TW200519018A - Substrate transportation device, substrate transportation method, and substrate transportation apparatus - Google Patents

Substrate transportation device, substrate transportation method, and substrate transportation apparatus

Info

Publication number
TW200519018A
TW200519018A TW093133852A TW93133852A TW200519018A TW 200519018 A TW200519018 A TW 200519018A TW 093133852 A TW093133852 A TW 093133852A TW 93133852 A TW93133852 A TW 93133852A TW 200519018 A TW200519018 A TW 200519018A
Authority
TW
Taiwan
Prior art keywords
substrate
substrate transportation
shelf
cassette
elevating
Prior art date
Application number
TW093133852A
Other languages
Chinese (zh)
Other versions
TWI253433B (en
Inventor
Yasuyoshi Kitazawa
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003376429A external-priority patent/JP4608870B2/en
Priority claimed from JP2003382207A external-priority patent/JP2005150199A/en
Priority claimed from JP2004033041A external-priority patent/JP2005228771A/en
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Publication of TW200519018A publication Critical patent/TW200519018A/en
Application granted granted Critical
Publication of TWI253433B publication Critical patent/TWI253433B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

A substrate is made so that it can be transported into and out of an optional shelf of a substrate cassette. A shelf 1R is formed in a cassette body 1 comprising a substrate cassette 1C by making a plurality of wires 4, installed in a tensioned manner, into a shelfbase. When transporting out a substrate 1G housed in a respective shelf 1R, respective substrate elevating arms 14 which are formed in a pair of elevating units 1U1 are made to advance into the shelf 1R' which is immediately below the shelf 1R in which the substrate 1G is housed. Then, by actuating air cushion units 21 installed in the upper face of each substrate elevating arm 14, pressurized air is expelled causing the substrate 1G to be raised, and the substrate 1G is transported out in this raised condition.
TW093133852A 2003-11-06 2004-11-05 Substrate transportation device, substrate transportation method, and substrate transportation apparatus TWI253433B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003376429A JP4608870B2 (en) 2003-11-06 2003-11-06 Board loading / unloading device
JP2003382207A JP2005150199A (en) 2003-11-12 2003-11-12 Substrate conveyance method and its equipment
JP2004033041A JP2005228771A (en) 2004-02-10 2004-02-10 Substrate transfer method and its apparatus

Publications (2)

Publication Number Publication Date
TW200519018A true TW200519018A (en) 2005-06-16
TWI253433B TWI253433B (en) 2006-04-21

Family

ID=34577450

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093133852A TWI253433B (en) 2003-11-06 2004-11-05 Substrate transportation device, substrate transportation method, and substrate transportation apparatus

Country Status (3)

Country Link
KR (2) KR100847627B1 (en)
TW (1) TWI253433B (en)
WO (1) WO2005045920A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100462292C (en) * 2006-02-06 2009-02-18 友达光电股份有限公司 Conveyer
JP4310712B2 (en) * 2007-01-10 2009-08-12 株式会社ダイフク Plate-shaped article carrier
KR100922593B1 (en) * 2007-12-31 2009-10-21 주식회사 태성기연 Apparatus for diverting direction for glass panel
KR101271657B1 (en) * 2011-08-08 2013-06-10 주식회사 태성기연 Apparatus for transferring of glass panel
KR101271654B1 (en) * 2011-08-08 2013-06-11 주식회사 태성기연 Lift type apparatus for transferring of glass panel
JP6456177B2 (en) * 2015-02-12 2019-01-23 株式会社ディスコ Wafer processing system
CN113895500B (en) * 2021-10-21 2024-06-25 广州润易包装制品有限公司 Adjustable turnover trolley
KR102625239B1 (en) * 2023-07-14 2024-01-17 (주)단디메카 Docking device for loading and unloading of ingots

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5965536U (en) * 1982-10-25 1984-05-01 株式会社日立製作所 Wafer unloading device
JPH1179389A (en) 1997-09-16 1999-03-23 Mitsui Eng & Shipbuild Co Ltd Substrate glass inspection processing system
JPH11214472A (en) * 1998-01-23 1999-08-06 Nec Corp Method of transporting work
JP4274601B2 (en) * 1998-07-08 2009-06-10 昌之 都田 Substrate transfer device and operation method thereof
WO2003024673A1 (en) * 2001-09-12 2003-03-27 Takehide Hayashi Robot hand with positioning function for semiconductor wafer and liquid crystal glass substrate

Also Published As

Publication number Publication date
KR100847627B1 (en) 2008-07-21
WO2005045920A1 (en) 2005-05-19
KR20070104664A (en) 2007-10-26
KR20060102557A (en) 2006-09-27
TWI253433B (en) 2006-04-21
KR100880777B1 (en) 2009-02-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees