TW200513812A - Attenuating phase shift mask blank and photomask - Google Patents
Attenuating phase shift mask blank and photomaskInfo
- Publication number
- TW200513812A TW200513812A TW093126853A TW93126853A TW200513812A TW 200513812 A TW200513812 A TW 200513812A TW 093126853 A TW093126853 A TW 093126853A TW 93126853 A TW93126853 A TW 93126853A TW 200513812 A TW200513812 A TW 200513812A
- Authority
- TW
- Taiwan
- Prior art keywords
- phase shift
- photomask
- shift mask
- mask blank
- mask blanks
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
- G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/655,593 US7029803B2 (en) | 2003-09-05 | 2003-09-05 | Attenuating phase shift mask blank and photomask |
EP04001359 | 2004-01-22 | ||
EP04008566 | 2004-04-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200513812A true TW200513812A (en) | 2005-04-16 |
Family
ID=34279336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093126853A TW200513812A (en) | 2003-09-05 | 2004-09-06 | Attenuating phase shift mask blank and photomask |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070076833A1 (zh) |
EP (1) | EP1668413A2 (zh) |
JP (1) | JP2007504497A (zh) |
KR (1) | KR20060120613A (zh) |
TW (1) | TW200513812A (zh) |
WO (1) | WO2005024518A2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602013B (zh) * | 2012-03-08 | 2017-10-11 | 克萊譚克公司 | 用於檢測遮罩以識別微影顯著缺陷之方法及檢測系統 |
CN110824599A (zh) * | 2018-08-14 | 2020-02-21 | 白金科技股份有限公司 | 一种红外带通滤波器 |
TWI741687B (zh) * | 2016-03-29 | 2021-10-01 | 日商Hoya股份有限公司 | 光罩基底、光罩基底之製造方法、轉印用光罩之製造方法及半導體裝置之製造方法 |
Families Citing this family (37)
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TWI287816B (en) * | 2004-07-22 | 2007-10-01 | Asia Optical Co Inc | Improved ion source with particular grid assembly |
JP4570632B2 (ja) * | 2006-02-20 | 2010-10-27 | Hoya株式会社 | 4階調フォトマスクの製造方法、及びフォトマスクブランク加工品 |
TWI432885B (zh) * | 2006-02-20 | 2014-04-01 | Hoya Corp | 四階光罩製造方法及使用此種方法中之光罩坯料板 |
KR100844981B1 (ko) * | 2006-12-14 | 2008-07-09 | 삼성전자주식회사 | 위상반전 마스크 및 이의 형성방법 |
US8216745B2 (en) * | 2007-11-01 | 2012-07-10 | Ulvac Coating Corporation | Half-tone mask, half-tone mask blank and method for manufacturing half-tone mask |
US20100119958A1 (en) * | 2008-11-11 | 2010-05-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Mask blank, mask formed from the blank, and method of forming a mask |
EP2251452B1 (en) | 2009-05-13 | 2018-07-18 | SiO2 Medical Products, Inc. | Pecvd apparatus for vessel coating |
US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
JP2010276724A (ja) * | 2009-05-26 | 2010-12-09 | Hoya Corp | 多階調フォトマスク、多階調フォトマスクの製造方法、及びパターン転写方法 |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
KR20110029701A (ko) * | 2009-09-16 | 2011-03-23 | 삼성전자주식회사 | 차단막을 갖는 극자외선 리소그라피 마스크 및 제조방법 |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
CN102169285B (zh) * | 2011-04-21 | 2013-01-09 | 深圳市科利德光电材料股份有限公司 | 铬版多余铬点的修补方法 |
JP5950430B2 (ja) * | 2011-09-15 | 2016-07-13 | Hoya株式会社 | マスクブランク、多階調マスクおよびそれらの製造方法 |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
EP2776603B1 (en) | 2011-11-11 | 2019-03-06 | SiO2 Medical Products, Inc. | PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
JP5739375B2 (ja) * | 2012-05-16 | 2015-06-24 | 信越化学工業株式会社 | ハーフトーン位相シフトマスクブランク及びハーフトーン位相シフトマスクの製造方法 |
JP5739376B2 (ja) * | 2012-05-16 | 2015-06-24 | 信越化学工業株式会社 | モールド作製用ブランクおよびモールドの製造方法 |
US9347127B2 (en) * | 2012-07-16 | 2016-05-24 | Veeco Instruments, Inc. | Film deposition assisted by angular selective etch on a surface |
US9664626B2 (en) | 2012-11-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Coating inspection method |
KR101415653B1 (ko) | 2012-11-12 | 2014-07-04 | 주식회사 에스앤에스텍 | 마스크 블랭크 및 그의 제조 방법과 포토마스크 |
WO2014078666A1 (en) | 2012-11-16 | 2014-05-22 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
KR102211950B1 (ko) | 2012-11-30 | 2021-02-04 | 에스아이오2 메디컬 프로덕츠, 인크. | 의료용 주사기 카트리지 등의 pecvd 증착 균일성 제어 |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
EP2961858B1 (en) | 2013-03-01 | 2022-09-07 | Si02 Medical Products, Inc. | Coated syringe. |
CN105392916B (zh) | 2013-03-11 | 2019-03-08 | Sio2医药产品公司 | 涂布包装材料 |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
EP2971227B1 (en) | 2013-03-15 | 2017-11-15 | Si02 Medical Products, Inc. | Coating method. |
US9341941B2 (en) | 2013-08-01 | 2016-05-17 | Samsung Electronics Co., Ltd. | Reflective photomask blank, reflective photomask, and integrated circuit device manufactured by using reflective photomask |
WO2015148471A1 (en) | 2014-03-28 | 2015-10-01 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
JP6545795B2 (ja) | 2015-05-15 | 2019-07-17 | Hoya株式会社 | マスクブランク、転写用マスク、マスクブランクの製造方法、転写用マスクの製造方法および半導体デバイスの製造方法 |
CA3204930A1 (en) | 2015-08-18 | 2017-02-23 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
JP6659855B2 (ja) * | 2017-06-28 | 2020-03-04 | アルバック成膜株式会社 | マスクブランクス、位相シフトマスク、ハーフトーンマスク、マスクブランクスの製造方法、及び位相シフトマスクの製造方法 |
KR20210121067A (ko) * | 2019-02-13 | 2021-10-07 | 호야 가부시키가이샤 | 마스크 블랭크, 위상 시프트 마스크, 위상 시프트 마스크의 제조 방법 및 반도체 디바이스의 제조 방법 |
WO2022164760A1 (en) * | 2021-01-29 | 2022-08-04 | The Regents Of The University Of California | Mask absorber layers for extreme ultraviolet lithography |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100295385B1 (ko) * | 1993-04-09 | 2001-09-17 | 기타지마 요시토시 | 하프톤위상쉬프트포토마스크,하프톤위상쉬프트포토마스크용블랭크스및이들의제조방법 |
JP3453435B2 (ja) * | 1993-10-08 | 2003-10-06 | 大日本印刷株式会社 | 位相シフトマスクおよびその製造方法 |
US5897977A (en) * | 1996-05-20 | 1999-04-27 | E. I. Du Pont De Nemours And Company | Attenuating embedded phase shift photomask blanks |
US5935735A (en) * | 1996-10-24 | 1999-08-10 | Toppan Printing Co., Ltd. | Halftone phase shift mask, blank for the same, and methods of manufacturing these |
US6274280B1 (en) * | 1999-01-14 | 2001-08-14 | E.I. Du Pont De Nemours And Company | Multilayer attenuating phase-shift masks |
KR20010028191A (ko) * | 1999-09-18 | 2001-04-06 | 윤종용 | CrAION을 위상 쉬프터 물질로서 사용한 위상 쉬프트 마스크 및 그 제조방법 |
JP2001201842A (ja) * | 1999-11-09 | 2001-07-27 | Ulvac Seimaku Kk | 位相シフトフォトマスクブランクス及び位相シフトフォトマスク並びに半導体装置の製造方法 |
DE10214092B4 (de) * | 2001-03-30 | 2012-03-15 | Hoya Corp. | Halbton-Phasenverschiebungsmasken-Rohling und Halbton-Phasenverschiebungsmaske |
US6756160B2 (en) * | 2001-04-19 | 2004-06-29 | E.I. Du Pont De Nemours. And Company | Ion-beam deposition process for manufacturing attenuated phase shift photomask blanks |
US20020197509A1 (en) * | 2001-04-19 | 2002-12-26 | Carcia Peter Francis | Ion-beam deposition process for manufacturing multi-layered attenuated phase shift photomask blanks |
US6756161B2 (en) * | 2002-04-16 | 2004-06-29 | E. I. Du Pont De Nemours And Company | Ion-beam deposition process for manufacture of binary photomask blanks |
-
2004
- 2004-09-06 WO PCT/EP2004/009919 patent/WO2005024518A2/en not_active Application Discontinuation
- 2004-09-06 EP EP04764867A patent/EP1668413A2/en not_active Withdrawn
- 2004-09-06 KR KR1020067003728A patent/KR20060120613A/ko not_active Application Discontinuation
- 2004-09-06 JP JP2006525130A patent/JP2007504497A/ja active Pending
- 2004-09-06 TW TW093126853A patent/TW200513812A/zh unknown
- 2004-09-06 US US10/570,612 patent/US20070076833A1/en not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI602013B (zh) * | 2012-03-08 | 2017-10-11 | 克萊譚克公司 | 用於檢測遮罩以識別微影顯著缺陷之方法及檢測系統 |
TWI741687B (zh) * | 2016-03-29 | 2021-10-01 | 日商Hoya股份有限公司 | 光罩基底、光罩基底之製造方法、轉印用光罩之製造方法及半導體裝置之製造方法 |
CN110824599A (zh) * | 2018-08-14 | 2020-02-21 | 白金科技股份有限公司 | 一种红外带通滤波器 |
US11714219B2 (en) | 2018-08-14 | 2023-08-01 | Platinum Optics Technology Inc. | Infrared band pass filter having layers with refraction index greater than 3.5 |
Also Published As
Publication number | Publication date |
---|---|
EP1668413A2 (en) | 2006-06-14 |
WO2005024518A3 (en) | 2005-11-17 |
JP2007504497A (ja) | 2007-03-01 |
WO2005024518A2 (en) | 2005-03-17 |
KR20060120613A (ko) | 2006-11-27 |
US20070076833A1 (en) | 2007-04-05 |
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