JPS5965536U - Wafer unloading device - Google Patents

Wafer unloading device

Info

Publication number
JPS5965536U
JPS5965536U JP16036082U JP16036082U JPS5965536U JP S5965536 U JPS5965536 U JP S5965536U JP 16036082 U JP16036082 U JP 16036082U JP 16036082 U JP16036082 U JP 16036082U JP S5965536 U JPS5965536 U JP S5965536U
Authority
JP
Japan
Prior art keywords
unloading device
wafer
wafer unloading
cassette
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16036082U
Other languages
Japanese (ja)
Inventor
勝義 工藤
金井　謙雄
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP16036082U priority Critical patent/JPS5965536U/en
Publication of JPS5965536U publication Critical patent/JPS5965536U/en
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、従来のウェハ搬出装置の正面構成図、第２図
は、第１図のＡ−Ａ規制面図、茅３図は、第１図のＢ−
Ｂ規制面図、第４図は、本考案によるウェハ搬出装置の
一実施例を示す正面構成図、第５図は、第４図のＣ−Ｃ
規制面図、第６図は、第４図のＤ−Ｄ規制面図である。 １０・・・・・・カセット台、１２・・・・・・ベルト
、１３・・・・・・ベルトコンベア、１４・・・・・・
ガイドローラ、２０・・・・・・カセツト、２１・・・
・・・カセット溝、３０・・・・・・ウエノ１゜FIG. 1 is a front configuration diagram of a conventional wafer unloading device, FIG. 2 is a regulatory plane view taken along A-A in FIG. 1, and figure 3 is a B--
B restriction plane view, FIG. 4 is a front configuration diagram showing an embodiment of the wafer unloading device according to the present invention, and FIG. 5 is a C-C diagram in FIG.
The restriction surface view, FIG. 6, is the DD restriction surface view of FIG. 4. 10...Cassette stand, 12...Belt, 13...Belt conveyor, 14...
Guide roller, 20...cassette, 21...
...Cassette groove, 30...Ueno 1°

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] カセットに装填されたウェハをベルトコンベアで前記カ
セットから搬出する装置において前記カセットからの搬
出時に前記ベルトコンベアのベルトと同一レベルに前記
ウェハを支持可能なガイドローラを設けたことを特徴と
するウェハ搬出装置。A wafer unloading device for unloading a wafer loaded in a cassette from the cassette using a belt conveyor, further comprising a guide roller capable of supporting the wafer at the same level as the belt of the belt conveyor when unloading from the cassette. Device.
JP16036082U 1982-10-25 1982-10-25 Wafer unloading device Pending JPS5965536U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16036082U JPS5965536U (en) 1982-10-25 1982-10-25 Wafer unloading device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16036082U JPS5965536U (en) 1982-10-25 1982-10-25 Wafer unloading device

Publications (1)

Publication Number Publication Date
JPS5965536U true JPS5965536U (en) 1984-05-01

Family

ID=30352730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16036082U Pending JPS5965536U (en) 1982-10-25 1982-10-25 Wafer unloading device

Country Status (1)

Country Link
JP (1) JPS5965536U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045920A1 (en) * 2003-11-06 2005-05-19 Shinko Electric Co., Ltd. Device for carrying in and out boards, board carrying method and device therefor
CN100426484C (en) * 2003-11-06 2008-10-15 神钢电机株式会社 Device for carrying in and out boards, board carrying method and device therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114176A (en) * 1978-02-27 1979-09-06 Kokusai Electric Co Ltd Semiconductor wafer storage buffer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114176A (en) * 1978-02-27 1979-09-06 Kokusai Electric Co Ltd Semiconductor wafer storage buffer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045920A1 (en) * 2003-11-06 2005-05-19 Shinko Electric Co., Ltd. Device for carrying in and out boards, board carrying method and device therefor
CN100426484C (en) * 2003-11-06 2008-10-15 神钢电机株式会社 Device for carrying in and out boards, board carrying method and device therefor

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