200419133 (發明說明應敘畦：發明所屬之技術領域、先前技術、内容、實施方式及圖式簡單說明） 【發明所屬之技術領域】 本發明係關於一種五自由度環型光柵式旋轉軸量測系 統，特別是指一種將量測光學原件微組化，俾能同時測量到 工具機主軸之偏擺量、位移量及主軸轉速等五個自由度之訊 號，提高精密加工與量測技術的量測系統。 【先前技術】 隨著現今高科技產業技術的發達，目前高科技產品也都 不斷的趨向於短、小、精、薄，尺寸的精度也從微米級推向 奈米級。由於加工中的品質與精度乃是產品中最主要的基本 要求，而精密的量測技術有助於我們對於整個產品品質及良 率的提升，故在加工時機械加工系統時的精度就顯的格外= θ釔於此，精雄、加工技術及精密量測技術必須不斷的去 歼與增長。而在傳統的主軸加工 ^ 素、材料因素、抻制田本s „ u τ彺彺因為機械g 、&制因素及裱境因素，造成其精度並不太高 且也時常忽略了主軸偏擺及微小位 影響。但在微精密加工時，只要加工主二二產4 微許的位移變化或偏㈣/加主軸對於加工工件有些 度的大量誤差，2都可能造成加工產品的尺寸與精 在傳統的主軸==不夠或良率不佳的情況。 式探頭、二角雷& ' ，又使用的有非接觸式的電容 — 射或是接觸式的LVDT等，它, 1主軸轉速或是主軸定相，… *匕們雖然可用於測 就是無法同時測量得二匕們都有—個共同的缺點， 軸的夕個自由度訊號，也因此無法 71 P時準確地掌握到主軸的作動情況與精度。 圖一揭示一種使用非接觸式的雷 做為量測的架構，其包括有_ ，=電容式探頭來 幻、^]2、2，其主要藉由多個感=^^^^^^ z接收旋轉主軸8位移的變化量，以達到' 旦η、Y2、 但是其架構較為雜亂且不容易安裝。4 '則里的功能， 鐘於此’發明人為了克服在主軸加工時，位移傲化旦 '一=度與品f的影響’即自行研發並成功推出 適時同步得到五個自由度的訊號， =以 轉軸的變化情形，以及主軸 ，握凝到旋 上補償，使加工精度達到所須的要求。 進仃線 【發明目的】 轉軸ί:;::目的即在於提供一種五自由度環型光柵式旋 ;?，到旋轉轴的變化情形，以及主轴位移變化量與： U，並進行線上補償，使加卫精度達到所須的要求。 【内容】 、一般的多軸加卫機旋轉主軸位移及偏擺訊號的量測方 乃大夕利用光源打在其旋轉主轴上並進而利用四象儀 (PSD)接收其反射訊號並加以處理、轉換、放大訊號而輸 2......專專方法，或疋利用電容式探頭感應其電壓差來進行 里測仁疋本發明則一反常態，因為本發明乃是利用光槓桿 原理與光干涉原理並藉由光柵繞射之特十生來進行線上量 測，由於雷射光打纟光拇上時會產生極性繞身士，故我們可藉 200419133 此得到繞射光的訊號並加以處理 # · m + u + π π i 里而传到四個自由度的測量 值，同時也有可藉由干涉鏡處理兩條 ^ ^ W條繞射光，產生干涉條紋 並藉由光檢測器（Photodiodes)處理f 4 & 里其矾旒，進而得到旋轉軸 轉數的量測值。故當光栅與雷射同時 N吟進仃1測時，我們即可 同時測量出主軸偏擺量及微小位銘旦$ ^ & a j位移里和旋轉數值等五個自 由度之訊號。 【實施方式】200419133 (Explanation of the invention should be described: the technical field, prior art, content, embodiments, and drawings of the invention are briefly explained.) [Technical field to which the invention belongs] The present invention relates to a five-degree-of-freedom ring-type grating-type rotation axis measurement The system, in particular, refers to a micro-organization of measuring optical elements, which can simultaneously measure five degrees of freedom signals such as the deflection amount, displacement amount, and spindle speed of the machine tool spindle, which can improve the precision processing and measurement technology.测 ***。 Test system. [Previous technology] With the development of today's high-tech industry technology, high-tech products are constantly trending to be short, small, fine and thin, and the accuracy of dimensions has also been pushed from the micron level to the nanometer level. Because the quality and accuracy in processing are the most important basic requirements in the product, and the precise measurement technology helps us to improve the quality and yield of the entire product, the accuracy of the machining system during processing is obvious. Extraordinary = θYttrium here, the elite, processing technology and precision measurement technology must continue to wipe out and grow. However, in the traditional spindle machining, the factors, material factors, and the production of Tamoto s „u τ 彺 彺 because of mechanical g, & manufacturing factors and mounting environment factors, the accuracy is not very high and the spindle deflection is often ignored. And micro-position effects. However, in micro-precision machining, as long as the machining of primary and secondary production 4 slight displacement changes or bias / addition of the spindle to the workpiece to some degree of large errors, 2 may cause the size and precision of the processed product Conventional spindle == Insufficient or poor yield. Type probes, two-angle mines & ', and also use non-contact capacitors-radio or contact LVDT, etc., it, 1 spindle speed or The phasing of the main shaft, ... Although the daggers can be used for measurement, they cannot be measured at the same time. Both daggers have a common disadvantage. The degree of freedom signal of the shaft can not accurately grasp the operation of the main shaft at 71 P. And accuracy. Figure 1 reveals a framework using non-contact lightning as a measurement, which includes _, = capacitive probes, ^] 2, 2, which mainly uses multiple senses = ^^^^ ^^ zReceives the amount of change in the displacement of the rotating spindle 8 to achieve 'Dan η, Y2, but its structure is more cluttered and not easy to install. 4 'The function in the rule, Zhong Yu here' In order to overcome the displacement of the spindle during spindle machining, the 'one = degree and product f' effect is self Developed and successfully launched a timely synchronization to obtain five degrees of freedom signals, = according to the change of the rotation axis, and the compensation of the main shaft, grip and rotation to make the processing accuracy reach the required requirements. Into the line [Objective of the invention] Rotation axis ί: ; :: The purpose is to provide a five-degree-of-freedom ring grating spinner;?, The change to the rotation axis, and the change in the displacement of the main shaft and: U, and perform online compensation, so that the precision of the guard can reach the required requirements. [Content], General multi-axis guard aircraft rotating spindle displacement and yaw signals are measured by Da Xi, using a light source to hit its rotating spindle, and then use a four-image device (PSD) to receive its reflected signal and process it. Convert and amplify the signal and input 2 ... special method, or use a capacitive probe to sense the voltage difference to perform the measurement. The present invention is anomalous because the present invention uses the principle of optical leverage and optical interference. The principle and the use of grating diffraction to carry out on-line measurement, because the laser light hits the thumb will produce polar devil, so we can use 200419133 to get the signal of the diffracted light and process it # · m + u + π π i and four degrees of freedom measurements are passed. At the same time, two ^ ^ W diffracted lights can be processed by the interferometer to generate interference fringes and f 4 is processed by photodiodes. & In order to obtain the measured value of the number of rotations of the rotating shaft, when the grating and laser are measured at the same time, we can simultaneously measure the amount of spindle deflection and the small position. ^ & aj Signals of five degrees of freedom including displacement and rotation values. [Embodiment]
「睛參閱圖-一」本發明所招· >fi£ -V 」银AM杈供之一種五自由度環型光栅 式旋轉軸量測系、統，其主要係由—個自行研發之光學讀寫頭 與-環型光柵i所構成之量測系統。在讀寫頭方面包括一個 雷射光源（Laser diode) 2，兩個半反射鏡（_ Mirr〇r) 3卜 32,兩個二維四象儀（2D PSD)41、42，兩個干涉鏡（interfei_〇meter) 5卜52，一個凸透鏡（Lens) 6及兩個光檢測器（ph〇t〇di〇des) 71、72。其基本作動原理乃是利用一個雷射光源2發出一束 雷射光束⑴打在-干涉鏡51上，藉由相位相干涉原理產 生干涉條紋，並經由一光檢測器71可量測到z軸方向的變 化；而另一道光線由干涉鏡51直接打在其旋轉主軸上之環型 光柵1，因雷射光打在其環型光柵丨上會產生極性繞射光， 且因其正一階光（L+1)、負一階光（l-1 )具有較強之強度， 所以我們主要是接收其正一階光（U1)、負一階光（L—丨）做 為量測依據，並藉由半反射鏡31、32將繞涉後的正一階光 (L+1)、負一階光（l-j)又各自分成L+2、[一2兩道光線；其 中分別穿過半反射鏡31、32的U2和L-2的其中兩道雷射光訊 唬’分別各自由兩個二維四象儀41、42讀取其分光後的光之 訊號’並且藉由其電壓差轉換成位置變化訊號輸出，進而達 到量測X-axis的二維偏移量和z-axis的一維偏移量。 200419133 經由上述的量測法，我們可得Μ χ—axis和z_axis的位置 訊號與偏擺訊號共四個自由的訊號；而另外一方面，另外兩 束雷射光束L+2和L-2分別經由半反射鏡31、32折射入同一個 干涉鏡52中，藉由此干射鏡52此兩道雷射光⑽和卜以皮此 產生-相位相互干涉效應，並產生明暗之干涉條紋，同時我 們讓干射光通過-凸透鏡6打到一個光檢測器72上，用以接 收並判斷其明暗干涉條紋之訊號，制此設計可判斷出干涉 條紋明亮之變化量，進而得到旋轉主軸之轉速。因此，藉由 本發明的量測系統，我們可輕易的量測出旋轉轴系統的位鲁 移、偏擺、轉數等五個自由度之訊號。 【特點及功效】 本發明所提供之-種五自由度環型光柵式㈣軸量㈣ ，：可以同步得到五個自由度的訊號’並即時準旋 到旋轉軸的變化情形，以及主軸位移變化量與偏擺量，並： 订線上補償，使加工精度達到所須的要求。 上列詳細說明係針對本發明之一可行實施例之星 明’惟該實施例並非用以限制本發明之專利範 ° 本發明技藝精神所為之等效實施$料 凡未脫離 專利範圍中。 實崎更’均應包含於本案之 【圖式簡單說明】 圖：ζ:以：有•關本發明一較佳實施例之詳細說明及1附 圖，將可進—步瞭解本發明之技術内容及 I、附 該實施例之附圖為： “ ’功效，有關 圖-為習知使用非接觸式的雷射或 量測的架構例圖；以及 谷式楝碩來做為 200419133 圖二為本發明五自由度環型光柵式旋轉軸量測系統之架 構例圖。 【主要部分代表符號】 1環型光柵 2雷射光源 31、32半反射鏡 41、42二維四象儀 51、52干涉鏡 6凸透鏡 71、72光檢測器 8旋轉主軸 XI、X2位移感應器 Y卜Y2位移感應器 Z位移感應器"Eye see figure-one" The present invention > fi £ -V "Silver AM fork is a five-degree-of-freedom ring-shaped grating-type rotary axis measurement system, which is mainly developed by a self-developed optical A measuring system consisting of a read / write head and a ring-shaped grating i. In terms of the read / write head, it includes a laser diode (2), two half mirrors (_ Mirr〇r) 3, 32, two two-dimensional four-imager (2D PSD) 41, 42, two interferometers (Interfei_meter) 5b 52, one convex lens (Lens) 6 and two photodetectors (ph0to diodes) 71, 72. The basic operating principle is to use a laser light source 2 to emit a laser beam hitting the interferometer 51, and generate interference fringes by the phase-phase interference principle, and the z-axis can be measured by a light detector 71 The direction of the light is changed; and the other light is directly hit by the interferometer 51 on the ring grating 1 of the main axis of rotation. The laser light on the ring grating 1 will generate polar diffracted light, and because of its positive first-order light ( L + 1), negative first-order light (l-1) has strong intensity, so we mainly receive its positive first-order light (U1), negative first-order light (L- 丨) as the measurement basis, and The positive first-order light (L + 1) and the negative first-order light (lj) after the revolving are respectively divided into L + 2, [one, two, and two rays by half mirrors 31 and 32; each of which passes through the half mirrors. The two laser light signals of U2 and L-2 at 31 and 32 were 'respectively read by the two two-dimensional four-imager 41 and 42 for their separated light signals' and converted into positions by their voltage differences. Change the signal output, and then measure the two-dimensional offset of the X-axis and the one-dimensional offset of the z-axis. 200419133 Through the above measurement method, we can obtain four free signals of the position signals and yaw signals of M χ-axis and z_axis; on the other hand, the other two laser beams L + 2 and L-2 are respectively Refracted into the same interference mirror 52 through the half mirrors 31 and 32, and thus the two laser beams ⑽ and 以 以 of the dry mirror 52 produce phase-phase interference effects, and produce light and dark interference fringes. At the same time, we Let the dry light pass through the -convex lens 6 to hit a light detector 72 to receive and judge the signal of its light and dark interference fringes. This design can determine the amount of change in the brightness of the interference fringes, and then obtain the rotation speed of the rotating spindle. Therefore, with the measuring system of the present invention, we can easily measure the signals of five degrees of freedom such as the position shift, yaw, and rotation number of the rotation axis system. [Features and effects] The present invention provides a five-degree-of-freedom ring grating-type ㈣-axis quantity ，: it can synchronize the five-degree-of-freedom signals' and instantly quasi-rotate to the change of the rotation axis, as well as the spindle displacement And yaw amount, and: Order online compensation, so that the processing accuracy reaches the required requirements. The above detailed description is directed to the star of one of the feasible embodiments of the present invention, but this embodiment is not intended to limit the patent scope of the present invention. The equivalent implementation of the technical spirit of the present invention is not out of the scope of the patent. "Shizaki more" should be included in the case [Simplified description of the drawings] Figure: ζ: To: Yes • Detailed description of a preferred embodiment of the present invention and a drawing, will further understand the technology of the present invention The contents and I. The drawings attached to this embodiment are: "'Efficacy, Relevant Figures-An example of a conventional structure using a non-contact laser or measurement; and Gu Shishuo as 200419133 Figure 2 is An example of the architecture of the five-degree-of-freedom ring-shaped grating-type rotating shaft measurement system of the present invention. [Representative symbols of main parts] 1 ring-shaped grating 2 laser light sources 31, 32 half-mirrors 41, 42 two-dimensional four-imager 51, 52 Interferometer 6 convex lens 71, 72 light detector 8 rotating spindle XI, X2 displacement sensor Y Bu Y2 displacement sensor Z displacement sensor