SG171589A1 - Release film for semiconductor resin molds - Google Patents

Release film for semiconductor resin molds

Info

Publication number
SG171589A1
SG171589A1 SG201102825-5A SG2011028255A SG171589A1 SG 171589 A1 SG171589 A1 SG 171589A1 SG 2011028255 A SG2011028255 A SG 2011028255A SG 171589 A1 SG171589 A1 SG 171589A1
Authority
SG
Singapore
Prior art keywords
layer
oxide
release film
release
resin molds
Prior art date
Application number
SG201102825-5A
Other languages
English (en)
Inventor
Tamao Okuya
Hiroshi Aruga
Yoshiaki Higuchi
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of SG171589A1 publication Critical patent/SG171589A1/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/56Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
    • B29C33/68Release sheets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • H01L21/566Release layers for moulds, e.g. release layers, layers against residue during moulding
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/3154Of fluorinated addition polymer from unsaturated monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal
    • Y10T428/31692Next to addition polymer from unsaturated monomers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Laminated Bodies (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
SG201102825-5A 2006-04-25 2007-04-20 Release film for semiconductor resin molds SG171589A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006120573 2006-04-25
JP2006191872 2006-07-12

Publications (1)

Publication Number Publication Date
SG171589A1 true SG171589A1 (en) 2011-06-29

Family

ID=38655360

Family Applications (1)

Application Number Title Priority Date Filing Date
SG201102825-5A SG171589A1 (en) 2006-04-25 2007-04-20 Release film for semiconductor resin molds

Country Status (8)

Country Link
US (2) US20090053528A1 (ja)
EP (1) EP2012351A4 (ja)
JP (1) JP5234419B2 (ja)
KR (1) KR20090018032A (ja)
CN (1) CN101427358B (ja)
SG (1) SG171589A1 (ja)
TW (1) TW200804052A (ja)
WO (1) WO2007125834A1 (ja)

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WO2010041542A1 (ja) 2008-10-09 2010-04-15 旭硝子株式会社 暗色系フッ素樹脂フィルムおよび太陽電池モジュール用バックシート
CN102246317B (zh) 2008-12-08 2016-03-16 旭硝子株式会社 氟树脂薄膜及其使用
JP5060517B2 (ja) * 2009-06-24 2012-10-31 東京エレクトロン株式会社 インプリントシステム
US9064693B2 (en) * 2010-03-01 2015-06-23 Kirsteen Mgmt. Group Llc Deposition of thin film dielectrics and light emitting nano-layer structures
JP5636725B2 (ja) * 2010-04-26 2014-12-10 大日本印刷株式会社 モールディング成形用離型フィルム及びその製造方法
US9351348B2 (en) * 2010-10-27 2016-05-24 Koninklijke Philips N.V. Laminate support film for fabrication of light emitting devices and method of fabrication
DE102011089566A1 (de) * 2011-12-22 2013-06-27 Tesa Se Liner zum Schutz von Klebemassen
TWI615271B (zh) * 2012-09-20 2018-02-21 Jx日鑛日石金屬股份有限公司 附載體金屬箔
KR101486052B1 (ko) * 2013-07-03 2015-01-23 고병수 반도체 패키지 제조용 몰드 이형시트 및 제조방법
DE102013221847A1 (de) * 2013-08-01 2015-02-05 Tesa Se Verfahren zum Formen eines Körpers in einer Form
MY173073A (en) 2013-11-07 2019-12-24 Agc Inc Mold release film and process for producing semiconductor package
MY176541A (en) * 2013-11-07 2020-08-14 Agc Inc Mold release film and process for producing semiconductor package
JPWO2015133630A1 (ja) * 2014-03-07 2017-04-06 旭硝子株式会社 離型フィルム、その製造方法、および半導体パッケージの製造方法
MY182272A (en) * 2014-03-07 2021-01-18 Agc Inc Mold release film and process for producing sealed body
CN106062947B (zh) * 2014-03-07 2019-03-05 Agc株式会社 半导体元件安装用封装体的制造方法以及脱模膜
DE112015005259T5 (de) 2014-11-20 2017-08-17 Asahi Glass Company, Limited Formwerkzeugtrennfilm, Verfahren zu dessen Herstellung und Verfahren zur Herstellung eines Halbleitergehäuses
JP2019504783A (ja) * 2016-02-01 2019-02-21 スリーエム イノベイティブ プロパティズ カンパニー バリア複合体
KR101682934B1 (ko) 2016-03-17 2016-12-06 김광원 메모리 반도체 패키지 몰드용 이형필름
JP6928924B2 (ja) * 2017-04-21 2021-09-01 三井化学東セロ株式会社 プロセス用離型フィルム、その用途、及びそれを用いた樹脂封止半導体の製造方法
JP2019149414A (ja) * 2018-02-26 2019-09-05 Tdk株式会社 積層型電子部品の製造方法
JP7088133B2 (ja) * 2019-07-12 2022-06-21 味の素株式会社 プリント配線板の製造方法、及び無機層付き樹脂シート
CN110718474B (zh) * 2019-09-03 2022-08-16 富联裕展科技(深圳)有限公司 封装方法、离型件及其制作方法
KR102207322B1 (ko) * 2020-06-29 2021-01-25 양문일 인쇄회로기판의 열프레스공정용 성형이형필름
KR102496596B1 (ko) * 2020-11-25 2023-02-06 엘지디스플레이 주식회사 배리어성이 우수한 알루미늄을 이용한 봉지 접착 필름 및 이를 포함하는 유기발광다이오드

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US3081208A (en) * 1960-02-17 1963-03-12 Du Pont Hazy polyvinyl fluoride film and process
KR940018419A (ko) * 1993-01-18 1994-08-18 이마무라 가즈수케 발수성을 향상시킨 불소 함유 고분자 성형체 및 이로 부터 제조된 세정용 지그
US5846477A (en) * 1994-12-08 1998-12-08 Nitto Denko Corporation Production method for encapsulating a semiconductor device
WO2000018555A1 (en) * 1998-10-01 2000-04-06 Airtech International, Inc. Method of molding or curing a resin material at high temperatures using a multilayer release film
JP3970464B2 (ja) * 1999-02-26 2007-09-05 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
JP2001168117A (ja) * 1999-12-06 2001-06-22 Idemitsu Petrochem Co Ltd 半導体素子の封止用離型フィルム及びそれを用いる半導体素子の封止方法
JP3658258B2 (ja) * 1999-12-17 2005-06-08 株式会社ルネサステクノロジ 半導体装置の製造方法
JP4443715B2 (ja) 1999-12-27 2010-03-31 日東電工株式会社 半導体の樹脂封止方法及び半導体樹脂封止用離型フィルム
JP2001310336A (ja) * 2000-04-28 2001-11-06 Asahi Glass Co Ltd 樹脂モールド成形用離型フィルム
JP2002110722A (ja) * 2000-10-03 2002-04-12 Nitto Denko Corp 半導体チップの樹脂封止方法及び半導体チップ樹脂封止用離型フィルム
JP2002361643A (ja) 2001-06-01 2002-12-18 Hitachi Chem Co Ltd 半導体モールド用離型シート
JP3678361B2 (ja) * 2001-06-08 2005-08-03 大日本印刷株式会社 ガスバリアフィルム
JP3791458B2 (ja) * 2002-05-23 2006-06-28 旭硝子株式会社 離型フィルム
JP2004079566A (ja) 2002-08-09 2004-03-11 Hitachi Chem Co Ltd 半導体モールド用離型シート
DE602005016337D1 (de) * 2004-06-29 2009-10-15 Asahi Glass Co Ltd Trennfolie für die Einkapselung von Halbleiterchips
JP2006049850A (ja) * 2004-06-29 2006-02-16 Asahi Glass Co Ltd 半導体チップ封止用離型フィルム
JP2006120573A (ja) 2004-10-25 2006-05-11 Furukawa Battery Co Ltd:The 制御弁式鉛蓄電池用負極板および前記負極板を用いた制御弁式鉛蓄電池
JP2006191872A (ja) 2005-01-14 2006-07-27 Hirose:Kk ホタルの幼虫育成容器

Also Published As

Publication number Publication date
CN101427358B (zh) 2012-07-18
CN101427358A (zh) 2009-05-06
WO2007125834A1 (ja) 2007-11-08
US8268218B2 (en) 2012-09-18
JPWO2007125834A1 (ja) 2009-09-10
TW200804052A (en) 2008-01-16
EP2012351A1 (en) 2009-01-07
JP5234419B2 (ja) 2013-07-10
KR20090018032A (ko) 2009-02-19
US20090053528A1 (en) 2009-02-26
EP2012351A4 (en) 2010-12-01
US20100096772A1 (en) 2010-04-22

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