TW200628868A - Image inspection system for correcting focal position in autofocusing - Google Patents
Image inspection system for correcting focal position in autofocusingInfo
- Publication number
- TW200628868A TW200628868A TW094145235A TW94145235A TW200628868A TW 200628868 A TW200628868 A TW 200628868A TW 094145235 A TW094145235 A TW 094145235A TW 94145235 A TW94145235 A TW 94145235A TW 200628868 A TW200628868 A TW 200628868A
- Authority
- TW
- Taiwan
- Prior art keywords
- focal position
- subject
- target focal
- image inspection
- inspection system
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/245—Devices for focusing using auxiliary sources, detectors
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004374522A JP2006184303A (ja) | 2004-12-24 | 2004-12-24 | 画像検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200628868A true TW200628868A (en) | 2006-08-16 |
TWI413823B TWI413823B (zh) | 2013-11-01 |
Family
ID=36737501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094145235A TWI413823B (zh) | 2004-12-24 | 2005-12-20 | 影像檢查裝置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7365295B2 (zh) |
JP (1) | JP2006184303A (zh) |
CN (1) | CN100570341C (zh) |
TW (1) | TWI413823B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102478699A (zh) * | 2010-11-23 | 2012-05-30 | 财团法人工业技术研究院 | 自动聚焦装置与其方法 |
TWI499754B (zh) * | 2010-06-17 | 2015-09-11 | Dmg Mori Seiki Co Ltd | 位移偵測裝置 |
Families Citing this family (20)
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JP5038191B2 (ja) * | 2008-03-04 | 2012-10-03 | 有限会社共同設計企画 | 電子部品検査方法およびそれに用いられる装置 |
JP4553030B2 (ja) * | 2008-04-11 | 2010-09-29 | ソニー株式会社 | 自動焦点制御ユニット、電子機器、自動焦点制御方法 |
DE102008041290A1 (de) * | 2008-08-15 | 2010-02-25 | Carl Zeiss Surgical Gmbh | Mikroskopieanordnung mit Fokusversatz |
JP2010251415A (ja) * | 2009-04-13 | 2010-11-04 | Hitachi High-Technologies Corp | 作業処理装置あるいは表示基板モジュール組立ラインまたは表示基板モジュール組立方法 |
US8592739B2 (en) * | 2010-11-02 | 2013-11-26 | Microsoft Corporation | Detection of configuration changes of an optical element in an illumination system |
TWI406025B (zh) | 2010-11-25 | 2013-08-21 | Ind Tech Res Inst | 自動聚焦裝置及方法 |
DE102011055294B4 (de) * | 2011-11-11 | 2013-11-07 | Leica Microsystems Cms Gmbh | Mikroskopische Einrichtung und Verfahren zur dreidimensionalen Lokalisierung von punktförmigen Objekten in einer Probe |
WO2013096660A1 (en) * | 2011-12-23 | 2013-06-27 | Rudolph Technologies, Inc. | On-axis focus sensor and method |
JP6014902B2 (ja) * | 2012-12-06 | 2016-10-26 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 焦点制御装置及びその方法 |
CN104237239B (zh) * | 2013-06-09 | 2017-02-08 | 致茂电子(苏州)有限公司 | 半导体元件的瑕疵检测方法 |
CN103795933B (zh) * | 2014-03-03 | 2018-02-23 | 联想(北京)有限公司 | 一种图像处理方法及电子设备 |
CN105628710A (zh) * | 2014-11-28 | 2016-06-01 | 浙江金徕镀膜有限公司 | 物料检测***及其检测方法 |
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CN113554687B (zh) * | 2021-09-18 | 2021-12-07 | 四川赛狄信息技术股份公司 | 无人机弹载发射偏移校准控制方法、***、终端及介质 |
Family Cites Families (23)
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JP2705778B2 (ja) * | 1989-01-27 | 1998-01-28 | キヤノン株式会社 | 投影露光装置 |
JP3555230B2 (ja) * | 1994-05-18 | 2004-08-18 | 株式会社ニコン | 投影露光装置 |
US20050111089A1 (en) * | 1994-07-15 | 2005-05-26 | Baer Stephen C. | Superresolving microscopy apparatus |
JP3538948B2 (ja) * | 1995-03-13 | 2004-06-14 | ヤマハ株式会社 | 半導体ウェハの露光方法 |
JPH0943862A (ja) * | 1995-07-28 | 1997-02-14 | Canon Inc | 投影露光装置 |
US6621521B1 (en) * | 1996-07-26 | 2003-09-16 | Fuji Photo Film Co., Ltd. | Automatic focusing device for film scanner |
US6091075A (en) * | 1997-06-04 | 2000-07-18 | Hitachi, Ltd. | Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus |
JPH1124902A (ja) | 1997-06-30 | 1999-01-29 | Canon Inc | 状態遷移図合成装置及び状態遷移図合成方法 |
JP4076249B2 (ja) | 1997-09-24 | 2008-04-16 | オリンパス株式会社 | 自動焦点顕微鏡 |
JP4097761B2 (ja) * | 1998-03-02 | 2008-06-11 | オリンパス株式会社 | 自動焦点顕微鏡及び自動合焦検出装置 |
DE19949582B4 (de) * | 1998-10-14 | 2004-02-12 | Pentax Corp. | Autofokuseinrichtung für ein Fernrohr |
US6538721B2 (en) * | 2000-03-24 | 2003-03-25 | Nikon Corporation | Scanning exposure apparatus |
JP3615988B2 (ja) * | 2000-05-23 | 2005-02-02 | 株式会社東京精密 | 走査式顕微鏡の焦点補正方法及び走査式顕微鏡 |
JP2003005021A (ja) * | 2001-06-22 | 2003-01-08 | Nikon Corp | 顕微鏡用焦点合わせ装置およびそれを備えた顕微鏡 |
JP2003030867A (ja) * | 2001-07-13 | 2003-01-31 | Hitachi Ltd | フォーカス制御方法及び装置とそれを用いた原盤露光装置 |
JP2003084189A (ja) * | 2001-09-07 | 2003-03-19 | Canon Inc | オートフォーカス検出方法および投影露光装置 |
US7127098B2 (en) * | 2001-09-13 | 2006-10-24 | Hitachi, Ltd. | Image detection method and its apparatus and defect detection method and its apparatus |
JP2003185913A (ja) * | 2001-12-21 | 2003-07-03 | Nikon Corp | 焦点検出装置、焦点合わせ装置、およびそれを備えた顕微鏡 |
JP3967935B2 (ja) * | 2002-02-25 | 2007-08-29 | 株式会社日立製作所 | 合わせ精度計測装置及びその方法 |
JP2003270524A (ja) * | 2002-03-19 | 2003-09-25 | Nikon Corp | 焦点検出装置およびこれを備えた顕微鏡、および、焦点検出方法 |
JP4121849B2 (ja) * | 2002-12-26 | 2008-07-23 | オリンパス株式会社 | 欠陥検査装置及び欠陥検査方法 |
JP4409183B2 (ja) * | 2003-02-10 | 2010-02-03 | オリンパス株式会社 | 検査装置 |
JP4652667B2 (ja) * | 2003-02-13 | 2011-03-16 | キヤノン株式会社 | 面位置計測方法及び走査型露光装置 |
-
2004
- 2004-12-24 JP JP2004374522A patent/JP2006184303A/ja active Pending
-
2005
- 2005-12-20 US US11/312,963 patent/US7365295B2/en not_active Expired - Fee Related
- 2005-12-20 TW TW094145235A patent/TWI413823B/zh not_active IP Right Cessation
- 2005-12-21 CN CNB2005101350323A patent/CN100570341C/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI499754B (zh) * | 2010-06-17 | 2015-09-11 | Dmg Mori Seiki Co Ltd | 位移偵測裝置 |
CN102478699A (zh) * | 2010-11-23 | 2012-05-30 | 财团法人工业技术研究院 | 自动聚焦装置与其方法 |
CN102478699B (zh) * | 2010-11-23 | 2013-09-25 | 财团法人工业技术研究院 | 自动聚焦装置与其方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2006184303A (ja) | 2006-07-13 |
TWI413823B (zh) | 2013-11-01 |
US7365295B2 (en) | 2008-04-29 |
CN100570341C (zh) | 2009-12-16 |
US20060249651A1 (en) | 2006-11-09 |
CN1800836A (zh) | 2006-07-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |