SE508676C2 - Förfarande för framställning av tunnfilmssolceller - Google Patents

Förfarande för framställning av tunnfilmssolceller

Info

Publication number
SE508676C2
SE508676C2 SE9403609A SE9403609A SE508676C2 SE 508676 C2 SE508676 C2 SE 508676C2 SE 9403609 A SE9403609 A SE 9403609A SE 9403609 A SE9403609 A SE 9403609A SE 508676 C2 SE508676 C2 SE 508676C2
Authority
SE
Sweden
Prior art keywords
layer
sodium
cuinse2
alkali metal
potassium
Prior art date
Application number
SE9403609A
Other languages
English (en)
Swedish (sv)
Other versions
SE9403609L (sv
SE9403609D0 (sv
Inventor
Marika Bodegaard
Jonas Hedstroem
Lars Stolt
Original Assignee
Nordic Solar Energy Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordic Solar Energy Ab filed Critical Nordic Solar Energy Ab
Priority to SE9403609A priority Critical patent/SE508676C2/sv
Publication of SE9403609D0 publication Critical patent/SE9403609D0/xx
Priority to DE69529529T priority patent/DE69529529T2/de
Priority to PCT/SE1995/001242 priority patent/WO1996013063A1/en
Priority to US08/817,693 priority patent/US5994163A/en
Priority to AU38205/95A priority patent/AU3820595A/en
Priority to ES95936166T priority patent/ES2191716T3/es
Priority to EP95936166A priority patent/EP0787354B1/en
Priority to JP51383596A priority patent/JP3690807B2/ja
Publication of SE9403609L publication Critical patent/SE9403609L/xx
Publication of SE508676C2 publication Critical patent/SE508676C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
    • H01L21/441—Deposition of conductive or insulating materials for electrodes
    • H01L21/443—Deposition of conductive or insulating materials for electrodes from a gas or vapour, e.g. condensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03923—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
SE9403609A 1994-10-21 1994-10-21 Förfarande för framställning av tunnfilmssolceller SE508676C2 (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
SE9403609A SE508676C2 (sv) 1994-10-21 1994-10-21 Förfarande för framställning av tunnfilmssolceller
DE69529529T DE69529529T2 (de) 1994-10-21 1995-10-20 Herstellungsverfahren von dünnschicht-solarzellen
PCT/SE1995/001242 WO1996013063A1 (en) 1994-10-21 1995-10-20 A method of manufacturing thin-film solar cells
US08/817,693 US5994163A (en) 1994-10-21 1995-10-20 Method of manufacturing thin-film solar cells
AU38205/95A AU3820595A (en) 1994-10-21 1995-10-20 A method of manufacturing thin-film solar cells
ES95936166T ES2191716T3 (es) 1994-10-21 1995-10-20 Un procedimiento de fabricacion de celulas solares de capa delgada.
EP95936166A EP0787354B1 (en) 1994-10-21 1995-10-20 A method of manufacturing thin-film solar cells
JP51383596A JP3690807B2 (ja) 1994-10-21 1995-10-20 薄膜太陽電池の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9403609A SE508676C2 (sv) 1994-10-21 1994-10-21 Förfarande för framställning av tunnfilmssolceller

Publications (3)

Publication Number Publication Date
SE9403609D0 SE9403609D0 (sv) 1994-10-21
SE9403609L SE9403609L (sv) 1996-04-22
SE508676C2 true SE508676C2 (sv) 1998-10-26

Family

ID=20395698

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9403609A SE508676C2 (sv) 1994-10-21 1994-10-21 Förfarande för framställning av tunnfilmssolceller

Country Status (8)

Country Link
US (1) US5994163A (es)
EP (1) EP0787354B1 (es)
JP (1) JP3690807B2 (es)
AU (1) AU3820595A (es)
DE (1) DE69529529T2 (es)
ES (1) ES2191716T3 (es)
SE (1) SE508676C2 (es)
WO (1) WO1996013063A1 (es)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4447866B4 (de) * 1994-11-16 2005-05-25 Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg Verfahren zur Herstellung einer Verbindungshalbleiter-Dünnschichtsolarzelle
JP3519543B2 (ja) * 1995-06-08 2004-04-19 松下電器産業株式会社 半導体薄膜形成用前駆体及び半導体薄膜の製造方法
US7053294B2 (en) * 2001-07-13 2006-05-30 Midwest Research Institute Thin-film solar cell fabricated on a flexible metallic substrate
WO2003007386A1 (en) * 2001-07-13 2003-01-23 Midwest Research Institute Thin-film solar cell fabricated on a flexible metallic substrate
EP1475841A4 (en) * 2002-02-14 2008-08-27 Honda Motor Co Ltd METHOD FOR PRODUCING A LIGHT ABSORPTION LAYER
US20060057766A1 (en) * 2003-07-08 2006-03-16 Quanxi Jia Method for preparation of semiconductive films
SE525704C2 (sv) * 2003-08-12 2005-04-05 Sandvik Ab Belagd stålprodukt av metallbandsmaterial innefattande ett elektriskt isolerande skikt dopat med en eller flera alkalimetaller
US20050056863A1 (en) * 2003-09-17 2005-03-17 Matsushita Electric Industrial Co., Ltd. Semiconductor film, method for manufacturing the semiconductor film, solar cell using the semiconductor film and method for manufacturing the solar cell
US7604843B1 (en) 2005-03-16 2009-10-20 Nanosolar, Inc. Metallic dispersion
US8846141B1 (en) 2004-02-19 2014-09-30 Aeris Capital Sustainable Ip Ltd. High-throughput printing of semiconductor precursor layer from microflake particles
US8372734B2 (en) 2004-02-19 2013-02-12 Nanosolar, Inc High-throughput printing of semiconductor precursor layer from chalcogenide nanoflake particles
US7605328B2 (en) 2004-02-19 2009-10-20 Nanosolar, Inc. Photovoltaic thin-film cell produced from metallic blend using high-temperature printing
US7306823B2 (en) 2004-09-18 2007-12-11 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US8309163B2 (en) * 2004-02-19 2012-11-13 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material
US8623448B2 (en) * 2004-02-19 2014-01-07 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles
US7663057B2 (en) * 2004-02-19 2010-02-16 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US8329501B1 (en) 2004-02-19 2012-12-11 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles
US7700464B2 (en) 2004-02-19 2010-04-20 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from nanoflake particles
US20060060237A1 (en) * 2004-09-18 2006-03-23 Nanosolar, Inc. Formation of solar cells on foil substrates
US20090032108A1 (en) * 2007-03-30 2009-02-05 Craig Leidholm Formation of photovoltaic absorber layers on foil substrates
US7732229B2 (en) * 2004-09-18 2010-06-08 Nanosolar, Inc. Formation of solar cells with conductive barrier layers and foil substrates
US7838868B2 (en) 2005-01-20 2010-11-23 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate
US8541048B1 (en) 2004-09-18 2013-09-24 Nanosolar, Inc. Formation of photovoltaic absorber layers on foil substrates
US8927315B1 (en) 2005-01-20 2015-01-06 Aeris Capital Sustainable Ip Ltd. High-throughput assembly of series interconnected solar cells
US20080053516A1 (en) 2006-08-30 2008-03-06 Richard Allen Hayes Solar cell modules comprising poly(allyl amine) and poly (vinyl amine)-primed polyester films
US8197928B2 (en) 2006-12-29 2012-06-12 E. I. Du Pont De Nemours And Company Intrusion resistant safety glazings and solar cell modules
US8771419B2 (en) * 2007-10-05 2014-07-08 Solopower Systems, Inc. Roll to roll evaporation tool for solar absorber precursor formation
AT10578U1 (de) * 2007-12-18 2009-06-15 Plansee Metall Gmbh Dunnschichtsolarzelle mit molybdan-haltiger ruckelektrodenschicht
US8197885B2 (en) * 2008-01-11 2012-06-12 Climax Engineered Materials, Llc Methods for producing sodium/molybdenum power compacts
EP2257431A1 (en) * 2008-03-26 2010-12-08 E. I. du Pont de Nemours and Company High performance anti-spall laminate article
JP2011517096A (ja) * 2008-04-04 2011-05-26 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 高メルトフローのポリ（ビニルブチラール）封止材を含む太陽電池モジュール
JP4384237B2 (ja) * 2008-05-19 2009-12-16 昭和シェル石油株式会社 Ｃｉｓ系薄膜太陽電池の製造方法
US20090288701A1 (en) * 2008-05-23 2009-11-26 E.I.Du Pont De Nemours And Company Solar cell laminates having colored multi-layer encapsulant sheets
EP2286465B1 (en) 2008-06-02 2019-08-14 E. I. du Pont de Nemours and Company Solar cell module having a low haze encapsulant layer
CA2744774C (en) 2008-07-17 2017-05-23 Uriel Solar, Inc. High power efficiency, large substrate, polycrystalline cdte thin film semiconductor photovoltaic cell structures grown by molecular beam epitaxy at high deposition rate for use in solar electricity generation
US20100101647A1 (en) * 2008-10-24 2010-04-29 E.I. Du Pont De Nemours And Company Non-autoclave lamination process for manufacturing solar cell modules
WO2010051522A1 (en) 2008-10-31 2010-05-06 E. I. Du Pont De Nemours And Company Solar cells modules comprising low haze encapsulants
US8080727B2 (en) 2008-11-24 2011-12-20 E. I. Du Pont De Nemours And Company Solar cell modules comprising an encapsulant sheet of a blend of ethylene copolymers
US8084129B2 (en) * 2008-11-24 2011-12-27 E. I. Du Pont De Nemours And Company Laminated articles comprising a sheet of a blend of ethylene copolymers
US20100154867A1 (en) 2008-12-19 2010-06-24 E. I. Du Pont De Nemours And Company Mechanically reliable solar cell modules
KR101629532B1 (ko) * 2008-12-31 2016-06-13 이 아이 듀폰 디 네모아 앤드 캄파니 낮은 탁도 및 높은 내습성을 갖는 봉지제 시트를 포함하는 태양 전지 모듈
KR20110122121A (ko) * 2009-01-22 2011-11-09 이 아이 듀폰 디 네모아 앤드 캄파니 태양 전지 모듈에 대한 킬레이트제를 포함하는 폴리(비닐 부티랄) 밀봉제
US8709856B2 (en) * 2009-03-09 2014-04-29 Zetta Research and Development LLC—AQT Series Enhancement of semiconducting photovoltaic absorbers by the addition of alkali salts through solution coating techniques
JP5229901B2 (ja) * 2009-03-09 2013-07-03 富士フイルム株式会社 光電変換素子、及び太陽電池
JP4629151B2 (ja) * 2009-03-10 2011-02-09 富士フイルム株式会社 光電変換素子及び太陽電池、光電変換素子の製造方法
US7785921B1 (en) * 2009-04-13 2010-08-31 Miasole Barrier for doped molybdenum targets
US8247243B2 (en) 2009-05-22 2012-08-21 Nanosolar, Inc. Solar cell interconnection
US9284639B2 (en) * 2009-07-30 2016-03-15 Apollo Precision Kunming Yuanhong Limited Method for alkali doping of thin film photovoltaic materials
KR20120052360A (ko) * 2009-07-31 2012-05-23 이 아이 듀폰 디 네모아 앤드 캄파니 광전지용 가교결합성 봉지제
KR101306913B1 (ko) * 2009-09-02 2013-09-10 한국전자통신연구원 태양 전지
US20110162696A1 (en) * 2010-01-05 2011-07-07 Miasole Photovoltaic materials with controllable zinc and sodium content and method of making thereof
US20110203655A1 (en) * 2010-02-22 2011-08-25 First Solar, Inc. Photovoltaic device protection layer
DE102010017246A1 (de) * 2010-06-04 2011-12-08 Solibro Gmbh Solarzellenmodul und Herstellungsverfahren hierfür
US8609980B2 (en) 2010-07-30 2013-12-17 E I Du Pont De Nemours And Company Cross-linkable ionomeric encapsulants for photovoltaic cells
TWI538235B (zh) 2011-04-19 2016-06-11 弗里松股份有限公司 薄膜光伏打裝置及製造方法
US20130000702A1 (en) * 2011-06-30 2013-01-03 Miasole Photovoltaic device with resistive cigs layer at the back contact
WO2014100309A1 (en) 2012-12-19 2014-06-26 E. I. Du Pont De Nemours And Company Cross-linkable acid copolymer composition and its use in glass laminates
US9837565B2 (en) 2012-12-21 2017-12-05 Flison Ag Fabricating thin-film optoelectronic devices with added potassium
US20150207011A1 (en) * 2013-12-20 2015-07-23 Uriel Solar, Inc. Multi-junction photovoltaic cells and methods for forming the same
US20150325729A1 (en) 2014-05-09 2015-11-12 E. I. Du Pont De Nemours And Company Encapsulant composition comprising a copolymer of ethylene, vinyl acetate and a third comonomer
TWI677105B (zh) 2014-05-23 2019-11-11 瑞士商弗里松股份有限公司 製造薄膜光電子裝置之方法及可藉由該方法獲得的薄膜光電子裝置
TWI661991B (zh) 2014-09-18 2019-06-11 瑞士商弗里松股份有限公司 用於製造薄膜裝置之自組裝圖案化
WO2016114895A1 (en) 2015-01-12 2016-07-21 Dow Global Technologies Llc High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors
WO2017137268A1 (en) 2016-02-11 2017-08-17 Flisom Ag Fabricating thin-film optoelectronic devices with added rubidium and/or cesium
US10651324B2 (en) 2016-02-11 2020-05-12 Flisom Ag Self-assembly patterning for fabricating thin-film devices
WO2017147037A1 (en) 2016-02-26 2017-08-31 Dow Global Technologies Llc Method for improving stability of photovoltaic articles incorporating chalcogenide semiconductors
US20210115239A1 (en) 2018-03-08 2021-04-22 Performance Materials Na, Inc. Photovoltaic module and encapsulant composition having improved resistance to potential induced degradation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4623601A (en) * 1985-06-04 1986-11-18 Atlantic Richfield Company Photoconductive device containing zinc oxide transparent conductive layer
US4915745A (en) * 1988-09-22 1990-04-10 Atlantic Richfield Company Thin film solar cell and method of making
US4873118A (en) * 1988-11-18 1989-10-10 Atlantic Richfield Company Oxygen glow treating of ZnO electrode for thin film silicon solar cell
US5028274A (en) * 1989-06-07 1991-07-02 International Solar Electric Technology, Inc. Group I-III-VI2 semiconductor films for solar cell application
DE4442824C1 (de) * 1994-12-01 1996-01-25 Siemens Ag Solarzelle mit Chalkopyrit-Absorberschicht
US5730852A (en) * 1995-09-25 1998-03-24 Davis, Joseph & Negley Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells

Also Published As

Publication number Publication date
DE69529529D1 (de) 2003-03-06
SE9403609L (sv) 1996-04-22
EP0787354B1 (en) 2003-01-29
JP3690807B2 (ja) 2005-08-31
JPH10512096A (ja) 1998-11-17
WO1996013063A1 (en) 1996-05-02
EP0787354A1 (en) 1997-08-06
AU3820595A (en) 1996-05-15
US5994163A (en) 1999-11-30
DE69529529T2 (de) 2003-12-11
ES2191716T3 (es) 2003-09-16
SE9403609D0 (sv) 1994-10-21

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