TW200707699A - Sip type package containing analog semiconductor chip and digital semiconductor chip stacked in order, and method for manufacturing the same - Google Patents

Sip type package containing analog semiconductor chip and digital semiconductor chip stacked in order, and method for manufacturing the same

Info

Publication number
TW200707699A
TW200707699A TW095116427A TW95116427A TW200707699A TW 200707699 A TW200707699 A TW 200707699A TW 095116427 A TW095116427 A TW 095116427A TW 95116427 A TW95116427 A TW 95116427A TW 200707699 A TW200707699 A TW 200707699A
Authority
TW
Taiwan
Prior art keywords
semiconductor chip
manufacturing
order
same
package containing
Prior art date
Application number
TW095116427A
Other languages
English (en)
Inventor
Kimihiro Kikushima
Original Assignee
Nec Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Electronics Corp filed Critical Nec Electronics Corp
Publication of TW200707699A publication Critical patent/TW200707699A/zh

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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
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    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
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    • H01L23/50Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2924/19101Disposition of discrete passive components
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    • H05K1/02Details
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    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
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TW095116427A 2005-05-20 2006-05-09 Sip type package containing analog semiconductor chip and digital semiconductor chip stacked in order, and method for manufacturing the same TW200707699A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9269674B2 (en) 2014-06-17 2016-02-23 Realtek Semiconductor Corporation Integrated circuit having electromagnetic shielding capability and manufacturing method thereof

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4408832B2 (ja) * 2005-05-20 2010-02-03 Necエレクトロニクス株式会社 半導体装置
KR100764682B1 (ko) * 2006-02-14 2007-10-08 인티그런트 테크놀로지즈(주) 집적회로 칩 및 패키지.
DE102006033175A1 (de) * 2006-07-18 2008-01-24 Robert Bosch Gmbh Elektronikanordnung
CN101150123B (zh) * 2007-10-31 2010-06-02 日月光半导体制造股份有限公司 具有电磁屏蔽罩盖的半导体封装结构
US20110193243A1 (en) * 2010-02-10 2011-08-11 Qualcomm Incorporated Unique Package Structure
CN101908082B (zh) * 2010-04-30 2012-10-24 梅州市志浩电子科技有限公司 印刷电路板的阻抗设计方法及阻抗设计装置
JP5924110B2 (ja) * 2012-05-11 2016-05-25 株式会社ソシオネクスト 半導体装置、半導体装置モジュールおよび半導体装置の製造方法
CN103969572B (zh) * 2013-02-05 2017-05-17 泰斗微电子科技有限公司 一种sip芯片测试平台和方法
CN103441124B (zh) * 2013-08-27 2016-01-06 矽力杰半导体技术(杭州)有限公司 电压调节器的叠层封装方法及相应的叠层封装装置
WO2015037390A1 (ja) * 2013-09-10 2015-03-19 株式会社村田製作所 センサモジュール
KR20160036945A (ko) * 2014-09-26 2016-04-05 삼성전기주식회사 인쇄회로기판 및 이를 포함하는 전자부품 패키지
WO2016154438A1 (en) * 2015-03-26 2016-09-29 Life Technologies Corporation Method for treating a semiconductor sensor array device
JP2018032680A (ja) * 2016-08-23 2018-03-01 日本電信電話株式会社 積層集積回路
CN106324484B (zh) * 2016-08-30 2019-04-02 福州瑞芯微电子股份有限公司 芯片的无线调试电路和方法
CN106324485B (zh) * 2016-08-30 2019-04-02 福州瑞芯微电子股份有限公司 芯片的无线测试电路及无线测试方法
CN106374962B (zh) * 2016-08-30 2019-03-12 福州瑞芯微电子股份有限公司 一体化wifi芯片及其封装方法
CN106361303A (zh) * 2016-08-30 2017-02-01 福州瑞芯微电子股份有限公司 血管检测一体化芯片及其实现方法
US10332820B2 (en) * 2017-03-20 2019-06-25 Akash Systems, Inc. Satellite communication transmitter with improved thermal management
US10374553B2 (en) * 2017-06-15 2019-08-06 Akash Systems, Inc. Microwave transmitter with improved information throughput
US10680633B1 (en) * 2018-12-21 2020-06-09 Analog Devices International Unlimited Compnay Data acquisition system-in-package
US20210055255A1 (en) * 2019-08-21 2021-02-25 Life Technologies Corporation Devices incorporating multilane flow cell

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5399898A (en) * 1992-07-17 1995-03-21 Lsi Logic Corporation Multi-chip semiconductor arrangements using flip chip dies
US5198693A (en) * 1992-02-05 1993-03-30 International Business Machines Corporation Aperture formation in aluminum circuit card for enhanced thermal dissipation
US5285352A (en) * 1992-07-15 1994-02-08 Motorola, Inc. Pad array semiconductor device with thermal conductor and process for making the same
US5642261A (en) * 1993-12-20 1997-06-24 Sgs-Thomson Microelectronics, Inc. Ball-grid-array integrated circuit package with solder-connected thermal conductor
US5858814A (en) * 1996-07-17 1999-01-12 Lucent Technologies Inc. Hybrid chip and method therefor
US6381283B1 (en) * 1998-10-07 2002-04-30 Controlnet, Inc. Integrated socket with chip carrier
JP2000323617A (ja) * 1999-05-12 2000-11-24 Mitsubishi Electric Corp 高周波用半導体パッケージ
JP2001035994A (ja) * 1999-07-15 2001-02-09 Toshiba Corp 半導体集積回路装置およびシステム基板
US6261869B1 (en) * 1999-07-30 2001-07-17 Hewlett-Packard Company Hybrid BGA and QFP chip package assembly and process for same
US6531784B1 (en) * 2000-06-02 2003-03-11 Amkor Technology, Inc. Semiconductor package with spacer strips
JP3417388B2 (ja) * 2000-07-19 2003-06-16 松下電器産業株式会社 半導体装置
KR100391093B1 (ko) * 2001-01-04 2003-07-12 삼성전자주식회사 히트 싱크가 부착된 볼 그리드 어레이 패키지
US6586825B1 (en) * 2001-04-26 2003-07-01 Lsi Logic Corporation Dual chip in package with a wire bonded die mounted to a substrate
US6867500B2 (en) * 2002-04-08 2005-03-15 Micron Technology, Inc. Multi-chip module and methods
JP2004111656A (ja) * 2002-09-18 2004-04-08 Nec Electronics Corp 半導体装置及び半導体装置の製造方法
US7479407B2 (en) * 2002-11-22 2009-01-20 Freescale Semiconductor, Inc. Digital and RF system and method therefor
JP2004214249A (ja) * 2002-12-27 2004-07-29 Renesas Technology Corp 半導体モジュール
TWI317549B (en) * 2003-03-21 2009-11-21 Advanced Semiconductor Eng Multi-chips stacked package
JP2004296719A (ja) * 2003-03-26 2004-10-21 Renesas Technology Corp 半導体装置
TWI278947B (en) * 2004-01-13 2007-04-11 Samsung Electronics Co Ltd A multi-chip package, a semiconductor device used therein and manufacturing method thereof
US7235889B2 (en) * 2004-09-10 2007-06-26 Lsi Corporation Integrated heatspreader for use in wire bonded ball grid array semiconductor packages
JP4748648B2 (ja) * 2005-03-31 2011-08-17 ルネサスエレクトロニクス株式会社 半導体装置
JP4408832B2 (ja) * 2005-05-20 2010-02-03 Necエレクトロニクス株式会社 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9269674B2 (en) 2014-06-17 2016-02-23 Realtek Semiconductor Corporation Integrated circuit having electromagnetic shielding capability and manufacturing method thereof
TWI553817B (zh) * 2014-06-17 2016-10-11 瑞昱半導體股份有限公司 具有電磁防護功能之積體電路及其製造方法

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