WO2006085925A3 - Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes - Google Patents

Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes Download PDF

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Publication number
WO2006085925A3
WO2006085925A3 PCT/US2005/020596 US2005020596W WO2006085925A3 WO 2006085925 A3 WO2006085925 A3 WO 2006085925A3 US 2005020596 W US2005020596 W US 2005020596W WO 2006085925 A3 WO2006085925 A3 WO 2006085925A3
Authority
WO
WIPO (PCT)
Prior art keywords
carbon nanotubes
diamond
synthesis
substrate
self assembled
Prior art date
Application number
PCT/US2005/020596
Other languages
French (fr)
Other versions
WO2006085925A2 (en
Inventor
Xiao Xingcheng
John A Carlisle
Orlando Auciello
Jeffrey W Elam
Dieter M Gruen
Original Assignee
Univ Chicago
Xiao Xingcheng
John A Carlisle
Orlando Auciello
Jeffrey W Elam
Dieter M Gruen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/097,603 external-priority patent/US20060222850A1/en
Application filed by Univ Chicago, Xiao Xingcheng, John A Carlisle, Orlando Auciello, Jeffrey W Elam, Dieter M Gruen filed Critical Univ Chicago
Priority to EP05857452A priority Critical patent/EP1771597A2/en
Publication of WO2006085925A2 publication Critical patent/WO2006085925A2/en
Publication of WO2006085925A3 publication Critical patent/WO2006085925A3/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/274—Diamond only using microwave discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Abstract

A material of carbon nanotubes and diamond bonded together. A method of producing carbon nanotubes and diamond covalently bonded together is disclosed with a substrate on which is deposited nanopart: iLcles of a suitable catalyst on a surface of the substrate. A diamond seeding material is deposited on the surface of the substrate, and then the substrate is exposed to a hydrogen poor plasma for a time sufficient to grow carbon nanotubes and diamond covalently bonded together.
PCT/US2005/020596 2004-06-10 2005-06-10 Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes WO2006085925A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP05857452A EP1771597A2 (en) 2004-06-10 2005-06-10 Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US57853204P 2004-06-10 2004-06-10
US60/578,532 2004-06-10
US11/097,603 2005-04-01
US11/097,603 US20060222850A1 (en) 2005-04-01 2005-04-01 Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes

Publications (2)

Publication Number Publication Date
WO2006085925A2 WO2006085925A2 (en) 2006-08-17
WO2006085925A3 true WO2006085925A3 (en) 2007-09-07

Family

ID=36685951

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/020596 WO2006085925A2 (en) 2004-06-10 2005-06-10 Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes

Country Status (3)

Country Link
EP (1) EP1771597A2 (en)
KR (1) KR20070072849A (en)
WO (1) WO2006085925A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8404313B1 (en) 2006-03-22 2013-03-26 University Of South Florida Synthesis of nanocrystalline diamond fibers
KR100781289B1 (en) * 2006-12-18 2007-11-30 한국과학기술연구원 Large area deposition method for self-assembled carbon nanomaterials
US8383200B2 (en) 2009-05-27 2013-02-26 GM Global Technology Operations LLC High hardness nanocomposite coatings on cemented carbide
CN113088921B (en) * 2021-04-13 2023-03-24 昆明理工大学 Preparation method of porous diamond film/three-dimensional carbon nanowire network composite material and product thereof
US20230260800A1 (en) * 2022-02-15 2023-08-17 Applied Materials, Inc. Methods to reduce uncd film roughness

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001061719A1 (en) * 2000-02-16 2001-08-23 Fullerene International Corporation Diamond/carbon nanotube structures for efficient electron field emission
US20040061429A1 (en) * 2002-09-26 2004-04-01 Tadashi Sakai Discharge lamp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001061719A1 (en) * 2000-02-16 2001-08-23 Fullerene International Corporation Diamond/carbon nanotube structures for efficient electron field emission
US20040061429A1 (en) * 2002-09-26 2004-04-01 Tadashi Sakai Discharge lamp

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
ESPINOSA H D ET AL: "Fracture strength of ultrananocrystalline diamond thin films-identification of Weibull parameters", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 94, no. 9, 1 November 2003 (2003-11-01), pages 6076 - 6084, XP012060604, ISSN: 0021-8979 *
GAO J S ET AL: "Control of sizes and densities of nano catalysts for nanotube synthesis by plasma breaking method", MATERIALS SCIENCE AND ENGINEERING B, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 107, no. 2, 15 March 2004 (2004-03-15), pages 113 - 118, XP004492088, ISSN: 0921-5107 *
KÜTTEL OLIVIER M ET AL: "Electron field emission from phase pure nanotube films grown in a methane/hydrogen plasma", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 73, no. 15, 12 October 1998 (1998-10-12), pages 2113 - 2115, XP012021124, ISSN: 0003-6951 *
SINNOTT S B ET AL: "Mechanical properties of nanotubule fibers and composites determined from theoretical calculations and simulations", CARBON, ELSEVIER, OXFORD, GB, vol. 36, no. 1-2, 1998, pages 1 - 9, XP004101799, ISSN: 0008-6223 *
STOCKEL R ET AL: "Carbon nanostructures diamond nucleation centers formed during the bias pretreatment", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 7, no. 2-5, February 1998 (1998-02-01), pages 147 - 151, XP004115025, ISSN: 0925-9635 *
YANG Q ET AL: "Selective growth of diamond and carbon nanostructures by hot filament chemical vapor deposition", DIAMOND AND RELATED MATERIALS, ELSEVIER SCIENCE PUBLISHERS, AMSTERDAM, NL, vol. 13, no. 3, March 2004 (2004-03-01), pages 433 - 437, XP004498785, ISSN: 0925-9635 *

Also Published As

Publication number Publication date
WO2006085925A2 (en) 2006-08-17
EP1771597A2 (en) 2007-04-11
KR20070072849A (en) 2007-07-06

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