖氣、氬氣、氙氣、或氮氣取代氩 氣來當作反應室的環境氣體。 假設反應室1内的溫度為約900°C ，反應室1外的温 度為約20 °C，則氣體重量可依下述計算。由於1莫耳氫氣 (22.4公升）在標準狀態下（0°C=274K、1大氣壓）重量為2 公克，且根據查理定律（Charle’slaw)，氫氣在溫度約為900 °C (11 74K)的反應室中體積會變大四倍，故1莫耳氫氣（22.4 公升）此時約重0.5公克。另外，由於1莫耳空氣（22.4公 升）在標準狀態下重28.9公克，故1莫耳空氣（22.4公升） 在室溫下（20°C )約重27公克。 15 200811032 反應室入口與出口處（即外界空氣與氫氣接觸處 外界空氣比重比氫氣比重大約 54倍，是以因不同比 故，空氣總是位在氫氣下方。由於反應室内部充滿氫 且反應室入口與出口處的氫氣與外界空氣達平衡狀態 此可防止外界空氣滲入反應室。因反應室内的氫氣佔 域為充滿比重不同於外界空氣比重的氣體，故其可視 不同比重氣體佔據區域。此氮氣佔據區域可防止外界 進入反應室。若反應室入口處的氫氣佔據區域視為一 側佔據區域、反應室出口處的氫氣佔據區域視為一出 佔據區域、且反應室入口與出口間的氫氣佔據區域視 中間佔據區域，則入口與出口的位置沿重力方向為低 間佔據區域，以防止外界空氣經由入口與出口進入 室。中間佔據區域為以橫跨重力方向的方向形成。入 佔據區域位於反應室入口與中間佔據區域之間，出口 據區域位於反應室出口與中間佔據區域之間。 反應室的沈降部5具有一縱深的空間，其係藉由 分反應室降低而比沈降部5周圍深來形成之。因從喷 直接注入到沈降部5上方的碳源氣體比重大於其周圍 氣比重，因此碳源氣體會下沉，並集中到沈降部 5。 降部5中的碳源氣體比氫氣重，故其不會上升而離開 部5。沈降部5中的碳源氣體佔據區域被反應室中的 佔據區域包圍。碳源氣體佔據區域為氫氣與金屬催化 應、及合成碳奈米管的反應區域，並且藉由氫氣隔開 應區域與反應室外的外界空氣。 )的 重之 氣， ，因 據區 為一 空氣 入口 口側 為一 於中 反應 口側 側佔 使部 灑頭 的氮 因沈 沈降 氫氣 劑反 此反 16 200811032 部分引進反應室的氫氣為透過反應室入口 2與 附近的排氣管1 3 0、3 3 0排出反應室外。此結構是用 氫氣壓力與外界空氣壓力間的平衡，以確保外界空 滲入反應室。氫氣從排氣管排放時會產生往排氣管 氣流。因排氣管1 3 0、3 3 0設在反應室入口 2與出口 ： 故氫氣會持續供應到反應室入口與出口 ，因而可維 壓力達到外界空氣不會流入反應室的程度。 採用根據第一實施例之合成碳奈米管系統來合 米管的方法將說明於下。 反應室1的金屬催化劑還原單元1 〇〇及碳奈米 單元200為利用第一加熱構件1 1 0與第二加熱構件 加熱至一預定溫度，如600°C至1200°C (步驟1)。 接著，利用氣體供應單元5 0提供惰性氣體（例 或氮氣）給反應室（步驟2)。當較大比重之惰性氣體 反應室時，較小比重之空氣或其他氣體會被惰性氣 及/或掃出反應室入口與出口。藉此可移除反應室1 純氣體，而在反應室内部形成惰性氣體環境。雖然 驟是在加熱反應室内部之後，才以惰性氣體填充反 部；然亦可在加熱反應室内部之前，即以惰性氣體 應室内部。 其次，利用氣體供應單元5 0提供氫氣至反應室 性氣體環境中（步驟3)。由於氫氣比填入反應室的惫 因此氫氣可從反應室上部填充至反應室。 然後，利用輸送單元將1 - 5 0奈米大小的金屬氧 出口 3 來維持 氣不會 流動的 ί附近， 持氫氣 成碳奈 管合成 210來 如氬氣 供應至 體推出 内的不 上述步 應室内 填充反 1的惰 t氣輕， 化物催 17 200811032 化劑或容納含金屬氧化物催化劑之催化材料的船形容器 1 0從外部經由入口 2輸送到反應室内（步驟4)。催化材料 可為粉末狀，且可包含氧化鎂（MgO)、氧化鋁（Al2〇3)、沸 石、氧化矽等。使催化材料變成奈米級多孔性催化材料的 方法可包括溶膠-凝膠法、沉澱法、或浸潰法。 輸送到反應室的金屬氧化物催化劑為經由金屬催化劑 還原單元1 0 0還原成不含氧的純金屬催化劑（步驟5)。例 如，若金屬氧化物催化劑為氧化鐵，則氧化鐵與氫氣反應 後會轉變成純鐵與水。金屬氧化物催化劑可包括始、鎳、 在目或其合金。 經過金屬催化劑還原單元1 00後，船形容器1 〇接著為 輸送到碳奈米管合成單元200。金屬催化劑在碳奈米管合 成單元2 0 0的反應區域中與碳源氣體反應而合成出碳奈米 管（步驟6)。 碳奈米管的合成為在氫氣環境中進行，其中氫氣移除 了金屬催化粒子表面的金屬氧化物，並抑制過多的後元素 供應至金屬催化劑表面。此外，氫氣還移除了吸附在金屬 催化粒子表面的非晶形碳材料，且抑制非晶形碳團聚物或 粉末依附到反應室中生成之碳奈米管的外表面。當然，藉 由調整合成碳奈米管時的碳源氣體流量與反應區域溫度， 可控制碳奈米管的生長速度、尺寸、及結晶度。 特別是當金屬催化劑粒子本質上係固著於粉末狀催化 材料之奈米級孔洞時，金屬催化粒子即使在合成碳奈米管 的高溫下，也能被抑制不動，因此可合成出大小均勻的碳 18 200811032 奈米管。另外，使用數奈米尺寸且本質上固著於粉末狀 質之奈米級孔洞的金屬催化劑顆粒來合成碳奈米管，由 並不會形成非晶形碳團聚物，故亦可合成出高純度的碳 米管。 含合成之碳奈米管的船形容器1 〇隨後輸送到冷卻 元3 00，並以冷卻構件3 1 0降溫（步驟7)。所合成的高純 碳奈米管通過冷卻單元3 0 0後冷卻到室溫，且於氫氣環 中反覆清洗之。 最後，合成之碳奈米管經由出口 3排出反應室外（步 8)。在反應室外取出船形容器1 0中的合成碳奈米管後， 添入金屬催化劑的船形容器1 0接著經由入口 2進入反 室，藉以連續合成出碳奈米管。採用此連續製程可大量 造碳奈米管。冷卻合成之碳奈米管的步驟可在碳奈米管 出反應室以後，再於外部進行，故在此實施例中，反應 不包括冷卻構件。 為了利用此連續製程合成碳奈米管，必須完全避免 氣滲入反應室。若氧氣經由空氣帶進反應室，則氧氣將 刻與碳源氣體反應而無法合成碳奈米管，並且氧氣可能 與氫氣反應而引起***。因此反應室中不能含有氧氣。 為了在反應室内部形成無氧環境，習知使用氣相合 法量產碳奈米管的批次系統是採用批次型結構，其反應 内部為完全與外部隔絕且充滿惰性氣體。 然而，採用上述結構需重複加熱反應室來合成碳奈 管、以及在每一次合成碳奈米管時冷卻反應室。因此習 基 於 奈 單 度 境 驟 新 應 製 排 室 空 立 會 成 室 米 知 19 200811032 批次型量產系統在合成碳奈米管前，需要極長的 間，故難以提高其生產率。 反之，本發明之反應室為連通外部，故反應室 保持在合成碳奈米管時的溫度，而不需反覆冷卻與 應室内部。根據本發明之用來合成碳奈米管的量產 一旦系統開始操作，即可連續製造碳奈米管，而不 製造。下述結構可達成連續合成碳奈米管的目的。 應室為連通外部，故金屬催化劑可持續供應至反應 外，當持續提供金屬催化劑至反應室時，碳奈米管 元2 0 0仍持續合成碳奈米管，進而大量製造碳奈米 達此目的，反應室必須為開放結構，其中入口與出 開狀態，且可避免外界空氣經由入口與出口進入反 藉由使不同比重之氣體佔據反應室特定區域，可防 空氣滲入反應室。由比重不同於反應室内其他氣體 所佔據的區域可視為一不同比重氣體佔據區域。 此外，由於反應室内的不同比重氣體之壓力和 入口與出口處的外界空氣壓力為達到平衡狀態，因 止外界空氣滲入反應室。 第3圖為根據本發明第二實施例之合成碳奈米 產系統截面圖。如第3圖所示，第二實施例之合成 管的量產系統具有一 V型結構，其中入口 2與出口 上開啟，碳奈米管合成單元200則位於反應室中央 沈降部 5中。在第二實施例之合成碳奈米管的量 中，分子量為39.948的氬氣做為反應室的環境氣體 準備時 内部可 加熱反 系統， 需停止 由於反 室。另 合成單 管。為 口為打 應室。 止外界 的氣體 反應室 此可防 管的量 碳奈米 3為朝 低處的 產系統 ，而分 20 200811032 子量大於氬氣的曱苯（分子量為92.1)則做為碳源氣體。 如同本發明第一實施例，第二實施例之量產系統包括 金屬催化劑還原單元1 〇〇、氣體供應單元、碳奈米管合成 單元200、以及冷卻單元300。為免贅述，部分元件於此將 省略繪示與說明。 以下將描述第二實施例之量產系統不同於第一實施例 的結構部份。 根據第二實施例的量產系統，反應室具有一開放結 構，其中入口 2與出口 3為朝上開啟，一先傾斜向上、再 向下延伸的A型部1 5 0則形成於入口 2附近。金屬催化劑 還原單元100位於A型部150。 氫氣透過氣體供應管提供至A型部150。由於氫氣的 比重小於外界空氣或反應室内氬氣的比重，因此氫氣可從 反應室上部填入A型部1 5 0。藉由注入氫氣可使A型部1 5 0 的中央區域充滿氮氣。在此實施例中’反應室入口 2處的 空氣比重大於A型部1 5 0内的氫氣比重，故空氣永遠位在 氫氣下方，而不會引進反應室。金屬催化劑還原渾元 1 00 形成於A型部1 5 0中，用以還原金屬氧化物催化劑。還原 反應室的金屬氧化物催化劑會消耗氫氣，因此需再提供氫 氣給反應室。A型部1 5 0具有一排放管，部分供應至反應 室的氫氣可經此排放管排出其外。 反應室1内連接A型部1 5 0的區域為填充氬氣。由於 氬氣的比重大於外界空氣或氫氣的比重，因此氬氣可從反 應室下部填入反應室。在此，若氬氣注入量超過一預定量， 21 200811032 則氬氣會將氫氣推擠出A型部1 5 0而填入A型部1 5 0。故 需調整氬氣注入量，並使其量不會超過對應Α型部150還 原區域的傾斜部分。 因外界空氣比重小於氬氣比重，故會位在氬氣上方， 是以即使外界空氣在反應室出口 3處接觸到氬氣，其也不 會滲入反應室。 在碳奈米管合成單元200中，比重大於氬氣比重的曱 苯為當作碳源氣體來合成碳奈米管。根據第二實施例的量 產系統，反應室包括一沿重力方向降低的沈降部 5。有鑒 於此，為使碳源氣體下沉並有效收集到沈降部 5，可使用 比重大於環境氣體比重的氣體做為碳源氣體。如此，反應 室沈降部5中的曱苯氣體將與金屬催化劑反應而有效合成 出碳奈米管。反應室的沈降部5是用來限制碳源氣體。 須注意的是，供應至反應室的環境氣體不限於氬氣， 其也可包含其他比重大於外界空氣比重的惰性氣體。另 外，碳源氣體不限於甲苯氣體，其亦可包含其他比重大於 環境氣體比重的氣體。 此實施例的量產系統包括A型部1 5 0，以於反應室1 中還原催化劑。然而，若提供給反應室的催化劑已經還原， 則不需在反應室中還原催化劑，也不需形成A型部1 5 0。 第4圖為根據本發明第三實施例之合成碳奈米管的量 產系統截面圖。如第4圖所示，第三實施例之合成碳奈米 管的量產系統類似第二實施例的量產系統，除了反應室結 構不同，其修改用來限制碳源氣體的沈降部而於反應室上 22 200811032 部形成一碳源氣體限制區2 5 0。 如同第一實施例’第三實施例之量產系統包括氣體供 應單元、碳奈米管合成單元200、以及冷卻單元3 00，但不 包括金屬催化劑還原單元。由於第三實施例之量產系統使 用已還原的金屬催化劑，因此可省略不用金屬催化劑還原 單元。 根據第三實施例之量產系統，碳源氣體比重為小於反 應室之反應區域中的環境氣體比重。在此實施例中，氬氣 是當作反應室的環境氣體，比重小於氬氣比重的乙烯等氣 體則是當作碳源氣體。然其他比重差異如上述的氣體亦可 分別做為環境氣體和碳源氣體。碳源氣體限制區2 5 0之周 邊由一内壁阻隔、且其上部由反應室頂面阻隔，因此其僅 向下開啟。第三實施例的量產系統包括噴灑頭，具有朝上 配置的喷嘴，以向上噴注碳源氣體。如此，比重較小的碳 源氣體會上升而集中到碳源氣體限制區2 5 0。 碳源氣體限制區2 5 0收集的碳源氣體會與供應至碳源 氣體限制區2 5 0的金屬催化劑反應，進而合成碳奈米管。 第5圖為根據本發明第四實施例之合成碳奈米管的量 產系統截面圖。如第5圖所示，第四實施例之合成碳奈米 管的量產系統類似第一實施例的量產系統，除了其包括形 成於反應室二側的U型部400、及連接於U型部400並向 上開啟的入口 2與出口 3。 如同第一實施例，第四實施例的量產系統包括金屬催 化劑還原單元 1 〇 〇、氣體供應單元（未繪示）、碳奈米管合 23 200811032 成單元2 0 0、以及冷卻單元3 0 0，未繪於圖式中之部分係便 於清楚描述此系統。 為阻擋外界空氣，可將比重大於外界空氣比重的氬氣 留在反應室的各U型部400内。反應室的U型部400乃由 注入管連接，氬氣經由注入管進入其中。反應室在入口 2 處的U型部400後面還包括金屬催化劑還原單元1 00及碳 奈米管合成單元 2 0 0。同時，反應室的金屬催化劑還原單 元100及碳奈米管合成單元200為充滿氫氣，而出口 3處 的U型部4 0 0為充滿氬氣。如此，外界空氣將於反應室入 口 2與出口 3處接觸到氬氣。因外界空氣比重小於氬氣比 重，故外界空氣會位在氬氣上方，且無法滲入反應室。 須注意的是，注入U型部400的氣體不單只有氬氣， 其他比重大於外界空氣比重的惰性氣體亦可使用。另外， 注入各U型部4 0 0的氣體不一定要相同，其也可分別注入 不同的氣體。 在反應室的碳奈米管合成單元200中，比重大於氫氣 比重的乙烯等氣體（碳源氣體）經由喷灑頭注入且集中至低 處的沈降部5後，會與通過沈降部5的金屬催化劑反應， 進而合成出碳奈米管。 對上述實施例之量產系統而言，若碳奈米管合成單元 或反應區域的長度增加，則輸送含催化劑之構件以使催化 劑與氣體反應的距離亦隨之增長，藉此可提高輸送含催化 劑之構件的速度。換言之，當決定了反應時間和反應室合 成溫度時，若碳奈米管合成單元的長度較長，則可加快金 24 200811032 屬催化劑輸入反應室的速度，因而可提高生產效率。 雖然上述實施例之量產系統的加熱構件是裝設在反應 室外部，但本發明並不侷限在此種結構。或者，加熱構件 可整合至金屬催化劑還原單元與碳奈米管合成單元。本發 明的範圍與應用包含上述所有情況。 不同比重氣體佔據區域是指反應室中被一氣體持續佔 據的預定空間，且該氣體的比重不同於周圍氣體（如外界空 氣）的比重。 本發明具複數個彎曲部的量產系統從反應室入口 2至 出口 3之間可包括一或多個不同比重氣體佔據區域。 若二或多個不同比重氣體佔據區域形成於反應室中， 則這些不同比重氣體佔據區域可各自填入不一樣的氣體。 輸送含催化劑之構件的方式不僅可採用具運輸帶的自 動運輸機構，其亦可採用手動運輸機構。 反應室的沈降部5或碳源氣體限制區2 5 0是將碳源氣 體集中到特定位置，故使用沈降部5或碳源氣體限制區2 5 0 可增加碳奈米管的合成效率。 第6圖為根據本發明第五實施例之合成碳奈米管的量 產系統截面圖。參照第6圖，第五實施例之合成碳奈米管 的量產系統包括一具預定空間於其中的反應室1 a。反應室 la包括位在一側的入口 2a與出口 3a。反應室入口 2a與出 口 3 a均為開放型結構，且連通大氣。此系統更包括一輸送 單元15a，其將桶狀容器10a(即含金屬催化劑之構件）從入 口 2a經由反應室la内部運送至出口 3a。 25 200811032 反應室1 a具有一直立的結構。反應室1 a包括位 側且向下開啟的入口 2 a、從反應室入口 2 a向上延伸 屬催化劑還原單元1 〇〇a、連接金屬催化劑還原單元 且向下延伸的碳奈米管合成單元200a、連接碳奈米管 單元200a且位於反應室la下部的冷卻單元300a、以 接冷卻單元3 0 0 a且向上開啟的出口 3 a。金屬催化劑 單元100a、碳奈求管合成單元200a、及/或冷卻單元 係與氣體供應單元5 0a連結，其提供碳源氣體、氫氣 氣（或氮氣等惰性氣體）等至反應室。反應室的入口 2a 屬催化劑還原單元l〇〇a、碳奈米管合成單元200a、冷 元300a、及出口 3a依序為互相連結。 金屬催化劑還原單元1 00a藉由還原金屬氧化物 劑而移除引入反應室1 a之金屬氧化物催化劑的氧。金 化劑還原單元 1 〇〇a 包括一具空間於其中之上反 110a、以及一置於上反應室1 1 0 a的第一加熱構件 1 5 金屬催化劑還原單元l〇〇a尚包括氫氣排放管120a， 反應室入口 2上方側，以使氫氣排放管1 2 0 a連通外 氣。上反應室1 1 0 a上端為封閉型態，以限制反應室内 的氣體。第一加熱構件1 5 0 a為一加熱產生機構，用以 反應室内部，且設有溫度感測器（未繪示），以維持反 内部溫度為 600°C至 1 200°C。金屬催化劑還原單元 的上反應室ll〇a為充滿供給反應室的氫氣。由反應室 小比重之氫氣所佔據在上反應室 11 0a的區域將視為 氣佔據區域。金屬氧化物催化劑是以含金屬氧化物催 於一 的金 100a 合成 及連 還原 300a 、氬 、金 卻單 催化 屬催 應室 0 a 〇 位於 界空 上升 加熱 應室 100a 内最 一氫 化劑 26 200811032 之催化載體的形式供應。 在碳奈米管合成單元200a中，金屬催化劑會與碳源氣 體反應而生成碳奈米管。碳奈米管合成單元200a包括一中 央反應室2 1 0a，具有讓較小比重之氣體上升的直立空間、 以及一置於中央反應室210a的第二加熱構件250a。因中 央反應室 2 1 0 a含有使金屬催化劑與碳源氣體反應並合成 碳奈米管的反應區域，故中央反應室2 1 0a具有足使金屬催 化劑充分流貫的長度，且其内徑大於上反應室1 1 〇a或下反 應室3 1 0a，以確保其内含有足夠的碳源氣體。第二加熱構 件250a亦為一加熱產生機構，用以加熱反應室内部，且設 有另一溫度感測器（未繪示），以維持反應室内部溫度為6 00 t至1200°C。構成碳奈米管合成單元200a的中央反應室 2 1 0a為充滿碳源氣體，如比重大於氫氣比重的乙烯氣體。 由反應室内比重大於氫氣之乙烯氣體所佔據在中央反應室 2 1 0a的區域將視為一乙烯氣體佔據區域。中央反應室2 1 0a 的實施結構例如可依不同的氣體比重而使氣體上升或下 降。須注意的是，中央反應室2 1 0a不限於第6圖的斜坡結 構，其也可採用其他具適當斜度的結構，只要此結構可依 氣體比重的不同而使氣體上升或下降即可。 冷卻單元300a用來冷卻碳奈米管。冷卻單元300a包 括一下反應室310a，連接碳奈米管合成單元200a且具有 密閉的底面以留住氣體（例如比碳源氣體重的氬氣）、以及 一設於下反應室310a的冷卻構件350a。構成冷卻單元300a 的下反應室310a為充滿氬氣，其為比重大於乙烯氣體的惰 27 200811032 性氣體之一；由氬氣所佔據在下反應室3 1 0 a的區域將視為 一氬氣佔據區域。如上述，上反應室的氫氣佔據區域和下 反應室 3 1 0 a的氬氣佔據區域沿重力方向上為填入不同比 重的氣體，因此這兩個區域將視為不同比重氣體佔據部。 在此實施例中，冷卻構件3 5 0 a是由水冷卻套組成。但 其他各種具冷卻功能的冷卻構件3 5 0 a亦可使用。下反應室 3 1 0 a形成在具U型排放管2 0 a的内側底部，U型排放管2 0 a 是用來排放包括水等的副產物。由於U型排放管20a的U 型彎曲結構内含有積水，故氣體不會從下反應室 3 1 0 a漏 出。冷卻單元300a可降低氬氣溫度，如此可避免氬氣比重 因熱膨脹而變小。 氣體供應單元50a包括碳源氣體貯槽、氬氣或氮氣貯 槽、和氫氣貯槽，其經由具開/關閥之氣體供應管各自連接 至反應室。每一貯槽包括一淨化器。淨化器分別純化混合 碳源氣體及混合氫氣，以提供高純度的碳源氣體及氫氣。 碳源氣體的例子包括曱烧、乙烧、乙稀、乙炔、丙稀、丁 烷、丁烯、丁二烯、己烷、庚烷、曱苯、苯、二曱苯、汽 油、丙烷、液態丙烷氣（LPG)、液態天然氣（LNG)、石油腦、 一氧化碳、及醇基氣體。惰性氣體存放在下反應室3 1 0 a。 本發明所使用的惰性氣體不限於氬氣或氮氣，任一比碳源 氣體重的惰性氣體皆可使用。在連接冷卻單元3 00a之氣體 供應單元5 Oa注入管所提供的氣體中，碳源氣體向上移動 而至碳奈米管合成單元2 0 0a，氫氣則向上移動、流過碳奈 米管合成單元2 0 0 a而達金屬催化劑還原單元1 0 0 a。在此， 28 200811032 氫氣於上升、流經碳奈米管合成單元2 0 0 a的過程中，會碰 撞碳奈米管合成單元200a内的碳源氣體並促使其移動，移 動中的碳源氣體將積極接觸金屬催化劑而促進碳奈米管的 合成。 輸送單元1 5 a將含催化劑之構件從入口 2 a運送至反應 室出口 3a，並在反應室内循環移動。輸送單元15a可藉由 控制馬達而控制含催化劑之構件的輸送速度，進而控制金 屬氧化物催化劑的還原時間及碳奈米管的合成時間。此實 施例的含催化劑之構件為桶狀容器1 〇 a，用以提供氣相合 成法合成碳奈米管所需的金屬催化劑。桶狀容器1 0 a上端 係以絞練連接於輸送系統。如此，桶狀容器1 Oa在任一位 置可藉由鉸鏈之連接而維持呈直立狀態，故含催化劑之構 件内的金屬催化劑不會傾倒出來。含催化劑之構件並不限 於桶狀容器，其可使用其他適合輸送金屬催化劑的容器形 式。含催化劑之構件可由各種材料構成，例如金屬、石英、 石墨等。含催化劑之構件可具有貫穿底面的孔洞，使金屬 催化劑與破源氣體進行活化反應。 各圖式中以虛線分隔的上、下部份乃表示不同氣體所 佔據的區域。 雖然此實施例的量產系統是採用桶狀容器做為含金屬 催化劑之構件，但本發明不限於此結構。例如，本發明的 量產系統可使用其他構件，如可放入金屬催化劑的船形容 器或托盤。在此實施例中，可依據含催化劑之構件的類型 選擇適當的輸送系統。然熟知此技藝者必對其有一定程度 29 200811032 的了解，故於此不再贅述。 根據第五實施例之採用合成碳奈米管系統來合成碳齐 米管的方法將說明於下。 不 反應室1 a的金屬催化劑還原單元1 〇〇a及唆奈米管合 成單元20〇a為利用第一加熱構件11〇 盥 — 乐一加熱構件 2 10a來加熱至一預定溫度，如6〇〇t：至12〇〇。〇(步驟1)。 接著，利用連接上反應室ll〇a之惰性氣體注入管來提 供惰性軋體（例如氬氣或氮氣）給反應室（步驟2)。 —严 』符別疋若 鼠氣透過連接上反應室丨丨0a之惰性氣體注入管供應至反 應室’則當比重大於外界空氣比重的氬氣在移往上反應室 1 1 〇 a之左側或右側時，將迫使反應室内部的空氣炉由入口 2a興出 a排出反應 反應室1 a外而於反應室丨a内形成惰性氣體環境 其次，利用氣體供應單元50a提供氫氣及唆源氣體至 反應室1 a中（步驟3)。 卞然後，將金屬氧化物催化劑或容納含金屬氧化物催化 劑之催化材料的桶狀容器1 〇a從外部經由入 — a鞠达到反 心至（步驟4)。桶狀容器1 0 a是利用輸送單元丨5 &運輸。 催化材料可為粉末狀’且可包含氧化鎂（Mg〇)、氧化 鋁（Ah 〇3)、沸石、氧化矽等。使催化材料變太 性催化& a, X /丁、木級多孔 料的方法可包括溶膠-凝膠法、沉澱法、或浸潰法。 ::到反應室的桶狀…〇3中的金屬氧化物催化劑 二、:屬催化劑還原單元1〇〇a還原成金屬催化劑(步驟 ?如’若金屬氧化物催化劑為氧化鐵，則氧化鐵盘氫 30 200811032 氣反應後會轉變成純鐵與水。金屬氧化物催化劑可包括 I古、鎳、钥或其合金。 經過金屬催化劑還原單元1 0 0 a後，桶狀容器1 0 a之金 屬催化劑接著為輸送到碳奈米管合成單元200a。金屬催化 劑在碳奈米管合成單元200a中與碳源氣體反應而合成出 碳奈米管（步驟6)。 當然在合成碳奈米管時，可藉由調整碳源氣體的注入 量與碳奈米管合成單元2 0 0 a的溫度，而控制碳奈米管的生 長速度、尺寸、及結晶度。 特別是當金屬催化粒子本質上係固著於粉末狀催化材 料之奈米級孔洞時，金屬催化粒子即使在合成碳奈米管的 高溫下，也能被抑制不動，因此可合成出大小均勻的碳奈 米管。另外，使用數奈米大小且本質上係固著於粉末狀基 質之奈米級孔洞的金屬催化劑粒子來合成碳奈米管，並不 會形成非晶形碳團聚物，故亦可合成出高純度的碳奈米管。 含合成之碳奈米管的桶狀容器1 〇a隨後輸送到冷卻單 元300a，並由冷卻構件350a冷卻至室溫（步驟7)。或者不 進行此冷卻步驟，碳奈米管可先排出反應室外，再於外部 降溫。 冷卻後，合成之碳奈米管經由出口 3 a排出反應室外 (步驟8)。在取出桶狀容器10a中的碳奈米管後，新添入金 屬催化劑的桶狀容器1 0 a接著經由入口 2 a進入反應室。由 於桶狀容器1 0 a持續進出反應室，新添入桶狀容器1 0 a的 金屬催化劑亦不斷與碳源氣體反應而連續合成碳奈米管， 31 200811032 因而可大量製造碳奈米管。從桶狀容器l〇a取出合 奈米管及添入新的金屬催化劑至桶狀容器的方法可 般熟知的自動化設備。 一較佳實施例之合成碳奈米管的量產系統包括 置的金屬催化劑還原單元1 〇 〇 a、碳奈米管合成單元 及冷卻單元3 0 0 a，且具有連通外界空氣的開放結構 可用於連續合成碳奈米管。換言之，本發明是採用 程來合成碳奈米管，其可連續輸入金屬催化劑至反 並可連續將合成之碳奈米管從反應室排放至外部。 氣體注入管所供應至反應室的碳源氣體、氫氣 具有不同的比重，其中比重最小之氫氣為填入金屬 還原單元100a的上反應室110a，比重較大之乙烯 填入碳奈米管合成單元200a的中央反應室210a， 大之氬氣則填入反應室最底部的下反應室3 1 0a。製 時，因氣體供應單元5 0a的某些氣體注入管為連接 應室210a下部，故乙稀氣體與氫氣會上升，而氬氣 至反應室的氣體之中。即，氫氣經過中央反應室2 1 < 上升至上反應室 1 1 0 a，乙烯氣體則會上升至中央 2 1 0a，並迫使原本在中央反應室2 1 0a的氣體流動。 會促進當作碳源氣體的乙烯氣體接觸金屬催化劑， 生成碳奈米管。尤其因為乙烯氣體比重大於氫氣比 於氬氣比重，是以乙烯氣體會留在中央反應室 21 外，若中央反應室2 1 0 a的上、下端為瓶頸構造，則 應室210a更易於收集和保留乙稀氣體。 成之碳 採用一 依序配 200a ^ ，因此 連續製 應室， 與氬氣 催4匕劑 氣體為 比重最 程進行 中央反 會下沉 〕a後會 反應室 此流動 而有效 重且小 0 a °此 中央反 32 200811032 高溫氫氣為收集到入口 2 a上方的金屬催化劑還原單 元1 0 0 a。因高溫氫氣的比重小於外界空氣，故外界空氣總 是位於氫氣下方，而可避免外界空氣進入反應室la。特別 是，假設反應室1 a内部溫度為約9 0 0 °C，反應室1 a外部 溫度為約20 °C。由於1莫耳氫氣（22.4公升）在標準狀態下 (0°C =2 74K、1大氣壓）之重量為2公克，且根據查理定律 (ChaHe’s law)，氫氣在溫度約為900°C (1174Κ)的反應室中 體積會變大四倍，因此1莫耳氫氣（2 2.4公升）此時約重0.5 公克。同時，由於1莫耳空氣（22.4公升）在標準狀態下重 28.9公克，故1莫耳空氣（22.4公升）在室溫下（20 °C)約重 27公克。換言之，外界空氣比重比反應室入口處（空氣與 氫氣接觸處）的氫氣比重大約5 4倍，因比重差異，空氣將 一直位在氫氣下方，而不會穿越氫氣、進入反應室la。若 入口 /出口為朝下開啟，則比重小於外界空氣比重的氣體 (例如氫氣）應佔據在入口 /出口附近，以防止外界空氣滲入 反應室。 另外，反應室出口 3a下方的氬氣（分子量為 39.948) 是由冷卻單元3 0 0 a降溫且維持在室溫狀態，此時1莫耳氬 氣（2 2.4公升）約重 3 5公克。由於外界空氣的比重小於氬 氣，故外界空氣總是位於氬氣上方，而不會穿越氬氣、進 入反應室 1 a。若入口 /出口為朝上開啟，則比重大於外界 空氣比重的氣體（例如氬氣）應佔據在入口附近，以防止外 界空氣滲入反應室。 反應室内一定量的氫氣可經由上反應室 ll〇a的氫氣 33 200811032 排放管1 2 0 a排出反應室外。藉由使反應室入口 2 a處氫氣 接觸外界空氣部份的氫氣壓力與外界空氣壓力達到平衡， 可有效避免外界空氣滲入反應室。換言之，此結構是用來 維持反應室入口處氫氣壓力與外界空氣壓力間的平衡，其 可利用個別的氫氣排放管1 20a排放一定量的氫氣，及利用 氣體注入管注入過量氫氣至反應室來提高氫氣壓力，並避 免氫氣因壓力增加而從入口 2 a流出於外。即，儘管還原金 屬氧化物催化劑時，一定量的氫氣會與金屬氧化物催化劑 反應，仍可注入超過反應量的氫氣至反應室中來維持反應 室内的氫氣壓力達預定值以上。 在此，一定量氫氣由氫氣排放管1 2 0 a排出於外時，氫 氣會從金屬催化劑還原單元1 〇〇a的上反應室1 1 Oa流向氫 氣排放管120a，而導向反應室入口 2a，如此可避免從入口 2a引進外界空氣至反應室。 本發明之合成碳奈米管的量產系統可使不同比重之氣 體各自佔據反應室的特定區域，如此具開放結構之系統即 使其反應室為完全開放狀態，外界空氣也不會滲入反應室。 若氧氣經由空氣帶進反應室，則氧氣將立刻與碳源氣 體進行氧化反應而無法合成碳奈米管，且氧氣會與氫氣反 應而可能引起***。因此反應室中不能含有氧氣。 對習知使用氣相合成法量產碳奈米管的批次系統而 言，其反應室内部完全與外部隔絕，且在合成碳奈米管前， 會先填入惰性氣體於反應室來排出反應室中的氧氣與空 氣，以在反應室内部形成無氧環境。 34 200811032 上述習知系統在每一次合成碳奈米管時需重複移除反 應室中的氧氣、加熱反應室來合成碳奈米管、冷卻反應室、 以及取出合成之碳奈米管的步驟，因此其需要額外的準備 時間。習知合成碳奈米管的量產系統因受限於額外的準備 時間而相對壓縮了實際合成碳奈米管的時間，故其難以提 高生產率。 反之，本發明之合成碳奈米管的量產系統只在開始準 備合成碳奈米管的階段才需達成及維持合成碳奈米管時的 反應環境。是以根據本發明之合成碳奈米管的量產系統， 可連續製造碳奈米管，甚至在操作系統時也不需停止製造。 由於金屬催化劑為持續送入完全開放的反應室，因此 本發明之系統可連續合成碳奈米管。即使金屬催化劑從外 部送入反應室，碳奈米管合成單元200a仍可持續合成出碳 奈米管。 雖然反應室内部是完全連通外界空氣，但反應室特定 區域的氣體可徹底阻擋外界空氣進入反應室。即不同比重 之氣體分別佔據反應室的特定區域，並阻擋其他氣體滲入 其特定區域，進而阻止外界空氣滲入反應室。因佔據反應 室特定區域的氣體壓力與外界空氣壓力達平衡狀態，故外 界空氣無法進入反應室。 第7圖為根據本發明第六實施例之合成碳奈米管的量 產系統截面圖。如第7圖所示，第六實施例的量產系統包 括一反應室1 a，具有加熱構件和含内部空間的通道4 a，以 連繫反應室外部、以及一輸送單元15a，其經由通道4a輸 35 200811032 送金屬催化劑至反應室1 a。通道4 a是讓催化劑進出 室的地方，其可視為入口或出口。 在此實施例中，量產系統的反應室1 a包括朝下開 通道4a、以及位於通道4a上方之反應室内的碳奈米 成單元200a。 反應室設有氣體供應單元 50a，其包括氣體貯槽 體注入管，每一氣體注入管連接於反應室相關的氣 槽，且具有開/關閥以分別提供碳源氣體、氫氣與惰性 給反應室。 碳奈米管合成單元200a包括一喷灑頭230a，連 應室1 a上部的碳源氣體貯槽，且具有複數個噴嘴以均 入碳源氣體；一碳源氣體限制區 280a，位於喷灑頭 下方且其上端為開啟（如同沒有頂面的箱子）以收集碳 體；以及一設於反應室的加熱構件2 5 0a。 碳源氣體限制區280a具有盒狀結構，其由預定高 内壁圍繞且僅打開其頂面。喷灑頭230a設置比碳源氣 制區2 8 0 a内壁頂端還深。採用此結構，碳源氣體從喷 23 0a喷出後，會停留在碳源氣體限制區280a内。從 氣體限制區2 8 0 a溢流出的碳源氣體主要留在反應室一 喷灑頭的面積為大到足以涵蓋碳源氣體限制區之 頂面的大部分範圍。當然，碳奈米管合成單元於喷灑 碳源氣體限制區之間尚包括讓含催化劑之構件進入碳 體限制區的空間、以及讓含催化劑之構件離開碳源氣 制區的空間。如此，喷灑頭可有效避免比碳源氣體輕 反應 啟的 管合 與氣 體貯 氣體 接反 勻注 23 0a 源氣 度之 體限 灑頭 碳源 「部。 開啟 頭與 源氣 體限 的氫 36 200811032 氣進入碳源氣體限制區，並可讓含催化劑之構件進出碳源 氣體限制區，藉以維持碳奈米管的合成效率。 碳源氣體限制區 280a的上端包括餘裕（leeway )空 間，以供桶狀容器（即含催化劑之構件）從一上側進入並從 另一上側離開。如此5碳源氣體限制區的破源氣體將在反 應區域中與金屬催化劑反應，此反應區域乃位於碳源氣體 限制區上之佔據餘裕空間的氫氣下方。 碳源氣體限制區2 8 0 a設有排放管2 8 5 a，用以排放水、 殘餘的碳源氣體與其他副產物。若過量供應碳源氣體至反 應室，則部份碳源氣體經由排放管2 8 5 a排到外部。碳源氣 體限制區2 8 0 a是用來收集比氫氣重的碳源氣體，且不限於 盒狀結構。碳源氣體限制區2 8 0a可為任一具開放上部、封 閉周圍和底面的結構。 附加至反應室的加熱構件加熱整個反應室内部。當桶 狀容器10a經由通道4a進入反應室時，桶狀容器10a内的 金屬氧化物催化劑在桶狀容器1 〇a到達碳源氣體限制區 280a前，會先與由氣體注入管注入反應室的氫氣反應而還 原，藉以移除反應室中的氧。於是，本身充滿氫氣的反應 室為當作金屬催化劑還原單元，以還原金屬催化劑。 此外，反應室包括一分離的誘導還原導引面，其接觸 碳源氣體限制區側邊，以確定金屬催化劑的還原。誘導還 原導引面具有足夠的側向長度，以確保含催化劑之構件沿 反應室上部空間移動的時間夠長來還原其中的金屬氧化物 催化劑。雖然本實施例為包括分離的誘導還原導引面，但 37 200811032 本發明並不限於此結構。或者，輸送單元可配置呈適當的 運輸路徑，使含催化劑之構件在到達碳源氣體限制區前， 已沿著反應室上部移動足夠的距離，因而有充足的時間來 還原金屬氧化物催化劑。 通道4a從反應室向下延伸一預定距離。反應室更包括 一冷卻單元300a，位於通道4a附近且包含冷卻構件350a， 以冷卻排出反應室外的碳奈米管。 氫氣排放管1 2 0 a形成在通道4 a —側。氣體供應單元 5 0a若提供過量的氫氣將會持續提高氫氣壓力。此時需排 出一定量的氫氣至反應室外，以保持通道4a處接觸外界空 氣的氫氣壓力與外界空氣壓力間的平衡。為達此目的，氫 氣的排放是使用氫氣排放管1 2 0 a，而非通道4 a。氫氣排放 管1 2 0 a設在反應室下部，可使氫氣在高溫條件下上升至反 應室上部時不會直接排放至外部，而是充分留在反應室， 藉以有效提高反應室内的氫氣壓力。 由於反應室外的外界空氣比重大於氫氣比重，因此外 界空氣會保持在氫氣下方。加上通道4 a為朝下開啟，故比 重較大的外界空氣將無法滲入充滿氫氣的反應室。再者， 維持通道4a處之氫氣接觸外界空氣的氫氣壓力和外界空 氣壓力間的平衡，也可防止外界空氣進入反應室。 儘管此實施例之量產系統的通道4 a為朝下開啟，然比 重大於反應室之高溫氫氣的外界空氣一直位於氫氣下方， 因而可避免外界空氣滲入反應室la。 在此實施例中，氬氣注入管為連接反應室的喷灑頭。 38 200811032 依此結構，在反應準備階段注入的氬氣會下推擠 應室的空氣，使空氣從通道排出，進而使反應室 惰性氣體環境。接著，氫氣及碳源氣體提供至反 原金屬催化劑，藉以合成碳奈米管。第六實施例 件與製程與第一實施例雷同，故於此不再贅述。 第8圖為根據本發明第七實施例之合成碳奈 產系統截面圖。如第8圖所示，第七實施例的量 第六實施例相同的部份為，桶狀容器1 0 a(即含催 件）可經由通道4 a進出系統。第七實施例與第六 同的部份則在於通道4 a為朝上開啟且連接U型 第七實施例的量產系統更包括一輸送單元 1 5 a， 含金屬氧化物催化劑的桶狀容器1 0 a至反應室内 碳奈米管、以及將桶狀容器傳出反應室外。 U型部4 0 0 a從通道4 a向下延伸、轉彎且水 定距離後，延伸端連接至用於合成碳奈米管的碳 成單元200a 〇 U型部400a構成一冷卻單元300a，其包括 部4 0 0 a附近的冷卻構件3 5 0 a。U型部4 0 0 a旁則 催化劑還原單元1 0 0 a和碳奈米管合成單元2 0 0 a 内。 當冷卻構件3 5 0 a冷卻U型部4 0 0 a時，U : 為充滿由氣體供應單元50a之氬氣注入管注入且 度的氬氣。冷卻之氬氣的比重相對提高到大於外 比重。因此在反應室通道4 a處，外界空氣將一直 原存於反 内部變成 應室來還 的其他元 米管的量 產系統與 化劑之構 實施例不 部 4 0 0 a ° 用來傳輸 ，以合成 平延伸一 奈米管合 置於U型 設有金屬 於反應室 S ^ 400a 達預定高 界空氣的 位在具較 39 200811032 大比重之氬氣的上方，而可阻擋外界空氣進入反應室1 a。 佔據U型部4 0 0 a的氣體可為與氬氣一樣之任一比重大於 外界空氣比重的惰性氣體。 反應室具有一水平延伸部1 〇 5 a，其從U型部4 0 0 a彎 折，並由反應室外部的加熱構件加熱。在水平延伸部1 0 5 a 中，氫氣注入管提供給反應室的氫氣會與由輸送單元 15a 引入反應室水平延伸部1 0 5 a的金屬氧化物催化劑反應，進 而移除金屬氧化物催化劑中的氧。經過水平延伸部 l〇5a 後，含催化劑之構件緊接著傳送到後反應室2 0 5 a的頂面。 如此即使殘有少量未還原的金屬氧化物催化劑，其仍可由 後反應室2 0 5 a上部的氫氣還原，而完全還原金屬氧化物催 化劑。水平延伸部1 0 5 a不侷限於第8圖所示的長度，其可 具有使金屬氧化物催化劑充分還原的長度。 連接水平延伸部l〇5a的後反應室205a包括一預定大 小的内部空間、以及一置於上部的噴灑頭2 3 0 a，以均勻注 入碳源氣體。後反應室2 0 5 a包括一設於上部的氫氣排放管 2 0 7a，用以排放比碳源氣體輕之氫氣到外部、以及一設於 下部的加熱構件 250a。由輸送單元 15a運送至後反應室 205a的含催化劑之構件在通過喷灑頭230a下方時，内含 之金屬氧化物催化劑會與碳源氣體反應而合成碳奈米管。 合成之碳奈米管隨著含催化劑之構件由輸送單元1 5 a沿相 同路徑送出反應室外。 後反應室2 0 5 a的底面係比水平延伸部1 0 5 a深，且喷 灑頭23 0a設置於靠近後反應室205a底面。依此結構，後 40 200811032 反應室2 0 5 a可使碳源氣體聚集在底部的預訂空間，而 一反應區域供金屬催化劑與碳源氣體反應。因金屬催 直接通過後反應室20 5 a底面的上方，故其可與聚集於 碳源氣體反應，進而有效合成碳奈米管。換言之，後 室2 0 5 a的底面比水平延伸部1 0 5 a還深，可使比氫氣 碳源氣體因重力而聚集在後反應室205a的下部空間， 提供反應效率。 其他元件在參考上述實施例後必能清楚了解，故 不再贅述。 第9圖為根據本發明第八實施例之合成碳奈米管 產系統截面圖。如第9圖所示，第八實施例的量產系 似第七實施例的量產系統，除了第八實施例的量產系 包括U型部，且通道為朝下開啟。 因從朝下開啟的通道至反應室為填滿氫氣，是以 室外的空氣無法進入反應室。外界空氣無法進入反應 原因已詳述於第五及第六實施例，故於此不再贅述。 第八實施例的量產系統不同於第七實施例的部份 括氫氣排放管2 0 7 a為設在通道上部。形成在通道附近 氣排放管2 0 7 a可防止氫氣由通道排放。 根據上述實施例之量產系統，若碳奈米管合成 2 0 0 a具有較長的長度供含催化劑之構件移動，則其可 的時間將隨之拉長，藉此可提高輸送含催化劑之構件 度。換言之，當決定了合成反應的時間和反應室溫度 若碳奈米管合成單元2 0 0 a的長度較長，則可加快金屬 形成 化劑 此的 反應 重的 進而 於此 的量 統類 統不 反應 室的 還包 的氫 單元 反應 的速 時， 催化 41 200811032 劑輸入反應室的速度，因而可提高生產效率。 在上述實施例之量產系統中，雖然加熱構件和冷卻構 件3 5 0 a為設置在反應室外部，但本發明並不限於此結構。 這些元件可設置在任一適合加熱及冷卻的位置。 根據本發明，量產系統可依反應室形狀來安排一或多 個不同比重氣體佔據區域。此外，彼此隔開的不同比重氣 體佔據區域可填入相同或不同的氣體。 輸送含催化劑之構件的機構不限於使用運輸帶，其可 使用其他熟知的運輸構件。 反應室的碳源氣體限制區 2 8 0a是用來加強碳奈米管 的合成效率，並且用來聚集碳源氣體到特定位置。 雖然本發明實施例採用分離的冷卻構件來冷卻合成之 碳奈米管至室溫狀態，但本發明並不限於此結構；碳奈米 管可在排出反應室外後，再於外部冷卻之。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 和範圍内，當可作各種之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 本發明可應用於採用氣相合成法來合成碳奈米管的量 產系統。特別是，本發明可應用於大量合成碳奈米管的方 法，其使用具開放型反應室的量產系統。 【圖式簡單說明】 為讓本發明之上述與其他目的、特徵、和優點能更明 42 200811032 顯易懂，茲配合所附圖式加以說明如下： 第1圖為根據本發明第一實施例之採用氣相合成法來 合成碳奈米管的量產系統示意圖； 第2圖為根據本發明第一實施例之合成碳奈米管的量 產系統截面圖，其繪示氣體在反應室内的狀態； 第3圖為根據本發明第二實施例之合成碳奈米管的量 產系統截面圖； 第4圖為根據本發明第三實施例之合成碳奈米管的量 產系統截面圖； 第5圖為根據本發明第四實施例之合成碳奈米管的量 產系統截面圖； 第6圖為根據本發明第五實施例之合成碳奈米管的量 產系統截面圖； 第7圖為根據本發明第六實施例之合成碳奈米管的量 產系統截面圖； 第8圖為根據本發明第七實施例之合成碳奈米管的量 產系統截面圖；以及 第9圖為根據本發明第八實施例之合成碳奈米管的量 產系統截面圖。 【主要元件符號說明】 1、la 反應室 2、2 a 入ο 3 > 3a 出口 4 a 通道 5 沈降 部 10 船形容器 43 200811032 10a 桶狀容 器 20a 、 120a 排放管 60 、 70 、 80 貯槽 105a 延伸部 110a 上反應室 1 3 0、3 3 0 排氣管 200 ^ 200a 合成單元 207a 、 285a 排放管 212 > 230a 喷灑頭 210 、 250a 加熱構件 310、 350a 冷卻構件 400 、 400a U型部 輸送單元 50a 氣體供應單元 > 100a 還原單元 、150a 加熱構件 、3 1 2 喷嘴 A型部 a 後反應室 a 中央反應室 、280a 碳源氣體限制區 、300a 冷卻單元 a 下反應室 44200811032 IX. Description of the Invention: [Technical Field] The present invention relates to a mass production method for a mass production system for synthesizing carbon nanotubes, and in particular to a method for synthesizing carbon nanotubes by gas phase combination Mass production system for tubes and mass production method using the same [Prior Art] The present invention relates to a mass production method for a mass production system for synthesizing carbon nanotubes, and more particularly to a method for utilizing gas phase Mass production system for synthesizing carbon nanotubes and mass production method using the same The carbon nanotubes are composed of graphite sheets rolled into a cylindrical shape, which can be divided into single-wall carbon nanotubes and double-wall carbon according to the number of sheets. Nano tube, and multi-wall rice tube. Because carbon nanotubes are light in weight, good in electrical and mechanical properties, high in chemical properties, and easy to react on the surface, they can be used in a wide range of applications such as electronic information industry, energy industry, high performance composite materials, and extremely fine nano compounds. Wait. Therefore, there is a need for a method of synthesizing a low-volume production cost of a high-purity carbon nanotube. Current methods for synthesizing carbon nanotubes include arc discharge, laser, chemical vapor deposition, and gas phase synthesis. The synthesis of carbon nanotubes by arc discharge method is accompanied by the formation of amorphous materials, so a thermal or chemical refining process is required to obtain high-purity carbon nanotubes with low economic yield. Although the chemical vapor deposition method can form a high-purity carbon nanotube by arranging the carbon nep on the substrate, the method is not as good as the method and the method is stable. With sediment or thunder and then its rice tube is easy to produce 5 200811032. Gas phase synthesis has been noted as a method of synthesizing carbon nanotubes at low cost. Although various gas phase synthesis methods have been developed, the carbon nanotubes synthesized by the conventional gas phase synthesis method contain a large amount of amorphous carbon particles, so that it is difficult to refine the carbon nanotubes. Since the yield of the gas phase synthesis method is low and the synthesized carbon nanotubes contain a large amount of amorphous carbon particles, they are particularly unsuitable for mass production of single-wall or double-wall carbon nanotubes. In addition, the carbon nanotube production system using the gas phase synthesis method is a batch system, wherein the carbon nanotubes are obtained by repeating a series of steps in each batch, the steps including inputting a metal catalyst into the reaction chamber, The reaction chamber is heated for a period of time and then the reaction chamber is cooled. However, it is necessary to repeat the above steps in each batch, and the process conditions of each batch are difficult to control to be completely the same, that is, the synthesized carbon nanotubes are uniformly different, so the mass production system has high manufacturing cost. With the problem of low productivity. SUMMARY OF THE INVENTION Carbon nanotubes have a wide range of applications, such as electronic information industry, energy industry, and high performance, because of their light weight, good electrical and mechanical properties, high chemical stability, and easy surface reaction. Composite materials, very fine nano compounds, etc. Therefore, there is a need for a method of synthesizing a large amount of high-purity carbon nanotubes with a low production cost. In order to solve the above problems, an object of the present invention is to provide a mass production system and a method for synthesizing a carbon nanotube in an open reaction chamber by a gas phase synthesis method. The invention relates to a mass production system for synthesizing carbon nanotubes, which is used for completely synthesizing a reaction chamber to the outside when synthesizing carbon nanotubes in a reaction chamber of 20081103232, and preventing outside air from flowing into the reaction chamber due to different gas gravity, And its mass production method. According to the present invention, the catalyst can be continuously supplied to the reaction chamber from the outside, and the carbon nanotubes synthesized in the reaction chamber are continuously discharged to the outside, whereby the carbon nanotubes can be mass-produced. Further, according to the present invention, it is possible to synthesize a large number of barrier tubes of different properties by controlling the catalyst transport rate, the reaction temperature, the metal catalyst particle size, the carbon source gas injection amount, and the hydrogen injection amount. High-quality carbon nanotubes can be mass-produced by continuously reducing the catalyst, synthesizing the carbon nanotubes, and cooling the carbon nanotubes. According to one aspect of the present invention, in order to achieve the above and other objects, a mass production system for synthesizing a carbon nanotube is provided, comprising: a reaction chamber having at least one opening communicating with outside air, and at least one gas of different specific gravity Occupying the area, the proportion of gas filled in this area is different from the specific gravity of the outside air to prevent outside air from entering the reaction chamber through the opening; a carbon nanotube synthesis unit, located in a region of different specific gravity gas, and using the catalyst medium introduced through the opening a carbon nanotube tube; a transport unit that transports the catalyst to the carbon nanotube synthesis unit through the opening; and a gas supply unit that supplies the carbon source gas for the different specific gravity gas and the synthetic carbon nanotube to the different specific gravity gas occupation regions and Carbon nanotube synthesis unit. Preferably, the opening includes an inlet for introducing a catalyst to the reaction chamber, and a carbon nanotube synthesized by a carbon nanotube synthesis unit to an outlet outside the reaction chamber. The transport unit transports the catalyst and/or the carbon nanotube through the opening, the gas-occupied area of different specific gravity, the carbon nanotubes, and the outlet. Preferably, the tissue synthesis unit comprises a reaction zone in the reaction chamber, which blocks the outside air by using different specific gravity gases filled in the gas occupying regions of different specific gravity; a carbon source gas injector for injecting gas The carbon source gas supplied from the supply unit is sent to the reaction zone, so that the catalyst input from the transport unit to the reaction zone will react with the carbon source gas to form a carbon nanotube; and a heating member for heating the reaction zone. Preferably, the reaction zone of the carbon nanotube synthesis unit is defined in at least a portion of the lower portion of the gas occupying region of the different specific gravity, and the specific gravity of the gas filled in the region occupied by the different specific gravity gas is smaller than the specific gravity of the carbon source gas. The carbon nanotube synthesis unit further includes a carbon source gas restriction zone that is open at the upper portion to block the carbon source gas injected into the reaction zone from leaking out of the reaction zone. Preferably, the different specific gravity gas occupying region comprises a first different specific gravity gas occupying region, and the gas is filled with a gas having a specific gravity smaller than a specific gravity of the carbon source gas; and a second different specific gravity gas occupying region, and the full specific gravity is greater than the specific gravity of the carbon source gas. gas. The first different specific gravity gas occupying region, the reaction region, and the second different specific gravity gas occupying region are sequentially defined in the reaction chamber along the gravity direction. Preferably, the gas of different specific gravity contains at least one gas having a specific gravity smaller than the specific gravity of the outside air, or a gas having a specific gravity greater than the specific gravity of the outside air (depending on the position of the opening of the reaction chamber) to prevent outside air from entering the reaction chamber through the opening. Preferably, the gas of different specific gravity filled in the regions occupying different specific gravity gases is hydrogen. 8 200811032 Preferably, the reaction chamber includes at least one exhaust pipe formed therein to discharge hydrogen gas to the outside of the reaction chamber, so that the hydrogen gas pressure in the region occupied by the different specific gravity gas is in equilibrium with the outside air pressure. Preferably, the different specific gravity gas occupying area comprises a first occupied area communicating with the traverse direction of gravity, a second occupied area connected between the inlet and the first occupied area, and a connection to the first occupied area The third occupied area between the areas. The reaction chamber is bent at its inlet and outlet to define a first occupied area, a second occupied area, and a third occupied area. Preferably, the inlet and the outlet have a one-dimensional difference in the direction of gravity with respect to the first occupied area to prevent the filling gas in the area occupied by the different specific gravity gases from leaking out of the reaction chamber via the inlet and the outlet due to gravity. Preferably, the carbon nanotube synthesis unit comprises a reaction zone in the reaction chamber, which blocks the outside air by using different specific gravity gases filled in the gas occupying regions of different specific gravity; a carbon source gas injector for injecting gas The carbon source gas supplied from the supply unit is sent to the reaction zone, so that the catalyst input from the transport unit to the reaction zone will react with the carbon source gas to form a carbon nanotube; and a heating member for heating the reaction zone. Preferably, the gas of different specific gravity comprises a gas whose specific gravity is smaller than the specific gravity of the outside air, and the arrangement of the inlet and the outlet is lower than the first occupied area in the direction of gravity to prevent the gas of different specific gravity from leaking out through the inlet or the outlet due to gravity. outdoor. Preferably, the gas of different specific gravity is hydrogen, and its specific gravity is smaller than the external air specific gravity. Preferably, the gas of different specific gravity comprises a gas having a specific gravity greater than that of the external air specific gravity 9 200811032, and the inlet and the outlet are arranged higher in the gravity direction than the first occupied area to prevent gas of different specific gravity from leaking through the inlet and the outlet due to gravity Out of the reaction outside. Preferably, the carbon source gas injector comprises a plurality of nozzles which are arranged in a dispersed manner corresponding to the size of the reaction zone to uniformly inject the carbon source gas into the reaction zone. Preferably, the mass production system further includes a heating member for heating at least a region of the reaction chamber to reduce the catalyst injected into the reaction chamber through the opening. Preferably, carbon nano. The tube synthesis unit includes an upwardly directed barrier limiting region for blocking the leakage of carbon source gas injected into the reaction zone from the reaction zone. Preferably, the mass production system further includes a cooling unit for cooling the area of the reaction chamber adjacent to the outlet such that the cooling unit cools the carbon nanotubes. According to another aspect of the present invention, a method for mass production of a synthetic carbon nanotube is provided, comprising the steps of: preparing a reaction chamber having a gas occupying region of a different specific gravity, and at least one opening communicating with outside air; A gas of different specific gravity is filled into the gas occupying area of different specific gravity, and the specific gravity of the gas is different from the outside air, so as to prevent outside air from entering the different specific gravity gas occupying area through the opening; providing a carbon source gas to the gas occupying area of different specific gravity to form a a reaction zone that uses a gas of a different specific gravity to block the outside air; a catalyst is supplied to the reaction zone of the reaction chamber through the opening; a carbon nanotube is synthesized by reacting the catalyst with a carbon source gas forming a reaction zone; and the carbon nanotube is discharged through the opening The carbon nanotubes are synthesized to the outside of the reaction chamber. Preferably, the different specific gravity gas occupying area comprises a first occupied area communicating with the traverse direction of gravity, a second occupied area connected between the inlet and the first occupied area, and a connection to the first occupied area The third occupied area between the areas 10 200811032. The reaction chamber is bent at its inlet and outlet to define a first occupied area, a second occupied area, and a third occupied area. Preferably, the inlet and the outlet have a one-dimensional difference in the direction of gravity with respect to the first occupied area to prevent the filling gas in the area occupied by the different specific gravity gases from leaking out of the reaction chamber via the inlet and the outlet due to gravity. Preferably, the filling gas in the different specific gravity gas occupying region contains hydrogen gas, and the above method further comprises: heating the second occupied region; and in the second occupied region, reacting the catalyst with hydrogen to reduce the catalyst. Preferably, the reaction chamber further comprises an exhaust pipe formed in the vicinity of one of the inlet and the outlet and connected to the outside, and the method further comprises: discharging the hydrogen gas by using the exhaust pipe so that the hydrogen gas in the region occupied by the different specific gravity gas Balanced with outside air pressure. The present invention is applicable to a mass production system for synthesizing carbon nanotubes by gas phase synthesis. In particular, the present invention is applicable to a mass production method for synthesizing carbon nanotubes using a mass production system of synthetic carbon nanotubes containing an open reaction chamber. [Embodiment] The preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is a cross-sectional view showing the production system of a synthetic carbon nanotube according to a first embodiment of the present invention. Referring to Fig. 1, the mass production system of the synthetic carbon nanotube of the first embodiment comprises an arched reaction chamber 1 having a predetermined space therein, a metal catalyst reduction unit 100 for reducing the metal catalyst, and a reduction using a carbon nanotube tube synthesis unit 200 for synthesizing a carbon nanotube, a cooling unit 300 for cooling the synthesized carbon nanotube, and a gas for supplying a carbon source gas, an atmosphere, etc. to the reaction chamber for 11 200811032 A supply unit 50, and a transport unit for transporting the metal catalyst to the reaction chamber. The reaction chamber 1 has an open structure in which the inlet 2 and the outlet 3 are connected to the outside, and the sediment 5 is located at the center thereof to define a space. The sedimentation section 5 is used to collect and store the carbon source gas and can be regarded as a carbon source gas restriction zone. The inlet 2 and the outlet 3 can be used as openings for connecting the outside, respectively. The gas supply unit 50 includes a carbon source gas storage tank 60 (e.g., an ethylene gas storage tank), an argon or nitrogen storage tank 70 (e.g., an inert gas storage tank), and a hydrogen storage tank 80 that supplies a gas to the reaction chamber via a gas supply pipe. Each sump includes a purifier. The purifier separately purifies the carbon source gas mixture, the inert gas mixture, and the hydrogen mixture to provide a high purity carbon source gas, an inert gas, and hydrogen. Examples of the carbon source gas include methane, ethane, ethylene, ethylene, propylene, butadiene, butadiene, dibutyl, hexane, heptane, toluene, benzene, diphenylbenzene, gasoline, propane, liquid propane gas ( LPG), liquid natural gas (LNG), petroleum brain, carbon monoxide, and alcohol-based gases. The metal catalyst reduction unit 1 is used to reduce the metal oxide catalyst introduced into the reaction chamber 1, or the metal oxide catalyst in the catalytic material containing the metal oxide catalyst. The metal catalyst reduction unit 1 includes a first gas nozzle 112 connected to the reaction chamber 1 to supply hydrogen gas, and a first heating member 110 installed outside the reaction chamber 1 to restore the metal in the boat-shaped container 10 Oxide catalyst. The first heating member 110 is a heating generating mechanism for heating the inside of the reaction chamber, and is provided with a temperature sensor (not shown) to maintain the temperature inside the reaction chamber at 60 (TC to 1200 ° C. Carbon Nano The tube synthesis unit 200 synthesizes a carbon nanotube by reacting a metal oxide 12 200811032 catalyst input into the reaction chamber with a carbon source gas. The carbon nanotube synthesis unit 200 includes a reaction region for synthesizing a carbon nanotube; a shower head 212 having a plurality of nozzles for uniformly injecting a carbon source gas; and a second heating member 2 10 disposed outside the reaction chamber 1. Since the nozzles are arranged on the shower head 2 1 2, the carbon The source gas can be uniformly injected into a predetermined region of the reaction chamber 1, and the carbon nanotubes are uniformly synthesized in the entire reaction region of the reaction chamber 1. The second heating member 210 is another heating generating mechanism for heating the reaction chamber Internally, a temperature sensor (not shown) is provided to maintain the temperature inside the reaction chamber from 600 ° C to 1 200 ° C. The cooling unit 300 includes a cooling member 310 placed in the reaction chamber 1 for cooling the reaction. Indoor room. Reaction chamber 1 is connected to The three gas nozzles 3 1 2 are for injecting an inert gas such as argon, nitrogen or hydrogen. The cooling unit 300 may include a water cooling jacket surrounding the reaction chamber 1. The hydrogen supplied from the third gas nozzle 312 is not only formed inside the reaction chamber 1 In the hydrogen atmosphere, the synthesized carbon nanotubes are also cleaned. The reaction chamber 1 includes a first gas exhaust pipe 130 in the vicinity of the inlet 2 of the reaction chamber 1 to discharge the gas remaining in the reaction chamber after the reaction, and a second gas exhaust pipe 3 30 near the outlet 3 of the reaction chamber 1 to discharge the gas remaining in the reaction chamber after the reaction. This structure can balance the hydrogen pressure in the reaction chamber with the external air pressure, thereby effectively preventing the outside air. Infiltration into the reaction chamber through the inlet and outlet. That is, when hydrogen is injected into the reaction chamber from the gas injection tube, the hydrogen pressure in the reaction chamber is increased; when the hydrogen pressure is greater than the outside air pressure, the hydrogen is discharged out of the reaction chamber. It is dangerous to discharge hydrogen from the inlet and outlet of the reaction chamber. The reaction chamber also includes a separate 13 200811032 gas exhaust pipe for discharging hydrogen. The container containing the metal catalyst (such as the ship 10) is transported to the reaction chamber, which can be a conveyor belt, etc. The transport unit can control the speed of transporting the metal catalyst by means of a motor or the like, thereby controlling the time of the oxide catalyst and synthesizing the carbon The time of the rice pipe. One of the containers containing the gold agent is a ship-shaped container 10, and may be composed of various materials, such as metal, quartz or graphite. The ship-shaped container 10 has a pore-reducing metal oxide catalyst and a synthetic carbon nanotube through the bottom surface. In the process, the pores of the vessel 10 increase the contact effect of the gas with the metal catalyst, the reduction of the metal oxide catalyst and the synthesis of the carbon nanotubes. The pores of the vessel 10 contribute to the discharge of the reaction product. The mass production of the synthetic carbon nanotubes of the first embodiment described above is a catalyst reduction unit 100, a carbon nanotube synthesis unit 200 and a unit 3 00 are sequentially disposed to carry out a continuous process. The ship-shaped container 1 of the mass-produced metal oxide catalyst of the synthetic carbon nanotube according to the first embodiment described above is sent from the delivery unit to the reaction chamber, passes through the metal catalyst reduction unit 100, the synthesis unit 200, and the cooling Unit 300 is then transported outside via outlet 3. After the boat-like container 1 is transferred from the outlet 3 to the outside, the resultant carbon nanotubes are then taken out from the vessel 10. After the rice tube 10 is taken out, the boat-shaped container 10 containing the new metal catalyst is fed to the reaction chamber. As such, the delivery unit can cycle through the reaction chamber between the inlet and outlet. Although the drawing does not depict the circulation structure of the conveying unit, it is known to those skilled in the art that it has a certain degree of understanding, so that the container is no longer catalyzed by the control of the primary metal, such as a hole. In addition to the ship's capacity, the ship's system, the gold cooling system, and the externally transmitted nano tube, the Z-reverse inlet 2 ring of the reaction vessel are worn and worn out. 14 200811032 The mass production system of the present invention can repeat the above-described continuous process, so that the carbon nanotubes can be synthesized in a large amount. Although the heating member of Fig. 1 is adjacent to the cooling member, the heating member may be disposed away from the cooling member to prevent mutual interference with each other; or a heat transfer preventing member may be added between the two members to avoid mutual interference with functions. Since the skilled artisan knows a certain degree of understanding of these structures, it will not be described here. Fig. 2 is a view showing the state of the carbon source gas and hydrogen in the reaction system of the mass production system of the synthetic carbon nanotube of the first embodiment of the present invention. As shown in Fig. 2, the reaction chamber 1 is filled with a carbon source gas and hydrogen gas. As described above, since the outside air cannot penetrate into the reaction chamber 1, the inside of the reaction chamber 1 can isolate the outside air. As shown in Figs. 1 and 2, the carbon source gas is uniformly injected into the reaction chamber 1 through the shower head 2 1 2 connected to the gas supply unit, and the hydrogen gas is injected through the gas nozzles 1 1 2, 3 1 2 . If a reduced metal catalyst is supplied to the reaction chamber, argon, helium, argon, helium or nitrogen may be substituted for the ambient gas of the reaction chamber. Assuming that the temperature in the reaction chamber 1 is about 900 ° C and the temperature outside the reaction chamber 1 is about 20 ° C, the gas weight can be calculated as follows. Due to 1 mole of hydrogen (22. 4 liters) under standard conditions (0 ° C = 274 K, 1 atmosphere) weighs 2 grams, and according to Charle's Law, hydrogen is in a reaction chamber at a temperature of about 900 ° C (11 74 K). It is four times larger, so 1 mole of hydrogen (22. 4 liters) at this time about 0. 5 grams. In addition, due to 1 mole of air (22. 4 liters) is 28. 9 grams, so 1 mole air (22. 4 liters) Weighs approximately 27 grams at room temperature (20 ° C). 15 200811032 The entrance and exit of the reaction chamber (that is, the ratio of the outside air at the contact between the outside air and the hydrogen is about 54 times that of the hydrogen. The reason is that the air is always below the hydrogen. Because the inside of the reaction chamber is filled with hydrogen and the reaction chamber The hydrogen at the inlet and outlet is in equilibrium with the outside air, which prevents the outside air from infiltrating into the reaction chamber. Since the hydrogen in the reaction chamber is filled with a gas having a specific gravity different from that of the outside air, it can be occupied by a region of different specific gravity. The occupied area prevents the outside from entering the reaction chamber. If the hydrogen occupied area at the inlet of the reaction chamber is regarded as a side occupied area, the hydrogen occupied area at the exit of the reaction chamber is regarded as an occupied area, and the hydrogen between the inlet and the outlet of the reaction chamber is occupied. The area occupies the area, and the position of the inlet and the outlet is a low-occupied area along the direction of gravity to prevent outside air from entering the chamber via the inlet and the outlet. The intermediate occupied area is formed in a direction across the direction of gravity. Between the entrance of the room and the area occupied by the middle, the area of the exit is located opposite Between the chamber outlet and the intermediate occupied area, the settling portion 5 of the reaction chamber has a deep space which is formed deeper than the periphery of the settling portion 5 by the reduction of the partial reaction chamber. Direct injection from the spray onto the settling portion 5 The specific gravity of the carbon source gas is greater than the specific gravity of the surrounding gas, so the carbon source gas sinks and concentrates on the settling portion 5. The carbon source gas in the lower portion 5 is heavier than the hydrogen gas, so it does not rise and leaves the portion 5. The carbon source gas occupying region in 5 is surrounded by the occupied region in the reaction chamber. The carbon source gas occupying region is a reaction region of hydrogen and metal catalysis, and a synthetic carbon nanotube, and the reaction region and the reaction chamber are separated by hydrogen. The outside air.) The heavy gas, because the area is an air inlet port side, the nitrogen side of the middle side of the reaction port occupies the head of the hydrogen sinking agent, and the reverse reaction 16 200811032 Partial introduction of the reaction chamber Hydrogen is discharged outside the reaction chamber through the reaction chamber inlet 2 and the nearby exhaust pipe 1 30 0, 3 30 . This structure uses a balance between hydrogen pressure and ambient air pressure to ensure that outside air penetrates into the reaction chamber. When the hydrogen is discharged from the exhaust pipe, it will generate a flow to the exhaust pipe. Since the exhaust pipes 1 30 0 and 3 3 0 are provided at the inlet 2 and the outlet of the reaction chamber: hydrogen gas is continuously supplied to the inlet and outlet of the reaction chamber, so that the pressure can be maintained to the extent that outside air does not flow into the reaction chamber. A method of using a synthetic carbon nanotube system according to the first embodiment to assemble a rice pipe will be described below. The metal catalyst reduction unit 1 and the carbon nanotube unit 200 of the reaction chamber 1 are heated to a predetermined temperature, for example, 600 ° C to 1200 ° C by the first heating member 110 and the second heating member (step 1). Next, an inert gas (for example or nitrogen) is supplied to the reaction chamber by the gas supply unit 50 (step 2). When a larger specific gravity inert gas reaction chamber is used, a smaller proportion of air or other gas may be purged by the inert gas and/or out of the reaction chamber inlet and outlet. Thereby, the reaction chamber 1 pure gas can be removed, and an inert gas atmosphere is formed inside the reaction chamber. Although the inside of the reaction chamber is heated, the inside of the reaction chamber is filled with an inert gas; however, it is also possible to heat the inside of the reaction chamber, i.e., inside the inert gas chamber. Next, hydrogen gas is supplied to the reaction chamber gas environment by the gas supply unit 50 (step 3). Hydrogen can be filled from the upper part of the reaction chamber to the reaction chamber due to the hydrogen ratio than the enthalpy charged in the reaction chamber. Then, using the transport unit to make the metal oxygen outlet 3 of the size of 1 - 50 nm to maintain the vicinity of the gas that does not flow, holding the hydrogen into the carbon nanotube synthesis 210, such as the supply of argon gas into the body, the above step should be The chamber is filled with a reverse inert gas, and the hull container 10 1011011032 or a boat-shaped container 10 containing a catalytic material containing a metal oxide catalyst is transported from the outside to the reaction chamber via the inlet 2 (step 4). The catalytic material may be in the form of a powder and may contain magnesium oxide (MgO), alumina (Al2?3), zeolite, cerium oxide or the like. The method of converting the catalytic material into a nano-sized porous catalytic material may include a sol-gel method, a precipitation method, or a dipping method. The metal oxide catalyst delivered to the reaction chamber is reduced to a pure metal catalyst containing no oxygen via the metal catalyst reduction unit 100 (step 5). For example, if the metal oxide catalyst is iron oxide, the iron oxide reacts with hydrogen and is converted into pure iron and water. The metal oxide catalyst may comprise a starting material, a nickel, a mesh or an alloy thereof. After passing through the metal catalyst reduction unit 100, the boat-shaped container 1 is then conveyed to the carbon nanotube synthesis unit 200. The metal catalyst is reacted with a carbon source gas in a reaction zone of the carbon nanotube synthesis unit 200 to synthesize a carbon nanotube (step 6). The synthesis of the carbon nanotubes is carried out in a hydrogen atmosphere in which the hydrogen removes the metal oxide on the surface of the metal catalyzed particles and suppresses the supply of excessive post elements to the surface of the metal catalyst. Further, the hydrogen also removes the amorphous carbon material adsorbed on the surface of the metal catalytic particles, and inhibits the amorphous carbon agglomerate or powder from adhering to the outer surface of the carbon nanotube formed in the reaction chamber. Of course, the growth rate, size, and crystallinity of the carbon nanotubes can be controlled by adjusting the flow rate of the carbon source gas and the temperature of the reaction zone when synthesizing the carbon nanotubes. In particular, when the metal catalyst particles are inherently fixed to the nano-scale pores of the powdery catalytic material, the metal-catalyzed particles can be suppressed even at the high temperature of the synthetic carbon nanotubes, so that a uniform size can be synthesized. Carbon 18 200811032 Nano tube. In addition, the carbon nanotubes are synthesized using metal catalyst particles having a nanometer size and substantially fixed to the nano-scale pores of the powdery substance, and the amorphous carbon agglomerates are not formed, so that high purity can be synthesized. Carbon meter tube. The boat-shaped container 1 containing the synthetic carbon nanotubes is then conveyed to the cooling unit 3 00 and cooled by the cooling member 310 (step 7). The synthesized high-purity carbon nanotubes were cooled to room temperature by a cooling unit 300, and repeatedly washed in a hydrogen ring. Finally, the synthesized carbon nanotubes exit the reaction chamber via outlet 3 (step 8). After the synthetic carbon nanotubes in the boat-shaped container 10 are taken out of the reaction chamber, the boat-shaped container 10 to which the metal catalyst is added is then introduced into the reaction chamber via the inlet 2, whereby the carbon nanotubes are continuously synthesized. A carbon nanotube can be produced in large quantities by this continuous process. The step of cooling the synthesized carbon nanotubes can be carried out after the carbon nanotubes are discharged from the reaction chamber, so that in this embodiment, the reaction does not include the cooling member. In order to utilize this continuous process to synthesize carbon nanotubes, it is necessary to completely avoid gas permeation into the reaction chamber. If oxygen is carried into the reaction chamber via the air, oxygen will react with the carbon source gas to synthesize the carbon nanotubes, and the oxygen may react with the hydrogen gas to cause an explosion. Therefore, the reaction chamber cannot contain oxygen. In order to form an oxygen-free environment inside the reaction chamber, it is known that a batch system using a gas phase synthesis mass production carbon nanotube is a batch type structure in which the reaction interior is completely isolated from the outside and is filled with an inert gas. However, with the above structure, the reaction chamber is repeatedly heated to synthesize carbon nanotubes, and the reaction chamber is cooled every time the carbon nanotubes are synthesized. Therefore, it is difficult to increase the productivity of the batch type mass production system before the synthesis of the carbon nanotubes, which requires an extremely long period of time before the synthesis of the carbon nanotubes. On the contrary, the reaction chamber of the present invention is connected to the outside, so that the reaction chamber is maintained at the temperature at which the carbon nanotubes are synthesized without repeatedly cooling the inside of the chamber. Mass production for synthesizing carbon nanotubes according to the present invention Once the system is put into operation, the carbon nanotubes can be continuously manufactured without being manufactured. The following structure can achieve the purpose of continuously synthesizing carbon nanotubes. The chamber is connected to the outside, so the metal catalyst can be continuously supplied to the reaction. When the metal catalyst is continuously supplied to the reaction chamber, the carbon nanotubes continue to synthesize the carbon nanotubes, thereby mass producing the carbon nanometer. Objective, the reaction chamber must be an open structure in which the inlet and the outlet are open, and the outside air can be prevented from entering through the inlet and the outlet. By allowing gas of different specific gravity to occupy a specific area of the reaction chamber, air can be prevented from infiltrating into the reaction chamber. The area occupied by the specific gravity different from the other gases in the reaction chamber can be regarded as a different specific gravity gas occupation area. In addition, since the pressure of the gas of different specific gravity in the reaction chamber and the pressure of the outside air at the inlet and outlet are in equilibrium, the outside air penetrates into the reaction chamber. Figure 3 is a cross-sectional view showing a synthetic carbon nano-production system according to a second embodiment of the present invention. As shown in Fig. 3, the mass production system of the synthesis tube of the second embodiment has a V-shaped structure in which the inlet 2 and the outlet are opened, and the carbon nanotube synthesis unit 200 is located in the central sedimentation portion 5 of the reaction chamber. In the amount of the synthetic carbon nanotube of the second embodiment, the molecular weight is 39. The 948 argon gas is used as the ambient gas in the reaction chamber. When preparing, the internal heating system can be stopped, due to the reverse chamber. Another single tube is synthesized. For the mouth is the response room. The external gas reaction chamber can prevent the amount of carbon nanotubes 3 from being a low-lying production system, and the weight of 20 200811032 is greater than that of argon (molecular weight is 92. 1) It is used as a carbon source gas. As with the first embodiment of the present invention, the mass production system of the second embodiment includes a metal catalyst reduction unit 1 〇〇, a gas supply unit, a carbon nanotube synthesis unit 200, and a cooling unit 300. In order to avoid redundancy, some of the components will be omitted from illustration and description herein. The mass production system of the second embodiment will be described below differently from the structural portions of the first embodiment. According to the mass production system of the second embodiment, the reaction chamber has an open structure in which the inlet 2 and the outlet 3 are opened upward, and an A-shaped portion 150 that is inclined first and then extends downward is formed near the inlet 2. . The metal catalyst reduction unit 100 is located at the A-shaped portion 150. Hydrogen is supplied to the A-shaped portion 150 through the gas supply pipe. Since the specific gravity of hydrogen is smaller than the specific gravity of the outside air or argon in the reaction chamber, hydrogen can be filled into the A-type portion 150 from the upper portion of the reaction chamber. The central region of the A-type portion 150 is filled with nitrogen gas by injecting hydrogen gas. In this embodiment, the specific gravity of the air at the inlet 2 of the reaction chamber is greater than the specific gravity of the hydrogen in the A-type portion 150, so that the air is always under the hydrogen gas without introducing the reaction chamber. A metal catalyst reduction unit 100 is formed in the A-type portion 150 to reduce the metal oxide catalyst. The metal oxide catalyst of the reduction reaction chamber consumes hydrogen, so hydrogen is required to be supplied to the reaction chamber. The A-type portion 150 has a discharge pipe through which hydrogen gas partially supplied to the reaction chamber can be discharged. The region in the reaction chamber 1 to which the A-type portion 150 is connected is filled with argon gas. Since the specific gravity of argon is greater than the specific gravity of the outside air or hydrogen, argon gas can be filled into the reaction chamber from the lower portion of the reaction chamber. Here, if the argon gas injection amount exceeds a predetermined amount, 21 200811032, the argon gas pushes the hydrogen gas out of the A-shaped portion 150 and fills the A-type portion 150. Therefore, the argon injection amount needs to be adjusted so that the amount does not exceed the inclined portion of the corresponding region of the corresponding Α-shaped portion 150. Since the outside air specific gravity is smaller than the specific gravity of the argon gas, it will be located above the argon gas, so that even if the outside air contacts the argon gas at the outlet 3 of the reaction chamber, it will not penetrate into the reaction chamber. In the carbon nanotube synthesis unit 200, benzene which has a specific gravity larger than the specific gravity of argon is used as a carbon source gas to synthesize a carbon nanotube. According to the production system of the second embodiment, the reaction chamber includes a settling portion 5 which is lowered in the direction of gravity. In view of this, in order to sink the carbon source gas and efficiently collect it into the sedimentation portion 5, a gas having a specific gravity greater than the specific gravity of the ambient gas may be used as the carbon source gas. Thus, the benzene gas in the reaction chamber sedimentation portion 5 reacts with the metal catalyst to efficiently synthesize the carbon nanotube. The settling portion 5 of the reaction chamber is used to restrict the carbon source gas. It should be noted that the ambient gas supplied to the reaction chamber is not limited to argon, and it may also contain other inert gases having a specific gravity greater than that of the outside air. Further, the carbon source gas is not limited to toluene gas, and may also contain other gases having a specific gravity greater than the specific gravity of the ambient gas. The mass production system of this embodiment includes an A-type portion 150 to reduce the catalyst in the reaction chamber 1. However, if the catalyst supplied to the reaction chamber has been reduced, it is not necessary to reduce the catalyst in the reaction chamber, and it is not necessary to form the A-type portion 150. Fig. 4 is a cross-sectional view showing the mass production system of a synthetic carbon nanotube according to a third embodiment of the present invention. As shown in Fig. 4, the mass production system of the synthetic carbon nanotube of the third embodiment is similar to the mass production system of the second embodiment, except that the structure of the reaction chamber is different, and the modification is used to limit the sedimentation of the carbon source gas. A carbon source gas restriction zone 250 is formed on the reaction chamber 22 200811032. The mass production system as in the third embodiment of the first embodiment includes a gas supply unit, a carbon nanotube synthesis unit 200, and a cooling unit 300, but does not include a metal catalyst reduction unit. Since the mass production system of the third embodiment uses the reduced metal catalyst, the reduction unit without the metal catalyst can be omitted. According to the mass production system of the third embodiment, the specific gravity of the carbon source gas is smaller than the specific gravity of the ambient gas in the reaction zone of the reaction chamber. In this embodiment, argon is used as the ambient gas of the reaction chamber, and a gas such as ethylene having a specific gravity smaller than the specific gravity of argon is used as the carbon source gas. However, other gases with different specific gravity differences as described above may also be used as the ambient gas and the carbon source gas, respectively. The periphery of the carbon source gas restriction zone 250 is blocked by an inner wall, and the upper portion thereof is blocked by the top surface of the reaction chamber, so that it is only opened downward. The mass production system of the third embodiment includes a sprinkler head having an upwardly disposed nozzle for injecting a carbon source gas upward. Thus, the carbon source gas having a small specific gravity rises and concentrates to the carbon source gas restriction region 250. The carbon source gas collected in the carbon source gas restriction zone 250 is reacted with a metal catalyst supplied to the carbon source gas restriction zone 250 to synthesize a carbon nanotube. Fig. 5 is a cross-sectional view showing the mass production system of a synthetic carbon nanotube according to a fourth embodiment of the present invention. As shown in FIG. 5, the mass production system of the synthetic carbon nanotube of the fourth embodiment is similar to the mass production system of the first embodiment except that it includes a U-shaped portion 400 formed on both sides of the reaction chamber, and is connected to the U. The profile 400 and the inlet 2 and the outlet 3 are opened upwards. As with the first embodiment, the mass production system of the fourth embodiment includes a metal catalyst reduction unit 1 〇〇, a gas supply unit (not shown), a carbon nanotube tube 23 200811032 into a unit 200, and a cooling unit 30. 0, the part not drawn in the drawing is to facilitate the clear description of this system. In order to block the outside air, argon gas having a specific gravity greater than that of the outside air may be left in each U-shaped portion 400 of the reaction chamber. The U-shaped portion 400 of the reaction chamber is connected by an injection pipe into which argon gas enters. The reaction chamber further includes a metal catalyst reduction unit 100 and a carbon nanotube synthesis unit 200 at the inlet of the U-shaped portion 400 at the inlet 2. At the same time, the metal catalyst reduction unit 100 and the carbon nanotube synthesis unit 200 of the reaction chamber are filled with hydrogen gas, and the U-shaped portion 400 at the outlet 3 is filled with argon gas. Thus, outside air will come into contact with argon at inlet 2 and outlet 3 of the reaction chamber. Since the outside air is less than the specific gravity of argon, the outside air will be above the argon gas and will not penetrate into the reaction chamber. It should be noted that the gas injected into the U-shaped portion 400 is not only argon gas, but other inert gases having a specific gravity greater than the specific gravity of the outside air can also be used. Further, the gases injected into the U-shaped portions 400 are not necessarily the same, and they may be injected with different gases. In the carbon nanotube synthesis unit 200 of the reaction chamber, a gas (carbon source gas) such as ethylene having a specific gravity greater than the specific gravity of hydrogen is injected through the shower head and concentrated to the lower portion of the sedimentation portion 5, and the metal passing through the sedimentation portion 5 The catalyst reacts to synthesize a carbon nanotube. For the mass production system of the above embodiment, if the length of the carbon nanotube synthesis unit or the reaction zone is increased, the catalyst-containing member is transported to increase the distance between the catalyst and the gas, thereby improving the transport content. The speed of the components of the catalyst. In other words, when the reaction time and the reaction chamber synthesis temperature are determined, if the length of the carbon nanotube synthesis unit is long, the speed of the catalyst input into the reaction chamber can be increased, thereby improving the production efficiency. Although the heating member of the mass production system of the above embodiment is installed outside the reaction chamber, the present invention is not limited to this configuration. Alternatively, the heating member may be integrated into the metal catalyst reduction unit and the carbon nanotube synthesis unit. The scope and application of the invention encompasses all of the above. The gas occupying area of different specific gravity refers to a predetermined space in the reaction chamber which is continuously occupied by a gas, and the specific gravity of the gas is different from the specific gravity of the surrounding gas (e.g., outside air). The mass production system of the present invention having a plurality of bends may include one or more different specific gravity gas occupying regions from the reaction chamber inlet 2 to the outlet 3. If two or more different specific gravity gas occupying regions are formed in the reaction chamber, the different specific gravity gas occupying regions may each be filled with a different gas. The means for transporting the catalyst-containing member can be carried out not only by an automatic transport mechanism having a conveyor belt but also by a manual transport mechanism. The sedimentation portion 5 of the reaction chamber or the carbon source gas restriction region 250 is a concentration of the carbon source gas to a specific position, so that the use of the sedimentation portion 5 or the carbon source gas restriction region 250 can increase the synthesis efficiency of the carbon nanotube. Figure 6 is a cross-sectional view showing the mass production system of a synthetic carbon nanotube according to a fifth embodiment of the present invention. Referring to Fig. 6, the mass production system of the synthetic carbon nanotube of the fifth embodiment includes a reaction chamber 1a having a predetermined space therein. The reaction chamber la includes an inlet 2a and an outlet 3a which are located on one side. Both the reaction chamber inlet 2a and the outlet 3a are of an open structure and are connected to the atmosphere. The system further includes a conveying unit 15a that conveys the barrel-like container 10a (i.e., the member containing the metal catalyst) from the inlet 2a to the outlet 3a via the inside of the reaction chamber 1a. 25 200811032 Reaction chamber 1 a has an upright structure. The reaction chamber 1a includes a bit side and a downward opening 2a, and a catalyst reduction unit 1 〇〇a extending from the reaction chamber inlet 2a, a carbon nanotube assembly unit 200a connected to the metal catalyst reduction unit and extending downward a cooling unit 300a that is connected to the carbon nanotube unit 200a and located at a lower portion of the reaction chamber la, and an outlet 3a that is connected to the cooling unit 300a and opens upward. The metal catalyst unit 100a, the carbon nanotube synthesis unit 200a, and/or the cooling unit are connected to the gas supply unit 50a, and supply a carbon source gas, hydrogen gas (or an inert gas such as nitrogen), or the like to the reaction chamber. The inlet 2a of the reaction chamber is a catalyst reduction unit 10a, a carbon nanotube synthesis unit 200a, a cold element 300a, and an outlet 3a which are sequentially connected to each other. The metal catalyst reduction unit 100a removes oxygen introduced into the metal oxide catalyst of the reaction chamber 1a by reducing the metal oxide. The metallizing agent reduction unit 1 〇〇a includes a space on which the opposite 110a, and a first heating member placed in the upper reaction chamber 1 10 a. The metal catalyst reduction unit 10a still includes hydrogen discharge. The tube 120a is on the upper side of the reaction chamber inlet 2 so that the hydrogen discharge tube 1 20 a is connected to the outside air. The upper end of the upper reaction chamber 1 10 a is in a closed state to limit the gas in the reaction chamber. The first heating member 150a is a heating generating mechanism for the inside of the reaction chamber, and is provided with a temperature sensor (not shown) to maintain the reverse internal temperature of 600 ° C to 1 200 ° C. The upper reaction chamber 11a of the metal catalyst reduction unit is filled with hydrogen gas supplied to the reaction chamber. The area occupied by the hydrogen in the reaction chamber with a small specific gravity in the upper reaction chamber 11 0a will be regarded as the gas occupying area. The metal oxide catalyst is synthesized by metal-containing oxide-containing gold 100a and reduced by 300a, argon, gold, but single-catalyst is the catalyzed chamber 0 a 〇 located in the boundary space rising heating chamber 100a, the most hydrogenating agent 26 200811032 The catalytic carrier is supplied in the form of a carrier. In the carbon nanotube synthesis unit 200a, the metal catalyst reacts with the carbon source gas to form a carbon nanotube. The carbon nanotube synthesis unit 200a includes a central reaction chamber 210a having an upright space for raising a gas of a small specific gravity, and a second heating member 250a placed in the central reaction chamber 210a. Since the central reaction chamber 210a contains a reaction zone for reacting the metal catalyst with the carbon source gas and synthesizing the carbon nanotubes, the central reaction chamber 210a has a length sufficient for the metal catalyst to flow sufficiently, and the inner diameter thereof is larger than The upper reaction chamber 1 1 〇a or the lower reaction chamber 3 10 0a is ensured to contain sufficient carbon source gas therein. The second heating member 250a is also a heating generating mechanism for heating the inside of the reaction chamber, and is provided with another temperature sensor (not shown) to maintain the temperature inside the reaction chamber from 600 to 1200 °C. The central reaction chamber 210a constituting the carbon nanotube synthesis unit 200a is filled with a carbon source gas such as ethylene gas having a specific gravity greater than that of hydrogen. The area occupied by the ethylene gas in the reaction chamber having a specific gravity greater than that of hydrogen in the central reaction chamber 2 10a will be regarded as a region occupied by ethylene gas. The implementation structure of the central reaction chamber 2 1 0a can raise or lower the gas, for example, depending on the specific gravity of the gas. It should be noted that the central reaction chamber 210a is not limited to the slope structure of Fig. 6, and other structures having appropriate slopes may be employed as long as the structure can raise or lower the gas depending on the specific gravity of the gas. The cooling unit 300a is used to cool the carbon nanotubes. The cooling unit 300a includes a lower reaction chamber 310a connected to the carbon nanotube synthesis unit 200a and having a closed bottom surface to retain a gas (for example, argon gas heavier than a carbon source gas), and a cooling member 350a provided in the lower reaction chamber 310a. . The lower reaction chamber 310a constituting the cooling unit 300a is filled with argon gas, which is one of the inertia 27 200811032 gas having a specific gravity greater than that of the ethylene gas; the region occupied by the argon gas in the lower reaction chamber 3 10 a will be regarded as an argon gas. region. As described above, the hydrogen occupying region of the upper reaction chamber and the argon gas occupying region of the lower reaction chamber 3 10 a are filled with gases of different specific gravity in the direction of gravity, and therefore these two regions will be regarded as gas occupying portions of different specific gravity. In this embodiment, the cooling member 350a is composed of a water cooling jacket. However, various other cooling members with cooling functions can also be used. The lower reaction chamber 3 1 0 a is formed on the inner bottom portion having the U-shaped discharge pipe 20 a , and the U-shaped discharge pipe 20 a is used to discharge by-products including water and the like. Since the U-shaped discharge pipe 20a has accumulated water in the U-shaped bent structure, gas does not leak from the lower reaction chamber 3 10 a. The cooling unit 300a can lower the argon temperature, so that the argon specific gravity can be prevented from becoming small due to thermal expansion. The gas supply unit 50a includes a carbon source gas storage tank, an argon gas or nitrogen storage tank, and a hydrogen storage tank, which are each connected to the reaction chamber via a gas supply pipe having an on/off valve. Each tank includes a purifier. The purifier separately purifies the mixed carbon source gas and the mixed hydrogen gas to provide a high purity carbon source gas and hydrogen gas. Examples of the carbon source gas include teriyaki, ethylene bromide, ethylene, acetylene, propylene, butane, butene, butadiene, hexane, heptane, toluene, benzene, diphenylbenzene, gasoline, propane, liquid Propane gas (LPG), liquid natural gas (LNG), petroleum brain, carbon monoxide, and alcohol-based gas. The inert gas is stored in the lower reaction chamber 3 1 0 a. The inert gas used in the present invention is not limited to argon or nitrogen, and any inert gas which is heavier than the carbon source gas can be used. In the gas supplied from the gas supply unit 5 Oa injection pipe connected to the cooling unit 300a, the carbon source gas moves upward to the carbon nanotube synthesis unit 200a, and the hydrogen moves upward and flows through the carbon nanotube synthesis unit. 2 0 0 a and the metal catalyst reduction unit 1 0 0 a. Here, 28 200811032 hydrogen gas rises and flows through the carbon nanotube synthesis unit 200 a, collides with the carbon source gas in the carbon nanotube synthesis unit 200a and causes it to move, the moving carbon source gas The metal catalyst will be actively contacted to promote the synthesis of the carbon nanotubes. The conveying unit 15 a transports the catalyst-containing member from the inlet 2 a to the reaction chamber outlet 3a and circulates in the reaction chamber. The conveying unit 15a can control the conveying speed of the catalyst-containing member by controlling the motor, thereby controlling the reduction time of the metal oxide catalyst and the synthesis time of the carbon nanotube. The catalyst-containing member of this embodiment is a barrel container 1 〇 a for providing a metal catalyst required for gas phase synthesis of a carbon nanotube. The upper end of the barrel container 10 a is connected to the conveying system by means of a whip. Thus, the barrel-shaped container 1 Oa can be maintained in an upright position at any position by the hinge connection, so that the metal catalyst in the catalyst-containing member does not fall out. The catalyst-containing member is not limited to a barrel-shaped container, and other container forms suitable for transporting a metal catalyst can be used. The catalyst-containing member may be composed of various materials such as metal, quartz, graphite, and the like. The catalyst-containing member may have pores penetrating the bottom surface to cause the metal catalyst to undergo an activation reaction with the source gas. The upper and lower parts separated by dashed lines in each drawing represent the areas occupied by different gases. Although the mass production system of this embodiment employs a barrel-shaped container as a member containing a metal-containing catalyst, the present invention is not limited to this structure. For example, the mass production system of the present invention may use other components such as a boat-shaped container or tray that can be placed in a metal catalyst. In this embodiment, an appropriate delivery system can be selected depending on the type of component containing the catalyst. However, those skilled in the art will have a certain degree of understanding of this document 29 200811032, so it will not be repeated here. A method of synthesizing a carbon nanotube using a synthetic carbon nanotube system according to the fifth embodiment will be described below. The metal catalyst reduction unit 1 〇〇a and the nanotube assembly unit 20〇a of the non-reaction chamber 1 a are heated to a predetermined temperature by using the first heating member 11 乐—the heating element 2 10a, such as 6〇 〇t: to 12〇〇. 〇 (Step 1). Next, an inert rolling body (e.g., argon or nitrogen) is supplied to the reaction chamber by means of an inert gas injection pipe connected to the reaction chamber 11a (step 2). - Strictly, if the rat gas is supplied to the reaction chamber through an inert gas injection pipe connected to the reaction chamber a0a, then the argon gas having a specific gravity greater than the specific gravity of the outside air is moved to the left of the upper reaction chamber 1 1 〇a or On the right side, the air furnace inside the reaction chamber is forced to exit from the inlet 2a and exit the reaction reaction chamber 1a to form an inert gas atmosphere in the reaction chamber 丨a. Second, the gas supply unit 50a supplies hydrogen and helium source gas to the reaction. In chamber 1 a (step 3). Then, the metal oxide catalyst or the barrel-shaped container 1 〇a containing the catalytic material containing the metal oxide catalyst is brought from the outside to the center of the reaction (step 4). The barrel container 10 a is transported by the transport unit 丨 5 & The catalytic material may be in the form of powder' and may comprise magnesium oxide (Mg 〇), aluminum oxide (Ah 〇 3), zeolite, cerium oxide or the like. The method of catalyzing the catalytic material to catalyze & a, X / butyl, wood grade porous material may include a sol-gel method, a precipitation method, or a dipping method. ::The barrel of the reaction chamber...the metal oxide catalyst in 〇3, the reduction of the catalyst reduction unit 1〇〇a into a metal catalyst (step? If the metal oxide catalyst is iron oxide, the iron oxide tray Hydrogen 30 200811032 After the gas reaction, it will be converted into pure iron and water. The metal oxide catalyst may include I, nickel, key or its alloy. After the metal catalyst reduction unit 100 a, the metal catalyst of the barrel container 10 a Next, it is transported to the carbon nanotube synthesis unit 200a. The metal catalyst reacts with the carbon source gas in the carbon nanotube synthesis unit 200a to synthesize a carbon nanotube (step 6). Of course, when synthesizing the carbon nanotube The growth rate, size, and crystallinity of the carbon nanotubes are controlled by adjusting the injection amount of the carbon source gas and the temperature of the carbon nanotube synthesis unit 200 a. Especially when the metal catalytic particles are essentially fixed In the case of the nano-scale pores of the powdery catalytic material, the metal-catalyzed particles can be suppressed even at the high temperature of the synthetic carbon nanotubes, so that carbon nanotubes of uniform size can be synthesized. In addition, several nanometers are used. The metal catalyst particles which are small and essentially fixed to the nano-scale pores of the powdery matrix are synthesized into carbon nanotubes, and do not form amorphous carbon agglomerates, so that high-purity carbon nanotubes can be synthesized. The barrel container 1 〇a containing the synthetic carbon nanotubes is then conveyed to the cooling unit 300a and cooled to room temperature by the cooling member 350a (step 7). Alternatively, the carbon nanotube tube may be discharged first without performing this cooling step. Outdoor, and then externally cooled. After cooling, the synthesized carbon nanotubes exit the reaction chamber through the outlet 3 a (step 8). After the carbon nanotubes in the barrel 10a are taken out, a new metal catalyst is added. The vessel 10 a then enters the reaction chamber via the inlet 2 a. Since the barrel container 10 a continues to enter and exit the reaction chamber, the metal catalyst newly added to the barrel container 10 a is continuously reacted with the carbon source gas to continuously synthesize carbon nanotubes. Tube, 31 200811032 Thus, it is possible to manufacture a large number of carbon nanotubes. The automatic equipment which is well known from the method of taking out the nanotube tube from the barrel container l〇a and adding a new metal catalyst to the barrel container is preferred. Synthetic carbon The rice tube mass production system comprises a metal catalyst reduction unit 1 〇〇a, a carbon nanotube synthesis unit and a cooling unit 300 a, and an open structure with external air can be used for continuous synthesis of carbon nanotubes. The invention adopts a process to synthesize a carbon nanotube tube, which can continuously input a metal catalyst to the reverse and can continuously discharge the synthesized carbon nanotube tube from the reaction chamber to the outside. The carbon source gas supplied to the reaction chamber by the gas injection tube The hydrogen has a different specific gravity, wherein the hydrogen having the smallest specific gravity is the upper reaction chamber 110a filled in the metal reduction unit 100a, and the ethylene having a larger specific gravity is filled into the central reaction chamber 210a of the carbon nanotube synthesis unit 200a, and the larger argon gas is Fill the lower reaction chamber 3 1 0a at the bottom of the reaction chamber. At the time of preparation, since some of the gas injection pipes of the gas supply unit 50a are the lower portions of the connection chamber 210a, the ethylene gas and the hydrogen gas rise, and the argon gas flows into the gas of the reaction chamber. That is, hydrogen passes through the central reaction chamber 2 1 < Ascending to the upper reaction chamber 1 10 a, the ethylene gas rises to the center 2 1 0a and forces the gas originally flowing in the central reaction chamber 2 10 a to flow. The ethylene gas as a carbon source gas is promoted to contact the metal catalyst to form a carbon nanotube. In particular, since the specific gravity of the ethylene gas is greater than the specific gravity of the hydrogen gas to the argon gas, the ethylene gas remains outside the central reaction chamber 21. If the upper and lower ends of the central reaction chamber 2 10 a are a bottleneck structure, the chamber 210a is easier to collect and Keep ethylene gas. The carbon of the carbon is used in a sequence of 200a ^, so the continuous chamber should be treated with the argon gas to make the central gravity of the gas. The reaction chamber will be effective and small and small. ° This central anti-32 200811032 high-temperature hydrogen is the metal catalyst reduction unit 1 0 0 a collected above the inlet 2 a. Since the specific gravity of the high-temperature hydrogen gas is smaller than the outside air, the outside air is always located under the hydrogen gas, and the outside air can be prevented from entering the reaction chamber la. Specifically, it is assumed that the internal temperature of the reaction chamber 1a is about 9000 °C, and the external temperature of the reaction chamber 1a is about 20 °C. Since 1 mol of hydrogen (22.4 liters) is 2 g in a standard state (0 ° C = 2 74 K, 1 atm), and according to ChaHe's law, hydrogen is at a temperature of about 900 ° C (1174 Κ). The volume in the reaction chamber is four times larger, so 1 mole of hydrogen (2 2.4 liters) is about 0.5 grams at this time. At the same time, since 1 mol of air (22.4 liters) weighs 28.9 grams under standard conditions, 1 mole of air (22.4 liters) weighs about 27 grams at room temperature (20 °C). In other words, the specific gravity of the outside air is about 54 times greater than the specific gravity of the hydrogen at the inlet of the reaction chamber (air and hydrogen). Due to the difference in specific gravity, the air will always be under the hydrogen without passing through the hydrogen and entering the reaction chamber la. If the inlet/outlet is opened downward, a gas with a specific gravity lower than that of the outside air (for example, hydrogen) should occupy near the inlet/outlet to prevent outside air from penetrating into the reaction chamber. Further, the argon gas (molecular weight 39.948) below the outlet 3a of the reaction chamber was cooled by the cooling unit 300 a and maintained at room temperature, at which time 1 mol of argon (2 2.4 liters) was about 35 g. Since the proportion of the outside air is less than that of argon, the outside air is always above the argon gas, and does not pass through the argon gas and enters the reaction chamber 1 a. If the inlet/outlet is opened upwards, a gas having a specific gravity greater than that of the outside air (e.g., argon) should occupy near the inlet to prevent outside air from penetrating into the reaction chamber. A certain amount of hydrogen in the reaction chamber can be discharged outside the reaction chamber through the hydrogen gas in the upper reaction chamber ll 33 33 200811032 discharge tube 1 2 0 a. By balancing the hydrogen pressure of the hydrogen gas contacting the outside air portion at the inlet 2 a of the reaction chamber with the outside air pressure, it is possible to effectively prevent outside air from infiltrating into the reaction chamber. In other words, this structure is used to maintain the balance between the hydrogen pressure at the inlet of the reaction chamber and the outside air pressure. It can use a certain hydrogen discharge pipe 110a to discharge a certain amount of hydrogen, and use a gas injection pipe to inject excess hydrogen into the reaction chamber. The hydrogen pressure is increased and hydrogen is prevented from flowing out of the inlet 2a due to an increase in pressure. That is, although a certain amount of hydrogen gas is reacted with the metal oxide catalyst when the metal oxide catalyst is reduced, hydrogen exceeding the reaction amount can be injected into the reaction chamber to maintain the hydrogen pressure in the reaction chamber above a predetermined value. Here, when a certain amount of hydrogen is discharged from the hydrogen discharge pipe 120a, hydrogen flows from the upper reaction chamber 1 1 Oa of the metal catalyst reduction unit 1 〇〇a to the hydrogen discharge pipe 120a, and is guided to the reaction chamber inlet 2a. This avoids the introduction of outside air from the inlet 2a to the reaction chamber. The mass production system of the synthetic carbon nanotube of the present invention allows gas of different specific gravity to occupy a specific area of the reaction chamber. Thus, the system having an open structure makes the reaction chamber completely open, and the outside air does not infiltrate into the reaction chamber. If oxygen is carried into the reaction chamber via the air, the oxygen will immediately undergo oxidation reaction with the carbon source gas to synthesize the carbon nanotubes, and the oxygen will react with the hydrogen gas to cause an explosion. Therefore, the reaction chamber cannot contain oxygen. For the batch system which uses the gas phase synthesis method to mass-produce carbon nanotubes, the inside of the reaction chamber is completely isolated from the outside, and before the synthesis of the carbon nanotubes, an inert gas is first filled in the reaction chamber to discharge. Oxygen and air in the reaction chamber form an oxygen-free environment inside the reaction chamber. 34 200811032 The above conventional system requires repeated steps of removing oxygen in the reaction chamber, heating the reaction chamber to synthesize the carbon nanotubes, cooling the reaction chamber, and taking out the synthesized carbon nanotubes each time the carbon nanotubes are synthesized. Therefore it requires extra preparation time. The mass production system of the conventional synthetic carbon nanotubes is relatively difficult to increase productivity because it is relatively compressed for the time required to actually synthesize the carbon nanotubes due to the additional preparation time. On the contrary, the mass production system of the synthetic carbon nanotube of the present invention only needs to reach and maintain the reaction environment for synthesizing the carbon nanotubes at the stage of starting the preparation of the synthetic carbon nanotubes. With the mass production system of the synthetic carbon nanotube according to the present invention, the carbon nanotube can be continuously manufactured, and it is not necessary to stop the manufacturing even in the operating system. Since the metal catalyst is continuously fed into the completely open reaction chamber, the system of the present invention can continuously synthesize carbon nanotubes. Even if the metal catalyst is externally supplied to the reaction chamber, the carbon nanotube synthesis unit 200a can continue to synthesize the carbon nanotube. Although the interior of the reaction chamber is completely connected to the outside air, the gas in a specific area of the reaction chamber can completely block the outside air from entering the reaction chamber. That is, gases of different specific gravities occupy a specific area of the reaction chamber and block other gases from infiltrating into specific areas, thereby preventing outside air from penetrating into the reaction chamber. Since the gas pressure occupying a specific area of the reaction chamber is in equilibrium with the outside air pressure, the outside air cannot enter the reaction chamber. Figure 7 is a cross-sectional view showing the mass production system of a synthetic carbon nanotube according to a sixth embodiment of the present invention. As shown in Fig. 7, the mass production system of the sixth embodiment includes a reaction chamber 1a having a heating member and a passage 4a containing an internal space for connecting the reaction chamber portion and a conveying unit 15a via the passage. 4a lose 35 200811032 Send metal catalyst to reaction chamber 1 a. Channel 4a is where the catalyst enters and exits the chamber, which can be considered an inlet or an outlet. In this embodiment, the reaction chamber 1a of the mass production system includes a downwardly opening passage 4a, and a carbon nanotube-forming unit 200a located in the reaction chamber above the passage 4a. The reaction chamber is provided with a gas supply unit 50a, which comprises a gas sump body injection pipe, each gas injection pipe is connected to a gas tank associated with the reaction chamber, and has an on/off valve to respectively supply carbon source gas, hydrogen gas and inert gas to the reaction chamber. . The carbon nanotube synthesis unit 200a includes a shower head 230a, a carbon source gas storage tank in the upper portion of the chamber 1a, and has a plurality of nozzles to share the carbon source gas; a carbon source gas restriction region 280a located at the showerhead Below and at its upper end is open (like a box without a top surface) to collect carbon; and a heating member 250a disposed in the reaction chamber. The carbon source gas restricting region 280a has a box-like structure surrounded by a predetermined high inner wall and only opens its top surface. The sprinkler head 230a is disposed deeper than the top end of the inner wall of the carbon source gas zone. With this configuration, the carbon source gas stays in the carbon source gas restriction region 280a after being ejected from the spray 230a. The carbon source gas overflowing from the gas confinement zone 28 8 a is mainly left in the reaction chamber, and the area of the sprinkler head is large enough to cover most of the top surface of the carbon source gas confinement zone. Of course, the carbon nanotube synthesis unit includes a space for the catalyst-containing member to enter the carbon restriction zone and a space for the catalyst-containing member to leave the carbon source gas zone between the sprayed carbon source gas restriction zones. In this way, the sprinkler head can effectively avoid the reaction between the tube and the gas storage gas which is lighter than the carbon source gas, and the carbon source of the body is limited to 23 0a. The hydrogen source of the head and the source gas is limited to 36. The gas enters the carbon source gas restriction zone, and allows the catalyst-containing member to enter and exit the carbon source gas restriction zone, thereby maintaining the synthesis efficiency of the carbon nanotube. The upper end of the carbon source gas restriction zone 280a includes a leeway space for the bucket The shaped vessel (ie, the catalyst-containing member) enters from one upper side and exits from the other upper side. The source gas of the 5 carbon source gas confinement zone will react with the metal catalyst in the reaction zone, and the reaction zone is located at the carbon source gas limit. Below the hydrogen in the area occupying the remaining space. The carbon source gas restriction zone is equipped with a discharge pipe 2 8 5 a for discharging water, residual carbon source gas and other by-products. If the carbon source gas is excessively supplied to In the reaction chamber, part of the carbon source gas is discharged to the outside through the discharge pipe 2 8 5 a. The carbon source gas restriction zone 28 80 a is used to collect carbon source gas heavier than hydrogen, and is not limited to a box-like junction. The carbon source gas restriction zone 280a may be any structure having an open upper portion, a closed periphery, and a bottom surface. The heating member attached to the reaction chamber heats the entire reaction chamber. When the barrel container 10a enters the reaction chamber via the passage 4a, The metal oxide catalyst in the barrel container 10a is first reduced by reacting with the hydrogen injected into the reaction chamber by the gas injection tube before the barrel container 1 〇a reaches the carbon source gas restriction region 280a, thereby removing oxygen in the reaction chamber. Therefore, the reaction chamber filled with hydrogen itself is used as a metal catalyst reduction unit to reduce the metal catalyst. Further, the reaction chamber includes a separate induced reduction guiding surface which contacts the side of the carbon source gas restriction region to determine the metal catalyst. Reduction: The induced reduction guide surface has sufficient lateral length to ensure that the catalyst-containing member moves along the upper space of the reaction chamber for a time long enough to reduce the metal oxide catalyst therein. Although this embodiment is an induced reduction including separation Guide surface, but 37 200811032 The invention is not limited to this configuration. Alternatively, the transport unit can be configured in an appropriate transport path The diameter of the catalyst-containing member has moved a sufficient distance along the upper portion of the reaction chamber before reaching the carbon source gas restriction zone, thereby providing sufficient time to reduce the metal oxide catalyst. The passage 4a extends downward from the reaction chamber by a predetermined distance. The reaction chamber further includes a cooling unit 300a located near the passage 4a and including a cooling member 350a for cooling the carbon nanotubes discharged outside the reaction chamber. The hydrogen discharge pipe 1 2 0 a is formed on the side of the passage 4 a. The gas supply unit 5 0a If the excess hydrogen is supplied, the hydrogen pressure will be continuously increased. At this time, a certain amount of hydrogen is discharged to the reaction chamber to maintain the balance between the hydrogen pressure of the channel 4a contacting the outside air and the outside air pressure. For this purpose, hydrogen The discharge is using a hydrogen discharge pipe of 1 2 0 a instead of a channel 4 a. The hydrogen discharge pipe 1 2 0 a is disposed in the lower part of the reaction chamber, so that the hydrogen gas is not directly discharged to the outside when it rises to the upper portion of the reaction chamber under high temperature conditions, but is sufficiently left in the reaction chamber, thereby effectively increasing the hydrogen pressure in the reaction chamber. Since the outside air outside the reaction chamber has a specific gravity greater than that of hydrogen, the outside air will remain below the hydrogen. In addition, since the passage 4a is opened downward, the outside air having a large specific gravity cannot penetrate into the reaction chamber filled with hydrogen. Further, maintaining the balance between the hydrogen pressure of the hydrogen at the passage 4a contacting the outside air and the outside air pressure can also prevent outside air from entering the reaction chamber. Although the passage 4a of the mass production system of this embodiment is opened downward, the outside air which is more than the high temperature hydrogen of the reaction chamber is always under the hydrogen gas, so that the outside air can be prevented from infiltrating into the reaction chamber la. In this embodiment, the argon injection tube is a showerhead that connects the reaction chambers. 38 200811032 According to this structure, the argon gas injected during the reaction preparation stage pushes the air in the chamber to discharge the air from the passage, thereby causing the reaction chamber to be in an inert gas atmosphere. Next, hydrogen and a carbon source gas are supplied to the reverse metal catalyst to synthesize the carbon nanotubes. The sixth embodiment and the process are the same as those of the first embodiment, and therefore will not be described again. Figure 8 is a cross-sectional view showing a synthetic carbon production system according to a seventh embodiment of the present invention. As shown in Fig. 8, the amount of the seventh embodiment is the same as that of the sixth embodiment, and the barrel container 10a (i.e., containing the catalyst) can enter and exit the system via the passage 4a. The seventh embodiment and the sixth portion are the same as the channel 4 a is open upward and the U-shaped seventh embodiment of the mass production system further includes a transport unit 15 a, a metal oxide catalyst-containing barrel container 1 0 a to the reaction chamber carbon nanotubes, and the barrel container is sent out of the reaction chamber. After the U-shaped portion 4 0 0 a extends downward from the passage 4 a, turns and is watered, the extended end is connected to the carbon-forming unit 200a for synthesizing the carbon nanotubes. The U-shaped portion 400a constitutes a cooling unit 300a. The cooling member 3 5 0 a in the vicinity of the portion 400a is included. Next to the U-shaped portion 4 0 0 a, the catalyst reduction unit 1 0 0 a and the carbon nanotube synthesis unit 2 0 0 a. When the cooling member 350 a cools the U-shaped portion 4 0 0 a, U: is an argon gas filled with a degree of injection into the argon gas injection pipe of the gas supply unit 50a. The specific gravity of the cooled argon gas is relatively increased to be greater than the external specific gravity. Therefore, at the reaction chamber passage 4a, the external air will be stored in the anti-internal and other chambers of the other mass-meter system. The embodiment of the mass production system and the chemical agent is not used for transmission. The synthetic flat extension one nano tube is placed in the U-shaped metal in the reaction chamber S ^ 400a to reach the predetermined high boundary air above the argon gas having a larger specific gravity than 39 200811032, and can block the outside air from entering the reaction chamber. 1 a. The gas occupying the U-shaped portion of the U-shaped portion may be an inert gas having the same specific gravity as the argon gas than the outside air. The reaction chamber has a horizontal extension 1 〇 5 a which is bent from the U-shaped portion 4 0 0 a and heated by a heating member outside the reaction chamber. In the horizontal extension 1 0 5 a, the hydrogen supplied to the reaction chamber by the hydrogen injection tube is reacted with the metal oxide catalyst introduced into the horizontal extension of the reaction chamber by the transport unit 15a, thereby removing the metal oxide catalyst. Oxygen. After passing through the horizontal extension l〇5a, the catalyst-containing member is subsequently transferred to the top surface of the post-reaction chamber 2 0 5 a. Thus, even if a small amount of unreduced metal oxide catalyst remains, it can be reduced by hydrogen in the upper portion of the post-reaction chamber 2 0 5 a to completely reduce the metal oxide catalyst. The horizontal extension 1 0 5 a is not limited to the length shown in Fig. 8, and may have a length for sufficiently reducing the metal oxide catalyst. The rear reaction chamber 205a connecting the horizontal extensions 10a includes a predetermined space of the inner space, and a sprinkler head 230a placed at the upper portion to uniformly inject the carbon source gas. The post reaction chamber 2 0 5 a includes a hydrogen discharge pipe 2 0 7a provided at an upper portion for discharging hydrogen gas lighter than the carbon source gas to the outside, and a heating member 250a provided at the lower portion. When the catalyst-containing member transported to the post-reaction chamber 205a by the transport unit 15a passes under the shower head 230a, the contained metal oxide catalyst reacts with the carbon source gas to synthesize the carbon nanotube. The synthesized carbon nanotubes are sent out of the reaction chamber along the same path by the transport unit 15 a along with the catalyst-containing members. The bottom surface of the post reaction chamber 2 0 5 a is deeper than the horizontal extension portion 10 5 a, and the shower head 230a is disposed near the bottom surface of the rear reaction chamber 205a. According to this structure, the rear 40 200811032 reaction chamber 2 0 5 a can concentrate the carbon source gas in the reserved space at the bottom, and the reaction region supplies the metal catalyst to react with the carbon source gas. Since the metal is directly passed over the bottom surface of the post-reaction chamber 20 5 a, it can react with the carbon source gas to effectively synthesize the carbon nanotube. In other words, the bottom surface of the rear chamber 2 0 5 a is deeper than the horizontal extension portion 10 5 a, and the hydrogen gas source gas can be accumulated in the lower space of the post reaction chamber 205a by gravity to provide reaction efficiency. Other components will be clearly understood after referring to the above embodiments, and therefore will not be described again. Figure 9 is a cross-sectional view showing a synthetic carbon nanotube production system according to an eighth embodiment of the present invention. As shown in Fig. 9, the mass production of the eighth embodiment is similar to the mass production system of the seventh embodiment, except that the mass production system of the eighth embodiment includes a U-shaped portion, and the passage is opened downward. Since the passage from the downward opening to the reaction chamber is filled with hydrogen, the outdoor air cannot enter the reaction chamber. The reason why the outside air cannot enter the reaction has been described in detail in the fifth and sixth embodiments, and therefore will not be described again. The mass production system of the eighth embodiment is different from the portion of the seventh embodiment in that the hydrogen discharge pipe 2 0 7 a is provided at the upper portion of the passage. Formed near the passage The gas discharge pipe 2 0 7 a prevents hydrogen from being discharged from the passage. According to the mass production system of the above embodiment, if the carbon nanotube synthesis 200 Å has a longer length for the catalyst-containing member to move, the aging time thereof will be lengthened, thereby improving the transport of the catalyst-containing material. Component degree. In other words, when the time of the synthesis reaction and the temperature of the reaction chamber are determined, if the length of the carbon nanotube synthesis unit 200 a is long, the reaction weight of the metal forming agent can be accelerated, and the amount of the reaction is further The rate at which the hydrogen unit of the reaction chamber is reacted at a rapid rate catalyzes the speed at which the agent enters the reaction chamber, thereby increasing production efficiency. In the mass production system of the above embodiment, although the heating member and the cooling member 350 are disposed outside the reaction chamber, the present invention is not limited to this configuration. These components can be placed in any suitable location for heating and cooling. According to the present invention, the mass production system can arrange one or more different specific gravity gas occupying regions depending on the shape of the reaction chamber. In addition, the different specific gravity gas occupying regions spaced apart from each other may be filled with the same or different gases. The mechanism for transporting the catalyst-containing member is not limited to the use of a conveyor belt, and other well-known transport members can be used. The carbon source gas confinement zone of the reaction chamber is used to enhance the synthesis efficiency of the carbon nanotubes and to concentrate the carbon source gas to a specific location. Although the embodiment of the present invention employs a separate cooling member for cooling the synthesized carbon nanotube to a room temperature state, the present invention is not limited to this structure; the carbon nanotube tube may be externally cooled after being discharged from the reaction chamber. While the present invention has been described above by way of a preferred embodiment, it is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application. The present invention is applicable to a mass production system for synthesizing carbon nanotubes by gas phase synthesis. In particular, the present invention is applicable to a method of mass synthesis of carbon nanotubes using a mass production system having an open reaction chamber. BRIEF DESCRIPTION OF THE DRAWINGS In order to make the above and other objects, features, and advantages of the present invention more apparent, the description of the accompanying drawings is as follows: FIG. 1 is a first embodiment according to the present invention. Schematic diagram of a mass production system for synthesizing carbon nanotubes by gas phase synthesis; FIG. 2 is a cross-sectional view of a mass production system of a synthetic carbon nanotube according to a first embodiment of the present invention, showing gas in a reaction chamber 3 is a cross-sectional view of a mass production system of a synthetic carbon nanotube according to a second embodiment of the present invention; and FIG. 4 is a cross-sectional view of a mass production system of a synthetic carbon nanotube according to a third embodiment of the present invention; Figure 5 is a cross-sectional view showing a mass production system of a synthetic carbon nanotube according to a fourth embodiment of the present invention; and Figure 6 is a cross-sectional view showing a mass production system of a synthetic carbon nanotube according to a fifth embodiment of the present invention; Figure 5 is a cross-sectional view showing a mass production system of a synthetic carbon nanotube according to a sixth embodiment of the present invention; and Figure 8 is a cross-sectional view showing a mass production system of a synthetic carbon nanotube according to a seventh embodiment of the present invention; In accordance with an eighth embodiment of the present invention As a system-sectional view of mass production of carbon nanotubes. [Main component symbol description] 1. la reaction chamber 2, 2 a into ο 3 > 3a outlet 4 a channel 5 sedimentation portion 10 boat-shaped container 43 200811032 10a barrel-shaped container 20a, 120a discharge tube 60, 70, 80 storage tank 105a extension Part 110a upper reaction chamber 1 3 0, 3 3 0 exhaust pipe 200 ^ 200a synthesis unit 207a, 285a discharge pipe 212 > 230a shower head 210, 250a heating member 310, 350a cooling member 400, 400a U-shaped conveying unit 50a gas supply unit > 100a reduction unit, 150a heating member, 3 1 2 nozzle type A portion, rear reaction chamber a, central reaction chamber, 280a carbon source gas restriction region, 300a, cooling unit a, lower reaction chamber 44