SG11202012792SA - Front-side imager and process for manufacturing such an imager - Google Patents
Front-side imager and process for manufacturing such an imagerInfo
- Publication number
- SG11202012792SA SG11202012792SA SG11202012792SA SG11202012792SA SG11202012792SA SG 11202012792S A SG11202012792S A SG 11202012792SA SG 11202012792S A SG11202012792S A SG 11202012792SA SG 11202012792S A SG11202012792S A SG 11202012792SA SG 11202012792S A SG11202012792S A SG 11202012792SA
- Authority
- SG
- Singapore
- Prior art keywords
- imager
- manufacturing
- side imager
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/1461—Pixel-elements with integrated switching, control, storage or amplification elements characterised by the photosensitive area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14692—Thin film technologies, e.g. amorphous, poly, micro- or nanocrystalline silicon
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1855540A FR3083000A1 (fr) | 2018-06-21 | 2018-06-21 | Substrat pour capteur d'image de type face avant et procede de fabrication d'un tel substrat |
PCT/FR2019/051515 WO2019243751A1 (fr) | 2018-06-21 | 2019-06-21 | Capteur d'image de type face avant et procede de fabrication d'un tel capteur |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202012792SA true SG11202012792SA (en) | 2021-01-28 |
Family
ID=63638027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202012792SA SG11202012792SA (en) | 2018-06-21 | 2019-06-21 | Front-side imager and process for manufacturing such an imager |
Country Status (9)
Country | Link |
---|---|
US (1) | US20210384223A1 (ko) |
EP (1) | EP3811411A1 (ko) |
JP (1) | JP7467805B2 (ko) |
KR (1) | KR102666552B1 (ko) |
CN (1) | CN112292760A (ko) |
FR (1) | FR3083000A1 (ko) |
SG (1) | SG11202012792SA (ko) |
TW (1) | TW202015226A (ko) |
WO (1) | WO2019243751A1 (ko) |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5407733A (en) * | 1990-08-10 | 1995-04-18 | Viratec Thin Films, Inc. | Electrically-conductive, light-attenuating antireflection coating |
US6365479B1 (en) * | 2000-09-22 | 2002-04-02 | Conexant Systems, Inc. | Method for independent control of polycrystalline silicon-germanium in a silicon-germanium HBT and related structure |
US7160753B2 (en) * | 2004-03-16 | 2007-01-09 | Voxtel, Inc. | Silicon-on-insulator active pixel sensors |
EP1722422A3 (fr) * | 2005-05-13 | 2007-04-18 | Stmicroelectronics Sa | Circuit intégré comprenant une photodiode de type à substrat flottant et procédé de fabrication correspondant |
EP1763069B1 (en) * | 2005-09-07 | 2016-04-13 | Soitec | Method for forming a semiconductor heterostructure |
US7768085B2 (en) * | 2005-10-11 | 2010-08-03 | Icemos Technology Ltd. | Photodetector array using isolation diffusions as crosstalk inhibitors between adjacent photodiodes |
KR20070118391A (ko) * | 2006-06-12 | 2007-12-17 | 삼성전자주식회사 | 크로스토크가 감소한 이미지 센서 |
US7645701B2 (en) * | 2007-05-21 | 2010-01-12 | International Business Machines Corporation | Silicon-on-insulator structures for through via in silicon carriers |
EP2281306A4 (en) * | 2008-05-30 | 2013-05-22 | Sarnoff Corp | METHOD FOR ELECTRONIC FIXING OF A BACKLACE OF A REAR-LUMINOUS IMAGE PRODUCED ON A UTSOI WAFER |
JP5356872B2 (ja) * | 2009-03-18 | 2013-12-04 | パナソニック株式会社 | 個体撮像装置の製造方法 |
US8587063B2 (en) * | 2009-11-06 | 2013-11-19 | International Business Machines Corporation | Hybrid double box back gate silicon-on-insulator wafers with enhanced mobility channels |
EP2498280B1 (en) * | 2011-03-11 | 2020-04-29 | Soitec | DRAM with trench capacitors and logic back-biased transistors integrated on an SOI substrate comprising an intrinsic semiconductor layer and manufacturing method thereof |
JP2013115100A (ja) * | 2011-11-25 | 2013-06-10 | Toshiba Corp | 固体撮像装置 |
US20140339614A1 (en) * | 2011-12-30 | 2014-11-20 | Shanghai Advanced Research Institute, Chinese Aca- Demy Of Sciences | Image sensor and method of fabricating the same |
US9105577B2 (en) * | 2012-02-16 | 2015-08-11 | International Business Machines Corporation | MOSFET with work function adjusted metal backgate |
US8772899B2 (en) * | 2012-03-01 | 2014-07-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for backside illumination sensor |
GB2507512A (en) * | 2012-10-31 | 2014-05-07 | Ibm | Semiconductor device with epitaxially grown active layer adjacent a subsequently grown optically passive region |
US10056293B2 (en) * | 2014-07-18 | 2018-08-21 | International Business Machines Corporation | Techniques for creating a local interconnect using a SOI wafer |
US9219150B1 (en) * | 2014-09-18 | 2015-12-22 | Soitec | Method for fabricating semiconductor structures including fin structures with different strain states, and related semiconductor structures |
FR3027731B1 (fr) | 2014-10-24 | 2018-01-05 | Stmicroelectronics Sa | Capteur d'image face avant a courant d'obscurite reduit sur substrat soi |
JP2016092178A (ja) * | 2014-11-04 | 2016-05-23 | 株式会社リコー | 固体撮像素子 |
EP3313503B1 (en) * | 2015-06-24 | 2022-08-31 | Pixium Vision SA | Photosensitive pixel structure with increased light absorption and photosensitive implant |
US9704916B2 (en) * | 2015-07-24 | 2017-07-11 | Artilux Inc. | Multi-wafer based light absorption apparatus and applications thereof |
JP2017054890A (ja) * | 2015-09-08 | 2017-03-16 | 株式会社東芝 | 固体撮像装置および固体撮像装置の製造方法 |
CN109863600B (zh) * | 2016-11-02 | 2023-06-20 | 索尼半导体解决方案公司 | 成像器件、成像装置以及电子设备 |
US9859311B1 (en) * | 2016-11-28 | 2018-01-02 | Omnivision Technologies, Inc. | Storage gate protection |
US10515989B2 (en) * | 2017-08-30 | 2019-12-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Device comprising photodiode and method of making the same |
-
2018
- 2018-06-21 FR FR1855540A patent/FR3083000A1/fr active Pending
-
2019
- 2019-06-21 WO PCT/FR2019/051515 patent/WO2019243751A1/fr active Application Filing
- 2019-06-21 US US17/254,808 patent/US20210384223A1/en active Pending
- 2019-06-21 SG SG11202012792SA patent/SG11202012792SA/en unknown
- 2019-06-21 KR KR1020207037625A patent/KR102666552B1/ko active IP Right Grant
- 2019-06-21 EP EP19745699.9A patent/EP3811411A1/fr active Pending
- 2019-06-21 TW TW108121761A patent/TW202015226A/zh unknown
- 2019-06-21 CN CN201980041160.1A patent/CN112292760A/zh active Pending
- 2019-06-21 JP JP2020569753A patent/JP7467805B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR20210021488A (ko) | 2021-02-26 |
JP7467805B2 (ja) | 2024-04-16 |
US20210384223A1 (en) | 2021-12-09 |
KR102666552B1 (ko) | 2024-05-20 |
TW202015226A (zh) | 2020-04-16 |
WO2019243751A1 (fr) | 2019-12-26 |
FR3083000A1 (fr) | 2019-12-27 |
CN112292760A (zh) | 2021-01-29 |
JP2021527954A (ja) | 2021-10-14 |
EP3811411A1 (fr) | 2021-04-28 |
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