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Application filed by Jia-Zhi ZhuangfiledCriticalJia-Zhi Zhuang
Priority to TW094111740ApriorityCriticalpatent/TW200636088A/en
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A method of growing a carbon nanotube and the structure of the grown carbon nanotube are described. Mainly, a metal diffusion layer and a catalysis metal layer are sequentially deposited on a substrate. Moreover, a carbon-containing gas are introduced to diffuse the carbon atoms from the metal diffusion layer to the catalysis metal particles formed by the catalysis metal layer. The carbon atoms are grown from the inside to the outside of several catalysis metal grains formed by the surface of the catalysis metal layer. By doing so, carbon nanotubes can be formed in a low temperature condition.
TW094111740A2005-04-132005-04-13Method of growing carbon nanotube and structure of grown carbon nanotube
TW200636088A
(en)