WO2006101637A3 - Producing a stable catalyst for nanotube growth - Google Patents

Producing a stable catalyst for nanotube growth Download PDF

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Publication number
WO2006101637A3
WO2006101637A3 PCT/US2006/005838 US2006005838W WO2006101637A3 WO 2006101637 A3 WO2006101637 A3 WO 2006101637A3 US 2006005838 W US2006005838 W US 2006005838W WO 2006101637 A3 WO2006101637 A3 WO 2006101637A3
Authority
WO
WIPO (PCT)
Prior art keywords
catalyst
producing
nanotube growth
stable catalyst
carbon
Prior art date
Application number
PCT/US2006/005838
Other languages
French (fr)
Other versions
WO2006101637A2 (en
Inventor
Steven M Smith
Bernard F Coll
Jaime A Quintero
Yi Wei
Original Assignee
Motorola Inc
Steven M Smith
Bernard F Coll
Jaime A Quintero
Yi Wei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc, Steven M Smith, Bernard F Coll, Jaime A Quintero, Yi Wei filed Critical Motorola Inc
Priority to EP06735485A priority Critical patent/EP1859084A2/en
Priority to JP2007548626A priority patent/JP2008525183A/en
Publication of WO2006101637A2 publication Critical patent/WO2006101637A2/en
Publication of WO2006101637A3 publication Critical patent/WO2006101637A3/en

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Classifications

    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/1271—Alkanes or cycloalkanes
    • D01F9/1272—Methane

Abstract

A process (40) is provided for preparing a catalyst (20). A catalyst (20) is formed over a substrate (12). A gas (24) comprising hydrogen and carbon is applied to the catalyst (20), wherein a carbon seeding layer (26) is formed on the catalyst (20). Carbon nanotubes (28) may then be grown from the catalyst (20) having the carbon seeding layer thereon (26).
PCT/US2006/005838 2005-03-17 2006-02-17 Producing a stable catalyst for nanotube growth WO2006101637A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP06735485A EP1859084A2 (en) 2005-03-17 2006-02-17 Producing a stable catalyst for nanotube growth
JP2007548626A JP2008525183A (en) 2005-03-17 2006-02-17 Production of stable catalysts for nanotube growth

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/082,437 2005-03-17
US11/082,437 US20060210467A1 (en) 2005-03-17 2005-03-17 Producing a stable catalyst for nanotube growth

Publications (2)

Publication Number Publication Date
WO2006101637A2 WO2006101637A2 (en) 2006-09-28
WO2006101637A3 true WO2006101637A3 (en) 2007-11-15

Family

ID=37010548

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/005838 WO2006101637A2 (en) 2005-03-17 2006-02-17 Producing a stable catalyst for nanotube growth

Country Status (5)

Country Link
US (1) US20060210467A1 (en)
EP (1) EP1859084A2 (en)
JP (1) JP2008525183A (en)
CN (1) CN101133190A (en)
WO (1) WO2006101637A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5089898B2 (en) * 2006-03-20 2012-12-05 株式会社アルバック Carbon nanotube growth method
US7678672B2 (en) * 2007-01-16 2010-03-16 Northrop Grumman Space & Mission Systems Corp. Carbon nanotube fabrication from crystallography oriented catalyst
JP5293126B2 (en) * 2008-12-01 2013-09-18 富士通株式会社 Manufacturing method of semiconductor device
JP4799623B2 (en) * 2009-01-19 2011-10-26 株式会社東芝 Carbon nanotube growth method
JP5780704B2 (en) * 2010-01-19 2015-09-16 株式会社リケン Hydrogen-containing amorphous hard carbon coated member
CN107601458B (en) * 2017-09-12 2020-07-28 刘云芳 Preparation method of single-walled carbon nanotube

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6087765A (en) * 1997-12-03 2000-07-11 Motorola, Inc. Electron emissive film
US6346189B1 (en) * 1998-08-14 2002-02-12 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube structures made using catalyst islands
US6475573B1 (en) * 1999-05-03 2002-11-05 Guardian Industries Corp. Method of depositing DLC inclusive coating on substrate
US6261693B1 (en) * 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6548313B1 (en) * 2002-05-31 2003-04-15 Intel Corporation Amorphous carbon insulation and carbon nanotube wires
US6841002B2 (en) * 2002-11-22 2005-01-11 Cdream Display Corporation Method for forming carbon nanotubes with post-treatment step
CN1286716C (en) * 2003-03-19 2006-11-29 清华大学 Method for growing carbon nano tube
WO2004087570A1 (en) * 2003-03-31 2004-10-14 Fujitsu Limited Process for producing carbon nanotube

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LIU ET AL.: "Growth of carbon nanotubes and nanowires using selected catalysts", THIN SOLID FILMS, vol. 420-421, 2002, pages 145 - 150, XP004397835 *
WU ET AL.: "Growth and characteristics of carbon films with nano-sized metal", THIN SOLID FILMS, vol. 420-421, 2002, pages 166 - 171, XP004397839 *

Also Published As

Publication number Publication date
EP1859084A2 (en) 2007-11-28
US20060210467A1 (en) 2006-09-21
CN101133190A (en) 2008-02-27
WO2006101637A2 (en) 2006-09-28
JP2008525183A (en) 2008-07-17

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